TW201606597A - Conductive laminated body for touch panel, touch panel, transparent conductive laminated body - Google Patents

Conductive laminated body for touch panel, touch panel, transparent conductive laminated body Download PDF

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TW201606597A
TW201606597A TW104118721A TW104118721A TW201606597A TW 201606597 A TW201606597 A TW 201606597A TW 104118721 A TW104118721 A TW 104118721A TW 104118721 A TW104118721 A TW 104118721A TW 201606597 A TW201606597 A TW 201606597A
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layer
patterned
group
pattern
substrate
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TW104118721A
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TWI661339B (en
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塚本直樹
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富士軟片股份有限公司
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    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/16Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by reduction or substitution, e.g. electroless plating
    • C23C18/18Pretreatment of the material to be coated
    • C23C18/20Pretreatment of the material to be coated of organic surfaces, e.g. resins
    • C23C18/28Sensitising or activating
    • C23C18/30Activating or accelerating or sensitising with palladium or other noble metal
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    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/3405Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions with at least two coatings of organic materials
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    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/34Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions
    • C03C17/36Surface treatment of glass, not in the form of fibres or filaments, by coating with at least two coatings having different compositions at least one coating being a metal
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    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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    • C23F1/00Etching metallic material by chemical means
    • C23F1/10Etching compositions
    • C23F1/14Aqueous compositions
    • C23F1/16Acidic compositions
    • C23F1/18Acidic compositions for etching copper or alloys thereof
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
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    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C2217/00Coatings on glass
    • C03C2217/90Other aspects of coatings
    • C03C2217/94Transparent conductive oxide layers [TCO] being part of a multilayer coating
    • C03C2217/948Layers comprising indium tin oxide [ITO]
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Abstract

The invention provides conductive laminated body for touch panel, touch panel and transparent conductive laminated body that containing substrate and pattern shape metal layer. Upon observing from the side of the substrate, the aforesaid pattern shape metal layer may be deemed darker from sight. The conductive laminated body for touch panel is provided with substrate of which have two main surfaces, pattern shape coated layer that installed on at least one main surface of the substrate, which comprises functional groups that can interact with the metal ions and the pattern shape metal layer that set on the pattern shape coated layer. Further, the aforesaid pattern shape coated layer comprises metal components that constituted pattern shape metal layer. Upon using energy dispersive X-ray analysis to analyze the composition of the cross sections of the pattern shape coated layer and the pattern shape metal layer, comparing to the intensity of the average peak of metal component of the pattern shape metal layer, the intensity ratio of the average peak of metal component of the pattern shape coated layer is 0.5~0.95.

Description

觸控面板用導電性積層體、觸控面板、透明導電性積層體Conductive laminated body for touch panel, touch panel, transparent conductive laminated body

本發明涉及觸控面板用導電性積層體、觸控面板和透明導電性積層體。The present invention relates to a conductive laminate for a touch panel, a touch panel, and a transparent conductive laminate.

在基板上形成了金屬細線的導電性積層體被廣泛用於各種顯示裝置的電磁波遮罩材料、觸控面板、透明面狀發熱體等中。特別是近年來在行動電話或便攜遊戲機等中,觸控面板的搭載率攀升,對於能夠多點檢出的靜電容量方式觸控面板用的導電性積層體的需求急速擴大。A conductive laminated body in which metal thin wires are formed on a substrate is widely used in electromagnetic wave shielding materials, touch panels, transparent planar heat generating bodies, and the like of various display devices. In particular, in recent years, in the mobile phone, the portable game machine, and the like, the mounting rate of the touch panel has been increasing, and the demand for the conductive laminated body for the capacitive touch panel capable of detecting multiple points has been rapidly increasing.

另外,作為形成金屬層的技術,已知有鍍覆法,例如在專利文獻1中公開了一種具有覆膜和圖案狀金屬層的透明導電膜,該覆膜是含有無電解鍍覆催化劑的感光性材料通過隔著光掩模的曝光而以特定圖案形成的覆膜,該圖案狀金屬層是在該覆膜上通過無電解鍍覆進行成膜而成的。另外,在專利文獻1的實施例欄中,作為無電解鍍覆催化劑使用了膠體鈀(鈀粒子)。Further, as a technique for forming a metal layer, a plating method is known. For example, Patent Document 1 discloses a transparent conductive film having a coating film and a patterned metal layer, which is a photosensitive film containing an electroless plating catalyst. The material is formed into a film having a specific pattern by exposure through a photomask, and the pattern metal layer is formed by electroless plating on the film. Further, in the column of the example of Patent Document 1, colloidal palladium (palladium particles) was used as the electroless plating catalyst.

[現有技術文獻][Prior Art Literature]

[專利文獻][Patent Literature]

專利文獻1: 日本特開平11-170421號公報Patent Document 1: Japanese Patent Laid-Open No. Hei 11-170421

近年來,隨著要求提高觸控面板的視認性,人們正在尋求通過觸控面板中的金屬層(金屬配線層)來抑制外光反射,為了滿足這樣的特性,要求金屬層被視認為更黑的黑色。特別是作為觸控面板中的感測器電極使用由銅構成的網狀(網狀圖案)金屬層的情況下,該要求增強。另外,在觸控面板中包含具備基板與配置在基板上的圖案狀金屬層的導電性積層體的情況下,基板多配置在視認側。In recent years, as the visibility of touch panels has been demanded, it has been sought to suppress external light reflection through a metal layer (metal wiring layer) in the touch panel. In order to satisfy such characteristics, the metal layer is required to be regarded as being blacker. Black. In particular, in the case where a mesh (mesh pattern) metal layer made of copper is used as the sensor electrode in the touch panel, this requirement is enhanced. Further, when the touch panel includes a conductive laminated body including a substrate and a patterned metal layer disposed on the substrate, the substrate is often disposed on the viewing side.

本發明人對於專利文獻1記載的通過使用膠體鈀的鍍覆法形成的圖案狀金屬層(圖案狀銅層)的特性進行評價,結果在從覆膜側視認時,圖案狀金屬層的色調稍有顏色,要求進一步的黑色化。The present inventors evaluated the characteristics of the patterned metal layer (patterned copper layer) formed by the plating method using colloidal palladium described in Patent Document 1, and as a result, the color tone of the patterned metal layer was slightly observed from the side of the coating film. There are colors that require further blackening.

鑒於上述情況,本發明的課題在於提供一種觸控面板用導電性積層體,其包含基板和圖案狀金屬層,在從基板側視認時,圖案狀金屬層被視認為更黑的黑色。In view of the above, an object of the present invention is to provide a conductive laminated body for a touch panel comprising a substrate and a patterned metal layer, and the patterned metal layer is regarded as blacker black when viewed from the substrate side.

此外,本發明的課題還在於提供含有上述觸控面板用導電性積層體的觸控面板和透明導電性積層體。Further, another object of the present invention is to provide a touch panel and a transparent conductive laminate including the above-described conductive laminate for a touch panel.

[解決課題的手段][Means for solving the problem]

本發明人對於現有技術的問題進行了深入研究,結果發現,通過在基板上配置有包含特定成分的組合物形成的被鍍覆層,在該被鍍覆層上賦予金屬離子並實施鍍覆處理來形成金屬層,能夠解決上述課題。The present inventors conducted intensive studies on the problems of the prior art, and as a result, found that a plated layer formed by disposing a composition containing a specific component on a substrate, metal ions are applied to the plated layer, and plating treatment is performed. The formation of a metal layer can solve the above problems.

即,本發明人發現通過下述構成能夠解決上述課題。That is, the inventors have found that the above problems can be solved by the following configuration.

(1) 一種觸控面板用導電性積層體,其具有:(1) A conductive laminated body for a touch panel, comprising:

基板,該基板具有2個主面;a substrate having two main faces;

圖案狀被鍍覆層,其配置在基板的至少一個主面上,具有與金屬離子相互作用的官能團;以及a patterned plated layer disposed on at least one major surface of the substrate and having a functional group that interacts with the metal ions;

圖案狀金屬層,其配置在圖案狀被鍍覆層上;a patterned metal layer disposed on the patterned plated layer;

在圖案狀被鍍覆層中包含構成圖案狀金屬層的金屬成分;A metal component constituting the patterned metal layer is included in the patterned plated layer;

使用能量分散型X射線分析法對圖案狀被鍍覆層和圖案狀金屬層的斷面進行組成分析時,相對於構成圖案狀金屬層的金屬成分來源的平均峰強度,圖案狀被鍍覆層所含有的金屬成分來源的平均峰強度的比為0.5~0.95。When the cross-section of the pattern-coated layer and the patterned metal layer is analyzed by energy dispersive X-ray analysis, the pattern-like layer is applied to the average peak intensity of the metal component constituting the pattern-shaped metal layer. The ratio of the average peak intensity of the metal component source contained is 0.5 to 0.95.

(2) 如(1)所述的觸控面板用導電性積層體,其中,在基板的2個主面上分別配置圖案狀被鍍覆層和圖案狀金屬層。(2) The conductive laminated body for a touch panel according to the above aspect, wherein a patterned plated layer and a patterned metal layer are disposed on each of the two main surfaces of the substrate.

(3) 一種觸控面板用導電性積層體,其依敘述順序具有基板、圖案狀樹脂層以及圖案狀金屬層,該基板具有2個主面,該圖案狀樹脂層配置在基板的至少一個主面上,該圖案狀金屬層配置在圖案狀樹脂層上;其中,該觸控面板用導電性積層體滿足下述要件A和要件B的至少一者。(3) A conductive laminated body for a touch panel, which has a substrate, a pattern-like resin layer, and a patterned metal layer in the order described, the substrate having two main faces, and the patterned resin layer is disposed on at least one main body of the substrate On the surface, the patterned metal layer is disposed on the patterned resin layer; wherein the conductive laminated body for the touch panel satisfies at least one of the following requirements A and B.

要件A:自圖案狀樹脂層與圖案狀金屬層的介面起在上述圖案狀樹脂層側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子。Requirement A: Metal particles having an average particle diameter of 10 to 1000 nm exist in a surface layer region of 500 nm in the direction of the pattern-like resin layer from the interface between the pattern-like resin layer and the pattern-like metal layer.

要件B:圖案狀樹脂層與圖案狀金屬層的介面具有凹凸形狀,凹凸形狀的算術平均粗糙度Ra為5~1000nm,凹凸形狀的凹部間的平均距離為10~1000nm。Requirement B: The interface between the pattern-like resin layer and the patterned metal layer has an uneven shape, and the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 to 1000 nm.

(4) 如(1)~(3)的任一項所述的觸控面板用導電性積層體,其中,基板為玻璃基板或樹脂基板。The conductive laminate for a touch panel according to any one of the aspects of the present invention, wherein the substrate is a glass substrate or a resin substrate.

(5) 如(1)~(4)的任一項所述的觸控面板用導電性積層體,其中,與基板的主面相鄰地配置底塗層。(5) The conductive laminated body for a touch panel according to any one of (1) to (4), wherein an undercoat layer is disposed adjacent to a main surface of the substrate.

(6) 如(1)~(5)的任一項所述的觸控面板用導電性積層體,其中,圖案狀金屬層包含銅。The conductive laminate for a touch panel according to any one of the above aspects, wherein the patterned metal layer contains copper.

(7) 一種觸控面板,其包含(1)~(6)的任一項所述的觸控面板用導電性積層體。(7) A conductive laminated body for a touch panel according to any one of (1) to (6).

(8) 一種透明導電性積層體,其具有:(8) A transparent conductive laminated body having:

基板,該基板具有2個主面;a substrate having two main faces;

圖案狀被鍍覆層,該圖案狀被鍍覆層配置在基板的至少一個主面上,並且具有與金屬離子相互作用的官能團;以及a patterned plated layer disposed on at least one major surface of the substrate and having a functional group that interacts with the metal ions;

圖案狀金屬層,該圖案狀金屬層配置在圖案狀被鍍覆層上;a patterned metal layer disposed on the patterned plated layer;

在圖案狀被鍍覆層中包含構成圖案狀金屬層的金屬成分;A metal component constituting the patterned metal layer is included in the patterned plated layer;

使用能量分散型X射線分析法對圖案狀被鍍覆層和圖案狀金屬層的斷面進行組成分析時,相對於構成圖案狀金屬層的金屬成分來源的平均峰強度,圖案狀被鍍覆層所含有的金屬成分來源的平均峰強度的比為0.50~0.95。When the cross-section of the pattern-coated layer and the patterned metal layer is analyzed by energy dispersive X-ray analysis, the pattern-like layer is applied to the average peak intensity of the metal component constituting the pattern-shaped metal layer. The ratio of the average peak intensity of the metal component source contained is 0.50 to 0.95.

[發明的效果][Effects of the Invention]

根據本發明,能夠提供一種觸控面板用導電性積層體,其包含基板和圖案狀金屬層,在從基板側視認時,圖案狀金屬層被視認為更黑的黑色(換言之,該觸控面板用導電性積層體的圖案狀金屬層的背面(基板側的表面)被視認為更黑的黑色)。According to the present invention, it is possible to provide a conductive laminated body for a touch panel including a substrate and a patterned metal layer, and the patterned metal layer is regarded as blacker black when viewed from the substrate side (in other words, the touch panel) The back surface (the surface on the substrate side) of the patterned metal layer of the conductive laminate is regarded as blacker black.

此外,本發明還能夠提供含有上述觸控面板用導電性積層體的觸控面板和透明導電性積層體。Moreover, the present invention can also provide a touch panel and a transparent conductive laminated body including the above-described conductive laminated body for a touch panel.

以下對本發明的觸控面板用導電性積層體進行詳述。需要說明的是,本說明書中使用“~”表示的數值範圍是指包含“~”前後記載的數值作為下限值和上限值的範圍。Hereinafter, the conductive laminated body for a touch panel of the present invention will be described in detail. In addition, the numerical range represented by "-" in this specification is the range which contains the numerical value of the [ before-

首先,作為本發明的觸控面板用導電性積層體(特別是後述第1實施方式和第2實施方式)的一個實施方式與現有技術比較的特徵之一,可以舉出:在形成圖案狀被鍍覆層之後,在通過鍍覆處理形成圖案狀金屬層時,使用包含顯示出特定pH的鍍覆催化劑或其前體的催化劑賦予液。First, one of the features of the conductive laminate for a touch panel of the present invention (particularly, the first embodiment and the second embodiment described later) and the prior art are characterized in that a pattern is formed. After the plating layer, when the patterned metal layer is formed by the plating treatment, a catalyst-imparting liquid containing a plating catalyst exhibiting a specific pH or a precursor thereof is used.

在觸控面板用導電性積層體的一個實施方式中,如下文所述,圖案狀金屬層通過對由包含特定成分的組合物形成的圖案被鍍覆層賦予金屬離子並實施鍍覆處理來形成。在利用這樣的方法形成圖案狀金屬層的情況下,在實施鍍覆處理之前首先實施對圖案狀被鍍覆層賦予作為鍍覆催化劑發揮功能的金屬離子的處理。此時,本發明人認識到,儘管使用了包含金屬離子的催化劑賦予液,但根據其pH的不同,其後的鍍覆處理的行為有很大不同。即,在使用顯示出特定pH的催化劑賦予液的情況下,在其後的鍍覆處理中,在圖案狀被鍍覆層上的特定位置形成金屬層、並形成圖案狀金屬層。在從背面側(圖案狀被鍍覆層側)對這樣的圖案狀金屬層進行觀察時,與比專利文獻1的方式相比,視認為黑色,得到了所期望的效果。作為得到這樣的所期望的效果的原因,可以舉出在圖案狀被鍍覆層中包含構成圖案狀金屬層的金屬成分。更具體地說,在使用上述催化劑賦予液時,圖案狀被鍍覆層中的金屬離子的賦予量增多,通過其後的鍍覆處理容易形成所期望的圖案狀金屬層。此時,儘管詳細原因不明確,但發明人認識到,在圖案狀被鍍覆層中也有構成圖案狀金屬層的金屬成分的析出,對於圖案狀金屬層的視認性帶來影響。In one embodiment of the conductive laminated body for a touch panel, as described below, the patterned metal layer is formed by applying a metal ion to the plating layer of the pattern formed of the composition containing the specific component and performing a plating treatment. . In the case where the pattern-like metal layer is formed by such a method, first, a treatment for imparting a metal ion functioning as a plating catalyst to the pattern-formed layer to be plated is performed before the plating treatment is performed. At this time, the inventors have recognized that although a catalyst-imparting liquid containing a metal ion is used, the behavior of the subsequent plating treatment greatly differs depending on the pH thereof. In other words, when a catalyst-imparting liquid exhibiting a specific pH is used, in a subsequent plating treatment, a metal layer is formed at a specific position on the pattern-shaped plated layer to form a patterned metal layer. When such a patterned metal layer is observed from the back side (the side of the pattern-formed layer), it is considered to be black as compared with the aspect of Patent Document 1, and a desired effect is obtained. The reason why such a desired effect is obtained is that a metal component constituting the patterned metal layer is included in the pattern-coated layer. More specifically, when the above-described catalyst-imparting liquid is used, the amount of metal ions imparted in the pattern-formed layer is increased, and a desired pattern-like metal layer is easily formed by the subsequent plating treatment. At this time, although the detailed reason is not clear, the inventors have recognized that precipitation of a metal component constituting the patterned metal layer is also affected in the pattern-like plated layer, which affects the visibility of the patterned metal layer.

另一方面,在使用pH並非為特定範圍的催化劑賦予液的情況下,可能會產生根本得不到圖案狀金屬層或在圖案狀被鍍覆層以外的部分也有金屬層析出等問題,在觸控面板用途中的應用受到限制。On the other hand, when a liquid is applied to a catalyst whose pH is not a specific range, there may be a problem that a pattern-like metal layer is not obtained at all, or a portion other than the pattern-formed layer is also subjected to metal chromatography. Applications in touch panel applications are limited.

另外,作為得到本發明效果的其它理由,據認為有如下方面。Further, as another reason for obtaining the effects of the present invention, the following aspects are considered.

如上所述,在金屬成分析出到圖案狀被鍍覆層的情況下,在被鍍覆層表面催化劑金屬或鍍覆的金屬複雜地進入到被鍍覆層中,在所形成的圖案狀金屬層與圖案被鍍覆層的介面形成微細的凹凸形狀。此時,進入到被鍍覆層中的金屬既有在被鍍覆層內部以獨立的金屬粒子的形態存在的情況,又有附著於圖案狀金屬層表面在圖案狀金屬層與被鍍覆層的介面處形成具有凹凸的不規則形狀的情況。在從基板側視認這樣的觸控面板用導電性積層體時,由於上述金屬粒子的存在使得光被吸收或者由於圖案狀金屬層的被鍍覆層側的微細凹凸結構使得光的反射被抑制,從而,作為結果,圖案狀金屬層的背面側被視認為更黑的黑色。另外,在通過鍍覆處理形成的圖案狀金屬層中,金屬之間緻密地填充,因而導電特性也優異。As described above, in the case where the metal is analyzed to the patterned plated layer, the catalyst metal or the plated metal on the surface of the plated layer is complicatedly entered into the plated layer, and the patterned metal is formed. The layer and the interface of the pattern-coated layer form a fine concavo-convex shape. At this time, the metal that has entered the layer to be plated exists in the form of independent metal particles inside the plated layer, and also adheres to the surface of the patterned metal layer in the patterned metal layer and the plated layer. The case where an irregular shape having irregularities is formed at the interface. When such a conductive laminated body for a touch panel is viewed from the substrate side, light is absorbed by the presence of the metal particles or light reflection is suppressed by the fine uneven structure on the side of the plated layer of the patterned metal layer. Therefore, as a result, the back side of the patterned metal layer is regarded as blacker black. Further, in the pattern-like metal layer formed by the plating treatment, the metals are densely packed between each other, and thus the conductive properties are also excellent.

此外,在使用上述鍍覆處理的情況下,能夠將製造時的工藝溫度保持在低溫(例如100℃以下),無需實施在濺射等中實施的高溫加熱處理、能夠抑制對基板的損害。In addition, in the case of using the above-described plating treatment, the process temperature at the time of production can be kept at a low temperature (for example, 100 ° C or lower), and it is not necessary to perform high-temperature heat treatment performed in sputtering or the like, and damage to the substrate can be suppressed.

進而,在上述專利文獻1中,由於在感光性材料中含有粒子狀的無電解鍍覆催化劑,因而為了進行感光性材料的圖案化而照射曝光時,由於粒子狀的無電解鍍覆催化劑而產生散射,無法使所形成的圖案化的線寬度細化。與此相對,在上述本發明的方法中,首先實施被鍍覆層的圖案化,之後賦予金屬離子,因而能夠形成線寬度更細的圖案,作為結果,能夠在該細的圖案狀被鍍覆層上形成線寬度細的圖案狀金屬層。Furthermore, in the above-mentioned Patent Document 1, since the photosensitive electroless plating catalyst is contained in the photosensitive material, when the exposure is performed in order to pattern the photosensitive material, the particulate electroless plating catalyst is generated. Scattering does not negate the resulting patterned line width. On the other hand, in the method of the present invention, first, patterning of the layer to be plated is performed, and then metal ions are applied, so that a pattern having a finer line width can be formed, and as a result, it can be plated in the thin pattern. A patterned metal layer having a thin line width is formed on the layer.

需要說明的是,在以下的說明書中,圖案狀金屬層被視認為黑色如上所述是指圖案狀金屬層的背面側(圖案狀被鍍覆層側)被視認為黑色。In the following description, the patterned metal layer is considered to be black as described above, and the back side of the patterned metal layer (the side of the patterned plated layer) is considered to be black.

<<第1實施方式>><<First embodiment>>

圖1中示出了本發明的觸控面板用導電性積層體的第1實施方式的斷面圖。Fig. 1 is a cross-sectional view showing a first embodiment of a conductive laminated body for a touch panel of the present invention.

觸控面板用導電性積層體(下文中也簡單稱為“積層體”)100具備基板12、圖案狀被鍍覆層20以及圖案狀金屬層22。A conductive laminated body for a touch panel (hereinafter also referred to simply as "layered body") 100 includes a substrate 12, a patterned plated layer 20, and a patterned metal layer 22.

下面首先對積層體的製造方法進行詳述,其後對積層體的構成進行詳述。First, the manufacturing method of the laminated body will be described in detail first, and then the configuration of the laminated body will be described in detail.

<積層體的製造方法><Method of Manufacturing Laminates>

作為上述積層體的製造方法,具有在基板上形成圖案狀被鍍覆層的工序(工序1)以及在圖案狀被鍍覆層上形成圖案狀金屬層的工序(工序2)。The method for producing the laminated body includes a step of forming a patterned plated layer on the substrate (Step 1) and a step of forming a patterned metal layer on the patterned plated layer (Step 2).

下面對各工序所使用的部件・材料和其過程進行詳述。The components, materials, and processes used in each step will be described in detail below.

[工序1:圖案狀被鍍覆層形成工序][Step 1: Pattern-formed layer-forming layer forming step]

工序1為下述工序:對於含有具有與金屬離子相互作用的官能團(下文中也稱為“相互作用性基團”)和聚合性基團的化合物的被鍍覆層形成用組合物以圖案狀賦予能量,在基板上形成圖案狀被鍍覆層。更具體地說為下述工序:首先,如圖2(A)所示,在基板12上形成被鍍覆層形成用組合物的塗膜30,如圖2(B)所示,對於所得到的塗膜30如黑箭頭所示以圖案狀賦予能量,從而促進聚合性基團的反應、進行固化,接著除去未賦予能量的區域,得到圖案狀被鍍覆層20(圖2(C))。Step 1 is a step of patterning a composition for forming a layer to be plated containing a compound having a functional group (hereinafter also referred to as "interactive group") which interacts with a metal ion and a polymerizable group. Energy is applied to form a patterned plated layer on the substrate. More specifically, the process is as follows: First, as shown in FIG. 2(A), a coating film 30 for forming a composition for forming a plating layer is formed on a substrate 12, as shown in FIG. 2(B). The coating film 30 is energized in a pattern as indicated by a black arrow to promote the reaction of the polymerizable group and to be cured, and then remove the region where no energy is applied, thereby obtaining a patterned plated layer 20 (Fig. 2(C)). .

在通過上述工序形成的圖案狀被鍍覆層中,根據相互作用性基團的功能,在後述的工序2中吸附(附著)金屬離子。即,圖案狀被鍍覆層作為金屬離子的良好的受容層發揮功能。此外,聚合性基團通過基於能量賦予的固化處理而被用於化合物之間的結合,能夠得到硬度・硬度(硬さ・硬度)優異的圖案狀被鍍覆層。In the pattern-formed layer to be formed formed in the above-described step, metal ions are adsorbed (adhered) in the step 2 to be described later according to the function of the interactive group. That is, the pattern-shaped plated layer functions as a good receiving layer of metal ions. In addition, the polymerizable group is used for the bonding between the compounds by the curing treatment by energy application, and a patterned coating layer having excellent hardness and hardness (hardness and hardness) can be obtained.

下面首先對本工序所使用的部件・材料進行詳述,其後對工序的過程進行詳述。First, the components and materials used in this step will be described in detail below, and the process of the process will be described in detail later.

(基板)(substrate)

基板只要具有2個主面、支持後述的圖案狀被鍍覆層即可,對其種類沒有特別限制。作為基板,優選絕緣基板,更具體地說,可以使用樹脂基板、陶瓷基板、玻璃基板、液晶盒玻璃基板等。The substrate is not particularly limited as long as it has two main faces and supports a patterned plated layer to be described later. As the substrate, an insulating substrate is preferable, and more specifically, a resin substrate, a ceramic substrate, a glass substrate, a liquid crystal cell glass substrate, or the like can be used.

作為樹脂基板的材料,例如可以舉出聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚醚碸、聚丙烯酸系樹脂、聚氨酯系樹脂、聚酯、聚碳酸酯、聚碸、聚醯胺、聚芳酯、聚烯烴、纖維素系樹脂、聚氯乙烯、環烯烴系樹脂等。其中優選聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯或聚烯烴。Examples of the material of the resin substrate include polyethylene terephthalate, polyethylene naphthalate, polyether oxime, polyacrylic resin, urethane resin, polyester, polycarbonate, and poly. Anthracene, polyamine, polyarylate, polyolefin, cellulose resin, polyvinyl chloride, cycloolefin resin, and the like. Among them, polyethylene terephthalate, polyethylene naphthalate or polyolefin is preferred.

基板的厚度(mm)沒有特別限制,從處理性和薄型化的平衡的方面考慮,優選為0.05~2mm、更優選為0.1~1mm。The thickness (mm) of the substrate is not particularly limited, and is preferably 0.05 to 2 mm, and more preferably 0.1 to 1 mm from the viewpoint of balance between handleability and thickness reduction.

此外,基板優選適當地透過光。具體地說,基板的全光線透過率優選為85~100%。Further, the substrate preferably transmits light appropriately. Specifically, the total light transmittance of the substrate is preferably 85 to 100%.

另外,基板可以為多層結構,例如,作為其一個層,可以含有功能性膜。另外,基板本身可以為功能性膜。儘管沒有特別限定,但作為功能性膜的示例,可以舉出偏振片、相位差膜、蓋塑膠、硬塗膜、阻隔膜、粘著膜、電磁波遮罩膜、放熱膜、天線膜、觸控面板以外的器件用配線膜等。Further, the substrate may have a multilayer structure, for example, as one layer thereof, may contain a functional film. In addition, the substrate itself may be a functional film. Although not particularly limited, examples of the functional film include a polarizing plate, a retardation film, a cover plastic, a hard coat film, a barrier film, an adhesive film, an electromagnetic wave mask film, a heat radiation film, an antenna film, and a touch. A wiring film for devices other than the panel.

特別是與觸控面板相關的液晶盒中使用的功能性膜的具體例如下:作為偏振片可以使用NPF系列(日東電工社製造)或HLC2系列(Sanritz社製造)等,作為相位差膜可以使用WV膜(富士膠片社製造)等,作為蓋塑膠可以使用FAlNDE(大日本印刷製造)、Technolloy(住友化學製造)、Iupilon(三菱瓦斯化學製造)、Silplus(新日鐵住金製造)、ORGA(日本合成化學製造)、SHORAYAL(昭和電工製造)等,作為硬塗膜可以使用H系列(Lintec社製造)、FHC系列(東山薄膜社製造)、KB膜(KIMOTO社製造)等。它們可在各功能性膜的表面上形成本發明的被鍍覆層。In particular, as a polarizing plate, for example, an NPF series (manufactured by Nitto Denko Corporation) or an HLC2 series (manufactured by Sanritz Co., Ltd.) can be used as the polarizing plate, and a retardation film can be used. WV film (manufactured by Fujifilm Co., Ltd.), etc., can be used as a cover plastic, such as FAlNDE (manufactured by Dainippon Printing Co., Ltd.), Technolloy (manufactured by Sumitomo Chemical Co., Ltd.), Iupilon (manufactured by Mitsubishi Gas Chemical Co., Ltd.), Silplus (manufactured by Nippon Steel & Sumitomo Metal Co., Ltd.), ORGA (Japan) For the hard coat film, H series (manufactured by Lintec Co., Ltd.), FHC series (manufactured by Higashiyama Film Co., Ltd.), KB film (manufactured by KIMOTO Co., Ltd.), or the like can be used as the hard coat film. They form the coated layer of the present invention on the surface of each functional film.

此外,在偏振片、相位差膜中,如日本特開2007-26426號公報所記載可使用三乙酸纖維素,但從對鍍覆工藝的耐性的方面出發,也可以將三乙酸纖維素變更為環烯烴(共)聚合物來使用,例如可以舉出ZEONOR(日本Zeon製造)等。In the polarizing plate or the retardation film, cellulose triacetate can be used as described in JP-A-2007-26426. However, from the viewpoint of resistance to the plating process, cellulose triacetate may be changed to The cycloolefin (co)polymer is used, and examples thereof include ZEONOR (manufactured by Zeon, Japan).

(被鍍覆層形成用組合物)(Composition for forming a layer to be plated)

在被鍍覆層形成用組合物中含有具有與金屬離子相互作用的官能團和聚合性基團的化合物。The composition for forming a layer to be plated contains a compound having a functional group and a polymerizable group which interact with a metal ion.

與金屬離子相互作用的官能團是指能夠與在後述工序中被賦予到圖案狀被鍍覆層的金屬離子發生相互作用的官能團,例如可以使用能夠形成與金屬離子的靜電相互作用的官能團或能夠與金屬離子形成配位元的含氮官能團、含硫官能團、含氧官能團等。The functional group that interacts with the metal ion means a functional group that can interact with the metal ion to be applied to the patterned plated layer in the later-described step, and for example, a functional group capable of forming electrostatic interaction with the metal ion can be used or can be used. The metal ion forms a nitrogen-containing functional group, a sulfur-containing functional group, an oxygen-containing functional group, and the like of the ligand.

作為相互作用性基團,更具體地說,可以舉出:氨基、醯胺基、醯亞胺基、脲基、叔氨基、銨基、脒基、三嗪環、三唑環、苯並三唑基、咪唑基、苯並咪唑基、喹啉基、吡啶基、嘧啶基、吡嗪基、唑啉基、喹喔啉基、嘌呤基、三嗪基、呱啶基、呱嗪基、吡咯烷基、吡唑基、苯胺基、含有烷基胺結構的基團、含有異氰尿素結構的基團、硝基、亞硝基、偶氮基、重氮基、疊氮基、氰基、氰酸酯基(R-O-CN)等含氮官能團;醚基、羥基、酚羥基、羧基、碳酸酯基、羰基、酯基、含有N-氧化物結構的基團、含有S-氧化物結構的基團、含有N-羥基結構的基團等含氧官能團;噻吩基、硫羥基、硫脲基、硫代氰尿酸基、苯並噻唑基、巰基三嗪基、硫醚基、硫氧基、亞碸基、碸基、亞硫酸鹽基、含有亞碸亞胺結構的基團、含有氧化硫鹽結構的基團、磺酸基、含有磺酸酯結構的基團等含硫官能團;磷酸基、磷醯胺基、膦基、含有磷酸酯結構的基團等含磷官能團;含有氯、溴等鹵原子的基團等,在可採取鹽結構的官能團中,也可以使用它們的鹽。Specific examples of the interactive group include an amino group, a decylamino group, a guanidino group, a ureido group, a tertiary amino group, an ammonium group, a decyl group, a triazine ring, a triazole ring, and a benzotriene group. Azyl, imidazolyl, benzimidazolyl, quinolyl, pyridyl, pyrimidinyl, pyrazinyl, oxazolinyl, quinoxalinyl, fluorenyl, triazinyl, acridinyl, pyridazinyl, pyrrole Alkyl, pyrazolyl, anilino, a group containing an alkylamine structure, a group containing an isocyanuric structure, a nitro group, a nitroso group, an azo group, a diazo group, an azide group, a cyano group, a nitrogen-containing functional group such as a cyanate group (RO-CN); an ether group, a hydroxyl group, a phenolic hydroxyl group, a carboxyl group, a carbonate group, a carbonyl group, an ester group, a group having an N-oxide structure, and an S-oxide-containing structure. An oxygen-containing functional group such as a group or a group containing an N-hydroxy structure; a thienyl group, a thiol group, a thiourea group, a thiocyanuric acid group, a benzothiazolyl group, a decyltriazinyl group, a thioether group, a thiol group, Amidino group, sulfhydryl group, sulfite group, group containing a ruthenium imine structure, a group containing a sulphur oxide salt structure, a sulfonic acid group, a sulfonate-containing ester a sulfur-containing functional group such as a group; a phosphorus-containing functional group such as a phosphate group, a phosphonium amino group, a phosphino group, or a phosphate group-containing group; a group containing a halogen atom such as chlorine or bromine, etc., and a functional group capable of adopting a salt structure Among them, it is also possible to use their salts.

其中,從極性高、與金屬離子等的吸附能力高的原因,特別優選羧基、磺酸基、磷酸基和硼酸基等離子性極性基團、醚基或氰基,進一步優選羧基或氰基。Among them, a polar group such as a carboxyl group, a sulfonic acid group, a phosphoric acid group or a boronic acid group, an ether group or a cyano group is particularly preferable because of high polarity and high adsorption ability with metal ions, and the like, and a carboxyl group or a cyano group is more preferable.

在化合物中,相互作用性基團可以含有2種以上。並且,化合物中所含有的相互作用性基團的數目沒有特別限制,可以為1個、也可以為2個以上。In the compound, the interactive group may contain two or more kinds. Further, the number of the interactive groups contained in the compound is not particularly limited, and may be one or two or more.

聚合性基團是可通過能量賦予而形成化學鍵接的官能團,例如可以舉出自由基聚合性基團、陽離子聚合性基團等。其中,從反應性更為優異的方面考慮,優選自由基聚合性基團。作為自由基聚合性基團,例如可以舉出丙烯酸酯基(丙烯醯氧基)、甲基丙烯酸酯基(甲基丙烯醯氧基)、衣康酸酯基、丁烯酸酯基、異丁烯酸酯基、馬來酸酯基等不飽和羧酸酯基;苯乙烯基、乙烯基、丙烯醯胺基、甲基丙烯醯胺基等。其中優選甲基丙烯醯氧基、丙烯醯氧基、乙烯基、苯乙烯基、丙烯醯胺基、甲基丙烯醯胺基,特別優選甲基丙烯醯氧基、丙烯醯氧基、苯乙烯基。The polymerizable group is a functional group capable of forming a chemical bond by energy supply, and examples thereof include a radical polymerizable group and a cationic polymerizable group. Among them, a radical polymerizable group is preferred from the viewpoint of further excellent reactivity. Examples of the radical polymerizable group include an acrylate group (acryloxy group), a methacrylate group (methacryloxy group), an itaconate group, a butenoate group, and a methacrylic acid. An unsaturated carboxylate group such as an ester group or a maleate group; a styryl group, a vinyl group, a acrylamide group, a methacrylamide group or the like. Among them, a methacryloxy group, a propylene methoxy group, a vinyl group, a styryl group, an acrylamide group, a methacrylamide group, and a methacryloxy group, an acryloxy group, a styryl group are particularly preferable. .

在化合物中,聚合性基團可以含有2種以上。另外,化合物中所含有的聚合性基團的數目沒有特別限制,可以為1個、也可以為2個以上。In the compound, the polymerizable group may contain two or more kinds. Further, the number of the polymerizable groups contained in the compound is not particularly limited, and may be one or two or more.

上述化合物可以為低分子化合物、也可以為高分子化合物。低分子化合物是指分子量小於1000的化合物,高分子化合物是指分子量為1000以上的化合物。The above compound may be a low molecular compound or a high molecular compound. The low molecular compound means a compound having a molecular weight of less than 1,000, and the polymer compound means a compound having a molecular weight of 1,000 or more.

需要說明的是,具有上述聚合性基團的低分子化合物相當於所謂的單體(monomer)。另外,高分子化合物可以為具有特定重複單元的聚合物。It should be noted that the low molecular compound having the above polymerizable group corresponds to a so-called monomer. Further, the polymer compound may be a polymer having a specific repeating unit.

另外,作為化合物可以僅使用1種、也可以合用兩種以上。Further, as the compound, one type may be used alone or two or more types may be used in combination.

上述化合物為聚合物的情況下,聚合物的重均分子量沒有特別限制,從溶解性等處理性更為優異的方面出發,優選為1000以上70萬以下、進一步優選為2000以上20萬以下。從聚合靈敏度的方面出發,特別優選為20000以上。When the compound is a polymer, the weight average molecular weight of the polymer is not particularly limited, and from the viewpoint of more excellent handleability such as solubility, it is preferably 1,000 or more and 700,000 or less, and more preferably 2,000 or more and 200,000 or less. From the viewpoint of polymerization sensitivity, it is particularly preferably 20,000 or more.

具有這樣的聚合性基團和相互作用性基團的聚合物的合成方法沒有特別限制,可使用公知的合成方法(參見日本專利公開2009-280905號[0097]~[0125]段)。The synthesis method of the polymer having such a polymerizable group and an interactive group is not particularly limited, and a known synthesis method can be used (see Japanese Patent Laid-Open Publication No. 2009-280905 [0097] to [0125].

(聚合物的適宜方式1)(Appropriate way of polymer 1)

作為聚合物的第1優選方式,可以舉出含有具有下式(a)所表示的聚合性基團的重複單元(下文中為方便起見也稱為聚合性基團單元)和下式(b)所表示的相互作用性基團的重複單元(下文中為方便起見也稱為相互作用性基團單元)的共聚物。The first preferred embodiment of the polymer includes a repeating unit having a polymerizable group represented by the following formula (a) (hereinafter referred to as a polymerizable group unit for convenience) and the following formula (b) a copolymer of a repeating unit of an interactive group (hereinafter also referred to as an interactive group unit for convenience).

[化1] [Chemical 1]

上述式(a)和式(b)中,R1 ~R5 各自獨立地表示氫原子、或者取代或無取代的烷基(例如甲基、乙基、丙基、丁基等)。另外,取代基的種類沒有特別限制,可以舉出甲氧基、氯原子、溴原子或氟原子等。In the above formula (a) and formula (b), R 1 to R 5 each independently represent a hydrogen atom or a substituted or unsubstituted alkyl group (e.g., a methyl group, an ethyl group, a propyl group, a butyl group or the like). Further, the type of the substituent is not particularly limited, and examples thereof include a methoxy group, a chlorine atom, a bromine atom, and a fluorine atom.

需要說明的是,作為R1 ,優選氫原子、甲基或被溴原子取代的甲基。作為R2 ,優選氫原子、甲基或被溴原子取代的甲基。作為R3 ,優選氫原子。作為R4 ,優選氫原子。作為R5 ,優選氫原子、甲基或被溴原子取代的甲基。Note that, as R 1, preferably a hydrogen atom, a methyl group substituted with a bromine atom or a methyl group. As R 2 , a hydrogen atom, a methyl group or a methyl group substituted with a bromine atom is preferred. As R 3 , a hydrogen atom is preferred. As R 4 , a hydrogen atom is preferred. R 5 is preferably a hydrogen atom, a methyl group or a methyl group substituted by a bromine atom.

上述式(a)和式(b)中,X、Y和Z各自獨立地表示單鍵、或者取代或無取代的二元有機基團。作為二元有機基團, 可以舉出取代或無取代的二元脂肪族烴基(優選碳原子數為1~8。例如亞甲基、亞乙基、丙烯基等亞烷基)、取代或無取代的二元芳香族烴基(優選碳原子數為6~12。例如亞苯基)、-O-、-S-、-SO2 -、-N(R)-(R:烷基)、-CO-、-NH-、-COO-、-CONH-或將它們組合而成的基團(例如亞烷氧基、亞烷氧基羰基、亞烷基羰醯氧基等)等。In the above formula (a) and formula (b), X, Y and Z each independently represent a single bond, or a substituted or unsubstituted binary organic group. The dibasic organic group may, for example, be a substituted or unsubstituted dibasic aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms, such as an alkylene group such as a methylene group, an ethylene group or a propenyl group), a substitution or no Substituted dibasic aromatic hydrocarbon groups (preferably having 6 to 12 carbon atoms, such as phenylene), -O-, -S-, -SO 2 -, -N(R)-(R:alkyl), - CO-, -NH-, -COO-, -CONH- or a group obtained by combining them (for example, an alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonyloxy group, etc.), etc.

作為X、Y和Z,從聚合物的合成容易、圖案狀金屬層的密合性更為優異的方面考慮,優選單鍵、酯基(-COO-)、醯胺基(-CONH-)、醚基(-O-)、或者取代或無取代的二元芳香族烴基,更優選單鍵、酯基(-COO-)、醯胺基(-CONH-)。X, Y and Z are preferably a single bond, an ester group (-COO-) or a guanamine group (-CONH-), from the viewpoint that the synthesis of the polymer is easy and the adhesion of the patterned metal layer is more excellent. The ether group (-O-) or the substituted or unsubstituted divalent aromatic hydrocarbon group is more preferably a single bond, an ester group (-COO-) or a decylamino group (-CONH-).

在上述式(a)和式(b)中,L1 和L2 各自獨立地表示單鍵、或者取代或無取代的二元有機基團。作為二元有機基團的定義,與上述X、Y和Z中所述的二元有機基團的含義相同。In the above formula (a) and the formula (b), L 1 and L 2 each independently represent a single bond, or a substituted or unsubstituted dibasic organic group. The definition of the binary organic group has the same meaning as the above-described binary organic group in X, Y and Z.

作為L1 ,從聚合物的合成容易、圖案狀金屬層的密合性更為優異的方面考慮,優選脂肪族烴基或者具有氨基甲酸酯鍵或脲鍵的二元有機基團(例如脂肪族烴基),其中優選總碳原子數為1~9的基團。需要說明的是,此處,L1 的總碳原子數是指L1 所表示的取代或無取代的二元有機基團所含有的總碳原子數。L 1 is preferably an aliphatic hydrocarbon group or a binary organic group having a urethane bond or a urea bond (for example, an aliphatic group) from the viewpoint that the synthesis of the polymer is easy and the adhesion of the patterned metal layer is more excellent. Hydrocarbyl), wherein a group having a total number of carbon atoms of 1 to 9 is preferred. Note that here, L is the total number of carbon atoms refers to the total number of carbon is a substituted or unsubstituted dibasic organic group represented by L 1 contained in the atoms.

另外,從圖案狀金屬層的密合性更為優異的方面考慮,L2 優選為單鍵或二元脂肪族烴基、二元芳香族烴基或者將它們組合而成的基團。其中,L2 優選單鍵或總碳原子數為1~15,特別優選無取代。需要說明的是,此處,L2 的總碳原子數是指L2 所表示的取代或無取代的二元有機基團所含有的總碳原子數。In addition, L 2 is preferably a single bond or a divalent aliphatic hydrocarbon group, a divalent aromatic hydrocarbon group, or a combination thereof, from the viewpoint of further excellent adhesion of the patterned metal layer. Among them, L 2 is preferably a single bond or a total number of carbon atoms of from 1 to 15, and particularly preferably unsubstituted. Note that here, L 2 is the total number of carbon atoms refers to the total number of carbon is a substituted or unsubstituted dibasic organic group represented by L 2 contained in the atoms.

上述式(b)中,W表示相互作用性基團。相互作用性基團的定義如上所述。In the above formula (b), W represents an interactive group. The definition of an interactive group is as described above.

從反應性(固化性、聚合性)和抑制合成時的凝膠化的方面考慮,上述聚合性基團單元的含量相對於聚合物中的全部重複單元優選為5~50摩爾%、更優選為5~40摩爾%。The content of the polymerizable group unit is preferably 5 to 50% by mole based on the reactivity (curability, polymerizability) and the gelation at the time of the synthesis, and is more preferably 5 to 50% by mole based on the total of the repeating units in the polymer. 5 to 40% by mole.

另外,從針對金屬離子的吸附性的方面出發,上述相互作用性基團單元的含量相對於聚合物中的全部重複單元優選為5~95摩爾%、更優選為10~95摩爾%。Further, the content of the above-mentioned interactive group unit is preferably 5 to 95% by mole, and more preferably 10 to 95% by mole based on the total repeating unit in the polymer from the viewpoint of the adsorption property to the metal ion.

(聚合物的適宜方式2)(A suitable way for the polymer 2)

作為聚合物的第2優選方式,可以舉出含有下式(A)、式(B)和式(C)所表示的重複單元的共聚物。The second preferred embodiment of the polymer includes a copolymer containing a repeating unit represented by the following formula (A), formula (B), and formula (C).

[化2] [Chemical 2]

式(A)所表示的重複單元與上述式(a)所表示的重複單元相同,各基團的說明也相同。The repeating unit represented by the formula (A) is the same as the repeating unit represented by the above formula (a), and the description of each group is also the same.

式(B)所表示的重複單元中的R5 、X和L2 與上述式(b)所表示的重複單元中的R5 、X和L2 相同,各基團的說明也相同。(B) repeating units represented by R 5, X, and L 2 represented by the above formula (b) and repeating units R 5, X and L are the same as the formula 2, each of the groups described is also the same.

式(B)中的Wa表示除了後述的V所表示的親水性基團或其前體基團以外的與金屬離子相互作用的基團。其中優選氰基、醚基。Wa in the formula (B) represents a group which interacts with a metal ion other than the hydrophilic group represented by V described later or a precursor group thereof. Among them, a cyano group and an ether group are preferred.

式(C)中,R6 各自獨立地表示氫原子、或者取代或無取代的烷基。In the formula (C), R 6 each independently represents a hydrogen atom or a substituted or unsubstituted alkyl group.

式(C)中,U表示單鍵、或者取代或無取代的二元有機基團。二元有機基團的定義與上述的X、Y和Z所表示的二元有機基團含義相同。作為U,從聚合物的合成容易、圖案狀金屬層的密合性更為優異的方面考慮,優選單鍵、酯基(-COO-)、醯胺基(-CONH-)、醚基(-O-)、或者取代或無取代的二元芳香族烴基。In the formula (C), U represents a single bond, or a substituted or unsubstituted binary organic group. The definition of the binary organic group has the same meaning as the above-mentioned binary organic group represented by X, Y and Z. U is preferably a single bond, an ester group (-COO-), a guanamine group (-CONH-), or an ether group from the viewpoint that the synthesis of the polymer is easy and the adhesion of the patterned metal layer is more excellent. O-), or a substituted or unsubstituted dibasic aromatic hydrocarbon group.

式(C)中,L3 表示單鍵、或者取代或無取代的二元有機基團。二元有機基團的定義與上述L1 和L2 所表示的二元有機基團的含義相同。作為L3 ,從聚合物的合成容易、圖案狀金屬層的密合性更為優異的方面考慮,優選單鍵或二元脂肪族烴基、二元芳香族烴基或將它們組合而成的基團。In the formula (C), L 3 represents a single bond, or a substituted or unsubstituted binary organic group. The definition of the binary organic group is the same as the meaning of the binary organic group represented by the above L 1 and L 2 . As L 3, from a synthetic polymer easy adhesion aspects patterned metal layer is more excellent in consideration of, preferably a single bond aliphatic hydrocarbon group or dibasic, dibasic aromatic hydrocarbon group or a group formed by a combination thereof .

式(C)中,V表示親水性基團或其前體基團。關於親水性基團,只要為顯示出親水性的基團就沒有特別限定,例如可以舉出羥基、羧酸基等。另外,親水性基團的前體基團是指可通過特定處理(例如利用酸或堿進行處理)而生成親水性基團的基團,例如可以舉出經THP(2-四氫吡喃基)保護的羧基等。In the formula (C), V represents a hydrophilic group or a precursor group thereof. The hydrophilic group is not particularly limited as long as it exhibits hydrophilicity, and examples thereof include a hydroxyl group and a carboxylic acid group. Further, the precursor group of the hydrophilic group means a group which can form a hydrophilic group by a specific treatment (for example, treatment with an acid or hydrazine), and examples thereof include THP (2-tetrahydropyranyl group). Protected carboxyl groups and the like.

作為親水性基團,從與金屬離子的相互作用的方面考慮,優選離子性極性基團。作為離子性極性基團,具體地說,可以舉出羧酸基、磺酸基、磷酸基、硼酸基。其中,從適度的酸性(不分解其它官能團)的方面考慮,優選羧酸基。As the hydrophilic group, an ionic polar group is preferred from the viewpoint of interaction with metal ions. Specific examples of the ionic polar group include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a boronic acid group. Among them, a carboxylic acid group is preferred from the viewpoint of moderate acidity (no decomposition of other functional groups).

上述聚合物的第2優選方式中的各單元的優選含量如下。The preferred content of each unit in the second preferred embodiment of the above polymer is as follows.

從反應性(固化性、聚合性)和抑制合成時的凝膠化的方面考慮,式(A)所表示的重複單元的含量相對於聚合物中的全部重複單元優選為5~50摩爾%、更優選為5~30摩爾%。The content of the repeating unit represented by the formula (A) is preferably 5 to 50% by mole based on the reactivity (curability, polymerizability) and the gelation at the time of inhibiting synthesis, with respect to all the repeating units in the polymer. More preferably, it is 5 to 30 mol%.

從針對金屬離子的吸附性的方面考慮,式(B)所表示的重複單元的含量相對於聚合物中的全部重複單元優選為5~75摩爾%、更優選為10~70摩爾%。The content of the repeating unit represented by the formula (B) is preferably from 5 to 75 mol%, more preferably from 10 to 70 mol%, based on the total of the repeating units in the polymer.

從基於水溶液的顯影性和耐濕密合性的方面考慮,式(C)所表示的重複單元的含量相對於聚合物中的全部重複單元優選為10~70摩爾%、更優選為20~60摩爾%、進一步優選為30~50摩爾%。The content of the repeating unit represented by the formula (C) is preferably from 10 to 70 mol%, more preferably from 20 to 60, based on the developability of the aqueous solution and the wet adhesion resistance, with respect to all the repeating units in the polymer. The mole % is more preferably 30 to 50% by mole.

作為上述聚合物的具體例,例如可以舉出日本特開2009-007540號公報[0106]~[0112]段中記載的聚合物、日本特開2006-135271號公報[0065]~[0070]段中記載的聚合物、US2010-080964號[0030]~[0108]段中記載的聚合物等。Specific examples of the polymer include a polymer described in paragraphs [0106] to [0112] of JP-A-2009-007540, and paragraphs [0065] to [0070] of JP-A-2006-135271. The polymer described in the above, the polymer described in paragraphs [0030] to [0108] of US2010-080964.

該聚合物可利用公知的方法(例如上述列舉的文獻中的方法)進行製造。The polymer can be produced by a known method (for example, the method in the literature cited above).

(單體的適宜方式)(appropriate way of monomer)

在上述化合物為所謂單體的情況下,作為適宜方式之一,可以舉出式(X)所表示的化合物。When the above compound is a so-called monomer, one of the suitable embodiments may be a compound represented by the formula (X).

[化3] [Chemical 3]

式(X)中,R11 ~R13 各自獨立地表示氫原子、或者取代或無取代的烷基。作為無取代的烷基,可以舉出甲基、乙基、丙基或丁基。另外,作為取代烷基,可以舉出被甲氧基、氯原子、溴原子或氟原子等取代的甲基、乙基、丙基、丁基。另外,作為R11 ,優選氫原子或甲基。作為R12 ,優選氫原子。作為R13 ,優選氫原子。In the formula (X), R 11 to R 13 each independently represent a hydrogen atom or a substituted or unsubstituted alkyl group. The unsubstituted alkyl group may, for example, be a methyl group, an ethyl group, a propyl group or a butyl group. Further, examples of the substituted alkyl group include a methyl group, an ethyl group, a propyl group and a butyl group substituted with a methoxy group, a chlorine atom, a bromine atom or a fluorine atom. Further, as R 11 , a hydrogen atom or a methyl group is preferred. As R 12 , a hydrogen atom is preferred. As R 13 , a hydrogen atom is preferred.

L10 表示單鍵或二元有機基團。作為二元有機基團,可以舉出取代或無取代的脂肪族烴基(優選碳原子數為1~8)、取代或無取代的芳香族烴基(優選碳原子數為6~12)、-O-、-S-、-SO2 -、-N(R)-(R:烷基)、-CO-、-NH-、-COO-、-CONH-或將它們組合而成的基團(例如亞烷氧基、亞烷氧基羰基、亞烷基羰醯氧基等)等。L 10 represents a single bond or a binary organic group. The divalent organic group may, for example, be a substituted or unsubstituted aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms), a substituted or unsubstituted aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms), and -O. -, -S-, -SO 2 -, -N(R)-(R:alkyl), -CO-, -NH-, -COO-, -CONH- or a group combining them (for example An alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonyloxy group, etc.).

作為取代或無取代的脂肪族烴基,優選亞甲基、亞乙基、亞丙基或者亞丁基或者這些基團被甲氧基、氯原子、溴原子或氟原子等取代得到的基團。The substituted or unsubstituted aliphatic hydrocarbon group is preferably a group obtained by substituting a methylene group, an ethylene group, a propylene group or a butylene group or a group thereof with a methoxy group, a chlorine atom, a bromine atom or a fluorine atom.

作為取代或無取代的芳香族烴基,優選無取代的亞苯基或者被甲氧基、氯原子、溴原子或氟原子等取代的亞苯基。The substituted or unsubstituted aromatic hydrocarbon group is preferably an unsubstituted phenylene group or a phenylene group substituted with a methoxy group, a chlorine atom, a bromine atom or a fluorine atom.

式(X)中,作為L10 的適宜方式之一,可以舉出-NH-脂肪族烴基-或-CO-脂肪族烴基-。In the formula (X), as one of suitable methods of L 10 , a -NH-aliphatic hydrocarbon group or a -CO-aliphatic hydrocarbon group- may be mentioned.

W的定義與式(b)中的W的定義的含義相同,表示相互作用性基團。相互作用性基團的定義如上所述。The definition of W is the same as the definition of W in the formula (b), and represents an interactive group. The definition of an interactive group is as described above.

式(X)中,作為W的適宜方式,可以舉出離子性極性基團,更優選羧酸基。In the formula (X), as a suitable form of W, an ionic polar group is mentioned, and a carboxylic acid group is more preferable.

上述化合物為所謂單體的情況下,作為其它適宜方式之一,可以舉出式(1)所表示的化合物。When the above compound is a so-called monomer, one of other suitable embodiments may be a compound represented by the formula (1).

[化4] [Chemical 4]

式(1)中,R10 表示氫原子、金屬陽離子或季銨陽離子。作為金屬陽離子,例如可以舉出鹼金屬陽離子(鈉離子、鈣離子)、銅離子、鈀離子、銀離子等。另外,作為金屬陽離子,主要使用1價或2價的金屬陽離子,在使用2價金屬陽離子(例如鈀離子)的情況下,後述的n表示2。In the formula (1), R 10 represents a hydrogen atom, a metal cation or a quaternary ammonium cation. Examples of the metal cation include an alkali metal cation (sodium ion, calcium ion), copper ion, palladium ion, silver ion, and the like. Further, as the metal cation, a monovalent or divalent metal cation is mainly used, and when a divalent metal cation (for example, palladium ion) is used, n which will be described later represents 2.

作為季銨陽離子,例如可以舉出四甲基銨離子、四丁基銨離子等。Examples of the quaternary ammonium cation include a tetramethylammonium ion and a tetrabutylammonium ion.

其中,從金屬離子的附著和圖案化後的金屬殘渣的方面考慮,優選氫原子。Among them, a hydrogen atom is preferred from the viewpoint of adhesion of metal ions and metal residue after patterning.

式(1)中的L10 的定義與上述的式(X)中的L10 的定義的含義相同,表示單鍵或二元有機基團。二元有機基團的定義如上所述。The same meaning as defined in the formula in the definition of L 10 L 10 (1) in the above-mentioned formula (X), represents a single bond or dibasic organic group. The definition of a binary organic group is as described above.

式(1)中的R11 ~R13 的定義與上述的式(X)中的R11 ~R13 的定義的含義相同,表示氫原子、或者取代或無取代的烷基。另外,R11 ~R13 的適宜方式如上所述。It is defined the same as defined in the formula R (1) is 11 ~ R 13 of the above-described formula (X) R 11 ~ R 13 meaning, represents a hydrogen atom, or a substituted or unsubstituted alkyl. Further, a suitable mode of R 11 to R 13 is as described above.

n表示1或2的整數。其中,從化合物的獲得性的方面出發,n優選為1。n represents an integer of 1 or 2. Among them, n is preferably 1 from the viewpoint of availability of the compound.

作為式(1)所表示的化合物的適宜方式,可以舉出式(2)所表示的化合物。A suitable form of the compound represented by the formula (1) is a compound represented by the formula (2).

[化5] [Chemical 5]

式(2)中,R10 、R11 和n與上述的定義相同。In the formula (2), R 10 , R 11 and n are the same as defined above.

L11 表示酯基(-COO-)、醯胺基(-CONH-)或亞苯基。其中,在L11 為醯胺基時,所得到的被鍍覆層的聚合性和耐溶劑性(例如堿溶劑耐性)提高。L 11 represents an ester group (-COO-), a guanamine group (-CONH-) or a phenylene group. However, when L 11 is a guanamine group, the polymerizability and solvent resistance (for example, solvent resistance) of the obtained plated layer are improved.

L12 表示單鍵、2價脂肪族烴基(優選碳原子數為1~8、更優選碳原子數為3~5)或2價芳香族烴基。脂肪族烴基可以為直鏈狀、支鏈狀、環狀。另外,在L12 為單鍵的情況下,L11 表示亞苯基。L 12 represents a single bond or a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms, more preferably 3 to 5 carbon atoms) or a divalent aromatic hydrocarbon group. The aliphatic hydrocarbon group may be linear, branched or cyclic. Further, in the case where L 12 is a single bond, L 11 represents a phenylene group.

式(1)所表示的化合物的分子量沒有特別限制,從揮發性、在溶劑中的溶解性、成膜性和處理性等方面出發,該分子量優選為100~1000、更優選為100~300。The molecular weight of the compound represented by the formula (1) is not particularly limited, and the molecular weight is preferably from 100 to 1,000, and more preferably from 100 to 300, from the viewpoints of volatility, solubility in a solvent, film formability, and handleability.

被鍍覆層形成用組合物中的上述化合物的含量沒有特別限制,相對於組合物總量優選為2~50質量%、更優選為5~30質量%。上述化合物的含量為上述範圍內時,組合物的處理性優異,圖案狀被鍍覆層的層厚的控制容易進行。The content of the above compound in the composition for forming a layer to be plated is not particularly limited, and is preferably 2 to 50% by mass, and more preferably 5 to 30% by mass based on the total amount of the composition. When the content of the above compound is within the above range, the handleability of the composition is excellent, and the control of the layer thickness of the patterned plated layer is easily performed.

從處理性的方面考慮,在被鍍覆層形成用組合物中優選含有溶劑。From the viewpoint of handleability, it is preferred to include a solvent in the composition for forming a layer to be plated.

可以使用的溶劑沒有特別限定,例如可以舉出水;甲醇、乙醇、丙醇、乙二醇、1-甲氧基-2-丙醇、甘油、丙二醇單甲醚等醇類溶劑;乙酸等酸;丙酮、甲基乙基酮、環己酮等酮類溶劑;甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等醯胺類溶劑;乙腈、丙腈等腈類溶劑;乙酸甲酯、乙酸乙酯等酯類溶劑;碳酸二甲酯、碳酸二乙酯等碳酸酯類溶劑;以及醚類溶劑、二醇類溶劑、胺類溶劑、硫醇類溶劑、鹵素類溶劑等。The solvent which can be used is not particularly limited, and examples thereof include water; alcohol solvents such as methanol, ethanol, propanol, ethylene glycol, 1-methoxy-2-propanol, glycerin, and propylene glycol monomethyl ether; and acids such as acetic acid. a ketone solvent such as acetone, methyl ethyl ketone or cyclohexanone; a guanamine solvent such as formamide, dimethylacetamide or N-methylpyrrolidone; a nitrile solvent such as acetonitrile or propionitrile; An ester solvent such as an ester or an ethyl acetate; a carbonate solvent such as dimethyl carbonate or diethyl carbonate; an ether solvent, a glycol solvent, an amine solvent, a thiol solvent, or a halogen solvent.

其中,優選醇類溶劑、醯胺類溶劑、酮類溶劑、腈類溶劑、碳酸酯類溶劑。Among them, an alcohol solvent, a guanamine solvent, a ketone solvent, a nitrile solvent, and a carbonate solvent are preferable.

被鍍覆層形成用組合物中的溶劑的含量沒有特別限制,相對於組合物總量優選為50~98質量%、更優選為70~95質量%。溶劑的含量為上述範圍內時,組合物的處理性優異、圖案狀被鍍覆層的層厚的控制等容易進行。The content of the solvent in the composition for forming a layer to be plated is not particularly limited, and is preferably from 50 to 98% by mass, and more preferably from 70 to 95% by mass based on the total amount of the composition. When the content of the solvent is within the above range, the handleability of the composition is excellent, and the control of the layer thickness of the pattern-coated layer is easily performed.

在被鍍覆層形成用組合物中可以含有聚合引發劑。通過含有聚合引發劑,進一步形成化合物之間以及化合物與基板之間的結合,作為結果,可得到密合性更為優異的圖案狀金屬層。A polymerization initiator may be contained in the composition for forming a layer to be plated. By containing a polymerization initiator, the bond between the compounds and the compound and the substrate is further formed, and as a result, a patterned metal layer having more excellent adhesion can be obtained.

作為所使用的聚合引發劑沒有特別限制,例如可以使用熱聚合引發劑、光聚合引發劑等。作為光聚合引發劑的示例,可以舉出二苯甲酮類、苯乙酮類、α-氨基烷基苯酮類、苯偶姻類、酮類、噻噸酮類、苯偶醯類、苯偶醯縮酮類、肟酯類、蒽酮類、四甲基秋蘭姆單硫化物類、雙醯基氧化膦類、醯基氧化膦類、蒽醌類、偶氮化合物等及其衍生物。The polymerization initiator to be used is not particularly limited, and for example, a thermal polymerization initiator, a photopolymerization initiator, or the like can be used. Examples of the photopolymerization initiator include benzophenones, acetophenones, α-aminoalkylphenones, benzoin, ketones, thioxanthones, benzophenes, and benzene. Olequinones, oxime esters, anthrones, tetramethylthiuram monosulfides, bis-indenylphosphine oxides, fluorenylphosphine oxides, anthraquinones, azo compounds, and derivatives thereof .

另外,作為熱聚合引發劑的示例,可以舉出重氮系化合物或過氧化物系化合物等。Moreover, examples of the thermal polymerization initiator include a diazo compound or a peroxide compound.

在被鍍覆層形成用組合物中含有聚合引發劑的情況下,聚合引發劑的含量相對於組合物總量優選為0.01~1質量%、更優選為0.1~0.5質量%。聚合引發劑的含量為上述範圍內時,組合物的處理性優異,所得到的圖案狀金屬層的密合性更為優異。When the polymerization initiator is contained in the composition for forming a layer to be plated, the content of the polymerization initiator is preferably 0.01 to 1% by mass, and more preferably 0.1 to 0.5% by mass based on the total amount of the composition. When the content of the polymerization initiator is within the above range, the handleability of the composition is excellent, and the adhesion of the obtained patterned metal layer is further improved.

在被鍍覆層形成用組合物中可以含有單體(其中不包括上述式(X)或式(1)所表示的化合物)。通過含有單體,可以適當地控制被鍍覆層中的交聯密度等。A monomer (which does not include the compound represented by the above formula (X) or formula (1)) may be contained in the composition for forming a layer to be plated. By containing a monomer, the crosslinking density and the like in the plated layer can be appropriately controlled.

所使用的單體沒有特別限制,例如,作為具有加成聚合性的化合物可以舉出具有烯鍵式不飽和鍵的化合物、作為具有開環聚合性的化合物可以舉出具有環氧基的化合物等。其中,從提高圖案狀被鍍覆層中的交聯密度、進一步提高圖案狀金屬層的密合性的方面考慮,優選使用多官能單體。多官能單體是指具有2個以上聚合性基團的單體。具體地說,優選使用具有2~6個聚合性基團的單體。The monomer to be used is not particularly limited, and examples of the compound having an addition polymerizable property include a compound having an ethylenically unsaturated bond, and examples of the compound having a ring-opening polymerizable property include a compound having an epoxy group. . Among them, a polyfunctional monomer is preferably used from the viewpoint of improving the crosslinking density in the patterned coating layer and further improving the adhesion of the patterned metal layer. The polyfunctional monomer means a monomer having two or more polymerizable groups. Specifically, a monomer having 2 to 6 polymerizable groups is preferably used.

從對反應性造成影響的交聯反應中的分子運動性的方面出發,作為所使用的多官能單體的分子量優選為150~1000、進一步優選為200~700。並且,聚合性基團存在多個時,作為聚合性基團之間的間隔(距離),以原子數計優選為1~15、更優選為6以上10以下。The molecular weight of the polyfunctional monomer to be used is preferably from 150 to 1,000, and more preferably from 200 to 700, from the viewpoint of molecular mobility in the crosslinking reaction which affects reactivity. In addition, when there are a plurality of polymerizable groups, the interval (distance) between the polymerizable groups is preferably from 1 to 15, more preferably from 6 to 10, in terms of the number of atoms.

在被鍍覆層形成用組合物中可以根據需要添加其它添加劑(例如增敏劑、固化劑、阻聚劑、抗氧化劑、抗靜電劑、紫外線吸收劑、填料、粒子、阻燃劑、表面活性劑、潤滑劑、增塑劑等)。Other additives (for example, sensitizer, curing agent, polymerization inhibitor, antioxidant, antistatic agent, ultraviolet absorber, filler, particles, flame retardant, surface active) may be added to the composition for forming a layer to be plated. Agents, lubricants, plasticizers, etc.).

另外,在上文中對於含有具有相互作用性基團和聚合性基團的化合物的被鍍覆層形成用組合物進行了敘述,但並不限於這種方式,例如也可以為含有具有相互作用性基團的化合物和具有聚合性基團的化合物的被鍍覆層形成用組合物。Further, in the above, the composition for forming a layer to be plated containing a compound having an interactive group and a polymerizable group has been described, but it is not limited thereto, and for example, it may contain an interaction property. A composition for forming a layer of a compound of a group and a compound having a polymerizable group.

相互作用性基團和聚合性基團的定義如上所述。The definition of the interactive group and the polymerizable group is as described above.

具有相互作用性基團的化合物是指具有相互作用性基團的化合物。相互作用性基團的定義如上所述。作為這樣的化合物,可以為低分子化合物、也可以為高分子化合物。作為具有相互作用性基團的化合物的適宜方式,可以舉出具有上述式(b)所表示的重複單元的高分子(例如聚丙烯酸)。需要說明的是,在具有相互作用性基團的化合物中不含有聚合性基團。A compound having an interactive group means a compound having an interactive group. The definition of an interactive group is as described above. Such a compound may be a low molecular compound or a polymer compound. A suitable form of the compound having an interactive group is a polymer (for example, polyacrylic acid) having a repeating unit represented by the above formula (b). It should be noted that the polymerizable group is not contained in the compound having an interactive group.

具有聚合性基團的化合物是指所謂的單體,從所形成的被鍍覆層的硬度更為優異的方面考慮,優選具有2個以上聚合性基團的多官能單體。關於多官能單體,具體地說,優選使用具有2~6個聚合性基團的單體。從對反應性造成影響的交聯反應中的分子運動性的方面出發,作為所使用的多官能單體的分子量優選為150~1000、進一步優選為200~700。並且,聚合性基團存在多個時,作為聚合性基團之間的間隔(距離),以原子數計優選為1~15、更優選為6~10。The compound having a polymerizable group is a so-called monomer, and a polyfunctional monomer having two or more polymerizable groups is preferred from the viewpoint that the hardness of the layer to be plated formed is more excellent. As the polyfunctional monomer, specifically, a monomer having 2 to 6 polymerizable groups is preferably used. The molecular weight of the polyfunctional monomer to be used is preferably from 150 to 1,000, and more preferably from 200 to 700, from the viewpoint of molecular mobility in the crosslinking reaction which affects reactivity. In the case where a plurality of polymerizable groups are present, the interval (distance) between the polymerizable groups is preferably from 1 to 15 and more preferably from 6 to 10 in terms of the number of atoms.

(工序1的過程)(process of process 1)

在工序1中,首先在基板上配置被鍍覆層形成用組合物,其方法沒有特別限制,例如可以舉出使上述被鍍覆層形成用組合物在基板上接觸來形成被鍍覆層形成用組合物的塗膜(被鍍覆層前體層)的方法。作為該方法,例如可以舉出在基板上塗布上述被鍍覆層形成用組合物的方法(塗布法)。In the step 1, the composition for forming a layer to be plated is first placed on the substrate, and the method is not particularly limited. For example, the composition for forming a layer to be plated is brought into contact with the substrate to form a layer to be plated. A method of coating a coating (coating layer precursor layer) of the composition. As such a method, for example, a method (coating method) of applying the composition for forming a layer to be plated onto a substrate is exemplified.

在塗布法的情況下,在基板上塗布被鍍覆層形成用組合物的方法沒有特別限制,可以使用公知的方法(例如旋塗、模塗、浸漬塗布等)。In the case of the coating method, the method of applying the composition for forming a layer to be plated on the substrate is not particularly limited, and a known method (for example, spin coating, die coating, dip coating, or the like) can be used.

從處理性、製造效率的方面出發,優選下述方式:在基板上塗布被鍍覆層形成用組合物,根據需要進行乾燥處理除去殘存的溶劑,形成塗膜。From the viewpoint of handleability and production efficiency, a composition for forming a layer to be plated is applied onto a substrate, and if necessary, a solvent is removed by drying to form a coating film.

另外,乾燥處理的條件沒有特別限制,從生產率更為優異的方面考慮,優選在室溫~220℃(優選50~120℃)實施1~30分鐘(優選1~10分鐘)。Further, the conditions of the drying treatment are not particularly limited, and from the viewpoint of further excellent productivity, it is preferably carried out at room temperature to 220 ° C (preferably 50 to 120 ° C) for 1 to 30 minutes (preferably 1 to 10 minutes).

對於基板上的含有上述化合物的塗膜以圖案狀進行能量賦予的方法沒有特別限制。例如優選使用加熱處理、曝光處理(光照射處理)等,從在短時間內結束處理的方面考慮,優選曝光處理。通過對塗膜賦予能量,化合物中的聚合性基團被活化,化合物間發生交聯,進行層的固化。The method of imparting energy to the coating film containing the above compound on the substrate in a pattern is not particularly limited. For example, heat treatment, exposure treatment (light irradiation treatment), or the like is preferably used, and from the viewpoint of ending the treatment in a short time, exposure treatment is preferred. By imparting energy to the coating film, the polymerizable group in the compound is activated, and crosslinking occurs between the compounds to cure the layer.

曝光處理使用UV燈、基於可見光線等的光照射等。作為光源,例如有水銀燈、金屬鹵化物燈、氙燈、化學燈、碳弧燈等。作為放射線,還有電子射線、X射線、離子束、遠紅外線等。作為具體的方式,可以適宜地舉出利用紅外線雷射器進行的掃描曝光、氙放電燈等高照度閃爍曝光、紅外線燈曝光等。The exposure process uses a UV lamp, light irradiation based on visible light rays, or the like. Examples of the light source include a mercury lamp, a metal halide lamp, a xenon lamp, a chemical lamp, a carbon arc lamp, and the like. As the radiation, there are electron rays, X rays, ion beams, far infrared rays, and the like. As a specific aspect, a high-illumination scintillation exposure such as a scanning exposure by an infrared laser device, a xenon discharge lamp, or the like, and an infrared lamp exposure can be suitably used.

作為曝光時間,根據化合物的反應性和光源的不同而不同,通常為10秒~5小時之間。作為曝光能量,為10~8000mJ左右即可,優選為50~3000mJ的範圍。The exposure time varies depending on the reactivity of the compound and the light source, and is usually from 10 seconds to 5 hours. The exposure energy may be about 10 to 8000 mJ, and preferably 50 to 3000 mJ.

另外,以圖案狀實施上述曝光處理的方法沒有特別限制,可採用公知的方法,例如可隔著掩模對塗膜照射曝光。Further, the method of performing the above-described exposure treatment in a pattern is not particularly limited, and a known method can be employed. For example, the coating film can be exposed to light through a mask.

另外,作為能量賦予使用加熱處理的情況下,可以使用鼓風乾燥機、烘箱、紅外線乾燥機、加熱鼓等。Further, when heat treatment is used as the energy supply, a blast dryer, an oven, an infrared dryer, a heating drum, or the like can be used.

接著,除去塗膜中的未實施能量賦予的部分,形成圖案狀被鍍覆層。Next, the portion of the coating film where the energy is not applied is removed, and a patterned plated layer is formed.

上述除去方法沒有特別限制,根據所使用的化合物適當選擇最佳的方法。例如可以舉出使用鹼性溶液(優選pH:13.0~13.8)作為顯影液的方法。在使用鹼性溶液除去能量未賦予區域的情況下,可以舉出將具有被賦予了能量的塗膜的基板浸漬在溶液中的方法、在該基板上塗布顯影液的方法等,優選進行浸漬的方法。在為浸漬方法的情況下,從生產率・作業性等的方面出發,作為浸漬時間優選為1分鐘至30分鐘左右。The above removal method is not particularly limited, and an optimum method is appropriately selected depending on the compound to be used. For example, a method of using an alkaline solution (preferably pH: 13.0 to 13.8) as a developing solution can be mentioned. In the case where the energy-imparting region is removed by using an alkaline solution, a method of immersing a substrate having a coating film to which energy is applied in a solution, a method of applying a developing solution on the substrate, and the like, and preferably immersing may be mentioned. method. In the case of the immersion method, the immersion time is preferably from about 1 minute to 30 minutes from the viewpoints of productivity, workability, and the like.

此外,作為其它方法,可以舉出將溶解上述化合物的溶劑作為顯影液,浸漬在其中的方法。Further, as another method, a method in which a solvent which dissolves the above compound is used as a developing solution and is immersed therein may be mentioned.

(圖案狀被鍍覆層)(patterned coated layer)

通過上述處理形成的圖案狀被鍍覆層的厚度沒有特別限制,從生產率的方面考慮,優選為0.01~10μm、更優選為0.2~5μm、特別優選為0.3~1.0μm。The thickness of the patterned plated layer formed by the above treatment is not particularly limited, and is preferably 0.01 to 10 μm, more preferably 0.2 to 5 μm, and particularly preferably 0.3 to 1.0 μm from the viewpoint of productivity.

圖案狀被鍍覆層的圖案形狀沒有特別限制,可按照要形成後述的圖案狀金屬層的位置進行調整,例如可以舉出網狀圖案等。在網狀圖案的情況下,網狀圖案內的格子(開口部)的一邊長度W優選為800μm以下、更優選為600μm以下,優選為50μm以上、更優選為400μm。另外,格子的形狀沒有特別限制,可以為大致菱形的形狀、多邊形狀(例如三角形、四邊形、六邊形)。並且,一邊的形狀除了可以為直線狀外,也可以為彎曲形狀、還可以為圓弧狀。The pattern shape of the pattern-formed layer to be plated is not particularly limited, and may be adjusted in accordance with the position at which the pattern-like metal layer to be described later is to be formed, and examples thereof include a mesh pattern and the like. In the case of the mesh pattern, the length W of one side of the lattice (opening) in the mesh pattern is preferably 800 μm or less, more preferably 600 μm or less, or preferably 50 μm or more, and more preferably 400 μm. Further, the shape of the lattice is not particularly limited, and may be a substantially rhombic shape or a polygonal shape (for example, a triangle, a quadrangle, or a hexagon). Further, the shape of one side may be a straight shape, or may be a curved shape or an arc shape.

另外,圖案狀被鍍覆層的線寬度沒有特別限制,從配置在圖案狀被鍍覆層上的圖案狀金屬層的低電阻性的方面考慮,優選為30μm以下、更優選為15μm、進一步優選為10μm、特別優選為9μm以下、最優選為7μm以下,優選為0.5μm以上、更優選為1.0μm以上。In addition, the line width of the pattern-formed layer to be plated is not particularly limited, and is preferably 30 μm or less, more preferably 15 μm, more preferably from the viewpoint of low resistance of the pattern-like metal layer disposed on the pattern-formed layer. It is 10 μm, particularly preferably 9 μm or less, and most preferably 7 μm or less, preferably 0.5 μm or more, and more preferably 1.0 μm or more.

[工序2:圖案狀金屬層形成工序][Step 2: Pattern Metal Layer Forming Process]

工序2為下述工序:對於上述工序1中形成的圖案狀被鍍覆層賦予金屬離子,對被賦予了金屬離子的圖案狀被鍍覆層進行鍍覆處理,在圖案狀被鍍覆層上形成圖案狀金屬層。如圖2(D)所示,通過實施本工序,在圖案狀被鍍覆層20上配置圖案狀金屬層22。Step 2 is a step of applying a metal ion to the pattern-formed layer to be formed in the step 1 and plating the pattern-coated layer to which the metal ions are applied, on the pattern-coated layer. A patterned metal layer is formed. As shown in FIG. 2(D), by performing this step, the patterned metal layer 22 is placed on the patterned plated layer 20.

下面分成對圖案狀被鍍覆層賦予金屬離子的工序(工序2-1)以及對被賦予了金屬離子的圖案狀被鍍覆層進行鍍覆處理的工序(工序2-2)進行說明。In the following, the step of adding a metal ion to the pattern-formed layer (step 2-1) and the step of performing a plating treatment on the pattern-formed layer to which the metal ion is applied (step 2-2) will be described.

(工序2-1:金屬離子賦予工序)(Step 2-1: Metal Ion Providing Step)

在本工序中,首先對圖案狀被鍍覆層賦予金屬離子。上述化合物來源的相互作用性基團根據其功能對被賦予的金屬離子進行附著(吸附)。更具體地說,金屬離子被賦予到被鍍覆層中和被鍍覆層表面上。In this step, first, metal ions are applied to the patterned plated layer. The interactive group derived from the above compound adheres (adsorbs) the metal ion to be imparted according to its function. More specifically, metal ions are imparted to the surface to be plated and to the surface of the layer to be plated.

金屬離子可通過化學反應而變成鍍覆催化劑,更具體地說,通過還原反應變成作為鍍覆催化劑的0價金屬。在本工序中,將金屬離子賦予到圖案狀被鍍覆層之後,可以在浸漬到鍍覆浴(例如無電解鍍覆浴)中之前通過另外的還原反應變化成0價金屬來作為鍍覆催化劑,也可以以金屬離子的狀態浸漬到鍍覆浴中,利用鍍覆浴中的還原劑變化成金屬(鍍覆催化劑)。The metal ion can be converted into a plating catalyst by a chemical reaction, and more specifically, a zero-valent metal which is a plating catalyst by a reduction reaction. In this step, after the metal ions are applied to the patterned plated layer, they may be converted into a zero-valent metal by another reduction reaction before being immersed in a plating bath (for example, an electroless plating bath) as a plating catalyst. Alternatively, it may be immersed in a plating bath in the state of metal ions, and changed into a metal (plating catalyst) by a reducing agent in the plating bath.

金屬離子優選使用金屬鹽被賦予至圖案狀被鍍覆層。作為所使用的金屬鹽,只要可溶解在適當的溶劑中並解離成金屬離子和堿基(陰離子)就沒有特別限制,可以舉出M(NO3 )n 、MCln 、M2/n (SO4 )、M3/n (PO4 )(M表示n價的金屬原子)等。作為金屬離子,可以適當地使用上述金屬鹽解離得到的金屬離子。作為具體例,例如可以舉出Ag離子、Cu離子、Al離子、Ni離子、Co離子、Fe離子、Pd離子,其中優選能夠多齒配位的離子,從能夠配位的官能團的種類數和催化劑能力的方面考慮,特別優選Ag離子、Pd離子。其中,從電氣可靠性的方面出發,特別優選Pd離子。The metal ion is preferably imparted to the patterned plated layer using a metal salt. The metal salt to be used is not particularly limited as long as it can be dissolved in a suitable solvent and dissociated into a metal ion and a sulfhydryl group (anion), and examples thereof include M(NO 3 ) n , MCl n , and M 2/n (SO). 4 ), M 3/n (PO 4 ) (M represents an n-valent metal atom), and the like. As the metal ion, a metal ion obtained by dissociation of the above metal salt can be suitably used. Specific examples include Ag ions, Cu ions, Al ions, Ni ions, Co ions, Fe ions, and Pd ions. Among them, ions capable of multidentate coordination, number of functional groups capable of coordination, and catalysts are preferable. From the viewpoint of the ability, Ag ions and Pd ions are particularly preferable. Among them, Pd ions are particularly preferable from the viewpoint of electrical reliability.

作為對圖案狀被鍍覆層賦予金屬離子的方法,可以舉出使含有金屬離子的催化劑賦予液與圖案狀被鍍覆層接觸的方法。另外,作為進行接觸的方法,例如可以在圖案狀被鍍覆層上塗布催化劑賦予液、或將形成有圖案狀被鍍覆層的基板浸漬在催化劑賦予液中。As a method of imparting a metal ion to the pattern-formed layer, a method of bringing a metal ion-containing catalyst-imparting liquid into contact with the pattern-formed layer is mentioned. Further, as a method of performing the contact, for example, a catalyst application liquid may be applied onto the pattern-coated layer or a substrate on which the pattern-coated layer is formed may be immersed in the catalyst application liquid.

催化劑賦予液的pH為3.0~7.0,從所形成的圖案狀金屬層被視認為更黑的黑色(更具體地說,從圖案狀被鍍覆層側對圖案狀金屬層進行觀察時,圖案狀金屬層的背面側(圖案狀被鍍覆層側)被視認為更黑的黑色)的方面考慮,該pH優選為3.2~6.8、更優選為3.5~6.6。The pH of the catalyst-imparting liquid is 3.0 to 7.0, and the patterned metal layer is considered to be blacker black (more specifically, when the pattern-shaped metal layer is observed from the side of the pattern-formed layer, the pattern is The pH is preferably from 3.2 to 6.8, and more preferably from 3.5 to 6.6, from the viewpoint that the back side of the metal layer (the side of the patterned layer to be plated) is considered to be blacker black.

催化劑賦予液的pH小於3.0的情況下,在鍍覆處理時鍍覆析出不充分,不形成圖案狀金屬層。此外,在催化劑賦予液的pH超過7.0的情況下,在鍍覆處理時,在未配置圖案狀被鍍覆層的基板上也有金屬層析出,不形成特定形狀的圖案狀金屬層。進而,在圖案狀被鍍覆層以外的區域發生鍍覆析出的情況下,這些金屬層的背面未能被視認為黑色。When the pH of the catalyst application liquid is less than 3.0, plating deposition is insufficient during the plating treatment, and a patterned metal layer is not formed. Further, when the pH of the catalyst application liquid exceeds 7.0, at the time of the plating treatment, the metal is also chromatographed on the substrate on which the patterned plating layer is not disposed, and the patterned metal layer having a specific shape is not formed. Further, when plating is deposited in a region other than the pattern-formed layer, the back surface of these metal layers is not considered to be black.

在催化劑賦予液中含有金屬離子。作為金屬離子的種類,可以舉出上述的金屬離子。The catalyst-imparting liquid contains metal ions. The metal ion mentioned above can be mentioned as a kind of metal ion.

在催化劑賦予液中通常含有溶劑。作為溶劑,適宜使用水或有機溶劑。作為有機溶劑,優選可滲透到圖案狀被鍍覆層中的溶劑,例如可以使用丙酮、乙醯乙酸甲酯、乙醯乙酸乙酯、乙二醇二乙酸酯、環己酮、乙醯丙酮、苯乙酮、2-(1-環己烯基)環己酮、丙二醇二乙酸酯、甘油三乙酸酯、二甘醇二乙酸酯、二氧六環、N-甲基吡咯烷酮、碳酸二甲酯、二甲基溶纖劑等。A solvent is usually contained in the catalyst-imparting liquid. As the solvent, water or an organic solvent is suitably used. As the organic solvent, a solvent which can penetrate into the patterned plated layer is preferable, and for example, acetone, ethyl acetate, ethyl acetate, ethylene glycol diacetate, cyclohexanone, and ethyl acetonide can be used. , acetophenone, 2-(1-cyclohexenyl)cyclohexanone, propylene glycol diacetate, triacetin, diethylene glycol diacetate, dioxane, N-methylpyrrolidone, Dimethyl carbonate, dimethyl cellosolve, and the like.

另外,作為溶劑使用水的情況下,水也可以為酸或堿的水溶液,作為酸性水溶液中含有的酸,例如可以舉出鹽酸、硝酸、硫酸、乙酸等;作為鹼性水溶液中含有的堿,可以舉出氫氧化鈉、氫氧化鉀、氫氧化鎂等。In addition, when water is used as the solvent, the water may be an aqueous solution of an acid or hydrazine, and examples of the acid contained in the acidic aqueous solution include hydrochloric acid, nitric acid, sulfuric acid, acetic acid, and the like; Sodium hydroxide, potassium hydroxide, magnesium hydroxide, etc. are mentioned.

催化劑賦予液的製備方法沒有特別限制,將特定的金屬鹽利用適當的溶劑溶解,根據需要使用酸或堿將pH調整為特定的範圍。The preparation method of the catalyst-imparting liquid is not particularly limited, and a specific metal salt is dissolved in a suitable solvent, and the pH is adjusted to a specific range using an acid or hydrazine as needed.

溶液中的金屬離子濃度沒有特別限制,優選為0.001~50質量%、更優選為0.005~30質量%。The concentration of the metal ions in the solution is not particularly limited, but is preferably 0.001 to 50% by mass, and more preferably 0.005 to 30% by mass.

另外,作為接觸時間,優選為30秒~24小時左右、更優選為1分鐘~1小時左右。Further, the contact time is preferably from about 30 seconds to about 24 hours, more preferably from about 1 minute to about 1 hour.

關於被鍍覆層的金屬離子的吸附量,根據所使用的鍍覆浴種類、催化劑金屬種類、圖案狀被鍍覆層的相互作用性基團種類、使用方法等的不同而不同,從鍍覆析出性的方面出發,該吸附量優選為5~1000mg/m2 、更優選為10~800mg/m2 、特別優選為20~600mg/m2The amount of adsorption of the metal ions to be plated is different depending on the type of plating bath to be used, the type of catalyst metal, the type of interactive group of the pattern-coated layer, the method of use, and the like. The amount of adsorption is preferably 5 to 1000 mg/m 2 , more preferably 10 to 800 mg/m 2 , and particularly preferably 20 to 600 mg/m 2 in terms of precipitation.

(工序2-2:鍍覆處理工序)(Step 2-2: Plating treatment process)

接下來,對被賦予了金屬離子的圖案狀被鍍覆層進行鍍覆處理。Next, the pattern-coated layer to which the metal ions are applied is subjected to a plating treatment.

鍍覆處理的方法沒有特別限制,例如可以舉出無電解鍍覆處理或電解鍍覆處理(電鍍處理)。在本工序中,可以單獨實施無電解鍍覆處理,也可以在實施無電解鍍覆處理後進一步實施電解鍍覆處理。The method of the plating treatment is not particularly limited, and examples thereof include an electroless plating treatment or an electrolytic plating treatment (electroplating treatment). In this step, the electroless plating treatment may be separately performed, or the electrolytic plating treatment may be further performed after the electroless plating treatment is performed.

另外,在本說明書中包含所謂銀鏡反應作為上述無電解鍍覆處理的一種。從而,例如通過銀鏡反應等,所附著的金屬離子被還原,可以形成所期望的圖案狀金屬層,進而在其後可以實施電解鍍覆處理。Further, in the present specification, a so-called silver mirror reaction is included as one of the above electroless plating treatments. Therefore, for example, by the silver mirror reaction or the like, the adhered metal ions are reduced, and a desired patterned metal layer can be formed, and thereafter, electrolytic plating treatment can be performed.

下面對無電解鍍覆處理和電解鍍覆處理的過程進行詳述。The process of the electroless plating treatment and the electrolytic plating treatment will be described in detail below.

無電解鍍覆處理指的是下述操作:使用溶解有在鍍覆時將要析出的金屬離子的溶液,通過化學反應使金屬析出。The electroless plating treatment refers to an operation of depositing a metal by a chemical reaction using a solution in which metal ions to be precipitated at the time of plating are dissolved.

本工序中的無電解鍍覆處理例如可如下進行:對於具備被賦予了金屬離子的圖案狀被鍍覆層的基板進行水洗,除去多餘的金屬離子,之後浸漬在無電解鍍覆浴中。作為所使用的無電解鍍覆浴,可以使用公知的無電解鍍覆浴。另外,在無電解鍍覆浴中,進行金屬離子的還原和還原之後的無電解鍍覆。The electroless plating treatment in this step can be performed, for example, by washing a substrate having a patterned plated layer to which metal ions are applied, to remove excess metal ions, and then immersing in an electroless plating bath. As the electroless plating bath to be used, a known electroless plating bath can be used. Further, in the electroless plating bath, electroless plating after reduction and reduction of metal ions is performed.

圖案狀被鍍覆層中的金屬離子的還原與上述的使用無電解鍍覆液的方式不同,也可準備催化劑活化液(還原液),作為無電解鍍覆處理前的其它工序來進行。催化劑活化液為溶解有可將金屬離子還原成0價金屬的還原劑的溶液,相對於溶液整體,還原劑的濃度優選為0.1~50質量%、更優選1~30質量%。作為還原劑,可以使用硼氫化鈉、二甲胺硼烷之類的硼系還原劑、甲醛、次亞磷酸等還原劑。The reduction of the metal ions in the patterned plated layer is different from the above-described method of using the electroless plating solution, and a catalyst activating solution (reducing solution) may be prepared as another step before the electroless plating treatment. The catalyst activating solution is a solution in which a reducing agent capable of reducing metal ions to a zero-valent metal is dissolved, and the concentration of the reducing agent is preferably 0.1 to 50% by mass, and more preferably 1 to 30% by mass based on the entire solution. As the reducing agent, a boron-based reducing agent such as sodium borohydride or dimethylamine borane, a reducing agent such as formaldehyde or hypophosphorous acid can be used.

在浸漬時,優選在浸漬的同時施加攪拌或揺動。At the time of impregnation, it is preferred to apply agitation or pulsation while immersing.

作為一般的無電解鍍覆浴的組成,除了含有溶劑(例如水)外,主要還含有1.鍍覆用的金屬離子、2.還原劑、3.提高金屬離子的穩定性的添加劑(穩定劑)。在該鍍覆浴中,除了這些成分外,還可以含有鍍覆浴的穩定劑等公知的添加劑。As a composition of a general electroless plating bath, in addition to a solvent (for example, water), it mainly contains 1. metal ions for plating, 2. a reducing agent, and an additive for improving the stability of metal ions (stabilizer). ). In addition to these components, the plating bath may contain a known additive such as a stabilizer of a plating bath.

作為無電解鍍覆浴中使用的有機溶劑,需要為能夠溶解于水的溶劑,從這方面考慮,優選使用丙酮等酮類、甲醇、乙醇、異丙醇等醇類。作為在無電解鍍覆浴中使用的金屬的種類,已知有銅、錫、鉛、鎳、金、銀、鈀、銠,其中,從導電性的方面出發,優選銅、銀、金,更優選銅。並且,優選根據上述金屬來選擇最佳的還原劑、添加劑。The organic solvent to be used in the electroless plating bath is preferably a solvent which can be dissolved in water. From this viewpoint, it is preferable to use a ketone such as acetone or an alcohol such as methanol, ethanol or isopropyl alcohol. Copper, tin, lead, nickel, gold, silver, palladium, and rhodium are known as the type of metal used in the electroless plating bath. Among them, copper, silver, gold, and the like are preferable from the viewpoint of conductivity. Copper is preferred. Further, it is preferred to select an optimum reducing agent or additive based on the above metal.

作為在無電解鍍覆浴中的浸漬時間,優選為1分鐘~6小時左右、更優選為1分鐘~3小時左右。The immersion time in the electroless plating bath is preferably from about 1 minute to 6 hours, more preferably from about 1 minute to 3 hours.

電解鍍覆處理指的是下述操作:使用溶解有在鍍覆時將要析出的金屬離子的溶液,利用電流使金屬析出。The electrolytic plating treatment refers to an operation of depositing a metal by a current using a solution in which metal ions to be precipitated at the time of plating are dissolved.

需要說明的是,如上所述,在本工序中,在上述無電解鍍覆處理後可根據需要進行電解鍍覆處理。利用這樣的方式,能夠適宜地調整所形成的圖案狀金屬層的厚度。In addition, as described above, in this step, electrolytic plating treatment may be performed as needed after the electroless plating treatment. In this manner, the thickness of the formed pattern metal layer can be appropriately adjusted.

作為電解鍍覆的方法,可以使用現有公知的方法。另外,作為電解鍍覆中使用的金屬,可以舉出銅、鉻、鉛、鎳、金、銀、錫、鋅等,從導電性的方面出發,優選銅、金、銀,更優選銅。As a method of electrolytic plating, a conventionally known method can be used. Further, examples of the metal used for the electrolytic plating include copper, chromium, lead, nickel, gold, silver, tin, zinc, and the like. From the viewpoint of conductivity, copper, gold, and silver are preferable, and copper is more preferable.

另外,通過電解鍍覆得到的圖案狀金屬層的膜厚可通過調整鍍覆浴中所含有的金屬濃度或電流密度等來進行控制。Further, the film thickness of the patterned metal layer obtained by electrolytic plating can be controlled by adjusting the metal concentration, current density, and the like contained in the plating bath.

通過上述過程形成的圖案狀金屬層的厚度沒有特別限制,可根據使用目的適當地選擇最佳厚度,從導電特性的方面考慮,該厚度優選為0.1μm以上、更優選為0.5μm以上,進一步優選為1~30μm。The thickness of the patterned metal layer formed by the above process is not particularly limited, and an optimum thickness can be appropriately selected depending on the purpose of use. From the viewpoint of electrical conductivity, the thickness is preferably 0.1 μm or more, more preferably 0.5 μm or more, and further preferably It is 1 to 30 μm.

另外,構成圖案狀金屬層的金屬的種類沒有特別限制,例如可以舉出銅、鉻、鉛、鎳、金、銀、錫、鋅等,從導電性的方面出發,優選銅、金、銀,更優選銅、銀。In addition, the type of the metal constituting the patterned metal layer is not particularly limited, and examples thereof include copper, chromium, lead, nickel, gold, silver, tin, and zinc. From the viewpoint of conductivity, copper, gold, and silver are preferable. More preferred are copper and silver.

圖案狀金屬層的圖案形狀沒有特別限制,由於圖案狀金屬層被配置在圖案狀被鍍覆層上、換言之圖案狀金屬層是沿著圖案狀被鍍覆層的形狀進行配置的,因而可根據圖案狀被鍍覆層的圖案形狀進行調整,例如可以舉出網狀圖案等。網狀圖案的圖案狀金屬層可以適當地用作觸控面板中的感測器電極。在圖案狀金屬層的圖案形狀為網狀圖案的情況下,網狀圖案內的格子(開口部)的一邊長度W的範圍、格子形狀的適宜方式、圖案狀金屬層的線寬度與上述圖案狀被鍍覆層的方式相同。The pattern shape of the pattern-shaped metal layer is not particularly limited, and since the pattern-like metal layer is disposed on the pattern-formed layer, in other words, the pattern-like metal layer is disposed along the shape of the pattern-coated layer, The pattern shape of the pattern-coated layer is adjusted, and for example, a mesh pattern or the like can be given. The patterned metal layer of the mesh pattern can be suitably used as the sensor electrode in the touch panel. When the pattern shape of the pattern metal layer is a mesh pattern, a range of one side length W of the lattice (opening) in the mesh pattern, a suitable form of the lattice shape, a line width of the pattern metal layer, and the above-described pattern shape The way to be coated is the same.

另外,在實施上述處理後的圖案狀被鍍覆層含有金屬離子還原而生成的金屬粒子。該金屬粒子以高密度分散在圖案狀被鍍覆層中。此外,如上所述,圖案狀被鍍覆層與圖案狀金屬層的介面形成複雜是形狀,由於這樣的介面形狀的影響,圖案狀金屬層被進一步視認為黑色。Further, the pattern-shaped plated layer after the above-described treatment contains metal particles produced by reduction of metal ions. The metal particles are dispersed in a pattern-like layer to be plated at a high density. Further, as described above, the interface between the patterned plated layer and the patterned metal layer is complicated in shape, and the patterned metal layer is further regarded as black due to the influence of such interface shape.

在本發明中,可以在所形成的圖案狀金屬層設置被覆層。特別是在為對圖案狀金屬層表面進行直接目視這樣的層構成的情況下,通過使圖案狀金屬層表面變黑(黑化),可得到降低圖案狀金屬層的金屬光澤效果、使銅色不顯眼的效果。除此以外,還可得到防銹效果、防遷移效果。In the present invention, a coating layer may be provided on the formed patterned metal layer. In particular, in the case of a layer structure in which the surface of the patterned metal layer is directly visually observed, by making the surface of the patterned metal layer black (blackened), the metallic gloss effect of reducing the patterned metal layer can be obtained, and copper color can be obtained. Unobtrusive effect. In addition to this, anti-rust effect and anti-migration effect can also be obtained.

作為黑化方法,有層積方法、置換方法。作為層積方法,可以舉出使用公知的被稱為黑化鍍覆(黒化めっき)的方式等來進行被覆層(黑化層)的層積的方法,可以使用Nikka Black(日本化學產業社製造)、Ebony Chrome 85系列(金屬化學工業社製造)等。另外,作為置換方法,可以舉出對圖案狀金屬層表面進行硫化或氧化來製作被覆層(黑化層)的方法、將圖案狀金屬層表面置換為更貴的金屬來製作被覆層(黑化層)的方法。作為硫化方法,有Enplate MB 438A(Meltex社製造)等,作為氧化方法,可以使用PROBOND 80(Rohm and Haas電子材料株式會社製造)等。作為置換為貴金屬的鍍覆,可以使用鈀。As a blackening method, there are a merging method and a replacement method. As a method of laminating, a method of laminating a coating layer (blackening layer) using a well-known method called blackening plating or the like can be used, and Nikka Black (Japan Chemical Industry Corporation) can be used. Manufactured, Ebony Chrome 85 series (manufactured by Metal Chemical Industry Co., Ltd.). Further, as a replacement method, a method of producing a coating layer (blackening layer) by vulcanizing or oxidizing the surface of the patterned metal layer, and replacing the surface of the patterned metal layer with a more expensive metal to produce a coating layer (blackening) Layer) method. As a method of vulcanization, Enplate MB 438A (manufactured by Meltex Co., Ltd.) or the like is used, and as the oxidation method, PROBOND 80 (manufactured by Rohm and Haas Electronic Materials Co., Ltd.) or the like can be used. As the plating substituted with a noble metal, palladium can be used.

<積層體><Laminated body>

經過上述工序形成導電性積層體,該導電性積層體具備具有2個主面的基板、配置在該基板的至少一個主面上的圖案狀被鍍覆層、以及配置在圖案狀被鍍覆層上的含有金屬成分的圖案狀金屬層(由金屬成分構成)。該導電性積層體作為所謂透明導電性積層體發揮功能,還能夠適當地用於觸控面板用途以外的其它用途(顯示幕用途)中。The conductive laminate is formed by the above-described steps, and the conductive laminate includes a substrate having two main faces, a patterned plated layer disposed on at least one main surface of the substrate, and a patterned plated layer. A patterned metal layer (made of a metal component) containing a metal component. This conductive laminated body functions as a so-called transparent conductive laminated body, and can be suitably used for other uses (display screen use) other than touch panel use.

另外,圖案狀被鍍覆層含有相互作用性基團。作為其一個方式,如上所述,對上述被鍍覆層形成用組合物以圖案狀賦予能量來形成。此外,作為圖案狀金屬層的一個方式,進行鍍覆處理來形成。Further, the patterned plated layer contains an interactive group. As one embodiment, as described above, the composition for forming a layer to be plated is formed by applying energy in a pattern. Moreover, as one aspect of the pattern metal layer, it is formed by performing a plating process.

在導電性積層體中,可以僅在基板的一個主面上配置圖案狀被鍍覆層和圖案狀金屬層,也可以在基板的2個主面的兩面配置圖案狀被鍍覆層和圖案狀金屬層。需要說明的是,在基板的兩面配置圖案狀被鍍覆層和圖案狀金屬層的情況下,對基板的兩面實施上述工序1和工序2即可。In the conductive laminate, the pattern-plated layer and the pattern-like metal layer may be disposed only on one main surface of the substrate, or the pattern-plated layer and the pattern may be disposed on both surfaces of the two main surfaces of the substrate. Metal layer. In the case where the pattern-coated layer and the pattern-like metal layer are disposed on both surfaces of the substrate, the above steps 1 and 2 may be performed on both surfaces of the substrate.

如上所述,在本發明的導電性積層體中,在圖案狀被鍍覆層中含有構成圖案狀金屬層的金屬成分。例如,在圖案狀金屬層為銅鍍覆層(由銅構成的金屬層)的情況下,在圖案狀被鍍覆層中含有銅成分。As described above, in the conductive laminate of the present invention, the metal component constituting the patterned metal layer is contained in the pattern-coated layer. For example, when the patterned metal layer is a copper plating layer (a metal layer made of copper), a copper component is contained in the pattern-formed layer.

另外,在本發明的導電性積層體中,在使用能量分散型X射線分析法(EDS法)對圖案狀被鍍覆層和圖案狀金屬層的斷面進行組成分析時,相對於構成圖案狀金屬層的金屬成分來源的平均峰強度,圖案狀被鍍覆層所含有的金屬成分來源的平均峰強度的比為0.5~0.95(優選為0.65~0.95、更優選為0.8~0.95)。Further, in the conductive laminate of the present invention, when the composition of the pattern-coated layer and the patterned metal layer is analyzed by energy dispersive X-ray analysis (EDS method), the pattern is formed. The ratio of the average peak intensity of the metal component source of the metal layer to the average peak intensity of the metal component source contained in the pattern-formed layer is 0.5 to 0.95 (preferably 0.65 to 0.95, more preferably 0.8 to 0.95).

更具體地說,首先,沿著導電性積層體的基板的法線方向對圖案狀被鍍覆層和圖案狀金屬層這兩者進行切斷,使用能量分散型X射線分析法對此時的斷面進行組成分析。由圖案狀金屬層的區域觀測構成圖案狀金屬層的金屬成分來源的峰。例如,在圖案狀金屬層為銅層的情況下,觀測銅來源的峰。此外,如上所述,在圖案狀被鍍覆層中含有與圖案狀金屬層相同的金屬成分。因此,由圖案狀被鍍覆層的區域也可觀測所含有的金屬成分來源的峰。More specifically, first, both the pattern-coated layer and the pattern-like metal layer are cut along the normal direction of the substrate of the conductive laminate, and the energy-dispersive X-ray analysis method is used for this. The section is analyzed for composition. A peak derived from a metal component constituting the patterned metal layer is observed from a region of the patterned metal layer. For example, in the case where the patterned metal layer is a copper layer, a peak derived from copper is observed. Further, as described above, the same metal component as the pattern metal layer is contained in the pattern-like plated layer. Therefore, the peak derived from the metal component contained can also be observed from the region of the patterned plated layer.

接下來,分別計算出構成圖案狀金屬層的金屬成分來源的平均峰強度Pa和圖案狀被鍍覆層中所含有的金屬成分來源的平均峰強度Pb,計算出平均峰強度Pb相對於平均峰強度Pa的比(Pb/Pa)。若所得到的比(Pb/Pa)為上述範圍內,則圖案狀被鍍覆層中所含有的金屬成分量為規定量,可得到所期望的效果。Next, the average peak intensity Pa of the source of the metal component constituting the patterned metal layer and the average peak intensity Pb of the source of the metal component contained in the patterned plated layer are respectively calculated, and the average peak intensity Pb is calculated with respect to the average peak. The ratio of the intensity Pa (Pb/Pa). When the obtained ratio (Pb/Pa) is within the above range, the amount of the metal component contained in the pattern-formed layer to be plated is a predetermined amount, and a desired effect can be obtained.

另外,作為平均峰強度Pa的計算方法,相對於通過上述方法得到的圖案狀金屬層的斷面,沿著深度方向進行基於能量分散型X射線分析法的組成分析,分別計算出任意10點以上的峰強度,將它們的算術平均值作為平均峰強度Pa。In addition, as a method of calculating the average peak intensity Pa, the composition analysis by the energy dispersion type X-ray analysis method is performed along the depth direction with respect to the cross section of the pattern metal layer obtained by the above method, and any 10 points or more is calculated. The peak intensities are taken as the average peak intensity Pa.

另外,關於平均峰強度Pb的計算方法,也相對於通過上述方法得到的圖案狀被鍍覆層的斷面,沿著深度方向進行基於能量分散型X射線分析法的組成分析,分別計算出任意10點以上的峰強度,將它們的算術平均值作為平均峰強度Pb。Further, regarding the calculation method of the average peak intensity Pb, the composition analysis by the energy dispersive X-ray analysis method is performed along the depth direction with respect to the cross section of the pattern-like plated layer obtained by the above method, and the calculation is performed arbitrarily. The peak intensities of 10 points or more are taken as the average peak intensity Pb.

導電性積層體的JIS K7361-1全光線透過率沒有特別限制,從應用於觸控面板用途時的視認性更為良好的方面考慮,該全光線透過率優選為75%以上、更優選為80%以上。上限沒有特別限制,通常情況下多為98%以下。The total light transmittance of JIS K7361-1 of the conductive laminated body is not particularly limited, and the total light transmittance is preferably 75% or more, and more preferably 80, from the viewpoint of better visibility when applied to a touch panel. %the above. The upper limit is not particularly limited, and is usually 98% or less.

需要說明的是,全光線透過率可利用NDH7000(日本電飾工業製造)進行評價。It should be noted that the total light transmittance can be evaluated by using NDH7000 (manufactured by Nippon Denshi Kogyo Co., Ltd.).

通過上述處理得到的導電性積層體優選滿足下述要件X和要件Y的至少一者。The conductive laminate obtained by the above treatment preferably satisfies at least one of the following requirements X and Y.

要件X:自圖案狀被鍍覆層與圖案狀金屬層的介面起在圖案狀被鍍覆層側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子。Requirement X: Metal particles having an average particle diameter of 10 to 1000 nm exist in a surface layer region of 500 nm in the direction of the side of the pattern-coated layer from the interface between the pattern-coated layer and the pattern-like metal layer.

要件Y:圖案狀被鍍覆層與圖案狀金屬層的介面具有凹凸形狀,凹凸形狀的算術平均粗糙度Ra為5~1000nm,凹凸形狀的凹部間的平均距離為10~1000nm。Requirement Y: The interface between the pattern-formed layer and the pattern-like metal layer has an uneven shape, and the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 to 1000 nm.

另外,在上述要件X和上述要件Y的定義中,除了所使用的層的種類以外,其它與後述第2實施方式中敘述的要件A和要件B相同,因而其詳細內容在下文敘述。In addition, the definition of the above-described requirement X and the above-described requirement Y is the same as the requirement A and the requirement B described in the second embodiment to be described later, except for the type of the layer to be used, and the details thereof will be described below.

所得到的導電性積層體能夠適宜地用於觸控面板(優選靜電容量式觸控面板)中。更具體地說,能夠適用作構成觸控面板中的觸控感測器的部件,圖案狀金屬層能夠適宜地應用於感知靜電容量變化的感測器電極、用於對感測器電極施加電壓的引出配線(周邊配線)等。The obtained conductive laminate can be suitably used in a touch panel (preferably a capacitive touch panel). More specifically, it can be applied as a component constituting a touch sensor in a touch panel, and the patterned metal layer can be suitably applied to a sensor electrode that senses a change in electrostatic capacitance, and is used to apply a voltage to the sensor electrode. Lead wiring (peripheral wiring), etc.

在用於觸控面板時,有時覆蓋層或OCA層等相鄰接,在這些鄰接層中,出於防止銅銹的目的,可以添加十一烷二酸、十二烷二酸、十三烷二酸等直鏈烷基二羧酸、磷酸單甲酯、磷酸單乙酯等磷酸酯化合物、喹哪啶酸等吡啶系化合物、三唑、羧基苯並三唑、苯並三唑、萘酚三唑等三唑系、1H-四唑環等四唑環類、苯並四唑環等四唑環系、4,4'-亞丁基雙(6-叔丁基-3-甲基苯酚)等雙酚系、季戊四-四[3-(3,5-二叔丁基-4-羥基苯基)丙酸酯]等位阻酚系、水楊酸衍生物系、醯肼衍生物、芳香族磷酸酯、硫脲類、甲基苯並三唑或2-巰基噁唑硫醇、甲基苯並噻唑、巰基噻唑啉等具有巰基的化合物、三嗪環化合物。When used in a touch panel, sometimes a cover layer or an OCA layer or the like is adjacently connected, and in these adjacent layers, undecanedioic acid, dodecanedioic acid, and tridecane may be added for the purpose of preventing copper rust. a phosphate compound such as a linear alkyl dicarboxylic acid such as a diacid, a monomethyl phosphate or a monoethyl phosphate; a pyridine compound such as quinaldine; a triazole, a carboxybenzotriazole, a benzotriazole or a naphthol; a triazole ring such as triazole, a tetrazole ring such as a 1H-tetrazole ring, a tetrazole ring system such as a benzotetrazole ring, or a 4,4'-butylene bis(6-tert-butyl-3-methylphenol). A bisphenol-based, pentaerythritol-tetrakis[3-(3,5-di-tert-butyl-4-hydroxyphenyl)propionate]-hindered phenolic system, a salicylic acid derivative system, an anthracene derivative A compound having a mercapto group such as an aromatic phosphate, a thiourea, a methylbenzotriazole or a 2-mercapto-oxazolthiol, a methylbenzothiazole or a mercaptothiazoline, or a triazine ring compound.

此外,在鄰接層中可以添加冠醚、環狀磷化合物之類的環狀化合物。Further, a cyclic compound such as a crown ether or a cyclic phosphorus compound may be added to the adjacent layer.

此外,在鄰接層中還可以添加烷基苯磺酸鹽、直鏈烷基苯磺酸鹽、萘磺酸鹽、鏈烯基琥珀酸鹽等陰離子表面活性劑、PVP等具有作為路易士堿的性質的水溶性高分子、芳基磺酸/鹽聚合物、聚苯乙烯磺酸、聚烯丙基磺酸、聚甲代烯丙基磺酸、聚乙烯基磺酸、聚異戊二烯磺酸、丙烯酸-3-磺基丙酯均聚物、甲基丙烯酸-3-磺基丙酯均聚物、2-羥基-3-丙烯醯胺丙烷磺酸均聚物等含有磺酸基的聚合物。Further, an anionic surfactant such as an alkylbenzenesulfonate, a linear alkylbenzenesulfonate, a naphthalenesulfonate or an alkenylsuccinate may be added to the adjacent layer, and PVP or the like may be used as the Lewis. Water-soluble polymer, arylsulfonic acid/salt polymer, polystyrenesulfonic acid, polyallylsulfonic acid, polymethallylsulfonic acid, polyvinylsulfonic acid, polyisoprenesulfonate Sulfonic acid group-containing polymerization of acid, -3-sulfopropyl acrylate homopolymer, -3-sulfopropyl methacrylate homopolymer, 2-hydroxy-3-propenylamine propane sulfonic acid homopolymer Things.

另外,在鄰接層中還可以添加五氧化銻水合物、鋁偶聯劑、鋯醇鹽等金屬螯合化合物、鋅化合物、鋁化合物、鋇化合物、鍶化合物和鈣化合物。作為鋅化合物,有磷酸鋅、鉬酸鋅、硼酸鋅、氧化鋅等。作為鋁化合物,有三聚磷酸二氫鋁、磷鉬酸鋁等。作為鋇化合物,有偏硼酸鋇等。作為鍶化合物,有碳酸鍶、氧化鍶、乙酸鍶、偏硼酸鍶、金屬鍶等。作為鈣化合物,有磷酸鈣、鉬酸鈣。Further, a metal chelate compound such as a ruthenium pentoxide hydrate, an aluminum coupling agent, or a zirconium alkoxide, a zinc compound, an aluminum compound, a ruthenium compound, a ruthenium compound, and a calcium compound may be added to the adjacent layer. Examples of the zinc compound include zinc phosphate, zinc molybdate, zinc borate, and zinc oxide. Examples of the aluminum compound include aluminum dihydrogen triphosphate and aluminum phosphomolybdate. As the ruthenium compound, there are bismuth metaborate or the like. Examples of the ruthenium compound include cesium carbonate, ruthenium oxide, ruthenium acetate, bismuth metaborate, and metal ruthenium. As the calcium compound, there are calcium phosphate and calcium molybdate.

此外,在鄰接層中還可以添加過硫酸銨、過硫酸鉀、過氧化氫等氧化劑。Further, an oxidizing agent such as ammonium persulfate, potassium persulfate or hydrogen peroxide may be added to the adjacent layer.

此外,在鄰接層中還可以組合添加二氯異氰脲酸鹽與偏矽酸鈉五水合物。Further, dichloroisocyanurate and sodium metasilicate pentahydrate may be added in combination in the adjacent layer.

此外還可以使用公知的銅腐蝕防止劑。並且,這些化合物可以含有2種以上來使用。Further, a known copper corrosion inhibitor can also be used. Further, these compounds may be used in combination of two or more kinds.

作為上述第1實施方式的變形例,在基板上可以進一步包含底塗層。更具體地說,如圖3所示,在基板12上可以進一步相鄰接地配置底塗層40。通過在基板與圖案狀被鍍覆層之間配置底塗層,兩者的密合性進一步提高。As a modification of the first embodiment, an undercoat layer may be further included on the substrate. More specifically, as shown in FIG. 3, the undercoat layer 40 may be further disposed adjacent to the substrate 12 on the substrate 12. By providing an undercoat layer between the substrate and the patterned plated layer, the adhesion between the two is further improved.

底塗層的厚度沒有特別限制,通常優選為0.01~100μm、更優選為0.05~20μm、進一步優選為0.05~10μm。The thickness of the undercoat layer is not particularly limited, but is usually preferably 0.01 to 100 μm, more preferably 0.05 to 20 μm, still more preferably 0.05 to 10 μm.

底塗層的材料沒有特別限制,優選與基板的密合性良好的樹脂。作為樹脂的具體例,例如可以為熱固性樹脂,可以為熱塑性樹脂,還可以為它們的混合物,例如作為熱固性樹脂,可以舉出環氧樹脂、酚樹脂、聚醯亞胺樹脂、聚酯樹脂、雙馬來醯亞胺樹脂、聚烯烴系樹脂、異氰酸酯系樹脂等。作為熱塑性樹脂,例如可以舉出苯氧基樹脂、聚醚碸、聚碸、聚亞苯基碸、聚苯硫醚、聚苯基醚、聚醚醯亞胺、ABS樹脂等。The material of the undercoat layer is not particularly limited, and a resin having good adhesion to the substrate is preferable. Specific examples of the resin may be, for example, a thermosetting resin, and may be a thermoplastic resin or a mixture thereof. Examples of the thermosetting resin include an epoxy resin, a phenol resin, a polyimide resin, a polyester resin, and a double resin. Maleic imine resin, polyolefin resin, isocyanate resin, and the like. Examples of the thermoplastic resin include a phenoxy resin, polyether oxime, polyfluorene, polyphenylene fluorene, polyphenylene sulfide, polyphenyl ether, polyether sulfimine, and ABS resin.

熱塑性樹脂與熱固性樹脂分別可以單獨使用、也可以將兩種以上合用。還可以使用含有氰基的樹脂,具體地說,可以使用ABS樹脂、日本特開2010-84196號[0039]~[0063]記載的“含有在側鏈具有氰基的單元的聚合物”。The thermoplastic resin and the thermosetting resin may be used singly or in combination of two or more. Further, a resin containing a cyano group can be used. Specifically, a "polymer containing a unit having a cyano group in a side chain" described in JP-A-2010-84196 [0039] to [0063] can be used.

此外,還可以使用NBR橡膠(丙烯腈・聚丁橡膠)、SBR橡膠(丁苯橡膠)等橡膠成分。Further, a rubber component such as NBR rubber (acrylonitrile, butadiene rubber) or SBR rubber (styrene-butadiene rubber) can also be used.

作為構成底塗層的材料的適宜方式之一,可以舉出具有可被氫化的共軛二烯化合物單元的聚合物。共軛二烯化合物單元是指共軛二烯化合物來源的重複單元。作為共軛二烯化合物,只要為具有含有被一個單鍵隔開的二個碳-碳雙鍵的分子結構的化合物就沒有特別限制。One of suitable methods for constituting the material of the undercoat layer is a polymer having a conjugated diene compound unit which can be hydrogenated. The conjugated diene compound unit means a repeating unit derived from a conjugated diene compound. The conjugated diene compound is not particularly limited as long as it has a molecular structure containing two carbon-carbon double bonds separated by one single bond.

作為共軛二烯化合物來源的重複單元的適宜方式之一,可以舉出通過具有丁二烯骨架的化合物的聚合反應而生成的重複單元。One of suitable methods for the repeating unit derived from the conjugated diene compound is a repeating unit which is produced by a polymerization reaction of a compound having a butadiene skeleton.

上述共軛二烯化合物單元可以被氫化,在含有被氫化的共軛二烯化合物單元的情況下,圖案狀金屬層的密合性進一步提高、是優選的。即,共軛二烯化合物來源的重複單元中的雙鍵可以被氫化。The conjugated diene compound unit can be hydrogenated, and when the hydrogenated conjugated diene compound unit is contained, the adhesion of the patterned metal layer is further improved, which is preferable. That is, the double bond in the repeating unit derived from the conjugated diene compound can be hydrogenated.

在具有可以被氫化的共軛二烯化合物單元的聚合物中,可以含有上述的相互作用性基團。In the polymer having a conjugated diene compound unit which can be hydrogenated, the above-mentioned interactive group may be contained.

作為該聚合物的適宜方式,可以舉出丁腈橡膠(NBR)、含有羧基的丁腈橡膠(XNBR)、丙烯腈-丁二烯-異戊二烯橡膠(NBIR)、丙烯腈-丁二烯-苯乙烯共聚物(ABS樹脂)或它們的氫化物(例如氫化丁腈橡膠)等。Suitable examples of the polymer include nitrile rubber (NBR), carboxyl group-containing nitrile rubber (XNBR), acrylonitrile-butadiene-isoprene rubber (NBIR), and acrylonitrile-butadiene. a styrene copolymer (ABS resin) or a hydride thereof (for example, hydrogenated nitrile rubber) or the like.

在底塗層中可以含有其它添加劑(例如增敏劑、抗氧化劑、抗靜電劑、紫外線吸收劑、填料、粒子、阻燃劑、表面活性劑、潤滑劑、增塑劑等)。Other additives (such as sensitizers, antioxidants, antistatic agents, ultraviolet absorbers, fillers, particles, flame retardants, surfactants, lubricants, plasticizers, etc.) may be included in the undercoat layer.

底塗層的形成方法沒有特別限制,可以舉出將所使用的樹脂層積在基板上的方法、將所使用的樹脂溶解在可溶解必要成分的溶劑中並利用塗布等方法在基板表面上進行塗布・乾燥的方法等。The method for forming the undercoat layer is not particularly limited, and a method of laminating the resin to be used on the substrate, dissolving the resin to be used in a solvent capable of dissolving the necessary component, and performing the coating on the surface of the substrate by a method such as coating may be mentioned. Coating and drying methods.

關於塗布方法中的加熱溫度與時間,選擇塗布溶劑可充分乾燥的條件即可,從製造適性的方面考慮,優選選擇加熱溫度為200℃以下、時間為60分鐘以內的範圍的加熱條件,更優選選擇加熱溫度為40~100℃、時間為20分鐘以內的範圍的加熱條件。另外,所使用的溶劑根據所使用的樹脂來適當選擇最佳的溶劑(例如環己酮、甲基乙基酮)。In the coating method, the heating temperature and the time of the coating method may be selected so that the coating solvent can be sufficiently dried. From the viewpoint of the production suitability, it is preferred to select a heating condition in a range of a heating temperature of 200 ° C or less and a time of 60 minutes or less. Heating conditions in a range of a heating temperature of 40 to 100 ° C and a time of 20 minutes or less are selected. Further, the solvent to be used is appropriately selected depending on the resin to be used (for example, cyclohexanone or methyl ethyl ketone).

在使用配置有上述底塗層的基板的情況下,通過在底塗層上實施上述工序1和工序2來得到所期望的導電性積層體。When the substrate on which the undercoat layer is disposed is used, the desired conductive laminate is obtained by performing the above steps 1 and 2 on the undercoat layer.

<<第2實施方式>><<2th embodiment>>

作為本發明的觸控面板用導電性積層體的第2實施方式,可以舉出下述的觸控面板用導電性積層體,該觸控面板用導電性積層體依敘述順序具有基板、圖案狀樹脂層以及圖案狀金屬層,該基板具有2個主面,該圖案狀樹脂層配置在基板的至少一個主面上,該圖案狀金屬層配置在圖案狀樹脂層上,該觸控面板用導電性積層體滿足下述要件A和B的至少一者。The second embodiment of the conductive laminated body for a touch panel of the present invention includes the following conductive laminated body for a touch panel, and the conductive laminated body for the touch panel has a substrate and a pattern in the stated order. a resin layer and a patterned metal layer having two main faces, wherein the pattern-like resin layer is disposed on at least one main surface of the substrate, the patterned metal layer is disposed on the pattern-like resin layer, and the touch panel is electrically conductive The colloidal body satisfies at least one of the following requirements A and B.

要件A:自圖案狀樹脂層與圖案狀金屬層的介面起在圖案狀樹脂層側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子。Requirement A: Metal particles having an average particle diameter of 10 to 1000 nm exist in a surface layer region of 500 nm in the direction of the pattern-like resin layer from the interface between the patterned resin layer and the patterned metal layer.

要件B:圖案狀樹脂層與圖案狀金屬層的介面具有凹凸形狀,凹凸形狀的算術平均粗糙度Ra為5~1000nm,凹凸形狀的凹部間的平均距離為10~1000nm。Requirement B: The interface between the pattern-like resin layer and the patterned metal layer has an uneven shape, and the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 to 1000 nm.

在為上述構成的觸控面板用導電性積層體時,可得到所期望的效果。When the conductive laminated body for a touch panel configured as described above is used, a desired effect can be obtained.

上述觸控面板用導電性積層體的第2實施方式中的基板與上述第1實施方式中說明的基板相同,省略其說明。The substrate in the second embodiment of the conductive laminate for a touch panel is the same as the substrate described in the first embodiment, and the description thereof is omitted.

上述觸控面板用導電性積層體的第2實施方式中,構成圖案狀樹脂層的樹脂的種類沒有特別限制,可以使用公知的樹脂,例如,可以為熱固性樹脂、可以為熱塑性樹脂、並且還可以為它們的混合物。作為熱固性樹脂和熱塑性樹脂的示例,可以舉出在上述第1實施方式的底塗層中使用的熱固性樹脂和熱塑性樹脂等。In the second embodiment of the conductive laminated body for a touch panel, the type of the resin constituting the patterned resin layer is not particularly limited, and a known resin can be used. For example, a thermosetting resin, a thermoplastic resin, or a thermoplastic resin can be used. For their mixture. Examples of the thermosetting resin and the thermoplastic resin include a thermosetting resin and a thermoplastic resin used in the undercoat layer of the first embodiment described above.

此外,作為圖案狀樹脂層的形成中使用的樹脂的適宜方式,可以舉出對上述具有相互作用性基團和聚合性基團的化合物賦予能量而形成的樹脂、具有可以被氫化的共軛二烯化合物單元的聚合物。具有相互作用性基團和聚合性基團的化合物以及具有可以被氫化的共軛二烯化合物單元的聚合物的定義如上所述。In addition, as a suitable aspect of the resin used for formation of the pattern-like resin layer, a resin formed by imparting energy to the compound having an interactive group and a polymerizable group, and a conjugated second which can be hydrogenated are mentioned. a polymer of an olefinic compound unit. The definition of a compound having an interactive group and a polymerizable group and a polymer having a conjugated diene compound unit which can be hydrogenated is as described above.

構成圖案狀金屬層的金屬的種類沒有特別限制,例如可以舉出銅、鉻、鉛、鎳、金、銀、錫、鋅等,從導電性的方面出發,優選銅、金、銀,更優選銅、銀。The type of the metal constituting the patterned metal layer is not particularly limited, and examples thereof include copper, chromium, lead, nickel, gold, silver, tin, and zinc. From the viewpoint of conductivity, copper, gold, and silver are preferable, and more preferably. Copper, silver.

圖案狀金屬層的圖案形狀沒有特別限制,例如可以舉出網狀圖案等。在圖案狀金屬層的圖案形狀為網狀圖案的情況下,網狀圖案內的格子(開口部)的一邊長度W的範圍、格子形狀的適宜方式、圖案狀金屬層的線寬度與上述圖案狀被鍍覆層的方式相同。The pattern shape of the pattern metal layer is not particularly limited, and examples thereof include a mesh pattern and the like. When the pattern shape of the pattern metal layer is a mesh pattern, a range of one side length W of the lattice (opening) in the mesh pattern, a suitable form of the lattice shape, a line width of the pattern metal layer, and the above-described pattern shape The way to be coated is the same.

本實施方式的觸控面板用導電性積層體滿足下述要件A和B的至少一者。The conductive laminated body for a touch panel of the present embodiment satisfies at least one of the following requirements A and B.

要件A:自圖案狀樹脂層與圖案狀金屬層的介面起在圖案狀樹脂層側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子。Requirement A: Metal particles having an average particle diameter of 10 to 1000 nm exist in a surface layer region of 500 nm in the direction of the pattern-like resin layer from the interface between the patterned resin layer and the patterned metal layer.

要件B:圖案狀樹脂層與圖案狀金屬層的介面具有凹凸形狀,凹凸形狀的算術平均粗糙度Ra為5~1000nm,凹凸形狀的凹部間的平均距離為10~1000nm。Requirement B: The interface between the pattern-like resin layer and the patterned metal layer has an uneven shape, and the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 to 1000 nm.

關於上述要件A,通過在自圖案狀樹脂層與圖案狀金屬層的介面起圖案狀樹脂層側方向的表層區域(換言之,自圖案狀樹脂層的圖案狀金屬層側的表面起的圖案狀樹脂層側方向的表層區域)含有特定尺寸的金屬粒子,從基板側進入的光由於該金屬粒子的表面等離子共振而被吸收,圖案狀金屬層被視認為更黑的黑色。In the above-mentioned requirement A, the surface layer region in the direction of the pattern-like resin layer from the interface between the pattern-like resin layer and the pattern-like metal layer (in other words, the pattern-like resin from the surface on the pattern-like metal layer side of the pattern-like resin layer) The surface layer region in the layer side direction contains metal particles of a specific size, and light entering from the substrate side is absorbed by the surface plasmon resonance of the metal particles, and the patterned metal layer is regarded as blacker black.

金屬粒子的平均粒徑為10~1000nm,從圖案狀金屬層被視認為更黑的黑色的方面考慮,優選為15~900nm、更優選為20~800nm。The metal particles have an average particle diameter of 10 to 1000 nm, and are preferably 15 to 900 nm, and more preferably 20 to 800 nm, from the viewpoint that the patterned metal layer is considered to be blacker black.

另外,上述平均粒徑為金屬粒子的一次粒徑的平均值,其是利用電子顯微鏡測定任意10個以上的金屬粒子的直徑並將它們算術平均而得到的值。另外,金屬粒子不是正圓狀的情況下,將長徑作為直徑。Further, the average particle diameter is an average value of the primary particle diameters of the metal particles, and is a value obtained by measuring the diameters of arbitrary ten or more metal particles by an electron microscope and arithmetically averaging them. Further, when the metal particles are not in a perfect circular shape, the long diameter is taken as the diameter.

另外,在對金屬粒子進行觀察時,利用電子顯微鏡(例如SEM觀察)對導電性積層體的斷面(導電性積層體中的垂直於基板表面的斷面)進行觀察,對於自圖案狀樹脂層與圖案狀金屬層的介面(交界線)起在圖案狀樹脂層側方向上直到500nm的表層區域是否含有特定尺寸的金屬粒子進行確認。Further, when the metal particles are observed, the cross section of the conductive laminated body (the cross section perpendicular to the surface of the substrate in the conductive laminated body) is observed by an electron microscope (for example, SEM observation), and the self-patterned resin layer is observed. It is confirmed whether or not the surface layer of the pattern-like metal layer (the boundary line) has a surface layer of 500 nm in the direction of the pattern-like resin layer side.

此外,上述表層區域中,在圖案狀樹脂層的厚度超過500nm的情況下,表層區域是指自圖案狀樹脂層與圖案狀金屬層的介面起在圖案狀樹脂層側方向最多500nm的區域;在圖案狀樹脂層的厚度為500nm以下的情況下,表層區域是指整個圖案狀樹脂層。In the surface layer region, when the thickness of the pattern-like resin layer exceeds 500 nm, the surface layer region refers to a region of at most 500 nm from the interface between the pattern-like resin layer and the patterned metal layer in the direction of the pattern-like resin layer side; When the thickness of the pattern-like resin layer is 500 nm or less, the surface layer region means the entire pattern-like resin layer.

關於上述要件B,通過使圖案狀樹脂層與圖案狀金屬層的介面具有特定的凹凸形狀(凹凸面),從基板側進入的光的反射被該凹凸形狀抑制,作為結果,圖案狀金屬層被視認為更黑的黑色。In the above-described requirement B, when the interface between the pattern-like resin layer and the patterned metal layer has a specific uneven shape (concavo-convex surface), the reflection of light entering from the substrate side is suppressed by the uneven shape, and as a result, the patterned metal layer is Think blacker black.

圖案狀樹脂層與圖案狀金屬層的介面的凹凸形狀的算術平均粗糙度Ra為5~1000nm,從圖案狀金屬層被視認為更黑的黑色的方面考慮,優選為10~900nm、更優選為15~800nm。The arithmetic mean roughness Ra of the unevenness of the interface between the patterned resin layer and the patterned metal layer is 5 to 1000 nm, and is preferably 10 to 900 nm, more preferably 10 to 900 nm, from the viewpoint that the patterned metal layer is considered to be blacker black. 15 to 800 nm.

作為上述算術平均粗糙度Ra的測定方法,可以利用電子顯微鏡(例如SEM觀察)對導電性積層體的斷面(導電性積層體中的垂直於基板表面的斷面)進行觀察,求出圖案狀樹脂層與圖案狀金屬層的介面(交界線)的算術平均粗糙度Ra。更具體地說,介面的算術平均粗糙度Ra被定義為如下求出的值:利用電子顯微鏡對圖案狀樹脂層與圖案狀金屬層的介面拍攝照片後,描繪出照片中的介面的凹凸形狀,將該描繪痕跡看作表面形狀,將按照JIS B 0601-2001(ISO4287-1997)中規定的算術平均粗糙度(Ra)的計算方法求出的值定義為該算術平均粗糙度Ra。As a method of measuring the arithmetic mean roughness Ra, the cross section of the conductive laminated body (the cross section perpendicular to the surface of the substrate in the conductive laminated body) can be observed by an electron microscope (for example, SEM observation) to obtain a pattern. The arithmetic mean roughness Ra of the interface (boundary line) between the resin layer and the patterned metal layer. More specifically, the arithmetic mean roughness Ra of the interface is defined as a value obtained by photographing the interface between the pattern-like resin layer and the patterned metal layer by an electron microscope, and then drawing the uneven shape of the interface in the photograph. The trace of the trace is regarded as the surface shape, and the value obtained by the calculation method of the arithmetic mean roughness (Ra) prescribed in JIS B 0601-2001 (ISO4287-1997) is defined as the arithmetic mean roughness Ra.

此外,凹凸形狀的凹部間的平均距離為10~1000nm,從圖案狀金屬層被視認為更黑的黑色的方面考慮,優選為15~900nm、更優選為20~800nm。In addition, the average distance between the concave portions of the uneven shape is 10 to 1000 nm, and is preferably 15 to 900 nm, and more preferably 20 to 800 nm from the viewpoint that the patterned metal layer is considered to be blacker black.

上述凹部相當於圖案狀金屬層中的金屬進入到圖案狀樹脂層內部的部分,換言之,其也可以說是在圖案狀金屬層的基板側突出的凸部。The concave portion corresponds to a portion in which the metal in the patterned metal layer enters the inside of the patterned resin layer, in other words, it may be a convex portion that protrudes on the substrate side of the patterned metal layer.

上述凹部間的平均距離是指相鄰的凹部間的距離的平均值,為對於至少10組以上的相鄰凹部間的距離進行測定並將它們算術平均而得到的值。另外,作為上述凹部間的距離的測定方法,與上述算術平均粗糙度Ra同樣地,可以舉出利用電子顯微鏡(例如SEM觀察)對導電性積層體中的垂直於基板表面的斷面進行觀察、對圖案狀樹脂層與圖案狀金屬層的介面(交界線)進行觀察的方法。The average distance between the concave portions is an average value of the distances between adjacent concave portions, and is a value obtained by measuring the distance between at least 10 or more adjacent concave portions and arithmetically averaging them. In addition, as a method of measuring the distance between the concave portions, similarly to the above-described arithmetic mean roughness Ra, a cross section perpendicular to the surface of the substrate in the conductive laminated body can be observed by an electron microscope (for example, SEM observation). A method of observing an interface (boundary line) between the patterned resin layer and the patterned metal layer.

作為上述觸控面板用導電性積層體的第2實施方式的製造方法,只要能夠形成上述的結構,對其方法就沒有特別限制,例如,在形成圖案狀樹脂層時使用具有相互作用性基團和聚合性基團的化合物的情況下,可以實施上述第1實施方式和第2實施方式的製造方法。The manufacturing method of the second embodiment of the conductive laminated body for a touch panel is not particularly limited as long as the above-described structure can be formed. For example, an interactive group is used in forming a patterned resin layer. In the case of a compound having a polymerizable group, the production methods of the first embodiment and the second embodiment described above can be carried out.

作為其它製造方法,例如可以舉出對圖案狀樹脂層表面實施粗面化處理,其後利用濺射等乾燥工藝或上述鍍覆處理等濕式工藝來形成圖案狀金屬層的方法。As another manufacturing method, for example, a method of roughening the surface of the patterned resin layer and then forming a patterned metal layer by a wet process such as sputtering or the above-described plating treatment may be mentioned.

上述第2實施方式的導電性積層體的全光線透過率沒有特別限制,其適宜範圍與上述第1實施方式的導電性積層體的全光線透過率的適宜範圍相同。The total light transmittance of the conductive laminate of the second embodiment is not particularly limited, and the suitable range is the same as the suitable range of the total light transmittance of the conductive laminate of the first embodiment.

另外,可以按照與第1實施方式相同的方式在基板上進一步相鄰地配置底塗層。Further, the undercoat layer may be further disposed adjacent to the substrate in the same manner as in the first embodiment.

[實施例][Examples]

以下、通過實施例進一步詳細說明本發明,但本發明並不限於這些實施例。Hereinafter, the present invention will be described in further detail by way of examples, but the invention is not limited thereto.

(合成例1:聚合物1)(Synthesis Example 1: Polymer 1)

在2L的三口燒瓶中裝入乙酸乙酯1L、2-氨基乙醇159g,利用冰浴冷卻。將內溫調節為20℃以下,向其中滴加2-溴異丁酸溴化物150g。其後將內溫升至室溫(25℃),進行2小時反應。反應終止後追加蒸餾水300mL,使反應停止。其後將乙酸乙酯相利用蒸餾水300mL清洗4次,之後利用硫酸鎂乾燥,進一步蒸餾除去乙酸乙酯,從而得到80g原料A。Into a 2 L three-necked flask, 1 L of ethyl acetate and 159 g of 2-aminoethanol were placed, and the mixture was cooled in an ice bath. The internal temperature was adjusted to 20 ° C or lower, and 150 g of 2-bromoisobutyric acid bromide was added dropwise thereto. Thereafter, the internal temperature was raised to room temperature (25 ° C), and the reaction was carried out for 2 hours. After the reaction was terminated, 300 mL of distilled water was added to stop the reaction. Thereafter, the ethyl acetate phase was washed four times with 300 mL of distilled water, and then dried over magnesium sulfate to further distill off ethyl acetate to obtain 80 g of the material A.

接著,在500mL的三口燒瓶中裝入原料A47.4g、吡啶22g、乙酸乙酯150mL,利用冰浴冷卻。將內溫調節為20℃以下,向其中滴加丙烯醯氯25g。其後升高到室溫,進行3小時反應。反應終止後,追加蒸餾水300mL,使反應停止。其後將乙酸乙酯相利用蒸餾水300mL清洗4次,之後利用硫酸鎂乾燥,進一步蒸餾除去乙酸乙酯。其後利用柱色譜得到以下的單體M1(20g)。Next, a raw material A 47.4 g, 22 g of pyridine, and 150 mL of ethyl acetate were placed in a 500 mL three-necked flask, and the mixture was cooled in an ice bath. The internal temperature was adjusted to 20 ° C or lower, and 25 g of acrylonitrile chloride was added dropwise thereto. Thereafter, it was raised to room temperature, and the reaction was carried out for 3 hours. After the reaction was terminated, 300 mL of distilled water was added to stop the reaction. Thereafter, the ethyl acetate phase was washed four times with 300 mL of distilled water, and then dried over magnesium sulfate to further distill off ethyl acetate. Thereafter, the following monomer M1 (20 g) was obtained by column chromatography.

[化6]單體M1[Chemical 6] Monomer M1

在500mL的三口燒瓶中裝入N,N-二甲基乙醯胺8g,在氮氣流下加熱至65℃。利用4小時的時間向其中滴加單體M1:14.3g、丙烯腈(東京化成工業株式會社製造)3.0g、丙烯酸(東京化成製造)6.5g、V-65(和光純藥製造)0.4g的N,N-二甲基乙醯胺8g溶液。8 g of N,N-dimethylacetamide was placed in a 500 mL three-necked flask and heated to 65 ° C under a nitrogen stream. The monomer M: 1:14.3 g, acrylonitrile (manufactured by Tokyo Chemical Industry Co., Ltd.), 3.0 g, acrylic acid (manufactured by Tokyo Chemical Industry Co., Ltd.), 6.5 g, and V-65 (manufactured by Wako Pure Chemical Industries, Ltd.) 0.4 g were added dropwise thereto over a period of 4 hours. 8 g solution of N,N-dimethylacetamide.

滴加結束後,進一步對反應溶液進行3小時的攪拌。其後追加N,N-二甲基乙醯胺41g,將反應溶液冷卻至室溫。向上述反應溶液中加入4-羥基TEMPO(東京化成製造)0.09g、DBU(二氮雜雙環十一碳烯)54.8g,在室溫進行12小時反應。其後向反應液中加入70質量%甲磺酸水溶液54g。反應終止後,用水進行再沉澱,取出固體物質,得到12g聚合物1。After the completion of the dropwise addition, the reaction solution was further stirred for 3 hours. Thereafter, 41 g of N,N-dimethylacetamide was added, and the reaction solution was cooled to room temperature. To the reaction solution, 0.09 g of 4-hydroxy TEMPO (manufactured by Tokyo Chemical Industry Co., Ltd.) and 54.8 g of DBU (diazabicycloundecene) were added, and the reaction was carried out for 12 hours at room temperature. Thereafter, 54 g of a 70% by mass aqueous methanesulfonic acid solution was added to the reaction liquid. After the reaction was terminated, reprecipitation was carried out with water, and the solid matter was taken out to obtain 12 g of a polymer 1.

使用IR測定儀((株)堀場製作所製造)進行所得到的聚合物1的鑒定。測定中將聚合物溶解在丙酮中使用KBr晶體來進行。根據IR測定的結果,在2240cm-1附近觀測到峰,可知丙烯腈作為腈單元被導入到聚合物中。此外,通過酸值測定可知丙烯酸作為羧酸單元被導入。並將其溶解在氘代DMSO(二甲基亞碸)中,利用Bruker制300MHz的NMR(AV-300)進行測定。在2.5-0.7ppm(5H)觀察到相當於含腈基單元的寬峰,在7.8-8.1ppm(1H)、5.8-5.6ppm(1H)、5.4-5.2ppm(1H)、4.2-3.9ppm(2H)、3.3-3.5ppm(2H)、2.5-0.7ppm(6H)觀察到相當於含聚合性基團單元的寬峰,在2.5-0.7ppm(3H)觀察到相當於含羧酸單元的寬峰,可知含聚合性基團單元:含腈基單元:羧酸基單元=30:30:40(mol%)。The identification of the obtained polymer 1 was carried out using an IR measuring instrument (manufactured by Horiba, Ltd.). In the measurement, the polymer was dissolved in acetone using KBr crystals. According to the results of IR measurement, a peak was observed in the vicinity of 2240 cm-1, and it was found that acrylonitrile was introduced into the polymer as a nitrile unit. Further, it was found from the measurement of the acid value that acrylic acid was introduced as a carboxylic acid unit. This was dissolved in deuterated DMSO (dimethyl hydrazine) and measured by a 300 MHz NMR (AV-300) manufactured by Bruker. A broad peak corresponding to the nitrile-containing unit was observed at 2.5-0.7 ppm (5H) at 7.8-8.1 ppm (1H), 5.8-5.6 ppm (1H), 5.4-5.2 ppm (1H), 4.2-3.9 ppm ( 2H), 3.3-3.5 ppm (2H), 2.5-0.7 ppm (6H), a broad peak corresponding to a polymerizable group unit was observed, and a width corresponding to a carboxylic acid-containing unit was observed at 2.5-0.7 ppm (3H). Peak, it is known that the polymerizable group unit: nitrile group-containing unit: carboxylic acid group unit = 30:30:40 (mol%).

[化7]聚合物1[Chemistry 7] Polymer 1

(合成例2:聚合物2)(Synthesis Example 2: Polymer 2)

在500ml的三口燒瓶中裝入N,N-二甲基乙醯胺20g,在氮氣流下加熱至65℃。利用4小時的時間向其中滴加下述單體M2:20.7g、丙烯酸-2-氰基乙酯(東京化成工業株式會社製造)20.5g、丙烯酸(東京化成工業株式會社製造)14.4g、V-65(和光純藥工業株式會社製造)1.0g的N,N-二甲基乙醯胺20g溶液。滴加結束後,進一步攪拌3小時。其後加入N,N-二甲基乙醯胺91g,將反應溶液冷卻至室溫。20 g of N,N-dimethylacetamide was placed in a 500 ml three-necked flask and heated to 65 ° C under a nitrogen stream. The following monomer M2 was added dropwise thereto over a period of 4 hours: 20.7 g, 2-cyanoethyl acrylate (manufactured by Tokyo Chemical Industry Co., Ltd.) 20.5 g, and acrylic acid (manufactured by Tokyo Chemical Industry Co., Ltd.) 14.4 g, V -65 (manufactured by Wako Pure Chemical Industries, Ltd.) 1.0 g of a solution of N,N-dimethylacetamide 20 g. After the completion of the dropwise addition, the mixture was further stirred for 3 hours. Thereafter, 91 g of N,N-dimethylacetamide was added, and the reaction solution was cooled to room temperature.

向上述反應溶液中加入4-羥基TEMPO(東京化成工業株式會社製造)0.17g、三乙胺75.9g,在室溫進行4小時反應。其後向反應液中加入70質量%甲磺酸水溶液112g。反應終止後,用水進行再沉澱,取出固體物質,得到聚合物2(25g)。0.17 g of 4-hydroxy TEMPO (manufactured by Tokyo Chemical Industry Co., Ltd.) and 75.9 g of triethylamine were added to the reaction solution, and the mixture was reacted at room temperature for 4 hours. Thereafter, 112 g of a 70% by mass aqueous methanesulfonic acid solution was added to the reaction liquid. After the reaction was terminated, reprecipitation was carried out with water, and the solid matter was taken out to obtain a polymer 2 (25 g).

[化8]單體M2[化8] Monomer M2

[化9]聚合物2[Chemistry 9] Polymer 2

(合成例3:聚合物3)(Synthesis Example 3: Polymer 3)

在500ml三口燒瓶中裝入N,N-二甲基乙醯胺200g、聚丙烯酸(和光純藥製造,分子量:25000)30g、四乙基苄基氯化銨2.4g、二叔戊基氫醌25mg、Cyclomer A(Daicel Chemical製造)27g,在氮氣流下在100℃反應5小時。其後對反應液進行再沉澱,濾取固體物質,得到聚合物3(28g)。In a 500 ml three-necked flask, 200 g of N,N-dimethylacetamide, 30 g of polyacrylic acid (manufactured by Wako Pure Chemical Industries, molecular weight: 25000), 2.4 g of tetraethylbenzylammonium chloride, and di-tert-amylhydroquinone were placed. 25 mg, Cyclomer A (manufactured by Daicel Chemical), 27 g, was reacted at 100 ° C for 5 hours under a nitrogen stream. Thereafter, the reaction liquid was reprecipitated, and the solid matter was collected by filtration to give polymer 3 (28 g).

[化10] [化10]

<被鍍覆層形成用組合物的製備><Preparation of composition for forming a layer to be plated>

按照表1在放入有磁力攪拌子的200ml燒杯中加入水、丙二醇單甲醚、2-丙烯醯胺-2-甲基丙烷磺酸、6-丙烯醯胺己酸、聚合物1~3、六亞甲基雙丙烯醯胺、IRGACUREOXE02(BASF),製備液體,得到組合物1~6。Add water, propylene glycol monomethyl ether, 2-propenylamine-2-methylpropane sulfonic acid, 6-acrylamide hexanoic acid, polymer 1-3, in a 200 ml beaker placed with a magnetic stirrer according to Table 1. Hexamethylene bis acrylamide, IRGACUREOXE02 (BASF), liquid was prepared to obtain compositions 1 to 6.

另外,表1中,各成分的含量以相對於組合物總量的質量%的形式表示。Further, in Table 1, the content of each component is expressed in terms of mass% with respect to the total amount of the composition.

[表1] [Table 1]

[化11]2-丙烯醯胺-2-甲基丙烷磺酸[11] 2-propenylamine-2-methylpropane sulfonic acid

[化12]6-丙烯醯胺己酸[化12] 6-acrylamide caproic acid

[化13]六亞甲基雙丙烯醯胺[Chemistry 13] Hexamethylene bis acrylamide

<底塗層形成用組合物><A composition for forming an undercoat layer>

將氫化丁腈橡膠Zetpole0020(日本Zeon製造)100g溶解在環戊酮(東京化成製造)900g中,將所得到的溶液作為底塗層形成用組合物。100 g of hydrogenated nitrile rubber Zetpole 0020 (manufactured by Zeon, Japan) was dissolved in 900 g of cyclopentanone (manufactured by Tokyo Chemical Industry Co., Ltd.), and the obtained solution was used as a composition for forming an undercoat layer.

<實施例1~10和比較例1~3><Examples 1 to 10 and Comparative Examples 1 to 3>

[帶有被鍍覆層的基板S1-1~S1-6的製作][Production of substrates S1-1 to S1-6 with a layer to be plated]

將玻璃基板大猩猩(Gorilla)玻璃(康寧製造)在150℃加熱乾燥1小時後,在1500rpm下將六甲基二矽氮烷(東京化成製造)、底塗層形成用組合物依次旋塗1分鐘,在80℃乾燥5分鐘,得到帶有底塗層的玻璃基板。接著,在底塗層上、在1500rpm下,將表1所示的被鍍覆層形成用組合物(組合物1~6)分別旋塗1分鐘,在80℃乾燥5分鐘。其後在大氣下隔著具有線寬/間距(line/space)為2μm/98μm的圖案的負型用掩模對基板進行UV照射(能量:2J、10mW;波長:256nm),使用1%的碳酸氫鈉進行顯影,從而形成圖案狀被鍍覆層。將此處得到的帶有被鍍覆層的基板分別作為帶有被鍍覆層的基板S1-1~S1-6。After glass substrate Gorilla glass (manufactured by Corning) was dried by heating at 150 ° C for 1 hour, hexamethyldiaziridine (manufactured by Tokyo Chemicals Co., Ltd.) and the composition for forming an undercoat layer were sequentially spin-coated at 1,500 rpm. After drying at 80 ° C for 5 minutes, a glass substrate with an undercoat layer was obtained. Next, the composition for forming a layer for plating (compositions 1 to 6) shown in Table 1 was spin-coated on the undercoat layer at 1,500 rpm for 1 minute, and dried at 80 ° C for 5 minutes. Thereafter, the substrate was subjected to UV irradiation (energy: 2 J, 10 mW; wavelength: 256 nm) with a negative mask having a line/space of 2 μm/98 μm in the atmosphere, using 1%. The sodium hydrogencarbonate is developed to form a patterned plated layer. The substrate with the plated layer obtained here was used as the substrates S1-1 to S1-6 with the plated layer.

[帶有被鍍覆層的基板S1-7的製作][Production of substrate S1-7 with plated layer]

除了不使用具有2μm/98μm的圖案的掩模而使用具有5μm/95μm的圖案的掩模以外,按照與帶有被鍍覆層的基板S1-1的製作過程同樣的過程製作帶有被鍍覆層的基板S1-7。The plating was performed in the same process as the manufacturing process of the substrate S1-1 with the plated layer except that a mask having a pattern of 2 μm/98 μm was used without using a mask having a pattern of 2 μm/98 μm. The substrate S1-7 of the layer.

[帶有被鍍覆層的基板S1-8的製作][Production of substrate S1-8 with plated layer]

除了不使用具有2μm/98μm的圖案的掩模而使用具有10μm/90μm的圖案的掩模以外,按照與帶有被鍍覆層的基板S1-1的製作過程同樣的過程製作帶有被鍍覆層的基板S1-8。The plating was performed in the same process as the manufacturing process of the substrate S1-1 with the plated layer except that a mask having a pattern of 2 μm/98 μm was used without using a mask having a pattern of 2 μm/98 μm. The substrate of the layer S1-8.

[帶有被鍍覆層的基板S1-9的製作][Production of substrate S1-9 with plated layer]

除了不使用底塗層形成用組合物、在旋塗六甲基二矽氮烷之後旋塗被鍍覆層形成用組合物以外,按照與帶有被鍍覆層的基板S1-1的製作過程同樣的過程製作帶有被鍍覆層的基板S1-9。The production process of the substrate S1-1 with the plated layer is carried out, except that the composition for forming an undercoat layer is not used, and the composition for forming a layer for plating is spin-coated after spin-coating hexamethyldioxane. The same process produces a substrate S1-9 with a plated layer.

[帶有被鍍覆層的基板S1-10的製作][Production of substrate S1-10 with plated layer]

將玻璃基板置換為PET(聚對苯二甲酸乙二醇酯)基板A4300(東洋紡製造)、不使用六甲基二矽氮烷而直接將底塗層形成用組合物在1500rpm下旋塗1分鐘,除此以外,按照與帶有被鍍覆層的基板S1-1的製作過程同樣的過程製作帶有被鍍覆層的基板S1-10。The glass substrate was replaced with PET (polyethylene terephthalate) substrate A4300 (manufactured by Toyobo Co., Ltd.), and the composition for forming an undercoat layer was directly spin-coated at 1,500 rpm for 1 minute without using hexamethyldioxane. Except for this, the substrate S1-10 having the plated layer was produced in the same manner as in the process of producing the substrate S1-1 with the plated layer.

上述帶有被鍍覆層的基板S1-1~S1-10中的圖案狀被鍍覆層的厚度為1.0μm。The thickness of the patterned plated layer in the substrates S1-1 to S1-10 having the plated layer described above was 1.0 μm.

[實施例1~10:具備圖案狀銅層的導電性積層體E1-1~E1-10的製作][Examples 1 to 10: Production of Conductive Laminates E1-1 to E1-10 having a patterned copper layer]

將帶有被鍍覆層的基板S1-1~S1-10的未形成被鍍覆層的面利用養護帶(日東電工製造)覆蓋後,在室溫下在將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液中浸漬5分鐘,利用純水清洗2次。接著在36℃下在還原劑MAB(上村工業製造)中浸漬5分鐘,利用純水清洗2次。其後在室溫下在活化處理液MEL-3(上村工業製造)中浸漬5分鐘,在不進行清洗的情況下,在室溫下分別在無電解鍍覆液Thru-cup PEA(上村工業製造)中浸漬60分鐘。剝離覆蓋的帶,利用純水清洗2次,將所得到的具備圖案狀被鍍覆層和圖案狀銅層的基板分別作為導電性積層體E1-1~E1-10。The surface of the substrates S1-1 to S1-10 having the plated layer which is not formed with the plated layer is covered with a protective tape (manufactured by Nitto Denko Corporation), and the Pd catalyst is supplied to the liquid MAT-2 at room temperature ( Only MAT-2A in Uemura Industrial Manufacturing Co., Ltd. was immersed in a 5-fold diluted solution for 5 minutes, and washed twice with pure water. Subsequently, it was immersed in a reducing agent MAB (manufactured by Uemura Industrial Co., Ltd.) at 36 ° C for 5 minutes, and washed twice with pure water. Thereafter, it was immersed in the activation treatment liquid MEL-3 (manufactured by Uemura Kogyo Co., Ltd.) for 5 minutes at room temperature, and was subjected to electroless plating solution Thru-cup PEA (Shangcun Industrial Co., Ltd.) at room temperature without washing. ) immersed for 60 minutes. The tape which was peeled off was washed twice with pure water, and the obtained substrate having the patterned plated layer and the patterned copper layer was used as the conductive layered bodies E1-1 to E1-10, respectively.

另外,上述“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”相當於含有鈀離子的催化劑賦予液,其pH為3.5。In addition, the above-mentioned "solution in which only MAT-2A in the Pd catalyst-providing liquid MAT-2 (manufactured by Uemura Industries Co., Ltd.) was diluted 5-fold" corresponds to a catalyst-imparting liquid containing palladium ions, and its pH was 3.5.

[實施例11~12:具備圖案狀銅層的導電性積層體E1-11~E1-12的製作][Examples 11 to 12: Production of Conductive Laminates E1-11 to E1-12 having a patterned copper layer]

在氯化鈀(0.5g)中加入10%的鹽酸200ml進行溶解後,加入1N的氫氧化鈉水溶液700ml。分別準備催化劑賦予液X和催化劑賦予液Y,該催化劑賦予液X是將該Pd催化劑賦予液利用10%的鹽酸和1N的氫氧化鈉水溶液將pH調整為4.4而得到的,該催化劑賦予液Y是將其pH調整為6.6而得到的。After dissolving 200 ml of 10% hydrochloric acid in palladium chloride (0.5 g), 700 ml of a 1 N aqueous sodium hydroxide solution was added. The catalyst-imparting liquid X and the catalyst-imparting liquid Y were prepared, and the catalyst-imparting liquid X was obtained by adjusting the pH of the Pd-catalyst-imparting liquid with 10% hydrochloric acid and a 1 N aqueous sodium hydroxide solution to adjust the pH to 4.4. It was obtained by adjusting its pH to 6.6.

除了不使用“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”而使用催化劑賦予液X以外,按照與導電性積層體E1-1的製作方法同樣的過程來製作導電性積層體E1-11。In addition to the use of the catalyst-imparting liquid X, the use of the conductive layered body E1-1 was used, except that the solution of the Pd catalyst-imparting liquid MAT-2 (manufactured by Uemura Industrial Co., Ltd.) The same procedure was used to produce the conductive laminate E1-11.

另外,除了不使用“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”而使用催化劑賦予液Y以外,按照與導電性積層體E1-1的製作方法同樣的過程來製作導電性積層體E1-12。In addition, the use of the catalyst-imparting liquid Y is carried out in addition to the use of the catalyst-imparting liquid Y, except that the solution of the Pd-catalyst-imparting liquid MAT-2 (manufactured by Uemura Kogyo Co., Ltd.) is used. The manufacturing method was the same to produce the conductive laminate E1-12.

[比較例1][Comparative Example 1]

除了不使用“厚度2mm、100mm見方的丙烯酸類樹脂制基體”而使用上述帶有底塗層的基板以外,按照與專利文獻1的0034~0037段的記載同樣的過程來得到具備圖案狀被鍍覆層(相當於抗蝕劑)的帶有被鍍覆層的基板S1-13。In the same procedure as described in paragraphs 0034 to 0037 of Patent Document 1, a pattern-like plating was obtained, except that the substrate with the undercoat layer was used without using the "base material of acrylic resin having a thickness of 2 mm and 100 mm square". A coated substrate S1-13 having a coating (corresponding to a resist).

另外,在比較例1中,如專利文獻1所記載,使用含有膠體鈀作為鍍覆催化劑的抗蝕劑塗布液。Further, in Comparative Example 1, as described in Patent Document 1, a resist coating liquid containing colloidal palladium as a plating catalyst was used.

將帶有被鍍覆層的基板S1-13的未形成被鍍覆層的面利用養護帶(日東電工)覆蓋後,在室溫下在活化處理液MEL-3(上村工業)中浸漬5分鐘,在不進行清洗的情況下,在室溫下分別在無電解鍍覆液Thru-cup PEA(上村工業)中浸漬60分鐘。剝離覆蓋的帶,利用純水清洗2次,將所得到的具備圖案狀被鍍覆層和圖案狀銅層的基板作為導電性積層體E1-13。The surface of the substrate S1-13 having the plated layer on which the plated layer was not formed was covered with a protective tape (Nitto Denko), and then immersed in the activation treatment liquid MEL-3 (Shangcun Industrial) for 5 minutes at room temperature. The mixture was immersed in an electroless plating solution Thru-cup PEA (Shangcun Industrial) at room temperature for 60 minutes without washing. The tape which was peeled off was washed twice with pure water, and the obtained substrate having the patterned plated layer and the patterned copper layer was used as the conductive layered body E1-13.

[比較例2][Comparative Example 2]

使用黑化處理液シルブライト(日本Carlit製造),對比較例1中得到的導電性積層體E1-13的圖案狀銅層表面進行黑化處理,得到導電性積層體E1-14。The surface of the patterned copper layer of the conductive laminated body E1-13 obtained in Comparative Example 1 was subjected to a blackening treatment using a blackening treatment liquid (manufactured by Carlit, Japan) to obtain a conductive laminated body E1-14.

[比較例3][Comparative Example 3]

使用濺射裝置(ULVAC製造),在玻璃基板大猩猩玻璃(Corning製造)上進行銅的1μm成膜。其後利用照相平版印刷法形成圖案狀的銅層,得到具備圖案狀銅層的導電性積層體E1-15。A 1 μm film of copper was formed on a glass substrate gorilla glass (manufactured by Corning) using a sputtering apparatus (manufactured by ULVAC). Thereafter, a patterned copper layer was formed by photolithography to obtain a conductive layered body E1-15 having a patterned copper layer.

[比較例4~6][Comparative Examples 4 to 6]

向氯化鈀(0.5g)中加入10%的鹽酸200ml進行溶解後,加入1N的氫氧化鈉水溶液700ml。分別準備催化劑賦予液Z和催化劑賦予液W,該催化劑賦予液Z是將該Pd催化劑賦予液利用10%的鹽酸和1N的氫氧化鈉水溶液將pH調整為1.8來得到的,該催化劑賦予液W是將其pH調整為8.0來得到的。After dissolving 200 ml of 10% hydrochloric acid into palladium chloride (0.5 g), 700 ml of a 1N aqueous sodium hydroxide solution was added. The catalyst-imparting liquid Z and the catalyst-imparting liquid W were prepared, and the catalyst-imparting liquid Z was obtained by adjusting the pH of the Pd-catalyst-imparting liquid with a 10% hydrochloric acid solution and a 1 N aqueous sodium hydroxide solution to adjust the pH to 1.8. It was obtained by adjusting its pH to 8.0.

除了不使用“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”而使用催化劑賦予液Z以外,按照與導電性積層體E1-1的製作方法同樣的過程來製作導電性積層體E1-16。其中,在導電性積層體E1-16中,金屬未析出、未形成圖案狀金屬層。The production of the conductive layered product E1-1 was carried out in addition to the use of the catalyst-imparting liquid Z, except that the solution of the Pd catalyst-imparting liquid MAT-2 (manufactured by Uemura Kogyo Co., Ltd.) was used. The same procedure was used to produce the conductive laminate E1-16. However, in the conductive laminated body E1-16, the metal was not precipitated, and the patterned metal layer was not formed.

除了不使用“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”而使用“Pd催化劑賦予液MAT-2(上村工業製造)的MAT-2A”以外,按照與導電性積層體E1-1的製作方法同樣的過程來製作導電性積層體E1-17。另外,上述“Pd催化劑賦予液MAT-2(上村工業製造)的MAT-2A”為與實施例1~10不同的在不進行稀釋的情況下使用的方式,“Pd催化劑賦予液MAT-2(上村工業製造)的MAT-2A”的pH為2.9。其中,在導電性積層體E1-17中,金屬未析出、未形成圖案狀金屬層。MAT-2A using "Pd catalyst-imparting liquid MAT-2 (manufactured by Uemura Kogyo Co., Ltd.)" was used instead of the "solution of 5-time dilution of only MAT-2A in the MAT-2 (manufactured by Uemura Industries)". In addition, the conductive laminated body E1-17 was produced in the same manner as in the method of producing the conductive laminated body E1-1. In addition, the "MAT-2A of the Pd catalyst-providing liquid MAT-2 (manufactured by Uemura Kogyo Co., Ltd.)" is used in the case where it is not diluted, and the "Pd catalyst-imparting liquid MAT-2 (" The pH of MAT-2A" manufactured by Uemura Industrial Co., Ltd. was 2.9. However, in the conductive laminated body E1-17, the metal was not precipitated, and the patterned metal layer was not formed.

此外,除了不使用“將Pd催化劑賦予液MAT-2(上村工業製造)中的僅MAT-2A進行5倍稀釋後的溶液”而使用催化劑賦予液W以外,按照與導電性積層體E1-1的製作方法同樣的過程來製作導電性積層體E1-18。另外,在所形成的導電性積層體E1-18中,在基板的大致整個面上形成金屬層,無法形成特定的圖案狀金屬層,無法應用於觸控面板用途中。從而,關於導電性積層體E1-18,未實施後段的各種評價。In addition, the use of the catalyst-imparting liquid W is carried out in addition to the use of the catalyst-imparting liquid W, except that the solution of the Pd-catalyst-imparting liquid MAT-2 (manufactured by Uemura Industrial Co., Ltd.) is used in a 5-fold dilution. The manufacturing method is the same process to produce the conductive laminate E1-18. Further, in the formed conductive laminated body E1-18, a metal layer is formed on substantially the entire surface of the substrate, and a specific patterned metal layer cannot be formed, which cannot be applied to a touch panel application. Therefore, various evaluations of the subsequent stage were not performed regarding the conductive laminated body E1-18.

<能量分散型X射線分光測定><Energy dispersive X-ray spectrometry>

對於上述導電性積層體E1-10的圖案狀被鍍覆層和圖案狀金屬層,沿著基板的法線方向並且在與圖案狀金屬層的延長方向正交的方向進行切斷,利用掃描型顯微鏡對圖案狀被鍍覆層與圖案狀金屬層的斷面進行觀察(參見圖4(A))。如圖4(A)所示,觀察到了圖案狀金屬層(無電解鍍覆銅)、圖案狀被鍍覆層、以及底塗層。The patterned plated layer and the patterned metal layer of the conductive layered product E1-10 are cut along the normal direction of the substrate and in a direction orthogonal to the direction in which the pattern metal layer extends, and the scanning type is used. The microscope observes the cross section of the patterned plated layer and the patterned metal layer (see Fig. 4(A)). As shown in FIG. 4(A), a patterned metal layer (electroless copper plating), a patterned plating layer, and an undercoat layer were observed.

接著,使用透過型電子顯微鏡,對於圖案狀被鍍覆層與圖案狀金屬層的斷面採用能量分散型X射線分析法沿著深度方向實施組成分析。圖4(B)中示出了銅來源的峰的圖譜。如圖4(B)所示,在圖案狀金屬層的區域,由於圖案狀金屬層由銅構成,因而計算出大致一定強度的峰;在圖案狀被鍍覆層的區域,觀測到圖案狀被鍍覆層中所含有的相同成分來源的峰。按照上述方法計算出構成圖案狀金屬層的銅來源的平均峰強度Pa以及圖案狀被鍍覆層中所含有的銅成分來源的平均峰強度Pb,求出其比(Pb/Pa)。結果列於表2。Next, using a transmission electron microscope, composition analysis was performed in the depth direction by energy dispersive X-ray analysis on the cross section of the patterned plated layer and the patterned metal layer. A map of peaks derived from copper is shown in Figure 4 (B). As shown in FIG. 4(B), in the region of the pattern-like metal layer, since the pattern-shaped metal layer is made of copper, a peak having a substantially constant intensity is calculated, and in the region where the pattern-like layer is plated, a pattern is observed. A peak derived from the same component contained in the plating layer. The average peak intensity Pa of the copper source constituting the patterned metal layer and the average peak intensity Pb of the copper component source contained in the pattern-formed layer were calculated by the above method, and the ratio (Pb/Pa) was determined. The results are shown in Table 2.

另外,在圖4(C)中顯示出了利用電子能量損失譜分析法(EELS法)對圖案狀被鍍覆層與圖案狀金屬層的斷面進行觀察的結果。利用該EELS法能夠確認到碳原子的存在,如圖4(C)所示,在圖案狀被鍍覆層和底塗層確認到碳原子的殘存。Further, Fig. 4(C) shows the results of observing the cross-sections of the patterned plated layer and the patterned metal layer by electron energy loss spectrum analysis (EELS method). The presence of carbon atoms was confirmed by the EELS method, and as shown in FIG. 4(C), the residual of carbon atoms was confirmed in the pattern-formed layer and the undercoat layer.

上文中對於使用導電性積層體E1-10的方法進行了詳述,對於導電性積層體E1-1~E1-9、導電性積層體E1-11~E1-17也實施同樣的測定,求出比(Pb/Pa)。另外,按照下述基準對於各實施例以及比較例進行評價。結果匯總示於表2中。In the above, the method of using the conductive laminated body E1-10 is described in detail, and the same measurement is performed on the conductive laminated bodies E1-1 to E1-9 and the conductive laminated bodies E1-11 to E1-17. Ratio (Pb/Pa). Further, each of the examples and the comparative examples was evaluated in accordance with the following criteria. The results are summarized in Table 2.

“A”:比(Pb/Pa)為0.8以上0.95以下"A": ratio (Pb/Pa) is 0.8 or more and 0.95 or less

“B”:比(Pb/Pa)為0.65以上且小於0.8"B": ratio (Pb/Pa) is 0.65 or more and less than 0.8

“C”:比(Pb/Pa)為0.5以上且小於0.65"C": ratio (Pb/Pa) is 0.5 or more and less than 0.65

“D”:比(Pb/Pa)小於0.5"D": ratio (Pb/Pa) is less than 0.5

<評價><evaluation>

(色調評價)(tone evaluation)

從基板側通過目視對所得到的導電性積層體進行觀察時,按照下述基準對圖案狀金屬層(圖案狀銅層)的色調進行評價。另外,實用上優選“3”。When the obtained conductive laminated body was visually observed from the substrate side, the color tone of the patterned metal layer (patterned copper layer) was evaluated in accordance with the following criteria. Further, "3" is preferable in practical use.

“1”:被清晰視認為銅色(橙色)"1": is clearly regarded as copper (orange)

“2”:被視認為稍有銅色(橙色)"2": considered to be slightly copper (orange)

“3”:被視認為黑色"3": is considered black

另外,在評價“3”中,在比(Pb/Pa)的評價為“A”的情況下,為更沒有光澤的深黑。Further, in the evaluation "3", in the case where the evaluation of the ratio (Pb/Pa) is "A", it is a dark black which is less luster.

(導電性評價)(Electrical evaluation)

除了使用特定的光掩模使得所形成的圖案狀金屬層的形狀為網狀(金屬部的長度為2μm、開口部的長度為98μm)以外,按照與上述實施例以及比較例同樣的過程製造導電性評價用的導電性積層體E3-1~E3-17。Conduction was performed in the same manner as in the above-described examples and comparative examples, except that the shape of the patterned metal layer formed was a mesh shape (the length of the metal portion was 2 μm and the length of the opening portion was 98 μm) using a specific photomask. Conductive laminates E3-1 to E3-17 for evaluation.

使用所得到的導電性評價用的導電性積層體E3-1~E3-17,利用低電阻率儀MCP-T610(三菱化學分析技術)測定金屬層的電阻值,按照下述基準進行評價。實用上優選“2”。Using the obtained conductive laminates E3-1 to E3-17 for conductivity evaluation, the resistance value of the metal layer was measured by a low resistivity meter MCP-T610 (Mitsubishi Chemical Analysis Technology), and evaluated according to the following criteria. Practically preferred is "2".

“1”:電阻值為1Ω/□以上“1”: resistance value is 1Ω/□ or more

“2”:電阻值小於1Ω/□"2": resistance value is less than 1 Ω / □

(斷面觀察)(section observation)

將1cm2 (1cm×1cm)的導電性積層體(E1-1~E1-17)固定於亞克力塊(acrylic block),放入至專用模具中,將丙烯酸類樹脂Acrylic One(株式會社Maruto)注入到模具中,之後利用曝光裝置ONE・LIGHT(株式會社Maruto)進行2小時曝光,使丙烯酸類樹脂固化。固化後利用丙酮清洗,利用研磨裝置ML-160A(株式會社Maruto)使用#400的研磨紙進行研磨直至露出基板表面為止,之後利用Baikaloy1.0CR(BAIKOWSK INTERNATIONAL CORPORATION)進行研磨直至成為鏡面為止。其後在表面蒸鍍防帶電(チャージアップ)用金,然後利用Hitachi High-Technologies S-3000對導電性積層體的斷面(相對於基板表面的垂直面)進行觀察,使用圖像分析軟體“winRFFO”根據圖像的濃淡計算出平均粒徑,確認是否滿足下述要件A或要件B。在滿足下述要件A和要件B的任意一者的情況下判斷為“有”微細結構,在要件A和要件B兩者均不滿足的情況下判斷為“無”微細結構。1 cm 2 (1 cm × 1 cm) of the conductive laminate (E1-1 to E1-17) was fixed to an acrylic block, placed in a special mold, and an acrylic resin Acrylic One (Maruto) was injected. After the mold was placed in the mold, exposure was performed for 2 hours using an exposure apparatus ONE/LIGHT (Maruto Co., Ltd.) to cure the acrylic resin. After the curing, it was washed with acetone, and polished using a polishing machine ML-160A (Maruto Co., Ltd.) using a #400 polishing paper until the surface of the substrate was exposed, and then polished by Baikaloy 1.0 CR (BAIKOWSK INTERNATIONAL CORPORATION) until it became a mirror surface. Thereafter, the anti-charged gold was vapor-deposited on the surface, and then the cross section of the conductive laminate (the vertical surface with respect to the substrate surface) was observed by Hitachi High-Technologies S-3000, and the image analysis software was used. winRFFO" calculates the average particle diameter based on the shading of the image, and confirms whether or not the following requirement A or requirement B is satisfied. When any one of the following requirements A and B is satisfied, it is judged as "having" a fine structure, and when both the requirement A and the requirement B are not satisfied, it is judged as "none" fine structure.

要件A:自被鍍覆層(或圖案狀被鍍覆層)與圖案狀金屬層的介面起在被鍍覆層(或圖案狀被鍍覆層)側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子。Requirement A: There is an average particle in the surface region of 500 nm from the side of the plated layer (or the patterned plated layer) from the interface between the plated layer (or the patterned plated layer) and the patterned metal layer. Metal particles having a diameter of 10 to 1000 nm.

要件B:被鍍覆層(或圖案狀被鍍覆層)與圖案狀金屬層的介面具有凹凸形狀,凹凸形狀的算術平均粗糙度Ra為5~1000nm,凹凸形狀的凹部間的平均距離為10~1000nm。The requirement B: the interface between the plated layer (or the patterned plated layer) and the patterned metal layer has an uneven shape, and the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 ~1000nm.

下述表2中,“L/S(μm/μm)”是指所形成的圖案狀金屬層的L(線條)/S(空間)。In the following Table 2, "L/S (μm/μm)" means L (line) / S (space) of the patterned metal layer formed.

另外,在“金屬層的形成方法”欄中,“無電解”是指實施了無電解鍍覆處理,“濺射”是指通過濺射形成金屬層。Further, in the column "method of forming a metal layer", "electroless" means that electroless plating treatment is performed, and "sputtering" means formation of a metal layer by sputtering.

另外,如上所述,在比較例6中,金屬層在大致整個面析出,無法應用於觸控面板用途,從這方面考慮,未實施各種評價。Further, as described above, in Comparative Example 6, the metal layer was deposited on substantially the entire surface, and it was not applied to the touch panel application. From this point of view, various evaluations were not performed.

[表2] [Table 2]

另外,使用NDH7000(日本電色工業製造)測定的導電性積層體E1-1~E1-17的全光線透過率(JIS K7361-1)為80%以上。In addition, the total light transmittance (JIS K7361-1) of the conductive laminates E1-1 to E1-17 measured by NDH7000 (manufactured by Nippon Denshoku Industries Co., Ltd.) was 80% or more.

另一方面,導電性積層體E1-18的全光線透過率(JIS K7361-1)小於80%。On the other hand, the total light transmittance (JIS K7361-1) of the conductive laminated body E1-18 is less than 80%.

如上述表2所表示,本發明的導電性積層體中,圖案狀金屬層被視認為更黑的黑色,並且導電性也優異。As shown in the above Table 2, in the conductive laminate of the present invention, the patterned metal layer is considered to be blacker black, and is also excellent in conductivity.

另一方面,在使用了專利文獻1的組成物的比較例1和2以及通過濺射法制作了圖案狀金屬層的比較例3中,儘管圖案狀金屬層的導電性優異,但圖案狀金屬層的色調成為銅色,視認性差。另外,如比較例2所示,相對於從基板側觀察圖案狀金屬層時被辨認為銅色的比較例1的導電性積層體,即使在實施黑化處理後,從基板側觀察圖案狀金屬層時,色調也未變黑。On the other hand, in Comparative Examples 1 and 2 using the composition of Patent Document 1 and Comparative Example 3 in which the patterned metal layer was formed by the sputtering method, although the patterned metal layer was excellent in conductivity, the patterned metal was used. The color tone of the layer is copper, and the visibility is poor. In addition, as shown in the comparative example 2, the conductive layered product of Comparative Example 1 which was recognized as a copper color when the patterned metal layer was observed from the substrate side was observed from the substrate side after the blackening treatment. When the layer is layered, the hue does not turn black.

另外,如比較例4~6所示,在未使用特定的pH的催化劑賦予液的情況下,未得到所期望的構成的導電性積層體,並且也未得到所期望的效果。Further, as shown in Comparative Examples 4 to 6, when a catalyst-imparting liquid having a specific pH was not used, a conductive laminated body having a desired structure was not obtained, and a desired effect was not obtained.

<實施例13:觸控面板用導電性積層體E2-1的製作><Example 13: Production of Conductive Laminate E2-1 for Touch Panel>

將掩模置換為單面單層型且具有感測器部分與周邊配線這兩者的觸控面板製作用掩模,除此以外,按照與導電性積層體E1-1的製作方法同樣的過程製備具有圖案狀銅層的導電性積層體,將其作為觸控面板用導電性積層體E2-1。The same procedure as the method of manufacturing the conductive laminated body E1-1 is used, except that the mask is replaced with a single-sided single-layer type mask having a sensor portion and a peripheral wiring. A conductive laminated body having a patterned copper layer was prepared and used as a conductive laminated body E2-1 for a touch panel.

<實施例14:觸控面板用導電性積層體E2-2的製作><Example 14: Production of Conductive Laminate E2-2 for Touch Panel>

除了將掩模置換為雙面型且具有感測器部分與周邊配線這兩者的觸控面板製作用掩模並在兩面製作圖案狀銅層以外,按照與導電性積層體E1-10的製作方法同樣的過程製備具有圖案狀銅層的導電性積層體,利用黑化處理液シルブライト(日本Carlit製造)對銅表面進行黑化處理,製成觸控面板用導電性積層體E2-2。In addition to replacing the mask with a double-sided type and having a touch panel fabrication mask for both the sensor portion and the peripheral wiring, and forming a patterned copper layer on both sides, the fabrication is performed in accordance with the conductive laminate E1-10. In the same manner, a conductive laminate having a patterned copper layer was prepared, and the surface of the copper was blackened by a blackening treatment liquid (manufactured by Carlit, Japan) to prepare a conductive laminated body E2-2 for a touch panel.

<實施例15:觸控面板用導電性積層體E2-3的製作><Example 15: Production of Conductive Laminate E2-3 for Touch Panel>

除了將掩模置換為僅具有周邊配線部分的觸控面板製作用掩模以外,按照與導電性積層體E1-1的製作方法同樣的過程製作具有圖案狀銅層的導電性積層體E2-3’。A conductive laminated body E2-3 having a patterned copper layer was produced in the same manner as in the method of producing the conductive laminated body E1-1, except that the mask was replaced with a mask for producing a touch panel having only a peripheral wiring portion. '.

接著,使用濺射裝置在導電性積層體E2-3’的具有銅層的面進行50nm的ITO(氧化銦錫)成膜。在ITO層上旋塗光致抗蝕劑TSMR-8900(東京應化工業製造)進行2μm成膜。在90℃下預烘焙10分鐘後,使用具有感測器部分的觸控面板製作用掩模,進行40mJ的UV照射。其後在110℃下烘焙10分鐘,之後利用0.75%的NaOH水溶液進行光致抗蝕劑的圖案化。接著使用蝕刻液ITO-02(關東化學製造)進行ITO層的蝕刻。最後利用2%的NaOH水溶液將光致抗蝕劑全部除去,清洗後在150℃下乾燥30分鐘,製成觸控面板用導電性積層體E2-3。Next, ITO (indium tin oxide) film of 50 nm was formed on the surface of the conductive layered product E2-3' having the copper layer by using a sputtering apparatus. A photoresist TSMR-8900 (manufactured by Tokyo Ohka Kogyo Co., Ltd.) was spin-coated on the ITO layer to form a film of 2 μm. After prebaking at 90 ° C for 10 minutes, UV irradiation of 40 mJ was performed using a touch panel fabrication mask having a sensor portion. Thereafter, it was baked at 110 ° C for 10 minutes, after which the patterning of the photoresist was carried out using a 0.75% aqueous NaOH solution. Then, etching of the ITO layer was performed using an etching solution ITO-02 (manufactured by Kanto Chemical Co., Ltd.). Finally, the photoresist was completely removed by a 2% aqueous NaOH solution, and after washing, it was dried at 150 ° C for 30 minutes to prepare a conductive laminated body E2-3 for a touch panel.

在上述實施例14中得到的導電性積層體的兩面粘貼上述製作的3M社製造OCA(#8146-4:100微米厚)。將所得到的積層體的外形大致整理成與感測器尺寸的0.7mm厚的堿石灰玻璃相同尺寸,利用索尼化學社製造的ACF(CP906AM-25AC)進行FPC(柔性印刷基板)的壓接接合,之後在頂側粘貼上述堿石灰玻璃,在底側與液晶顯示幕貼合,製造觸控面板。The OCA (#8146-4: 100 μm thick) manufactured by 3M Co., Ltd. prepared above was attached to both surfaces of the conductive laminate obtained in the above Example 14. The outer shape of the obtained laminated body was roughly the same size as the slaked lime glass of 0.7 mm thick of the sensor size, and the FPC (flexible printed circuit board) was bonded by ACF (CP906AM-25AC) manufactured by Sony Chemical Co., Ltd. Then, the slaked lime glass was pasted on the top side, and the liquid crystal display was bonded to the bottom side to manufacture a touch panel.

另外,利用索尼化學社製造的ACF(CP906AM-25AC)在上述實施例13與15得到的導電性積層體上進行FPC(柔性印刷基板)的壓接接合後,與液晶顯示幕貼合,製造觸控面板。In addition, the APC (CP906AM-25AC) manufactured by Sony Chemical Co., Ltd. was subjected to pressure bonding of FPC (Flexible Printed Substrate) on the conductive laminate obtained in the above Examples 13 and 15, and then bonded to a liquid crystal display panel to produce a touch. Control panel.

在表3中,關於“兩面/單面”,在僅在基板的一個面上配置感測器部分(感測器電極)和周邊配線的情況下意指“單面”、在基板的兩面配置感測器部分(感測器電極)和周邊配線的情況下意指“兩面”。In Table 3, regarding "two-sided/one-sided", in the case where the sensor portion (sensor electrode) and the peripheral wiring are disposed only on one surface of the substrate, it means "single-sided" and is disposed on both sides of the substrate. The case of the sensor portion (sensor electrode) and the peripheral wiring means "two sides".

[表3] [table 3]

將實施例13~15中得到的觸控面板的構成匯總示於表3。The composition of the touch panel obtained in Examples 13 to 15 is collectively shown in Table 3.

在使用觸控面板用導電性積層體E2-1~2-3作為觸控面板感測器的情況下,對於通過上述處理形成的圖案狀金屬層(感測器部分和/或周邊配線),即使從基板側觀察也被視認為黑色,能夠作為觸控面板感測器使用。In the case where the conductive laminated bodies E2-1 to 2-3 for touch panels are used as the touch panel sensor, the pattern-like metal layer (sensor portion and/or peripheral wiring) formed by the above-described processing is It is considered to be black even when viewed from the substrate side, and can be used as a touch panel sensor.

100‧‧‧觸控面板用導電性積層體100‧‧‧Electrically conductive laminated body for touch panel

12‧‧‧基板12‧‧‧Substrate

22‧‧‧圖案狀金屬層22‧‧‧patterned metal layer

20‧‧‧圖案狀被鍍覆層20‧‧‧patterned coating

30‧‧‧塗膜30‧‧·coating film

40‧‧‧底塗層40‧‧‧Undercoat

圖1為本發明的觸控面板用導電性積層體的第1實施方式的斷面圖。Fig. 1 is a cross-sectional view showing a first embodiment of a conductive laminated body for a touch panel of the present invention.

圖2為按工藝順序示出本發明的觸控面板用導電性積層體的第1實施方式的製造方法的斷面圖。FIG. 2 is a cross-sectional view showing a manufacturing method of the first embodiment of the conductive laminated body for a touch panel of the present invention in the order of the process.

圖3為本發明的觸控面板用導電性積層體的第1實施方式的變形例的斷面圖。3 is a cross-sectional view showing a modification of the first embodiment of the conductive laminated body for a touch panel of the present invention.

圖4(A)為實施例中得到的導電性積層體的斷面的掃描型顯微鏡觀察圖。圖4(B)為利用能量分散型X射線分析法進行導電性積層體的斷面的銅的組成分析的結果。圖4(C)為利用電子能量損失譜分析法進行導電性積層體的斷面的碳組成分析的結果。Fig. 4 (A) is a scanning microscopic observation view of a cross section of the conductive laminate obtained in the example. Fig. 4(B) shows the results of composition analysis of copper in the cross section of the conductive laminate by the energy dispersive X-ray analysis method. Fig. 4(C) shows the results of carbon composition analysis of the cross section of the conductive laminate by the electron energy loss spectrum analysis method.

100‧‧‧觸控面板用導電性積層體 100‧‧‧Electrically conductive laminated body for touch panel

12‧‧‧基板 12‧‧‧Substrate

22‧‧‧圖案狀金屬層 22‧‧‧patterned metal layer

20‧‧‧圖案狀被鍍覆層 20‧‧‧patterned coating

Claims (8)

一種觸控面板用導電性積層體,其具有: 基板,該基板具有2個主面; 圖案狀被鍍覆層,該圖案狀被鍍覆層配置在上述基板的至少一個主面上,具有與金屬離子相互作用的官能團;以及 圖案狀金屬層,該圖案狀金屬層配置在上述圖案狀被鍍覆層上; 在上述圖案狀被鍍覆層中包含構成上述圖案狀金屬層的金屬成分; 使用能量分散型X射線分析法對上述圖案狀被鍍覆層和上述圖案狀金屬層的斷面進行組成分析時,相對於構成上述圖案狀金屬層的金屬成分來源的平均峰強度,上述圖案狀被鍍覆層所含有的上述金屬成分來源的平均峰強度的比為0.5~0.95。A conductive laminated body for a touch panel, comprising: a substrate having two main surfaces; a patterned plated layer, wherein the patterned plated layer is disposed on at least one main surface of the substrate, and has a functional group that interacts with a metal ion; and a patterned metal layer disposed on the patterned plated layer; wherein the patterned plated layer includes a metal component constituting the patterned metal layer; In the energy dispersive X-ray analysis method, when the composition of the pattern-coated layer and the patterned metal layer is analyzed, the average peak intensity of the metal component constituting the pattern-shaped metal layer is The ratio of the average peak intensity of the above-mentioned metal component source contained in the plating layer is 0.5 to 0.95. 如權利要求1所述的觸控面板用導電性積層體,其中,在上述基板的2個主面上分別配置上述圖案狀被鍍覆層和上述圖案狀金屬層。The conductive laminated body for a touch panel according to claim 1, wherein the pattern-coated layer and the patterned metal layer are disposed on each of two main surfaces of the substrate. 一種觸控面板用導電性積層體,其依敘述順序具有基板、圖案狀樹脂層以及圖案狀金屬層,該基板具有2個主面,該圖案狀樹脂層配置在上述基板的至少一個主面上,該圖案狀金屬層配置在上述圖案狀樹脂層上;其中,該觸控面板用導電性積層體滿足下述要件A和要件B中的至少一者: 要件A:自上述圖案狀樹脂層與上述圖案狀金屬層的介面起在上述圖案狀樹脂層側方向的500nm的表層區域中存在平均粒徑為10~1000nm的金屬粒子; 要件B:上述圖案狀樹脂層與上述圖案狀金屬層的介面具有凹凸形狀,上述凹凸形狀的算術平均粗糙度Ra為5~1000nm,上述凹凸形狀的凹部間的平均距離為10~1000nm。A conductive laminated body for a touch panel, comprising a substrate, a pattern-like resin layer, and a patterned metal layer, wherein the substrate has two main faces, and the patterned resin layer is disposed on at least one main surface of the substrate The patterned metal layer is disposed on the patterned resin layer; wherein the conductive laminate for the touch panel satisfies at least one of the following requirements A and B: A: from the patterned resin layer The interface of the patterned metal layer has metal particles having an average particle diameter of 10 to 1000 nm in a surface layer region of 500 nm in the direction of the pattern-like resin layer; and the material B: an interface between the pattern-like resin layer and the patterned metal layer The concave-convex shape is such that the arithmetic mean roughness Ra of the uneven shape is 5 to 1000 nm, and the average distance between the concave portions of the uneven shape is 10 to 1000 nm. 如權利要求1~3的任一項所述的觸控面板用導電性積層體,其中,上述基板為玻璃基板或樹脂基板。The conductive laminate for a touch panel according to any one of claims 1 to 3, wherein the substrate is a glass substrate or a resin substrate. 如權利要求1~3的任一項所述的觸控面板用導電性積層體,其中,與上述基板的主面相鄰地配置底塗層。The conductive laminate for a touch panel according to any one of claims 1 to 3, wherein an undercoat layer is disposed adjacent to a main surface of the substrate. 如權利要求1~3的任一項所述的觸控面板用導電性積層體,其中,上述圖案狀金屬層包含銅。The conductive laminated body for a touch panel according to any one of claims 1 to 3, wherein the patterned metal layer contains copper. 一種觸控面板,其包含權利要求1~6的任一項所述的觸控面板用導電性積層體。A touch panel comprising the conductive laminate for a touch panel according to any one of claims 1 to 6. 一種透明導電性積層體,其具有: 基板,該基板具有2個主面; 圖案狀被鍍覆層,該圖案狀被鍍覆層配置在上述基板的至少一個主面上,並且具有與金屬離子相互作用的官能團;以及 圖案狀金屬層,該圖案狀金屬層配置在上述圖案狀被鍍覆層上; 在上述圖案狀被鍍覆層中包含構成上述圖案狀金屬層的金屬成分; 使用能量分散型X射線分析法對上述圖案狀被鍍覆層和上述圖案狀金屬層的斷面進行組成分析時,相對於構成上述圖案狀金屬層的金屬成分來源的平均峰強度,上述圖案狀被鍍覆層所含有的上述金屬成分來源的平均峰強度的比為0.50~0.95。A transparent conductive laminated body comprising: a substrate having two main faces; a patterned plated layer disposed on at least one main surface of the substrate and having a metal ion a functional group that interacts; and a patterned metal layer disposed on the patterned plated layer; wherein the patterned plated layer includes a metal component constituting the patterned metal layer; When the composition of the pattern-coated layer and the patterned metal layer is analyzed by the X-ray analysis method, the pattern is plated with respect to the average peak intensity of the metal component constituting the pattern-shaped metal layer. The ratio of the average peak intensity of the above-mentioned metal component source contained in the layer is from 0.50 to 0.95.
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