TW201617810A - Conductive laminate for touch panel sensor and manufacturing method thereof, touch panel sensor, touch panel - Google Patents

Conductive laminate for touch panel sensor and manufacturing method thereof, touch panel sensor, touch panel Download PDF

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Publication number
TW201617810A
TW201617810A TW104124053A TW104124053A TW201617810A TW 201617810 A TW201617810 A TW 201617810A TW 104124053 A TW104124053 A TW 104124053A TW 104124053 A TW104124053 A TW 104124053A TW 201617810 A TW201617810 A TW 201617810A
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Taiwan
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resin layer
detecting electrode
group
touch panel
precursor
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TW104124053A
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Chinese (zh)
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吉田昌史
塚本直樹
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富士軟片股份有限公司
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Publication of TW201617810A publication Critical patent/TW201617810A/en

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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means

Abstract

The invention provides high electrical connecting conductive laminate for touch panel sensor and manufacturing method thereof, touch panel sensor and touch panel that having detective electrode and lead wire. The conductive laminate for touch panel sensor comprises substrate, resin layer located on the periphery area of the substrate composing functional group is capable of interacting with plating catalyst or precursor thereof, detective electrode that is disposed on the substrate via contacting with the resin layer by an end part and lead wire is disposed on the resin layer, which electrical connecting with an end part of the detective electrode. The lead wire is formed at least by the following procedure: providing the plating catalyst or precursor thereof to the resin layer and then plating the aforesaid resin layer afterwards.

Description

觸控面板感測器用導電性層積體和其製造方法、觸控面板感測器、觸控面板Conductive laminate for touch panel sensor and manufacturing method thereof, touch panel sensor, touch panel

本發明涉及一種觸控面板感測器用導電性層積體和其製造方法以及觸控面板感測器、觸控面板。The present invention relates to a conductive laminate for a touch panel sensor, a method of manufacturing the same, and a touch panel sensor and a touch panel.

在基板上形成了導電性細線的導電性膜被用於各種用途中,特別是近年來,隨著觸控面板在行動電話、可攜式遊戲機等上的安裝率的上升,能夠多點檢測的靜電電容方式的觸控面板感測器用的導電性膜的需求急速增加。A conductive film in which a conductive thin wire is formed on a substrate is used in various applications, and in particular, in recent years, with the increase in the mounting rate of a touch panel on a mobile phone, a portable game machine, etc., it is possible to detect multiple points. The demand for conductive films for capacitive touch sensors is rapidly increasing.

關於作為觸控面板感測器用導電性膜中含有的引出配線發揮出功能的導電層的製作方法,提出了各種方法,例如,在專利文獻1中(日本特開2008-207401號公報)公開了下述方法,在該方法中,對於具有相互作用性基團的接枝聚合物生成區域賦予無電解鍍覆催化劑或其前體,進行無電解鍍覆,來製作導電層。In the method of producing a conductive layer that functions as a lead-out wiring included in the conductive film for a touch panel sensor, various methods are proposed. For example, Patent Document 1 (JP-A-2008-207401) discloses In the method, an electroless plating catalyst or a precursor thereof is applied to a graft polymer-forming region having an interactive group, and electroless plating is performed to prepare a conductive layer.

在專利文獻1中,記載了導電層可作為“連接觸控面板內的電極(檢測電極)與驅動器的引導配線(引出配線)”發揮出功能這一點,但關於其具體構成卻並無記載。Patent Document 1 describes that the conductive layer can function as "the electrode (detection electrode) connected to the touch panel and the guide wiring (lead wiring) of the driver", but the specific configuration is not described.

本發明人發現,在參照專利文獻1記載的方法以引出配線的形式製作導電層時,在檢測電極之間可能會發生導電不良。The present inventors have found that when a conductive layer is formed in the form of a lead wiring by referring to the method described in Patent Document 1, a conductive defect may occur between the detecting electrodes.

鑒於上述情況,本發明的課題在於提供檢測電極與引出配線的電氣連線性高的觸控面板感測器用導電性層積體。In view of the above circumstances, an object of the present invention is to provide a conductive laminate for a touch panel sensor having high electrical continuity between a detecting electrode and a lead wiring.

此外,本發明的課題還在於提供上述觸控面板感測器用導電性層積體的製造方法、包含觸控面板感測器用導電性層積體的觸控面板感測器和觸控面板。Further, another object of the present invention is to provide a method of manufacturing a conductive laminate for a touch panel sensor, a touch panel sensor including the conductive laminate for a touch panel sensor, and a touch panel.

本發明人對於現有技術的問題進行了深入研究,結果發現,通過控制具有與鍍覆催化劑或其前體相互作用的官能團的樹脂層與檢測電極的位置關係,能夠解決上述課題。The inventors of the present invention have conducted intensive studies on the problems of the prior art, and as a result, have found that the above problems can be solved by controlling the positional relationship between the resin layer having a functional group that interacts with the plating catalyst or its precursor and the detecting electrode.

即,本發明人發現,利用下述構成能夠解決上述課題。That is, the inventors have found that the above problems can be solved by the following configuration.

(1) 一種觸控面板感測器用導電性層積體,其具有:(1) A conductive laminate for a touch panel sensor, comprising:

基板;Substrate

樹脂層,其配置在基板上的周邊區域,具有與鍍覆催化劑或其前體相互作用的官能團;a resin layer disposed in a peripheral region on the substrate and having a functional group that interacts with the plating catalyst or a precursor thereof;

檢測電極,其按照一端部與樹脂層接觸的方式配置在基板上;以及a detecting electrode disposed on the substrate in such a manner that one end portion is in contact with the resin layer;

引出配線,其配置在樹脂層上,與檢測電極的一端部電氣連接;Leading wiring disposed on the resin layer and electrically connected to one end portion of the detecting electrode;

引出配線為通過至少具有下述步驟的方法形成的配線,在該步驟中,對樹脂層賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理。The lead-out wiring is a wiring formed by a method having at least the following steps. In this step, a plating catalyst or a precursor thereof is applied to the resin layer, and a resin layer to which the plating catalyst or its precursor is applied is plated. .

(2) 如(1)所述的觸控面板感測器用導電性層積體,其中,(2) The conductive laminate for a touch panel sensor according to (1), wherein

該層積體進一步具有絕緣層,該絕緣層按照檢測電極的與引出配線電氣連接的上述一端部露出的方式覆蓋檢測電極;The laminate further includes an insulating layer covering the detecting electrode in such a manner that the one end portion of the detecting electrode electrically connected to the lead wiring is exposed;

在絕緣層中實質上不含有與鍍覆催化劑或其前體相互作用的官能團。The functional group that interacts with the plating catalyst or its precursor is substantially not contained in the insulating layer.

(3) 如(1)或(2)所述的觸控面板感測器用導電性層積體,其中,(3) The conductive laminate for a touch panel sensor according to (1) or (2), wherein

在樹脂層中含有著色劑,樹脂層作為裝飾層發揮功能;a coloring agent is contained in the resin layer, and the resin layer functions as a decorative layer;

檢測電極的一端部延伸至樹脂層上。One end portion of the detecting electrode extends onto the resin layer.

(4) 如(1)或(2)所述的觸控面板感測器用導電性層積體,其中,(4) The conductive laminate for a touch panel sensor according to (1) or (2), wherein

樹脂層為包含下側樹脂層與上側樹脂層的層積型樹脂層,該下側樹脂層含有著色劑,該上側樹脂層配置在下側樹脂層上,具有與鍍覆催化劑或其前體相互作用的官能團;The resin layer is a laminated resin layer including a lower resin layer containing a colorant, and a lower resin layer disposed on the lower resin layer to interact with the plating catalyst or its precursor Functional group

檢測電極的一端部延伸至上側樹脂層上。One end portion of the detecting electrode extends to the upper resin layer.

(5) 如(1)或(2)所述的觸控面板感測器用導電性層積體,其中,(5) The conductive laminate for a touch panel sensor according to (1) or (2), wherein

樹脂層為包含下側樹脂層與上側樹脂層的層積型樹脂層,該下側樹脂層含有著色劑,該上側樹脂層配置在下側樹脂層的一部分上,具有與鍍覆催化劑或其前體相互作用的官能團;The resin layer is a laminated resin layer including a lower resin layer containing a colorant, and a lower resin layer disposed on a portion of the lower resin layer and having a plating catalyst or a precursor thereof Interacting functional group;

檢測電極的一端部延伸至下側樹脂層上,在下側樹脂層上一端部與上側樹脂層接觸。One end portion of the detecting electrode extends to the lower resin layer, and one end portion of the lower resin layer is in contact with the upper resin layer.

(6) 如(1)~(5)的任一項所述的觸控面板感測器用導電性層積體,其中,基板為玻璃基板。(6) The conductive laminate for a touch panel sensor according to any one of (1) to (5) wherein the substrate is a glass substrate.

(7) 一種觸控面板感測器,其包含(1)~(6)的任一項所述的觸控面板感測器用導電性層積體。(7) A touch panel sensor comprising the conductive laminate for a touch panel sensor according to any one of (1) to (6).

(8) 一種觸控面板,其包含(1)~(6)的任一項所述的觸控面板感測器用導電性層積體。(8) A touch panel comprising the conductive laminate for a touch panel sensor according to any one of (1) to (6).

(9) 一種觸控面板感測器用導電性層積體的製造方法,其具有下述步驟:(9) A method of manufacturing a conductive laminate for a touch panel sensor, comprising the steps of:

步驟A,在該步驟中,在基板上的周邊區域形成具有與鍍覆催化劑或其前體相互作用的官能團的樹脂層;Step A, in this step, forming a resin layer having a functional group that interacts with the plating catalyst or its precursor on a peripheral region on the substrate;

步驟B,在該步驟中,在基板上形成檢測電極,該檢測電極的一端部延伸至樹脂層上,該檢測電極與樹脂層接觸;Step B, in this step, forming a detecting electrode on the substrate, one end portion of the detecting electrode extends to the resin layer, and the detecting electrode is in contact with the resin layer;

步驟C,在該步驟中,順序不一地實施步驟C-1和步驟C-2,在步驟C-1中,在樹脂層上形成抗蝕劑圖案;在步驟C-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極;以及Step C, in this step, step C-1 and step C-2 are performed in different order, in step C-1, a resist pattern is formed on the resin layer; in step C-2, substantially An insulating layer not containing a functional group that interacts with a plating catalyst or a precursor thereof, the insulating layer covering the detecting electrode in such a manner that one end portion of the detecting electrode that is in contact with the resin layer is exposed;

步驟D,在該步驟中,對於樹脂層上的未形成抗蝕劑圖案的區域賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理,形成與檢測電極的一端部電氣連接的引出配線。In the step D, a plating catalyst or a precursor thereof is applied to a region of the resin layer where no resist pattern is not formed, and a resin layer to which a plating catalyst or a precursor thereof is applied is plated to form a resin layer. A lead wire electrically connected to one end portion of the detecting electrode.

(10) 一種觸控面板感測器用導電性層積體的製造方法,其具有下述步驟:(10) A method of manufacturing a conductive laminate for a touch panel sensor, comprising the steps of:

步驟E,在該步驟中,在基板上的周邊區域形成含有著色劑的下側樹脂層;Step E, in this step, forming a lower resin layer containing a colorant on a peripheral region on the substrate;

步驟F,在該步驟中,在基板上形成一端部延伸至下側樹脂層上的檢測電極;Step F, in this step, forming a detection electrode extending from one end to the lower resin layer on the substrate;

步驟G,在該步驟中,順序不一地實施步驟G-1和步驟G-2,在步驟G-1中,形成具有與鍍覆催化劑或其前體相互作用的官能團的上側樹脂層,該上側樹脂層配置在下側樹脂層的一部分上,並且該上側樹脂層與檢測電極接觸;在步驟G-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與上側樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極;以及Step G, in which step G-1 and step G-2 are sequentially performed, and in step G-1, an upper resin layer having a functional group that interacts with the plating catalyst or its precursor is formed, The upper resin layer is disposed on a portion of the lower resin layer, and the upper resin layer is in contact with the detecting electrode; in the step G-2, an insulating layer is formed which does not substantially contain a functional group that interacts with the plating catalyst or its precursor, The insulating layer covers the detecting electrode in such a manner that one end portion of the detecting electrode that is in contact with the upper resin layer is exposed;

步驟H,在該步驟中,通過至少具有下述步驟的方法形成與檢測電極的一端部電氣連接的引出配線,在該步驟中,對上側樹脂層賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的上側樹脂層進行鍍覆處理。Step H, in this step, a lead-out wiring electrically connected to one end portion of the detecting electrode is formed by a method having at least the following steps, and in this step, a plating catalyst or a precursor thereof is applied to the upper resin layer, and is given The upper resin layer of the plating catalyst or its precursor is subjected to a plating treatment.

本發明之效果為:The effect of the invention is:

1、根據本發明,能夠提供一種檢測電極與引出配線的電氣連線性高的觸控面板感測器用導電性層積體。1. According to the present invention, it is possible to provide a conductive laminate for a touch panel sensor having high electrical connection linearity between the detecting electrode and the lead wiring.

2、此外,根據本發明,還能夠提供上述觸控面板感測器用導電性層積體的製造方法、包含觸控面板感測器用導電性層積體的觸控面板感測器和觸控面板。2. In addition, according to the present invention, a method of manufacturing a conductive laminate for a touch panel sensor, a touch panel sensor including a conductive laminate for a touch panel sensor, and a touch panel can be provided. .

下面對本發明的觸控面板感測器用導電性層積體及其製造方法、觸控面板感測器、以及觸控面板進行詳細說明。Hereinafter, the conductive laminate for a touch panel sensor of the present invention, a method of manufacturing the same, a touch panel sensor, and a touch panel will be described in detail.

需要說明的是,在本說明書中,使用“~”表示的數值範圍是指包含“~”前後所記載的數值作為下限值和上限值的範圍。另外,本發明中的圖為示意圖,各層的厚度關係、位置關係等不一定必須與實際情況一致。In the present specification, the numerical range represented by "to" means a range including the numerical values described before and after "to" as the lower limit and the upper limit. In addition, the drawings in the present invention are schematic views, and the thickness relationship, positional relationship, and the like of each layer do not necessarily have to be consistent with actual conditions.

作為本發明的觸控面板感測器用導電性層積體的特徵點之一,可以舉出按照含有特定官能團的樹脂層與檢測電極接觸的方式進行配置這一點。通過採用這樣的配置,作為鍍覆金屬層(該鍍覆金屬層是對於被賦予了鍍覆催化劑或其前體的樹脂層實施鍍覆處理而形成的)的引出配線與檢測電極充分接觸,可確保兩者間的電氣導通。One of the features of the conductive laminate for a touch panel sensor of the present invention is that the resin layer containing a specific functional group is placed in contact with the detecting electrode. By adopting such an arrangement, the lead wiring which is formed as a plating metal layer (which is formed by performing a plating treatment on the resin layer to which the plating catalyst or the precursor is applied) is sufficiently in contact with the detecting electrode. Ensure electrical continuity between the two.

此外,作為本發明的其它特徵點之一,可以舉出按照檢測電極的一端部露出的方式來設置覆蓋檢測電極的絕緣層這一點。通過設置絕緣層,在對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理時,能夠抑制鍍覆物在檢測電極上的析出,作為結果,能夠進一步抑制檢測電極間的導通的發生。Further, as one of the other features of the present invention, an insulating layer covering the detecting electrode may be provided so that one end portion of the detecting electrode is exposed. When the resin layer to which the plating catalyst or its precursor is applied is subjected to a plating treatment by providing the insulating layer, precipitation of the plating material on the detecting electrode can be suppressed, and as a result, conduction between the detecting electrodes can be further suppressed. occur.

<<第1實施方式>><<First embodiment>>

圖1中示出了本發明的觸控面板感測器用導電性層積體的第1實施方式的俯視圖。圖2為沿切斷線A-A進行切斷的截面圖。需要說明的是,在本說明書中,附圖是為了容易理解各層構成而進行示意性表示的圖,並非為精確表示各層配置的圖。Fig. 1 is a plan view showing a first embodiment of a conductive laminate for a touch panel sensor according to the present invention. Fig. 2 is a cross-sectional view taken along the cutting line A-A. In the present specification, the drawings are schematically shown for easy understanding of the respective layer configurations, and are not intended to accurately show the arrangement of the layers.

圖1所示的觸控面板感測器用導電性層積體10具備:基板12、配置在基板12上的周邊區域EO 的樹脂層14、在基板12上的被周邊區域EO 包圍的中央區域EI 上配置的2個以上的第1檢測電極16和第2檢測電極18、配置在樹脂層14上的與第1檢測電極16和第2檢測電極18電氣連接的2個以上引出配線20、以及按照覆蓋第1檢測電極16和第2檢測電極18的方式配置於中央區域EI 的絕緣層22。The conductive laminate 10 for a touch panel sensor shown in FIG. 1 includes a substrate 12, a resin layer 14 disposed in a peripheral region E O of the substrate 12, and a center surrounded by a peripheral region E O on the substrate 12. two or more first detecting electrode 16 and the second detection electrode disposed on a region E I 18, disposed on the resin layer 14 is connected to the 18 electrical first detection electrode 16 and the second detection electrode of the two or more lead lines 20 And the insulating layer 22 disposed in the central region E I so as to cover the first detecting electrode 16 and the second detecting electrode 18.

本實施方式的觸控面板感測器用導電性層積體10具有構成輸入區域(在作為觸控面板感測器使用時,該輸入區域能夠由使用者進行輸入操作)的中央區域EI 、以及位於中央區域EI 的外側的周邊區域EO 。需要說明的是,關於中央區域,如上所述為配置檢測電極的區域;關於周邊區域EO ,為中央區域外側的配置引出配線的外側區域(周邊區域)。The conductive laminate 10 for a touch panel sensor of the present embodiment has a central region E I constituting an input region (which can be input by a user when used as a touch panel sensor), and A peripheral area E O located outside the central area E I . In the central region, as described above, the region in which the detecting electrode is disposed; and in the peripheral region E O , the outer region (peripheral region) in which the lead wire is disposed outside the central region.

下面對上述構成進行詳細說明。The above configuration will be described in detail below.

[基板][substrate]

基板12具有2個主面,為承擔下述作用的部件:其在中央區域EI 支承第1檢測電極16和第2檢測電極18,同時在周邊區域EO 支承樹脂層14。另外,在圖1中,周邊區域EO 為從基板12的外周邊向中央側延伸的與外周邊接近的區域,形成為矩形框狀,但並不限於該形態,可以任意為心型、蛋型、圓型等。The substrate 12 has two main faces, and is a member that functions to support the first detecting electrode 16 and the second detecting electrode 18 in the central region E I while supporting the resin layer 14 in the peripheral region E O . Further, in FIG. 1, the peripheral region E O to the outer periphery of a region extending from near the outer periphery of the substrate 12 toward the center side, is formed into a rectangular frame shape, but is not limited to this shape, a heart shape may be arbitrary, egg Type, round shape, etc.

基板12的種類沒有特別限制,例如可以舉出絕緣基板,更具體地說,可以使用樹脂基板、陶瓷基板、玻璃基板等,優選玻璃基板。The type of the substrate 12 is not particularly limited, and examples thereof include an insulating substrate. More specifically, a resin substrate, a ceramic substrate, a glass substrate, or the like can be used, and a glass substrate is preferable.

作為樹脂基板的材料,例如可以舉出聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯、聚醚碸、聚丙烯酸系樹脂、聚氨酯系樹脂、聚酯、聚碳酸酯、聚碸、聚醯胺、聚芳酯、聚烯烴、纖維素系樹脂、聚氯乙烯、環烯烴系樹脂等。其中優選聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯或聚烯烴。Examples of the material of the resin substrate include polyethylene terephthalate, polyethylene naphthalate, polyether oxime, polyacrylic resin, urethane resin, polyester, polycarbonate, and poly. Anthracene, polyamine, polyarylate, polyolefin, cellulose resin, polyvinyl chloride, cycloolefin resin, and the like. Among them, polyethylene terephthalate, polyethylene naphthalate or polyolefin is preferred.

樹脂基板優選帶有硬塗層。硬塗層優選設於表面的聚對苯二甲酸乙二醇酯、聚萘二甲酸乙二醇酯或聚烯烴,硬塗層更優選設於表面的聚對苯二甲酸乙二醇酯、聚烯烴。The resin substrate is preferably provided with a hard coat layer. The hard coat layer is preferably polyethylene terephthalate, polyethylene naphthalate or polyolefin provided on the surface, and the hard coat layer is more preferably polyethylene terephthalate or polyethylene provided on the surface. Olefins.

基板12的厚度(mm)沒有特別限制,從處理性和薄型化的平衡的方面考慮,樹脂基板優選為0.01~2mm、更優選為0.02~1mm、最優選為0.03~0.1mm。此外,玻璃基板優選為0.01~2mm、更優選為0.3~0.8mm、最優選為0.4~0.7mm。The thickness (mm) of the substrate 12 is not particularly limited, and the resin substrate is preferably 0.01 to 2 mm, more preferably 0.02 to 1 mm, and most preferably 0.03 to 0.1 mm from the viewpoint of balance between handleability and thickness reduction. Further, the glass substrate is preferably 0.01 to 2 mm, more preferably 0.3 to 0.8 mm, and most preferably 0.4 to 0.7 mm.

此外,基板12優選適當地透過光。具體地說,基板12的全光線透過率優選為85~100%。Further, the substrate 12 preferably transmits light appropriately. Specifically, the total light transmittance of the substrate 12 is preferably 85 to 100%.

[樹脂層][resin layer]

樹脂層14為配置在基板12上的整個周邊區域EO 的層,是具有與鍍覆催化劑或其前體相互作用的官能團(下文中也簡單稱為“相互作用性基團”)的層。樹脂層14根據相互作用性基團的功能對於在製作引出配線時所使用的鍍覆催化劑或其前體進行吸附(附著)。即,樹脂層14發揮出作為鍍覆催化劑或其前體的良好接受層(所謂的被鍍覆層)的功能。The resin layer 14 is a layer of the entire peripheral region E O disposed on the substrate 12, and is a layer having a functional group (hereinafter simply referred to as "interactive group") which interacts with the plating catalyst or its precursor. The resin layer 14 adsorbs (attaches) the plating catalyst or its precursor used in the production of the lead wiring in accordance with the function of the interactive group. That is, the resin layer 14 functions as a good receiving layer (so-called coated layer) as a plating catalyst or a precursor thereof.

需要說明的是,如下文所述,在樹脂層14中優選包含著色劑並發揮出作為所謂裝飾層的功能。即,樹脂層14優選在發揮出作為被鍍覆層的功能的同時還發揮出作為裝飾層的功能。需要說明的是,所謂裝飾層為從基板12側視認觸控面板感測器用導電性層積體10時能夠遮蓋引出配線20的層,可發揮出作為用於提高美觀性的層的作用。In addition, as described below, the resin layer 14 preferably contains a coloring agent and functions as a so-called decorative layer. In other words, it is preferable that the resin layer 14 functions as a decorative layer while exhibiting a function as a layer to be plated. In addition, the decorative layer is a layer that can cover the lead wiring 20 when the conductive layered body 10 for a touch panel sensor is viewed from the substrate 12 side, and functions as a layer for improving the appearance.

樹脂層14的厚度沒有特別限制,從生產率的方面考慮,優選為5~100μm、更優選為10~70μm、進一步優選為20~60μm。The thickness of the resin layer 14 is not particularly limited, and is preferably 5 to 100 μm, more preferably 10 to 70 μm, still more preferably 20 to 60 μm from the viewpoint of productivity.

樹脂層14所含有的相互作用性基團意指能夠與被賦予至樹脂層14的鍍覆催化劑或其前體發生相互作用的官能團,例如可以使用能夠與鍍覆催化劑或其前體形成靜電相互作用的官能團或能夠與鍍覆催化劑或其前體形成配位的含氮官能團、含硫官能團、含氧官能團等。The interactive group contained in the resin layer 14 means a functional group capable of interacting with the plating catalyst or its precursor imparted to the resin layer 14, and for example, it is possible to form an electrostatic interaction with the plating catalyst or its precursor. The functional group to be functional or a nitrogen-containing functional group, a sulfur-containing functional group, an oxygen-containing functional group or the like capable of forming a coordination with the plating catalyst or its precursor.

作為相互作用性基團,更具體地說,可以舉出:氨基、酰胺基、酰亞胺基、脲基、叔氨基、銨基、脒基、三嗪環、三唑環、苯並三唑基、咪唑基、苯並咪唑基、喹啉基、吡啶基、嘧啶基、吡嗪基、喹唑啉基、喹喔啉基、嘌呤基、三嗪基、哌啶基、哌嗪基、吡咯烷基、吡唑基、苯胺基、含有烷基胺結構的基團、含有異氰脲結構的基團、硝基、亞硝基、偶氮基、重氮基、疊氮基、氰基、氰酸酯基等含氮官能團;醚基、羥基、酚羥基、羧酸基、碳酸酯基、羰基、酯基、含有N-氧化物結構的基團、含有S-氧化物結構的基團、含有N-羥基結構的基團等含氧官能團;噻吩基、硫羥基、硫脲基、硫代氰尿酸基、苯並噻唑基、巰基三嗪基、硫醚基、硫氧基(チオキシ基)、亞碸基、碸基、亞硫酸鹽基、含有亞碸亞胺結構的基團、含有亞碸鹽結構的基團、磺酸基、含有磺酸酯結構的基團等含硫官能團;磷酸酯(ホスフォート)基、磷酰胺基、膦基、含有磷酸酯結構的基團等含磷官能團;含有氯、溴等鹵原子的基團等,在可採用鹽結構的官能團中,還可以使用它們的鹽。Specific examples of the interactive group include an amino group, an amide group, an imide group, a urea group, a tertiary amino group, an ammonium group, a thiol group, a triazine ring, a triazole ring, and a benzotriazole. Base, imidazolyl, benzimidazolyl, quinolyl, pyridyl, pyrimidinyl, pyrazinyl, quinazolinyl, quinoxalinyl, fluorenyl, triazinyl, piperidinyl, piperazinyl, pyrrole Alkyl, pyrazolyl, anilino, a group containing an alkylamine structure, a group containing an isocyanurate structure, a nitro group, a nitroso group, an azo group, a diazo group, an azide group, a cyano group, a nitrogen-containing functional group such as a cyanate group; an ether group, a hydroxyl group, a phenolic hydroxyl group, a carboxylic acid group, a carbonate group, a carbonyl group, an ester group, a group having an N-oxide structure, a group having an S-oxide structure, An oxygen-containing functional group such as a group having an N-hydroxy structure; a thienyl group, a thiol group, a thiourea group, a thiocyanuric acid group, a benzothiazolyl group, a decyltriazinyl group, a thioether group, a thiol group , anthracenylene, fluorenyl group, sulfite group, group containing a ruthenium structure, a group containing an ytterbium salt structure, a sulfonic acid group, containing a sulfur-containing functional group such as a group of an acid ester structure; a phosphorus-containing functional group such as a phosphate ester group, a phosphoramide group, a phosphino group, or a phosphate group-containing group; a group containing a halogen atom such as chlorine or bromine; Among the functional groups in which a salt structure can be employed, salts thereof can also be used.

其中,出於極性高、與鍍覆催化劑或其前體等的吸附能力高的原因,特別優選羧酸基、磺酸基、磷酸基和硼酸基等離子性極性基團、醚基或氰基,進一步優選羧酸基(羧基)或氰基。特別是為了增加羧酸基,可以利用鹼性溶液對樹脂層的表面進行皂化處理。Among them, an ionic polar group, an ether group or a cyano group such as a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a boric acid group is particularly preferable because of high polarity and high adsorption ability with a plating catalyst or a precursor thereof. Further preferred is a carboxylic acid group (carboxyl group) or a cyano group. In particular, in order to increase the carboxylic acid group, the surface of the resin layer may be subjected to a saponification treatment using an alkaline solution.

在樹脂層14中,可以含有2種以上的相互作用性基團。The resin layer 14 may contain two or more types of interactive groups.

構成樹脂層14的樹脂的種類沒有特別限制,可以舉出熱固化性樹脂或熱塑性樹脂等絕緣性樹脂(例如(甲基)丙烯酸系樹脂(包括交聯和非交聯的(甲基)丙烯酸系樹脂))。在這些材料中含有相互作用性基團即可。需要說明的是,所謂(甲基)丙烯酸系樹脂是指包括丙烯酸系樹脂和甲基丙烯酸樹脂的概念。The type of the resin constituting the resin layer 14 is not particularly limited, and examples thereof include an insulating resin such as a thermosetting resin or a thermoplastic resin (for example, a (meth)acrylic resin (including a crosslinked and a non-crosslinked (meth)acrylic resin). Resin)). It is sufficient that these materials contain an interactive group. In addition, the (meth)acrylic resin is a concept including an acrylic resin and a methacryl resin.

更具體地說,作為熱固化性樹脂,例如可以舉出環氧樹脂、酚樹脂、聚醯亞胺樹脂、聚酯樹脂、雙馬來醯亞胺樹脂、聚烯烴樹脂、異氰酸酯樹脂、交聯(甲基)丙烯酸系樹脂、矽樹脂等。作為熱塑性樹脂,例如可以舉出苯氧基樹脂、聚醚碸、聚碸、聚亞苯基碸、聚苯硫醚、聚苯基醚、聚醚醯亞胺、非交聯的(甲基)丙烯酸系樹脂等。More specifically, examples of the thermosetting resin include an epoxy resin, a phenol resin, a polyimide resin, a polyester resin, a bismaleimide resin, a polyolefin resin, an isocyanate resin, and crosslinking ( Methyl) acrylic resin, enamel resin, and the like. Examples of the thermoplastic resin include phenoxy resin, polyether oxime, polyfluorene, polyphenylene fluorene, polyphenylene sulfide, polyphenyl ether, polyether sulfimine, and non-crosslinked (methyl). Acrylic resin, etc.

樹脂層14中含有的著色劑的種類沒有特別限制,使用公知的顏料或染料。作為顏料,無機顏料和有機顏料均可使用。更具體地說,作為無機顏料,可示例出:二氧化鈦、氧化鋅等白色顏料;碳酸鈣、硫酸鋇等體質顏料;炭黑之類的黑色顏料;鐵丹、鉛丹、鉬紅、鎘紅之類的紅色顏料;一氧化鉛(リサージ)、鉻黃、黃色氧化鐵之類的黃色顏料;普鲁士藍、群青之類的藍色顏料。此外,作為有機顏料,可以示例出偶氮系顏料、酞菁系顏料、喹吖啶酮系顏料、二萘嵌苯系顏料、異吲哚啉酮系顏料、二噁嗪系顏料、士林(スレン)系顏料等。The kind of the coloring agent contained in the resin layer 14 is not particularly limited, and a known pigment or dye is used. As the pigment, both an inorganic pigment and an organic pigment can be used. More specifically, as the inorganic pigment, white pigments such as titanium oxide and zinc oxide; body pigments such as calcium carbonate and barium sulfate; black pigments such as carbon black; iron oxide, lead dan, molybdenum red, and cadmium red can be exemplified. Red pigments of the class; yellow pigments such as lead oxide, chrome yellow, yellow iron oxide; blue pigments such as Prussian blue and ultramarine. In addition, examples of the organic pigment include an azo pigment, a phthalocyanine pigment, a quinacridone pigment, a perylene pigment, an isoindolinone pigment, a dioxazine pigment, and a Shilin (スレン) is a pigment, etc.

[檢測電極][Detection electrode]

第1檢測電極16和第2檢測電極18是在包含本實施方式的觸控面板感測器用導電性層積體的觸控面板感測器中感知靜電電容變化的感應電極,其構成感知部(感應部)。即,若使指尖與觸控面板接觸,則各檢測電極的相互靜電電容發生變化,基於該變化量利用IC電路對指尖的位置進行運算。The first detecting electrode 16 and the second detecting electrode 18 are sensing electrodes that sense a change in electrostatic capacitance in a touch panel sensor including the conductive layered body for a touch panel sensor of the present embodiment, and constitute a sensing portion ( Sensing section). In other words, when the fingertip is brought into contact with the touch panel, the mutual capacitance of each of the detecting electrodes changes, and the position of the fingertip is calculated by the IC circuit based on the amount of change.

第1檢測電極16具有對於接近中央區域EI 的操作者手指的X方向的輸入位置進行檢測的作用,具有在其與手指之間產生靜電電容的功能。第1檢測電極16在第1方向(X方向)延伸,為在與第1方向正交的第2方向(Y方向)隔著規定的間隔進行排列的電極。The first detection electrode 16 has a function for detecting X-direction position of the input region E I near the center of the operator's finger, having a function of generating electrostatic capacitance between it and the fingers. The first detecting electrode 16 extends in the first direction (X direction) and is an electrode that is arranged at a predetermined interval in the second direction (Y direction) orthogonal to the first direction.

第2檢測電極18具有對於接近中央區域EI 的操作者手指的Y方向的輸入位置進行檢測的作用,具有在其與手指之間產生靜電電容的功能。第2檢測電極18在第2方向(Y方向)延伸,為在第1方向(X方向)隔著規定的間隔進行排列的電極。The second detecting electrode 18 has a function of detecting an input position in the Y direction of the operator's finger close to the central region E I , and has a function of generating an electrostatic capacitance between the finger and the finger. The second detecting electrode 18 extends in the second direction (Y direction) and is an electrode that is arranged at a predetermined interval in the first direction (X direction).

在圖1中,第1檢測電極16設置4個、第2檢測電極18設置4個,但其數目沒有特別限制,只要為2個以上即可。In FIG. 1, four of the first detecting electrodes 16 and four of the second detecting electrodes 18 are provided, but the number thereof is not particularly limited, and may be two or more.

在圖1中,第1檢測電極16和第2檢測電極18為實心膜,但也可以包含網狀等特定的圖案。In FIG. 1, the first detecting electrode 16 and the second detecting electrode 18 are solid films, but may include a specific pattern such as a mesh.

需要說明的是,如圖2所示,在第1檢測電極16與第2檢測電極18交叉的部分,防止第1檢測電極16與第2檢測電極18的導通,進行絕緣,為此在第1檢測電極16與第2檢測電極18之間配置電極間絕緣層24。In addition, as shown in FIG. 2, in the portion where the first detecting electrode 16 and the second detecting electrode 18 intersect, the conduction between the first detecting electrode 16 and the second detecting electrode 18 is prevented, and insulation is performed. An inter-electrode insulating layer 24 is disposed between the detecting electrode 16 and the second detecting electrode 18.

另外,如圖2所示,在第2檢測電極18中,各自的一端部18A延伸至上述的樹脂層14上、與樹脂層14接觸。換言之,一端部18A位於樹脂層14上。需要說明的是,在第1檢測電極16中也同樣地,其一端部延伸至樹脂層14上而與樹脂層14接觸。Further, as shown in FIG. 2, in the second detecting electrode 18, each of the one end portions 18A extends over the resin layer 14 and is in contact with the resin layer 14. In other words, the one end portion 18A is located on the resin layer 14. In the same manner, in the first detecting electrode 16, the one end portion thereof extends over the resin layer 14 to be in contact with the resin layer 14.

由此,第1檢測電極16的一端部和第2檢測電極18的一端部分別與樹脂層14接觸,從而,作為結果,與利用後述方法在樹脂層14上形成的引出配線20接觸良好,可確保第1檢測電極16和第2檢測電極18與引出配線20的良好的電氣導通。As a result, the one end portion of the first detecting electrode 16 and the one end portion of the second detecting electrode 18 are in contact with the resin layer 14, respectively, and as a result, the contact with the lead wiring 20 formed on the resin layer 14 by the method described later is good. Good electrical conduction between the first detecting electrode 16 and the second detecting electrode 18 and the lead wiring 20 is ensured.

構成第1檢測電極16和第2檢測電極18的材料沒有特別限制,例如可以舉出氧化銦錫(ITO)、氧化錫、氧化鋅、氧化鎘、氧化鎵、二氧化鈦等金屬氧化物。此外,還可以使用金(Au)、銀(Ag)、銅(Cu)、鋁(Al)等金屬或合金等。The material constituting the first detecting electrode 16 and the second detecting electrode 18 is not particularly limited, and examples thereof include metal oxides such as indium tin oxide (ITO), tin oxide, zinc oxide, cadmium oxide, gallium oxide, and titanium oxide. Further, a metal such as gold (Au), silver (Ag), copper (Cu), or aluminum (Al) or an alloy may be used.

[引出配線][lead wiring]

引出配線20為承擔用於對第1檢測電極16和第2檢測電極18施加電壓的作用的部件。引出配線20被配置在基板12上的周邊區域EO ,其一端與相應的第1檢測電極16和第2檢測電極18電氣連接,另一端位於柔性印刷電路板等所配置的位置。另外,在圖2中,引出配線按照覆蓋檢測電極的一端部(圖2中,第2檢測電極18的一端部18A)的方式進行配置,但只要引出配線與檢測電極電氣連接即可,並不限於該方式。The lead wiring 20 is a member that functions to apply a voltage to the first detecting electrode 16 and the second detecting electrode 18. The lead wiring 20 is disposed in the peripheral region E O of the substrate 12, and one end thereof is electrically connected to the corresponding first detecting electrode 16 and second detecting electrode 18, and the other end is located at a position where the flexible printed circuit board or the like is disposed. In addition, in FIG. 2, the lead wiring is disposed so as to cover one end portion of the detecting electrode (the one end portion 18A of the second detecting electrode 18 in FIG. 2), but the lead wiring may be electrically connected to the detecting electrode, and Limited to this method.

如下文所述,引出配線20為通過至少具有下述步驟的方法形成的配線,在該步驟中,對樹脂層14賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的樹脂層14進行鍍覆處理。即,引出配線20為由鍍覆處理中形成的鍍覆金屬層(金屬層)構成的配線。As described below, the lead wiring 20 is a wiring formed by a method having at least the following steps, in which a plating catalyst or a precursor thereof is applied to the resin layer 14, and a plating catalyst or a precursor thereof is imparted thereto. The resin layer 14 is subjected to a plating treatment. That is, the lead wiring 20 is a wiring composed of a plated metal layer (metal layer) formed in the plating process.

需要說明的是,引出配線20的數目沒有特別限制,通常根據第1檢測電極16和第2檢測電極18的數目配置2根以上。In addition, the number of the lead wires 20 is not particularly limited, and generally two or more are arranged in accordance with the number of the first detecting electrodes 16 and the second detecting electrodes 18.

引出配線20的厚度沒有特別限制,可以根據使用目的適當選擇最佳的厚度,從導電特性的方面考慮,優選為0.1μm以上、更優選為0.5μm以上、進一步優選為1~30μm。The thickness of the lead-out wiring 20 is not particularly limited, and an optimum thickness can be appropriately selected depending on the purpose of use. From the viewpoint of electrical conductivity, it is preferably 0.1 μm or more, more preferably 0.5 μm or more, and still more preferably 1 to 30 μm.

引出配線20的線寬沒有特別限制,從引出配線的低電阻性的方面考慮,優選為30μm以下、更優選為15μm以下、進一步優選為10μm以下,優選為0.5μm以上、更優選為1.0μm以上。The line width of the lead-out wiring 20 is not particularly limited, and is preferably 30 μm or less, more preferably 15 μm or less, further preferably 10 μm or less, and preferably 0.5 μm or more, and more preferably 1.0 μm or more from the viewpoint of low resistance of the lead wiring. .

此外,構成引出配線20的金屬的種類沒有特別限制,根據後述的鍍覆處理所使用的鍍覆液的種類而不同,例如可以舉出銅、鉻、鉛、鎳、金、銀、錫、鋅等,從導電性的方面出發,優選銅、金、銀,更優選銅、銀。In addition, the type of the metal constituting the lead-out wiring 20 is not particularly limited, and may be different depending on the type of the plating liquid used for the plating treatment to be described later, and examples thereof include copper, chromium, lead, nickel, gold, silver, tin, and zinc. From the viewpoint of conductivity, copper, gold, and silver are preferable, and copper and silver are more preferable.

需要說明的是,儘管在圖1中未圖示出,但在引出配線20的另一端(並非為檢測電極側的端部)所處的位置可以配置柔性印刷電路板等。柔性印刷電路板為在基板上設有2個以上的配線和端子的板,與引出配線20各自的另一端連接,發揮出將靜電電容式觸控面板感測器與外部裝置(例如顯示裝置)進行連接的作用。In addition, although not illustrated in FIG. 1, a flexible printed circuit board or the like may be disposed at a position where the other end of the lead wiring 20 (not the end on the detecting electrode side) is located. The flexible printed circuit board is a board in which two or more wirings and terminals are provided on a substrate, and is connected to the other end of the lead wiring 20 to exhibit a capacitive touch panel sensor and an external device (for example, a display device). The role of the connection.

[絕緣層][Insulation]

絕緣層22為按照第1檢測電極16和第2檢測電極18的與引出配線20連接的一端部露出的方式覆蓋第1檢測電極16和第2檢測電極18的層,在圖1中遍佈中央區域EI 的整個區域進行配置。需要說明的是,絕緣層22為任意的構成,是根據需要進行配置的層。The insulating layer 22 covers the first detecting electrode 16 and the second detecting electrode 18 so that one end portion of the first detecting electrode 16 and the second detecting electrode 18 connected to the lead wiring 20 is exposed, and is spread over the central region in FIG. E I is the entire area of the configuration. In addition, the insulating layer 22 has an arbitrary structure, and is a layer arrange|positioned as needed.

在絕緣層22中實質上不含有與鍍覆催化劑或其前體相互作用的官能團。因此,如下文所述,在上述製造引出配線20時所實施的賦予鍍覆催化劑或其前體的步驟中,可防止鍍覆催化劑或其前體被賦予(吸附)至第1檢測電極16和第2檢測電極18,作為結果,可抑制鍍覆處理後檢測電極間的導通的發生。The insulating layer 22 does not substantially contain a functional group that interacts with the plating catalyst or its precursor. Therefore, as described below, in the step of imparting the plating catalyst or the precursor thereof to the above-described production of the lead wiring 20, it is possible to prevent the plating catalyst or its precursor from being imparted (adsorbed) to the first detecting electrode 16 and As a result, the second detecting electrode 18 can suppress the occurrence of conduction between the detecting electrodes after the plating treatment.

絕緣層22的種類沒有特別限制,可以使用公知的絕緣材料,例如適於使用絕緣性有機材料和絕緣性無機材料。The type of the insulating layer 22 is not particularly limited, and a known insulating material can be used. For example, an insulating organic material and an insulating inorganic material are suitably used.

作為絕緣性有機材料,可以使用公知的絕緣性樹脂。作為絕緣性樹脂,可以舉出在上述的樹脂層14的形成中所使用的熱固化性樹脂或熱塑性樹脂等。As the insulating organic material, a known insulating resin can be used. The insulating resin may, for example, be a thermosetting resin or a thermoplastic resin used for forming the resin layer 14 described above.

此外,作為絕緣性無機材料,例如可以使用二氧化矽、氧化鈮等金屬氧化物等。Further, as the insulating inorganic material, for example, a metal oxide such as cerium oxide or cerium oxide can be used.

作為絕緣層22,可以僅為1層、也可以為2層以上。在2層以上的情況下,各層的材料可以不同。此外,還可以使用覆蓋帶之類的粘著性弱的膠帶。The insulating layer 22 may be only one layer or two or more layers. In the case of two or more layers, the materials of the respective layers may be different. In addition, a tape having a weak adhesive such as a cover tape can also be used.

絕緣層22實質上不含有與鍍覆催化劑或其前體相互作用的官能團(相互作用性基團)。此處,實質上不含有相互作用性基團意指絕緣層22的鍍覆催化劑或其前體的吸附量為1000質量ppm以下,該吸附量優選為500質量ppm以下、更優選為100質量ppm以下、最優選為10質量ppm以下。其可通過ICP質量分析法進行測定。The insulating layer 22 does not substantially contain a functional group (interactive group) that interacts with the plating catalyst or its precursor. Here, the substantially no intermetallic group means that the amount of adsorption of the plating catalyst or the precursor of the insulating layer 22 is 1000 ppm by mass or less, and the amount of adsorption is preferably 500 ppm by mass or less, more preferably 100 ppm by mass. The following is most preferably 10 ppm by mass or less. It can be determined by ICP mass spectrometry.

絕緣層22的厚度(乾燥後的厚度)沒有特別限制,從能夠進一步抑制鍍覆處理時在中央區域EI 的鍍覆析出的方面考慮,優選為1~9μm、更優選為1~8μm、進一步優選為2~8μm、特別優選為3~8μm。The thickness of the insulating layer 22 (thickness after drying) is not particularly limited, and it is preferably 1 to 9 μm, more preferably 1 to 8 μm, from the viewpoint of further suppressing plating deposition in the central region E I during the plating treatment. It is preferably 2 to 8 μm, and particularly preferably 3 to 8 μm.

另外,儘管在圖1中未圖示出,但可以在樹脂層14上的未配置引出配線20的區域上配置抗蝕劑圖案。如下文所述,在形成引出配線20時,根據需要使用抗蝕劑圖案。Further, although not illustrated in FIG. 1, a resist pattern may be disposed on a region of the resin layer 14 where the lead wiring 20 is not disposed. As described below, when the lead wiring 20 is formed, a resist pattern is used as needed.

另外,儘管在圖1中未圖示出,但可以按照覆蓋引出配線20的另一端以外的部分的方式進一步配置絕緣保護膜。Further, although not illustrated in FIG. 1, the insulating protective film may be further disposed so as to cover a portion other than the other end of the lead wiring 20.

<觸控面板感測器用導電性層積體的製造方法><Method of Manufacturing Conductive Laminate for Touch Panel Sensor>

上述的觸控面板感測器用導電性層積體的第1實施方式的製造方法沒有特別限制,可適當地實施最佳的步驟,從製造容易的方面考慮,優選具有以下的步驟。The manufacturing method of the first embodiment of the conductive laminate for a touch panel sensor described above is not particularly limited, and an optimum step can be appropriately performed. From the viewpoint of easiness of production, it is preferable to have the following steps.

步驟A:在基板上的周邊區域形成樹脂層的步驟;Step A: a step of forming a resin layer on a peripheral region on the substrate;

步驟B:在基板上形成檢測電極的步驟,該檢測電極的一端部延伸至樹脂層上,從而該檢測電極與樹脂層接觸;Step B: forming a detecting electrode on the substrate, one end portion of the detecting electrode extending onto the resin layer, so that the detecting electrode is in contact with the resin layer;

步驟C:順序不一地實施步驟C-1和步驟C-2的步驟,在步驟C-1中,在樹脂層上形成抗蝕劑圖案;在步驟C-2中,按照與樹脂層接觸的檢測電極的一端部露出的方式形成絕緣層;Step C: The steps of step C-1 and step C-2 are carried out in different order, in step C-1, a resist pattern is formed on the resin layer; in step C-2, in contact with the resin layer Forming an insulating layer in such a manner that one end of the detecting electrode is exposed;

步驟D:形成引出配線的步驟,對樹脂層上的未形成抗蝕劑圖案的區域賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理,形成與檢測電極的一端部電氣連接的引出配線。Step D: a step of forming a lead wiring, applying a plating catalyst or a precursor thereof to a region where a resist pattern is not formed on the resin layer, and performing a plating treatment on the resin layer to which the plating catalyst or the precursor thereof is applied, A lead wiring electrically connected to one end portion of the detecting electrode is formed.

下面對上述步驟A~步驟D進行詳細說明。需要說明的是,在以下的說明中使用圖3,該圖3為按步驟順序示出圖1和圖2記載的觸控面板感測器用導電性層積體10的製造方法的截面圖。The above steps A to D will be described in detail below. In the following description, FIG. 3 is a cross-sectional view showing a method of manufacturing the conductive laminate 10 for a touch panel sensor shown in FIGS. 1 and 2 in order of steps.

[步驟A][Step A]

步驟A為在基板上的周邊區域形成具有與鍍覆催化劑或其前體相互作用的官能團的樹脂層的步驟。通過實施本步驟,如圖3(A)所示,在基板12上的周邊區域EO 配置樹脂層14。Step A is a step of forming a resin layer having a functional group that interacts with the plating catalyst or its precursor on the peripheral region on the substrate. This step is shown by FIG. 3 (A), the peripheral region E O on the substrate 12 resin layer 14 is disposed.

形成樹脂層的方法沒有特別限制,優選使用含有特定化合物的樹脂層形成用組合物的方式。作為所使用的樹脂層形成用組合物,例如可以舉出含有如下化合物的樹脂層形成用組合物,該化合物具有與鍍覆催化劑或其前體相互作用的官能團和聚合性基團。將這樣的組合物塗布在基板上形成塗膜,對位於圖1所示的周邊區域EO 上的塗膜賦予能量,從而可促進聚合性基團的反應、進行固化,接著除去未被賦予能量的區域,可得到配置在周邊區域的樹脂層。The method of forming the resin layer is not particularly limited, and a method of forming a composition for forming a resin layer containing a specific compound is preferably used. The resin layer-forming composition to be used is, for example, a resin layer-forming composition containing a functional group and a polymerizable group that interact with a plating catalyst or a precursor thereof. Such a composition is applied onto a substrate to form a coating film, and energy is applied to the coating film located on the peripheral region E O shown in FIG. 1 to promote the reaction of the polymerizable group, to perform curing, and then to remove the energy. The area of the resin layer can be obtained in the peripheral area.

下面對使用樹脂層形成用組合物的方式進行詳細說明。首先詳細說明組合物的材料,其後對步驟的過程進行詳細說明。The manner in which the composition for forming a resin layer is used will be described in detail below. The material of the composition will be described in detail first, and the process of the step will be described in detail later.

(樹脂層形成用組合物(之1))(Resin layer forming composition (1))

在樹脂層形成用組合物中含有具有相互作用性基團和聚合性基團的化合物。The resin layer-forming composition contains a compound having an interactive group and a polymerizable group.

相互作用性基團的定義如上所述。The definition of an interactive group is as described above.

聚合性基團為通過能量賦予可形成化學鍵合的官能團,例如可以舉出自由基聚合性基團、陽離子聚合性基團等。其中,從反應性更為優異的方面考慮,優選自由基聚合性基團。作為自由基聚合性基團,例如可以舉出丙烯酸酯基(丙烯醯氧基)、甲基丙烯酸酯基(甲基丙烯醯氧基)、衣康酸酯基、丁烯酸酯基、異丁烯酸酯基、馬來酸酯基等不飽和羧酸酯基、苯乙烯基、乙烯基、丙烯醯胺基、甲基丙烯醯胺基等。其中優選甲基丙烯醯氧基、丙烯醯氧基、乙烯基、苯乙烯基、丙烯醯胺基、甲基丙烯醯胺基,更優選甲基丙烯醯氧基、丙烯醯氧基、苯乙烯基。The polymerizable group is a functional group capable of forming a chemical bond by energy, and examples thereof include a radical polymerizable group and a cationic polymerizable group. Among them, a radical polymerizable group is preferred from the viewpoint of further excellent reactivity. Examples of the radical polymerizable group include an acrylate group (acryloxy group), a methacrylate group (methacryloxy group), an itaconate group, a butenoate group, and a methacrylic acid. An unsaturated carboxylate group such as an ester group or a maleate group, a styryl group, a vinyl group, an acrylamide group, a methacrylamide group or the like. Among them, a methacryloxy group, a propylene methoxy group, a vinyl group, a styryl group, an acrylamide group, a methacrylamide group, and more preferably a methacryloxy group, a propylene oxy group, a styryl group are preferable. .

在化合物中,聚合性基團可以包含2種以上。此外,化合物中所含有的聚合性基團的數目沒有特別限制,可以為1個、也可以為2個以上。In the compound, the polymerizable group may contain two or more kinds. Further, the number of the polymerizable groups contained in the compound is not particularly limited, and may be one or two or more.

上述化合物可以為低分子化合物、也可以為高分子化合物。低分子化合物意指分子量小於1000的化合物,高分子化合物意指分子量為1000以上的化合物。The above compound may be a low molecular compound or a high molecular compound. The low molecular compound means a compound having a molecular weight of less than 1,000, and the high molecular compound means a compound having a molecular weight of 1,000 or more.

需要說明的是,具有上述聚合性基團的低分子化合物相當於所謂的單體(monomer)。另外,所謂高分子化合物也可以為具有特定的重複單元的聚合物。It should be noted that the low molecular compound having the above polymerizable group corresponds to a so-called monomer. Further, the polymer compound may be a polymer having a specific repeating unit.

另外,作為化合物可以僅使用1種,也可以合用兩種以上。Further, as the compound, one type may be used alone or two or more types may be used in combination.

上述化合物為聚合物的情況下,聚合物的重均分子量沒有特別限制,從溶解性等處理性更為優異的方面考慮,優選為1000以上70萬以下、進一步優選為2000以上20萬以下。特別是從聚合靈敏度的方面出發,優選為20000以上。When the compound is a polymer, the weight average molecular weight of the polymer is not particularly limited, and from the viewpoint of more excellent handleability such as solubility, it is preferably 1,000 or more and 700,000 or less, and more preferably 2,000 or more and 200,000 or less. In particular, from the viewpoint of polymerization sensitivity, it is preferably 20,000 or more.

這樣的具有聚合性基團和相互作用性基團的聚合物的合成方法沒有特別限制,可使用公知的合成方法(參見日本專利公開2009-280905號的段落[0097]~[0125])。The synthesis method of such a polymer having a polymerizable group and an interactive group is not particularly limited, and a known synthesis method can be used (see paragraphs [0097] to [0125] of Japanese Patent Laid-Open Publication No. 2009-280905).

(聚合物的優選方式1)(Preferred mode 1 of polymer)

作為聚合物的第1優選方式,可以舉出這樣的共聚物,該共聚物包含具有下式(a)所表示的聚合性基團的重複單元(以下也適當地成為聚合性基團單元)和具有下式(b)所表示的相互作用性基團的重複單元(以下也適當地稱為相互作用性基團單元)。The first preferred embodiment of the polymer is a copolymer comprising a repeating unit having a polymerizable group represented by the following formula (a) (hereinafter also suitably a polymerizable group unit) and A repeating unit having an interactive group represented by the following formula (b) (hereinafter also referred to as an interactive group unit as appropriate).

[化1] [Chemical 1]

上述式(a)和式(b)中,R1 ~R5 各自獨立地表示氫原子或者取代或無取代的烷基(例如甲基、乙基、丙基、丁基等)。需要說明的是,取代基的種類沒有特別限制,可以舉出甲氧基、氯原子、溴原子或氟原子等。In the above formula (a) and formula (b), R 1 to R 5 each independently represent a hydrogen atom or a substituted or unsubstituted alkyl group (e.g., methyl group, ethyl group, propyl group, butyl group, etc.). In addition, the kind of the substituent is not particularly limited, and examples thereof include a methoxy group, a chlorine atom, a bromine atom, and a fluorine atom.

需要說明的是,作為R1 ,優選氫原子、甲基或被溴原子取代的甲基。作為R2 ,優選氫原子、甲基或被溴原子取代的甲基。作為R3 ,優選氫原子。作為R4 ,優選氫原子。作為R5 ,優選氫原子、甲基或被溴原子取代的甲基。Note that, as R 1, preferably a hydrogen atom, a methyl group substituted with a bromine atom or a methyl group. As R 2 , a hydrogen atom, a methyl group or a methyl group substituted with a bromine atom is preferred. As R 3 , a hydrogen atom is preferred. As R 4 , a hydrogen atom is preferred. R 5 is preferably a hydrogen atom, a methyl group or a methyl group substituted by a bromine atom.

上述式(a)和式(b)中,X、Y和Z各自獨立地表示單鍵或者取代或無取代的2價有機基團。作為2價有機基團,可以舉出取代或無取代的2價脂肪族烴基(優選碳原子數為1~8。例如,亞甲基、亞乙基、亞丙基等亞烷基)、取代或無取代的2價芳香族烴基(優選碳原子數為6~12。例如亞苯基)、-O-、-S-、-SO2 -、-N(R)-(R:烷基)、-CO-、-NH-、-COO-、-CONH-、或將它們組合而成的基團(例如亞烷基氧基、亞烷基氧基羰基、亞烷基羰醯氧基等)等。In the above formula (a) and formula (b), X, Y and Z each independently represent a single bond or a substituted or unsubstituted divalent organic group. The divalent organic group may, for example, be a substituted or unsubstituted divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms, for example, an alkylene group such as a methylene group, an ethylene group or a propylene group) or a substituent. or unsubstituted divalent aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms, e.g. phenylene.), - O -, - S -, - SO 2 -, - N (R) - (R: alkyl group) , -CO-, -NH-, -COO-, -CONH-, or a combination thereof (for example, an alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonyloxy group, etc.) Wait.

作為X、Y和Z,從聚合物的合成容易、引出配線的密合性更為優異的方面考慮,優選單鍵、酯基(-COO-)、醯胺基(-CONH-)、醚基(-O-)或者取代或無取代的2價芳香族烴基,更優選單鍵、酯基(-COO-)、醯胺基(-CONH-)。X, Y, and Z are preferably a single bond, an ester group (-COO-), a guanamine group (-CONH-), or an ether group from the viewpoint of easy synthesis of a polymer and excellent adhesion of a lead wire. (-O-) or a substituted or unsubstituted divalent aromatic hydrocarbon group, more preferably a single bond, an ester group (-COO-) or a decylamino group (-CONH-).

上述式(a)和式(b)中,L1 和L2 各自獨立地表示單鍵或者取代或無取代的2價有機基團。作為2價有機基團的定義,與上述X、Y和Z中敘述的2價有機基團的含義相同。In the above formula (a) and formula (b), L 1 and L 2 each independently represent a single bond or a substituted or unsubstituted divalent organic group. The definition of the divalent organic group is the same as the meaning of the divalent organic group described in the above X, Y and Z.

作為L1 ,從聚合物的合成容易、引出配線的密合性更為優異的方面考慮,優選脂肪族烴基或者具有氨基甲酸酯鍵或脲鍵的2價有機基團(例如脂肪族烴基),其中優選總碳原子數為1~9。需要說明的是,此處,L1 的總碳原子數是指由L1 表示的取代或無取代的2價有機基團所含有的總碳原子數。L 1 is preferably an aliphatic hydrocarbon group or a divalent organic group having a urethane bond or a urea bond (for example, an aliphatic hydrocarbon group) from the viewpoint that the synthesis of the polymer is easy and the adhesion of the lead wiring is more excellent. Among them, the total number of carbon atoms is preferably from 1 to 9. Note that here, L is the total number of carbon atoms refers to the total number of carbon substituted or unsubstituted divalent organic group represented by L 1 contained in the atoms.

另外,從引出配線的密合性更為優異的方面考慮,L2 優選為單鍵、或者為2價脂肪族烴基、2價芳香族烴基、或將它們組合而成的基團。其中,L2 優選為單鍵或總碳原子數為1~15,特別優選無取代。需要說明的是,此處,L2 的總碳原子數是指由L2 所表示的取代或無取代的2價有機基團所含有的總碳原子數。In addition, L 2 is preferably a single bond, a divalent aliphatic hydrocarbon group, a divalent aromatic hydrocarbon group, or a combination thereof, from the viewpoint that the adhesion of the lead wiring is more excellent. Among them, L 2 is preferably a single bond or a total number of carbon atoms of from 1 to 15, and particularly preferably unsubstituted. Note that here, L 2 is the total number of carbon atoms refers to the total number of carbon is a substituted or unsubstituted divalent organic group represented by the L 2 contained in the atoms.

上述式(b)中,W表示相互作用性基團。相互作用性基團的定義如上所述。In the above formula (b), W represents an interactive group. The definition of an interactive group is as described above.

從反應性(固化性、聚合性)和抑制合成時的凝膠化的方面考慮,相對於聚合物中的全部重複單元,上述聚合性基團單元的含量優選為5~50摩爾%、更優選為5~40摩爾%。The content of the polymerizable group unit is preferably 5 to 50% by mole, more preferably the total repeating unit in the polymer, from the viewpoints of reactivity (curability, polymerizability) and inhibition of gelation at the time of synthesis. It is 5 to 40% by mole.

此外,從針對鍍覆催化劑或其前體的吸附性的方面出發,相對於聚合物中的全部重複單元,上述相互作用性基團單元的含量優選為5~95摩爾%、更優選為10~95摩爾%。Further, the content of the above-mentioned interactive group unit is preferably from 5 to 95 mol%, more preferably from 10 to 10, based on the total of the repeating units in the polymer, from the viewpoint of the adsorptivity to the plating catalyst or its precursor. 95 mol%.

(聚合物的優選方式2)(Preferred mode 2 of polymer)

作為聚合物的第2優選方式,可以舉出包含下式(A)、式(B)和式(C)所表示的重複單元的共聚物。A second preferred embodiment of the polymer includes a copolymer comprising a repeating unit represented by the following formula (A), formula (B), and formula (C).

[化2] [Chemical 2]

式(A)所表示的重複單元與上述式(a)所表示的重複單元相同,各基團的說明也相同。The repeating unit represented by the formula (A) is the same as the repeating unit represented by the above formula (a), and the description of each group is also the same.

式(B)所表示的重複單元中的R5 、X和L2 與上述式(b)所表示的重複單元中的R5 、X和L2 相同,各基團的說明也相同。(B) repeating units represented by R 5, X, and L 2 represented by the above formula (b) and repeating units R 5, X and L are the same as the formula 2, each of the groups described is also the same.

式(B)中的Wa表示除後述的V所表示的親水性基團或其前體基團以外的與鍍覆催化劑或其前體相互作用的基團。其中優選氰基、醚基。Wa in the formula (B) represents a group which interacts with a plating catalyst or a precursor thereof other than the hydrophilic group represented by V described later or a precursor group thereof. Among them, a cyano group and an ether group are preferred.

式(C)中,R6 各自獨立地表示氫原子或者取代或無取代的烷基。In the formula (C), R 6 each independently represents a hydrogen atom or a substituted or unsubstituted alkyl group.

式(C)中,U表示單鍵或者取代或無取代的2價有機基團。2價有機基團的定義與上述的X、Y和Z所表示的2價有機基團含義相同。作為U,從聚合物的合成容易、引出配線的密合性更為優異的方面考慮,優選單鍵、酯基(-COO-)、醯胺基(-CONH-)、醚基(-O-)、或者取代或無取代的2價芳香族烴基。In the formula (C), U represents a single bond or a substituted or unsubstituted divalent organic group. The definition of the divalent organic group has the same meaning as the above-mentioned divalent organic group represented by X, Y and Z. U is preferably a single bond, an ester group (-COO-), a guanamine group (-CONH-), or an ether group (-O-) from the viewpoint that the synthesis of the polymer is easy and the adhesion of the lead wiring is more excellent. Or a substituted or unsubstituted divalent aromatic hydrocarbon group.

式(C)中,L3 表示單鍵或者取代或無取代的2價有機基團。2價有機基團的定義與上述的L1 和L2 所表示的2價有機基團含義相同。作為L3 ,從聚合物的合成容易、引出配線的密合性更為優異的方面考慮,優選單鍵或者2價脂肪族烴基、2價芳香族烴基或它們組合而成的基團。In formula (C), L 3 represents a single bond or a substituted or unsubstituted divalent organic group. The definition of the divalent organic group has the same meaning as the above-mentioned divalent organic group represented by L 1 and L 2 . As L 3, from a synthetic polymer easy adhesion lead aspects more excellent in consideration of wiring, preferably a single bond or a divalent aliphatic hydrocarbon group, a divalent aromatic hydrocarbon group or a combination thereof.

式(C)中,V表示親水性基團或其前體基團。關於親水性基團,只要為表示出親水性的基團就沒有特別限定,例如可以舉出羥基、羧酸基等。此外,所謂親水性基團的前體基團是指通過特定的處理(例如,利用酸或鹼進行的處理)可生成親水性基團的基團,例如可以舉出被THP(2-四氫吡喃基)保護的羧基等。In the formula (C), V represents a hydrophilic group or a precursor group thereof. The hydrophilic group is not particularly limited as long as it is a group which exhibits hydrophilicity, and examples thereof include a hydroxyl group and a carboxylic acid group. Further, the precursor group of the hydrophilic group means a group which can form a hydrophilic group by a specific treatment (for example, treatment with an acid or a base), and examples thereof include THP (2-tetrahydrogen). Pyranyl) protected carboxyl group and the like.

作為親水性基團,從與鍍覆催化劑或其前體的相互作用的方面考慮,優選為離子性極性基團。作為離子性極性基團,具體地說,可以舉出羧酸基、磺酸基、磷酸基、硼酸基。其中,從適度的酸性(不分解其它官能團)這樣的方面考慮,優選羧酸基。As the hydrophilic group, an ionic polar group is preferred from the viewpoint of interaction with the plating catalyst or its precursor. Specific examples of the ionic polar group include a carboxylic acid group, a sulfonic acid group, a phosphoric acid group, and a boronic acid group. Among them, a carboxylic acid group is preferred from the viewpoint of moderate acidity (no decomposition of other functional groups).

上述聚合物的第2優選方式中各單元的優選含量如下。The preferred content of each unit in the second preferred embodiment of the above polymer is as follows.

從反應性(固化性、聚合性)和抑制合成時的凝膠化的方面考慮,相對於聚合物中的全部重複單元,式(A)所表示的重複單元的含量優選為5~50摩爾%、更優選為5~30摩爾%。The content of the repeating unit represented by the formula (A) is preferably 5 to 50% by mole based on all the repeating units in the polymer from the viewpoints of reactivity (curability, polymerizability) and inhibition of gelation at the time of synthesis. More preferably, it is 5 to 30 mol%.

從針對鍍覆催化劑或其前體的吸附性的方面出發,相對於聚合物中的全部重複單元,式(B)所表示的重複單元的含量優選為5~75摩爾%、更優選10~70摩爾%。The content of the repeating unit represented by the formula (B) is preferably from 5 to 75 mol%, more preferably from 10 to 70, from the viewpoint of the adsorptivity against the plating catalyst or its precursor, with respect to all the repeating units in the polymer. Molar%.

從基於水溶液的顯影性和耐濕密合性的方面考慮,相對於聚合物中的全部重複單元,式(C)所表示的重複單元的含量優選為10~70摩爾%、更優選為20~60摩爾%、進一步優選為30~50摩爾%。The content of the repeating unit represented by the formula (C) is preferably from 10 to 70% by mole, more preferably from 20 to 30%, based on all of the repeating units in the polymer, from the viewpoint of the developability of the aqueous solution and the wet adhesion resistance. 60 mol%, more preferably 30-50 mol%.

作為上述聚合物的具體例,例如可以舉出日本特開2009-007540號公報的段落[0106]~[0112]中記載的聚合物、日本特開2006-135271號公報的段落[0065]~[0070]中記載的聚合物、US2010-080964號的段落[0030]~[0108]中記載的聚合物等。Specific examples of the above-mentioned polymer include the polymers described in paragraphs [0106] to [0112] of JP-A-2009-007540, and paragraphs [0065] to [00] of JP-A-2006-135271. The polymer described in 0070], the polymer described in paragraphs [0030] to [0108] of US2010-080964.

該聚合物可利用公知的方法(例如,上述列舉的文獻中的方法)來製造。The polymer can be produced by a known method (for example, the method in the literature cited above).

(單體的優選方式)(Preferred mode of monomer)

在上述化合物為所謂的單體的情況下,作為優選方式之一,可以舉出式(X)所表示的化合物。When the above compound is a so-called monomer, one of the preferable embodiments is a compound represented by the formula (X).

[化3] [Chemical 3]

式(X)中,R11 ~R13 各自獨立地表示氫原子或者取代或無取代的烷基。作為無取代的烷基,可以舉出甲基、乙基、丙基或丁基。另外,作為取代烷基,可以舉出被甲氧基、氯原子、溴原子或氟原子等取代的甲基、乙基、丙基、丁基。需要說明的是,作為R11 ,優選氫原子或甲基。作為R12 ,優選氫原子。作為R13 ,優選氫原子。In the formula (X), R 11 to R 13 each independently represent a hydrogen atom or a substituted or unsubstituted alkyl group. The unsubstituted alkyl group may, for example, be a methyl group, an ethyl group, a propyl group or a butyl group. Further, examples of the substituted alkyl group include a methyl group, an ethyl group, a propyl group and a butyl group substituted with a methoxy group, a chlorine atom, a bromine atom or a fluorine atom. It should be noted that, as R 11, is preferably a hydrogen atom or a methyl group. As R 12 , a hydrogen atom is preferred. As R 13 , a hydrogen atom is preferred.

L10 表示單鍵或2價有機基團。作為2價有機基團,可以舉出取代或無取代的脂肪族烴基(優選碳原子數為1~8)、取代或無取代的芳香族烴基(優選碳原子數為6~12)、-O-、-S-、-SO2 -、-N(R)-(R:烷基)、-CO-、-NH-、-COO-、-CONH-、或將它們組合而成的基團(例如亞烷基氧基、亞烷基氧基羰基、亞烷基羰醯氧基等)等。L 10 represents a single bond or a divalent organic group. The divalent organic group may, for example, be a substituted or unsubstituted aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms), a substituted or unsubstituted aromatic hydrocarbon group (preferably having 6 to 12 carbon atoms), or -O. -, -S-, -SO 2 -, -N(R)-(R:alkyl), -CO-, -NH-, -COO-, -CONH-, or a combination of them ( For example, an alkyleneoxy group, an alkyleneoxycarbonyl group, an alkylenecarbonylcarbonyl group, etc.).

作為取代或無取代的脂肪族烴基,優選亞甲基、亞乙基、亞丙基或亞丁基、或者這些基團被甲氧基、氯原子、溴原子或氟原子等取代得到的基團。The substituted or unsubstituted aliphatic hydrocarbon group is preferably a group obtained by substituting a methylene group, an ethylene group, a propylene group or a butylene group, or a group having a methoxy group, a chlorine atom, a bromine atom or a fluorine atom.

作為取代或無取代的芳香族烴基,優選無取代的亞苯基、或者被甲氧基、氯原子、溴原子或氟原子等取代得到的亞苯基。The substituted or unsubstituted aromatic hydrocarbon group is preferably an unsubstituted phenylene group or a phenylene group obtained by substitution with a methoxy group, a chlorine atom, a bromine atom or a fluorine atom.

式(X)中,作為L10 的優選方式之一,可以舉出-NH-脂肪族烴基-或-CO-脂肪族烴基-。In the formula (X), as one of preferable embodiments of L 10 , a -NH-aliphatic hydrocarbon group or a -CO-aliphatic hydrocarbon group- may be mentioned.

W的定義與式(b)中的W的定義的含義相同,表示相互作用性基團。相互作用性基團的定義如上所述。The definition of W is the same as the definition of W in the formula (b), and represents an interactive group. The definition of an interactive group is as described above.

式(X)中,作為W的優選方式,可以舉出離子性極性基團,更優選羧酸基。In the formula (X), as a preferable aspect of W, an ionic polar group is mentioned, and a carboxylic acid group is more preferable.

上述化合物為所謂的單體的情況下,作為其它的優選方式之一,可以舉出式(1)所表示的化合物。When the above compound is a so-called monomer, one of the other preferred embodiments may be a compound represented by the formula (1).

[化4](式1)[Chemical 4] (Formula 1)

式(1)中,R10 表示氫原子、金屬陽離子或季銨陽離子。作為金屬陽離子,例如可以舉出鹼金屬陽離子(鈉離子、鈣離子)、銅離子、鈀離子、銀離子等。需要說明的是,作為金屬陽離子,主要使用1價或2價的金屬陽離子,在使用2價金屬陽離子(例如鈀離子)的情況下,後述的n表示2。In the formula (1), R 10 represents a hydrogen atom, a metal cation or a quaternary ammonium cation. Examples of the metal cation include an alkali metal cation (sodium ion, calcium ion), copper ion, palladium ion, silver ion, and the like. In addition, as a metal cation, a monovalent or divalent metal cation is mainly used, and when a divalent metal cation (for example, palladium ion) is used, n which will be described later represents 2.

作為季銨陽離子,例如可以舉出四甲基銨離子、四丁基銨離子等。Examples of the quaternary ammonium cation include a tetramethylammonium ion and a tetrabutylammonium ion.

其中,從鍍覆催化劑或其前體的附著和圖案化後的金屬殘渣的方面考慮,優選氫原子。Among them, a hydrogen atom is preferred from the viewpoint of adhesion of the plating catalyst or its precursor and metal residue after patterning.

式(1)中的L10 的定義與上述式(X)中的L10 的定義含義相同,表示單鍵或2價有機基團。2價有機基團的定義如上所述。The definition of L 10 in the formula (1) is the same as the definition of L 10 in the above formula (X), and represents a single bond or a divalent organic group. The definition of the divalent organic group is as described above.

式(1)中的R11 ~R13 的定義與上述的式(X)中的R11 ~R13 的定義含義相同,表示氫原子或者取代或無取代的烷基。需要說明的是,R11 ~R13 的優選方式如上所述。As defined in the definition of the formula R (1) is 11 ~ R 13 of the above-described formula (X) R 11 ~ R 13 have the same meaning, represents a hydrogen atom or a substituted or unsubstituted alkyl. It should be noted that preferred embodiments of R 11 to R 13 are as described above.

n表示1或2的整數。其中,從化合物的易獲得性的方面出發,優選n為1。n represents an integer of 1 or 2. Among them, n is preferably 1 from the viewpoint of availability of the compound.

作為式(1)所表示的化合物的優選方式,可以舉出式(2)所表示的化合物。A preferred embodiment of the compound represented by the formula (1) is a compound represented by the formula (2).

[化5](式2)[Chemical 5] (Formula 2)

式(2)中,R10 、R11 和n與上述定義相同。In the formula (2), R 10 , R 11 and n are the same as defined above.

L11 表示酯基(-COO-)、醯胺基(-CONH-)或亞苯基。其中,若L11 為醯胺基,則耐溶劑性(例如鹼溶劑耐性)提高。L 11 represents an ester group (-COO-), a guanamine group (-CONH-) or a phenylene group. However, when L 11 is a guanamine group, solvent resistance (for example, alkali solvent resistance) is improved.

L12 表示單鍵、2價脂肪族烴基(優選碳原子數為1~8、更優選碳原子數為3~5)或2價芳香族烴基。脂肪族烴基可以為直鏈狀、支鏈狀、環狀。需要說明的是,在L12 為單鍵的情況下,L11 表示亞苯基。L 12 represents a single bond or a divalent aliphatic hydrocarbon group (preferably having 1 to 8 carbon atoms, more preferably 3 to 5 carbon atoms) or a divalent aromatic hydrocarbon group. The aliphatic hydrocarbon group may be linear, branched or cyclic. In the case where L 12 is a single bond, L 11 represents a phenylene group.

式(1)所表示的化合物的分子量沒有特別限制,從揮發性、在溶劑中的溶解性、成膜性和處理性等方面出發,優選為100~1000、更優選為100~300。The molecular weight of the compound represented by the formula (1) is not particularly limited, and is preferably from 100 to 1,000, more preferably from 100 to 300, from the viewpoints of volatility, solubility in a solvent, film formability, and handleability.

樹脂層形成用組合物中的上述化合物的含量沒有特別限制,相對於組合物總量優選為2~50質量%、更優選為5~30質量%。若為上述範圍內,則組合物的處理性優異、容易控制樹脂層的層厚。The content of the above compound in the resin layer-forming composition is not particularly limited, and is preferably 2 to 50% by mass, and more preferably 5 to 30% by mass based on the total amount of the composition. When it is in the above range, the handleability of the composition is excellent, and the layer thickness of the resin layer can be easily controlled.

從處理性的方面考慮,在樹脂層形成用組合物中優選含有溶劑。The resin layer-forming composition preferably contains a solvent from the viewpoint of handleability.

可以使用的溶劑沒有特別限定,例如可以舉出:水;甲醇、乙醇、丙醇、乙二醇、1-甲氧基-2-丙醇、甘油、丙二醇單甲醚等醇類溶劑;乙酸等酸;丙酮、甲基乙基酮、環己酮等酮類溶劑;甲醯胺、二甲基乙醯胺、N-甲基吡咯烷酮等醯胺類溶劑;乙腈、丙腈等腈類溶劑;乙酸甲酯、乙酸乙酯等酯類溶劑;碳酸二甲酯、碳酸二乙酯等碳酸酯類溶劑;此外還有醚類溶劑、二醇類溶劑、胺類溶劑、硫醇類溶劑、鹵素類溶劑等。The solvent to be used is not particularly limited, and examples thereof include water; alcohol solvents such as methanol, ethanol, propanol, ethylene glycol, 1-methoxy-2-propanol, glycerin, and propylene glycol monomethyl ether; and acetic acid, and the like. Acid; ketone solvent such as acetone, methyl ethyl ketone or cyclohexanone; guanamine solvent such as formamide, dimethylacetamide or N-methylpyrrolidone; nitrile solvent such as acetonitrile or propionitrile; An ester solvent such as methyl ester or ethyl acetate; a carbonate solvent such as dimethyl carbonate or diethyl carbonate; and an ether solvent, a glycol solvent, an amine solvent, a thiol solvent, and a halogen solvent. Wait.

其中,優選醇類溶劑、醯胺類溶劑、酮類溶劑、腈類溶劑、碳酸酯類溶劑。Among them, an alcohol solvent, a guanamine solvent, a ketone solvent, a nitrile solvent, and a carbonate solvent are preferable.

樹脂層形成用組合物中的溶劑的含量沒有特別限制,相對於組合物總量優選為50~98質量%、更優選為70~95質量%。若為上述範圍內,則組合物的處理性優異、容易控制樹脂層的層厚等。The content of the solvent in the resin layer-forming composition is not particularly limited, and is preferably 50 to 98% by mass, and more preferably 70 to 95% by mass based on the total amount of the composition. When it is in the above range, the handleability of the composition is excellent, and the layer thickness of the resin layer or the like is easily controlled.

在樹脂層形成用組合物中可以含有聚合引發劑。通過含有聚合引發劑,進一步形成化合物之間和化合物與基板之間的結合,作為結果可得到密合性更為優異的引出配線。A polymerization initiator may be contained in the resin layer-forming composition. By containing a polymerization initiator, the bond between the compounds and the compound and the substrate is further formed, and as a result, the lead wires having more excellent adhesion can be obtained.

作為所使用的聚合引發劑沒有特別限制,例如可以使用熱聚合引發劑、光聚合引發劑等。作為光聚合引發劑的示例,可以舉出二苯甲酮類、苯乙酮類、α-氨基烷基苯酮類、苯偶姻類、酮類、噻噸酮類、苯偶醯類、苄基縮酮類、肟酯類、蒽酮類、一硫化四甲基秋蘭姆類、雙醯基氧化膦類、醯基氧化膦類、蒽醌類、偶氮化合物等及其衍生物。The polymerization initiator to be used is not particularly limited, and for example, a thermal polymerization initiator, a photopolymerization initiator, or the like can be used. Examples of the photopolymerization initiator include benzophenones, acetophenones, α-aminoalkylphenones, benzoin, ketones, thioxanthones, benzophenes, and benzyl. A ketal, an oxime ester, an anthrone, a tetramethyl thiuram monosulfide, a bis-decylphosphine oxide, a fluorenylphosphine oxide, an anthracene, an azo compound, and the like.

此外,作為熱聚合引發劑的示例,可以舉出重氮系化合物或過氧化物系化合物等。Further, examples of the thermal polymerization initiator include a diazo compound or a peroxide compound.

在樹脂層形成用組合物中含有聚合引發劑的情況下,聚合引發劑的含量相對於組合物總量優選為0.01~1質量%、更優選為0.1~0.5質量%。該含量為上述範圍內時,組合物的處理性優異,所得到的引出配線的密合性更為優異。When the polymerization initiator is contained in the resin layer-forming composition, the content of the polymerization initiator is preferably 0.01 to 1% by mass, and more preferably 0.1 to 0.5% by mass based on the total amount of the composition. When the content is within the above range, the handleability of the composition is excellent, and the adhesion of the obtained lead wiring is further improved.

在樹脂層形成用組合物中可以含有單體(其中不包括上述式(X)或式(1)所表示的化合物)。通過含有單體,能夠適宜地控制樹脂層中的交聯密度等。A monomer (which does not include the compound represented by the above formula (X) or formula (1)) may be contained in the resin layer-forming composition. By containing a monomer, the crosslinking density and the like in the resin layer can be appropriately controlled.

所使用的單體沒有特別限制,例如,作為具有加成聚合性的化合物可以舉出具有烯鍵式不飽和鍵的化合物,作為具有開環聚合性的化合物可以舉出具有環氧基的化合物等。其中,從提高樹脂層中的交聯密度、進一步提高引出配線的密合性的方面考慮,優選使用多官能單體。所謂多官能單體是指具有2個以上聚合性基團的單體。具體地說,優選使用具有2~6個聚合性基團的單體。The monomer to be used is not particularly limited, and examples of the compound having an addition polymerizable property include a compound having an ethylenically unsaturated bond, and examples of the compound having a ring-opening polymerizable property include a compound having an epoxy group. . Among them, a polyfunctional monomer is preferably used from the viewpoint of increasing the crosslinking density in the resin layer and further improving the adhesion of the lead wiring. The polyfunctional monomer means a monomer having two or more polymerizable groups. Specifically, a monomer having 2 to 6 polymerizable groups is preferably used.

從對反應性帶來影響的交聯反應中的分子的運動性的方面出發,作為所使用的多官能單體的分子量優選為150~1000、進一步優選為200~700。此外,作為多個存在的聚合性基團之間的間隔(距離),以原子數計優選為1~15,更優選為6以上10以下。The molecular weight of the polyfunctional monomer to be used is preferably from 150 to 1,000, and more preferably from 200 to 700, from the viewpoint of the mobility of the molecule in the crosslinking reaction which affects the reactivity. Further, the interval (distance) between the plurality of polymerizable groups present is preferably from 1 to 15 in terms of the number of atoms, and more preferably from 6 to 10.

在樹脂層形成用組合物中可以根據需要添加其它添加劑(例如增感劑、固化劑、阻聚劑、抗氧化劑、抗靜電劑、紫外線吸收劑、填料、顆粒、阻燃劑、表面活性劑、潤滑劑、增塑劑等)。Other additives (for example, a sensitizer, a curing agent, a polymerization inhibitor, an antioxidant, an antistatic agent, an ultraviolet absorber, a filler, a granule, a flame retardant, a surfactant, etc.) may be added to the resin layer-forming composition as needed. Lubricants, plasticizers, etc.).

此外,在樹脂層中含有著色劑的情況下,在樹脂層形成用組合物中可以進一步含有著色劑。Further, when the colorant is contained in the resin layer, the coloring agent may be further contained in the resin layer-forming composition.

(樹脂層形成用組合物(之2))(Resin layer forming composition (Part 2))

在上述樹脂層形成用組合物(之1)中含有具有相互作用性基團和聚合性基團的化合物,但並不限於該方式,例如,也可以使用含有具有相互作用性基團的化合物和具有聚合性基團的化合物這2種化合物的樹脂層形成用組合物。The resin layer-forming composition (No. 1) contains a compound having an interactive group and a polymerizable group, but is not limited thereto. For example, a compound having an interactive group and a compound may be used. A composition for forming a resin layer of the two compounds having a polymerizable group.

所謂具有相互作用性基團的化合物為具有相互作用性基團但不具有聚合性基團的化合物。相互作用性基團的定義如上所述。作為這樣的化合物,可以為低分子化合物、也可以為高分子化合物。作為具有相互作用性基團的化合物的優選方式,可以舉出具有上述式(b)所表示的重複單元的高分子。The compound having an interactive group is a compound having an interactive group but no polymerizable group. The definition of an interactive group is as described above. Such a compound may be a low molecular compound or a polymer compound. A preferred embodiment of the compound having an interactive group is a polymer having a repeating unit represented by the above formula (b).

具有聚合性基團的化合物是所謂的單體,從所形成的樹脂層的硬度更為優異的方面考慮,優選為具有2個以上的聚合性基團的多官能單體。作為多官能單體,可以使用公知的單體。The compound having a polymerizable group is a so-called monomer, and a polyfunctional monomer having two or more polymerizable groups is preferable from the viewpoint that the hardness of the formed resin layer is more excellent. As the polyfunctional monomer, a known monomer can be used.

(步驟A的過程)(Process of step A)

在步驟A中,首先在基板上配置樹脂層形成用組合物,其方法沒有特別限制,例如可以舉出使上述樹脂層形成用組合物在基板上接觸來形成樹脂層形成用組合物的塗膜的方法。作為該方法,例如可以舉出在基板上塗布上述樹脂層形成用組合物的方法(塗布法)。In the step A, the resin layer-forming composition is first placed on the substrate, and the method of forming the resin layer-forming composition by contacting the resin layer-forming composition on the substrate is exemplified. Methods. As such a method, for example, a method (coating method) of applying the above-described composition for forming a resin layer on a substrate is exemplified.

在塗布法的情況下,在基板上塗布樹脂層形成用組合物的方法沒有特別限制,可以使用公知的方法(例如旋塗、模塗、浸漬塗布等)。In the case of the coating method, the method of applying the composition for forming a resin layer on the substrate is not particularly limited, and a known method (for example, spin coating, die coating, dip coating, or the like) can be used.

從處理性、製造效率的方面出發,優選下述方式:在基板上塗布樹脂層形成用組合物,根據需要進行乾燥處理除去殘留的溶劑,形成塗膜。From the viewpoint of handleability and production efficiency, a composition for forming a resin layer is applied onto a substrate, and if necessary, a residual solvent is removed to form a coating film.

需要說明的是,乾燥處理的條件沒有特別限制,從生產率更為優異的方面考慮,優選在室溫~220℃(優選50~120℃)實施1~30分鐘(優選1~10分鐘)。In addition, the conditions of the drying treatment are not particularly limited, and from the viewpoint of further excellent productivity, it is preferably carried out at room temperature to 220 ° C (preferably 50 to 120 ° C) for 1 to 30 minutes (preferably 1 to 10 minutes).

對基板上的塗膜(組合物層)以圖案狀賦予能量的方法沒有特別限制。例如,優選使用加熱處理、曝光處理(光照射處理)等,從處理在短時間內完成的方面考慮,優選曝光處理。通過對塗膜賦予能量,化合物中的聚合性基團被活化,產生化合物間的交聯,進行層的固化。The method of applying energy to the coating film (composition layer) on the substrate in a pattern is not particularly limited. For example, heat treatment, exposure treatment (light irradiation treatment), or the like is preferably used, and from the viewpoint of completion of the treatment in a short time, exposure treatment is preferred. By imparting energy to the coating film, the polymerizable group in the compound is activated to cause crosslinking between the compounds, and the layer is cured.

在曝光處理中,使用基於UV(紫外光)燈、可見光線等的光照射等。作為光源,例如有汞燈、金屬鹵化物燈、氙燈、化學燈、碳弧燈等。作為放射線,還有電子射線、X射線、離子束、遠紅外線等。作為具體的方式,可以適當地舉出基於紅外線鐳射的掃描曝光、氙放電燈等高照度閃爍曝光、紅外線燈曝光等。In the exposure processing, light irradiation based on a UV (ultraviolet light) lamp, visible light, or the like is used. Examples of the light source include a mercury lamp, a metal halide lamp, a xenon lamp, a chemical lamp, a carbon arc lamp, and the like. As the radiation, there are electron rays, X rays, ion beams, far infrared rays, and the like. As a specific aspect, high-intensity scintillation exposure such as scanning exposure by infrared laser or xenon discharge lamp, exposure by infrared light, or the like can be suitably mentioned.

作為曝光時間,根據化合物的反應性和光源而不同,通常為10秒~5小時之間。作為曝光能量為10~8000mJ的程度即可,優選為50~3000mJ的範圍。The exposure time varies depending on the reactivity of the compound and the light source, and is usually between 10 seconds and 5 hours. The exposure energy may be in the range of 10 to 8000 mJ, and is preferably in the range of 50 to 3000 mJ.

需要說明的是,以圖案狀實施上述曝光處理的方法沒有特別限制,可以採用公知的方法,例如,隔著掩模對塗膜照射曝光用光即可。In addition, the method of performing the above-described exposure treatment in a pattern is not particularly limited, and a known method may be employed. For example, the coating film may be irradiated with light for exposure through a mask.

此外,作為能量賦予使用加熱處理的情況下,可以使用鼓風乾燥機、烘箱、紅外線乾燥機、加熱鼓等。Further, when heat treatment is used as the energy imparting, a blast dryer, an oven, an infrared dryer, a heating drum, or the like can be used.

接著,除去塗膜中的未實施能量賦予的部分,形成樹脂層。Next, the portion of the coating film where the energy is not applied is removed to form a resin layer.

上述除去方法沒有特別限制,根據所使用的化合物適當地選擇最佳方法。例如可以舉出使用鹼性溶液(優選pH:13.0~13.8)作為顯影液的方法。在使用鹼性溶液除去能量未賦予區域的情況下,可以舉出將具有被賦予了能量的塗膜的基板浸漬在溶液中的方法、在該基板上塗布顯影液的方法等,優選進行浸漬的方法。在進行浸漬的方法的情况下,從生產性、作業性等方面出發,作為浸漬時間優選為1分鐘至30分鐘左右。The above removal method is not particularly limited, and an optimum method is appropriately selected depending on the compound to be used. For example, a method of using an alkaline solution (preferably pH: 13.0 to 13.8) as a developing solution can be mentioned. In the case where the energy-imparting region is removed by using an alkaline solution, a method of immersing a substrate having a coating film to which energy is applied in a solution, a method of applying a developing solution on the substrate, and the like, and preferably immersing may be mentioned. method. In the case of the method of immersing, it is preferable that the immersion time is about 1 minute to 30 minutes from the viewpoints of productivity, workability, and the like.

此外,作為其它方法,可以舉出將溶解上述化合物的溶劑作為顯影液,浸漬在其中的方法。Further, as another method, a method in which a solvent which dissolves the above compound is used as a developing solution and is immersed therein may be mentioned.

需要說明的是,上文中對於在基板上直接形成樹脂層的方式進行了敘述,但也可以實施轉印法等其它方法。另外,所謂轉印法為在假支持體上形成樹脂層、將所形成的樹脂層轉印到基板上的方法。In the above description, the method of directly forming the resin layer on the substrate has been described, but other methods such as a transfer method may be employed. Further, the transfer method is a method in which a resin layer is formed on a dummy support and the formed resin layer is transferred onto a substrate.

[步驟B][Step B]

步驟B為在基板上形成檢測電極的步驟,該檢測電極的一端部延伸至樹脂層上,從而該檢測電極與樹脂層接觸。更具體地說,通過實施本步驟,如圖3(B)所示,在基板12上配置第1檢測電極16和第2檢測電極18。需要說明的是,如圖3(B)所示,檢測電極(第1檢測電極16和第2檢測電極18)的一端部延伸至樹脂層14上。Step B is a step of forming a detecting electrode on the substrate, and one end portion of the detecting electrode extends onto the resin layer such that the detecting electrode is in contact with the resin layer. More specifically, by performing this step, as shown in FIG. 3(B), the first detecting electrode 16 and the second detecting electrode 18 are disposed on the substrate 12. In addition, as shown in FIG. 3(B), one end portion of the detecting electrodes (the first detecting electrode 16 and the second detecting electrode 18) extends over the resin layer 14.

檢測電極的製造方法沒有特別限制,採用公知的方法。例如,作為檢測電極使用ITO層的情況下,優選利用濺射法或蒸鍍法來形成。此外,在形成特定形狀的檢測電極時,適宜使用掩模。The method for producing the detecting electrode is not particularly limited, and a known method is employed. For example, when an ITO layer is used as the detecting electrode, it is preferably formed by a sputtering method or a vapor deposition method. Further, when forming a detection electrode of a specific shape, a mask is suitably used.

[步驟C][Step C]

步驟C為順序不一地實施步驟C-1和步驟C-2的步驟,在步驟C-1中,在樹脂層上形成抗蝕劑圖案;在步驟C-2中,形成絕緣層,該絕緣層按照與樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極。更具體地說,通過實施本步驟,如圖3(C)所示,配置覆蓋檢測電極的絕緣層22。需要說明的是,在圖3(C)中,儘管未圖示出,但抗蝕劑圖案被配置在圖1的未形成引出配線20的樹脂層14上的區域。Step C is a step of performing step C-1 and step C-2 in different order, in step C-1, forming a resist pattern on the resin layer; in step C-2, forming an insulating layer, the insulating layer The layer covers the detecting electrode so that one end portion of the detecting electrode that is in contact with the resin layer is exposed. More specifically, by performing this step, as shown in FIG. 3(C), the insulating layer 22 covering the detecting electrodes is disposed. Note that, in FIG. 3(C), although not illustrated, the resist pattern is disposed in a region on the resin layer 14 on which the lead wiring 20 is not formed in FIG.

在步驟C中,順序不一地實施步驟C-1和步驟C-2即可,具體地說,可以在實施步驟C-1後實施步驟C-2,也可以在實施步驟C-2後實施步驟C-1。In step C, step C-1 and step C-2 may be performed in different order. Specifically, step C-2 may be implemented after step C-1 is implemented, or may be implemented after step C-2 is implemented. Step C-1.

步驟C-1為在樹脂層上形成抗蝕劑圖案的步驟。更具體地說,本步驟為在後述的鍍覆處理時不希望使鍍覆析出的樹脂層上的特定區域形成抗蝕劑圖案的步驟。Step C-1 is a step of forming a resist pattern on the resin layer. More specifically, this step is a step of forming a resist pattern on a specific region on the resin layer which is not required to be deposited by plating in the plating treatment to be described later.

在樹脂層上形成抗蝕劑圖案的方法沒有特別限制,使用公知的方法;從抗蝕劑圖案的精度更為優異的方面考慮,優選使用感光性抗蝕劑形成抗蝕劑圖案的方法。The method of forming the resist pattern on the resin layer is not particularly limited, and a known method is used. From the viewpoint of more excellent precision of the resist pattern, a method of forming a resist pattern using a photosensitive resist is preferable.

作為可在本步驟中使用的感光性抗蝕劑,例如可以舉出光固化型的負性抗蝕劑、或通過曝光發生溶解的光溶解型的正性抗蝕劑。作為感光性抗蝕劑,例如可以使用1.感光性幹膜抗蝕劑(DFR)、2.液態抗蝕劑、3.ED(電沉積)抗蝕劑。The photosensitive resist which can be used in this step is, for example, a photocurable negative resist or a photo-dissolving positive resist which is dissolved by exposure. As the photosensitive resist, for example, a photosensitive dry film resist (DFR), a liquid resist, or a 3.ED (electrodeposition) resist can be used.

作為抗蝕劑圖案的形成方法,可以在樹脂層上配置由感光性抗蝕劑形成的膜(感光性抗蝕劑膜),對感光性抗蝕劑膜進行圖案曝光、進而進行顯影,從而形成抗蝕劑圖案。As a method of forming the resist pattern, a film (photosensitive resist film) formed of a photosensitive resist may be disposed on the resin layer, and the photosensitive resist film may be subjected to pattern exposure and further development to form a resist pattern. Resist pattern.

步驟C-2為形成絕緣層的步驟,該絕緣層按照與樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極。Step C-2 is a step of forming an insulating layer that covers the detecting electrode so that one end portion of the detecting electrode that is in contact with the resin layer is exposed.

絕緣層的形成方法沒有特別限制,根據所使用的材料選擇最佳的方法。The method of forming the insulating layer is not particularly limited, and an optimum method is selected depending on the materials used.

例如,在使用感光性絕緣樹脂(例如環氧樹脂)等的情況下,可以舉出在基板上塗布含有感光性絕緣樹脂的組合物,對特定區域進行曝光使其固化,然後除去未曝光部的方法等。For example, when a photosensitive insulating resin (for example, an epoxy resin) or the like is used, a composition containing a photosensitive insulating resin is applied onto a substrate, and a specific region is exposed and cured, and then the unexposed portion is removed. Method, etc.

此外,在使用金屬氧化物等的情況下,可以舉出配置特定的掩模,利用濺射或蒸鍍法使金屬氧化物層堆積在特定位置的方法等。Further, when a metal oxide or the like is used, a method in which a specific mask is disposed and a metal oxide layer is deposited at a specific position by sputtering or vapor deposition may be mentioned.

[步驟D][Step D]

步驟D為形成引出配線的步驟,在該步驟中,對樹脂層上的未形成抗蝕劑圖案的區域賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理,形成與檢測電極的一端部電氣連接的引出配線。更具體地說,通過實施本步驟,如圖3(D)所示,可以形成與第2檢測電極18的一端部18A電氣連接的引出配線20。需要說明的是,儘管未圖示出,但第1檢測電極的一端部也與引出配線電氣連接。Step D is a step of forming a lead wiring in which a plating catalyst or a precursor thereof is applied to a region on the resin layer where no resist pattern is formed, and a resin layer to which a plating catalyst or a precursor thereof is imparted is applied. The plating treatment is performed to form a lead wiring electrically connected to one end portion of the detecting electrode. More specifically, by performing this step, as shown in FIG. 3(D), the lead wiring 20 electrically connected to the one end portion 18A of the second detecting electrode 18 can be formed. It should be noted that although not illustrated, one end portion of the first detecting electrode is also electrically connected to the lead wiring.

下面分成對樹脂層賦予鍍覆催化劑或其前體的步驟(步驟D-1)、以及對於被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理的步驟(步驟D-2)進行說明。In the following, the step of applying a plating catalyst or a precursor thereof to the resin layer (step D-1), and the step of performing a plating treatment on the resin layer to which the plating catalyst or the precursor is applied (step D-2) are carried out. Description.

(步驟D-1:鍍覆催化劑賦予步驟)(Step D-1: Plating catalyst application step)

在本步驟中,首先對樹脂層上的未形成抗蝕劑圖案的區域賦予鍍覆催化劑或其前體。樹脂層中所含有的相互作用性基團根據其功能來附著(吸附)所賦予的鍍覆催化劑或其前體。更具體地說,在樹脂層中以及樹脂層表面上被賦予鍍覆催化劑或其前體。In this step, first, a plating catalyst or a precursor thereof is applied to a region of the resin layer where no resist pattern is formed. The interactive group contained in the resin layer adheres (adsorbs) the applied plating catalyst or its precursor according to its function. More specifically, a plating catalyst or a precursor thereof is imparted to the resin layer and on the surface of the resin layer.

鍍覆催化劑或其前體作為鍍覆處理的催化劑或電極發揮功能。因此,所使用的鍍覆催化劑或其前體的種類根據鍍覆處理的種類酌情確定。The plating catalyst or its precursor functions as a catalyst or electrode for the plating treatment. Therefore, the type of the plating catalyst to be used or its precursor is determined as appropriate depending on the type of the plating treatment.

需要說明的是,所使用的鍍覆催化劑或其前體優選為無電解鍍覆催化劑或其前體。下面主要對無電解鍍覆催化劑或其前體等進行詳細說明。It is to be noted that the plating catalyst to be used or a precursor thereof is preferably an electroless plating catalyst or a precursor thereof. Hereinafter, the electroless plating catalyst or its precursor and the like will be mainly described in detail.

關於本步驟中所使用的無電解鍍覆催化劑,只要可成為無電解鍍覆時的活性核,則任何的無電解鍍覆催化劑均可使用,具體地說,可以舉出具有自身催化還原反應的催化能力的金屬(已知為離子化傾向低於Ni的可進行無電解鍍覆的金屬)等。具體地說,可以舉出Pd、Ag、Cu、Ni、Pt、Au、Co等。其中,從催化能力的高度的方面考慮,特別優選Ag、Pd、Pt、Cu。Regarding the electroless plating catalyst used in the present step, any electroless plating catalyst can be used as long as it can be an active core during electroless plating, and specifically, an autocatalytic reduction reaction can be mentioned. A metal of catalytic ability (known as a metal which can be subjected to electroless plating with a tendency to ionize is lower than Ni). Specifically, Pd, Ag, Cu, Ni, Pt, Au, Co, etc. are mentioned. Among them, Ag, Pd, Pt, and Cu are particularly preferable from the viewpoint of the height of the catalytic ability.

作為該無電解鍍覆催化劑,可以使用金屬膠體。As the electroless plating catalyst, a metal colloid can be used.

本步驟中所用的無電解鍍覆催化劑前體只要可通過化學反應變成無電解鍍覆催化劑就可以沒有特別限制地使用。主要使用作為上述無電解鍍覆催化劑舉出的金屬的金屬離子。作為無電解鍍覆催化劑前體的金屬離子通過還原反應變成作為無電解鍍覆催化劑的0價金屬。作為無電解鍍覆催化劑前體的金屬離子被賦予至樹脂層之後,在浸漬到無電解鍍覆浴中之前,可以通過另外的還原反應變化成0價金屬而成為無電解鍍覆催化劑。此外,可以保持無電解鍍覆催化劑前體的狀態浸漬在無電解鍍覆浴中,也可以通過無電解鍍覆浴中的還原劑變化成金屬(無電解鍍覆催化劑)。The electroless plating catalyst precursor used in this step can be used without particular limitation as long as it can be converted into an electroless plating catalyst by a chemical reaction. Metal ions of the metal exemplified as the above electroless plating catalyst are mainly used. The metal ions as the electroless plating catalyst precursor are converted into a zero-valent metal as an electroless plating catalyst by a reduction reaction. After the metal ions as the electroless plating catalyst precursor are supplied to the resin layer, they can be changed into a zero-valent metal by another reduction reaction to be an electroless plating catalyst before being immersed in the electroless plating bath. Further, the state in which the electroless plating catalyst precursor is maintained may be immersed in the electroless plating bath, or may be changed to a metal (electroless plating catalyst) by the reducing agent in the electroless plating bath.

作為無電解鍍覆催化劑前體的金屬離子優選使用金屬鹽賦予至樹脂層。作為所使用的金屬鹽,只要溶解在適當的溶劑中而解離成金屬離子和鹼(陰離子)即可,沒有特別限制,可以舉出M(NO3n 、MCln 、M2/n (SO4 )、M3/n (PO4 )(M表示n價的金屬原子)等。作為金屬離子,可以適當地使用上述金屬鹽解離得到的金屬離子。例如可以舉出Ag離子、Cu離子、Ni離子、Co離子、Pt離子、Pd離子。其中優選為可多齒配位元的金屬離子,從能夠配位的官能團的種類數和催化能力的方面考慮,特別優選Ag離子、Pd離子、Cu離子。The metal ion as the electroless plating catalyst precursor is preferably applied to the resin layer using a metal salt. The metal salt to be used is not particularly limited as long as it is dissolved in a suitable solvent to be dissociated into a metal ion and a base (anion), and examples thereof include M(NO 3 ) n , MCl n , and M 2/n (SO). 4 ), M 3/n (PO 4 ) (M represents an n-valent metal atom), and the like. As the metal ion, a metal ion obtained by dissociation of the above metal salt can be suitably used. For example, Ag ions, Cu ions, Ni ions, Co ions, Pt ions, and Pd ions can be mentioned. Among them, metal ions which are multidentate ligands are preferable, and Ag ions, Pd ions, and Cu ions are particularly preferable from the viewpoint of the number of kinds of functional groups capable of coordination and catalytic ability.

在本步驟中,作為為了不進行無電解鍍覆而直接進行電鍍所使用的催化劑,也可以使用0價金屬。In this step, a zero-valent metal may be used as the catalyst used for direct plating without electroless plating.

作為將鍍覆催化劑或其前體賦予至樹脂層的方法,例如可以製備將鍍覆催化劑或其前體分散或溶解在適當的溶劑中而成的溶液(鍍覆催化劑液),將該溶液塗布在樹脂層上、或者將形成有樹脂層的基板浸漬在該溶液中即可。As a method of imparting a plating catalyst or a precursor thereof to the resin layer, for example, a solution (plating catalyst liquid) obtained by dispersing or dissolving a plating catalyst or a precursor thereof in a suitable solvent can be prepared, and the solution can be coated. The substrate on which the resin layer is formed may be immersed in the resin layer or immersed in the solution.

作為上述溶劑,酌情使用水或有機溶劑。作為有機溶劑,優選可浸透到樹脂層中的溶劑,例如可以使用丙酮、乙醯乙酸甲酯、乙醯乙酸乙酯、乙二醇二乙酸酯、環己酮、乙醯丙酮、苯乙酮、2-(1-環己烯基)環己酮、丙二醇二乙酸酯、甘油三乙酸酯、二甘醇二乙酸酯、二氧六環、N-甲基吡咯烷酮、碳酸二甲酯、二甲基溶纖劑等。As the above solvent, water or an organic solvent is used as appropriate. As the organic solvent, a solvent which can be impregnated into the resin layer is preferable, and for example, acetone, ethyl acetate, ethyl acetate, ethylene glycol diacetate, cyclohexanone, ethyl acetonide, acetophenone can be used. , 2-(1-cyclohexenyl)cyclohexanone, propylene glycol diacetate, triacetin, diethylene glycol diacetate, dioxane, N-methylpyrrolidone, dimethyl carbonate , dimethyl cellosolve, etc.

含有鍍覆催化劑或其前體和溶劑的催化劑賦予液的pH沒有特別限制,從在後述鍍覆處理時容易在所期望的位置形成所期望量的金屬層的方面考慮,該pH優選為3.0~7.0、更優選為3.2~6.8、進一步優選為3.5~6.6。The pH of the catalyst-imparting liquid containing the plating catalyst or its precursor and the solvent is not particularly limited, and the pH is preferably 3.0 to 3.0 from the viewpoint of forming a desired amount of the metal layer at a desired position during the plating treatment described later. 7.0 is more preferably 3.2 to 6.8, still more preferably 3.5 to 6.6.

催化劑賦予液的製備方法沒有特別限制,將特定金屬鹽溶解在適當的溶劑中,根據需要使用酸或鹼將pH調整成特定的範圍。The preparation method of the catalyst-imparting liquid is not particularly limited, and a specific metal salt is dissolved in a suitable solvent, and the pH is adjusted to a specific range using an acid or a base as needed.

溶液中的鍍覆催化劑或其前體的濃度沒有特別限制,優選為0.001~50質量%、更優選為0.005~30質量%。The concentration of the plating catalyst or the precursor thereof in the solution is not particularly limited, but is preferably 0.001 to 50% by mass, and more preferably 0.005 to 30% by mass.

此外,作為接觸時間,優選為30秒~24小時左右、更優選為1分鐘~1小時左右。Further, the contact time is preferably from about 30 seconds to about 24 hours, more preferably from about 1 minute to about 1 hour.

關於樹脂層的鍍覆催化劑或其前體的吸附量,根據所使用的鍍覆浴種、催化劑金屬種、樹脂層的相互作用性基團種、使用方法等而不同,從鍍覆的析出性的方面出發,優選為5~1000mg/m2 、更優選為10~800mg/m2 、特別優選為20~600mg/m2The amount of adsorption of the plating catalyst of the resin layer or the precursor thereof differs depending on the plating bath to be used, the type of catalyst metal, the type of interactive group of the resin layer, the method of use, and the like, and the precipitation property from plating. In view of the above, it is preferably 5 to 1000 mg/m 2 , more preferably 10 to 800 mg/m 2 , and particularly preferably 20 to 600 mg/m 2 .

(步驟D-2:鍍覆處理步驟)(Step D-2: Plating Process Step)

接著,對被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理。通過實施鍍覆處理,在樹脂層上的未配置抗蝕劑圖案的區域形成由鍍覆金屬層構成的引出配線。Next, the resin layer to which the plating catalyst or its precursor is applied is subjected to a plating treatment. By performing the plating treatment, the lead wiring made of the plated metal layer is formed in the region of the resin layer where the resist pattern is not disposed.

鍍覆處理的方法沒有特別限制,例如可以舉出無電解鍍覆處理或電解鍍覆處理(電鍍處理)。在本步驟中,可以單獨實施無電解鍍覆處理,也可以在實施了無電解鍍覆處理後進一步實施電解鍍覆處理。The method of the plating treatment is not particularly limited, and examples thereof include an electroless plating treatment or an electrolytic plating treatment (electroplating treatment). In this step, the electroless plating treatment may be separately performed, or the electrolytic plating treatment may be further performed after the electroless plating treatment is performed.

需要說明的是,在本說明書中,所謂的銀鏡反應作為上述無電解鍍覆處理的一種而含有。從而,可以通過例如銀鏡反應等使所附著的金屬離子還原、形成所期望的圖案狀金屬層,進而其後可實施電解鍍覆處理。In addition, in this specification, a silver mirror reaction is contained as one type of said electroless-plating process. Therefore, the adhered metal ions can be reduced by, for example, a silver mirror reaction or the like to form a desired patterned metal layer, and then electrolytic plating treatment can be performed thereafter.

下面對無電解鍍覆處理和電解鍍覆處理的過程進行詳細說明。The process of the electroless plating treatment and the electrolytic plating treatment will be described in detail below.

所謂無電解鍍覆處理是指下述操作:使用溶解有希望以鍍覆的形式析出的金屬離子的溶液,通過化學反應使金屬析出。The electroless plating treatment refers to an operation of depositing a metal by a chemical reaction using a solution in which metal ions precipitated in a form desirably plated are dissolved.

本步驟中的無電解鍍覆例如優選如下進行:對具備被賦予了無電解鍍覆催化劑的樹脂層的基板進行水洗,除去多餘的無電解鍍覆催化劑(金屬)後,浸漬在無電解鍍覆浴中,由此來進行無電解鍍覆。作為所使用的無電解鍍覆浴,可以使用公知的無電解鍍覆浴。The electroless plating in this step is preferably performed, for example, by washing a substrate having a resin layer to which an electroless plating catalyst is applied, removing excess electroless plating catalyst (metal), and then immersing in electroless plating. In the bath, electroless plating is thereby performed. As the electroless plating bath to be used, a known electroless plating bath can be used.

此外,在無電解鍍覆催化劑前體吸附或滲入到樹脂層中的狀態下將具備被賦予了無電解鍍覆催化劑前體的樹脂層的基板浸漬到無電解鍍覆浴中的情況下,優選對基板進行水洗除去多餘的無電解鍍覆催化劑前體(金屬鹽等)之後浸漬到無電解鍍覆浴中。這種情況下,在無電解鍍覆浴中進行無電解鍍覆催化劑前體的還原以及緊接其後的無電解鍍覆。作為此處所使用的無電解鍍覆浴,也可以與上述同樣地使用公知的無電解鍍覆浴。In the case where the substrate provided with the resin layer to which the electroless plating catalyst precursor is applied is immersed in the electroless plating bath in a state where the electroless plating catalyst precursor is adsorbed or infiltrated into the resin layer, it is preferred. The substrate is washed with water to remove excess electroless plating catalyst precursor (metal salt or the like), and then immersed in an electroless plating bath. In this case, the electroless plating catalyst precursor is reduced and the subsequent electroless plating is performed in an electroless plating bath. As the electroless plating bath used herein, a known electroless plating bath may be used in the same manner as described above.

需要說明的是,關於無電解鍍覆催化劑前體的還原,也可以在上述那樣的使用無電解鍍覆液的方式之外另行準備催化劑活性化液(還原液),作為無電解鍍覆前的其它步驟來進行。In addition, in the reduction of the electroless plating catalyst precursor, a catalyst activating solution (reducing liquid) may be separately prepared in addition to the above-described method using the electroless plating solution, as before the electroless plating. Other steps to proceed.

此外,鍍覆浴不僅與被賦予了無電解鍍覆催化劑的樹脂層接觸,而且還與檢測電極接觸,由此鍍覆由該檢測電極析出。因此,在距離樹脂層2μm以上的檢測電極部也有鍍覆的析出,能夠形成確保了與檢測電極的電氣導通的引出配線。在檢測電極上產生的鍍覆自樹脂層起的長度優選為3μm以上、更優選為10μm以上、最優選為1000μm以上。Further, the plating bath is not only in contact with the resin layer to which the electroless plating catalyst is applied but also in contact with the detecting electrode, whereby plating is deposited by the detecting electrode. Therefore, deposition of plating is also performed on the detection electrode portion of 2 μm or more from the resin layer, and the lead wiring which ensures electrical conduction with the detection electrode can be formed. The length of plating generated on the detecting electrode from the resin layer is preferably 3 μm or more, more preferably 10 μm or more, and most preferably 1000 μm or more.

作為一般的無電解鍍覆浴的組成,除了溶劑(例如水)以外,主要包含:1.鍍覆用的金屬離子、2.還原劑、3.使金屬離子的穩定性提高的添加劑(穩定劑)。在該鍍覆浴中,除了這些成分外,還可以包含鍍覆浴的穩定劑等公知的添加劑。As a composition of a general electroless plating bath, in addition to a solvent (for example, water), it mainly includes: 1. metal ions for plating, 2. a reducing agent, and an additive for improving the stability of metal ions (stabilizer). ). In addition to these components, the plating bath may contain a known additive such as a stabilizer of a plating bath.

作為無電解鍍覆浴中使用的有機溶劑,可溶於水的溶劑是必要的,從這方面考慮,優選使用丙酮等酮類、甲醇、乙醇、異丙醇等醇類。作為無電解鍍覆浴中使用的金屬的種類,已知有銅、錫、鉛、鎳、金、銀、鈀、銠,其中,從導電性的方面出發,優選銅、銀、金,更優選銅。並且根據上述金屬選擇最佳的還原劑、添加劑。As the organic solvent used in the electroless plating bath, a solvent soluble in water is necessary. From this point of view, it is preferred to use a ketone such as acetone or an alcohol such as methanol, ethanol or isopropyl alcohol. Copper, tin, lead, nickel, gold, silver, palladium, and rhodium are known as the type of the metal to be used in the electroless plating bath. Among them, copper, silver, and gold are preferable from the viewpoint of conductivity. copper. Further, an optimum reducing agent or additive is selected based on the above metal.

作為在無電解鍍覆浴中的浸漬時間,優選為1分鐘~6小時左右、更優選為1分鐘~3小時左右,最優選為1~10分鐘。The immersion time in the electroless plating bath is preferably from about 1 minute to about 6 hours, more preferably from about 1 minute to 3 hours, and most preferably from 1 to 10 minutes.

在本步驟中,在被賦予至樹脂層的鍍覆催化劑或其前體具有作為電極的功能的情況下,可以對該被賦予了催化劑或其前體的樹脂層進行電鍍。In this step, when the plating catalyst or the precursor thereof to be applied to the resin layer has a function as an electrode, the resin layer to which the catalyst or its precursor is applied may be plated.

需要說明的是,如上所述,在本步驟中,在上述無電解鍍覆處理之後可以根據需要進行電解鍍覆處理。利用這樣的方式,能夠適宜地調整所形成的引出配線的厚度。It should be noted that, as described above, in this step, electrolytic plating treatment may be performed as needed after the electroless plating treatment. In this manner, the thickness of the formed lead wires can be appropriately adjusted.

作為電鍍的方法,可以使用現有公知的方法。需要說明的是,作為電鍍中使用的金屬,可以舉出銅、鉻、鉛、鎳、金、銀、錫、鋅等,從導電性的方面出發,優選銅、金、銀,更優選銅。As a method of electroplating, a conventionally known method can be used. In addition, copper, chromium, lead, nickel, gold, silver, tin, zinc, etc. are mentioned as a metal used for electroplating, and copper, gold, and silver are preferable from a viewpoint of electroconductive, and copper is more preferable.

上述步驟D之後,可以根據需要實施除去抗蝕劑圖案的處理。After the above step D, the treatment for removing the resist pattern may be performed as needed.

需要說明的是,在上述的方式中,已經對實施形成絕緣層的步驟C-2的方式進行了敘述,但通過僅在樹脂層的特定部分賦予鍍覆催化劑或其前體、僅在該樹脂層的部分進行鍍覆處理,由此即使不實施上述步驟C-2,也可得到觸控面板感測器用導電性層積體。In the above-described embodiment, the embodiment of the step C-2 of forming the insulating layer has been described, but the plating catalyst or its precursor is provided only in a specific portion of the resin layer, and only the resin is provided. The portion of the layer is subjected to a plating treatment, whereby the conductive laminate for the touch panel sensor can be obtained without performing the above step C-2.

上述的觸控面板感測器用導電性層積體10能夠適合地應用於觸控面板感測器中。上述這樣的觸控面板感測器能夠與顯示裝置等組合適當地應用於觸控面板(特別是靜電電容式觸控面板)中。The above-described conductive laminate 10 for a touch panel sensor can be suitably applied to a touch panel sensor. The above-described touch panel sensor can be suitably applied to a touch panel (particularly, a capacitive touch panel) in combination with a display device or the like.

<<第2實施方式>><<2th embodiment>>

圖4中示出了本發明的觸控面板感測器用導電性層積體的第2實施方式的俯視圖。圖5為沿切斷線B-B進行切斷的截面圖。FIG. 4 is a plan view showing a second embodiment of the conductive laminate for a touch panel sensor of the present invention. Fig. 5 is a cross-sectional view taken along the cutting line B-B.

圖4所示的觸控面板感測器用導電性層積體100具備:基板12、配置在基板12上的周邊區域EO 的由下側樹脂層30和上側樹脂層32構成的層積型樹脂層34、在被基板12上的周邊區域EO 包圍的中央區域EI 上配置的2個以上的第1檢測電極16和第2檢測電極18、配置在層積型樹脂層34上的與第1檢測電極16和第2檢測電極18電氣連接的2個以上的引出配線20、以及按照覆蓋第1檢測電極16和第2檢測電極18的方式配置於中央區域EI 的絕緣層22。The conductive laminate 100 for a touch panel sensor shown in FIG. 4 includes a substrate 12 and a laminated resin composed of a lower resin layer 30 and an upper resin layer 32 disposed in a peripheral region E O of the substrate 12 . The layer 34 and the two or more first detecting electrodes 16 and the second detecting electrodes 18 disposed on the central region E I surrounded by the peripheral region E O on the substrate 12 and the first and second stacked electrodes 18 disposed on the laminated resin layer 34 The two or more lead wires 20 electrically connected to the detecting electrode 16 and the second detecting electrode 18 and the insulating layer 22 disposed in the central region E I so as to cover the first detecting electrode 16 and the second detecting electrode 18 are provided.

圖4所示的觸控面板感測器用導電性層積體100中,除了層積型樹脂層34這一點以外,與圖1所示的觸控面板感測器用導電性層積體10具有同樣的構成,因而對於相同的構成要件賦予相同的參照符號並省略其說明,下面主要對層積型樹脂層34進行詳細說明。The conductive laminate 100 for a touch panel sensor shown in FIG. 4 has the same function as the conductive laminate 10 for a touch panel sensor shown in FIG. 1 except for the laminated resin layer 34. The same constituent elements are denoted by the same reference numerals, and the description thereof will be omitted. The laminated resin layer 34 will be mainly described below.

另外,如圖5所示,第2檢測電極18的一端部18A延伸至上側樹脂層32上,一端部18A與上側樹脂層32接觸。需要說明的是,在第1檢測電極中,其一端部也延伸至上側樹脂層上。Further, as shown in FIG. 5, the one end portion 18A of the second detecting electrode 18 extends to the upper resin layer 32, and the one end portion 18A is in contact with the upper resin layer 32. In addition, in the first detecting electrode, one end portion thereof also extends to the upper resin layer.

層積型樹脂層34為包含下側樹脂層30與上側樹脂層32的層積型樹脂層,下側樹脂層30含有著色劑,上側樹脂層32配置在下側樹脂層30上,具有與鍍覆催化劑或其前體相互作用的官能團(相互作用性基團)。在層積型樹脂層34中,下側樹脂層發揮出所謂裝飾層的作用,上側樹脂層發揮出作為所謂的被鍍覆層的作用。通過使用這樣的層積型樹脂層34,能夠將裝飾層與被鍍覆層的作用分離,這兩層所使用的材料的選擇範圍擴大。The laminated resin layer 34 is a laminated resin layer including the lower resin layer 30 and the upper resin layer 32, the lower resin layer 30 contains a colorant, and the upper resin layer 32 is disposed on the lower resin layer 30, and is plated. A functional group (interactive group) in which the catalyst or its precursor interacts. In the laminated resin layer 34, the lower resin layer functions as a so-called decorative layer, and the upper resin layer functions as a so-called plated layer. By using such a laminated resin layer 34, the effect of the decorative layer and the layer to be plated can be separated, and the selection range of the materials used for the two layers is expanded.

下側樹脂層30所含有的著色劑的種類沒有特別限制,可以舉出上述的樹脂層14中含有的著色劑。The type of the coloring agent contained in the lower resin layer 30 is not particularly limited, and examples thereof include the coloring agent contained in the resin layer 14 described above.

此外,在下側樹脂層30中含有樹脂,但其種類沒有特別限制,可以舉出樹脂層14中所含有的樹脂。In addition, the resin is contained in the lower resin layer 30, and the kind thereof is not particularly limited, and the resin contained in the resin layer 14 can be mentioned.

需要說明的是,在下側樹脂層30中可以含有相互作用性基團。In addition, an interactive group may be contained in the lower resin layer 30.

下側樹脂層30的厚度沒有特別限制,從作為裝飾層的功能更為優異的方面、以及薄型化的平衡的方面考慮,優選為0.5~70μm、更優選為1~40μm。The thickness of the lower resin layer 30 is not particularly limited, and is preferably 0.5 to 70 μm, and more preferably 1 to 40 μm from the viewpoint of more excellent functions as a decorative layer and a balance of thickness reduction.

上側樹脂層32為配置在下側樹脂層30上的層,含有相互作用性基團。相互作用性基團的定義如上所述。The upper resin layer 32 is a layer disposed on the lower resin layer 30 and contains an interactive group. The definition of an interactive group is as described above.

在上側樹脂層32中含有樹脂,但其種類沒有特別限制,可以舉出樹脂層14中所含有的樹脂。The resin is contained in the upper resin layer 32, but the type thereof is not particularly limited, and the resin contained in the resin layer 14 can be mentioned.

在上側樹脂層32中優選實質上不含有著色劑。實質上不含有意指著色劑的含量相對於上側樹脂層32總質量為10質量%以下,該含量優選為5質量%以下、更優選為0質量%。It is preferable that the upper resin layer 32 does not substantially contain a coloring agent. The content of the coloring agent is not particularly limited to 10% by mass or less based on the total mass of the upper resin layer 32, and the content is preferably 5% by mass or less, and more preferably 0% by mass.

上側樹脂層32的厚度沒有特別限制,從作為被鍍覆層的功能更為優異的方面、以及薄型化的平衡的方面考慮,優選為0.01~10μm、更優選為0.2~5μm、進一步優選為0.25~1.0μm。The thickness of the upper resin layer 32 is not particularly limited, and is preferably 0.01 to 10 μm, more preferably 0.2 to 5 μm, still more preferably 0.25, from the viewpoint of further excellent function as a layer to be plated and balance of thickness reduction. ~1.0μm.

上述觸控面板感測器用導電性層積體100的製造方法沒有特別限制,可以舉出實施下述步驟A-1和步驟A-2作為上述觸控面板感測器用導電性層積體10的製造方法中的步驟A的方法,在步驟A-1中,在基板上的周邊區域形成下側樹脂層;在步驟A-2中,在下側樹脂層上形成上側樹脂層。The method for manufacturing the conductive laminate 100 for a touch panel sensor is not particularly limited, and the following steps A-1 and A-2 are performed as the conductive laminate 10 for the touch panel sensor. In the method of the step A in the production method, in the step A-1, the lower resin layer is formed on the peripheral region on the substrate; and in the step A-2, the upper resin layer is formed on the lower resin layer.

形成下側樹脂層的方法沒有特別限制,根據所使用的樹脂的種類而不同,可以舉出使用含有著色劑和樹脂的下側樹脂層形成用組合物的方法。更具體地說,可以舉出在基板上塗布下側樹脂層形成用組合物後去除周邊區域上以外的組成物的塗膜的方法。需要說明的是,作為樹脂使用感光性樹脂的情況下,可以如下形成下側樹脂層:在基板上塗布組合物形成塗膜後,對於位於基板上的周邊區域上的塗膜進行圖案狀曝光,通過顯影處理除去未曝光部,由此形成所期望的下側樹脂層。The method of forming the lower resin layer is not particularly limited, and depending on the type of the resin to be used, a method of using a composition for forming a lower resin layer containing a colorant and a resin may be mentioned. More specifically, a method of applying a composition for forming a lower resin layer on a substrate and then removing a coating film of a composition other than the peripheral region may be mentioned. In the case where a photosensitive resin is used as the resin, the lower resin layer may be formed by coating the composition on the substrate to form a coating film, and then pattern-applying the coating film on the peripheral region on the substrate. The unexposed portion is removed by a development process, thereby forming a desired lower side resin layer.

形成上側樹脂層的方法沒有特別限制,酌情採用在步驟B中實施的過程,該步驟B為形成上述觸控面板感測器用導電性層積體10中的樹脂層的步驟。The method of forming the upper resin layer is not particularly limited, and the process carried out in the step B is employed as appropriate, and the step B is a step of forming the resin layer in the conductive laminate 10 for the touch panel sensor.

<<第3實施方式>><<3rd embodiment>>

圖6中示出了本發明的觸控面板感測器用導電性層積體的第3實施方式的俯視圖。圖7為沿切斷線C-C進行切斷的截面圖。Fig. 6 is a plan view showing a third embodiment of the conductive laminate for a touch panel sensor of the present invention. Fig. 7 is a cross-sectional view taken along the cutting line C-C.

圖6所示的觸控面板感測器用導電性層積體200具備:基板12、配置在基板12上的周邊區域EO 的下側樹脂層30、配置在下側樹脂層30上的一部分的上側樹脂層132、在被基板12上的周邊區域EO 包圍的中央區域EI 上配置的2個以上的第1檢測電極16和第2檢測電極18、配置在上側樹脂層32上的與第1檢測電極16和第2檢測電極18電氣連接的2個以上的引出配線20、以及按照覆蓋第1檢測電極16和第2檢測電極18的方式配置在中央區域EI 的絕緣層22。The conductive laminate 200 for a touch panel sensor shown in FIG. 6 includes a substrate 12, a lower resin layer 30 of a peripheral region E O disposed on the substrate 12, and an upper portion of a portion disposed on the lower resin layer 30. The resin layer 132 and the two or more first detecting electrodes 16 and the second detecting electrodes 18 disposed on the central region E I surrounded by the peripheral region E O on the substrate 12 are disposed on the upper resin layer 32 and the first The two or more lead wires 20 electrically connected to the detecting electrode 16 and the second detecting electrode 18 and the insulating layer 22 disposed in the central region E I so as to cover the first detecting electrode 16 and the second detecting electrode 18 are provided.

圖6所示的觸控面板感測器用導電性層積體200主要除了上側樹脂層132這一點以外,與圖2所示的觸控面板感測器用導電性層積體100具有同樣的構成,因而對於相同的構成要件賦予相同的參照符號並省略其說明,下面主要對各層的配置位置進行詳細說明。The conductive laminate 200 for a touch panel sensor shown in FIG. 6 has the same configuration as the conductive laminate 100 for a touch panel sensor shown in FIG. 2 except that the upper resin layer 132 is mainly used. Therefore, the same components are denoted by the same reference numerals, and the description thereof will be omitted. The arrangement positions of the respective layers will be mainly described below.

在圖4所示的觸控面板感測器用導電性層積體100中,上側樹脂層的一部分位於下側樹脂層與檢測電極(第1檢測電極或第2檢測電極)之間;而在圖6所示的觸控面板感測器用導電性層積體200中,上側樹脂層在下側樹脂層上按照與檢測電極接觸的方式進行配置。即,如圖7所示,第2檢測電極18的一端部18A延伸至下側樹脂層30上,在下側樹脂層30上一端部18A與上側樹脂層132和引出配線20接觸。第1檢測電極中也具有同樣的構成。In the conductive laminate 100 for a touch panel sensor shown in FIG. 4, a part of the upper resin layer is located between the lower resin layer and the detecting electrode (the first detecting electrode or the second detecting electrode); In the conductive laminate 200 for a touch panel sensor shown in FIG. 6, the upper resin layer is disposed on the lower resin layer so as to be in contact with the detecting electrode. In other words, as shown in FIG. 7, the one end portion 18A of the second detecting electrode 18 extends to the lower resin layer 30, and the one end portion 18A of the lower resin layer 30 is in contact with the upper resin layer 132 and the lead wiring 20. The same configuration is also applied to the first detecting electrode.

關於上側樹脂層132的配置位置,更具體地說,如圖6所示,上側樹脂層132僅位於下側樹脂層30與引出配線20之間。即,上側樹脂層132按照與引出配線20相同的圖案狀進行配置,引出配線20僅位於上側樹脂層132上。換言之,在本方式中,上側樹脂層以圖案狀進行配置。Regarding the arrangement position of the upper resin layer 132, more specifically, as shown in FIG. 6, the upper resin layer 132 is located only between the lower resin layer 30 and the lead wiring 20. In other words, the upper resin layer 132 is arranged in the same pattern as the lead wiring 20, and the lead wiring 20 is located only on the upper resin layer 132. In other words, in the present embodiment, the upper resin layer is arranged in a pattern.

需要說明的是,在該方式中,上側樹脂層132的配置位置並不限於圖6和7的方式,只要上側樹脂層在下側樹脂層上與檢測電極的一端部接觸即可,例如,上側樹脂層也可以配置在下側樹脂層上的檢測電極所處的區域以外的區域上。In this embodiment, the arrangement position of the upper resin layer 132 is not limited to the embodiment of FIGS. 6 and 7, as long as the upper resin layer is in contact with one end portion of the detecting electrode on the lower resin layer, for example, the upper resin. The layer may also be disposed on a region other than the region where the detecting electrode on the lower resin layer is located.

上述觸控面板感測器用導電性層積體200的製造方法沒有特別限制,從製造容易的方面考慮,優選具有以下的步驟。The method for producing the conductive laminate 200 for a touch panel sensor is not particularly limited, and it is preferable to have the following steps from the viewpoint of easiness of production.

步驟E:在基板上的周邊區域形成含有著色劑的下側樹脂層的步驟;Step E: a step of forming a lower resin layer containing a colorant in a peripheral region on the substrate;

步驟F:在基板上形成檢測電極的步驟,該檢測電極一端部延伸至下側樹脂層上;Step F: forming a detecting electrode on the substrate, the detecting electrode extending from one end to the lower resin layer;

步驟G:順序不一地實施步驟G-1和步驟G-2的步驟,在步驟G-1中,形成具有與鍍覆催化劑或其前體相互作用的官能團的上側樹脂層,該上側樹脂層配置在下側樹脂層的一部分上,並且該上側樹脂層與檢測電極接觸;在步驟G-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與上側樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極;Step G: The steps of Step G-1 and Step G-2 are carried out in different order, and in Step G-1, an upper resin layer having a functional group that interacts with the plating catalyst or its precursor is formed, the upper resin layer Arranged on a portion of the lower resin layer, and the upper resin layer is in contact with the detecting electrode; in step G-2, an insulating layer is formed which does not substantially contain a functional group that interacts with the plating catalyst or its precursor, the insulating layer Covering the detecting electrode in such a manner that one end portion of the detecting electrode that is in contact with the upper resin layer is exposed;

步驟H:通過下述方法形成與檢測電極的一端部電氣連接的引出配線的步驟,該方法至少具有下述步驟:對上側樹脂層賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的上側樹脂層進行鍍覆處理。Step H: a step of forming a lead wiring electrically connected to one end portion of the detecting electrode by the following method, the method having at least the step of: applying a plating catalyst or a precursor thereof to the upper resin layer, and imparting a plating catalyst to the plating catalyst The upper resin layer of the precursor or the precursor thereof is subjected to a plating treatment.

下面對上述步驟E~步驟H進行詳細說明。The above steps E to H will be described in detail below.

[步驟E][Step E]

步驟E為在基板上的周邊區域形成含有著色劑的下側樹脂層的步驟。本步驟可通過與上述的步驟A-1同樣的過程來實施。Step E is a step of forming a lower resin layer containing a colorant in a peripheral region on the substrate. This step can be carried out by the same procedure as the above-described step A-1.

[步驟F][Step F]

步驟F為在基板上形成檢測電極的步驟,該檢測電極的一端部延伸至下側樹脂層上。本步驟可通過與上述的步驟B同樣的過程來實施。Step F is a step of forming a detecting electrode on the substrate, and one end portion of the detecting electrode extends to the lower resin layer. This step can be carried out by the same procedure as step B described above.

[步驟G][Step G]

步驟G為順序不一地實施步驟G-1和步驟G-2的步驟,在步驟G-1中,形成具有與鍍覆催化劑或其前體相互作用的官能團的上側樹脂層,該上側樹脂層配置在下側樹脂層的一部分上,並且該上側樹脂層與檢測電極接觸;在步驟G-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與上側樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極。Step G is a step of performing steps G-1 and G-2 in a stepwise manner, and in step G-1, forming an upper resin layer having a functional group that interacts with a plating catalyst or a precursor thereof, the upper resin layer Arranged on a portion of the lower resin layer, and the upper resin layer is in contact with the detecting electrode; in step G-2, an insulating layer is formed which does not substantially contain a functional group that interacts with the plating catalyst or its precursor, the insulating layer The detecting electrode is covered so that one end portion of the detecting electrode that is in contact with the upper resin layer is exposed.

在步驟G中,順序不一地實施步驟G-1和步驟G-2即可,具體地說,可以在實施步驟G-1後實施步驟G-2,也可以在實施步驟G-2後實施步驟G-1。In step G, step G-1 and step G-2 may be implemented in different order. Specifically, step G-2 may be implemented after step G-1 is implemented, or may be implemented after step G-2 is implemented. Step G-1.

步驟G-1為形成具有與鍍覆催化劑或其前體相互作用的官能團的上側樹脂層的步驟,該上側樹脂層配置在下側樹脂層的一部分上,並且該上側樹脂層與檢測電極接觸。本步驟的過程適宜採用在形成上述觸控面板感測器用導電性層積體10中的樹脂層的步驟A中實施的過程,僅在下側樹脂層上的特定區域上配置上側樹脂層。需要說明的是,在僅在特定區域上配置上側樹脂層時,酌情調整賦予能量的區域即可。Step G-1 is a step of forming an upper side resin layer having a functional group that interacts with a plating catalyst or a precursor thereof, the upper side resin layer being disposed on a portion of the lower side resin layer, and the upper side resin layer being in contact with the detecting electrode. The process of this step is preferably carried out in the step A performed in the step of forming the resin layer in the conductive laminate 10 for the touch panel sensor described above, and the upper resin layer is disposed only on a specific region on the lower resin layer. In addition, when the upper resin layer is disposed only in a specific region, the energy-imparting region may be adjusted as appropriate.

步驟G-2為形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層的步驟,該絕緣層按照與上側樹脂層接觸的檢測電極的一端部露出的方式覆蓋檢測電極。本步驟的過程酌情採用形成在上述的觸控面板感測器用導電性層積體10中的絕緣層的步驟C-2中實施的過程。Step G-2 is a step of forming an insulating layer that does not substantially contain a functional group that interacts with the plating catalyst or its precursor, and the insulating layer covers the detecting electrode so that one end portion of the detecting electrode that is in contact with the upper resin layer is exposed. The process of this step employs the process carried out in the step C-2 of forming the insulating layer in the conductive laminate 10 for a touch panel sensor as described above.

[步驟H][Step H]

步驟H為通過下述方法形成與檢測電極的一端部電氣連接的引出配線的步驟,該方法至少具有下述步驟:對上側樹脂層賦予鍍覆催化劑或其前體,對於被賦予了鍍覆催化劑或其前體的上側樹脂層進行鍍覆處理。Step H is a step of forming a lead wiring electrically connected to one end portion of the detecting electrode by the following method, the method having at least the step of: applying a plating catalyst or a precursor thereof to the upper resin layer, and applying a plating catalyst to the plating catalyst The upper resin layer of the precursor or the precursor thereof is subjected to a plating treatment.

如圖6所示,在上側樹脂層僅位於引出配線所配置的區域的情況下,在本步驟中,通過實施步驟D,能夠形成所期望的引出配線,該步驟D形成上述的觸控面板感測器用導電性層積體10中的引出配線。As shown in FIG. 6, in the case where the upper resin layer is located only in the region where the lead wiring is disposed, in this step, the desired lead wiring can be formed by performing step D, and the step D forms the touch panel feeling described above. The lead wires in the conductive laminate 10 for the detector are used.

需要說明的是,在步驟H中,根據需要,可以對於通過鍍覆處理在上側樹脂層上所形成的金屬層進一步以圖案狀進行蝕刻,形成引出配線。In addition, in step H, if necessary, the metal layer formed on the upper resin layer by the plating treatment may be further etched in a pattern to form lead wires.

作為此時的方法,使用通常已知的減成法(在金屬層上設置圖案狀的掩模,對未形成掩模的區域進行蝕刻處理後,除去掩模,形成引出配線的方法)、半加成法(在金屬層上設置圖案狀的掩模,按照在未形成掩模的區域形成金屬層的方式進行鍍覆處理,除去掩模,進行蝕刻處理,形成引出配線的方法)。As a method at this time, a generally known subtractive method (a method in which a pattern-like mask is provided on a metal layer, an etching process is performed on a region where a mask is not formed, and a mask is removed to form a lead wiring) is used. The addition method (a method in which a pattern mask is provided on a metal layer, a metal layer is formed in a region where no mask is formed, a mask is removed, a mask is removed, and an etching process is performed to form a lead wiring).

需要說明的是,在步驟G中,也可不進行形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層的步驟,而在不形成絕緣層的情況下僅對於被賦予了鍍覆催化劑或其前體的上側樹脂層和檢測電極的一端部進行鍍覆處理。In addition, in the step G, the step of forming an insulating layer that does not substantially contain a functional group that interacts with the plating catalyst or its precursor may be omitted, and only the insulating layer is not provided. The upper resin layer of the plating catalyst or its precursor and the one end portion of the detecting electrode are plated.

此外,在上述的圖1~圖7中,對於僅在基板的一側的表面上配置檢測電極、引出配線和樹脂層的方式進行了敘述,但也可以在基板的兩面配置上述的檢測電極、引出配線和樹脂層。此時,作為所使用的基板,如上所述,可以使用樹脂基板(例如PET基板)等。In addition, in the above-described FIGS. 1 to 7 , the detection electrode, the lead wiring, and the resin layer are disposed only on one surface of the substrate. However, the above-described detection electrodes may be disposed on both surfaces of the substrate. The wiring and the resin layer are taken out. At this time, as the substrate to be used, as described above, a resin substrate (for example, a PET substrate) or the like can be used.

[實施例][Examples]

下面通過實施例對本發明進一步詳細地說明,但本發明並不限於這些。The invention is further illustrated by the following examples, but the invention is not limited thereto.

<實施例1><Example 1>

在厚度為0.55mm的玻璃基板上使用黑色抗蝕劑進行5次絲網印刷、進行塗布。接著利用減壓乾燥機除去溶劑成分,之後利用接近式曝光方式(超高壓水銀燈)進行曝光。此處,作為曝光用光掩模使用利用Cr(鉻)在鈉玻璃上實施了圖案而得到的掩模。接下來利用鹼性顯影液進行顯影、進行熱處理,在圖1所示的樹脂層14的位置形成樹脂層。Screen printing was performed five times on a glass substrate having a thickness of 0.55 mm using a black resist. Then, the solvent component was removed by a vacuum dryer, and then exposure was performed by a proximity exposure method (ultra-high pressure mercury lamp). Here, as a photomask for exposure, a mask obtained by patterning a soda glass with Cr (chromium) is used. Next, development is carried out using an alkaline developing solution, and heat treatment is performed to form a resin layer at the position of the resin layer 14 shown in FIG.

需要說明的是,作為黑色抗蝕劑,使用日本特開2014-130417的實施例4中使用的黑色組合物4。另外,在所得到的樹脂層中含有作為相互作用性基團的羧酸基。In addition, as the black resist, the black composition 4 used in Example 4 of JP-A-2014-130417 was used. Further, a carboxylic acid group as an interactive group is contained in the obtained resin layer.

接著,使用氧化銦與氧化錫為重量比95:5的組成、填充密度為98%的氧化銦-氧化錫靶材,通過濺射法在所得到的玻璃基板上形成ITO層,利用照相平版印刷法將抗蝕劑圖案化、進行蝕刻,得到相當於圖1所示的第1檢測電極16和第2檢測電極18的圖案狀ITO層。其中,在第1檢測電極16和第2檢測電極18之間使用丙烯酸系感光性樹脂組合物進行圖案曝光,配置電極間絕緣層。Next, an indium oxide-tin oxide target having a composition of indium oxide and tin oxide of 95:5 by weight and a packing density of 98% was used, and an ITO layer was formed on the obtained glass substrate by a sputtering method, and photolithography was used. The resist is patterned and etched to obtain a patterned ITO layer corresponding to the first detecting electrode 16 and the second detecting electrode 18 shown in FIG. In the meantime, the acrylic photosensitive resin composition is used for pattern exposure between the first detecting electrode 16 and the second detecting electrode 18, and an inter-electrode insulating layer is disposed.

需要說明的是,如圖1所示,ITO層的一端部延伸至樹脂層上。It should be noted that, as shown in FIG. 1, one end portion of the ITO layer extends to the resin layer.

接著,在所得到的玻璃基板的ITO層上塗布含有環化異戊二烯橡膠的負性抗蝕劑(Fuji Film製造,SC-450),以圖案狀進行曝光,顯影除去未曝光部,在與圖1所示的絕緣層22同樣的位置得到絕緣層。需要說明的是,在絕緣層中不含有相互作用性基團。另外,如圖1所示,絕緣層按照ITO層的各一端部露出的方式進行配置。Next, a negative resist containing cyclized isoprene rubber (manufactured by Fuji Film, SC-450) was applied onto the ITO layer of the obtained glass substrate, and exposed in a pattern, and the unexposed portion was removed by development. An insulating layer is obtained at the same position as the insulating layer 22 shown in FIG. It should be noted that the insulating layer does not contain an interactive group. Further, as shown in FIG. 1, the insulating layer is disposed such that each end portion of the ITO layer is exposed.

接著,在樹脂層上塗布含有環化異戊二烯橡膠的負性抗蝕劑(Fuji Film製造,SC-450),以圖案狀進行曝光,在圖1所示的未配置引出配線20的樹脂層上的區域形成抗蝕劑圖案。Next, a negative resist containing cyclized isoprene rubber (SC-450, manufactured by Fuji Film) was applied onto the resin layer, and exposed in a pattern, and the resin in which the lead wiring 20 was not disposed as shown in FIG. 1 was applied. The area on the layer forms a resist pattern.

接下來,將未形成樹脂層的玻璃基板的面利用養護帶(日東電工製造)覆蓋後,在室溫下將具有樹脂層的玻璃基板在僅將Pd催化劑賦予液MAT-2(上村工業製造)中的MAT-2A進行5倍稀釋後的(催化劑賦予液、pH:3.5)溶液中浸漬5分鐘,利用純水清洗2次。接著在36℃下在還原劑MAB(上村工業製造)中浸漬5分鐘,利用純水清洗2次。其後在室溫下在活性化處理液MEL-3(上村工業製造)中浸漬5分鐘,在不進行清洗的情況下,在室溫下分別在無電解鍍覆液Thru-cup PEA(上村工業製造)中浸漬60分鐘。剝離覆蓋的帶,利用純水清洗2次,得到在樹脂層上具備圖案狀銅層(相當於引出配線)的導電性層積體。確認到在圖2所示的第2檢測電極端部18A上形成的配線20的長度自第2檢測電極端部18A最外部起為1mm以上。Next, the surface of the glass substrate in which the resin layer is not formed is covered with a protective tape (manufactured by Nitto Denko Corporation), and the glass substrate having the resin layer is applied to the Pd catalyst only liquid MAT-2 (manufactured by Uemura Industrial Co., Ltd.) at room temperature. The MAT-2A was immersed in a 5-fold diluted solution (catalyst-imparting solution, pH: 3.5) for 5 minutes, and washed twice with pure water. Subsequently, it was immersed in a reducing agent MAB (manufactured by Uemura Industrial Co., Ltd.) at 36 ° C for 5 minutes, and washed twice with pure water. Thereafter, it was immersed in the activation treatment liquid MEL-3 (manufactured by Uemura Kogyo Co., Ltd.) for 5 minutes at room temperature, and was subjected to electroless plating solution Thru-cup PEA (Shangcun Industrial) at room temperature without washing. Immersed for 60 minutes. The tape which was peeled off was washed twice with pure water to obtain a conductive laminate having a patterned copper layer (corresponding to a lead wire) on the resin layer. It is confirmed that the length of the wiring 20 formed on the second detecting electrode end portion 18A shown in FIG. 2 is 1 mm or more from the outermost portion of the second detecting electrode end portion 18A.

<實施例2><Example 2>

(合成例:聚合物1)(Synthesis Example: Polymer 1)

在2L的三口燒瓶中加入乙酸乙酯1L、2-氨基乙醇159g,利用冰浴進行冷卻。調節成內溫為20℃以下向其中滴加2-溴代異丁醯溴150g。其後使內溫上升至室溫(25℃)並反應2小時。反應終止後,追加蒸餾水300mL使反應停止。其後利用蒸餾水300mL對乙酸乙酯相進行4次清洗,之後利用硫酸鎂進行乾燥,進而蒸餾除去乙酸乙酯,從而得到原料A 80g。1 L of ethyl acetate and 159 g of 2-aminoethanol were placed in a 2 L three-necked flask, and the mixture was cooled in an ice bath. After adjusting to have an internal temperature of 20 ° C or less, 150 g of 2-bromoisobutyl hydrazine bromide was added dropwise thereto. Thereafter, the internal temperature was raised to room temperature (25 ° C) and reacted for 2 hours. After the reaction was terminated, 300 mL of distilled water was added to stop the reaction. Thereafter, the ethyl acetate phase was washed four times with 300 mL of distilled water, and then dried over magnesium sulfate, and then ethyl acetate was distilled off to obtain 80 g of a material A.

接著,向500mL的三口燒瓶中加入原料A 47.4g、吡啶22g、乙酸乙酯150mL,利用冰浴進行冷卻。調節成內溫為20℃以下向其中滴加丙烯醯氯25g。其後上升至室溫並反應3小時。反應終止後,追加蒸餾水300mL使反應停止。其後利用蒸餾水300mL對乙酸乙酯相進行4次清洗,之後利用硫酸鎂進行乾燥,進而蒸餾除去乙酸乙酯。其後利用柱色譜得到以下的單體M1(20g)。Next, 47.4 g of a raw material A, 22 g of pyridine, and 150 mL of ethyl acetate were placed in a 500 mL three-necked flask, and the mixture was cooled in an ice bath. After adjusting to have an internal temperature of 20 ° C or less, 25 g of acrylonitrile chloride was added dropwise thereto. Thereafter, it was raised to room temperature and reacted for 3 hours. After the reaction was terminated, 300 mL of distilled water was added to stop the reaction. Thereafter, the ethyl acetate phase was washed four times with 300 mL of distilled water, and then dried over magnesium sulfate to further distill off ethyl acetate. Thereafter, the following monomer M1 (20 g) was obtained by column chromatography.

[化6]單體M1[Chemical 6] Monomer M1

在500mL的三口燒瓶中加入N,N-二甲基乙醯胺8g,在氮氣流下加熱至65℃。利用4小時的時間向其中滴加單體M1:14.3g、丙烯腈(東京化成工業株式會社製造)3.0g、丙烯酸(東京化成製造)6.5g、V-65(和光純藥製造)0.4g的N,N-二甲基乙醯胺8g溶液。8 g of N,N-dimethylacetamide was placed in a 500 mL three-necked flask and heated to 65 ° C under a nitrogen stream. The monomer M: 1:14.3 g, acrylonitrile (manufactured by Tokyo Chemical Industry Co., Ltd.), 3.0 g, acrylic acid (manufactured by Tokyo Chemical Industry Co., Ltd.), 6.5 g, and V-65 (manufactured by Wako Pure Chemical Industries, Ltd.) 0.4 g were added dropwise thereto over a period of 4 hours. 8 g solution of N,N-dimethylacetamide.

滴加結束後,將反應溶液進一步攪拌3小時。其後追加N,N-二甲基乙醯胺41g,將反應溶液冷卻至室溫。向上述反應溶液中加入4-羥基TEMPO(東京化成製造)0.09g、DBU(二氮雜雙環十一碳烯)54.8g,在室溫下進行12小時反應。其後向反應液中加入70質量%甲磺酸水溶液54g。反應終止後,利用水進行再沉澱,取出固體物質,得到聚合物1(12g)。After the completion of the dropwise addition, the reaction solution was further stirred for 3 hours. Thereafter, 41 g of N,N-dimethylacetamide was added, and the reaction solution was cooled to room temperature. To the reaction solution, 0.09 g of 4-hydroxy TEMPO (manufactured by Tokyo Chemical Industry Co., Ltd.) and 54.8 g of DBU (diazabicycloundecene) were added, and the reaction was carried out for 12 hours at room temperature. Thereafter, 54 g of a 70% by mass aqueous methanesulfonic acid solution was added to the reaction liquid. After the reaction was terminated, reprecipitation was carried out with water, and the solid matter was taken out to obtain a polymer 1 (12 g).

使用IR測定機((株)堀場製作所製造)進行所得到的聚合物1的鑒定。在測定中,使聚合物溶解在丙酮中,使用KBr結晶來進行。根據IR測定的結果,在2240cm-1 附近觀測到峰值,可知丙烯腈作為腈單元被導入到聚合物中。此外,通過酸值測定可知丙烯酸作為羧酸單元被導入。並且,使聚合物溶解在氘代DMSO(二甲基亞碸)中,利用Bruker製造的300MHz的NMR(核磁共振,Nuclear Magnetic Resonance) (AV-300)進行測定。可知,在2.5-0.7ppm(5H)觀察到相當於含腈基單元的寬峰,在7.8-8.1ppm(1H)、5.8-5.6ppm(1H)、5.4-5.2ppm(1H)、4.2-3.9ppm(2H)、3.3-3.5ppm(2H)、2.5-0.7ppm(6H)觀察到相當於含聚合性基團單元的寬峰,在2.5-0.7ppm(3H)觀察到相當於含羧酸單元的寬峰,含聚合性基團單元:含腈基單元:羧酸基單元=30:30:40(mol%)。The identification of the obtained polymer 1 was carried out using an IR measuring machine (manufactured by Horiba, Ltd.). In the measurement, the polymer was dissolved in acetone and carried out using KBr crystals. From the results of the IR measurement, a peak was observed in the vicinity of 2240 cm -1 , and it was found that acrylonitrile was introduced into the polymer as a nitrile unit. Further, it was found from the measurement of the acid value that acrylic acid was introduced as a carboxylic acid unit. Further, the polymer was dissolved in deuterated DMSO (dimethyl hydrazine) and measured by 300 MHz NMR (Nuclear Magnetic Resonance) (AV-300) manufactured by Bruker. It can be seen that a broad peak corresponding to the nitrile-containing unit was observed at 2.5-0.7 ppm (5H), at 7.8-8.1 ppm (1H), 5.8-5.6 ppm (1H), 5.4-5.2 ppm (1H), 4.2-3.9. Phenol (2H), 3.3-3.5 ppm (2H), 2.5-0.7 ppm (6H), a broad peak corresponding to a polymerizable group unit was observed, and a corresponding carboxylic acid-containing unit was observed at 2.5-0.7 ppm (3H). Wide peak, polymerizable group unit: nitrile group-containing unit: carboxylic acid group unit = 30:30:40 (mol%).

[化7]聚合物1[Chemistry 7] Polymer 1

(上側樹脂層形成用組合物的調製)(Preparation of composition for forming upper resin layer)

在置入有磁力攪拌的200ml燒杯中加入水(18.95質量份)、丙二醇單甲醚(75.8質量份)、聚合物1(5質量份)和IRGACURE OXE 02(BASF社製造)(0.25質量份),調製液體,得到上側樹脂層形成用組合物。Water (18.95 parts by mass), propylene glycol monomethyl ether (75.8 parts by mass), polymer 1 (5 parts by mass), and IRGACURE OXE 02 (manufactured by BASF Corporation) (0.25 parts by mass) were placed in a 200 ml beaker placed with magnetic stirring. The liquid was prepared to obtain a composition for forming an upper resin layer.

除了將樹脂層的製造過程變更為以下的方法(層積型樹脂層的製造方法)以外,按照與實施例1相同的過程製造導電性層積體。A conductive laminate was produced in the same manner as in Example 1 except that the production process of the resin layer was changed to the following method (manufacturing method of the laminated resin layer).

(層積型樹脂層的製造方法)(Method of Manufacturing Layered Resin Layer)

使用在日本特開2013-218313號的實施例1中製造的裝飾層形成用感光性膜L1,按照與上述文獻同樣的過程,將裝飾層在與圖4所示的下側樹脂層30同樣的位置配置在基板上。需要说明的是,在裝飾層中含有著色劑。In the same manner as the above-mentioned document, the decorative layer is the same as the lower resin layer 30 shown in FIG. 4, using the photosensitive film L1 for decorative layer formation manufactured in Example 1 of JP-A-2013-218313. The position is placed on the substrate. It should be noted that a coloring agent is contained in the decorative layer.

接著,在具備裝飾層的基板上旋塗上側樹脂層形成用組合物,在80℃乾燥5分鐘。其後,在大氣下對塗膜整個面以圖案狀進行UV照射(能量:2J、10mW、波長:256nm),在與圖4所示的上側樹脂層32同樣的位置形成上側樹脂層(厚度:0.25μm)。Next, the composition for forming the upper resin layer was spin-coated on the substrate having the decorative layer, and dried at 80 ° C for 5 minutes. Thereafter, the entire surface of the coating film was subjected to UV irradiation (energy: 2 J, 10 mW, wavelength: 256 nm) in the atmosphere, and an upper resin layer was formed at the same position as the upper resin layer 32 shown in FIG. 4 (thickness: 0.25 μm).

<實施例3><Example 3>

按照與實施例2同樣的過程製造具有裝飾層的基板。A substrate having a decorative layer was produced in the same manner as in Example 2.

接著,按照與實施例1中實施的方法同樣的過程在基板上配置ITO層。需要說明的是,ITO層的一端部延伸至裝飾層上。Next, an ITO layer was placed on the substrate in the same manner as the method carried out in Example 1. It should be noted that one end portion of the ITO layer extends to the decorative layer.

接著,在具備裝飾層的基板上旋塗上側樹脂層形成用組合物,在80℃乾燥5分鐘。其後,在大氣下對塗膜整個面以圖案狀進行UV照射(能量:2J、10mW、波長:256nm),在與圖6所示的上側樹脂層132同樣的位置形成上側樹脂層(厚度:0.25μm)。Next, the composition for forming the upper resin layer was spin-coated on the substrate having the decorative layer, and dried at 80 ° C for 5 minutes. Thereafter, the entire surface of the coating film was subjected to UV irradiation (energy: 2 J, 10 mW, wavelength: 256 nm) in the atmosphere, and an upper resin layer was formed at the same position as the upper resin layer 132 shown in FIG. 6 (thickness: 0.25 μm).

其後,使用所得到的基板,按照與實施例1相同的過程設置絕緣層,進而進行鍍覆處理,在圖6所示的引出配線20的位置形成圖案狀銅層,得到導電性層積體。Then, using the obtained substrate, an insulating layer was provided in the same manner as in Example 1, and further, a plating treatment was performed, and a patterned copper layer was formed at the position of the lead wiring 20 shown in FIG. 6 to obtain a conductive laminate. .

使用上述實施例1~3中得到的導電性層積體實施下述的(連接電阻測定),結果在任一導電性層積體中均為“A”評價,確認到ITO層(檢測電極)與圖案狀銅層(引出配線)的電氣連線性高。The conductive laminate obtained in the above Examples 1 to 3 was subjected to the following (connection resistance measurement), and as a result, it was evaluated as "A" in any of the conductive laminates, and it was confirmed that the ITO layer (detection electrode) and The patterned copper layer (lead wiring) has a high electrical connection linearity.

(連接電阻測定)(connection resistance measurement)

作為評價方法,對上述圖案狀銅層與圖案狀ITO層之間的電阻值進行測定(日置電機社製造,Milliohm HiTester 3540),按照下述基準進行評價。As a method of evaluation, the electric resistance value between the patterned copper layer and the patterned ITO layer was measured (manufactured by Hiramoto Electric Co., Ltd., Milliohm HiTester 3540), and evaluated according to the following criteria.

“A”:電阻值為10mΩ以下的情況"A": When the resistance value is 10mΩ or less

“B”:電阻值大於10mΩ的情況"B": the resistance value is greater than 10mΩ

“C”:無法測定出電阻值、實質上發生斷線的情況"C": The resistance value cannot be measured, and the disconnection is substantially caused.

需要說明的是,在實施例1中,使用了由含有環化異戊二烯橡膠的負性抗蝕劑(Fuji Film製造,SC-450)形成的絕緣層,但即使在替代絕緣層而使用SiO2 層(33nm)與NbO5 層(14nm)的層積層的情況下,也確認得到了同樣的效果。In addition, in Example 1, an insulating layer formed of a negative resist containing a cyclized isoprene rubber (SC-450, manufactured by Fuji Film) was used, but it was used instead of the insulating layer. In the case of a laminated layer of SiO 2 layer (33 nm) and NbO 5 layer (14 nm), it was confirmed that the same effect was obtained.

製造了具備包含上述實施例1~3中得到的各導電性層積體的觸控面板感測器的觸控面板,結果各觸控面板均工作良好。A touch panel including the touch panel sensor including the respective conductive laminates obtained in the above Examples 1 to 3 was produced, and as a result, each of the touch panels worked well.

需要說明的是,在上述實施例1~3中是設置絕緣層進行鍍覆處理的,但也可以不設置絕緣層而僅在希望使引出配線析出的部分實施鍍覆處理,形成所期望的圖案狀銅層。更具體地說,僅將希望使引出配線析出的樹脂層的部分浸漬在上述鍍覆處理中使用的溶液中,使鍍覆物析出。In the above-described first to third embodiments, the insulating layer is provided for the plating treatment. However, the plating layer may be formed only in the portion where the extraction wiring is desired to be formed without providing the insulating layer, thereby forming a desired pattern. Copper layer. More specifically, only the portion of the resin layer which is desired to precipitate the lead wiring is immersed in the solution used in the above plating treatment to precipitate the plating material.

以上所舉者僅係本發明之部份實施例,並非用以限制本發明,致依本發明之創意精神及特徵,稍加變化修飾而成者,亦應包括在本專利範圍之內。The above is only a part of the embodiments of the present invention, and is not intended to limit the present invention. It is intended to be included in the scope of the present invention.

綜上所述,本發明實施例確能達到所預期之使用功效,又其所揭露之具體技術手段,不僅未曾見諸於同類產品中,亦未曾公開於申請前,誠已完全符合專利法之規定與要求,爰依法提出發明專利之申請,懇請惠予審查,並賜准專利,則實感德便。In summary, the embodiments of the present invention can achieve the expected use efficiency, and the specific technical means disclosed therein have not been seen in similar products, nor have they been disclosed before the application, and have completely complied with the patent law. The regulations and requirements, the application for invention patents in accordance with the law, and the application for review, and the grant of patents, are truly sensible.

10,100,200‧‧‧觸控面板感測器用導電性層積體10,100,200‧‧‧Electrically conductive laminate for touch panel sensors

12‧‧‧基板12‧‧‧Substrate

14‧‧‧樹脂層14‧‧‧ resin layer

16‧‧‧第1檢測電極16‧‧‧1st detecting electrode

18‧‧‧第2檢測電極18‧‧‧2nd detection electrode

20‧‧‧引出配線20‧‧‧Leading wiring

22‧‧‧絕緣層22‧‧‧Insulation

24‧‧‧電極間絕緣層24‧‧‧Inter-electrode insulation

30‧‧‧下側樹脂層30‧‧‧Lower resin layer

32,132‧‧‧上側樹脂層32,132‧‧‧Upper resin layer

34‧‧‧層積型樹脂層34‧‧‧Layered resin layer

18A‧‧‧一端部18A‧‧‧End

圖1是本發明的觸控面板感測器用導電性層積體的第1實施方式的俯視圖。1 is a plan view showing a first embodiment of a conductive laminate for a touch panel sensor according to the present invention.

圖2是沿圖1中示出的切斷線A-A進行切斷的截面圖。Fig. 2 is a cross-sectional view taken along the cutting line A-A shown in Fig. 1.

圖3是按步驟順序示出觸控面板感測器用導電性層積體的製造方法的一個實施方式的截面圖。3 is a cross-sectional view showing one embodiment of a method of manufacturing a conductive laminate for a touch panel sensor in order of steps.

圖4是本發明的觸控面板感測器用導電性層積體的第2實施方式的俯視圖。4 is a plan view showing a second embodiment of the conductive laminate for a touch panel sensor of the present invention.

圖5是沿圖4中示出的切斷線B-B進行切斷的截面圖。Fig. 5 is a cross-sectional view taken along the cutting line B-B shown in Fig. 4 .

圖6是本發明的觸控面板感測器用導電性層積體的第3實施方式的俯視圖。Fig. 6 is a plan view showing a third embodiment of a conductive laminate for a touch panel sensor according to the present invention.

圖7是沿圖6中示出的切斷線C-C進行切斷的截面圖。Fig. 7 is a cross-sectional view taken along the cutting line C-C shown in Fig. 6.

12‧‧‧基板 12‧‧‧Substrate

14‧‧‧樹脂層 14‧‧‧ resin layer

16‧‧‧第1檢測電極 16‧‧‧1st detecting electrode

18‧‧‧第2檢測電極 18‧‧‧2nd detection electrode

18A‧‧‧一端部 18A‧‧‧End

20‧‧‧引出配線 20‧‧‧Leading wiring

22‧‧‧絕緣層 22‧‧‧Insulation

24‧‧‧電極間絕緣層 24‧‧‧Inter-electrode insulation

Claims (10)

一種觸控面板感測器用導電性層積體,其具有:   基板;   樹脂層,其配置在上述基板上的周邊區域,具有與鍍覆催化劑或其前體相互作用的官能團;   檢測電極,其按照一端部與上述樹脂層接觸的方式配置在上述基板上;以及   引出配線,其配置在上述樹脂層上,與上述檢測電極的上述一端部電氣連接;   上述引出配線為通過至少具有下述步驟的方法形成的配線,在該步驟中,對上述樹脂層賦予鍍覆催化劑或其前體,對於上述被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理。A conductive laminate for a touch panel sensor, comprising: a substrate; a resin layer disposed on a peripheral region of the substrate, having a functional group that interacts with a plating catalyst or a precursor thereof; and a detecting electrode One end portion is disposed on the substrate so as to be in contact with the resin layer, and a lead wire is disposed on the resin layer and electrically connected to the one end portion of the detecting electrode; and the lead wire is a method having at least the following steps In the wiring to be formed, in this step, a plating catalyst or a precursor thereof is applied to the resin layer, and a resin layer to which the plating catalyst or its precursor is applied is subjected to a plating treatment. 如申請專利範圍第1項所述的觸控面板感測器用導電性層積體,其中,   該層積體進一步具有絕緣層,該絕緣層按照上述檢測電極的與上述引出配線電氣連接的上述一端部露出的方式覆蓋上述檢測電極;   上述絕緣層中實質上不含有與鍍覆催化劑或其前體相互作用的官能團。The conductive laminate for a touch panel sensor according to claim 1, wherein the laminate further has an insulating layer, the insulating layer being electrically connected to the one end of the detecting electrode electrically connected to the lead wiring The exposed portion covers the detecting electrode; the insulating layer does not substantially contain a functional group that interacts with the plating catalyst or its precursor. 如申請專利範圍第1或2項所述的觸控面板感測器用導電性層積體,其中,   上述樹脂層中含有著色劑,上述樹脂層作為裝飾層發揮功能;   上述檢測電極的上述一端部延伸至上述樹脂層上。The conductive laminate for a touch panel sensor according to the first aspect of the invention, wherein the resin layer contains a coloring agent, the resin layer functions as a decorative layer, and the one end portion of the detecting electrode It extends to the above resin layer. 如申請專利範圍第1或2項所述的觸控面板感測器用導電性層積體,其中,   上述樹脂層為包含下側樹脂層與上側樹脂層的層積型樹脂層,該下側樹脂層含有著色劑,該上側樹脂層配置在上述下側樹脂層上,並且該上側樹脂層具有與上述鍍覆催化劑或其前體相互作用的官能團;   上述檢測電極的上述一端部延伸至上述上側樹脂層上。The conductive laminate for a touch panel sensor according to the first or second aspect, wherein the resin layer is a laminated resin layer including a lower resin layer and an upper resin layer, and the lower resin The layer contains a coloring agent, the upper resin layer is disposed on the lower resin layer, and the upper resin layer has a functional group that interacts with the plating catalyst or the precursor thereof; and the one end portion of the detecting electrode extends to the upper resin On the floor. 如申請專利範圍第1或2項所述的觸控面板感測器用導電性層積體,其中,   上述樹脂層為包含下側樹脂層與上側樹脂層的層積型樹脂層,該下側樹脂層含有著色劑,該上側樹脂層配置在上述下側樹脂層上的一部分,並且該上側樹脂層具有與上述鍍覆催化劑或其前體相互作用的官能團;   上述檢測電極的上述一端部延伸至上述下側樹脂層上,在上述下側樹脂層上,上述一端部與上述上側樹脂層接觸。The conductive laminate for a touch panel sensor according to the first or second aspect, wherein the resin layer is a laminated resin layer including a lower resin layer and an upper resin layer, and the lower resin The layer contains a coloring agent, the upper resin layer is disposed on a portion of the lower resin layer, and the upper resin layer has a functional group that interacts with the plating catalyst or a precursor thereof; and the one end portion of the detecting electrode extends to the above On the lower resin layer, the one end portion is in contact with the upper resin layer on the lower resin layer. 如申請專利範圍第1或2項所述的觸控面板感測器用導電性層積體,其中,上述基板為玻璃基板。The conductive laminate for a touch panel sensor according to claim 1 or 2, wherein the substrate is a glass substrate. 一種觸控面板感測器,其包含如申請專利範圍第1~6項的任一項所述的觸控面板感測器用導電性層積體。A touch panel sensor, comprising the conductive laminate for a touch panel sensor according to any one of claims 1 to 6. 一種觸控面板,其包含如申請專利範圍第1~6項的任一項所述的觸控面板感測器用導電性層積體。A touch panel comprising the conductive laminate for a touch panel sensor according to any one of claims 1 to 6. 一種觸控面板感測器用導電性層積體的製造方法,其具有下述步驟:   步驟A,在該步驟中,在基板上的周邊區域形成具有與鍍覆催化劑或其前體相互作用的官能團的樹脂層;   步驟B,在該步驟中,在上述基板上形成檢測電極,該檢測電極的一端部延伸至上述樹脂層上,該檢測電極與上述樹脂層接觸;   步驟C,在該步驟中,順序不一地實施步驟C-1和步驟C-2,在步驟C-1中,在上述樹脂層上形成抗蝕劑圖案;在步驟C-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與上述樹脂層接觸的上述檢測電極的一端部露出的方式覆蓋上述檢測電極;以及   步驟D,在該步驟中,對上述樹脂層上的未形成上述抗蝕劑圖案的區域賦予鍍覆催化劑或其前體,對於上述被賦予了鍍覆催化劑或其前體的樹脂層進行鍍覆處理,形成與上述檢測電極的上述一端部電氣連接著的引出配線。A method for manufacturing a conductive laminate for a touch panel sensor, comprising the steps of: Step A, in which a functional group having a interaction with a plating catalyst or a precursor thereof is formed in a peripheral region on a substrate a resin layer; in this step, a detecting electrode is formed on the substrate, one end portion of the detecting electrode extends to the resin layer, and the detecting electrode is in contact with the resin layer; Step C, in this step, Step C-1 and step C-2 are performed in different order, in step C-1, a resist pattern is formed on the above resin layer; in step C-2, formation is substantially free of plating catalyst or An insulating layer of a functional group in which the precursor interacts, the insulating layer covering the detecting electrode in such a manner that one end portion of the detecting electrode in contact with the resin layer is exposed; and a step D, in the step, on the resin layer The region where the resist pattern is not formed is provided with a plating catalyst or a precursor thereof, and the resin layer to which the plating catalyst or its precursor is applied is plated. Forming the lead line connected to the one end portion of the detection electrode electrically. 一種觸控面板感測器用導電性層積體的製造方法,其具有下述步驟:   步驟E,在該步驟中,在基板上的周邊區域形成含有著色劑的下側樹脂層;   步驟F,在該步驟中,在上述基板上形成一端部延伸至上述下側樹脂層上的檢測電極;   步驟G,在該步驟中,順序不一地實施步驟G-1和步驟G-2,在步驟G-1中,形成具有與鍍覆催化劑或其前體相互作用的官能團的上側樹脂層,該上側樹脂層配置在上述下側樹脂層的一部分上,並且該上側樹脂層與上述檢測電極接觸;在步驟G-2中,形成實質上不含有與鍍覆催化劑或其前體相互作用的官能團的絕緣層,該絕緣層按照與上述上側樹脂層接觸的上述檢測電極的一端部露出的方式覆蓋上述檢測電極;以及   步驟H,在該步驟中,通過下述方法形成與上述檢測電極的上述一端部電氣連接著的引出配線,該方法至少具有下述步驟:對上述上側樹脂層賦予鍍覆催化劑或其前體,對於上述被賦予了鍍覆催化劑或其前體的上側樹脂層進行鍍覆處理。A method for manufacturing a conductive laminate for a touch panel sensor, comprising the steps of: Step E, in which a lower resin layer containing a colorant is formed on a peripheral region on a substrate; Step F, In this step, a detecting electrode having one end extending to the lower resin layer is formed on the substrate; Step G, in this step, step G-1 and step G-2 are performed in different order, in step G- 1 , forming an upper resin layer having a functional group that interacts with a plating catalyst or a precursor thereof, the upper resin layer being disposed on a portion of the lower resin layer, and the upper resin layer being in contact with the detecting electrode; In G-2, an insulating layer that does not substantially contain a functional group that interacts with a plating catalyst or a precursor thereof is formed, and the insulating layer covers the detecting electrode so that one end portion of the detecting electrode that is in contact with the upper resin layer is exposed. And step H, in which the lead wiring electrically connected to the one end portion of the detecting electrode is formed by the following method, the method Having at least the following steps: on the upper side of the resin layer imparting a plating catalyst or a precursor thereof, a plating treatment is given to the above-described plated layer on the side of the resin catalyst or a precursor thereof.
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