TW201606261A - Screw dimension automatic measurement system - Google Patents

Screw dimension automatic measurement system Download PDF

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TW201606261A
TW201606261A TW104119939A TW104119939A TW201606261A TW 201606261 A TW201606261 A TW 201606261A TW 104119939 A TW104119939 A TW 104119939A TW 104119939 A TW104119939 A TW 104119939A TW 201606261 A TW201606261 A TW 201606261A
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workpiece
screw
head
data
size
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TW104119939A
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TWI567363B (en
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北尾八三一
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日產螺絲股份有限公司
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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present application is related to a screw dimension automatic measuring system. The screw dimension automatic measuring system regards screw as a measurement object workpiece, comprising: a gripping portion, gripping an axial end of male screw of a workpiece; a gripping rotating portion, rotating and driving the gripping portion about the axial direction by 360 degree; an optical measurement device, optically measuring the size of the workpiece without contact in which the male screw of the axial end of the workpiece is gripped by the gripping portion; an axial movement portion, moving the optical measuring device relatively to the gripping portion along the axial direction; a calculation controlling unit, calculating and then outputting the axial size of the workpiece and the size around the axis of the workpiece. The calculation controlling device comprises: a screw diameter calculating unit, calculating the size relative to the crest of the screw and the size relative to the root of the screw of the workpiece; and a total length calculating unit, calculating the total length along the axial direction of the workpiece.

Description

螺釘尺寸自動測定系統 Screw size automatic measuring system

本發明係關於一種關於螺釘尺寸自動測定系統,特別是關於可自動地測定螺釘有關的各種尺寸的螺釘尺寸自動測定系統。 BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to an automatic screw size measuring system, and more particularly to an automatic screw size measuring system for automatically measuring various sizes of screws.

在螺釘製造商中,為了將製造的螺釘製成滿足預設的規格的製品進行出貨,而進行螺釘的各種尺寸測定。螺釘的各種尺寸分別具有規格,為了對這些規格進行測量,一邊分開使用測微計、卡尺、螺紋量規等各式各樣的測量設備,一邊在大部分測量中藉由檢查員的人工作業進行螺釘尺寸檢查。一個螺釘中具有10個以上的應該管理的尺寸,在這些尺寸的測定中,使用各不相同的測量設備,其檢查結果係藉由工作人員的手寫記錄於檢查表中。 In the screw manufacturer, various dimensions of the screw are measured in order to manufacture the manufactured screw to a product that meets the preset specifications. Various sizes of screws are available in specifications. In order to measure these specifications, various measuring devices such as micrometers, calipers, and thread gauges are used separately, and most of the measurements are performed by the inspector's manual work. Screw size check. There are more than 10 dimensions that should be managed in one screw. In the measurement of these dimensions, different measuring devices are used, and the inspection results are recorded in the checklist by the handwriting of the staff.

這種螺釘尺寸測定需要大量的精力和時間,因此,提出有一些自動測定方法。例如,在日本國特開2012-112929號公報中,就螺釘檢查裝置而言,揭示有如下裝置,即利用卡盤單元固定螺釘的頭部,從發光器對螺紋部照射平行光線,並利用相對於螺紋部而設於發光器 之相反側的受光器來取得螺紋部的明暗影像,並利用電腦對螺紋部的取得影像進行計算,以顯示螺釘的長度、徑寬、螺紋頂等測定資訊。以上係說明發光器和受光器可沿著螺紋部的軸向移動,並旋轉螺釘的頭部而改變螺紋部的方向,藉此可遍及360度檢查螺釘之外周。 This screw size measurement requires a lot of effort and time, and therefore, some automatic measurement methods have been proposed. For example, in Japanese Laid-Open Patent Publication No. 2012-112929, the screw inspection device discloses a device in which a head portion of a screw unit fixing screw is used to illuminate a thread portion from a illuminator, and a relative light is used. Provided in the illuminator in the threaded portion The light receiver on the opposite side acquires the light and dark image of the threaded portion, and uses the computer to calculate the image obtained by the threaded portion to display measurement information such as the length, the width of the screw, and the top of the screw. The above description shows that the illuminator and the light receiver can be moved along the axial direction of the threaded portion, and the head of the screw is rotated to change the direction of the threaded portion, whereby the outer circumference of the screw can be inspected 360 degrees.

在日本國特開2010-210292號公報中,就螺釘形狀測定裝置而言,揭示有如下裝置,即具有:光源,與螺釘的螺旋平行地照射光;攝像裝置,具有直線感測器,該直線感測器係使用具有與光源同一之受光光軸且僅使與光軸平行的成分成像的遠心透鏡,取得與螺紋軸正交的方向的1維圖像感測器。在此,藉由掃描對螺釘槽取得複數個1維圖像,並將這些圖像合成而測定螺釘的形狀。 In the screw shape measuring device, a device having a light source that emits light in parallel with a spiral of a screw, and an imaging device having a linear sensor, the straight line, is disclosed in Japanese Laid-Open Patent Publication No. 2010-210292 The sensor uses a telecentric lens having a light receiving optical axis identical to the light source and imaging only a component parallel to the optical axis, and obtains a one-dimensional image sensor in a direction orthogonal to the screw axis. Here, a plurality of one-dimensional images are obtained by scanning a screw slot, and these images are combined to measure the shape of the screw.

在習知技術中,提出有螺紋部的尺寸關係之自動測定,但並未敍述螺紋部以外的螺釘的各種尺寸的測定。 In the prior art, automatic measurement of the dimensional relationship of the threaded portion has been proposed, but the measurement of various dimensions of the screw other than the threaded portion has not been described.

例如,在帶頭螺釘的情況下,並未敍述頭部的形狀尺寸、頭部與螺紋部之間的頭下部的曲率半徑、設於頭部的頭部孔的深度等。另外,在螺釘的繞軸的尺寸測定中,必須使螺釘繞著軸旋轉,而不易連續地進行該旋轉和測定。在日本國特開2012-112929號公報中,為了遍及360度檢查螺釘的外周,係暫時解除卡盤單元對頭部進行之固定,而使頭部旋轉,並再次利用卡盤單元重新固定頭部,因此,不能連續進行旋轉和測定。 For example, in the case of a cap screw, the shape and size of the head, the radius of curvature of the head lower portion between the head portion and the screw portion, the depth of the head hole provided in the head portion, and the like are not described. In addition, in the measurement of the size of the winding axis of the screw, it is necessary to rotate the screw about the axis, and the rotation and measurement are not easily performed continuously. In Japanese Patent Laid-Open Publication No. 2012-112929, in order to inspect the outer circumference of the screw over 360 degrees, the chuck unit is temporarily released from fixing the head portion, and the head is rotated, and the head unit is again fixed by the chuck unit. Therefore, rotation and measurement cannot be performed continuously.

本發明的目的係在於提供一種螺釘尺寸自動測定系統,係僅安裝一次作為測定對象工件的螺釘,就可自動地測定螺釘的各種尺寸。 An object of the present invention is to provide an automatic screw size measuring system capable of automatically measuring various sizes of screws by mounting only a screw as a workpiece to be measured.

本發明之螺釘尺寸自動測定系統,係以螺釘為測定對象工件,包括:把持部,係把持工件的公螺紋的軸向的一端;把持旋轉部,係繞著軸向使驅動把持部旋轉360度;光學測量裝置,係光學性且非接觸地測量由把持部把持公螺紋的軸向的一端的工件之尺寸;軸向移動部,係使光學測量裝置相對於把持部沿軸向相對性移動;以及運算控制裝置,係算出並輸出工件的軸向及繞軸的尺寸;其中,運算控制裝置係包含:螺紋徑算出部,係算出與工件的螺紋頂相關的尺寸及與螺紋底相關的尺寸;及全長算出部,係算出沿著工件的軸向的全長。 The automatic screw size measuring system of the present invention is a workpiece for measuring a screw, comprising: a grip portion that grips one end of an axial direction of a male thread of the workpiece; and a grip rotating portion that rotates the driving grip portion 360 degrees around the axial direction The optical measuring device optically and non-contactly measures the size of the workpiece at one end of the axial direction of the male thread held by the grip portion; the axial moving portion moves the optical measuring device relative to the grip portion in the axial direction; And the calculation control device calculates and outputs the dimension of the workpiece in the axial direction and the axis; wherein the calculation control device includes: a screw diameter calculation unit that calculates a dimension related to the thread top of the workpiece and a dimension related to the thread bottom; And the full length calculation unit calculates the total length along the axial direction of the workpiece.

在本發明的螺釘尺寸自動測定系統中,較佳為,把持部係包含:轉接器,具有圓板狀之外形,且在一端面的中心具有預定嚙合長度的母螺紋,該母螺紋係在螺入工件的公螺紋的前端部時,可固定成使工件的軸向不晃動;緊固卡盤,至少以3點夾持固定轉接器的外周側面。 In the automatic screw size measuring system of the present invention, preferably, the grip portion includes: an adapter having a disc-shaped outer shape and a female thread having a predetermined engagement length at a center of the end surface, the female thread being attached to When screwing into the front end of the male thread of the workpiece, it can be fixed so that the axial direction of the workpiece does not sway; the chuck is fastened, and the outer peripheral side of the adapter is clamped at least at three points.

在本發明的螺釘尺寸自動測定系統中,較佳為,轉接器係具有:環規,刻有與工件的公螺紋的螺紋尺寸對應且具有預定的嚙合精度的基準母螺紋;圓板狀的支架,具有與環規的基準母螺紋嚙合的公螺紋所突出的一端面;其中,支架的圓板形狀為不論工件的螺釘尺寸為何之共同的形狀。 In the automatic screw size measuring system of the present invention, preferably, the adapter has a ring gauge engraved with a reference female thread corresponding to a thread size of a male thread of the workpiece and having a predetermined meshing accuracy; a disk-shaped The bracket has an end surface protruding from a male thread engaged with the reference female thread of the ring gauge; wherein the circular shape of the bracket is a common shape regardless of the screw size of the workpiece.

在本發明的螺釘尺寸自動測定系統中,較佳為,將軸向設為Y方向,將與Y方向垂直的面設為XZ平面,且具備具有與XZ平面平行的上表面的基台,把持部可繞著軸向旋轉地設於基台的上表面,軸向移動部係包含搭載有光學測量裝置的移動工作台、即相對於基台可沿著Y方向移動至任意Y位置的移動工作台,光學測量裝置包含測定工件的軸向及繞軸尺寸的圖像投影部。 In the automatic screw size measuring system of the present invention, it is preferable that the axial direction is the Y direction, the surface perpendicular to the Y direction is the XZ plane, and the base having the upper surface parallel to the XZ plane is provided, and the holding is performed. The portion is rotatably disposed on the upper surface of the base plate in the axial direction, and the axial movement portion includes a moving table on which the optical measuring device is mounted, that is, a moving work that can be moved to the Y position in the Y direction with respect to the base plate. The optical measuring device includes an image projection unit that measures the axial direction of the workpiece and the size of the axis.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,圖像投影部具有:光源,相對於工件的Y方向中心線配置於Z方向的一側並輸出平行光線;遠心光學系統的投影攝像照相機,相對於工件的Y方向中心線而配置於Z方向的另一側,接收來自光源的平行光線,對於成為工件影像的投影形狀,具有與光源相同的受光光軸且僅使與光軸平行的成分在與XY平面平行的拍攝面上成像而進行拍攝。 Further, in the automatic screw size measuring system of the present invention, preferably, the image projecting unit includes a light source that is disposed on one side in the Z direction with respect to a center line of the workpiece in the Z direction and outputs parallel rays; projection of the telecentric optical system The imaging camera is disposed on the other side in the Z direction with respect to the center line of the Y direction of the workpiece, receives parallel rays from the light source, and has the same light receiving optical axis as the light source and only the optical axis with respect to the projection shape of the workpiece image. Parallel components are imaged on an imaging surface parallel to the XY plane for imaging.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,運算控制裝置係包含輪廓資料算出部,其係將由投影攝像照相機所拍攝的工件的投影形狀資料變換成具有任意的位置解析度的位元映像的2維資料,並使用預定臨限值將位元映像的2維資料的各資料二值化成黑白。 Further, in the automatic screw size measuring system of the present invention, preferably, the arithmetic control device includes a contour data calculating unit that converts projection shape data of the workpiece imaged by the projection imaging camera into an arbitrary position resolution. The 2-dimensional data of the bit map, and the data of the 2-dimensional data of the bit map is binarized into black and white using a predetermined threshold.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,輪廓資料算出部係依據依據預設的雜訊判斷基準,對黑白的二值化交界的資料進行將從工件的剖視圖形觀察而成為異常的資料作為雜訊予以去除的平滑化處 理,而求得表示螺釘輪廓分佈的輪廓資料,輪廓資料算出部係依據使工件繞Y軸旋轉360度時的每隔預定的角度間隔的輪廓資料,算出並輸出工件的軸向及繞軸的尺寸。 Further, in the automatic screw size measuring system of the present invention, preferably, the contour data calculating unit performs the cross-sectional view of the black and white binarized boundary data based on the preset noise determination criterion. Smoothing where the abnormal data is removed as noise The contour data indicating the distribution of the screw contour is obtained, and the contour data calculation unit calculates and outputs the axial and circumferential axes of the workpiece according to the contour data of every predetermined angular interval when the workpiece is rotated 360 degrees around the Y axis. size.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,包含有合焦移動部,其係沿著Z方向移動投影攝像照相機,運算控制裝置係包含合焦位置算出部,作為變換成位元映像的前處理,合焦位置算出部係在由投影攝像照相機所拍攝的螺釘的投影形狀資料從白資料轉換成黑資料的邊緣區域中,以在投影形狀資料的黑白交界取得最大值的方式,使用預設的評價函數,一邊利用合焦移動部使投影攝像照相機沿著Z方向移動,一邊求得各Z位置的評價函數的值,並以評價函數的值成為最大值的Z位置為合焦位置,來固定投影攝像照相機的Z方向位置。 Further, in the automatic screw size measuring system of the present invention, it is preferable that the focus adjustment moving unit includes a projection imaging camera that moves in the Z direction, and the calculation control device includes a focus position calculation unit as a conversion position. The pre-processing of the meta-image, the focus position calculation unit is a method of converting the projection shape data of the screw captured by the projection imaging camera from the white data to the edge region of the black data, and obtaining the maximum value at the black-and-white boundary of the projection shape data. By using the preset evaluation function, the focus of the evaluation function of each Z position is obtained by moving the projection imaging camera in the Z direction by the focus moving unit, and the Z position at which the value of the evaluation function becomes the maximum value is combined. The focal position is used to fix the Z-direction position of the projection camera.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,運算控制裝置係對工件的每隔預定的角度間隔的輪廓資料求得工件之繞Y軸的尺寸的測定資料的組群,並排除脫離預先設定的下限臨限值至預先設定的上限臨限值的範圍之前述尺寸的測定資料,且依據前述尺寸的測定資料的剩餘的組群算出繞Y軸的尺寸之值並輸出至輸出裝置。 Further, in the automatic screw size measuring system of the present invention, preferably, the arithmetic control device determines a group of measurement data of the size of the workpiece around the Y-axis for the contour data of the workpiece at predetermined angular intervals, and The measurement data of the aforementioned size that is out of the predetermined lower limit threshold value to the preset upper limit threshold value is excluded, and the value of the size around the Y axis is calculated based on the remaining group of the measurement data of the aforementioned size and output to the output. Device.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,運算控制裝置係對於黑白的二值化的交界的資料藉由如下方式進行平滑化處理:在使工件繞Y軸旋轉時得到的每隔預定的角度間隔的輪廓資料中,對預設在沿 著工件的Y方向連續的測定資料之軌跡的預定頻率的低通濾波。 Further, in the automatic screw size measuring system of the present invention, it is preferable that the arithmetic control device performs smoothing processing on the boundary of the binarization of the black and white by the following method: when the workpiece is rotated about the Y axis In the contour data of every predetermined angular interval, the preset is on the edge Low-pass filtering of a predetermined frequency of the trajectory of the measured data in the Y direction of the workpiece.

另外,在本發明的螺釘尺寸自動測定系統中,較佳為,運算控制裝置係對於黑白的二值化的交界的資料,針對使工件繞Y軸旋轉時得到的每隔預定的角度間隔的輪廓資料,預測依據工件每隔預定角度偏離而產生之Y方向的偏離,對根據藉由對應工件的繞Y軸的角度所預測之偏離進行了修正的複數個點而預測的點的X方向位置的軌跡進行低通濾波,以生成過濾處理後的輪廓資料,依據過濾處理後的輪廓資料算出前述工件的繞Y軸的尺寸之值並輸出至輸出裝置。 Further, in the automatic screw size measuring system of the present invention, it is preferable that the arithmetic control device is a profile of a boundary between binarization of black and white, and a contour of every predetermined angular interval obtained when the workpiece is rotated about the Y axis. Data, predicting the deviation of the Y direction caused by the deviation of the workpiece at predetermined angles, and the X-direction position of the point predicted based on the plurality of points corrected by the deviation predicted by the angle of the corresponding workpiece about the Y-axis The trajectory is low-pass filtered to generate contour data after filtering, and the value of the dimension of the workpiece around the Y-axis is calculated according to the contour data after the filtering process and output to the output device.

在本發明的螺釘尺寸自動測定系統中,較佳為,工件是具有頭部和螺紋軸部且在頭部具有緊固工具用的旋轉槽或旋轉孔的帶頭螺釘,光學測量裝置係包含測定工件的頭部孔的深度的頭部測量部。 In the automatic screw size measuring system of the present invention, preferably, the workpiece is a cap screw having a head and a threaded shaft portion and having a rotating groove or a rotating hole for fastening a tool at the head, and the optical measuring device includes the measuring workpiece. The head measuring portion of the depth of the head hole.

本發明的螺釘尺寸自動測定系統中,較佳為,頭部測量部具有:頭部攝像照相機,在與XZ平面平行的拍攝面上拍攝工件的頭部孔的形狀;雷射光源,以相對於工件的Y方向之預定的傾斜角度,遍及工件的頭部的上表面和頭部孔的底面而照射在XZ平面上以直線狀延伸的光束;運算控制裝置包含:頭部尺寸算出部,依據頭部攝像照相機的拍攝資料算出工件的頭部尺寸;頭部孔深度算出部,利用頭部攝像照相機分別檢測從雷射光源照射的直線狀的光束投影於頭部上表面和頭部孔底面的投影位 置,並依據檢測的各個投影位置的XZ平面上的錯位量和預定的傾斜角度算出頭部孔的深度。 In the automatic screw size measuring system of the present invention, preferably, the head measuring unit has a head imaging camera that captures a shape of a head hole of the workpiece on a photographing surface parallel to the XZ plane; the laser light source is opposite to the laser light source a predetermined inclination angle of the workpiece in the Y direction, irradiating a light beam extending linearly on the XZ plane over the upper surface of the head of the workpiece and the bottom surface of the head hole; the arithmetic control device includes: a head size calculation unit, according to the head The photographing data of the camera camera calculates the head size of the workpiece, and the head hole depth calculating unit detects the projection of the linear light beam emitted from the laser light source on the upper surface of the head and the bottom surface of the head hole by the head imaging camera. Bit And determining the depth of the head hole according to the amount of misalignment on the XZ plane of each detected projection position and the predetermined tilt angle.

根據本發明的構成,螺釘尺寸自動測定系統係具有把持作為測定對象工件的公螺紋的軸向的一端的把持部。另外,螺釘尺寸自動測定系統係使把持部繞著軸向旋轉驅動360度,並使光學性且非接觸地測量工件尺寸的光學測量裝置相對於把持部沿著軸向相對性移動。由此,在把持部上僅安裝一次作為測定對象工件的螺釘,就可自動地測定工件的軸向及繞軸的各種尺寸。 According to the configuration of the present invention, the screw size automatic measurement system has a grip portion that grips one end of the male screw of the workpiece to be measured in the axial direction. Further, the automatic screw size measuring system is such that the grip portion is rotationally driven 360 degrees around the axial direction, and the optical measuring device that optically and non-contactly measures the size of the workpiece is relatively moved in the axial direction with respect to the grip portion. Thereby, the screw which is a workpiece to be measured is attached only once to the grip portion, and various dimensions in the axial direction and the axis of the workpiece can be automatically measured.

另外,本發明中,把持部係可具有轉接器而構成,該轉接器具有圓板狀之外形,且其在一端面的中心具有預定嚙合長度的母螺紋,該預定嚙合長度的母螺紋在螺入工件的公螺紋的前端部時,固定成使工件的軸向不晃動。根據該構成,即使讓工件繞著軸旋轉,也可進行穩定的測定。 Further, in the present invention, the grip portion may be constituted by an adapter having a disc-shaped outer shape and having a female thread of a predetermined engagement length at the center of one end face, the female thread of the predetermined engagement length When screwing into the front end portion of the male screw of the workpiece, it is fixed so that the axial direction of the workpiece does not shake. According to this configuration, even if the workpiece is rotated about the axis, stable measurement can be performed.

另外,本發明中,根據轉接器具有刻上與工件的公螺紋的螺紋尺寸對應而具有預設的嚙合精度的基準母螺紋的環規的構成,環規的基準母螺紋係具有精確的母螺紋形狀。因此,如果工件為良品,則其完整螺紋部與基準母螺紋嚙合1個螺距左右,由此可牢固地固定,不使工件的軸向晃動。另外,具有與環規的基準母螺紋嚙合的公螺紋從一端面側突出的圓板狀的支架,不論工件的螺釘尺寸為何,支架的圓板形狀均為共同的形狀,因此藉由利用緊固卡盤夾持該共同的形狀,即可容易地對應各種標稱 尺寸的螺釘的測定。 Further, in the present invention, the reference female thread of the ring gauge has an accurate mother base according to the configuration of the ring gauge of the reference female thread having the predetermined meshing accuracy corresponding to the thread size of the male thread of the workpiece. Thread shape. Therefore, if the workpiece is a good product, the full thread portion is engaged with the reference female thread by about one pitch, thereby being firmly fixed without causing the axial movement of the workpiece. Further, the disc-shaped bracket having the male thread that meshes with the reference female thread of the ring gauge protrudes from the one end side, regardless of the screw size of the workpiece, the disc shape of the bracket has a common shape, and therefore, by using the fastening The chuck holds the common shape and can easily correspond to various nominals. Determination of the size of the screw.

另外,本發明中可以設為如下構成,把持部係繞著軸向可旋轉地設於具有與XZ平面平行的上表面的基台的上表面,在相對於基台沿著Y方向可移動至任意的Y位置的Y工作台上搭載有包含測定工件的軸向及繞軸尺寸的圖像投影部的光學測量裝置。根據該構成,使把持部繞著軸旋轉,並使Y工作台沿著Y方向移動,由此使用圖像投影部可自動地測定工件的軸向及繞軸的尺寸。 Further, in the present invention, the grip portion may be rotatably provided in the axial direction on the upper surface of the base having the upper surface parallel to the XZ plane, and be movable in the Y direction with respect to the base to An optical measuring device including an image projection unit that measures the axial direction of the workpiece and the size of the axis is mounted on the Y stage at an arbitrary Y position. According to this configuration, the grip portion is rotated about the axis, and the Y table is moved in the Y direction, whereby the image projection portion can automatically measure the size of the workpiece in the axial direction and the axis.

另外,本發明係可設為如下構成,圖像投影部具有相對於工件的Y方向中心線而配置於Z方向的一側的平行光線光源、及相對於工件的Y方向中心線而配置於Z方向的另一側的遠心光學系統的投影攝像照相機。根據該構成,可精確地取得工件的外形資料。 Further, the present invention can be configured such that the image projection unit has a parallel light source disposed on one side in the Z direction with respect to the center line of the workpiece in the Y direction, and is disposed in the Z direction center line with respect to the workpiece. A projection camera camera of the telecentric optical system on the other side of the direction. According to this configuration, the shape data of the workpiece can be accurately obtained.

另外,本發明係可設為如下構成,運算控制裝置係對於由投影攝像照相機所拍攝的螺釘的投影形狀資料之具有任意的位置解析度的位元映像的2維資料,將黑白的二值化的交界的資料中之從螺釘的剖視圖形觀察成為異常的資料作為雜訊並予以去除,而求得表示螺釘輪廓分佈的輪廓資料。根據該構成,藉由軟體處理可去除附著於工件的垃圾等引起的雜訊,因此可精確地算出並輸出工件的軸向及繞軸的尺寸。 Further, the present invention can be configured such that the arithmetic control device binarizes black and white in two-dimensional data of a bit map having an arbitrary position resolution of projection shape data of a screw imaged by a projection imaging camera. In the data of the junction, the abnormal data is observed as a noise and is removed from the cross-sectional view of the screw, and the contour data indicating the contour distribution of the screw is obtained. According to this configuration, the noise caused by the garbage or the like adhering to the workpiece can be removed by the soft body processing, so that the axial direction of the workpiece and the size around the axis can be accurately calculated and output.

另外,本發明係可設為如下構成,在由投影攝像照相機所拍攝的螺釘的投影形狀資料從白資料轉換至黑資料的邊緣區域中算出合焦位置。一般的自動聚焦係 可在對象物的表面進行合焦,但螺釘的輪廓分佈為軸狀的直徑的邊緣的分佈,因此合焦位置極窄。在上述構成中,使用以在投影形狀資料的黑白交界中取得最大值的方式而預設的評價函數,因此可精確地求得合焦位置。 Further, the present invention can be configured to calculate a focus position in an edge region where the projection shape data of the screw imaged by the projection imaging camera is converted from the white data to the black data. General autofocus system Focusing can be performed on the surface of the object, but the contour of the screw is distributed as the edge of the shaft-shaped diameter, so the focus position is extremely narrow. In the above configuration, an evaluation function that is preset so as to obtain a maximum value in the black-and-white boundary of the projected shape data is used, so that the focus position can be accurately obtained.

另外,本發明係可設為如下構成,對工件的每隔預定的角度間隔的輪廓資料求得工件的繞Y軸的尺寸的測定資料的組群,並排除脫離預先設定的下限臨限值至預先設定的上限臨限值的範圍的繞軸的尺寸的測定資料。而且,設為如下構成,依據繞Y軸的尺寸的測定資料的剩餘的組群算出繞Y軸的尺寸的值。根據該構成,即使在異物附著於螺釘的情況下,也可更高精度地算出繞Y軸的尺寸的值。 Further, the present invention can be configured such that the measurement data of the size of the workpiece around the Y-axis is obtained for the contour data of the workpiece at predetermined angular intervals, and the predetermined lower limit threshold is removed. Measurement data of the size of the axis around the range of the preset upper limit threshold. Further, the configuration is such that the value of the size around the Y-axis is calculated from the remaining group of measurement data of the size around the Y-axis. According to this configuration, even when foreign matter adheres to the screw, the value of the dimension around the Y axis can be calculated with higher precision.

另外,本發明係可設為如下構成,在工件為帶頭螺釘的情況下,無法利用投影形狀資料進行頭部孔的測定,因此光學測量裝置除了包含圖像投影部之外,還包含測定工件的頭部孔的深度的頭部測量部。由此,也可對頭部孔的測定進行非接觸的光學測量。 Further, the present invention can be configured as follows. When the workpiece is a cap screw, the measurement of the head hole cannot be performed using the projection shape data. Therefore, the optical measuring device includes the image projection portion and the measurement workpiece. A head measuring portion of the depth of the head hole. Thereby, non-contact optical measurement of the measurement of the head hole can also be performed.

另外,本發明中可設為如下構成,孔深度的測量係利用:以相對於工件的Y方向為預定的傾斜角度,遍及工件的頭部的上表面和頭部孔的底面而照射在XZ平面上以直線狀延伸的雷射光束;該以直線狀延伸的光束的投影位置係根據孔深度在頭部上表面和頭部孔底面偏離錯位。由此,不使用量規等,就可藉由非接觸的光學測量進行頭部孔深度的測量。 Further, in the present invention, the hole depth may be measured by irradiating the XZ plane over the upper surface of the head of the workpiece and the bottom surface of the head hole at a predetermined inclination angle with respect to the Y direction of the workpiece. A laser beam extending in a straight line; the projection position of the linearly extending beam is offset from the top surface of the head and the bottom surface of the head hole according to the depth of the hole. Thereby, the measurement of the head hole depth can be performed by non-contact optical measurement without using a gauge or the like.

2‧‧‧公螺紋部 2‧‧‧ Male thread

3‧‧‧頭下部 3‧‧‧ lower head

4‧‧‧頭部 4‧‧‧ head

5‧‧‧上表面 5‧‧‧Upper surface

6‧‧‧頭部孔 6‧‧‧ head hole

8‧‧‧工件 8‧‧‧Workpiece

10‧‧‧螺釘尺寸自動測定系統 10‧‧‧Automatic screw size measurement system

12‧‧‧螺釘尺寸自動測定裝置 12‧‧‧Automatic screw size measuring device

14‧‧‧防振台 14‧‧‧Anti-vibration table

15‧‧‧框體 15‧‧‧ frame

16‧‧‧基台 16‧‧‧Abutment

18、19‧‧‧柱部 18, 19‧‧ ‧ pillar

20‧‧‧頂板部 20‧‧‧ top board

22、23‧‧‧導軌 22, 23‧‧‧ rails

24、25‧‧‧螺紋柱 24, 25‧‧ ‧ threaded column

26‧‧‧Y載物台 26‧‧‧Y stage

27、28‧‧‧軸承部 27, 28‧‧ ‧ bearing department

29‧‧‧Y馬達 29‧‧‧Y motor

30‧‧‧感測器 30‧‧‧ Sensor

31‧‧‧皮帶 31‧‧‧Land

32‧‧‧光學測量裝置 32‧‧‧Optical measuring device

32a‧‧‧光學測量裝置 32a‧‧‧Optical measuring device

34‧‧‧圖像投影部 34‧‧‧Image Projection Department

34a‧‧‧頭部測量部 34a‧‧‧ Head Measurement Department

36‧‧‧光源 36‧‧‧Light source

38‧‧‧攝像照相機 38‧‧‧Photo Camera

40、40a‧‧‧頭部測量部 40, 40a‧‧‧ Head Measurement Department

42‧‧‧頭部攝像照相機 42‧‧‧ head camera

44‧‧‧雷射光源 44‧‧‧Laser light source

45‧‧‧致動器 45‧‧‧Actuator

46‧‧‧環形照明部 46‧‧‧Circular Lighting Department

48‧‧‧安裝板 48‧‧‧Installation board

50‧‧‧合焦移動部 50‧‧‧Focus Moving Department

52‧‧‧Z載物台 52‧‧‧Z stage

54‧‧‧Z馬達 54‧‧‧Z motor

56‧‧‧退避移動部 56‧‧‧Removal of the mobile department

58‧‧‧X載物台 58‧‧‧X stage

60‧‧‧活塞氣缸機構 60‧‧‧Piston cylinder mechanism

62‧‧‧把持旋轉部 62‧‧‧ Holding the rotating part

64‧‧‧θ馬達 64‧‧ θ motor

66‧‧‧旋轉接頭部 66‧‧‧Rotary joints

68‧‧‧把持部 68‧‧‧The Department of Control

70‧‧‧緊固卡盤 70‧‧‧ fastening chuck

72‧‧‧支承台 72‧‧‧Support table

74a、74b、74c‧‧‧滑動台 74a, 74b, 74c‧‧‧ slide table

76a、76b、76c‧‧‧夾持爪部 76a, 76b, 76c‧‧‧ gripping claws

78a、78b‧‧‧活塞 78a, 78b‧‧‧Pistons

80‧‧‧轉接器 80‧‧‧Adapter

82a‧‧‧環規 82a‧‧‧Circle

83a‧‧‧基準母螺紋 83a‧‧‧ reference female thread

84a‧‧‧墊片 84a‧‧‧shims

86‧‧‧支架 86‧‧‧ bracket

90‧‧‧止動凸緣部 90‧‧‧stop flange

92a‧‧‧公螺紋 92a‧‧‧ male thread

100‧‧‧運算控制裝置 100‧‧‧ arithmetic control device

102‧‧‧空氣壓力控制裝置 102‧‧‧Air pressure control device

104‧‧‧輸出裝置 104‧‧‧Output device

106‧‧‧檢查表 106‧‧‧Checklist

110‧‧‧螺紋徑算出部 110‧‧‧Thread diameter calculation unit

112‧‧‧全長算出部 112‧‧‧Full-time calculation department

114‧‧‧合焦位置算出部 114‧‧‧Focus position calculation unit

116‧‧‧輪廓資料算出部 116‧‧‧ Outline Data Calculation Department

118‧‧‧頭下R算出部 118‧‧‧The first R calculation department

120‧‧‧頭部尺寸算出部 120‧‧‧ Head size calculation department

122‧‧‧頭部孔深度算出部 122‧‧‧ Head hole depth calculation unit

124‧‧‧測定資料輸出部 124‧‧‧Measurement data output department

133、134、135、136、137‧‧‧紅色線 133, 134, 135, 136, 137‧‧ red lines

142‧‧‧黑白交界 142‧‧‧Black and white junction

144‧‧‧折彎線 144‧‧‧ bend line

145、146、148、150‧‧‧黑資料的位置 145, 146, 148, 150‧‧‧ Location of black material

162、163‧‧‧直線 162, 163‧‧‧ straight line

166、167‧‧‧垂線 166, 167‧‧‧ vertical line

170、171‧‧‧輪廓資料 170, 171‧‧‧ Outline data

172‧‧‧回歸直線 172‧‧‧Return to the straight line

173‧‧‧線 Line 173‧‧

176‧‧‧回歸直線 176‧‧‧Return to the straight line

180、180b、180c‧‧‧頭部孔鑽頭 180, 180b, 180c‧‧‧ head hole drill

182b‧‧‧頭部孔嵌合部 182b‧‧‧ head hole fitting

184‧‧‧凸緣部 184‧‧‧Flange

186‧‧‧圓筒部 186‧‧‧Cylinder

188‧‧‧圓錐頂部 188‧‧‧ cone top

190‧‧‧柱構件 190‧‧‧column components

194‧‧‧致動器殼體 194‧‧‧Actuator housing

195‧‧‧導向孔 195‧‧‧ Guide hole

196‧‧‧Y工作台 196‧‧‧Y workbench

198‧‧‧滑動腳部 198‧‧‧Sliding feet

200‧‧‧位置感測器 200‧‧‧ position sensor

202‧‧‧移動構件 202‧‧‧moving components

204‧‧‧固定側構件 204‧‧‧Fixed side members

210‧‧‧鑽頭夾緊單元 210‧‧‧Drill Clamping Unit

211‧‧‧升降構件 211‧‧‧ Lifting members

214‧‧‧導向構件 214‧‧‧ Guide members

216‧‧‧伸縮臂 216‧‧‧ telescopic arm

218‧‧‧活塞氣缸機構 218‧‧‧Piston cylinder mechanism

220‧‧‧鑽頭把持部 220‧‧‧Drill Bit Control Department

221‧‧‧爪部 221‧‧‧ claws

222‧‧‧上下桿 222‧‧‧Up and down pole

230‧‧‧下側固定工作台 230‧‧‧Under fixed workbench

232‧‧‧Z移動工作台 232‧‧‧Z mobile workbench

234‧‧‧線性致動器 234‧‧‧Linear actuator

236‧‧‧旋轉構件 236‧‧‧Rotating components

238‧‧‧旋轉接頭 238‧‧‧Rotary joint

240‧‧‧皮帶輪 240‧‧‧ Pulley

244‧‧‧皮帶 244‧‧‧Land

250‧‧‧上側固定工作台 250‧‧‧Upper fixed workbench

252‧‧‧頭部照相機移動部 252‧‧‧ head camera moving department

254‧‧‧桿部 254‧‧‧ pole

256‧‧‧活塞氣缸機構 256‧‧‧Piston cylinder mechanism

第1圖是本發明實施形態的螺釘尺寸自動測定系統的構成圖,且為螺釘尺寸自動測定裝置的前視圖;第2圖中的(a)是第1圖的螺釘尺寸自動測定裝置的左側視圖,(b)是第1圖的螺釘尺寸自動測定裝置的俯視圖;第3圖是表示本發明實施形態的螺釘尺寸自動測定系統的把持部和被把持的做為測定對象工件的螺釘的圖,第3圖中的(a)是緊固卡盤的側視圖,(b)是轉接器的側視圖,(c)是表示測定對象工件的螺釘的圖,(d)是轉接器的分解圖,(e)至(g)是與(a)至(c)對應的俯視圖;第4圖是表示標稱尺寸不同的每個測定對象工件的轉接器的圖,第4圖中的(a)是表示M12的螺紋用的轉接器的圖,(b)是表示M6的螺紋用的轉接器的圖,(c)是M3的螺紋用的轉接器;第5圖是表示本發明實施形態的螺釘尺寸自動測定系統的測定順序的流程圖;第6圖是表示與第5圖的測定順序對應的測定部位的圖,第6圖中的(a)表示側視圖中的測定部位,(b)是表示俯視圖中的測定部位的圖;第7圖是表示第5圖中的頭部孔深度的測定的圖,第7圖中的(a)是測定對象工件中處於任意的把持狀態的圖,(b)是表示使測定對象工件從(a)的狀態繞著軸旋轉的狀態的圖,(c)是表示使雷射光源相對於測定對象工件沿著Y方 向移動位置而測定頭部孔深度的狀態的圖;第8圖是在本發明實施形態的螺釘尺寸自動測定系統中表示合焦位置的算出方法的圖,第8圖中的(a)是表示螺釘輪廓的投影狀態的圖,(b)是表示投影攝像照相機的焦點位置從A至E時所拍攝的黑白狀態的圖,(c)是以灰階值I的變化表示黑白狀態的變化的圖,(d)是表示灰階值I相對於Z位置的微分波形的圖,(e)是表示(d)的波形的半值寬(半值幅)相對於Z位置的關係的圖;第9圖是表示本發明實施形態的螺釘尺寸自動測定系統中之輪廓分佈的雜訊去除方法的圖,第9圖中的(a)是表示輪廓跟蹤處理的規則的圖,(b)是對測定對象工件進行輪廓跟蹤處理而得到的螺釘輪廓分佈,(c)是表示從(b)去除雜訊的輪廓資料的圖;第10圖是表示第5圖中進行頭下R的測定的圖,第10圖中的(a)是表示測定對象工件的頭下部的輪廓資料的圖,(b)是表示頭下R的測定方法的圖;第11圖是表示第5圖中的頂徑的測定的圖,第11圖中的(a)是表示沿著測定對象工件的軸向的輪廓資料的圖,(b)是求得(a)的頂部的輪廓資料的回歸線的圖,(c)是表示頂徑的算出方法的圖;第12圖是表示第5圖中的底徑的測定的圖,第12圖中的(a)是表示沿著測定對象工件的軸向的輪廓資料的圖,(b)是求得(a)的底部的輪廓資料的回歸線的圖,(c)是表示底徑的算出方法的圖; 第13圖是表示頭部孔深度的另一測定方法的圖,第13圖中的(a)是表示在頭部孔中插入預定的頭部孔用基準鑽頭的狀態的側視圖,(b)是與(a)對應的俯視圖;第14圖是表示標稱尺寸不同的每個測定對象工件的頭部孔用鑽頭的圖,第14圖中的(a)是表示M12的螺釘用的頭部孔用鑽頭的圖,(b)是表示M6的螺釘用的頭部孔用鑽頭的圖,(c)是表示M3的螺釘用的頭部孔用鑽頭的圖;第15圖是構成本發明實施形態的另一例的螺釘尺寸自動測定系統的螺釘尺寸自動測定裝置的主要部分的前視圖;第16圖是第15圖的螺釘尺寸自動測定裝置的右側視圖;第17圖是表示第15圖的螺釘尺寸自動測定裝置的圖,第17圖中的(a)是表示在俯視圖中使頭部攝像照相機退避至右側的狀態的圖,(b)是表示使頭部攝像照相機移動至攝像位置的狀態的俯視圖;第18圖是在第15圖的螺釘尺寸自動測定裝置的俯視圖中省略了頭部攝像照相機的圖;第19圖是在第15圖的左側視圖中表示鑽頭夾緊單元的圖;第20圖是表示在本發明實施形態的另一例螺釘尺寸自動測定系統中算出輪廓資料後,在預定角度算出頂徑及底徑的方法的圖,且為第12圖(c)的放大圖;第21圖中的(a)是以曲線連結預定角度的頂徑d max 及底徑d min的測定資料並以與角度θ的關係表示的圖,(b)是作為螺釘的工件的軸向一部分的剖視圖;第22圖是表示在預定角度的頂徑d max的測定資料和測定資料的個數的關係中的理想模型時(a)和在1例中排除脫離預定範圍的測定資料時(b)的圖;第23圖是表示在對工件的預定角度的輪廓資料進行低通濾波的情況下工件的1次螺釘輪廓分佈(a)和過濾處理後的2次螺釘輪廓分佈(b)的圖;第24圖(a)至(c)是表示在求得工件的預定角度的輪廓資料時利用低通濾波器進行X方向的異常部分的去除的情況下,每隔預定角度旋轉工件時的1次螺釘輪廓分佈的變化的圖;第25圖是表示在工件的輪廓分佈的一部分之點,利用低通濾波器對預定角度的X方向位置的軌跡進行異常部分的去除的情況下的過濾處理前的軌跡(a)和過濾處理後的軌跡(b)的圖;第26圖是表示用於固定工件的轉接器的另一例之與第4圖對應的圖。 Fig. 1 is a configuration diagram of an automatic screw size measuring system according to an embodiment of the present invention, and is a front view of the automatic screw size measuring device. Fig. 2(a) is a left side view of the automatic screw size measuring device of Fig. 1. (b) is a plan view of the screw size automatic measuring device of Fig. 1; and Fig. 3 is a view showing a grip portion of the automatic screw size measuring system according to the embodiment of the present invention and a screw to be gripped as a workpiece to be measured, (a) is a side view of the fastening chuck, (b) is a side view of the adapter, (c) is a view showing a screw of the workpiece to be measured, and (d) is an exploded view of the adapter. (e) to (g) are plan views corresponding to (a) to (c); Fig. 4 is a view showing an adapter of each measurement target workpiece having a different nominal size, (a in Fig. 4) ) is a view showing an adapter for the thread of M12, (b) is a view showing an adapter for a thread of M6, (c) is an adapter for a thread of M3, and FIG. 5 is a view showing the present invention. A flowchart of the measurement procedure of the screw size automatic measurement system according to the embodiment; and FIG. 6 is a view showing the measurement site corresponding to the measurement sequence of FIG. Fig. 6(a) shows a measurement site in a side view, (b) is a view showing a measurement site in a plan view, and Fig. 7 is a view showing measurement of a header hole depth in Fig. 5, and a seventh diagram. (a) is a view showing an arbitrary holding state in the workpiece to be measured, and (b) is a view showing a state in which the workpiece to be measured is rotated about the axis from the state of (a), and (c) is a view showing that the workpiece is rotated. The light source is along the Y side with respect to the workpiece to be measured FIG. 8 is a view showing a method of calculating a focus position in the automatic screw size measurement system according to the embodiment of the present invention, and FIG. 8(a) is a view showing a state in which the depth of the head hole is measured in the moving position. (b) is a view showing a black-and-white state captured when the focus position of the projection imaging camera is from A to E, and (c) is a diagram showing a change in the black-and-white state by a change in the grayscale value I. (d) is a graph showing a differential waveform of the gray scale value I with respect to the Z position, and (e) is a graph showing the relationship between the half value width (half value width) of the waveform of (d) with respect to the Z position; FIG. 9 is a view showing a method of removing noise of a contour distribution in the automatic screw size measuring system according to the embodiment of the present invention, wherein (a) of FIG. 9 is a view showing a rule of contour tracking processing, and (b) is a measurement target. The screw profile distribution obtained by the contour tracking process of the workpiece, (c) is a map showing the contour data for removing noise from (b), and FIG. 10 is a diagram showing the measurement of the head R below in FIG. (a) in the figure is a diagram showing outline data of the lower portion of the head of the workpiece to be measured, and (b) is a diagram showing the head. Fig. 11 is a view showing measurement of the top diameter in Fig. 5, and Fig. 11(a) is a view showing outline data along the axial direction of the workpiece to be measured, (b) It is a figure which finds the regression line of the outline data of the top of (a), (c) is a figure which shows the calculation method of the top diameter, and FIG. 12 is a figure which shows the measurement of the bottom diameter of FIG. (a) is a graph showing contour data along the axial direction of the workpiece to be measured, (b) is a graph showing the regression line of the contour data at the bottom of (a), and (c) is a method for calculating the bottom diameter. Map Fig. 13 is a view showing another method of measuring the depth of the head hole, and Fig. 13(a) is a side view showing a state in which a predetermined head hole drill bit is inserted into the head hole, (b) FIG. 14 is a plan view showing a head hole drill for each workpiece to be measured having a different nominal size, and FIG. 14( a ) is a head for a screw for M12. (b) is a view showing a head hole drill for a screw of M6, (c) is a view showing a head hole drill for a screw of M3, and Fig. 15 is a view showing the construction of the present invention. FIG. 16 is a right side view of the automatic screw size measuring device of FIG. 15 and FIG. 17 is a view showing the screw of FIG. (a) of FIG. 17 is a view showing a state in which the head imaging camera is retracted to the right side in the plan view, and (b) is a state in which the head imaging camera is moved to the imaging position. Top view; Figure 18 is a top view of the screw size automatic measuring device in Fig. 15. FIG. 19 is a view showing a bit clamping unit in a left side view of FIG. 15, and FIG. 20 is a view showing another example of an automatic screw size measuring system according to an embodiment of the present invention. A map for calculating the top diameter and the bottom diameter at a predetermined angle after calculating the contour data, and is an enlarged view of FIG. 12(c); (a) of FIG. 21 is a curve connecting a top diameter d max of a predetermined angle. And the measurement data of the bottom diameter d min and the relationship with the angle θ, (b) is a cross-sectional view of a part of the axial direction of the workpiece as a screw, and FIG. 22 is a measurement data of the top diameter d max at a predetermined angle. The ideal model in the relationship with the number of measured data (a) and the figure (b) in the case where the measurement data of the predetermined range is excluded from the case; the 23rd figure shows the outline data at a predetermined angle to the workpiece. In the case of low-pass filtering, the first screw contour distribution of the workpiece (a) and the second screw contour distribution (b) after the filtering process; and Figs. 24 (a) to (c) show the predetermined workpiece. In the case of the outline data of the angle, when the abnormal portion in the X direction is removed by the low-pass filter, the change of the screw contour distribution at the time of rotating the workpiece at a predetermined angle is obtained; and FIG. 25 is a view showing the contour distribution at the workpiece. A part of the trajectory (a) before the filtering process and the trajectory (b) after the filtering process in the case where the trajectory of the X-direction position of the predetermined angle is removed by a low-pass filter; The figure shows another adapter for fixing the workpiece An example of a map corresponding to Fig. 4.

以下下表面,使用附圖詳細說明本發明的實施形態。以下,作為測定對象工件,主要說明螺紋標稱為M3且標稱長度為30mm的附有六角孔的螺栓,但這是用於說明的例示。就螺紋的種類而言,除了公制粗螺紋以外,也可以是公制細螺紋、錐形管螺紋、平行管螺紋、威 氏粗螺紋、統一粗螺紋、統一細螺紋、微型螺紋、公制梯形螺紋。另外,也可以是標稱長度為30mm以外的螺釘。頭部孔除了設於頭部的緊固工具用的旋轉槽或旋轉孔、六角孔以外,也可以是切槽(負號槽)、十字孔、正負孔、四角孔、TORX(註冊商標)和作為其改良版的TORX PLUS(註冊商標)等六角星形的孔、即內六角孔、三角孔。另外,也可以不具有頭部,也可以具有頭部而不具有頭部孔。 Embodiments of the present invention will be described in detail below with reference to the drawings. Hereinafter, as the workpiece to be measured, a bolt having a hexagonal hole with a nominal diameter of 30 mm and a nominal length of 30 mm will be mainly described, but this is an illustration for explanation. In terms of the type of thread, in addition to the metric coarse thread, it can also be a metric fine thread, a tapered pipe thread, a parallel pipe thread, or Thick thread, uniform coarse thread, uniform fine thread, micro thread, metric trapezoidal thread. In addition, it may be a screw having a nominal length of 30 mm or more. The head hole may be a slot (negative groove), a cross hole, a positive and negative hole, a square hole, a TORX (registered trademark), and the like, in addition to a rotary groove or a rotary hole or a hexagonal hole for a fastening tool provided on the head. A hexagonal hole such as a TORX PLUS (registered trademark) such as a modified version, that is, a hexagonal hole or a triangular hole. Alternatively, the head may not be provided, and the head may be provided without a head hole.

以下敍述的形狀、尺寸、材質、測定部位等是用於說明的例示,可配合螺釘尺寸自動測定系統的規格等適當變更。另外,以下,在全部附圖中,對相同的要素標注相同的符號,並省略重複的說明。 The shape, the size, the material, the measurement site, and the like described below are exemplified for explanation, and can be appropriately changed in accordance with the specifications of the screw size automatic measurement system. In the following, the same components are denoted by the same reference numerals throughout the drawings, and overlapping description will be omitted.

第1圖是實施形態的螺釘尺寸自動測定系統10的構成圖。螺釘尺寸自動測定系統10係構成為包含螺釘尺寸自動測定裝置12、運算控制裝置100、空氣壓力控制裝置102。螺釘尺寸自動測定裝置12係構成為包含防振台14、配置於在防振台14上設置的框體15之內部的基台16。第1圖中表示螺釘尺寸自動測定裝置12的前視圖。第2圖中表示螺釘尺寸自動測定裝置12的框體15的內部部分的左側視圖和俯視圖。第2圖(a)是左側視圖,(b)是俯視圖。第1、2圖中表示正交的X方向、Y方向和Z方向。XZ平面是與基台16的上表面平行的面,與基台16的上表面垂直的方向是與重力方向平行的Y方向。X方向是左側視圖中的左右方向,Z方向是前視圖中的左右方向。 Fig. 1 is a configuration diagram of an automatic screw size measuring system 10 according to an embodiment. The screw size automatic measurement system 10 is configured to include a screw size automatic measuring device 12, an arithmetic control device 100, and an air pressure control device 102. The screw size automatic measuring device 12 is configured to include an anti-vibration table 14 and a base 16 disposed inside the casing 15 provided on the vibration isolating table 14. A front view of the screw size automatic measuring device 12 is shown in Fig. 1 . Fig. 2 is a left side view and a plan view showing an inner portion of the casing 15 of the automatic screw size measuring device 12. Fig. 2(a) is a left side view, and Fig. 2(b) is a plan view. In the first and second figures, the orthogonal X direction, Y direction, and Z direction are shown. The XZ plane is a plane parallel to the upper surface of the base 16, and a direction perpendicular to the upper surface of the base 16 is a Y direction parallel to the direction of gravity. The X direction is the left and right direction in the left side view, and the Z direction is the left and right direction in the front view.

雖然不是螺釘尺寸自動測定裝置12的構成 要素,但表示有測定對象的工件8。工件8是螺紋標稱為M12且標稱長度為30mm的附有六角孔的螺栓。工件8的軸向是與Y方向平行的方向。換言之,Y方向是工件8的軸向。 Although not the composition of the screw size automatic measuring device 12 Element, but indicates the workpiece 8 to be measured. The workpiece 8 is a bolt with a hexagonal hole nominally M12 and having a nominal length of 30 mm. The axial direction of the workpiece 8 is a direction parallel to the Y direction. In other words, the Y direction is the axial direction of the workpiece 8.

從基台16的上表面與Y方向平行地豎立設置的柱部18、19及連接兩個柱部18、19的上端部的頂板部20係與基台16一起形成框空間。在柱部18、19的相對向的面上分別設置有導軌22、23,在由導軌22、23所夾持的內側,螺紋柱24、25係從基台16的上表面與Y方向平行地豎立設置。螺紋柱24、25是在外周面上沿著軸向刻有公螺紋,且旋轉自如地支承於基台16的可旋轉的軸柱。螺紋柱24、25的-Y方向的端部係從基台16的上表面板向下方突出,且分別設置有皮帶輪。 The column portions 18 and 19 which are erected in parallel with the Y direction from the upper surface of the base 16 and the top plate portion 20 which connects the upper end portions of the two column portions 18 and 19 form a frame space together with the base 16 . Rails 22, 23 are respectively provided on the opposing faces of the column portions 18, 19, and the screw posts 24, 25 are parallel to the Y direction from the upper surface of the base 16 on the inner side sandwiched by the guide rails 22, 23. Set upright. The threaded posts 24, 25 are rotatable shafts that are journaled in the axial direction on the outer peripheral surface and are rotatably supported by the base 16. The ends of the threaded posts 24, 25 in the -Y direction project downward from the upper surface plate of the base 16, and are respectively provided with pulleys.

如第2圖(b)所示,Y載物台26是在Z方向的兩端具有可沿著導軌22、23滑動的滑動部,並設置有兩組軸承部27、28且上表面平坦的工作台。在兩組軸承部27、28中,一軸承部27係設於導軌22的+Z側,另一軸承部28係設於導軌23的-Z側。兩組軸承部27、28係由與刻於螺紋柱24、25的外周的螺釘嚙合的滾珠螺帽構成。在外周刻有公螺紋的螺紋柱24、25和包含滾珠螺帽的軸承部27、28構成滾珠螺桿機構,螺紋柱24、25係相當於滾珠螺桿機構用的滾珠螺桿。Y載物台26是藉由該滾珠螺桿機構的作用,旋轉驅動螺紋柱24、25,由此被導軌22、23導引而沿著Y方向移動的移動工作台。 As shown in Fig. 2(b), the Y stage 26 has sliding portions slidable along the guide rails 22, 23 at both ends in the Z direction, and is provided with two sets of bearing portions 27, 28 and the upper surface is flat. Workbench. Among the two sets of bearing portions 27 and 28, one bearing portion 27 is provided on the +Z side of the guide rail 22, and the other bearing portion 28 is provided on the -Z side of the guide rail 23. The two sets of bearing portions 27, 28 are formed by ball nuts that mesh with screws engraved on the outer circumference of the threaded posts 24, 25. The threaded posts 24, 25 engraved with a male thread on the outer circumference and the bearing portions 27, 28 including the ball nut constitute a ball screw mechanism, and the screw posts 24, 25 correspond to a ball screw for a ball screw mechanism. The Y stage 26 is a moving table that is guided by the guide rails 22 and 23 to move in the Y direction by the action of the ball screw mechanism.

在基台16上安裝有旋轉驅動螺紋柱24、25的伺服馬達、即Y馬達29。Y馬達29的輸出軸係從基台16的上表面板向下方突出,並設置有皮帶輪。皮帶31是在設於Y馬達29的輸出軸的皮帶輪和設於螺紋柱24、25的-Y方向的端部的皮帶輪之間架設的動力傳遞構件。作為該3個皮帶輪,可使用沿著周方向設置有凹凸的同步皮帶輪,作為皮帶31,可使用在表面上具有凹凸的同步皮帶。作為Y馬達29,可使用AC伺服馬達。 A servo motor that rotationally drives the threaded posts 24, 25, that is, a Y motor 29, is attached to the base 16. The output shaft of the Y motor 29 protrudes downward from the upper surface plate of the base 16, and is provided with a pulley. The belt 31 is a power transmission member that is stretched between a pulley provided on the output shaft of the Y motor 29 and a pulley provided at the end in the -Y direction of the screw columns 24 and 25. As the three pulleys, a timing pulley provided with irregularities along the circumferential direction can be used, and as the belt 31, a timing belt having irregularities on the surface can be used. As the Y motor 29, an AC servo motor can be used.

Y馬達29是在運算控制裝置100的控制下驅動而使螺紋柱24、25旋轉並使Y載物台26沿Y方向升降的升降用馬達。在Y馬達29上設置檢測該輸出軸的旋轉狀態的感測器30。也可設置檢測螺紋柱24、25各自的旋轉狀態的感測器。作為該感測器30,可以使用編碼器。由感測器30檢測的檢測資料使用適當的信號線傳送至運算控制裝置100。運算控制裝置100係依據傳送的資料算出Y載物台26的Y方向位置。如此如此,設於Y馬達29或螺紋柱24、25的感測器30是檢測Y載物台26的Y方向位置的Y感測器。作為設為Y感測器的感測器30,也可使用直接檢測Y載物台26的Y方向位置的位置感測器,以取代檢測Y馬達29的旋轉狀態的感測器。作為位置感測器,可使用線性標度方式的光學感測器、檢測磁性體的位移的差動變速式位移感測器、容量式位移感測器等。 The Y motor 29 is a lifting motor that is driven by the arithmetic control device 100 to rotate the screw posts 24 and 25 and to raise and lower the Y stage 26 in the Y direction. A sensor 30 that detects the rotation state of the output shaft is provided on the Y motor 29. A sensor that detects the respective rotational states of the threaded posts 24, 25 may also be provided. As the sensor 30, an encoder can be used. The detected data detected by the sensor 30 is transmitted to the arithmetic control device 100 using an appropriate signal line. The arithmetic control device 100 calculates the Y-direction position of the Y stage 26 based on the transmitted data. In this manner, the sensor 30 provided on the Y motor 29 or the screw posts 24, 25 is a Y sensor that detects the position of the Y stage 26 in the Y direction. As the sensor 30 which is a Y sensor, a position sensor that directly detects the Y-direction position of the Y stage 26 may be used instead of the sensor that detects the rotation state of the Y motor 29. As the position sensor, an optical sensor of a linear scale method, a differential shift type displacement sensor that detects displacement of a magnetic body, a displacement type displacement sensor, or the like can be used.

Y馬達29、皮帶31、螺紋柱24、25、設於Y載物台26的軸承部27、28係構成相對於基台16沿著Y 方向移動Y載物台26的軸向移動部。 The Y motor 29, the belt 31, the threaded posts 24, 25, and the bearing portions 27, 28 provided on the Y stage 26 are configured to be along the Y with respect to the base 16 The axial movement portion of the Y stage 26 is moved in the direction.

搭載於Y載物台26的上表面的光學測量裝置32是光學性且非接觸地測定工件8的尺寸、形狀的測定裝置。光學測量裝置32係構成為包含測定工件8的軸向及繞軸的尺寸的圖像投影部34、及測定工件8的頭部的尺寸形狀及頭部孔的深度的頭部測量部40。 The optical measuring device 32 mounted on the upper surface of the Y stage 26 is a measuring device that measures the size and shape of the workpiece 8 optically and non-contactly. The optical measuring device 32 is configured to include an image projecting unit 34 that measures the axial direction of the workpiece 8 and a size around the axis, and a head measuring unit 40 that measures the size of the head of the workpiece 8 and the depth of the head hole.

圖像投影部34具有:光源36,相對於工件8的Y方向中心線配置於Z方向的一側且輸出平行光線;遠心光學系統的投影攝像照相機38,相對於工件8的Y方向中心線而配置於Z方向的另一側,接收來自光源36的平行光線,對成為工件8的影像的投影形狀具有與光源36相同的受光光軸且僅使與光軸平行的成分在與XY平面平行的拍攝面上成像而進行拍攝。作為該光源36,可使用準直儀等具有適當的光線平行化裝置的光源、及包含遠心光學系統的光源。作為該投影攝像照相機38,可使用應用了CCD圖像感測器的CCD照相機或應用了CMOS圖像感測器的照相機裝置。例如,可使用1個像素約為8μm且拍攝面的大小約為20mm角的CCD照相機。 The image projecting unit 34 has a light source 36 that is disposed on one side in the Z direction with respect to the center line of the workpiece 8 in the Z direction and outputs parallel rays; the projection imaging camera 38 of the telecentric optical system is oriented with respect to the Y-direction center line of the workpiece 8. The other side disposed in the Z direction receives parallel light rays from the light source 36, and has a projection shape of the image to be the workpiece 8 having the same light receiving optical axis as the light source 36 and only the components parallel to the optical axis are parallel to the XY plane. Shoot on the shooting surface for imaging. As the light source 36, a light source having an appropriate light parallelizing means such as a collimator or a light source including a telecentric optical system can be used. As the projection imaging camera 38, a CCD camera to which a CCD image sensor is applied or a camera device to which a CMOS image sensor is applied can be used. For example, a CCD camera having a pixel of about 8 μm and an imaging surface having a size of about 20 mm can be used.

圖像投影部34的光源36的配置位置係從Y載物台26的中心設於+Z側,且相對於Y載物台26進行固定。投影攝像照相機38係從Y載物台26的中心設於-Z側,但搭載於在Y載物台26上設置的合焦移動部50上,且可沿著Z方向移動。組合了投影攝像照相機38和合焦移動部50的部分是投影攝像部。 The arrangement position of the light source 36 of the image projecting unit 34 is provided on the +Z side from the center of the Y stage 26, and is fixed to the Y stage 26. The projection imaging camera 38 is provided on the -Z side from the center of the Y stage 26, but is mounted on the focusing moving unit 50 provided on the Y stage 26, and is movable in the Z direction. A portion in which the projection imaging camera 38 and the focusing moving unit 50 are combined is a projection imaging unit.

合焦移動部50係構成為包含相對於Y載物台26可沿著Z方向移動的Z載物台52和沿著Z方向移動驅動Z載物台52的Z馬達54。Z馬達54的動作係藉由運算控制裝置100所控制。合焦移動部50的功能係使用第8圖進行後述。作為該Z馬達54,可使用AC伺服馬達或DC伺服馬達。 The focus moving unit 50 is configured to include a Z stage 52 that is movable in the Z direction with respect to the Y stage 26 and a Z motor 54 that moves the Z stage 52 in the Z direction. The operation of the Z motor 54 is controlled by the arithmetic control device 100. The function of the focus moving unit 50 will be described later using Fig. 8 . As the Z motor 54, an AC servo motor or a DC servo motor can be used.

頭部測量部40係構成為包含在與XZ平面平行的拍攝面上攝像工件8的頭部孔的形狀的頭部攝像照相機42、及以相對於工件8的Y方向成預定的傾斜角度並遍及工件8的頭部的上表面和頭部孔的底面而照射在XZ平面上以直線狀延伸的光束的雷射光源44。雷射光源44的光束係與Z方向平行地延伸成直線狀。致動器45是使雷射光源44沿著Y方向移動的驅動裝置。作為致動器45,可使用小型的馬達。使用該直線狀延伸的雷射光束的頭部孔深度測定方法係利用第7圖進行說明。 The head measuring unit 40 is configured to include a head imaging camera 42 that captures a shape of a head hole of the workpiece 8 on an imaging surface parallel to the XZ plane, and a predetermined inclination angle with respect to the Y direction of the workpiece 8 and The upper surface of the head of the workpiece 8 and the bottom surface of the head hole illuminate the laser light source 44 of the light beam extending linearly on the XZ plane. The beam of the laser light source 44 extends linearly in parallel with the Z direction. The actuator 45 is a driving device that moves the laser light source 44 in the Y direction. As the actuator 45, a small motor can be used. The head hole depth measuring method using the linearly extending laser beam will be described with reference to Fig. 7.

頭部攝像照相機42是與工件8的頭部的上表面相對向的拍攝面與XZ平面平行的攝像照相機。作為該頭部攝像照相機42,可使用應用了CCD圖像感測器的CCD照相機或應用了CMOS圖像感測器的照相機裝置。環形照明部46是設於頭部攝像照相機42的-Y方向側而對工件8的上表面進行照明的環狀燈。頭部攝像照相機42、雷射光源44和環形照明部46係進行相對性的配置關係的定位,且皆固定安裝於安裝板48。 The head imaging camera 42 is an imaging camera in which the imaging surface facing the upper surface of the head of the workpiece 8 is parallel to the XZ plane. As the head imaging camera 42, a CCD camera to which a CCD image sensor is applied or a camera device to which a CMOS image sensor is applied can be used. The ring illumination unit 46 is an annular lamp that is provided on the −Y direction side of the head imaging camera 42 to illuminate the upper surface of the workpiece 8 . The head camera camera 42, the laser light source 44, and the ring illumination unit 46 are positioned in a relative arrangement relationship, and are fixedly mounted to the mounting board 48.

退避移動部56是可沿著X方向移動安裝板 48的機構,且構成為包含可沿著X方向移動的X載物台58、及使X載物台58以預定的移動距離L在±X方向移動的活塞氣缸機構60。活塞氣缸機構60係在運算控制裝置100的控制下進行運作,藉由從空氣壓力控制裝置102供給的空氣壓而可使活塞往返移動±L的距離。 The retreating moving portion 56 is capable of moving the mounting plate in the X direction The mechanism of 48 is configured to include an X stage 58 that is movable in the X direction, and a piston cylinder mechanism 60 that moves the X stage 58 in the ±X direction by a predetermined movement distance L. The piston cylinder mechanism 60 is operated under the control of the arithmetic control device 100, and the piston is reciprocated by a distance of ±L by the air pressure supplied from the air pressure control device 102.

當活塞進行+L移動時,安裝於安裝板48的頭部攝像照相機42、雷射光源44和環形照明部46係成為一體而向+X方向移動,且頭部攝像照相機42的光軸恰好來到工件8的頭部的中心。該狀態是可進行頭部形狀的測定和孔深度的測定的測定狀態。當活塞進行-L移動時,安裝於安裝板48的頭部攝像照相機42、雷射光源44和環形照明部46係成為一體並向-X方向進行退避移動。該狀態是即使Y載物台26朝-Y方向下降,頭部攝像照相機42等也不會干擾工件8的退避狀態。 When the piston performs +L movement, the head imaging camera 42, the laser light source 44, and the ring illumination portion 46 attached to the mounting plate 48 are integrally moved in the +X direction, and the optical axis of the head imaging camera 42 is just right. To the center of the head of the workpiece 8. This state is a measurement state in which the measurement of the shape of the head and the measurement of the depth of the hole can be performed. When the piston moves -L, the head imaging camera 42, the laser light source 44, and the ring illumination portion 46 attached to the mounting plate 48 are integrated and retracted in the -X direction. In this state, even if the Y stage 26 is lowered in the -Y direction, the head imaging camera 42 or the like does not interfere with the retracted state of the workpiece 8.

把持部68係透過把持旋轉部62配置於基台16上,並把持工件8的公螺紋的軸向的一端的裝置。把持部68係構成為包含具有圓板狀外形的轉接器80、及至少以3點夾持固定轉接器80的外周側面的緊固卡盤70。把持旋轉部62係構成為包含使緊固卡盤70繞著軸向旋轉360度的θ馬達64、及設於θ馬達64與緊固卡盤70之間的旋轉接頭部66。 The grip portion 68 is a device that is disposed on the base 16 through the grip rotating portion 62 and holds one end of the male screw in the axial direction of the workpiece 8. The grip portion 68 is configured to include an adapter 80 having a disk-shaped outer shape and a fastening chuck 70 that sandwiches the outer peripheral side surface of the adapter 80 at least three points. The grip rotating portion 62 is configured to include a θ motor 64 that rotates the fastening chuck 70 360 degrees in the axial direction, and a rotary joint portion 66 that is provided between the θ motor 64 and the fastening chuck 70.

旋轉接頭部66是向緊固卡盤70供給來自空氣壓力控制裝置102的空氣壓時的空氣壓中繼部。旋轉接頭部66具有中繼的功能,使用於供給空氣壓的供給管不會 因緊固卡盤70的軸向旋轉而纏繞。θ馬達64的旋轉動作係藉由運算控制裝置100進行控制。作為該θ馬達64,可使用AC伺服馬達或DC伺服馬達。 The rotary joint portion 66 is an air pressure relay portion when the air pressure from the air pressure control device 102 is supplied to the fastening chuck 70. The rotary joint portion 66 has a relay function, and the supply pipe for supplying air pressure does not Winding due to the axial rotation of the fastening chuck 70. The rotation operation of the θ motor 64 is controlled by the arithmetic control device 100. As the θ motor 64, an AC servo motor or a DC servo motor can be used.

第3圖是表示把持部68的詳情的分解圖。在此,表示構成把持部68的緊固卡盤70、由緊固卡盤70固定的轉接器80、由轉接器80把持的工件8各自的詳細構成。第3圖(a)至(c)表示緊固卡盤70、轉接器80和工件8各自的剖視圖,(d)表示轉接器80的分解圖,(e)至(g)表示緊固卡盤70、轉接器80和工件8各自的俯視圖。 FIG. 3 is an exploded view showing details of the grip unit 68. Here, the detailed configuration of each of the fastening chuck 70 constituting the grip portion 68, the adapter 80 fixed by the fastening chuck 70, and the workpiece 8 held by the adapter 80 is shown. 3(a) to (c) are cross-sectional views showing the fastening chuck 70, the adapter 80, and the workpiece 8, respectively, (d) showing an exploded view of the adapter 80, and (e) to (g) showing fastening. A top view of each of the chuck 70, the adapter 80, and the workpiece 8.

工件8包含公螺紋部2、頭部4、公螺紋部2和頭部4之間的頭下部3而構成,在頭部4上設置有六角形的頭部孔6。工件8是M12的螺紋標稱且標稱長度為30mm的公制粗螺紋。根據日本工業規格值,在公螺紋部2可固定螺釘的長度約為30mm,公螺紋部2的最大直徑約為13.7mm,螺釘的螺距為1.75mm,頭部4的基準外形尺寸為18mm,頭部4的基準高度尺寸為12mm,頭部孔6為六角形孔,對邊寬度的標稱尺寸為10mm,孔深度的最小尺寸為6mm,頭下部3的圓形的最大狀態的半徑即頭下R最小為0.6mm。對邊寬度是六角形之相對向的邊之間的尺寸。頭部孔6的底面並非平坦,而是具有張開角度120度的圓錐形。公螺紋部2的不完整螺紋部最大為兩個螺距,在現在的情況下,2螺距=3.50mm。 The workpiece 8 includes a male screw portion 2, a head portion 4, a male lower portion 2, and a head lower portion 3 between the head portions 4. The head portion 4 is provided with a hexagonal head hole 6. The workpiece 8 is a metric coarse thread of nominal M12 with a nominal length of 30 mm. According to the Japanese industrial specifications, the length of the fixing screw in the male thread portion 2 is about 30 mm, the maximum diameter of the male thread portion 2 is about 13.7 mm, the pitch of the screw is 1.75 mm, and the reference outer dimension of the head 4 is 18 mm. The reference height dimension of the portion 4 is 12 mm, the head hole 6 is a hexagonal hole, the nominal dimension of the opposite side width is 10 mm, the minimum dimension of the hole depth is 6 mm, and the radius of the maximum state of the circular shape of the lower head 3 is the head under the head. R is a minimum of 0.6 mm. The opposite side width is the dimension between the opposite sides of the hexagon. The bottom surface of the head hole 6 is not flat but has a conical shape with an opening angle of 120 degrees. The incomplete thread portion of the male thread portion 2 has a maximum of two pitches, and in the present case, 2 pitches = 3.50 mm.

緊固卡盤70係將前端部相互面向的3個滑動台74a、74b、74c配置於支承台72上。在初始狀態下, 為3個滑動台74a、74b、74c退避至支承台72的外周側的狀態。利用藉由從空氣壓力控制裝置102供給的空氣壓進行運作的活塞氣缸機構的活塞78a、78b,使3個滑動台74a、74b、74c同步,並在支承台72的外周側和中心軸側之間移動驅動。 The fastening chuck 70 is disposed on the support base 72 with the three slide tables 74a, 74b, and 74c whose front end portions face each other. In the initial state, The three slide tables 74a, 74b, and 74c are retracted to the outer peripheral side of the support base 72. The three slide tables 74a, 74b, and 74c are synchronized by the pistons 78a and 78b of the piston-cylinder mechanism that are operated by the air pressure supplied from the air pressure control device 102, and are on the outer peripheral side and the central axis side of the support base 72. Move between drives.

在3個滑動台74a、74b、74c上分別安裝有夾持爪部76a、76b、76c。3個夾持爪部76a、76b、76c的前端部分別以朝向支承台72的中心軸方向的方式配置。在初始狀態下,夾持爪部76a、76b、76c亦退避至支承台72的外周側的狀態。3個滑動台74a、74b、74c同步地向支承台72的中心軸方向移動驅動,由此成為夾持爪部76a、76b、76c的前端部以向支承台72的中心軸方向集中的方式同步地移動,且一邊使配置於支承台72的中心的轉接器80以與中心軸的位置一致的方式定心,一邊夾持固定轉接器80的外周側面的緊固狀態。如此如此,緊固卡盤70是在退避狀態和緊固狀態之間藉由空氣而移動驅動的三分度卡盤機構。 Clamping claw portions 76a, 76b, and 76c are attached to the three sliding tables 74a, 74b, and 74c, respectively. The front end portions of the three grip claw portions 76a, 76b, and 76c are disposed toward the central axis direction of the support base 72, respectively. In the initial state, the grip claw portions 76a, 76b, and 76c are also retracted to the outer peripheral side of the support base 72. The three slide tables 74a, 74b, and 74c are synchronously moved in the direction of the central axis of the support base 72, whereby the front end portions of the grip claw portions 76a, 76b, and 76c are synchronized in the center axis direction of the support base 72. When the adapter 80 placed at the center of the support base 72 is centered so as to be aligned with the position of the central axis, the fastening state of the outer circumferential side surface of the adapter 80 is clamped and fixed. In this manner, the fastening chuck 70 is a three-division chuck mechanism that is moved by air between the retracted state and the tightened state.

緊固卡盤70的定心夾持動作係在運算控制裝置100的控制下進行。緊固卡盤70進行的轉接器80的夾持係在3個夾持爪部76a、76b、76c的前端部進行。3個夾持爪部76a、76b、76c的前端部分別為平坦面,因此當轉接器80的外形為圓板狀時,其外周側面以3個點、準確而言為在沿著軸向的3條切線進行夾持。轉接器80的外周側面的夾持只要至少以3個點進行即可。例如,也可設 為如下構造,亦即,將夾持爪部的前端部的形狀設為V字形,且利用相對向的兩個夾持爪部夾持轉接器80的外周側面。在該情況下,以4個點夾持轉接器80的外周側面。 The centering clamping operation of the fastening chuck 70 is performed under the control of the arithmetic control device 100. The clamping of the adapter 80 by the fastening chuck 70 is performed at the front end portions of the three clamping claw portions 76a, 76b, and 76c. The front end portions of the three gripping claw portions 76a, 76b, and 76c are flat surfaces, respectively. Therefore, when the outer shape of the adapter 80 is a disc shape, the outer peripheral side surface thereof is three points, specifically, in the axial direction. The three tangent lines are clamped. The clamping of the outer peripheral side of the adapter 80 may be performed at least at three points. For example, it can also be set In other words, the shape of the front end portion of the grip claw portion is V-shaped, and the outer peripheral side surface of the adapter 80 is sandwiched by the opposing grip claw portions. In this case, the outer peripheral side surface of the adapter 80 is sandwiched at four points.

轉接器80是工件固定夾具,其具有被緊固卡盤70夾持的圓板狀的外形部,且在一端面的中心具有預定嚙合長度的母螺紋,該母螺紋係在螺入工件8的公螺紋部2的前端部時,固定成使工件8的軸向不晃動。 The adapter 80 is a workpiece fixing jig having a disk-shaped outer shape portion held by the fastening chuck 70, and has a female thread of a predetermined engagement length at the center of one end surface, the female screw being screwed into the workpiece 8 When the front end portion of the male screw portion 2 is fixed, the axial direction of the workpiece 8 is not shaken.

轉接器80係藉由將工件8的公螺紋部2的前端部螺入預定的嚙合長度的環規82a、由緊固卡盤70夾持之具有圓板狀的外形部的支架86、及配置於環規82a和支架86之間的墊片84a一體化而構成。 The adapter 80 is a ring gauge 82a that screwes a front end portion of the male screw portion 2 of the workpiece 8 into a predetermined engagement length, a bracket 86 having a disk-shaped outer shape portion held by the fastening chuck 70, and The spacer 84a disposed between the ring gauge 82a and the bracket 86 is integrated.

環規82a是具有圓板狀的形狀,且沿著其中心軸刻有基準母螺紋83a的構件。基準母螺紋83a是與工件8的公螺紋部2的螺紋尺寸對應且具有預設的嚙合精度的母螺紋。該環規82a係可直接使用用於螺紋檢查的螺紋外徑量規。標準的螺紋外徑量規係在M12的情況下,刻有8個螺距的基準母螺紋83a。由於1個螺距=1.75mm,因此環規82a的厚度精確管理成8個螺距=14.00mm。基準母螺紋83a並未具有不完整螺紋部。 The ring gauge 82a is a member having a disk shape and having a reference female thread 83a engraved along its central axis. The reference female thread 83a is a female thread corresponding to the thread size of the male thread portion 2 of the workpiece 8 and having a predetermined meshing accuracy. The ring gauge 82a can directly use a thread outer diameter gauge for thread inspection. The standard thread outer diameter gauge is engraved with a reference pitch female thread 83a of 8 pitches in the case of M12. Since 1 pitch = 1.75 mm, the thickness of the ring gauge 82a is precisely managed to 8 pitches = 14.00 mm. The reference female thread 83a does not have an incomplete thread portion.

工件8的公螺紋部2的前端部從環規82a的一端面側、即上表面側以預定的嚙合長度螺入。預定的嚙合長度係設定成在使工件8的公螺紋部2的前端部螺入環規82a的基準母螺紋83a而嚙合時,不會在工件8的軸向晃動的程度。較佳為,工件8的軸向的晃動量為零,但 只要是不影響工件8的各種尺寸的測定精度的範圍即允許。如果工件8為良品,則使工件8的公螺紋部2的有效螺紋部約1個螺距;如果與環規82a的基準母螺紋83a嚙合,則使工件8的軸向的晃動大致落入允許範圍。工件8的公螺紋部2最大具有兩個螺距的不完整螺紋部,因此工件8的螺入量即預定的嚙合長度(不完整螺紋部的螺距數的長度+完整螺紋部的1個螺距的長度)較佳為盡可能地設定成較長。 The front end portion of the male screw portion 2 of the workpiece 8 is screwed in from the one end surface side of the ring gauge 82a, that is, the upper surface side with a predetermined meshing length. The predetermined engagement length is set so as not to be shaken in the axial direction of the workpiece 8 when the tip end portion of the male screw portion 2 of the workpiece 8 is screwed into the reference female screw 83a of the ring gauge 82a. Preferably, the axial sway of the workpiece 8 is zero, but It is permissible as long as it does not affect the measurement accuracy of various dimensions of the workpiece 8. If the workpiece 8 is a good product, the effective thread portion of the male thread portion 2 of the workpiece 8 is made to have about one pitch; if it is engaged with the reference female thread 83a of the ring gauge 82a, the axial sway of the workpiece 8 is substantially allowed to fall within the allowable range. . The male thread portion 2 of the workpiece 8 has a maximum threaded portion of two pitches, so that the screwing amount of the workpiece 8 is a predetermined meshing length (the length of the pitch number of the incomplete thread portion + the length of one pitch of the full thread portion) It is preferable to set it as long as possible.

環規82a具有可用於工件8的螺紋檢查的高精度,因此工件8不能以預定的嚙合長度螺入環規82a時,該工件8成為不良品。因此,將工件8的螺入環規82a的基準母螺紋83a的前端部判定為良品部分。但是,該部分不能進行螺釘尺寸自動測定系統10進行的定量的測定,所以較佳為將預定的嚙合長度盡可能地設定為較短。如此,要減少工件8的軸向的晃動的觀點與要擴大由螺釘尺寸自動測定系統10能進行定量的測定的範圍的觀點相反。 The ring gauge 82a has high precision for thread inspection of the workpiece 8, so that the workpiece 8 cannot be screwed into the ring gauge 82a with a predetermined meshing length, and the workpiece 8 becomes a defective product. Therefore, the tip end portion of the reference female screw 83a of the workpiece 8 which is screwed into the ring gauge 82a is determined as a good portion. However, since this part cannot be quantitatively measured by the screw size automatic measuring system 10, it is preferable to set the predetermined meshing length as short as possible. As described above, the viewpoint of reducing the axial sway of the workpiece 8 is contrary to the viewpoint of expanding the range in which the screw size automatic measurement system 10 can perform quantitative measurement.

因此,以下設為預定的嚙合長度=工件8的公螺紋部2的3個螺距的長度=5.25mm。將預定的嚙合長度設為作為1個螺距的長度的整數倍的3個螺距的長度,是由於將工件8的公螺紋部2的前端部向環規82a的螺入深度設為1個螺距的整數倍的精確的值。工件8為M12的螺紋標稱且標稱長度為30mm的公制粗螺紋,根據日本工業規格值,公螺紋部2的不完整螺紋部最大為兩個螺距。因此,該最大的兩個螺距加上1個螺距,將預定的嚙 合長度設為3個螺距的長度,使至少1個螺距在完整螺紋部嚙合。 Therefore, the following is assumed to be a predetermined engagement length = length of three pitches of the male screw portion 2 of the workpiece 8 = 5.25 mm. The predetermined engagement length is set to be a length of three pitches which is an integral multiple of the length of one pitch, because the screwing depth of the tip end portion of the male screw portion 2 of the workpiece 8 to the ring gauge 82a is set to one pitch. An exact value that is an integer multiple. The workpiece 8 is a metric coarse thread with a nominal M12 thread and a nominal length of 30 mm. According to Japanese Industrial Standards, the incomplete thread portion of the male thread portion 2 has a maximum of two pitches. Therefore, the two largest pitches plus one pitch will be predetermined The combined length is set to a length of three pitches so that at least one pitch is engaged at the full thread portion.

需要說明的是,在質量等級較低的工件8的情況下,不完整螺紋部有時也為兩個螺距以上,即使嚙合長度設為3個螺距的長度,有時工件8也在軸向晃動。在這種情況下,以1個螺距的長度為單位從3個螺距的長度延長預定的嚙合長度。例如,將預定的嚙合長度設為4個螺距的長度或5個螺距的長度。相反地,在加工為高精度用的螺釘等情況且不完整螺紋部落入1個螺距以下的情況下,亦能以1個螺距的長度為單位從3個螺距的長度縮短預定的嚙合長度。例如,也可將預定的嚙合長度設為兩個螺距的長度。預定的嚙合長度的1個螺距單位的調整係藉由後述那樣增減墊片84a的件數而進行。 It should be noted that in the case of the workpiece 8 having a low quality level, the incomplete thread portion may be equal to or greater than two pitches, and even if the mesh length is set to a length of three pitches, the workpiece 8 may be shaken in the axial direction. . In this case, the predetermined engagement length is extended from the length of the three pitches in units of the length of one pitch. For example, the predetermined engagement length is set to a length of 4 pitches or a length of 5 pitches. On the other hand, in the case of processing a screw for high precision or the like and the incomplete thread is inserted into one pitch or less, the predetermined meshing length can be shortened from the length of three pitches in units of the length of one pitch. For example, the predetermined engagement length can also be set to the length of two pitches. The adjustment of one pitch unit of the predetermined meshing length is performed by increasing or decreasing the number of the spacers 84a as will be described later.

支架86是具有與環規82a的基準母螺紋83a嚙合的公螺紋92a突出的一端面、即上表面的圓板狀的構件。當將工件8的公螺紋部2螺入環規82a的一側設為環規82a的上表面側時,支架86的公螺紋92a從環規82a的下表面側螺入。支架86的圓板狀的部分具有夾持環部88和外徑比夾持環部88大的止動凸緣部90,以利用緊固卡盤70夾持時精確地進行Y方向的定位。即使工件8的標稱尺寸不同,夾持環部88也具有相同的外徑可使緊固卡盤70標準化,故較為理想。在此,將夾持環部88的外徑設為20mm,將止動凸緣部90的外徑設為35mm。作為止動凸緣部90的-Y方向側的端面的下表面與緊固卡盤70的 3個夾持爪部76a、76b、76c的上表面抵接,由此精確地進行由緊固卡盤70夾持支架86時的Y方向定位。需要說明的是,藉由將止動凸緣部90的外周局部切口,在將支架86放置於作業台等時,可防止支架86滾轉。 The bracket 86 is a disk-shaped member having an end surface that protrudes from the male screw 92a that meshes with the reference female screw 83a of the ring gauge 82a, that is, the upper surface. When the side where the male screw portion 2 of the workpiece 8 is screwed into the ring gauge 82a is set as the upper surface side of the ring gauge 82a, the male screw 92a of the bracket 86 is screwed from the lower surface side of the ring gauge 82a. The disc-shaped portion of the bracket 86 has a clamp ring portion 88 and a stopper flange portion 90 having an outer diameter larger than that of the clamp ring portion 88 to accurately position the Y direction when clamped by the fastening chuck 70. Even if the nominal size of the workpiece 8 is different, the clamp ring portion 88 has the same outer diameter to normalize the fastening chuck 70, which is preferable. Here, the outer diameter of the clamp ring portion 88 is set to 20 mm, and the outer diameter of the stopper flange portion 90 is set to 35 mm. The lower surface of the end surface on the -Y direction side of the stopper flange portion 90 and the fastening chuck 70 The upper surfaces of the three gripping claw portions 76a, 76b, and 76c abut, thereby accurately positioning the Y direction when the bracket 86 is held by the fastening chuck 70. It should be noted that by partially cutting the outer circumference of the stopper flange portion 90, when the bracket 86 is placed on a work table or the like, the bracket 86 can be prevented from rolling.

公螺紋92a係從作為支架86的止動凸緣部90的一側端面的上表面以預先設定的突出量突出。公螺紋92a也可具有不完整螺紋部。 The male screw 92a protrudes from the upper surface of the one end surface of the stopper flange portion 90 as the bracket 86 by a predetermined amount of protrusion. The male thread 92a can also have an incomplete threaded portion.

公螺紋92a螺入環規82a的基準母螺紋83a的長度精確地設定成:{(環規82a的厚度)-(工件8的公螺紋部2與環規82a嚙合的預定的嚙合長度)}。在上述情況下,設定成:{(環規82a的厚度)-(工件8的公螺紋部2與環規82a嚙合的預定的嚙合長度)}={(8個螺距的長度)-(3個螺距的長度)}=(5個螺距的長度)=(14.00mm-5.25mm)=8.75mm。 The length of the reference female thread 83a of the male thread 92a screwed into the ring gauge 82a is precisely set to: {(thickness of the ring gauge 82a) - (the predetermined meshing length of the male thread portion 2 of the workpiece 8 engaged with the ring gauge 82a)}. In the above case, it is set to: {(thickness of the ring gauge 82a) - (the predetermined meshing length at which the male screw portion 2 of the workpiece 8 meshes with the ring gauge 82a)} = {(the length of the eight pitches) - (3 Length of pitch)}=(length of 5 pitches)=(14.00mm-5.25mm)=8.75mm.

公螺紋92a之從止動凸緣部90的預定的突出量也可設為該(5個螺距的長度)=8.75mm,但考慮到在公螺紋92a形成頭下部,也可設定為比(5個螺距的長度)=8.75mm長。設定為較長時,增長螺距的整數倍的長度。由此,公螺紋92a的突出量精確地成為螺距的整數倍,可將工件8的公螺紋部2的前端部向環規82a的螺入深度設為1個螺距的整數倍的精確值。在此,設為公螺紋92a的突出量=(7個螺距的長度)=12.25mm。 The predetermined amount of protrusion of the male screw 92a from the stopper flange portion 90 can also be set to (the length of the five pitches) = 8.75 mm, but it can be set to a ratio (5) in consideration of forming the lower portion of the head portion of the male thread 92a. The length of the pitch) = 8.75 mm long. When set to be longer, increase the length of the integer multiple of the pitch. Thereby, the protruding amount of the male screw 92a is exactly an integral multiple of the pitch, and the screwing depth of the tip end portion of the male screw portion 2 of the workpiece 8 to the ring gauge 82a can be set to an exact value of an integral multiple of one pitch. Here, the amount of protrusion of the male screw 92a = (the length of 7 pitches) = 12.25 mm.

當使支架86的公螺紋92a從環規82a的下表面側與環規82a的基準母螺紋83a嚙合,且使工件8的 公螺紋部2的前端從環規82a的上表面側螺入環規82a的基準母螺紋83a時,工件8的公螺紋部2的前端部係在支架86的公螺紋92a前端的位置停止。工件8的公螺紋部2的前端部向環規82a的螺入深度以(工件8的公螺紋部2與環規82a嚙合的預定的嚙合長度)計為{(環規82a的厚度)-(支架86的公螺紋92a螺入環規82a的長度)}。 When the male thread 92a of the bracket 86 is engaged with the reference female thread 83a of the ring gauge 82a from the lower surface side of the ring gauge 82a, and the workpiece 8 is made When the distal end of the male screw portion 2 is screwed into the reference female screw 83a of the ring gauge 82a from the upper surface side of the ring gauge 82a, the distal end portion of the male screw portion 2 of the workpiece 8 is stopped at the position of the tip end of the male screw 92a of the bracket 86. The screwing depth of the front end portion of the male screw portion 2 of the workpiece 8 to the ring gauge 82a is (the predetermined meshing length of the male screw portion 2 of the workpiece 8 meshed with the ring gauge 82a) as {(thickness of the ring gauge 82a)-( The male thread 92a of the bracket 86 is screwed into the length of the ring gauge 82a).

如上所述,有時支架86之公螺紋92a的突出量以1個螺距的長度單位變更,另外,如上所述,有時工件8的公螺紋部2與環規82a嚙合的預定的嚙合長度也以1個螺距的長度單位調整。即使在這種情況下,工件8的公螺紋部2的前端部向環規82a的螺入深度也設為1個螺距的整數倍的精確值。藉此,可根據環規82a的上表面的Y位置的測定值精確地求得工件8的公螺紋部2的前端部的Y位置。墊片84a係用於該1個螺距長度單位的調整。 As described above, the amount of protrusion of the male screw 92a of the bracket 86 may be changed by the length of one pitch, and as described above, the predetermined engagement length of the male screw portion 2 of the workpiece 8 and the ring gauge 82a may be also Adjusted in units of length of one pitch. Even in this case, the screwing depth of the tip end portion of the male screw portion 2 of the workpiece 8 to the ring gauge 82a is set to an exact value of an integral multiple of one pitch. Thereby, the Y position of the front end portion of the male screw portion 2 of the workpiece 8 can be accurately obtained from the measured value of the Y position of the upper surface of the ring gauge 82a. The spacer 84a is used for the adjustment of the one pitch length unit.

墊片84a是在中心具有使公螺紋92a穿過的貫通孔的環狀薄板。1個墊片84a具有精確地與工件8的1個螺距對應的厚度。第3圖中,將墊片84a的個數設為2個進行表示,但如以下一些例子所述,個數不限於2個,有時也為1個,有時也為3個。在上述例子中,在環規82a的厚度=8個螺距的長度,且支架86的公螺紋92a的突出量相當於7個螺距的長度的情況下,在支架86的止動凸緣部90和環規82a之間插入兩個具有1個螺距的厚度的墊片84a。由此,成為工件8的公螺紋部2的前端部和環規82a的預定的嚙合長度=〔(環規82a的厚度)-{(公螺紋92a 的突出量)-(墊片84a的厚度)}〕=〔(8個螺距的長度)-{(7個螺距的長度)-(兩個螺距的長度)}〕=3個螺距的長度。藉如,可根據環規82a的上表面的Y位置的測定值,精確地求得沿著-Y方向降低3個螺距的位置,以作為工件8的公螺紋部2的前端部的Y位置。 The spacer 84a is an annular thin plate having a through hole through which the male screw 92a passes at the center. One spacer 84a has a thickness that accurately corresponds to one pitch of the workpiece 8. In the third drawing, the number of the spacers 84a is shown as two. However, as described in some examples below, the number is not limited to two, and may be one or sometimes three. In the above example, in the case where the thickness of the ring gauge 82a = the length of 8 pitches, and the amount of projection of the male thread 92a of the bracket 86 corresponds to the length of 7 pitches, the stopper flange portion 90 of the bracket 86 and Two spacers 84a having a thickness of one pitch are inserted between the ring gauges 82a. Thereby, the predetermined engagement length of the front end portion of the male screw portion 2 of the workpiece 8 and the ring gauge 82a = [(thickness of the ring gauge 82a) - {(male thread 92a) The amount of protrusion) - (thickness of spacer 84a)}] = [(length of 8 pitches) - {(length of 7 pitches) - (length of two pitches)}] = length of 3 pitches. For example, the position at which the three pitches are lowered in the -Y direction can be accurately determined based on the measured value of the Y position of the upper surface of the ring gauge 82a as the Y position of the tip end portion of the male screw portion 2 of the workpiece 8.

在需要將工件8的公螺紋部2的前端部和環規82a的預定的嚙合長度從3個螺距的長度進行變更時,只要增減墊片84a的插入個數即可。例如,由於工件8的公螺紋部2的不完整螺紋部的長度等原因,要將預定的嚙合長度從3個螺距增長至4個螺距時,在上述例子中,將墊片84a的插入個數增加1個。由此,可根據環規82a的上表面的Y位置的測定值,精確地求得沿著-Y方向降低4個螺距的位置作為工件8的公螺紋部2的前端部的Y位置。預定的嚙合長度滿足兩個螺距時,在上述例子中,將墊片84a的插入個數減少1個。由此,可根據環規82a的上表面的Y位置的測定值,精確地求得沿著-Y方向降低兩個螺距的位置,作為工件8的公螺紋部2的前端部的Y位置。 When it is necessary to change the predetermined engagement length of the tip end portion of the male screw portion 2 of the workpiece 8 and the ring gauge 82a from the length of three pitches, the number of insertions of the spacer 84a may be increased or decreased. For example, when the predetermined engagement length is increased from 3 pitches to 4 pitches due to the length of the incomplete thread portion of the male thread portion 2 of the workpiece 8, etc., in the above example, the number of inserts of the spacer 84a is increased. Increase by one. Thereby, the position where the four pitches are reduced in the -Y direction can be accurately determined as the Y position of the tip end portion of the male screw portion 2 of the workpiece 8 based on the measured value of the Y position of the upper surface of the ring gauge 82a. When the predetermined engagement length satisfies the two pitches, in the above example, the number of insertions of the spacer 84a is reduced by one. Thereby, the position where the two pitches are lowered in the -Y direction can be accurately obtained from the measured value of the Y position of the upper surface of the ring gauge 82a as the Y position of the tip end portion of the male screw portion 2 of the workpiece 8.

在需要將支架86的公螺紋92a的突出量從7個螺距的長度進行變更的情況下,也只要增減墊片84a的插入個數即可。例如,由於支架86的公螺紋92a的頭下部的長度等原因,要將公螺紋92a的突出量從7個螺距設為8個螺距的長度時,將墊片84a的插入個數增加1個。公螺紋92a的突出量只要6個螺距即可時,將插入個數減 少1個。由此,即使在任意情況下,也可以根據環規82a的上表面的Y位置的測定值,精確地求得沿著-Y方向降低3個螺距的位置以作為工件8的公螺紋部2的前端部的Y位置。 When it is necessary to change the amount of protrusion of the male screw 92a of the bracket 86 from the length of seven pitches, the number of insertions of the spacer 84a may be increased or decreased. For example, when the protruding amount of the male screw 92a is set to a length of eight pitches from the seven pitches due to the length of the lower portion of the male screw 92a of the bracket 86, the number of insertions of the spacer 84a is increased by one. When the protruding amount of the male thread 92a is only 6 pitches, the number of insertions is reduced. One less. Thereby, even in any case, it is possible to accurately determine the position of the three pitches in the -Y direction as the male thread portion 2 of the workpiece 8 based on the measured value of the Y position of the upper surface of the ring gauge 82a. Y position of the front end.

如此,僅藉由墊片84a的個數的增減,就可廣泛地應對工件8的公螺紋部2的不完整螺紋部的長度和支架86的公螺紋92a的頭下部的長度等的偏差,而將工件8的公螺紋部2的前端部的位置設為從轉接器80的環規82a的上表面沿著-Y方向精確地降低1個螺距的長度的整數倍的長度的位置。由此,即使利用轉接器80把持工件8的公螺紋部2的前端部,藉由測定轉接器80的環規82a的上表面的Y位置,也可藉由計算算出工件8的全長。 Thus, the variation of the length of the incomplete thread portion of the male screw portion 2 of the workpiece 8 and the length of the head portion of the male screw 92a of the bracket 86 can be widely dealt with only by the increase or decrease of the number of the spacers 84a. On the other hand, the position of the distal end portion of the male screw portion 2 of the workpiece 8 is a position that is accurately reduced by an integral multiple of the length of one pitch in the -Y direction from the upper surface of the ring gauge 82a of the adapter 80. Thereby, even if the front end portion of the male screw portion 2 of the workpiece 8 is gripped by the adapter 80, the Y position of the upper surface of the ring gauge 82a of the adapter 80 can be measured, and the total length of the workpiece 8 can be calculated by calculation.

在此,構成轉接器80的環規82a、墊片84a和支架86的公螺紋92a具有根據工件8的種類而各異的厚度和螺紋部,但不論工件8的種類為何,夾持環部88和止動凸緣部90均具有共同的形狀和尺寸。 Here, the ring gauge 82a, the spacer 84a, and the male screw 92a constituting the adapter 80 have different thicknesses and thread portions depending on the type of the workpiece 8, but regardless of the type of the workpiece 8, the clamp ring portion Both the 88 and the stop flange portion 90 have a common shape and size.

第4圖是表示根據工件8的種類而異的轉接器的例子的圖。在此,表示與3個工件8的種類對應的轉接器,但除此以外的不同種類的工件8的轉接器也可設為相同構造。第4圖(a)是工件8的螺紋的標稱為M12的情況,與第3圖中說明的轉接器80相同。 Fig. 4 is a view showing an example of an adaptor depending on the type of the workpiece 8. Here, the adapters corresponding to the types of the three workpieces 8 are shown, but the adapters of the different types of workpieces 8 other than the above may be of the same configuration. Fig. 4(a) shows the case where the thread of the workpiece 8 is nominally M12, which is the same as the adapter 80 described in Fig. 3.

第4圖(b)是表示工件8的螺紋的標稱為M6時的轉接器80b的圖。夾持環部88和止動凸緣部90係與(a)相同。在此,M6的螺距為1.00mm,因此環規82b的厚 度為8螺距=8.00mm,1個墊片84b的厚度為1個螺距=1.00mm,公螺紋92b從止動凸緣部90的突出量為7個螺距=7.00mm。 Fig. 4(b) is a view showing the adapter 80b when the thread of the workpiece 8 is nominally M6. The clamp ring portion 88 and the stop flange portion 90 are the same as (a). Here, the pitch of the M6 is 1.00 mm, so the thickness of the ring gauge 82b is The degree is 8 pitches = 8.00 mm, the thickness of one spacer 84b is 1 pitch = 1.00 mm, and the amount of protrusion of the male screw 92b from the stopper flange portion 90 is 7 pitches = 7.00 mm.

第4圖(c)是表示工件8的螺紋的標稱為M3時的轉接器80c的圖。夾持環部88和止動凸緣部90係與(a)相同。在此,M3的螺距為0.50mm,因此環規82c的厚度為8螺距=4.00mm,1個墊片84c的厚度為1個螺距=0.50mm,公螺紋92c從止動凸緣部90的突出量為7個螺距=3.50mm。 Fig. 4(c) is a view showing the adapter 80c when the thread of the workpiece 8 is nominally M3. The clamp ring portion 88 and the stop flange portion 90 are the same as (a). Here, the pitch of the M3 is 0.50 mm, so the thickness of the ring gauge 82c is 8 pitches = 4.00 mm, the thickness of one spacer 84c is 1 pitch = 0.50 mm, and the male thread 92c protrudes from the stopper flange portion 90. The amount is 7 pitches = 3.50 mm.

再次返回第1圖,運算控制裝置100具有如下功能,亦即,作為整體來控制構成螺釘尺寸自動測定裝置12的各要素和空氣壓力控制裝置102的運作,算出工件8的軸向及繞軸的尺寸,並將算出的結果傳送至印表機等輸出裝置104,且在輸出裝置104中作為檢查表106進行列印。該運算控制裝置100係可利用適當的計算機而構成。 Returning to Fig. 1, the arithmetic and control device 100 has a function of controlling the operation of each element constituting the automatic screw size measuring device 12 and the air pressure control device 102 as a whole, and calculating the axial direction and the axis of the workpiece 8 The size is transmitted to the output device 104 such as a printer, and printed as the inspection table 106 in the output device 104. The arithmetic control device 100 can be configured using an appropriate computer.

運算控制裝置100包含:螺紋徑算出部110、全長算出部112、合焦位置算出部114、輪廓資料算出部116、頭下R算出部118、頭部尺寸算出部120、頭部孔深度算出部122、測定資料輸出部124而構成。這些功能可藉由運算控制裝置100執行的軟體而實現,具體而言,可藉由執行螺釘自動測定程序而實現。也可藉由硬體而實現這些功能的一部分。 The calculation control device 100 includes a screw diameter calculation unit 110, a total length calculation unit 112, a focus position calculation unit 114, a contour data calculation unit 116, a head-down R calculation unit 118, a head size calculation unit 120, and a head hole depth calculation unit. 122. The measurement data output unit 124 is configured. These functions can be realized by the software executed by the arithmetic control device 100, and specifically, can be realized by executing an automatic screw measurement program. A part of these functions can also be implemented by hardware.

使用第5圖至第11圖進一步詳細說明上述構成的螺釘尺寸自動測定系統10的作用、特別是運算控制 裝置100的各功能。第5圖是表示螺釘尺寸自動測定系統10中的測定順序的流程圖。第6圖是表示進行第5圖的各順序的工件8的測定部位的圖。第6圖(a)在側視圖中表示測定部位,(b)是在俯視圖中表示測定部位的圖。 The function, particularly the arithmetic control, of the screw size automatic measuring system 10 constructed as described above will be further described in detail using Figs. 5 to 11. Each function of the device 100. Fig. 5 is a flow chart showing the measurement procedure in the screw size automatic measurement system 10. Fig. 6 is a view showing a measurement portion of the workpiece 8 in each order of the fifth drawing. Fig. 6(a) is a view showing a measurement site in a side view, and Fig. 6(b) is a view showing a measurement site in a plan view.

為了進行工件8的測定,首先進行螺釘尺寸自動測定系統10的初始化。在初始化中,將電源設為接通(ON)狀態,啟動空氣壓力控制裝置102,並將運算控制裝置100設為初始狀態。由此,Y載物台26返回至預定的初始Y位置。初始Y位置係設定成沿著Y方向相對於把持部68的前端位置足夠高的位置。另外,Z載物台52係返回預定的初始Z位置,X載物台58係返回退避狀態。把持部68係返回預定的初始θ位置。緊固卡盤70的3個夾持爪部76a、76b、76c係返回退避狀態。 In order to perform the measurement of the workpiece 8, first, the initialization of the screw size automatic measurement system 10 is performed. In the initialization, the power supply is turned "ON", the air pressure control device 102 is activated, and the arithmetic control device 100 is set to the initial state. Thereby, the Y stage 26 is returned to the predetermined initial Y position. The initial Y position is set to a position sufficiently high with respect to the front end position of the grip portion 68 along the Y direction. Further, the Z stage 52 is returned to the predetermined initial Z position, and the X stage 58 is returned to the retracted state. The grip portion 68 is returned to a predetermined initial θ position. The three gripping claw portions 76a, 76b, and 76c of the fastening chuck 70 are returned to the retracted state.

當初始化結束時,在把持部68上安裝工件8(S10)。如第4圖中說明,工件8被把持部68把持固定公螺紋部2的前端部的3個螺距。該處理中,預先準備M12用的轉接器80,向轉接器80的環規82a螺入工件8的公螺紋部2的前端部。M12用的轉接器80係設定為預定的嚙合長度為M12的螺紋的3個螺距=5.25mm,因此工件8係螺入5.25mm並在該位置停止。接著,將把持工件8的轉接器80安裝於處於緊固卡盤70的退避狀態的3個夾持爪部76a、76b、76c之間的空間。目前為止的處理藉由作業者的人工作業進行。 When the initialization is completed, the workpiece 8 is attached to the grip portion 68 (S10). As described in FIG. 4, the workpiece 8 is gripped by the grip portion 68 to fix the three pitches of the front end portion of the male screw portion 2. In this process, the adapter 80 for M12 is prepared in advance, and the tip end portion of the male screw portion 2 of the workpiece 8 is screwed into the ring gauge 82a of the adapter 80. The adapter 80 for the M12 is set to have three pitches of a predetermined meshing length of M12 = 5.25 mm, so that the workpiece 8 is screwed into 5.25 mm and stopped at this position. Next, the adapter 80 that grips the workpiece 8 is attached to a space between the three gripping claw portions 76a, 76b, and 76c in the retracted state of the fastening chuck 70. The processing so far is performed by the manual work of the operator.

當在把持部68安裝工件8時,藉由作業者 按下緊固固定按鈕等,運算控制裝置100係對空氣壓力控制裝置102發出指令,且對把持部68的緊固卡盤70的活塞氣缸機構供給預定的緊固用空氣壓力。由此,3個夾持爪部76a、76b、76c同步地朝支承台72的中心軸側移動,且充分地緊固固定工件8。由該狀態開始測定工件8的形狀尺寸。 When the workpiece 8 is mounted on the grip portion 68, by the operator The operation control device 100 issues a command to the air pressure control device 102 by pressing a fastening button or the like, and supplies a predetermined fastening air pressure to the piston cylinder mechanism of the fastening chuck 70 of the grip portion 68. Thereby, the three gripping claw portions 76a, 76b, and 76c are simultaneously moved toward the central axis side of the support base 72, and the workpiece 8 is sufficiently fastened and fixed. The shape and size of the workpiece 8 are measured from this state.

S10之後,進行頭部尺寸測定(S12)。該處理係藉由運算控制裝置100的頭部尺寸算出部120的功能而執行。具體而言,使Y載物台26下降,並使頭部攝像照相機42的焦點位置恰好成為工件8的頭部4的上表面的位置。而且,利用頭部攝像照相機42取得工件8的頭部4的形狀的拍攝資料,將拍攝資料二值化,使用邊緣檢測法等,算出頭部4的直徑尺寸、頭部孔6的對邊寬度尺寸等。第6圖中表示將頭部4的俯視圖設為S12。 After S10, head size measurement is performed (S12). This processing is executed by the function of the head size calculation unit 120 of the arithmetic control device 100. Specifically, the Y stage 26 is lowered, and the focus position of the head imaging camera 42 is exactly the position of the upper surface of the head 4 of the workpiece 8. Further, the head imaging camera 42 acquires the image data of the shape of the head portion 4 of the workpiece 8, binarizes the image data, and calculates the diameter of the head portion 4 and the width of the opposite side of the head hole 6 using an edge detection method or the like. Size, etc. Fig. 6 shows a plan view of the head 4 as S12.

頭部4的外形為圓形,因此使工件8以1度間隔繞著軸旋轉360度,並在各角度反覆進行頭部4的直徑尺寸的測定。將這些測定結果的最大值、最小值和平均值設為頭部4的直徑尺寸的測定值。頭部孔6的對邊寬度為六角形的相對向的邊之間的間隔,六角形的相對向的邊為3組,因此使工件8以120度間隔繞著軸旋轉360度,進行3組對邊寬度的測定。將這些測定結果的最大值、最小值和平均值設為頭部孔6的對邊寬度的測定值。 Since the outer shape of the head portion 4 is circular, the workpiece 8 is rotated 360 degrees around the axis at an interval of 1 degree, and the diameter of the head portion 4 is measured repeatedly at each angle. The maximum value, the minimum value, and the average value of these measurement results are taken as the measured values of the diameter size of the head 4. The width of the opposite side of the head hole 6 is the interval between the opposite sides of the hexagonal shape, and the opposite sides of the hexagonal shape are three groups, so that the workpiece 8 is rotated 360 degrees around the axis at an interval of 120 degrees, and three groups are performed. Determination of the width of the side. The maximum value, the minimum value, and the average value of these measurement results were taken as the measured values of the opposite side widths of the head holes 6.

接著,進行頭部孔深度測定(S14)。頭部孔6是設於工件8的頭部的連結工具用的旋轉槽或旋轉孔,在 當前的情況下為六角形孔。該處理係藉由運算控制裝置100的頭部孔深度算出部122的功能而執行。具體而言,由雷射光源44以相對於工件8的Y方向成預定的傾斜角度,遍及工件8的頭部4的上表面和頭部孔6的底面照射在XZ平面上以直線狀延伸的光束。而且,利用照射的直線狀延伸的光束投影於頭部4的上表面的投影位置、及投影於頭部孔6的底面的投影位置在XZ平面上的錯位量根據頭部孔6的深度而異。 Next, the head hole depth measurement is performed (S14). The head hole 6 is a rotation groove or a rotation hole for connecting a tool provided on the head of the workpiece 8 at In the current case, it is a hexagonal hole. This processing is executed by the function of the head hole depth calculation unit 122 of the arithmetic control device 100. Specifically, the laser light source 44 is irradiated in a straight line on the XZ plane over the upper surface of the head portion 4 of the workpiece 8 and the bottom surface of the head hole 6 at a predetermined inclination angle with respect to the Y direction of the workpiece 8. beam. Further, the projection position of the linearly extending light beam projected on the upper surface of the head 4 and the projection position projected on the bottom surface of the head hole 6 in the XZ plane vary depending on the depth of the head hole 6. .

第7圖是表示測定頭部孔6的深度的順序的圖。第7圖(a)是工件8處於任意的把持狀態的圖,(b)是表示使工件8從(a)的狀態繞著軸旋轉△θ的狀態的圖,(c)是表示使雷射光源44相對於工件8的Y方向的位置進行△Y移動而測定頭部孔深度的狀態的圖。這些圖中,上層側的圖是頭部4的俯視圖,下層側的圖是工件8的剖視圖。 Fig. 7 is a view showing the procedure for measuring the depth of the head hole 6. Fig. 7(a) is a view showing the workpiece 8 in an arbitrary holding state, and Fig. 7(b) is a view showing a state in which the workpiece 8 is rotated by Δθ about the state of (a), and (c) is a view showing the laser. A diagram in which the position of the head hole depth is measured by ΔY moving the position of the light source 44 with respect to the Y direction of the workpiece 8. In these figures, the upper side view is a plan view of the head 4, and the lower side view is a cross-sectional view of the workpiece 8.

第7圖(a)是在頭部孔6的六角形的相對向的邊與Z方向平行的狀態下,從雷射光源44以相對於Y方向成預定的傾斜角度,朝頭部的上表面5和頭部孔6的底面7照射以直線狀延伸的光束130的圖。光束130是與Z方向平行地以直線狀延伸的線束。例如當雷射光源44為紅色發光型時,紅色線投影於頭部4的上表面5和頭部孔6的底面7。第7圖(a)中,表示有投影於頭部4的上表面5的紅色線132和投影於頭部孔6的底面7的紅色線133。頭部孔6的底面並非平坦,而是具有張開角度為120度的圓錐形,因此投影於底面7的紅色線133為圓弧狀。 Fig. 7(a) shows a predetermined inclination angle with respect to the Y direction from the laser light source 44 in a state where the opposite sides of the hexagonal shape of the head hole 6 are parallel to the Z direction. The upper surface 5 of the head and the bottom surface 7 of the head hole 6 are illuminated by a light beam 130 extending linearly. The light beam 130 is a wire harness that extends linearly in parallel with the Z direction. For example, when the laser light source 44 is of the red light type, the red line is projected on the upper surface 5 of the head 4 and the bottom surface 7 of the head hole 6. In Fig. 7(a), a red line 132 projected on the upper surface 5 of the head 4 and a red line 133 projected on the bottom surface 7 of the head hole 6 are shown. The bottom surface of the head hole 6 is not flat, but has a conical shape with an opening angle of 120 degrees. Therefore, the red line 133 projected on the bottom surface 7 has an arc shape.

利用深度量規檢查頭部孔6的深度時,深度量規係在頭部孔6的六角形的角部的底面9抵接。頭部孔6的六角形的角部的底面9係與具有張開角度為120度的圓錐形的圓錐面、即底面7不同。因此,為了光學性測定頭部孔6的深度,較佳為照射光束130,使投影於頭部孔6的底面的紅色線在頭部孔6的六角形的角部的底面9抵接。第7圖(a)中,紅色線133與作為圓錐面的底面7抵接,或不與頭部孔6的六角形的角部的底面9抵接,而且利用頭部4的上表面5的影子,紅色線133的端部不會延伸到頭部孔6的六角形的邊的位置。 When the depth of the head hole 6 is inspected by the depth gauge, the depth gauge abuts on the bottom surface 9 of the hexagonal corner portion of the head hole 6. The bottom surface 9 of the hexagonal corner portion of the head hole 6 is different from the conical surface having a flare angle of 120 degrees, that is, the bottom surface 7. Therefore, in order to optically measure the depth of the head hole 6, it is preferable to irradiate the light beam 130 so that the red line projected on the bottom surface of the head hole 6 abuts on the bottom surface 9 of the hexagonal corner portion of the head hole 6. In Fig. 7(a), the red line 133 abuts against the bottom surface 7 which is a conical surface, or does not abut against the bottom surface 9 of the hexagonal corner portion of the head hole 6, and the upper surface 5 of the head 4 is used. The shadow, the end of the red line 133 does not extend to the position of the hexagonal side of the head hole 6.

第7圖(b)是表示使工件8繞著軸進行△θ旋轉,使六角形的邊與X方向成平行的狀態的圖。在此,表示投影於頭部4的上表面5的紅色線134、及投影於作為頭部孔6的圓錐面的底面7的紅色線135,但紅色線135的端部延伸至頭部孔6的六角形的邊。但是,紅色線135不會與頭部孔6的六角形的角部的底面9抵接。 Fig. 7(b) is a view showing a state in which the workpiece 8 is rotated by Δθ around the axis so that the sides of the hexagon are parallel to the X direction. Here, the red line 134 projected on the upper surface 5 of the head 4 and the red line 135 projected on the bottom surface 7 of the conical surface of the head hole 6 are shown, but the end of the red line 135 extends to the head hole 6 Hexagonal side. However, the red line 135 does not abut against the bottom surface 9 of the hexagonal corner portion of the head hole 6.

第7圖(c)是表示相對於(b)的狀態,使雷射光源44的Y方向的位置相對於工件8沿著+Y方向偏離△Y的狀態的圖。根據△Y的大小,光束朝+X方向移動。第7圖(c)中,表示投影於頭部4的上表面5的紅色線136和投影於頭部孔6的底面的紅色線137。紅色線136、137的X方向位置係根據光束131的Y方向移動量△Y進行移動。在此,表示有投影於頭部孔6的底面的紅色線137與頭部孔6的六角形的角部的底面9抵接的狀態的△Y。是 否為紅色線137與頭部孔6的六角形的角部的底面9抵接的狀態,可依據頭部攝像照相機42取得的頭部4的拍攝資料進行判斷。 Fig. 7(c) is a view showing a state in which the position in the Y direction of the laser light source 44 is shifted by ΔY in the +Y direction with respect to the workpiece 8 with respect to the state of (b). According to the size of ΔY, the light beam moves in the +X direction. In Fig. 7(c), a red line 136 projected on the upper surface 5 of the head 4 and a red line 137 projected on the bottom surface of the head hole 6 are shown. The X-direction position of the red lines 136 and 137 is moved in accordance with the Y-direction movement amount ΔY of the light beam 131. Here, ΔY in a state in which the red line 137 projected on the bottom surface of the head hole 6 abuts against the bottom surface 9 of the hexagonal corner portion of the head hole 6 is shown. Yes The state in which the red line 137 is in contact with the bottom surface 9 of the hexagonal corner portion of the head hole 6 can be determined based on the photographing data of the head portion 4 obtained by the head camera camera 42.

△Y係可藉由朝Y方向移動驅動雷射光源44的致動器45的控制而任意設定。在頭部攝像照相機42的焦點深度足夠深的情況下,也可省略致動器45,將雷射光源44的位置設為相對於Y載物台26固定的位置,並使Y載物台26移動-△Y。 The ΔY system can be arbitrarily set by controlling the actuator 45 that drives the laser light source 44 in the Y direction. When the depth of focus of the head imaging camera 42 is sufficiently deep, the actuator 45 may be omitted, and the position of the laser light source 44 may be set to a position fixed with respect to the Y stage 26, and the Y stage 26 may be provided. Move - △ Y.

第7圖(c)中,頭部孔6的深度D,係依據光束131之相對於Y方向的預定的傾斜角度、及紅色線136與紅色線137的XZ平面上的X位置的錯位量L用D=Lcot 而算出。錯位量L是頭部4的六角形和紅色線136的交點的X位置、頭部4的六角形和紅色線137的交點的X位置的差。如此,藉由光學性且非接觸進行頭部孔6的深度D的測定。 In Fig. 7(c), the depth D of the head hole 6 is based on a predetermined inclination angle of the light beam 131 with respect to the Y direction. And the amount of misalignment L of the X position on the XZ plane of the red line 136 and the red line 137 is D = Lcot And calculate. The misalignment amount L is the difference between the X position of the intersection of the hexagonal shape of the head 4 and the red line 136, and the X position of the intersection of the hexagonal shape of the head 4 and the red line 137. In this manner, the measurement of the depth D of the head hole 6 is performed optically and non-contact.

在頭部孔6為六角形的情況下,使工件8以120度間隔繞著軸旋轉360度,並反覆進行上述測定。將這些測定結果的最大值、最小值和平均值設為頭部孔6的深度測定值。 In the case where the head hole 6 is hexagonal, the workpiece 8 is rotated 360 degrees around the axis at an interval of 120 degrees, and the above measurement is repeated. The maximum value, the minimum value, and the average value of these measurement results are taken as the depth measurement values of the head holes 6.

再次返回第5圖,當S14的處理結束時,使用頭部攝像照相機42的測定結束,因此使活塞氣缸機構60運作,並使X載物台58返回至退避狀態。以後,依據由投影攝像照相機38所取得的工件8的拍攝資料,進行工件8的軸向及繞軸的尺寸的算出。 Returning to Fig. 5 again, when the processing of S14 is completed, the measurement by the head imaging camera 42 is completed, so that the piston cylinder mechanism 60 is operated and the X stage 58 is returned to the retracted state. Thereafter, the dimensions of the workpiece 8 in the axial direction and the axis are calculated based on the imaging data of the workpiece 8 acquired by the projection imaging camera 38.

由投影攝像照相機38拍攝的工件8的投影形狀資料中所需者是從白資料轉換成黑資料的位置的資料。工件8是公螺紋部2、頭部4均在XZ平面上為圓筒狀或在其本身刻有螺旋螺紋的工件。因此,以投影形狀從白資料轉換成黑資料的位置成為在圓筒狀的緣部為圓弧狀曲面的頂點位置。因此,需要使投影攝像照相機38的焦點位置與該曲面的頂點位置對齊。另外,當在曲面的表面附著有垃圾等時,投影形狀資料中會形成雜訊。 The required shape in the projection shape data of the workpiece 8 taken by the projection camera 38 is the material converted from the white data to the position of the black data. The workpiece 8 is a workpiece in which the male thread portion 2 and the head portion 4 are both cylindrical in the XZ plane or have a helical thread engraved on themselves. Therefore, the position where the projection shape is converted from the white data to the black data is the vertex position where the cylindrical edge portion is an arcuate curved surface. Therefore, it is necessary to align the focus position of the projection imaging camera 38 with the vertex position of the curved surface. In addition, when garbage or the like adheres to the surface of the curved surface, noise is formed in the projected shape data.

第5圖的S16的合焦位置的算出和S18的輪廓資料的算出,係根據由投影攝像照相機38所取得的工件8的投影形狀資料進行各種尺寸的算出時預先進行的處理。 The calculation of the focus position of S16 in Fig. 5 and the calculation of the contour data of S18 are performed in advance when various sizes are calculated based on the projection shape data of the workpiece 8 acquired by the projection imaging camera 38.

合焦位置算出(S16)係藉由運算控制裝置100的合焦位置算出部114的功能而執行。具體而言,使合焦移動部50的Z載物台52移動,並使投影攝像照相機38的焦點位置向Z方向移動,求得此時的從白資料轉換成黑資料的最陡峭的Z位置,並將該位置設為合焦位置。合焦位置算出處理是所謂的自動聚焦處理,但一般的自動聚焦與對象物的表面進行合焦,對於S16的合焦位置算出,是在投影形狀資料從白資料轉換成黑資料的邊緣區域中,算出在工件8的曲面上合焦時的位置。 The focus position calculation (S16) is executed by the function of the focus position calculation unit 114 of the arithmetic control device 100. Specifically, the Z stage 52 of the focus moving unit 50 is moved, and the focus position of the projection imaging camera 38 is moved in the Z direction, and the steepest Z position from the white data to the black data at this time is obtained. And set the position to the focus position. The focus position calculation processing is a so-called auto focus processing, but general auto focus is focused on the surface of the object, and the focus position calculation in S16 is in the edge region where the projection shape data is converted from white data to black data. The position at the time of focusing on the curved surface of the workpiece 8 is calculated.

第8圖是表示合焦位置的算出方法的圖。第8圖(a)是表示工件8的輪廓的投影狀態的圖,(b)是表示投影攝像照相機38的焦點位置為A至E時的拍攝的黑白狀 態的圖,(c)是藉由灰階值I的變化表示黑白狀態的變化的圖,(d)是表示灰階值I相對於Z位置的微分波形的圖,(e)是表示(d)的波形的半值寬△Z0.5相對於Z位置的關係的圖。 Fig. 8 is a view showing a method of calculating a focus position. Fig. 8(a) is a view showing a projection state of the outline of the workpiece 8, and Fig. 8(b) is a view showing a black-and-white state of photographing when the focus position of the projection imaging camera 38 is A to E, and (c) is a view by ash. The change of the order value I represents a map of the change of the black and white state, (d) is a graph showing the differential waveform of the gray scale value I with respect to the Z position, and (e) is the half value width ΔZ 0.5 of the waveform representing the (d). A diagram of the relationship at the Z position.

第8圖(a)是表示與XZ平面平行的面中的光源36、投影攝像照相機38和工件8的關係的圖。來自光源36的平行光線被工件8遮擋,而在工件8的下游側產生影像區域140。當利用投影攝像照相機38攝像該影像區域時,成為黑資料。從白資料轉換成黑資料的黑白交界142係以與工件8的曲面連接的線表示。當使投影攝像照相機38相對於工件8朝±Z方向移動時,投影攝像照相機38的焦點位置係對應該移動距離而朝±Z方向移動。第8圖(a)中,將投影攝像照相機38的Z方向移動量變化成5組,並表示此時的工件8的曲面上的焦點位置A、B、C、D、E。 Fig. 8(a) is a view showing the relationship between the light source 36, the projection imaging camera 38, and the workpiece 8 in a plane parallel to the XZ plane. The parallel rays from the light source 36 are blocked by the workpiece 8, and the image area 140 is produced on the downstream side of the workpiece 8. When the image area is captured by the projection camera 38, it becomes black data. The black and white boundary 142 that is converted from white data to black data is represented by a line connecting the curved surface of the workpiece 8. When the projection imaging camera 38 is moved in the ±Z direction with respect to the workpiece 8, the focus position of the projection imaging camera 38 is moved in the ±Z direction corresponding to the movement distance. In Fig. 8(a), the amount of movement of the projection imaging camera 38 in the Z direction is changed into five groups, and the focus positions A, B, C, D, and E on the curved surface of the workpiece 8 at this time are shown.

第8圖(b)是表示投影攝像照相機38的焦點位置為A至E時由投影攝像照相機38所拍攝的拍攝面中的黑白狀態的圖。黑白狀態的程度中,由斜線表示的狀態為完全黑的狀態,由細點集合表示的狀態為不完全黑且不完全白的狀態,既沒有斜線也沒有細點集合的狀態為完全白的狀態。從光源觀察,焦點位置處於工件8的下游側時,表示在黑白交界142附近為不完全白且不完全黑的狀態。焦點位置處於工件8的上游側時,焦點與工件8未對齊,因此整體成為不完全白且不完全黑的狀態。 Fig. 8(b) is a view showing a black-and-white state in the imaging surface captured by the projection imaging camera 38 when the focus position of the projection imaging camera 38 is A to E. In the black-and-white state, the state indicated by the oblique line is a completely black state, and the state represented by the thin point set is a state of incomplete black and incomplete white, and the state in which neither the oblique line nor the fine point set is completely white. When viewed from the light source, the focus position is on the downstream side of the workpiece 8, indicating a state in which the vicinity of the black-and-white boundary 142 is incompletely white and not completely black. When the focus position is on the upstream side of the workpiece 8, the focus is not aligned with the workpiece 8, so that the whole is incompletely white and not completely black.

第8圖(c)是藉由灰階值I的變化表示(b)的 黑白狀態的變化的圖。橫軸為Z位置,縱軸為灰階值I。焦點位置為C時,相對於Z位置的變化,灰階值I急劇地變化,但在除此以外的焦點位置,灰階值I的變化相對於Z位置的變化變得緩和。 Figure 8 (c) shows the change of the gray scale value I (b) A diagram of the change in black and white state. The horizontal axis is the Z position, and the vertical axis is the gray level value I. When the focus position is C, the grayscale value I changes abruptly with respect to the change in the Z position, but at other focus positions, the change in the grayscale value I with respect to the Z position is moderated.

第8圖(d)是為了使灰階值I的變化相對於Z位置的變化的程度明確化,而表示灰階值I相對於Z位置的微分波形的圖。橫軸為Z位置,縱軸為dI/dZ。灰階值I的變化係以脈衝狀的波形表示,該脈衝狀的波形峰值越大,脈衝狀的波形的半值寬△Z0.5越小,且灰階值I的變化越大。 Fig. 8(d) is a view showing a differential waveform of the grayscale value I with respect to the Z position in order to clarify the degree of change of the grayscale value I with respect to the Z position. The horizontal axis is the Z position and the vertical axis is dI/dZ. The change of the gray scale value I is represented by a pulse waveform, and the larger the peak value of the pulse waveform is, the smaller the half value width ΔZ 0.5 of the pulse waveform is, and the larger the change of the gray scale value I is.

第8圖(e)是表示(d)的波形的半值寬△Z0.5相對於Z位置的關係的圖。橫軸為Z位置,投影攝像照相機38的焦點位置A、B、C、D、E也用於參考。縱軸為△Z0.5。在此,△Z0.5在焦點位置C成為最小值。如果將△Z0.5的倒數或(d)中的脈衝狀的波形的峰值設為合焦的評價函數,則藉由算出評價函數的值取得最大值的Z位置Z0,可算出投影攝像照相機38的合焦位置。在第8圖(e)的情況下,焦點位置為C時的Z位置為Z0。在投影攝像照相機38的Z位置成為該Z位置Z0的狀態下,固定Z載物台52的位置。 Fig. 8(e) is a view showing the relationship between the half value width ΔZ 0.5 of the waveform of (d) with respect to the Z position. The horizontal axis is the Z position, and the focus positions A, B, C, D, and E of the projection imaging camera 38 are also used for reference. The vertical axis is ΔZ 0.5 . Here, ΔZ 0.5 becomes the minimum value at the focus position C. When the reciprocal of ΔZ 0.5 or the peak of the pulse waveform in (d) is set as the evaluation function of the focus, the projection camera 38 can be calculated by calculating the Z position Z 0 of the maximum value by calculating the value of the evaluation function. The focus position. In the case of Fig. 8(e), the Z position when the focus position is C is Z 0 . The position of the Z stage 52 is fixed in a state where the Z position of the projection imaging camera 38 is at the Z position Z 0 .

再次返回第5圖,輪廓資料算出(S18)的處理係藉由運算控制裝置100的輪廓資料算出部116的功能而執行。具體而言,以工件8的投影形狀資料的黑白交界為工件8的投影形狀的輪廓進行輪廓跟蹤處理,並算出1次螺釘輪廓分佈的資料。而且,對該1次螺釘輪廓分佈的 資料,進行將從工件8的剖視圖形觀察而成為異常的資料作為雜訊去除的平滑化處理,以算出2次螺釘輪廓分佈。將該雜訊去除的螺釘輪廓分佈設為以後用於算出各種尺寸的輪廓資料。 Returning to Fig. 5 again, the processing of the contour data calculation (S18) is executed by the function of the contour data calculation unit 116 of the arithmetic control device 100. Specifically, contour tracking processing is performed on the contour of the projection shape of the workpiece 8 with the black-and-white boundary of the projection shape data of the workpiece 8, and the data of the screw contour distribution is calculated once. Moreover, the distribution of the contour of the screw In the data, the data which is abnormal from the cross-sectional view of the workpiece 8 is used as a smoothing process for noise removal, and the screw contour distribution is calculated twice. The contour of the screw removed by the noise is set to be used later to calculate contour data of various sizes.

第9圖是表示輪廓分佈的雜訊去除方法的圖。第9圖(a)是表示輪廓跟蹤處理的規則的圖。(b)是對工件8進行輪廓跟蹤處理而得到的1次螺釘輪廓分佈的資料,(c)是表示從(b)去除雜訊的輪廓資料的圖。 Fig. 9 is a view showing a method of removing noise of a contour distribution. Fig. 9(a) is a diagram showing the rules of the contour tracking processing. (b) is the data of the primary screw contour distribution obtained by performing the contour tracking processing on the workpiece 8, and (c) is a graph showing the contour data for removing the noise from (b).

在輪廓資料算出中,為了提高輪廓資料的解析度,係將由投影攝像照相機38所拍攝的工件8的投影形狀資料變換成具有任意的位置解析度的位元映像的2維資料。例如,如果投影攝像照相機38的拍攝面中的像素解析度約為8μm,則將1個像素分割成8×8的子像素,位置解析度變化成1μm的2維位元映像。如此,可得到具有足夠的位置解析度的2維位元映像,以下,使用2維位元映像的資料進行輪廓跟蹤處理和雜訊去除處理。 In the contour data calculation, in order to improve the resolution of the contour data, the projection shape data of the workpiece 8 captured by the projection imaging camera 38 is converted into two-dimensional data having a bit map of an arbitrary position resolution. For example, if the pixel resolution in the imaging plane of the projection imaging camera 38 is about 8 μm, one pixel is divided into 8×8 sub-pixels, and the position resolution is changed to a 2-dimensional bitmap of 1 μm. In this way, a two-dimensional bitmap image having sufficient position resolution can be obtained. Hereinafter, the contour tracking processing and the noise removal processing are performed using the data of the two-dimensional bitmap image.

第9圖(a)是表示輪廓跟蹤處理的規則的圖。輪廓跟蹤處理是跟蹤2維位元映像中的黑白交界的處理,輪廓跟蹤處理的規則是決定根據1個黑資料的位置搜索具有下一個黑資料的位置時的順序的規則。區別黑資料和白資料的二值化處理係使用相對於資料的灰階值的預定的臨限值而進行。 Fig. 9(a) is a diagram showing the rules of the contour tracking processing. The contour tracking processing is processing for tracking the black and white boundary in the two-dimensional bitmap image, and the rule of the contour tracking processing is a rule for determining the order in which the position of the next black data is searched based on the position of one black material. The binarization process that distinguishes the black data from the white data is performed using a predetermined threshold value relative to the grayscale value of the data.

第9圖(a)是表示對於輪廓跟蹤處理公知的規則的圖。該規則中,對於1個黑資料的位置周圍的8個 資料位置,逆時針旋轉依次判斷是否為黑資料,並將最初成為黑資料的資料位置設為下一個黑資料的位置。第9圖(a)的數字1至8係表示根據最初的黑資料的位置搜索下一個黑資料的跟蹤順序,從數字1的位置往數字8的位置依序進行跟蹤。 Fig. 9(a) is a diagram showing a well-known rule for contour tracking processing. In this rule, 8 around the location of 1 black data The data position is rotated counterclockwise to determine whether it is black data, and the data position that originally became black data is set to the position of the next black data. The numbers 1 to 8 of Fig. 9(a) indicate that the tracking order of the next black data is searched based on the position of the original black data, and the position from the position of the number 1 to the position of the number 8 is sequentially followed.

第9圖(b)是對將工件8的投影形狀資料變換成2維位元映像資料的資料,應用(a)的輪廓跟蹤處理的規則,且連接黑白交界的黑資料的位置的圖。折彎線144係表示跟蹤處理的軌跡。塗上斜線的資料位置為黑白交界的黑資料位置,連接該位置的線是1次螺釘輪廓分佈。 Fig. 9(b) is a view showing a rule for converting the projection shape data of the workpiece 8 into two-dimensional bitmap image data, applying the rule of the contour tracking processing of (a), and connecting the black data boundary of the black and white boundary. The bend line 144 represents the trajectory of the tracking process. The data position marked with a slash is the black data position of the black and white border, and the line connecting the position is a screw contour distribution.

最初,進行從2維位元映像的左上位置朝右方向搜索掃描黑資料的有無。在此,藉由從上至第二行的掃描,檢測到最初的黑資料。將該位置設為最初的黑資料的位置145。在該黑資料的位置145的周圍的8個資料位置中,根據(a)的規則搜索成為下一個黑資料的位置。(b)的例子中,從黑資料的位置145觀察成斜下的資料位置、(a)中表示的跟蹤的順序中第四個資料位置為下一個黑資料的位置。反覆進行該搜索,在到達2維位元映像的端部時,輪廓跟蹤結束。 Initially, the presence or absence of scanning black data is searched from the upper left position of the two-dimensional bitmap to the right. Here, the initial black data is detected by scanning from the top to the second line. This position is set to the position 145 of the original black material. Among the eight material positions around the position 145 of the black material, the position to be the next black material is searched according to the rule of (a). In the example of (b), the data position obliquely below is observed from the position 145 of the black data, and the fourth data position in the order of tracking indicated in (a) is the position of the next black data. This search is repeated, and the contour tracking ends when the end of the 2-dimensional bitmap is reached.

第9圖(b)中,在黑資料的位置146、148、150,作為跟蹤處理的軌跡的折彎線144返回。工件8的輪廓形狀中,即使是公螺紋部2,也進行流暢的變化,因此該3個黑資料的位置146、148、150,由於垃圾等存在引起的雜訊的可能性高,且從螺釘的剖面形狀觀察,判斷為 異常。 In Fig. 9(b), at positions 146, 148, and 150 of the black material, the bending line 144 which is the trajectory of the tracking process returns. In the outline shape of the workpiece 8, even if the male thread portion 2 is smoothly changed, the positions 146, 148, and 150 of the three black materials are highly likely due to the presence of garbage or the like, and the screw is high. Observed the shape of the section, judged as abnormal.

第9圖(c)是進行將從螺釘的剖面形狀觀察判斷為異常的3個黑資料的位置146、148、150去除的平滑化處理,生成作為工件8的輪廓形狀看作正常的2次螺釘輪廓分佈的圖。折彎線152未返回而成為單調變化的跟蹤軌跡。在此,作為雜訊判斷基準,使用表示輪廓跟蹤的軌跡的折彎線144中的返回的有無。亦能以折彎線144的方向的變化程度為雜訊判斷基準來代替返回的有無。另外,亦可藉由工件8之視為正常的輪廓形狀之跟蹤軌跡將實際的跟蹤軌跡予以規格化,並使用將視為正常的輪廓形狀的跟蹤軌跡和實際的輪廓形狀之跟蹤軌跡的差量超過預定的臨限值範圍時設為雜訊的雜訊判斷基準。 (c) of FIG. 9 is a smoothing process for removing the positions 146, 148, and 150 of the three pieces of black data determined to be abnormal from the cross-sectional shape of the screw, and generating the secondary screw as the normal shape of the workpiece 8 as normal. A map of the contour distribution. The bend line 152 does not return and becomes a track of monotonous change. Here, as the noise determination criterion, the presence or absence of the return in the bending line 144 indicating the trajectory of the contour tracking is used. It is also possible to replace the return presence with the degree of change in the direction of the bend line 144 as a noise determination criterion. In addition, the actual tracking trajectory can be normalized by the tracking trajectory of the workpiece 8 which is regarded as a normal contour shape, and the difference between the tracking trajectory which is regarded as a normal contour shape and the tracking trajectory of the actual contour shape can be used. When it exceeds the predetermined threshold range, it is set as the noise judgment criterion for noise.

如此,可對藉由公知的輪廓跟蹤處理得到的輪廓分佈資料應用預設的雜訊判斷基準進行去除雜訊的平滑化處理,並算出表示工件8的螺釘輪廓分佈的輪廓資料。 In this way, smoothing processing for removing noise can be performed by applying a preset noise determination reference to the contour distribution data obtained by the known contour tracking processing, and contour data indicating the screw contour distribution of the workpiece 8 can be calculated.

當S16、S18的處理結束時,使用投影攝像照相機38取得的工件8的投影形狀資料,進行各種尺寸測定。工件8具有朝Y方向延伸的形狀,因此一邊使投影攝像照相機38從初始Y位置朝-Y方向下降,一邊依序進行工件8的尺寸測定是有效的。因此,在頭部尺寸測定(S12)和頭部孔深度測定(S14)之後,依據投影攝像照相機38取得的投影形狀資料進行頭部4的高度尺寸測定。該測定係作為後述的全長算出(S26)的一部分而進行。具體而言,如 第6圖所示,測定頭部4的上表面的Y位置Y10和下表面的Y位置Y9When the processes of S16 and S18 are completed, the projection shape data of the workpiece 8 acquired by the projection imaging camera 38 is used, and various dimensional measurements are performed. Since the workpiece 8 has a shape extending in the Y direction, it is effective to sequentially measure the size of the workpiece 8 while lowering the projection imaging camera 38 from the initial Y position toward the -Y direction. Therefore, after the head size measurement (S12) and the head hole depth measurement (S14), the height measurement of the head portion 4 is performed based on the projection shape data acquired by the projection imaging camera 38. This measurement is performed as a part of the full length calculation (S26) which will be described later. Specifically, as shown in Fig. 6, the Y position Y 10 of the upper surface of the head portion 4 and the Y position Y 9 of the lower surface are measured.

在此,為了使表示頭部4的上表面的輪廓資料進入投影攝像照相機38的拍攝面,而控制Y馬達29的運作,並利用感測器30取得Y10的資料值。接著,一邊使工件8以1度間隔繞著軸旋轉360度,一邊對各角度在2維位元映像上求得投影攝像照相機38所取得的頭部4的上表面的輪廓資料的Y方向的位置,例如,以1μm單位算出Y10的精密值。對於對各個角度算出的Y10的精密值,求得最大值、最小值和平均值,將這些值加上來自感測器30的資料值,設為Y10的最大值、最小值、平均值。 Here, in order to cause the outline data indicating the upper surface of the head portion 4 to enter the imaging surface of the projection imaging camera 38, the operation of the Y motor 29 is controlled, and the data value of Y 10 is obtained by the sensor 30. Next, while rotating the workpiece 8 by 360 degrees around the axis at an interval of 1 degree, the Y direction of the contour data of the upper surface of the head 4 acquired by the projection imaging camera 38 is obtained on the two-dimensional bitmap image for each angle. The position, for example, is a precision value of Y 10 calculated in units of 1 μm. For the precision value of Y 10 calculated for each angle, the maximum value, the minimum value, and the average value are obtained, and these values are added to the data value from the sensor 30 to be the maximum value, the minimum value, and the average value of Y 10 . .

同樣地,對於頭部4的下表面,也取得來自感測器30的資料,然後一邊使工件8以1度間隔繞著軸旋轉,一邊在2維位元映像上求得投影攝像照相機38所取得的頭部4的下表面的輪廓資料的Y方向的位置,例如,以1μm單位算出Y9的精密值。對於對各個角度算出的Y9的精密值,求得最大值、最小值和平均值,並將這些值加上來自感測器30的資料值,設為Y9的最大值、最小值、平均值。 Similarly, the data from the sensor 30 is also obtained for the lower surface of the head 4, and then the workpiece 8 is obtained by rotating the workpiece 8 around the axis at an interval of 1 degree, and the projection camera 38 is obtained on the 2-dimensional bitmap. The position of the obtained contour data of the lower surface of the head 4 in the Y direction is calculated, for example, by a precision value of Y 9 in units of 1 μm. For the precision value of Y 9 calculated for each angle, the maximum value, the minimum value, and the average value are obtained, and these values are added to the data value from the sensor 30, and the maximum value, the minimum value, and the average value of Y 9 are set. value.

當頭部4的高度尺寸測定結束時,使Y載物台26沿著Y方向進一步下降,而進行頭下R測定(S20)。頭下R是頭部4和公螺紋部2之間的頭下部的曲率半徑。該處理係藉由運算控制裝置100的頭下R算出部118的功能而執行。具體而言,使用第9圖中說明的方法在2維位 元映像上求得投影攝像照相機38所取得的工件8的頭下部3的輪廓資料。將該輪廓資料在第6圖中作為S20表示工件8的頭下部3。求得將該輪廓資料的R部分兩側的兩條直線形成的角度予以2等分的角度分割線,將從該線垂下至最近的兩條直線的垂線的長度作為頭下R算出。 When the measurement of the height dimension of the head 4 is completed, the Y stage 26 is further lowered in the Y direction, and the head-down R measurement is performed (S20). The under head R is the radius of curvature of the lower portion of the head between the head 4 and the male thread portion 2. This processing is executed by the function of the head-down R calculation unit 118 of the arithmetic control device 100. Specifically, using the method illustrated in Figure 9 in the 2-dimensional position The contour data of the head lower portion 3 of the workpiece 8 obtained by the projection camera 38 is obtained on the meta map. This outline data indicates the lower portion 3 of the workpiece 8 as S20 in Fig. 6 . An angle dividing line that divides the angle formed by the two straight lines on both sides of the R portion of the contour data into two is obtained, and the length of the perpendicular line from the line to the nearest two straight lines is calculated as the head-down R.

第10圖是表示頭下R的算出方法的圖。第10圖(a)是表示工件8的頭下部3的2維位元映像上的輪廓資料160的圖。第10圖(b)是表示求得構成(a)的輪廓資料160的兩條直線162、163,以求得將該兩條直線162、163形成的角度予以2等分的角度分割線164,並從該角度分割線164分別垂下至直線162、163的垂線166、167的圖。 Fig. 10 is a view showing a method of calculating the head R. Fig. 10(a) is a view showing outline data 160 on a two-dimensional bitmap of the lower portion 3 of the workpiece 8. Fig. 10(b) is a view showing the two straight lines 162 and 163 of the outline data 160 of the configuration (a), and the angle dividing line 164 for equally dividing the angle formed by the two straight lines 162 and 163 is obtained. From this angle, the dividing line 164 is suspended to the vertical lines 166, 167 of the straight lines 162, 163.

依據該垂線166、167的長度算出頭下R的值。亦即,使工件8以1度間隔繞著軸旋轉360度,並對各角度分別求得垂線166、167的長度。對於360度,以1度間隔求得,因此垂線的長度值合計求得720個。對於求得的值,將其最大值、最小值、平均值設為頭下R的值。 The value of the head R is calculated from the length of the vertical lines 166 and 167. That is, the workpiece 8 is rotated 360 degrees around the axis at an interval of 1 degree, and the lengths of the vertical lines 166, 167 are obtained for each angle. For 360 degrees, the interval is obtained at 1 degree interval, so the total length value of the vertical line is 720. For the obtained value, the maximum value, the minimum value, and the average value are set to the value of R below the head.

再次返回第5圖,在S20之後,進行頂徑測定(S22)、底徑測定(S24)。頂徑為螺紋頂的外徑尺寸,底徑為螺紋底的內徑尺寸。該處理係藉由運算控制裝置100的螺紋徑算出部110的功能而執行。頂徑測定(S22)和底徑測定(S24)係沿著工件8的公螺紋部2的軸向對複數個部位進行。第6圖中,將進行頂徑測定(S22)和底徑測定(S24)的3個部位的Y位置Y8、Y7、Y6設為S22、S24,並將其表示。測定部位的數量係可根據工件8的公螺紋部2的長度而適 當決定。 Returning to Fig. 5 again, after S20, the top diameter measurement (S22) and the bottom diameter measurement (S24) are performed. The top diameter is the outer diameter of the thread top, and the bottom diameter is the inner diameter of the thread bottom. This processing is executed by the function of the screw diameter calculating unit 110 of the arithmetic control device 100. The top diameter measurement (S22) and the bottom diameter measurement (S24) are performed on a plurality of portions along the axial direction of the male screw portion 2 of the workpiece 8. In Fig. 6, the Y positions Y 8 , Y 7 , and Y 6 of the three portions of the top diameter measurement (S22) and the bottom diameter measurement (S24) are referred to as S22 and S24, and are shown. The number of measurement sites can be appropriately determined depending on the length of the male screw portion 2 of the workpiece 8.

第11圖是表示頂徑測定的方法的圖。第11圖(a)、(c)是表示2維位元映像上的工件8的公螺紋部2的輪廓資料的圖,(b)是(a)的局部放大圖。 Fig. 11 is a view showing a method of measuring the top diameter. Fig. 11 (a) and (c) are diagrams showing outline data of the male screw portion 2 of the workpiece 8 on the two-dimensional pixel map, and Fig. 11 (b) is a partial enlarged view of (a).

第11圖(a)中,表示工件8的公螺紋部2的兩個輪廓資料170、171。兩個輪廓資料170、171是表示工件8的公螺紋部2的左右兩側的輪廓形狀的資料。(b)是(a)的局部放大圖,表示使用該圖求得輪廓資料170的頂部的回歸直線172的方法。頂部的回歸直線172是通過公螺紋部2的複數個頂部頂點的平均位置的直線。 In Fig. 11(a), two outline data 170, 171 of the male screw portion 2 of the workpiece 8 are shown. The two contour data 170 and 171 are data indicating the outline shapes of the left and right sides of the male screw portion 2 of the workpiece 8. (b) is a partial enlarged view of (a), and shows a method of obtaining the regression line 172 at the top of the contour data 170 using the map. The regression line 172 at the top is a straight line passing through the average position of the plurality of top vertices of the male thread portion 2.

當求得回歸直線172時,對輪廓資料170的整體求得處於比回歸直線172更靠外徑側的頂部頂點。這是求得與回歸直線172垂直的線173,並沿著垂直的線173延伸的方向移動回歸直線172的位置。而且,求得與輪廓資料170中的至少1個頂部頂點連接的回歸直線172的移動量的最大值a。移動量係沿著與回歸直線172垂直的線173測定。a是表示從回歸直線172觀察位於輪廓資料170中最外徑側的頂部頂點的位置的值。 When the regression line 172 is obtained, the entire outline data 170 is found to be at the top apex on the outer diameter side of the regression line 172. This is to find the line 173 perpendicular to the regression line 172 and to move the position of the regression line 172 in the direction in which the vertical line 173 extends. Then, the maximum value a of the amount of movement of the regression line 172 connected to at least one top vertex in the contour data 170 is obtained. The amount of movement is measured along line 173 that is perpendicular to the regression line 172. a is a value indicating a position at the top apex on the outermost diameter side of the contour data 170 as viewed from the regression line 172.

接著,如第11圖(c)所示,使回歸直線172沿著與其垂直的線173向輪廓資料171側移動,求得與輪廓資料171中的複數個頂部頂點連接的回歸直線172的移動量的最大值b。b是表示從回歸直線172觀察位於輪廓資料171中最外徑側的頂部頂點的位置的值。頂徑為工件8的公螺紋部2中的頂部外徑,因此(a+b)係相當於工件8 之公螺紋部2的兩個輪廓資料170、171的頂徑值。 Next, as shown in Fig. 11(c), the regression line 172 is moved toward the contour data 171 along the line 173 perpendicular thereto, and the amount of movement of the regression line 172 connected to the plurality of top vertices in the contour data 171 is obtained. The maximum value b. b is a value indicating a position of the top vertex located on the outermost diameter side of the contour data 171 as viewed from the regression line 172. The top diameter is the top outer diameter in the male thread portion 2 of the workpiece 8, so (a+b) corresponds to the workpiece 8 The top diameter value of the two contour data 170, 171 of the male thread portion 2.

在此,使工件8以1度間隔繞著軸旋轉360度,而分別求得各角度的兩個輪廓資料的(a+b)。當求得360個(a+b)的值時,將其最大值、最小值、平均值設為該測定部位的頂徑的測定值。如第6圖所示,對3個測定部位分別進行頂徑的算出。3個測定部位的位置係以大致覆蓋工件8的公螺紋部2的全長的整個區域的方式設定。測定部位的數量也可以是3個以外。例如,也可以為4個以上,也可以為兩個以下。 Here, the workpiece 8 is rotated 360 degrees around the axis at an interval of 1 degree, and (a+b) of the two contour data of each angle is obtained. When 360 (a+b) values are obtained, the maximum value, the minimum value, and the average value are set as the measured values of the top diameter of the measurement site. As shown in Fig. 6, the top diameters were calculated for each of the three measurement sites. The positions of the three measurement sites are set so as to substantially cover the entire area of the entire length of the male screw portion 2 of the workpiece 8. The number of measurement sites may be other than three. For example, it may be four or more, or two or less.

第12圖是表示底徑測定的方法的圖。與第11圖一樣,第12圖(a)、(c)是表示2維位元映像上的工件8的公螺紋部2的輪廓資料的圖,(b)是(a)的局部放大圖。第12圖(a)中與第11圖一樣表示兩個輪廓資料170、171。底部測定與頂部測定類似,不同在於,第12圖(b)所示的回歸直線176為藉由公螺紋部2的複數個底部底點的平均位置的直線。 Fig. 12 is a view showing a method of measuring the bottom diameter. Similarly to Fig. 11, Fig. 12 (a) and (c) are diagrams showing outline data of the male screw portion 2 of the workpiece 8 on the two-dimensional pixel map, and (b) is a partial enlarged view of (a). In Fig. 12(a), two contour data 170, 171 are shown as in Fig. 11. The bottom measurement is similar to the top measurement except that the regression line 176 shown in Fig. 12(b) is a straight line passing through the average position of the plurality of bottom bottom points of the male screw portion 2.

當對底部求得回歸直線176時,如第12圖(b)所示,對輪廓資料170的整體求得位於比回歸直線176更靠內徑側的底部底點的位置。求得與回歸直線176垂直的線177,並沿著垂直的線177延伸的方向移動於回歸直線176的位置。而且,求得與輪廓資料170中的至少1個底部底點連接的回歸直線176的移動量的最大值c。移動量係沿著與回歸直線176垂直的線177而測定。c是表示從回歸直線176觀察位於輪廓資料170中最內徑側的底部 底點的位置的值。 When the regression line 176 is obtained for the bottom portion, as shown in Fig. 12(b), the entire outline data 170 is located at a position closer to the bottom bottom point on the inner diameter side than the regression line 176. A line 177 perpendicular to the regression line 176 is found and moved in a direction in which the vertical line 177 extends in the position of the regression line 176. Then, the maximum value c of the amount of movement of the regression line 176 connected to at least one bottom bottom point in the contour data 170 is obtained. The amount of movement is measured along line 177 that is perpendicular to the regression line 176. c is a view showing the bottom of the innermost diameter side of the contour data 170 as viewed from the regression line 176. The value of the position of the bottom point.

接著,如第12圖(c)所示,使回歸直線176沿著與其垂直的線177朝輪廓資料171側移動,求得與輪廓資料171中的至少1個底部底點連接的回歸直線176的移動量的最大值d。d是表示從回歸直線176觀察位於輪廓資料171中最內徑側的底部底點的位置的值。底徑為工件8的底部的最小內徑,因此(d-c)係相當於工件8的公螺紋部2的兩個輪廓資料170、171的底徑值。 Next, as shown in Fig. 12(c), the regression line 176 is moved toward the contour data 171 along the line 177 perpendicular thereto, and the regression line 176 connected to at least one bottom bottom point in the contour data 171 is obtained. The maximum value d of the amount of movement. d is a value indicating a position at the bottom bottom point on the most inner diameter side of the contour data 171 as viewed from the regression line 176. The bottom diameter is the minimum inner diameter of the bottom of the workpiece 8, so (d-c) corresponds to the bottom diameter values of the two contour data 170, 171 of the male screw portion 2 of the workpiece 8.

在此,使工件8以1度間隔繞著軸旋轉360度,並分別求得各角度的兩個輪廓資料的(d-c)。當求得360個(d-c)的值時,將其最大值、最小值、平均值設為該測定部位的底徑的測定值。底徑測定與頂徑測定係成對進行,底徑的測定部位與頂徑的測定部位相同。 Here, the workpiece 8 is rotated 360 degrees around the axis at an interval of 1 degree, and (d-c) of the two contour data of each angle is obtained. When 360 (d-c) values are obtained, the maximum value, the minimum value, and the average value are used as the measured values of the bottom diameter of the measurement site. The bottom diameter measurement and the top diameter measurement system are performed in pairs, and the measurement site of the bottom diameter is the same as the measurement site of the top diameter.

當算出頂徑的測定值和底徑的測定值時,算出有效徑=(頂徑+底徑)/2。對於有效徑,也算出最大值、最小值和平均值。最大值係根據頂徑的最大值和底徑的最小值而算出,最小值係根據頂徑的最小值和底徑的最大值而算出,平均值係根據頂徑的平均值和底徑的平均值而算出。也可以使用除此以外的算出法進行與有效徑相關的各種算出。 When the measured value of the top diameter and the measured value of the bottom diameter are calculated, the effective diameter = (top diameter + bottom diameter) / 2 is calculated. For the effective diameter, the maximum value, the minimum value, and the average value are also calculated. The maximum value is calculated based on the maximum value of the top diameter and the minimum value of the bottom diameter. The minimum value is calculated from the minimum value of the top diameter and the maximum value of the bottom diameter. The average value is based on the average of the top diameter and the average of the bottom diameter. Calculated by value. Various calculations related to the effective diameter may be performed using other calculation methods.

S22、S24的測定結束時,使Y載物台26進一步下降,進行把持工件8的公螺紋部2的前端部的轉接器80的環規82a的上表面的Y位置Y1的測定。具體而言,可按照與已經說明的頭部4的上表面的Y位置Y10和下表 面的Y位置Y9的測定相同的順序進行。亦即,為了使表示環規82a的上表面的輪廓資料進入投影攝像照相機38的拍攝面,而控制Y馬達29的運作,且利用感測器30來取得Y1的資料值。接著,一邊使工件8以1度間隔繞著軸旋轉360度,一邊在2維位元映像上求得投影攝像照相機38所取得的環規82a的上表面的輪廓資料的Y方向的位置,例如,以1μm單位算出Y1的精密值。對於算出的每1度Y1的精密值,求得最大值、最小值和平均值,將這些值加上來自感測器30的資料值,設為Y1的最大值、最小值、平均值。 When the measurement of S22 and S24 is completed, the Y stage 26 is further lowered, and the Y position Y 1 of the upper surface of the ring gauge 82a of the adapter 80 that grips the distal end portion of the male screw portion 2 of the workpiece 8 is measured. Specifically, it can be performed in the same order as the measurement of the Y position Y 10 of the upper surface of the head 4 and the Y position Y 9 of the lower surface. That is, in order to make data representing the contour of the upper surface of the ring gauge enters the imaging plane of the projection 82a of the imaging camera 38, and the control operation of the motor 29 of the Y, and using the sensor 30 to obtain data values of Y 1. Next, while rotating the workpiece 8 by 360 degrees around the axis at an interval of 1 degree, the position in the Y direction of the contour data of the upper surface of the ring gauge 82a obtained by the projection imaging camera 38 is obtained on the two-dimensional bitmap image, for example. The precision value of Y 1 was calculated in units of 1 μm. For the calculated precision value per degree Y 1 , the maximum value, the minimum value, and the average value are obtained, and these values are added to the data values from the sensor 30 to be the maximum value, the minimum value, and the average value of Y 1 . .

再次返回第5圖,接著進行全長算出(S26)。該處理係藉由運算控制裝置100的全長算出部112的功能而執行。具體而言,依據已經測定的Y位置Y10、Y9、Y1的值,以及環規82a的基準母螺紋83a和工件8的公螺紋部2的前端部的預定的嚙合長度、即3個螺距的長度=5.25mm,算出工件8的全長。公螺紋部2的全長係作為{(Y9-Y1)+5.25mm}算出。也包含頭部4的工件8的全長係作為{(Y10-Y1)+5.25mm}算出。全長算出中,依據Y10、Y9、Y1各自的最大值、最小值、平均值,算出全長的最大值、最小值、平均值。例如,公螺紋部2的全長的最大值係根據Y9的最大值和Y1的最小值而算出,公螺紋部2的全長的平均值係根據Y9的平均值和Y1的平均值而算出。也可以使用除此以外的算出法進行與全長相關的各種算出。 Returning to Fig. 5 again, the full length calculation is performed (S26). This processing is executed by the function of the total length calculating unit 112 of the arithmetic control device 100. Specifically, based on the values of the Y positions Y 10 , Y 9 , and Y 1 that have been measured, and the predetermined engagement lengths of the reference female threads 83a of the ring gauge 82a and the front end portion of the male screw portion 2 of the workpiece 8, that is, three The length of the pitch was 5.25 mm, and the total length of the workpiece 8 was calculated. The total length of the male screw portion 2 is calculated as {(Y 9 -Y 1 )+5.25 mm}. The entire length of the workpiece 8 including the head 4 is calculated as {(Y 10 -Y 1 )+5.25 mm}. In the full-length calculation, the maximum value, the minimum value, and the average value of the full length are calculated from the maximum value, the minimum value, and the average value of each of Y 10 , Y 9 , and Y 1 . For example, the maximum value of the total length of the male screw portion 2 is calculated based on the maximum value of Y 9 and the minimum value of Y 1 , and the average value of the total length of the male screw portion 2 is based on the average value of Y 9 and the average value of Y 1 . Calculated. Various calculations related to the full length may be performed using other calculation methods.

當全長算出(S26)結束時,進行工件8的各 種尺寸的測定資料輸出(S28)。該處理係藉由運算控制裝置100的測定資料輸出部124的功能而執行。具體而言,藉由S12的頭部尺寸測定、S14的頭部孔深度測定、S20的頭下R測定、S22的頂徑測定、S24的底徑測定、S26的全長算出而得到的各種尺寸的最大值、最小值、平均值等根據預定的檢查表的格式記錄於預定的記錄部位,並作為檢查表106從輸出裝置104列印輸出。 When the full length calculation (S26) is completed, each of the workpieces 8 is performed. The measurement data of the size is output (S28). This processing is executed by the function of the measurement data output unit 124 of the arithmetic control device 100. Specifically, the size of the head is measured by S12, the head hole depth measurement of S14, the head R measurement of S20, the measurement of the top diameter of S22, the measurement of the bottom diameter of S24, and the calculation of the total length of S26. The maximum value, the minimum value, the average value, and the like are recorded in a predetermined recording position in accordance with a predetermined check list format, and are printed as an inspection table 106 from the output device 104.

如此,根據螺釘尺寸自動測定系統10,可自動地測定與螺釘相關的各種尺寸,且可將其測定結果作為預定格式的檢查表自動輸出。 As described above, according to the screw size automatic measurement system 10, various sizes related to the screw can be automatically measured, and the measurement result can be automatically output as a checklist of a predetermined format.

上述中,藉由光學性且非接觸進行頭部孔深度的測定。取而代之,為接觸式,但可以使用螺釘檢查用的頭部孔鑽頭,進行頭部孔深度的測定。第13圖是表示在工件8中將頭部孔鑽頭180插入工件8的頭部孔6中,並利用投影攝像照相機38攝像其狀態,依據所取得的投影形狀資料算出頭部孔深度D的方法的圖。第13圖(a)是剖視圖,(b)是俯視圖。 In the above, the measurement of the depth of the head hole is performed optically and non-contact. Instead, it is a contact type, but the head hole depth for screw inspection can be used to measure the depth of the head hole. Fig. 13 is a view showing a method of inserting the head hole drill bit 180 into the head hole 6 of the workpiece 8 in the workpiece 8, and capturing the state by the projection imaging camera 38, and calculating the head hole depth D based on the obtained projection shape data. Figure. Fig. 13 (a) is a cross-sectional view, and (b) is a plan view.

螺釘檢查用的頭部孔鑽頭180係構成為包含頭部孔嵌合部182、外形為圓板狀的凸緣部184、把持用圓筒部186、圓錐頂部188。為了將頭部孔鑽頭180插入工件8的頭部孔6,可藉由如下方式進行,亦即,利用兩分度卡盤等把持凸緣部184和把持用圓筒部186,輸送至頭部孔6的上方,然後解除兩分度卡盤等的把持,並使頭部孔鑽頭180落下。在使頭部孔鑽頭180朝工件8的頭部孔 6落下時,較佳為從圓錐頂部188的上方側向下方側壓入。兩分度卡盤的頭部孔鑽頭180的把持和其解除、圓錐頂部188的壓入也可使用藉由從空氣壓力控制裝置102供給的空氣壓而動作的活塞氣缸機構等自動地進行。 The head hole drill bit 180 for screw inspection is configured to include a head hole fitting portion 182, a flange portion 184 having a disk shape, a holding cylindrical portion 186, and a conical top portion 188. In order to insert the head hole drill bit 180 into the head hole 6 of the workpiece 8, the gripping flange portion 184 and the holding cylindrical portion 186 can be conveyed to the head by using a two-division chuck or the like. Above the hole 6, the holding of the two-division chuck or the like is released, and the head hole drill bit 180 is dropped. At the head hole of the workpiece 8 with the head hole drill bit 180 When it is dropped, it is preferable to press it from the upper side to the lower side of the conical top 188. The gripping and releasing of the head hole drill bit 180 of the two-division chuck and the press-fitting of the conical top portion 188 can be automatically performed using a piston-cylinder mechanism or the like that operates by the air pressure supplied from the air pressure control device 102.

頭部孔鑽頭180的頭部孔嵌合部182的高度尺寸G和形狀係可根據工件8的種類而變更。其他凸緣部184、把持用圓筒部186、圓錐頂部188的尺寸和形狀係可不論工件8的種類而設為相同。 The height dimension G and shape of the head hole fitting portion 182 of the head hole drill bit 180 can be changed depending on the type of the workpiece 8. The size and shape of the other flange portion 184, the holding cylindrical portion 186, and the conical top portion 188 can be made the same regardless of the type of the workpiece 8.

將頭部孔鑽頭180插入工件8的頭部孔6的狀態下,利用投影攝像照相機38進行拍攝,依據該輪廓資料,可算出工件8的頭部的上表面和頭部孔鑽頭180的凸緣部184的下表面之間之沿著Y方向的間隔尺寸Y2。依據算出的間隔尺寸Y2和頭部孔鑽頭180的頭部孔嵌合部182的高度尺寸G,可作為頭部孔深度尺寸D=(G-Y2)算出。 When the head hole drill bit 180 is inserted into the head hole 6 of the workpiece 8, the projection camera 38 performs imaging, and based on the contour data, the upper surface of the head of the workpiece 8 and the flange of the head hole drill bit 180 can be calculated. The spacing dimension Y 2 along the Y direction between the lower surfaces of the portions 184. Calculated based on the size of the interval and height dimension Y 2 G bit head bore head portion 180 of the fitting hole 182, as the head bore depth dimension D = (GY 2) is calculated.

第14圖是表示根據工件8的種類而異的頭部孔鑽頭的圖。在此,表示與3個工件8的種類對應的頭部孔鑽頭,除此以外的不同種類的工件8的頭部孔鑽頭也可設為相同的構造。在第14圖(a)中,在工件8的螺紋的標稱為M12的情況下,與第13圖中說明的頭部孔鑽頭180相同。 Fig. 14 is a view showing a head hole drill which differs depending on the type of the workpiece 8. Here, the head hole drill corresponding to the type of the three workpieces 8 is shown, and the head hole drills of the different types of workpieces 8 other than the above may have the same structure. In Fig. 14(a), in the case where the thread of the workpiece 8 is nominally M12, it is the same as the head hole drill 180 described in Fig. 13.

第14圖(b)是表示工件8的螺紋的標稱為M6時的頭部孔鑽頭180b的圖。凸緣部184、把持用圓筒部186、圓錐頂部188與(a)相同。頭部孔嵌合部182b的形 狀和尺寸與(a)不同。第4圖(c)是表示工件8的螺紋的標稱為M3時的頭部孔鑽頭180c的圖。凸緣部184、把持用圓筒部186、圓錐頂部188係與(a)、(b)相同。頭部孔嵌合部182c的形狀和尺寸係與(a)、(b)不同。 Fig. 14(b) is a view showing the head hole drill bit 180b when the thread of the workpiece 8 is nominally M6. The flange portion 184, the holding cylindrical portion 186, and the conical top portion 188 are the same as (a). Shape of the head hole fitting portion 182b The shape and size are different from (a). Fig. 4(c) is a view showing the head hole drill bit 180c when the thread of the workpiece 8 is nominally M3. The flange portion 184, the holding cylindrical portion 186, and the conical top portion 188 are the same as (a) and (b). The shape and size of the head hole fitting portion 182c are different from those of (a) and (b).

如此,藉由使頭部孔嵌合部182以外的要素的形狀和尺寸共同化,則不論工件8的種類為何,均可共同地使用把持頭部孔鑽頭180、180b、180c的兩分度卡盤等。 By combining the shape and the size of the elements other than the head hole fitting portion 182, the two-division card for holding the head hole drills 180, 180b, and 180c can be used in common regardless of the type of the workpiece 8. Disk and so on.

第15圖是實施形態的另一例的構成螺釘尺寸自動測定系統的螺釘尺寸自動測定裝置12a的主要部分的前視圖。第16圖是第15圖的螺釘尺寸自動測定裝置12a的右側視圖。第17圖(a)是螺釘尺寸自動測定裝置12a的俯視圖,且為表示使頭部攝像照相機42退避至右側的狀態的圖,第17圖(b)是表示使頭部攝像照相機42移動至攝像位置的狀態的俯視圖。第18圖是在螺釘尺寸自動測定裝置12a的俯視圖中省略了頭部攝像照相機42的圖。 Fig. 15 is a front elevational view showing the main part of the automatic screw size measuring device 12a constituting the automatic screw size measuring system of another example of the embodiment. Fig. 16 is a right side view of the automatic screw size measuring device 12a of Fig. 15. Fig. 17 (a) is a plan view of the screw size automatic measuring device 12a, and shows a state in which the head imaging camera 42 is retracted to the right side, and Fig. 17 (b) shows that the head imaging camera 42 is moved to the imaging. Top view of the state of the location. Fig. 18 is a view in which the head imaging camera 42 is omitted in a plan view of the screw size automatic measuring device 12a.

在另一例的螺釘尺寸自動測定系統中,防振台14、框體15、基台16、運算控制裝置100、空氣壓力控制裝置102及輸出裝置104(參照第1圖)的基本構成係與第1圖至第12圖所示的構成相同。另一例的構成螺釘尺寸自動測定系統的螺釘尺寸自動測定裝置12a為龍門型。具體而言,在螺釘尺寸自動測定裝置12a的形成基台16的上表面的上表面板16a上,豎立設置並固定有外形為四角柱的柱構件190。柱構件190係如第17圖所示,從Y方向觀 察時的形狀為大致矩形。在柱構件190的正面(第15圖的正前側面、第16圖的左側面、第17圖(a)的下側面)安裝有升降致動器192。 In another automatic screw size measuring system of the other example, the basic configuration of the vibration isolating table 14, the frame 15, the base 16, the arithmetic control device 100, the air pressure control device 102, and the output device 104 (see Fig. 1) The configurations shown in Fig. 1 to Fig. 12 are the same. Another example of the automatic screw size measuring device 12a constituting the automatic screw size measuring system is a gantry type. Specifically, on the upper surface plate 16a of the upper surface of the base 16 on which the screw size automatic measuring device 12a is formed, a column member 190 having a quadrangular prism shape is erected and fixed. The column member 190 is as shown in Fig. 17, viewed from the Y direction The shape of the inspection is roughly rectangular. A lifting actuator 192 is attached to the front surface of the column member 190 (the front side surface of Fig. 15, the left side surface of Fig. 16, and the lower side surface of Fig. 17(a)).

升降致動器192包含固定於柱構件190的正面(+X方向側)的致動器殼體194、螺紋軸(未圖示)、Y馬達29a、螺帽構件(未圖示)。致動器殼體194是在上下方向、即Y方向較長的長條狀。在致動器殼體194的上表面固定有Y馬達29a的殼體,在從Y馬達29a向下方(-Y方向)延伸的輸出軸,螺紋軸係在致動器殼體194內沿著-Y方向延伸配置,而可旋轉地支承於致動器殼體194。由此,螺紋軸係藉由Y馬達29a的旋轉而旋轉。Y馬達29a的驅動係藉由運算控制裝置100(第1圖)而被控制。在柱構件190的-X側(第15圖的背側,第16圖的左側,第17圖(a)的上側),以可朝Y方向移動之方式支承有形成後述的鑽頭夾緊單元210的升降構件212。 The lift actuator 192 includes an actuator case 194 fixed to the front surface (+X direction side) of the column member 190, a screw shaft (not shown), a Y motor 29a, and a nut member (not shown). The actuator case 194 is elongated in the vertical direction, that is, in the Y direction. A housing of the Y motor 29a is fixed to the upper surface of the actuator housing 194, and an output shaft extending downward (-Y direction) from the Y motor 29a is threaded in the actuator housing 194 along - The Y-direction extends and is rotatably supported by the actuator housing 194. Thereby, the threaded shaft is rotated by the rotation of the Y motor 29a. The drive of the Y motor 29a is controlled by the arithmetic control device 100 (Fig. 1). On the -X side of the column member 190 (the back side of Fig. 15, the left side of Fig. 16, and the upper side of Fig. 17 (a)), the bit clamping unit 210, which will be described later, is supported so as to be movable in the Y direction. Lifting member 212.

在致動器殼體194的正面側(+X側)的Z方向兩端部,沿著Y方向大致遍及全長地形成有平行的兩個導向孔195。而且,Y工作台196係沿著Y方向而可移動地支承於致動器殼體194上。Y工作台196是沿著YZ平面的大致平板狀的移動工作台。為了在第15圖中易於理解,以砂地表示Y工作台196。 In the Z-direction end portions on the front side (+X side) of the actuator casing 194, two parallel guide holes 195 are formed substantially in the Y direction over the entire length. Further, the Y table 196 is movably supported on the actuator housing 194 in the Y direction. The Y table 196 is a substantially flat moving table along the YZ plane. For ease of understanding in Fig. 15, the Y table 196 is shown in sand.

致動器殼體194內的螺帽構件係經由複數個滾珠與螺紋軸的螺紋部而嚙合,而構成滾珠螺桿機構。在螺帽構件的Z方向兩端部形成有平行的兩個滑動腳部 198(第17圖(a))。各滑動腳部198係藉由導向孔195從致動器殼體194向外側突出。而且,在各滑動腳部198的前端部固定有Y工作台196。由此,藉由Y馬達29a的旋轉,Y工作台196係可沿著Y方向移動。升降致動器192係構成使Y工作台196相對於基台16向Y方向移動的軸向移動部。 The nut member in the actuator housing 194 is engaged with the threaded portion of the threaded shaft via a plurality of balls to constitute a ball screw mechanism. Two parallel sliding legs are formed at both ends of the nut member in the Z direction 198 (Fig. 17 (a)). Each of the sliding leg portions 198 protrudes outward from the actuator housing 194 by a guide hole 195. Further, a Y table 196 is fixed to the front end portion of each of the sliding leg portions 198. Thereby, the Y table 196 can be moved in the Y direction by the rotation of the Y motor 29a. The lift actuator 192 constitutes an axial movement portion that moves the Y table 196 in the Y direction with respect to the base 16 .

另外,如第16圖所示,在致動器殼體194的+Z側端部安裝有線性標度方式的位置感測器200。亦即,位置感測器200檢測出Y工作台196的Y方向位置。位置感測器200係只要光學性或磁性地且高精度地檢測安裝於例如Y工作台196上的移動構件202的Y方向位置即可。例如對於磁性的位置感測器200,在移動構件202安裝有流過電流的勵磁線圈和檢測線圈,在固定於致動器殼體194的固定側構件204的Y方向複數個位置配置有固定側線圈(未圖示)。在移動構件202係沿著Y方向移動的情況下,移動構件202的勵磁線圈及檢測線圈與複數個固定側線圈之一個接近並相對向,並根據檢測線圈的兩端的電壓變化來檢測移動構件202的位置。表示移動構件202的檢測位置的信號係發送至運算控制裝置100(第1圖)。 Further, as shown in Fig. 16, a linear scale type position sensor 200 is attached to the +Z side end portion of the actuator casing 194. That is, the position sensor 200 detects the Y-direction position of the Y table 196. The position sensor 200 is only required to detect the Y-direction position of the moving member 202 attached to, for example, the Y table 196 optically or magnetically and with high precision. For example, in the magnetic position sensor 200, the exciting coil and the detecting coil through which the current flows are attached to the moving member 202, and are fixed at a plurality of positions in the Y direction of the fixed side member 204 fixed to the actuator housing 194. Side coil (not shown). In the case where the moving member 202 is moved in the Y direction, the exciting coil and the detecting coil of the moving member 202 are close to and opposed to one of the plurality of fixed-side coils, and the moving member is detected based on the voltage change at both ends of the detecting coil. 202 location. A signal indicating the detection position of the moving member 202 is transmitted to the arithmetic and control device 100 (Fig. 1).

光學測量裝置32a係支承於Y工作台196的正面(+X方向)側。光學測量裝置32a係構成為包含圖像投影部34a和頭部測量部40a。圖像投影部34a具有:固定於Y工作台196的正面側且在Z方向上較長的下側固定工作台230、固定於下側固定工作台230的-Z側端部的光源 36、支承於下側固定工作台230的+Z側端部的投影攝像照相機38。 The optical measuring device 32a is supported on the front (+X direction) side of the Y table 196. The optical measuring device 32a is configured to include an image projecting unit 34a and a head measuring unit 40a. The image projecting unit 34a has a lower fixed table 230 that is fixed to the front side of the Y table 196 and that is long in the Z direction, and a light source that is fixed to the -Z side end of the lower fixed table 230. 36. A projection imaging camera 38 supported by the +Z side end of the lower fixed table 230.

Z移動工作台232係在Z方向可移動地支承於下側固定工作台230。Z移動工作台232係藉由線性致動器234相對於下側固定工作台230沿著Z方向移動。線性致動器234包含電動馬達和滾珠螺桿機構,藉由電動馬達的旋轉,使經由滾珠與滾珠螺桿機構的螺紋軸嚙合的螺帽構件沿著Z方向移動。Z移動工作台232係固定於螺帽構件,藉由螺帽構件的Z方向的移動,Z移動工作亦朝Z方向移動。電動馬達係由運算控制裝置100所控制。由此,藉由電動馬達的旋轉,投影攝像照相機38係沿著+Z方向或-Z方向進行移動。利用線性致動器234和Z移動工作台232構成合焦移動部50。投影攝像照相機38和光源36係夾持作為攝像對象的螺釘的工件8,並在Z方向相對向。作為構成線性致動器的電動馬達,可使用AC伺服馬達或步進馬達。 The Z moving table 232 is movably supported by the lower fixed table 230 in the Z direction. The Z moving table 232 is moved in the Z direction by the linear actuator 234 with respect to the lower fixed table 230. The linear actuator 234 includes an electric motor and a ball screw mechanism, and the nut member that meshes with the threaded shaft of the ball screw mechanism via the ball is moved in the Z direction by the rotation of the electric motor. The Z moving table 232 is fixed to the nut member, and the Z moving operation also moves in the Z direction by the movement of the nut member in the Z direction. The electric motor is controlled by the arithmetic control device 100. Thereby, the projection imaging camera 38 moves in the +Z direction or the -Z direction by the rotation of the electric motor. The focus moving unit 50 is constituted by the linear actuator 234 and the Z moving table 232. The projection imaging camera 38 and the light source 36 hold the workpiece 8 as a screw to be imaged, and are opposed to each other in the Z direction. As the electric motor constituting the linear actuator, an AC servo motor or a stepping motor can be used.

工件8係與第1圖至第13圖的構成一樣,螺入轉接器80的環規82c,轉接器80係由緊固卡盤70所保持。緊固卡盤70的支承台72係固定於相對於基台16沿著上下方向延伸的旋轉構件236的上側。 The workpiece 8 is screwed into the ring gauge 82c of the adapter 80 in the same manner as the first to the thirteenth drawings, and the adapter 80 is held by the fastening chuck 70. The support base 72 of the fastening chuck 70 is fixed to the upper side of the rotating member 236 that extends in the vertical direction with respect to the base 16 .

旋轉構件236的下端繞Y軸係可旋轉地支承於在基台16上固定的旋轉接頭238。在固定於旋轉構件236的Y方向中間部的皮帶輪240和固定於θ馬達64的輸出軸的皮帶輪242架設有皮帶244,θ馬達64係在基台 16的上表面板16a的下側向+Z方向(第15圖中的右側)偏離固定。由此,藉由θ馬達64的旋轉,經由皮帶244使旋轉構件236旋轉,緊固卡盤70會與工件8一起繞Y軸旋轉。只要能使支承台72旋轉,亦可是任意構成。 The lower end of the rotating member 236 is rotatably supported around the Y-axis to a rotary joint 238 fixed to the base 16. A pulley 244 is attached to the pulley 240 fixed to the intermediate portion of the rotating member 236 in the Y direction and the pulley 242 fixed to the output shaft of the θ motor 64. The θ motor 64 is attached to the base. The lower side of the upper surface plate 16a of 16 is offset from the +Z direction (the right side in Fig. 15). Thereby, the rotation member 236 is rotated via the belt 244 by the rotation of the θ motor 64, and the fastening chuck 70 is rotated about the Y-axis together with the workpiece 8. As long as the support base 72 can be rotated, it can be configured arbitrarily.

投影攝像照相機38係接收來自光源36的平行光線並使成為工件8的影像的投影形狀在與XY平面平行的拍攝面上成像進行拍攝。 The projection imaging camera 38 receives the parallel light from the light source 36 and causes the projection shape of the image to be the workpiece 8 to be imaged on the imaging surface parallel to the XY plane.

配置於工件8的上方的頭部測量部40a具有:在Y工作台196的正面側(+X側)固定於下側固定工作台230的上側的上側固定工作台250、安裝於上側固定工作台250的正面側的頭部照相機移動部252、頭部攝像照相機42。頭部照相機移動部252具有:在前端部固定有頭部攝像照相機42的桿部254、使桿部254沿著Z方向伸縮的活塞氣缸機構256。活塞氣缸機構256係由運算控制裝置100(第1圖)所控制,藉由由空氣壓力控制裝置102(第1圖)供給的空氣壓可使活塞在Z方向往返移動。在活塞上固定有桿部254,藉由活塞朝-Z方向移動,頭部攝像照相機42亦朝-Z方向移動,藉由活塞朝+Z方向移動,頭部攝像照相機42亦朝+Z方向移動。由此,頭部攝像照相機42可在至少如第17圖(a)所示那樣從XZ平面的工件8的位置P朝+Z方向退避的位置係如第17圖(b)所示那樣工件的位置P的正上方位置這兩個位置之間移動。 The head measuring unit 40a disposed above the workpiece 8 has an upper fixed table 250 that is fixed to the upper side of the lower fixed table 230 on the front side (+X side) of the Y table 196, and is attached to the upper fixed table. The head camera moving unit 252 on the front side of the 250 and the head imaging camera 42 are provided. The head camera moving unit 252 has a rod portion 254 to which the head imaging camera 42 is fixed at the distal end portion, and a piston cylinder mechanism 256 that expands and contracts the rod portion 254 in the Z direction. The piston cylinder mechanism 256 is controlled by the arithmetic control device 100 (Fig. 1), and the piston is reciprocated in the Z direction by the air pressure supplied from the air pressure control device 102 (Fig. 1). A rod portion 254 is fixed to the piston, and the head camera camera 42 is also moved in the -Z direction by the piston moving in the -Z direction, and the head camera camera 42 is also moved in the +Z direction by the piston moving in the +Z direction. . Thereby, the head imaging camera 42 can be retracted from the position P of the workpiece 8 in the XZ plane toward the +Z direction as shown in Fig. 17 (a), as shown in Fig. 17 (b). The position directly above the position P moves between the two positions.

頭部攝像照相機42係與第1圖至第12圖所示的構成一樣,取得工件8的頭部的形狀的拍攝資料,並 算出頭部的直徑尺寸、頭部孔6(參照第3圖)的對邊寬度尺寸等。頭部測量部40a係與第1圖至第12圖的構成不同,既不包含用於測定工件8的頭部孔深度的雷射光源,也不包含移動雷射光源的致動器。取而代之,螺釘尺寸自動測定裝置12a包含夾緊頭部孔鑽頭180(第19圖)而使之移動的鑽頭夾緊單元210。 The head imaging camera 42 acquires imaging data of the shape of the head of the workpiece 8 in the same manner as the configuration shown in FIGS. 1 to 12, and The diameter of the head, the size of the opposite side of the head hole 6 (see Fig. 3), and the like are calculated. Unlike the configurations of Figs. 1 to 12, the head measuring unit 40a does not include a laser light source for measuring the head hole depth of the workpiece 8, and does not include an actuator for moving the laser light source. Instead, the screw size automatic measuring device 12a includes a bit clamping unit 210 that clamps the head hole drill bit 180 (Fig. 19) and moves it.

第19圖是表示第15圖的左側視圖中的鑽頭夾緊單元210的圖。如第15圖、第17圖、第19圖所示,鑽頭夾緊單元210具有安裝於柱構件190的-Z側(第15圖、第17圖(a)的左側、第19圖的正前側)且在Y方向較長的導向構件214、升降構件212。第19圖中省略了柱構件190及升降致動器192的圖示。 Fig. 19 is a view showing the bit clamping unit 210 in the left side view of Fig. 15. As shown in Fig. 15, Fig. 17, and Fig. 19, the bit clamping unit 210 is attached to the -Z side of the column member 190 (the left side of Fig. 15, Fig. 17 (a), and the front side of Fig. 19). And a guide member 214 and a lifting member 212 that are long in the Y direction. The illustration of the column member 190 and the lift actuator 192 is omitted in Fig. 19.

升降構件212係在Y方向可移動地支承於導向構件214的-Z側。在升降構件212安裝有可朝X方向伸縮的伸縮臂216。伸縮臂216係藉由活塞氣缸機構218進行伸縮。對活塞氣缸機構218供給的空氣壓係由空氣壓力控制裝置102(第1圖)所控制。在伸縮臂216的前端部,以與工件8的上表面相對向之方式安裝有鑽頭把持部220。鑽頭把持部220是在下端部具有兩個爪部221的兩分度卡盤。兩個爪部221係藉由從空氣壓力控制裝置102供給的空氣壓而動作,而朝鑽頭把持部220的半徑方向移動。兩個爪部221具有:把持工件8的頭部孔深度測定用的頭部孔鑽頭180(第19圖)的功能;及在工件8的上方解除頭部孔鑽頭180的把持,由此使頭部孔鑽頭180向頭部 孔6(參照第3圖)落下的功能。 The elevating member 212 is movably supported on the -Z side of the guide member 214 in the Y direction. A telescopic arm 216 that is expandable and contractible in the X direction is attached to the lifting member 212. The telescopic arm 216 is telescoped by a piston cylinder mechanism 218. The air pressure supplied to the piston cylinder mechanism 218 is controlled by the air pressure control device 102 (Fig. 1). A drill grip portion 220 is attached to the front end portion of the telescopic arm 216 so as to face the upper surface of the workpiece 8. The drill grip portion 220 is a two-division chuck having two claw portions 221 at the lower end portion. The two claw portions 221 are operated by the air pressure supplied from the air pressure control device 102, and are moved in the radial direction of the drill grip portion 220. The two claw portions 221 have a function of gripping the head hole drill bit 180 (Fig. 19) for measuring the head hole depth of the workpiece 8; and releasing the grip of the head hole drill bit 180 above the workpiece 8, thereby making the head Hole drill bit 180 to the head The function of the hole 6 (refer to Fig. 3) is dropped.

如第19圖所示,升降構件212係固定於在基台16上支承的上下桿222的前端部。上下桿222係沿著Y方向設置,並藉由活塞氣缸機構224朝Y方向位移。活塞氣缸機構224係由空氣壓力控制裝置102所控制。由此,空氣壓力控制裝置102係控制對鑽頭夾緊單元210的各活塞氣缸機構218、224及鑽頭把持部220供給的空氣壓,由此可使鑽頭把持部220在預定的位置夾緊頭部孔鑽頭180,而移動至X方向及Y方向的預定位置,且在工件8的上方放開頭部孔鑽頭180以落至頭部孔6。 As shown in Fig. 19, the elevating member 212 is fixed to the front end portion of the upper and lower rods 222 supported on the base 16. The upper and lower rods 222 are disposed along the Y direction and are displaced in the Y direction by the piston cylinder mechanism 224. Piston cylinder mechanism 224 is controlled by air pressure control device 102. Thereby, the air pressure control device 102 controls the air pressure supplied to the respective piston-cylinder mechanisms 218, 224 and the bit grip portion 220 of the bit clamping unit 210, whereby the bit grip portion 220 can be clamped to the head at a predetermined position. The hole drill bit 180 is moved to a predetermined position in the X direction and the Y direction, and the head hole drill bit 180 is placed above the workpiece 8 to fall to the head hole 6.

鑽頭夾緊單元210中也可設為如下構成,亦即,在伸縮臂216的前端部安裝雷射光源而作為雷射照射單元,由雷射光源從工件8的頭部的斜上側向該頭部照射雷射。因此,鑽頭夾緊單元210的鑽頭把持部220較佳設為可與包含雷射光源的雷射照射構件交換的構成。 The bit clamping unit 210 may be configured such that a laser light source is attached to the front end portion of the telescopic arm 216 as a laser irradiation unit, and the laser light source is obliquely upward from the head of the workpiece 8 toward the head. The part is illuminated by a laser. Therefore, the drill gripping portion 220 of the drill bit clamping unit 210 is preferably configured to be exchangeable with a laser irradiation member including a laser light source.

根據上述構成,可使投影攝像照相機38移動至Y方向及Z方向的所希望位置,頭部攝像照相機42也可移動至Y方向及Z方向的所希望位置。另外,僅藉由在包含轉接器80和緊固卡盤70的把持部68安裝作為螺釘的工件8,就可自動地測定工件8的軸向及繞軸的各種尺寸。另外,與上述的第5圖的S18的處理一樣,利用運算控制裝置100的輪廓資料算出部116算出輪廓資料後,在測定工件8的高度方向尺寸時,可對根據投影攝像照相機38的輪廓資料算出的Y方向位置、例如Y10的最大值、最 小值和平均值加上位置感測器200的高精度的檢測資料。由此,可更高精度地測定工件8的高度方向尺寸。其它構成及作用與上述第1圖至第12圖所示的構成相同。 According to the above configuration, the projection imaging camera 38 can be moved to a desired position in the Y direction and the Z direction, and the head imaging camera 42 can be moved to a desired position in the Y direction and the Z direction. Further, by attaching the workpiece 8 as a screw to the grip portion 68 including the adapter 80 and the fastening chuck 70, the axial direction of the workpiece 8 and various dimensions around the shaft can be automatically measured. In the same manner as the processing of S18 in the fifth embodiment, the contour data calculation unit 116 of the calculation control device 100 calculates the contour data, and when measuring the height dimension of the workpiece 8, the contour data of the camera camera 38 according to the projection can be obtained. The calculated Y-direction position, for example, the maximum value, the minimum value, and the average value of Y 10 plus the high-precision detection data of the position sensor 200. Thereby, the height direction dimension of the workpiece 8 can be measured with higher precision. Other configurations and operations are the same as those shown in Figs. 1 to 12 described above.

另一方面,在第1圖至第12圖的構成或第15圖至第19圖的構成中,在進行工件8的繞Y軸的尺寸例如頂徑及底徑的測定時,如以下說明那樣,也可考慮異物的附著,而更高精度地進行測定。第20圖是表示在本發明實施形態的另一例的螺釘尺寸自動測定系統中算出輪廓資料後,以預定角度算出頂徑的方法的圖,是第12圖(c)的放大圖。第21圖(a)是利用曲線連結預定角度的頂徑d max及底徑d min的測定資料並藉由與角度θ的關係進行表示的圖,第21圖(b)是作為螺釘的工件8的軸向的局部剖視圖。第22圖表示在預定角度的頂徑d max的測定資料和測定資料的個數的關係中的理想模型的情況(a)和在1例中排除脫離預定範圍的測定資料的情況(b)的圖。 On the other hand, in the configuration of Figs. 1 to 12 or the configuration of Figs. 15 to 19, when the dimensions of the workpiece 8 around the Y axis, for example, the top diameter and the bottom diameter, are measured, as described below. It is also possible to carry out measurement with higher precision in consideration of adhesion of foreign matter. Fig. 20 is a view showing a method of calculating the top diameter at a predetermined angle after calculating the contour data in the automatic screw size measuring system according to another example of the embodiment of the present invention, and is an enlarged view of Fig. 12(c). Fig. 21(a) is a view showing measurement data of a top diameter dmax and a bottom diameter dmin of a predetermined angle by a curve and expressed by a relationship with an angle θ, and Fig. 21(b) is a workpiece 8 as a screw. A partial cutaway view of the axial direction. Fig. 22 is a view showing an ideal model (a) in the relationship between the measurement data of the top diameter d max of the predetermined angle and the number of measurement data, and the case (b) in which the measurement data of the predetermined range is excluded in one example. Figure.

如第20圖所示,求得工件8的頂徑d max及底徑d min時,在工件8的繞Y軸的某個角度算出工件8的兩個輪廓資料170、171後,如上述第1圖至第12圖的構成中說明的那樣,在工件8的公螺紋部2的軸向即Y方向的複數個位置算出工件8的頂徑d max及底徑d min。此時,如上前述,根據與兩個輪廓資料170、171的頂部的頂點連接的回歸直線172、174求得輪廓資料170、171的頂徑d max(=a+b)。另外,以工件8的繞Y軸的每隔預定的角度間隔,例如以每1度間隔求得頂徑d max的測定值。 同樣地,根據與輪廓資料170、171的底部的底點連接的回歸直線求得底徑d min的測定值。 As shown in Fig. 20, when the top diameter d max and the bottom diameter d min of the workpiece 8 are obtained, after the two contour data 170 and 171 of the workpiece 8 are calculated at a certain angle around the Y axis of the workpiece 8, as described above As described in the configuration of Fig. 12 to Fig. 12, the top diameter d max and the bottom diameter d min of the workpiece 8 are calculated at a plurality of positions in the Y direction of the male screw portion 2 of the workpiece 8 . At this time, as described above, the top diameter d max (= a + b) of the contour data 170, 171 is obtained from the regression lines 172, 174 connected to the vertices of the tops of the two contour data 170, 171. Further, the measured value of the top diameter d max is obtained at intervals of every 1 degree, for example, at predetermined angular intervals around the Y axis of the workpiece 8. Similarly, the measured value of the bottom diameter dmin is obtained from the regression line connected to the bottom point of the bottom of the contour data 170, 171.

此時,對於頂徑d max及底徑d min,當根據每隔預定的角度間隔的各角度的測定資料的組的整體分別求得最大值、最小值及平均值時,在工件8上附著有異物的情況下,可能產生大的誤差。具體而言,如第21圖(b)所示,可能在工件8的公螺紋部2上附著塵土、灰塵等異物11。第21圖(a)中,以縱軸表示頂徑d max、底徑d min,以橫軸表示測定時的工件8的繞Y軸的旋轉角度θ。此時,如依據上述異物11的附著而由單點劃線Q1、Q2包圍表示的部分那樣,較大地偏離頂徑d max及底徑d min各自的全測定資料的平均值da、db,而產生誤差。另外,在重複數次相同的運算處理而求得頂徑d max及底徑d min的情況下,可能使一部分角度θ的測定資料的誤差增大,且最終求得的計算值較大地偏離正確的值。由於這種情況,對頂徑d max及底徑d min進行下表面的過濾處理,而代替從每隔預定的角度間隔的測定資料的組的整體求得頂徑d max及底徑d min的最大值、最小值及平均值。過濾處理中,從測定資料的組中排除一部分資料,並算出頂徑d max、底徑d min各自的最大值、最小值及平均值。 At this time, for the top diameter d max and the bottom diameter d min , when the maximum value, the minimum value, and the average value are respectively determined from the entire group of measurement data of the respective angles at predetermined angular intervals, the workpiece 8 is attached. In the case of foreign matter, a large error may occur. Specifically, as shown in FIG. 21( b ), foreign matter 11 such as dust or dust may adhere to the male screw portion 2 of the workpiece 8 . In Fig. 21(a), the vertical axis represents the top diameter d max and the bottom diameter d min , and the horizontal axis represents the rotation angle θ of the workpiece 8 around the Y axis at the time of measurement. At this time, the average value da, db of the total measurement data of each of the top diameter d max and the bottom diameter d min is largely deviated from the portion indicated by the one-dot chain lines Q1 and Q2 in accordance with the adhesion of the foreign matter 11 described above. An error has occurred. Further, when the same calculation processing is repeated several times to obtain the top diameter d max and the bottom diameter d min , the error of the measurement data of a part of the angle θ may be increased, and the calculated value finally obtained may be largely deviated correctly. Value. In this case, the top surface d max and the bottom diameter d min are subjected to the filtering process of the lower surface, and the top diameter d max and the bottom diameter d min are obtained instead of the entire group of the measurement data at intervals of every predetermined angle. Maximum, minimum, and average. In the filtration process, a part of the data is excluded from the group of measurement data, and the maximum value, the minimum value, and the average value of the top diameter d max and the bottom diameter d min are calculated.

該過濾處理中,首先考慮沒有異物11向工件8的公螺紋部2附著的理想模型的測定資料的分佈。此時,如第22圖(a)所示,在以橫軸表示頂徑d max,以縱軸表示測定資料的個數的情況下,頂徑d max的測定資料成 為正態分佈。“理想模型”可根據測定對象的螺釘的設計尺寸預先設定。另一方面,在工件8的公螺紋部2上具有異物附著的1例中,測定資料如第22圖(b)所示那樣分佈。具體而言,第22圖(b)中,由於異物的存在,如實線α所示,平均值da1及眾數db1係從由虛線β表示的理想模型的平均值da向正側偏離。理想模型的眾數與平均值da相同。 In the filtering process, first, the distribution of the measurement data of the ideal model in which the foreign matter 11 is not attached to the male screw portion 2 of the workpiece 8 is considered. In this case, as shown in Fig. 22(a), when the top diameter d max is represented by the horizontal axis and the number of measurement data is indicated by the vertical axis, the measurement data of the top diameter d max is Is a normal distribution. The "ideal model" can be set in advance according to the design size of the screw to be measured. On the other hand, in one example in which the foreign thread is attached to the male screw portion 2 of the workpiece 8, the measurement data is distributed as shown in Fig. 22(b). Specifically, in Fig. 22(b), due to the presence of foreign matter, as indicated by the solid line α, the average value da1 and the mode db1 are deviated from the average value da of the ideal model indicated by the broken line β toward the positive side. The mode of the ideal model is the same as the mean da.

而且,作為過濾處理,運算控制裝置100係以預先設定的理想模型的測定資料的平均值da為基準,從工件8的每隔預定的角度間隔的輪廓資料的工件8的頂徑d max的測定資料組中排除頂徑d max的測定資料的一部分。而且,依據頂徑d max的測定資料的剩餘的組算出頂徑d max的值,例如最大值。 Further, as the filtering process, the arithmetic and control device 100 measures the top diameter d max of the workpiece 8 from the contour data of the workpiece 8 at predetermined angles, based on the average value da of the measurement data of the predetermined ideal model. A part of the measurement data excluding the top diameter d max in the data set. Further, the value of the top diameter d max , for example, the maximum value, is calculated from the remaining group of the measurement data of the top diameter d max .

具體而言,在過濾處理中,將用於排除一部分資料的下限臨限值即下限臨界值和作為上限臨限值的上限臨界值,以各自理想模型的平均值da為基準,且作為與標準偏差σ成比例的範圍設定。此時,作為可變更K的任意的比例常數,將從理想模型的平均值da向下側和上側偏離K σ的值分別設為下限臨界值(da-K σ)、上限臨界值(da+K σ)。例如K設為1.0或1.2或0.7等任意的數。而且,如第22圖(b)所示,在實線α所示的頂徑d max的測定資料的曲線中,排除脫離從下限臨界值(da-K σ)至上限臨界值(da+K σ)的範圍的測定資料(第22圖(b)的斜線部)。而且,依據測定資料的剩餘的群組,算出頂徑d max 的值,例如頂徑d max的最大值、最小值和平均值。對於底徑d min,也與頂徑d max一樣,設定上限臨界值、下限臨界值,並排除脫離從下限臨界值至上限臨界值的範圍的測定資料,算出底徑d min的值,例如底徑的最大值、最小值和平均值。而且,運算控制裝置100係使對頂徑d max、底徑d min算出的值在輸出裝置104(參照第1圖)中印表輸出。 Specifically, in the filtering process, the lower limit threshold value for excluding a part of the data, that is, the lower limit threshold value and the upper limit threshold value as the upper limit threshold value are based on the average value da of the respective ideal models, and as a standard The range in which the deviation σ is proportional is set. In this case, as an arbitrary proportional constant that can change K, the values from the average value d of the ideal model to the upper side and the upper side are set to the lower limit critical value (da-K σ) and the upper limit critical value (da+). K σ). For example, K is set to an arbitrary number such as 1.0 or 1.2 or 0.7. Further, as shown in Fig. 22(b), in the curve of the measurement data of the top diameter d max indicated by the solid line α, the exclusion from the lower limit critical value (da-K σ) to the upper limit critical value (da+K) is excluded. Measurement data of the range of σ) (hatched portion of Fig. 22(b)). Moreover, the top diameter d max is calculated based on the remaining groups of the measured data. The value of, for example, the maximum value, the minimum value, and the average value of the top diameter d max . For the bottom diameter d min , the upper limit critical value and the lower limit critical value are set as well as the top diameter d max , and the measurement data deviating from the lower limit critical value to the upper limit critical value is excluded, and the value of the bottom diameter d min is calculated, for example, the bottom The maximum, minimum, and average values of the diameter. Further, the arithmetic and control unit 100 outputs the values calculated for the top diameter d max and the bottom diameter d min in the output device 104 (see FIG. 1).

根據上述構成,可更高精度地算出工件8的繞Y軸的尺寸的值。例如,如第22圖(b)中斜線部所示,對頂徑d max排除低於下限臨界值的測定資料及超過上限臨界值的測定資料,因此可減少異物11的影響,而得到更接近頂徑d max的正確的值的最大值、最小值及平均值。需要說明的是,上述中,將平均值da至下限臨界值的大小和平均值da至上限臨界值的大小設為相同的值K σ,但也可使各自的大小不同。例如也可將比例常數設為兩個不同的值K1、K2,將下限臨界值設為(da-K1 σ),且將上限臨界值設為(da+K2 σ)。此時,也可使上限臨界值的比例常數K2比下限臨界值的比例常數K1 σ小。另外,也可在上限臨界值及下限臨界值的設定中不使用標準偏差σ,而將上限臨界值及下限臨界值設定成分別根據工件8的設計尺寸而預先設定的任意值。 According to the above configuration, the value of the dimension of the workpiece 8 around the Y axis can be calculated with higher precision. For example, as shown by the hatched portion in Fig. 22(b), the measurement data lower than the lower limit threshold value and the measurement data exceeding the upper limit critical value are excluded from the top diameter d max , so that the influence of the foreign matter 11 can be reduced, and the effect is closer. The maximum, minimum, and average values of the correct values of the top diameter d max . In addition, in the above, the magnitude of the average value da to the lower limit critical value and the magnitude of the average value da to the upper limit critical value are set to the same value K σ , but the respective sizes may be different. For example, the proportional constant may be set to two different values K1 and K2, the lower limit critical value may be set to (da-K1 σ), and the upper limit critical value may be set to (da+K2 σ). At this time, the proportional constant K2 of the upper limit critical value may be made smaller than the proportional constant K1 σ of the lower limit critical value. Further, the standard deviation σ may not be used in the setting of the upper limit threshold value and the lower limit threshold value, and the upper limit threshold value and the lower limit threshold value may be set to arbitrary values that are set in advance according to the design size of the workpiece 8.

另外,在上述第9圖所示的例子中,說明了進行工件8的輪廓跟蹤處理,在2維位元映像的資料中去除判斷為異常的資料,且進行平滑化處理而生成螺釘輪廓 分佈的情況。另一方面,也可如下那樣在2維位元映像的1次螺釘輪廓分佈中,藉由進行低通濾波而進行平滑化處理,並生成2次螺釘輪廓分佈。 Further, in the example shown in the ninth embodiment, the contour tracking processing of the workpiece 8 is performed, and the data determined to be abnormal is removed from the data of the two-dimensional bitmap image, and the smoothing processing is performed to generate the screw contour. Distribution situation. On the other hand, in the primary screw profile distribution of the two-dimensional bitmap, the smoothing process can be performed by low-pass filtering, and the screw contour distribution can be generated twice.

第23圖是表示在對工件8的預定角度的輪廓資料進行低通濾波的情況下,工件8的1次螺釘輪廓分佈(a)和過濾處理後的2次螺釘輪廓分佈(b)的圖。1次螺釘輪廓分佈是沿著工件8的軸向連續的測定資料的軌跡。 Fig. 23 is a view showing the primary screw contour distribution (a) of the workpiece 8 and the secondary screw contour distribution (b) after the filtering process in the case where the contour data of the predetermined angle of the workpiece 8 is low-pass filtered. The primary screw profile distribution is a trajectory of the measured data continuously along the axial direction of the workpiece 8.

第23圖中,在1次螺釘輪廓分佈中,藉由低通濾波進行異物的附著引起的異常部分及雜訊的去除。具體而言,運算控制裝置100係根據第9圖中所示的黑白的二值化的交界的黑資料求得輪廓資料。運算控制裝置100係將使工件8繞Y軸旋轉時得到的每隔預定的角度間隔的輪廓資料中,沿著工件8的Y方向連續的測定資料的軌跡設定為1次螺釘輪廓分佈。再者,藉由對1次螺釘輪廓分佈進行預先設定的預定頻率的低通濾波,來進行平滑化處理,並求得工件8的每隔預定的角度間隔的輪廓資料即2次螺釘輪廓分佈。由此,運算控制裝置100進行螺釘輪廓分佈中的異常部分及雜訊的去除。 In Fig. 23, in one screw contour distribution, abnormal portions and noise removal due to adhesion of foreign matter are performed by low-pass filtering. Specifically, the arithmetic and control unit 100 obtains contour data based on the black data of the boundary of the black and white binarization shown in FIG. The calculation control device 100 sets the trajectory of the measurement data continuous in the Y direction of the workpiece 8 to the primary screw contour distribution in the contour data of every predetermined angular interval obtained when the workpiece 8 is rotated about the Y axis. Further, smoothing processing is performed by performing low-pass filtering of a predetermined predetermined frequency on the screw contour distribution, and the contour data of the workpiece 8 at predetermined angular intervals, that is, the secondary screw contour distribution is obtained. Thereby, the arithmetic and control device 100 performs the removal of the abnormal portion and the noise in the screw contour distribution.

例如,作為1次螺釘輪廓分佈,有時得到第23圖(a)之由實線γ表示的曲線。該曲線γ中,依據雜訊的高頻的波形曲線與沿著螺釘輪廓的低頻的波形曲線重疊。另外,曲線γ中,由單點劃線Q3包圍的部分中,異物附著於公螺紋,該異物附著的部分也成為高頻的波形。運算控制裝置100係對曲線γ進行低通濾波,以留下沿著 作為軸向的Y方向預先設定的預定頻率fA以下的頻率波形,並去除高於預定頻率fA的頻率的波形。預定頻率fA係以從依據測定對象的螺釘的設計尺寸的理想模型的螺釘的螺距提高某個程度的方式預先設定。由此,從曲線γ的1次輪廓分佈,去除依據雜訊及異物的高頻的波形,如第23圖(b)之由實線δ表示的曲線般,得到低頻的平穩的波形的2次輪廓分佈。 For example, as a primary screw profile distribution, a curve indicated by a solid line γ in Fig. 23(a) may be obtained. In the curve γ, the waveform of the high frequency according to the noise overlaps with the waveform of the low frequency along the outline of the screw. Further, in the portion of the curve γ surrounded by the one-dot chain line Q3, the foreign matter adheres to the male screw, and the portion to which the foreign matter adheres also has a high-frequency waveform. The arithmetic control device 100 performs low-pass filtering on the curve γ to leave along A waveform having a frequency equal to or lower than a predetermined frequency fA set in advance in the Y direction of the axial direction, and a waveform having a frequency higher than the predetermined frequency fA is removed. The predetermined frequency fA is set in advance so as to increase the pitch of the screw from the ideal model of the design size of the screw to be measured. Thereby, the waveform of the high frequency according to the noise and the foreign matter is removed from the primary contour distribution of the curve γ, and the curve represented by the solid line δ in Fig. 23(b) is obtained twice, and the smooth waveform of the low frequency is obtained twice. Contour distribution.

該2次輪廓分佈係根據各角度而求得。而且,如上述第11圖、第12圖或第21圖、22中所示的構成,依據各角度的輪廓分佈,算出工件8的繞Y軸的尺寸,例如頂徑、底徑、各自的最大值、最小值及平均值。而且,運算控制裝置100係將對頂徑、底徑算出的值在輸出裝置104(參照第1圖)中列印輸出。 The secondary contour distribution is obtained from each angle. Further, as shown in the above-described 11th, 12th, or 21st and 22th, the size of the workpiece 8 around the Y-axis, for example, the top diameter, the bottom diameter, and the maximum of each, is calculated based on the contour distribution of each angle. Value, minimum, and average. Further, the arithmetic and control device 100 prints and outputs the value calculated for the top diameter and the bottom diameter in the output device 104 (see FIG. 1).

此外,上述第23圖所示的低通濾波器進行的處理也可以設為如下處理,亦即,對1次輪廓分佈進行傅立葉變換,去除超過預定頻率fA的高頻成分後,進行逆傅立葉變換,由此得到第23圖(b)的曲線δ般的曲線。例如傅立葉變換可設為高速傅立葉變換(FFT),逆傅立葉變換可設為逆高速傅立葉變換(IFFT)。另外,上述中說明了對工件8的公螺紋部2的輪廓分佈進行低通濾波的情況。另一方面,在工件8的公螺紋部2以外的部分,例如在第10圖的頭下R的輪廓資料160中具有高頻的雜訊或異物產生的異常部分的情況下,也可以進行低通濾波而減小或消除雜訊及異物的影響。 Further, the processing performed by the low-pass filter shown in FIG. 23 may be a process of performing Fourier transform on the primary contour distribution, removing high-frequency components exceeding the predetermined frequency fA, and performing inverse Fourier transform. Thus, a curve of the curve δ of Fig. 23(b) is obtained. For example, the Fourier transform can be set as a fast Fourier transform (FFT), and the inverse Fourier transform can be set as an inverse fast Fourier transform (IFFT). Further, the case where the contour distribution of the male screw portion 2 of the workpiece 8 is low-pass filtered has been described above. On the other hand, in a portion other than the male screw portion 2 of the workpiece 8, for example, when the contour data 160 of the head R below the figure 10 has a high-frequency noise or an abnormal portion generated by a foreign matter, it may be low. Filtering reduces or eliminates the effects of noise and foreign matter.

第23圖中說明了在工件8的輪廓分佈中對Y方向進行低通濾波的情況。另一方面,也可在第23圖(a)的1次輪廓分佈或第23圖(b)的2次輪廓分佈中,預測繞Y軸的角度θ的偏離引起的Y方向位置的偏離。而且,也以依據藉由該預測的偏離而修正的點,對X方向位置的軌跡進行低通濾波。具體而言,運算控制裝置100係如上述,對於第9圖的黑白的二值化的交界的黑資料,使工件8繞Y軸旋轉時,將得到的每隔預定的角度間隔的輪廓資料設定為1次螺釘輪廓分佈。而且,運算控制裝置100對工件8的每隔預定的角度間隔的輪廓分佈,依據工件8每隔預定角度進行的偏離來預測Y方向的偏離。而且,運算控制裝置100對應工件8的繞Y軸的角度,對根據藉由預測的偏離修正的點而預測的點的X方向位置的軌跡進行低通濾波。而且,藉由在1次輪廓分佈的複數個點反覆進行該操作,以生成過濾處理後的2次螺釘輪廓分佈。另外,運算控制裝置100係依據過濾處理後的輪廓分佈來算出工件8的繞Y軸的尺寸的值。而且,運算控制裝置100係使對繞Y軸的尺寸算出的值在輸出裝置104(參照第1圖)中列印輸出。 Fig. 23 illustrates the case where the Y direction is low-pass filtered in the contour distribution of the workpiece 8. On the other hand, in the primary contour distribution of Fig. 23(a) or the secondary contour distribution of Fig. 23(b), the deviation in the Y-direction position due to the deviation of the angle θ around the Y-axis may be predicted. Further, the trajectory of the X-direction position is also low-pass filtered based on the point corrected by the deviation of the prediction. Specifically, the arithmetic control device 100 sets the contour data of every predetermined angular interval obtained when the workpiece 8 is rotated about the Y axis as described above with respect to the black data of the binarized boundary of the black and white in FIG. 9 . 1 screw contour distribution. Further, the arithmetic control device 100 predicts the deviation of the Y direction from the contour distribution of the workpiece 8 at predetermined angular intervals in accordance with the deviation of the workpiece 8 at predetermined angles. Further, the arithmetic and control device 100 performs low-pass filtering on the trajectory of the X-direction position of the point predicted based on the predicted offset deviation point in accordance with the angle of the workpiece 8 around the Y-axis. Moreover, this operation is repeated by a plurality of points of the contour distribution once to generate the secondary screw contour distribution after the filtering process. Further, the arithmetic and control unit 100 calculates the value of the dimension of the workpiece 8 around the Y axis based on the contour distribution after the filtering process. Further, the arithmetic and control device 100 prints and outputs the value calculated for the size around the Y axis in the output device 104 (see FIG. 1).

第24圖是表示求得工件8的預定角度的輪廓資料時利用低通濾波器進行X方向的異常部分的去除的情況下,每隔預定角度旋轉工件8時的1次螺釘輪廓分佈的變化的圖。第25圖(a)是表示在工件8的輪廓分佈的一部分之點,對預定角度的X方向位置的軌跡進行低通濾波 時的過濾處理前的軌跡(a)和過濾處理後的軌跡(b)的圖。 Fig. 24 is a view showing the change of the screw contour distribution once when the workpiece 8 is rotated every predetermined angle in the case where the contour portion of the predetermined angle of the workpiece 8 is obtained and the abnormal portion in the X direction is removed by the low-pass filter. Figure. Fig. 25(a) is a diagram showing the low-pass filtering of the trajectory of the X-direction position of the predetermined angle at a point of a part of the contour distribution of the workpiece 8. A map of the trajectory (a) before the filtering process and the trajectory (b) after the filtering process.

如第24圖(a)、(b)、(c)中所示,考慮使工件8每隔預定角度且朝同方向旋轉而形成角度θ 1、θ 2、θ 3的情況。在該情況下,工件8的公螺紋部2為螺旋形狀,因此1次螺釘輪廓分佈係沿著Y方向逐漸偏離。另外,各預定角度每個輪廓分佈係有時皆朝X方向及Y方向偏離。例如,頂部的複數個頂點G1、G3、G5……及底部的底點G2、G4……中,係著眼於1個頂部的頂點G3。此時,頂點G3朝Y方向的偏離係依據測定對象的螺釘的螺距如L1、L2般被預先預測。由此,藉由該偏離L1、L2進行修正且根據將X方向位置設為與點G3相同的點G3a、G3b,將在預定距離內存在的頂點預測為各角度θ 1、θ 2的點G3。第24圖中,各角度θ 1、θ 2的點G3係從點G3a、G3b朝X方向偏離D1、D2。而且,對於角度θ,該預測的頂點G3的X方向位置的軌跡係以第25圖(a)的η 1表示。第25圖(a)的橫軸表示工件8的繞Y軸的旋轉角度θ,縱軸為頂點G3的X方向位置。 As shown in Fig. 24 (a), (b), and (c), it is considered that the workpiece 8 is rotated at the predetermined angle and in the same direction to form the angles θ 1 , θ 2, and θ 3 . In this case, since the male screw portion 2 of the workpiece 8 has a spiral shape, the primary screw profile distribution gradually deviates in the Y direction. In addition, each contour distribution of each predetermined angle is sometimes deviated in the X direction and the Y direction. For example, among the plurality of vertices G1, G3, G5, ... at the top and the bottom points G2, G4, ... at the bottom, attention is paid to the vertex G3 of one top. At this time, the deviation of the vertex G3 in the Y direction is predicted in advance based on the pitch of the screw to be measured, such as L1 and L2. Thus, the correction is performed by the deviations L1 and L2, and the vertices existing at the predetermined distance are predicted as the points G3 of the respective angles θ 1 and θ 2 based on the points G3a and G3b having the same position in the X direction as the point G3. . In Fig. 24, the point G3 of each angle θ 1 and θ 2 deviates from D1 and D2 in the X direction from points G3a and G3b. Further, with respect to the angle θ, the trajectory of the X-direction position of the predicted vertex G3 is represented by η 1 of Fig. 25(a). The horizontal axis of Fig. 25(a) shows the rotation angle θ of the workpiece 8 about the Y axis, and the vertical axis represents the position of the vertex G3 in the X direction.

從第25圖(a)可知,頂點G3的X方向位置的軌跡即曲線η 1中,係依據雜訊的高頻的波形曲線與低頻的波形曲線重疊。另外,曲線η 1中,由單點劃線Q4包圍的部分中,由於異物對工件8的公螺紋部的附著而成為高頻波形。 As can be seen from Fig. 25(a), in the curve η 1 which is the trajectory of the position of the vertex G3 in the X direction, the waveform of the high frequency according to the noise overlaps with the waveform of the low frequency. Further, in the portion of the curve η 1 surrounded by the one-dot chain line Q4, the foreign matter is attached to the male screw portion of the workpiece 8 to form a high-frequency waveform.

運算控制裝置100係對曲線η 1沿著Y方向進行低通濾波,以留下預先設定的預定頻率fB以下的頻 率的波形,並去除超過預定頻率fB的頻率的波形。預定頻率fB係根據測定對象的螺釘的螺距、導程等預定設計尺寸預先設定。由此,從曲線η 1去除依據雜訊及異物的高頻的波形,如第25圖(b)的曲線η 2般,去除異物的影響而使之平滑化。需要說明的是,對於頂點G3的X方向位置的軌跡,理想而言,X方向位置為一定的直線,但在工件8的緊固卡盤70(第1圖或第15圖)進行的保持狀態下,工件8可能相對於上下方向(Y方向)稍微傾斜。如此,在工件8傾斜的情況下,如第25圖(b)所示,X方向位置易於成為曲線。上述第24圖、第25圖中表示的構成在工件8傾斜的這種情況下,在減小雜訊及異物的影響的點上是有效的。 The arithmetic control device 100 performs low-pass filtering on the curve η 1 along the Y direction to leave a frequency below a predetermined frequency fB set in advance. The waveform of the rate and the waveform of the frequency exceeding the predetermined frequency fB is removed. The predetermined frequency fB is set in advance according to a predetermined design size such as a pitch of a screw to be measured, a lead, and the like. Thereby, the waveform of the high frequency according to the noise and the foreign matter is removed from the curve η 1 , and the influence of the foreign matter is removed and smoothed as in the curve η 2 of FIG. 25( b ). In addition, it is preferable that the trajectory of the X-direction position of the vertex G3 is a constant straight line, but the holding state of the fastening chuck 70 (Fig. 1 or Fig. 15) of the workpiece 8 is maintained. Next, the workpiece 8 may be slightly inclined with respect to the up and down direction (Y direction). As described above, when the workpiece 8 is inclined, as shown in Fig. 25(b), the position in the X direction is liable to become a curve. The configuration shown in Figs. 24 and 25 described above is effective in reducing the influence of noise and foreign matter in the case where the workpiece 8 is inclined.

而且,運算控制裝置100係對於包含第24圖的頂點G3以外的頂部的頂點G1、G5……及底部的底點G2、G4……且輪廓分佈的複數個位置的X方向位置,也與頂點G3一樣進行低通濾波。而且,運算控制裝置100係依據各頂點及各底點生成各角度θ的過濾處理後的2次螺釘輪廓分佈。由此,在2次螺釘輪廓分佈中,進行異物的附著引起的異常部分及雜訊的去除。而且,運算控制裝置100係依據過濾處理後的各角度θ的2次輪廓分佈,按照第11圖、第12圖或第21圖、22中所示的構成算出工件8的繞Y軸的尺寸,例如頂徑、底徑各自的最大值、最小值及平均值。 Further, the arithmetic control device 100 is also associated with the vertices G1, G5, ... including the tops of the vertices G3 of Fig. 24 and the bottom points G2, G4, ... of the bottom, and the X-direction positions of the plurality of positions of the contour distribution, and also the vertices. The G3 performs low-pass filtering as well. Further, the arithmetic control device 100 generates a secondary screw contour distribution after the filtering process of each angle θ in accordance with each vertex and each bottom point. Thereby, in the secondary screw profile distribution, the abnormal portion due to the adhesion of the foreign matter and the removal of the noise are performed. Further, the calculation control device 100 calculates the size of the workpiece 8 around the Y axis in accordance with the configuration shown in FIG. 11 , FIG. 12 or FIGS. 21 and 22 in accordance with the secondary contour distribution of each angle θ after the filtering process. For example, the maximum value, the minimum value, and the average value of the top diameter and the bottom diameter.

需要說明的是,在上述第25圖所示的利用 低通濾波器進行處理的情況下,也可使用傅立葉變換及逆傅立葉變化。具體而言,也可對第25圖(a)所示的輪廓分佈的X方向位置的軌跡進行傅立葉變換,去除超過預定頻率fA的高頻成分後,進行逆傅立葉變換,由此進行得到第25圖(b)般之曲線的處理。此時,使用FFT作為傅立葉變換,也可使用IFFT作為逆傅立葉變換。 It should be noted that the utilization shown in the above FIG. 25 is used. In the case of processing by the low-pass filter, Fourier transform and inverse Fourier transform can also be used. Specifically, the trajectory of the X-direction position of the contour distribution shown in FIG. 25( a ) may be Fourier-transformed, and the high-frequency component exceeding the predetermined frequency fA may be removed, and then inverse Fourier transform may be performed to obtain the 25th. The processing of the curve of Figure (b). At this time, using FFT as the Fourier transform, IFFT can also be used as the inverse Fourier transform.

第26圖是表示用於固定工件的轉接器的另一例的與第4圖對應的圖。在第3圖、第4圖中說明的構成中,在固定工件8的轉接器80中,為了以1個螺距長度單位精確地調整工件8的公螺紋部2向環規82a的螺入深度,使用墊片84a、84b、84c。另一方面,在第1圖至第25圖所示的構成的任一構成中,如第26圖所示,也可設為轉接器80d不夾持墊片的構成。 Fig. 26 is a view corresponding to Fig. 4 showing another example of the adapter for fixing the workpiece. In the configuration explained in Figs. 3 and 4, in the adapter 80 for fixing the workpiece 8, the screw depth of the male screw portion 2 of the workpiece 8 to the ring gauge 82a is precisely adjusted in units of one pitch length. The spacers 84a, 84b, 84c are used. On the other hand, in any of the configurations shown in Figs. 1 to 25, as shown in Fig. 26, the adapter 80d may be configured not to sandwich the spacer.

在第26圖所示的轉接器80d中,作為環規82a的另一端面的下表面與支架86的止動凸緣部90的上表面抵接。 In the adapter 80d shown in Fig. 26, the lower surface of the other end surface of the ring gauge 82a is in contact with the upper surface of the stopper flange portion 90 of the bracket 86.

此時,支架86的公螺紋92a從下方螺入環規82a的基準母螺紋83a。在該情況下,環規82a的下端至公螺紋92a的上端的長度與公螺紋92a從止動凸緣部90的上表面的突出高度HS相同。而且,在轉接器80d中,可從基準母螺紋83a的上側螺入工件8的公螺紋部2(參照第3圖、第4圖)的長度即螺入長度Lw為{(環規82a的厚度DR)-(支架86的公螺紋92a的突出高度HS)}。該螺入長度Lw設定成基準母螺紋83a的螺距Pc的整數倍(=N× Pc)。在此,N為任意整數。 At this time, the male screw 92a of the bracket 86 is screwed into the reference female screw 83a of the ring gauge 82a from below. In this case, the length from the lower end of the ring gauge 82a to the upper end of the male screw 92a is the same as the protruding height HS of the male screw 92a from the upper surface of the stopper flange portion 90. Further, in the adapter 80d, the length of the male screw portion 2 (see FIGS. 3 and 4) of the workpiece 8 can be screwed from the upper side of the reference female screw 83a, that is, the screw length Lw is {(ring gauge 82a) Thickness DR) - (protruding height HS of the male thread 92a of the bracket 86)}. The screw length Lw is set to an integral multiple of the pitch Pc of the reference female thread 83a (=N× Pc). Here, N is an arbitrary integer.

另外,也可以將N1、N2設為任意整數,並將環規82a的厚度DR設定為基準母螺紋83a的螺距Pc的整數倍(=N1×Pc),且支架86的公螺紋92a的突出高度Hs也設定為螺距Pc的整數倍(=N2×Pc)。 Further, N1 and N2 may be arbitrary integers, and the thickness DR of the ring gauge 82a may be set to an integral multiple (= N1 × Pc) of the pitch Pc of the reference female screw 83a, and the protruding height of the male screw 92a of the bracket 86 may be set. Hs is also set to an integral multiple of the pitch Pc (= N2 × Pc).

在將支架86與環規82a結合的情況下,將支架86的公螺紋92a從環規82a的下表面側螺入環規82a的基準母螺紋83a。另外,從環規82a的上表面側將第3圖所示的工件8的公螺紋部2的前端部螺入環規82a的基準母螺紋83a,且將工件8的公螺紋部2的前端與支架86的公螺紋92a的前端抵接。由此,將工件8固定於環規82a。此時,如上前述,將環規82a的上側的螺入長度Lw設為基準母螺紋83a的螺距Pc的整數倍。該螺入長度Lw為工件8的公螺紋部2與環規82a嚙合的嚙合長度Lw,能以1個螺距的長度單位精確地調整。例如,在將(環規82a的厚度DR)設為8個螺距的長度且將支架86的公螺紋92a的突出高度Hs設為5個螺距的情況下,工件8的公螺紋部2的嚙合長度Lw可調整成3個螺距的長度。因此,可根據環規82a的上表面的Y位置的測定值精確地求得工件8的公螺紋部2的前端部的Y位置。 When the bracket 86 is coupled to the ring gauge 82a, the male thread 92a of the bracket 86 is screwed into the reference female thread 83a of the ring gauge 82a from the lower surface side of the ring gauge 82a. Further, the front end portion of the male screw portion 2 of the workpiece 8 shown in Fig. 3 is screwed into the reference female screw 83a of the ring gauge 82a from the upper surface side of the ring gauge 82a, and the front end of the male screw portion 2 of the workpiece 8 is The front end of the male screw 92a of the bracket 86 abuts. Thereby, the workpiece 8 is fixed to the ring gauge 82a. At this time, as described above, the screw length Lw of the upper side of the ring gauge 82a is set to be an integral multiple of the pitch Pc of the reference female screw 83a. The screw length Lw is an engagement length Lw at which the male screw portion 2 of the workpiece 8 meshes with the ring gauge 82a, and can be accurately adjusted in units of lengths of one pitch. For example, in the case where (the thickness DR of the ring gauge 82a) is set to a length of 8 pitches and the protruding height Hs of the male screw 92a of the bracket 86 is set to 5 pitches, the meshing length of the male thread portion 2 of the workpiece 8 Lw can be adjusted to the length of 3 pitches. Therefore, the Y position of the front end portion of the male screw portion 2 of the workpiece 8 can be accurately determined from the measured value of the Y position of the upper surface of the ring gauge 82a.

另外,作為工件8,即使在使用相同規格的螺釘的情況下,由於在前端部具有不完整螺紋部等原因,有時公螺紋部2的前端部也不能與基準母螺紋83a充分嚙合。考慮到這種情況,轉接器80d中,較佳準備上側的螺 入長度Lw為螺距Pc的不同的整數倍的多種轉接器。 Further, even when the screw of the same specification is used as the workpiece 8, the tip end portion of the male screw portion 2 may not be sufficiently meshed with the reference female screw 83a due to the fact that the distal end portion has an incomplete thread portion or the like. In view of this situation, in the adapter 80d, it is preferable to prepare the upper side screw A plurality of adapters having a length Lw that is a different integer multiple of the pitch Pc.

另外,如第3圖、第4圖所示構成,在環規82a和支架86之間配置墊片84a、84b、84c而調整螺釘的嚙合長度的構成中,提高墊片的尺寸精度是非常重要的。另一方面,提高墊片的尺寸精度比提高厚度較大的環規82a的尺寸精度的情況難。由此,在使用墊片的構成中,與第26圖的構成相比,測定精度可能變低。另外,墊片比環規82a易於變形。根據第26圖的構成,與使用墊片的構成的情況相比,可提高測定精度。特別是若是螺距Pc較小的小螺釘,則較佳為使用以更高精度的形狀進行嚙合的構件,在該點上,第26圖的構成是有利的。另外,可省略墊片,因此可實現成本降低。例如,沒有墊片的高精度的轉接器的製造成本,有時與高精度的墊片的製造成本大致同程度。 Further, as shown in Figs. 3 and 4, in the configuration in which the spacers 84a, 84b, and 84c are disposed between the ring gauge 82a and the bracket 86 to adjust the meshing length of the screw, it is important to improve the dimensional accuracy of the spacer. of. On the other hand, it is difficult to increase the dimensional accuracy of the spacer than to increase the dimensional accuracy of the ring gauge 82a having a large thickness. Therefore, in the configuration using the spacer, the measurement accuracy may be lower than the configuration of Fig. 26. In addition, the spacer is more easily deformed than the ring gauge 82a. According to the configuration of Fig. 26, the measurement accuracy can be improved as compared with the case of using the configuration of the spacer. In particular, in the case of a small screw having a small pitch Pc, it is preferable to use a member that engages with a shape with higher precision. In this point, the configuration of Fig. 26 is advantageous. In addition, the gasket can be omitted, so that cost reduction can be achieved. For example, the manufacturing cost of a high-precision adapter without a gasket is sometimes about the same as the manufacturing cost of a high-precision gasket.

10‧‧‧螺釘尺寸自動測定系統 10‧‧‧Automatic screw size measurement system

12‧‧‧螺釘尺寸自動測定裝置 12‧‧‧Automatic screw size measuring device

14‧‧‧防振台 14‧‧‧Anti-vibration table

15‧‧‧框體 15‧‧‧ frame

16‧‧‧基台 16‧‧‧Abutment

18、19‧‧‧柱部 18, 19‧‧ ‧ pillar

20‧‧‧頂板部 20‧‧‧ top board

22、23‧‧‧導軌 22, 23‧‧‧ rails

24、25‧‧‧螺紋柱 24, 25‧‧ ‧ threaded column

26‧‧‧Y載物台 26‧‧‧Y stage

27、28‧‧‧軸承部 27, 28‧‧ ‧ bearing department

29‧‧‧Y馬達 29‧‧‧Y motor

30‧‧‧感測器 30‧‧‧ Sensor

31‧‧‧皮帶 31‧‧‧Land

32‧‧‧光學測量裝置 32‧‧‧Optical measuring device

34‧‧‧圖像投影部 34‧‧‧Image Projection Department

36‧‧‧光源 36‧‧‧Light source

38‧‧‧攝像照相機 38‧‧‧Photo Camera

40‧‧‧頭部測量部 40‧‧‧ Head Measurement Department

42‧‧‧頭部攝像照相機 42‧‧‧ head camera

44‧‧‧雷射光源 44‧‧‧Laser light source

46‧‧‧環形照明部 46‧‧‧Circular Lighting Department

48‧‧‧安裝板 48‧‧‧Installation board

50‧‧‧合焦移動部 50‧‧‧Focus Moving Department

52‧‧‧Z載物台 52‧‧‧Z stage

54‧‧‧Z馬達 54‧‧‧Z motor

56‧‧‧退避移動部 56‧‧‧Removal of the mobile department

58‧‧‧X載物台 58‧‧‧X stage

60‧‧‧活塞氣缸機構 60‧‧‧Piston cylinder mechanism

62‧‧‧把持旋轉部 62‧‧‧ Holding the rotating part

64‧‧‧θ馬達 64‧‧ θ motor

66‧‧‧旋轉接頭部 66‧‧‧Rotary joints

68‧‧‧把持部 68‧‧‧The Department of Control

70‧‧‧緊固卡盤 70‧‧‧ fastening chuck

80‧‧‧轉接器 80‧‧‧Adapter

100‧‧‧運算控制裝置 100‧‧‧ arithmetic control device

102‧‧‧空氣壓力控制裝置 102‧‧‧Air pressure control device

104‧‧‧輸出裝置 104‧‧‧Output device

106‧‧‧檢查表 106‧‧‧Checklist

110‧‧‧螺紋徑算出部 110‧‧‧Thread diameter calculation unit

112‧‧‧全長算出部 112‧‧‧Full-time calculation department

114‧‧‧合焦位置算出部 114‧‧‧Focus position calculation unit

116‧‧‧輪廓資料算出部 116‧‧‧ Outline Data Calculation Department

118‧‧‧頭下R算出部 118‧‧‧The first R calculation department

120‧‧‧頭部尺寸算出部 120‧‧‧ Head size calculation department

122‧‧‧頭部孔深度算出部 122‧‧‧ Head hole depth calculation unit

124‧‧‧測定資料輸出部 124‧‧‧Measurement data output department

Claims (13)

一種螺釘尺寸自動測定系統,係以螺釘為測定對象工件,前述螺釘尺寸自動測定系統包括:把持部,把持前述工件的公螺紋的軸向的一端;把持旋轉部,繞著軸向360度旋轉驅動前述把持部;光學測量裝置,光學性且非接觸地測量被前述把持部把持前述公螺紋的軸向的一端的前述工件的尺寸;軸向移動部,使前述光學測量裝置相對於把持部沿著軸向相對性移動;以及運算控制裝置,算出並輸出前述工件的軸向及繞軸的尺寸;其中,前述運算控制裝置係包含:螺紋徑算出部,算出與前述工件的螺紋頂相關的尺寸及與螺紋底相關的尺寸;及全長算出部,算出沿著前述工件的軸向的全長。 An automatic screw measuring system is a workpiece for measuring a screw. The screw size automatic measuring system includes: a grip portion that holds an axial end of the male thread of the workpiece; and a rotating portion that is rotated 360 degrees around the axial direction. The optical measuring device optically and non-contactly measures the size of the workpiece in which one end of the male screw in the axial direction is gripped by the grip portion, and an axial movement portion that causes the optical measuring device to move along the grip portion with respect to the grip portion And an arithmetic control device that calculates and outputs a dimension of the axial direction and the axis of the workpiece; wherein the calculation control device includes a screw diameter calculating unit that calculates a size related to a thread top of the workpiece and The dimension associated with the bottom of the thread; and the full length calculating unit calculates the total length along the axial direction of the workpiece. 如申請專利範圍第1項所述的螺釘尺寸自動測定系統,其中,前述把持部包含:轉接器,具有圓板狀之外形,且在一端面的中心具有預定嚙合長度的母螺紋,前述母螺紋係在螺入前述工件的前述公螺紋的前端部時,能夠固定成使前述工件的軸向不晃動;以及 緊固卡盤,至少以3點夾持固定前述轉接器的外周側面。 The automatic screw size measuring system according to claim 1, wherein the gripping portion comprises: an adapter having a disk-shaped outer shape and a female thread having a predetermined meshing length at a center of the end surface, the mother When the thread is screwed into the front end portion of the male screw of the workpiece, the thread can be fixed so that the axial direction of the workpiece does not shake; Fasten the chuck and clamp the outer peripheral side of the adapter at least 3 points. 如申請專利範圍第2項所述的螺釘尺寸自動測定系統,其中,前述轉接器具有:環規,刻有與前述工件的前述公螺紋的螺紋尺寸對應且具有預定的嚙合精度的基準母螺紋;以及圓板狀的支架,具有與前述環規的基準母螺紋嚙合的前述公螺紋所突出的一端面;其中,前述支架的圓板形狀為不論前述工件的螺釘尺寸為何之共同的形狀。 The automatic screw size measuring system according to claim 2, wherein the adapter has a ring gauge engraved with a reference female thread corresponding to a thread size of the male thread of the workpiece and having a predetermined meshing accuracy. And a disc-shaped bracket having an end surface protruding from the male thread engaged with the reference female thread of the ring gauge; wherein the circular shape of the bracket is a common shape regardless of the screw size of the workpiece. 如申請專利範圍第1項所述的螺釘尺寸自動測定系統,其中,將軸向設為Y方向,將與Y方向垂直的面設為XZ平面,前述螺釘尺寸自動測定系統具備基台,前述基台具有與XZ平面平行的上表面,前述把持部係以可繞著軸向旋轉之方式設置於前述基台的上表面,前述軸向移動部包含搭載有前述光學測量裝置的移動工作台,即相對於基台沿著Y方向能移動至任意Y位置的移動工作台,前述光學測量裝置包含測定前述工件的軸向及繞軸的尺寸的圖像投影部。 The automatic screw size measuring system according to the first aspect of the invention, wherein the axial direction is the Y direction, and the surface perpendicular to the Y direction is the XZ plane, and the screw size automatic measurement system includes a base, and the base The stage has an upper surface parallel to the XZ plane, and the grip portion is provided on the upper surface of the base so as to be rotatable about the axial direction, and the axial movement portion includes a moving table on which the optical measuring device is mounted, that is, The optical measuring device includes an image projection unit that measures the axial direction of the workpiece and the size of the axis around the moving table that can be moved to the Y position in the Y direction with respect to the base. 如申請專利範圍第4項所述的螺釘尺寸自動測定系統,其中,前述圖像投影部具有:光源,相對於前述工件的Y方向中心線配置於Z方向的一側並輸出平行光線;以及遠心光學系統的投影攝像照相機,相對於前述工件的Y方向中心線而配置於Z方向的另一側,接收來自前述光源的前述平行光線,對於成為前述工件的影像的投影形狀,具有與前述光源相同的受光光軸且僅使與光軸平行的成分在與XY平面平行的拍攝面上成像而進行拍攝。 The automatic screw size measuring system according to claim 4, wherein the image projection unit includes a light source that is disposed on one side in the Z direction with respect to a center line of the workpiece in the Y direction and outputs parallel rays; and a telecentric The projection imaging camera of the optical system is disposed on the other side in the Z direction with respect to the center line of the workpiece in the Y direction, receives the parallel light rays from the light source, and has the same projection shape as the light source of the image to be the workpiece The light-receiving optical axis is imaged only by imaging a component parallel to the optical axis on an imaging surface parallel to the XY plane. 如申請專利範圍第5項所述的螺釘尺寸自動測定系統,其中,前述運算控制裝置包含輪廓資料算出部,其係將由前述投影攝像照相機拍攝的前述工件的投影形狀資料變換成具有任意的位置解析度的位元映像的2維資料,並使用預定臨限值將前述位元映像的前述2維資料的各資料二值化成黑白。 The automatic screw size measuring system according to claim 5, wherein the arithmetic control device includes a contour data calculating unit that converts projection shape data of the workpiece captured by the projection imaging camera into an arbitrary position analysis. The two-dimensional data of the bit map is used, and each data of the aforementioned two-dimensional data of the bit map is binarized into black and white using a predetermined threshold. 如申請專利範圍第6項所述的螺釘尺寸自動測定系統,其中,前述輪廓資料算出部係依據預設的雜訊判斷基準,對前述黑白的二值化交界中的資料進行將從前述工件的剖視圖形觀察而成為異常的資料作為雜訊予以 去除的平滑化處理,而求得表示螺釘輪廓分佈的輪廓資料,且前述輪廓資料算出部係依據使前述工件繞Y軸旋轉360度時的每隔預定的角度間隔的輪廓資料,算出並輸出前述工件的軸向及繞軸的尺寸。 The automatic screw size measuring system according to the sixth aspect of the invention, wherein the contour data calculating unit performs the data in the binarized boundary of the black and white from the workpiece according to a preset noise determination criterion. Observed by a cross-sectional view and become abnormal data as a noise The contouring data indicating the distribution of the screw contour is obtained by the smoothing process, and the contour data calculating unit calculates and outputs the contour data at intervals of a predetermined angular interval when the workpiece is rotated 360 degrees around the Y axis. The axial and circumferential dimensions of the workpiece. 如申請專利範圍第7項所述的螺釘尺寸自動測定系統,其中,前述螺釘尺寸自動測定系統係包含合焦移動部,其係使前述投影攝像照相機沿著Z方向移動,前述運算控制裝置係包含合焦位置算出部,作為變換成前述位元映像的前處理,前述合焦位置算出部係在由前述投影攝像照相機拍攝的螺釘的投影形狀資料從白資料轉換成黑資料的邊緣區域中,以在前述投影形狀資料的黑白交界取得最大值的方式,使用預設的評價函數,一邊利用前述合焦移動部使前述投影攝像照相機沿著Z方向移動,一邊求得各Z位置的前述評價函數的值,並以前述評價函數的值成為最大值的Z位置為合焦位置,來固定前述投影攝像照相機的Z方向位置。 The automatic screw size measuring system according to claim 7, wherein the screw size automatic measuring system includes a focusing moving unit that moves the projection imaging camera in the Z direction, and the arithmetic control device includes The focus position calculation unit is a pre-processing for converting into the bit map, and the focus position calculation unit converts the projection shape data of the screw imaged by the projection imaging camera from the white data to the edge region of the black data. In the method of obtaining the maximum value of the black and white boundary of the projection shape data, the evaluation function is used to obtain the evaluation function of each Z position while moving the projection imaging camera in the Z direction by the focus moving unit. The Z position at which the value of the evaluation function becomes the maximum value is the focus position, and the Z-direction position of the projection imaging camera is fixed. 如申請專利範圍第7或8項所述的螺釘尺寸自動測定系統,其中,前述運算控制裝置係對前述工件的每隔前述預定的角度間隔的輪廓資料求得前述工件的繞Y軸的尺寸的測定資料的組群, 並排除脫離預先設定的下限臨限值至預先設定的上限臨限值的範圍的前述尺寸的測定資料,且依據前述尺寸的測定資料的剩餘的組群算出前述繞Y軸的尺寸的值並輸出至輸出裝置。 The automatic screw size measuring system according to claim 7 or 8, wherein the arithmetic control device determines the size of the workpiece about the Y-axis from the contour data of the workpiece at every predetermined angular interval. a group of measured data, The measurement data of the above-described size that is out of the predetermined lower limit threshold value to the preset upper limit threshold value is excluded, and the value of the size around the Y-axis is calculated and output based on the remaining group of the measurement data of the aforementioned size. To the output device. 如申請專利範圍第6項所述的螺釘尺寸自動測定系統,其中,前述運算控制裝置係對於前述黑白的二值化的交界的資料藉由如下方式進行平滑化處理:在使前述工件繞Y軸旋轉時得到的每隔預定的角度間隔的輪廓資料中,對沿著前述工件的Y方向連續的測定資料的軌跡進行預先設定的預定頻率的低通濾波。 The automatic screw size measuring system according to claim 6, wherein the arithmetic control device performs smoothing processing on the boundary of the binarization of the black and white by: winding the workpiece around the Y axis In the contour data of every predetermined angular interval obtained at the time of rotation, the trajectory of the measurement data continuous along the Y direction of the workpiece is subjected to low-pass filtering of a predetermined frequency set in advance. 如申請專利範圍第6項所述的螺釘尺寸自動測定系統,其中,前述運算控制裝置係對於前述黑白的二值化的交界的資料,針對使前述工件繞Y軸旋轉時得到的每隔預定的角度間隔的輪廓資料,預測依據前述工件每隔預定角度偏離而產生之Y方向的偏離,對根據藉由對應前述工件的繞Y軸的角度所預測的偏離進行了修正的複數個點而預測的點的X方向位置的軌跡進行低通濾波,以生成過濾處理後的輪廓資料,依據過濾處理後的輪廓資料算出前述工件的繞Y軸的尺寸之值並輸出至輸出裝置。 The automatic screw size measuring system according to the sixth aspect of the invention, wherein the calculation control device is configured to calculate a boundary between the black and white binarization, and to obtain a predetermined time for the workpiece to be rotated about the Y axis. The contour data of the angular interval is predicted by the plurality of points corrected by the deviation of the angle of the workpiece around the Y axis by the deviation of the Y direction generated by the predetermined deviation of the workpiece at a predetermined angle. The trajectory of the X-direction position of the point is low-pass filtered to generate the contour data after the filtering process, and the value of the dimension of the workpiece around the Y-axis is calculated based on the contour data after the filtering process and output to the output device. 如申請專利範圍第1項所述的螺釘尺寸自動測定系統,其中, 前述工件是具有頭部和螺紋軸部且在前述頭部具有緊固工具用的旋轉槽或旋轉孔的帶頭螺釘,前述光學測量裝置包含測定前述工件的頭部孔的深度的頭部測量部。 An automatic screw size measuring system according to claim 1, wherein The workpiece is a head screw having a head portion and a screw shaft portion and having a rotation groove or a rotation hole for fastening a tool on the head portion, and the optical measuring device includes a head measuring portion that measures a depth of a head hole of the workpiece. 如申請專利範圍第12項所述的螺釘尺寸自動測定系統,其中,前述頭部測量部具有:頭部攝像照相機,在與XZ平面平行的拍攝面上拍攝前述工件的前述頭部孔的形狀;以及雷射光源,以相對於前述工件的Y方向成預定的傾斜角度,遍及前述工件的前述頭部的上表面和前述頭部孔的底面而照射在XZ平面上以直線狀延伸的光束,前述運算控制裝置包含:頭部尺寸算出部,依據前述頭部攝像照相機的拍攝資料算出前述工件的頭部尺寸;以及頭部孔深度算出部,利用前述頭部攝像照相機分別檢測從前述雷射光源照射的直線狀的光束投影於前述頭部之上表面及前述頭部孔的底面之投影位置,並依據檢測到的各個投影位置的XZ平面上的錯位量和預定的傾斜角度來算出前述頭部孔的深度。 The automatic screw size measuring system according to claim 12, wherein the head measuring unit includes a head imaging camera that captures a shape of the head hole of the workpiece on an imaging surface parallel to the XZ plane; And a laser light source that emits a light beam extending linearly on the XZ plane over the upper surface of the head portion of the workpiece and the bottom surface of the head hole at a predetermined inclination angle with respect to the Y direction of the workpiece, The calculation control device includes: a head size calculation unit that calculates a head size of the workpiece based on the image data of the head imaging camera; and a head hole depth calculation unit that detects the irradiation from the laser light source by the head imaging camera The linear beam is projected on the upper surface of the head and the bottom surface of the head hole, and the head hole is calculated according to the detected displacement amount on the XZ plane of each projection position and a predetermined tilt angle. depth.
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI629450B (en) * 2017-08-01 2018-07-11 崑山科技大學 Nail size measuring device
TWI724520B (en) * 2019-08-29 2021-04-11 岡杉企業有限公司 Screw measuring tool
CN113305098A (en) * 2021-05-25 2021-08-27 云南电网有限责任公司电力科学研究院 Device and method for detecting and removing scale sample of voltage-sharing electrode

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107290005A (en) * 2017-08-10 2017-10-24 无锡市蠡湖铸业有限公司 The measuring method of Automatic Measuring Apparatus and Automatic Measuring Apparatus
JP7320703B2 (en) 2018-02-16 2023-08-04 パナソニックIpマネジメント株式会社 LASER WELDING APPARATUS AND LASER WELDING METHOD
CN112005161B (en) 2018-03-30 2021-12-10 华为技术有限公司 Imaging device, display apparatus, and imaging apparatus
CN108562251B (en) * 2018-04-24 2024-03-22 周盈玉 Linear industrial robot for realizing inclined hole groove detection
JP7246882B2 (en) * 2018-09-13 2023-03-28 株式会社ディスコ Density measuring instrument
TWI703308B (en) * 2019-07-18 2020-09-01 和全豐光電股份有限公司 Precise measuring device capable of quickly holding tiny items
JP7278911B2 (en) * 2019-09-05 2023-05-22 Dmg森精機株式会社 Screw shaft measuring method, screw shaft measuring device, and NC machine tool equipped with the same
KR102419075B1 (en) * 2021-11-24 2022-07-08 (주)이화테크원 Ball stud inspection device
CN117600837B (en) * 2023-06-13 2024-06-04 苏州市斯可源自动化科技有限公司 Drilling tapping machine control method and drilling tapping control system

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0451007Y2 (en) * 1985-07-10 1992-12-01
JPH02253107A (en) * 1989-03-27 1990-10-11 Rozefu:Kk Noncontact measuring instrument for inside and outside diameters
US5521707A (en) * 1991-08-21 1996-05-28 Apeiron, Inc. Laser scanning method and apparatus for rapid precision measurement of thread form
JP2740630B2 (en) * 1993-12-27 1998-04-15 株式会社ミツトヨ Non-contact measurement device
US6111601A (en) * 1995-12-11 2000-08-29 Adachi; Yoshi Non-contacting laser gauge for qualifying screw fasteners and the like
JPH10320543A (en) * 1997-03-14 1998-12-04 Omron Corp Graphic generation method and device therefor
JP4089924B2 (en) * 1997-10-20 2008-05-28 大日本印刷株式会社 Image processing method and apparatus
JP4407997B2 (en) * 2000-06-30 2010-02-03 アサヒ飲料株式会社 PET bottle dimension measuring device
TWI267623B (en) * 2002-08-01 2006-12-01 Ming-Liau Yang Component monitoring method
JPWO2005047815A1 (en) * 2003-11-12 2007-07-19 株式会社コーエー・テック Male screw appearance inspection device
US7328904B2 (en) * 2005-04-19 2008-02-12 Black & Decker Inc. Power tool with power-take-off driven pusher-type chuck having device for reducing tension in pusher screw
JP4828974B2 (en) * 2006-03-16 2011-11-30 株式会社ミツトヨ Screw measuring method, screw measuring probe, and screw measuring device using the same
JP5099848B2 (en) * 2006-08-10 2012-12-19 芝浦メカトロニクス株式会社 Disc-shaped substrate inspection apparatus and inspection method
JP2008281399A (en) * 2007-05-09 2008-11-20 Konica Minolta Sensing Inc Three-dimensional measuring device and portable measuring device
US7633046B2 (en) * 2007-10-23 2009-12-15 Gii Acquisition Llc Method for estimating thread parameters of a part
JP5251617B2 (en) * 2009-03-06 2013-07-31 Jfeスチール株式会社 Screw shape measuring device and screw shape measuring method
TWM404739U (en) * 2010-11-22 2011-06-01 Ching Chan Optical Technology Co Ltd Screw detection device
JP5804722B2 (en) * 2011-02-16 2015-11-04 三菱重工業株式会社 Position detection device
WO2012111603A1 (en) * 2011-02-17 2012-08-23 シャープ株式会社 Line width measurement device
CN102538700B (en) * 2011-12-02 2014-01-15 合肥工业大学 Screw rotor type surface profile error measurement instrument

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI629450B (en) * 2017-08-01 2018-07-11 崑山科技大學 Nail size measuring device
TWI724520B (en) * 2019-08-29 2021-04-11 岡杉企業有限公司 Screw measuring tool
CN113305098A (en) * 2021-05-25 2021-08-27 云南电网有限责任公司电力科学研究院 Device and method for detecting and removing scale sample of voltage-sharing electrode
CN113305098B (en) * 2021-05-25 2022-11-29 云南电网有限责任公司电力科学研究院 Detection and removal device for scale sample of voltage-sharing electrode and use method

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