TWI703308B - Precise measuring device capable of quickly holding tiny items - Google Patents

Precise measuring device capable of quickly holding tiny items Download PDF

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TWI703308B
TWI703308B TW108125472A TW108125472A TWI703308B TW I703308 B TWI703308 B TW I703308B TW 108125472 A TW108125472 A TW 108125472A TW 108125472 A TW108125472 A TW 108125472A TW I703308 B TWI703308 B TW I703308B
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measuring device
device capable
adsorption platform
unit
precision measuring
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TW202104835A (en
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陳盈運
陳韋康
南平
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和全豐光電股份有限公司
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Abstract

一種可快速固持微小物品之精密量測裝置,係包括一主載台、一光源、一攝像模組、一檢測載台及一泵浦單元,該主載台具有一平面,該平面兩端分設有該光源及該攝像模組,該攝像模組具有一相機單元及一影像擷取單元,該相機單元對接該影像擷取單元,該影像擷取單元與該光源相對應設置,該檢測載台對應設於該平面上並置於所述光源及攝像模組之間,該檢測載台具有一待測物吸附平台,該待測物吸附平台具有一上表面開設至少一孔洞,該上表面用以供至少一待測物置放,該泵浦單元對應與該檢測載台相連通,該泵浦單元提供一吸力以令所述待測物透過該孔洞被吸附於該待測物吸附平台之上表面。 A precision measuring device capable of quickly holding tiny objects, comprising a main carrier, a light source, a camera module, a detection carrier, and a pump unit. The main carrier has a plane, and the plane is divided into two ends. The light source and the camera module are provided. The camera module has a camera unit and an image capturing unit. The camera unit is connected to the image capturing unit. The image capturing unit is arranged corresponding to the light source. The stage is correspondingly set on the plane and placed between the light source and the camera module. The detection stage has an adsorption platform for the object to be tested. The adsorption platform for the object to be tested has an upper surface with at least one hole opened on the upper surface. For placing at least one object under test, the pump unit is correspondingly connected with the detection stage, and the pump unit provides a suction force to make the object under test be adsorbed on the adsorption platform of the object under test through the hole surface.

Description

可快速固持微小物品之精密量測裝置 Precise measuring device capable of quickly holding tiny items

本發明係有關於一種量測裝置,尤指一種免除習知繁複檢測步驟進以大幅提升檢測效率之可快速固持微小物品之精密量測裝置。 The present invention relates to a measuring device, in particular to a precision measuring device capable of quickly holding small objects, which eliminates the conventional complicated detection steps and greatly improves the detection efficiency.

隨著科技之發展與進步,對於精密的元件表面輪廓及尺寸計算要求越來越迫切,而隨著工藝技術的提昇,元件加工對表面平整度、線寬間隔、工差的要求等更為嚴格,因為某些精細的微元件其表面粗糙度足以左右訊號品質,或是其加工深寬量誤差會影響繞射元件效能。而表面的量測可分為二維尺寸與三維輪廓的量測,其中以三維輪廓的量測最為複雜與困難。三維輪廓的量測在各產業中像是光學元件的形狀、表面粗糙度、曲率及刮傷之量測,或是光纖端面的量測,或是晶圓的表面輪廓的量測,或是電路板上錫高厚度的量測,或是零組件的表面粗糙度等。 With the development and advancement of science and technology, the requirements for precise component surface contour and size calculation are becoming more and more urgent. With the improvement of process technology, component processing has more stringent requirements on surface flatness, line width spacing, and tolerances. , Because the surface roughness of some fine micro-elements is sufficient to influence the signal quality, or the error in the processing depth and width will affect the performance of the diffraction element. The surface measurement can be divided into two-dimensional size and three-dimensional contour measurement. Among them, the three-dimensional contour measurement is the most complicated and difficult. The measurement of three-dimensional profile in various industries is like the measurement of the shape, surface roughness, curvature and scratches of optical components, or the measurement of fiber end faces, or the measurement of the surface profile of wafers, or circuits Measurement of the thickness of the tin on the board, or the surface roughness of the components.

目前業界對於精密加工件的量測,若產能很大時,必須仰賴光學快篩機來量測,但由於光學快篩機的速度很快,所以在量測精度上不高,只能做初步的篩選,而篩選後的良品,必須還要仰賴人力抽檢,一般的精密加工件的量測利用人工抽檢必須要利用多種量測工具,如:光學投影儀、影像二次元量測儀、卡尺等等傳統量測工具,才能完成工件的全尺寸量測,如此不僅耗費大量時間、儀器及人力的成本外,量測的效率也相對較差。 At present, for the measurement of precision machining parts in the industry, if the production capacity is large, it must rely on the optical quick screening machine to measure. However, due to the fast speed of the optical quick screening machine, the measurement accuracy is not high, and only preliminary The screening of good products after screening must also rely on manual sampling. The measurement of general precision-processed parts using manual sampling must use a variety of measurement tools, such as optical projectors, image two-dimensional measuring instruments, calipers, etc. The full-scale measurement of the workpiece can only be completed with traditional measurement tools. This not only consumes a lot of time, equipment and labor costs, but also has relatively poor measurement efficiency.

爰此,為有效解決上述之問題,本發明之主要目的在於提供一種免除習知繁複檢測步驟之可快速固持微小物品之精密量測裝置。 Therefore, in order to effectively solve the above-mentioned problems, the main purpose of the present invention is to provide a precision measuring device that can quickly hold small objects without the complicated detection steps in the prior art.

本發明之次要目的,在於提供一種可大幅提升檢測效率之可快速固持微小物品之精密量測裝置。 The secondary objective of the present invention is to provide a precise measuring device capable of quickly holding small objects that can greatly improve the detection efficiency.

本發明之次要目的,在於提供一種可大幅提升檢測準確度之可快速固持微小物品之精密量測裝置。 The secondary objective of the present invention is to provide a precision measuring device capable of quickly holding small objects that can greatly improve the detection accuracy.

為達上述目的,本發明係提供一種可快速固持微小物品之精密量測裝置,係包括一主載台、一光源、一攝像模組、一檢測載台及一泵浦單元,該主載台具有一平面,該光源係對應設置於所述平面之一端上,該攝像模組係對應設置於所述平面之另一端上,並該攝像模組具有一相機單元及一影像擷取單元,該相機單元對接該影像擷取單元,該影像擷取單元與所述光源相對應設置,該檢測載台係對應設於所述平面上並置於所述光源及攝像模組之間,該檢測載台具有一待測物吸附平台,該待測物吸附平台具有一上表面開設至少一孔洞,該上表面用以供至少一待測物置放,該泵浦單元係對應與所述檢測載台相連通,該泵浦單元提供一吸力以令所述待測物透過所述孔洞被吸附於所述待測物吸附平台之上表面。 In order to achieve the above objective, the present invention provides a precision measuring device that can quickly hold small objects, which includes a main carrier, a light source, a camera module, a detection carrier, and a pump unit. The main carrier There is a plane, the light source is correspondingly arranged on one end of the plane, the camera module is correspondingly arranged on the other end of the plane, and the camera module has a camera unit and an image capturing unit, the The camera unit is docked with the image capturing unit, the image capturing unit is arranged corresponding to the light source, the detection stage is correspondingly arranged on the plane and placed between the light source and the camera module, the detection stage There is an adsorption platform for the object to be tested, the adsorption platform for the object to be tested has an upper surface with at least one hole, the upper surface is used for placing at least one object to be tested, and the pump unit is correspondingly connected to the detection stage , The pump unit provides a suction force so that the object to be measured is adsorbed on the upper surface of the adsorption platform of the object to be measured through the hole.

透過本發明此結構的設計,當欲檢測所述微小之待測物(如:螺絲、精密零件等)一輪廓及尺寸時,首先,先將該待測物置放於該檢測載台的待測物吸附平台上表面上,並藉由該待測物吸附平台內部形成的至少一流道與前述之孔洞相連通之結構設計,當啟動該泵浦單元時會產生一吸力將該待測物透過孔洞及流道被牢固地吸附於該待測物吸附平台 上,接著透過該光源所產生的平行光照射於該待測物上,當平行光通過該待測物時會有阻擋光線的緣故而形成該待測物的輪廓,而得以令此輪廓產生於與該光源相對應設置的影像擷取單元上,並透過與該影像擷取單元相連接的相機單元進行該輪廓之影像的拍攝動作,最後,再將拍攝到的輪廓之影像傳送至一數位電子裝置(如:電腦等)進行利用人工智能影像處理運算而得出該待測物之輪廓全尺寸,如此一來,不僅可改善習知技術於檢測微小待測物時必須透過夾持方式而得以量測其輪廓尺寸之繁複步驟,大幅縮短檢測時間以提升檢測效率外,還具有提升檢測準確度之效果。 Through the design of the structure of the present invention, when the outline and size of the tiny object to be tested (such as screws, precision parts, etc.) are to be detected, first, the object to be tested is placed on the testing platform. On the upper surface of the object adsorption platform, and through the structural design that at least the first channel formed inside the adsorption platform for the object to be measured is connected to the aforementioned hole, when the pump unit is activated, a suction force is generated to pass the object to be measured through the hole And the flow channel is firmly adsorbed on the adsorption platform Then, the parallel light generated by the light source irradiates the object to be measured. When the parallel light passes through the object to be measured, it will block the light and form the outline of the object to be measured, so that the outline can be generated on the object under test. The image capturing unit is set corresponding to the light source, and the camera unit connected to the image capturing unit is used to capture the contour image, and finally, the captured contour image is sent to a digital electronics The device (such as: computer, etc.) uses artificial intelligence image processing to obtain the full size of the outline of the object to be measured. In this way, it can not only improve the conventional technology. The detection of small objects to be measured must be achieved by clamping. The complicated steps of measuring its contour size greatly shorten the inspection time to improve the inspection efficiency and also have the effect of improving the accuracy of the inspection.

2‧‧‧量測裝置 2‧‧‧Measuring device

20‧‧‧主載台 20‧‧‧Main Stage

200‧‧‧平面 200‧‧‧Plane

21‧‧‧光源 21‧‧‧Light source

22‧‧‧攝像模組 22‧‧‧Camera Module

220‧‧‧相機單元 220‧‧‧Camera unit

221‧‧‧影像擷取單元 221‧‧‧Image capture unit

23‧‧‧檢測載台 23‧‧‧Testing stage

230‧‧‧待測物吸附平台 230‧‧‧Adsorption platform

231‧‧‧上表面 231‧‧‧Upper surface

232‧‧‧流道 232‧‧‧Runner

233‧‧‧孔洞 233‧‧‧Hole

234‧‧‧凸階 234‧‧‧convex

24‧‧‧泵浦單元 24‧‧‧Pump unit

25‧‧‧連接管體 25‧‧‧Connecting pipe body

26‧‧‧待測物 26‧‧‧Object to be tested

27‧‧‧桿體 27‧‧‧Pole body

第1圖係為本發明可快速固持微小物品之精密量測裝置之立體圖;第2圖係為本發明之檢測載台立體圖;第3圖係為本發明之檢測載台前後擺動立體圖;第4圖係為本發明之檢測載台左右擺動立體圖;第5圖係為本發明之檢測載台升起時立體圖;第6圖係為本發明可快速固持微小物品之精密量測裝置之實施示意圖;第7圖係為本發明可快速固持微小物品之精密量測裝置之另一實施示意圖。 Figure 1 is a three-dimensional view of the precision measuring device capable of quickly holding small items of the present invention; Figure 2 is a three-dimensional view of the detection stage of the present invention; Figure 3 is a perspective view of the testing stage of the present invention swinging back and forth; fourth Figure is a perspective view of the detection carrier swinging from side to side of the present invention; Figure 5 is a perspective view of the detection carrier of the present invention when it is raised; Figure 6 is a schematic diagram of the implementation of the precision measuring device that can quickly hold small items of the present invention; Figure 7 is a schematic diagram of another implementation of the precision measuring device capable of quickly holding tiny objects in the present invention.

本發明之上述目的及其結構與功能上的特性,將依據所附圖式之較佳實施例予以說明。 The above-mentioned objects and structural and functional characteristics of the present invention will be described based on the preferred embodiments of the accompanying drawings.

請參閱第1、2圖,係為本發明可快速固持微小物品之精密量 測裝置2之立體圖及檢測載台立體圖,如圖所示,一種可快速固持微小物品之精密量測裝置2,係包括一主載台20、一光源21、一攝像模組22、一檢測載台23及一泵浦單元24,該主載台20具有一平面200,該光源21及攝像模組22分別對應設置於該平面200的相對應兩端上並保有一段空間距離,該攝像模組22具有一相機單元220及一影像擷取單元221,並且該相機單元220與該影像擷取單元221相互對接,以透過該相機單元220來拍攝並且儲存該影像擷取單元221所截取的一圖像並進行後續運算,該影像擷取單元221則與所述光源21相對應設置,其中,於本實施例中,該相機單元220使用的是工業用相機,該影像擷取單元221使用的是可調整焦距和光圈的複合透鏡系統或不可調整焦距及光圈的複合透鏡系統,而所述光源21則為一平行光做說明,然而,並不引以為限,任何可與前述之相機單元220、影像擷取單元221及光源21做替代之等效物,皆包含於本發明之範圍內,合先敘明。 Please refer to Figures 1 and 2, which show the precise amount of small objects that can be quickly held by the present invention The three-dimensional view of the measuring device 2 and the three-dimensional view of the detection stage, as shown in the figure, a precision measuring device 2 that can quickly hold small objects, includes a main stage 20, a light source 21, a camera module 22, and a detection carrier The stage 23 and a pump unit 24. The main stage 20 has a plane 200. The light source 21 and the camera module 22 are respectively disposed on the corresponding two ends of the plane 200 and maintain a certain spatial distance. 22 has a camera unit 220 and an image capture unit 221, and the camera unit 220 and the image capture unit 221 are connected to each other to capture and store a picture captured by the image capture unit 221 through the camera unit 220 Image and perform subsequent operations, the image capturing unit 221 is set corresponding to the light source 21, wherein, in this embodiment, the camera unit 220 uses an industrial camera, and the image capturing unit 221 uses The compound lens system that can adjust the focal length and aperture or the compound lens system that cannot adjust the focal length and aperture, and the light source 21 is a parallel light for illustration, however, it is not limited, and any can be compatible with the aforementioned camera unit 220 The equivalents of the image capturing unit 221 and the light source 21 as replacements are all included in the scope of the present invention, and are described first.

前述之檢測載台23對應設於所述主載台20之平面200上,並且該檢測載台23設置在所述光源21及攝像模組22之間,該檢測載台23具有一待測物吸附平台230,該待測物吸附平台230具有一上表面231開設至少一孔洞233,該上表面231係用以供至少一待測物26放置於其上而得以進行待測物26之檢測,另外,該待測物吸附平台230內部進一步形成有至少一流道232,該流道232與該孔洞233係為相互連通的,並且該流道232係可呈縱向或橫向排列設置於該待測物吸附平台230內部。 The aforementioned detection stage 23 is correspondingly arranged on the plane 200 of the main stage 20, and the detection stage 23 is arranged between the light source 21 and the camera module 22, and the detection stage 23 has an object to be measured The adsorption platform 230, which has an upper surface 231 with at least one hole 233, and the upper surface 231 is used to place at least one test object 26 on the test object 26 to detect the test object 26, In addition, at least a flow channel 232 is further formed in the adsorption platform 230 for the object to be measured. The flow channel 232 and the hole 233 are connected to each other, and the flow channel 232 can be arranged longitudinally or horizontally on the object to be measured. Inside the adsorption platform 230.

另外,需說明的是,於所述待測物吸附平台230之上表面231更朝上凸伸形成一凸階234,前述孔洞233對應開設於該凸階234上,並該凸階234內部形成有所述流道232,而所述凸階234之結構其目的係為了於量測 的過程中該待測物吸附平台230在進行左右擺動時以避免光源21照射至待測物26而被所述待測物吸附平台230擋住之一結構,得以防止待測物26的輪廓被該待測物吸附平台230阻擋而產生量測輪廓不精確之問題。 In addition, it should be noted that a convex step 234 is formed protruding upward on the upper surface 231 of the adsorption platform 230 for the object to be measured. The aforementioned hole 233 is correspondingly opened on the convex step 234, and the convex step 234 is formed inside There is the flow channel 232, and the structure of the convex step 234 is for measuring During the process, when the object-to-be-measured adsorption platform 230 swings left and right, it prevents the light source 21 from irradiating the object to be measured 26 and is blocked by the object-to-be-measured adsorption platform 230 to prevent the contour of the object 26 from being The object to be measured is blocked by the adsorption platform 230 and the measurement profile is not accurate.

請一併參閱第3、4、5圖,所述待測物吸附平台230係可於所述主載台20上進行水平位移(前、後,如第3圖所示)及旋轉位移(左、右,如第4圖所示)的擺動及角度的調整,並且,所述主載台20更具有一桿體27,所述檢測載台23係透過該桿體27上下移動以執行高度位移之作動(升起、下降,如第5圖所示)之功能,換句話說,該待測物吸附平台230可依照使用者的需求來進行調整,不僅可改善該待測物26的輪廓被該待測物吸附平台230阻擋問題缺失,還可大幅提升使用便利性。 Please refer to Figures 3, 4, and 5 together. The adsorption platform 230 for the object to be measured can be horizontally displaced (front and rear, as shown in Figure 3) and rotationally displaced (left and right) on the main stage 20. , Right, as shown in Figure 4) swing and angle adjustment, and the main carrier 20 has a rod 27, the detection carrier 23 moves up and down through the rod 27 to perform height displacement The function of moving (raising and descending, as shown in Figure 5), in other words, the adsorption platform 230 for the test object can be adjusted according to the user’s needs, which not only improves the profile of the test object 26 The adsorption platform 230 of the object to be tested lacks blocking problems, which can greatly improve the convenience of use.

前述之泵浦單元24與所述檢測載台23相連接並藉由一連接管體25而得以令泵浦單元24及檢測載台23相互連通,該泵浦單元24係用以提供一吸力,其目的係令所述待測物26透過該檢測載台23形成的流道232及孔洞233被吸附在該待測物吸附平台230之上表面231,如此得以固定該待測物26以避免其掉落,其中,所述泵浦單元24於本實施例中係選擇一無油式真空泵浦,但並不引以為限,合先敘明。 The aforementioned pump unit 24 is connected to the detection stage 23, and the pump unit 24 and the detection stage 23 are communicated with each other by a connecting pipe body 25. The pump unit 24 is used to provide a suction force. The purpose is to make the test object 26 pass through the flow channel 232 and the hole 233 formed by the detection stage 23 to be adsorbed on the upper surface 231 of the test object adsorption platform 230 so as to fix the test object 26 to prevent it from falling However, the pump unit 24 is selected as an oil-free vacuum pump in this embodiment, but it is not limited to this and will be described first.

另外,需一提的是,由於不同的待測物26具有不同的尺寸及大小,因此為了因應前述之需求,本發明的檢測載台23其設置方式可依照使用者的需求選擇為固定式之檢測載台23或是可拆卸式之檢測載台23對應設置在所述主載台20之平面200上,合先敘明。 In addition, it should be mentioned that since different test objects 26 have different sizes and sizes, in order to meet the aforementioned needs, the setting method of the detection stage 23 of the present invention can be selected as a fixed type according to the needs of the user. The detection carrier 23 or the detachable detection carrier 23 is correspondingly arranged on the plane 200 of the main carrier 20, as described first.

續請一併參閱第6圖,因此,透過本發明此結構的設計,當欲檢測所述微小之待測物26(螺絲、精密零件等)一輪廓及尺寸時,首先, 先將該待測物26放置在該檢測載台23的待測物吸附平台230之凸階234上,並藉由該待測物吸附平台230內部形成的流道232及孔洞233相連通之結構設計,當啟動該泵浦單元24時會產生吸力將該待測物26透過孔洞233及流道232被牢固地吸附於該待測物吸附平台230上,接著透過該光源21所產生的平行光照射於該待測物26上,當平行光通過該待測物26時會有阻擋光線的緣故而形成該待測物26的輪廓,而得以令此輪廓產生於與該光源21相對應設置的影像擷取單元221上,並透過與該影像擷取單元221相連接的相機單元220進行該輪廓之影像的拍攝動作,最後,再將拍攝到的輪廓之影像傳送至一數位電子裝置(圖中未示,如:電腦等)進行利用人工智能影像處理運算而得出該待測物26之輪廓全尺寸,如此一來,不僅可改善習知技術於檢測微小待測物時必須透過夾持方式而得以量測其輪廓尺寸之繁複步驟,大幅縮短檢測時間以提升檢測效率外,還具有提升檢測準確度之效果。 Please refer to Figure 6 together. Therefore, through the design of this structure of the present invention, when it is desired to detect the outline and size of the tiny object 26 (screws, precision parts, etc.), first, First place the test object 26 on the convex step 234 of the test object adsorption platform 230 of the detection stage 23, and connect the flow channel 232 and the hole 233 formed inside the test object adsorption platform 230 Designed, when the pumping unit 24 is activated, a suction force will be generated. The test object 26 is firmly adsorbed on the test object adsorption platform 230 through the hole 233 and the flow channel 232, and then passes through the parallel light generated by the light source 21 When irradiated on the test object 26, when parallel light passes through the test object 26, it will block the light and form the profile of the test object 26, so that the profile can be generated in the corresponding setting of the light source 21 On the image capturing unit 221, and through the camera unit 220 connected to the image capturing unit 221, the contour image is captured, and finally, the captured contour image is transmitted to a digital electronic device (in the figure) Not shown, such as: computer, etc.) use artificial intelligence image processing operations to obtain the full size of the outline of the object 26. In this way, it can not only improve the conventional technology, when detecting small objects to be measured, the clamping method must be adopted The complicated steps to measure the contour size greatly shorten the inspection time to improve the inspection efficiency, and also have the effect of improving the inspection accuracy.

除此之外,再請參閱第7圖,透過本發明之量測裝置2的結構設計,使用者可同時量測多根待測物26的輪廓尺寸,並且每一待測物26之長度可為不相等長,如此可大幅縮短量測時間,提升檢測效率。 In addition, please refer to Figure 7 again. Through the structural design of the measuring device 2 of the present invention, the user can measure the contour size of multiple objects 26 to be measured at the same time, and the length of each object 26 can be It is not the same length, so the measurement time can be greatly shortened, and the detection efficiency can be improved.

以上所述,本發明相較於習知具有下列優點:1.免除習知繁複檢測步驟;2.大幅提升檢測效率;3.大幅提升檢測準確度。 As mentioned above, the present invention has the following advantages over the conventional ones: 1. Eliminates the complicated detection steps of the conventional ones; 2. Significantly improves the detection efficiency; 3. Significantly improves the detection accuracy.

以上已將本發明做一詳細說明,惟以上所述者,僅為本發明之一較佳實施例而已,當不能限定本發明實施之範圍,即凡依本發明申請範圍所作之均等變化與修飾等,皆應仍屬本發明之專利涵蓋範圍。 The present invention has been described in detail above, but what is described above is only a preferred embodiment of the present invention, and should not limit the scope of implementation of the present invention, that is, all equivalent changes and modifications made in accordance with the scope of application of the present invention Etc., should still be covered by the patent of the present invention.

2‧‧‧量測裝置 2‧‧‧Measuring device

20‧‧‧主載台 20‧‧‧Main Stage

200‧‧‧平面 200‧‧‧Plane

21‧‧‧光源 21‧‧‧Light source

22‧‧‧攝像模組 22‧‧‧Camera Module

220‧‧‧相機單元 220‧‧‧Camera unit

221‧‧‧影像擷取單元 221‧‧‧Image capture unit

23‧‧‧檢測載台 23‧‧‧Testing stage

230‧‧‧待測物吸附平台 230‧‧‧Adsorption platform

24‧‧‧泵浦單元 24‧‧‧Pump unit

25‧‧‧連接管體 25‧‧‧Connecting pipe body

Claims (10)

一種可快速固持微小物品之精密量測裝置,係包括:一主載台,具有一平面;一光源,係對應設置於所述平面之一端上;一攝像模組,係對應設置於所述平面之另一端上,該攝像模組具有一相機單元及一影像擷取單元,該相機單元對接該影像擷取單元,該影像擷取單元與所述光源相對應設置;一檢測載台,係對應設於所述平面上並置於所述光源及攝像模組之間,該檢測載台具有一待測物吸附平台,該待測物吸附平台具有一上表面開設至少一孔洞,該上表面用以供至少一待測物置放;及一泵浦單元,係對應與所述檢測載台相連通,該泵浦單元提供一吸力以令所述待測物透過所述孔洞被吸附於所述待測物吸附平台之上表面。 A precision measuring device capable of quickly holding tiny objects, comprising: a main carrier with a flat surface; a light source correspondingly arranged on one end of the flat surface; and a camera module correspondingly arranged on the flat surface On the other end, the camera module has a camera unit and an image capture unit, the camera unit is docked with the image capture unit, and the image capture unit is arranged corresponding to the light source; a detection stage is corresponding Set on the plane and placed between the light source and the camera module, the detection stage has an adsorption platform for the object to be measured, and the adsorption platform for the object to be measured has an upper surface with at least one hole, and the upper surface is used for For placing at least one object to be tested; and a pump unit corresponding to the detection stage, and the pump unit provides a suction force so that the object to be tested is adsorbed to the object to be tested through the hole The upper surface of the adsorption platform. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述待測物吸附平台之上表面更朝上凸伸形成一凸階,所述孔洞對應開設於該凸階上,該凸階對應置放所述待測物。 The precision measuring device capable of quickly holding small articles as described in claim 1, wherein the upper surface of the adsorption platform for the object to be measured is protruded upward to form a convex step, and the hole is correspondingly opened on the convex step, The convex step corresponds to the object to be tested. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述待測物吸附平台可於所述主載台上進行水平位移、旋轉位移及高度位移之作動。 The precision measuring device capable of quickly holding small objects as described in claim 1, wherein the adsorption platform for the object to be measured can perform horizontal displacement, rotational displacement and height displacement on the main stage. 如請求項3所述之可快速固持微小物品之精密量測裝置,其中所述主載台更具有一桿體,所述檢測載台係透過該桿體上下移動以執行高度位移之作動。 According to claim 3, the precision measuring device capable of quickly holding small items, wherein the main carrier further has a rod, and the detection carrier moves up and down through the rod to perform height displacement. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述光源係為一平行光。 The precision measuring device capable of quickly holding small articles as described in claim 1, wherein the light source is a parallel light. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述相機單元係為一工業相機,所述泵浦單元係為一無油式真空泵浦。 The precision measuring device capable of quickly holding small articles as described in claim 1, wherein the camera unit is an industrial camera, and the pump unit is an oil-free vacuum pump. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述影像擷取單元係為可調整焦距及光圈的複合透鏡系統或不可調整焦距及光圈的複合透鏡系統。 According to claim 1, the precise measurement device capable of quickly holding small items, wherein the image capturing unit is a compound lens system with adjustable focal length and aperture or a compound lens system with adjustable focal length and aperture. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述檢測載台設置方式係選擇為固定式或可拆卸式地設置於所述主載台之平面上。 The precision measuring device capable of quickly holding small articles as described in claim 1, wherein the detection stage is selected to be fixed or detachably arranged on the plane of the main stage. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中所述待測物吸附平台內部更形成至少一流道與所述孔洞相連通,該流道係可呈縱向或橫向排列設置於該待測物吸附平台內部。 The precision measuring device capable of quickly holding small articles as described in claim 1, wherein at least a flow channel is formed inside the adsorption platform for the object to be measured to communicate with the hole, and the flow channel can be arranged in a vertical or horizontal arrangement Inside the adsorption platform of the test object. 如請求項1所述之可快速固持微小物品之精密量測裝置,其中更具有一連接管體,該連接管體對應連通所述泵浦單元及檢測載台。 According to claim 1, the precision measuring device capable of quickly holding small articles further includes a connecting tube body corresponding to the pump unit and the detection stage.
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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0297254A1 (en) * 1987-05-12 1989-01-04 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
US20140152771A1 (en) * 2012-12-01 2014-06-05 Og Technologies, Inc. Method and apparatus of profile measurement
TWI567363B (en) * 2014-06-23 2017-01-21 日產螺絲股份有限公司 Screw dimension automatic measurement system
TWI636234B (en) * 2016-12-13 2018-09-21 由田新技股份有限公司 Profile measuring method, profile measuring apparatus and deformation inspecting apparatus

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0297254A1 (en) * 1987-05-12 1989-01-04 Olympus Optical Co., Ltd. Fine surface profile measuring apparatus
US20140152771A1 (en) * 2012-12-01 2014-06-05 Og Technologies, Inc. Method and apparatus of profile measurement
TWI567363B (en) * 2014-06-23 2017-01-21 日產螺絲股份有限公司 Screw dimension automatic measurement system
TWI636234B (en) * 2016-12-13 2018-09-21 由田新技股份有限公司 Profile measuring method, profile measuring apparatus and deformation inspecting apparatus

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