TW201605612A - Liquid crystal polymer film attached with metal foils and its manufacturing method, multi-layer printed wiring board and its manufacturing method - Google Patents
Liquid crystal polymer film attached with metal foils and its manufacturing method, multi-layer printed wiring board and its manufacturing method Download PDFInfo
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/02—Apparatus or processes for manufacturing printed circuits in which the conductive material is applied to the surface of the insulating support and is thereafter removed from such areas of the surface which are not intended for current conducting or shielding
- H05K3/022—Processes for manufacturing precursors of printed circuits, i.e. copper-clad substrates
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2250/00—Layers arrangement
- B32B2250/03—3 layers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2457/00—Electrical equipment
- B32B2457/08—PCBs, i.e. printed circuit boards
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2201/00—Indexing scheme relating to printed circuits covered by H05K1/00
- H05K2201/01—Dielectrics
- H05K2201/0137—Materials
- H05K2201/0141—Liquid crystal polymer [LCP]
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- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
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- Production Of Multi-Layered Print Wiring Board (AREA)
- Manufacturing Of Printed Wiring (AREA)
Abstract
Description
本揭示係關於附金屬箔之液晶聚合物薄膜、及其製造方法、以及使用該附金屬箔之液晶聚合物薄膜的多層印刷配線板、及其製造方法。 The present disclosure relates to a liquid crystal polymer film with a metal foil, a method for producing the same, and a multilayer printed wiring board using the liquid crystal polymer film with the metal foil, and a method for producing the same.
近年來圖求多層印刷配線板之高頻特性的提升。因此,進行使用高頻特性優異的液晶聚合物的多層印刷配線板的開發。 In recent years, the improvement of the high frequency characteristics of the multilayer printed wiring board has been sought. Therefore, development of a multilayer printed wiring board using a liquid crystal polymer having excellent high-frequency characteristics was carried out.
例如,在專利文獻1中係記載一種單面覆金屬積層體之製造方法。金屬箔、絕緣性薄膜、及分離薄膜被積層而進行熱壓接,之後,藉由將分離薄膜剝離,可得單面覆金屬積層體。在此,使用熱塑性液晶聚合物薄膜作為絕緣性薄膜。 For example, Patent Document 1 describes a method of producing a single-sided metal-clad laminate. The metal foil, the insulating film, and the separation film are laminated by thermocompression bonding, and then the separation film is peeled off to obtain a single-sided metal-clad laminate. Here, a thermoplastic liquid crystal polymer film is used as the insulating film.
此外,在專利文獻2中係記載一種液晶聚合物薄膜積層基材之製造方法。液晶聚合物薄膜的表面係以蝕刻液進行粗面化。接著,以經粗面化的液晶聚合物薄膜的表面與被積層基材的表面相對面的方式,液晶聚合物薄膜與被積 層基材被疊合。之後,藉由加熱加壓處理,被積層基材與液晶聚合物薄膜被一體化。在此,以被積層基材而言,係使用形成有金屬配線的液晶聚合物薄膜或金屬箔等。 Further, Patent Document 2 describes a method for producing a liquid crystal polymer film laminated substrate. The surface of the liquid crystal polymer film is roughened with an etching solution. Next, the liquid crystal polymer film is accumulated with the surface of the roughened liquid crystal polymer film facing the surface of the layered substrate. The layer substrates are laminated. Thereafter, the laminated substrate and the liquid crystal polymer film are integrated by heat and pressure treatment. Here, in the laminated substrate, a liquid crystal polymer film or a metal foil in which metal wiring is formed is used.
〔專利文獻1〕國際公開號WO2011/093427 [Patent Document 1] International Publication No. WO2011/093427
〔專利文獻2〕日本專利申請公開號2005-81649 [Patent Document 2] Japanese Patent Application Publication No. 2005-81649
本揭示之附金屬箔之液晶聚合物薄膜係具備有:液晶聚合物薄膜、第1金屬箔、及第2金屬箔。第1金屬箔係被積層在液晶聚合物薄膜的第1面。第2金屬箔係被積層在液晶聚合物薄膜的第1面的相反側的第2面。第2金屬箔係具有:粗面、及在粗面的相反側的平滑面的電解金屬箔。第2金屬箔的粗面、及液晶聚合物薄膜的第2面相疊合,在粗面被施行脫模處理。 The metal foil-attached liquid crystal polymer film of the present invention includes a liquid crystal polymer film, a first metal foil, and a second metal foil. The first metal foil is laminated on the first surface of the liquid crystal polymer film. The second metal foil is laminated on the second surface on the opposite side of the first surface of the liquid crystal polymer film. The second metal foil has an electrolytic metal foil having a rough surface and a smooth surface on the opposite side of the rough surface. The rough surface of the second metal foil and the second surface of the liquid crystal polymer film are laminated, and the mold release treatment is performed on the rough surface.
此外,本揭示之多層印刷配線板係具備有:第2金屬箔由附金屬箔之液晶聚合物薄膜被剝離後的單側金屬箔液晶聚合物薄膜、接合薄片、及芯材。接合薄片係被積層在單側金屬箔液晶聚合物薄膜的液晶聚合物薄膜。芯材係具有導體圖案且被積層在接合薄片。接合薄片之與積層液晶聚合物薄膜的面為相反的面、及芯材之形成有導體圖案的面相疊合。 Further, the multilayer printed wiring board of the present invention includes a one-side metal foil liquid crystal polymer film in which the second metal foil is peeled off from the metal foil-attached liquid crystal polymer film, a bonding sheet, and a core material. The bonding sheet is a liquid crystal polymer film laminated on a single-sided metal foil liquid crystal polymer film. The core material has a conductor pattern and is laminated on the bonding sheet. The surface of the bonding sheet opposite to the surface on which the liquid crystal polymer film is laminated is laminated on the surface of the core material on which the conductor pattern is formed.
本揭示之附金屬箔之液晶聚合物薄膜之製造方法係在 液晶聚合物薄膜的第1面積層第1金屬箔,使陽極電極、及作為陰極電極的旋轉滾筒浸漬在包含金屬離子的電解液,在陽極電極與陰極電極之間流通電流,藉此將第2金屬箔進行電沈積在旋轉滾筒的表面,將第2金屬箔由旋轉滾筒剝離,將第2金屬箔之原與旋轉滾筒的表面相接的面設為光澤面,且將第2金屬箔之原未與旋轉滾筒的表面相接的面設為粗糙面,在第2金屬箔的粗糙面塗佈脫模劑,且藉由在液晶聚合物薄膜的第1面的相反側的第2面積層第2金屬箔的粗糙面,來製作積層體,將積層體進行加壓及加熱。 The method for manufacturing a liquid crystal polymer film with metal foil disclosed in the present disclosure is In the first metal layer of the first area layer of the liquid crystal polymer film, the anode electrode and the rotating drum as the cathode electrode are immersed in an electrolytic solution containing metal ions, and a current flows between the anode electrode and the cathode electrode, thereby making the second metal foil The metal foil is electrodeposited on the surface of the rotating drum, and the second metal foil is peeled off by the rotating drum, and the surface of the second metal foil that is in contact with the surface of the rotating drum is made into a shiny surface, and the second metal foil is used as the original. The surface that is not in contact with the surface of the rotating drum is a rough surface, and a release agent is applied to the rough surface of the second metal foil, and the second area layer on the opposite side of the first surface of the liquid crystal polymer film is used. 2 The rough surface of the metal foil is used to form a laminate, and the laminate is pressurized and heated.
本揭示之多層印刷配線板之製造方法係將第2金屬箔由附金屬箔之液晶聚合物薄膜剝離,在將第2金屬箔剝離後的面,積層以液晶聚合物形成的接合薄片,藉由在接合薄片之與積層液晶聚合物薄膜的面為相反的面,疊合形成有導體圖案的芯材的表面,來製作多層基板,將多層基板進行加壓及加熱。 In the method for producing a multilayer printed wiring board according to the present disclosure, the second metal foil is peeled off from the metal foil-attached liquid crystal polymer film, and a bonding sheet formed of a liquid crystal polymer is laminated on the surface after the second metal foil is peeled off. The multilayer substrate is formed by laminating the surface of the core material on which the conductor pattern is formed on the surface opposite to the surface on which the laminated liquid crystal polymer film is laminated, and the multilayer substrate is pressurized and heated.
1‧‧‧附金屬箔之液晶聚合物薄膜 1‧‧‧ Liquid crystal polymer film with metal foil
2‧‧‧多層印刷配線板 2‧‧‧Multilayer printed wiring board
4‧‧‧液晶聚合物薄膜 4‧‧‧Liquid polymer film
4a、7a、31a、32a‧‧‧粗面 4a, 7a, 31a, 32a‧‧‧
5‧‧‧接合薄片 5‧‧‧ Bonding sheet
6‧‧‧導體圖案 6‧‧‧Conductor pattern
6a‧‧‧內層圖案 6a‧‧‧ Inner layer pattern
6b‧‧‧外層圖案 6b‧‧‧ outer pattern
7‧‧‧芯材 7‧‧‧ core material
8‧‧‧絕緣層 8‧‧‧Insulation
9a‧‧‧貫穿孔 9a‧‧‧through holes
9b‧‧‧通孔 9b‧‧‧through hole
10‧‧‧單側金屬箔液晶聚合物薄膜 10‧‧‧One-sided metal foil liquid crystal polymer film
20‧‧‧多層基板 20‧‧‧Multilayer substrate
31‧‧‧第1金屬箔 31‧‧‧1st metal foil
31b、32b‧‧‧平滑面 31b, 32b‧‧‧ smooth surface
32‧‧‧第2金屬箔 32‧‧‧2nd metal foil
32c‧‧‧脫模層 32c‧‧‧ release layer
33‧‧‧金屬箔 33‧‧‧metal foil
40‧‧‧第1面 40‧‧‧1st
41‧‧‧第2面 41‧‧‧2nd
45、57‧‧‧界面 45, 57‧‧‧ interface
圖1A係顯示藉由本實施形態所得之附金屬箔之液晶聚合物薄膜之製造方法的剖面模式圖。 Fig. 1A is a schematic cross-sectional view showing a method of producing a metal foil-attached liquid crystal polymer film obtained by the present embodiment.
圖1B係顯示藉由本實施形態所得之附金屬箔之液晶聚合物薄膜之製造方法的剖面模式圖。 Fig. 1B is a schematic cross-sectional view showing a method of producing a metal foil-attached liquid crystal polymer film obtained by the present embodiment.
圖1C係顯示由藉由本實施形態所得之附金屬箔之液晶聚合物薄膜,將第2金屬箔剝離後的狀態的剖面模式圖。 1C is a schematic cross-sectional view showing a state in which the second metal foil is peeled off from the liquid crystal polymer film with a metal foil obtained in the present embodiment.
圖2A係顯示藉由本實施形態所得之多層印刷配線板之製造方法的剖面模式圖。 Fig. 2A is a schematic cross-sectional view showing a method of manufacturing a multilayer printed wiring board obtained in the present embodiment.
圖2B係顯示藉由本實施形態所得之多層印刷配線板之製造方法的剖面模式圖。 Fig. 2B is a schematic cross-sectional view showing a method of manufacturing the multilayer printed wiring board obtained in the present embodiment.
圖2C係顯示藉由本實施形態所得之多層印刷配線板之製造方法的剖面模式圖。 Fig. 2C is a schematic cross-sectional view showing a method of manufacturing the multilayer printed wiring board obtained in the present embodiment.
圖3係顯示由藉由本實施形態所得之附金屬箔之液晶聚合物薄膜,將第2金屬箔剝離後的表面的照片的圖。 Fig. 3 is a view showing a photograph of the surface of the second metal foil after peeling off the liquid crystal polymer film with a metal foil obtained in the present embodiment.
圖4係顯示由藉由本實施形態所得之附金屬箔之液晶聚合物薄膜,將第2金屬箔剝離後的表面的照片的圖。 Fig. 4 is a view showing a photograph of the surface of the second metal foil after peeling off the liquid crystal polymer film with a metal foil obtained in the present embodiment.
圖5係顯示由藉由比較例所得之附金屬箔之液晶聚合物薄膜,將第2金屬箔剝離後的表面的照片的圖。 Fig. 5 is a view showing a photograph of the surface of the second metal foil after peeling off the liquid crystal polymer film with a metal foil obtained by the comparative example.
若將以專利文獻1的方法所形成的單面覆金屬積層體貼合在接合薄片,會有密接性弱的情形。 When the single-sided metal-clad laminate formed by the method of Patent Document 1 is bonded to the bonded sheet, the adhesion may be weak.
此外,在專利文獻2中,係必須要有將液晶聚合物薄膜的表面進行蝕刻的工程。此外,若在液晶聚合物薄膜的其中一面重疊被積層基材而一體化時,通常在液晶聚合物 薄膜的另一面係疊合有脫模薄膜等。若在該狀態下進行加熱加壓,液晶聚合物薄膜會軟化,另一面被轉印脫模薄膜等的表面狀態而予以平滑化。 Further, in Patent Document 2, it is necessary to have a process of etching the surface of the liquid crystal polymer film. Further, when the laminated liquid crystal substrate is superposed on one surface of the liquid crystal polymer film to be integrated, usually in a liquid crystal polymer The other side of the film is laminated with a release film or the like. When the film is heated and pressurized in this state, the liquid crystal polymer film is softened, and the other surface is transferred to the surface state of the release film or the like to be smoothed.
以下說明本揭示之實施形態。 Embodiments of the present disclosure will be described below.
圖1A、圖1B係顯示藉由本實施形態所得之附金屬箔之液晶聚合物薄膜1之製造方法的剖面模式圖。 1A and 1B are schematic cross-sectional views showing a method of manufacturing a liquid crystal polymer film 1 with a metal foil obtained in the present embodiment.
附金屬箔之液晶聚合物薄膜1係具備有:液晶聚合物薄膜4、第1金屬箔31、及第2金屬箔32。第1金屬箔31係被積層在液晶聚合物薄膜4的第1面40。第2金屬箔32係被積層在液晶聚合物薄膜4的第1面40的相反側的第2面41。第2金屬箔32係具有:粗面32a、及在粗面32a的相反側的平滑面32b的電解金屬箔。第2金屬箔32的粗面32a、及液晶聚合物薄膜4的第2面41相疊合,在粗面32a被施行脫模處理。 The liquid crystal polymer film 1 with a metal foil includes a liquid crystal polymer film 4, a first metal foil 31, and a second metal foil 32. The first metal foil 31 is laminated on the first surface 40 of the liquid crystal polymer film 4. The second metal foil 32 is laminated on the second surface 41 on the opposite side of the first surface 40 of the liquid crystal polymer film 4 . The second metal foil 32 has an electrolytic metal foil having a rough surface 32a and a smooth surface 32b on the opposite side of the rough surface 32a. The rough surface 32a of the second metal foil 32 and the second surface 41 of the liquid crystal polymer film 4 are laminated, and the rough surface 32a is subjected to a mold release treatment.
附金屬箔之液晶聚合物薄膜1之製造方法係具有:將第1金屬箔31、液晶聚合物薄膜4、第2金屬箔32依序重疊,且進行加熱加壓的工程。圖1C係顯示由藉由本實施形態所得之附金屬箔之液晶聚合物薄膜1,將第2金屬箔32剝離後的狀態的剖面模式圖。將圖1C的狀態稱為單側金屬箔液晶聚合物薄膜10。 The manufacturing method of the liquid crystal polymer film 1 with a metal foil has the process of superposing the 1st metal foil 31, the liquid-crystal polymer film 4, and the 2nd metal foil 32 sequentially, and heating and press. 1C is a schematic cross-sectional view showing a state in which the second metal foil 32 is peeled off from the liquid crystal polymer film 1 with a metal foil obtained in the present embodiment. The state of FIG. 1C is referred to as a one-sided metal foil liquid crystal polymer film 10.
首先,說明在附金屬箔之液晶聚合物薄膜1的製造所使用的第1金屬箔31、液晶聚合物薄膜4、第2金屬箔32。 First, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 used in the production of the liquid crystal polymer film 1 with a metal foil will be described.
以第1金屬箔31而言,使用例如銅箔、不銹鋼箔、 鎳箔、或鎳鉻合金箔等。第1金屬箔31的至少單面較佳為粗面31a。在本實施形態中,係說明第1金屬箔31的其中一面為粗面31a、另一面為平滑面31b的情形。但是,亦可第1金屬箔31的兩面均為粗面31a。 For the first metal foil 31, for example, a copper foil or a stainless steel foil is used. Nickel foil, nickel chrome alloy foil, etc. At least one surface of the first metal foil 31 is preferably a rough surface 31a. In the present embodiment, a case where one surface of the first metal foil 31 is a rough surface 31a and the other surface is a smooth surface 31b will be described. However, both surfaces of the first metal foil 31 may be rough surfaces 31a.
在此,粗面31a係指形成有微細凹凸的面。具體而言,粗面31a的十點平均粗糙度Rz係以0.5μm以上、5.0μm以下為佳。平滑面31b為平滑的面。平滑面31b的十點平均粗糙度Rz並未特別限定,若為例如0.5μm以上、2.5μm以下即可。 Here, the rough surface 31a means a surface on which fine irregularities are formed. Specifically, the ten-point average roughness Rz of the rough surface 31a is preferably 0.5 μm or more and 5.0 μm or less. The smooth surface 31b is a smooth surface. The ten-point average roughness Rz of the smooth surface 31b is not particularly limited, and may be, for example, 0.5 μm or more and 2.5 μm or less.
第1金屬箔31係可藉由壓延法或電解法等來製作。在壓延法中,係例如藉由施行粗面化處理等表面處理,在第1金屬箔31形成具有如上所述之十點平均粗糙度Rz的粗面31a。在電解法中,係例如調整電解條件、或施行粗面化處理等適當的表面處理,藉此在第1金屬箔31形成具有如上所述之十點平均粗糙度Rz的粗面31a。第1金屬箔31的厚度係例如5.0μm以上、70.0μm以下。 The first metal foil 31 can be produced by a calendering method, an electrolysis method, or the like. In the rolling method, for example, by performing surface treatment such as roughening treatment, the rough surface 31a having the ten-point average roughness Rz as described above is formed in the first metal foil 31. In the electrolysis method, for example, an appropriate surface treatment such as adjustment of electrolysis conditions or roughening treatment is performed, whereby the rough surface 31a having the ten-point average roughness Rz as described above is formed in the first metal foil 31. The thickness of the first metal foil 31 is, for example, 5.0 μm or more and 70.0 μm or less.
液晶聚合物薄膜4係形成為薄膜狀的液晶聚合物。以液晶聚合物而言,係使用例如:聚芳香酯系液晶聚合物、或全芳香族聚酯、或半剛直性芳香族聚酯、或聚酯醯胺等。或者,以液晶聚合物而言,係使用以(1)芳香族或脂肪族二羥化合物、或(2)芳香族或脂肪族二羧酸、或(3)芳香族羥基羧酸、或(4)芳香族二胺、芳香族羥胺或芳香族胺基羧酸等為原料的共聚物等。液晶聚合物薄膜4的表面可為粗面,亦可為平滑面。液晶聚合物薄膜4的 厚度為例如12μm以上、200μm以下。液晶聚合物薄膜4係被疊合在第1金屬箔31的粗面31a。 The liquid crystal polymer film 4 is formed into a film-like liquid crystal polymer. For the liquid crystal polymer, for example, a polyarylate-based liquid crystal polymer, a wholly aromatic polyester, or a semi-rigid aromatic polyester, or a polyester decylamine or the like is used. Alternatively, in the case of a liquid crystal polymer, (1) an aromatic or aliphatic dihydroxy compound, or (2) an aromatic or aliphatic dicarboxylic acid, or (3) an aromatic hydroxycarboxylic acid, or (4) A copolymer of a raw material such as an aromatic diamine, an aromatic hydroxylamine or an aromatic aminocarboxylic acid. The surface of the liquid crystal polymer film 4 may be a rough surface or a smooth surface. Liquid crystal polymer film 4 The thickness is, for example, 12 μm or more and 200 μm or less. The liquid crystal polymer film 4 is laminated on the rough surface 31a of the first metal foil 31.
第2金屬箔32係被疊合在液晶聚合物薄膜4。第2金屬箔32為電解金屬箔,使用例如銅箔、或不銹鋼箔、或鎳箔、或鎳鉻合金箔等。第2金屬箔32的材質係以與第1金屬箔31的材質為相同為佳。藉由使第2金屬箔32與第1金屬箔31的材質為相同,可抑制圖1B所示之附金屬箔之液晶聚合物薄膜1的翹曲。 The second metal foil 32 is laminated on the liquid crystal polymer film 4. The second metal foil 32 is an electrolytic metal foil, and for example, a copper foil, a stainless steel foil, a nickel foil, a nichrome foil, or the like is used. The material of the second metal foil 32 is preferably the same as the material of the first metal foil 31. By making the material of the second metal foil 32 and the first metal foil 31 the same, the warpage of the metal foil-attached liquid crystal polymer film 1 shown in FIG. 1B can be suppressed.
以下說明作為第2金屬箔32被使用之金屬箔(電解金屬箔)之製作方法。在包含金屬離子的電解液浸漬作為陰極來發揮作用的旋轉滾筒、及陽極電極。旋轉滾筒係由鈦等所形成。一邊使旋轉滾筒旋轉,一邊在陽極與陰極之間流通電流,藉此使金屬箔電沈積在旋轉滾筒上,另一方面,將金屬箔由旋轉滾筒的表面剝離。藉由該方法,連續製作金屬箔。例如,若金屬箔為銅箔,使用硫酸銅溶液作為電解液。 A method of producing a metal foil (electrolytic metal foil) used as the second metal foil 32 will be described below. A rotating drum and an anode electrode functioning as a cathode are immersed in an electrolytic solution containing metal ions. The rotating drum is formed of titanium or the like. While rotating the rotary drum, an electric current flows between the anode and the cathode, whereby the metal foil is electrodeposited on the rotary drum, and the metal foil is peeled off from the surface of the rotary drum. By this method, a metal foil is continuously produced. For example, if the metal foil is a copper foil, a copper sulfate solution is used as the electrolytic solution.
第2金屬箔32中的粗面32a係電解金屬箔之原未與旋轉滾筒相接的面。此外,第2金屬箔32中的平滑面32b係電解金屬箔之原與旋轉滾筒相接的面。在此,粗面32a亦被稱為粗糙面(Mat面)、M面。此外,平滑面32b亦被稱為光澤面(Shiny面)、S面。 The rough surface 32a of the second metal foil 32 is a surface of the electrolytic metal foil that is not in contact with the rotating drum. Further, the smooth surface 32b of the second metal foil 32 is a surface on which the original of the electrolytic metal foil is in contact with the rotary drum. Here, the rough surface 32a is also referred to as a rough surface (Mat surface) and an M surface. Further, the smooth surface 32b is also referred to as a glossy surface (Shiny surface) and an S surface.
平滑面32b的表面形成為旋轉滾筒的表面狀態被轉印的形狀,因此一般為平滑。平滑面32b的十點平均粗糙度Rz並未特別限定,若為例如0.5μm以上、2.5μm以下即 可。 The surface of the smooth surface 32b is formed into a shape in which the surface state of the rotary drum is transferred, and thus is generally smooth. The ten-point average roughness Rz of the smooth surface 32b is not particularly limited, and is, for example, 0.5 μm or more and 2.5 μm or less. can.
另一方面,粗面32a係金屬進行電沈積而析出的面。電沈積時的電沈積速度並非遍及旋轉滾筒的表面全體為均一,會依旋轉滾筒的稍微的表面狀態的不同或電解液的流動方式等而發生不均。因此,在金屬箔的厚度會發生不均。若因金屬箔的厚度不均而產生突起部,突起部近傍的電解液中的電解密度會變高,該突起部係比周圍更加容易被電沈積金屬。結果,在粗面32a全體形成凹凸,可得經粗面化的表面狀態。該粗糙度係可藉由調整電解液濃度或添加劑等電解條件來控制。粗面32a的十點平均粗糙度Rz係以1.0μm以上、5.0μm以下為佳。 On the other hand, the rough surface 32a is a surface on which a metal is deposited by electrodeposition. The electrodeposition speed at the time of electrodeposition is not uniform throughout the entire surface of the rotary drum, and may vary depending on the slight surface state of the rotary drum or the flow pattern of the electrolyte. Therefore, unevenness occurs in the thickness of the metal foil. When the projection is formed due to the uneven thickness of the metal foil, the electrolytic density in the electrolytic solution near the projection becomes high, and the projection is more easily electrodeposited than the surroundings. As a result, irregularities are formed on the entire rough surface 32a, and a roughened surface state can be obtained. This roughness can be controlled by adjusting the electrolyte concentration or the electrolytic conditions such as additives. The ten-point average roughness Rz of the rough surface 32a is preferably 1.0 μm or more and 5.0 μm or less.
印刷配線板所使用的電解銅箔係為確保與構成絕緣層的樹脂的密接性,有對粗面另外施行形成銅粒等微粒子的粗化處理,所謂微粒子附著處理的情形。因微粒子附著處理而定準效應提升之故。該微粒子附著處理亦被稱為附隆起的粗化處理。 In the electrolytic copper foil used for the printed wiring board, in order to ensure adhesion to the resin constituting the insulating layer, a roughening treatment for forming fine particles such as copper particles on the rough surface may be performed, and the microparticle adhesion treatment may be performed. The quasi-effect is improved due to the adhesion treatment of the particles. This microparticle attachment treatment is also referred to as a roughening treatment with an ridge.
但是,在本實施形態中,在第2金屬箔32的粗面32a係以未被施行微粒子附著處理為佳。在本實施形態中,依序重疊第1金屬箔31、液晶聚合物薄膜4、及第2金屬箔32,藉由加熱及加壓,製造附金屬箔之液晶聚合物薄膜1(積層體)。此外,藉由將第2金屬箔32由該積層體剝離,液晶聚合物薄膜4之已剝離第2金屬箔32的面即成為粗面。此外,在液晶聚合物薄膜4之已剝離第2金屬箔32的面疊合接合薄片5,在接合薄片5疊合芯材 7來製作多層基板20。接著,藉由將多層基板20進行加熱及加壓,而得多層印刷配線板2(參照圖2A~圖2C)。若對第2金屬箔32的粗面32a施行微粒子附著處理,液晶聚合物薄膜4與第2金屬箔32的密接強度會變得過強。結果,會有難以將第2金屬箔32由液晶聚合物薄膜4剝離的情形。此外,當將第2金屬箔32剝離時,會有銅粒等微粒子由第2金屬箔32脫落而殘留在液晶聚合物薄膜4內的可能性。如此一來,形成為銅粒等微粒子被埋入在多層印刷配線板2的狀態,此形成為原因而有在電路間引起短路、或產生遷移(migration)的可能性。 However, in the present embodiment, it is preferable that the rough surface 32a of the second metal foil 32 is not subjected to the fine particle adhesion treatment. In the present embodiment, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are stacked in this order, and a liquid crystal polymer film 1 (layered body) with a metal foil is produced by heating and pressurization. Further, by peeling off the second metal foil 32 from the laminated body, the surface of the liquid crystal polymer film 4 from which the second metal foil 32 has been peeled off becomes a rough surface. Further, the bonding sheet 5 is laminated on the surface of the liquid crystal polymer film 4 from which the second metal foil 32 has been peeled off, and the core sheet is laminated on the bonding sheet 5. 7 to fabricate the multilayer substrate 20. Next, the multilayer wiring board 20 is heated and pressurized to multiply the printed wiring board 2 (see FIGS. 2A to 2C). When the fine particle adhesion treatment is performed on the rough surface 32a of the second metal foil 32, the adhesion strength between the liquid crystal polymer film 4 and the second metal foil 32 is excessively strong. As a result, it may be difficult to peel off the second metal foil 32 from the liquid crystal polymer film 4. In addition, when the second metal foil 32 is peeled off, fine particles such as copper particles may fall off from the second metal foil 32 and remain in the liquid crystal polymer film 4 . As a result, fine particles such as copper particles are embedded in the multilayer printed wiring board 2, and this may cause a short circuit or migration between circuits.
在第2金屬箔32的粗面32a係被施行脫模處理。換言之,藉由將脫模劑塗佈在粗面32a而形成有脫模層32c。以脫模劑而言,使用例如氟系脫模劑、或矽系脫模劑等。被施行脫模處理的粗面32a的十點平均粗糙度Rz係以1.0μm以上、5.0μm以下為佳。已施行脫模處理的第2金屬箔32的厚度為例如12μm以上、35μm以下。其中,在脫模處理前後,第2金屬箔32的粗面32a的十點平均粗糙度Rz及第2金屬箔32的厚度幾乎沒有改變。 The mold release treatment is performed on the rough surface 32a of the second metal foil 32. In other words, the release layer 32c is formed by applying a release agent to the rough surface 32a. For the release agent, for example, a fluorine-based release agent, a oxime-based release agent, or the like is used. The ten-point average roughness Rz of the rough surface 32a subjected to the mold release treatment is preferably 1.0 μm or more and 5.0 μm or less. The thickness of the second metal foil 32 subjected to the mold release treatment is, for example, 12 μm or more and 35 μm or less. However, the ten-point average roughness Rz of the rough surface 32a of the second metal foil 32 and the thickness of the second metal foil 32 hardly change before and after the mold release treatment.
接著具體說明附金屬箔之液晶聚合物薄膜1之製造方法。 Next, a method of manufacturing the liquid crystal polymer film 1 with a metal foil will be specifically described.
如圖1A及圖1B所示,將第1金屬箔31、液晶聚合物薄膜4、及第2金屬箔32依序重疊。亦即,以第1金屬箔31及第2金屬箔32夾著液晶聚合物薄膜4。此時,第1金屬箔31之重疊在液晶聚合物薄膜4的面較佳為粗 面31a。此外,第2金屬箔32之重疊在液晶聚合物薄膜4的面為粗面32a,在該粗面32a被施行脫模處理而形成有脫模層32c。在如上所述重疊的狀態下,以預定期間進行加熱及加壓而將積層體成形。該成形可為連續式,亦可為單片式。在連續式中,將第1金屬箔31、液晶聚合物薄膜4、第2金屬箔32均形成為長形,且將該等一邊以長邊方向搬送一邊成形。在單片式中,將第1金屬箔31、液晶聚合物薄膜4、第2金屬箔32均一致切成預定大小而形成為1組(set),1組1組地成形。以成形條件而言,例如以250℃以上、350℃以下的溫度,1分鐘以上、120分鐘以下,施加0.5MPa以上、6MPa以下的壓力。藉由加熱及加壓,液晶聚合物薄膜4會軟化,該經軟化的液晶聚合物薄膜4被接著在第1金屬箔31及第2金屬箔32。之後,若停止加熱及加壓而視需要進行冷卻時,原軟化的液晶聚合物薄膜4會固化,且連同第1金屬箔31及第2金屬箔32一起一體化,而得圖1B所示之附金屬箔之液晶聚合物薄膜1(積層體)。 As shown in FIG. 1A and FIG. 1B, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are sequentially stacked. In other words, the liquid crystal polymer film 4 is interposed between the first metal foil 31 and the second metal foil 32. At this time, the surface of the liquid crystal polymer film 4 in which the first metal foil 31 is superposed is preferably thick. Face 31a. Further, the surface of the second metal foil 32 which is superposed on the liquid crystal polymer film 4 is a rough surface 32a, and the rough surface 32a is subjected to a mold release treatment to form a release layer 32c. In the state of being superposed as described above, the laminate is formed by heating and pressurizing for a predetermined period of time. The forming can be continuous or monolithic. In the continuous type, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are each formed into an elongated shape, and the one side is formed while being transported in the longitudinal direction. In the one-piece type, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are uniformly cut into a predetermined size to form one set, and one set is formed into one set. In the molding conditions, for example, a pressure of 0.5 MPa or more and 6 MPa or less is applied at a temperature of 250 ° C or more and 350 ° C or less for 1 minute or more and 120 minutes or less. The liquid crystal polymer film 4 is softened by heating and pressurization, and the softened liquid crystal polymer film 4 is followed by the first metal foil 31 and the second metal foil 32. Thereafter, when the heating and the pressure are stopped and cooling is performed as necessary, the originally softened liquid crystal polymer film 4 is solidified, and integrated together with the first metal foil 31 and the second metal foil 32, and the film shown in FIG. 1B is obtained. A liquid crystal polymer film 1 (layered body) with a metal foil.
在如上所述所得之附金屬箔之液晶聚合物薄膜1中,第1金屬箔31之重疊在液晶聚合物薄膜4的面為粗面31a,因此藉由定準效應(anchor effect),第1金屬箔31與液晶聚合物薄膜4的密接力會提升。另一方面,第2金屬箔32的粗面32a的微細凹凸的形狀被轉印在液晶聚合物薄膜4。如圖1C所示,若將第2金屬箔32由附金屬箔之液晶聚合物薄膜1剝離,液晶聚合物薄膜4的粗面 4a會露出。粗面4a係被轉印第2金屬箔32的粗面32a,而形成有微細凹凸。如上所示,即使未進行蝕刻,亦可將液晶聚合物薄膜4的表面粗面化。 In the metal foil-attached liquid crystal polymer film 1 obtained as described above, the surface of the liquid crystal polymer film 4 overlapped by the first metal foil 31 is a rough surface 31a, so that the first effect is the first effect. The adhesion between the metal foil 31 and the liquid crystal polymer film 4 is enhanced. On the other hand, the shape of the fine unevenness of the rough surface 32a of the second metal foil 32 is transferred to the liquid crystal polymer film 4. As shown in FIG. 1C, when the second metal foil 32 is peeled off from the metal foil-attached liquid crystal polymer film 1, the rough surface of the liquid crystal polymer film 4 4a will be exposed. The rough surface 4a is transferred to the rough surface 32a of the second metal foil 32, and fine unevenness is formed. As described above, the surface of the liquid crystal polymer film 4 can be roughened even if etching is not performed.
若被施加脫模處理的第2金屬箔32的粗面32a的十點平均粗糙度Rz為1.0μm以上,可在液晶聚合物薄膜4形成可更加提高與接合薄片5(參照圖2A~圖2C)的密接性的粗面4a。在第2金屬箔32的粗面32a被施行脫模處理而形成有脫模層32c。因此,若為具有十點平均粗糙度Rz為5.0μm以下的粗面32a的第2金屬箔32,可輕易地將第2金屬箔32由附金屬箔之液晶聚合物薄膜1剝離。亦即,第2金屬箔32的粗面32a的十點平均粗糙度Rz係以1.0μm以上、5.0μm以下為佳。具體而言,液晶聚合物薄膜4與第2金屬箔32的剝離強度係以0.4N/mm以下為佳。藉此,可更輕易地將第2金屬箔32由附金屬箔之液晶聚合物薄膜1剝離。剝離強度的實質下限為0.01N/mm。亦即,液晶聚合物薄膜4與第2金屬箔32的剝離強度係以0.01N/mm以上、0.4N/mm以下為佳。 When the ten-point average roughness Rz of the rough surface 32a of the second metal foil 32 to which the mold release treatment is applied is 1.0 μm or more, the liquid crystal polymer film 4 can be formed and the bonding sheet 5 can be further improved (see FIGS. 2A to 2C). The adhesion of the rough surface 4a. The mold release layer 32c is formed by performing a mold release process on the rough surface 32a of the 2nd metal foil 32. Therefore, the second metal foil 32 can be easily peeled off from the metal foil-attached liquid crystal polymer film 1 by the second metal foil 32 having the rough surface 32a having a ten-point average roughness Rz of 5.0 μm or less. In other words, the ten-point average roughness Rz of the rough surface 32a of the second metal foil 32 is preferably 1.0 μm or more and 5.0 μm or less. Specifically, the peeling strength of the liquid crystal polymer film 4 and the second metal foil 32 is preferably 0.4 N/mm or less. Thereby, the second metal foil 32 can be more easily peeled off from the metal foil-attached liquid crystal polymer film 1. The substantial lower limit of the peel strength is 0.01 N/mm. In other words, the peeling strength of the liquid crystal polymer film 4 and the second metal foil 32 is preferably 0.01 N/mm or more and 0.4 N/mm or less.
接著參照圖2A~圖2C,說明使用藉由上述方法所製造之附金屬箔之液晶聚合物薄膜1之多層印刷配線板2之製造方法。 Next, a method of manufacturing the multilayer printed wiring board 2 using the metal foil-attached liquid crystal polymer film 1 produced by the above method will be described with reference to Figs. 2A to 2C.
首先說明在多層印刷配線板2的製造中所使用的接合薄片5、芯材7。 First, the bonding sheet 5 and the core material 7 used in the production of the multilayer printed wiring board 2 will be described.
接合薄片5係形成為薄片狀的液晶聚合物。如後所述,接合薄片5的液晶聚合物係以使用熔點比形成液晶聚 合物薄膜4的液晶聚合物為更低的液晶聚合物為佳。但是,接合薄片5的液晶聚合物亦可與液晶聚合物薄膜4的液晶聚合物為相同。接合薄片5的表面可為粗面,亦可為平滑面。接合薄片5的厚度係例如25μm以上、200μm以下。 The bonding sheet 5 is formed into a sheet-like liquid crystal polymer. As will be described later, the liquid crystal polymer of the bonding sheet 5 is formed by using a melting point ratio to form a liquid crystal polymer. The liquid crystal polymer of the film 4 is preferably a lower liquid crystal polymer. However, the liquid crystal polymer of the bonding sheet 5 may be the same as the liquid crystal polymer of the liquid crystal polymer film 4. The surface of the bonding sheet 5 may be a rough surface or a smooth surface. The thickness of the bonding sheet 5 is, for example, 25 μm or more and 200 μm or less.
芯材7係形成為薄片狀或長形狀的液晶聚合物,在表面設有導體圖案6。芯材7的液晶聚合物亦可與液晶聚合物薄膜4的液晶聚合物為相同。在芯材7的至少單面係設有導體圖案6。在本實施形態中,係說明在芯材7的其中一面設有導體圖案6,在另一面設有金屬箔33的情形。但是,在另一面亦可未設有金屬箔33。 The core material 7 is formed into a sheet-like or long-shaped liquid crystal polymer, and a conductor pattern 6 is provided on the surface. The liquid crystal polymer of the core material 7 may be the same as the liquid crystal polymer of the liquid crystal polymer film 4. A conductor pattern 6 is provided on at least one side of the core material 7. In the present embodiment, a case where the conductor pattern 6 is provided on one surface of the core material 7 and the metal foil 33 is provided on the other surface will be described. However, the metal foil 33 may not be provided on the other side.
例如,在薄片狀的液晶聚合物的兩面重疊金屬箔的粗面,而在液晶聚合物接著金屬箔之後,以蝕刻將單面的金屬箔的不必要部分去除而設置導體圖案6,藉此獲得芯材7。在芯材7之設有導體圖案6的面,露出液晶聚合物的部分係被轉印以蝕刻被去除的金屬箔的粗面的形狀,因此形成為粗面7a。藉此,可更加提高在製造多層印刷配線板2時與接合薄片5的密接性。芯材7的厚度為例如12μm以上、200μm以下。導體圖案6及金屬箔33的厚度為例如5μm以上、70μm以下。 For example, the rough surface of the metal foil is overlapped on both sides of the flaky liquid crystal polymer, and after the liquid crystal polymer is followed by the metal foil, the unnecessary portion of the single-sided metal foil is removed by etching to provide the conductor pattern 6, thereby obtaining Core material 7. On the surface of the core material 7 on which the conductor pattern 6 is provided, the portion where the liquid crystal polymer is exposed is transferred to etch the shape of the rough surface of the removed metal foil, and thus is formed into the rough surface 7a. Thereby, the adhesion to the bonding sheet 5 at the time of manufacturing the multilayer printed wiring board 2 can be further improved. The thickness of the core material 7 is, for example, 12 μm or more and 200 μm or less. The thickness of the conductor pattern 6 and the metal foil 33 is, for example, 5 μm or more and 70 μm or less.
接著說明多層印刷配線板2之具體製造方法。多層印刷配線板2之製造方法係在製作附金屬箔之液晶聚合物薄膜1(積層體)之後,具有剝離工程、及積層工程。 Next, a specific manufacturing method of the multilayer printed wiring board 2 will be described. The manufacturing method of the multilayer printed wiring board 2 is a peeling process and a lamination process after the liquid-crystal polymer film 1 ( laminated body) with metal foil is manufactured.
在剝離工程中,係如圖1B及圖1C所示,將第2金 屬箔32由附金屬箔之液晶聚合物薄膜1剝離,製作單側金屬箔液晶聚合物薄膜10。在第2金屬箔32的粗面32a係被施行脫模處理而形成有脫模層32c,因此第2金屬箔32係可輕易剝離。 In the stripping project, as shown in Figure 1B and Figure 1C, the second gold will be The genus foil 32 is peeled off from the liquid crystal polymer film 1 with a metal foil to form a one-side metal foil liquid crystal polymer film 10. Since the rough surface 32a of the second metal foil 32 is subjected to a mold release treatment to form the release layer 32c, the second metal foil 32 can be easily peeled off.
在積層工程中,係如圖2A及圖2B所示,將單側金屬箔液晶聚合物薄膜10、接合薄片5、及芯材7依序重疊,且進行加熱加壓。 In the laminate process, as shown in FIG. 2A and FIG. 2B, the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 are sequentially superposed and heated and pressurized.
在積層工程中,將單側金屬箔液晶聚合物薄膜10之未形成有第1金屬箔31的面(粗面4a)重疊在接合薄片5的其中一面,將芯材7之設有導體圖案6的面(包含粗面7a)重疊在接合薄片5的另一面。在如上所示重疊的狀態下以預定期間進行加熱加壓而將多層印刷配線板2成形。該成形可為連續式,亦可為單片式。在連續式中,係將單側金屬箔液晶聚合物薄膜10、接合薄片5、芯材7均形成為長形,且將該等一邊以長邊方向搬送一邊成形。在單片式中,係將單側金屬箔液晶聚合物薄膜10、接合薄片5、芯材7均一致切成預定大小而形成為1組,且1組1組地成形。 In the lamination process, the surface (the rough surface 4a) of the single-sided metal foil liquid crystal polymer film 10 on which the first metal foil 31 is not formed is superposed on one side of the bonding sheet 5, and the conductor pattern 6 of the core material 7 is provided. The face (including the rough face 7a) is superposed on the other face of the bonding sheet 5. The multilayer printed wiring board 2 is molded by heating and pressurizing for a predetermined period of time in a state of being overlapped as described above. The forming can be continuous or monolithic. In the continuous type, the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 are each formed into an elongated shape, and the one side is formed while being conveyed in the longitudinal direction. In the one-piece type, the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 are uniformly cut into a predetermined size to form one set, and one set is formed into one set.
以成形條件而言,例如以250℃以上、350℃以下的溫度,以1分鐘以上、120分鐘以下,施加0.5MPa以上、6MPa以下的壓力。 In the molding conditions, for example, a pressure of 0.5 MPa or more and 6 MPa or less is applied at a temperature of 250 ° C or more and 350 ° C or less for 1 minute or more and 120 minutes or less.
構成單側金屬箔液晶聚合物薄膜10、接合薄片5、芯材7的液晶聚合物藉由加熱及加壓而軟化。接著,藉由該經軟化的液晶聚合物,單側金屬箔液晶聚合物薄膜10與 接合薄片5相接著,且接合薄片5與芯材7相接著。之後,若停止加熱及加壓而視需要進行冷卻時,原經軟化的液晶聚合物會固化,單側金屬箔液晶聚合物薄膜10、接合薄片5、芯材7一體化,而得如圖2B所示之多層印刷配線板2。在本實施形態中,係顯示3層多層印刷配線板2。 The liquid crystal polymer constituting the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 is softened by heating and pressurization. Next, by the softened liquid crystal polymer, the single-sided metal foil liquid crystal polymer film 10 and The bonding sheets 5 are successively joined, and the bonding sheets 5 are followed by the core material 7. Thereafter, when the heating and the pressure are stopped and cooling is performed as needed, the softened liquid crystal polymer is solidified, and the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 are integrated, and as shown in FIG. 2B. The multilayer printed wiring board 2 is shown. In the present embodiment, a three-layer multilayer printed wiring board 2 is displayed.
構成單側金屬箔液晶聚合物薄膜10、接合薄片5、芯材7的液晶聚合物係固化,在多層印刷配線板2中形成為絕緣層8。芯材7的導體圖案6係被配置在絕緣層8的內部而形成為內層圖案6a。 The liquid crystal polymer constituting the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 is cured, and is formed as the insulating layer 8 in the multilayer printed wiring board 2. The conductor pattern 6 of the core material 7 is disposed inside the insulating layer 8 to form the inner layer pattern 6a.
接合薄片5的表面較佳為粗面。但是接合薄片5的表面即使為平滑,單側金屬箔液晶聚合物薄膜10由於具有經粗面化的表面(粗面4a),因此藉由該粗面4a,與接合薄片5的密接性會提升。此外,芯材7由於具有經粗面化的表面(粗面7a),因此藉由該粗面7a,與接合薄片5的密接性會提升。如上所示,單側金屬箔液晶聚合物薄膜10與接合薄片5的界面45、及接合薄片5與芯材7的界面57被充分接著,因此抑制層間剝離。 The surface of the bonding sheet 5 is preferably a rough surface. However, even if the surface of the bonding sheet 5 is smooth, the one-side metal foil liquid crystal polymer film 10 has a roughened surface (rough surface 4a), so that the adhesion to the bonding sheet 5 is improved by the rough surface 4a. . Further, since the core material 7 has a roughened surface (rough surface 7a), the adhesion to the bonding sheet 5 is enhanced by the rough surface 7a. As described above, the interface 45 between the one-side metal foil liquid crystal polymer film 10 and the bonding sheet 5, and the interface 57 between the bonding sheet 5 and the core material 7 are sufficiently adhered, thereby suppressing interlayer peeling.
在此,在附金屬箔之液晶聚合物薄膜1中(亦即單側金屬箔液晶聚合物薄膜10中)的液晶聚合物薄膜4的熔點係以比接合薄片5的熔點為更高為佳。此外,積層工程的加熱溫度係以比附金屬箔之液晶聚合物薄膜1中的液晶聚合物薄膜4的熔點為更低、且比接合薄片5的熔點為更高為佳。藉此,在維持單側金屬箔液晶聚合物薄膜10中 之形成在液晶聚合物薄膜4的表面的粗面4a的粗化狀態的情況下,接合薄片5會軟化。因此,接合薄片5中的樹脂會流至液晶聚合物薄膜4的粗面4a的凹部。結果,在液晶聚合物薄膜4與接合薄片5之間獲得較強的定準效應,密接會提升。 Here, the melting point of the liquid crystal polymer film 4 in the metal foil-attached liquid crystal polymer film 1 (that is, in the one-side metal foil liquid crystal polymer film 10) is preferably higher than the melting point of the bonding sheet 5. Further, the heating temperature of the laminate process is preferably lower than the melting point of the liquid crystal polymer film 4 in the liquid crystal polymer film 1 with metal foil attached, and higher than the melting point of the bonding sheet 5. Thereby, in maintaining the one-side metal foil liquid crystal polymer film 10 When the rough surface 4a of the surface of the liquid crystal polymer film 4 is formed in a roughened state, the bonding sheet 5 is softened. Therefore, the resin in the bonding sheet 5 flows to the concave portion of the rough surface 4a of the liquid crystal polymer film 4. As a result, a strong registration effect is obtained between the liquid crystal polymer film 4 and the bonding sheet 5, and the adhesion is enhanced.
若在圖2B所示之多層印刷配線板2適用例如減成法,可得圖2C所示之多層印刷配線板2。藉由以蝕刻將第1金屬箔31及金屬箔33的不必要部分去除,來形成外層圖案6b。此外,以貫穿絕緣層8的方式鑽孔,在該孔的內面施行鍍敷,藉此形成將多層印刷配線板2的兩面的外層圖案6b彼此導通的貫穿孔9a。此外,在絕緣層8鑽孔至到達內層圖案6a為止,且在該孔的內面施行鍍敷,藉此形成將內層圖案6a與外層圖案6b導通的通孔9b。 If the multilayer printed wiring board 2 shown in Fig. 2B is applied, for example, by a subtractive method, the multilayer printed wiring board 2 shown in Fig. 2C can be obtained. The outer layer pattern 6b is formed by removing unnecessary portions of the first metal foil 31 and the metal foil 33 by etching. Further, a hole is drilled through the insulating layer 8, and plating is performed on the inner surface of the hole, thereby forming a through hole 9a that electrically connects the outer layer patterns 6b on both surfaces of the multilayer printed wiring board 2. Further, the insulating layer 8 is drilled until reaching the inner layer pattern 6a, and plating is performed on the inner surface of the hole, thereby forming a through hole 9b that electrically connects the inner layer pattern 6a and the outer layer pattern 6b.
如以上說明所示,本實施形態多層印刷配線板2係在界面45及界面57的密接力強,可抑制層間剝離。而且,由於絕緣層8的全部係由液晶聚合物所構成,因此高頻特性優異。因此,本實施形態之多層印刷配線板2係可使用在智慧型手機、或平板PC、或筆記型PC、或網路伺服機器、或數位相機、或攝影機、或車載機器等高速傳送機器。 As shown in the above description, this embodiment In the multilayer printed wiring board 2, the adhesion between the interface 45 and the interface 57 is strong, and delamination between layers can be suppressed. Further, since all of the insulating layer 8 is composed of a liquid crystal polymer, it is excellent in high frequency characteristics. Therefore, the multilayer printed wiring board 2 of the present embodiment can be used in a high-speed transmission device such as a smart phone, a tablet PC, a notebook PC, a network servo device, a digital camera, a video camera, or an in-vehicle device.
以下藉由實施例,具體說明本揭示。 The present disclosure will be specifically described below by way of examples.
準備銅箔(古河電氣工業股份有限公司製「F2WS」、厚度12μm),作為第1金屬箔31。 Copper foil ("F2WS" manufactured by Furukawa Electric Co., Ltd., thickness: 12 μm) was prepared as the first metal foil 31.
準備KURARAY股份有限公司製「VECSTAR CT-Z」(厚度50μm、熔點330℃),作為液晶聚合物薄膜4。 "VECSTAR CT-Z" (thickness: 50 μm, melting point: 330 ° C) manufactured by KURARAY Co., Ltd. was prepared as the liquid crystal polymer film 4.
準備在粗面32a被施行脫模處理的銅箔(粗面32a的十點平均粗糙度Rz4.8μm、厚度18μm),作為第2金屬箔32。 A copper foil (a ten-point average roughness Rz 4.8 μm and a thickness of 18 μm of the rough surface 32a) subjected to the release treatment on the rough surface 32a is prepared as the second metal foil 32.
使用上述第1金屬箔31、液晶聚合物薄膜4、第2金屬箔32,如以下所示製造附金屬箔之液晶聚合物薄膜1。 Using the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32, a liquid crystal polymer film 1 with a metal foil was produced as follows.
如圖1A及圖1B所示,將第1金屬箔31、液晶聚合物薄膜4、及第2金屬箔32依序重疊。此時,第1金屬箔31之被重疊在液晶聚合物薄膜4的面為粗面31a,第2金屬箔32之被重疊在液晶聚合物薄膜4的面為粗面32a。在如上所述重疊的狀態下,以330℃、3MPa、5分鐘的成形條件進行加熱加壓而成形,藉此獲得如圖1B所示之附金屬箔之液晶聚合物薄膜1。 As shown in FIG. 1A and FIG. 1B, the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are sequentially stacked. At this time, the surface of the first metal foil 31 which is superposed on the liquid crystal polymer film 4 is the rough surface 31a, and the surface of the second metal foil 32 which is superposed on the liquid crystal polymer film 4 is the rough surface 32a. In the state of being overlapped as described above, the film was formed by heating and pressing at 330 ° C, 3 MPa, and 5 minutes, thereby obtaining a metal foil-attached liquid crystal polymer film 1 as shown in FIG. 1B.
準備KURARAY股份有限公司製「VECSTAR CT-F」(厚度50μm、熔點280℃),作為接合薄片5。 "VECSTAR CT-F" (thickness: 50 μm, melting point: 280 ° C) manufactured by KURARAY Co., Ltd. was prepared as the bonding sheet 5.
芯材7係在KURARAY股份有限公司製「VECSTAR CT-Z」(厚度100μm、熔點330℃)的兩面接著銅箔(古 河電氣工業股份有限公司製「F2WS」、厚度12μm)之後,藉由以蝕刻將單面的金屬箔的不必要部分去除而設置導體圖案6而構成。導體圖案6係藉由黑色氧化處理法進行氧化處理。 The core material 7 is a copper foil on both sides of "VECSTAR CT-Z" (thickness: 100 μm, melting point: 330 ° C) manufactured by KURARAY Co., Ltd. After the "F2WS" manufactured by Kawasaki Electric Co., Ltd. and having a thickness of 12 μm), the conductive pattern 6 is provided by removing unnecessary portions of the single-sided metal foil by etching. The conductor pattern 6 is oxidized by a black oxidation treatment.
使用上述附金屬箔之液晶聚合物薄膜1、接合薄片5、芯材7,經由如下所示之剝離工程及積層工程,製造多層印刷配線板2。 The multilayer printed wiring board 2 is produced by the above-described peeling process and laminate work using the metal foil-attached liquid crystal polymer film 1, the bonding sheet 5, and the core material 7.
在剝離工程中,係如圖1B及圖1C所示,將第2金屬箔32由附金屬箔之液晶聚合物薄膜1剝離,藉此製作單側金屬箔液晶聚合物薄膜10。液晶聚合物薄膜4與第2金屬箔32的剝離強度為0.08N/mm。 In the peeling process, as shown in FIG. 1B and FIG. 1C, the second metal foil 32 is peeled off from the metal foil-attached liquid crystal polymer film 1, whereby the one-side metal foil liquid crystal polymer film 10 is produced. The peeling strength of the liquid crystal polymer film 4 and the second metal foil 32 was 0.08 N/mm.
在積層工程中,係如圖2A及圖2B所示,將單側金屬箔液晶聚合物薄膜10、接合薄片5、及芯材7依序重疊,且進行加熱及加壓。亦即,以單側金屬箔液晶聚合物薄膜10、及芯材7夾著接合薄片5,進行加熱及加壓。 In the laminate process, as shown in FIG. 2A and FIG. 2B, the one-side metal foil liquid crystal polymer film 10, the bonding sheet 5, and the core material 7 are sequentially superposed, and heated and pressurized. That is, the bonding foil 5 is sandwiched between the one-side metal foil liquid crystal polymer film 10 and the core material 7, and heating and pressurization are performed.
在積層工程中,將單側金屬箔液晶聚合物薄膜10之未形成有第1金屬箔31的面(粗面4a)重疊在接合薄片5的其中一面,且將芯材7之設有導體圖案6的面(包含粗面7a)重疊在接合薄片5的另一面。在如上所示重疊的狀態下,以300℃、1MPa、10分鐘的成形條件進行加熱及加壓而成形,藉此獲得如圖2B所示之多層印刷配線板2。該多層印刷配線板2的絕緣層8的全部係由液晶聚合物所構成,因此高頻特性優異。 In the lamination process, the surface (the rough surface 4a) of the single-sided metal foil liquid crystal polymer film 10 on which the first metal foil 31 is not formed is superposed on one side of the bonding sheet 5, and the conductor pattern of the core material 7 is provided. The face of 6 (including the rough face 7a) is superposed on the other face of the bonding sheet 5. In the state of being overlapped as described above, heating and pressurization were carried out under molding conditions of 300 ° C, 1 MPa, and 10 minutes to obtain a multilayer printed wiring board 2 as shown in FIG. 2B. Since all of the insulating layers 8 of the multilayer printed wiring board 2 are composed of a liquid crystal polymer, they are excellent in high frequency characteristics.
除了準備粗面32a的十點平均粗糙度Rz為3.5μm的銅箔作為第2金屬箔32之外係與實施例1為相同。 The copper foil having a ten-point average roughness Rz of 3.5 μm prepared as the rough surface 32a was prepared as the second metal foil 32 except for the second metal foil 32.
除了準備粗面32a的十點平均粗糙度Rz為2.1μm的銅箔作為第2金屬箔32之外係與實施例1為相同。 The copper foil having a ten-point average roughness Rz of 2.1 μm prepared as the rough surface 32a was prepared as the second metal foil 32 except for the second metal foil 32.
除了準備粗面32a的十點平均粗糙度Rz為1.3μm的銅箔作為第2金屬箔32之外係與實施例1為相同。 The copper foil having the ten-point average roughness Rz of the rough surface 32a of 1.3 μm was prepared as the second metal foil 32 except that it was the same as that of the first embodiment.
除了準備粗面32a的十點平均粗糙度Rz為0.8μm的銅箔作為第2金屬箔32之外係與實施例1為相同。 The copper foil having the ten-point average roughness Rz of the rough surface 32a of 0.8 μm was prepared as the second metal foil 32 except that it was the same as that of the first embodiment.
除了準備平滑面32b的十點平均粗糙度Rz為2.1μm的銅箔作為第2金屬箔32、及依序重疊第1金屬箔31、液晶聚合物薄膜4、及第2金屬箔32時之第2金屬箔32之被重疊在液晶聚合物薄膜4的面係形成為平滑面32b之外,係與實施例1為相同。其中,如前所述,第2金屬箔32的粗糙度係可藉由調整電解條件來進行控制。因此,在比較例2中,即使為平滑面32b,十點平均粗糙度Rz 增大為2.1μm。但是,在比較例2中,亦以粗面32a比平滑面32b為更粗。 In addition to the preparation of the smooth surface 32b, the copper foil having a ten-point average roughness Rz of 2.1 μm is used as the second metal foil 32, and the first metal foil 31, the liquid crystal polymer film 4, and the second metal foil 32 are sequentially stacked. The second metal foil 32 is superposed on the surface of the liquid crystal polymer film 4 to form a smooth surface 32b, and is the same as that of the first embodiment. Here, as described above, the roughness of the second metal foil 32 can be controlled by adjusting the electrolysis conditions. Therefore, in Comparative Example 2, even if it is the smooth surface 32b, the ten-point average roughness Rz Increase to 2.1 μm. However, in Comparative Example 2, the rough surface 32a is also thicker than the smooth surface 32b.
在如以上所得之實施例及比較例中之多層印刷配線板2,測定在單側金屬箔液晶聚合物薄膜10與接合薄片5的界面45的密接力。密接力係依據JIS C 6471來測定。 In the multilayer printed wiring board 2 of the examples and the comparative examples obtained above, the adhesion force at the interface 45 between the one-side metal foil liquid crystal polymer film 10 and the bonding sheet 5 was measured. The adhesion is measured in accordance with JIS C 6471.
將評估結果顯示在表1。此外,在圖3~圖5顯示將第2金屬箔32由附金屬箔之液晶聚合物薄膜1剝離後的表面的照片。圖3、圖4係顯示將第2金屬箔32由藉由本實施形態所得之附金屬箔之液晶聚合物薄膜1剝離後的表面(粗面4a)的照片的圖。圖3係顯示在實施例2中所製作的液晶聚合物薄膜4的表面(粗面4a),圖4係顯示在實施例4中所製作的液晶聚合物薄膜4的表面(粗面4a)。圖5係顯示將第2金屬箔32由比較例2之附金屬箔之液晶聚合物薄膜1剝離後的表面(粗面4a)的照片的圖。亦即,圖5係顯示在比較例2中所製作的液晶聚合物薄膜4(粗面4a)的表面。 The evaluation results are shown in Table 1. Further, a photograph of the surface of the second metal foil 32 peeled off from the metal foil-attached liquid crystal polymer film 1 is shown in FIGS. 3 to 5. FIG. 3 and FIG. 4 are views showing photographs of the surface (rough surface 4a) of the second metal foil 32 separated from the liquid crystal polymer film 1 with metal foil obtained in the present embodiment. 3 shows the surface (rough surface 4a) of the liquid crystal polymer film 4 produced in Example 2, and FIG. 4 shows the surface (rough surface 4a) of the liquid crystal polymer film 4 produced in Example 4. FIG. 5 is a view showing a photograph of the surface (rough surface 4a) after the second metal foil 32 is peeled off from the liquid crystal polymer film 1 of the metal foil of Comparative Example 2. That is, Fig. 5 shows the surface of the liquid crystal polymer film 4 (rough surface 4a) produced in Comparative Example 2.
由評估結果可知,若將作為第2金屬箔32的銅箔的粗面32a重疊在液晶聚合物薄膜4,在實施例1~4中,粗面32a的十點平均粗糙度為1.3μm以上、4.8μm以下,在液晶聚合物薄膜4與接合薄片5的界面45的密接力良 好。 As a result of the evaluation, it is understood that the rough surface 32a of the copper foil as the second metal foil 32 is superposed on the liquid crystal polymer film 4, and in the first to fourth embodiments, the ten-point average roughness of the rough surface 32a is 1.3 μm or more. 4.8 μm or less, the adhesion between the liquid crystal polymer film 4 and the interface 45 of the bonding sheet 5 is good. it is good.
但是,在粗面32a的十點平均粗糙度為0.8μm的比較例1中,在液晶聚合物薄膜4與接合薄片5的界面45的密接力係比實施例1~4為差劣。 However, in Comparative Example 1 in which the ten-point average roughness of the rough surface 32a was 0.8 μm, the adhesion between the liquid crystal polymer film 4 and the interface 45 of the bonding sheet 5 was inferior to those of Examples 1 to 4.
此外,如比較例2所示,若將作為第2金屬箔32的銅箔的平滑面32b重疊在液晶聚合物薄膜4,即使十點平均粗糙度為2.1μm,在液晶聚合物薄膜4與接合薄片5的界面45的密接力亦比實施例1~4為差劣。 Further, as shown in the comparative example 2, when the smooth surface 32b of the copper foil as the second metal foil 32 is superposed on the liquid crystal polymer film 4, even if the ten-point average roughness is 2.1 μm, the liquid crystal polymer film 4 and the bonding are performed. The adhesion of the interface 45 of the sheet 5 is also inferior to that of the first to fourth embodiments.
比較例2的平滑面32b的十點平均粗糙度Rz(2.1μm)係大於實施例4的粗面32a的十點平均粗糙度Rz(1.3μm)。但是,雖然如此,比較例2的密接力係小於實施例4的密接力。 The ten-point average roughness Rz (2.1 μm) of the smooth surface 32b of Comparative Example 2 is larger than the ten-point average roughness Rz (1.3 μm) of the rough surface 32a of Example 4. However, in spite of this, the adhesion force of Comparative Example 2 was smaller than that of Example 4.
比較例2的平滑面32b係如前所述,為電解金屬箔之原與旋轉滾筒相接的面。在旋轉滾筒係當在清掃滾筒時在滾筒表面產生一定方向之條紋狀的研磨損傷。該研磨損傷在電解金屬箔表面形成為一定方向的條紋狀溝槽或突起而被轉印。被認為由於該一定方向的條紋狀溝槽或突起,比較例2的密接力變弱。 The smooth surface 32b of Comparative Example 2 is a surface in which the original of the electrolytic metal foil is in contact with the rotating drum as described above. In the rotating drum, when the drum is cleaned, a stripe-shaped grinding damage in a certain direction is generated on the surface of the drum. This polishing damage is transferred by forming a stripe-shaped groove or protrusion in a certain direction on the surface of the electrolytic metal foil. It is considered that the adhesion force of Comparative Example 2 is weakened by the stripe-shaped grooves or protrusions in the predetermined direction.
另一方面,實施例1~4的粗面32a係電解金屬箔之原未與旋轉滾筒相接的面。在該粗面32a係形成有不具方向性的梨皮狀的凹凸。被認為藉由該凹凸,密接性被改善。 On the other hand, the rough faces 32a of Examples 1 to 4 are the faces of the electrolytic metal foil which are not in contact with the rotating drum. In the rough surface 32a, a pear-shaped unevenness which is not directional is formed. It is considered that the adhesion is improved by the unevenness.
如以上所示,藉由本揭示,即使未進行蝕刻,亦可將附金屬箔之液晶聚合物薄膜1中之液晶聚合物薄膜4的表面進行粗面化。此外,藉由使用該經粗面化的表面,附金屬箔之液晶聚合物薄膜1與接合薄片5的密接性會提升。 As described above, according to the present disclosure, the surface of the liquid crystal polymer film 4 in the metal foil-attached liquid crystal polymer film 1 can be roughened without being etched. Further, by using the roughened surface, the adhesion of the metal foil-attached liquid crystal polymer film 1 to the bonding sheet 5 is improved.
4‧‧‧液晶聚合物薄膜 4‧‧‧Liquid polymer film
31a、32a‧‧‧粗面 31a, 32a‧‧‧
31‧‧‧第1金屬箔 31‧‧‧1st metal foil
31b、32b‧‧‧平滑面 31b, 32b‧‧‧ smooth surface
32‧‧‧第2金屬箔 32‧‧‧2nd metal foil
32c‧‧‧脫模層 32c‧‧‧ release layer
40‧‧‧第1面 40‧‧‧1st
41‧‧‧第2面 41‧‧‧2nd
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US10668697B2 (en) * | 2016-05-20 | 2020-06-02 | Panasonic Intellectual Property Management Co., Ltd. | Method for manufacturing metal clad laminated board, method for manufacturing electronic circuit board, and rigid body pendulum type viscoelasticity measuring device |
CN105973091A (en) * | 2016-06-22 | 2016-09-28 | 韩德庆 | Glass static gate digital display caliper |
KR102214641B1 (en) * | 2018-07-16 | 2021-02-10 | 삼성전기주식회사 | Printed circuit board |
CN114007832B (en) * | 2019-06-17 | 2024-04-19 | 株式会社可乐丽 | Method for producing metal-clad laminate |
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US5719354A (en) * | 1994-09-16 | 1998-02-17 | Hoechst Celanese Corp. | Monolithic LCP polymer microelectronic wiring modules |
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JP2000264987A (en) * | 1999-03-11 | 2000-09-26 | Kuraray Co Ltd | Heat treatment of thermoplastic liquid crystal polymer film |
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CN101795859A (en) * | 2007-11-13 | 2010-08-04 | 三星精密化学株式会社 | Prepreg having uniform permittivity, and metal clad laminates and print wiring board using the same |
JP5382410B2 (en) * | 2008-09-25 | 2014-01-08 | 日立化成株式会社 | Three-layer wiring board and manufacturing method thereof |
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