TW201600291A - Multi-point diamond tool - Google Patents

Abstract

The present invention provides a multi-point diamond tool, which can reduce the number of tool exchange, even if the sharp point is worn out by scribing. The outer periphery of the base 11 of the diamond tool 10 is provided with a plurality of notches 14-19 with each end part of the notch as a sharp point. The diamond tool 10 makes the sharp point contact the substrate for scribing without rolling. In the case that the sharp point is worn out by scribing, the diamond tool 10 is made to rotate to allow the other end part of the notch to become a scribing sharp point. Thereby, for one diamond tool, a plurality of sharp points can be used to reduce the exchange frequency.

Description

Multi-point diamond tool

The present invention relates to a multi-point diamond tool for scribing a substrate of a brittle material such as a glass substrate or a tantalum wafer by a diamond tip.

Conventionally, in order to scribe a glass substrate or a tantalum wafer, a tool using a diamond cusp having a score wheel or a single crystal diamond is used. For the glass substrate, the scriber wheel is generally used for rolling with respect to the substrate. However, from the viewpoint of improving the strength of the substrate after the scribe, the diamond cusp using the fixed blade is also reviewed. Patent Documents 1 and 2 mention a sharp point cutter for marking a high hardness substrate such as a sapphire wafer or an alumina wafer. In these patent documents, a tool having a sharp point for cutting on a ridge line of a pyramid or a tool having a tip end tapered is used. Further, in Patent Document 3, in order to scribe a glass plate, there is mentioned a scribing device which uses a glass scribing tool having a conical front end.

Patent Document 1: Japanese Laid-Open Patent Publication No. 2003-183040

Patent Document 2: Japanese Laid-Open Patent Publication No. 2005-079529

Patent Document 3: Japanese Laid-Open Patent Publication No. 2013-043787

Since the sharp points are worn (wearing) if they are scored by a conventional fixed blade tool, it is necessary to change the sharp points. Available in pyramidal or conical tools The apex of the apex is two parts or up to four parts. Therefore, there is a problem that the tool must be replaced when changing the sharp points of two parts or four parts, and the frequency of replacement is high. In addition, in the characterization of the tool, the cusp must contact the substrate at an appropriate angle. However, in the conventional tool, it is necessary to rotate the tool in the axial direction when the cusp is changed, and it is not easy to adjust the contact angle with high precision.

The present invention has been made in view of such conventional problems, and an object thereof is to provide a diamond tool capable of easily changing a cusp position and reducing an exchange frequency even when sharp point wear is used in scribing.

In order to solve the problem, the multi-point diamond tool of the present invention comprises: a susceptor which is rotationally symmetrical and at least a ridge line portion of the outer circumference is formed of diamonds; and a plurality of notches formed in a ridge line portion of the susceptor.

Here, it is preferable that the notches are formed at equal intervals on the outer circumference of the susceptor.

Here, it is preferable that the susceptor has a diamond layer formed on a ridge line portion thereof.

Here, it is preferable that the both ends of the notches have a smaller notch.

Here, it is preferable that each of the notches is formed by laser processing.

Here, it is preferable that each of the minute notches is formed by machining.

According to the present invention having such a general feature, a plurality of sharp points can be provided by forming a plurality of notches around the diamond tool. Therefore, it is possible to obtain an effect that even if a sharp point is worn (wearing), a new sharp point can be used by changing the fixed angle of the diamond tool, and the frequency of exchange of the diamond tool can be reduced. Further, since the sharp point can be changed while maintaining the mounting angle of the tool with respect to the substrate, the contact angle of the sharp point can be easily adjusted.

10, 30, 40‧ ‧ multi-point diamond tools

11, 31, 41‧‧‧ Pedestal

12, 32, 42‧‧‧through holes

13, 33, 43‧‧‧ polished surface

14~19, 34~37, 44~47‧‧‧ gap

44a, 44b, 45a, 45b, 46a, 46b, 47a, 47b‧‧‧ tiny gaps

Fig. 1 is a front view and a side view of a multi-point diamond tool according to a first embodiment of the present invention.

Fig. 2 is an enlarged view showing a first example of a notch of the diamond tool of the embodiment.

Fig. 3 is an enlarged view showing a second example of the notch of the diamond tool of the embodiment.

Fig. 4A is a front view showing the scribing of the diamond tool according to the first embodiment of the present invention.

Fig. 4B is a side view showing the scribing of the diamond tool according to the first embodiment of the present invention.

Fig. 5 is a front view showing a diamond tool according to a second embodiment of the present invention, and a view using the diamond tool.

Fig. 6 is a front view showing a diamond tool according to a third embodiment of the present invention, and a view using the diamond tool.

Next, a first embodiment of the present invention will be described. Fig. 1 is a front view and a side view showing an example of a multi-point diamond tool (hereinafter, simply referred to as a diamond tool) 10 of the present embodiment. The diamond tool 10 is a base 11 of a circularly symmetrical circular disk formed of a single crystal diamond and has a through hole 12 at its center. The diameter of the base 11 of the single crystal diamond is, for example, 2 mm to 20 mm. As shown in the side view of Fig. 1(a), the both ends of the circumferential portion are polished into a V shape to form a blade tip end portion 13 composed of a ridge line 13a and an inclined surface 13b. Further, as shown in the figure, the notches 14 to 19 are formed by laser processing at six locations of the blade tip end portion 13. Fig. 2 is an enlarged view showing the notch 14A of the first example. As shown in Fig. 2, the original circumferential portion shown by the solid line and the one-point chain line is formed as shown in the figure. The notch 14A is a portion where the ridge line 13a intersects the notch 14A as the cusp P1. From the cusp point P1, for example, the angle α with respect to the tangential line is set to 35°, for example, to a depth of about 5 μm, and further from this point, for example, at an angle of 3.5° with respect to the original tangent line, the notch 14A is formed. . The other five notches are also the same, and the intersection of the ridge line 13a and the notches 15A to 19A is set as the sharp point P2 to P6, respectively.

FIG. 3 is an enlarged view showing the notch 14B of the second example of the notch 14. In this case, for example, the cusp P1 is cut to a depth of 10 μm so that the angle α with respect to the tangential line is 35°, and then cut in a stepwise manner to form a notch. The other five gaps are also the same, and the intersections of the ridge line 13a and the notches 15B to 19B are respectively pointed as sharp points P2 to P6.

The case where the diamond tool 10 of this embodiment is scribed will be described with reference to FIGS. 4A and 4B. Further, in FIGS. 4A and 4B, the notch of the circumferential portion is exaggeratedly enlarged, and FIG. 4A is a side view from the front (front view), and FIG. 4B is a side view as viewed from the right side of FIG. 4A. When scribing, as shown in FIGS. 4A(a) and 4B(a), one sharp point P1 of the diamond tool 10 is fixed to the substrate 20, and the substrate 20 is moved in the direction of the arrow A shown in the figure. Perform a scribe. At this time, since the diamond tool 10 is not rolled, it is possible to perform scribing with the same sharp point. When the sharp point in contact with the substrate has deteriorated due to abrasion, as shown in FIGS. 4A(b) and 4B(b), the diamond tool 10 is rotated by 60° around the through hole 12 to make the adjacent The sharp point P2 is in contact with the substrate 20 and is scored in the same manner. When this operation is repeated, even if the sharp point is deteriorated by abrasion, it is possible to scribe with a new sharp point depending on the number of notches formed around the circular plate. Further, even if the diamond tool 10 is rotated, since the angle θ at which the ridge line of the tip end of the blade contacts the substrate does not change from the side view of the diamond tool 10, the contact angle of the cusp with respect to the substrate can be easily adjusted.

Further, in this embodiment, the notch of six portions is provided around the disk, but it is preferable to provide a plurality of notches as much as possible in the circumferential portion. The upper limit of the number of notches is the number of adjacent cusps that do not interfere with each other. Thereby, the cusp can be replaced by rotating the diamond tool when the cusps are worn, and the frequency of replacement of the diamond tool 10 can be reduced.

Next, a second embodiment of the present invention will be described with reference to Fig. 5 . Similarly to the first embodiment, the diamond tool 30 of the embodiment has a through hole 32 in the center of the disk-shaped base 31 of the single crystal diamond, and has a blade which is ground into a V shape from both sides of the circumference. Front end 33. Further, in the first embodiment described above, the shape of the notch is asymmetrical. However, in the second embodiment, as shown in Fig. 5(a), an arc-shaped notch 34 is formed along the circumference of the diamond tool 30. ~37. Such a gap can be easily formed by laser processing.

In the diamond tool 30, as shown in Fig. 5(b), the substrate 20 is scored with the end portion of one notch 34 as a sharp point. Further, when the cusp is worn, the diamond tool 30 is rotated by 90° along the axis (not shown) inserted through the through hole, so that the end of the adjacent notch 35 is used as in the above-described embodiment. Scratch and scribe. By repeating this action, it is possible to use the sharp points of the four parts. Further, once the sharp points of the four portions are completely worn, the diamond tool 30 is further reversed as shown in Fig. 5(c). Then, the different vertices of the notches 34 to 37 can be used as the sharp points to perform the same scribing. Therefore, it is possible to perform scoring in a total of eight points.

Next, a third embodiment of the present invention will be described with reference to Fig. 6 . In the same manner as in the first embodiment, the diamond tool 40 of the embodiment has a through hole 42 at the center of the disc-shaped base 41 of the single crystal diamond, and has a blade that is ground into a V shape from both sides of the circumference. Front end 43. Further, in the same manner as in the second embodiment described above, the four portions of the circumference portion are formed by laser irradiation. The positions are formed into arc-shaped notches 44 to 47. Further, the arcuate minute notches 44a, 44b are formed by machining at both end portions of the notch 44. Similarly to the other notches 45, 46, and 47, small arc-shaped micro-notches 45a, 45b, 46a, 46b, 47a, and 47b are formed at both end positions. In this case, the small notch on the circumference can precisely shape the shape of the notch portion by grinding by machining, and the surface roughness can be made small.

When the diamond tool 40 is used for scribing, as shown in FIG. 6(b), the intersection of the ridge line and the minute notch is used as a sharp point. In the event that the position is worn, the diamond tool 40 is rotated 90° each time to use the sharp points of adjacent notches. According to this, the position of the cusp can be changed four times for scribing. Further, once the sharp points of the four portions are completely worn, the diamond tool 40 is reversed as shown in Fig. 6(c). Accordingly, the outer side of the notch of each of the notches 44 to 47 can be similarly scored as a sharp point. In this way, the position of the cusp can be changed four times to perform the scribe, and the cusp of the total of eight times can be replaced for characterization.

Further, in the second and third embodiments described above, the notch of four portions is provided around the circular plate that serves as the susceptor. However, it is needless to say that more notches can be provided and the number of cusps can be increased. In the second and third embodiments, the notch is formed in an arc shape, but it may be cut into a V shape or a U shape in any shape as long as it is bilaterally symmetrical in the side view of the diamond tool. Further, in the third embodiment, the minute notches may be linear. Further, as for the method of forming the notch, in addition to the laser processing, a well-known processing method such as grinding or electric discharge machining can be used.

In each of the above embodiments, the notches are provided at equal intervals around the circular plate. In this case, the equal interval is effective in that the number of notches can be increased, and the sharp point can be changed by rotating the diamond tool at a fixed angle, and the contact angle of the pointed point can be easily fixed, but it is not Must be at equal intervals.

Further, in the above-described embodiment, the single crystal diamond is used to form the entire circular plate. However, since it is sufficient to have a diamond layer on the surface portion, it may be in the front end portion of the pedestal blade of the super hard alloy or the sintered diamond. The surface forms a layer of polycrystalline diamond and forms a gap therein. Further, a single crystal or a polycrystalline diamond having conductivity and containing impurities such as boron may also be used. By using a conductive diamond, it is possible to easily form a notch by electrical discharge machining.

Further, in each of the above embodiments, the base of the diamond tool is formed in a disk shape, but it is not necessarily required to have a disk shape, and the base may be formed in a polygonal shape. The base may be rotationally symmetrical with respect to the center of the through hole. When the pedestal of the polygon is cut, the portion including the apex may be cut into a straight line, or the portion including the apex may be cut into a V shape or a U shape. Further, the apex may be set such that the apex is a base point which is asymmetrically cut into a V shape or a U shape. In any case, the notch can be formed in such a manner that the ridge line and the notch form a point of intersection of the sharp points.

The multi-point diamond tool of the present invention can be used in a scoring apparatus for scribing a substrate of a brittle material, and in particular, a scribing object of high hardness which increases the wear of the diamond tool can be used effectively.

10‧‧‧Multiple diamond tools

11‧‧‧Base

12‧‧‧through holes

13‧‧‧Grinding surface

13a‧‧‧ ridgeline

13b‧‧‧ sloped surface

14~19‧‧‧ gap

Claims (6)

A multi-point diamond tool comprising: a susceptor having rotational symmetry and at least a peripheral portion of a ridge line portion formed of diamonds; and a plurality of notches formed at a ridge line portion of the base. The multi-point diamond tool of claim 1, wherein the notches are formed at equal intervals on the outer circumference of the base. For example, in the multi-point diamond tool of claim 1, wherein the base has a diamond layer formed on a ridgeline portion thereof. For example, the multi-point diamond tool of claim 1 has a smaller gap at both ends of the gap. For example, in the multi-point diamond tool of claim 1, wherein the notches are formed by laser processing. For example, in the multi-point diamond tool of claim 4, wherein the micro-nicks are formed by machining.