TW201546441A - Computer visual recognition output picture auxiliary integrated circuit selection system and selection method - Google Patents

Computer visual recognition output picture auxiliary integrated circuit selection system and selection method Download PDF

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TW201546441A
TW201546441A TW103119707A TW103119707A TW201546441A TW 201546441 A TW201546441 A TW 201546441A TW 103119707 A TW103119707 A TW 103119707A TW 103119707 A TW103119707 A TW 103119707A TW 201546441 A TW201546441 A TW 201546441A
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wafer
integrated circuit
report
output image
signal
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TW103119707A
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Qing-Po Chen
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Yealy Optic Electronic Co Ltd
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Abstract

The invention relates to a computer visual recognition output picture auxiliary integrated circuit selection system and selection method. The computer visual recognition output picture auxiliary integrated circuit selection system comprises an optical detection device, a scanning device, a tablet computer device and a grain suction device. The scanning device scans the detection result of the optical detection device and transmits the scanning result to the tablet computer, and the tablet computer displays a recognition signal for a user to quickly recognize. Moreover, the efficacies of reducing labor force cost and simultaneously enhancing quality yield and production speed can be realized through the selection method.

Description

電腦視覺辨識輸出圖像輔助積體電路挑選系統及挑選方法 Computer vision identification output image auxiliary integrated circuit selection system and selection method

本發明係有關於一種積體電路挑選系統及挑選方法,尤指一種利用電腦平板輸出檢測結果之電腦視覺辨識輸出圖像輔助積體電路挑選系統及挑選方法。 The invention relates to an integrated circuit selection system and a selection method, in particular to a computer vision identification output image auxiliary integrated circuit selection system and a selection method using a computer tablet output detection result.

當玻璃黏晶(Chip on Glass;COG)技術越來越普遍之際,使COG晶粒的檢驗需求也快速地在成長。除了在晶圓階段的檢驗外,為增加生產良率以及降低修復或重工的機會,放置在承載盤上的晶粒在被安裝到顯示面板前之檢驗也成為必要。為了滿足這些檢驗需求,少數用於檢驗承載盤上之晶粒之檢驗系統被開發。 As the chip on glass (COG) technology becomes more and more popular, the inspection requirements for COG grains are also growing rapidly. In addition to inspections at the wafer stage, in order to increase production yield and reduce the chance of repair or rework, the inspection of the die placed on the carrier disk before it is mounted to the display panel is also necessary. In order to meet these inspection requirements, a small number of inspection systems for inspecting the dies on the carrier tray were developed.

而自動光學檢測(Automated Optical Inspection,AOI)儀器的使用上也逐漸的重要,以使用自動光學檢測針對光學影像及影像比對檢測技術進行產品的檢測,並不斷以針對輕薄短小、密度高之電子產品的檢測需求而開發,在不需測試治具、不需電子量測且不破壞產品的情況下,可有效檢出元件的各種不良製程。 The use of Automated Optical Inspection (AOI) instruments is also becoming more and more important, using automatic optical inspection for optical image and image comparison detection technology to detect products, and constantly aiming at light, thin, high density electronic Developed for product inspection needs, it can effectively detect various bad processes of components without testing fixtures, electronic measurement, and product destruction.

又,一般晶圓的檢測主要區分有兩個階段,其第一階段為整片晶圓的檢測,其係將晶圓設置於自動光學檢測儀器以大範圍掃描的方式進行檢測,然後再由人工方式進行掃描式電子顯微鏡再檢測,將自動光學檢測儀器檢測出的瑕疵晶圓樣本再進行判別,而就晶粒的檢測上,則是將切割後 的晶粒透過人工以電子顯微鏡進行檢測,以將有缺陷之晶粒挑出,但以人工方式進行檢測所耗費之檢測成本大大提高,首先需耗費許多的人工成本,且進行挑選晶粒的人工需經過許多的教育訓練,才能有效利用目測方式得知有缺陷之晶粒,更且使用晶粒之對象眾多,所相對應之需求條件也相對複雜,而人工檢測之方式其整體之品質良率並無法有效維持與檢測作業速度也相對的降低,故習知技術具有下列缺點:1.檢測所耗費之成本高;2.整體之品質良率並無法有效維持;3.檢測作業速度低。 In addition, the detection of general wafers is mainly divided into two stages. The first stage is the inspection of the whole wafer. The wafer is set on the automatic optical inspection instrument to detect in a wide range of scanning, and then manually. The method is further performed by scanning electron microscope re-detection, and the 瑕疵 wafer sample detected by the automatic optical detecting instrument is further judged, and in the case of detecting the crystal grain, it is after cutting The crystal grains are manually detected by an electron microscope to pick out defective crystal grains, but the cost of detecting the manual inspection is greatly increased, firstly, a lot of labor costs are required, and manual processing of the crystal grains is performed. It takes a lot of education and training to effectively use the visual method to know the defective crystal grains. Moreover, there are many objects using the crystal grains, and the corresponding demand conditions are relatively complicated, and the overall quality yield of the manual detection method. The conventional technology has the following disadvantages: 1. The cost of the detection is high; 2. The overall quality yield cannot be effectively maintained; 3. The detection operation speed is low.

是以,要如何解決上述習用之問題與缺失,即為本案之發明人與從事此行業之相關廠商所亟欲研究改善之方向所在者。 Therefore, how to solve the above problems and problems in the past, that is, the inventors of this case and the relevant manufacturers engaged in this industry are eager to study the direction of improvement.

爰此,為有效解決上述之問題,本發明之主要目的在提供一種可有效降低人力成本且同時可提高品質良率與生產速度之電腦視覺辨識輸出圖像輔助積體電路挑選系統。 Accordingly, in order to effectively solve the above problems, the main object of the present invention is to provide a computer vision recognition output image auxiliary integrated circuit selection system which can effectively reduce labor costs and at the same time improve quality yield and production speed.

本發明之次要目的在提供一種可有效降低人力成本且同時可提高品質良率與生產速度之電腦視覺辨識輸出圖像輔助積體電路挑選系統。 A secondary object of the present invention is to provide a computer vision recognition output image assisted integrated circuit selection system that can effectively reduce labor costs while improving quality yield and production speed.

為達上述目的,本發明係提供一種電腦視覺辨識輸出圖像輔助積體電路挑選系統,係包括:一光學檢測裝置、一掃描裝置、一平板電腦裝置及一晶粒吸取裝置,其中所述光學檢測裝置主要具有至少一承載治具,該承載治具上可設置有複數晶圓定位模組,該等晶圓定位模組上分別定位有一晶圓,其各晶圓分別具有複數積體電路,且該光學檢測裝置經由檢測所述 晶圓並產生至少一晶圓報表,該晶圓報表包括有一條碼與一檢測資料;所述掃描裝置掃描所述晶圓報表之條碼,並經由所述條碼產生有一掃描資料,而該平板電腦裝置電性連接所述掃描裝置且接收所述掃描訊號,且該平板電腦裝置具有一顯示螢幕,而其檢測後之晶圓設置於所述顯示螢幕上,該顯示螢幕根據所述掃描資料產生有至少一顯示訊號及辨識訊號,其顯示訊號係供所述晶圓對位,而其辨識訊號係顯示於未通過檢測之積體電路位置處,另該晶粒吸取裝置係吸取產生有辨識訊號位置處之積體電路,藉此,所述電腦視覺辨識輸出圖像輔助積體電路挑選系統利用該掃描裝置掃描所述光學檢測裝置之檢測結果,且將其掃描資料傳送至電性連接之平板電腦裝置,再由所述平板電腦裝置之顯示螢幕於未通過檢測之積體電路位置處產生有辨識訊號,以供使用者可藉由辨識訊號直接判斷其未通過檢測之積體電路,再由晶粒吸取裝置直接吸取所述未通過檢測之積體電路,可有效解決需由人力透過顯微鏡一一挑選之步驟,進而達到降低人力成本且同時可提高品質良率與生產速度之功效者。 To achieve the above objective, the present invention provides a computer vision recognition output image auxiliary integrated circuit selection system, comprising: an optical detecting device, a scanning device, a tablet device, and a die picking device, wherein the optical The detecting device mainly has at least one carrying fixture, and the carrying fixture can be provided with a plurality of wafer positioning modules, wherein the wafer positioning modules respectively have a wafer, and each of the wafers has a plurality of integrated circuits, And the optical detecting device detects the And generating at least one wafer report, the wafer report includes a code and a detection data; the scanning device scans a barcode of the wafer report, and generates a scan data via the barcode, and the tablet device Electrically connecting the scanning device and receiving the scanning signal, and the tablet device has a display screen, and the detected wafer is disposed on the display screen, and the display screen generates at least according to the scanning data. a display signal and an identification signal, wherein the display signal is for the wafer alignment, and the identification signal is displayed at the position of the integrated circuit that has not passed the detection, and the die suction device absorbs the position where the identification signal is generated. The integrated circuit, whereby the computer vision identification output image auxiliary integrated circuit selecting system scans the detection result of the optical detecting device by using the scanning device, and transmits the scanned data to the electrically connected tablet device And the display screen of the tablet device generates an identification signal at the position of the integrated circuit that has not passed the detection for use. The integrated circuit can be directly judged by the identification signal, and the integrated circuit that has not passed the detection is directly sucked by the die suction device, which can effectively solve the steps required to be selected by the human through the microscope. Reduce the labor cost and at the same time improve the quality yield and production speed.

本發明另提供一種電腦視覺辨識輸出圖像輔助積體電路挑選方法,該方法係包括:提供有複數晶圓,其晶圓具有複數積體電路;將複數定位有所述晶圓之複數晶圓定位模組設置於一承載治具上;將該承載治具組設於一光學檢測裝置內進行檢測並於檢測後移出且取下晶圓;所述光學檢測裝置產生有至少一晶圓報表,以一掃描裝置掃瞄所述晶圓報表之條碼並產生一掃描資料;提供一平板電腦裝置接收所述掃描資料並依據所述掃描資料產生一顯示訊號及對未通過檢測之積體電路位置產生一辨識訊號,且將所述顯示訊號及辨識訊號顯示於一顯示螢幕上;將該晶圓設置於所述顯示螢幕上 且對位於所述顯示訊號;以一晶粒吸取裝置對產生有所述辨識訊號位置處之積體電路進行挑除。 The present invention further provides a method for selecting a computer vision recognition output image auxiliary integrated circuit, the method comprising: providing a plurality of wafers, the wafer having a plurality of integrated circuits; and positioning the plurality of wafers of the plurality of wafers The positioning module is disposed on a bearing fixture; the bearing fixture is disposed in an optical detecting device for detecting and removing and removing the wafer after the detecting; the optical detecting device generates at least one wafer report. Scanning the bar code of the wafer report by a scanning device and generating a scan data; providing a tablet device to receive the scan data and generating a display signal according to the scan data and generating a position of the integrated circuit that fails the detection An identification signal, and displaying the display signal and the identification signal on a display screen; the wafer is disposed on the display screen And in the display signal; the integrated circuit at the position where the identification signal is generated is removed by a die picking device.

藉此,所述電腦視覺辨識輸出圖像輔助積體電路挑選方法可利用該掃描裝置掃描所述光學檢測裝置之檢測結果,且將掃描資料傳送至所述平板電腦裝置,該平板電腦裝置之顯示螢幕於未通過檢測之積體電路位置處產生有辨識訊號,而當所述晶圓設置於所述顯示螢幕上時,使用者可藉由辨識訊號直接判斷其未通過檢測之積體電路位置,再由晶粒吸取裝置直接吸取所述未通過檢測之積體電路,可有效解決需由人力透過顯微鏡一一挑選之步驟,進而達到降低人力成本且同時可提高品質良率與生產速度之功效者。 Thereby, the computer vision identification output image auxiliary integrated circuit selection method can scan the detection result of the optical detection device by using the scanning device, and transmit the scan data to the tablet device, and display the tablet device The screen generates an identification signal at the position of the integrated circuit that has not passed the detection, and when the wafer is disposed on the display screen, the user can directly determine the position of the integrated circuit that has not passed the detection by the identification signal. Then, the die extraction device directly absorbs the integrated circuit that has not passed the detection, which can effectively solve the steps that need to be selected by the human through the microscope, thereby achieving the effect of reducing the labor cost and improving the quality yield and the production speed. .

1‧‧‧電腦視覺辨識輸出圖像輔助積體電路挑選系統 1‧‧‧Computer vision identification output image auxiliary integrated circuit selection system

2‧‧‧光學檢測裝置 2‧‧‧Optical inspection device

21‧‧‧承載治具 21‧‧‧bearing fixture

22‧‧‧晶圓定位模組 22‧‧‧ Wafer Positioning Module

3‧‧‧晶圓 3‧‧‧ wafer

31‧‧‧積體電路 31‧‧‧ integrated circuit

23‧‧‧晶圓報表 23‧‧‧ Wafer Report

231‧‧‧條碼 231‧‧‧ barcode

232‧‧‧檢測資料 232‧‧‧Test data

4‧‧‧掃描裝置 4‧‧‧Scanning device

41‧‧‧掃描資料 41‧‧‧ scan data

5‧‧‧平板電腦裝置 5‧‧‧ tablet device

51‧‧‧顯示螢幕 51‧‧‧ Display screen

511‧‧‧顯示訊號 511‧‧‧Display signal

512‧‧‧辨識訊號 512‧‧‧ identification signal

6‧‧‧晶粒吸取裝置 6‧‧‧Grad suction device

7‧‧‧控制裝置 7‧‧‧Control device

8‧‧‧網路伺服器 8‧‧‧Web server

第1圖係本發明第一較佳實施例之方塊示意圖;第2圖係本發明第一較佳實施例之實施示意圖一;第3圖係本發明第一較佳實施例之實施示意圖二;第4圖係本發明第一較佳實施例之實施示意圖三;第5圖係本發明第一較佳實施例之實施示意圖四;第6圖係本發明第一較佳實施例之實施示意圖五;第7圖係本發明第一較佳實施例之實施示意圖六;第8圖係本發明第一較佳實施例之實施示意圖七;第9圖係本發明第二較佳實施例之實施示意圖;第10圖係本發明第三較佳實施例之實施示意圖;第11圖係本發明第一較佳實施例之流程圖; 第12圖係本發明第二較佳實施例之流程圖;第13圖係本發明第三較佳實施例之流程圖。 1 is a block diagram of a first preferred embodiment of the present invention; FIG. 2 is a first schematic view of a first preferred embodiment of the present invention; and FIG. 3 is a second schematic view of a first preferred embodiment of the present invention; Figure 4 is a schematic view of the first preferred embodiment of the present invention; Figure 5 is a schematic view of the first preferred embodiment of the present invention; and Figure 6 is a schematic view of the first preferred embodiment of the present invention. Figure 7 is a schematic view of the first preferred embodiment of the present invention; Figure 8 is a schematic view of the first preferred embodiment of the present invention; and Figure 9 is a schematic view of the second preferred embodiment of the present invention. Figure 10 is a schematic view showing the implementation of the third preferred embodiment of the present invention; and Figure 11 is a flow chart showing the first preferred embodiment of the present invention; Figure 12 is a flow chart of a second preferred embodiment of the present invention; and Figure 13 is a flow chart of a third preferred embodiment of the present invention.

本發明之上述目的及其結構與功能上的特性,將依據所附圖式之較佳實施例予以說明。 The above object of the present invention, as well as its structural and functional features, will be described in accordance with the preferred embodiments of the drawings.

請參閱第1及第2圖及第3圖及第4圖所示,係為本發明第一較佳實施例之方塊示意圖及實施示意圖一及實施示意圖二及實施示意圖三,其中所述電腦視覺辨識輸出圖像輔助積體電路挑選系統係包含有:一光學檢測裝置2、一掃描裝置4、一平板電腦裝置5及一晶粒吸取裝置6;其中所述光學檢測裝置2具有至少一承載治具21,該承載治具21上可設置有複數晶圓定位模組22,而其各晶圓定位模組22上分別具有固定後之一晶圓3,各晶圓3分別具有複數積體電路31,而該承載治具21裝設有所述晶圓3後,將其承載治具21送至所述光學檢測裝置2內,其光學檢測裝置2可針對其各晶圓定位模組22之晶圓3檢測,以檢測出具有瑕疵的積體電路31,而其檢測後之晶圓3由光學檢測裝置2移出且由承載治具21卸下,再將其固定之晶圓3與晶圓定位模組22分離。 Please refer to FIGS. 1 and 2 and FIGS. 3 and 4, which are block diagrams and implementation diagrams 1 and 2 and FIG. 3 of the first preferred embodiment of the present invention, wherein the computer vision The identification output image auxiliary integrated circuit selection system comprises: an optical detecting device 2, a scanning device 4, a tablet device 5 and a die picking device 6; wherein the optical detecting device 2 has at least one carrying device The carrier fixture 21 can be provided with a plurality of wafer positioning modules 22, and each of the wafer positioning modules 22 has a fixed wafer 3, and each wafer 3 has a plurality of integrated circuits. 31. After the carrier 3 is mounted on the wafer 3, the carrier fixture 21 is sent to the optical detecting device 2, and the optical detecting device 2 can be used for each of the wafer positioning modules 22 The wafer 3 is detected to detect the integrated circuit 31 having the germanium, and the detected wafer 3 is removed by the optical detecting device 2 and removed by the carrying fixture 21, and the wafer 3 and the wafer are fixed. The positioning module 22 is separated.

另請參閱第1圖及第5圖及第6圖所示,係為本發明第一較佳實施例之方塊示意圖及實施示意圖四及實施示意圖五,其中所述光學檢測裝置2針對所述晶圓3檢測後會產生有一晶圓報表23,其每一份晶圓報表23皆是針對每一晶圓3所產生,且其晶圓報表23包括各晶圓3之一條碼231與一檢測資料232,而所述掃描裝置4則掃描所述晶圓報表23之條碼231,並經由所述條碼231產生有一掃描資料41,而其掃描資料41則傳送至所述平板電腦裝置5, 其平板電腦裝置5具有一處理單元(圖中未表示),而該平板電腦裝置5接收所述掃描資料41後則透過所述處理單元轉換,並於所述平板電腦裝置5之一顯示螢幕51上有一顯示訊號511及一辨識訊號512,其中所述顯示訊號511其中產生之範圍稍微大於晶圓3之範圍大小,係可供所述卸下之晶圓3對位設置,而所述辨識訊號512則為於顯示螢幕51上產生有不同光源。 Please refer to FIG. 1 and FIG. 5 and FIG. 6 , which are block diagrams and implementation diagrams 4 and FIG. 5 of the first preferred embodiment of the present invention, wherein the optical detecting device 2 is directed to the crystal After the round 3 detection, a wafer report 23 is generated, each wafer report 23 is generated for each wafer 3, and the wafer report 23 includes one barcode 231 and one inspection data of each wafer 3. 232, and the scanning device 4 scans the barcode 231 of the wafer report 23, and generates a scan data 41 via the barcode 231, and the scan data 41 is transmitted to the tablet device 5, The tablet device 5 has a processing unit (not shown), and the tablet device 5 receives the scanned data 41 and then converts through the processing unit, and displays the screen 51 on one of the tablet devices 5. There is a display signal 511 and an identification signal 512, wherein the display signal 511 is generated in a range slightly larger than the range of the wafer 3, and the detached wafer 3 is disposed in alignment, and the identification signal is 512 is to generate different light sources on the display screen 51.

另請參閱第1圖及第7圖及第8圖所示,係為本發明第一較佳實施例之方塊示意圖及實施示意圖六及實施示意圖七,其中所述平板電腦裝置5之顯示螢幕51產生有所述顯示訊號511與辨識訊號512後,則可將其卸下之晶圓3設置於所述顯示螢幕51上,其晶圓3可經由所述顯示訊號511進行對位,而其晶圓3定位後,其晶圓3之某些積體電路31會經由所述辨識訊號512產生光源,而其產生光源之積體電路31則為光學檢測裝置2所檢測出具有瑕疵的積體電路31,也就是說其辨識訊號512會先參考所述顯示訊號511與晶圓3之相對位置,而針對未通過檢測之積體電路31位置產生光源,而在晶圓3定位後,會產生光源之積體電路31也是未通過光學檢測裝置2檢測之積體電路31,而所述顯示螢幕51對通過檢測之積體電路31位置處未產生所述辨識訊號512,而使用者可藉由辨識訊號512直接判斷其未通過檢測之積體電路31位置,再由晶粒吸取裝置6直接吸取所述未通過檢測之積體電路31,藉此,可有效解決晶圓3需由人力透過顯微鏡一一挑選是否有瑕疵之步驟,進而有效達到降低人力成本且同時可提高品質良率與生產速度之功效者。 Please refer to FIG. 1 and FIG. 7 and FIG. 8 , which are block diagrams and implementation diagrams 6 and FIG. 7 of the first preferred embodiment of the present invention, wherein the display screen 51 of the tablet device 5 is shown. After the display signal 511 and the identification signal 512 are generated, the removed wafer 3 can be disposed on the display screen 51, and the wafer 3 can be aligned via the display signal 511. After the circle 3 is positioned, some integrated circuits 31 of the wafer 3 generate a light source via the identification signal 512, and the integrated circuit 31 for generating the light source is an integrated circuit detected by the optical detecting device 2. 31, that is, the identification signal 512 first refers to the relative position of the display signal 511 and the wafer 3, and generates a light source for the position of the integrated circuit 31 that has not passed the detection, and after the wafer 3 is positioned, a light source is generated. The integrated circuit 31 is also an integrated circuit 31 that is not detected by the optical detecting device 2, and the identification signal 512 is not generated at the position of the integrated circuit 31 of the display screen 51, and the user can identify by Signal 512 directly judges that it is not open The position of the integrated circuit 31 is detected, and the integrated circuit 31 that has not passed the detection is directly sucked by the die picking device 6. Thereby, the steps of the wafer 3 to be selected by the human through the microscope can be effectively solved. In order to effectively reduce the labor cost and at the same time improve the quality yield and production speed.

另請參閱第9圖所示,係為本發明第二較佳實施例之實施示意圖,該較佳實施例大致與前述第一較佳實施的連結關係及其功效相同,其中該實施例主要差別在於所述電腦視覺辨識輸出圖像輔助積體電路31挑選系統1更 包括有一控制裝置7,所述控制裝置7電性連接所述平板電腦裝置5,以當其晶圓3(請參閱第7圖所示)設置於所述顯示螢幕51上且經由所述顯示訊號511進行對位時,可經由控制裝置7控制其顯示訊號511及辨識訊號512於顯示螢幕51上之位置。 Please refer to FIG. 9 , which is a schematic diagram of the implementation of the second preferred embodiment of the present invention. The preferred embodiment is substantially the same as the first preferred embodiment and the same function, wherein the main difference is the embodiment. In the computer vision recognition output image auxiliary integrated circuit 31 picking system 1 more A control device 7 is included, and the control device 7 is electrically connected to the tablet device 5 to be disposed on the display screen 51 via the wafer 3 (see FIG. 7) and via the display signal When the 511 is aligned, the position of the display signal 511 and the identification signal 512 on the display screen 51 can be controlled by the control device 7.

另請參閱第10圖與配合第1圖所示,係為本發明第三較佳實施例之實施示意圖,該較佳實施例大致與前述第一較佳實施的連結關係及其功效相同,其中該實施例主要差別在於所述光學檢測裝置2產生之其晶圓報表23係上傳至一網路伺服器8,而該平板電腦裝置5透過網路至其網路伺服器8下載所述晶圓報表23。 FIG. 10 is a schematic view showing the implementation of the third preferred embodiment of the present invention. The preferred embodiment is substantially the same as the first preferred embodiment. The main difference of this embodiment is that the wafer report 23 generated by the optical detecting device 2 is uploaded to a network server 8, and the tablet device 5 downloads the wafer through the network to its network server 8. Statement 23.

再請參閱第11圖與配合第1圖所示,係為本發明挑選方法第一較佳實施例之流程圖,該電腦視覺辨識輸出圖像輔助積體電路挑選方法係包括下列步驟: Referring to FIG. 11 and FIG. 1 together, it is a flowchart of a first preferred embodiment of the selection method of the present invention. The computer visual identification output image auxiliary integrated circuit selection method comprises the following steps:

S1:提供有複數晶圓,其晶圓具有複數積體電路;其中提供有複數晶圓3,而其各晶圓3具有複數積體電路31。 S1: A plurality of wafers are provided, the wafers of which have a plurality of integrated circuits; wherein a plurality of wafers 3 are provided, and each of the wafers 3 has a plurality of integrated circuits 31.

S2:將複數定位有所述晶圓之複數晶圓定位模組設置於一承載治具上;將所述定位有所述晶圓3之晶圓定位模組22設置於承載治具21上。 S2: The plurality of wafer positioning modules positioned with the plurality of wafers are disposed on a bearing fixture; and the wafer positioning module 22 positioned with the wafers 3 is disposed on the bearing fixture 21.

S3:將該承載治具組設於一光學檢測裝置內進行檢測並於檢測後移出且取下晶圓;將其承載治具21送至所述光學檢測裝置2內,其光學檢測裝置2可針對其各晶圓定位模組22之晶圓3檢測,以檢測出具有瑕疵的積體電路31,而其檢測後之晶圓3由光學檢測裝置2移出且由承載治具21卸下,再將其固定之晶圓3與晶圓定位模組22分離 S3: the carrier fixture is set in an optical detecting device for detection and removed after the detection and the wafer is removed; the bearing fixture 21 is sent to the optical detecting device 2, and the optical detecting device 2 can be The wafer 3 of each of the wafer positioning modules 22 is detected to detect the integrated circuit 31 having the germanium, and the detected wafer 3 is removed by the optical detecting device 2 and is removed by the carrying fixture 21, and then Separating the fixed wafer 3 from the wafer positioning module 22

S4:所述光學檢測裝置產生有至少一晶圓報表,以一掃描裝置掃瞄所述晶圓報表之條碼並產生一掃描資料;光學檢測裝置2針對所述晶圓3檢測後會產生有晶圓報表23,其每一份晶圓報表23皆是針對每一晶圓3所產生,且其晶圓報表23包括各晶圓3之所屬條碼231與所屬檢測資料232,再以所述掃描裝置4掃描其晶圓報表23之條碼231,且透過所述條碼231產生有掃描資料41。 S4: The optical detecting device generates at least one wafer report, scans the barcode of the wafer report by a scanning device and generates a scan data; and the optical detecting device 2 generates a crystal after detecting the wafer 3. The round report 23, each of which is generated for each wafer 3, and the wafer report 23 includes the barcode 231 of the wafer 3 and the associated detection data 232, and the scanning device 4 Scanning the barcode 231 of the wafer report 23, and generating the scanned data 41 through the barcode 231.

S5:提供一平板電腦裝置接收所述掃描資料並依據所述掃描資料產生一顯示訊號及對未通過檢測之積體電路位置產生一辨識訊號,且將所述顯示訊號及辨識訊號顯示於一顯示螢幕上;其掃描資料41則傳送至所述平板電腦裝置5,該平板電腦裝置5接收所述掃描資料41後則透過所述處理單元轉換,並於所述平板電腦裝置5之顯示螢幕51上有顯示訊號511及辨識訊號512,其中所述顯示訊號511可供所述卸下之晶圓3對位設置,而所述辨識訊號512則為於顯示螢幕51上產生有不同光源。 S5: providing a tablet device to receive the scan data, generating a display signal according to the scan data, generating an identification signal for the undetected integrated circuit position, and displaying the display signal and the identification signal on a display On the screen, the scanned data 41 is transmitted to the tablet device 5, and the tablet device 5 receives the scanned data 41 and then converts through the processing unit and displays on the display screen 51 of the tablet device 5. There is a display signal 511 and an identification signal 512, wherein the display signal 511 is alignable for the unloaded wafer 3, and the identification signal 512 is generated with different light sources on the display screen 51.

S6:將該晶圓設置於所述顯示螢幕上且對位於所述顯示訊號;將其卸下之晶圓3設置於所述顯示螢幕51上,其晶圓3可經由所述顯示訊號511進行對位。 S6: the wafer is disposed on the display screen and disposed on the display signal; the wafer 3 on which the wafer is removed is disposed on the display screen 51, and the wafer 3 can be processed via the display signal 511. Counterpoint.

S7:以一晶粒吸取裝置對產生有所述辨識訊號位置處之積體電路進行挑除。 S7: picking up the integrated circuit at the position where the identification signal is generated by a die picking device.

其晶圓3之某些積體電路31會經由所述辨識訊號512產生光源,其產生光源之積體電路31則為光學檢測裝置2所檢測出具有瑕疵的積體電路31,再由晶粒吸取裝置6直接吸取產生有所述辨識訊號512位置處之積體電路31。 The integrated circuit 31 of the wafer 3 generates a light source via the identification signal 512, and the integrated circuit 31 for generating the light source is the integrated circuit 31 detected by the optical detecting device 2 and has a germanium. The pick-up device 6 directly picks up the integrated circuit 31 at the position where the identification signal 512 is generated.

藉此,使用者可藉由辨識訊號512直接判斷其未通過檢測之積體電路31位置,再由晶粒吸取裝置6直接吸取所述未通過檢測之積體電路31,可有效解決晶圓3需由人力透過顯微鏡一一挑選是否有瑕疵之步驟,進而有效達到降低人力成本且同時可提高品質良率與生產速度之功效者。 Therefore, the user can directly determine the position of the integrated circuit 31 that has not passed the detection by the identification signal 512, and then directly absorb the undetected integrated circuit 31 by the die picking device 6, thereby effectively solving the wafer 3. It is necessary for humans to select whether or not there are steps through the microscope, thereby effectively achieving the effect of reducing labor costs while improving the quality yield and production speed.

再請參閱第12圖與配合第1圖所示,係為本發明挑選方法第二較佳實施例之流程圖,該較佳實施例大致與前述挑選方法第一較佳實施的方法及其功效相同,其中該實施例主要差別在於所述步驟S4,其步驟S4:所述光學檢測裝置產生有至少一晶圓報表,檢測者將其晶圓報表上傳至一網路伺服器,而所述平板電腦裝置透過網路至其網路伺服器下載所述晶圓報表,再以一掃描裝置掃瞄所述晶圓報表之條碼並產生一掃描資料;其中所述光學檢測裝置2產生之其晶圓報表23係上傳至一網路伺服器8,而該平板電腦裝置5透過網路至其網路伺服器8下載所述晶圓報表23。 Referring to FIG. 12 and FIG. 1 together, it is a flowchart of a second preferred embodiment of the selection method of the present invention. The preferred embodiment is substantially the same as the first preferred method of the foregoing selection method and its function. The same, wherein the main difference of the embodiment is the step S4, the step S4: the optical detecting device generates at least one wafer report, and the detector uploads the wafer report to a network server, and the tablet The computer device downloads the wafer report through the network to its network server, scans the barcode of the wafer report with a scanning device, and generates a scan data; wherein the optical detecting device 2 generates the wafer The report 23 is uploaded to a web server 8, and the tablet device 5 downloads the wafer report 23 via the network to its web server 8.

更其中所述平板電腦裝置5安裝有一應用程式(Application,APP),並經由所述應用程式透過網路至其網路伺服器8下載其晶圓報表23。 Further, the tablet device 5 is installed with an application (Application, APP), and the wafer report 23 is downloaded through the network to its web server 8 via the application.

再請參閱第13圖與配合第1圖所示,係為本發明挑選方法第三較佳實施例之流程圖,該較佳實施例大致與前述挑選方法第一較佳實施的方法及其功效相同,其中該實施例主要差別在於顯示訊號511及辨識訊號512顯示於所述顯示螢幕51後更具有一步驟,其步驟S6:透過一控制裝置7控制所述顯示訊號511與辨識訊號512於顯示螢幕51顯示之位置;而步驟S7為:將該晶圓設置於所述顯示螢幕上且對位於所述顯示訊號;與步驟S8:以一晶粒吸取裝置對產生有所述辨識訊號位置處之積體電路進行挑除。 Referring to FIG. 13 and FIG. 1 together, it is a flowchart of a third preferred embodiment of the selection method of the present invention. The preferred embodiment is substantially the same as the first preferred method of the foregoing selection method and its efficacy. The main difference is that the display signal 511 and the identification signal 512 are displayed on the display screen 51. The step S6: controlling the display signal 511 and the identification signal 512 to be displayed through a control device 7. The screen 51 is displayed at a position; and the step S7 is: the wafer is disposed on the display screen and is located on the display signal; and step S8: the position of the identification signal is generated by a pair of die picking devices. The integrated circuit is removed.

以上所述,本發明係一種電腦視覺辨識輸出圖像輔助積體電路挑選系統及挑選方法,其具有以下有優點:1.降低成本;2.提高品質良率;3.提高生產速度。 As described above, the present invention is a computer vision recognition output image auxiliary integrated circuit selection system and selection method, which has the following advantages: 1. reducing cost; 2. improving quality yield; 3. increasing production speed.

需陳明者,以上所述僅為本案之較佳實施例,並非用以限制本發明,若依本發明之構想所作之改變,在不脫離本發明精神範圍內,例如:對於構形或佈置型態加以變換,對於各種變化,修飾與應用,所產生等效作用,均應包含於本案之權利範圍內,合予陳明。 It is to be understood that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and changes may be made without departing from the spirit of the invention, for example, for configuration or arrangement. The type is transformed, and the equivalent effect of various changes, modifications and applications shall be included in the scope of the case and shall be combined with Chen Ming.

綜上所述,本發明電腦視覺辨識輸出圖像輔助積體電路挑選系統及挑選方法於使用時,為確實能達到其功效及目的,故本發明誠為一實用性優異之創作,為符合發明專利之申請要件,爰依法提出申請,盼 審委早日賜准本案,以保障發明人之辛苦創作,倘若 鈞局審委有任何稽疑,請不吝來函指示,發明人定當竭力配合,實感德便。 In summary, the computer vision identification output image auxiliary integrated circuit selection system and the selection method of the present invention can achieve the effect and purpose when used, so the invention is a practical and excellent creation, in accordance with the invention. The application requirements of the patent, 提出 apply in accordance with the law, and hope that the trial committee will grant the case as soon as possible to protect the inventor's hard work. If the arbitral tribunal has any doubts, please do not hesitate to give instructions, the inventor will try his best to cooperate. .

1‧‧‧電腦視覺辨識輸出圖像輔助積體電路挑選系統 1‧‧‧Computer vision identification output image auxiliary integrated circuit selection system

2‧‧‧光學檢測裝置 2‧‧‧Optical inspection device

23‧‧‧晶圓報表 23‧‧‧ Wafer Report

231‧‧‧條碼 231‧‧‧ barcode

232‧‧‧檢測資料 232‧‧‧Test data

3‧‧‧晶圓 3‧‧‧ wafer

31‧‧‧積體電路 31‧‧‧ integrated circuit

4‧‧‧掃描裝置 4‧‧‧Scanning device

41‧‧‧掃描資料 41‧‧‧ scan data

5‧‧‧平板電腦裝置 5‧‧‧ tablet device

51‧‧‧顯示螢幕 51‧‧‧ Display screen

511‧‧‧顯示訊號 511‧‧‧Display signal

512‧‧‧辨識訊號 512‧‧‧ identification signal

6‧‧‧晶粒吸取裝置 6‧‧‧Grad suction device

Claims (10)

一種電腦視覺辨識輸出圖像輔助積體電路挑選系統,包含:一光學檢測裝置,具有至少一承載治具,所述承載治具上設置複數定位有一晶圓之晶圓定位模組,該晶圓具有複數積體電路,且該光學檢測裝置經由檢測所述晶圓並產生至少一晶圓報表,該晶圓報表包括有一條碼與一檢測資料;一掃描裝置,根據所述條碼讀取所述晶圓報表並產生一掃描資料;一平板電腦裝置,具有一顯示螢幕並供檢測後之晶圓設置,而該平板電腦裝置電性連接所述掃瞄裝置且接收所述掃描資料,並該顯示螢幕根據所述掃描資料產生至少一顯示訊號並對未通過檢測之積體電路位置產生有一辨識訊號;及一晶粒吸取裝置,吸取產生有辨識訊號之積體電路。 A computer vision identification output image auxiliary integrated circuit selection system includes: an optical detecting device having at least one carrying fixture, wherein the carrying fixture is provided with a plurality of wafer positioning modules for positioning a wafer, the wafer Having a plurality of integrated circuits, and the optical detecting device generates at least one wafer report by detecting the wafer, the wafer report includes a code and a detection data; and a scanning device that reads the crystal according to the barcode Circular report and generating a scan data; a tablet device having a display screen and a wafer set for detection, and the tablet device is electrically connected to the scan device and receiving the scan data, and the display screen Generating at least one display signal according to the scan data and generating an identification signal for the position of the integrated circuit that has not passed the detection; and a die picking device for sucking the integrated circuit generating the identification signal. 如申請專利範圍第1項所述之電腦視覺辨識輸出圖像輔助積體電路挑選系統,其中所述平板電腦裝置具有一處理單元,該處理單元產生有所述顯示訊號及辨識訊號。 The computer vision identification output image auxiliary integrated circuit selection system according to claim 1, wherein the tablet device has a processing unit, and the processing unit generates the display signal and the identification signal. 如申請專利範圍第1項所述之電腦視覺辨識輸出圖像輔助積體電路挑選系統,其中所述晶粒吸取裝置係為一真空吸取裝置。 The computer vision identification output image auxiliary integrated circuit selection system according to claim 1, wherein the die suction device is a vacuum suction device. 如申請專利範圍第2項所述之電腦視覺辨識輸出圖像輔助積體電路挑選系統,其中所述顯示螢幕對通過檢測之積體電路位置處未產生所述辨識訊號。 The computer vision identification output image auxiliary integrated circuit selection system according to claim 2, wherein the identification signal is not generated at the position of the integrated circuit of the display screen. 如申請專利範圍第1項所述之電腦視覺辨識輸出圖像輔助積體電路挑選系統,更包括有一控制裝置,所述控制裝置電性連接所述平板電腦 裝置並控制所述顯示訊號與辨識訊號於顯示螢幕顯示之位置。 The computer vision identification output image auxiliary integrated circuit selection system according to claim 1, further comprising a control device, wherein the control device is electrically connected to the tablet computer The device controls and controls the display signal and the identification signal to display the position of the screen display. 如申請專利範圍第1項所述之電腦視覺辨識輸出圖像輔助積體電路挑選系統,其中所述光學檢測裝置產生有所述晶圓報表且上傳至一網路伺服器,而該平板電腦裝置透過網路至其網路伺服器下載所述晶圓報表。 The computer vision identification output image auxiliary integrated circuit selection system according to claim 1, wherein the optical detection device generates the wafer report and uploads to a network server, and the tablet device Download the wafer report via the network to its web server. 一種電腦視覺辨識輸出圖像輔助積體電路挑選方法,係包含下列步驟:提供有複數晶圓,其晶圓具有複數積體電路;將複數定位有所述晶圓之複數晶圓定位模組設置於一承載治具上;將該承載治具組設於一光學檢測裝置內進行檢測並於檢測後移出且取下晶圓;所述光學檢測裝置產生有至少一晶圓報表,以一掃描裝置掃瞄所述晶圓報表之條碼並產生一掃描資料;提供一平板電腦裝置接收所述掃描資料並依據所述掃描資料產生一顯示訊號及對未通過檢測之積體電路位置產生一辨識訊號,且將所述顯示訊號及辨識訊號顯示於一顯示螢幕上;將該晶圓設置於所述顯示螢幕上且對位於所述顯示訊號;以一晶粒吸取裝置對產生有所述辨識訊號位置處之積體電路進行挑除。 A method for selecting a computer vision recognition output image auxiliary integrated circuit includes the steps of: providing a plurality of wafers having a plurality of integrated circuits; and setting a plurality of wafer positioning modules for positioning the plurality of wafers The carrier fixture is disposed in an optical detecting device for detecting and removing the wafer after the detecting and removing the wafer; the optical detecting device generates at least one wafer report to the scanning device Scanning the barcode of the wafer report and generating a scan data; providing a tablet device to receive the scan data, generating a display signal according to the scan data, and generating an identification signal for the position of the integrated circuit that has not passed the detection, And displaying the display signal and the identification signal on a display screen; the wafer is disposed on the display screen and located opposite to the display signal; and the position of the identification signal is generated by a pair of die picking devices The integrated circuit is removed. 如申請專利範圍第7項所述之電腦視覺辨識輸出圖像輔助積體電路挑選方法,其中所述光學檢測裝置產生有所述晶圓報表後之步驟更具有:檢測者將其晶圓報表上傳至一網路伺服器,而所述平板電腦裝置透過網路至其網路伺服器下載所述晶圓報表。 The computer vision identification output image auxiliary integrated circuit selection method according to claim 7, wherein the step of generating the wafer report by the optical detecting device further comprises: the detector uploading the wafer report thereof Up to a web server, and the tablet device downloads the wafer report through the network to its web server. 如申請專利範圍第8項所述之電腦視覺辨識輸出圖像輔助積體電 路挑選方法,其中所述平板電腦裝置安裝有一應用程式,並經由所述應用程式透過網路至其網路伺服器下載其晶圓報表。 Computer visual recognition output image auxiliary integrated electric power as described in item 8 of the patent application scope The method for selecting a road, wherein the tablet device is installed with an application and downloads its wafer report through the network to its network server via the application. 如申請專利範圍第7項所述之電腦視覺辨識輸出圖像輔助積體電路挑選方法,其中所述顯示訊號及辨識訊號顯示於所述顯示螢幕後更具有一步驟:透過一控制裝置控制所述顯示訊號與辨識訊號於顯示螢幕顯示之位置。 The method for selecting a computer vision recognition output image auxiliary integrated circuit according to claim 7, wherein the display signal and the identification signal are displayed after the display screen has a further step: controlling the control device by a control device The display signal and the identification signal are displayed on the display screen.
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