TW201534451A - Labyrinth seal, casting device, and solution casting apparatus and method - Google Patents
Labyrinth seal, casting device, and solution casting apparatus and method Download PDFInfo
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- TW201534451A TW201534451A TW104104875A TW104104875A TW201534451A TW 201534451 A TW201534451 A TW 201534451A TW 104104875 A TW104104875 A TW 104104875A TW 104104875 A TW104104875 A TW 104104875A TW 201534451 A TW201534451 A TW 201534451A
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/44—Free-space packings
- F16J15/447—Labyrinth packings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/24—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor for making articles of indefinite length
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C41/00—Shaping by coating a mould, core or other substrate, i.e. by depositing material and stripping-off the shaped article; Apparatus therefor
- B29C41/34—Component parts, details or accessories; Auxiliary operations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/72—Sealings
- F16C33/76—Sealings of ball or roller bearings
- F16C33/80—Labyrinth sealings
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Moulding By Coating Moulds (AREA)
- Polarising Elements (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
Abstract
Description
本發明係有關一種迷宮式密封件、流延裝置、溶液製膜設備及方法。 The present invention relates to a labyrinth seal, a casting device, a solution film forming apparatus and method.
具有透光性之聚合物薄膜(以下,稱為薄膜)廣泛用作偏光板的保護膜、相位差膜、防反射膜、透明導電性薄膜等光學薄膜。對於薄膜要求厚度的均勻性和光學特性。以往,主要使用厚度為80μm以上的較厚的薄膜,但近年來,薄膜的薄膜化需求增強,要求厚度為40μm以下的薄型薄膜。 A translucent polymer film (hereinafter referred to as a film) is widely used as an optical film such as a protective film of a polarizing plate, a retardation film, an antireflection film, or a transparent conductive film. The uniformity and optical properties of the thickness are required for the film. Conventionally, a thick film having a thickness of 80 μm or more has been mainly used. However, in recent years, a thin film forming demand for a film has been increased, and a thin film having a thickness of 40 μm or less has been required.
作為薄膜的製造方法有溶液製膜方法。溶液製膜方法係例如藉由如下來獲得薄膜之方法,亦即,藉由流延模具(以下,稱為模具)在金屬製滾筒或傳送帶等流延支撐體(以下,稱為支撐體)上流延將聚合物溶解於溶劑之溶液(以下,稱為濃液(dope))來形成流延膜,使其乾燥並剝取。 As a method for producing a film, there is a solution film forming method. The solution film forming method is a method of obtaining a film by, for example, casting a casting support (hereinafter referred to as a support) such as a metal drum or a conveyor belt by a casting die (hereinafter referred to as a die). A cast film in which a polymer is dissolved in a solvent (hereinafter referred to as a dope) is formed to form a cast film, which is dried and stripped.
為了提高溶液製膜的生產率,由濃液形成流延膜之流延製程的高速化成為課題。為了高速進行流延製程,例如若提高支撐體的行走速度,則在行走之支撐體的表面附近產生隨著支撐體的行走而與支撐體一同向行走方向流動之風(以下,稱為攜帶風)。若該攜帶風吹到液珠上,則液珠振動。該液珠的振動導致在所製造之薄膜的流延方向(支撐體行走方向)上產生厚度不均。因此,例如在日本專利公開2004-114328號公報中,相對於液珠在支撐體行走方向的上游側靠近液珠而配設擋風物,從而防止攜帶風進入液珠。 In order to increase the productivity of the solution film formation, it is a problem to increase the speed of the casting process in which the cast film is formed from the dope. In order to carry out the casting process at a high speed, for example, when the traveling speed of the support body is increased, a wind that flows in the traveling direction together with the support body as the support body travels is generated in the vicinity of the surface of the support body (hereinafter, referred to as carrying wind) ). If the carrying wind blows onto the liquid bead, the liquid bead vibrates. The vibration of the bead causes uneven thickness in the casting direction of the produced film (the traveling direction of the support). For this reason, for example, in Japanese Laid-Open Patent Publication No. 2004-114328, a windshield is disposed close to the liquid bead on the upstream side of the support in the traveling direction of the support, thereby preventing the carrier air from entering the liquid bead.
並且,在日本專利公開2010-158834號公報中,相對於液珠在支撐體行走方向的上游側靠近液珠而配設減壓腔室,藉由負壓吸引攜帶風,從而抑制由攜帶風引起之液珠的振動。同樣地,在日本專利公開2000- 79621號公報中,設置有用於吸引液珠之吸引箱。該吸引箱劃分為第1負壓區域~第3負壓區域而分別進行減壓。在第1負壓區域中遍及液珠的整個寬度方向而吸引液珠的周邊,在第2負壓區域中吸引液珠的寬度方向兩側部的周邊,在第3負壓區域中從液珠的兩側方向吸引。藉由該吸引,抑制被稱為空氣混入之、空氣向流延膜與支撐體之間的捲入(以下,有時稱為空氣捲入),且使液珠與支撐體相接之流延線穩定化。 Further, in Japanese Laid-Open Patent Publication No. 2010-158834, a decompression chamber is disposed close to the liquid bead on the upstream side of the support in the traveling direction of the support, and the air is carried by the negative pressure to suppress the wind caused by the carrier air. The vibration of the liquid bead. Similarly, in Japanese Patent Publication 2000- In the publication No. 79621, a suction box for attracting liquid beads is provided. The suction box is divided into a first negative pressure region to a third negative pressure region, and the pressure is reduced. In the first negative pressure region, the periphery of the liquid bead is attracted throughout the width direction of the liquid bead, and the periphery of both sides in the width direction of the liquid bead is sucked in the second negative pressure region, and the liquid bead is removed from the third negative pressure region. Both sides are attracted. By this suction, the entrainment of air between the casting film and the support (hereinafter referred to as air entrapment), and the casting of the liquid bead and the support are suppressed. Line stabilization.
若使用吸引箱等吸引裝置,則從液珠的寬度方向端部的側面發生空氣的捲入,若提高流延速度(支撐體的行走速度),則被捲入之空氣變成氣泡而出現在流延膜上,由於該氣泡,在延伸時會產生破裂等,生產率下降。因此,在日本專利公開平10-264185號公報中,相對於液珠在支撐體行走方向的下游側配設噴吹噴嘴或加壓箱,從而抑制空氣的捲入。 When a suction device such as a suction box is used, air is caught in the side surface at the end portion in the width direction of the liquid bead, and when the casting speed (the traveling speed of the support body) is increased, the air that is entrained becomes a bubble and appears in the flow. On the film, due to the bubbles, cracking or the like occurs during stretching, and productivity is lowered. In the Japanese Patent Publication No. Hei 10-264185, a blowing nozzle or a pressurizing box is disposed on the downstream side of the traveling direction of the support in the direction in which the liquid droplets travel, thereby suppressing the entrapment of air.
並且,在日本專利公開2005-104148號公報中,相對於模具在支撐體行走方向上游側及下游側配置擋風板,以此阻止風流向液珠。該擋風板在其與支撐體之間具有迷宮式密封件。 Further, in Japanese Laid-Open Patent Publication No. 2005-104148, a windshield is disposed on the upstream side and the downstream side of the support in the traveling direction of the support, thereby preventing the wind from flowing to the liquid bead. The wind deflector has a labyrinth seal between it and the support.
但是,隨著近年來的平板顯示器的大型化和輕量化,亦增進了所製造之薄膜的薄型化。為了更高效地製造薄型薄膜,除了在製膜後的延伸製程中藉由延伸來形成為較薄之外,在液珠階段就將厚度設為較薄為較佳,還對液珠的薄型化的改良進行了研究。 However, with the increase in size and weight of flat panel displays in recent years, the thickness of the manufactured film has also been increased. In order to produce a thin film more efficiently, in addition to being formed thin by stretching in the stretching process after film formation, it is preferable to make the thickness thinner at the liquid bead stage, and to reduce the thickness of the liquid bead. The improvement was studied.
為了使液珠變薄,例如不改變模具吐出口的液珠厚度,而是提高支撐體的行走速度來使液珠將要與支撐體相接之前的厚度變薄,並且,將模具的吐出口的液珠厚度設為比以往者薄。但是,若較薄地流延液珠,則即使在以至今為止的液珠厚度不存在問題的情況下,液珠亦與變薄之量相應地容易受到攜帶風的影響。 In order to make the bead thinner, for example, the thickness of the bead of the die spout is not changed, but the walking speed of the support is increased to make the thickness of the bead before the contact with the support is thinned, and the discharge port of the mold is The thickness of the bead is set to be thinner than the conventional one. However, if the liquid bead is cast thinner, even if there is no problem with the thickness of the bead until now, the liquid bead is easily affected by the carrying wind in accordance with the amount of thinning.
例如,藉由日本專利公開2004-114328號公報中記載的擋風物來截斷伴隨支撐體的移動之攜帶風時,若將液珠設為較薄,則在寬度方向上出現較長的厚度不均。該厚度不均在支撐體行走方向上發生變化,因此成為在行走方向上變化成波形之台階形不均故障而出現,要求改善。另外,台階形不均是在流延方向上產生之液珠的振動引起之週期性厚度不均,若惡化,則變得可以藉由之後說明之評價方法來目視確認。 For example, when the windshield associated with the movement of the support body is cut off by the wind shield described in Japanese Laid-Open Patent Publication No. 2004-114328, if the liquid bead is made thin, a long thickness does not occur in the width direction. All. Since the thickness unevenness changes in the traveling direction of the support body, it becomes a step-shaped unevenness change which changes into a waveform in the traveling direction, and is required to be improved. Further, the stepped unevenness is a periodic thickness unevenness caused by the vibration of the liquid bead generated in the casting direction, and if it is deteriorated, it can be visually confirmed by an evaluation method described later.
日本專利公開2010-158834號公報中記載的減壓腔室中,隨 著液珠的薄型化,液珠因藉由負壓產生之氣壓振動而變得易振動,出現同樣的面狀故障。並且,由於液珠的振動,易發生空氣的捲入。若在支撐體與液珠之間殘留有空氣,則空氣變成氣泡而進入到在支撐體上流延濃液而形成之流延膜與支撐體之間。該空氣的捲入有時會在流延膜乾燥之後從支撐體剝下時發展成流延膜的破裂。此時變成流延停止,在開始流延之前需要大量的時間和勞力。因此,要求抑制空氣的捲入。 In the decompression chamber described in Japanese Patent Laid-Open Publication No. 2010-158834, When the bead is thinned, the bead is easily vibrated by the air pressure generated by the negative pressure, and the same planar failure occurs. Moreover, due to the vibration of the liquid bead, the entrapment of air is liable to occur. When air remains between the support and the liquid bead, the air becomes a bubble and enters between the cast film formed by casting the dope on the support and the support. The entrapment of the air sometimes progresses to breakage of the cast film when it is peeled off from the support after the cast film is dried. At this time, the casting stops, and a large amount of time and labor are required before the start of the casting. Therefore, it is required to suppress the entrapment of air.
藉由日本專利公開2000-79621號公報中記載的吸引箱,將內部劃分為3個負壓區域來吸引液珠的周邊時,由於分為3個負壓區域來進行吸引,因此吸引箱本身變成複雜的結構,此外還需要略微調節各負壓區域的壓力設定。並且,由於具有3個負壓區域,因此需要3個鼓風機,導致設備成本增加。而且,若變成支撐體的行走速度為50m/min以上的高速流延,則隨著液珠的薄型化,由於由3個負壓區域進行之吸引,很難穩定地維持流延線,導致發生空氣捲入。 When the inside is divided into three negative pressure regions to attract the periphery of the liquid bead by the suction box described in Japanese Laid-Open Patent Publication No. 2000-79621, since the suction is divided into three negative pressure regions, the suction box itself becomes In addition to the complicated structure, it is also necessary to slightly adjust the pressure setting of each negative pressure region. Also, since there are three negative pressure regions, three blowers are required, resulting in an increase in equipment cost. In addition, when the traveling speed of the support is 50 m/min or more, the casting of the liquid droplets is difficult, and it is difficult to stably maintain the casting line due to the suction of the three negative pressure regions. Air is involved.
日本專利公開平10-264185號公報中記載的噴吹噴嘴或加壓箱中,相對於液珠配設於支撐體行走方向的下游側,能夠將液珠壓回上游側亦即模具側,與此相應地,液珠與支撐體相接之線路亦即流延線得以穩定。但是,為了將液珠壓回上游側,需要提高噴吹噴嘴或加壓箱的風壓,隨著液珠的薄型化,液珠變得易振動。由於該振動,在寬度方向上出現較長的厚度不均,其在支撐體行走方向上發生變化,因此成為在行走方向上變化成波形之台階形不均故障。 In the blowing nozzle or the pressure tank described in Japanese Patent Publication No. Hei 10-264185, the liquid bead is disposed on the downstream side in the traveling direction of the support, and the liquid bead can be pressed back to the upstream side, that is, the mold side, and Correspondingly, the line where the liquid bead is connected to the support, that is, the casting line, is stabilized. However, in order to press the liquid ball back to the upstream side, it is necessary to increase the wind pressure of the blowing nozzle or the pressurizing tank, and as the liquid bead is thinned, the liquid bead becomes easy to vibrate. Due to this vibration, a long thickness unevenness occurs in the width direction, which changes in the traveling direction of the support body, and thus becomes a step-shaped unevenness change which changes in a traveling direction into a waveform.
日本專利公開2005-104148號公報中,在擋風板設置迷宮式密封件,從而抑制風進入液珠,但是由於在遠離模具之支撐體行走方向上游側及下游側配置迷宮式密封件,因此未能抑制在模具附近產生之氣壓振動。並且,由於相對於減壓腔室在行走體行走方向上游側及下游側配置迷宮式密封件,因此未能抑制減壓腔室引起之氣壓振動。因此,所獲得之薄膜變成在傳送方向上厚度發生變化之台階形不均故障。 Japanese Laid-Open Patent Publication No. 2005-104148 discloses that a labyrinth seal is provided on the windshield to suppress the wind from entering the liquid bead. However, since the labyrinth seal is disposed on the upstream side and the downstream side in the traveling direction of the support body away from the mold, It can suppress the air pressure vibration generated near the mold. Further, since the labyrinth seal is disposed on the upstream side and the downstream side of the traveling body traveling direction with respect to the decompression chamber, the air pressure vibration caused by the decompression chamber cannot be suppressed. Therefore, the obtained film becomes a step-shaped unevenness in which the thickness changes in the conveying direction.
並且,迷宮式密封件本身亦未能按其頻帶成份去除行走體的行走引起之攜帶風的氣壓變動,未能有效地抑制氣壓振動。 Further, the labyrinth seal itself has failed to remove the air pressure fluctuation of the wind carried by the traveling body in accordance with the band component, and the air pressure vibration cannot be effectively suppressed.
本發明的目的在於,提供一種能夠有效地去除氣壓振動,並 在溶液製造薄型薄膜時,藉由實現高速流延來提高生產率,而且能夠抑制發生由台階形不均故障和空氣捲入引起之流延停止等的迷宮式密封件、流延裝置、溶液製膜設備及方法。 It is an object of the present invention to provide an air pressure vibration that can be effectively removed, and When a thin film is produced in a solution, productivity is improved by high-speed casting, and a labyrinth seal, a casting device, and a solution film which are caused by a step-type unevenness failure and a flow stop due to air entrapment can be suppressed. Equipment and methods.
本發明的迷宮式密封件具備第1密封部及第2密封部,且靠近行走之行走體的表面而配設,並且設置於遮擋表面所攜帶之攜帶風之擋風部件。第1密封部形成於擋風部件的與表面對向之面並具有第1槽。第1槽沿與行走體的行走方向交叉之方向較長地形成。第1槽在前述行走方向上分開排列有3個以上。第2密封部具有槽寬或槽深與第1槽不同之第2槽。第2槽在前述行走方向上分開排列有3個以上。 The labyrinth seal of the present invention includes a first seal portion and a second seal portion, and is disposed close to the surface of the traveling body to be traveled, and is provided on the windshield member that carries the wind carried by the shield surface. The first sealing portion is formed on a surface of the wind shield that faces the surface and has a first groove. The first groove is formed long in a direction crossing the traveling direction of the traveling body. The first groove is divided into three or more in the traveling direction. The second sealing portion has a second groove having a groove width or a groove depth different from that of the first groove. The second groove is divided into three or more in the traveling direction.
迷宮式密封件還具備第3密封部為較佳。第3密封部與第2密封部相鄰。第3密封部具有槽寬或槽深與第1槽及第2槽不同的第3槽。第3槽在前述行走方向上分開排列有3個以上。 It is preferable that the labyrinth seal further includes a third sealing portion. The third sealing portion is adjacent to the second sealing portion. The third seal portion has a third groove having a groove width or a groove depth different from that of the first groove and the second groove. The third groove is divided into three or more in the traveling direction.
上述槽寬及槽深結合基於攜帶風之氣壓振動的頻帶而決定為較佳。 It is preferable that the groove width and the groove depth are combined with a frequency band based on the air pressure vibration of the wind.
本發明的流延裝置具備行走之支撐體、模具、擋風部件及迷宮式密封件。模具從吐出口朝向支撐體吐出濃液。模具在其與支撐體之間形成液珠並且在支撐體的表面上形成流延膜。擋風部件遮擋支撐體的行走引起之攜帶風。擋風部件在比液珠更靠支撐體行走方向的上游側的位置靠近支撐體的表面且沿著液珠而配設。迷宮式密封件配設於擋風部件的朝向支撐體的對向面。迷宮式密封件具有第1密封部及第2密封部。第1密封部形成於前述對向面並具有第1槽。第1槽沿與前述行走方向交叉之方向較長地形成。第1槽在前述行走方向上分開排列有3個以上。第2密封部具有槽寬或槽深與第1槽不同之第2槽。第2槽在前述行走方向上分開排列有3個以上。 The casting device of the present invention includes a traveling support, a mold, a wind shield, and a labyrinth seal. The mold discharges the dope from the discharge port toward the support. The mold forms a liquid bead between it and the support and forms a cast film on the surface of the support. The windshield member blocks the wind caused by the walking of the support body. The wind-shielding member is disposed closer to the surface of the support body than the liquid bead on the upstream side in the traveling direction of the support body, and is disposed along the liquid droplet. The labyrinth seal is disposed on the opposite side of the wind shield facing the support. The labyrinth seal has a first seal portion and a second seal portion. The first sealing portion is formed on the opposing surface and has a first groove. The first groove is formed to be long in a direction crossing the traveling direction. The first groove is divided into three or more in the traveling direction. The second sealing portion has a second groove having a groove width or a groove depth different from that of the first groove. The second groove is divided into three or more in the traveling direction.
槽寬為3mm以上30mm以下,槽深為1mm以上20mm以下為較佳。 The groove width is preferably 3 mm or more and 30 mm or less, and the groove depth is preferably 1 mm or more and 20 mm or less.
本發明的溶液製膜設備具備行走之支撐體、模具、擋風部件、迷宮式密封件及乾燥裝置。模具從吐出口朝向支撐體吐出濃液。模具在其與支撐體之間形成液珠並且在支撐體的表面上形成流延膜。擋風部件遮擋支撐體的行走引起之攜帶風。擋風部件在比液珠更靠支撐體行走方向 的上游側的位置靠近支撐體的表面且沿著液珠而配設。迷宮式密封件配設於擋風部件的朝向支撐體的對向面。迷宮式密封件具有第1密封部及第2密封部。第1密封部形成於前述對向面並具有第1槽。第1槽沿與前述行走方向交叉之方向較長地形成。第1槽在前述行走方向上分開排列有3個以上。第2密封部具有槽寬或槽深與第1槽不同之第2槽。第2槽在前述行走方向上分開排列有3個以上。乾燥裝置從支撐體剝下流延膜並進行乾燥。 The solution film forming apparatus of the present invention includes a traveling support body, a mold, a wind shield member, a labyrinth seal, and a drying device. The mold discharges the dope from the discharge port toward the support. The mold forms a liquid bead between it and the support and forms a cast film on the surface of the support. The windshield member blocks the wind caused by the walking of the support body. The windshield component is in the direction of the support body than the liquid bead The upstream side is located close to the surface of the support and is disposed along the liquid droplets. The labyrinth seal is disposed on the opposite side of the wind shield facing the support. The labyrinth seal has a first seal portion and a second seal portion. The first sealing portion is formed on the opposing surface and has a first groove. The first groove is formed to be long in a direction crossing the traveling direction. The first groove is divided into three or more in the traveling direction. The second sealing portion has a second groove having a groove width or a groove depth different from that of the first groove. The second groove is divided into three or more in the traveling direction. The drying device peels off the cast film from the support and performs drying.
本發明的溶液製膜方法具備流延膜形成步驟及乾燥步驟。流延膜形成步驟中利用流延裝置形成流延膜。流延裝置具有行走之支撐體、模具、擋風部件及迷宮式密封件。流延膜形成於支撐體上。模具從吐出口朝向支撐體吐出濃液。模具在其與支撐體之間形成液珠並且在支撐體的表面上形成流延膜。擋風部件遮擋行走體的行走引起之攜帶風。擋風部件在比液珠更靠支撐體行走方向的上游側的位置靠近支撐體的表面且沿著液珠而配設。迷宮式密封件配設於擋風部件的朝向支撐體的對向面。迷宮式密封件具有第1密封部及第2密封部。第1密封部形成於前述對向面並具有第1槽。第1槽沿與前述行走方向交叉之方向較長地形成。第1槽在前述行走方向上分開排列有3個以上。第2密封部具有槽寬或槽深與第1槽不同的第2槽。第2槽在行走方向上分開排列有3個以上。乾燥步驟中,從支撐體剝下流延膜並進行乾燥。 The solution film forming method of the present invention includes a cast film forming step and a drying step. In the cast film forming step, a casting film is formed using a casting device. The casting device has a walking support, a mold, a wind shield, and a labyrinth seal. The cast film is formed on the support. The mold discharges the dope from the discharge port toward the support. The mold forms a liquid bead between it and the support and forms a cast film on the surface of the support. The windshield member blocks the wind carried by the walking body. The wind-shielding member is disposed closer to the surface of the support body than the liquid bead on the upstream side in the traveling direction of the support body, and is disposed along the liquid droplet. The labyrinth seal is disposed on the opposite side of the wind shield facing the support. The labyrinth seal has a first seal portion and a second seal portion. The first sealing portion is formed on the opposing surface and has a first groove. The first groove is formed to be long in a direction crossing the traveling direction. The first groove is divided into three or more in the traveling direction. The second sealing portion has a second groove having a groove width or a groove depth different from that of the first groove. The second groove is arranged in three or more different directions in the traveling direction. In the drying step, the cast film is peeled off from the support and dried.
依本發明,對於行走之周面所攜帶之攜帶風的氣壓振動,能夠按其頻帶進行消除。依本發明的將迷宮式密封件用於擋風部件的流延裝置、溶液製膜設備及方法,能夠抑制攜帶風引起之液珠的振動,並能夠在抑制產生台階形不均的同時有效地製造薄型薄膜。 According to the present invention, the air pressure vibration of the wind carried by the circumferential surface of the walking can be eliminated in accordance with the frequency band. According to the casting device, the solution film forming apparatus and the method of the present invention, the labyrinth seal member is used for the windshield member, and the vibration of the liquid bead caused by the wind can be suppressed, and the step unevenness can be effectively suppressed while being generated. A thin film is produced.
10‧‧‧溶液製膜設備 10‧‧‧solution film making equipment
11‧‧‧流延裝置 11‧‧‧casting device
12‧‧‧拉幅機 12‧‧‧ tenter
13‧‧‧乾燥裝置 13‧‧‧Drying device
14、15‧‧‧分切機 14, 15‧‧‧ slitting machine
16‧‧‧捲取裝置 16‧‧‧Winding device
21‧‧‧第1滾筒 21‧‧‧1st roller
22‧‧‧第2滾筒 22‧‧‧2nd roller
23‧‧‧傳送帶 23‧‧‧Conveyor belt
24‧‧‧導引輥 24‧‧‧ Guide roller
25‧‧‧模具 25‧‧‧Mold
25A‧‧‧吐出口 25A‧‧‧Export
26A、26B、89‧‧‧吸引箱 26A, 26B, 89‧‧‧Attraction box
27、70‧‧‧擋風塊 27, 70‧‧‧ wind block
27A‧‧‧擋風塊27的傳送帶對向面 27A‧‧‧Conveyor belt facing surface of windshield 27
28A、28B、28C、36‧‧‧導管(膜乾燥機) 28A, 28B, 28C, 36‧‧‧ catheter (membrane dryer)
29‧‧‧剝離輥 29‧‧‧ peeling roller
30‧‧‧濃液 30‧‧‧Liquor
31、105‧‧‧液珠 31, 105‧‧‧ liquid beads
32、106‧‧‧流延膜 32, 106‧‧‧ cast film
32A‧‧‧氣泡 32A‧‧‧ bubbles
33‧‧‧薄膜 33‧‧‧film
33A‧‧‧卷狀薄膜 33A‧‧‧roll film
34‧‧‧夾子 34‧‧‧ clip
35‧‧‧減壓腔室 35‧‧‧Decompression chamber
38‧‧‧輥 38‧‧‧roll
40、41‧‧‧支架 40, 41‧‧‧ bracket
43‧‧‧三角筒體 43‧‧‧ Triangle cylinder
43A‧‧‧水平板 43A‧‧‧ horizontal board
43B‧‧‧垂直板 43B‧‧‧ vertical board
43C‧‧‧傾斜板 43C‧‧‧ inclined board
44A、44B‧‧‧側板 44A, 44B‧‧‧ side panels
45‧‧‧吸引口 45‧‧‧ attracting mouth
46‧‧‧第1隔板 46‧‧‧1st partition
47‧‧‧第2隔板 47‧‧‧2nd partition
48‧‧‧吸引室 48‧‧‧Attraction room
50‧‧‧軸承 50‧‧‧ bearing
51‧‧‧導引環 51‧‧‧ Guide ring
51A‧‧‧導孔 51A‧‧‧Guide
52、92、93‧‧‧內螺紋環 52, 92, 93‧‧‧ internal thread ring
52A、92A、93A‧‧‧內螺紋部 52A, 92A, 93A‧‧‧ internal thread
53‧‧‧第1轉動軸 53‧‧‧1st rotating shaft
54‧‧‧第2轉動軸 54‧‧‧2nd rotation axis
53A、54A、90A、90B‧‧‧外螺紋部 53A, 54A, 90A, 90B‧‧‧ External thread
53B、54B‧‧‧導引部 53B, 54B‧‧ Guidance Department
55、95‧‧‧吸引管 55, 95‧‧‧ suction tube
55A‧‧‧凸緣部 55A‧‧‧Flange
56‧‧‧貫穿環 56‧‧‧through ring
57‧‧‧抽吸泵 57‧‧‧ suction pump
58‧‧‧攜帶風 58‧‧‧ Carrying the wind
59、69、74‧‧‧迷宮式密封件 59, 69, 74‧‧‧ labyrinth seals
61、71、81‧‧‧第1密封部 61, 71, 81‧‧‧1st seal
62、72、82‧‧‧第2密封部 62, 72, 82‧ ‧ 2nd seal
63、73、83‧‧‧第3密封部 63, 73, 83‧ ‧ third seal
65、66、67、75、76、77‧‧‧密封單元 65, 66, 67, 75, 76, 77‧‧‧ Sealing unit
65A、66A、67A、75A、76A、77A‧‧‧齒 65A, 66A, 67A, 75A, 76A, 77A‧‧‧ teeth
65B、66B、67B、75B、76B、77B‧‧‧槽 65B, 66B, 67B, 75B, 76B, 77B‧‧‧ slots
90‧‧‧轉動軸 90‧‧‧Rotary axis
91‧‧‧導引軸 91‧‧‧Guide axis
94‧‧‧固定環 94‧‧‧Fixed ring
96‧‧‧擋風板 96‧‧‧wind shield
96A‧‧‧擋風板96的傳送帶對向面 Conveyor belt facing surface of 96A‧‧ windshield 96
BCA‧‧‧液珠中央部區 BCA‧‧‧Liquor Central District
BSA‧‧‧液珠兩端部區 BSA‧‧‧ Both ends of the liquid bead
BLN、BLO‧‧‧流延線 BLN, BLO‧‧‧casting line
BTA‧‧‧頂點部區 BTA‧‧‧ vertex area
G‧‧‧間隙 G‧‧‧ gap
H1‧‧‧齒高、槽深 H1‧‧‧ tooth height, groove depth
L1‧‧‧吸引口長度 L1‧‧‧Attraction length
L2‧‧‧齒寬 L2‧‧‧ tooth width
L31、L32、L33‧‧‧槽寬 L31, L32, L33‧‧‧ slot width
OS‧‧‧偏移長度 OS‧‧‧ offset length
T1‧‧‧頂點 Summit of T1‧‧‧
X‧‧‧方向 X‧‧‧ direction
Y‧‧‧傳送帶的行走方向 Y‧‧‧The direction of travel of the conveyor belt
圖1係表示本發明的溶液製膜設備的概要之側視圖。 Fig. 1 is a side view showing an outline of a solution film forming apparatus of the present invention.
圖2係表示流延裝置的模具周圍的概要之立體圖。 Fig. 2 is a perspective view showing an outline of a periphery of a mold of a casting device.
圖3係表示第1實施形態中之模具、液珠、吸引箱之間的關係之縱剖面圖。 Fig. 3 is a longitudinal cross-sectional view showing the relationship between a mold, a liquid bead, and a suction box in the first embodiment.
圖4係將吸引箱的傾斜板的一部份切開表示之立體圖。 Fig. 4 is a perspective view showing a portion of the inclined plate of the suction box cut away.
圖5係將吸引箱的傾斜板的一部份切開表示之俯視圖。 Fig. 5 is a plan view showing a portion of the inclined plate of the suction box cut away.
圖6係表示吸引箱相對於液珠之配置之前視圖。 Fig. 6 is a front view showing the arrangement of the suction box with respect to the liquid bead.
圖7係表示藉由吸引箱吸引液珠的兩端部之狀態下的液珠流延線和流延膜之俯視圖。 Fig. 7 is a plan view showing a bead casting line and a casting film in a state in which both ends of the liquid bead are sucked by the suction box.
圖8係表示沒有吸引液珠的兩端部之以往類型的液珠流延線和流延膜的俯視圖。 Fig. 8 is a plan view showing a conventional type of liquid bead casting line and a cast film which are not attracted to both end portions of the liquid bead.
圖9係表示擋風塊的迷宮式密封件之側視圖。 Figure 9 is a side view showing the labyrinth seal of the wind block.
圖10係表示擋風塊的迷宮式密封件的另一實施形態之剖面圖。 Fig. 10 is a cross-sectional view showing another embodiment of the labyrinth seal of the windshield block.
圖11係表示擋風塊的迷宮式密封件的另一實施形態之剖面圖。 Figure 11 is a cross-sectional view showing another embodiment of the labyrinth seal of the windshield block.
圖12係切開傾斜板的一部份來表示用一個轉動軸移動複數個隔板之另一實施形態的吸引箱之俯視圖。 Figure 12 is a plan view showing a suction box of another embodiment in which a plurality of partitions are moved by one rotating shaft, with a portion of the inclined plate being cut.
圖13係表示具有擋風板及吸引箱之擋風板一體型吸引箱之仰視圖。 Fig. 13 is a bottom view showing a windshield-integrated suction box having a windshield and a suction box.
如圖1所示,溶液製膜設備10從上游側依次具備流延裝置11、拉幅機12、分切機14、乾燥裝置13、分切機15及捲取裝置16,且該些部件串聯連接。 As shown in FIG. 1, the solution film forming apparatus 10 is provided with a casting device 11, a tenter 12, a slitter 14, a drying device 13, a slitting machine 15, and a winding device 16 in this order from the upstream side, and the components are connected in series. connection.
流延裝置11具備環狀傳送帶(支撐體)23、導引輥24、模具25、吸引箱(吸引部件)26A、26B、擋風塊(擋風部件)27、導管(膜乾燥機)28A、28B、28C及剝離輥29。傳送帶23形成為環狀,並作為金屬製流延支撐體發揮作用。該傳送帶23捲繞在第1滾筒21和第2滾筒22的周面。第1滾筒21藉由馬達(省略圖示)旋轉驅動,環狀傳送帶23沿以箭頭Y表示之方向行走。另外,以下說明中,有時將傳送帶23的行走方向Y稱為傳送帶行走方向Y或Y方向。導引輥24從裏面側支撐上側的傳送帶23。 The casting device 11 includes an endless belt (support) 23, a guide roller 24, a mold 25, suction boxes (suction members) 26A and 26B, a wind block (wind shield) 27, a duct (film dryer) 28A, and 28B, 28C and peeling roller 29. The conveyor belt 23 is formed in a ring shape and functions as a metal casting support. This conveyor belt 23 is wound around the circumferential surfaces of the first drum 21 and the second drum 22. The first roller 21 is rotationally driven by a motor (not shown), and the endless belt 23 travels in a direction indicated by an arrow Y. In the following description, the traveling direction Y of the conveyor belt 23 may be referred to as a belt running direction Y or a Y direction. The guide roller 24 supports the upper conveyor belt 23 from the inner side.
如圖2所示,在第1滾筒21的上方配置有模具25。模具25相對於行走中之傳送帶23的表面,將濃液30作為液珠31連續從吐出口25A(參閱圖3)流出。藉此,在傳送帶23上形成流延膜32。濃液30在未圖示的濃液製造生產線上,例如將纖維素醯化物溶解於溶劑而被製造,並供給至模具25。 As shown in FIG. 2, the mold 25 is disposed above the first drum 21. The mold 25 continuously flows out of the discharge port 25A (see FIG. 3) as the liquid bead 31 with respect to the surface of the traveling belt 23 during traveling. Thereby, the casting film 32 is formed on the conveyor belt 23. The dope 30 is produced by dissolving a cellulose halide in a solvent, for example, in a dope production line (not shown), and supplies it to the mold 25.
相對於來自模具25的液珠31,在傳送帶23的行走方向Y上的上游配設有一對吸引箱26A、26B。 A pair of suction boxes 26A and 26B are disposed upstream of the traveling beads Y of the conveyor belt 23 with respect to the liquid droplets 31 from the mold 25.
如圖1所示,為了提高製造速度,朝向剝離輥29的流延膜32藉由第2滾筒22及傳送帶23被加熱。並且,在流延位置,傳送帶23藉由第1滾筒21被冷卻,抑制過度的升溫。為此,第1滾筒21、第2滾筒22具有未圖示的溫度調節裝置。 As shown in FIG. 1, in order to increase the manufacturing speed, the casting film 32 which faces the peeling roller 29 is heated by the 2nd drum 22 and the conveyor belt 23. Further, at the casting position, the conveyor belt 23 is cooled by the first drum 21, and excessive temperature rise is suppressed. Therefore, the first roller 21 and the second roller 22 have temperature adjustment devices (not shown).
導管28A、28B、28C沿著傳送帶23的行走路線排列配設,並吹出乾燥風。溫風控制器(未圖示)獨立控制乾燥風的溫度、濕度、流量。藉由乾燥風的溫度及流量的控制、及基於第1滾筒21、第2滾筒22自身的溫度調節裝置之溫度控制,調節流延膜32的溫度,溶劑從流延膜32蒸發,進行流延膜32的乾燥。並且,流延膜32固化至能夠以拉幅機12傳送之程度。 The ducts 28A, 28B, and 28C are arranged along the traveling path of the conveyor belt 23, and blow dry air. The temperature controller (not shown) independently controls the temperature, humidity, and flow rate of the dry air. The temperature of the casting film 32 is adjusted by the temperature and flow rate control of the drying air and the temperature control by the temperature adjustment means of the first roller 21 and the second roller 22 itself, and the solvent is evaporated from the casting film 32 to be cast. Drying of film 32. Further, the casting film 32 is cured to such an extent that it can be conveyed by the tenter 12.
相對於模具25,在傳送帶23的行走方向Y的上游側,在第1滾筒21的周面附近配設有剝離輥29。剝離輥29在從傳送帶23剝下包含溶劑之狀態的已進行乾燥之流延膜32時,支撐流延膜32。剝取之流延膜32作為薄膜33被引導至拉幅機12。 With respect to the mold 25, a peeling roller 29 is disposed on the upstream side of the traveling direction Y of the conveyor belt 23 in the vicinity of the circumferential surface of the first drum 21. The peeling roller 29 supports the cast film 32 when the dried cast film 32 is removed from the conveyor belt 23 in a state containing a solvent. The stripped cast film 32 is guided as a film 33 to the tenter 12.
拉幅機12中,藉由夾子34把持薄膜33的兩側部,並從導管36送出乾燥風,藉此在傳送薄膜33的同時賦予朝向以箭頭X表示之薄膜寬度方向X的張力,從而擴大薄膜33的寬度。另外,薄膜33、流延膜32、液珠31的各寬度方向相互一致,因此均以符號X表示它們的寬度方向,在本說明書中有時稱為X方向。 In the tenter 12, the both sides of the film 33 are gripped by the clip 34, and the dry air is sent from the duct 36, thereby imparting a tension toward the film width direction X indicated by an arrow X while conveying the film 33, thereby expanding The width of the film 33. In addition, since the respective width directions of the film 33, the casting film 32, and the liquid droplets 31 coincide with each other, the width direction thereof is indicated by the symbol X, and is sometimes referred to as the X direction in the present specification.
分切機14切除包括由拉幅機12的夾子34引起之保持痕跡在內之兩側部。被切除兩側部之薄膜33被送往乾燥裝置13。 The slitter 14 cuts off both sides including the holding marks caused by the clips 34 of the tenter 12. The film 33 which is cut off at both sides is sent to the drying device 13.
乾燥裝置13中,薄膜33捲繞在多個輥38上而被傳送。乾燥裝置13內部氣氛的溫度或濕度等藉由未圖示的溫度調節機調節,在薄膜33被傳送期間,溶劑從薄膜33蒸發。 In the drying device 13, the film 33 is wound around a plurality of rolls 38 and conveyed. The temperature or humidity of the atmosphere inside the drying device 13 is adjusted by a temperature adjuster (not shown), and the solvent evaporates from the film 33 during the conveyance of the film 33.
經過乾燥裝置13之薄膜藉由分切機15被切除兩側部,以便例如成為目標產品寬度等。被切除兩側部之薄膜33藉由捲取裝置16捲取成卷狀。藉由本發明獲得之卷狀薄膜33A尤其能夠用於相位差膜或偏光板保護膜。 The film that has passed through the drying device 13 is cut off by the slitter 15 to be, for example, the target product width or the like. The film 33 which is cut off at both sides is taken up in a roll shape by the winding device 16. The roll film 33A obtained by the present invention can be especially used for a retardation film or a polarizing plate protective film.
另外,可在乾燥裝置13的薄膜行走下游側設置第2拉幅機(未圖示)。第2拉幅機為與拉幅機12相同的結構,具有夾子及導管,藉由 夾子保持薄膜33而向寬度方向延伸。延伸時,藉由控制延伸倍率和溫度條件等,可獲得具有所希望的光學特性之薄膜33。設置第2拉幅機時,將分切機15配設於第2拉幅機的下游來切除包括由第2拉幅機的夾子引起之保持痕跡在內之兩側部為較佳。 Further, a second tenter (not shown) may be provided on the downstream side of the film running of the drying device 13. The second tenter has the same structure as the tenter 12, and has a clip and a catheter. The clip holds the film 33 and extends in the width direction. At the time of stretching, the film 33 having desired optical characteristics can be obtained by controlling the stretching ratio and temperature conditions and the like. When the second tenter is installed, it is preferable to arrange the slitter 15 downstream of the second tenter to cut off the both sides including the holding trace by the clip of the second tenter.
如圖2所示,吸引箱26A、26B靠近液珠31而配設於流延膜32的寬度方向X的兩端部。吸引箱26A、26B經由支架40安裝於模具25。吸引箱26A、26B的傳送帶對向面形成為相對於傳送帶23的周面保持平行之平滑面。 As shown in FIG. 2, the suction boxes 26A and 26B are disposed near the liquid droplets 31 and are disposed at both end portions of the casting film 32 in the width direction X. The suction boxes 26A and 26B are attached to the mold 25 via the bracket 40. The opposite faces of the conveyor belts of the suction boxes 26A, 26B are formed as smooth surfaces that are parallel with respect to the circumferential surface of the conveyor belt 23.
如圖4所示,配設於液珠31的寬度方向X的一端部之吸引箱26A藉由側板44A、44B堵住由水平板43A、垂直板43B、傾斜板43C構成之三角筒體43的兩端,從而形成為三角柱狀。水平板43A配設成與傳送帶23大致平行。並且,傾斜板43C配設成與模具25的前端面平行。 As shown in FIG. 4, the suction box 26A disposed at one end portion of the liquid bead 31 in the width direction X blocks the triangular cylinder 43 composed of the horizontal plate 43A, the vertical plate 43B, and the inclined plate 43C by the side plates 44A and 44B. Both ends are formed into a triangular column shape. The horizontal plate 43A is disposed substantially parallel to the conveyor belt 23. Further, the inclined plate 43C is disposed in parallel with the front end surface of the mold 25.
如圖3所示,在水平板43A與傾斜板43C之間設置有狹縫狀間隙。藉由該間隙形成有吸引箱26A的吸引口45。 As shown in FIG. 3, a slit-like gap is provided between the horizontal plate 43A and the inclined plate 43C. The suction port 45 of the suction box 26A is formed by the gap.
如圖4所示,在吸引箱26A內,兩個隔板46、47安裝成相對於液珠31的寬度方向X移動自如。以下說明中,將符號46稱為第1隔板,將符號47稱為第2隔板。第1隔板46及第2隔板47形成為與側板44A、44B相同形狀且稍小於側板44A、44B,且能夠在吸引箱26A內滑動。第1隔板46及第2隔板47上利用導引環51、內螺紋環52安裝有第1轉動軸53及第2轉動軸54。被該些第1隔板46、第2隔板47夾住之吸引箱空間成為吸引室48。第1轉動軸53、第2轉動軸54藉由軸承50旋轉自如地安裝於側板44A、44B。 As shown in FIG. 4, in the suction box 26A, the two partition plates 46, 47 are mounted to be movable with respect to the width direction X of the liquid droplet 31. In the following description, reference numeral 46 is referred to as a first separator, and reference numeral 47 is referred to as a second separator. The first partition plate 46 and the second partition plate 47 are formed in the same shape as the side plates 44A and 44B and are slightly smaller than the side plates 44A and 44B, and are slidable in the suction box 26A. The first rotating shaft 53 and the second rotating shaft 54 are attached to the first partition plate 46 and the second partition plate 47 by the guide ring 51 and the female thread ring 52. The suction box space sandwiched by the first partition plate 46 and the second partition plate 47 serves as the suction chamber 48. The first rotating shaft 53 and the second rotating shaft 54 are rotatably attached to the side plates 44A and 44B by bearings 50.
圖5中,第1轉動軸53僅在其右半部份形成有外螺紋部53A,而左半部份成為導引部53B。外螺紋部53A上螺合有內螺紋環52的內螺紋部52A,導引部53B上嵌合有導引環51的導孔51A。藉此,如圖4所示,若向順時針方向轉動第1轉動軸53,則第1隔板46在X方向上向右移動,若向逆時針方向轉動第1轉動軸,則第1隔板46向左側移動。同樣地,如圖5所示,從背面(垂直板43B)側觀察時,第2轉動軸54僅在其左半部份形成有外螺紋部54A,而右半部份成為導引部54B。並且,在外螺紋部54A上螺合有內螺紋環52的內螺紋部52A,導引部54B上嵌合有導引 環51的導孔51A,因此藉由第2轉動軸54的轉動,第2隔板47在X方向上向右或向左移動。 In Fig. 5, the first rotating shaft 53 is formed with a male screw portion 53A only in the right half portion thereof, and the left half portion serves as the guide portion 53B. The male screw portion 52A of the female screw ring 52 is screwed into the male screw portion 53A, and the guide hole 51A of the guide ring 51 is fitted to the guide portion 53B. As a result, as shown in FIG. 4, when the first rotating shaft 53 is rotated clockwise, the first partition plate 46 is moved to the right in the X direction, and when the first rotating shaft is rotated counterclockwise, the first partition is opened. The plate 46 moves to the left. Similarly, as shown in FIG. 5, when viewed from the side of the back surface (vertical plate 43B), the second rotating shaft 54 is formed with the male screw portion 54A only in the left half portion thereof, and the right half portion serves as the guide portion 54B. Further, the female screw portion 52A of the female screw ring 52 is screwed to the male screw portion 54A, and the guide portion 54B is fitted with a guide. Since the guide hole 51A of the ring 51 is rotated by the second rotation shaft 54, the second partition 47 moves to the right or left in the X direction.
如圖6所示,藉由第1隔板46及第2隔板47的X方向的移動,能夠改變吸引口45的X方向上的長度(以下,稱為吸引口長度)L1及從液珠31的端部至吸引口45為止的X方向上的偏移量(以下,稱為偏移長度)OS。吸引口長度L1例如為10mm以上50mm以下。並且,偏移長度OS例如為5mm以上30mm以下。藉此,吸引箱26A、26B能夠從液珠31的兩端朝向中央部吸引例如10mm以上50mm以下的範圍。另外,根據濃液30的種類和黏度、液珠31的厚度和寬度、長度等而適當變更偏移長度OS為較佳。並且,藉由變更吸引口長度L1,能夠調節吸引風量,因此例如如日本專利公開2000-79621號公報所示,相對於第1~第3負壓區域產生不同之負壓,因此無需設置3個鼓風機,能夠抑制設備成本。 As shown in FIG. 6, the length of the suction port 45 in the X direction (hereinafter referred to as the suction port length) L1 and the liquid droplet can be changed by the movement of the first separator 46 and the second separator 47 in the X direction. The amount of shift in the X direction from the end of 31 to the suction port 45 (hereinafter referred to as offset length) OS. The suction port length L1 is, for example, 10 mm or more and 50 mm or less. Further, the offset length OS is, for example, 5 mm or more and 30 mm or less. Thereby, the suction boxes 26A and 26B can attract a range of, for example, 10 mm or more and 50 mm or less from the both ends of the liquid bead 31 toward the center portion. Further, it is preferable to appropriately change the offset length OS depending on the type and viscosity of the dope 30, the thickness, width, length, and the like of the bead 31. In addition, since the suction air volume can be adjusted by changing the length L1 of the suction port, for example, as shown in Japanese Laid-Open Patent Publication No. 2000-79621, different negative pressures are generated with respect to the first to third negative pressure regions, so that it is not necessary to provide three. The blower can suppress equipment costs.
如圖5所示,第2隔板47上藉由凸緣部55A安裝有吸引管55。吸引管55貫穿位於外側之側板44B的貫穿環56,連結於外部的吸引源,例如連結於圖4所示之抽吸泵57。 As shown in FIG. 5, the suction pipe 55 is attached to the 2nd partition plate 47 by the flange part 55A. The suction pipe 55 is inserted through the through ring 56 of the outer side plate 44B, and the suction source connected to the outside is connected to, for example, the suction pump 57 shown in Fig. 4 .
配設於液珠31的寬度方向X的另一端部之吸引箱26B亦構成為與吸引箱26A相同。但是,設置於吸引箱26B的第1轉動軸53、第2轉動軸54和吸引管55在液珠31的寬度方向X的中央部,朝向吸引箱26A的第1轉動軸53、第2轉動軸54、吸引管55的突出側的相反側的外側突出。 The suction box 26B disposed at the other end portion of the liquid bead 31 in the width direction X is also configured to be the same as the suction box 26A. However, the first rotating shaft 53, the second rotating shaft 54, and the suction pipe 55 provided in the suction box 26B are in the center portion in the width direction X of the liquid droplet 31, and the first rotating shaft 53 and the second rotating shaft that face the suction box 26A. 54. The outer side of the opposite side of the protruding side of the suction tube 55 protrudes.
本實施形態中,如圖7所示,相對於液珠31,在傳送帶行走方向Y的上游側,靠近液珠31的兩端部而配置有吸引箱26A、26B。藉由該些吸引箱26A、26B,在液珠兩端部區BSA,液珠31的兩端部被吸引。因此,液珠31與傳送帶23所接觸之流延線BLN與沿傳送帶行走方向Y以凸狀彎曲之以往類型的流延線BLO(圖中以雙點劃線表示)相比,如虛線所示,在超過液珠兩端部區BSA之液珠中央部區BCA中成為直線狀。因此,不會如圖8所示之以往類型的流延線BLO,空氣從彎曲成凸狀之頂點部區BTA進入,空氣不會在流延膜32與傳送帶23之間成為氣泡32A,空氣捲入的產生得到抑制。 In the present embodiment, as shown in FIG. 7, the suction boxes 26A and 26B are disposed on the upstream side of the belt running direction Y on the upstream side of the liquid droplet 31 in the vicinity of the liquid droplets 31. By the suction boxes 26A and 26B, both ends of the liquid droplets 31 are sucked at the both end portions BSA of the liquid bead. Therefore, the casting line BLN that the liquid bead 31 is in contact with the conveyor belt 23 is compared with the conventional type of casting line BLO (indicated by a chain double-dashed line in the figure) which is convexly curved in the traveling direction Y of the conveyor belt, as indicated by a broken line. It is linear in the central portion BCA of the liquid bead beyond the BSA at both end portions of the bead. Therefore, unlike the conventional type of casting line BLO shown in Fig. 8, the air enters from the apex portion BTA which is curved into a convex shape, and air does not become the bubble 32A between the casting film 32 and the conveyor belt 23, and the air roll The production of the ingress is suppressed.
圖8表示俯視觀察之以往的流延線BLO。流延線BLO上,液珠105的寬度方向X的中央成為頂點T1,且藉由高速製膜成為沿傳送帶 行走方向Y變長之大致圓弧形。因此,空氣從彎曲成凸狀之頂點部區BTA進入,在傳送帶23與流延膜106之間沿傳送帶行走方向Y產生氣泡32A。相對於此,本實施形態中,如圖7所示,藉由液珠兩端部區BSA被吸引,流延線BLN如實線所示,在超過液珠兩端部區BSA之液珠中央部區BCA中成為直線狀。因此,不會如圖8所示之以往類型,空氣從彎曲成凸狀之頂點部區BTA進入而在傳送帶23與流延膜106之間成為氣泡32A,空氣捲入的產生得到抑制。因此,流延膜32不會因氣泡32A而殘留在剝離輥29(參閱圖1),不會產生殘留引起之流延停止等。 Fig. 8 shows a conventional casting line BLO in plan view. On the casting line BLO, the center of the width direction X of the liquid droplet 105 becomes the vertex T1, and the film is formed along the conveyor belt by high speed film formation. The traveling direction Y becomes a substantially circular arc. Therefore, air enters from the apex portion BTA bent into a convex shape, and a bubble 32A is generated between the conveyor belt 23 and the casting film 106 in the traveling direction Y of the conveyor belt. On the other hand, in the present embodiment, as shown in Fig. 7, the both ends of the liquid bead BSA are attracted, and the casting line BLN is as shown by the solid line, and is in the center of the liquid bead beyond the BSA at both end portions of the bead. The area BCA is linear. Therefore, in the conventional type as shown in Fig. 8, the air enters from the apex portion BTA which is curved into a convex shape, and becomes a bubble 32A between the conveyor belt 23 and the casting film 106, and generation of air entrapment is suppressed. Therefore, the casting film 32 does not remain on the peeling roller 29 (see FIG. 1) by the air bubbles 32A, and does not cause a casting stop or the like due to the residual.
但是,根據薄膜33的薄膜化的要求,需要使傳送帶23例如以50m/min以上100m/min以下的範圍內的高速行走。藉由該傳送帶23的高速行走,傳送帶23會攜帶空氣,在傳送帶23的表面產生攜帶風58。為了排除該攜帶風58的影響,本實施形態中,如圖2所示,在一對吸引箱26A、26B之間配設有擋風塊27。擋風塊27在液珠31的上游側遮擋攜帶風58,因此攜帶風58不會吹到液珠31。擋風塊27經由支架41安裝於模具25。 However, depending on the requirements for the film formation of the film 33, it is necessary to cause the conveyor belt 23 to travel at a high speed in a range of, for example, 50 m/min or more and 100 m/min or less. By the high speed running of the conveyor belt 23, the conveyor belt 23 carries air, and a carrying wind 58 is generated on the surface of the conveyor belt 23. In order to eliminate the influence of the portable wind 58, in the present embodiment, as shown in Fig. 2, a wind block 27 is disposed between the pair of suction boxes 26A and 26B. The wind block 27 blocks the carrying wind 58 on the upstream side of the liquid bead 31, so that the carrying wind 58 does not blow to the liquid bead 31. The wind block 27 is attached to the mold 25 via the bracket 41.
在傳送帶23與擋風塊27之間設置有間隙G(參閱圖9),擋風塊27不會與行走之傳送帶23接觸。因此,未被完全遮擋之攜帶風58的下層部份通過傳送帶23與擋風塊27之間的間隙G。 A gap G (see FIG. 9) is provided between the conveyor belt 23 and the windshield 27, and the windshield 27 does not come into contact with the traveling conveyor belt 23. Therefore, the lower portion of the carrier wind 58 that is not completely blocked passes through the gap G between the conveyor belt 23 and the windshield block 27.
在傳送帶23的行走速度為30m/min左右的以往的情況下,如圖8所示,伴隨傳送帶23的行走之攜帶風對液珠105帶來之影響較少,很少會發展成流延膜106的台階形不均等面狀故障。另一方面,隨著薄膜化的要求,若將傳送帶23的行走速度設為50m/min以上的高速,則隨著該高速化,液珠105亦變薄,變得易受攜帶風的影響。以往,藉由日本專利公開2004-114328號公報中記載的擋風塊來遮擋攜帶風,但是通過擋風塊與傳送帶23之間的間隙之攜帶風的下層部份在通過擋風塊之後會產生漩渦。藉由本發明人的實驗確認到該漩渦的產生及漩渦引起之對液珠105賦予的振動等。 In the conventional case where the traveling speed of the conveyor belt 23 is about 30 m/min, as shown in Fig. 8, the carrying wind accompanying the traveling of the conveyor belt 23 has less influence on the liquid droplet 105, and it rarely develops into a cast film. The stepped shape of 106 is uneven. On the other hand, when the traveling speed of the conveyor belt 23 is set to a high speed of 50 m/min or more as required for the film formation, the liquid bead 105 is also thinned as the speed is increased, and it is susceptible to the wind. In the past, the windshield described in Japanese Patent Laid-Open Publication No. 2004-114328 is used to block the wind, but the lower portion of the wind that passes through the gap between the windshield and the conveyor belt 23 is generated after passing through the windshield. swirl. The generation of the vortex and the vibration imparted to the liquid droplet 105 by the vortex were confirmed by experiments by the inventors.
因此,如圖9所示,在擋風塊27的傳送帶對向面27A上形成有迷宮式密封件59。迷宮式密封件59具有第1密封部61、第2密封部62、及第3密封部63。第1密封部61在Y方向上具有3個密封單元65,前述密封單元具有與X方向平行的齒(板狀突起)65A、及在Y方向上與該 齒65A相鄰且與X方向平行的槽65B。齒65A的高度H1與槽65B的深度相同,1mm以上20mm以下為較佳,3mm以上15mm以下更為佳。 Therefore, as shown in FIG. 9, a labyrinth seal 59 is formed on the belt facing surface 27A of the windshield 27. The labyrinth seal 59 has a first seal portion 61, a second seal portion 62, and a third seal portion 63. The first sealing portion 61 has three sealing units 65 in the Y direction, and the sealing unit has teeth (plate-like projections) 65A parallel to the X direction and the Y direction A groove 65B adjacent to the tooth 65A and parallel to the X direction. The height H1 of the tooth 65A is the same as the depth of the groove 65B, preferably 1 mm or more and 20 mm or less, more preferably 3 mm or more and 15 mm or less.
齒65A的Y方向長度(寬度)L2為1mm以上10mm以下為較佳,1mm以上5mm以下更為佳。並且,槽65B的Y方向長度(寬度)L31為3mm以上30mm以下為較佳,3mm以上20mm以下更為佳。 The length L2 of the tooth 65A in the Y direction is preferably 1 mm or more and 10 mm or less, more preferably 1 mm or more and 5 mm or less. Further, the Y direction length (width) L31 of the groove 65B is preferably 3 mm or more and 30 mm or less, more preferably 3 mm or more and 20 mm or less.
將第1密封部61中之各密封單元65的排列個數設為3個,但是只要是3個以上即可。另外,密封單元65的排列個數並未特別限定上限,但若從設備效率的觀點出發,10個以下為較佳,5個以下更為佳。 The number of the respective sealing units 65 in the first sealing portion 61 is three, but it may be three or more. Further, the number of the arrays of the sealing units 65 is not particularly limited. However, from the viewpoint of equipment efficiency, 10 or less is preferable, and 5 or less is more preferable.
第2密封部62、第3密封部63亦與第1密封部61相同地具有3個密封單元66、67。密封單元66、67具有齒66A、67A及槽66B、67B。各密封單元66、67中,槽66B、67B的寬度L32、L33與第1密封部61的槽寬L31相比,在Y方向上隨著朝向液珠31而逐漸變寬,除該點不同之外為相同結構。 The second sealing portion 62 and the third sealing portion 63 also have three sealing units 66 and 67 similarly to the first sealing portion 61. The sealing units 66, 67 have teeth 66A, 67A and grooves 66B, 67B. In each of the sealing units 66 and 67, the widths L32 and L33 of the grooves 66B and 67B are gradually wider toward the liquid bead 31 in the Y direction than the groove width L31 of the first sealing portion 61, and the points are different. The outer structure is the same.
藉由將各密封單元65~67的槽65B~67B的寬度及深度、槽65B~67B與齒65A~67A或者齒65A~67A與槽65B~67B的反覆次數設為一定範圍,能夠抑制由從擋風塊27的傳送帶對向面27A與傳送帶23之間的間隙G進入之攜帶風58引起之特定頻帶的氣壓振動。該見解藉由改變迷宮式密封件59的齒65A~67A及槽65B~67B的尺寸和它們在Y方向上之反覆次數(排列個數)的各種實驗獲得。亦即,進行各種實驗獲得如下見解:將槽65B~67B的寬度L31~L33及深度H1、槽65B~67B與齒65A~67A或齒65A~67A與槽65B~67B的反覆次數設為一定範圍,藉此可有效抑制特定頻帶的氣壓振動。藉此,能夠藉由迷宮式密封件59抑制或截斷攜帶風58的特定頻帶的氣壓振動。 By setting the width and depth of the grooves 65B to 67B of the respective sealing units 65 to 67, the number of times of the grooves 65B to 67B and the teeth 65A to 67A or the teeth 65A to 67A and the grooves 65B to 67B to a constant range, it is possible to suppress the number of grooves. The gap G between the conveyor facing surface 27A of the wind block 27 and the conveyor belt 23 enters the air pressure vibration of the specific frequency band caused by the wind 58. This finding was obtained by various experiments for changing the sizes of the teeth 65A to 67A and the grooves 65B to 67B of the labyrinth seal 59 and their number of repetitions (number of arrays) in the Y direction. That is, various experiments were carried out to obtain the following findings: the widths L31 to L33, the depths H1, the grooves 65B to 67B, and the teeth 65A to 67A or the teeth 65A to 67A and the grooves 65B to 67B of the grooves 65B to 67B are set to a certain range. Thereby, the air pressure vibration of a specific frequency band can be effectively suppressed. Thereby, the air pressure vibration of the specific frequency band carrying the wind 58 can be suppressed or cut off by the labyrinth seal 59.
若間隙G並非3mm以下,則會導致攜帶風58不通過間隙G,氣壓振動的降低效果下降。另外,下限值越接近0mm越較佳。但是,若接近0mm,則由於傳送帶23的厚度誤差和第1滾筒21的周面誤差等,有可能使擋風塊27的傳送帶對向面27A與傳送帶23接觸。因此,下限值為1mm以上為較佳。 When the gap G is not 3 mm or less, the carrier wind 58 does not pass through the gap G, and the effect of reducing the air pressure vibration is lowered. Further, the closer the lower limit value is to 0 mm, the more preferable. However, when it is close to 0 mm, the belt facing surface 27A of the windshield 27 may come into contact with the conveyor belt 23 due to the thickness error of the conveyor belt 23 and the circumferential surface error of the first drum 21. Therefore, the lower limit value is preferably 1 mm or more.
槽65B、66B、67B的深度H1(齒65A、66A、67A的高度H1)為1mm以上20mm以下為較佳,3mm以上15mm以下更為佳。若小於 1mm,則無法在槽65B~67B內產生風紊流,壓力損失不會上升,因此擋風效果會降低。若超過20mm,則變成氣壓振動的降低效果達到飽和之狀態,與加深槽65B~67B而引起之加工負載的增大相比,無法獲得更好的效果。 The depth H1 of the grooves 65B, 66B, and 67B (the height H1 of the teeth 65A, 66A, and 67A) is preferably 1 mm or more and 20 mm or less, more preferably 3 mm or more and 15 mm or less. If less than When 1 mm is used, wind turbulence cannot be generated in the grooves 65B to 67B, and the pressure loss does not rise, so that the wind shielding effect is lowered. When it exceeds 20 mm, the effect of reducing the air pressure vibration is saturated, and a better effect cannot be obtained than the increase in the machining load caused by the deepening grooves 65B to 67B.
槽65B、66B、67B的寬度L31、L32、L33為3mm以上30mm以下為較佳,3mm以上20mm更為佳。若小於3mm,則無法在槽65B、66B、67B內產生風紊流,壓力損失不會上升,氣壓振動的降低效果下降。若超過30mm,則變成氣壓振動的降低效果達到飽和之狀態,無法期待更好的效果。並且,加工負載亦增大。 The widths L31, L32, and L33 of the grooves 65B, 66B, and 67B are preferably 3 mm or more and 30 mm or less, more preferably 3 mm or more and 20 mm. If it is less than 3 mm, wind turbulence cannot be generated in the grooves 65B, 66B, and 67B, the pressure loss does not rise, and the effect of reducing the air pressure vibration is lowered. When it exceeds 30 mm, the effect of reducing the air pressure vibration is saturated, and a better effect cannot be expected. Also, the processing load is also increased.
槽65B、66B、67B的寬度L31、L32、L33結合由攜帶風58引起之氣壓振動中之欲截斷的頻帶而決定為較佳。例如,藉由將槽寬L31、L32、L33設為3mm,能夠截斷氣壓振動中的頻帶為100Hz以上且小於150Hz的氣壓振動。並且,藉由將槽寬L31、L32、L33設為10mm,能夠截斷氣壓振動中的頻帶為50Hz以上且小於100Hz的氣壓振動。而且,藉由將槽寬L31、L32、L33設為20mm,能夠截斷小於50Hz的氣壓振動。另外,欲截斷的氣壓振動中的頻帶與槽寬L31、L32、L33並非限定於上述關係者。能夠藉由改變槽寬L31、L32、L33來改變欲截斷的氣壓振動中的頻帶。該些關係能夠藉由形成改變了槽寬以及槽深H1等的齒及槽來進行實驗,以此指定有截斷效果的頻帶。 The widths L31, L32, and L33 of the grooves 65B, 66B, and 67B are preferably determined in combination with the frequency band to be cut off by the air pressure vibration caused by the wind 61. For example, by setting the groove widths L31, L32, and L33 to 3 mm, it is possible to cut off the air pressure vibration in the air pressure in the frequency band of 100 Hz or more and less than 150 Hz. In addition, by setting the groove widths L31, L32, and L33 to 10 mm, it is possible to cut off the air pressure vibration in the air pressure range of 50 Hz or more and less than 100 Hz. Further, by setting the groove widths L31, L32, and L33 to 20 mm, it is possible to cut off the air pressure vibration of less than 50 Hz. Further, the frequency band and the groove widths L31, L32, and L33 in the air pressure vibration to be cut off are not limited to the above relationship. The frequency band in the air pressure vibration to be cut can be changed by changing the groove widths L31, L32, and L33. These relationships can be experimentally performed by forming teeth and grooves in which the groove width and the groove depth H1 are changed, thereby specifying a frequency band having a truncation effect.
齒65A、66A、67A的寬度L2為1mm以上20mm以下為較佳。若小於1mm,則變得強度不足,耐久性下降。若超過20mm,則只會使迷宮式密封件59的Y方向長度增加,氣壓振動的降低效果下降。 It is preferable that the widths L2 of the teeth 65A, 66A, and 67A are 1 mm or more and 20 mm or less. If it is less than 1 mm, the strength will be insufficient and the durability will be lowered. When it exceeds 20 mm, only the length of the labyrinth seal 59 in the Y direction is increased, and the effect of reducing the air pressure vibration is lowered.
另外,迷宮式密封件59的各槽65B~67B的兩端部可開放亦可封閉。但是,若使其開放,則進入各槽65B~67B之風易從兩端部逃出,因此相對於液珠31的擋風效果變得更高。 Further, both ends of the grooves 65B to 67B of the labyrinth seal 59 may be opened or closed. However, if it is opened, the wind entering each of the grooves 65B to 67B easily escapes from both end portions, so that the wind shielding effect with respect to the liquid bead 31 becomes higher.
圖10表示具有沿Y方向調換密封單元65~67的齒65A~67A及槽65B~67B之第1密封部71~第3密封部73之第2實施形態的迷宮式密封件69。如此,即使沿Y方向調換齒65A~67A及槽65B~67B,亦能夠截斷特定頻帶的振動。另外,對於與上述實施形態相同的構成部件,標註相同符號並省略重複說明。可適當改變第1密封部61、71、第2密封部62、72、第3密封部63、73的在傳送帶行走方向Y上之排列順序。各槽 65B~67B沿與傳送帶行走方向Y正交之X方向延伸而形成,但槽65B~67B的形成方向只要與傳送帶行走方向Y交叉即可,交叉角度並不限定於直角。圖10中,對設置有迷宮式密封件69之擋風塊標註符號70。 Fig. 10 shows a labyrinth seal 69 of the second embodiment in which the teeth 65A to 67A of the sealing units 65 to 67 and the first to third sealing portions 71 to 73 of the grooves 65B to 67B are exchanged in the Y direction. Thus, even if the teeth 65A to 67A and the grooves 65B to 67B are exchanged in the Y direction, the vibration in the specific frequency band can be cut off. The same components as those of the above-described embodiment are denoted by the same reference numerals and the description thereof will not be repeated. The order of arrangement of the first sealing portions 61, 71, the second sealing portions 62, 72, and the third sealing portions 63, 73 in the traveling direction Y of the conveyor belt can be appropriately changed. Each slot 65B to 67B are formed to extend in the X direction orthogonal to the traveling direction Y of the conveyor belt, but the direction in which the grooves 65B to 67B are formed may be intersected with the traveling direction Y of the conveyor belt, and the crossing angle is not limited to a right angle. In Fig. 10, a windshield provided with a labyrinth seal 69 is denoted by reference numeral 70.
圖11表示比第1實施形態的迷宮式密封件59中之槽更淺地形成迷宮式密封件74的各槽75B~77B之另一實施形態的擋風塊78的第1密封部81~第3密封部83。第1密封部81~第3密封部83具有在Y方向上連續形成之3個密封單元75~77。圖11中,對密封單元75、76、77的各齒標註符號75A、76A、77A。即使各槽75B~77B的深度H1比第1實施形態淺,亦能夠截斷特定頻帶的振動。 Fig. 11 shows a first sealing portion 81 to a windshield block 78 of another embodiment in which the grooves 75B to 77B of the labyrinth seal 74 are formed shallower than the grooves in the labyrinth seal 59 of the first embodiment. 3 sealing portion 83. The first to third sealing portions 81 to 83 have three sealing units 75 to 77 which are continuously formed in the Y direction. In Fig. 11, reference numerals 75A, 76A, and 77A are attached to the respective teeth of the sealing units 75, 76, and 77. Even if the depth H1 of each of the grooves 75B to 77B is shallower than that of the first embodiment, the vibration of the specific frequency band can be cut off.
上述各實施形態中,基於吸引箱26A、26B之吸引壓力BP為-3000Pa以上-150Pa以下,-1000Pa以上-500Pa以下為較佳。流延裝置11具備容納模具25、第1滾筒21、第2滾筒22、傳送帶23等之腔室(未圖示)。基於吸引箱26A、26B之吸引壓力BP為在該腔室內將吸引箱26A、26B的上方附近的壓力作為基準之值,但亦可以係將模具25的上方附近的壓力作為基準之值。若超過-150Pa,則無法充份進行攜帶風58的引導。並且,若小於-3000Pa,則液珠本身亦由於負壓而變形,導致面狀惡化。 In each of the above embodiments, the suction pressure BP of the suction boxes 26A and 26B is preferably -3000 Pa or more to 150 Pa or less, and more preferably -1000 Pa or more to 500 PaPa or less. The casting device 11 includes a chamber (not shown) that houses the mold 25, the first roller 21, the second roller 22, and the conveyor belt 23. The suction pressure BP based on the suction boxes 26A and 26B is a value based on the pressure in the vicinity of the upper portions of the suction boxes 26A and 26B in the chamber. However, the pressure in the vicinity of the upper portion of the mold 25 may be used as a reference value. If it exceeds -150 Pa, the guidance of the carrying wind 58 cannot be sufficiently performed. Further, if it is less than -3000 Pa, the bead itself is also deformed by the negative pressure, resulting in deterioration of the surface.
上述各實施形態中,相對於模具25在傳送帶行走方向Y的上游側設置有擋風塊27、70、78,但是還可以進一步在擋風塊27、70、78的上游側設置減壓腔室。減壓腔室吸引擋風塊27、70、78的上游側區的空氣來對該區內進行減壓,抑制攜帶風58進入液珠31。基於該減壓腔室之吸引壓力小於吸引箱26A、26B的吸引壓力為較佳。亦即,減壓腔室內的壓力大於吸引箱26A、26B的各個內部的壓力為較佳。並且,可使用減壓腔室來代替擋風塊27、70、78。 In each of the above embodiments, the wind blocks 27, 70, and 78 are provided on the upstream side of the conveyor belt traveling direction Y with respect to the mold 25. However, the decompression chamber may be further provided on the upstream side of the windshields 27, 70, and 78. . The decompression chamber sucks the air in the upstream side region of the wind blocks 27, 70, 78 to decompress the region, and suppresses the carried wind 58 from entering the bead 31. It is preferable that the suction pressure based on the decompression chamber is smaller than the suction pressure of the suction boxes 26A, 26B. That is, it is preferable that the pressure in the decompression chamber is larger than the pressure inside each of the suction boxes 26A, 26B. Also, a decompression chamber can be used instead of the wind blocks 27, 70, 78.
上述實施形態的吸引箱26A、26B利用第1轉動軸53、第2轉動軸54該兩個轉動軸分別移動第1隔板46、第2隔板47。但是,如圖12所示,亦可以設為利用一個轉動軸90及一個導引軸91移動第1隔板46、第2隔板47之吸引箱89來代替上述方式。轉動軸90經由軸承50轉動自如地安裝於吸引箱89的兩側板44A、44B。導引軸91藉由固定環94固定於兩側板44A、44B。另外,對於與上述實施形態相同的構成部件標註相同符號並省略重複說明。 In the suction boxes 26A and 26B of the above-described embodiment, the first partition plate 46 and the second partition plate 47 are moved by the first rotating shaft 53 and the second rotating shaft 54. However, as shown in FIG. 12, instead of the above, the suction box 89 which moves the 1st partition 46 and the 2nd partition 47 by one rotation shaft 90 and one guide shaft 91 may be used. The rotating shaft 90 is rotatably attached to the both side plates 44A and 44B of the suction box 89 via the bearing 50. The guide shaft 91 is fixed to the side plates 44A, 44B by a fixing ring 94. The same components as those of the above-described embodiment are denoted by the same reference numerals, and the description thereof will not be repeated.
轉動軸90經由內螺紋環92、93貫穿一對隔板亦即第1隔板46、第2隔板47而被安裝。轉動軸90從中央朝向兩端部具有相互反方向的外螺紋部90A、90B。一個內螺紋環92具有與外螺紋部90A螺合之內螺紋部92A,另一個內螺紋環93具有與外螺紋部90B螺合之內螺紋部93A。導引軸91經由導引環51貫穿一對隔板亦即第1隔板46、第2隔板47而被安裝。導引環51具有滑動自如地保持導引軸91之導孔51A。 The rotating shaft 90 is attached to the pair of partition plates, that is, the first partition 46 and the second partition 47 via the internally threaded rings 92 and 93. The rotating shaft 90 has external thread portions 90A and 90B that are opposite to each other from the center toward both end portions. One internal thread ring 92 has an internal thread portion 92A that is screwed to the external thread portion 90A, and the other internal thread ring 93 has an internal thread portion 93A that is screwed to the external thread portion 90B. The guide shaft 91 is attached to the pair of partition plates, that is, the first partition plate 46 and the second partition plate 47 via the guide ring 51. The guide ring 51 has a guide hole 51A that slidably holds the guide shaft 91.
藉由使轉動軸90向一側旋轉,一對隔板亦即第1隔板46、第2隔板47經由內螺紋環92、93而靠近,藉由向另一側旋轉,第1隔板46、第2隔板47分離。藉此能夠改變吸引室48的寬度。因此,濃液30的黏度或液珠31的厚度發生變化時,能夠藉由轉動轉動軸90來將吸引箱89的吸引口45的寬度設為最佳。藉由改變吸引口45的寬度,不改變鼓風機的負壓就能夠調節吸引風量。另外,使第1隔板46、第2隔板47平行移動之機構不限於上述者,可以使用各種機構。並且,隔板不限於一對,亦可設置3個以上。此時,將各隔板分別設置成沿液珠31的寬度方向X移動自如,並將在吸引箱內被各隔板隔開之吸引室設置為兩個以上,藉此能夠更仔細地設定吸引風量和吸引區。 When the rotating shaft 90 is rotated to one side, the pair of partition plates, that is, the first partition plate 46 and the second partition plate 47 are brought close to each other via the female screw rings 92 and 93, and the first partition plate is rotated to the other side. 46. The second partition 47 is separated. Thereby, the width of the suction chamber 48 can be changed. Therefore, when the viscosity of the dope 30 or the thickness of the liquid droplet 31 changes, the width of the suction port 45 of the suction box 89 can be optimized by rotating the rotating shaft 90. By changing the width of the suction port 45, the suction air volume can be adjusted without changing the negative pressure of the air blower. Further, the mechanism for moving the first separator 46 and the second separator 47 in parallel is not limited to the above, and various mechanisms can be used. Further, the separator is not limited to a pair, and three or more sheets may be provided. In this case, each of the partition plates is provided so as to be movable in the width direction X of the liquid droplets 31, and the number of suction chambers partitioned by the respective partition plates in the suction box is two or more, whereby the suction can be set more carefully. Air volume and attraction area.
上述實施形態中,將吸引管55設置於第2隔板47,但如圖12所示,亦可以將吸引管95設置於構成吸引箱89之垂直板43B來代替上述方式。並且,雖省略圖示,但可將吸引管95設置於構成吸引箱89之傾斜板43C。 In the above embodiment, the suction pipe 55 is provided in the second partition plate 47. However, as shown in Fig. 12, the suction pipe 95 may be provided in the vertical plate 43B constituting the suction box 89 instead of the above. Further, although not shown, the suction pipe 95 may be provided in the inclined plate 43C constituting the suction box 89.
另外,雖省略圖示,但可使用位移機構將吸引箱26A、26B、89安裝成沿液珠31的寬度方向移動自如。此時,能夠根據濃液30的黏度等對液珠31的兩端部的吸引區進行微調。並且,當液珠31的寬度發生變化時亦能夠輕鬆應對。 Further, although not shown, the suction boxes 26A, 26B, and 89 can be attached to move in the width direction of the liquid droplet 31 by using a displacement mechanism. At this time, it is possible to finely adjust the suction regions at both end portions of the liquid droplets 31 in accordance with the viscosity of the dope 30 or the like. Moreover, it is also easy to cope with the change in the width of the bead 31.
上述實施形態中,將擋風塊27配置於吸引箱26A、26B之間,但如圖13所示,可代替上述方式將擋風板96設為比流延膜32(參閱圖2)長,例如設為與模具25的X方向長度相同。在該擋風板96的傳送帶對向面96A的例如整個面上沿X方向較長地形成有迷宮式密封件59。並且,在擋風板96的上表面的X方向的兩端部配設吸引箱26A、26B。此時,能夠藉由迷宮式密封件59減少來自吸引箱26A、26B與傳送帶23之間的間隙 的攜帶風58的氣壓振動。並且,可在第1實施形態的吸引箱26A、26B的傳送帶對向面形成與擋風塊27相同的迷宮式密封件59,以此代替擋風板96與吸引箱26A、26B的一體類型。 In the above embodiment, the windshield block 27 is disposed between the suction boxes 26A and 26B. However, as shown in Fig. 13, the windshield plate 96 may be made longer than the casting film 32 (see Fig. 2). For example, it is set to be the same length as the mold 25 in the X direction. A labyrinth seal 59 is formed long in the X direction on, for example, the entire surface of the belt facing surface 96A of the windshield 96. Further, suction boxes 26A and 26B are disposed at both end portions of the upper surface of the windshield 96 in the X direction. At this time, the gap between the suction boxes 26A, 26B and the conveyor belt 23 can be reduced by the labyrinth seal 59. The air pressure of the wind 58 is carried. Further, in the suction belts 26A and 26B of the first embodiment, the labyrinth seal 59 similar to the windshield 27 can be formed on the opposite side of the conveyor belt, thereby replacing the integral type of the windshield 96 and the suction boxes 26A and 26B.
上述例子中,攜帶風係伴隨行走之傳送帶23的流延有濃液30之一側表面(傳送帶面)者,但並不限於此。亦即,攜帶風只要係伴隨行走之行走體的表面者即可。因此,上述迷宮式密封件59、69、74亦可設置於靠近與傳送帶23不同之行走體的表面而配設之擋風部件。作為行走體,有代替傳送帶23用作支撐體且向周向旋轉之滾筒。並且,作為行走體的另一例,有在藉由塗佈製造多層結構的薄膜時在表面塗佈塗佈液來形成塗膜之長形物(網)。 In the above-described example, the side surface (conveyor surface) on which one side of the dope 30 is carried by the conveyor belt 23 that carries the wind system is not limited thereto. In other words, the wind can be carried as long as it is on the surface of the traveling body. Therefore, the labyrinth seals 59, 69, and 74 may be provided on the windshield member disposed close to the surface of the traveling body different from the conveyor belt 23. As the traveling body, there is a drum that serves as a support body instead of the conveyor belt 23 and that rotates in the circumferential direction. Further, as another example of the traveling body, there is an elongated material (mesh) in which a coating liquid is applied to a surface of a film having a multilayer structure by coating to form a coating film.
本發明的溶液製膜設備中,作為產品之薄膜33的寬度為600mm以上為較佳,1400mm以上2500mm以下更為佳。另外,薄膜33的寬度大於2500mm時亦有效。並且,薄膜33的膜厚為10μm以上80μm以下為較佳,10μm以上40μm以下更為佳。成為薄膜33的原料之聚合物並沒有特別限定,例如有纖維素醯化物或環狀聚烯烴等。 In the solution film forming apparatus of the present invention, the width of the film 33 as a product is preferably 600 mm or more, more preferably 1400 mm or more and 2500 mm or less. Further, it is also effective when the width of the film 33 is larger than 2,500 mm. Further, the film thickness of the film 33 is preferably 10 μm or more and 80 μm or less, more preferably 10 μm or more and 40 μm or less. The polymer which is a raw material of the film 33 is not particularly limited, and examples thereof include cellulose halides and cyclic polyolefins.
本發明中用於纖維素醯化物之醯基可以只有一種,或者亦可以使用2種以上的醯基。使用2種以上的醯基時,其中之一為乙醯基為較佳。藉由羧酸對纖維素的經基進行酯化之比例,亦即醯基的取代度滿足下述所有公式(I)~(III)者為較佳。另外,以下公式(I)~(III)中,A及B表示醯基的取代度,A為乙醯基的取代度,並且B為碳原子數為3~22的醯基的取代度。並且,三醋酸纖維素(TAC)的90質量%以上為0.1mm以上4mm以下的顆粒為較佳。 The thiol group used for the cellulose oxime in the present invention may be used alone or two or more kinds of fluorenyl groups may be used. When two or more kinds of fluorenyl groups are used, one of them is preferably an acetamino group. It is preferred that the ratio of the esterification of the cellulose to the cellulose group, that is, the degree of substitution of the thiol group, satisfies all of the following formulas (I) to (III). Further, in the following formulas (I) to (III), A and B represent the degree of substitution of a mercapto group, A is a degree of substitution of an ethylidene group, and B is a degree of substitution of a mercapto group having 3 to 22 carbon atoms. Further, it is preferred that 90% by mass or more of triacetylcellulose (TAC) is 0.1 mm or more and 4 mm or less.
醯基的總取代度A+B為2.20以上2.90以下更為佳,2.40以上2.88以下尤為佳。並且,碳原子數為3~22的醯基的取代度B為0.30以上更為佳,0.5以上尤為佳。 The total substitution degree A+B of the fluorenyl group is preferably 2.20 or more and 2.90 or less, and more preferably 2.40 or more and 2.88 or less. Further, the degree of substitution B of the fluorenyl group having 3 to 22 carbon atoms is more preferably 0.30 or more, and particularly preferably 0.5 or more.
對於纖維素醯化物的詳細內容,記載於日本專利公開2005-104148號的[0140]段至[0195]段。該些記載亦能夠適用於本發明。並且, 對於溶劑及可塑劑、劣化防止劑、紫外線吸收劑(UV劑)、光學各向異性控制劑、延遲抑制劑、染料、消光劑、剝離劑、剝離促進劑等添加劑,亦同樣詳細記載於日本專利公開2005-104148號的[0196]段落至[0516]段落。 The details of the cellulose oxime are described in paragraphs [0140] to [0195] of Japanese Patent Laid-Open Publication No. 2005-104148. These descriptions can also be applied to the present invention. and, Additives such as solvents, plasticizers, deterioration inhibitors, ultraviolet absorbers (UV agents), optical anisotropy control agents, retardation inhibitors, dyes, matting agents, release agents, and stripping accelerators are also described in detail in Japanese patents. Paragraphs [0196] to [0516] of 2005-104148 are disclosed.
進行示出齒65A、66A、67A的高度(槽深)H1;齒65A、66A、67A的寬度L2;槽65B、66B、67B的寬度L31~L33;間隙(clearance)G;及能夠截斷的氣壓振動之間的關係之實驗。表1係表示實驗結果之一覽表。實驗1中,將槽深H1設為3mm,將齒寬L2設為1mm,將槽寬L31設為3mm,將槽寬L32設為10mm,將槽寬L33設為20mm,並將單元個數設為3個時,針對0Hz以上且小於50Hz、50Hz以上且小於100Hz、及100Hz以上且小於150Hz的氣壓振動的頻帶,求出所截斷之頻率峰值者。所截斷之頻率峰值以與不具備迷宮式密封件的實驗5中截斷之頻率峰值0.8Pa的比較來表示,實驗1中所截斷之頻率峰值為0.4Pa。實驗2與實驗1相比改變了槽深H1,藉此測定槽深H1對截斷效果帶來之影響。實驗3、4與實驗1相比改變了單元個數,藉此測定單元個數較少時(實驗3)及單元個數較多時(實驗4)對截斷效果帶來之影響。另外,藉由如下來獲得能夠截斷的頻帶及頻率峰值,亦即,藉由將氣壓振動撿拾器及放大器連接於FFT分析器(Rion公司製SA-01)者,以不在模具25附近的流延寬度左右及中央部共3處流延之狀態下脫機運行之狀態進行實測。另外,表1的“槽”的“寬度L3”欄中,密封部編號“1”欄表示槽寬L31,密封部編號“2”欄表示槽寬L32,密封部編號“3”欄表示槽寬L33。 The height (groove depth) H1 of the teeth 65A, 66A, and 67A; the width L2 of the teeth 65A, 66A, and 67A; the widths L31 to L33 of the grooves 65B, 66B, and 67B; the clearance G; and the air pressure that can be cut off are performed. Experiments on the relationship between vibrations. Table 1 is a list showing the results of the experiment. In Experiment 1, the groove depth H1 was set to 3 mm, the tooth width L2 was set to 1 mm, the groove width L31 was set to 3 mm, the groove width L32 was set to 10 mm, the groove width L33 was set to 20 mm, and the number of cells was set. In the case of three, the frequency peak of the cutoff is obtained for a frequency band of 0 Hz or more and less than 50 Hz, 50 Hz or more and less than 100 Hz, and 100 Hz or more and less than 150 Hz. The truncated frequency peak is represented by a comparison with a frequency peak of 0.8 Pa cut off in Experiment 5 without a labyrinth seal, and the frequency peak cut in Experiment 1 is 0.4 Pa. Experiment 2 changed the groove depth H1 as compared with Experiment 1, thereby measuring the influence of the groove depth H1 on the cutting effect. Experiments 3 and 4 changed the number of cells compared with Experiment 1, thereby measuring the influence of the truncation effect when the number of cells was small (Experiment 3) and when the number of cells was large (Experiment 4). In addition, the band and the frequency peak which can be cut off are obtained by connecting the air pressure vibrating pickup and the amplifier to the FFT analyzer (SA-01 manufactured by Rion Co., Ltd.) so as not to be cast near the mold 25. The state in which the operation is performed offline with a total of three castings in the center of the width and the center is performed. Further, in the "width L3" column of "groove" in Table 1, the seal portion number "1" column indicates the groove width L31, the seal portion number "2" column indicates the groove width L32, and the seal portion number "3" column indicates the groove width. L33.
表1的實驗1中,所截斷之頻率峰值為0.4Pa,可知具有攜帶風58的截斷效果。相對於此,在從實驗1的3mm的槽深H1成為10mm的槽深H1之實驗2中,所截斷之頻率峰值為0.1Pa,可知截斷效果最高。並且,在將單元個數從實驗1的“3”變更為“2”之實驗3中,所截斷之頻率峰值為0.6Pa,截斷效果低於實驗1。而且,在將單元個數設為“5”之實驗4中,所截斷之頻率峰值為0.4,與單元個數為3時相同。因此,可知單元個數為3個以上5個以下為較佳。並且,在沒有迷宮式密封件的實驗5中,所截斷之頻率峰值為0.8Pa,可知沒有截斷效果。 In Experiment 1 of Table 1, the peak frequency of the cutoff was 0.4 Pa, and it was found that the cut-off effect of carrying wind 58 was obtained. On the other hand, in Experiment 2 from the groove depth H1 of 3 mm of Experiment 1 to the groove depth H1 of 10 mm, the peak value of the cutoff was 0.1 Pa, and it was found that the cutting effect was the highest. Further, in Experiment 3 in which the number of cells was changed from "3" to "2" in Experiment 1, the peak frequency of the cutoff was 0.6 Pa, and the cutoff effect was lower than Experiment 1. Further, in Experiment 4 in which the number of cells was set to "5", the peak frequency of the truncation was 0.4, which was the same as when the number of cells was 3. Therefore, it is understood that the number of cells is preferably 3 or more and 5 or less. Further, in Experiment 5 without the labyrinth seal, the peak frequency of the cutoff was 0.8 Pa, and it was found that there was no cutoff effect.
為了確認基於吸引箱26A、26B之效果而進行了實驗。將該結果示於表2。 Experiments were conducted to confirm the effects based on the suction boxes 26A and 26B. The results are shown in Table 2.
實驗11~13中,使用圖2~圖4所示之吸引箱26A、26B,在傳送帶行走方向Y的上游側吸引液珠31的兩端部,如圖7所示,實現流延線BLN的直線化。並且,使用擋風塊27排除攜帶風58引起之液珠31的振動的影響。藉由圖1所示之溶液製膜設備10,在傳送帶23上形成流延膜32之後,剝下該流延膜32作為薄膜33,經過拉幅機12、乾燥裝置13製造薄膜33,並將薄膜33捲取成卷狀。薄膜33由TAC構成,實驗11中將寬度設為200mm,實驗12中設為400mm,實驗13中設為800mm,各實驗11~13中將厚度設為10μm、30μm、60μm。 In the experiments 11 to 13, the suction boxes 26A and 26B shown in Figs. 2 to 4 are used to suck the both ends of the liquid bead 31 on the upstream side in the traveling direction Y of the conveyor belt, and as shown in Fig. 7, the casting line BLN is realized. Straight line. Further, the influence of the vibration of the liquid bead 31 caused by the wind 58 is excluded by using the wind block 27. After the casting film 32 is formed on the conveyor belt 23 by the solution film forming apparatus 10 shown in FIG. 1, the casting film 32 is peeled off as the film 33, and the film 33 is produced by the tenter 12 and the drying device 13, and The film 33 is taken up in a roll shape. The film 33 was composed of TAC, and the width was set to 200 mm in Experiment 11, 400 mm in Experiment 12, and 800 mm in Experiment 13, and the thickness was set to 10 μm, 30 μm, and 60 μm in each of Experiments 11 to 13.
實驗14中,去掉了實驗11的吸引箱26A、26B及擋風塊27,除此以外,以與實驗11相同的條件製造了薄膜33。 In Experiment 14, the film 33 was produced under the same conditions as those of Experiment 11, except that the suction boxes 26A and 26B of the experiment 11 and the wind block 27 were removed.
實驗15中,設置了圖1中以雙點劃線表示之減壓腔室35來代替實驗11的吸引箱26A、26B及擋風塊27,除此以外,以與實驗11相同的條件製造了薄膜33。 In Experiment 15, in the same manner as in Experiment 11, except that the decompression chambers 35 indicated by two-dot chain lines in Fig. 1 were provided instead of the suction boxes 26A and 26B of the experiment 11 and the windshield block 27, Film 33.
如從表2明確可知,實驗11~13中,未發生空氣捲入,亦未產生台階形不均。相對於此,實驗14中雖未產生台階形不均,但發生了空氣捲入。並且,實驗15中雖未發生空氣捲入,但產生了台階形不均。 As is clear from Table 2, in the experiments 11 to 13, no air entrapment occurred, and step unevenness did not occur. On the other hand, in the experiment 14, although the step shape unevenness did not occur, air entrapment occurred. Further, although air entrapment did not occur in Experiment 15, step unevenness occurred.
另外,表2中,未發生空氣捲入時,將空氣捲入的發生評價為“A”,將發生空氣捲入時評價為“B”。並且,在未產生台階形不均時,將台階形不均產生評價為“A”,在產生台階形不均時,評價為“B”。 In addition, in Table 2, when air entrapment did not occur, the occurrence of air entrapment was evaluated as "A", and when air entrapment occurred, it was evaluated as "B". Further, when stepped unevenness was not generated, the step unevenness was evaluated as "A", and when stepped unevenness was generated, it was evaluated as "B".
關於空氣捲入,藉由高速攝像機拍攝包含流延線之流延膜32,將該已拍攝之圖像放大至5~15倍並顯示於顯示器。即使捲入有很少的空氣,亦判定為B,未捲入有空氣時視作具有氣泡抑制效果,判定為A。另外,空氣捲入藉由對顯示器的目視確認來進行。但是,還能夠對顯示於顯示器之圖像進行圖像處理並藉由圖案識別等來自動識別空氣的捲入,從而進行判定。 Regarding the air entrapment, the cast film 32 including the casting line is photographed by a high speed camera, and the captured image is enlarged to 5 to 15 times and displayed on the display. Even if there is a small amount of air caught in, it is judged as B, and when it is not entrained with air, it is regarded as having a bubble suppressing effect, and it is judged as A. In addition, air entrapment is performed by visual confirmation of the display. However, it is also possible to perform image processing on an image displayed on the display, and automatically recognize the entrapment of air by pattern recognition or the like, thereby performing determination.
對於台階形不均,以規定尺寸對所獲得之薄膜進行採樣,將所採樣之薄膜載置於透明薄膜放置台,利用距離薄膜上方1500mm~2000mm之點光源(USHIO製氙氣燈)對薄膜進行照明,將透過薄膜及薄膜放置台之光投影到觀察臺上,評價從觀察台的投射光能否目視觀察到台階形不 均。藉由目視評價確認到台階形不均時判定為B,未確認到台階形不均時判定為A。另外,在相對於觀察台以45°以上60°以下的範圍內傾斜薄膜放置台之狀態下進行了評價。 For uneven step shape, the obtained film is sampled at a predetermined size, and the sampled film is placed on a transparent film placing table, and the film is illuminated by a point light source (USHIO xenon lamp) from 1500 mm to 2000 mm above the film. Projecting the light through the film and film placement table onto the observation table to evaluate whether the projected light from the observation table can be visually observed. All. When it was confirmed by visual evaluation that the step shape was uneven, it was judged as B, and when the step shape unevenness was not confirmed, it was judged as A. In addition, evaluation was performed in a state where the film placement stage was tilted in a range of 45° or more and 60° or less with respect to the observation stage.
從以上結果可知,能夠獲得台階形不均的改善效果及氣泡的抑制效果。並且,根據該些結果可推測,在實際製造條件下,亦即,將寬度例如設為1400mm以上2500mm以下或超過該範圍,將厚度設為10μm以上60μm以下時,亦能夠獲得相同效果。 From the above results, it is understood that the effect of improving step unevenness and the effect of suppressing bubbles can be obtained. In addition, it is estimated that the same effect can be obtained under the actual production conditions, that is, when the width is, for example, 1400 mm or more and 2500 mm or less, or more than the range, and the thickness is 10 μm or more and 60 μm or less.
23‧‧‧傳送帶 23‧‧‧Conveyor belt
27‧‧‧擋風塊 27‧‧‧ wind block
27A‧‧‧擋風塊的傳送帶對向面 27A‧‧‧ conveyor belt facing opposite
58‧‧‧攜帶風 58‧‧‧ Carrying the wind
59‧‧‧迷宮式密封件 59‧‧‧Labyrinth seals
61‧‧‧第1密封部 61‧‧‧1st seal
62‧‧‧第2密封部 62‧‧‧2nd seal
63‧‧‧第3密封部 63‧‧‧3rd seal
65‧‧‧密封單元 65‧‧‧ Sealing unit
65A‧‧‧齒 65A‧‧‧ teeth
65B‧‧‧槽 65B‧‧‧ slot
66‧‧‧密封單元 66‧‧‧Seal unit
66A‧‧‧齒 66A‧‧‧ teeth
66B‧‧‧槽 66B‧‧‧ slot
67‧‧‧密封單元 67‧‧‧ Sealing unit
67A‧‧‧齒 67A‧‧‧ teeth
67B‧‧‧槽 67B‧‧‧ slot
G‧‧‧間隙 G‧‧‧ gap
H1‧‧‧齒高、槽深 H1‧‧‧ tooth height, groove depth
L2‧‧‧齒寬 L2‧‧‧ tooth width
L31‧‧‧槽寬 L31‧‧‧ slot width
L32‧‧‧槽寬 L32‧‧‧ slot width
L33‧‧‧槽寬 L33‧‧‧ slot width
Y‧‧‧傳送帶的行走方向 Y‧‧‧The direction of travel of the conveyor belt
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JPH08338537A (en) * | 1995-06-09 | 1996-12-24 | Toshiba Corp | Labyrinth seal |
US6027121A (en) * | 1997-10-23 | 2000-02-22 | General Electric Co. | Combined brush/labyrinth seal for rotary machines |
DE10011063A1 (en) * | 2000-03-07 | 2001-09-27 | Daimler Chrysler Ag | Labyrinth seal for shaft of electric motor is made up of two sections, outer section having annular components which form conical seal gaps with surface of other component |
JP2009052434A (en) * | 2007-08-24 | 2009-03-12 | Hitachi Plant Technologies Ltd | Centrifugal compressor |
JP4960186B2 (en) * | 2007-09-25 | 2012-06-27 | 富士フイルム株式会社 | Casting method and apparatus |
CN201170319Y (en) * | 2007-12-26 | 2008-12-24 | 艾志工业技术集团有限公司 | Labyrinth type sealing base plate with root-relief ring for packing case |
JP5177750B2 (en) * | 2008-09-26 | 2013-04-10 | 富士フイルム株式会社 | Method for producing thermoplastic resin film |
JP2010158834A (en) * | 2009-01-08 | 2010-07-22 | Fujifilm Corp | Casting apparatus and solution film forming method |
JP5540032B2 (en) * | 2012-03-05 | 2014-07-02 | 富士フイルム株式会社 | Labyrinth seal, cleaning device, cleaning method, and solution casting method |
-
2014
- 2014-03-04 JP JP2014042004A patent/JP6008452B2/en not_active Expired - Fee Related
-
2015
- 2015-02-13 TW TW104104875A patent/TWI658916B/en not_active IP Right Cessation
- 2015-02-13 KR KR1020150022073A patent/KR20150104028A/en not_active Application Discontinuation
- 2015-02-13 CN CN201510078587.2A patent/CN104896102B/en not_active Expired - Fee Related
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KR20150104028A (en) | 2015-09-14 |
TWI658916B (en) | 2019-05-11 |
JP2015168062A (en) | 2015-09-28 |
CN104896102A (en) | 2015-09-09 |
JP6008452B2 (en) | 2016-10-19 |
CN104896102B (en) | 2018-05-04 |
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