TW201532957A - Tube-type ozone generation device - Google Patents

Abstract

A tube-type ozone generation device (1) equipped with an ozone generation unit (30). The ozone generation unit (30) has a discharge tube (32) positioned inside an outer electrode tube (31) with a discharge gap (36) interposed therebetween. The discharge tube (32) has a dielectric tube (33) which has an opening (33a), an electrode film (34) positioned along the inner-circumferential surface of the dielectric tube (33) in a state where an end section (34a) thereof sticks out from the opening (33a), and a power-supply element (40). The power-supply element (40) has an inside clip (41) and an outside clip (42), and the exposed end section (34a) of the electrode film (34) is sandwiched between the inside clip (41) and the outside clip (42).

Description

Tubular ozone generating device

The invention relates to a tubular ozone generating device, in particular in connection with the construction of the power supply component.

Ozone has a strong oxidation effect and decomposes into harmless oxygen after action. Therefore, in the fields of semiconductor manufacturing, food manufacturing, water treatment, and the like, ozone is often used for cleaning, sterilization, deodorization, and the like.

An ozone generating device such as this uses a silent discharge method.

In the ozone discharge device of the silent discharge system, a gap (discharge gap) is provided between a pair of electrodes opposed to each other via a dielectric. When a high voltage is applied between a pair of electrodes, a silent discharge is generated in the discharge gap. The oxygen-containing raw material gas is caused to flow through the discharge gap, whereby the raw material gas is ozonated to generate ozone.

In the ozone generating apparatus using such a silent discharge method, there is a tubular ozone generating apparatus. In the tubular ozone generating device, a tubular discharge tube is used as a dielectric, and the dielectric constitutes a unit for generating ozone. In the case of the tubular ozone generating device, since a plurality of discharge tubes can be densely arranged in parallel, there is an advantage that it is easy to enlarge.

The structure of the power supply member in the tubular ozone generating device is disclosed in, for example, Patent Document 1 and Patent Document 2.

In Patent Document 1, a rod-shaped power supply member electrically connected to a high-voltage power source is disposed inside a dielectric tube, and the power supply member is via a stainless steel wool member and gold. Electrodes that are vapor deposited on the inner surface of the dielectric tube are electrically connected together.

Patent Document 2 uses a lantern-shaped power supply member having a plurality of slits formed on an outer peripheral surface thereof, and the power supply member is in elastic contact with an electrode on which the metal is vapor-deposited on the inner surface of the dielectric tube, thereby power supply and The electrodes are electrically connected together.

[Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2012-144425

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2013-184874

The dielectric tube is made of glass or the like, and the inner surface does not have a true circular shape due to the influence of the material and the forming precision, and the inner diameter also has a certain degree of deviation. From the microscopic level, the inner surface of the dielectric tube is not smooth, but there are irregularities.

For this purpose, the contact between the power supply member and the electrode is ensured by using the wire member or forming the power supply member into a lantern shape. However, since the shape of the wire member and the lantern-shaped power supply member is complicated, there is a problem that it is troublesome in manufacturing.

Accordingly, it is a primary object of the present invention to provide an ozone generating apparatus that can be easily manufactured.

An ozone generating unit provided in the tubular ozone generating apparatus of the present invention has a cylindrical outer electrode tube and a discharge tube disposed inside the outer electrode tube with a discharge gap interposed therebetween. The discharge tube has a cylindrical dielectric tube having an opening at least at one end thereof, and is disposed in close contact with an inner peripheral surface of the dielectric tube in a state having an exposed end portion exposed from the opening An electrode film; and a power supply member connected to the external power source to supply power to the electrode film.

The power supply member has an inner clip disposed inside the electrode film and an outer clip disposed outside the electrode film, and the inner clip and the outer clip sandwich the exposed end.

According to the ozone generating device, the electrode film is made close to the inner peripheral surface of the dielectric tube Since they are in contact with each other, the exposed end portion can be easily provided as long as the length of the electrode film in the longitudinal direction of the dielectric tube is adjusted. Further, since the exposed end portion of the electrode film is sandwiched by the inner clip and the outer clip, the electrode film can be directly and uniformly contacted with the power supply member, and the electrode film can be stably supplied with power.

Preferably, the ozone generating device includes a plurality of the ozone generating units. In order to clamp the ends of the plurality of electrode films at a time, the outer clip has a plurality of clip portions, and the plurality of exposed ends respectively The clip is sandwiched by the clip portion and the inner clip disposed on the inner side of each exposed end portion.

In this way, an outer clip can be used to clamp the ends of the plurality of electrode films at a time. Therefore, the amount of work for sandwiching the exposed end portions of the electrode film can be reduced. Further, it is possible to easily connect the discharge tubes having a large number of roots, and it is also possible to reduce the contact resistance.

Preferably, the ozone generating device includes a plurality of the ozone generating units, and at least a part of the inner clip is a connecting terminal inner clip, and the inner connecting clip of the connecting terminal is directly provided with the external power source. Connected connection terminals.

In this way, it is possible to reduce the number of components and reduce the contact resistance with a simple structure.

According to the ozone generating apparatus of the present invention, it is possible to stably supply power to the respective discharge tubes.

1‧‧‧Ozone generating device

30‧‧Ozone generating unit

31‧‧‧Outer electrode tube

32‧‧‧Discharge tube

33‧‧‧ dielectric tube

33a‧‧‧ openings

34‧‧‧Electrode film

34a‧‧‧ exposed end

40‧‧‧Power supply parts

41‧‧‧Inside buckle

42‧‧‧Outside clip

Fig. 1 is a schematic perspective view showing a tubular ozone generator of a first embodiment.

Fig. 2 is a schematic side view in which a part of the components are omitted in order to show the internal structure of the ozone generating device.

Fig. 3 is a schematic cross-sectional view taken along line X-X of Fig. 2;

4 is a schematic cross-sectional view showing the configuration of an ozone generating unit.

Fig. 5 is an exploded perspective view of the power supply unit.

Fig. 6 is a schematic view showing an example of a connection form between power supply members.

7(a) and 7(b) are schematic views showing the outer clip pair. Fig. 7(a) is a plan view, and Fig. 7(b) is a front view.

Fig. 8 is a schematic view showing a connection terminal.

9(a) and 9(b) are schematic diagrams showing a connection structure between power supply members. Fig. 9(a) is a plan view, Fig. 9(b) is a front view, and the rear part is omitted in Fig. 9(b).

10(a) and 10(b) are schematic views showing a mounting clip used in the ozone generating apparatus of the second embodiment. Fig. 10(a) is a plan view, and Fig. 10(b) is a front view.

11(a) and 11(b) are schematic views showing the attachment terminal mounting clip. Fig. 11(a) is a plan view, and Fig. 11(b) is a front view.

12(a) and 12(b) are schematic diagrams showing a connection structure between power feeding members in the second embodiment. Fig. 12 (a) is a plan view, Fig. 12 (b) is a front view, and the rear part is omitted in Fig. 12 (b).

Fig. 13 (a) is a plan view showing a modification of the outer clip, and Fig. 13 (b) is a front view showing a modification of the rack clip.

Hereinafter, embodiments of the present invention will be described in detail based on the drawings. The following embodiments are merely examples in nature and are not intended to limit the invention, its application, or its use.

<First embodiment>

(Structure of ozone generating device)

A tubular ozone generator 1 of the present embodiment is shown in Fig. 1 . The ozone generator 1 includes an apparatus main body 2, an accessory device 3, and the like, and the accessory device 3 is constituted by a control device, an operation panel, and the like that cooperate with the apparatus main body 2.

The apparatus main body 2 is a stainless steel pressure-resistant container having good corrosion resistance, and ozone is generated inside the apparatus main body 2. The apparatus main body 2 has a cylindrical trunk portion 11 and two lid portions 12 that seal both ends of the trunk portion 11. The apparatus main body 2 is supported by a pair of leg portions 13, 13 in a horizontally placed state. With. One of the cover portions 12 is attached to the trunk portion 11 by a hinge, and is configured as a switchable door.

A material gas pipe 14, an ozone pipe 15, a cooling pipe 16, and the like are connected to the apparatus main body 2. Specifically, the material gas pipe 14 is connected to a source gas supply source (not shown), and a material gas such as oxygen or air is supplied to the apparatus body 2 through the material gas pipe 14 . The ozone duct 15 is connected to an ozone supply target (not shown), and ozone generated in the apparatus main body 2 is sent to the supply target through the ozone duct 15.

The cooling duct 16 includes two cooling ducts 16a and 16b for water inlet and drain, and the cooling ducts 16a and 16b are respectively connected to a heat exchanger (not shown) or the like. Cooling water is circulated to the apparatus main body 2 through these cooling ducts 16a, 16b.

As shown in FIG. 2, the inside of the apparatus main body 2 is partitioned into a material gas chamber 18, a cooling chamber 19, and an ozone chamber 20 by two partition plates 17, 17 made of stainless steel. The material gas chamber 18 is disposed at one end portion of the apparatus main body 2 and is in communication with the material gas conduit 14. The ozone chamber 20 is disposed at the other end of the apparatus main body 2 and communicates with the ozone duct 15.

The cooling chamber 19 is located between the material gas chamber 18 and the ozone chamber 20, which occupies most of the volume of the apparatus body 2. The cooling chamber 19 communicates with the water inlet cooling duct 16a at a lower portion on the side of the ozone chamber 20. The cooling chamber 19 communicates with the drain cooling duct 16b on the upper side of the material gas chamber 18 side. Inside the cooling chamber 19, a plurality of limiting plates 21 are provided at predetermined intervals. Through these restricting plates 21, the inner upper side and the inner lower side of the cooling chamber 19 are alternately separated, and the inside of the cooling chamber 19 is designed to flow in a cooling water.

A plurality of ozone generating units 30 are provided inside the apparatus main body 2, and these ozone generating units 30 traverse the cooling chamber 19 and extend in parallel along the longitudinal direction of the trunk portion 11.

As shown in FIG. 3, the ozone generating unit 30 is arranged in a dense state. In detail, the ozone generating unit 30 is arranged in a triangular shape so that the spacing between adjacent ozone generating units 30 is the same. At each of the ozone generating units 30 of these ozone generating units 30, ozone is generated from the material gas.

The enlarged view of FIG. 3 and FIG. 4 show the detailed structure of the ozone generating unit 30. The ozone generating unit 30 is composed of an outer electrode tube 31 and a discharge tube 32.

The outer electrode tube 31 is composed of a cylindrical stainless steel tube, and each end portion of the outer electrode tube 31 is seamlessly joined to each of the partition plates 17. The outer electrode tube 31 is electrically grounded via the partition plate 17, and the outer electrode tube 31 constitutes an electrode on the low voltage side. The periphery of the outer electrode tube 31 is filled with cooling water, and each ozone generating unit 30 is cooled by cooling water. A discharge tube 32 is disposed inside the outer electrode tube 31, and the outer electrode tube 31 and the discharge tube 32 have the same center position.

(Structure of discharge tube)

The discharge tube 32 is composed of a dielectric tube 33, an electrode film 34, a power supply member 40, and the like.

The dielectric tube 33 is an elongated rod-shaped member having an opening 33a at one end thereof, and is made of, for example, glass or the like in a cylindrical shape. Generally, the size of the dielectric tube 33 is: the total length is up to 2 m, the outer diameter is about 10 mm to 30 mm, and the thickness is about 1 mm to 3 mm.

The outer peripheral surface of the dielectric tube 33 faces the inner peripheral surface of the outer electrode tube 31 with a slight gap (discharge gap 36) therebetween. When a high voltage is applied between the outer electrode tube 31 and the electrode film 34 of the discharge tube 32, a silent discharge is generated in the discharge gap 36.

The sealed end of the dielectric tube 33 is located in the ozone chamber 20, and the end of the dielectric tube 33 having the opening 33a is located in the material gas chamber 18. The material gas flows from the material gas chamber 18 into the discharge gap 36 where the silent discharge is generated, thereby generating ozone. The generated ozone flows to the ozone chamber 20 and is sent to the supply target through the ozone conduit 15.

The electrode film 34 is formed of a film-like metal conductor having high elasticity and excellent electrical conductivity, such as a spring steel plate made of stainless steel, and the electrode film 34 is formed in a cylindrical shape.

Specifically, after the metal conductor is inserted into the depth of the dielectric tube 33 from the opening 33a in a state in which the metal conductor is wound into an elongated cylindrical shape, the metal conductor is deflected toward the inside of the dielectric tube 33 by its own elastic force. The outer side is expanded, so that the electrode film 34 is in close contact with the inner peripheral surface of the dielectric tube 33.

Therefore, in the ozone generating device 1, the electrode metal is vapor-deposited on the dielectric tube. Unlike the case on the inner surface, since the electrode film 34 can be detached from the dielectric tube 33, only the electrode film 34 can be replaced.

Further, the electrode film 34 is provided in the dielectric tube 33 in a state in which a part thereof (also referred to as an exposed end portion 34a) is exposed from the opening 33a.

The power supply member 40 is connected to the high voltage side of the external power source 37 to supply power to the electrode film 34. As shown in FIG. 5, the power supply member 40 is composed of an inner clip 41, an outer clip 42, and the like.

Both the inner clip 41 and the outer clip 42 are formed by metal stamping, multi-forming, machining jigs, etc., and have good elasticity and electrical conductivity.

The outer clip 42 is a cylindrical member in which a part thereof is cut along the axial direction, and has a C-shaped cross section. The inner diameter of the outer clip 42 is formed to be smaller than the inner diameter of the dielectric tube 33 in an unloaded state that is not subjected to an external force. Here, the axial length L2 of the exposed end portion 34a is only greater than 0, that is, it is only required to be exposed from the opening 33a, but it is preferable that the axial length L2 of the exposed end portion 34a is larger than the axial length of the outer clip 42 L1 (L2 L1), more preferably, the axial length L2 of the exposed end portion 34a is greater than or equal to the axial length L1 of the outer clip 42 (L2) 2L1).

The inner clip 41 is also a cylindrical member having a C-shaped cross section similarly to the outer clip 42. The outer diameter of the inner clip 41 is formed to be larger than the inner diameter of the dielectric tube 33 in the no-load state. The axial length L3 of the inner clip 41 is formed to be at least larger than the axial length L1 of the inner clip 41.

An external force is applied to the outer clasp 42 to enlarge the diameter, and the outer clasp 42 is fitted over the outer side of the exposed end portion 34a into which the inner clasp 41 is inserted. Since the outer clip 42 is reduced after the external force is removed, the outer clip 42 is provided on the outer side of the electrode film 34 in a state of being pressed against the exposed end portion 34a from the outside.

An external force is applied to the inner clip 41 to reduce the diameter, and the inner clip 41 is inserted into the inner side of the electrode film 34 until the front end of the inner clip 41 is located inside the dielectric tube 33. Since the inner clip 41 is expanded after the external force is removed, the inner clip 41 is from the inner side. The state of being crimped on the electrode film 34 is provided inside the electrode film 34.

As a result, the exposed end portion 34a is sandwiched by the inner clip 41 and the outer clip 42, and is pressed from the inner side and the outer side.

As described above, the inner clip 41 and the outer clip 42 sandwich the exposed end portion 34a of the electrode film 34 exposed from the opening 33a of the dielectric tube 33, so that the exposed end portion 34a is in direct and uniform contact with the power supply member 40. . Therefore, it is possible to supply power to the electrode film 34 stably.

(connection between power supply components)

As schematically shown in Fig. 6, the power supply members 40 of the discharge tubes 32 are electrically connected to each other. It should be noted that, in FIG. 6, the power supply members 40 are connected in series to each other, that is, one power supply member 40 is connected to one or two adjacent power supply members 40, but the power supply member can be appropriately set according to specifications. The way to connect between 40.

A connection terminal 43 electrically connected to the wire 44 is provided at a plurality of locations of the group of power supply members 40 connected to each other. The wire 44 is electrically connected to the external power source 37 at a position not shown. Power is supplied from the external power source 37 to the group of power supply members 40 via these connection terminals 43 and wires 44.

Since the gap between the adjacent power supply members 40 is small, when the number of the power supply members 40 is large, the workload is extremely large, and thus the connection work of the power supply members 40 is a burdensome operation.

Then, in the ozone generator 1 of the present embodiment, the shapes of the inner clip 41 and the outer clip 42 are worked up, so that the connection work of the power supply members 40 can be easily performed.

(The specific structure of the power supply unit)

First, as shown in FIG. 4, the inner clip 41 is provided such that the length L4 of the inner clip 41 exposed from the opening 33a of the dielectric tube 33 is twice or more the axial length L1 of the outer clip 42. It is set to be 2 times or more in order to be able to stack at least two outer clips 42 on the inner clip 41.

As shown in Figure 7, in order to be able to clamp the two exposed ends 34a at a time, the two outer clips 42 is joined together to form one body (also called outer clip pair 42P). A curved portion 45 is provided between the two outer buckles 42, 42 that are connected. The dimensions between the two outer clips 42, 42 are set to match the spacing between adjacent power supply members 40. Since the bent portion 45 can be elastically deformed, the mounting can be completed even if the pitch is slightly deviated.

In order to connect the wires 44, as shown in FIG. 8, a part of the inner side clips 41 is configured such that the inner side clips 41 are directly provided with the connection terminal inner side clips 52 of the connection terminals 43.

When a part of the inner clips 41 are provided with the connection terminal inner clips 52, a desired number of the connection terminals 43 can be easily mounted at a desired portion.

A power supply member 40 that is connected to each other using these outer clip pairs 42P is shown in FIG. The outer clip pair 42P is sleeved over the adjacent two exposed ends 34a, 34a, thereby forming a pair of power supply members in which the two power supply members 40, 40 are electrically connected. Further, the other outer clip pair 42P is placed over the two exposed end portions 34a, 34a adjacent to the pair of power supply members to further form a pair of power supply members.

Then, for the two adjacent power supply members 40, 40 of the pair of two power supply members formed, an outer clip pair 42P is stacked in the longitudinal direction of the dielectric tube 33, and the two power supply members 40, The inner buckles 41, 41 of 40 are clamped. In this manner, the outer clip pair 42P is interlaced and continuously fitted over the exposed end portions 34a and the inner clips 41 of the respective power supply members 40, whereby the connection operation of the plurality of power supply members 40 can be easily performed.

<Second Embodiment>

An ozone generating apparatus according to a second embodiment is shown in Figs. 10 to 12 . The basic configuration of the ozone generating device and the discharge tube of the present embodiment is the same as that of the first embodiment. Therefore, the same reference numerals are given to the same structures, and the description thereof will be omitted.

In the ozone generating device 1 of the present embodiment, the outer clips 42 are not used in pairs, but are used separately. The power supply member 40 additionally includes a mounting clip 50 as shown in FIGS. 10 and 11 and a connection terminal mounting clip 51.

The erecting clip 50 has a pair of insertion legs 50a extending oppositely, and is erected on these The mounting portion 50b on one end of the leg portion 50a is inserted. A bendable portion 50c that is elastically deformable is formed at the center of the mounting portion 50b. The size between the insertion legs 50a, 50a is set to match the spacing between adjacent power supply members 40. In detail, the size between the insertion leg portions 50a, 50a is formed to be slightly smaller than the spacing between the adjacent power supply members 40.

The inner peripheral surface of the inner clip 41 and the shape of the ozone generating unit 30 provided in the dielectric tube 33 are fitted, and each of the insertion leg portions 50a is formed in a curved shape in cross section.

An external force is applied to expand the insertion legs 50a, 50a, and the insertion legs 50a are inserted into the adjacent two inner buckles 41, 41, thereby erecting the fastening clips 50 on the two inner buckles 41. 41. In this way, the insertion legs 50a are crimped onto the inner surfaces of the inner buckles 41, and the inner buckles 41, 41 are electrically connected to each other. Since the bent portion 50c can be elastically deformed, there is no problem even if the pitch between the inner clips 41, 41 is slightly deviated.

Fig. 11 shows the attachment terminal mounting clip 51 attached. In the attached connection terminal mounting clip 51, the connection terminal 43 connectable to the lead wire 44 and the mounting portion 50b are integrally provided.

Fig. 12 shows the power supply member 40 which is connected to each other by means of these mounting clips 50 and the attached connection terminal mounting clips 51. Since the mounting clip 50 and the attached terminal mounting clip 51 are inserted into the adjacent two inner clips 41, 41 from the direction of the opening 33a of the dielectric tube 33, the use of the clip clip 50 can be completed. The connection work is performed by attaching the clip 51 with the connection terminal, and therefore the workability is good.

As long as a part of the mounting clip 50 is configured to include the connection terminal mounting clip 51, the connection terminal 43 can be easily provided.

Incidentally, the ozone generating device of the present invention is not limited to the above embodiment, and various configurations other than the above-described embodiments are also included in the present invention.

As shown in Fig. 13 (a), three or more outer clips 42 may be coupled together. As shown in FIG. 13(b), two or more mounting clips 50 may be coupled together. The number of links is large, and it has the advantages of workability and resistance. In particular, it can be set to such The form, that is, the plurality of outer clips 42 or the rack clips 50 are connected together, and the number of the joints is 10, 20, and the like. In this way, when an outer clip 42 or the like is required, an outer clip 42 can be cut for use. When two outer clips 42 and the like are required, the two outer clips 42 can be cut and used. Since the outer clip 42 or the like corresponding to the required amount can be cut as needed, the versatility is good.

In the ozone generating apparatus according to the second embodiment, a part of the inner clips 41 may be configured as the attached terminal inner clip 52 as shown in FIG. 8 instead of the attached terminal mounting clip 51 as in the first embodiment.

33‧‧‧ dielectric tube

33a‧‧‧ openings

34‧‧‧Electrode film

34a‧‧‧End

40‧‧‧Power supply parts

41‧‧‧Inside buckle

42‧‧‧Outside clip

Claims (3)

A tubular ozone generating device, wherein the tubular ozone generating device includes an ozone generating unit having a cylindrical outer electrode tube and a discharge tube disposed inside the outer electrode tube via a discharge gap, The discharge tube has a cylindrical dielectric tube having an opening at least at one end thereof, and is provided in close contact with an inner peripheral surface of the dielectric tube in a state having an exposed end portion exposed from the opening. An electrode film; and a power supply member connected to the external power source to supply power to the electrode film, the power supply member having an inner clip disposed inside the electrode film and an outer clip disposed outside the electrode film The inner buckle and the outer buckle clamp the exposed end. The ozone generating device according to claim 1, wherein the ozone generating device is provided with a plurality of the ozone generating units, and the outer buckle has a plurality of buckles for clamping the ends of the plurality of the electrode films at a time. The nip portion, the plurality of exposed ends are respectively sandwiched by the clip portion and the inner clip disposed on the inner side of each exposed end portion. The ozone generating device according to claim 1, wherein the ozone generating device includes a plurality of the ozone generating units, and at least a part of the inner clip is an inner connecting clip with a connecting terminal, and the inner connecting clip of the connecting terminal is attached A connection terminal electrically connected to the external power source is directly provided.