CN111777044A

CN111777044A - Tubular ozone generator

Info

Publication number: CN111777044A
Application number: CN202010488958.5A
Authority: CN
Inventors: 寺岛裕二; 吉田久次; 广井秀树; 北村胜博; 尾形安央
Original assignee: Sumitomo Precision Products Co Ltd
Current assignee: Sumitomo Precision Products Co Ltd
Priority date: 2014-02-17
Filing date: 2015-01-28
Publication date: 2020-10-16
Also published as: TWI636953B; WO2015122132A1; JP2015151311A; JP6196913B2; TW201532957A; CN105849037A

Abstract

A tube-type ozone generating device (1) is provided with an ozone generating unit (30). The ozone generating unit (30) has a discharge tube (32) disposed inside the outer electrode tube (31) with a discharge gap (36) therebetween. The discharge tube (32) has: a dielectric tube (33) having an opening (33 a); an electrode film (34) provided on the inner peripheral surface of the dielectric tube (33) in a state where the end (34a) is exposed from the opening (33 a); and a power supply member (40). The power supply member (40) has an inner clip (41) and an outer clip (42), and the exposed end (34a) of the electrode film (34) is sandwiched between the inner clip (41) and the outer clip (42).

Description

Tubular ozone generator

This application is a divisional application of an invention patent application having an application date of 2015, year 01, month 28, application number of 201580003306.5 (international application number of PCT/JP2015/000373), and an invention name of "tubular ozone generator".

Technical Field

The present invention relates to a tube-type ozone generating apparatus, particularly to the configuration of a power supply member.

Background

Ozone has a strong oxidizing action and is decomposed into harmless oxygen and the like after the action. Therefore, in the fields of semiconductor manufacturing, food manufacturing, water treatment, and the like, treatments such as cleaning, sterilization, deodorization, and the like are often performed using ozone.

Such ozone generating devices for generating ozone often adopt a silent discharge method.

In a silent discharge type ozone generating device, a gap (discharge gap) is provided between a pair of electrodes facing each other with a dielectric interposed therebetween. When a high voltage is applied between a pair of electrodes, a silent discharge is generated in the discharge gap. An oxygen-containing raw material gas is caused to flow through the discharge gap, whereby the raw material gas is ozonized to generate ozone.

Among such silent discharge type ozone generating devices, there is a tube type ozone generating device. In the tube-type ozone generating apparatus, a discharge tube in a tube shape is used as a dielectric substance constituting a unit for generating ozone. The tube-type ozone generating apparatus has an advantage that it is easy to increase the size of the apparatus because a plurality of discharge tubes can be arranged in parallel and densely.

The structure of the power supply member in the tube-type ozone generating apparatus is disclosed in, for example, patent document 1 and patent document 2.

In patent document 1, a rod-shaped power supply member electrically connected to a high-voltage power supply is disposed inside a dielectric tube, and the power supply member is electrically connected to an electrode in which a metal is deposited on an inner surface of the dielectric tube via a stainless steel wire (stainless steel wire) member.

Patent document 2 discloses a power supply member in the form of a lantern having a plurality of slits formed in the outer peripheral surface thereof, and the power supply member is elastically brought into contact with an electrode formed on the inner surface of a dielectric tube by metal deposition, whereby the power supply is electrically connected to the electrode.

Patent document 1: japanese laid-open patent publication No. 2012-144425

Patent document 2: japanese laid-open patent publication No. 2013-184874

Disclosure of Invention

Technical problems to be solved by the invention

The dielectric tube is made of glass or the like, and the inner surface is often not perfectly circular due to the influence of the material and the molding accuracy, and the inner diameter is also deviated to some extent. The inner surface of the dielectric tube is not smooth but has irregularities on a microscopic level.

For this reason, the contact between the power supply member and the electrode is ensured by using a wire member or forming the power supply member in a lantern shape. However, since the wire member and the lantern-shaped power supply member have complicated shapes, there is a problem that they are troublesome in manufacturing.

Accordingly, a main object of the present invention is to provide an ozone generating apparatus which can be easily manufactured.

Technical solution for solving technical problem

The ozone generating unit provided in the tube-type ozone generating device of the present invention includes a cylindrical outer electrode tube and a discharge tube arranged inside the outer electrode tube with a discharge gap therebetween. The discharge tube has: a cylindrical dielectric tube having an opening at least at one end; an electrode film disposed in close contact with an inner peripheral surface of the dielectric tube in a state having an exposed end portion exposed from the opening; and a power supply member connected to an external power supply to supply power to the electrode film.

The power supply member has an inner clip provided inside the electrode film and an outer clip provided outside the electrode film, and the exposed end portion is sandwiched by the inner clip and the outer clip.

According to this ozone generating device, since the electrode film is brought into close contact with the inner peripheral surface of the dielectric tube, the exposed end portion can be easily provided by adjusting the length of the electrode film in the longitudinal direction of the dielectric tube. Further, since the exposed end portion of the electrode film is sandwiched by the inner clip and the outer clip, the electrode film and the power supply member can be brought into direct and uniform contact, and power can be stably supplied to the electrode film.

Preferably: the ozone generating device is provided with a plurality of ozone generating units, the outer clip has a plurality of clip parts for clamping the end parts of the electrode films at one time, and a plurality of exposed end parts are respectively clamped by the clip parts and the inner clip arranged at the inner side of each exposed end part.

In this way, the end portions of the plurality of electrode films can be sandwiched at a time by using one outer clip. Therefore, the amount of work for sandwiching the exposed end portion of the electrode film can be reduced. Further, a large number of discharge tubes can be easily connected to each other, and contact resistance can be reduced.

Preferably: the ozone generating device comprises a plurality of ozone generating units, at least a part of the inner clips are inner clips with connecting terminals, and the connecting terminals electrically connected with the external power supply are directly arranged on the inner clips with the connecting terminals.

Thus, the number of components and the contact resistance can be reduced with a simple configuration.

Effects of the invention

According to the ozone generating apparatus of the present invention, power can be stably supplied to each discharge tube.

Drawings

Fig. 1 is a schematic perspective view showing a tube-type ozone generating apparatus according to a first embodiment.

Fig. 2 is a schematic side view, in which some parts are omitted to show the internal structure of the ozone generating apparatus.

Fig. 3 is a schematic sectional view taken along line X-X in fig. 2.

Fig. 4 is a schematic sectional view showing the structure of the ozone generating unit.

Fig. 5 is an exploded perspective view of the power supply part.

Fig. 6 is a schematic diagram showing an example of a connection method between power supply members.

Fig. 7(a) and 7(b) are schematic views showing the pair of outer clips. Fig. 7(a) is a plan view and fig. 7(b) is a front view.

Fig. 8 is a schematic diagram showing the connection terminal.

Fig. 9(a) and 9(b) are schematic diagrams showing a connection structure between power supply members. Fig. 9(a) is a plan view, fig. 9(b) is a front view, and parts of the rear portion are omitted in fig. 9 (b).

Fig. 10(a) and 10(b) are schematic views showing mounting clips used in the ozone generating apparatus of the second embodiment. Fig. 10(a) is a plan view and fig. 10(b) is a front view.

Fig. 11(a) and 11(b) are schematic views showing a clip for mounting a connection terminal. Fig. 11(a) is a plan view and fig. 11(b) is a front view.

Fig. 12(a) and 12(b) are schematic diagrams showing a connection structure between power supply members in the second embodiment. Fig. 12(a) is a plan view and fig. 12(b) is a front view, and parts of the rear portion are omitted in fig. 12 (b).

Fig. 13(a) is a plan view showing a modification of the outer clip, and fig. 13(b) is a front view showing a modification of the clip.

Detailed Description

Embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following embodiments are merely examples in nature and are not intended to limit the present invention, its application, or uses.

< first embodiment >

(Structure of ozone generating apparatus)

Fig. 1 shows a tube-type ozone generating apparatus 1 according to the present embodiment. The ozone generating apparatus 1 includes an apparatus main body 2, an accessory device 3, and the like, and the accessory device 3 is constituted by a control device, an operation panel, and the like that operate in cooperation with the apparatus main body 2.

The apparatus main body 2 is a stainless pressure-resistant container having excellent corrosion resistance, and ozone is generated inside the apparatus main body 2. The device body 2 includes a cylindrical body portion 11 and two lid portions 12 that seal both ends of the body portion 11. The apparatus main body 2 is supported by a pair of

leg portions

13, 13 in a horizontal state. One of the lid portions 12 is attached to the body portion 11 by a hinge and is configured as an openable and closable door.

The apparatus main body 2 is connected to a raw material gas line 14, an ozone line 15, a cooling line 16, and the like. Specifically, the source gas duct 14 is connected to a source gas supply source, not shown, and a source gas such as oxygen or air is supplied to the apparatus main body 2 through the source gas duct 14. The ozone pipe 15 is connected to an ozone supply target, not shown, to which ozone generated in the apparatus main body 2 is sent through the ozone pipe 15.

The cooling duct 16 includes two

cooling ducts

16a and 16b for water intake and water discharge, and the

cooling ducts

16a and 16b are connected to a heat exchanger or the like, not shown, respectively. The cooling water is circulated and supplied to the apparatus main body 2 through these cooling

pipes

16a and 16 b.

As shown in fig. 2, the inside of the apparatus main body 2 is partitioned into a raw material gas chamber 18, a cooling chamber 19, and an ozone chamber 20 by two

partition plates

17, 17 made of stainless steel. The raw material gas chamber 18 is disposed at one end portion of the apparatus main body 2, and communicates with the raw material gas pipe 14. The ozone chamber 20 is disposed at the other end portion of the apparatus main body 2, and communicates with the ozone duct 15.

The cooling chamber 19 is located between the raw material gas chamber 18 and the ozone chamber 20, and the cooling chamber 19 occupies most of the volume of the apparatus main body 2. The lower part of the cooling chamber 19 on the ozone chamber 20 side communicates with the cooling pipe 16a for water supply. The cooling chamber 19 communicates with the drain cooling pipe 16b at an upper portion on the raw material gas chamber 18 side. A plurality of limiting plates 21 are provided at predetermined intervals inside the cooling chamber 19. The upper and lower inner sides of the cooling chamber 19 are alternately partitioned by these restricting plates 21, and the inside of the cooling chamber 19 is designed so that cooling water flows in a meandering manner.

A plurality of ozone generating units 30 are provided inside the apparatus main body 2, and these ozone generating units 30 extend in parallel along the longitudinal direction of the trunk unit 11 across the supercooling chamber 19.

As shown in fig. 3, the ozone generating units 30 are arranged in a dense state. In detail, the ozone generating units 30 are arranged in a triangular shape such that the intervals between adjacent ozone generating units 30 are equal. At each of these ozone generating units 30, ozone is generated from the raw material gas.

The detailed structure of ozone generating unit 30 is shown in the enlarged view of fig. 3 and fig. 4. The ozone generating unit 30 is composed of an outer electrode tube 31 and a discharge tube 32.

The outer electrode tube 31 is formed of a cylindrical stainless steel tube, and each end of the outer electrode tube 31 is joined to each separator 17 without a seam. The outer electrode tube 31 is electrically grounded via the partition plate 17, and the outer electrode tube 31 constitutes a low-voltage side electrode. The periphery of the outer electrode tube 31 is filled with cooling water, and each ozone generating unit 30 is cooled by the cooling water. A discharge tube 32 is disposed inside the outer electrode tube 31, and the outer electrode tube 31 and the discharge tube 32 have the same center position.

(Structure of discharge tube)

The discharge tube 32 is composed of a dielectric tube 33, an electrode film 34, a power supply member 40, and the like.

The dielectric tube 33 is an elongated rod-shaped member having an opening 33a at one end, and is made into a cylindrical shape, for example, from glass or the like. Typically, the dimensions of the dielectric tube 33 are: the longest total length is 2m, the outer diameter is about 10 mm-30 mm, and the thickness is about 1 mm-3 mm.

The outer peripheral surface of the dielectric tube 33 faces the inner peripheral surface of the outer electrode tube 31 with a slight gap (discharge gap 36). When a high voltage is applied between the outer electrode tube 31 and the electrode film 34 of the discharge tube 32, silent discharge occurs in the discharge gap 36.

The sealed end of the dielectric tube 33 is located in the ozone chamber 20, and the end of the dielectric tube 33 having the opening 33a is located in the raw material gas chamber 18. The raw material gas flows from the raw material gas chamber 18 into the discharge gap 36 where silent discharge is generated, thereby generating ozone. The generated ozone flows to the ozone chamber 20 and is sent to the supply object through the ozone pipe 15.

The electrode film 34 is formed of a thin film metal conductor having high elasticity and good conductivity, such as a stainless steel spring steel plate, and the electrode film 34 is formed in a cylindrical shape.

Specifically, after the metal conductor is inserted into the deep part of the dielectric tube 33 from the opening 33a in a state where the metal conductor is wound in an elongated cylindrical shape, the metal conductor is expanded radially outward inside the dielectric tube 33 by its own elastic force, and the electrode film 34 is brought into close contact with the inner peripheral surface of the dielectric tube 33.

Therefore, in the ozone generating apparatus 1, since the electrode film 34 can be removed from the dielectric tube 33, only the electrode film 34 can be replaced, unlike the case where the electrode metal is evaporated on the inner surface of the dielectric tube.

The electrode film 34 is provided in the dielectric tube 33 in a state where a part thereof (also referred to as an exposed end portion 34a) is exposed from the opening 33 a.

The power supply member 40 is connected to the high voltage side of the external power source 37 to supply power to the electrode film 34, and as shown in fig. 5, the power supply member 40 is constituted by an inner clip 41, an outer clip 42, and the like.

The inner clip 41 and the outer clip 42 are formed by metal press working, Multi-forming (Multi-forming), machining jig, or the like, and have good elasticity and conductivity.

The outer clip 42 is a cylindrical member having a part cut off in the axial direction, and has a C-shaped cross section. The inside diameter of the outside clip 42 is formed as: and is smaller than the inner diameter of the dielectric tube 33 in a non-load state where the dielectric tube is not subjected to an external force. Here, the axial length L2 of the exposed end 34a may be larger than 0, that is, may be exposed from the opening 33a, but the axial length L2 of the exposed end 34a is preferably larger than the axial length L1 of the outer clip 42 (L2 ≧ L1), and more preferably L2 ≧ 2L 1.

The inner clip 41 is also a cylindrical member having a C-shaped cross section, similar to the outer clip 42. The outside diameter of the inside clip 41 is formed as: and in an unloaded state, larger than the inner diameter of the dielectric tube 33. The axial length L3 of the inside clip 41 is formed to be at least greater than the axial length L1 of the inside clip 41.

The outer clip 42 is expanded in diameter by applying an external force, and the outer clip 42 is fitted over the outer side of the exposed end portion 34a into which the inner clip 41 is inserted. Since the outer clip 42 is contracted when the external force is removed, the outer clip 42 is provided outside the electrode film 34 in a state of being pressed against the exposed end portion 34a from the outside.

The inner clip 41 is reduced in diameter by applying an external force, and the inner clip 41 is inserted into the electrode film 34 until the tip of the inner clip 41 is positioned inside the dielectric tube 33. Since the inner clip 41 is expanded when the external force is removed, the inner clip 41 is disposed inside the electrode film 34 in a state of being pressed against the electrode film 34 from the inside.

As a result, the exposed end 34a is sandwiched between the inner clip 41 and the outer clip 42, and is pressed from the inside and the outside.

As described above, the exposed end portion 34a of the electrode film 34 exposed from the opening 33a of the dielectric tube 33 is sandwiched by the inner clip 41 and the outer clip 42, and the exposed end portion 34a is in direct and uniform contact with the power supply member 40. Therefore, power can be stably supplied to the electrode film 34.

(connection between Power supply members)

As schematically shown in fig. 6, the power feeding members 40 of the discharge tubes 32 are electrically connected to each other. In fig. 6, the power feeding members 40 are connected in series with each other, that is, one power feeding member 40 is connected to one or two adjacent power feeding members 40, but the connection form between the power feeding members 40 may be appropriately set according to the specification.

Connection terminals 43 electrically connected to the lead wires 44 are provided at a plurality of positions of the group of power supply members 40 connected to each other. The lead 44 is electrically connected to the external power supply 37 at a position not shown in the drawing. Power is supplied from an external power source 37 to a group of power supply members 40 via these connection terminals 43 and wires 44.

Since the gap between the adjacent power supply members 40 is small, when the number of power supply members 40 is large, the amount of work for connecting the group of power supply members 40 is very large, and therefore the work for connecting the group of power supply members 40 is a heavy work.

In the ozone generating apparatus 1 of the present embodiment, the shapes of the inner clip 41 and the outer clip 42 are devised so that the connection operation of the power supply members 40 can be easily performed.

(concrete Structure of Power supply Member)

First, as shown in fig. 4, the inside clip 41 is provided with: the length L4 of the inner clip 41 exposed from the opening 33a of the dielectric tube 33 is 2 times or more the axial length L1 of the outer clip 42. The number of the outer clips 42 is set to 2 or more so that at least two outer clips 42 can be stacked on the inner clip 41.

As shown in fig. 7, the two outer clips 42 are integrally connected to each other (also referred to as outer clip pairs 42P) so as to be able to hold the two exposed ends 34a at a time. A curved portion 45 is provided between the two

outer clips

42, 42 that are connected. The dimension between the two

outer clips

42, 42 is set in accordance with the spacing between the adjacent power supply members 40. Since the bent portion 45 can be elastically deformed, the mounting can be completed even if the pitch is slightly deviated.

As shown in fig. 8, a part of the inner clips 41 are configured as connecting terminal-attached inner clips 52 in which the connecting terminals 43 are directly provided on the inner clips 41 for connecting the lead wires 44.

By configuring a part of the inner clips 41 to be attached with the connection terminal inner clips 52, a desired number of connection terminals 43 can be easily attached to a desired portion.

The power supply members 40 are shown in fig. 9 as being connected to each other using these outer clip pairs 42P. The outer pair of clips 42P fit over the adjacent two exposed end portions 34a, thereby forming a pair of power supply members in which the two

power supply members

40, 40 are electrically connected together. The other pair of outer clips 42P are fitted over the two exposed

end portions

34a, 34a adjacent to the pair of power supply members, thereby further forming a pair of power supply members.

Then, an outer clip pair 42P is stacked on the two adjacent

power supply members

40, 40 of the two pairs of power supply members formed, in the longitudinal direction of the dielectric tube 33, and

inner clips

41, 41 of the two

power supply members

40, 40 are sandwiched. In this way, the outer clip pairs 42P are continuously fitted to the exposed end portions 34a and the inner clips 41 of the power supply members 40 in a staggered manner, and the connection operation of the plurality of power supply members 40 can be easily performed.

< second embodiment >

Fig. 10 to 12 show an ozone generating apparatus according to a second embodiment. Since the basic structures of the ozone generating device and the discharge tube of the present embodiment are the same as those of the first embodiment, the same reference numerals are used for functionally identical structures, and the description thereof is omitted.

In the ozone generating device 1 of the present embodiment, the outer clips 42 are not used in pairs, but are used individually. The power supply member 40 further includes a mounting clip 50 and a connection terminal mounting clip 51 as shown in fig. 10 and 11.

The mounting clip 50 includes a pair of insertion leg portions 50a extending in an opposed manner, and a mounting portion 50b mounted on one end of the insertion leg portions 50 a. A bent portion 50c that can elastically deform is formed at the center of the bridge portion 50 b. The dimension between the

insertion leg portions

50a, 50a is set in accordance with the pitch between the adjacent power supply members 40. In detail, the size between the

insertion leg portions

50a, 50a is formed to be slightly smaller than the pitch between the adjacent power supply members 40.

Each of the insertion leg portions 50a is formed in an arcuate shape having a minor cross section in accordance with the inner peripheral surface of the inner clip 41 provided in the dielectric tube 33 and the shape of the ozone generating unit 30.

The mounting clip 50 is mounted on the two

inner clips

41, 41 by expanding the

insertion leg portions

50a, 50a by applying an external force and inserting each insertion leg portion 50a into the adjacent two

inner clips

41, 41. Thus, the insertion leg portions 50a are pressed against the inner surfaces of the inner clips 41, and the

inner clips

41 and 41 are electrically connected to each other. Since the bent portion 50c is elastically deformable, even if there is a slight deviation in the interval between the inner clips 41, no problem is caused.

Fig. 11 shows the accessory connection terminal mounting clip 51. In the connection terminal mounting clip 51, the connection terminal 43 connectable to the lead 44 is provided integrally with the mounting portion 50 b.

Fig. 12 shows the power supply member 40 connected to each other by these mounting clips 50 and the accessory connection terminal mounting clips 51. Since the connection work by the installation clip 50 and the additional connection terminal installation clip 51 can be completed only by inserting the installation clip 50 and the additional connection terminal installation clip 51 into the adjacent two

inner clips

41 and 41 from the direction toward the opening 33a of the dielectric tube 33, workability is good.

The connection terminals 43 can be easily provided by configuring a part of the mounting clips 50 with the connection terminal mounting clips 51.

The ozone generating device according to the present invention is not limited to the above embodiment, and various configurations other than the above embodiment are also included in the present invention.

As shown in fig. 13(a), three or more outer clips 42 may be connected together. As shown in fig. 13(b), two or more mounting clips 50 may be connected together. The number of connections is large, which has advantages in workability and resistance. In particular, the configuration may be such that: a plurality of outer clips 42 or erection clips 50 are connected together, and the number of the connection is 10, 20 and the like. Thus, when one outer clip 42 is required, one outer clip 42 can be cut and used, and when two outer clips 42 are required, two outer clips 42 can be cut and used. Since the outer clips 42 and the like can be cut as needed and used by the required amount, versatility is improved.

In the ozone generating device of the second embodiment, as in the first embodiment, a part of the inner clips 41 may be configured as the inner clip 52 with the connecting terminal shown in fig. 8 instead of the clip 51 with the connecting terminal.

-description of symbols-

1 ozone generating device

30 ozone generating unit

31 outer electrode tube

32 discharge tube

33 dielectric tube

33a opening

34 electrode film

34a exposed end portion

40 Power supply part

41 inside clip

42 outside buckle

Claims

1. A tubular ozone generating device is characterized in that:

the tube-type ozone generating device comprises an ozone generating unit having a cylindrical outer electrode tube and a discharge tube disposed inside the outer electrode tube with a discharge gap therebetween, the ozone generating unit generating a silent discharge in the discharge gap,

the discharge tube has:

a cylindrical dielectric tube having an opening at least at one end;

an electrode film formed of a thin film metal conductor having high elasticity and inserted into the dielectric tube in a state of being rolled into an elongated cylindrical shape, and expanded inside the dielectric tube by its own elasticity; and

a power supply member connected to an external power source to supply power to the electrode film,

the electrode film has a portion closely contacting the inner peripheral surface of the dielectric tube and an exposed end portion exposed from the opening of the dielectric tube,

the power supply member has an inner clip provided inside the electrode film and an outer clip provided outside the electrode film,

applying an external force to the inner clip to reduce the diameter of the inner clip, inserting the inner clip into the electrode film until the front end of the inner clip is positioned inside the dielectric tube,

applying an external force to the outer clip to expand the diameter of the outer clip, and sheathing the outer clip on the outer side of the exposed end part inserted with the inner clip,

the exposed end is clamped by the inner side clip and the outer side clip.

2. The ozone generating apparatus as claimed in claim 1, wherein:

each of the discharge tubes of the plurality of ozone generating units has the dielectric tube, and

having a plurality of exposed end portions respectively corresponding to the respective dielectric tubes,

at least two of the outer clips corresponding to the plurality of exposed end portions are integrally connected to each other, and a bent portion is provided between the two outer clips.

3. The ozone generating apparatus as claimed in claim 1, wherein:

the ozone generating device is provided with a plurality of ozone generating units,

at least a part of the inner clips are subsidiary connecting terminal inner clips, and connecting terminals electrically connected to the external power supply are directly provided on the subsidiary connecting terminal inner clips.