JP7001258B2 - Tube surface treatment equipment and plasma treatment equipment - Google Patents

Description

The present invention relates to a tube surface treatment device that modifies the surface of an elastically deformable or coiled tube by plasma irradiation, and in particular, surface-treats the inner surface of an elastically deformable or coiled tube by plasma irradiation in a space-saving manner. The present invention relates to a tube surface treatment device and a plasma treatment device suitable for quality.

As a surface treatment method for improving the hydrophilicity of the inner wall surface of a test tube or pipette by irradiating it with plasma, for example, the inside of the test tube with the open end closed is maintained in a vacuum state, and a predetermined voltage is applied to electrodes arranged at both ends of the test tube. It has been proposed to apply a DC pulse voltage for a predetermined time (Patent Document 1).

Japanese Patent No. 5785650

When the inner surface of an elastically deformable long tube is surface-treated by the surface treatment method disclosed in Patent Document 1, the long tube must be straightened, which is unrealistic in terms of securing space and the like. rice field.

Further, when the inner surface of the coiled tube is surface-modified by plasma irradiation, it is difficult to generate plasma with the electrode arrangement of Patent Document 1.

Therefore, the present invention has been made by paying attention to the unsolved problems of such conventional techniques, and the inner surface of a space-saving, elastically deformable or coiled tube is surface-modified by plasma irradiation. It is an object of the present invention to provide a tube surface treatment device and a plasma treatment device suitable for the above.

[Invention 1] In order to achieve the above object, the tube surface treatment device of the invention 1 is a tube surface treatment device that surface-treats the inner surface of an elastically deformable or coiled tube by plasma irradiation, and is a vacuum chamber. A support tower arranged in the vacuum chamber and having the elastically deformable tube spirally wound and attached to the outer periphery of the tower body, or a support tower to which the coiled tube is attached, and the outer periphery of the tower body. A plurality of first electrode bodies arranged along the circumferential direction, a plurality of second electrode bodies arranged between the first electrode bodies along the circumferential direction on the outer periphery of the tower body, and the first electrode body. A power supply unit that applies a predetermined voltage to the electrode body and the second electrode body, and a tube attached to the tower body are connected to exhaust the gas in the tube, and the pressure is reduced to the pressure at which plasma is generated in the tube. It has a first vacuum pump unit.

Here, the vacuum means a state in a space filled with a gas having a pressure lower than the atmospheric pressure. Hereinafter, the same applies to the specification of the present application.

[Invention 2] Further, the surface treatment device for the tube of the invention 2 is the surface treatment device for the tube of the invention 1. Detachable on the surface.

[Invention 3] Further, in the tube surface treatment device of the invention 3, in the tube surface treatment device of the invention 1, a fitting groove into which the tube is fitted is spirally formed on the outer peripheral surface of the tower body.

[Invention 4] Further, the tube surface treatment device of the invention 4 is the tube surface treatment device of any one of the inventions 1 to 3, wherein the support tower is detachably attached to the vacuum chamber.

[Invention 5] Further, the tube surface treatment device of the invention 5 exhausts the gas in the vacuum chamber in the tube surface treatment device of any one of the inventions 1 to 4, and is higher than the pressure in the tube. It has a second vacuum pump unit that can reduce the pressure to a pressure at which plasma is not generated in the vacuum chamber and adjust the differential pressure generated between the pressure and the pressure in the tube.

[Invention 6] Further, the tube surface treatment device of the invention 6 is the tube surface treatment device of any one of the inventions 1 to 5, wherein the vacuum chamber is a chamber main body formed in a vertically long bottomed tubular shape. And a lid that closes the upper end opening of the chamber body, and the support tower can be taken out through the upper end opening.

[Invention 7] On the other hand, in order to achieve the above object, the plasma processing apparatus of the invention 7 is a plasma processing apparatus that processes one of the inner surface and the outer surface of the object to be processed by plasma irradiation, and applies atmospheric pressure. The differential pressure between the two spaces is a predetermined condition in a state where the inner surface of the object to be processed is arranged in one of the two adjustable spaces and the outer surface of the object to be processed is arranged in the other space. As described above, the air pressure in the one space and the air pressure in the other space are reduced, and the air pressure in the one space is made lower than the air pressure in the other space.

As described above, according to the tube surface treatment device of the invention 1, the device can be arranged in a state of being wound around the outer periphery of the tower body regardless of the length of the elastically deformable tube or even a coiled tube. Space can be saved. Further, since the first electrode body and the second electrode body are not arranged facing each other with the tube sandwiched between them, but are alternately arranged on the outer periphery of the tower body along the circumferential direction to generate plasma, the first electrode body and the second electrode body can be generated. The degree of freedom in arranging the second electrode body is increased, and the device can be made compact.

Further, according to the tube surface treatment device of the invention 2, the tube can be appropriately attached to the outer peripheral surface of the tower body according to the length of the tube.

Further, according to the tube surface treatment apparatus of the invention 3, since tubes of the same length can be easily attached, a large number of tubes of the same length can be efficiently treated.

Further, according to the tube surface treatment apparatus of the present invention 4, if a support tower to which the tube is attached is prepared in advance, the replacement time of the support tower from the end of the treatment to the next treatment can be shortened, and the treatment efficiency can be shortened. Can be up.

Further, according to the tube surface treatment device of the invention 5, the second vacuum pump portion adjusts the differential pressure inside and outside the tube according to the magnitude of the deformation strength of the tube to prevent the tube from being crushed. Only the inner peripheral surface in the tube can be surface-modified.

Further, according to the tube surface treatment device of the invention 6, the support tower can be replaced by removing the lid from the chamber body, lowering the support tower from the opening of the chamber body into the chamber body, and pulling it up. Can be replaced.

On the other hand, according to the plasma processing apparatus of the invention 7, it is possible to suppress deformation of the object to be processed and process one of the inner and outer surfaces of the object to be processed.

It is an external perspective view of the surface treatment apparatus 1 of a tube. It is a front view of the surface treatment apparatus 1 of a tube. It is a right side view of the surface treatment apparatus 1 of a tube. It is a top view of the surface treatment apparatus 1 of a tube. It is an external perspective view of the support tower 5. (A) is a top view of the support tower 5, (b) is a right side view of the support tower 5, and (c) is a front view of the support tower 5. It is an exploded perspective view of the support tower 200. It is sectional drawing which follows the AA line of FIG.

[First Embodiment]
Hereinafter, the first embodiment of the present invention will be described. 1 to 6 are diagrams showing the present embodiment.

First, the configuration of this embodiment will be described.
FIG. 1 is an external perspective view of a tube surface treatment device 1. FIG. 2 is a front view of the tube surface treatment device 1. FIG. 3 is a right side view of the tube surface treatment device 1.

In FIG. 1, the tube surface treatment device 1 is spirally wound around a vacuum chamber 2 formed in a vertically long tubular shape, a support tower 5 removably installed in the vacuum chamber 2, and a support tower 5. A first vacuum pump unit 8 that exhausts gas in a long tube 7 that can be elastically deformed to be rotated, a second vacuum pump unit 9 that exhausts gas in a vacuum chamber 2, and a second vacuum pump unit attached to a support tower 5. It has a power supply unit 12 that applies, for example, a DC pulse voltage to one electrode 10 and a second electrode 11.

Next, the configuration of the vacuum chamber 2 will be described.
In the vacuum chamber 2, the opening 22 formed at the upper end of the vertically elongated cylindrical chamber body 21 having the bottom 20 is closed by the disk-shaped lid 23. A first exhaust port 24 and a second exhaust port 25 that communicate inside and outside the chamber body 21 are attached to the side surface of the chamber body 21. The first exhaust port 24 and the second exhaust port 25 are connected to the first vacuum pump unit 4 via a connection pipe (not shown).

A bottomed circular bottom hole 26 is formed in the central portion of the bottom 20. A hollow mounting base 27 for mounting the support tower 5 to the bottom portion 20 is fitted in the bottom hole portion 26. In the mounting base 27, a cylindrical first engaging portion 28 and a disk-shaped base main body portion 29 having a larger outer diameter than the first engaging portion 28 are integrally formed on the same axis, and the base main body is formed. The portion 29 fits into the bottom hole portion 26. The upper surface 30 of the base body 29 coincides with the surface of the bottom 20.

In the bottom hole portion 26, four mounting pins 31a to 31d are spent upward at regular intervals in the circumferential direction. Engagement holes 32a to 32d are formed in the base body 29 corresponding to the mounting pins 31a to 31d. The mounting base 27 is fixed to the bottom 20 by inserting the engaging holes 32a to 32d of the base main body 29 into the mounting pins 31a to 31d and adhering them with an adhesive or the like. In the first engaging portion 28, the upper surface of the front portion 33 is formed lower in the vertical direction than the upper surface of the rear portion 34 with the diameter line interposed therebetween, and a step in the vertical direction is formed between the upper surface of the front portion 33 and the upper surface of the rear portion 34. 35 is formed.

The outer peripheral portion of the inner surface of the lid 23 is in close contact with the entire peripheral surface of the upper end surface of the opening 22. A third exhaust port 36 that communicates inside and outside the chamber body 21 and a pressure gauge 37 that measures the air pressure inside the chamber body 21 are attached to the lid body 23. The third exhaust port 36 is connected to the second vacuum pump unit 9 via a connection pipe (not shown). When the second vacuum pump unit 9 is driven to reduce the air pressure in the vacuum chamber 2, the lid 23 comes into close contact with the opening of the chamber body 21 due to the differential pressure.

Next, the configuration of the support tower 5 will be described.
FIG. 4 is a top view of the tube surface treatment device 1. FIG. 5 is an external perspective view of the support tower 5. 6A is a top view of the support tower 5, FIG. 6B is a right side view of the support tower 5, and FIG. 6C is a front view of the support tower 5.

The support tower 5 has a cylindrical tower main body 50 and a second engaging portion 51 formed in a cylindrical shape into which the lower end portion of the tower main body 50 is inserted. In the tower main body 50, four concave grooves 52 to the fourth concave groove 55 are formed at equal intervals (90 degrees) on the outer peripheral surface along the axial direction. The A electrode body 10A and the B electrode body 10B of the first electrode 10 are mounted on the first concave groove 52 and the third concave groove 54 facing each other. The first electrode 10 is formed by bending a narrow conductive member into a plane U-shape, and the A electrode body 10A and the B electrode body 10B forming the first electrode body face each other on both sides of the connecting body 100 in the central portion. Be placed. The second electrode 11 is configured in the same manner as the first electrode 10, and the C electrode body 11C and the D electrode body 11D forming the second electrode body are arranged to face each other on both sides of the connecting body 110 in the central portion. Then, the C electrode body 11C and the D electrode body 11D are mounted on the second concave groove 53 and the fourth concave groove 55 facing each other. That is, the second electrode body is arranged between the first electrode bodies.

The lower end of the tower body 50 is tightly fitted into the inner diameter hole 56 of the second engaging portion 51. On the inner surface of the inner diameter hole 56, the first engaging piece 57 to the fourth engaging piece 60 are formed inward corresponding to the concave portions of the first concave groove 52 to the fourth concave groove 55. The positions where the first engaging piece 57 to the fourth engaging piece 60 reach the outer surfaces of the A electrode 10A, the B electrode 10B, the C electrode 11C, and the D electrode 11D mounted on the first concave groove 52 to the fourth concave groove 55. Extends to.

The second engaging portion 51 is formed so that the lower surface of the rear portion 61 is located above the lower surface of the front portion 62 with the diameter line interposed therebetween, and is formed in the vertical direction between the lower surface of the front portion 62 and the lower surface of the rear portion 61. A step 63 is formed on the surface. The outer diameters of the second engaging portion 51 and the first engaging portion 28 are formed to be the same, so that the second engaging portion 51 is in contact with the first engaging portion 28 so that the step 35 and the step 63 are in contact with each other. When stacked, they engage non-rotatably around the axis.

The lower end of the tower body 50 is cut out so as to coincide with the step 63 of the second engaging portion 51, and the lower end of the rear portion 64 of the tower main body 50 reaches the lower surface of the rear portion 61 of the second engaging portion 51. The lower end of the front portion 65 of the tower body 50 reaches the lower surface of the front portion 62 of the second engaging portion 51.

As shown in FIG. 6, in the first electrode 10 and the second electrode 11, the connecting body 100 and the connecting body 110 are arranged so as to be orthogonal to each other on the lower side of the tower main body 50, and the A electrode body 10A is placed in the first concave groove. 52, the B electrode body 10B is inserted into the third concave groove 54, the C electrode body 11C is inserted into the second concave groove 53, and the D electrode body 11D is inserted into the fourth concave groove 55. The second electrode 11 arranges the connecting body 110 at the lower end of the rear portion 64 of the tower main body 50, and the first electrode 10 arranges the connecting body 100 at the lower end of the front portion 65 of the tower main body 50. Therefore, the connecting body 100 of the first electrode 10 is located below the connecting body 110 of the second electrode 11, and is not short-circuited. Since the second concave groove 53 to which the C electrode body 11C of the second electrode 11 is mounted is provided in the front portion 65 of the tower main body 50, the tower main body 50 in which the fourth concave groove 55 is provided is provided. It is notched to the same level as the lower end of the rear 64.

A high-pressure pulse side feeding pin (not shown) and a ground side feeding pin (not shown) are inserted into the A electrode body 10A, the B electrode body 10B, the C electrode body 11C, and the D electrode body 11D through the tower body 50. Pin insertion holes 66 are formed at lower positions, respectively. In the A electrode body 10A, the B electrode body 10B, the C electrode body 11C, and the D electrode body 11D, screws (not shown) are attached to the tower body 50 through a plurality of screw holes (not shown) provided above the feeding pin insertion holes 66. It is screwed in and the first electrode plate 10 and the second electrode plate 11 are fixed to the tower body 50.

The high-voltage pulse-side feeding pin and the ground-side feeding pin are connected to, for example, a high-voltage pulse connection terminal (not shown) attached to the chamber body 21 and a ground connection terminal (not shown) via a feeding line (not shown). The power supply unit 12 is connected to the high voltage pulse connection terminal and the ground connection terminal via a connection line (not shown).

A spiral guide groove 67 is formed on the outer peripheral surface of the tower body 50 along the vertical direction. A tube 7 having soft elasticity is fitted and wound in the guide groove 67. Examples of the tube 7 include, but are not limited to, medical tubes for blood transfusion, infusion, and the like. One end opening 7a located on the lower end side of the tube 7 wound around the outer periphery of the tower body 50 and the other end opening 7b located on the upper end side are not shown in the first exhaust port 24 and the second exhaust port 25, respectively. It is connected via a connection pipe. It is also possible to close the other end opening 7b of the tube 7 and exhaust only from the one end opening 7a. At that time, the second exhaust port 25 is closed.

Next, the surface treatment operation of the tube 7 will be described.
In the present embodiment, when the inner peripheral surface of the tube 7 is surface-modified, the tube 7 is fitted into the guide groove 67 in the support tower 5 and held in advance. Further, the high voltage pulse side feeding pin and the ground side feeding pin are inserted into the feeding pin insertion holes 66 of the first electrode plate 10 and the second electrode plate 11, respectively. Further, a connection pipe (not shown) is connected to the one end opening 7a of the tube 7 to connect to the first vacuum pump unit 8. The other end opening 7b of the tube 7 is closed in advance.

Then, the lid 23 of the vacuum chamber 2 is removed to open the opening 22 of the chamber main body 21, and the support tower 5 in which the tube 7 is wound and held is inserted from the opening 22 toward the bottom 20 in the chamber main body 21. By engaging the second engaging portion 51 of the support tower 5 with the first engaging portion 28 of the mounting base 27, the support tower 5 is non-rotatably attached to the bottom 20 of the vacuum chamber 2. After the installation of the support tower 5 is completed, the lid 23 is placed on the upper end of the chamber main body 21 and the opening 22 is closed.

After that, the first vacuum pump unit 8 and the second vacuum pump unit 9 are driven to control the air pressure (P1) on the inner surface side of the tube 7 to be processed and the non-processed surface side of the processing object. The air pressure inside the tube 7 (P1) is made lower than the air pressure (P2) in the vacuum chamber 2 so that a differential pressure (P1 <P2) is generated in the air pressure (P2) in the vacuum chamber 2. The atmospheric pressure (P2) in the vacuum chamber 2 is set to an atmospheric pressure at which plasma is not generated on the outer surface side of the tube 7.

The A electrode body 10A and the B electrode body 10B of the first electrode 10 are arranged to face each other on the outer peripheral surface of the tower body 50, and the C electrode body 11C and the D electrode of the second electrode 11 are displaced by 90 degrees in the circumferential direction. Body 11D is placed.

That is, the A electrode body 10A, the B electrode body 10B, the C electrode body 11C, and the D electrode body 11D are arranged in this order in the circumferential direction of the tower body 50. A high-voltage pulse voltage having a positive polarity is applied to the first electrode 10 from the power supply unit 12, and a ground voltage having a negative polarity is applied to the second electrode 11. That is, positive-polarity electrode bodies (10A, 10B) and negative-polarity electrode bodies (11C, 11D) are alternately arranged on the outer periphery of the tower body 50. Therefore, when a predetermined voltage is applied to the first electrode 10 and the second electrode 11 while the inside of the tube 7 is depressurized to a predetermined atmospheric pressure value, plasma is generated in the tube 7 between the adjacent electrode bodies, and the tube 7 The inner peripheral surface can be modified by plasma irradiation to improve hydrophilicity and the like.

In the present embodiment, a differential pressure state is generated by lowering the air pressure inside the tube 7 which is the surface to be processed of the tube 7 to be processed in the vacuum chamber 2 to be lower than the air pressure outside the non-processed surface. is doing. The differential pressure generated on the surface to be processed and the surface to be non-processed is set within a range in which the object to be processed is not crushed by the differential pressure. The atmospheric pressure on the non-processed surface side is set in a range not lower than the atmospheric pressure (threshold value) at which plasma is generated, that is, higher than the atmospheric pressure at which plasma is not generated. The threshold value is a value corresponding to the power supply voltage of the plasma. Further, the tolerance of the differential pressure varies depending on the strength of the object to be treated, but for example, in a PET bottle and a test tube, the differential pressure is smaller in the PET bottle.

Therefore, the pressure can be reduced only on the inside of the tube 7 which has high deformation strength and is hard to be crushed. On the other hand, for the tube 7 which has low deformation strength and is easily crushed, the pressure is reduced both inside and outside the tube 7. For example, the air pressure inside the tube 7 (P1) is set to 200 Pa, and the air pressure outside the tube 7 (P2) is set to 2000 Pa, so that plasma is generated only inside the tube 7 and plasma is not generated outside the tube 7. The air pressure on the outside, that is, inside the vacuum chamber 2, is set slightly higher than the air pressure inside the tube 7. By checking the atmospheric pressure in the vacuum chamber 2 with the pressure gauge 37, it is possible to maintain the atmospheric pressure in which plasma is not generated in the vacuum chamber 2.

Next, the effect of this embodiment will be described.
According to the present embodiment, since the tube 7 is spirally wound around the tower body 52, the inner surface of the tube 7 is surface-modified by plasma irradiation in a small space even if the tube 7 is long. be able to.

Further, since the guide groove 67 is spirally provided on the outer peripheral surface of the tower body 50 to fit and hold the tube 7, it is easy to attach the tube 7 to the tower body 50. Therefore, the tube 7 having a predetermined length is provided. Can be processed in a large number in a short time.

Further, the second vacuum pump unit 9 adjusts the differential pressure inside and outside the tube 7 according to the magnitude of the deformation strength of the tube to prevent the tube from being crushed and to surface only on the inner peripheral surface inside the tube 7. It can be reformed.

Further, electrode plates (A electrode body, B electrode body, C electrode body, D electrode body) 10 and 11 of the positive electrode and the negative electrode are alternately arranged along the circumferential direction on the outer peripheral surface of the tower body 50 around which the tube 7 is wound. By arranging them, plasma is generated between the adjacent A electrode body 10A, B electrode body 10B, C electrode body 11C, and D electrode body 11D. Therefore, the arrangement of the electrode plates 10 and 11 of the positive electrode and the negative electrode can be arranged in the tower main body 50, the degree of freedom in the arrangement of the electrode plates (electrode body) is increased, and the device can be made compact.

Further, to replace the support tower 5, the support tower 5 is attached to the mounting base 27 by a simple operation of removing the lid 23 from the chamber main body 21 and lowering the support tower 5 into the chamber main body 21 from the opening 22 of the chamber main body 21. It can be attached, and conversely, the support tower 5 to which the treated tube 7 is attached can be easily taken out by simply pulling it up.

Further, if a plurality of support towers 5 to which the tubes 7 are attached are prepared in advance, the replacement time from the end of the processing to the next processing can be shortened, and the processing efficiency can be improved.

[Second Embodiment]
Next, a second embodiment of the present invention will be described. 7 and 8 are diagrams showing the present embodiment.

FIG. 7 is an exploded perspective view of the support tower 200. FIG. 8 is a cross-sectional view taken along the line AA of FIG. The same members as those shown in the first embodiment are designated by the same reference numerals, and the description thereof will be omitted.

First, the configuration of the support tower 200 will be described.
In FIGS. 7 and 8, the support tower 200 of the second embodiment is the same as the second engaging portion 51 provided in the support tower 5 of the first embodiment at the lower end portion of the tower main body 201 formed in a cylindrical shape. A third engaging portion (not shown) of the structure is provided. The support tower 200 engages with the first engaging portion 28 provided on the mounting base portion 27 of the vacuum chamber 2 shown in FIG. 1, and is detachably attached to the bottom portion of the vacuum chamber 2.

The first electrode plate 10 and the second electrode plate 11 shown in the first embodiment are attached to the tower body 201 of the support tower 200. The first concave groove 202 to the fourth concave groove 205 are formed on the outer peripheral surface of the tower main body 201 at equal angular intervals, and the A electrode body 10A of the first electrode plate 10 is the first concave groove 202 and the B electrode body 10B is the third. The C electrode body 11C of the concave groove 204 and the second electrode plate 11 is attached so as to be inserted into the second concave groove 203 and the D electrode body 11D into the fourth concave groove 205.

In the present embodiment, the first electrode plate 10 to which the high voltage pulse is applied is mounted from the lower side of the tower body 201, and the second electrode plate 11 to which the ground side voltage is applied is mounted from the upper side of the tower body 201. .. Since both the upper and lower end faces of the tower body 201 are formed on a flat surface, when the first electrode plate 10 and the second electrode plate 11 are mounted from the upper end or the lower end side of the tower body 201, the first electrode 10 is connected. The connection body 110 between the body 100 and the second electrode 11 is short-circuited. However, in the present embodiment, since the first electrode plate 10 and the second electrode plate 11 are separately arranged on the upper end side and the lower end side of the tower main body 201, there is no short circuit.

The tube 7 is spirally wound around the outer peripheral surface of the tower body 201. Both ends of the tube 7 spirally wound around the outer peripheral surface of the tower body 201 were removably held by the first tube end presser body 206 and the second tube end presser body 207, which are tube fixing means. In this state, it is pressed against the outer peripheral surface of the tower body 201 and stopped immovably.

The first tube end presser body 206 and the second tube end presser body 207 are formed in the same structure, the configuration of the first tube end presser body 206 will be described, and the configuration of the second tube end presser body 207 will be described. , The same member is designated by the same reference numeral, and the description thereof will be omitted. In the first tube end holding body 206, a semicircular fitting groove 210 into which the tube 7 is fitted is formed on one end side of one side surface 209 of the rectangular parallelepiped main body portion 208, and a difference is formed at the other end of one side surface 209. The protrusion 211 projects forward.

The tower main body is in a state where one end of the tube 7 is fitted into the fitting groove 210 of the first tube holding body 206 and the other end of the tube 7 is fitted into the fitting groove 210 of the second tube holding body 207. The tube 7 is spirally wound around the outer peripheral surface of 201. At that time, the insertion protrusion 211 of the first tube end holding body 206 on the winding start end side is detachably inserted and fixed into the insertion hole 212 formed in the lower part of the outer peripheral surface of the tower body 201, for example. When the tube 7 was spirally wound around the outer peripheral surface of the tower body 201, the insertion protrusion 211 of the second tube holding body 207 provided at the other end of the tube 7 was formed on the outer peripheral surface of the tower body 201. It is fixed by inserting it into another insertion hole 212.

The tube 7 spirally wound around the outer peripheral surface of the tower main body 201 has a tower having one end located below and the other end located above via the first tube presser body 206 and the second tube presser body 207. Since it is fixed to the outer peripheral surface of the main body 201, the tube 7 is held in a state of being spirally wound around the outer peripheral surface of the tower main body 201.

Next, the effect of this embodiment will be described.
In the present embodiment, the tube 7 can be held in a spirally wound state with respect to the tower main body 201 by changing the winding pitch according to the length of the tube 7. If the tube 7 is long, the winding pitch is reduced, and if the tube 7 is short, the winding pitch is increased. By providing a plurality of insertion holes 212 into which the insertion protrusions 211 are inserted on the outer peripheral surface of the tower body 201 in the circumferential direction and the vertical direction, the tube 7 can be inserted into the tower body at the same pitch regardless of the length of the tube 7. It can be attached to the outer peripheral surface of 201.

According to the present embodiment, the tubes 7 having different lengths can be spirally wound and held around the tower body 201. Therefore, it is not necessary to prepare the tower main body 201 for each length of the tube 7.

[Modification example]
In the first and second embodiments, the first electrode 10 having a flat U-shape and the second electrode 11 tower main body 50 are arranged so as to be orthogonal to each other, and two electrode bodies, one for the positive electrode and the other for the negative electrode, are used. 10A, 10B, 11A, 11B) are arranged alternately, but three or more electrode bodies for each of the positive electrode and the negative electrode may be arranged alternately.

Further, in the first and second embodiments and modifications thereof, the support towers 5 and 200 are formed in a cylindrical shape, but may be in a cylindrical shape, or may be in a cylindrical shape or a prismatic shape.

Further, in the first and second embodiments and modifications thereof, the first engaging portion 28 and the second engaging portion 51 are provided as mounting means for mounting the support towers 5 and 200 to the bottom portion 20 of the vacuum chamber 2. Although it is engaged and made non-rotatable around the axis in the vertical direction, the present invention is not limited to this configuration, and any configuration may be used as long as the support towers 5 and 200 can be detachably attached to the bottom portion 20.

Further, in the first and second embodiments and modifications thereof, a coiled tube may be attached to the tower body 200.

1 ... tube surface treatment device, 2 ... vacuum chamber, 5 ... support tower, 7 ... tube, 7a ... one end opening, 7b ... other end opening, 8 ... first vacuum pump section, 9 ... second vacuum pump section, 10 ... 1st electrode, 11 ... 2nd electrode, 10A ... A electrode body, 10B ... B electrode body, 100 ... connection body, 110 ... connection body, 11C ... C electrode body, 11D ... D electrode body, 12 ... power supply unit, 20 ... bottom, 21 ... chamber body, 22 ... opening, 23 ... lid, 24 ... first exhaust port, 25 ... second exhaust port, 26 ... bottom hole, 27 ... mounting base, 28 ... first engaging part , 29 ... stand body, 30 ... top surface, 31a-31d ... mounting pin, 32a-32d ... engagement hole, 33 ... front, 34 ... rear, 35 ... step, 36 ... third exhaust port, 37 ... pressure gauge , 50 ... Tower body, 51 ... 2nd engaging part, 52-55 ... 1st concave groove to 4th concave groove, 56 ... Inner diameter hole, 57-60 ... 1st engaging piece to 4th engaging piece, 61 ... rear, 62 ... front, 63 ... step, 64 ... rear, 65 ... front, 66 ... power supply pin insertion hole, 67 ... guide groove, 200 ... support tower, 201 ... tower body, 202-205 ... first Recessed groove to 4th concave groove, 206 ... 1st tube end presser body, 207 ... 2nd tube end presser body, 208 ... Main body part, 209 ... One side surface, 210 ... Fitting groove, 211 ... Insertion protrusion , 212 ... Insert hole, 213 ... High pressure pulse side feeding pin, 214 ... Ground side feeding pin

Claims (6)

A tube surface treatment device that surface-treats the inner surface of an elastically deformable or coiled tube by plasma irradiation.
With a vacuum chamber,
A support tower arranged in the vacuum chamber and attached by spirally winding the elastically deformable tube around the outer periphery of the tower body, or to which the coiled tube is attached.
A plurality of first electrode bodies arranged along the axial direction on the outer periphery of the tower body, and
A plurality of second electrode bodies arranged along the axial direction on the outer periphery of the tower body, and
A power supply unit that applies a predetermined voltage to the first electrode body and the second electrode body,
A first vacuum pump unit connected to a tube attached to the tower body to exhaust gas in the tube and reduce the pressure to the pressure at which plasma is generated in the tube.
Have,
The plurality of first electrode bodies and the plurality of second electrode bodies are alternately arranged along the circumferential direction on the outer periphery of the tower body.
The tube surface treatment device is characterized in that the tube is attached from the outside of the plurality of first electrode bodies and the plurality of second electrode bodies . In claim 1,
A tube surface treatment device, wherein both ends of the tube are removably fixed to the outer peripheral surface of the tower body by tube fixing means attached to both ends of the tube. In claim 1,
A tube surface treatment device characterized in that a fitting groove into which the tube is fitted is spirally formed on the outer peripheral surface of the tower body. In any one of claims 1 to 3,
The support tower is a tube surface treatment device, characterized in that it is detachably mounted in the vacuum chamber. In any one of claims 1 to 4,
The gas in the vacuum chamber is exhausted to a pressure higher than the air pressure in the tube so that plasma is not generated in the vacuum chamber, and the differential pressure generated between the pressure and the air pressure in the tube can be adjusted. A tube surface treatment device comprising a second vacuum pump section. In any one of claims 1 to 5,
The vacuum chamber has a chamber body formed in a vertically long bottomed tubular shape and a lid body that closes the upper end opening of the chamber body, and the support tower can be taken out through the upper end opening. A featured tube surface treatment device .

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