JP2019077104A - Tube surface treatment apparatus and plasma treatment apparatus - Google Patents

Abstract

To provide a tube surface treatment apparatus suitable for surface modification of an inner surface of a space-saving, elastically deformable or coil formed tube by plasma irradiation.SOLUTION: A tube surface treatment apparatus 1 has a vacuum chamber 2, a support tower 5 disposed in the vacuum chamber 2 and having an elastically deformable tube 7 helically wound and attached to an outer periphery of a tower main body 50 or a coiled tube attached, a plurality of first electrode body disposed along a circumferential direction on an outer periphery of the tower main body 50, a plurality of second electrode body disposed between the first electrode body along a circumferential direction on an outer periphery of the tower main body 50, a power supply unit 12 for applying a predetermined voltage to the first electrode body and the second electrode body, and a first vacuum pump unit 8 connected to the tube 7 attached to the tower main body 50 to evacuate a gas in the tube 7 and reduce a pressure to a pressure at which plasma is generated in the tube 7.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a tube surface treatment apparatus for surface modification of an elastically deformable or coiled tube by plasma irradiation, and in particular, the inner surface of the elastically deformable or coiled tube can be surface-modified by plasma irradiation. TECHNICAL FIELD The present invention relates to a tube surface treatment apparatus and a plasma treatment apparatus suitable for quality control.

  As a surface treatment method for improving the hydrophilicity of the inner wall surface of a test tube or a pipette by plasma irradiation, for example, the inside of the test tube whose open end is closed is maintained in a vacuum state, and an electrode placed at both ends of the test tube It has been proposed to apply a DC pulse voltage for a predetermined time (Patent Document 1).

Patent No. 5785650

  In the case where the inner surface of an elastically deformable long tube is surface-treated by the surface treatment method disclosed in Patent Document 1, the long tube must be extended straight, which is unrealistic in terms of securing a space, etc. The

  Further, when the inner surface of the coiled tube is surface-modified by plasma irradiation, it is difficult to generate plasma with the electrode arrangement of Patent Document 1.

  Therefore, the present invention has been made focusing on the unsolved problems of such conventional techniques, and it is possible to space-reform the inner surface of an elastically deformable or coiled tube by plasma irradiation. It is an object of the present invention to provide a suitable tube surface treatment apparatus and plasma treatment apparatus.

  [Invention 1] In order to achieve the above object, the tube surface treatment apparatus of Invention 1 is a tube surface treatment apparatus for treating the inner surface of an elastically deformable or coiled tube by plasma irradiation, which is a vacuum chamber And a support tower disposed in the vacuum chamber, the elastically deformable tube being helically wound and attached to the outer periphery of the tower body, or the outer periphery of the tower body to which the coiled tube is attached A plurality of first electrode bodies disposed along the circumferential direction, a plurality of second electrode bodies disposed between the first electrode bodies along the circumferential direction on the outer periphery of the tower main body, and the first A power supply for applying a predetermined voltage to the electrode body and the second electrode body, and a tube attached to the tower main body exhaust the gas in the tube and generate plasma in the tube It has a first vacuum pump unit for depressurizing the pressure, the.

  Here, a vacuum means the state in the space filled with the gas of pressure lower than atmospheric pressure. Hereinafter, the same applies in the present specification.

  [Invention 2] Further, in the tube surface treatment apparatus of the invention 2, in the tube surface treatment apparatus of the invention 1, both ends of the tube are outer peripheries of the tower main body by tube stoppers attached to both ends of the tube. Releasably secured to the surface.

  [Invention 3] Further, in the tube surface treatment apparatus of the invention 3, in the tube surface treatment apparatus of the invention 1, the fitting groove in which the tube is fitted is formed in a spiral on the outer peripheral surface of the tower main body.

  [Invention 4] Furthermore, in the tube surface treatment apparatus of the invention 4 according to any one of the inventions 1 to 3, the support tower is removably attached to the inside of the vacuum chamber.

  [Invention 5] Furthermore, in the tube surface treatment apparatus according to the fifth invention, in the tube surface treatment apparatus according to any one of the first to fourth inventions, the gas in the vacuum chamber is exhausted to make the pressure higher than the pressure in the tube. The second vacuum pump unit has a second vacuum pump portion that is highly reduced to a pressure at which no plasma is generated in the vacuum chamber, and a differential pressure generated between the pressure in the tube and the pressure in the tube can be adjusted.

  [Invention 6] The tube surface treatment apparatus according to the invention 6 is the tube surface treatment apparatus according to any one of the inventions 1 to 5, wherein the vacuum chamber is a chamber body formed in a cylindrical shape with a vertical bottom. And a lid closing an upper end opening of the chamber body, and the support tower can be taken out through the upper end opening.

  [Invention 7] On the other hand, in order to achieve the above object, the plasma processing apparatus of Invention 7 is a plasma processing apparatus for processing one of the inner surface and the outer surface of the object to be treated by plasma irradiation. With the inner surface of the object to be treated in one of the two adjustable spaces and the outer surface of the object to be treated in the other space, the differential pressure between the two spaces is a predetermined condition. Thus, the pressure in the one space and the pressure in the other space are reduced, and the pressure in the one space is made lower than the pressure in the other space.

  As described above, according to the tube surface treatment apparatus of the invention 1, the apparatus can be disposed in a state of being wound around the outer periphery of the tower body regardless of the length of the elastically deformable tube or even a coiled tube. Save space. In addition, since the first electrode body and the second electrode body can be alternately arranged along the circumferential direction on the outer periphery of the tower body without opposingly arranging the first electrode body and the second electrode body across the tube, the first electrode body and The degree of freedom in the arrangement of the second electrode body is increased, and the device can be made compact.

  Furthermore, according to the tube surface treatment apparatus of the invention 2, the tube can be appropriately attached to the outer peripheral surface of the tower body in accordance with the length and length of the tube.

  Furthermore, according to the tube surface treatment apparatus of the third aspect of the present invention, since tubes of the same length can be easily attached, a large number of tubes of the same length can be processed efficiently.

  Furthermore, according to the tube surface treatment apparatus of the invention 4, if a support tower on which a tube is attached is prepared in advance, the exchange time of the support tower from the end of the treatment to the next treatment can be shortened, and the treatment efficiency Can be up.

  Furthermore, according to the tube surface treatment apparatus of the fifth aspect, crushing of the tube is prevented by adjusting the differential pressure inside and outside the tube according to the magnitude of the deformation strength of the tube by the second vacuum pump unit. Surface modification treatment can be performed only on the inner circumferential surface in the tube.

  Furthermore, according to the tube surface treatment apparatus of the sixth aspect, the support tower is replaced by removing the lid from the chamber body, and lowering the support tower from the opening of the chamber body into the chamber body and lifting the support tower with a simple operation. Exchange operations can be performed.

  On the other hand, according to the plasma processing apparatus of the seventh aspect, it is possible to suppress the deformation of the object to be treated and process one of the inner surface and the outer surface of the object to be treated.

It is an external appearance perspective view of the surface treatment apparatus 1 of a tube. It is a front view of the surface treatment apparatus 1 of a tube. It is a right side view of surface treatment apparatus 1 of a tube. It is a top view of the surface treatment apparatus 1 of a tube. FIG. 2 is an external perspective view of a support tower 5; (A) is a top view of the support tower 5, (b) is a right side view of the support tower 5, (c) is a front view of the support tower 5. FIG. 7 is an exploded perspective view of a support tower 200. It is sectional drawing along the AA of FIG.

First Embodiment
Hereinafter, a first embodiment of the present invention will be described. 1 to 6 show the present embodiment.

First, the configuration of the present embodiment will be described.
FIG. 1 is an external perspective view of a tube surface treatment apparatus 1. FIG. 2 is a front view of the tube surface treatment apparatus 1. FIG. 3 is a right side view of the tube surface treatment apparatus 1.

  In FIG. 1, the tube surface treatment apparatus 1 is spirally wound around a vacuum chamber 2 formed in a vertically long cylindrical shape, a support tower 5 installed in the vacuum chamber 2 so as to be removable, and the support tower 5. The first vacuum pump unit 8 for evacuating the gas in the elastically deformable elongated tube 7, the second vacuum pump unit 9 for evacuating the gas in the vacuum chamber 2, and the support tower 5 For example, the power supply unit 12 applies a pulse voltage of direct current to the first electrode 10 and the second electrode 11.

Next, the configuration of the vacuum chamber 2 will be described.
In the vacuum chamber 2, an opening 22 formed at the upper end of a vertically long cylindrical chamber main body 21 having a bottom portion 20 is closed by a disk-shaped lid 23. A first exhaust port 24 and a second exhaust port 25 communicating the inside and the outside of the chamber body 21 are attached to the side surface of the chamber body 21. The first exhaust port 24 and the second exhaust port 25 are connected to the first vacuum pump unit 4 via a connection pipe (not shown).

  A bottomed circular bottom hole 26 is formed in the central portion of the bottom 20. The bottom hole 26 is fitted with a hollow mount 27 for attaching the support tower 5 to the bottom 20. The mounting base 27 is integrally formed with a cylindrical first engaging portion 28 and a disk-shaped base body portion 29 having an outer diameter larger than that of the first engaging portion 28 on the same axial center. The part 29 fits into the bottom hole 26. The top surface 30 of the base body 29 is flush with the surface of the bottom 20.

  In the bottom hole portion 26, four mounting pins 31a to 31d are expended upward at constant angular intervals in the circumferential direction. In the stand main body portion 29, engagement holes 32a to 32d are formed corresponding to the attachment pins 31a to 31d. The mounting base 27 is fixed to the bottom portion 20 by inserting the engaging holes 32 a to 32 d of the base body portion 29 into the mounting pins 31 a to 31 d and adhering them with an adhesive or the like. The first engaging portion 28 is formed such that the upper surface of the front portion 33 is lower in the vertical direction than the upper surface of the rear portion 34 across the diameter line, and the step in the vertical direction between the upper surface of the front portion 33 and the upper surface of the rear portion 34 35 are formed.

  The outer peripheral portion of the inner surface of the lid 23 is in close contact with the entire peripheral surface of the upper end surface of the opening 22. The lid 23 is provided with a third exhaust port 36 communicating the inside and the outside of the chamber body 21 and a pressure gauge 37 for measuring the air pressure inside the chamber body 21. The third exhaust port 36 is connected to the second vacuum pump unit 9 via a connection pipe (not shown). When the second vacuum pump unit 9 is driven to reduce the pressure in the vacuum chamber 2, the lid 23 is in close contact with the opening of the chamber body 21 by the differential pressure.

Next, the configuration of the support tower 5 will be described.
FIG. 4 is a top view of the tube surface treatment apparatus 1. FIG. 5 is an external perspective view of the support tower 5. 6A is a top view of the support tower 5, FIG. 6B is a right side view of the support tower 5, and FIG. 6C is a front view of the support tower 5.

  The support tower 5 has a cylindrical tower body 50 and a second engaging portion 51 formed in a cylindrical shape into which the lower end portion of the tower body 50 is inserted. In the column main body 50, four concave grooves of a first concave groove 52 to a fourth concave groove 55 are formed at equal intervals (90 degrees) along the axial direction on the outer peripheral surface. The A electrode body 10A and the B electrode body 10B of the first electrode 10 are attached to the first groove 52 and the third groove 54 opposed to each other. The first electrode 10 is formed by bending a narrow conductive member into a flat U-shape, and the A electrode body 10A and the B electrode body 10B forming the first electrode body face each other on both sides of the connection body 100 in the central portion. Be placed. The second electrode 11 is configured in the same manner as the first electrode 10, and a C electrode body 11C and a D electrode body 11D forming a second electrode body are disposed opposite to each other on both sides of the connection body 110 in the central portion. Then, the C electrode body 11C and the D electrode body 11D are attached to the facing second concave groove 53 and the fourth concave groove 55, respectively. That is, the second electrode body is disposed between the first electrode bodies.

  The lower end portion of the tower body 50 is closely fitted in the inner diameter hole 56 of the second engaging portion 51. The first engagement piece 57 to the fourth engagement piece 60 are formed inward on the inner surface of the inner diameter hole 56 in correspondence with the concave portions of the first concave groove 52 to the fourth concave groove 55. Positions where the first engagement piece 57 to the fourth engagement piece 60 reach the outer surfaces of the A electrode 10A, the B electrode 10B, the C electrode 11C, and the D electrode 11D attached to the first recessed groove 52 to the fourth recessed groove 55 It extends to

  The second engaging portion 51 is formed such that the lower surface of the rear portion 61 is positioned above the lower surface of the front portion 62 with the diameter line interposed therebetween, and the vertical direction between the lower surface of the front portion 62 and the lower surface of the rear portion 61 A step 63 is formed on the The second engaging portion 51 and the first engaging portion 28 are formed to have the same outer diameter so that the second engaging portion 51 is in contact with the step 35 and the step 63 with respect to the first engaging portion 28. When stacked, they engage non-rotatably about the axis.

  The lower end portion of the tower main body 50 is cut out so as to coincide with the step 63 of the second engaging portion 51, and the lower end of the rear portion 64 of the tower main body 50 reaches the lower surface of the rear portion 61 of the second engaging portion 51, The lower end of the front portion 65 of the tower main body 50 reaches the lower surface of the front portion 62 of the second engaging portion 51.

  As shown in FIG. 6, in the first electrode 10 and the second electrode 11, the connection body 100 and the connection body 110 are disposed on the lower side of the tower main body 50 so as to be orthogonal to each other, and the A electrode body 10A is a first concave groove 52, the B electrode body 10B is inserted into the third recessed groove 54, the C electrode body 11C is inserted into the second recessed groove 53, and the D electrode body 11D is inserted into the fourth recessed groove 55. The second electrode 11 has the connector 110 disposed at the lower end of the rear portion 64 of the tower main body 50, and the first electrode 10 has the connector 100 disposed at the lower end of the front portion 65 of the tower main body 50. Therefore, the connection body 100 of the first electrode 10 is located below the connection body 110 of the second electrode 11 and does not short. The second recessed groove 53 to which the C electrode body 11C of the second electrode 11 is attached is provided in the front portion 65 of the tower main body 50, so that the fourth recessed groove 55 is provided in the tower main body 50. It is notched to the same level as the lower end of the rear 64.

  A feed through which the high voltage pulse side feed pin (not shown) and the ground side feed pin (not shown) are inserted into the A electrode body 10A, the B electrode body 10B, the C electrode body 11C and the D electrode body 11D. Pin insertion holes 66 are respectively formed at lower positions. Screws (not shown) pass through the screw holes (not shown) provided on the upper side of the feed pin insertion holes 66 in the tower main body 50 for the A electrode body 10A, B electrode body 10B, C electrode body 11C, and D electrode body 11D. The first electrode plate 10 and the second electrode plate 11 are fixed to the column main body 50 by screwing.

  The high-voltage pulse-side power supply pin and the ground-side power supply pin are connected to, for example, a high-voltage pulse connection terminal (not shown) attached to the chamber body 21 and a ground connection terminal (not shown). The power supply unit 12 is connected to the high voltage pulse connection terminal and the ground connection terminal via a connection line (not shown).

  A spiral guide groove 67 is formed on the outer peripheral surface of the tower body 50 along the vertical direction. A soft elastic tube 7 is fitted and wound around the guide groove 67. The tube 7 may be exemplified by a medical tube for blood transfusion, infusion, etc., but it is not limited thereto. The one end opening 7a located on the lower end side of the tube 7 wound and supported on the outer periphery of the tower main body 50 and the other end opening 7b located on the upper end side are not shown in the first exhaust port 24 and the second exhaust port 25 respectively. Connected via connection pipe. The other end opening 7b of the tube 7 may be closed, and the air may be exhausted only from the one end opening 7a. At this time, the second exhaust port 25 is closed.

Next, the surface treatment operation of the tube 7 will be described.
In the present embodiment, when the inner peripheral surface of the tube 7 is surface-modified, the tube 7 is fitted to the guide groove 67 in the support tower 5 and held in advance. Further, the high voltage pulse side feed pin and the ground side feed pin are inserted into the feed pin insertion holes 66 of the first electrode plate 10 and the second electrode plate 11, respectively. Further, a connection pipe (not shown) is connected to the one end opening 7 a of the tube 7, and the connection with the first vacuum pump unit 8 is performed. The other end opening 7b of the tube 7 is closed in advance.

  Then, the lid 23 of the vacuum chamber 2 is removed to open the opening 22 of the chamber body 21, and the support tower 5 on which the tube 7 is wound and held is inserted from the opening 22 toward the bottom 20 in the chamber body 21. The support tower 5 is non-rotatably attached to the bottom portion 20 of the vacuum chamber 2 by engaging the second engagement portion 51 of the support tower 5 with the first engagement portion 28 of the mounting base 27. After the attachment of the support tower 5 is completed, the lid 23 is placed on the upper end of the chamber body 21 and the opening 22 is closed.

  Thereafter, the first vacuum pump unit 8 and the second vacuum pump unit 9 are driven, and the pressure (P1) on the inner surface side which is the processing target surface of the tube 7 as the processing target and the non-processing target surface side of the processing target The pressure (P1) inside the tube 7 is made lower than the pressure (P2) in the vacuum chamber 2 so that a differential pressure (P1 <P2) is generated in the pressure (P2) in the vacuum chamber 2. The air pressure (P2) in the vacuum chamber 2 is set to an air pressure at which no plasma is generated on the outer surface side of the tube 7.

  The A electrode body 10A and the B electrode body 10B of the first electrode 10 are disposed opposite to each other on the outer peripheral surface of the column main body 50, and the C electrode body 11C and the D electrode of the second electrode 11 are shifted by 90 degrees in the circumferential direction. Body 11D is placed.

  That is, in the circumferential direction of the column main body 50, the A electrode body 10A, the B electrode body 10B, the C electrode body 11C, and the D electrode body 11D are arranged in this order. A high voltage pulse voltage of positive polarity is applied from the power supply unit 12 to the first electrode 10, and a ground voltage of negative polarity is applied to the second electrode 11. That is, positive polarity electrode bodies (10A, 10B) and negative polarity electrode bodies (11C, 11D) are alternately arranged on the outer periphery of the column main body 50. Therefore, when a predetermined voltage is applied to the first electrode 10 and the second electrode 11 in a state where the pressure in the tube 7 is reduced to a predetermined pressure value, plasma is generated in the tube 7 between the adjacent electrode bodies. The inner peripheral surface can be subjected to plasma modification to improve its hydrophilicity and the like.

  In the present embodiment, the pressure inside the tube 7 which is the processing target surface of the tube 7 which is the processing target in the vacuum chamber 2 is lower than the pressure inside the outside which is the non-processing target surface to generate a differential pressure state. doing. The differential pressure generated between the processing target surface and the non-processing target surface is set in a range in which the processing target is not crushed by the differential pressure. The atmospheric pressure on the non-processing target surface side is set in a range which is not lower than the atmospheric pressure (threshold) at which plasma is generated, that is, higher than the atmospheric pressure at which plasma is not generated. The threshold is a value corresponding to the power supply voltage of plasma. Moreover, although the tolerance of the said differential pressure changes with the intensity | strengths of a to-be-processed object, a plastic bottle and a test tube, for example, a smaller differential pressure in a plastic bottle.

  Therefore, only the inner side can be depressurized with respect to the tube 7 having high deformation strength, which is difficult to be crushed. On the other hand, for a crushable tube 7 having a low deformation strength, both the inside and the outside of the tube 7 are depressurized. For example, the air pressure (P1) in the tube 7 is set to 200 Pa, the air pressure (P2) outside the tube 7 to 2000 Pa, plasma is generated only in the tube 7, and plasma is not generated outside the tube 7. The pressure inside the vacuum chamber 2 is set to be slightly higher than the pressure inside the tube 7. By checking the pressure in the vacuum chamber 2 with the pressure gauge 37, the pressure at which no plasma is generated in the vacuum chamber 2 can be maintained.

Next, the effects of the present embodiment will be described.
According to the present embodiment, since the tube 7 is spirally wound around the column main body 52, the inner surface of the tube 7 is surface-modified by plasma irradiation in a small space even if the tube 7 is long. be able to.

  In addition, since the guide groove 67 is provided spirally on the outer peripheral surface of the tower main body 50 and the tube 7 is fitted and held, the tube 7 can be easily attached to the tower main body 50. Can be processed in large numbers in a short time.

  Further, by adjusting the differential pressure between the inside and the outside of the tube 7 according to the magnitude of the deformation strength of the tube by the second vacuum pump unit 9, crushing of the tube is prevented, and the surface only on the inner peripheral surface inside the tube 7 It can be reformed.

  Furthermore, the positive and negative electrode plates (A electrode body, B electrode body, C electrode body, D electrode body) 10 and 11 are alternately arranged along the circumferential direction on the outer peripheral surface of the column main body 50 on which the tube 7 is wound. By arranging, plasma is generated between the adjacent A electrode body 10A, B electrode body 10B, C electrode body 11C, and D electrode body 11D. For this reason, the arrangement of the electrode plates 10 and 11 of the positive electrode and the negative electrode can be arranged in the column main body 50, the degree of freedom in the arrangement of the electrode plates (electrode bodies) is increased, and the apparatus can be made compact.

  Further, the support tower 5 is removed from the chamber body 21 by the simple operation of removing the lid 23 from the chamber body 21 and lowering the support tower 5 into the chamber body 21 from the opening 22 of the chamber body 21. It is possible to easily take out the support tower 5 to which the treated tube 7 is attached, which can be attached or simply pulled up in reverse.

  Furthermore, if a plurality of supporting towers 5 to which the tubes 7 are attached are prepared in advance, the exchange time from the end of the process to the next process can be shortened, and the process efficiency can be improved.

Second Embodiment
Next, a second embodiment of the present invention will be described. 7 and 8 are diagrams showing this embodiment.

  FIG. 7 is an exploded perspective view of the support tower 200. FIG. FIG. 8 is a cross-sectional view taken along the line A-A of FIG. In addition, the same code | symbol is attached | subjected to the same member as the member shown in 1st Embodiment, and the description is abbreviate | omitted.

First, the configuration of the support tower 200 will be described.
In FIG. 7 and FIG. 8, the support tower 200 of the second embodiment is the same as the second engaging portion 51 provided in the support tower 5 of the first embodiment at the lower end portion of the tower body 201 formed in a cylindrical shape. A third engagement portion (not shown) of the structure is provided. The support tower 200 engages with the first engaging portion 28 provided on the mounting base 27 of the vacuum chamber 2 shown in FIG. 1 and is removably attached to the bottom of the vacuum chamber 2.

  The first electrode plate 10 and the second electrode plate 11 shown in the first embodiment are attached to the tower body 201 of the support tower 200. The first to fourth concave grooves 202 to 205 are formed at equal angular intervals on the outer peripheral surface of the tower main body 201, and the A electrode body 10A of the first electrode plate 10 is formed as the first concave groove 202 and the B electrode body 10B is as the third. The concave groove 204 and the C electrode body 11C of the second electrode plate 11 are inserted into the second concave groove 203 and the D electrode body 11D so as to be inserted.

  In the present embodiment, the first electrode plate 10 to which a high voltage pulse is applied is mounted from the lower side of the tower body 201, and the second electrode plate 11 to which the ground voltage is applied is mounted from the upper side of the tower body 201. . Since the end faces of the upper end and the lower end of the tower body 201 are both formed flat, when the first electrode plate 10 and the second electrode plate 11 are mounted from the upper end or the lower end side of the tower body 201, connection of the first electrode 10 is performed. The connection body 110 of the body 100 and the second electrode 11 shorts. However, in the present embodiment, since the first electrode plate 10 and the second electrode plate 11 are separately disposed on the upper end side and the lower end side of the tower main body 201, a short circuit does not occur.

  The tube 7 is spirally wound around the outer peripheral surface of the tower body 201. Both ends of the tube 7 spirally wound around the outer peripheral surface of the column main body 201 are detachably held by the first tube end pressing body 206 and the second tube end pressing body 207 which are tube stopping means. In this state, it is pressed against the outer peripheral surface of the tower body 201 and stopped immovably.

  The first tube end pressing member 206 and the second tube end pressing member 207 are formed in the same structure, and the configuration of the first tube end pressing member 206 will be described. The configuration of the second tube end pressing member 207 will be described. The same reference numerals are given to the same members, and the description thereof will be omitted. In the first tube end pressing member 206, a semicircular fitting groove 210 in which the tube 7 is fitted is formed on one end side of one side surface 209 of the rectangular parallelepiped main body portion 208, and The insertion protrusion 211 protrudes forward.

  One end portion of the tube 7 is fitted in the fitting groove 210 of the first tube pressing body 206, and the other end portion of the tube 7 is fitted in the fitting groove 210 of the second tube pressing body 207. The tube 7 is spirally wound around the outer peripheral surface of the tube 201. At that time, the insertion protrusion 211 of the first tube end pressing member 206 on the winding start end side is removably inserted and fixed in, for example, the insertion hole 212 formed in the lower part of the outer peripheral surface of the tower main body 201. When the tube 7 is spirally wound around the outer peripheral surface of the tower main body 201, the insertion protrusion 211 of the second tube presser body 207 provided at the other end of the tube 7 is formed on the outer peripheral surface of the tower main body 201 It inserts in another insertion hole 212, and fixes.

  The tube 7 spirally wound around the outer peripheral surface of the tower body 201 has one end located below and the other end located above the tower via the first tube presser 206 and the second tube presser 207. Since the tube 7 is fixed to the outer peripheral surface of the main body 201, the tube 7 is held in a state of being spirally wound around the outer peripheral surface of the tower main body 201.

Next, the effects of the present embodiment will be described.
In the present embodiment, by changing the pitch at the time of winding according to the length of the tube 7, the tube 7 can be held in a spirally wound state with respect to the tower main body 201. If the tube 7 is long, the winding pitch is reduced, and if it is short, the winding pitch is increased. In addition, by providing the insertion holes 212 into which the insertion projections 211 are inserted at a plurality of circumferential and vertical directions on the outer peripheral surface of the tower main body 201, the tubes 7 can be tower main body at the same pitch regardless of the length of the tubes 7. It can be attached to the outer peripheral surface of 201.

  According to the present embodiment, the tubes 7 having different lengths can be spirally wound and held on the tower main body 201. For this reason, it is not necessary to prepare the tower main body 201 for every length of the tube 7.

[Modification]
In the first and second embodiments described above, the first electrode 10 and the second electrode 11 of the planar U-shape are disposed orthogonal to the column body 50, and each of the positive and negative electrode bodies Although 10A, 10B, 11A, 11B) are alternately arranged, three or more electrode bodies of positive electrode and negative electrode may be alternately arranged.

  Further, in the first and second embodiments and the modification thereof, the support towers 5 and 200 are formed in a cylindrical shape, but may be in a cylindrical shape, may be in a square cylinder shape or in a prismatic shape.

  In the first and second embodiments and their modifications, the first engaging portion 28 and the second engaging portion 51 are used as attachment means for attaching the support towers 5 and 200 to the bottom portion 20 of the vacuum chamber 2. It is engaged and made non-rotatable about the vertical axis, but it is not limited to this configuration, as long as the support towers 5 and 200 can be removably attached to the bottom 20.

  Further, in the first and second embodiments and their modifications, a coiled tube may be attached to the tower body 200.

DESCRIPTION OF SYMBOLS 1 ... Surface treatment apparatus of a tube, 2 ... Vacuum chamber, 5 ... Support tower, 7 ... Tube, 7a ... One end opening, 7b ... Other end opening, 8 ... 1st vacuum pump part, 9 ... 2nd vacuum pump part, 10 ... 1st electrode, 11 ... 2nd electrode, 10A ... A electrode body, 10B ... B electrode body, 100 ... connection body, 110 ... connection body, 11C ... C electrode body, 11D ... D electrode body, 12 ... power supply section, DESCRIPTION OF SYMBOLS 20 ... Bottom part 21 ... Chamber body, 22 ... Opening, 23 ... Lid, 24 ... 1st exhaust port, 25 ... 2nd exhaust port, 26 ... Bottom hole part 27 ... Mounting stand, 28 ... 1st engagement part , 29: base body portion 30, 30: upper surface, 31a to 31d, mounting pin, 32a to 32d, engaging hole, 33: front, 34: rear, 35: step, 36: third exhaust port, 37: pressure gauge , 50 ... tower body, 51 second engaging portion 52 to 55 first recessed groove to fourth recessed groove 56 inner diameter hole 57 to 60 first engaging piece to fourth engaging piece 61 rear portion 62 front Parts 63 Step difference 64 Rear part 65 Front part 66 Feeding pin insertion hole 67 Guide groove 200 Support tower 201 Tower body 202 to 205 First concave groove to fourth concave Groove: 206 First tube end pressing body 207: Second tube end pressing body 208: Main body portion 209: One side 210: Fitting groove 211: Insertion protrusion 212: Insertion hole , 213 ... High voltage pulse side feed pin, 214 ... Ground side feed pin

Claims (7)

A tube surface treatment apparatus for treating the inner surface of an elastically deformable or coiled tube by plasma irradiation, comprising:
With a vacuum chamber,
A support tower disposed in the vacuum chamber, the elastically deformable tube being helically wound and attached to the outer periphery of a tower body, or the coiled tube being attached;
A plurality of first electrode bodies disposed along the circumferential direction on the outer periphery of the tower body;
A plurality of second electrode bodies disposed between the first electrode bodies along the circumferential direction on the outer periphery of the tower body;
A power supply unit for applying a predetermined voltage to the first electrode body and the second electrode body;
A first vacuum pump unit connected to a tube attached to the column body to evacuate gas in the tube and reduce the pressure to a pressure at which plasma is generated in the tube;
An apparatus for treating a surface of a tube, comprising: In claim 1,
The tube surface treatment apparatus is characterized in that both end portions of the tube are detachably fixed to the outer peripheral surface of the tower body by tube stoppers attached to both ends of the tube. In claim 1,
A fitting groove into which the tube fits is formed in a spiral on the outer peripheral surface of the tower body. In any one of claims 1 to 3,
The apparatus for treating a surface of a tube, wherein the support tower is removably mounted in the vacuum chamber. In any one of claims 1 to 4,
The gas in the vacuum chamber is exhausted to reduce the pressure higher than the pressure in the tube to a pressure at which no plasma is generated in the vacuum chamber, and the differential pressure generated between the pressure in the tube and the pressure in the tube can be adjusted. A tube surface treatment apparatus comprising a second vacuum pump unit. In any one of claims 1 to 5,
The vacuum chamber has a chamber main body formed in a cylindrical shape with a vertical bottom and a lid closing an upper end opening of the chamber main body, and the support tower can be taken out through the upper end opening. The tube surface treatment device to be characterized. A plasma processing apparatus for processing one of the inner and outer surfaces of an object to be treated by plasma irradiation, comprising:
With the inner surface of the object to be treated disposed in one of the two spaces in which the air pressure can be adjusted and the outer surface of the object to be treated disposed in the other space, the differential pressure between the two spaces is a predetermined condition The pressure in the one space and the pressure in the other space are reduced so that the pressure in the one space is lower than the pressure in the other space.

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