TW201531804A - Photosensitive resin composition for light shielding film and cured product using the same - Google Patents

Photosensitive resin composition for light shielding film and cured product using the same Download PDF

Info

Publication number
TW201531804A
TW201531804A TW104103532A TW104103532A TW201531804A TW 201531804 A TW201531804 A TW 201531804A TW 104103532 A TW104103532 A TW 104103532A TW 104103532 A TW104103532 A TW 104103532A TW 201531804 A TW201531804 A TW 201531804A
Authority
TW
Taiwan
Prior art keywords
light
group
component
photosensitive resin
resin composition
Prior art date
Application number
TW104103532A
Other languages
Chinese (zh)
Other versions
TWI627501B (en
Inventor
Wakana Higashi
Takashi Konno
Manabu Higashi
Original Assignee
Nippon Steel & Sumikin Chem Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel & Sumikin Chem Co filed Critical Nippon Steel & Sumikin Chem Co
Publication of TW201531804A publication Critical patent/TW201531804A/en
Application granted granted Critical
Publication of TWI627501B publication Critical patent/TWI627501B/en

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/032Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)
  • Indole Compounds (AREA)
  • Polymerisation Methods In General (AREA)
  • Macromonomer-Based Addition Polymer (AREA)
  • Epoxy Resins (AREA)

Abstract

An objective of this invention is to provide a photosensitive resin composition for light shielding film capable of obtaining a coating film having high fineness, high light shielding, and sufficiently secured development adhesion property even formed in fine line so as to have an excellent adhesion with glass substrate. Provided is a photosensitive resin composition for light shielding film comprising: (A) an alkali soluble resin contains predetermined polymerizable unsaturated group, (B) a photo polymerizable monomer having at least one ethylene unsaturated bond, (C) a photo polymerization initiator, and (D) a shielding component, wherein, the composition comprises (A)/(B) in weight ratio is 50/50 to 90/10, contains 2 to 30 part by weight of (C) component with resects to 100 part by weight of total amount of (A) component and (B) component, and contains a compound represented by the following general formula (I) as the photo polymerization initiator of component (C).

Description

遮光膜用感光性樹脂組成物及其硬化物 Photosensitive resin composition for light-shielding film and cured product thereof

本發明係關於遮光膜用感光性樹脂組成物及其硬化物,詳言之,係適於在透明基板上形成細微之遮光膜的鹼水溶液顯影型之遮光膜用感光性樹脂組成物及其硬化物,硬化而得之遮光膜係適於利用在形成彩色濾光片或觸控面板者。 The present invention relates to a photosensitive resin composition for a light-shielding film and a cured product thereof, and more particularly to a photosensitive resin composition for a light-shielding film of an alkali aqueous solution development type which is suitable for forming a fine light-shielding film on a transparent substrate and hardening thereof The hardened film is suitable for use in forming a color filter or a touch panel.

彩色液晶顯示裝置係將控制光之穿透量或反射量之液晶部與彩色濾光片作為構成要件,而該彩色濾光片之製造方法通常係使用於玻璃、塑膠片等透明基板之表面形成黑色的矩陣(matrix),接著,依序將紅、綠、藍之相異色相以條紋狀或馬賽克狀等顏色圖形(pattern)形成之方法。 The color liquid crystal display device uses a liquid crystal portion and a color filter for controlling the amount of light penetration or reflection as constituent elements, and the method for manufacturing the color filter is usually formed on the surface of a transparent substrate such as glass or plastic sheet. A black matrix, followed by a method of forming a color pattern of red, green, and blue in a streak or mosaic pattern.

近幾年,彩色液晶顯示裝置開始用於液晶電視、液晶螢幕、彩色液晶行動電話等各種領域。彩色濾光片係影響彩色液晶顯示裝置之視認性(legibility)的重要構件之一,為了提升視認性,亦即,為了得到鮮明之圖像, 需使構成彩色濾光片之紅(R)、綠(G)、藍(B)等畫素高色純度化至超越現狀,同時需於黑矩陣達成高遮光化,因此,不得不於感光性樹脂組成物添加較以往多之著色劑。 In recent years, color liquid crystal display devices have begun to be used in various fields such as liquid crystal televisions, liquid crystal screens, and color liquid crystal mobile phones. A color filter is one of important components that affects the visibility of a color liquid crystal display device. In order to improve visibility, that is, in order to obtain a clear image, It is necessary to make the color of red (R), green (G), and blue (B) constituting the color filter high in purity beyond the current state, and at the same time, it is necessary to achieve high light-shielding in the black matrix, and therefore, it is necessary to be photosensitive. The resin composition is added with more coloring agents than before.

又,近年來,智慧型行動電話等中小型面板需要用以得到全高清(Full High Definition,Full HD)之解析度的超高精細化(每英寸像素密度(Pixel Per Inch)400以上)技術,高精細化已成為必需之技術趨勢。為了達成高精細化,雖需使紅、綠、藍之各畫素尺寸更為細密,惟就高亮度化而言,需不使彩色濾光片之開口率(背光所穿透之RGB畫素之面積比例)下降,且同時亦追求黑矩陣之細化。亦即,黑矩陣之線寬,以往係以6至8μm為主流,但最近則要求要4至5μm之尺寸。 In addition, in recent years, small and medium-sized panels such as smart mobile phones require ultra-high definition (Pixel Per Inch 400 or more) technology for obtaining full HD (Full HD) resolution. High definition has become a necessary technology trend. In order to achieve high definition, it is necessary to make the size of each of the red, green, and blue pixels finer. However, in terms of high brightness, it is necessary to prevent the aperture ratio of the color filter (the RGB pixel penetrated by the backlight). The area ratio is reduced, and at the same time, the refinement of the black matrix is also pursued. That is, the line width of the black matrix has been mainly 6 to 8 μm in the past, but recently it has been required to be 4 to 5 μm.

又,為了高亮度化,有提升背光強度之傾向,伴隨於此,為了防止從黑矩陣漏光,需使RGB周圍之黑矩陣高遮光化。為了確保高遮光,只要使黑矩陣之膜厚變厚即可,但若使膜厚變厚,則變得容易受到顯影程序之影響,於素玻璃(mother glass)面內之黑矩陣之線寬的參差會變大。尤其是4至5μm之細線之情形下,線寬之參差對於色斑的產生等顯示性能會造成很大的影響。因此,為了盡量以較薄之膜厚確保目標之遮光度,需提高每單位膜厚之遮光性。然而,通常是增加樹脂組成物中黑色顏料之含量,因此,其結果係會有所謂發生有助於硬化性之黏合劑樹脂或丙烯酸酯成分等的調配比例相對地變小,塗膜變得難以充分硬化,塗膜與玻璃基板之附著性降低,變得容易發生 剝落等問題。 Further, in order to increase the brightness, there is a tendency to improve the backlight intensity. Accordingly, in order to prevent light leakage from the black matrix, it is necessary to make the black matrix around RGB high in light shielding. In order to ensure high light shielding, the film thickness of the black matrix may be increased. However, if the film thickness is increased, the thickness of the black matrix in the surface of the mother glass is easily affected by the development process. The stagger will become bigger. In particular, in the case of a thin line of 4 to 5 μm, the variation in line width greatly affects the display performance such as generation of a stain. Therefore, in order to ensure the opacity of the target with a thin film thickness as much as possible, it is necessary to increase the light-shielding property per unit film thickness. However, in general, the content of the black pigment in the resin composition is increased. As a result, the proportion of the binder resin or the acrylate component which contributes to the hardenability is relatively small, and the coating film becomes difficult. Fully hardened, the adhesion between the coating film and the glass substrate is reduced, and it becomes easy to occur Peeling and other issues.

然而,作為液晶面板之耐久性試驗(可靠性試驗),一般而言係進行PCT(Pressure Cooker Test),此試驗法,係於溫度121℃、濕度100%、氣壓2atm之所謂嚴苛條件下,將液晶面板放置數小時,並進行液晶面板之彩色濾光片基板與TFT基板之間是否有封入的液晶漏出之確認者。黑矩陣係存在於紅、綠、藍各色之間,除了有提高對比之作用之外,亦有作為彩色濾光片之外框遮光膜之功能,外框遮光膜之一部分係經由密封材料而與相對之基板相互貼合。因此,亦同時要求黑矩陣有即使在如PCT之嚴苛條件下亦不發生如與玻璃基板剝落的高附著強度。尤其,近年來,用以提升液晶面板之視認性之外框遮光膜對於高遮光化之需求亦高。 However, as a durability test (reliability test) of a liquid crystal panel, a PCT (Pressure Cooker Test) is generally used. This test method is carried out under the so-called severe conditions of a temperature of 121 ° C, a humidity of 100%, and a gas pressure of 2 atm. The liquid crystal panel was left for several hours, and it was confirmed whether or not the sealed liquid crystal leaked out between the color filter substrate and the TFT substrate of the liquid crystal panel. The black matrix exists between the red, green and blue colors. In addition to the effect of improving contrast, it also functions as a light-shielding film outside the color filter. One part of the outer frame light-shielding film is via a sealing material. The opposite substrates are attached to each other. Therefore, it is also required that the black matrix has a high adhesion strength such as peeling off from the glass substrate even under severe conditions such as PCT. In particular, in recent years, in order to improve the visibility of the liquid crystal panel, the frame light-shielding film has a high demand for high light-shielding.

如所述,對於遮光材料之含有比例多而難以光硬化之感光性樹脂組成物,係要求:以較廣之顯影裕度(developing margin)得到於低曝光量下為圖形尺寸安定性、圖形附著性、圖形邊緣形狀的銳度良好之細線圖形,及,即使於PCT等耐久性試驗中,形成與玻璃基板之附著性高、品質良好之黑矩陣及外框遮光膜。再者,基於與彩色濾光片外框遮光膜相同之目的,於觸控面板之外框等形成遮光膜之需求亦增高。 As described above, it is required that the photosensitive resin composition having a large content ratio of the light-shielding material and being difficult to be photo-cured is required to obtain a pattern size stability and pattern adhesion at a low exposure amount with a wide development margin. The fine line pattern having good sharpness and the sharpness of the edge shape of the pattern, and the black matrix and the outer frame light-shielding film having high adhesion to the glass substrate and good quality even in a durability test such as PCT. Further, for the same purpose as the color filter outer frame light-shielding film, the demand for forming a light-shielding film on the outer frame of the touch panel or the like is also increased.

於是,例如於專利文獻1至3中已提案一種含有肟酯(oxime ester)系化合物作為高靈敏度光聚合起始劑之黑矩陣用感光性樹脂組成物。然而,就以較廣之顯影 裕度得到於低曝光量下為圖形尺寸安定性優異、圖形附著性、圖形之邊緣形狀的銳度良好之細線圖形之點而言,係難以表現充分之性能,而且,並沒有關於在PCT等耐久性試驗中之附著性的具體記載。 Then, for example, Patent Documents 1 to 3 have proposed a photosensitive resin composition for a black matrix containing an oxime ester-based compound as a high-sensitivity photopolymerization initiator. However, it is more widely developed When the margin is obtained at a low exposure amount, which is excellent in pattern dimensional stability, pattern adhesion, and sharpness of the edge shape of the pattern, it is difficult to express sufficient performance, and there is no such thing as in the PCT. Specific description of the adhesion in the durability test.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本特開2005-242279號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2005-242279

[專利文獻2]日本特開2006-53569號公報 [Patent Document 2] Japanese Laid-Open Patent Publication No. 2006-53569

[專利文獻3]日本特開2008-100955號公報 [Patent Document 3] Japanese Patent Laid-Open Publication No. 2008-100955

本發明係有鑑於上述問題而成者,其目的為提供一種遮光膜用感光性樹脂組成物,其係於感光性樹脂組成物維持高精細度、高遮光,且即使於形成例如5μm之細線時,亦確保充分之顯影附著性,與玻璃基板之附著性亦優異。本發明復提供一種使用該感光性樹脂組成物,藉由光蝕刻(photolithography)法而形成之遮光膜圖形等的硬化物,且進一步提供一種含有該硬化物之彩色濾光片及觸控面板。 The present invention has been made in view of the above-mentioned problems, and an object of the invention is to provide a photosensitive resin composition for a light-shielding film which maintains high definition and high light-shielding in a photosensitive resin composition, and even when a fine line of, for example, 5 μm is formed. It also ensures sufficient development adhesion and excellent adhesion to a glass substrate. The present invention provides a cured product of a light-shielding film pattern formed by photolithography using the photosensitive resin composition, and further provides a color filter and a touch panel including the cured product.

本發明人等為了解決前述課題而進行探討,結果發現,藉由調配具有特定化學結構之肟系光聚合起始劑作為包含含有聚合性不飽和基之鹼可溶性樹脂、光聚合 性單體、光聚合起始劑及遮光成分之感光性樹脂組成物的光聚合起始劑,可得到可維持高精細度、高遮光,且於形成細線時亦可充分地確保顯影附著性,與玻璃基板之附著性亦優異之遮光膜,進而完成本發明。 In order to solve the above-mentioned problems, the present inventors have found that an oxime-based photopolymerization initiator having a specific chemical structure is formulated as an alkali-soluble resin containing a polymerizable unsaturated group, and photopolymerization is carried out. The photopolymerization initiator of the photosensitive resin composition of the monomer, the photopolymerization initiator, and the light-shielding component can maintain high definition and high light-shielding, and can sufficiently ensure development adhesion when forming a fine line. The present invention is completed by a light-shielding film which is excellent in adhesion to a glass substrate.

亦即,本發明之要點如下所述。 That is, the gist of the present invention is as follows.

(1)一種遮光膜用感光性樹脂組成物,其係含有下述(A)至(D)作為必要成分:(A)含有聚合性不飽和基之鹼可溶性樹脂,其係使具有2個以上環氧基之化合物和(甲基)丙烯酸之反應物再與多元羧酸或其酐反應所得者,(B)具有至少1個乙烯性不飽和鍵之光聚合性單體,(C)光聚合起始劑,及(D)從黑色有機顏料、混色有機顏料及遮光材料所成之群中選出之1種以上之遮光成分;其中,(A)成分與(B)成分之重量比例(A)/(B)為50/50至90/10,相對於(A)成分與(B)成分之合計100重量份係含有(C)成分2至30重量份,且含有下述通式(I)所表示之化合物作為(C)成分之光聚合起始劑 惟,通式(I)中,R1及R2表示碳原子C為1至20個之烷基或碳原子C為6至20個之芳基,前述烷基或芳基亦可含 有醚鍵,又,前述烷基或芳基中之氫原子之一部分亦可經以下所示之取代基取代:取代基係碳原子C為2至12個之烯基、碳原子C為4至8個之環烯基、碳原子C為2至12個之炔基、碳原子C為3至10個之環烷基、苯基、萘基、可經鹵素取代之碳原子C為1至5之烷氧基或鹵素;R3表示碳原子C為6至20個之芳基、或碳原子C為5至20個之雜芳基。 (1) A photosensitive resin composition for a light-shielding film comprising the following (A) to (D) as essential components: (A) an alkali-soluble resin containing a polymerizable unsaturated group, which has two or more a reaction of a compound of an epoxy group and a reaction of (meth)acrylic acid with a polycarboxylic acid or an anhydride thereof, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, and (C) photopolymerization a starter, and (D) one or more light-shielding components selected from the group consisting of a black organic pigment, a mixed color organic pigment, and a light-shielding material; wherein the weight ratio of the component (A) to the component (B) is (A) / (B) is 50/50 to 90/10, and contains 100 parts by weight of the component (A) and (B), and contains 2 to 30 parts by weight of the component (C), and contains the following general formula (I) The compound represented as a photopolymerization initiator of the component (C) However, in the formula (I), R 1 and R 2 each represent an alkyl group having 1 to 20 carbon atoms C or an aryl group having 6 to 20 carbon atoms, and the alkyl group or aryl group may further contain an ether bond. Further, a part of the hydrogen atom in the alkyl group or the aryl group may be substituted with a substituent represented by a substituent having a carbon atom C of 2 to 12 alkenyl groups and a carbon atom C of 4 to 8 a cycloalkenyl group, an alkynyl group having 2 to 12 carbon atoms C, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, an alkoxy group having a carbon atom C of 1 to 5 which may be substituted by halogen Or a halogen; R 3 represents an aryl group having 6 to 20 carbon atoms C or a heteroaryl group having 5 to 20 carbon atoms C.

(2)如(1)所述之遮光膜用感光性樹脂組成物,其中,(C)成分之光聚合起始劑係含有下述通式(II)所表示之化合物 惟,通式(II)中,R1及R2表示碳原子C為1至20個之烷基或碳原子C為6至20個之芳基,前述烷基或芳基亦可含有醚鍵,又,前述烷基或芳基中之氫原子之一部分亦可經以下所示之取代基取代:取代基係碳原子C為2至12個之烯基、碳原子C為4至8個之環烯基、碳原子C為2至12個之炔基、碳原子C為3至10個之環烷基、苯基、萘基、可經鹵素取代之碳原子C為1至5之烷氧基或鹵素。 (2) The photosensitive resin composition for a light-shielding film according to (1), wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (II) However, in the formula (II), R 1 and R 2 each represent an alkyl group having 1 to 20 carbon atoms C or an aryl group having 6 to 20 carbon atoms, and the alkyl group or aryl group may further contain an ether bond. Further, a part of the hydrogen atom in the alkyl group or the aryl group may be substituted with a substituent represented by a substituent having a carbon atom C of 2 to 12 alkenyl groups and a carbon atom C of 4 to 8 a cycloalkenyl group, an alkynyl group having 2 to 12 carbon atoms C, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, an alkoxy group having a carbon atom C of 1 to 5 which may be substituted by halogen Base or halogen.

(3)如(1)所述之遮光膜用感光性樹脂組成物,其中,(C) 成分之光聚合起始劑係含有下述通式(III)所表示之化合物 惟,通式(III)中,R4及R5係獨立地表示氫原子、-O-CH3、-O-CH2CH3、-O-(CH2)n+1CH3、-O-CH2CF3、或-O-CH2(CF2)nCHF2;惟,R4或R5中之任一者係氫原子;n係1至3之整數。 (3) The photosensitive resin composition for a light-shielding film according to (1), wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (III) However, in the formula (III), R 4 and R 5 independently represent a hydrogen atom, -O-CH 3 , -O-CH 2 CH 3 , -O-(CH 2 ) n+1 CH 3 , -O -CH 2 CF 3 or -O-CH 2 (CF 2 ) n CHF 2 ; however, either R 4 or R 5 is a hydrogen atom; n is an integer from 1 to 3.

(4)如(1)所述之遮光膜用感光性樹脂組成物,其中,(C)成分之光聚合起始劑係含有下述式(IV)所表示之化合物 (4) The photosensitive resin composition for a light-shielding film according to (1), wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (IV)

(5)如(1)至(4)中任一者所述之遮光膜用感光性樹脂組成物,其中,係使用使下述通式(V)所表示之化合物和(甲基)丙烯酸之反應物進一步與多元羧酸或其酐反應所得到之含有聚合性不飽和基之鹼可溶性樹脂作為(A)成分 惟,通式(V)中,R6及R7係獨立地表示氫原子、碳原子數1至5之烷基、或鹵素原子,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、茀-9,9-二基、或是單鍵,l係0至10之數字。 (5) The photosensitive resin composition for a light-shielding film according to any one of (1) to (4), wherein a compound represented by the following formula (V) and (meth)acrylic acid are used. The alkali-soluble resin containing a polymerizable unsaturated group obtained by further reacting a reactant with a polyvalent carboxylic acid or an anhydride thereof as the component (A) However, in the general formula (V), R 6 and R 7 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms, or a halogen atom, and X represents -CO-, -SO 2 -, -C(CF). 3 ) 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, 茀-9,9-diyl, or a single bond, l is 0 to 10 figures.

(6)如(1)至(5)中任一者所述之遮光膜用感光性樹脂組成物,其中,相對於遮光膜用感光性樹脂組成物中之固形成分,(D)成分中之遮光成分的含量係40至70質量%。 (6) The photosensitive resin composition for a light-shielding film according to any one of (1) to (5), wherein the solid component in the photosensitive resin composition for a light-shielding film is in the component (D) The content of the light-shielding component is 40 to 70% by mass.

(7)如(1)至(6)中任一者所述之遮光膜用感光性樹脂組成物,其中,(D)遮光成分係碳黑。 (7) The photosensitive resin composition for a light-shielding film according to any one of (1), wherein (D) the light-shielding component is carbon black.

(8)一種塗膜,其係使(1)至(7)中任一者所述之遮光膜用感光性樹脂組成物硬化而形成。 (8) A coating film formed by curing the light-shielding film according to any one of (1) to (7).

(9)一種彩色濾光片,其係具備:將(1)至(7)中任一者所述之遮光膜用感光性樹脂組成物塗佈於透明基板上,預烘(pre-bake)後,進行經由紫外線曝光裝置之曝光、經由鹼水溶液之顯影及後烘(post-bake)所製作之遮光膜。 (9) A color filter comprising: the photosensitive resin composition for a light-shielding film according to any one of (1) to (7), which is applied onto a transparent substrate, and pre-bake Thereafter, a light-shielding film produced by exposure by an ultraviolet exposure apparatus, development by an aqueous alkali solution, and post-bake was performed.

(10)一種觸控面板,其係具備:將(1)至(7)中任一者所述之遮光膜用感光性樹脂組成物塗佈於透明基板上,預烘後, 進行經由紫外線曝光裝置之曝光、經由鹼水溶液之顯影及後烘所製作之遮光膜。 (10) A touch panel comprising: the photosensitive resin composition for a light-shielding film according to any one of (1) to (7), which is applied onto a transparent substrate, and after pre-baking, A light-shielding film which is formed by exposure by an ultraviolet exposure apparatus, development by an aqueous alkali solution, and post-baking is performed.

以下詳細說明本發明。 The invention is described in detail below.

作為(A)成分之含有聚合性不飽和基之鹼可溶性樹脂,適合者為使從雙酚(bisphenol)類衍生之具有2個環氧丙基醚基之環氧化合物與(甲基)丙烯酸(在此係指「丙烯酸及/或甲基丙烯酸」)反應,再使所得到之具有羥基之化合物與多元羧酸或其酐反應而得到環氧(甲基)丙烯酸酯之酸加成物。所謂從雙酚類衍生之環氧化合物,係指使雙酚類與環氧鹵丙烷(epihalohydrin)反應所得到之環氧化合物或與此相當之物。(A)成分,係一併具有聚合性不飽和雙鍵與羧基,故對感光性樹脂組成物賦予優異之光硬化性、良好之顯影性、圖形化特性,使遮光膜之物性提升。 The alkali-soluble resin containing a polymerizable unsaturated group as the component (A) is preferably an epoxy compound having two epoxypropyl ether groups derived from bisphenol and (meth)acrylic acid ( Here, the reaction is referred to as "acrylic acid and/or methacrylic acid", and the obtained compound having a hydroxyl group is reacted with a polyvalent carboxylic acid or an anhydride thereof to obtain an acid addition product of an epoxy (meth) acrylate. The epoxy compound derived from bisphenols refers to an epoxy compound obtained by reacting bisphenols with epihalohydrin or the like. Since the component (A) has a polymerizable unsaturated double bond and a carboxyl group, it provides excellent photocurability, good developability, and patterning properties to the photosensitive resin composition, and the physical properties of the light-shielding film are improved.

(A)成分之較佳例,係從通式(V)所表示之環氧化合物衍生。此環氧化合物係從雙酚類衍生,首先,使含有不飽和基之單羧酸反應。使(a)二羧酸或三羧酸或者其酸酐、及(b)四羧酸或其酸二酐,與此環氧化合物與含有不飽和基之單羧酸之反應物反應,而得到含有聚合性不飽和基之鹼可溶性樹脂。以下,說明使用通式(V)之化合物得到(A)成分之情形。 A preferred example of the component (A) is derived from an epoxy compound represented by the formula (V). This epoxy compound is derived from a bisphenol, and first, a monocarboxylic acid containing an unsaturated group is reacted. And (a) a dicarboxylic acid or a tricarboxylic acid or an acid anhydride thereof, and (b) a tetracarboxylic acid or an acid dianhydride thereof, and a reaction product of the epoxy compound and a monocarboxylic acid containing an unsaturated group, thereby obtaining a content An alkali-soluble resin of a polymerizable unsaturated group. Hereinafter, the case where the component (A) is obtained by using the compound of the formula (V) will be described.

就提供通式(V)之環氧化合物之雙酚類而言,可列舉:雙(4-羥基苯基)酮、雙(4-羥基-3,5-二甲基苯基)酮、雙(4-羥基-3,5-二氯苯基)酮、雙(4-羥基苯基)碸、雙(4-羥基-3,5-二甲基苯基)碸、雙(4-羥基-3,5-二氯苯基)碸、 雙(4-羥基苯基)六氟丙烷、雙(4-羥基-3,5-二甲基苯基)六氟丙烷、雙(4-羥基-3,5-二氯苯基)六氟丙烷、雙(4-羥基苯基)二甲基矽烷、雙(4-羥基-3,5-二甲基苯基)二甲基矽烷、雙(4-羥基-3,5-二氯苯基)二甲基矽烷、雙(4-羥基苯基)甲烷、雙(4-羥基-3,5-二氯苯基)甲烷、雙(4-羥基-3,5-二溴苯基)甲烷、2,2-雙(4-羥基苯基)丙烷、2,2-雙(4-羥基-3,5-二甲基苯基)丙烷、2,2-雙(4-羥基-3,5-二氯苯基)丙烷、2,2-雙(4-羥基-3-甲基苯基)丙烷、2,2-雙(4-羥基-3-氯苯基)丙烷、雙(4-羥基苯基)醚、雙(4-羥基-3,5-二甲基苯基)醚、雙(4-羥基-3,5-二氯苯基)醚、9,9-雙(4-羥基苯基)茀、9,9-雙(4-羥基-3-甲基苯基)茀、9,9-雙(4-羥基-3-氯苯基)茀、9,9-雙(4-羥基-3-溴苯基)茀、9,9-雙(4-羥基-3-氟苯基)茀、9,9-雙(4-羥基-3-甲氧基苯基)茀、9,9-雙(4-羥基-3,5-二甲基苯基)茀、9,9-雙(4-羥基-3,5-二氯苯基)茀、9,9-雙(4-羥基-3,5-二溴苯基)茀、4,4'-聯苯酚、3,3'-聯苯酚等。其中,特佳可使用通式(V)中之X為茀-9,9-二基之雙酚類。 Examples of the bisphenol which provides the epoxy compound of the formula (V) include bis(4-hydroxyphenyl)one, bis(4-hydroxy-3,5-dimethylphenyl)one, and bis. (4-hydroxy-3,5-dichlorophenyl) ketone, bis(4-hydroxyphenyl)anthracene, bis(4-hydroxy-3,5-dimethylphenyl)anthracene, bis(4-hydroxy- 3,5-dichlorophenyl) hydrazine, Bis(4-hydroxyphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dimethylphenyl)hexafluoropropane, bis(4-hydroxy-3,5-dichlorophenyl)hexafluoropropane , bis(4-hydroxyphenyl)dimethyl decane, bis(4-hydroxy-3,5-dimethylphenyl)dimethyl decane, bis(4-hydroxy-3,5-dichlorophenyl) Dimethyldecane, bis(4-hydroxyphenyl)methane, bis(4-hydroxy-3,5-dichlorophenyl)methane, bis(4-hydroxy-3,5-dibromophenyl)methane, 2 , 2-bis(4-hydroxyphenyl)propane, 2,2-bis(4-hydroxy-3,5-dimethylphenyl)propane, 2,2-bis(4-hydroxy-3,5-di Chlorophenyl)propane, 2,2-bis(4-hydroxy-3-methylphenyl)propane, 2,2-bis(4-hydroxy-3-chlorophenyl)propane, bis(4-hydroxyphenyl) Ether, bis(4-hydroxy-3,5-dimethylphenyl)ether, bis(4-hydroxy-3,5-dichlorophenyl)ether, 9,9-bis(4-hydroxyphenyl) Indole, 9,9-bis(4-hydroxy-3-methylphenyl)anthracene, 9,9-bis(4-hydroxy-3-chlorophenyl)anthracene, 9,9-bis(4-hydroxy-3) -Bromophenyl)anthracene, 9,9-bis(4-hydroxy-3-fluorophenyl)anthracene, 9,9-bis(4-hydroxy-3-methoxyphenyl)anthracene, 9,9-double (4-hydroxy-3,5-dimethylphenyl)anthracene, 9,9-bis(4-hydroxy-3,5-dichlorophenyl)anthracene, 9,9-bis(4-hydroxy-3, 5-dibromophenyl) , 4,4'-biphenol, 3,3'-biphenol and the like. Among them, it is particularly preferable to use a bisphenol of the formula (V) wherein X is a -9,9-diyl group.

為了得到(A)之鹼可溶性樹脂,適合者為使上述雙酚類與環氧氯丙烷(epichlorohydrin)反應而得到具有2個環氧丙基醚基之環氧化合物。於此反應時,通常會伴隨著二環氧丙基醚化合物之低聚合反應(oligomerization),故得到通式(V)之環氧化合物。l通常混雜存在複數個值,故平均值為0至10(不限於整數),較佳為l之平均值為0至3。l之值若超過上限值,則將使用該環氧化合物而合成之鹼可溶性樹脂用來作為感光性樹脂組 成物時,組成物之黏度變的過大而會變得無法順利塗佈,無法賦予充分之鹼可溶性,鹼顯影性會變的非常差。 In order to obtain the alkali-soluble resin of (A), it is suitable to obtain an epoxy compound having two epoxypropyl ether groups by reacting the above bisphenols with epichlorohydrin. In the case of this reaction, the oligomerization of the diglycidyl ether compound is usually accompanied, so that the epoxy compound of the formula (V) is obtained. l Usually there are a plurality of values mixed, so the average value is 0 to 10 (not limited to an integer), and it is preferable that the average value of l is 0 to 3. If the value of l exceeds the upper limit, an alkali-soluble resin synthesized using the epoxy compound is used as the photosensitive resin group. When the product is formed, the viscosity of the composition becomes too large to be applied smoothly, and sufficient alkali solubility cannot be imparted, and the alkali developability is extremely poor.

再者,本發明之含有聚合性不飽和基之鹼可溶性樹脂係可得自如上述之雙酚類所衍生之環氧化合物,除該環氧化合物之外,亦可使用例如得自酚酚醛清漆型環氧化合物或甲酚酚醛清漆型環氧化合物等具有2個環氧丙基醚基之環氧化合物者。 Further, the alkali-soluble resin containing a polymerizable unsaturated group of the present invention may be obtained from an epoxy compound derived from the above-mentioned bisphenol, and in addition to the epoxy compound, for example, a phenol novolak type may be used. An epoxy compound having two epoxypropyl ether groups such as an epoxy compound or a cresol novolak type epoxy compound.

其次,例如使通式(V)之化合物與作為含有不飽和基的單羧酸之丙烯酸或甲基丙烯酸或此兩者反應,再使藉此得到之具有羥基之反應物與(a)二羧酸或三羧酸或者其酸酐、及(b)四羧酸或其酸二酐反應。此時,以於(a)/(b)之莫耳比成為0.01至10之範圍反應者為佳。藉由此反應,得到具有環氧(甲基)丙烯酸酯酸加成物之結構的含有聚合性不飽和基之鹼可溶性樹脂。 Next, for example, a compound of the formula (V) is reacted with acrylic acid or methacrylic acid as a monocarboxylic acid containing an unsaturated group or both, and a reactant having a hydroxyl group and (a) a dicarboxylic acid are obtained therefrom. The acid or tricarboxylic acid or anhydride thereof, and (b) the tetracarboxylic acid or its acid dianhydride are reacted. At this time, it is preferred that the molar ratio of (a)/(b) is in the range of 0.01 to 10. By this reaction, an alkali-soluble resin containing a polymerizable unsaturated group having a structure of an epoxy (meth) acrylate acid addition product is obtained.

就環氧基(甲基)丙烯酸酯酸加成物中所利用之(a)二羧酸或三羧酸或者其酸酐而言,可使用鏈式烴二羧酸或三羧酸或者其酸酐和脂環式二羧酸或三羧酸或者其酸酐、芳香族二羧酸或三羧酸或者其酸酐。其中,就鏈式烴二羧酸或三羧酸或者其酸酐而言,例如琥珀酸、乙醯琥珀酸、順丁烯二酸、己二酸、伊康酸、壬二酸、檸蘋酸(Citramalic acid)、丙二酸、戊二酸、檸檬酸、酒石酸、側氧基戊二酸、庚二酸、癸二酸、辛二酸、縮二羥乙酸(diglycolic acid)等化合物,再者,亦可為導入有任意取代基之二羧酸或三羧酸或者其酸酐。而且,就脂環式二羧酸 或三羧酸或者其酸酐而言,例如環丁烷二羧酸、環戊烷二羧酸、六氫酞酸、四氫酞酸、降莰烷二羧酸等化合物,再者,亦可為導入有任意取代基之二羧酸或三羧酸或者其酸酐。再者,就芳香族二羧酸或三羧酸或者其酸酐而言,例如酞酸、異酞酸、1,2,4-苯三甲酸(trimellitic acid)等化合物,再者,亦可為導入有任意取代基之二羧酸或三羧酸或者其酸酐。 As the (a) dicarboxylic acid or tricarboxylic acid or an anhydride thereof used in the epoxy group (meth) acrylate acid adduct, a chain hydrocarbon dicarboxylic acid or a tricarboxylic acid or an anhydride thereof and An alicyclic dicarboxylic acid or a tricarboxylic acid or an anhydride thereof, an aromatic dicarboxylic acid or a tricarboxylic acid or an anhydride thereof. Wherein, in the case of a chain hydrocarbon dicarboxylic acid or a tricarboxylic acid or an anhydride thereof, for example, succinic acid, acetyl succinic acid, maleic acid, adipic acid, itaconic acid, sebacic acid, citramalic acid ( Citramalic acid), malonic acid, glutaric acid, citric acid, tartaric acid, oxoglutaric acid, pimelic acid, sebacic acid, suberic acid, diglycolic acid, etc. It may also be a dicarboxylic acid or a tricarboxylic acid or an anhydride thereof to which an arbitrary substituent is introduced. Alicyclic dicarboxylic acid Or a tricarboxylic acid or an acid anhydride thereof, for example, a compound such as cyclobutane dicarboxylic acid, cyclopentane dicarboxylic acid, hexahydrononanoic acid, tetrahydrofurfuric acid or norbornane dicarboxylic acid, or A dicarboxylic acid or a tricarboxylic acid or an anhydride thereof having an arbitrary substituent is introduced. Further, in the case of an aromatic dicarboxylic acid or a tricarboxylic acid or an acid anhydride thereof, for example, a compound such as citric acid, isophthalic acid or trimellitic acid may be introduced. A dicarboxylic acid or a tricarboxylic acid having an optional substituent or an anhydride thereof.

而且,就環氧基(甲基)丙烯酸酯酸加成物所利用之(b)四羧酸或其酸二酐而言,可使用鏈式烴四羧酸或其酸二酐以及脂環式四羧酸或其酸二酐、或者芳香族多元羧酸或其酸二酐。其中,就鏈式烴四羧酸或其酸二酐而言,例如丁烷四羧酸、戊烷四羧酸、己烷四羧酸等,再者,亦可為導入有任意取代基之四羧酸或其酸二酐。而且,就脂環式四羧酸或其酸二酐而言,例如環丁烷四羧酸、環戊烷四羧酸、環己烷四羧酸、環庚烷四羧酸、降莰烷四羧酸等,再者,亦可為導入有任意取代基之四羧酸或其酸二酐。而且,就芳香族四羧酸或其酸二酐而言,可舉例如焦蜜石酸、二苯甲酮四羧酸、聯苯四羧酸、聯苯醚四羧酸或其酸二酐,再者,亦可為導入有任意取代基之四羧酸或其酸二酐。 Further, as the (b) tetracarboxylic acid or its acid dianhydride used in the epoxy group (meth) acrylate acid adduct, a chain hydrocarbon tetracarboxylic acid or an acid dianhydride thereof and an alicyclic ring type can be used. a tetracarboxylic acid or an acid dianhydride thereof, or an aromatic polycarboxylic acid or an acid dianhydride thereof. Wherein, in the case of a chain hydrocarbon tetracarboxylic acid or an acid dianhydride thereof, for example, butane tetracarboxylic acid, pentane tetracarboxylic acid, hexanetetracarboxylic acid, etc., and further, four may be introduced with any substituent. A carboxylic acid or its acid dianhydride. Further, in the case of an alicyclic tetracarboxylic acid or an acid dianhydride thereof, for example, cyclobutanetetracarboxylic acid, cyclopentanetetracarboxylic acid, cyclohexanetetracarboxylic acid, cycloheptanetetracarboxylic acid, norbornane IV Further, a carboxylic acid or the like may be a tetracarboxylic acid or an acid dianhydride to which an arbitrary substituent is introduced. Further, examples of the aromatic tetracarboxylic acid or the acid dianhydride thereof include, for example, pyrogal acid, benzophenone tetracarboxylic acid, biphenyltetracarboxylic acid, diphenyl ether tetracarboxylic acid or acid dianhydride thereof. Further, it may be a tetracarboxylic acid or an acid dianhydride to which an arbitrary substituent is introduced.

於環氧(甲基)丙烯酸酯酸加成物所使用之(a)二羧酸或三羧酸或者其酸酐與(b)四羧酸或其酸二酐之莫耳比(a)/(b)係如上所述,以0.01至10為佳。若莫耳比(a)/(b)不於上述範圍,則無法得到最適當之分子量,於使用(A)之感光性樹脂組成物中,鹼顯影性、耐熱性、耐溶劑性、 圖形形狀等會劣化,故為不佳。再者,有莫耳比(a)/(b)越小則鹼溶解性越大,而分子量越大之傾向。 The molar ratio (a)/(a) of the (a) dicarboxylic acid or tricarboxylic acid or anhydride thereof to (b) the tetracarboxylic acid or its acid dianhydride used in the epoxy (meth) acrylate acid adduct. b) is preferably 0.01 to 10 as described above. When the molar ratio (a)/(b) is out of the above range, the most suitable molecular weight cannot be obtained, and in the photosensitive resin composition using (A), alkali developability, heat resistance, solvent resistance, The shape of the graphic or the like deteriorates, so it is not preferable. Further, the smaller the molar ratio (a)/(b), the larger the alkali solubility and the higher the molecular weight.

環氧(甲基)丙烯酸酯酸加成物係可藉由上述步驟,以已知之方法,例如藉由日本特開平8-278629號公報或日本特開2008-9401號公報等所記載之方法來製造。首先,作為使含有不飽和基之單羧酸與通式(V)之環氧化合物反應之方法,例如有:將含有與環氧化合物之環氧基等莫耳之不飽和基之單羧酸添加於溶劑中,於觸媒(三乙基苄基氯化銨、2,6-二異丁基酚等)之存在下,一邊吹入空氣一邊加熱至90至120℃並攪拌而使其反應之方法。其次,作為使反應生成物之環氧丙烯酸酯化合物之羥基與酸酐反應之方法,有:將預定量之環氧丙烯酸酯化合物及酸二酐及酸酐添加至溶劑中,於觸媒(溴化四乙基銨、三苯膦等)之存在下,加熱至90至130℃並攪拌使其反應之方法。 The epoxy (meth) acrylate acid addition system can be obtained by a known method, for example, by the method described in JP-A-H08-278629 or JP-A-2008-9401. Manufacturing. First, as a method of reacting a monocarboxylic acid containing an unsaturated group with an epoxy compound of the formula (V), for example, a monocarboxylic acid containing a molar unsaturated group such as an epoxy group with an epoxy compound Adding to a solvent, heating to 90 to 120 ° C while blowing air in the presence of a catalyst (triethylbenzylammonium chloride, 2,6-diisobutylphenol, etc.), stirring and reacting The method. Next, as a method of reacting a hydroxyl group of an epoxy acrylate compound of a reaction product with an acid anhydride, a predetermined amount of an epoxy acrylate compound, an acid dianhydride, and an acid anhydride are added to a solvent to cause a catalyst (bromine tetra A method of heating to 90 to 130 ° C in the presence of ethylammonium, triphenylphosphine or the like and stirring to cause a reaction.

含有聚合性不飽和基之鹼可溶性樹脂(A)之重量平均分子量(Mw),係以2000至50000之範圍為佳,2000至7000之間為更佳。若重量平均分子量(Mw)未達2000,則無法維持使用(A)之感光性樹脂組成物於顯影時之圖形之附著性,且會發生圖形剝落,而且,若重量平均分子量(Mw)超過50000,則顯影殘渣或未曝光部分之殘膜會變得容易殘留。再者,(A)之酸價係以30至200mgKOH/g之範圍為理想。若該值較30mgKOH/g小,則會無法順利進行使用(A)之感光性樹脂組成物之鹼顯影,或需要強鹼等特殊之顯影條件,而若超過200mgKOH/g,則對使用(A)之感光性 樹脂組成物之鹼顯影液之滲透會變得過快,而引起剝離之現象,故皆不佳。再者,(A)之含有聚合性不飽和基之鹼可溶性樹脂可僅使用1種,亦可使用2種以上之混合物。 The weight average molecular weight (Mw) of the alkali-soluble resin (A) containing a polymerizable unsaturated group is preferably in the range of from 2,000 to 50,000, more preferably from 2,000 to 7,000. When the weight average molecular weight (Mw) is less than 2,000, the adhesion of the photosensitive resin composition of (A) to the pattern at the time of development cannot be maintained, and pattern peeling occurs, and if the weight average molecular weight (Mw) exceeds 50,000. Then, the residue of the developing residue or the unexposed portion may become easily left. Further, the acid value of (A) is preferably in the range of 30 to 200 mgKOH/g. When the value is smaller than 30 mgKOH/g, alkali development using the photosensitive resin composition of (A) or special development conditions such as strong alkali is not required, and if it exceeds 200 mgKOH/g, it is used (A) Sensitivity The penetration of the alkali developer of the resin composition becomes too fast and causes peeling, which is not preferable. In addition, the alkali-soluble resin containing a polymerizable unsaturated group of (A) may be used alone or in combination of two or more.

接著,就(B)具有至少1個乙烯性不飽和鍵之光聚合性單體而言,可舉例如:(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-乙基己酯等具有羥基之(甲基)丙烯酸酯類;乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、三乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯(tetramethylene glycol dimethacrylate)、三羥甲基丙烷三(甲基)丙烯酸酯、三羥甲基乙烷三(甲基)丙烯酸酯、新戊四醇二(甲基)丙烯酸酯、新戊四醇三(甲基)丙烯酸酯、新戊四醇四(甲基)丙烯酸酯、二新戊四醇四(甲基)丙烯酸酯、(甲基)丙烯酸甘油酯、山梨醇五(甲基)丙烯酸酯、二新戊四醇五(甲基)丙烯酸酯、或二新戊四醇六(甲基)丙烯酸酯、山梨醇六(甲基)丙烯酸酯、磷腈(phosphazene)之環氧烷改質六(甲基)丙烯酸酯、己內酯改質二新戊四醇六(甲基)丙烯酸酯等(甲基)丙烯酸酯類,可使用該等之1種或2種以上。再者,(B)具有至少1個乙烯性不飽和鍵之光聚合性單體係不具有游離的羧基。 Next, (B) the photopolymerizable monomer having at least one ethylenically unsaturated bond may, for example, be 2-hydroxyethyl (meth)acrylate or 2-hydroxypropyl (meth)acrylate. a (meth) acrylate having a hydroxyl group such as 2-ethylhexyl (meth)acrylate; ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, triethylene glycol Di(meth)acrylate, tetraethylene glycol di(meth)acrylate, tetramethylene glycol dimethacrylate, trimethylolpropane tri(meth)acrylate, three Hydroxymethylethane tri(meth)acrylate, pentaerythritol di(meth)acrylate, pentaerythritol tri(meth)acrylate, pentaerythritol tetra(meth)acrylate, two Pentaerythritol tetra (meth) acrylate, glyceryl (meth) acrylate, sorbitol penta (meth) acrylate, dipentaerythritol penta (meth) acrylate, or dipentaerythritol (Meth) acrylate, sorbitol hexa(meth) acrylate, phosphazene alkylene oxide modified hexa(meth) acrylate, caprolactone modified dipentaerythritol hexa(methyl) Propylene Esters of (meth) acrylates may be used or two or more of these. Further, (B) the photopolymerizable single system having at least one ethylenically unsaturated bond does not have a free carboxyl group.

此等(A)成分及(B)成分之調配比例,以重量比(A)/(B)為50/50至90/10,以60/40至80/20為佳。若(A)成分及(B)成分之調配比例較50/50少,則光硬化後之硬化物會變脆,而且,於未曝光部分之塗膜之酸價較低,故對 鹼顯影液之溶解性會降低,發生圖形邊緣會有參差的缺刻而無法清晰呈現之問題,而且,若較90/10多,則佔樹脂之光反應性官能基之比例較少而交聯結構之形成不充分,更且,樹脂成分中之酸價度過高,曝光部分對鹼顯影液之溶解性變高,故有所謂發生所形成之圖形較目標線寬來的細、容易發生圖形缺陷之問題之虞。 The blending ratio of the components (A) and (B) is preferably 50/50 to 90/10 by weight ratio (A)/(B), and preferably 60/40 to 80/20. If the blending ratio of the component (A) and the component (B) is less than 50/50, the cured product after photohardening becomes brittle, and the acid value of the coating film in the unexposed portion is low, so The solubility of the alkali developing solution is lowered, and there is a problem that the edge of the pattern may be staggered and cannot be clearly displayed, and if it is more than 90/10, the proportion of the photoreactive functional group of the resin is small and the crosslinked structure is small. The formation of the resin component is insufficient, and the acidity of the resin component is too high, and the solubility of the exposed portion to the alkali developer becomes high. Therefore, the pattern formed by the so-called occurrence is thinner than the target line width, and pattern defects are likely to occur. The problem is the problem.

又,(C)成分之光聚合起始劑係含有前述通式(I)所表示之化合物作為必要成分,藉由照射紫外線光等來產生自由基物種,加成至光聚合性之化合物,使自由基開始聚合,而使組成物硬化。其中,較佳為通式(II)者,更佳為通式(III)者,就考慮到可達成高靈敏度之點而言,則進一步以通式(IV)所表示之1-[11-(2-乙基己基)-8-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑-5-基]-[4-(2,2,3,3-四氟丙氧基)-苯基]-甲酮 肟 O-乙酸酯為特佳。至於通式(I)之製造,例如於國際公開公報WO2012/045736A1中記載有其製法。 In addition, the photopolymerization initiator of the component (C) contains a compound represented by the above formula (I) as an essential component, and generates a radical species by irradiation with ultraviolet light or the like, and is added to a photopolymerizable compound. The free radicals begin to polymerize and the composition hardens. Among them, those having a general formula (II), more preferably those having the general formula (III), further considering the point at which high sensitivity can be achieved, further 1-[11- represented by the general formula (IV). (2-ethylhexyl)-8-(2,4,6-trimethylbenzylidene)-11H-benzo[a]indazol-5-yl]-[4-(2,2,3 , 3-tetrafluoropropoxy)-phenyl]-methanone O-acetate is particularly preferred. The production of the general formula (I) is described in, for example, International Publication No. WO 2012/045736 A1.

而且,本發明中,可與通式(I)所示之光聚合起始劑一起併用1種以上其他光聚合起始劑或增敏劑。其中,就其他光聚合起始劑或增敏劑而言,可舉例如:苯乙酮、2,2-二乙氧基苯乙酮、對-二甲基苯乙酮、對-二甲基胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對-第三丁基苯乙酮等苯乙酮類;二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲基胺基二苯甲酮等二苯甲酮類;二苯甲醯、苯偶姻、苯偶姻甲基醚、苯偶姻異丙基醚、苯偶姻異丁基醚等苯偶姻醚類; 2-(鄰-氯苯基)-4,5-苯基聯咪唑、2-(鄰-氯苯基)-4,5-二(間-甲氧基苯基)聯咪唑、2-(鄰-氟苯基)-4,5-二苯基聯咪唑、2-(鄰-甲氧基苯基)-4,5-二苯基聯咪唑、2,4,5-三芳基聯咪唑等聯咪唑系化合物類;2-三氯甲基-5-苯乙烯基-1,3,4-二唑、2-三氯甲基-5-(對-氰基苯乙烯基)-1,3,4-二唑、2-三氯甲基-5-(對-甲氧基苯乙烯基)-1,3,4-二唑等鹵甲基二唑化合物類;2,4,6-參(三氯甲基)-1,3,5-三、2-甲基-4,6-雙(三氯甲基)-1,3,5-三、2-苯基-4,6-雙(三氯甲基)-1,3,5-三、2-(4-氯苯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基萘基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(3,4,5-三甲氧基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三、2-(4-甲基硫基苯乙烯基)-4,6-雙(三氯甲基)-1,3,5-三等鹵甲基-S-三系化合物類;1,2-辛烷二酮,1-〔4-(苯基硫基)苯基〕-,2-(鄰-苯甲醯基肟)、1-(4-苯基巰基苯基)丁烷-1,2-二酮-2-肟-鄰-苯甲酸酯、1-(4-甲基巰基苯基)丁烷-1,2-二酮-2-肟-鄰-乙酸酯、1-(4-甲基巰基苯基)丁烷-1-酮肟-鄰-乙酸酯等鄰-醯基肟系化合物類;苯甲基二甲基縮酮、氧硫雜蒽酮、2-氯氧硫雜蒽酮、2,4-二乙基氧硫雜蒽酮、2-甲基氧硫雜蒽酮、2-異丙基氧硫雜蒽酮等硫化合物;2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌等蒽醌類;偶氮雙異丁腈、過氧化苯甲醯基、過氧化異丙苯等有機過氧化物;2-巰基苯并咪唑、2-巰基苯并唑、2-巰基苯并噻唑等硫醇化合物等。 Further, in the present invention, one or more other photopolymerization initiators or sensitizers may be used in combination with the photopolymerization initiator represented by the formula (I). Among them, as other photopolymerization initiators or sensitizers, for example, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethyl group Acetophenones such as amphetamine, dichloroacetophenone, trichloroacetophenone, p-t-butylacetophenone, benzophenone, 2-chlorobenzophenone, p,p'- Benzophenones such as bis-dimethylaminobenzophenone; benzophenone, benzoin, benzoin methyl ether, benzoin isopropyl ether, benzoin isobutyl ether, etc. Acryl ethers; 2-(o-chlorophenyl)-4,5-phenylbiimidazole, 2-(o-chlorophenyl)-4,5-di(m-methoxyphenyl)biimidazole , 2-(o-fluorophenyl)-4,5-diphenylbiimidazole, 2-(o-methoxyphenyl)-4,5-diphenylbiimidazole, 2,4,5-triaryl Biimidazole-based compounds such as imidazole; 2-trichloromethyl-5-styryl-1,3,4- Diazole, 2-trichloromethyl-5-(p-cyanostyryl)-1,3,4- Diazole, 2-trichloromethyl-5-(p-methoxystyryl)-1,3,4- Halodimethyldiazole compounds such as oxadiazoles; 2,4,6-paraxyl (trichloromethyl)-1,3,5-three 2-methyl-4,6-bis(trichloromethyl)-1,3,5-three 2-phenyl-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-chlorophenyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxynaphthyl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(3,4,5-trimethoxystyryl)-4,6-bis(trichloromethyl)-1,3,5-three , 2-(4-methylthiostyryl)-4,6-bis(trichloromethyl)-1,3,5-three Isohalomethyl-S-three Compounds; 1,2-octanedione, 1-[4-(phenylthio)phenyl]-, 2-(o-benzylidene fluorene), 1-(4-phenylmercaptobenzene) Butane-1,2-dione-2-indole-o-benzoate, 1-(4-methylnonylphenyl)butane-1,2-dione-2-indole-o- Acetate, o-nonyl fluorene compounds such as 1-(4-methylnonylphenyl)butan-1-one oxime-o-acetate; benzyl dimethyl ketal, oxythiazepine Sulfur compounds such as anthrone, 2-chlorooxazepinone, 2,4-diethyloxythiazinone, 2-methyloxazepinone, 2-isopropyloxythiazolone; - anthracene such as ethyl hydrazine, octamethyl hydrazine, 1,2-benzopyrene, 2,3-diphenyl hydrazine; azobisisobutyronitrile, benzammonium peroxide, Organic peroxides such as cumene oxide; 2-mercaptobenzimidazole, 2-mercaptobenzoene a thiol compound such as azole or 2-mercaptobenzothiazole.

包括通式(I)所表示之光聚合起始劑,此等光聚合起始劑或增敏劑係除了可僅單獨使用1種以外,亦可組合2種以上來使用。而且,亦可添加如本身雖不具作為光聚合起始劑或增敏劑之作用,但可藉由組合使用來增加光聚合起始劑或增敏劑之能力之化合物。如此之化合物可舉例如與二苯基酮組合使用則有效果之三乙醇胺、三乙基胺等3級胺。 In addition to the photopolymerization initiator or the sensitizer, the photopolymerization initiator or the sensitizer may be used alone or in combination of two or more. Further, a compound which does not function as a photopolymerization initiator or a sensitizer itself, but which can increase the ability of a photopolymerization initiator or a sensitizer by a combination can be added. Such a compound may, for example, be a tertiary amine such as triethanolamine or triethylamine which is effective in combination with diphenylketone.

以(A)成分與(B)成分之合計100質量份為基準,(C)成分之光聚合起始劑之使用量係2至30質量份,以5至25質量份為佳,以5至20質量份為較佳。若(C)成分之調配比例係未達2質量份,則光聚合之速度會變慢,靈敏度會降低,另一方面,若超過30質量份,則有發生靈敏度太強,圖形線寬相對於圖形遮罩變成脹大狀態,而無法對遮罩忠實地再現線寬,或,圖形邊緣會有參差的缺刻而無法清晰呈現的問題之虞。(C)成分之光聚合起始劑係含有通式(I)所表示之光聚合起始劑作為必要成分,其量宜係即使未添加其他(C)成分,亦可單獨作為光聚合起始劑而有效地發揮作用之量以上之量,而通式(I)所表示之光聚合起始劑之量係以(C)成分之總量中之70至100質量%為佳。 The photopolymerization initiator of the component (C) is used in an amount of 2 to 30 parts by mass, preferably 5 to 25 parts by mass, based on 100 parts by mass based on the total of the components (A) and (B). 20 parts by mass is preferred. If the proportion of the component (C) is less than 2 parts by mass, the speed of photopolymerization will be slower and the sensitivity will be lowered. On the other hand, if it exceeds 30 parts by mass, the sensitivity is too strong, and the pattern line width is relatively large. The graphic mask becomes inflated, and the line width cannot be faithfully reproduced to the mask, or the edge of the graphic may have a staggered nick and cannot be clearly presented. The photopolymerization initiator of the component (C) contains, as an essential component, a photopolymerization initiator represented by the formula (I), preferably in an amount as a photopolymerization initiation even if no other component (C) is added. The amount of the photopolymerization initiator represented by the formula (I) is preferably from 70 to 100% by mass based on the total amount of the component (C).

(D)成分中,選自黑色有機顏料、混色有機顏料或遮光材料之遮光成分,係以耐熱性、耐光性及耐溶劑性優異者為佳。其中,黑色有機顏料可舉例如苝黑(perylene black)、花青黑(cyanine black)、苯胺黑(aniline black)等。混色有機顏料可舉出:將選自紅、藍、綠、紫、 黃色、花青、洋紅(magenta)等之2種以上之顏料混合而模擬黑色者。遮光材料可舉出:碳黑、氧化鉻、氧化鐵、鈦黑(titanium black)等無機黑色顏料,亦可適當地選擇2種以上來使用,惟就遮光性、表面平滑性、分散安定性、與樹脂之相容性良好之點而言,尤以碳黑為佳 Among the components (D), a light-shielding component selected from the group consisting of a black organic pigment, a mixed color organic pigment, and a light-shielding material is preferred because it is excellent in heat resistance, light resistance, and solvent resistance. Among them, the black organic pigment may, for example, be perylene black, cyanine black, aniline black or the like. Mixed color organic pigments may be selected from: red, blue, green, purple, Two or more kinds of pigments such as yellow, cyanine, and magenta are mixed to simulate black. The light-shielding material may be an inorganic black pigment such as carbon black, chromium oxide, iron oxide or titanium black, and may be appropriately selected from two or more types, and the light-shielding property, surface smoothness, dispersion stability, and In terms of good compatibility with the resin, carbon black is preferred.

而且,此等遮光成分係以事先分散於分散媒而作成遮光性分散液後,再調配遮光膜用感光性樹脂組成物為佳。其中,分散媒可舉例如:丙二醇單甲醚乙酸酯(propylene glycol monomethyl ether acetate)、3-甲氧基丁基乙酸酯(3-methoxybutyl acetate)等。相對於本發明之組成物之全部固形成分,遮光性分散液中之(D)的遮光成分之調配比例係20至80質量%,以40至70質量%之範圍來使用為佳。此時,使用苯胺黑、花青黑等有機顏料或碳黑等碳系遮光成分時,尤以40至60質量%之範圍為佳。若較20質量%少,則遮光性會變得不充分。若超過80質量%,則會發生本來成為黏合劑之感光性樹脂之含量會減少,故會產生損及顯影特性及損及膜形成能力之問題。 In addition, it is preferable that the light-shielding component is prepared by dispersing the dispersion medium in advance to form a light-shielding dispersion liquid, and then to prepare a photosensitive resin composition for a light-shielding film. The dispersion medium may, for example, be propylene glycol monomethyl ether acetate or 3-methoxybutyl acetate. The blending ratio of the light-shielding component (D) in the light-shielding dispersion is 20 to 80% by mass, and preferably 40 to 70% by mass, based on the total solid content of the composition of the present invention. In this case, when an organic pigment such as aniline black or cyanine black or a carbon-based light-shielding component such as carbon black is used, it is preferably in the range of 40 to 60% by mass. When the amount is less than 20% by mass, the light shielding property may be insufficient. When the amount is more than 80% by mass, the content of the photosensitive resin which is originally a binder is reduced, which causes a problem of impairing the developing property and impairing the film forming ability.

本發明之感光性樹脂組成物中,較佳係在使用上述(A)至(D)以外更使用溶劑來調整黏度。就溶劑而言,可舉例如:甲醇、乙醇、正丙醇、異丙醇、乙二醇、丙二醇等醇類;α-或β-萜品醇等萜烯類等;丙酮、甲基乙基酮、環己酮、N-甲基-2-吡咯啶酮等酮類;甲苯、二甲苯、四甲基苯等芳香族烴類;賽璐蘇、甲基賽璐蘇、乙基賽璐蘇、卡必醇、甲基卡必醇、乙基卡必醇、丁基卡必 醇、丙二醇單甲基醚、丙二醇單乙基醚、二丙二醇單甲基醚、二丙二醇單乙基醚、三乙二醇單甲基醚、三乙二醇單乙基醚等二醇醚類;乙酸乙酯、乙酸丁酯、賽璐蘇乙酸酯、乙基賽璐蘇乙酸酯、丁基賽璐蘇乙酸酯、卡必醇乙酸酯、乙基卡必醇乙酸酯、丁基卡必醇乙酸酯、丙二醇單甲基醚乙酸酯、丙二醇單乙基醚乙酸酯等乙酸酯類等,可使用該等來進行溶解、混合而形成均勻的溶液狀組成物。 In the photosensitive resin composition of the present invention, it is preferred to use a solvent to adjust the viscosity in addition to the above (A) to (D). Examples of the solvent include alcohols such as methanol, ethanol, n-propanol, isopropanol, ethylene glycol, and propylene glycol; terpenes such as α- or β-terpineol; and acetone and methyl ethyl Ketones such as ketone, cyclohexanone and N-methyl-2-pyrrolidone; aromatic hydrocarbons such as toluene, xylene and tetramethylbenzene; 赛 璐, methyl 赛 璐, ethyl 赛 璐, carbitol, methyl carbitol, ethyl carbitol, butyl carbene Alcohol, propylene glycol monomethyl ether, propylene glycol monoethyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether and other glycol ethers Ethyl acetate, butyl acetate, celecoxib acetate, ethyl cyproterone acetate, butyl cyproterone acetate, carbitol acetate, ethyl carbitol acetate, Acetate such as butyl carbitol acetate, propylene glycol monomethyl ether acetate or propylene glycol monoethyl ether acetate can be used by dissolving and mixing to form a uniform solution-like composition.

而且,本發明之感光性樹脂組成物中,可視需要而調配硬化促進劑、熱聚合抑制劑、塑化劑、填充材、溶劑、調平劑、消泡劑、偶合劑、界面活性劑等添加劑。就熱聚合抑制劑而言,可列舉:氫醌、氫醌單甲基醚、五倍子酚、第三丁基兒茶酚、啡噻等;就塑化劑而言,可列舉:酞酸二丁酯、酞酸二辛酯、磷酸三甲苯酯等;就充填材而言,可列舉:玻璃纖維、氧化矽、雲母、氧化鋁等;就消泡劑或調平劑而言,可列舉:聚矽氧系、氟系、丙烯酸系之化合物。而且,就界面活性劑而言,可列舉:氟系界面活性劑、聚矽氧系界面活性劑等;就偶合劑而言,可列舉:3-(環氧丙基氧基)丙基三甲氧基矽烷、3-異氰酸基丙基三乙氧基矽烷、3-脲基丙基三乙氧基矽烷等矽烷偶合劑。 Further, in the photosensitive resin composition of the present invention, an additive such as a curing accelerator, a thermal polymerization inhibitor, a plasticizer, a filler, a solvent, a leveling agent, an antifoaming agent, a coupling agent, and a surfactant may be blended as needed. . Examples of the thermal polymerization inhibitor include hydroquinone, hydroquinone monomethyl ether, gallic phenol, tert-butylcatechol, and thiophene Examples of the plasticizer include dibutyl phthalate, dioctyl phthalate, and tricresyl phosphate; and examples of the filler include glass fiber, cerium oxide, mica, alumina, and the like. Examples of the antifoaming agent or the leveling agent include polyfluorene-based, fluorine-based, and acrylic-based compounds. Further, examples of the surfactant include a fluorine-based surfactant and a polyfluorene-based surfactant; and as the coupling agent, 3-(epoxypropyloxy)propyltrimethoxy A decane coupling agent such as decane, 3-isocyanatopropyltriethoxy decane or 3-ureidopropyltriethoxy decane.

本發明之感光性樹脂組成物係含有上述(A)至(D)成分或含有該等與溶劑為主成分。扣除溶劑之固形成分(固形成分包括硬化後成為固形成分之單體)中,理想為含有(A)至(D)成分之合計為80質量%,以90質量%以上為佳。溶劑量係根據目標黏度而變化,惟以成為感光性樹脂 組成物中含有70至90質量%的範圍為佳。 The photosensitive resin composition of the present invention contains the above components (A) to (D) or contains such a solvent as a main component. In the case where the solid content of the solvent is removed (the solid component includes a monomer which becomes a solid component after hardening), the total content of the components (A) to (D) is preferably 80% by mass, preferably 90% by mass or more. The amount of solvent varies depending on the target viscosity, but it becomes a photosensitive resin. The composition preferably contains a range of 70 to 90% by mass.

本發明之遮光膜用感光性樹脂組成物,係優異之例如彩色濾光片遮光膜形成用之樹脂組成物,遮光膜之形成方法有如下述之光蝕刻法。可列舉:首先,將感光性樹脂組成物塗佈於透明基板上,接著,使溶媒乾燥(預烘)後,於以此方式進行而得到之覆膜上放置光罩,照射紫外線,使曝光部硬化,進一步使用鹼水溶液使未曝光部溶出以進行顯影、形成圖形,進一步進行後烘(熱燒製)作為後乾燥之方法。 The photosensitive resin composition for a light-shielding film of the present invention is excellent in, for example, a resin composition for forming a color filter light-shielding film, and the light-shielding film is formed by the following photo-etching method. First, the photosensitive resin composition is applied onto a transparent substrate, and then the solvent is dried (pre-baked), and then a mask is placed on the film obtained in this manner, and the ultraviolet ray is irradiated to expose the exposed portion. After hardening, the unexposed part is further eluted by using an aqueous alkali solution to develop, form a pattern, and further post-baking (hot baking) is used as a method of post-drying.

塗佈感光性樹脂組成物之透明基板,除了玻璃基板之外,可例示:於透明膜(例如聚碳酸酯、聚對苯二甲酸乙二酯、聚醚碸等)上蒸鍍或圖形化有ITO或金等透明電極者等。於透明基板上塗佈感光性樹脂組成物之溶液的方法,除了可採用習知之溶液浸漬法、噴霧法之外,亦可採用使用輥塗機(roller coater)、Land Coater塗佈機()、狹縫塗佈機或旋轉機(spinner)之方法等任一種方法。藉由此等方法,塗佈所期望之厚度後,去除溶劑(預烘),藉此形成覆膜。預烘係藉由烤箱、加熱板等來加熱而進行。預烘之加熱溫度及加熱時間係依據所使用之溶劑來適當地選擇,例如以60至110℃之溫度進行1至3分鐘。 The transparent substrate on which the photosensitive resin composition is applied may be, for example, vapor-deposited or patterned on a transparent film (for example, polycarbonate, polyethylene terephthalate, polyether oxime, etc.) in addition to the glass substrate. Transparent electrode such as ITO or gold. A method of coating a solution of a photosensitive resin composition on a transparent substrate may be a roll coater or a Land Coater coater, in addition to a conventional solution dipping method or a spray method. Any method such as a slit coater or a spinner. After the desired thickness is applied by such a method, the solvent (prebaking) is removed, thereby forming a film. The pre-baking is carried out by heating with an oven, a hot plate or the like. The preheating heating temperature and heating time are appropriately selected depending on the solvent to be used, for example, at a temperature of 60 to 110 ° C for 1 to 3 minutes.

預烘後所進行之曝光係藉由紫外線曝光裝置來進行,藉由經由光罩曝光,使僅對應於圖形之部分之阻劑感光。曝光裝置及其曝光照射條件係可適當地選擇,使用超高壓水銀燈、高壓水銀燈、金屬鹵素燈、遠紫外線燈 等光源來進行曝光,使塗膜中之感光性樹脂組成物光硬化。 The exposure performed after the prebaking is performed by an ultraviolet exposure device, and the resist which is only corresponding to the portion of the pattern is exposed by exposure through the photomask. The exposure device and its exposure illumination conditions can be appropriately selected, and an ultrahigh pressure mercury lamp, a high pressure mercury lamp, a metal halide lamp, a far ultraviolet lamp are used. The light source is exposed to light to cure the photosensitive resin composition in the coating film.

曝光後之鹼顯影係為了去除未曝光部分之阻劑而進行,藉由此顯影以形成所期望之圖形。適合於此種鹼顯影之顯影液,可舉例如:鹼金屬或鹼土金屬之碳酸鹽水溶液、鹼金屬之氫氧化物水溶液等,尤宜係使用含有0.05至3質量%碳酸鈉、碳酸鉀、碳酸鋰等碳酸鹽之弱鹼性水溶液以23至28℃之溫度進行顯影,可使用市售之顯影機或超音波洗淨機等精密地形成細微之圖像。 The alkali development after exposure is performed in order to remove the resist of the unexposed portion, thereby being developed to form a desired pattern. The developing solution suitable for such alkali development may, for example, be an alkali metal or alkaline earth metal carbonate aqueous solution or an alkali metal hydroxide aqueous solution, and particularly preferably contain 0.05 to 3% by mass of sodium carbonate, potassium carbonate or carbonic acid. A weakly alkaline aqueous solution of a carbonate such as lithium is developed at a temperature of 23 to 28 ° C, and a fine image can be precisely formed using a commercially available developing machine or an ultrasonic cleaner.

顯影後,以180至250℃之溫度及20至60分鐘之條件來進行熱處理(後烘)為佳。此後烘係為了提高經圖形化之遮光膜與基板之附著性等而進行。此係與預烘相同,係藉由烤箱、加熱板等來加熱而進行。本發明之經圖形化之遮光膜,係經由上述光蝕刻法的各個步驟而形成。 After the development, heat treatment (post-baking) is preferably carried out at a temperature of 180 to 250 ° C and a condition of 20 to 60 minutes. Thereafter, the baking is performed in order to improve the adhesion of the patterned light-shielding film to the substrate. This is the same as prebaking, and is performed by heating by an oven, a heating plate, or the like. The patterned light-shielding film of the present invention is formed through each step of the photolithography method.

本發明之感光性樹脂組成物係如上所述,適合於藉由曝光、鹼顯影等操作來形成細微之圖形。而且,本發明之遮光膜用感光性樹脂組成物係可適合用作為塗佈材料,尤其是適合於用於液晶顯示裝置或攝影元件之彩色濾光片用墨水,藉此形成之遮光膜係有用於作為彩色濾光片、液晶投影用黑矩陣、遮光膜、觸控面板用遮光膜等者。 The photosensitive resin composition of the present invention is suitable for forming a fine pattern by an operation such as exposure or alkali development as described above. Further, the photosensitive resin composition for a light-shielding film of the present invention can be suitably used as a coating material, and is particularly suitable for use in a color filter ink for a liquid crystal display device or a photographic element, whereby a light-shielding film formed is useful. It is used as a color filter, a black matrix for liquid crystal projection, a light-shielding film, and a light-shielding film for a touch panel.

本發明之遮光膜用感光性樹脂組成物係維持高精細度、高遮光,且形成例如線寬為5μm左右之細線時亦可充分確保顯影附著性,而且,與玻璃基板之附著性亦優異。 In the photosensitive resin composition for a light-shielding film of the present invention, high-definition and high light-shielding are maintained, and when a fine line having a line width of about 5 μm is formed, for example, development adhesion can be sufficiently ensured, and adhesion to a glass substrate is also excellent.

以下根據實施例及比較例,具體說明本發明之實施形態,但本發明並不限制於此等。 Hereinafter, embodiments of the present invention will be specifically described based on examples and comparative examples, but the present invention is not limited thereto.

(實施例) (Example)

首先,說明本發明之(A)含有聚合性不飽和基之鹼可溶性樹脂之合成例1。合成例中之樹脂之評估係以下述方式進行。 First, Synthesis Example 1 of the (A) alkali-soluble resin containing a polymerizable unsaturated group of the present invention will be described. The evaluation of the resin in the synthesis example was carried out in the following manner.

[固形成分濃度] [solid component concentration]

將合成例中得到之樹脂溶液1g含浸於玻璃過濾器[重量:W0(g)]而秤取[W1(g)],藉由下式求得於160℃加熱2小時後之重量[W2(g)]。 1 g of the resin solution obtained in the synthesis example was impregnated into a glass filter [weight: W 0 (g)], and [W 1 (g)] was weighed, and the weight after heating at 160 ° C for 2 hours was obtained by the following formula [ W 2 (g)].

固形成分濃度(重量%)=100×(W2-W0)/(W1-W0)。 Solid component concentration (% by weight) = 100 × (W 2 - W 0 ) / (W 1 - W 0 ).

[酸價] [acid price]

將樹脂溶液溶解於二烷,使用電位差滴定裝置[平沼製作所股份有限公司製 商品名COM-1600]以1/10N-KOH水溶液來滴定而求得。 Dissolve the resin solution in two The alkane was obtained by titration with a 1/10 N-KOH aqueous solution using a potentiometric titration apparatus [trade name: COM-1600, manufactured by Hiroshima Seisakusho Co., Ltd.].

[分子量] [molecular weight]

以凝膠滲透層析儀(GPC)[Tosoh股份有限公司製 商品名HLC-8220GPC,溶媒:四氫呋喃,管柱: TSKgelSuperH-2000(2根)+TSKgelSuperH-3000(1根)+TSKgelSuperH-4000(1根)+TSKgelSuper-H5000(1根)[Tosoh股份有限公司製],溫度:40℃,速度:0.6ml/分鐘]測定,以標準聚苯乙烯[Tosoh股份有限公司製PS-低聚物套組]換算值求得重量平均分子量(Mw)。 By gel permeation chromatography (GPC) [Tosoh Corporation, trade name HLC-8220GPC, solvent: tetrahydrofuran, column: TSKgel SuperH-2000 (2 pieces) + TSKgel SuperH-3000 (1 piece) + TSKgel SuperH-4000 (1 piece) + TSKgel Super-H5000 (1 piece) [Tosoh Co., Ltd.], temperature: 40 ° C, speed: 0.6 ml / minute The measurement was carried out to obtain a weight average molecular weight (Mw) in terms of a standard polystyrene [PS-Eligomer Set made by Tosoh Co., Ltd.].

又,合成例及比較合成例中所使用之縮寫係如下所述。 Further, the abbreviations used in the synthesis examples and the comparative synthesis examples are as follows.

BPFE:9,9-雙(4-羥基苯基)茀與1-氯-2,3-1環氧丙烷(chloromethyloxirane)之反應物。通式(V)之化合物中,X係茀-9,9-二基,R6、R7係氫原子之化合物。 BPFE: a reaction of 9,9-bis(4-hydroxyphenyl)fluorene with 1-chloro-2,3-1 chloromethyloxirane. Among the compounds of the formula (V), a compound wherein X is a hydrazone-9,9-diyl group, and R 6 and R 7 are a hydrogen atom.

BPDA:3,3’,4,4’-聯苯四羧酸二酐 BPDA: 3,3',4,4'-biphenyltetracarboxylic dianhydride

THPA:1,2,3,6-四氫酞酸酐 THPA: 1,2,3,6-tetrahydrophthalic anhydride

TPP:三苯膦 TPP: triphenylphosphine

PGMEA:丙二醇單甲醚乙酸酯 PGMEA: propylene glycol monomethyl ether acetate

[合成例1] [Synthesis Example 1]

於附有回流冷卻器之500ml四口燒瓶中,加入BPFE 78.63g(0.17mol)、丙烯酸24.50g(0.34mol)、TPP 0.45g及PGMEA 114g,於100至105℃之加熱下攪拌12小時而得到反應生成物。 In a 500 ml four-necked flask equipped with a reflux condenser, 78.63 g (0.17 mol) of BPFE, 24.50 g (0.34 mol) of acrylic acid, 0.45 g of TPP and 114 g of PGMEA were added, and the mixture was stirred under heating at 100 to 105 ° C for 12 hours. Reaction product.

接著,於得到之反應生成物加入BPDA 25.01g(0.085mol)及THPA 12.93g(0.085mol),於120至125℃之加熱下攪拌6小時而得到含有聚合性不飽和基之鹼可溶性樹脂溶液(A)-1。所得到之樹脂溶液之固形成分濃度係 55.8wt%,酸價(以固形成分換算)係103mgKOH/g,GPC分析所得之Mw係2600。 Next, BPDA 25.01 g (0.085 mol) and THPA 12.93 g (0.085 mol) were added to the obtained reaction product, and the mixture was stirred under heating at 120 to 125 ° C for 6 hours to obtain an alkali-soluble resin solution containing a polymerizable unsaturated group ( A)-1. Solid component concentration system of the obtained resin solution 55.8 wt%, the acid value (calculated as solid content) was 103 mgKOH/g, and the Mw system obtained by GPC analysis was 2600.

[比較合成例1] [Comparative Synthesis Example 1]

於附有氮氣導入管及回流管之1000ml四口燒瓶中加入甲基丙烯酸51.65g(0.60mol)、甲基丙烯酸甲酯38.44g(0.38mol)、甲基丙烯酸環己酯36.33g(0.22mol)、AIBN 5.91g及DMDG 368g,於80至85℃之氮氣氣流下,攪拌8小時使其聚合。進一步,於燒瓶內添加甲基丙烯酸環氧丙酯39.23g(0.28mol)、TPP 1.44g、2,6-二-三級丁基-對甲酚(2,6-di-tert-butyl-p-cresol)0.055g,於80至85℃攪拌16小時,得到含有聚合性不飽和基之鹼可溶性樹脂溶液(A)-2。所得到之含有聚合性不飽和基之鹼可溶性樹脂之固形成分濃度係32質量%,酸價(以固形成分換算)係110mgKOH/g,GPC分析所得之Mw係18080。 51.65 g (0.60 mol) of methacrylic acid, 38.44 g (0.38 mol) of methyl methacrylate, and 36.33 g (0.22 mol) of cyclohexyl methacrylate were added to a 1000 ml four-necked flask equipped with a nitrogen inlet tube and a reflux tube. AIBN 5.91g and DMDG 368g were stirred under a nitrogen gas flow of 80 to 85 ° C for 8 hours to polymerize. Further, 39.23 g (0.28 mol) of glycidyl methacrylate, 1.42 g of TPP, and 2,6-di-tert-butyl-p-cresol (2,6-di-tert-butyl-p) were added to the flask. -cresol) 0.055 g, and stirred at 80 to 85 ° C for 16 hours to obtain an alkali-soluble resin solution (A)-2 containing a polymerizable unsaturated group. The solid content concentration of the obtained alkali-soluble resin containing a polymerizable unsaturated group was 32% by mass, the acid value (in terms of solid content) was 110 mgKOH/g, and the Mw system obtained by GPC analysis was 18080.

其次,說明(C)通式(I)所表示之光聚合起始劑之合成例2至4。 Next, (C) Synthesis Examples 2 to 4 of the photopolymerization initiator represented by the formula (I) will be explained.

[合成例2] [Synthesis Example 2]

進行下述6個步驟之反應,合成結構式(IV)之化合物。 The reaction of the following six steps is carried out to synthesize a compound of the formula (IV).

步驟1:11H-苯并[a]咔唑(結構式(VI))之合成 Step 1:11 Synthesis of H-benzo[a]carbazole (Structure (VI))

將苯肼16.22g(0.18mol)與α-四氫萘酮26.89g(0.18mol)於400ml乙醇中在濃鹽酸18ml存在下加熱,於回流狀態下反應4小時。將反應溶液以蒸發器去除乙醇,以環己烷/甲苯(50/50)使其再結晶,藉此得到反應生成物38.25g。將此反應物30.82g(0.14mol)溶解於二甲苯240ml,添加5%Pd/C 9.23g作為觸媒,並加熱,於回流狀態下反應1小時。冷卻反應液,加入乙酸乙酯240ml,以矽藻土過濾觸媒等之後,以蒸發器將溶劑餾除而使結晶析出。將其過濾而得到白色之固體化合物24.64g。得到之化合物以1H-NMR確認,為結構式(VI)之化合物。 16.22 g (0.18 mol) of phenylhydrazine and 26.89 g (0.18 mol) of α-tetralone were heated in 400 ml of ethanol in 18 ml of concentrated hydrochloric acid, and reacted under reflux for 4 hours. The reaction solution was removed by ethanol in an evaporator, and recrystallized from cyclohexane/toluene (50/50), whereby 38.25 g of a reaction product was obtained. 30.82 g (0.14 mol) of this reaction product was dissolved in 240 ml of xylene, and 9.23 g of 5% Pd/C was added as a catalyst, and it heated, and it was set on the refluxing state for 1 hour. The reaction liquid was cooled, and 240 ml of ethyl acetate was added thereto, and the catalyst was filtered with diatomaceous earth, and then the solvent was distilled off by an evaporator to precipitate crystals. This was filtered to give 24.64 g of a white solid compound. The obtained compound was confirmed by 1 H-NMR to be a compound of the formula (VI).

1H-NMR頻譜(CDCl3中):δ(ppm)=7.30-7.70(m,6H),8.00-8.20(m,4H),8.80(br,1H) 1H-NMR spectrum (in CDCl3): δ (ppm) = 7.30-7.70 (m, 6H), 8.00-8.20 (m, 4H), 8.80 (br, 1H)

步驟2:11-(2-乙基己基)-11H-苯并[a]咔唑(結構式(VII))之合成 Step 2: Synthesis of 11-(2-ethylhexyl)-11H-benzo[a]carbazole (Structure (VII))

將11H-苯并[a]咔唑(結構式(VI))21.72g(0.10mol)溶解於DMF 100mL,以冰浴冷卻至0℃後,添加氫化鈉4.04g(0.101mol)並保持1小時。其後,添加1-溴-2-乙基已烷27.04g(0.14mol),保持30分鐘後,移除冰浴而溫度回到室溫後,使其反應一晚。將反應液注入於冰水,使反應停止後,以乙酸乙酯萃取2次,收集有機相,以純水及飽和食鹽水洗淨,添加硫酸鎂,使其乾燥後,以蒸發器去除有機溶劑,藉此得到黃色液狀之粗產物33.23g。不精製所得到之粗產物而用於下一個反應。所得到之粗產物以1H-NMR鑑別結構,確認為結構式(VII)之化合物。 11H-benzo[a]carbazole (structural formula (VI)) 21.72 g (0.10 mol) was dissolved in DMF 100 mL, and cooled to 0 ° C in an ice bath, then sodium hydride 4.04 g (0.101 mol) was added and kept for 1 hour. . Thereafter, 27.04 g (0.14 mol) of 1-bromo-2-ethylhexane was added, and after maintaining for 30 minutes, the ice bath was removed and the temperature was returned to room temperature, and then allowed to react overnight. The reaction solution was poured into ice water to stop the reaction, and the mixture was extracted twice with ethyl acetate. The organic phase was collected, washed with pure water and saturated brine, and then dried over magnesium sulfate. Thus, 33.23 g of a crude product in the form of a yellow liquid was obtained. The obtained crude product was not purified and used in the next reaction. The obtained crude product was identified by 1H-NMR to confirm the compound of the formula (VII).

1H-NMR頻譜(CDCl3):δ(ppm)=0.80-0.92(m,6H),1.16-1.47(m,8H),2.27(m,1H),4.65-4.69(m,2H),7.27(td,1H),7.44-7.59(m,4H),7.66(d,1H),8.02(d,1H),8.14(d,1H),8.18(d,1H),8.54(d,1H) 1H-NMR spectrum (CDCl3): δ (ppm) = 0.80-0.92 (m, 6H), 1.16-1.47 (m, 8H), 2.27 (m, 1H), 4.65-4.69 (m, 2H), 7.27 (td) , 1H), 7.44 - 7.59 (m, 4H), 7.66 (d, 1H), 8.02 (d, 1H), 8.14 (d, 1H), 8.18 (d, 1H), 8.54 (d, 1H)

步驟3:1-[11-(2-乙基己基)-8-(2-氟苯甲醯基)-11H-苯并[a]咔唑-5-基]-(2,4,6-三甲基苯)-甲酮(結構式(VIII))之合成 Step 3: 1-[11-(2-Ethylhexyl)-8-(2-fluorobenzhydryl)-11H-benzo[a]oxazol-5-yl]-(2,4,6- Synthesis of trimethylbenzene)-methanone (structural formula (VIII))

將結構式(VII)之化合物19.83g(60mmol)溶解於二氯甲烷(200mL),以冰浴冷卻至0℃,保持30分鐘後添加2,4,6-三甲基苯甲醯氯11.51g(63mmol)及氯化鋁8.4g(63mmol),其後移除冰浴,回復到室溫使其反應2小時。2小時後再次以冰浴冷卻至0℃後,加入氯化鋁8.4g(63mmol),藉由滴定漏斗以2小時滴入2-氟苯甲醯氯9.99g(63mmol)。滴入結束後,移除冰浴,回復到室溫,使其於室溫下反應3小時。將反應液注入至冰水,使反應停止後,以二氯甲烷進行萃取2次,收集有機相,以純水及飽和食鹽水洗淨,添加硫酸鎂使其乾燥。其後,加入正己烷800mL,與二氯甲烷同時去除/濃縮,藉此使米白色之固體物質析出。將之過濾,以正己烷洗淨、並乾燥,得到米白色之固體34.39g。得到之化合物係以1H-及19F-NMR來鑑別結構,確認為結構式(VIII)之化合物。 19.83 g (60 mmol) of the compound of the formula (VII) was dissolved in dichloromethane (200 mL), cooled to 0 ° C in an ice bath, and kept for a period of 30 minutes, then added 2,4,6-trimethylbenzhydryl chloride 11.51 g (63 mmol) and 8.4 g (63 mmol) of aluminum chloride were then removed from the ice bath and allowed to react to room temperature for 2 hours. After cooling to 0 ° C again in an ice bath after 2 hours, 8.4 g (63 mmol) of aluminum chloride was added, and 9.3 g (63 mmol) of 2-fluorobenzhydryl chloride was added dropwise over 2 hours through a titration funnel. After the completion of the dropwise addition, the ice bath was removed, returned to room temperature, and allowed to react at room temperature for 3 hours. The reaction solution was poured into ice water, and after the reaction was stopped, the mixture was extracted twice with dichloromethane, and the organic phase was collected, washed with pure water and saturated brine, and dried over magnesium sulfate. Thereafter, 800 mL of n-hexane was added and simultaneously removed/concentrated with dichloromethane to precipitate a white solid substance. This was filtered, washed with n-hexane and dried to give a white solid. The obtained compound was identified by 1H- and 19F-NMR to confirm the compound of the formula (VIII).

1H-NMR頻譜(CDCl3):δ(ppm)=0.84(t),0.89(t),1.18-1.42(m),2.20(s),2.28-2.31(m),2.40(s),4.72-4.76(m), 6.96(s),7.19(t),7.29(t),7.52-7.60(m),7.70-7.84(m),8.38(s),8.63-8.66(m),9.56(d) 1H-NMR spectrum (CDCl3): δ (ppm) = 0.84 (t), 0.89 (t), 1.18-1.42 (m), 2.20 (s), 2.28-2.31 (m), 2.40 (s), 4.72-4.76 (m), 6.96(s), 7.19(t), 7.29(t), 7.52-7.60(m), 7.70-7.84(m), 8.38(s), 8.63-8.66(m), 9.56(d)

19F-NMR頻譜(CDCl3):δ(ppm)=-111.58 19F-NMR spectrum (CDCl3): δ (ppm) = -111.58

步驟4:1-[11-(2-乙基己基)-8-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑-5-基]-[4-(2,2,3,3-四氟丙氧基)-苯基]-甲酮(結構式(IX))之合成 Step 4: 1-[11-(2-Ethylhexyl)-8-(2,4,6-trimethylbenzylidene)-11H-benzo[a]indazol-5-yl]-[ Synthesis of 4-(2,2,3,3-tetrafluoropropoxy)-phenyl]-methanone (Structure (IX))

將結構式(VIII)之化合物29.94g(50mmol)溶解於吡啶(100mL),加入2,2,3,3-四氟1-丙醇9.9g(75mmol)與氫氧化鈉3.0g(75mmol),於70℃攪拌一晚。於預定之反應時間後,冷卻至室溫,注入至純水,以乙酸乙酯萃取,以純水及飽和食鹽水洗淨。添加硫酸鎂、乾燥後,濃縮,將得到之粗產物以使用二氯甲烷為溶析液之矽膠管柱層析精製,藉此得到白色固體18.13g。得到之化合物以1H-及19F-NMR來鑑別結構,確認為結構式(IX)之化合物。 29.94 g (50 mmol) of the compound of the formula (VIII) was dissolved in pyridine (100 mL), and 2.9 g (75 mmol) of 2,2,3,3-tetrafluoro 1-propanol and 3.0 g (75 mmol) of sodium hydroxide were added. Stir at 70 ° C for one night. After the predetermined reaction time, it was cooled to room temperature, poured into pure water, extracted with ethyl acetate, and washed with pure water and saturated brine. After adding magnesium sulfate, drying, and concentrating, the obtained crude product was purified by a silica gel column chromatography using methylene chloride as a solvent, whereby 18.13 g of a white solid was obtained. The obtained compound was identified by 1H- and 19F-NMR to confirm the compound of the formula (IX).

1H-NMR頻譜(CDCl3):δ(ppm)=0.82(t),0.87(t), 1.16-1.56(m),2.19(s),2.26-2.29(m),2.39(s),4.30-4.34(t),4.65-4.77(m),5.35-5.60(m),6.95(s),7.15-7.20(m),7.29(t),7.52-7.60(m),7.70-7.77(m),8.63-8.66(m),9.56(d) 1H-NMR spectrum (CDCl3): δ (ppm) = 0.82 (t), 0.87 (t), 1.16-1.56(m), 2.19(s), 2.26-2.29(m), 2.39(s), 4.30-4.34(t), 4.65-4.77(m), 5.35-5.60(m), 6.95(s), 7.15-7.20(m), 7.29(t), 7.52-7.60(m), 7.70-7.77(m), 8.63-8.66(m), 9.56(d)

19F-NMR頻譜(CDCl3):δ(ppm)=-140.92,-126.30 19F-NMR spectrum (CDCl3): δ (ppm) = -140.92, -126.30

步驟5:1-[11-(2-乙基己基)-8-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑-5-基]-[4-(2,2,3,3-四氟丙氧基)-苯基]-甲酮 肟(結構式(X))之合成 Step 5: 1-[11-(2-Ethylhexyl)-8-(2,4,6-trimethylbenzylidene)-11H-benzo[a]indazol-5-yl]-[ Synthesis of 4-(2,2,3,3-tetrafluoropropoxy)-phenyl]-methanone oxime (Structure (X))

將結構式(IX)之化合物14.22g(20mmol)溶解於吡啶(100mL)後,加入鹽酸羥胺0.67g(21mmol)。其後,升溫至130℃使其反應6小時。反應結束後,冷卻至室溫,再將反應液注入至純水,以二氯甲烷萃取,收集有機相,以純水及飽和食鹽水洗淨後,添加硫酸鎂使其乾燥。其後,藉由以蒸發器來濃縮而得到淡黃色之固狀物13.06g。得到之化合物以1H-及19F-NMR來鑑別結構,確認為結構式(X)之化合物。 After dissolving 14.22 g (20 mmol) of the compound of the formula (IX) in pyridine (100 mL), 0.67 g (21 mmol) of hydroxylamine hydrochloride was added. Thereafter, the temperature was raised to 130 ° C to carry out a reaction for 6 hours. After completion of the reaction, the mixture was cooled to room temperature, and the reaction mixture was poured into pure water and extracted with dichloromethane. The organic phase was collected, washed with purified water and saturated brine, and then dried over magnesium sulfate. Thereafter, 13.06 g of a pale yellow solid was obtained by concentration with an evaporator. The obtained compound was identified by 1H- and 19F-NMR to confirm the compound of the formula (X).

1H-NMR頻譜(CDCl3):δ(ppm)=0.82(t),0.87(t), 1.16-1.56(m),2.19(s),2.26-2.29(m),2.39(s),4.25-4.30(t),4.65-4.77(m),5.30-5.55(m),6.95(s),7.10(d),7.15-7.20(m),7.45-7.60(m),7.70-7.77(m),8.42-8.66(m),9.56(d) 1H-NMR spectrum (CDCl3): δ (ppm) = 0.82 (t), 0.87 (t), 1.16-1.56(m), 2.19(s), 2.26-2.29(m), 2.39(s), 4.25-4.30(t), 4.65-4.77(m), 5.30-5.55(m), 6.95(s), 7.10(d), 7.15-7.20(m), 7.45-7.60(m), 7.70-7.77(m), 8.42-8.66(m), 9.56(d)

19F-NMR頻譜(CDCl3):δ(ppm)=-140.92,-126.30 19F-NMR spectrum (CDCl3): δ (ppm) = -140.92, -126.30

步驟6:1-[11-(2-乙基己基)-8-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑-5-基]-[4-(2,2,3,3-四氟丙氧基)-苯基]-甲酮 肟 O-乙酸酯(結構式(IV))之合成 Step 6: 1-[11-(2-Ethylhexyl)-8-(2,4,6-trimethylbenzylidene)-11H-benzo[a]indazol-5-yl]-[ Synthesis of 4-(2,2,3,3-tetrafluoropropoxy)-phenyl]-methanone O-acetate (Structure (IV))

將結構式(X)之化合物7.26g(10mmol)溶解於乙酸乙酯(150mL)後,以冰浴冷卻至0℃,依序添加三乙胺3.04g(30mmol)、乙醯氯2.35g(30mmol)。添加後,使其反應2.5小時後,將反應液注入至純水,以乙酸乙酯萃取,收集有機相,以純水及飽和食鹽水洗淨後,添加硫酸鎂使其乾燥。乾燥後,去除溶劑,得到淡黃至白色之固狀物7.03g。得到之化合物以1H-及19F-NMR來鑑別結構,確認為結構式(IV)之化合物。 After dissolving 7.26 g (10 mmol) of the compound of the formula (X) in ethyl acetate (150 mL), the mixture was cooled to 0 ° C in an ice bath, and then, to the mixture, triethylamine 3.04 g (30 mmol) and acetonitrile chloride 2.35 g (30 mmol). ). After the addition, the reaction mixture was poured into pure water, and extracted with ethyl acetate. The organic phase was collected, washed with pure water and saturated brine, and then dried over magnesium sulfate. After drying, the solvent was removed to give a pale yellow to white solid, 7.03 g. The obtained compound was identified by 1H- and 19F-NMR to confirm the compound of the formula (IV).

1H-NMR頻譜(CDCl3):δ(ppm)=0.82(t),0.87(t),1.16-1.56(m),2.05(s),2.19(s),2.26-2.29(m),2.39(s),4.30-4.34(t),4.65-4.77(m),5.39-5.65(tt),6.95(s),7.01(d),7.15-7.20(m),7.39(d),7.46-7.53(m),7.70-7.77(m),8.35(s),8.42(s),8.63(d),9.56(d) 1H-NMR spectrum (CDCl3): δ (ppm) = 0.82 (t), 0.87 (t), 1.16-1.56 (m), 2.05 (s), 2.19 (s), 2.26-2.29 (m), 2.39 (s) ), 4.30-4.34(t), 4.65-4.77(m), 5.39-5.65(tt), 6.95(s), 7.01(d), 7.15-7.20(m), 7.39(d), 7.46-7.53(m) ), 7.70-7.77(m), 8.35(s), 8.42(s), 8.63(d), 9.56(d)

19F-NMR頻譜(CDCl3):δ(ppm)=-140.66,-126.32 19F-NMR spectrum (CDCl3): δ (ppm) = -140.66, -126.32

[合成例3] [Synthesis Example 3]

使用於合成例2之步驟2所得到之結構式(VII)之化合物,進行下述步驟3以後之反應,合成通式(I)之化合物之一之結構式(XII)之化合物。 Using the compound of the formula (VII) obtained in the second step of Synthesis Example 2, the reaction of the following step 3 and subsequent steps is carried out to synthesize a compound of the formula (XII) which is one of the compounds of the formula (I).

步驟3:1-[11-(2-乙基己基)-5-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑8-基]-乙酮(結構式(XI))之合成 Step 3: 1-[11-(2-Ethylhexyl)-5-(2,4,6-trimethylbenzylidene)-11H-benzo[a]carbazole-8-yl]-ethanone Synthesis of (Structure (XI))

將結構式(VII)之化合物(4.18g;12.6mmol)溶解於二氯甲烷(40mL),以冰浴冷卻至0℃,保持30分鐘後,添加2,4,6-三甲基苯甲醯氯(2.38g;13.0mmol)及氯化鋁(1.77g;13.3mmol),其後,移除冰浴回復到室溫,使其反應2小時。其後,再次以冰浴冷卻至0℃後,加入氯化鋁(1.77g;13.3mmol),藉由滴定漏斗以30分鐘滴入乙醯氯(1.02g;13.0mmol)。滴入結束後,移除冰浴回復到室溫,於室溫下使其反應3小時。 The compound of the formula (VII) (4.18 g; 12.6 mmol) was dissolved in dichloromethane (40 mL) and cooled to 0 ° C in an ice bath, and then, after being kept for 30 minutes, 2,4,6-trimethylbenzhydrazide was added. Chlorine (2.38 g; 13.0 mmol) and aluminum chloride (1.77 g; 13.3 mmol) were added, and then the ice bath was removed and returned to room temperature, and allowed to react for 2 hours. Thereafter, after cooling again to 0 ° C in an ice bath, aluminum chloride (1.77 g; 13.3 mmol) was added, and toluene chloride (1.02 g; 13.0 mmol) was added dropwise over 30 minutes through a titration funnel. After the completion of the dropwise addition, the ice bath was removed and returned to room temperature, and allowed to react at room temperature for 3 hours.

將反應液注入至冰水,使反應停止後,以二氯甲烷進行萃取2次,收集有機層,以純水及飽和食鹽水洗淨,以硫酸鎂使其乾燥。其後,加入正己烷230mL,與二氯甲烷同時去除/濃縮,藉此使米白色之固體物質析出。 The reaction solution was poured into ice water to stop the reaction, and the mixture was extracted twice with dichloromethane. The organic layer was collected, washed with purified water and brine, and dried over magnesium sulfate. Thereafter, 230 mL of n-hexane was added and simultaneously removed/concentrated with dichloromethane to precipitate a white solid substance.

將其過濾,以正己烷洗淨,使其乾燥,藉此得到米白色之固體物質(產量4.91g;產率75.0%)。 This was filtered, washed with n-hexane and dried to give a white solid material (yield: 4.91 g; yield: 75.0%).

得到之化合物係以1H-NMR鑑別結構。 The obtained compound was identified by 1 H-NMR.

1H-NMR頻譜(CDCl3)δ(ppm):0.82(t),0.90(t),1.18-1.45(m),2.20(s),2.29-2.30(m),2.41(s),2.72(s),4.74-4.77(m),6.98(s),7.58(d),7.70-7.79(m),8.10(dd),8.39(s),8.60(d),8.64(d),9.53(d). 1 H-NMR spectrum (CDCl 3 ) δ (ppm): 0.82 (t), 0.90 (t), 1.18-1.45 (m), 2.20 (s), 2.29-2.30 (m), 2.41 (s), 2.72 ( s), 4.74 - 4.77 (m), 6.98 (s), 7.58 (d), 7.70 - 7.79 (m), 8.10 (dd), 8.39 (s), 8.60 (d), 8.64 (d), 9.53 (d) ).

步驟4:1-[11-(2-乙基己基)-5-(2,4,6-三甲基苯甲醯基)-11H-苯并[a]咔唑-8-基]-乙酮 肟 O-乙酸酯(結構式(XII))之合成 Step 4: 1-[11-(2-Ethylhexyl)-5-(2,4,6-trimethylbenzylidene)-11H-benzo[a]carbazol-8-yl]-B Synthesis of ketooxime O-acetate (structural formula (XII))

將結構式(X1)之化合物(4.91g;9.49mmol)溶解於甲苯(10mL)及吡啶(2mL)後,升溫至80℃,加入乙酸鈉(0.82g;10.0mmol)、鹽酸羥胺(0.69g;10.0mmol),於100℃攪拌一晚。其後,以冰浴冷卻至0℃,加入三乙胺(2.88g;28.5mmol)及乙醯氯(0.77g;9.8mmol)後,回復到室溫使其反應2小時。其後,將反應液注入至純水,以甲苯萃取,收集有機 相後,以純水及飽和食鹽水洗淨。洗淨液係使用硫酸鎂使其乾燥後濃縮,以三級丁基甲基醚洗淨粗產物,藉此得到白色固體(產量3.30g,產率60.5%)。 After dissolving the compound of the formula (X1) (4.91 g; 9.49 mmol) in toluene (10 mL) and pyridine (2 mL), the mixture was heated to 80 ° C, and sodium acetate (0.82 g; 10.0 mmol) and hydroxylamine hydrochloride (0.69 g; 10.0 mmol), stirred at 100 ° C for one night. Thereafter, the mixture was cooled to 0 ° C in an ice bath, and then triethylamine (2.88 g; 28.5 mmol) and acetonitrile (0.77 g; 9.8 mmol) were added, and the mixture was allowed to react at room temperature for 2 hours. Thereafter, the reaction solution was poured into pure water, extracted with toluene, and organic was collected. After washing, wash with pure water and saturated saline. The washing liquid was dried over magnesium sulfate and concentrated, and the crude product was washed with tri-butyl butyl ether to give a white solid (yield: 3.30 g, yield: 60.5%).

得到之化合物係以1H-NMR鑑別結構。 The obtained compound was identified by 1 H-NMR.

1H-NMR頻譜(CDCl3)δ(ppm):0.82(t),0.87(t),1.19-1.39(m),2.26(s),2.27-2.30(m),2.29(s),2.39(s),2.50(s),4.72-4.76(m),6.96(s),7.16-7.18(m),7.24-7.27(m),7.57(d),7.69-7.77(m),7.87(dd),8.31(s),8.38(s),8.64(d),9.53(d). 1 H-NMR spectrum (CDCl 3 ) δ (ppm): 0.82 (t), 0.87 (t), 1.19-1.39 (m), 2.26 (s), 2.27-2.30 (m), 2.29 (s), 2.39 ( s), 2.50 (s), 4.72-4.76 (m), 6.96 (s), 7.16-7.18 (m), 7.24-7.27 (m), 7.57 (d), 7.69-7.77 (m), 7.87 (dd) , 8.31(s), 8.38(s), 8.64(d), 9.53(d).

[合成例4] [Synthesis Example 4]

使用合成例2之步驟2中所得到之結構式(VII)之化合物,進行下述步驟3以後之反應,合成通式(I)之化合物之一之結構式(XV)之化合物。 The compound of the formula (VII) obtained in the second step of Synthesis Example 2 is subjected to the reaction of the following step 3 to synthesize a compound of the formula (XV) which is one of the compounds of the formula (I).

步驟3:1-[11-(2-乙基己基)-8-(2-乙氧基苯甲醯基)-11H-苯并[a]咔唑-5-基]-(2,4,6-三甲基苯)-甲酮(結構式(XIII))之合成 Step 3: 1-[11-(2-Ethylhexyl)-8-(2-ethoxybenzhydryl)-11H-benzo[a]oxazol-5-yl]-(2,4, Synthesis of 6-trimethylbenzene)-methanone (structural formula (XIII))

將結構式(VII)之化合物(4.18g;12.6mmol)溶解於二氯 甲烷(40mL),以冰浴冷卻至0℃,保持30分鐘後添加2,4,6-三甲基苯甲醯氯(2.38g;13.0mmol)及氯化鋁(1.77g;13.3mmol),其後,移除冰浴回復到室溫後,使其反應2小時。其後,再次以冰浴冷卻至0℃後,加入氯化鋁(1.77g;13.3mmol),藉由滴定漏斗以30分鐘滴入2-乙氧基苯甲醯氯(2.41g;13.0mmol)。滴入結束後,移除冰浴回復到室溫,於室溫下使其反應3小時。 The compound of formula (VII) (4.18 g; 12.6 mmol) was dissolved in dichloro Methane (40 mL) was cooled to 0 ° C in an ice-bath, and then, for 30 minutes, 2,4,6-trimethylbenzhydrin chloride (2.38 g; 13.0 mmol) and aluminum chloride (1.77 g; 13.3 mmol) were added. Thereafter, after removing the ice bath and returning to room temperature, it was allowed to react for 2 hours. Thereafter, after cooling again to 0 ° C in an ice bath, aluminum chloride (1.77 g; 13.3 mmol) was added, and 2-ethoxybenzylguanidinium chloride (2.41 g; 13.0 mmol) was added dropwise thereto over 30 minutes through a titration funnel. . After the completion of the dropwise addition, the ice bath was removed and returned to room temperature, and allowed to react at room temperature for 3 hours.

將反應液注入至冰水,使反應停止後,以二氯甲烷進行2次萃取,收集有機層,以純水及飽和食鹽水洗淨,以硫酸鎂使其乾燥。其後,加入正己烷230mL,與二氯甲烷同時去除/濃縮,藉此使米白色之固體物質析出。 The reaction solution was poured into ice water to stop the reaction, and the mixture was extracted twice with dichloromethane. The organic layer was collected, washed with purified water and brine, and dried over magnesium sulfate. Thereafter, 230 mL of n-hexane was added and simultaneously removed/concentrated with dichloromethane to precipitate a white solid substance.

將其過濾,以正己烷洗淨,使其乾燥,藉此得到米白色之固體物質(產量4.71g;產率72.0%)。 This was filtered, washed with n-hexane and dried to give a white solid material (yield: 4.71 g; yield: 72.0%).

得到之化合物係以1H-NMR鑑別結構。 The obtained compound was identified by 1 H-NMR.

1H-NMR頻譜(CDCl3)δ(ppm):0.78-0.90(m),1.15-1.42(m),2.06(s)2.07(s),2.18(s),2.19(s),2.22-2.32(m),2.38(s),2.39(s),3.74(q),4.00(q),4.69-4.76(m),6.84(d),6.94(s),7.00-7.05(m),7.42-7.51(m),7.28(d),7.67-7.76(m),8.20(s),8.30(s),8.36-8.40(m),8.62(d),9.54(d),9.60(d). 1 H-NMR spectrum (CDCl 3 ) δ (ppm): 0.78-0.90 (m), 1.15 - 1.42 (m), 2.06 (s) 2.07 (s), 2.18 (s), 2.19 (s), 2.22 - 2.32 (m), 2.38(s), 2.39(s), 3.74(q), 4.00(q), 4.69-4.76(m), 6.84(d), 6.94(s), 7.00-7.05(m),7.42- 7.51(m), 7.28(d), 7.67-7.76(m), 8.20(s), 8.30(s), 8.36-8.40(m), 8.62(d), 9.54(d), 9.60(d).

步驟4:1-[11-(2-乙基己基)-8-(2-乙氧基苯甲醯基)-11H-苯并[a]咔唑-5-基]-(2,4,6-三甲基苯)-甲酮 肟(結構式(XIV))之合成 Step 4: 1-[11-(2-Ethylhexyl)-8-(2-ethoxybenzhydryl)-11H-benzo[a]oxazol-5-yl]-(2,4, Synthesis of 6-trimethylbenzene)-methanone (Structure (XIV))

將結構式(XIII)之化合物(4.71g;9.11mmol)溶解於吡啶(5mL)後,加入鹽酸羥胺(0.76g;10.9mmol),於130℃使其反應6小時。反應結束後,冷卻至室溫,再將反應液注入至純水,以二氯甲烷萃取,收集有機相,以純水及飽和食鹽水洗淨後,以硫酸鎂使其乾燥。其後,以蒸發器濃縮,藉此得到淡黃色之固狀物(產量4.85g,產率90.6%)。 After dissolving the compound of the formula (XIII) (4.71 g; 9.11 mmol) in pyridine (5 mL), hydroxylamine hydrochloride (0.76 g; 10.9 mmol) was added and allowed to react at 130 ° C for 6 hours. After completion of the reaction, the mixture was cooled to room temperature, and the reaction mixture was poured into pure water, and extracted with dichloromethane. The organic phase was collected, washed with purified water and saturated brine, and dried over magnesium sulfate. Thereafter, it was concentrated by an evaporator, whereby a pale yellow solid (yield: 4.85 g, yield: 90.6%) was obtained.

得到之化合物係以1H-NMR鑑別結構。 The obtained compound was identified by 1 H-NMR.

1H-NMR頻譜(CDCl3)δ(ppm):0.78-0.90(m),1.15-1.42(m),2.06(s)2.07(s),2.18(s),2.19(s),2.22-2.32(m),2.38(s),2.39(s),3.74(q),4.00(q),4.69-4.76(m),6.84(d),6.94(s),7.00-7.05(m),7.42-7.51(m),7.44(d),7.67-7.76(m),8.20(s),8.30(s),8.36(s),8.52(s),8.62(d),9.54(d),9.60(d). 1 H-NMR spectrum (CDCl 3 ) δ (ppm): 0.78-0.90 (m), 1.15 - 1.42 (m), 2.06 (s) 2.07 (s), 2.18 (s), 2.19 (s), 2.22 - 2.32 (m), 2.38(s), 2.39(s), 3.74(q), 4.00(q), 4.69-4.76(m), 6.84(d), 6.94(s), 7.00-7.05(m),7.42- 7.51(m), 7.44(d), 7.67-7.76(m), 8.20(s), 8.30(s), 8.36(s), 8.52(s), 8.62(d), 9.54(d), 9.60(d) ).

步驟5:1-[11-(2-乙基己基)-8-(2-乙氧基苯甲醯基)-11H-苯并[a]咔唑-5-基]-(2,4,6-三甲基苯)-甲酮 肟 O-乙酸酯(結構式(XV))之合成 Step 5: 1-[11-(2-Ethylhexyl)-8-(2-ethoxybenzhydryl)-11H-benzo[a]oxazol-5-yl]-(2,4, Synthesis of 6-trimethylbenzene)-methanone O-acetate (structural formula (XV))

將結構式(XIV)之化合物(4.85g;9.11mmol)溶解於二氯甲烷(50mL)後,以冰浴冷卻至0℃,依序添加三乙胺(2.76g;27.3mmol)、乙醯氯(0.74g;9.38mmol)。添加後,使其反應2.5小時後,將反應液注入至純水,以乙酸乙酯萃取,收集有機相,以純水及飽和食鹽水洗淨後,以硫酸鎂使其乾燥。乾燥後,使溶劑揮發以得到淡黃至白色之固狀物(產量5.02g,產率96.0%)。 After dissolving the compound of the formula (XIV) (4.85 g; 9.11 mmol) in dichloromethane (50 mL), the mixture was cooled to 0 ° C in an ice bath, and then triethylamine (2.76 g; 27.3 mmol) (0.74 g; 9.38 mmol). After the reaction, the reaction mixture was poured into pure water and extracted with ethyl acetate. The organic phase was collected, washed with purified water and saturated brine, and dried over magnesium sulfate. After drying, the solvent was evaporated to give a pale yellow to white solid (yield: 5.02 g, yield: 96.0%).

得到之化合物係以1H-NMR鑑別結構。 The obtained compound was identified by 1 H-NMR.

1H-NMR頻譜(CDCl3)δ(ppm):0.78-0.90(m),1.15-1.42(m),2.06(s)2.07(s),2.18(s),2.19(s),2.22-2.32(m),2.38(s),2.39(s),3.74(q),4.00(q),4.69-4.76(m),6.84(d),6.94(s),7.00-7.05(m),7.42-7.51(m),7.60(d),7.67-7.76(m),8.20(s),8.30(s),8.36(s),8.45(s),8.62(d),9.54(d),9.60(d). 1 H-NMR spectrum (CDCl 3 ) δ (ppm): 0.78-0.90 (m), 1.15 - 1.42 (m), 2.06 (s) 2.07 (s), 2.18 (s), 2.19 (s), 2.22 - 2.32 (m), 2.38(s), 2.39(s), 3.74(q), 4.00(q), 4.69-4.76(m), 6.84(d), 6.94(s), 7.00-7.05(m),7.42- 7.51(m), 7.60(d), 7.67-7.76(m), 8.20(s), 8.30(s), 8.36(s), 8.45(s), 8.62(d), 9.54(d), 9.60(d) ).

(實施例1至4,比較例1至6) (Examples 1 to 4, Comparative Examples 1 to 6)

其次,根據製造感光性樹脂組成物及其硬化物之實施例及比較例具體說明本發明,但本發明並不限定於此等。 其中,用於後述實施例及比較例之感光性樹脂組成物及其硬化物之製造的原料及縮寫係如下所述。 Next, the present invention will be specifically described based on examples and comparative examples in which a photosensitive resin composition and a cured product thereof are produced, but the present invention is not limited thereto. The raw materials and abbreviations used for the production of the photosensitive resin composition and the cured product of the examples and comparative examples described later are as follows.

(含有聚合性不飽和基之鹼可溶性樹脂) (alkali-soluble resin containing a polymerizable unsaturated group)

(A)-1成分:上述合成例1所得之鹼可溶性樹脂溶液 (A)-1 component: the alkali-soluble resin solution obtained in the above Synthesis Example 1.

(A)-2成分:上述比較合成例1所得之鹼可溶性樹脂溶液 (A)-2 component: the alkali-soluble resin solution obtained in the above Comparative Synthesis Example 1

(光聚合性單體) (photopolymerizable monomer)

(B):季戊四醇四丙烯酸酯(新中村工業股份有限公司製,商品名A-TMMT) (B): Pentaerythritol tetraacrylate (manufactured by Shin-Nakamura Industrial Co., Ltd., trade name A-TMMT)

(光聚合起始劑) (photopolymerization initiator)

(C)-1:上述合成例2所得之式(IV)所表示之化合物 (C)-1: a compound represented by the formula (IV) obtained in the above Synthesis Example 2

(C)-2:上述合成例3所得之式(XII)所表示之化合物 (C)-2: a compound represented by the formula (XII) obtained in the above Synthesis Example 3

(C)-3:上述合成例4所得之式(XV)所表示之化合物 (C)-3: a compound represented by the formula (XV) obtained in the above Synthesis Example 4

(C)-4:乙酮,1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3- 基]-,1-(0-乙醯基肟)(BASF Japan公司製,產品名IRGACURE OXE02) (C)-4: Ethylketone, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-carbazole-3- Base]-, 1-(0-ethenylhydrazine) (manufactured by BASF Japan, product name IRGACURE OXE02)

(遮光性分散顏料) (light-shielding disperse pigment)

(D):碳黑濃度25.0質量%、高分子分散劑濃度5.0質量%之丙二醇單甲醚乙酸酯分散液(固形成分30.0%) (D): a propylene glycol monomethyl ether acetate dispersion having a carbon black concentration of 25.0% by mass and a polymer dispersant concentration of 5.0% by mass (solid content: 30.0%)

(矽烷偶合劑) (decane coupling agent)

(E):3-硫醇基丙基三甲氧基矽烷(商品名:KBM-803:信越化學股份有限公司製) (E): 3-thiol propyl trimethoxy decane (trade name: KBM-803: manufactured by Shin-Etsu Chemical Co., Ltd.)

(溶劑) (solvent)

(F)-1:丙二醇單甲醚乙酸酯(F)-2:環己酮 (F)-1: propylene glycol monomethyl ether acetate (F)-2: cyclohexanone

(界面活性劑) (surfactant)

(G):BYK-330(BYK-Chemie公司製) (G): BYK-330 (BYK-Chemie)

將上述調配成分以表1所示之比例來調配,調製實施例1至4及比較例1至6之感光性樹脂組成物。再者,表1中之數值皆表示質量份。 The above-mentioned compounding components were blended at a ratio shown in Table 1, and the photosensitive resin compositions of Examples 1 to 4 and Comparative Examples 1 to 6 were prepared. Furthermore, the numerical values in Table 1 represent parts by mass.

[評估] [assessment]

使用實施例1至4及比較例1至6之黑色阻劑(black resist)用感光性樹脂組成物,進行下述評估。將此等 評估結果表示於表2。 Using the photosensitive resin compositions of the black resists of Examples 1 to 4 and Comparative Examples 1 to 6, the following evaluations were carried out. Put this The results of the evaluation are shown in Table 2.

<顯影特性(圖形線寬、圖形直線性)之評估> <Evaluation of development characteristics (graphic line width, graphic linearity)>

將上述所得到之各感光性樹脂組成物使用旋塗機塗佈於125mm×125mm之玻璃基板(Corning1737)上,以使其後烘後之膜厚成為1.1μm之方式於90℃預烘1分鐘。其後,將曝光縫隙調整至100μm,於乾燥塗膜上披覆5μm之負型光罩,於光罩上放置有短波長截止濾波器(型號LU0350,朝日分光股份有限公司製(阻斷340nm以下之水銀燈波長))之情形(實施例1、比較例1至4)與未放置之情形(實施例2至4、比較例5、6)中,係以i線照度為30mW/cm2之超高壓水銀燈照射80mJ/cm2之紫外線,進行感光部分之光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a 125 mm × 125 mm glass substrate (Corning 1737) using a spin coater, and prebaked at 90 ° C for 1 minute so that the film thickness after post-baking was 1.1 μm. . Thereafter, the exposure slit was adjusted to 100 μm, a 5 μm negative mask was placed on the dried coating film, and a short-wavelength cut filter was placed on the mask (model LU0350, manufactured by Asahi Seisakusho Co., Ltd. (blocking 340 nm or less) In the case of the mercury lamp wavelength)) (Example 1, Comparative Examples 1 to 4) and the case where it was not placed (Examples 2 to 4, Comparative Examples 5 and 6), the i-line illuminance was 30 mW/cm 2 . The high-pressure mercury lamp was irradiated with ultraviolet rays of 80 mJ/cm 2 to carry out a photohardening reaction of the photosensitive portion.

其次,將此已曝光之塗板於25℃、0.08%氫氧化鉀水溶液中,以1kgf/cm2之淋浴顯影壓,從圖形開始出現之顯影時間(break time=BT),至+10秒、+15秒之顯影後,進行5kgf/cm2壓力之噴霧水洗,去除塗膜之未曝光部分,於玻璃基板上形成畫素圖形,其後,使用熱風乾燥機以230℃、30分鐘進行熱後烘後,評估對於5μm線之遮罩寬的線寬、圖形直線性。將即使顯影時間超過80秒亦無圖形呈像之情形視為無法顯影。再者,各評估方法如下所述。 Next, the exposed plate was applied to a 25 ° C, 0.08% potassium hydroxide aqueous solution, and developed at a pressure of 1 kgf/cm 2 , and the development time (break time = BT) from the beginning of the pattern was +10 seconds, + After 15 seconds of development, a spray washing with a pressure of 5 kgf/cm 2 was performed, and the unexposed portion of the coating film was removed to form a pixel pattern on the glass substrate, and thereafter, hot-drying was performed at 230 ° C for 30 minutes using a hot air dryer. Thereafter, the line width and the linearity of the pattern for the mask of the 5 μm line were evaluated. It is considered that the development is not possible even if the development time exceeds 80 seconds. Furthermore, each evaluation method is as follows.

圖形線寬:使用測長顯微鏡(尼康公司製「XD-20」),測量遮罩寬5μm之圖形線寬。 Graphic line width: Using a length measuring microscope ("XD-20" manufactured by Nikon Corporation), the line width of the mask width of 5 μm was measured.

圖形直線性:以顯微鏡觀察後烘後之5μm遮罩圖形,將未確認到相對於基板之剝離或圖形邊緣部分之參差的缺刻者評估為○,確認到一部分者評估為△,整體皆發現者評估為×。 Linearity of the pattern: a 5 μm mask pattern after observation by a microscope, and a nicker who was not confirmed to be uneven with respect to the peeling of the substrate or the edge portion of the pattern was evaluated as ○, and it was confirmed that some of the evaluators were evaluated as Δ, and the whole was evaluated by the finder. For ×.

<OD/μm之評估> <OD/μm evaluation>

使用旋塗機,將上述所得到之各感光性樹脂組成物塗佈於125mm×125mm之玻璃基板(Corning1737)上,以使後烘後之膜厚成為1.1μm之方式於90℃預烘1分鐘。其後,對於在乾燥塗膜上不披覆負型光罩,放置短波長截止濾波器(型號LU0350,朝日分光股份有限公司製(阻斷340nm以下之水銀燈波長))之情形(實施例1、比較例1至4)與未放置短波長截止濾波器之情形(實施例2、比較例5、6)中,以i線照度為30mW/cm2之超高壓水銀燈照射80mJ/cm2之紫外線,進行感光部分之光硬化反應。 Each of the photosensitive resin compositions obtained above was applied onto a 125 mm × 125 mm glass substrate (Corning 1737) by a spin coater, and prebaked at 90 ° C for 1 minute so that the film thickness after post-baking became 1.1 μm. . Thereafter, a short-wavelength cut filter (model LU0350, manufactured by Asahi Seiki Co., Ltd. (blocking the mercury lamp wavelength of 340 nm or less)) was placed on the dried coating film without a negative mask (Example 1, In Comparative Examples 1 to 4) and in the case where the short-wavelength cut filter was not placed (Example 2, Comparative Examples 5 and 6), ultraviolet rays of 80 mJ/cm 2 were irradiated with an ultrahigh pressure mercury lamp having an i-line illuminance of 30 mW/cm 2 . A photohardening reaction of the photosensitive portion is carried out.

其次,將該已曝光之塗板於25℃、0.08%氫氧化鉀水溶液中,以1kgf/cm2之淋浴顯影壓進行60秒之顯影後,進行5kgf/cm2壓力之噴霧水洗,其後,使用熱風乾燥機以230℃進行熱後烘30分鐘後,使用麥克伯(Macbeth)穿透濃度計來評估光照射部之OD。進一步,測量光照射部之膜厚,將OD值除以膜厚而得之值作為OD/μm。 Next, the exposed coated plate was developed in a 0.08% potassium hydroxide aqueous solution at 25 ° C in a developing pressure of 1 kgf/cm 2 for 60 seconds, and then subjected to a spray washing with a pressure of 5 kgf/cm 2 , and thereafter, used. After hot-drying at 230 ° C for 30 minutes in a hot air dryer, the OD of the light-irradiating portion was evaluated using a Macbeth penetration densitometer. Further, the film thickness of the light-irradiating portion was measured, and the value obtained by dividing the OD value by the film thickness was defined as OD/μm.

<附著性之評估> <Evaluation of adhesion>

使用旋塗機,將上述所得到之各感光性樹脂組成物塗佈於125mm×125mm之玻璃基板(Corning1737)上,以使後烘後之膜厚成為1.1μm之方式於90℃預烘1分鐘。其後,對於在不使用負型光罩而於塗膜上放置有短波長截止濾波器(型號LU0350朝日分光股份有限公司製(阻斷340nm以下之水銀燈波長))之情形(實施例1、比較例1至4)與未放置短波長截止濾波器之情形(實施例2至4、比較例5、6)中,以i線照度為30mW/cm2之超高壓水銀燈用80mJ/cm2來整面曝光後,使用熱風乾燥機以230℃進行熱後烘30分鐘。其後,對於上述所得到之後烘基板,依照JISK6856-1994之3點折曲附著試驗方法之評估法,藉此以下述方式評估與密封玻璃基板之附著強度。 Each of the photosensitive resin compositions obtained above was applied onto a 125 mm × 125 mm glass substrate (Corning 1737) by a spin coater, and prebaked at 90 ° C for 1 minute so that the film thickness after post-baking became 1.1 μm. . Thereafter, a short-wavelength cut filter (model LU0350 manufactured by Asahi Seiko Co., Ltd. (blocking the wavelength of mercury lamps below 340 nm)) was placed on the coating film without using a negative mask (Example 1, Comparison) In the cases of Examples 1 to 4) and the case where the short-wavelength cut filter was not placed (Examples 2 to 4, Comparative Examples 5 and 6), the ultrahigh pressure mercury lamp having an i-line illuminance of 30 mW/cm 2 was used for 80 mJ/cm 2 . After the surface exposure, heat-drying was performed at 230 ° C for 30 minutes using a hot air dryer. Thereafter, with respect to the above-obtained post-bake substrate, the adhesion strength to the sealing glass substrate was evaluated in the following manner in accordance with the evaluation method of the 3-point bending adhesion test method of JIS K6856-1994.

將上述後烘基板、及未塗佈樹脂組成物之玻璃基板(Corning1737)分別裁切成20mm×63mm之短籤狀,以準備試驗片。將經後烘之塗膜板與未塗佈感光性樹脂組成物之玻璃基板經由一定量之密封劑環氧系黏著劑(Strike lacto bond XN-21s(三井化學製))以使重合寬度成為8mm之方式將雙方之基板(試驗片)貼合。重合時之密封劑環氧系黏著劑之形狀係圓形且直徑約5mm。其後,將重合之試驗片分別實施90℃、20分鐘之預烘,接著分別150℃、2小時之後烘,製作三點折曲試驗片。進一步,對20mm×63mm之未塗佈之玻璃片彼此亦以與上述相同之方法來製作貼合之比較試驗用試樣。 The post-bake substrate and the glass substrate (Corning 1737) to which the resin composition was not applied were each cut into a short mark of 20 mm × 63 mm to prepare a test piece. The post-baking coating film and the glass substrate not coated with the photosensitive resin composition were passed through a certain amount of a sealant epoxy-based adhesive (Strike lacto bond XN-21s (manufactured by Mitsui Chemicals, Inc.)) so that the overlap width became 8 mm. In this way, the substrates (test pieces) of both sides are bonded together. The sealant epoxy adhesive in the form of a coincidence is circular and has a diameter of about 5 mm. Thereafter, the test pieces which were superposed were each subjected to prebaking at 90 ° C for 20 minutes, and then baked at 150 ° C for 2 hours, respectively, to prepare a three-point bending test piece. Further, a test sample for comparison test was prepared in the same manner as described above for the uncoated glass sheets of 20 mm × 63 mm.

上述所得到之試驗片中,以重合部位成為中心之方式,將塗佈板與相對之基板(無塗佈之基板)、或沒有塗佈之比較試驗用之玻璃基板以2點之支撐物來支撐(2點之支撐物之長度為3cm),使用orientec公司製「UCT-100」,以1mm/分之速度從重合部之正上方朝正下方施予負荷,以觀察剝離面並讀取當時之負荷,除以密封劑環氧系黏著劑之塗佈面積,將每單位面積之負荷作為附著強度。又,於121℃、100%RH、2atm及5小時之條件下實施PCT(pressure cooker test)後,實施相同之附著強度測試,評估PCT前後之附著強度。以相對值來表示將PCT前後之未塗佈阻劑之玻璃彼此之附著強度設為100時各組成之附著強度。PCT前後60以上評估為○,未達60評估為×。 In the test piece obtained as described above, the coated plate and the opposite substrate (substrate without coating) or the glass substrate for comparison test without coating were placed at two points as a center. Support (the length of the support at 2 o'clock is 3 cm), and the load was applied from the top right of the overlapping portion to the directly below at a speed of 1 mm/min using a UCT-100 manufactured by Orientec Co., Ltd. to observe the peeling surface and read the time. The load is divided by the coating area of the sealant epoxy-based adhesive, and the load per unit area is taken as the adhesion strength. Further, after performing a PCT (pressure cooker test) at 121 ° C, 100% RH, 2 atm, and 5 hours, the same adhesion strength test was carried out to evaluate the adhesion strength before and after the PCT. The adhesion strength of each composition when the adhesion strength of the glass of the uncoated resist before and after PCT was set to 100 was shown by the relative value. The evaluation of 60 or more before and after the PCT is ○, and the evaluation of less than 60 is ×.

以上之結果,從實施例1至4之感光性樹脂組成物得到之塗膜係線寬、圖形直線性、附著強度皆良好。相對於此,從比較例1至6之黑色阻劑用感光性樹脂組成物得到之塗膜係線寬、圖形直線性、附著強度之全部項目皆非良好者。由此可知,例如即使如比較例3、比較例6是附著強度良好之組成物,就顯影性而言,圖形容易變細,圖形邊緣容易有參差的缺刻而圖形之直線性容易變差,故尤其難以穩定地形成所謂5μm以下之細線。 As a result of the above, the coating film obtained from the photosensitive resin compositions of Examples 1 to 4 had good line width, pattern linearity, and adhesion strength. On the other hand, all of the coating film line widths, pattern linearities, and adhesion strengths obtained from the photosensitive resin compositions for black resists of Comparative Examples 1 to 6 were not satisfactory. Therefore, for example, even in Comparative Example 3 and Comparative Example 6, the composition having good adhesion strength is likely to be thinner in developability, and the edge of the pattern is liable to be staggered, and the linearity of the pattern is liable to be deteriorated. In particular, it is difficult to stably form a thin wire of 5 μm or less.

Claims (10)

一種遮光膜用感光性樹脂組成物,其係含有下述(A)至(D)作為必要成分:(A)含有聚合性不飽和基之鹼可溶性樹脂,其係使具有2個以上環氧基之化合物和(甲基)丙烯酸之反應物再與多元羧酸或其酐反應所得者,(B)具有至少1個乙烯性不飽和鍵之光聚合性單體,(C)光聚合起始劑,及(D)從黑色有機顏料、混色有機顏料及遮光材料所成之群中選出之1種以上之遮光成分;其中,(A)成分與(B)成分之重量比例(A)/(B)為50/50至90/10,相對於(A)成分與(B)成分之合計100重量份含有(C)成分2至30重量份,且含有下述通式(I)所表示之化合物作為(C)成分之光聚合起始劑, 惟,通式(I)中,R1及R2表示碳原子C為1至20個之烷基或碳原子C為6至20個之芳基,前述烷基或芳基亦可含有醚鍵,又,前述烷基或芳基中之氫原子之一部分亦可經以下所示之取代基取代:取代基係碳原子C為2至12個之烯基、碳原子C為4至8個之環烯基、碳原子C為2至12個之炔基、碳原子C為3至 10個之環烷基、苯基、萘基、可經鹵素取代之碳原子C為1至5之烷氧基或鹵素;R3表示碳原子C為6至20個之芳基、或碳原子C為5至20個之雜芳基。 A photosensitive resin composition for a light-shielding film comprising the following (A) to (D) as essential components: (A) an alkali-soluble resin containing a polymerizable unsaturated group, which has two or more epoxy groups a compound obtained by reacting a compound and (meth)acrylic acid with a polyvalent carboxylic acid or an anhydride thereof, (B) a photopolymerizable monomer having at least one ethylenically unsaturated bond, and (C) a photopolymerization initiator And (D) one or more kinds of light-shielding components selected from the group consisting of black organic pigments, mixed color organic pigments, and light-shielding materials; wherein the weight ratio of (A) component to (B) component (A)/(B) And 50 to 50 to 90/10, containing 2 to 30 parts by weight of the component (C) with respect to 100 parts by weight of the total of the components (A) and (B), and containing the compound represented by the following formula (I) As a photopolymerization initiator of the component (C), However, in the formula (I), R 1 and R 2 each represent an alkyl group having 1 to 20 carbon atoms C or an aryl group having 6 to 20 carbon atoms, and the alkyl group or aryl group may further contain an ether bond. Further, a part of the hydrogen atom in the alkyl group or the aryl group may be substituted with a substituent represented by a substituent having a carbon atom C of 2 to 12 alkenyl groups and a carbon atom C of 4 to 8 a cycloalkenyl group, an alkynyl group having 2 to 12 carbon atoms C, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, an alkoxy group having a carbon atom C of 1 to 5 which may be substituted by halogen Or a halogen; R 3 represents an aryl group having 6 to 20 carbon atoms C or a heteroaryl group having 5 to 20 carbon atoms C. 如申請專利範圍第1項所述之遮光膜用感光性樹脂組成物,其中,(C)成分之光聚合起始劑係含有下述通式(II)所表示之化合物, 惟,通式(II)中,R1及R2表示碳原子C為1至20個之烷基或碳原子C為6至20個之芳基,前述烷基或芳基亦可含有醚鍵,又,前述烷基或芳基中之氫原子之一部分亦可經以下所示之取代基取代:取代基係碳原子C為2至12個之烯基、碳原子C為4至8個之環烯基、碳原子C為2至12個之炔基、碳原子C為3至10個之環烷基、苯基、萘基、可經鹵素取代之碳原子C為1至5之烷氧基或鹵素。 The photosensitive resin composition for a light-shielding film according to the first aspect of the invention, wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (II). However, in the formula (II), R 1 and R 2 each represent an alkyl group having 1 to 20 carbon atoms C or an aryl group having 6 to 20 carbon atoms, and the alkyl group or aryl group may further contain an ether bond. Further, a part of the hydrogen atom in the alkyl group or the aryl group may be substituted with a substituent represented by a substituent having a carbon atom C of 2 to 12 alkenyl groups and a carbon atom C of 4 to 8 a cycloalkenyl group, an alkynyl group having 2 to 12 carbon atoms C, a cycloalkyl group having 3 to 10 carbon atoms, a phenyl group, a naphthyl group, an alkoxy group having a carbon atom C of 1 to 5 which may be substituted by halogen Base or halogen. 如申請專利範圍第1項所述之遮光膜用感光性樹脂組成物,其中,(C)成分之光聚合起始劑係含有下述通式(III)所表示之化合物, 惟,通式(III)中,R4及R5係獨立地表示氫原子、-O-CH2CH3、-O-(CH2)n+1CH3、-O-CH2CF3或-O-CH2(CF2)nCHF2;惟,R4或R5中之任一者係氫原子;n係1至3之整數。 The photosensitive resin composition for a light-shielding film according to the first aspect of the invention, wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (III). However, in the formula (III), R 4 and R 5 independently represent a hydrogen atom, -O-CH 2 CH 3 , -O-(CH 2 ) n+1 CH 3 , -O-CH 2 CF 3 or -O-CH 2 (CF 2 ) n CHF 2 ; however, either R 4 or R 5 is a hydrogen atom; n is an integer from 1 to 3. 如申請專利範圍第1項所述之遮光膜用感光性樹脂組成物,其中,(C)成分之光聚合起始劑係含有下述式(IV)所表示之化合物, The photosensitive resin composition for a light-shielding film according to the first aspect of the invention, wherein the photopolymerization initiator of the component (C) contains a compound represented by the following formula (IV). 如申請專利範圍第1至4項中任一項所述之遮光膜用感光性樹脂組成物,其中,作為(A)成分者,係使用使下述通式(V)所表示之化合物與(甲基)丙烯酸之反應物進一步與多元羧酸或其酐反應所得到之含有聚合性不飽和基之鹼可溶性樹脂, 惟,通式(V)中,R6及R7係獨立地表示氫原子、碳原子數1至5之烷基或鹵素原子,X表示-CO-、-SO2-、-C(CF3)2-、-Si(CH3)2-、-CH2-、-C(CH3)2-、-O-、茀-9,9-二基或是單鍵,l係0至10之數字。 The photosensitive resin composition for a light-shielding film according to any one of the first aspect of the invention, wherein the compound represented by the following formula (V) is used as the component (A). An alkali-soluble resin containing a polymerizable unsaturated group obtained by further reacting a reaction product of a methyl methacrylate with a polyvalent carboxylic acid or an anhydride thereof, However, in the general formula (V), R 6 and R 7 independently represent a hydrogen atom, an alkyl group having 1 to 5 carbon atoms or a halogen atom, and X represents -CO-, -SO 2 -, -C(CF 3 ). 2 -, -Si(CH 3 ) 2 -, -CH 2 -, -C(CH 3 ) 2 -, -O-, 茀-9,9-diyl or a single bond, l is 0 to 10 digital. 如申請專利範圍第1至5項中任一項所述之遮光膜用感光性樹脂組成物,其中,相對於遮光膜用感光性樹脂組成物中之固形成分,(D)成分中之遮光成分之含量係40至70質量%。 The photosensitive resin composition for a light-shielding film according to any one of the first aspect of the invention, wherein the light-shielding component in the component (D) is a solid component in the photosensitive resin composition for a light-shielding film. The content is 40 to 70% by mass. 如申請專利範圍第1項至第6項中任一項所述之遮光膜用感光性樹脂組成物,其中,(D)遮光成分係碳黑。 The photosensitive resin composition for a light-shielding film according to any one of the first aspect of the invention, wherein the (D) light-shielding component is carbon black. 一種塗膜,其係使申請專利範圍第1項至第7項中任一項所述之遮光膜用感光性樹脂組成物硬化而形成者。 A coating film which is formed by curing a photosensitive resin composition for a light-shielding film according to any one of the first to seventh aspects of the invention. 一種彩色濾光片,其係具備將申請專利範圍第1項至第7項中任一項所述之遮光膜用感光性樹脂組成物塗佈於透明基板上,預烘後,進行經由紫外線曝光裝置之曝光、經由鹼水溶液之顯影及後烘來製作之遮光膜。 A color filter comprising a photosensitive resin composition for a light-shielding film according to any one of the first to seventh aspects of the invention, which is coated on a transparent substrate, pre-baked, and exposed to ultraviolet light. A light-shielding film produced by exposure of the device, development through an aqueous alkali solution, and post-baking. 一種觸控面板,其係具備將申請專利範圍第1項至第7 項中任一項所述之遮光膜用感光性樹脂組成物塗佈於透明基板上,預烘後,進行經由紫外線曝光裝置之曝光、經由鹼水溶液之顯影及後烘來製作之遮光膜。 A touch panel having the patent application scope 1 to 7 The photosensitive resin composition for a light-shielding film according to any one of the above-mentioned items is applied onto a transparent substrate, and after pre-baking, a light-shielding film which is formed by exposure by an ultraviolet exposure apparatus, development by an aqueous alkali solution, and post-baking is performed.
TW104103532A 2014-02-04 2015-02-03 Photosensitive resin composition for light shielding film and cured product using the same TWI627501B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014019140 2014-02-04
JP2014-019140 2014-02-04

Publications (2)

Publication Number Publication Date
TW201531804A true TW201531804A (en) 2015-08-16
TWI627501B TWI627501B (en) 2018-06-21

Family

ID=53730671

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104103532A TWI627501B (en) 2014-02-04 2015-02-03 Photosensitive resin composition for light shielding film and cured product using the same

Country Status (4)

Country Link
JP (2) JP6375236B2 (en)
KR (2) KR20150092005A (en)
CN (1) CN104820342B (en)
TW (1) TWI627501B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI760311B (en) * 2015-08-31 2022-04-11 日商富士軟片股份有限公司 Coloring photosensitive composition, cured film, color filter, light-shielding film, solid state imaging device, image display device, and method for manufacturing cured film

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI717193B (en) * 2015-03-30 2021-01-21 日商富士軟片股份有限公司 Colored photosensitive composition, cured film, pattern forming method, infrared cut filter with light shielding film, solid-state imaging element, image display device, and infrared sensor
JP6754591B2 (en) * 2015-03-30 2020-09-16 東友ファインケム株式会社Dongwoo Fine−Chem Co., Ltd. Color curable resin composition
TWI731895B (en) * 2015-12-08 2021-07-01 日商富士軟片股份有限公司 Radiation-sensitive resin composition, cured film, pattern forming method, solid-state imaging device, and image display device
KR102350336B1 (en) * 2016-01-20 2022-01-17 동우 화인켐 주식회사 Colored photosensitive resin composition for red pixel
KR102347918B1 (en) * 2016-03-28 2022-01-05 동우 화인켐 주식회사 Colored photosensitive resin composition, color filter and image display device produced using the same
JP6758070B2 (en) * 2016-03-31 2020-09-23 日鉄ケミカル&マテリアル株式会社 A method for manufacturing a photosensitive resin composition for a light-shielding film, a display substrate provided with a light-shielding film obtained by curing the photosensitive resin composition, and a display substrate.
WO2018012383A1 (en) * 2016-07-13 2018-01-18 株式会社Adeka Curable composition, cured product and method for producing cured product
KR101986408B1 (en) * 2016-11-08 2019-06-05 동우 화인켐 주식회사 Colored Photosensitive Resin Composition, Color Filter and Display Device
KR102361604B1 (en) * 2017-08-07 2022-02-10 동우 화인켐 주식회사 A colored photo resist composition, a color filter comprising the same and a display device comprising the same
WO2019159922A1 (en) 2018-02-16 2019-08-22 古河電気工業株式会社 Insulated wire, coil, and electric/electronic instrument
KR102150679B1 (en) 2018-03-13 2020-09-01 주식회사 엘지화학 Battery module, battery pack comprising the battery module and vehicle comprising the battery pack
JP7089914B2 (en) * 2018-03-27 2022-06-23 日鉄ケミカル&マテリアル株式会社 A photosensitive resin composition containing an unsaturated group-containing alkali-soluble resin as an essential component and a cured product thereof.
KR20220019654A (en) * 2019-06-11 2022-02-17 가부시키가이샤 아데카 Carbamoyloxime compound and polymerization initiator and polymerizable composition containing said compound
JP2022528738A (en) * 2019-06-21 2022-06-15 艾▲堅▼蒙(安▲慶▼)科技▲発▼展有限公司 New dialoylcarbazole compounds, and their use as sensitizers
WO2022264987A1 (en) * 2021-06-15 2022-12-22 三菱瓦斯化学株式会社 Resin composition, resin sheet, multilayer printed wiring board and semiconductor device

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4595374B2 (en) 2003-04-24 2010-12-08 住友化学株式会社 Black photosensitive resin composition
JP3754065B2 (en) 2003-06-10 2006-03-08 三菱化学株式会社 Photopolymerizable composition and color filter using the same
JP4627227B2 (en) * 2005-06-22 2011-02-09 東京応化工業株式会社 Photosensitive composition and black matrix
JP5030527B2 (en) 2006-10-20 2012-09-19 株式会社Adeka Oxime ester compound and photopolymerization initiator containing the compound
JP5108300B2 (en) * 2006-12-28 2012-12-26 新日鉄住金化学株式会社 Photosensitive resin composition and color filter using the same
JP2009083482A (en) * 2007-09-13 2009-04-23 Asahi Kasei Electronics Co Ltd Photosensitive resin laminate
JP5529370B2 (en) * 2007-10-03 2014-06-25 新日鉄住金化学株式会社 Photosensitive resin composition for black resist containing polyfunctional thiol compound, black matrix for color filter using the same, and color filter
JP2011085732A (en) * 2009-10-15 2011-04-28 Toppan Printing Co Ltd Black resin composition, black matrix using the same, and color filter
TWI520940B (en) * 2010-10-05 2016-02-11 巴地斯顏料化工廠 Oxime ester
JP5744528B2 (en) * 2011-01-11 2015-07-08 東京応化工業株式会社 Colored photosensitive resin composition for touch panel, touch panel, and display device
JP6009774B2 (en) * 2011-02-22 2016-10-19 東京応化工業株式会社 Photosensitive resin composition, and color filter and display device using the same
JP5981159B2 (en) * 2011-02-22 2016-08-31 東京応化工業株式会社 Photosensitive resin composition, and color filter and display device using the same
CA2830592A1 (en) * 2011-03-25 2012-10-04 Toray Industries, Inc. Black resin composition, resin black matrix substrate, and touch panel
WO2013083505A1 (en) * 2011-12-07 2013-06-13 Basf Se Oxime ester photoinitiators
TWI585527B (en) * 2012-02-29 2017-06-01 新日鐵住金化學股份有限公司 A photosensitive composition for black matrix and a method for producing the same
JP6021473B2 (en) * 2012-07-02 2016-11-09 株式会社日本化学工業所 Novel photopolymerization initiator and photosensitive resin composition using them
JP6317432B2 (en) * 2014-05-01 2018-04-25 富士フイルム株式会社 Coloring composition, film, color filter, pattern forming method, color filter manufacturing method, solid-state imaging device, and infrared sensor
WO2016058545A1 (en) * 2014-10-15 2016-04-21 奇美实业股份有限公司 Photosensitive resin composition, color filter and liquid crystal display element thereof

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI760311B (en) * 2015-08-31 2022-04-11 日商富士軟片股份有限公司 Coloring photosensitive composition, cured film, color filter, light-shielding film, solid state imaging device, image display device, and method for manufacturing cured film

Also Published As

Publication number Publication date
TWI627501B (en) 2018-06-21
JP2015165297A (en) 2015-09-17
KR102116177B1 (en) 2020-05-27
CN104820342B (en) 2020-02-14
JP2018025805A (en) 2018-02-15
KR20150092005A (en) 2015-08-12
JP6375236B2 (en) 2018-08-15
CN104820342A (en) 2015-08-05
KR20180029211A (en) 2018-03-20
JP6495394B2 (en) 2019-04-03

Similar Documents

Publication Publication Date Title
TWI627501B (en) Photosensitive resin composition for light shielding film and cured product using the same
JP7227939B2 (en) Light-shielding film photosensitive resin composition, light-shielding film and color filter obtained by curing the same
JP4570999B2 (en) Photosensitive resin composition and color filter using the same
JP4508928B2 (en) Photosensitive resin composition and color filter using the same
TWI654487B (en) Black photosensitive resin composition, black matrix using same, and image display device comprising the black matrix
JP6891553B2 (en) Colored resin composition, color filter, and image display device
CN103019032B (en) Photosensitive resin composition, the forming method of cured film, cured film, organic EL display and liquid crystal display device
JP2010262028A (en) Photosensitive resin composition for black matrix
TW201915040A (en) Photosensitive resin composition and method of producing substrate with resin film suitable for forming a resin film pattern on a plastic substrate having a heat resistance of 140 DEG C or higher
JP2006003860A (en) Photosensitive resin composition and color filter using the same
TWI736601B (en) Photosensitive resin composition for light-sielding film, display substrate and manufacturing method thereof
JP5343260B2 (en) Colored photosensitive resin composition, color filter, and liquid crystal display device comprising the same
TW201739844A (en) Compound, colorant composition comprising the same and resin composition comprising the same capable of providing excellent solubility and chemical resistance
JP5108300B2 (en) Photosensitive resin composition and color filter using the same
TW200530281A (en) Photosensitive resin composition and color filter using the same
JP2020060617A (en) Photosensitive resin composition for light-shielding film and cured product of the same, and method for producing color filter and touch panel using the cured product
TW201635029A (en) Black photosensitive resin composition, black matrix and image display device comprising thereof
TW201635013A (en) Photosensitive resin composition for color filter and application thereof
JP7345252B2 (en) Photosensitive resin composition for light-shielding film, cured product thereof, and method for producing color filters and touch panels using the cured product
KR20230141486A (en) Photosensitve resin composition, cured film thereof, substrate with that, and manufacturing method for that substrate
JP2020166116A (en) Light-shielding film and photosensitive resin composition for obtaining the same, and production method of light-shielding film
JP2014218438A (en) Polymerizable compound having sulfur atom and cyano group and polymer, composition including polymer