TW201526998A - Method of horizontally glue dispensing - Google Patents

Abstract

A method of horizontally glue dispensing includes steps as followed. To load-in a processing article, and capture position information of adhesive location of the processing article. A glue-dispensing head is provided to horizontally inject glues toward the adhesive location of the processing article. To move and elevate the glue-dispensing head according to the position information, so as to inject the glues to the adhesive location of the processing article. In accordance with the adhesive location having a first distance away from the glue-dispensing head, the glue-dispensing head is kept at the first distance apart from the adhesive location and inject the glues at a constant speed. In accordance with the distance between the adhesive location and the glue-dispensing head is larger than the first distance, the glue-dispensing head is elevated to make the glues falling at a longer location corresponding to the adhesive location by parabola principle. Finally, the processing article is loaded out.

Description

Horizontal dispensing method

The present invention relates to a method of horizontal dispensing, and more particularly to a dispensing system in which a dispensing head is placed in a horizontal manner and a droplet is sprayed horizontally to glue a workpiece having a side to be glued.

The dispensing method of the existing dispensing device is to vertically position the dispensing head, and the dispensing process drives the dispensing head to move in the vertical direction by the power device, and the dispensing head moves to the dispensing position of the processing member. At the height, the power unit stops driving the dispensing head to move in the vertical direction. Then, the driving device drives the dispensing head to move in the horizontal direction. When the dispensing head moves closer to the processing member, the dispensing head is glued out, thereby completing the dispensing process.

Since the lifting device for controlling the movement of the dispensing head can only adjust the position of the dispensing head from the vertical direction, the control of the position of the dispensing head is limited, and the dispensing position cannot be accurately dispensed, which also affects the quality of the dispensing. Therefore, the existing dispenser is inconvenient to operate and has low work efficiency. Therefore, some conventional dispensing devices place the dispensing head obliquely, such as the Republic of China Patent No. M396158 "Multi-Azimuth Tilt Dispensing Device", in order to improve the quality of the dispensing, to dispense the workpiece from multiple directions, Improve precision.

However, for the state of the positive side dispensing, the above dispensing method is still not applicable. Especially for the three-dimensional stack packaging technology of the semiconductor process, in the parallel lamination of the substrate or the wafer, not only the vertical dispensing device is not suitable, the inclined dispensing device can only obliquely spray the glue. Drops are still not ideal in the quality of the glue. Furthermore, the existing semiconductor technology has utilized a three-dimensional integrated package of wafer (substrate) assemblies that bond two wafers, the glued portion is completely horizontal, vertical The dispensing device is not suitable. A slight deviation of the inclined dispensing device may cause the adhesive to land on the wafer, which may affect the quality of the dispensing and even damage the wafer assembly.

The technical problem to be solved by the present invention is to provide a horizontal dispensing method, by providing a dispensing system, especially for a workpiece to be glued at a side, whether or not the glue to be glued on the same horizontal line, or whether there is a depression Or outstanding conditions, still ensure the quality of dispensing.

In addition, the technical problem to be solved by the present invention lies in a wafer (substrate) assembly suitable for wafer bonding technology in a stereo integrated structure, which is completely horizontal, including a groove or a flat edge, and can still be Maintain its glue quality.

In order to solve the above technical problem, according to one aspect of the present invention, a method for horizontal dispensing is provided, comprising the steps of: loading a workpiece; capturing position information of the workpiece to be glued; providing an injection dispensing a plurality of glue droplets are sprayed toward the glued portions of the workpiece in a horizontal direction; according to the position information to be glued, the spray head is moved and raised, and the glue droplets are sprayed to the processing The portions to be glued; wherein, for the portions to be glued at the same first distance from the spray head, the jet head is maintained at the first distance and the jet is at a constant speed a glue droplet; wherein, for the portions to be glued at a distance greater than the first distance from the jetting point, the jetting head is raised to cause the droplets to fall farther by the parabolic principle; The above processed parts are carried out.

The present invention has the following beneficial effects: the horizontal dispensing method of the present invention can ensure the dispensing of the workpiece to be glued at the side, whether the glue is to be on the same horizontal line, or whether there is a depression or protrusion. quality. In addition, the present invention is more suitable for a wafer (substrate) assembly of a wafer bonding technology in a stereo integrated structure, which is completely horizontal, including grooves or flat edges, and can maintain its bonding quality.

In order to further understand the technology adopted by the present invention for achieving the intended purpose, The method and function of the present invention are described in the following detailed description and drawings of the present invention. It is believed that the objects, features and characteristics of the present invention can be further understood and understood. It is not intended to limit the invention.

100‧‧‧ Dispensing system

9‧‧‧Processed parts

90‧‧‧to be glued

90B‧‧‧ starting point

92‧‧‧ Identification gap

10‧‧‧Base

12‧‧‧Human Machine Interface Module

121‧‧‧ display

122‧‧‧ keyboard

123‧‧‧ Mouse

14‧‧‧recording and control device

20‧‧‧Loading platform

21‧‧‧Rotary support

22‧‧‧ Guide column

23‧‧‧Optical alignment unit

30‧‧‧ camera module

31‧‧‧Look down lens

32‧‧‧Side view lens

40‧‧‧Spray dispensing head

49‧‧‧ pedestal

50‧‧‧Mobile Module

60‧‧‧Curing module

61‧‧‧Cure energy components

62‧‧‧ ‧ frame

63‧‧‧Shielding unit

70‧‧‧ Weight verification module

80‧‧‧ cleaning module

82‧‧‧Test spray board

84‧‧‧Clean location

G‧‧‧gel drops

R‧‧‧ robotic arm

D1‧‧‧first distance

D2‧‧‧Second distance

D3‧‧‧ third distance

BRIEF DESCRIPTION OF THE DRAWINGS Figure 1 is a flow chart showing the main structure of the horizontal dispensing method of the present invention.

2 is a top plan view of the dispensing system of the present invention.

2A to 2D are schematic flow charts showing the side view angle of the dispensing system of Fig. 2 of the present invention.

Figure 3 is a flow chart of the glue application process of the present invention.

Figure 4 is a perspective view of the dispensing system of the present invention.

Figure 5 is a partial enlarged view of the dispensing system of Figure 4 in accordance with the present invention.

Figure 6 is a partial enlarged view of another embodiment of the dispensing system of Figure 4 of the present invention.

Figure 7 is a side elevational view of the dispensing system of Figure 4 in accordance with the present invention.

Figure 8 is a top plan view of the dispensing system of Figure 4 in accordance with the present invention.

Figure 9 is a flow chart showing the calibration procedure of the horizontal dispensing method of the present invention.

Figure 10 is a flow chart showing the procedure for correcting the glue weight of the horizontal dispensing method of the present invention.

Figure 11 is a flow chart of the droplet parabola correction procedure of the horizontal dispensing method of the present invention.

The embodiments described below are referred to by the number or the like, and the scope of application of the invention should not be limited by the number or the like unless otherwise stated. The directional terms used in the present invention, such as left, right, front or rear, are merely intended to be illustrative, and not to limit the invention.

The invention provides a method for horizontal dispensing, the main structure of which is shown in FIG. 1 , comprising S10, an automatic program for the operator to select whether to automatically perform all subsequent operations; S20, loading program for loading Machining parts; S30, visual scanning program, visual scanning for the workpiece; S40 glue spraying program; S50 loading a program for loading the workpiece; S60, a dispensing head cleaning program; then asking the operator S70 for the program to leave the automatic program, and if so, ending the automatic program, and if not, returning to the S10 program. All of the above procedures can be displayed and selected by a human interface module.

Regarding the S10 program, it is mainly for the operator to start the automatic operation for all subsequent operations, or for the operator to choose to stop the automatic execution of the program.

Please refer to FIG. 2 , which is a top plan view of a dispensing system 100 for performing a horizontal dispensing method according to the present invention. In this embodiment, a wafer (substrate) assembly in which two wafers are bonded in a three-dimensional integrated configuration is exemplified as the workpiece 9. However, the invention is not limited to wafer assemblies and can be applied to other workpieces having side glues. The above wafer (substrate) bonding can be applied to optical assembly or vertical volume circuit (3D IC) technology. The wafer bonding process includes fusion bonding (Metal Thermal Compression Bonding), polymer bonding bonding (Polymer Adhesive Bonding), and special eutectic bonding. Since it is not the technical point of this creation, it will not be described. After bonding, the gap around the wafer needs to be glued, including the notch or flat of the wafer.

Regarding the loading procedure of the S20, the workpiece 9 that needs to be dispensed is sequentially moved from the temporary storage area (not shown) located in the upstream by the mechanical arm R and the like, and the workpiece 9 is moved to the dispensing system 100. A carrying platform 20. In this process, the carrier platform 20 of the present embodiment can be a pre-aligner that aligns the loaded workpiece 9 to the correct processing position.

Regarding the visual scanning program of S30, visual inspection is performed on the workpiece 9, in order to obtain the positional information of the workpiece 90 to be glued 90 before dispensing. The embodiment of the present invention provides a camera module 30 for capturing position information of the workpiece to be glued 90. The camera module 30 includes a top view lens 31 disposed above the workpiece 9 and capturing the horizontal position information of the portion to be glued 90, and a side view lens 32 disposed on the side of the workpiece 9 . The top view lens 31 The vertical position information of the 90 to be glued is taken. In this embodiment, preferably, regarding the above The step of taking the location information includes rotating the workpiece 360 degrees on the carrier platform 20 and transmitting the location information to a recording and controlling device 14.

Regarding the glue dispensing procedure of S40, the present embodiment provides an injection dispensing head 40 that ejects a plurality of glue drops in the horizontal direction toward the portions to be glued 90 of the workpiece 9. The horizontal direction of the glue droplet is one of the characteristic techniques in the process of dispensing the present invention, and the method is particularly suitable for the side where the glue is to be completely located on the side of the workpiece, especially in the three-dimensional integrated structure exemplified in the embodiment. A wafer (substrate) assembly that joins two wafers, hereinafter referred to as a substrate assembly. Here, the horizontal direction means that the glue droplets are emitted in a horizontal direction perpendicular to the direction of gravity, wherein the substrate assembly is placed in a horizontal state. Another alternative is where the substrate assembly can also be placed in a vertical position for dispensing.

Referring to FIG. 3, in the spraying process of S40, the process of spraying the glue drops includes the following steps: Step S41, setting a starting point 90B of the workpiece 9 according to the position information, as shown in FIG. 2, this embodiment Preferably, it may be an identification notch 92 of the substrate assembly (machined part 9), and FIG. 2 is exemplified by a notch, but is also applicable to a flat edge recognition flat. Next, in step S42, the starting point 90B is aligned with the jet dispensing head 40; in step S43, the workpiece 9 is rotated and the jet dispensing head 40 is activated. According to the embodiment, the substrate assembly is used as the workpiece 9. Preferably, it is rotated according to the center of the substrate assembly, as shown in FIG. In the process, in step S44, according to the position information of the portions to be glued, the spray dispensing head 40 is moved and raised, and the glue drops G are sprayed to the portions to be glued 90 of the workpiece 9; In step S45, it is determined whether the workpiece 9 has been rotated 360 degrees. If not, then returning to step S44, the workpiece 9 is continuously rotated and the glue drops G are ejected; if so, the jetting head 40 is stopped, such as Step S49 is shown.

Please refer to FIG. 2A to FIG. 2D for a schematic flow chart of the horizontal dispensing method of the present invention. The above step S44 is one of the features of the present invention. In the process of the glue spraying process, according to the distance from the glue dispensing point 90 to the jet dispensing head 40, the dispensing method of the present invention is based on the positions of the to-be-bonded portion 90. Information, moving and lifting the jet dispensing head 40, and spraying the glue drops G to the portions to be glued of the jetting head 40 90.

Please refer to FIG. 2A, which is a side view of FIG. 2. With respect to most of the glue to be glued 90, it is kept at the same distance as the jet dispensing head 40. For the portions to be glued 90 that are at the same first distance d1 from the jetting head 40, the jetting head 40 is held at the first distance d1 and the first distance d1 is sprayed at a constant speed. Drop G. For convenience of description, FIGS. 2A to 2D define that the plane of the horizontal state of the workpiece 9 is the X-axis and the Y-axis, and the workpiece 9 is perpendicular to the Z-axis, and the horizontal ejection direction in which the dispensing head 40 is jetted is defined as a parallel X-axis. In accordance with the above situation, the jet dispensing head 40 is held at the Z1 point in the Z-axis.

Referring to FIG. 2B, the workpiece in FIG. 2 is rotated nearly one turn into the identification notch 92. In the above, for the portions to be glued 90 that are greater than the first distance d1 from the jetting head 40, the recessed identification notch 92 is taken as an example, and the second distance d2 is greater than the first distance d1, for example, as a groove. The straight position of the bevel inside. In this embodiment, according to the position information recorded by the recording and control device 14, the position of the spray head 40 to Z2 is raised along the Z axis, so that the glue drops G fall farther by the parabolic principle. It can fit properly within the identification gap 92.

As shown in Fig. 2C, the workpiece in Fig. 2 is rotated nearly one turn further into the identification notch 92, which can be considered to be the position of the corner in the groove. At this time, according to the position information recorded by the recording and control device 14, the glue is to be at a third distance d3 from the jetting head 40, and further away from the jetting head 40, and the jet dispensing is raised along the Z axis. The positions of the heads 40 to Z3 are such that the glue drops G fall farther by the parabolic principle.

As shown in Fig. 2D, the rotation of the workpiece in Fig. 2 will leave the identification notch 92, which can be regarded as the other oblique side linear position in the groove. According to the position information recorded by the above recording and control device 14, the distance from the glue dispensing head 40 to the drawing point 40 is similar to that of FIG. 2B, and returns to the second distance d2, following the condition of FIG. 2C, and the jet dispensing head 40 is controlled by the Z axis. The position of the upper Z3 is lowered back to the position of Z2 on the Z axis, so that the glue drops G fall by a parabolic principle to a position closer to FIG. 2C. At the end, wait until the workpiece 9 has rotated 360 The starting point 90B is again aligned with the above-mentioned jet dispensing head 40, that is, the dispensing process of S40 is completed.

In addition, in order to maintain the density of the dispensing, the present invention further includes increasing the frequency at which the droplets are ejected to compensate for the density of the droplets per unit length. Taking the situation shown in FIG. 2 and FIG. 2B as an example, the portion to be glued 90 is a straight position of the oblique side in the groove. At this time, in the case where the workpiece 9 maintains the same rotation speed, the injection point is faced every unit time. The distance of the plastic head 40 will become longer. If the frequency of the original droplets is maintained, the density of the droplets in the identification gap 92 will be looser than the circumference of the circle. Therefore, in the embodiment, according to the position information recorded by the recording and control device 14, the frequency of spraying the glue drops can be increased to compensate the density of the glue drops in the unit length, thereby maintaining the glue droplets in the identification gap 92. density. In another alternative manner, the frequency at which the droplets are ejected can be maintained while the rotational speed of the workpiece 9 is reduced.

In this embodiment, after the step of spraying the glue droplets in the glue spraying process of S40, further comprising providing a curing module to cure the glue droplets. Further, after the step of curing the above-mentioned droplets, the carrying-out procedure of S50 is performed, and the workpiece 9 is carried out to leave the carrier platform 20.

In the above embodiment, the substrate assembly is taken as the processing member 9, and most of the circumferences are provided with a concave identification recess 92. The present invention can maintain the above-mentioned jet dispensing head 40 at the first distance d1 (which can be mostly glued) for the glues that are smaller than the first distance d1 from the jetting head 40. The same spray distance is used as the first distance) and the frequency of spraying the glue drops is increased. Increasing the frequency of spraying the droplets is to match the protruding glue, and at the same speed, there is a longer distance per unit time.

In the following, in conjunction with the above-described horizontal dispensing method of the present invention, a dispensing system 100 incorporating the present invention is specifically illustrated to make the horizontal dispensing method of the present invention more specifically understandable, but not to limit the present invention. Various components. Please refer to FIG. 4 to FIG. 6 , which are perspective views of a dispensing system 100 of the present invention and a partial enlarged view thereof. The dispensing system 100 of the present invention includes a base 10, a carrying platform 20, a camera module 30, and an injection point The rubber head 40, a moving module 50, a curing module 60, a weight verification module 70, and a cleaning module 80.

The base 10 can be used to accommodate the recording and control device 14 and the power device (not shown) and carry the above components. A human interface module 12 is disposed on one side of the base 10. The human interface module 12 includes a display 121, a keyboard 122, and a mouse 123, but is not limited thereto. For example, it can also be a touch screen.

The carrying platform 20 is for carrying the workpiece 9 and preferably rotating the workpiece 9 to fit the jet dispensing head 40. In conjunction with the workpiece of the wafer assembly, the carrier platform 20 of the embodiment may be a pre-aligner for collating and positioning the wafer assembly at a correct processing position. A non-contact measurement that provides eccentricity and direction accuracy of substrate placement to overcome positioning errors caused by vibration during transmission. Pre-aligner operation, including measurement of wafer displacement, calculation of necessary compensation, and orientation of the groove (or flat edge) to the desired angle. The upstream of the pre-aligner can be coupled to a wafer handler delivers to transport the wafer assembly to be processed, and can be coupled to different machines in tandem with appropriate communication protocols to obtain information from each other into a production line.

Please refer to FIG. 7. FIG. 7 is a side view of the dispensing device of the present invention. The pre-aligner (the carrier platform 20) of the embodiment includes a rotating support base 21 for supporting and rotating the wafer assembly (the workpiece 9), and a plurality of guiding posts 22 abutting the bottom surface of the wafer assembly. And an optical alignment unit 23 disposed at an edge of the wafer assembly.

The camera module 30 is configured to capture and record the contour of the portion to be glued 90, and then transmit the contour to the recording and control device 14 for subsequent control of the reference of the jet dispensing head 40. The camera module 30 includes a top view lens 31 and a side view lens 32. The top view lens 31 is disposed above the workpiece 9 for capturing horizontal position information of the parts to be glued, and the side view lens 32 is placed on the workpiece. The side of the 9 is adjacent to the jet dispensing head 40 for capturing the vertical position information of the portion to be glued.

Referring to FIG. 8, the jet dispensing head 40 is disposed on a mounting base 49, and a plurality of glue drops are sprayed in the horizontal direction toward the portions 90 to be glued of the workpiece 9. This implementation In the example, the jet dispensing head 40 is fixed to the mounting base 49 together with the side view lens 32. The jet dispensing head 40 is a non-contacting spray head that provides controlled dispensing of high speed and large capacity for adhesive liquids such as sealants, underfills, UV glues, surface coating materials, and the like. Regarding the colloidal injection tube upstream of the jet dispensing head 40 for providing a glue cartridge (not shown), it may be vertically or obliquely arranged.

The moving module 50 includes a rail, a motor, and the like, and can move the mounting base 49 and the dispensing head 40 in the X, Y, and Z axis directions. By moving the above-described jet dispensing head 40 in the Z-axis direction, the initial position of the ejection of the glue droplets of the dispensing head 40 can be raised and parabolically directed toward the wafer assembly (machined member 9). At the same jetting speed, the glue drops can be placed at a farther position to compensate for the difference in distance due to the grooves.

The curing module 60 is configured to cure the glue droplets. As shown in FIG. 5, the curing module 60 includes a curing energy component 61, a frame 62 for fixing the curing energy component 61, and a shielding unit 63 adjacent to the above. The energy element 61 is cured. The curing energy element 61 can be a source of ultraviolet light, or other curable colloid, or heated. The curing energy element 61 of the present embodiment is disposed above the base 10 in a circular arc shape by the frame body 62, adjacent to the bearing platform 20, and adjacent to the workpiece 9 to be glued. This embodiment is disposed below a portion of the circumferential perimeter of the wafer assembly. A preferred arrangement of the curing energy element 61 is to place the dispensing head 40 adjacent one end of the curing energy element 61. After the wafer assembly (machined part 9) is sized, one end of the curing energy element 61 is rotated toward the other end, so that the position of the dispensing passes through the curing energy element 61 to cure the glue.

For the glued portion of the arc-shaped periphery of the wafer assembly, the distance from the jet head 40 is substantially the same distance, and the jet can be fixed by rotating the wafer assembly (machined part 9) of the carrier platform 20 regularly. The dispensing head 40 is in the same position and ejects the glue droplets at the same frequency and speed. Frequency refers to the number of drops that are ejected at a fixed time. Speed refers to the initial velocity at which the glue drops away from the jetting head 40. These can be controlled by the stroke adjustment knob and control valve of the above-described jet dispensing head 40.

The gaps 92 (grooves or flat sides) of the wafer assembly are to be glued slightly away from the jet head 40. If the glue drops still maintain the above-mentioned spraying conditions, the glue drops will not fall in the proper position; in addition, since the contour of the groove is longer than the generally arc-shaped periphery, the density of the glue may not be satisfactory. In particular, the present invention can further utilize the moving module 50 to move the jet dispensing head 40 to adjust the initial ejection position of the glue droplet, and even adjust the ejection frequency of the jet dispensing head 40 to make the longer length. On the gluing contour line, the same number of glue drops are provided within the same distance, so that the quality of the glue (including the glue spot position and the glue density) is the same as the other arc-shaped periphery.

The present invention is characterized in that the mobile module 50 moves and raises and drops the jet dispensing head 40 according to the position information of the to-be-bonded portion 90 captured by the camera module 30, and ejects the droplets to the ejection point. The portions of the plastic head 40 to be glued 90. Thereby, it is possible to match the portions to be glued in a slightly distant groove or protrusion so that the glue drops still fall in the correct position.

The weight verification module 70 of the embodiment is located on the moving path of the erection base 49 for spraying the dispensing head 40 thereon to accurately check the weight of the glue droplet. The cleaning module 80 is placed between the weight verification module 70 and the carrying platform 20, and is used to clean the spray dispensing head 40 after use or at a desired timing to prevent the residual gel from getting stuck in the jet flow path. In this embodiment, the cleaning module 80 includes a test spray plate 82 adjacent to the load bearing platform 20 and located on the moving path of the spray head 40, and the spray head 40 sprays the spray heads 40. The glue drops on the test spray plate 82 and displays the paths of the glue drops G (see Fig. 5).

After each dispensing, in order to avoid clogging of the dispensing head 40, it is preferred to perform the dispensing head cleaning procedure of S60 each time to clean the dispensing head. The dispensing head 40 can be moved to a cleaning position 84 (shown in Figure 4), then the vacuum is activated and allowed to stand for a period of time to empty the glue remaining inside the dispensing head 40, and then the vacuum is turned off. The dispensing head cleaning process can be completed.

The invention may further include an inquiry operation before loading the workpiece 9 Whether the staff performs the calibration procedure. In the dispensing process, it is necessary to set the amount of dispensing and the height at the time of dispensing. The calibration procedure is as shown in FIG. 9. This embodiment can include at least the following four corrected conditions C1 to C4.

Correction condition C1, for selecting whether to correct the distance between the dispensing head and the camera module of the visual scanning. If "No" is selected, the next correction condition C2 is entered. If "Yes" is selected, the program S81, the dispensing head and the visual compensation correction program are performed. In this embodiment, the dispensing head 40 is first moved to a corrected position, for example, to the front of the test strip 82; then, the moving head 40 is moved by the moving module 50 to touch a soft target. For example, it may be located on the test spray plate 82 to generate a correction mark; afterwards, the camera module 30 is moved to the correction position to confirm whether the image captured by the camera module 30 is aligned with the correction mark, thereby The correction position of the camera module 30 described above is corrected.

Correction condition C2, for selecting whether to correct the vacuum cleaning position of the dispensing head. If "No" is selected, the next correction condition C3 is entered. If "YES" is selected, then a process S82 is performed, which is a procedure for ensuring that the dispensing head 40 is moved to the correct cleaning position for vacuum cleaning. With the embodiment, the jet dispensing head 40 is fixed to the mounting base 49 together with the side view lens 32. First, the side view lens 32 of the camera module 30 is moved to a correcting position, and the side view lens 32 can capture images and Confirm that it is in the correct calibration position, which corresponds to the dispensing head 40 being in the correct cleaning position. It is then determined whether the system settings are changed and recorded in the record and control device 14. After that, the dispensing head vacuum cleaning procedure is performed.

Correction condition C3, for selecting whether to correct the average weight of each drop of the glue. About correcting the average mass of each drop of the glue. If "No" is selected, the next correction condition C4 is entered. If "Yes" is selected, then the process S83 is performed, and referring to FIG. 10, first, as shown in step S831, the jet dispensing head 40 is moved to a corrected position, where the position of the weight of the glue is measured, in this embodiment. For example, the position of the weight verification module 70 shown in FIG. Next, in step S832, a glue droplet is sprayed, and the weight of the glue droplet is weighed; in step S833, the weight of the glue droplet is obtained; and in step S834, it is determined whether to change the set value of the glue weight in the dispensing system, and if so, Changing the dispensing as shown in step S835 A record within a parameter memory device of system 100. The parameter memory device of this embodiment may be the recording and control device 14.

Correction condition C4, whether to correct the correction amount of the droplet parabola. If "No" is selected, the calibration procedure ends. If "Yes" is selected, referring to FIG. 11, the method includes the following steps: moving the dispensing head 40 to a corrected first position as shown in step S841; moving the X-axis and the Y-axis along the X-axis and the Y-axis as shown in step S842 Spraying the dispensing head 40; as shown in step S843, according to the preset speed and unit moving distance of the dispensing system 100, the spray dispensing head 40 is activated to spray the glue to a test spray plate 82; as shown in step S844 The speed of the ejection and the number of the glue droplets are recorded; as shown in step S845, a visual scan is performed to capture the glue droplets in the test spray plate 82; as shown in step S846, the spray head is moved. 40 to a corrected second position; as shown in step S847, along the Z-axis linearity correction; and, as shown in step S848, moving the dispensing glue along the X, Y, and Z axes according to the compensation value of the Z-axis described above The head 40; as shown in step S849, the spray dispensing head 40 is activated to spray glue to the test spray plate 82. As shown in step S850, a visual scan is performed to capture the glue droplets on the test spray plate 82. The movement may be based on the position information of the previously glued portion 90 to be simulated. In the case of identifying the notch 92, in conjunction with the substrate assembly (machined part 9) of the present embodiment, the path of the glue should be on the same horizontal line under the correct condition.

In summary, the horizontal dispensing method of the present invention has the following features and functions, and the horizontal dispensing method can specifically target the workpiece to be glued at the side, whether or not the glue to be glued on the same horizontal line, or whether There are dents or protrusions that still ensure the quality of the dispense. In addition, the present invention is more suitable for a wafer (substrate) assembly of a wafer bonding technology in a stereo integrated structure, which is completely horizontal, including grooves or flat edges, and can maintain its bonding quality. The efficacy achieved by the present invention is not achievable by conventional vertical dispensing or tilt dispensing.

The above description is only a preferred and feasible embodiment of the present invention. Equivalent changes and modifications made by the scope of the invention are intended to be within the scope of the invention.

This designated representative diagram is a flow chart with no symbolic brief description.

Claims (11)

A method for horizontal dispensing, comprising the steps of: loading a workpiece; capturing position information of the workpiece to be glued; providing a spray dispensing head, facing the workpiece to be glued in a horizontal direction Spraying a plurality of glue drops; moving and lifting the spray dispensing head according to the position information to be glued, and spraying the glue drops to the portions to be glued of the workpiece; wherein the spray points are separated Where the glue heads are at the same first distance, the glue heads are kept at the first distance to be glued at the first distance and the glue droplets are sprayed at a constant speed; wherein the glue heads are larger than the above Where the first distances are to be glued, the spray head is raised to cause the glue drops to fall farther by the parabolic principle; and the workpiece is carried out. The method of claim 1 wherein the step of capturing position information comprises providing a top view lens disposed above the workpiece to capture a horizontal position information and providing a workpiece disposed on the workpiece. A side view lens on the side captures a vertical position information. The method of claim 2, wherein the step of capturing the position information comprises rotating the workpiece 360 degrees and transmitting the position information to a recording and controlling device. The method of claim 18, wherein the step of spraying the glue drops further comprises the steps of: setting a starting point of the workpiece according to the position information; aligning the starting point with the jet dispensing a head; rotating the workpiece and starting the jet dispensing head; determining whether the workpiece has been rotated 360 degrees, and if not, continuing to rotate The workpiece is machined and the glue drops are sprayed; if so, the jet dispensing head is stopped. The method of horizontal dispensing according to claim 4, wherein the step of raising the jet dispensing head further comprises the steps of: increasing the frequency of spraying the droplets to compensate for the density of the droplets per unit length . The method of horizontal dispensing according to claim 4, wherein the step of raising the dispensing head further comprises the steps of: maintaining a frequency of spraying the droplets to reduce a rotation speed of the workpiece to compensate for the glue The density dropped within the unit length. The method of claim 18, wherein after the step of spraying the droplets, further comprising the step of providing a curing module to cure the droplets. The method of horizontal dispensing according to claim 7, wherein the step of loading the workpiece is further followed by a step of cleaning the jet dispensing head. The method of claim 18, wherein, for the glues that are smaller than the first distance from the jetting head, maintaining the jetting head and the first distance to be glued at the first distance Increase the frequency of spraying these drops. The method of claim 18, wherein before the loading of the workpiece, further comprising a procedure for correcting the weight of the glue, comprising the steps of: moving the dispensing head to a correction position; spraying a glue Drip, and weigh the weight of the above-mentioned glue drops; obtain the weight of the above-mentioned glue drops; determine whether to change the setting value of the glue weight in the dispensing system, and if so, change the record in a parameter memory device of the dispensing system. The method of claim 18, wherein before the loading of the workpiece, a step of parabolic parabola correction is further included, comprising the steps of: moving the jetting head to a corrected first position; The X-axis and the Y-axis move the jet dispensing head; the spray dispensing head is activated to spray the glue droplets onto a test spray plate; Recording the speed of the spraying and the number of the glue droplets; visually scanning to capture the glue droplets on the test spray plate; moving the spray head to a corrected second position; correcting along the Z-axis; According to the compensation value of the Z axis, moving the jet dispensing head along the X, Y, and Z axes; initiating the jet dispensing head to spray the glue droplets onto the test spray plate; and visually scanning to capture the glue The path that drip on the test spray plate.