TW201522206A - Ozone generating device - Google Patents

Abstract

Provided is an ozone generating device including a chamber, a UV light source, and a lamp cover. The chamber includes a first end plane, a second end plane, and a side wall connecting the first end plane with the second end plane. The UV light source is disposed in the chamber, and a reaction space is formed between the UV light source and the side wall of the chamber. The lamp cover has a bottom and a body which define an accommodating space, wherein an end of the UV light source is disposed in the accommodating space, and the bottom of the lamp cover, the first end plane of the chamber, and a portion of the sidewall of the chamber collectively define a buffer space. When gas is transported into the chamber, it flows into the buffer space, and then into the reaction space.

Description

Ozone generating device

The present disclosure relates to an ozone (O ₃ ) generating device, and more particularly to an ozone generating device having an intake buffer space.

Ozone has strong oxidizing properties and is recognized as a highly effective fungicide in the world. It can decompose or eliminate substances that are dangerous to the environment or health. At present, ozone is widely used in many countries and regions, such as disinfection in drinking water and disinfection of medical water.

The way in which ozone generators produce ozone today is mainly divided into the following two types. (1) Corona discharge: The gas is introduced between the two electrode plates to move electrons between the electrodes. These electrons provide energy and free oxygen molecules to generate ozone. The principle is similar to the electric shock phenomenon in nature. When the feed gas is generally air, since the air contains a lot of nitrogen, so in addition to the generation of ozone will produce a number of external nitrogen compounds (NO _x, such as nitrous oxide, etc.), a nitrogen compound such corrosive to human Harmful is the biggest drawback of corona discharge. In addition, in the device used in this method, the discharge gas directly contacts the metal electrode, which easily corrodes the metal electrode, which may cause metal rust dust to be mixed into O ₃ , which is disadvantageous for subsequent ozone application. (2) UV photochemical formula: ultraviolet light (UV) of a low-pressure mercury lamp, when the wavelength is less than 243 nm, the oxygen molecules in the air can be dissociated to form ozone, but due to the lower ratio of the wavelength of 185 nm in the emission spectrum of the mercury lamp, It only accounts for 7% to 15% of the total spectral energy. Therefore, most of the mercury lamp energy cannot be used to dissociate oxygen molecules into ozone. Therefore, the current UV photochemical ozone generator on the market is only suitable for producing a small amount of ozone. For example, it is roughly between 100 and 200 ppm. In addition, the apparatus used in this method often requires a relatively long warm-up time, so the amount of O ₃ generated is not easily controlled, and the generated O ₃ absorbs ultraviolet light having a wavelength of 254 nm to be reduced to O ₂ . All of this constitutes an urgent need for more advanced ozone generating devices.

The present disclosure provides an ozone generating device that can increase the concentration and yield of ozone.

The ozone generating device of the present disclosure includes a reaction chamber, an ultraviolet light source, and a first lamp protection cover. The reaction chamber includes a first end surface, a second end surface, and side walls connected to the first and second end surfaces. The ultraviolet light source is placed in the reaction chamber and a gas reaction space is formed between the side walls of the reaction chamber. The first lamp protection sleeve has a bottom portion and a sleeve body to define an accommodation space, wherein one end of the ultraviolet light source is disposed in the accommodation space, and the bottom of the first lamp tube protection sleeve, the first end surface of the reaction cavity body, and A portion of the sidewall of the reaction chamber collectively defines an intake buffer space. When the gas is introduced into the reaction chamber through the air inlet, it first flows into the air intake buffer space and then flows into the gas reaction space.

Based on the above, the ozone generating device provided by the present disclosure has a special gas flow field design. By forming an intake buffer space between the first lamp protection cover and the first end surface of the reaction chamber, the gas distribution can be made more uniform, whereby the ozone concentration generated is relatively high.

The above features and advantages of the present invention will become more apparent from the following detailed description.

100, 600‧‧‧Ozone generating device

102‧‧‧Reaction chamber

102a‧‧‧ first end face

102b‧‧‧second end face

102c‧‧‧ side wall

102d‧‧‧air inlet

102e‧‧‧Exhaust port

104, 304, 404‧‧‧ ultraviolet light source

106, 206, 207, 217, 306, 606‧‧‧ first lamp protection cover

106a, 122a‧‧‧ bottom

106b, 122b‧‧‧

106c, 122c‧‧‧ accommodating space

108‧‧‧ gas reaction space

110, 210‧‧‧ intake buffer space

112, 212‧‧‧ intake passage

114‧‧‧discharge gas

116‧‧‧Light tube

118, 418‧‧‧ external electrodes

119‧‧‧High voltage source

120, 420‧‧‧ internal electrodes

121‧‧‧Exhaust buffer space

122,322,622‧‧‧Second lamp protection cover

124‧‧‧Exhaust passage

200, 201‧‧‧ trench

203‧‧‧through holes

219‧‧‧ spacer members

302a, 602a‧‧‧ first end cap

302b, 602b‧‧‧ second end cap

302c, 602c‧‧‧ cavity shell

303‧‧‧Support

415‧‧‧ inner tube

416‧‧‧External management

622a, 622b, 622c‧‧‧ components

623‧‧‧ airtight components

625‧‧‧Insulation

D ₁ ‧‧‧Width

L ₁ ‧‧‧ length

R‧‧‧ detention area

1 is a schematic cross-sectional view of an ozone generating apparatus according to a first embodiment of the present disclosure.

2A is a partial enlarged view of an ozone generating device according to a second embodiment of the present disclosure.

2B and 2C are top and perspective views, respectively, of the lamp guard of Fig. 2A.

FIG. 3A is a partial enlarged view of another ozone generating apparatus according to a second embodiment of the present disclosure.

3B and 3C are top and perspective views, respectively, of the lamp guard of Fig. 3A.

4A is a partial enlarged view of still another ozone generating device.

4B and 4C are top and perspective views, respectively, of the lamp guard of Fig. 4A.

FIG. 5A is an exploded perspective view of an ozone generating apparatus according to a third embodiment of the present disclosure.

Figure 5B is a cross-sectional view of the first tube guard of the ozone generating device of Figure 5A and its adjacent members.

Fig. 6 is a schematic cross-sectional view showing another ozone generating apparatus assembled from parts.

Fig. 7 is a schematic view of an ozone generating apparatus according to a fourth embodiment.

Fig. 8A shows the relationship between the concentration of ozone generated and the time during operation of the three ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1.

Fig. 8B is a graph showing the yields of the ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1 under different flow rates.

8C is a schematic cross-sectional view of the ozone generating apparatus of Comparative Example 2.

9A and 9B show the relationship between the concentration of ozone generated and the time of the ozone generating apparatus of Experimental Example 2 and Experimental Example 3 during operation.

1 is a cross section of an ozone generating apparatus according to a first embodiment of the present disclosure. schematic diagram.

Referring to FIG. 1, the ozone generating device 100 includes a reaction chamber 102, an ultraviolet light source 104, and a first tube protective cover 106. Hereinafter, the internal details and interaction relationships of these members will be separately described.

In this embodiment, the reaction chamber 102 includes a first end surface 102a, a second end surface 102b, and a sidewall 102c connected to the first end surface 102a and the second end surface 102b. The first end surface 102a is provided with an air inlet 102d. The second end surface 102b is provided with an exhaust port 102e. When the ozone generating device 100 is in operation, the oxygen-containing gas enters the reaction chamber 102 from the air inlet 102d, is excited by the ultraviolet light source 104, thereby generating ozone, and then exits the reaction chamber 102 through the exhaust port 102e for the next step. Use. For the sake of clarity of illustration, the flow direction of the gas is indicated by an arrow in FIG.

The reaction chamber 102 can be formed by any known method and any known material. For example, the side wall 102c can be made of a transparent material such as glass or quartz, or can be made of metal, and the first end face thereof. The 102a and second end faces 102b may be made of metal or other materials. In this example, the first end face 102a, the second end face 102b, and the side wall 102c may be separate members that are assembled after being formed separately. Examples of such a component to constitute a reaction cavity will be exemplified hereinafter. Of course, in other cases, an integrally formed process is also possible.

The ultraviolet light source 104 is placed within the reaction chamber 102 to form a gas reaction space 108 with the side wall 102c of the reaction chamber 102. The gas introduced into the reaction chamber 102 is irradiated by the ultraviolet light source 104 in the gas reaction space 108 to generate ozone. The size of the gas reaction space 108, that is, the distance between the ultraviolet light source 104 and the side wall 102c of the reaction chamber 102, is generally not particularly limited. However, this distance can be adjusted to achieve the best ozone production. This adjustment is related to the type of light source of the ultraviolet light source 104 and the concentration of oxygen in the air, as explained below.

The ultraviolet light source 104 can be an excimer lamp. The excimer lamp is an advanced ultraviolet light source. It can generate different wavelengths of ultraviolet light depending on the type of discharge gas used. The wavelength can be in the ultraviolet (UV) and vacuum ultraviolet (VUV). For example, ultraviolet light having a wavelength of 172 nm is generated. Since the excimer lamp can generate uniform energy ultraviolet light, it is less likely to excite nitrogen in the air than the general energy distribution of the corona discharge, which will increase the purity of the ozone product. In addition, excimer lamps can also increase the yield of ozone and speed up the time to turn off the lights to the microsecond (μs) level. However, the penetration distance of 172 nm ultraviolet light in air is limited. If the distance between the ultraviolet light source 104 and the side wall 102c of the reaction chamber 102 is too large, the ultraviolet light source 104 may not be sufficient to convert oxygen which is too far away into ozone. So that a part of the oxygen in the gas reaction space 108 does not react, which reduces the ozone generation efficiency. Thus, in the example where the ultraviolet source 104 is an excimer lamp that emits ultraviolet light having a wavelength of 172 nm, the distance between the ultraviolet source 104 and the sidewall 102c of the reaction chamber 102 is preferably controlled to be less than a certain distance, such as less than 3 mm. If the concentration of oxygen in the air passing into the reaction chamber 102 is higher, such as pure oxygen, the distance may be further reduced to 1 mm.

Hereinafter, the ultraviolet light source 104 is an excimer lamp as an example, and will be described in more detail. In this example, the ultraviolet light source 104 includes a bulb 116, an outer electrode 118, an inner electrode 120, and a discharge gas 114 that is filled in the bulb 116. The outer electrode 118 can be a meshed metal electrode and is thus depicted as a plurality of separate line segments in cross-section. The outer electrode 118 is disposed on the outer wall of the bulb 116. The inner electrode 120 can be a linear electrode located within the tube 116. The bulb 116 is filled with a discharge gas 114, such as helium (Xe), which can generate a gas discharge reaction to emit ultraviolet light when a high voltage is applied. A portion of the outer electrode 118 (the right portion in FIG. 1) is in contact with the first tube protective cover 106, and the two are electrically connected. In other words, in the present embodiment, the outer electrode 118 is protected by the first tube. 106 contacts and electrically connected to the reaction chamber 102 Pick up. As for the inner electrode 120, it passes through the reaction chamber 102 and is electrically insulated from the reaction chamber 102. The outer electrode 118 (and the reaction chamber 102 electrically connected thereto) may be grounded, and the inner electrode 120 may be connected to the high voltage source 119, whereby a high voltage is applied to the discharge gas 114 in the bulb 116. .

The first lamp protection cover 106 is fixed in the reaction chamber 102, and can house, support and protect the ultraviolet light source 104. The material thereof is not particularly limited, but may be aluminum in this embodiment. The first lamp protection cover 106 has a bottom portion 106a and a sleeve body 106b. The bottom portion 106a and the sleeve body 106b define an accommodation space 106c, and one end of the ultraviolet light source 104 (the right end in FIG. 1) is placed in the accommodation space 106c. Inside. The height of the sleeve 106b is not particularly limited, so that it is sufficient to accommodate the ultraviolet light source 104. Of course, if the sleeve 106b is made of an opaque material, the height thereof should not be too large, so as to shield the ultraviolet light generated by the ultraviolet light source 104. . The thickness of the sleeve 106b is also not particularly limited, and in one example, it may be as thin as about 1 mm.

The bottom portion 106a of the first tube protective cover 106, the first end surface 102a of the reaction chamber 102, and a portion of the side wall 102c of the reaction chamber 102 (the portion closest to the first end surface 102a in Fig. 1) collectively define an intake buffer Space 110. As is clear from FIG. 1, when the gas is introduced into the reaction chamber 102 via the intake port 102d, it flows into the intake buffer space 110 first, is evenly dispersed in the intake buffer space 110, and flows into the gas reaction space 108. This can avoid the retention zone in which the gas is generated in the reaction chamber 102, and the ozone generating apparatus 100 of the present embodiment can increase the yield of ozone due to the improvement of the gas retention phenomenon. This result will be confirmed experimentally below. The length L _{1 of the} intake buffer space 110 is not particularly limited and may be adjusted according to the overall size of the ozone generating apparatus 100 and the size of each component, and may be, for example, between 0.5 mm and 6 mm.

Although the air inlet 102d is illustrated as being disposed on the first end surface 102a in FIG. 1, the present disclosure is not limited thereto. For example, the air inlet 102d may also be disposed on the side wall 102c at a position closer to the first end surface 102a as long as the gas enters the reaction chamber via the air inlet 102d. At 102 o'clock, the air intake buffer space 110 is first entered and then flows into the gas reaction space 108.

In addition, an intake passage 112 is formed between the sleeve 106b of the first tube cover 106 and the side wall 102c of the reaction chamber 102. When the gas is introduced into the reaction chamber 102 from the intake port 102d, the gas first flows into the intake buffer space 110 and then flows into the gas reaction space 108 via the intake passage 112. An intake passage 112 has a width, i.e. the distance between the side walls 102c 106b and sleeve reaction chamber body 102, generally can be adjusted, in the present embodiment, the intake channel width D ₁ 112 is less than 3mm.

Furthermore, the ozone generating device 100 further includes a second tube protective cover 122. The function, material, structure and position of the second lamp protection cover 122 may be similar or corresponding to the first lamp tube cover 106, having a bottom portion 122a and a sleeve body 122b, and the accommodation space defined by the bottom portion 122a and the sleeve body 122b. 122c. The other end (left end in Fig. 1) of the ultraviolet light source 104 is placed in the accommodating space 122c. Similarly, an exhaust buffer space 121 is formed between the bottom portion 122a of the second tube protective cover 122 and the second end surface 102b of the reaction chamber 102, and the exhaust buffer space 121 and the exhaust port 102e are in direct communication. Similarly, an exhaust passage 124 is formed between the sleeve 122b of the second tube cover 122 and the side wall 102c of the reaction chamber 102. Therefore, when the gas is introduced into the reaction chamber 102 from the air inlet 102d, the gas sequentially flows into the intake buffer space 110, the intake passage 112, the gas reaction space 108, the exhaust passage 124, and the exhaust buffer space 121, and finally The exhaust port 102e flows out of the reaction chamber 102. The presence of the exhaust buffer space 121 allows the gas flow field velocity to be relatively uniform and smooth, which helps to discharge the gas containing the high concentration of ozone out of the reaction chamber 102. If there is no exhaust buffer space 121, the ozone concentration is high. The gas may stay in the reaction chamber where the flow rate is slow or turbulent, and after a short time, it will return to oxygen, and even if it is excited again, it will reduce the probability of being discharged from the reaction chamber. Yield and concentration.

Other features pertaining to the present embodiment are also described below. In Figure 1, ultraviolet light The source 104 coincides with the central axis of the reaction chamber 102. In the present embodiment, the reaction chamber 102 has a tubular shape. Therefore, if the intake buffer space 110 is taken to have a cross section perpendicular to the central axis, the cross section may be a circular cross section; if the intake passage 112 is taken one and the foregoing A section perpendicular to the central axis, which is a circular section. In this embodiment, the area of the circular cross section may be greater than or equal to the area of the annular cross section to promote the effects of gas buffering and gas distribution.

Although FIG. 1 illustrates one possible aspect of the first lamp protector 106 and the second lamp protector 122, this is only one of many possibilities. As long as the physical structure of the first lamp protection cover can provide an air intake buffer space and allow gas to flow uniformly into the gas reaction space, the object of the present disclosure can be satisfied. The following examples illustrate several other possible aspects.

2A is a partial enlarged view of an ozone generating device according to a second embodiment of the present disclosure. 2A is a schematic view of the first lamp protection cover and the components in the vicinity thereof, that is, only the reaction cavity 102, the first end surface 102a and the side wall 102c, the ultraviolet light source 104, the air inlet 102d, and the first lamp are depicted. Tube protector 206.

The difference between the embodiment illustrated in Figures 2A and 1 is that the first tube guard sleeve 206 of Figure 2A abuts the first end face 102a and the side wall 102c of the reaction chamber 102. Nevertheless, the intake buffer space and the intake passage can be realized through the structural design, as explained below.

2B and 2C are top and perspective views, respectively, of the first tube guard 206 of FIG. 2A.

Referring to FIG. 2A, FIG. 2B and FIG. 2C, in this example, the first lamp protection cover 206 is formed with a plurality of grooves 200 starting from the bottom of the first lamp protection cover 206. Radially extends to its casing. Although eight grooves are illustrated in the drawings, the number of grooves is not particularly limited. The groove 200 at the bottom of the first tube protection cover 206 and the first end surface 102a together form an intake buffer space 210, the groove 200 on the casing and the reaction chamber 102. The side wall 102c constitutes a plurality of intake passages 212. When the gas is introduced into the reaction chamber 102 from the intake port 102d, the gas flows into the intake buffer space 210, and then flows into the gas reaction space via the intake passage 212. The depth of each of the grooves 200 may be the same or different from each other, and is also not particularly limited as long as the gas can pass, for example, may be less than 1 mm.

FIG. 3A is a partial enlarged view of another ozone generating apparatus according to a second embodiment of the present disclosure. 3B and 3C are top and perspective views, respectively, of the first tube guard of Fig. 3A.

Referring to FIG. 3A, FIG. 3B and FIG. 3C, in this example, a plurality of trenches 201 are formed at the bottom of the first tube protective cover 207. The groove 201 radiates outward from the center of the bottom of the first tube guard 207 and extends to the edge of the bottom to provide an intake buffer space. A plurality of through holes 203 are formed in the casing of the first tube protective cover 207. Each of the through holes 203 is in communication with one of the grooves 201. When the gas is introduced into the reaction chamber 102 from the inlet port 102d, the gas first flows into the intake buffer space, and then flows into the gas reaction space through the through holes 203.

4A is a partial enlarged view of another ozone generating device. 4B and 4C are top and perspective views, respectively, of the lamp guard of Fig. 4A.

Referring to FIG. 4A, FIG. 4B and FIG. 4C, in this example, a spacer member 219 is disposed on the bottom of the first tube protective cover 217. The spacer member 219 abuts against the first end face 102a of the cavity 102, whereby the intake buffer space is formed between the bottom of the first lamp guard 217 and the first end face 102a. In other words, in this example, the length of the intake buffer space is determined by the height of the spacer member 219. Similar to the example depicted in FIGS. 3A to 3C, a plurality of through holes 203 are also formed in the casing of the first tube cover 217. Each of the through holes 203 is in communication with the intake buffer space. When the gas is introduced into the reaction chamber 102 from the inlet port 102d, the gas first flows into the intake buffer space, and then flows into the gas reaction space through the through holes 203.

Please refer to FIG. 1 again. FIG. 1 shows the overall structure of the ozone generating device, as before. As described herein, the ozone generating device can be assembled from a plurality of parts. To this end, Figures 5A and 6 show two other embodiments, the details of which may differ slightly from those depicted in Figure 1, however, the effect of allowing gas to enter the intake buffer space and then enter the gas reaction space is the same. .

FIG. 5A is an exploded perspective view of an ozone generating apparatus according to a third embodiment of the present disclosure. This figure illustrates the ease of disassembly and assembly of the device of the present invention.

Referring to FIG. 5A, the components of the ozone generating device include a first end cap 302a, a second end cap 302b, a cavity housing 302c, an ultraviolet light source 304, a first tube guard 306, and a second tube guard 322. As shown by the dashed line frame, many of the members have mutually corresponding threads and are therefore suitable for being secured together in a threaded manner. For example, the first end cap 302a, the second end cap 302b, and the cavity housing 302c can be joined together to form a reaction chamber. It should be noted that there are a plurality of spherical support members 303 between the first lamp tube cover 306 and the cavity housing 302c for positioning the first lamp tube cover 306. This is different from the positioning of the first lamp protection cover 106 in the first embodiment. Of course, the spherical supports 303 are spaced apart from one another so as not to affect the flow of gas from the inlet to the center of the reaction chamber. In this regard, reference is also made to Figure 5B, which is a side cross-sectional view of the first tube guard 306 and its adjacent members as viewed along the axial direction of the reaction chamber. Although FIG. 5A illustrates an embodiment in which the corresponding components are combined by threads, the present invention is not limited thereto. In other embodiments, any other known means may be used in combination with the ozone generating device. Components.

Fig. 6 is a schematic cross-sectional view showing another ozone generating apparatus assembled from parts. Unlike Fig. 5A, Fig. 6 shows an ozone generating apparatus after assembly.

Referring to FIG. 6, the basic components of the ozone generating device 600 include a first end cap 602a, a second end cap 602b, a cavity housing 602c, an ultraviolet light source 104 (same as that depicted in FIG. 1), and a first tube protective cover 606. And a second lamp cover 622. The first end cap 602a, the cavity housing 602c and the first tube protective sleeve 606 are made of metal (for example, aluminum), and the first end The cover 602a and the cavity housing 602c are electrically connected to the outer electrode 118 of the ultraviolet light source 104 through the first lamp tube cover 606 to ground the outer electrode 118. In order to excite the helium gas and thereby generate ultraviolet light, a high voltage across the inner electrode 120 and the outer electrode 118 of the ultraviolet light source 104 is generally required. Therefore, electrical insulation must be maintained between the inner electrode 120 and the outer electrode 118. To this end, the second end cap 602b is made of an insulating material, and an example of the insulating material may be a general engineering plastic such as Teflon (PTFE) or poly(ether-ether-ketone); PEEK. ).

As for the second lamp protection cover 622, engineering plastics such as PEEK are used to achieve the insulation effect, but the processing property of the plastic may not be as good as that of the metal. To this end, the second lamp guard 622 is designed as a member that is joined by the assembly 622a, the assembly 622b, and the assembly 622c. In the portion in contact with the ultraviolet light source 104, the thickness of the sleeve of the second tube guard 622 should be thinner, so that the component 622a is made of a metal material that is more favorable for processing. In the portion joined to the second end cap 602b, the component 622c is also made of a metal material which is advantageous for processing because of a complicated type. The two are separated by a component 622b made of PEEK plastic material to ensure insulation. In addition, an airtight member 623 (such as an O-ring) may be disposed at the junction of the second lamp tube cover 622 and the second end cover 602b to prevent gas from escaping therefrom, and the second tube protection cover 622 All of them may be made of a metal material as long as an insulating layer 625 is interposed between the inner electrode 120 and the protective cover 622.

Referring again to FIG. 1, the ultraviolet light source 104 illustrated in FIG. 1 is an excimer lamp of a single lamp. As already mentioned above, the ultraviolet light source 104 of the present disclosure is not limited thereto. Even though the ultraviolet light source 104 is an excimer lamp, it is not limited to that shown in FIG. For example, the ultraviolet light source 104 can be an excimer lamp of a double tube, as shown in FIG.

FIG. 7 is a schematic diagram of an ozone generating apparatus according to a fourth embodiment, wherein the ozone generating apparatus is substantially the same as that illustrated in FIG. 1, and the difference is only in the configuration of the ultraviolet light source.

Referring to FIG. 7, the ultraviolet light source 404 includes an outer tube 416, an inner tube 415, an outer electrode 418, and an inner electrode 420. The inner tube 415 is located within the outer tube 416 with a discharge gas 114 (e.g., Xe) filled between the outer tube 416 and the inner tube 415. The outer electrode 418 is disposed on the outer wall of the outer tube 416. The inner electrode 420 is disposed on the inner wall of the inner tube 415. As an excimer lamp, the operating principle of the ultraviolet light source 404 can be identical to that described in the first embodiment. The difference is that the inner electrode 120 in the first embodiment has to penetrate the bulb 116 (Fig. 1) to excite the discharge gas 114. Therefore, it is generally necessary to perform a step of sealing the metal (electrode material) and ceramic (light tube material) when the inner electrode 120 penetrates the bulb 116, which makes it difficult to add a process. In the structure of the double tube of this embodiment, the inner electrode 420 does not need to pass through the tube but is disposed on the inner wall of the inner tube 415, and the step of sealing the metal and ceramic can be omitted.

<experiment>

The disclosure will be described more specifically below with reference to experimental examples. Although the following experiments are described, the materials used, their amounts and ratios, processing details, processing procedures, and the like can be appropriately changed without departing from the scope of the present disclosure. Therefore, the present disclosure should not be construed restrictively based on the experiments described below.

Fig. 8A shows the relationship between the concentration of ozone generated and the time during operation of the three ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1. The experiments shown in Fig. 8A were all carried out under the conditions of a gas flow rate of 18 L/min.

Comparative Example 1 is a conventional ozone generating device (Ozone Technology, model UV-10) using a commercially available mercury lamp (power 35 W) as an ultraviolet light source. Because mercury is a liquid, it must wait for a period of warming before it is converted into a vapor. The gas molecules are then hit by electrons to emit ultraviolet light. Therefore, the ozone generating apparatus of Comparative Example 1 generates ozone at a relatively slow rate (the slope in the figure is low). Comparative Example 2 is an ozone generating device using an excimer lamp as an ultraviolet light source, and its structure is as shown in Fig. 8C. The ozone generating device of FIG. 8C and the ozone generating device of the present disclosure illustrated in FIG. Similarly, the difference is that in the ozone generating apparatus of Comparative Example 2, the lamp protective sleeves respectively abut against the two end faces of the cavity, and the intake port and the exhaust port are respectively disposed on the side walls of the cavity. After the gas is introduced from the air inlet, the moving path is substantially as shown by the arrow in FIG. 8C. However, in this design, since the ozone generating device has no intake buffer space and no exhaust buffer space, the gas cannot be uniformly distributed. Dispersed in the cavity, it can not smoothly flow to the exhaust port, but a trap zone R is formed at the intake and exhaust points, so that the gas is trapped between the lamp tube and the sidewall of the cavity. Ozone is a compound with a short half-life. Once it is retained in the reaction chamber, it will soon be converted into oxygen, which makes the energy in vain, and the ozone generator has poor productivity and productivity.

Since the excimer lamp was used, the ozone generating device of Comparative Example 2 produced ozone much faster than Comparative Example 1. However, due to the aforementioned design defects, the maximum ozone concentrations of Comparative Examples 1 and 2 are not far behind.

In Experimental Example 1, an excimer lamp was used as an ultraviolet light source, and the structure was designed as shown in Fig. 6. Just as the difference between FIG. 6 and FIG. 8C is only the presence or absence of the intake buffer space and the exhaust buffer space, the difference between Experimental Example 1 and Comparative Example 2 is also only here; the materials and dimensions of the respective members of the ozone generating device are basically They are all the same. In Experimental Example 1, the lamp of the excimer lamp was a quartz tube having a length of 140 mm, the metal inner electrode penetrated into the quartz tube, and the metal mesh outer electrode was grounded. The quartz tube was filled with about 300 torr of Xe gas. The starting voltage is 1500V (60kHz). This excimer lamp produces ultraviolet light having a wavelength of about 172 nm.

As shown in FIG. 8A, the ozone generating apparatus of Experimental Example 1 not only generates ozone rapidly (the slope is the largest among the three curves), but also the ozone concentration which can be stably achieved is much higher than that of Comparative Example 1 and Comparative Example 2, almost reaching More than twice. This confirms the effect of the present disclosure.

Fig. 8B shows the yields of the ozone generating devices of Comparative Example 1, Comparative Example 2, and Experimental Example 1 under different flow rates. Referring to FIG. 8B, in comparison with Comparative Example 1, since Comparative Example 2 employs an excimer lamp, it is possible to generate ozone of a comparable concentration with a relatively low power. Therefore, the yield thereof is improved. As for the ozone generating apparatus of Experimental Example 1, the ozone yield was far more than Comparative Examples 1 and 2 due to its unique structural design (especially the setting of the intake buffer space).

9A and 9B show the relationship between the concentration of ozone generated and the time of the ozone generating apparatus of Experimental Example 2 and Experimental Example 3 during operation. The experiments were all carried out under the conditions of a gas flow rate of 18 L/min. Both Experimental Example 2 and Experimental Example 3 used an ozone generating apparatus as depicted in Fig. 6. The difference is that the length L _{1 of the} intake buffer space is different. The L ₁ of Experimental Example 2 was 6 mm. The L ₁ of Experimental Example 3 was 0.5 mm. It can be seen that as long as the intake buffer space exists, at least the length between 0.5 mm and 6 mm can complete the effect of buffering and uniformly distributing the gas.

In summary, the present disclosure focuses on the gas flow field design of the ozone generating device, and can also take into consideration the convenience of fabrication and assembly, and does not require too high cost. The design of the present disclosure makes the external gas (such as air or pure oxygen) uniformly pass through the surface of the ultraviolet light source, so that the ozone concentration generated is relatively high, and the ozone generating device currently using the ultraviolet light source is complicated to manufacture, and the cavity is complicated. Easy to break and other issues.

Although the present disclosure has been described above by way of examples, it is not intended to limit the disclosure. Any person having ordinary skill in the art can make some changes and refinements without departing from the spirit and scope of the disclosure. Therefore, the scope of protection of this application is subject to the definition of the scope of the patent application attached.

100‧‧‧Ozone generating device

102‧‧‧Reaction chamber

102a‧‧‧ first end face

102b‧‧‧second end face

102c‧‧‧ side wall

102d‧‧‧air inlet

102e‧‧‧Exhaust port

104‧‧‧UV source

106‧‧‧First lamp cover

106a, 122a‧‧‧ bottom

106b, 122b‧‧‧

106c, 122c‧‧‧ accommodating space

108‧‧‧ gas reaction space

110‧‧‧Air intake buffer space

112‧‧‧Intake passage

114‧‧‧discharge gas

116‧‧‧Light tube

118‧‧‧External electrode

119‧‧‧High voltage source

120‧‧‧ internal electrodes

121‧‧‧Exhaust buffer space

122‧‧‧Second lamp cover

124‧‧‧Exhaust passage

D ₁ ‧‧‧Width

L ₁ ‧‧‧ length

Claims (21)

An ozone generating device comprising: a reaction chamber comprising a first end surface, a second end surface and a side wall connected to the first and second end surfaces; an ultraviolet light source disposed in the reaction chamber, wherein the ultraviolet Forming a gas reaction space between the light source and the sidewall of the reaction chamber; and a first lamp protection sleeve having a bottom and a body to define an accommodation space, wherein one end of the ultraviolet light source is placed in the volume a space in the space, and the bottom portion of the first lamp protection sleeve, the first end surface of the reaction chamber, and a portion of the side wall of the reaction chamber collectively define an air intake buffer space, wherein when a gas passes through When the gas port is introduced into the reaction chamber, the gas first flows into the intake buffer space and then flows into the gas reaction space. The ozone generating device of claim 1, wherein the sleeve of the first tube protective sleeve and the side wall of the reaction chamber form an intake passage, and when the gas is used by the intake When the mouth is introduced into the reaction chamber, the gas first flows into the intake buffer space, and then flows into the gas reaction space via the intake passage. The ozone generating device of claim 2, wherein the inlet passage has a width of less than 3 mm. The ozone generating device of claim 1, wherein the first tube protective sleeve has a plurality of grooves, and the grooves and the side wall of the reaction chamber constitute a plurality of intake passages, when When the gas is introduced into the reaction chamber from the gas inlet, the gas first flows into the intake buffer space, and then flows into the gas reaction space through the intake passages. The ozone generating device of claim 4, wherein the grooves have a depth of less than 1 mm. The ozone generating device of claim 4, wherein the grooves are in the The bottom of the first tube cover is arranged in a radial form. The ozone generating device of claim 1, wherein the first tube protective sleeve has a plurality of through holes, and when the gas is introduced into the reaction chamber from the air inlet, the gas flows into the first The intake buffer space flows into the gas reaction space through the through holes. The ozone generating device of claim 1, wherein the ultraviolet light source comprises: a lamp tube, wherein a discharge gas is filled in the lamp tube; an inner electrode is disposed inside the lamp tube, and one end thereof extends To the outside of the tube; and an external electrode, a portion of which is in contact with the first tube protection sleeve, and the two are electrically connected. The ozone generating device of claim 1, wherein the ultraviolet light source comprises: an outer tube; an inner tube; wherein the outer tube is filled with a discharge gas between the outer tube and the inner tube; An outer electrode is disposed on the outer wall of the outer tube; and an inner electrode is disposed on the inner wall of the inner tube. The ozone generating device of claim 1, wherein the ultraviolet light source comprises: a lamp tube, wherein a discharge gas is filled in the lamp tube; an external electrode is disposed on an outer wall of the lamp tube; and The inner electrode is located inside the tube. The ozone generating device of claim 9 or 10, wherein the inner electrode passes through the reaction chamber and is electrically insulated from the reaction chamber, and the outer electrode is covered by the first tube Contacted and electrically connected to the reaction chamber. The ozone generating device of claim 1, further comprising a second tube protective cover having a bottom and a set, the bottom of the second tube protective cover and the sleeve defining another An accommodating space, wherein the other end of the ultraviolet light source is disposed in the another accommodating space. The ozone generating device of claim 12, wherein an exhaust buffer space is formed between the bottom of the second tube protective cover and the second end surface of the reaction chamber. The ozone generating device of claim 13, wherein the intake buffer space and the exhaust buffer space have lengths greater than or equal to 0.5 mm, respectively. The ozone generating device of claim 13, wherein the exhaust buffer space is in direct communication with an exhaust port of the reaction chamber. The ozone generating device of claim 15, wherein the casing of the second lamp protective sleeve and the side wall of the reaction chamber form an exhaust passage. The ozone generating device of claim 16, wherein when the gas is introduced into the reaction chamber from the air inlet, the gas first flows into the air intake buffer space, and then flows into the gas through the air inlet passage. The reaction space then flows into the exhaust buffer space via the exhaust passage, and finally flows out of the reaction chamber through the exhaust port. The ozone generating device of claim 1, wherein the ultraviolet light source and the central axis of the reaction chamber coincide. The ozone generating device of claim 1, wherein the ultraviolet light source and the side wall of the reaction chamber are less than 3 mm apart. The ozone generating device of claim 1, wherein the intake buffer space has a cross-sectional area perpendicular to a central axis of the reaction chamber that is greater than or equal to a cross-sectional area of the intake passage perpendicular to the central axis of the reaction chamber. The ozone generating device of claim 1, wherein the ultraviolet light source is an excimer lamp.