TW201522010A - Light irradiation device - Google Patents

Abstract

The purpose of the present invention is to provide a light irradiation device capable of emitting multi-wavelength ultraviolet ray with an uniform peak intensity toward the external side of a drum. The light irradiation device of the present invention comprises a plurality of optical units each including: a light source part composed by a plurality of light-emitting components arranged on a substrate along a first direction and a second direction of; and a pair of rectangular reflectors configured for clamping an optical axis of the plurality of light-emitting components from the second direction; and light beam emitted from the light source part and guided by a pair of reflectors so as to emit light beam with predetermined divergent angle and quantity of light toward the drum. The plurality of optical units are composed by N*M (M is an integer greater than 1) optical units for emitting light beam with N (N is an integer greater than 2) different wavelengths, and the emission planes of the N*M optical units are arranged on a predetermined reference plane. The distance between a pair of reflectors of each optical unit is determined according to the distance from the reference plane of the optical axis to the external side of the drum.

Description

Light irradiation device

BACKGROUND OF THE INVENTION 1. Field of the Invention This invention relates to a light-irradiating device that illuminates a sheet-like illuminating target that moves in close proximity along a portion of the outer side of a cylindrical drum; in particular, a light-irradiating device that emits light of a plurality of different wavelengths.

Conventionally, in order to form a predetermined pattern or a fine structure on a glass substrate, a plastic substrate, or a film substrate, an ultraviolet curable resin is widely used. Such an ultraviolet curable resin is designed, for example, by curing by irradiation with ultraviolet light having a wavelength of around 365 nm, and is cured by a light irradiation device (so-called ultraviolet irradiation device) that irradiates ultraviolet light. .

A technique of forming a fine structure on a substrate, for example, a nanoimprint method. The nanoimprint method is excellent for producing a nanostructure-sized fine structure pattern on the surface of a substrate, particularly from the viewpoints of mass productivity and release property. In order to transfer and reproduce a fine structure pattern, a structure using a roll-shaped mold has been proposed. A pattern forming apparatus having such a configuration is described in, for example, Patent Document 1.

In the pattern forming apparatus described in Patent Document 1, a film having an ultraviolet curable resin coated on its surface is wound around a roll-shaped mold having a fine structure pattern formed on the outer surface thereof, and the outer surface of the mold is irradiated with ultraviolet light from the light irradiation device. After the light is hardened by the resin, it is peeled off from the mold, whereby the fine structure pattern is continuously (repeatedly) transferred onto the film.

The transfer quality of the fine structure pattern obtained by this method is determined by the hardening step of the resin by ultraviolet light, so in order to improve the transfer quality (that is, in order to obtain a correct fine structure pattern), When the film is in a state of being in close contact with the mold, the resin is surely cured. Then, in order to harden the resin more reliably, a configuration in which ultraviolet light of a plurality of wavelengths is emitted has been proposed (for example, Patent Document 2).

The pattern forming apparatus described in Patent Document 2 is a device in which an ultraviolet curable resin is applied to a substrate in a line shape and then cured by ultraviolet light. First, the short-wavelength ultraviolet light is irradiated, and only the surface portion of the resin is hardened, and then the long-wavelength ultraviolet light which easily penetrates into the inside of the resin is irradiated to harden the inside of the resin, thereby reliably curing the linear coated resin.

[Previous Technical Literature]

[Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2013-086388

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2012-143691

In the pattern forming apparatus described in Patent Document 1, when a fine structure pattern is produced by a roll-shaped mold (that is, a roll), it is necessary to replace the corresponding mold in accordance with the required fine structure pattern and the film to be used. Ontology. Therefore, in order to cope with the molds of various outer diameters and to secure the working space at the time of mold replacement, a light irradiation device in which the light exit surface facing the outer surface of the mold is planar is required.

Therefore, in the case where the structure described in Patent Document 2 (that is, a structure in which ultraviolet light of a plurality of wavelengths is irradiated) is applied to the pattern forming apparatus described in Patent Document 1, an optical unit that emits ultraviolet light of a different wavelength is desired. It is arranged in a plane shape with respect to the outer side of the mold.

However, if the optical units of different wavelengths are arranged in a planar shape with respect to the outer side surface of the mold, the distances from the respective optical units to the mold are different, and the ultraviolet light having different peak intensities at each wavelength is injected into the resin on the mold. When the ultraviolet light having different peak intensities according to the respective wavelengths is injected into the resin, the curing of the resin is affected by the ultraviolet light having a low peak intensity, and the fine structure pattern cannot be accurately transferred, and the transfer quality and the product are obtained. The problem of significantly reduced reliability. Further, if the transfer speed is slowed down by the ultraviolet light having a low peak intensity and the integral light is increased, the transfer quality can be improved, but this method has a problem that the production efficiency is remarkably lowered.

The present invention has been made in view of the above circumstances, and an object thereof is to provide a light irradiation device which is configured to arrange optical units for emitting ultraviolet light of different wavelengths in a plane shape with respect to an outer side surface of a mold (that is, a reel). On the other hand, it can emit ultraviolet light whose peak intensity is uniform between wavelengths.

In order to achieve the above object, a light-irradiating device according to the present invention is a light-irradiating device that irradiates light to a sheet-shaped illuminating target that moves in close contact with a part of the outer surface of the cylindrical roll, and includes a plurality of optical units having a plurality of optical units a light source unit formed of a light-emitting element, wherein the light-emitting element is arranged in a first direction parallel to a central axis of the roll and arranged in a first predetermined interval (n is an integer of 2 or more) along the first direction. a second direction perpendicular to the first direction and arranged in m columns (m is an integer of 1 or more) across the second predetermined interval, and arranged such that the optical axis direction coincides with the third direction perpendicular to the substrate surface; And a pair of rectangular mirrors extending in the first direction and the third direction so as to sandwich the optical axis of the plurality of light-emitting elements from the second direction, and arranged such that the reflecting surfaces face each other; and the light from the light source unit Guided by a pair of mirrors, and then emitting a predetermined divergence angle and a quantity of light to a portion of the outer surface of the reel; the plurality of optical units are N x of light of different wavelengths (N is an integer of 2 or more). M (M is 1 or more The optical unit is configured such that each of the exit surfaces of the N×M optical units is disposed on a predetermined reference plane defined by the first direction and the second direction; and the distance between one of the optical units and the mirror is It is set according to the distance from the reference plane of the optical axis to the outer side of the reel.

According to this configuration, although the configuration in which the N × M optical units are arranged in a planar shape with respect to the outer surface of the reel is formed, each of the optical units is set in accordance with the distance from the reference plane of the optical axis to the outer surface of the reel. Since the distance between the mirrors is such that ultraviolet light having a peak intensity that is uniform between the N kinds of wavelengths can be emitted.

Further, among the N × M optical units, the optical unit having the longest distance from the reference plane of the optical axis to the outer surface of the reel is the first optical unit, and sequentially starts from the first number along the second direction. When defining the optical unit of No. N×M, the distance between the pair of mirrors of the i-th (i is an integer of 1×N=M or less) optical unit is a _i , and the reference plane from the optical axis to the volume The distance from the outer side surface of the cylinder is b _i , and the size of the light source portion in the second direction is c, and the distance between the mirrors at both ends in the second direction is d, and when the diameter of the reel is e, it is desirable to satisfy The following formulas (1), (2) and (3).

a _i >c‧‧‧(1)

a _i ×b _i =k (k is a given constant)‧‧‧(2)

d<e‧‧‧(3)

Further, among the N × M optical units, a pair of extension mirrors are provided, and the optical unit having the longest distance from the reference plane of the optical axis to the outer surface of the reel is used as the first optical unit, and along the second direction. When the optical unit of the Nth and Mth optical units is sequentially defined from the first number, the front end portions of the respective mirrors located at both ends in the second direction extend slightly in parallel to the vicinity of the outer side surface of the reel, and are respectively reflected from the No. 1 And the light emitted by the optical unit No. N×M; the distance between the optical unit of the first optical unit and the pair of mirrors is a ₁ , and the reference plane from the optical axis of the optical unit of the first optical unit is outside the reel The distance from the side is b ₁ , the distance between the N×M optical unit and the pair of mirrors is a _(N×M) , and the reference plane from the optical axis of the N×M optical unit is to the reel The distance between the outer side surface is b _{(N × M)} , and the distance between the pair of mirrors of the optical unit of the i-th (i is an integer of 2 or more (N × M-1) or less) is a _i , and the ith number is made. between the optical axis of the optical unit from the reference plane to the outer surface of the spool is b _i, the size of the light source portion in the second direction is c, is located in the second direction so that both ends of the mirror Distance d, e and when the diameter of the roll, it is desirable to satisfy the following formula (4), (5) and (6).

a ₁ , a _(N×M) , a _i >c‧‧‧(4)

a ₁ ×b ₁ /2=a _(N×M) ×b _(N×M) /2=a _i ×b _i =k (k is a predetermined constant)‧‧‧(5)

D≦e‧‧‧(6)

Further, it is desirable that the respective emitting surfaces of the N × M optical units are arranged at equal intervals along the second direction.

Further, it is desirable that the N×M optical units are arranged in a grouped manner in accordance with the respective wavelengths so that the irradiation target is sequentially received with light of a short wavelength to a long wavelength in accordance with the movement of the irradiation target. According to this configuration, when the ultraviolet curable resin is applied to the surface of the irradiation target, the surface of the ultraviolet curable resin can be hardened after being hardened.

Further, a plurality of light-emitting elements are LEDs having a substantially square light-emitting surface, and it is desirable to arrange them in such a manner that both sides of the light-emitting surface are parallel to the first side.

Further, a plurality of light-emitting elements are LEDs having a substantially square light-emitting surface, and it is desirable to arrange them in such a manner that the diagonal line on one side of the light-emitting surface is parallel to the first direction. According to this configuration, the light emitted from the LED and the light emitted from the LED adjacent to the LED are superposed on each other in the first direction and the second direction, so that a more uniform amount of light can be obtained on the target. distributed.

In addition, m is 2 or more, and among the plurality of light-emitting elements, it is desirable to set the v-th column in the second direction (v is 1 or more (m-1) or less only at a distance of 1/2 of the first predetermined interval. Integer) The light-emitting elements are arranged to be shifted from the (v+1)-th column light-emitting element in the first direction. According to this configuration, since the linear light rays of the (v+1)th column and the linear light rays of the (v+1)th column cancel each other, the portions of the linear light rays of the (v+1)th column are canceled, and the target object is substantially uniform in the first direction. The amount of light distribution.

Further, the light-emitting element is preferably configured to have at least one or more LED chips.

Further, it is desirable that N different wavelengths of light contain light having a "wavelength that acts on the ultraviolet curable resin coated on the surface of the object to be irradiated".

Further, it is desirable that the pair of mirrors have a rectangular shape when viewed from the second direction.

As described above, according to the light irradiation device of the present invention, even if the optical unit that emits ultraviolet light of different wavelengths is arranged in a planar shape with respect to the outer side surface of the reel, the peak intensity of the reel can be emitted at each wavelength. Consistent UV light.

100, 200, 300, 400‧‧‧ light irradiation devices

101‧‧‧Substrate

105‧‧‧ Covering glass

110, 110A, 110B‧‧‧1st LED unit

112, 122, 132‧‧‧ Light source department

113, 123, 133‧‧‧ LED components

113a‧‧‧Lighting surface

113b‧‧‧LED chip

114a, 114b, 124a, 124b, 134a, 134b‧‧‧ mirror

120, 120A, 120B‧‧‧2nd LED unit

130, 130A, 130B‧‧‧3rd LED unit

210, 230‧‧‧Extended mirror

A‧‧‧ area

a ₁ , a ₂ , a ₃ ‧ ‧ interval

PH‧‧‧X-axis direction spacing

PV‧‧‧Y-axis spacing

AX1~AX3‧‧‧ optical axis

P1, P2‧‧‧ illumination target

D1‧‧‧ large diameter reel

D2‧‧‧ small diameter reel

R1, R3‧‧‧ reflection path

E1, E2, E3‧‧‧ areas

O2‧‧‧ central axis

Fig. 1 is a front elevational view showing a light irradiation device according to a first embodiment of the present invention.

Fig. 2 is a left side view of a light irradiation device according to a first embodiment of the present invention.

Fig. 3 is an enlarged view of a region shown by A in Fig. 1.

Fig. 4 is a view showing the relationship between the ultraviolet light emitted from the light irradiation device according to the first embodiment of the present invention and the irradiation region of the reel.

Fig. 5 is a graph showing the intensity distribution of ultraviolet light emitted from the light irradiation device according to the first embodiment of the present invention on a reel.

Fig. 6 is a view for explaining the relationship between the ultraviolet light emitted from the light irradiation device according to the first embodiment of the present invention and the irradiation region of the reel.

Fig. 7 is a graph showing the intensity distribution of ultraviolet light emitted from the light irradiation device according to the first embodiment of the present invention on a reel.

Fig. 8 is a left side view showing the configuration of a light irradiation device according to a second embodiment of the present invention.

Fig. 9 is a graph showing the intensity distribution of ultraviolet light emitted from a light irradiation device according to a second embodiment of the present invention on a reel.

FIG. 10 is a view showing a configuration of a first LED unit, a second LED unit, and a third LED unit included in the light irradiation device according to the third embodiment of the present invention.

FIG. 11 is a view showing a configuration of a first LED unit, a second LED unit, and a third LED unit included in the light irradiation device according to the fourth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. In addition, the same or corresponding portions in the drawings are denoted by the same reference numerals, and the description thereof will not be repeated.

(First embodiment)

Fig. 1 is a front view of a light irradiation device 100 according to a first embodiment of the present invention. Fig. 2 is a left side view of the light irradiation device 100 according to the first embodiment of the present invention. In addition, FIG. 3 is an enlarged view of a region shown by A in FIG. 1. The light irradiation device 100 of the present embodiment is incorporated in a pattern forming device or the like (hereinafter referred to as "main body device"), and the device for curing the ultraviolet curable resin applied to the surface of the object to be irradiated is described later. The sheet-shaped illuminating target that is partially in close contact with one of the outer side surfaces of the reel disposed on the body device illuminates the light. The reel disposed on the main body device is configured to be replaced in accordance with a desired fine structural pattern and the characteristics and specifications of the film to be used. As shown in FIG. 2, the light irradiation device 100 of the present embodiment has a The sheet-shaped illuminating target P1 in which the large-diameter reel D1 is closely moved and the sheet-like slidable movement along the small-diameter reel D2 The target P2 is irradiated with light. Further, as shown in Fig. 2, in the present embodiment, the irradiation targets P1, P2 are moved on the large diameter reels D1, D2 at a constant speed in the direction of the arrow (i.e., counterclockwise rotation), Be explained. In the present specification, the large diameter reel D1 and the small diameter reel D2 are collectively referred to as a "reel", and the irradiation targets P1 and P2 are collectively referred to as "irradiation target".

As shown in FIGS. 1 to 3, the light irradiation device 100 includes a rectangular substrate 101 extending in parallel along a central axis (not shown) of the large diameter reel D1 and a central axis O2 of the small diameter reel D2; The first LED (Light Emitting Diode) unit 110, the second LED unit 120, and the third LED unit 130 are arranged side by side at equal intervals on the substrate 101, and emit linear ultraviolet light, a cover glass 105, and the like. Further, in the actual light irradiation device 100, the substrate 101, the first LED unit 110, the second LED unit 120, the third LED unit 130, and the cover glass 105 are housed and fixed in a casing (not shown), but in FIG. 1 In 3, in order to make the drawing easy to read, the housing is omitted. In the present specification, the longitudinal direction of the substrate 101 of the light irradiation device 100 is defined as the X-axis direction (first direction), and the short-side direction is defined as the Y-axis direction (second direction), which is perpendicular to the X-axis and the Y-axis. The direction (that is, the direction perpendicular to the surface of the substrate 101) is defined as the Z-axis direction (third direction) for explanation.

Further, in the first LED unit 110, the second LED unit 120, and the third LED unit 130 of the present embodiment (hereinafter, the units are collectively referred to as "LED units"), in addition to the ultraviolet light emitted from the respective LED units, The wavelengths are different, and one of the LED units has a different interval from the mirror (described in detail in the later paragraph), and the other configurations are the same. Therefore, the structure of the first LED unit 110 will be mainly described below.

The first LED unit 110 includes a light source unit 112 that is disposed on the substrate 101 that extends in the X-axis direction, and a pair of mirrors 114a and 114b that are disposed so as to sandwich the light source unit 112 from the Y-axis direction, and are disposed at X. Extending in the axial direction.

As shown in FIGS. 1 and 3, the light source unit 112 of the first LED unit 110 of the present embodiment is a rectangular plurality of LED elements of 6.8 mm (length in the X-axis direction) × 6.8 mm (length in the Y-axis direction). The light-emitting element 113 has a square light-emitting surface 113a at the center. The LED element 113 of the present embodiment has a two-dimensional square lattice shape of two columns (Y-axis direction) × 85 (X-axis direction) on the substrate 101 in an alignment in which both sides are parallel to the X-axis direction, and It is electrically connected to the substrate 101. The substrate 101 is an electronic circuit board made of glass epoxy resin, ceramics or the like, and is connected to an LED drive circuit (not shown) so that a drive current from the LED drive circuit is supplied to each of the LED elements 113 through the substrate 101.

As shown in FIG. 3, the LED element 113 of this embodiment has four LED chips 113b arranged in a square shape inside. When a drive current is supplied to each of the LED elements 113, each of the LED chips 113b emits light in accordance with the amount of light corresponding to the drive current, and ultraviolet light of a predetermined amount of light is emitted from each of the LED elements 113. Further, in the present embodiment, each of the LED chips 113b is configured to receive a drive current from the LED drive circuit and emit ultraviolet light having a wavelength of 365 nm. That is, ultraviolet light having a wavelength of 365 nm is emitted from each of the LED elements 113 with a predetermined amount of light.

Further, the driving current supplied to each of the LED elements 113 is adjusted such that the LED elements 113 of the present embodiment have substantially the same amount of ultraviolet light, and the linear ultraviolet light emitted from the first LED unit 110 is on the X-axis. There is a substantially uniform distribution of light in the direction. In addition, as shown in Figure 3. As shown in the embodiment, the pitch PH of each of the LED modules 110 in the X-axis direction and the pitch PV in the Y-axis direction are both set to about 8 mm.

The pair of mirrors 114a and 114b are respectively disposed on the XZ plane, and are mirrors for guiding the ultraviolet light emitted from the light source unit 112, and the light source is sandwiched toward the inner side (ie, the reflective surface is opposed), and the light source is sandwiched from the Y-axis direction. The mode of the portion 112 is arranged in parallel with the interval a ₁ (Fig. 3). Further, as shown in FIG. 2, when viewed from the X-axis direction, the proximal end sides of the pair of mirrors 114a and 114b are arranged close to the light source unit 112, and the distal end side is disposed close to the cover glass 105. The ultraviolet light emitted from the light source unit 112 is guided by the pair of mirrors 114a and 114b, and is emitted from the cover glass 105 (that is, from the first LED unit 110) to have a predetermined divergence angle in the Z-axis direction and the X-axis. Parallel linear ultraviolet light. Further, as described above, since the pair of mirrors 114a and 114b of the present embodiment are arranged in parallel with the X-axis direction, the divergence angle of the ultraviolet light emitted from the cover glass 105 in the Z-axis direction is approximately equal to that of the LED. In the present embodiment, the divergence angle of the ultraviolet light emitted from the element 113 in the Z-axis direction is 0° in the Z-axis direction, and the ultraviolet light having a scattering angle of about ±50° is formed. Further, AX1 of FIG. 2 indicates the optical axis of the first LED unit 110 (that is, the optical path center of the ultraviolet light emitted from the first LED unit 110). Further, although the details are described in the following paragraph, the interval a ₁ between the pair of mirrors 114a and 114b of the first LED unit 110 is set to be narrower than the interval a ₂ between the pair of the second LED units 120 and the mirrors 124a and 124b. (image 3).

As described above, the second LED unit 120 has the same configuration as the first LED unit 110, and is disposed from the first LED unit 110 with a predetermined distance in the Y-axis direction. The second LED unit 120 includes a light source unit 122 and is disposed on the substrate 101. The pair of mirrors 124a and 124b are disposed so as to sandwich the light source unit 122 from the Y-axis direction and extend in the X-axis direction. Similarly to the light source unit 112, the light source unit 122 is composed of two rows (Y-axis direction) × 85 (X-axis direction) LED elements 123, but is derived from each of the LED elements 123 (that is, the light source unit). 122) A configuration in which ultraviolet light having a wavelength of 405 nm is emitted, which is different from the light source unit 112. In other words, the ultraviolet light having a wavelength of 405 nm emitted from the light source unit 122 is guided by the pair of mirrors 124a and 124b, and is emitted from the cover glass 105 (that is, from the second LED unit 120) in the Z-axis direction. A linear ultraviolet light having a divergence angle of about ±50° and parallel to the X-axis. Further, AX2 of FIG. 2 indicates the optical axis of the second LED unit 120 (that is, the optical path center of the ultraviolet light emitted from the second LED unit 120). Further, although the details are described in the following paragraphs, the interval a ₂ between the pair of mirrors 124a and 124b of the second LED unit 120 is set to be larger than the interval a ₁ between the pair of mirrors 114a and 114b of the first LED unit 110, and The interval a ₃ between the pair of mirrors 134a and 134b of the third LED unit 130 is wider (Fig. 3). In addition, in general, although ultraviolet light refers to light having a wavelength of 360 to 400 nm, in the present specification, light having a wavelength of 405 nm is also included in the ultraviolet light.

Further, the third LED unit 130 has the same configuration as that of the first LED unit 110 and the second LED unit 120, and is disposed in the Y-axis direction from the second LED unit 120 with a predetermined distance therebetween. The third LED unit 130 includes a light source unit 132 and is disposed on the substrate 101. The pair of mirrors 134a and 134b are disposed so as to sandwich the light source unit 132 from the Y-axis direction and extend in the X-axis direction. Similarly to the light source units 112 and 122, the light source unit 132 is composed of two rows (Y-axis direction) × 85 (X-axis direction) LED elements 133, but is derived from each of the LED elements 133 (that is, the light source). The portion 132) is configured to emit ultraviolet light having a wavelength of 385 nm, which is different from the light source portions 112 and 122. In other words, the ultraviolet light having a wavelength of 385 nm emitted from the light source unit 132 is guided by the pair of mirrors 134a and 134b, and is emitted from the cover glass 105 (that is, from the third LED unit 130) in the Z-axis direction. Linear ultraviolet light with a divergence angle of ±50° and parallel to the X-axis. Further, AX3 of FIG. 2 indicates the optical axis of the third LED unit 130 (that is, the optical path center of the ultraviolet light emitted from the third LED unit 130). Further, although the details are described in the following paragraph, the interval a ₃ between the pair of mirrors 134a and 134b of the third LED unit 130 is narrower than the interval a ₂ between the pair of mirrors 124a and 124b of the second LED unit 120, and It is set approximately equal to the interval a ₁ of the pair of mirrors 114a and 114b of the first LED unit 110 (FIG. 3).

In this manner, the first LED unit 110, the second LED unit 120, and the third LED unit 130 of the present embodiment are arranged at equal intervals along the Y-axis direction and emit ultraviolet light of different wavelengths in parallel along the Z-axis direction. Composition. Therefore, it is possible to sequentially irradiate ultraviolet light of different wavelengths to the sheet-shaped irradiation target placed on the optical path of the first LED unit 110, the second LED unit 120, and the third LED unit 130 and moving along the outer surface of the reel. Therefore, the ultraviolet curable resin applied to the surface of the irradiation target can be surely cured from the surface to the inside.

Further, the respective emitting surfaces of the first LED unit 110, the second LED unit 120, and the third LED unit 130 of the present embodiment are arranged in a planar shape along the X-Y plane (that is, the cover glass 105). Therefore, it is possible to cope with various reels having different outer diameters, and it is possible to sufficiently ensure the working space when the reel is replaced.

However, as in the present embodiment, the first LED unit 110, the second LED unit 120, and the third LED unit 130 are arranged in a planar manner along the Y-axis direction, and the distance from each LED unit to the irradiation target is not fixed, so that even if The intensity of the ultraviolet light emitted from each of the LED units is uniform, and the ultraviolet light having a different peak intensity depending on each wavelength is incident on the irradiation target. Therefore, in the present embodiment, the problem is solved by adjusting the interval between the pair of mirrors of the respective LED units in accordance with the distance between each of the LED units and the irradiation target (i.e., the reel).

4 is a view for explaining the problem, in a case where the pair of mirrors of the first LED unit 110, the second LED unit 120, and the third LED unit 130 are set to the same interval, the left side view of the light irradiation device 100 . In addition, in FIG. 4, for the convenience of description, the substrate 101 and the irradiation target P1 are omitted. In addition, in FIG. 4, the outer side surface area of the large diameter reel D1 irradiated by the 1st LED unit 110 is shown as the area|region E1 (part of a thick solid line), and the large diameter which irradiated the 2nd LED unit 120. The outer side area of the reel D1 is shown as the area E2 (portion indicated by a thick broken line), and the outer side area of the large diameter reel D1 irradiated by the third LED unit 130 is shown as the area E3 (the portion indicated by the thick solid line). .

In FIG. 4, the first LED unit 110, the second LED unit 120, and the third LED unit 130 are arranged at intervals of 32 mm in the Y-axis direction. Further, the interval between the pair of mirrors 114a and 114b, 124a and 124b, 134a and 134b is set to 23 mm, respectively. Further, the diameter φ of the large diameter reel D1 is 400 mm, and the second LED unit 120 is disposed such that the optical axis AX2 thereof approximately coincides with the normal line on the outer surface of the large diameter reel D1. Further, the distance from the exit surface of the optical axis AX2 of the second LED unit 120 (that is, the front end surface of the cover glass 105) to the outer surface of the large diameter reel D1 (hereinafter, from the respective optical axes AX1, AX2, and AX3) The distance from the front end surface of the cover glass 105 to the outer surface of the large diameter reel D1 is referred to as "travel distance WD"), and is set to 5.0 mm, and the travel distance WD of the first LED unit 110 and the third LED unit 130 is 7.6 mm.

In FIG. 4, as indicated by the arrow of the dotted line, the first LED unit 110, the second LED unit 120, and the third LED unit 130 are respectively emitted toward the outer surface of the large diameter reel D1 by about ±50° in the Z-axis direction. In the ultraviolet light of the divergence angle, the area E1 on the outer side surface of the large diameter reel D1 is irradiated by the first LED unit 110, and the area E2 on the outer side surface of the large diameter reel D1 is irradiated by the second LED unit 120, and the large diameter reel The area E3 on the outer side of D1 is illuminated by the third LED unit 130. However, as described above, since the traveling distance WD of the second LED unit 120 is the shortest, the length of the region E2 in the circumferential direction becomes shorter than the length of the region E1 and the region E3 in the circumferential direction. Therefore, in the case where ultraviolet light of the same intensity is emitted from the first LED unit 110, the second LED unit 120, and the third LED unit 130, the intensity of ultraviolet light per unit area becomes the highest in the region E2, and the peak intensity is also It becomes the highest in the area E2. In other words, the peak intensity of the ultraviolet light having a wavelength of 405 nm emitted from the second LED unit 120 becomes higher than the peak intensity of the ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110, and the ultraviolet light having a wavelength of 385 nm emitted from the third LED unit 130. The peak intensity of light is higher.

Fig. 5 is a result obtained by simulating the ultraviolet light intensity distribution on the large diameter reel D1 of Fig. 4. Fig. 5(a) shows the intensity distribution of the ultraviolet light of each wavelength in the X-axis direction, and the horizontal axis shows the position in the X-axis direction on the large-diameter reel D1 (the center position of the large-diameter reel D1 having a length of 600 mm) The position at 0 mm) indicates the intensity (mW/cm ² ) of ultraviolet light. 5(b) shows the intensity distribution in the circumferential direction of the large diameter reel D1, and the horizontal axis shows the position in the circumferential direction of the outer surface of the large diameter reel D1 (the optical axis AX2 of the second LED unit 120 is made The position at which the outer side of the large diameter reel D1 is transferred is 0 mm, and the vertical axis indicates the intensity (mW/cm ² ) of ultraviolet light. As shown in FIGS. 5(a) and 5(b), the peak intensity of the ultraviolet light having a wavelength of 405 nm emitted from the second LED unit 120 is higher than that of the ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110. The peak intensity and the peak intensity of the ultraviolet light having a wavelength of 385 nm emitted from the third LED unit 130 are higher.

Therefore, in the case where the ultraviolet light having different peak intensities according to the respective wavelengths is irradiated onto the reel so as to be incident on the ultraviolet curable resin of the surface of the irradiation target (not shown in FIG. 4) disposed in close contact with the reel, The hardening of the resin is affected by the ultraviolet light having a low peak intensity, and the fine structure pattern cannot be accurately transferred, and the transfer quality and the reliability of the product are remarkably lowered. Further, by blending the ultraviolet light having a low peak intensity to reduce the transfer speed and increasing the integrated light amount, the transfer quality can be improved, but this method has a problem that the production efficiency is remarkably lowered. Therefore, in order to solve this problem, the present embodiment adjusts the distance between the pair of mirrors of each LED unit in accordance with the distance between each LED unit and the irradiation target (i.e., the reel). Specifically, in order to make the ultraviolet light intensity per unit area of the region E1 and the region E3 substantially equal to the ultraviolet light intensity per unit area of the region E2, the interval a ₁ between the pair of mirrors 114 a and 114 b and one The interval a ₃ between the mirrors 134a and 134b is narrowed so that the length of the region E1 and the region E3 in the circumferential direction is substantially equal to the length of the region E2 in the circumferential direction.

Here, the condition that the length of the region E1 and the region E3 in the circumferential direction is equal to the length of the region E2 in the circumferential direction is discussed. First, it is necessary to cause all of the ultraviolet light emitted from the light source portion of each LED unit to enter a pair of mirrors. between, respectively, so that the first 1LED unit 110, first unit 120 2LED, 3LED means of a pair of mirrors each of the spacer 130 is _{a 1, a 2, a 3} , the size of the light source unit in the Y direction (i.e., When the distance from the upper end of the LED element in the first column to the lower end of the LED element in the second column is c, the following conditional expression (7) can be derived.

a ₁ , a ₂ , a ₃ >c‧‧‧(7)

Further, since the ultraviolet light of the same divergence angle is emitted in parallel with the Z-axis direction from each of the LED units, the length of each of the regions E1 to E3 in the circumferential direction is proportional to the traveling distance WD of each LED unit, and is different from each other. The spacing of the mirrors (i.e., a ₁ ~ a ₃ ) is proportional. Therefore, when the travel distances WD of the first LED unit 110, the second LED unit 120, and the third LED unit 130 are b ₁ , b ₂ , and b ₃ , respectively, the following conditional expression (8) can be derived.

a ₁ ×b ₁ =a ₂ ×b ₂ =a ₃ ×b ₃ =k (k is a predetermined constant)‧‧‧(8)

Further, since all of the ultraviolet light emitted from the respective LED units must be incident on the reel, the distance between the mirrors located at both ends in the Y-axis direction (that is, the mirror 114a of the first LED unit 110 and the third LED unit 130) The distance between the mirrors 134b is d, and the diameter of the reel is e, the following conditional expression (9) can be derived.

d<e‧‧‧(9)

That is, when the conditional expressions (7), (8), and (9) are satisfied, the peak intensity of the ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110 and the ultraviolet light having a wavelength of 385 nm emitted from the third LED unit 130 The peak intensity of the light is slightly equal to the peak intensity of the ultraviolet light having a wavelength of 405 nm emitted from the second LED unit 120.

Figure 6 is a rear structure of FIG. 4, the first pair of mirrors 1LED means 114a, 114b of the intervals a _1, and second means 3LED a pair of mirrors 134a, 134b of the spacer 110 to adjust a ₃ 130, the light irradiating means The left side view of 100, the interval a ₁ between the pair of mirrors 114a and 114b of the first LED unit 110, and the interval a ₃ of the pair of mirrors 134a and 134b of the third LED unit 130 are based on the above conditional expression (7), 8) and (9) are set to 15 mm, which is different from the structure of Fig. 4. That is, in the structure of FIG. 6, in order to make the ultraviolet light intensity per unit area of the area E1 and the area E3 slightly equal to the ultraviolet light intensity per unit area of the area E2 (that is, the area E1 and the area E3 are in the circumferential direction) The upper length is slightly equal to the length of the region E2 in the circumferential direction), and the interval a ₁ between the pair of mirrors 114a and 114b and the interval a ₃ between the pair of mirrors 134a and 134b are adjusted.

Fig. 7 is a graph showing the results obtained by simulating the ultraviolet light intensity distribution on the large diameter reel D1 of Fig. 6. Fig. 7(a) shows the intensity distribution of the ultraviolet light of each wavelength in the X-axis direction, and the horizontal axis shows the position in the X-axis direction on the large-diameter reel D1 (in the center of the large-diameter reel D1 having a length of 600 mm) The position is 0 mm, and the vertical axis indicates the intensity (mW/cm ² ) of ultraviolet light. 7(b) shows the intensity distribution in the circumferential direction of the large diameter reel D1, and the horizontal axis indicates the position in the circumferential direction of the outer surface of the large diameter reel D1 (in the optical axis AX2 of the second LED unit 120 and The position at which the outer side of the large diameter reel D1 is transferred is 0 mm, and the vertical axis indicates the intensity (mW/cm ² ) of ultraviolet light. As shown in FIGS. 7(a) and 7(b), the peak intensity of ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110 of the present embodiment and the wavelength of 385 nm emitted from the third LED unit 130 can be known. The peak intensity of the ultraviolet light is substantially the same as the peak intensity of the ultraviolet light having a wavelength of 405 nm emitted from the second LED unit 120.

As described above, the light irradiation device 100 of the present embodiment is configured such that the first LED unit 110, the second LED unit 120, and the third LED unit 130 are arranged in a planar shape along the Y-axis direction, and the first LED is adjusted. The interval a ₁ between the pair of mirrors 114a and 114b of the unit 110 and the interval a ₃ of the pair of mirrors 134a and 134b of the _third LED unit 130 are such that the peak intensity of the ultraviolet light emitted from each LED unit is at the irradiation target. The objects are roughly equal. Therefore, when the light irradiation device 100 of the present embodiment is applied to the pattern forming device, the production efficiency is not lowered, and the fine structure pattern can be accurately transferred.

Although the present embodiment has been described above, the present invention is not limited to the above-described constituents, and can be used in the present invention. Various changes are made within the scope of the technical idea of the invention.

In the present embodiment, the light source unit 112 of the first LED unit 110, the light source unit 122 of the second LED unit 120, and the light source unit 132 of the third LED unit 130 are provided in two rows (Y-axis direction) × 85 (X-axis direction). The LED elements 113, 123, and 133 are not limited to such a configuration, and are arranged in parallel along the X-axis direction at a predetermined interval (n is an integer of 2 or more), and are arranged side by side at a predetermined interval in the Y direction. The m column (m is an integer of 1 or more) may have a structure.

In this embodiment, although it is composed of three different wavelengths of ultraviolet light, it is not limited to such a structure, and the present invention can also be applied to irradiating N kinds of light (N is an integer of 2 or more) of different wavelengths of ultraviolet light. The light irradiation device 100. In the present embodiment, ultraviolet light having a wavelength of 365 nm is emitted from one first LED unit 110, ultraviolet light having a wavelength of 405 nm is emitted from one second LED unit 120, and ultraviolet light having a wavelength of 385 nm is emitted from one third LED unit 130. The structure of the light is not limited to this structure, and may be an LED unit having a plurality of ultraviolet light beams emitting respective wavelengths. In other words, the light irradiation device 100 of the present embodiment may be configured to include N×M (M is an integer of 1 or more) LED units that emit N types of light (N is an integer of 2 or more) of different wavelengths. Further, in this case, N × M LED units are arranged side by side in the Y-axis direction, and as long as the above conditional expressions (7), (8), and (9) are satisfied, the same effects as in the present embodiment are produced, and There is no special need to arrange them side by side at equal intervals. That is, the above conditional expressions (7), (8) and (9) can be generalized as in the following conditional expressions (10), (11) and (12).

a _i >c‧‧‧(10)

a _i ×b _i =k (k is a given constant)‧‧‧(11)

d<e‧‧‧(12)

Here, a _i is an N × M optical unit, and an optical unit having the longest travel distance WD (that is, one of optical units located at both ends in the Y-axis direction) is used as the first optical unit along the Y-axis. When the optical units of No. 1 to N×M are sequentially defined in the order, the interval between the pair of mirrors of the i-th (i is an integer of 1 or more and N×M or less) LED unit. Further, b _i is the travel distance WD of the i-th LED unit (that is, the distance from the exit surface of the optical unit of the LED unit to the outer surface of the reel), and c is the size of the light source unit in the Y-axis direction. Further, d is the distance between the mirrors at both ends in the Y-axis direction, and e is the diameter of the reel.

Further, in the present embodiment, the first LED unit 110, the second LED unit 120, and the third LED unit 130 are arranged in this order along the Y-axis direction, and the ultraviolet light having a wavelength of 365 nm is sequentially irradiated as the irradiation target moves. The ultraviolet light having a wavelength of 405 nm and the ultraviolet light having a wavelength of 385 nm are not particularly limited as long as the ultraviolet curable resin applied to the object to be irradiated can be surely cured. Further, since the pattern forming apparatus of the light irradiation device 100 of the present embodiment is mounted, it is necessary to first harden the surface of the ultraviolet curable resin, and then to harden the inside thereof, so that a highly precise pattern can be formed. Each of the LED units is disposed such that the target emits light of a short wavelength to a long wavelength. When the above-described N×M LED units are used, it is desirable to arrange them in such a manner that they are grouped according to each wavelength (that is, N types).

Further, the LED element 113 of the present embodiment includes four LED chips 113a arranged in a square lattice shape. However, the LED element 113 is not limited to this configuration, and may be provided with at least one or more LED chips.

(Second embodiment)

Fig. 8 is a left side view showing the configuration of a light irradiation device 200 according to a second embodiment of the present invention. Figure. The light irradiation device 200 of the present embodiment is a device that irradiates ultraviolet light to the small diameter reel D2, and includes a pair of extension mirrors 210 and 230 extending from the cover glass 105 to the outer side surface of the small diameter reel D2, and The interval between the pair of mirrors 124a and 124b of the second LED unit 120 is set to 25 mm, which is different from the light irradiation device 100 of the first embodiment. In the present embodiment, the diameter φ of the small diameter reel D2 is 100 mm, the traveling distance WD of the second LED unit 120 is 5.0 mm, and the traveling distance WD of the first LED unit 110 and the third LED unit 130 is 16.6 mm. In addition, in FIG. 8, like FIG. 6, for the convenience of description, the substrate 101 and the irradiation target P1 are omitted. In addition, in FIG. 8, similarly to FIG. 4, the area on the outer side surface of the small diameter reel D2 irradiated by the first LED unit 110 is schematically shown as the area E1 (portion indicated by a thick solid line), and the second LED is to be used. The area on the outer side of the small diameter reel D2 irradiated by the unit 120 is shown as the area E2 (portion indicated by a thick broken line), and the area on the outer side of the small diameter reel D2 irradiated by the third LED unit 130 is represented as an area E3 ( The part shown by the thick solid line).

Since the ultraviolet light emitted from the first LED unit 110, the second LED unit 120, and the third LED unit 130 has a predetermined divergence angle, the diameter of the small diameter reel D2 is reduced as in the present embodiment, so that the second LED unit 120 is made smaller. The difference between the travel distance WD2 and the travel distances WD1 and WD3 of the first LED unit 110 and the third LED unit 130 is increased, and a part of the ultraviolet light emitted from the first LED unit 110 and the third LED unit 130 is irradiated to the small-diameter roll. The outside of the cylinder D2. Therefore, in the present embodiment, a pair of extensions are provided so that the mirror 114a of the first LED unit 110 and the mirror 134b of the third LED unit 130 in the Y-axis direction are sandwiched by the cover glass 105 and each is extended. Mirrors 210, 230.

The extension mirror 210 is a rectangular mirror that is elongated in the X-axis direction, and has a reflection surface that faces the optical axis AX1 side of the first LED unit 110 and is disposed on the same plane as the mirror 114a. From X When viewed in the axial direction, the proximal end portion of the extension mirror 210 is disposed so as to be close to the cover glass 105, and the distal end portion is disposed near the outer side surface of the small diameter reel D2. Therefore, as described above, the ultraviolet light emitted from the first LED unit 110 is developed at a predetermined divergence angle along the Z-axis direction, but the ultraviolet light to be developed toward the mirror 114a side (that is, the upper side of FIG. 8) is developed. Because the mirror 210 is extended, it is reflected to the outer side of the small diameter reel D2 (FIG. 8: reflection path R1), and the area E1 is irradiated. Therefore, the direct light from the first LED unit 110 and the reflected light from the extended mirror 210 enter the region E1. Here, the ultraviolet light emitted from the first LED unit 110 is mixed by the pair of mirrors 114a and 114b, and further has uniform intensity, so that the direct light from the first LED unit 110 is the same as the reflected light from the extension mirror 210. strength. Therefore, if the direct light from the first LED unit 110 and the reflected light incident region E1 from the extension mirror 210 are equal to each other, the peak intensity is approximately doubled. That is, the peak intensity of the ultraviolet light incident on the region E1 of the present embodiment is approximately twice the peak intensity of the ultraviolet light incident on the region E1 of the first embodiment.

Similarly to the mirror 210, the extension mirror 230 is a rectangular mirror that is elongated in the X-axis direction, and its reflection surface faces the optical axis AX3 side of the third LED unit 130, and is disposed on the same plane as the mirror 134b. When viewed from the X-axis direction, the proximal end portion of the extension mirror 230 is disposed close to the cover glass 105, and the distal end portion is disposed near the outer side surface of the small diameter reel D2. Therefore, as described above, the ultraviolet light emitted from the third LED unit 130 is developed at a predetermined divergence angle along the Z-axis direction, but is developed to the ultraviolet side of the mirror 134b side (that is, the lower side of FIG. 8). The light is reflected by the extension mirror 230 to the outer side surface of the small diameter reel D2 (FIG. 8: reflection path R3), and further irradiates the area E3. Thus, the direct light from the third LED unit 130 and the reflected light from the extension mirror 230 are incident on the region E3. Therefore, similarly to the above-described region E1, the peak intensity of the ultraviolet light incident on the region E3 of the present embodiment is approximately twice the peak intensity of the ultraviolet light incident on the region E3 of the first embodiment.

As described above, the peak intensity of the ultraviolet light emitted from the first LED unit 110 and the third LED unit 130 of the present embodiment on the outer surface of the small diameter reel D2 is approximately twice as large as that of the first embodiment. . Therefore, in the present embodiment, the conditional expressions (7) and (8) described above are changed to the following conditional expressions (13) and (14), and the second LED is set by the conditional expressions (13) and (14). The interval a ₂ between the pair of mirrors 124a, 124b of the unit 120 is such that the peak intensities of the ultraviolet light emitted from the respective LED units are substantially equal.

a ₁ , a ₂ , a ₃ >c‧‧‧(13)

a ₁ ×b ₁ /2=a ₂ ×b ₂ =a ₃ ×b ₃ /2=k (k is a predetermined constant)‧‧‧(14)

Further, according to the light irradiation device 200 of the present embodiment, the ultraviolet light originally irradiated to the outside of the small diameter reel D2 can be returned to the small diameter reel D2 side by the pair of extension mirrors 210 and 230, so that the reel diameter The distance between the pair of extension mirrors 210 and 230 can be reduced to a maximum. That is, the interval between the pair of extension mirrors 210 and 230 (that is, the distance between the mirror 114a of the first LED unit 110 and the mirror 134b of the third LED unit 130) is d, and the diameter of the reel is e, the following conditional expression (15) can be derived.

D≦e‧‧‧(15)

As described above, in the present embodiment, when the conditional expressions (13), (14), and (15) are satisfied, the peak intensity of the ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110 is emitted from the second LED unit 120. Peak intensity of ultraviolet light having a wavelength of 405 nm and emitted from the third LED unit 130 The peak intensities of the ultraviolet light having a wavelength of 385 nm become substantially equal.

Fig. 9 is a result obtained by simulating the intensity distribution of ultraviolet light on the small diameter reel D2 of Fig. 8. Fig. 9(a) shows the intensity distribution of the ultraviolet light of each wavelength in the X-axis direction, and the horizontal axis shows the position in the X-axis direction on the small-diameter reel D2 (in the center of the small-diameter reel D2 having a length of 600 mm) The position is 0 mm, and the vertical axis indicates the intensity (mW/cm ² ) of ultraviolet light. 9(b) shows the intensity distribution of the small diameter reel D2 in the circumferential direction, and the horizontal axis shows the position of the outer side surface of the small diameter reel D2 in the circumferential direction (the optical axis AX2 of the second LED unit 120 is made The position where the outer side of the small diameter reel D2 is transferred is 0 mm, and the vertical axis indicates the intensity (mW/cm ² ) of ultraviolet light. As shown in FIGS. 9(a) and 9(b), the peak intensity of ultraviolet light having a wavelength of 365 nm emitted from the first LED unit 110 of the present embodiment and the second LED unit 120 can be obtained as in the first embodiment. The peak intensity of the ultraviolet light having a wavelength of 405 nm emitted and the peak intensity of the ultraviolet light having a wavelength of 385 nm emitted by the third LED unit 130 are substantially the same.

In the light irradiation device 200 of the present embodiment, as in the first embodiment, the peak intensity of the ultraviolet light emitted from each of the LED units is substantially equal to the irradiation target. Therefore, when the light irradiation device 200 of the present embodiment is applied to the pattern forming device, the fine structure pattern can be accurately transferred without lowering the production efficiency.

Further, the light irradiation device 200 of the present embodiment includes a pair of extension mirrors 210 and 230, and the distance between the pair of mirrors 124a and 124b of the second LED unit 120 is different from that of the first embodiment. 100 different. Therefore, as long as the pair of extension mirrors 210 and 230 are detachably formed and the mirrors 124a and 124b can be adjusted by adjusting one of the second LED units 120, the outer diameter of the reel used can be used. Switching the light irradiation device of the embodiment The light irradiation device 100 of the first embodiment is used for use.

In addition, the light irradiation device 200 of the present embodiment may be similar to the light irradiation device 100 of the first embodiment, and may have N×M pieces of light of different wavelengths of N types (N is an integer of 2 or more). The configuration of the LED unit in which M is an integer of 1 or more. Therefore, if the above conditional expressions (13), (14), and (15) are generalized as follows, the following description will be given.

a ₁ , a _(N×M) , a _i >c‧‧‧(16)

a ₁ ×b ₁ /2=a _(N×M) ×b _(N×M) /2=a _i ×b _i =k (k is a predetermined constant)‧‧‧(17)

D≦e‧‧‧(18)

Here, a ₁ is an N × M optical unit, and an optical unit having the longest travel distance WD is used as the first optical unit, and the first to N×M optical units are sequentially defined along the Y-axis direction. The interval between the pair of mirrors of the No. 1 LED unit. Further, b ₁ is the travel distance WD of the first LED unit. Further, a _{(N × M)} is an interval between a pair of mirrors of the N × Mth LED unit, and b _{(N × M)} is a travel distance WD of the N × Mth LED unit. Further, a _i is the interval between the pair of mirrors of the LED unit of the i-th (i is an integer of 2 or more (N × M-1) or less), and b _i is the travel distance WD of the i-th LED unit. Further, d is the distance between the mirrors at both ends in the Y-axis direction, and e is the diameter of the reel.

(Third embodiment)

FIG. 10 is a view showing a configuration of the first LED unit 110A, the second LED unit 120A, and the third LED unit 130A included in the light irradiation device 300 according to the third embodiment of the present invention. In the first LED unit 110A, the second LED unit 120A, and the third LED unit 130A of the present embodiment, the LED elements 113, 123, and 133 disposed on the respective LED units are arranged in a check pattern. The shape (that is, the distance between the 85 LED elements in the first column and the 85 LED elements in the second column is shifted from each other by a distance of 1/2 of the pitch PH), and the light of the first embodiment is different from that of the first embodiment. The illumination device 100 is different.

When the LED elements 113, 123, and 133 are arranged as described above, the linear ultraviolet light emitted by the first LED unit 110A, the second LED unit 120A, and the third LED unit 130A is in the X-axis direction, and only the LED elements are used. The distance between 113, 123, and 133 from 1/2 of PH is relatively deviated. Therefore, since the portion where the light amount distribution of each of the linear ultraviolet light is low is canceled, the light amount distribution which is substantially uniform in the X-axis direction can be obtained on the irradiation target.

(Fourth embodiment)

FIG. 11 is a view showing a configuration of the first LED unit 110B, the second LED unit 120B, and the third LED unit 130B included in the light irradiation device 400 according to the fourth embodiment of the present invention. In the first LED unit 110B, the second LED unit 120B, and the third LED unit 130B of the present embodiment, the LED elements 113, 123, and 133 disposed on the respective LED units have a diagonal line parallel to the X-axis direction. This configuration is different from the light irradiation device 100 of the first embodiment.

When the LED elements 113, 123, and 133 are arranged as described above, the ultraviolet light emitted from each of the LED elements and the ultraviolet light emitted from the LED elements adjacent to the respective LED elements overlap each other in the X-axis direction and the Y-axis direction. A more uniform light amount distribution can be obtained on the irradiation target.

In addition, all the points of the present disclosure are exemplified and should not be construed as limiting the present invention. The scope of the present invention is defined by the scope of the invention and the scope of the invention and the scope of the invention.

100‧‧‧Lighting device

105‧‧‧ Covering glass

110‧‧‧1st LED unit

113, 123, 133‧‧‧ LED components

114a, 114b, 124a, 124b, 134a, 134b‧‧‧ mirror

120‧‧‧2nd LED unit

130‧‧‧3rd LED unit

AX1, AX2, AX3‧‧‧ optical axis

D1‧‧‧ large diameter reel

E1, E2, E3‧‧‧ areas

Claims (11)

A light illuminating device is a light illuminating device for illuminating a target illuminating object along a portion of a cylindrical outer surface of a cylindrical roll, the light illuminating device comprising: a plurality of optical units, comprising: illuminating in plural a light source unit formed by the elements, wherein the light-emitting elements are arranged on a substrate so as to be arranged in a first direction parallel to a central axis of the reel at a predetermined interval (n is an integer of 2 or more) And a second direction perpendicular to the first direction is arranged in a second predetermined interval at intervals of m (m is an integer of 1 or more), and an optical axis direction is the third perpendicular to the substrate surface And a pair of mirrors extending in the first direction and the third direction so as to face each other with the reflecting surface so as to sandwich the optical axes of the light emitting elements from the second direction Arranging, and the light from the light source portion is guided by the pair of mirrors to emit light of a predetermined divergence angle and a quantity of light for a portion of the outer surface of the reel; wherein the optical units are emitted by N species (N N for more than 2 integers of different wavelengths of light ×M (M is an integer of 1 or more) optical unit; each of the emission surfaces of the N×M optical units is disposed on a predetermined reference plane defined by the first direction and the second direction; The distance between the pair of mirrors of the optical unit is set according to the distance from the reference plane of the optical axis to the outer side of the reel. The light irradiation device according to claim 1, wherein among the N×M optical units, an optical unit having the longest distance from the reference plane of the optical axis to the outer side surface of the reel is used as a In the first optical unit, when the optical units No. 1 to No. N×M are sequentially defined along the second direction, the optical unit of the i-th (i is an integer of 1×N=M or less) is used. The distance between the pair of mirrors is a _i , the distance from the reference plane of the optical axis to the outer surface of the reel is b _i , and the dimension of the second direction of the light source unit is c, so that the second is located When the distance between the mirrors at both ends of the direction is d and the diameter of the reel is e, the following formulas (1), (2), and (3) are satisfied: a _i > c‧‧‧(1) a _i ×b _i =k (k is a given constant)‧‧‧(2) d<e‧‧‧(3) The light irradiation device of claim 1, further comprising: a pair of extension mirrors, from the reference plane of the optical axis to the outer side of the reel, among the N×M optical units The longest optical unit is the first optical unit, and the mirrors from the first direction to the N×M optical unit are sequentially arranged along the second direction, and the mirrors are located at both ends of the second direction. The front end portion extends substantially parallel to the vicinity of the outer side surface of the reel, and respectively reflects the light emitted by the first and N×M optical units; and the pair of mirrors of the first optical unit between the distance of a _1, so that the reference plane of the optical axis of the optical unit No. 1 from the drum to the outer side surface is b _1, so that the number of N × M optical unit of the pair of mirrors The distance is a _{(N × M)} such that the distance from the reference plane of the optical axis of the optical unit of the N×M optical unit to the outer side surface of the reel is b _(N×M) , so that the i-th (i is the distance between the pair of mirrors integer of 2 or more (N × M-1) or less) of the optical unit is a _i, so that the i-th optical axis of the optical unit of the group Distance from the plane to the outer surface of the drum b _i, the size of the second portion of the light source direction is c, the distance between the opposite ends located on the second mirror is d, and the diameter of the drum When it is e, the following formulas (4), (5), and (6) are satisfied: a ₁ , a _{(N × M)} , a _i > c‧ ‧ (4) a ₁ × b ₁ /2 = a _{(N ×M)} ×b _(N×M) /2=a _i ×b _i =k (k is a predetermined constant)‧‧‧(5) d≦e‧‧‧(6) The light irradiation device according to any one of claims 1 to 3, wherein each of the emission surfaces of the N×M optical units is disposed at equal intervals along the second direction. The light irradiation device according to any one of claims 1 to 3, wherein the N×M optical units are such that the irradiation target sequentially receives a short wavelength as the irradiation target moves. The method of irradiating light to a long wavelength is grouped according to each wavelength. The light-emitting device according to any one of claims 1 to 3, wherein the light-emitting elements are LEDs having a substantially square light-emitting surface, which are based on the light-emitting surface Both sides are arranged in parallel with the first direction. The light-emitting device according to any one of claims 1 to 3, wherein the light-emitting elements are LEDs having a substantially square light-emitting surface, which is a diagonal line on one side of the light-emitting surface It is arranged in parallel with this first direction. The light irradiation device according to any one of claims 1 to 3, wherein the m is 2 or more; and among the light-emitting elements, only a distance of 1/2 of the first predetermined interval is used. The light-emitting element in the v-th column (v is an integer of 1 or more (m-1) or less) in the second direction is opposite to the (v+1)-th column light-emitting element The arrangement is shifted in the first direction. The light-emitting device according to any one of claims 1 to 3, wherein the light-emitting element has at least one or more LED chips. The light irradiation device according to any one of claims 1 to 3, wherein the N different wavelengths of light comprise wavelengths which have an effect on the ultraviolet curable resin coated on the surface of the irradiation target. The light. The light irradiation device according to any one of claims 1 to 3, wherein the pair of mirrors each have a rectangular shape when viewed from the second direction.