WO2013172634A1 - Line laser module - Google Patents

Line laser module Download PDF

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Publication number
WO2013172634A1
WO2013172634A1 PCT/KR2013/004267 KR2013004267W WO2013172634A1 WO 2013172634 A1 WO2013172634 A1 WO 2013172634A1 KR 2013004267 W KR2013004267 W KR 2013004267W WO 2013172634 A1 WO2013172634 A1 WO 2013172634A1
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Prior art keywords
light
light source
laser module
reflected
reflector
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PCT/KR2013/004267
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French (fr)
Korean (ko)
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이성원
김영훈
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주식회사 이엔씨 테크놀로지
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Publication of WO2013172634A1 publication Critical patent/WO2013172634A1/en

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/1022—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H01S3/0635—Thin film lasers in which light propagates in the plane of the thin film provided with a periodic structure, e.g. using distributed feed-back, grating couplers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Definitions

  • the present invention relates to a laser, and more particularly, the primary light generated by the primary light source unit is irradiated to the control mirror with two beams of light through a beam splitter, and the control mirror gratings of the secondary light source unit. (Grating) By irradiating the primary light to the reflector to obtain the reflected light, high light efficiency and evenness of the light at the center and the edge of the line laser appear evenly, there is little variation in the light homogeneity Relates to a line laser module.
  • LASER Light Amplification by the Stimulated Emission of Radiation
  • LASER Light Amplification by the Stimulated Emission of Radiation
  • Ordinary light can be made very thin by using a lens, but soon spreads greatly, and because it is mixed with various wavelengths, that is, light of various colors, the light by the discharge such as neon signs which can be relatively pure light
  • the Doppler effect caused by the motion of atoms has a slight wavelength width.
  • lasers are light that has traveled narrow and long tubes tens of thousands of times, so they can go very far and go straight forward with little spread, and emit light in resonance, resulting in pure light with almost a single wavelength. Emits.
  • Such lasers have generally used a lot of dot type lasers, but according to industrial development, linear lasers, that is, line lasers have been used in many industrial sites.
  • the line laser module MD (hereinafter referred to as a "module") is a typical one, and the contents thereof are as follows.
  • the module MD includes a light source LS, a first lens LZ1, and a second lens LZ2.
  • the light source LS may selectively use either a light emitting diode (LED) or a laser diode (LD) as the light source as the primary light source.
  • LED light emitting diode
  • LD laser diode
  • the light source LS transmits light primarily through the first lens LZ1 and produces line energy LL1 spread in the width direction, and the line energy LL1 receives the second lens LZ2. To form a wider line laser (LL2).
  • the first lens LZ1 is a cylinder lens, and the cylinder lens is generally a lens having at least one surface in a cylindrical shape, and linearly receives light incident from the light source LS in a horizontal direction. Permeate through.
  • the second lens LZ2 is a concave lens using the principle of concave lens that the light incident toward the focus is refracted and then exits in parallel.
  • the present invention has been made to solve the conventional problems as described above, and an object of the present invention is to obtain high light efficiency and evenly distributed line light through a grating reflector with almost no light loss.
  • Another object of the present invention is to make the uniformity of light at the central portion and the edge portion appear evenly, so that there is little variation in the uniformity of light.
  • the line laser module
  • At least one beam splitter provided at one end of the light source to reflect and transmit the primary light from the primary light source
  • a control mirror symmetrically provided to reflect the light of the two branches reflected and transmitted through the beam splitter
  • a secondary light source unit for reflecting the light reflected through the control mirror to the homogeneous reflected light amplified by constructive interference.
  • the uniformity of the light at the center portion and the edge portion of the line laser appear evenly, and there is an effect that there is little variation in the homogeneity of the light.
  • 1 is a view showing the configuration of a conventional line laser module
  • FIG. 2 is a view showing the configuration of a line laser module according to the present invention
  • FIG. 3 is a view showing another embodiment of a line laser module according to the present invention.
  • the line laser module 1 (hereinafter referred to as a “module”) according to the present invention includes a primary light source unit 10, a beam splitter 100, a control mirror 200, and a secondary light source unit 300. )
  • the primary light source unit 10 is a device for producing primary light, and may be selectively used either a light emitting diode (LED) or a laser diode (LD).
  • LED light emitting diode
  • LD laser diode
  • a beam splitter 100 is provided at one end of the primary light source unit 10, and the beam splitter 100 reflects and transmits primary light emitted from the primary light source unit 10 in a direction perpendicular to each other. To do.
  • the control mirror 200 is a mirror for the laser line is provided with a hinge 210 at one end, the hinge 210 On the other end opposite to the control lever 230 is provided.
  • the hinge 210 will be described later by adjusting the adjustment lever 230 provided in the upper left and right directions of the control mirror 200 to adjust the irradiation angle of the primary light irradiated through the beam splitter 100.
  • the homogeneity of the line laser irradiated through the secondary light source unit 300 can be increased.
  • the primary light reflected by the control mirror 200 having the above configuration is irradiated to the secondary light source unit 300.
  • the secondary light source unit 300 is a lattice body which emits secondary light, which is homogeneous reflected light amplified by constructive interference by transmitting and reflecting the primary light of the primary light source unit 10, and the secondary light source unit ( 300 is roughly divided into a grating plate 310, a grating reflector 330, and a lens or lens array 350.
  • the lattice reflector 330 is a multiple reflector, and is formed on the upper portion of the lattice plate 310 made of a flat plate at a predetermined interval, for example, an interval of 0.1 ⁇ m or more and 10 mm or less corresponding to an integer multiple of the primary light wavelength. Do.
  • the reason is that the light emitted from the adjacent grid points is constructively interfered with each other due to the phase difference, so that the secondary lights formed by the grid reflector 330 overlap each other and are amplified.
  • the diffraction phenomenon of the secondary light can be effectively shown to increase the diffusion and superposition of light.
  • the lens array 350 is disposed in front of the grating reflector 330.
  • the lens array 350 is disposed to increase the uniformity of the reflected light reflected from the grating reflector 330 described above.
  • a slit is an optical device that forms a large number of narrow, long gaps, and illuminates monochromatic light so that the light passing through each part of the gap travels far away and interferes with each other, resulting in a bright and dark pattern depending on the location. to be.
  • the primary light when the primary light is irradiated from the primary light source unit 10, the primary light is divided into two branched lights that are reflected and transmitted at right angles to each other through the beam splitter 100 according to the present invention. Lose.
  • the divided primary light is reflected by the grid reflector 330 provided in the secondary light source unit 300 through the control mirror 200 provided in a symmetrical manner, and produces secondary light, that is, a line laser. will be.
  • the line laser produced through the lattice reflector 330 is amplified by overlapping each other, thereby obtaining high light efficiency and uniformly distributed line light, and by uniformizing the light uniformity at the center and the edge, There was little variation in the homogeneity of.
  • the coherent reflected light amplified by the above-described constructive interference action of the grating reflector 330 can be obtained.
  • FIG 3 shows another embodiment of the line laser module 10 according to the present invention, and includes the beam splitter 100, the control mirror 200, and the secondary light source unit 300 in various directions. Can produce line lasers.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)

Abstract

The present invention relates to a line laser module. The main objective of the present invention is to obtain high optical efficiency and line light uniformly distributed as a whole and to allow little deviation in the uniformity of the light at the center and edge of the line laser. To this end, the line laser module according to the present invention comprises: at least one beam splitter arranged at one end of a light source so as to reflect and transmit the primary light from a primary light source unit; control mirrors symmetrically arranged so as to reflect the bifurcated light reflected and transmitted by the beam splitter; and a secondary light source unit for reflecting the light reflected by the control mirrors as amplified, uniformly-reflected light by constructive interference. Thus, the line laser module of the present invention is advantageous as it enables high optical efficiency to be obtained and line light uniformly distributed all over, and allows little deviation in the uniformity of the light at the center and edge of the line laser.

Description

라인 레이져 모듈Line laser module
본 발명은 레이져에 관한 것으로, 더욱 상세하게는 1차 광원부에서 생성된 1차 광을 빔 스프리터(Beam Spiltter)를 통해 두 갈래의 빛으로 컨트롤 미러에 조사하고, 이 컨트롤 미러에서는 2차 광원부의 격자(Grating) 반사체에 1차 광을 조사함으로서, 결맞은 반사광을 얻도록 하여 높은 광효율과, 라인 레이져의 중앙부위와 가장자리 부위의 빛의 균질도가 고르게 나타나도록 함으로서, 빛의 균질도 편차가 거의 없는 라인 레이져 모듈에 관한 것이다.The present invention relates to a laser, and more particularly, the primary light generated by the primary light source unit is irradiated to the control mirror with two beams of light through a beam splitter, and the control mirror gratings of the secondary light source unit. (Grating) By irradiating the primary light to the reflector to obtain the reflected light, high light efficiency and evenness of the light at the center and the edge of the line laser appear evenly, there is little variation in the light homogeneity Relates to a line laser module.
일반적으로, 레이져(LASER, Light Amplification by the Stimulated Emission of Radiation)는 "유도 방출에 의한 빛의 증폭"의 영어표기를 한글화한 것으로서, 광자를 결맞은 빛으로 방출하는 광원이며 전형적인 레이저 광은 단색, 즉, 오직 하나의 파장이나 색으로 이루어져 있다. In general, LASER (Light Amplification by the Stimulated Emission of Radiation) is a localized English word for "amplification of light by induction emission" and is a light source that emits photons as a coherent light. That is, it consists of only one wavelength or color.
보통의 빛은, 렌즈를 써서 아주 가늘게 만들 수 있기는 하지만 곧 크게 퍼져 버리고, 여러 가지 파장, 즉, 여러 가지 색의 빛이 섞여 있으므로, 비교적 순수한 빛이랄 수 있는 네온사인등의 방전에 의한 빛도 원자의 운동에 의한 도플러 효과로 약간의 파장폭을 가지고 있다.Ordinary light can be made very thin by using a lens, but soon spreads greatly, and because it is mixed with various wavelengths, that is, light of various colors, the light by the discharge such as neon signs which can be relatively pure light The Doppler effect caused by the motion of atoms has a slight wavelength width.
이에 비해, 레이져는 좁고 긴 관을 수만번 왕복한 빛이기 때문에 멀리까지 갈 수 있는 상태로 아주 잘 빚어져서 거의 퍼지지 않고 직진하게 되고, 공명상태의 빛을 방출하므로, 거의 단일한 파장을 갖는 순수한 빛을 방출한다. In contrast, lasers are light that has traveled narrow and long tubes tens of thousands of times, so they can go very far and go straight forward with little spread, and emit light in resonance, resulting in pure light with almost a single wavelength. Emits.
이와 같은, 레이져는 일반적으로 점(Dot) 방식의 레이져를 많이 활용하여 왔으나, 근래 산업발전에 따라 선형 레이져, 다시 말해서, 라인 레이져가 많은 산업현장에서 활용되고 있다.Such lasers have generally used a lot of dot type lasers, but according to industrial development, linear lasers, that is, line lasers have been used in many industrial sites.
도 1에 도시한 바와 같은, 라인 레이져 모듈(MD)(이하, "모듈"이라 칭한다)이 그 대표적인 것으로, 그 내용은 다음과 같다.As shown in Fig. 1, the line laser module MD (hereinafter referred to as a "module") is a typical one, and the contents thereof are as follows.
도시한 바를 참조하면, 모듈(MD)은 광원(LS)과 제 1렌즈(LZ1)와 제 2렌즈(LZ2)로 이루어진다.Referring to FIG. 4, the module MD includes a light source LS, a first lens LZ1, and a second lens LZ2.
광원(LS)은 1차 광을 광원소스로 발광 다이오드(LED) 또는 레이져 다이오드(LD)중 어느 하나가 선택적으로 사용될 수 있다.The light source LS may selectively use either a light emitting diode (LED) or a laser diode (LD) as the light source as the primary light source.
이와 같은, 광원(LS)은 제 1렌즈(LZ1)를 통해 일차적으로 빛을 투과시키며 너비방향으로 넓게 퍼진 라인에너지(LL1)가 생산되고, 이 라인에너지(LL1)는 제 2렌즈(LZ2)를 통해 더 넓은 라인레이져(LL2)를 형성한다.As such, the light source LS transmits light primarily through the first lens LZ1 and produces line energy LL1 spread in the width direction, and the line energy LL1 receives the second lens LZ2. To form a wider line laser (LL2).
상기 제 1렌즈(LZ1)는 실린더렌즈(Cylinder Lenz)로서, 실린더렌즈는 일반적으로 적어도 일면이 실린더형상을 갖는 렌즈로서, 상기 광원(LS)으로 부터 입사된 빛을 수평방향의 선형(線形) 광으로 투과시킨다.The first lens LZ1 is a cylinder lens, and the cylinder lens is generally a lens having at least one surface in a cylindrical shape, and linearly receives light incident from the light source LS in a horizontal direction. Permeate through.
또한, 제 2렌즈(LZ2)는 오목렌즈로서 초점을 향해서 입사된 빛은 굴절 후, 평행하게 나가는 오목렌즈의 원리를 이용한 것이다.In addition, the second lens LZ2 is a concave lens using the principle of concave lens that the light incident toward the focus is refracted and then exits in parallel.
그러나, 이와 같은 종래의 모듈은 렌즈를 통한 광흡수에 의해 광효율이 낮고, 라인 광이 중앙에만 집중되는 문제가 있었다.However, such a conventional module has a problem in that light efficiency is low due to light absorption through the lens, and line light is concentrated only at the center.
또한, 빛의 균질도 면에서도 중앙부위와 가장자리의 편차가 심하게 나타나는 문제가 있었다. In addition, even in terms of homogeneity of light, there was a problem in that the deviation between the center and the edge was severe.
본 발명은 상술한 바와 같은 종래의 문제점을 해결하기 위해 안출된 것으로서, 본 발명의 목적은 광 손실이 거의 없는 격자(Grating) 반사체를 통해 높은 광효율과 전체적으로 고르게 분포되는 라인 광을 얻도록 하는데 있다.SUMMARY OF THE INVENTION The present invention has been made to solve the conventional problems as described above, and an object of the present invention is to obtain high light efficiency and evenly distributed line light through a grating reflector with almost no light loss.
또한, 본 발명의 다른 목적은 중앙부위와 가장자리 부위의 빛의 균질도가 고르게 나타나도록 함으로서, 빛의 균질도 편차가 거의 없도록 하는데 있다.In addition, another object of the present invention is to make the uniformity of light at the central portion and the edge portion appear evenly, so that there is little variation in the uniformity of light.
이와 같은 목적으로 이루어진 본 발명은, The present invention made for such a purpose,
라인 레이져 모듈에 관한 것으로, Regarding the line laser module,
상기 라인 레이져 모듈은; The line laser module;
1차 광원부에서의 1차 광을 반사 및 투과될 수 있도록, 상기 광원의 일단에 적어도 하나 이상 구비되는 빔 스프리터와;At least one beam splitter provided at one end of the light source to reflect and transmit the primary light from the primary light source;
상기 빔 스프리터를 통해 반사 및 투과된 두 갈래의 빛을 반사시키도록 대칭형으로 구비되는 컨트롤 미러와;A control mirror symmetrically provided to reflect the light of the two branches reflected and transmitted through the beam splitter;
상기 컨트롤 미러를 통해 반사된 빛을 보강간섭에 의한 증폭된 균질한 반사광으로 반사시키는 2차 광원부로 이루어진다.And a secondary light source unit for reflecting the light reflected through the control mirror to the homogeneous reflected light amplified by constructive interference.
상술한 바와 같이, 본 발명에 따른 라인 레이져 구조에 의하면, 높은 광효율과 전체적으로 고르게 분포되는 라인 광을 얻도록 하는 효과가 있다.As described above, according to the line laser structure according to the present invention, there is an effect to obtain a high light efficiency and evenly distributed line light as a whole.
또한, 라인 레이져의 중앙부위와 가장자리 부위의 빛의 균질도가 고르게 나타나도록 함으로서, 빛의 균질도 편차가 거의 없도록 하는 효과가 있다.In addition, the uniformity of the light at the center portion and the edge portion of the line laser appear evenly, and there is an effect that there is little variation in the homogeneity of the light.
도 1은 종래의 라인 레이져 모듈의 구성을 보인 도면이고,1 is a view showing the configuration of a conventional line laser module,
도 2는 본 발명에 따른 라인 레이져 모듈의 구성을 보인 도면이고,2 is a view showing the configuration of a line laser module according to the present invention,
도 3은 본 발명에 따른 라인 레이져 모듈의 다른 실시예를 보인 도면이다. 3 is a view showing another embodiment of a line laser module according to the present invention.
도 2를 참조하면, 본 발명에 따른 라인 레이져 모듈(1)(이하, "모듈"이라 칭한다)은 1차 광원부(10)와 빔 스프리터(100)와 컨트롤 미러(200)와 2차 광원부(300)로 이루어진다.Referring to FIG. 2, the line laser module 1 (hereinafter referred to as a “module”) according to the present invention includes a primary light source unit 10, a beam splitter 100, a control mirror 200, and a secondary light source unit 300. )
1차 광원부(10)는 1차 광을 만들어 내는 장치로서, 발광 다이오드(LED) 또는 레이져 다이오드(LD)중 어느 하나를 선택적으로 사용해도 무방하다.The primary light source unit 10 is a device for producing primary light, and may be selectively used either a light emitting diode (LED) or a laser diode (LD).
이 1차 광원부(10)의 일단에 빔 스프리터(100)가 구비되는데, 빔 스프리터(100)는 상기한 1차 광원부(10)로 부터 비춰지는 1차 광을 상호 직각 방향으로 반사 및 투과시키는 역할을 하는 것이다. A beam splitter 100 is provided at one end of the primary light source unit 10, and the beam splitter 100 reflects and transmits primary light emitted from the primary light source unit 10 in a direction perpendicular to each other. To do.
이와 같이, 두 방향으로 나누어진 1차 광은 컨트롤 미러(200)에 조사(照射)되는데, 이 컨트롤 미러(200)는 레이저 라인용 미러로 일단에 힌지(210)가 구비되고, 이 힌지(210)에 대향하는 타단에 조절레버(230)가 구비되어 있다.In this way, the primary light divided in two directions is irradiated to the control mirror 200, the control mirror 200 is a mirror for the laser line is provided with a hinge 210 at one end, the hinge 210 On the other end opposite to the control lever 230 is provided.
이 힌지(210)는 상기한 빔 스프리터(100)를 통해 조사되는 1차 광의 조사각을 조절할 수 있도록, 컨트롤 미러(200)의 상단 좌, 우 방향으로 구비된 조절레버(230)를 조절하여 후술하는 2차 광원부(300)를 통해 조사되는 라인 레이져의 균질도를 높일 수 있다.The hinge 210 will be described later by adjusting the adjustment lever 230 provided in the upper left and right directions of the control mirror 200 to adjust the irradiation angle of the primary light irradiated through the beam splitter 100. The homogeneity of the line laser irradiated through the secondary light source unit 300 can be increased.
상기한 바와 같은 구성으로 이루어진 컨트롤 미러(200)에 반사된 1차 광은 2차 광원부(300)로 조사된다.The primary light reflected by the control mirror 200 having the above configuration is irradiated to the secondary light source unit 300.
2차 광원부(300)는 상기한 1차 광원부(10)의 1차 광이 투과 및 반사되어 보강간섭에 의해 증폭된 균질한 반사광인 2차 광을 출사시키는 격자체로서, 이, 2차 광원부(300)는 격자판(310)과 격자 반사체(330)와 렌즈 또는 렌즈 어레이(350)로 대별된다.The secondary light source unit 300 is a lattice body which emits secondary light, which is homogeneous reflected light amplified by constructive interference by transmitting and reflecting the primary light of the primary light source unit 10, and the secondary light source unit ( 300 is roughly divided into a grating plate 310, a grating reflector 330, and a lens or lens array 350.
격자 반사체(330)는 다중 반사체로서, 평판으로 이루어진 격자판(310)의 상부에 일정한 간격, 예를 들면, 1차 광 파장의 정수 배에 해당하는 0.1㎛ 이상~10mm 이하의 간격으로 형성하는 것이 바람직하다.The lattice reflector 330 is a multiple reflector, and is formed on the upper portion of the lattice plate 310 made of a flat plate at a predetermined interval, for example, an interval of 0.1 μm or more and 10 mm or less corresponding to an integer multiple of the primary light wavelength. Do.
그 이유로는, 상호 이웃한 격자점에서 나온 광들이 위상차로 인해 서로 보강간섭하게 됨으로, 상기한 격자 반사체(330)에 의해 형성된 2차 광들이 서로 중첩하여 증폭된다.The reason is that the light emitted from the adjacent grid points is constructively interfered with each other due to the phase difference, so that the secondary lights formed by the grid reflector 330 overlap each other and are amplified.
또한, 상기한 격자 반사체(330)의 간격을 가능하면 작게 조절함으로서, 2차광의 회절현상을 효과적으로 나타나게 하여 빛의 확산 및 중첩효과를 증대시킬 수 있다.In addition, by controlling the spacing of the grating reflector 330 as small as possible, the diffraction phenomenon of the secondary light can be effectively shown to increase the diffusion and superposition of light.
상기한 격자 반사체(330)의 전면에 렌즈 어레이(350)가 배치되어 있다.The lens array 350 is disposed in front of the grating reflector 330.
렌즈 어레이(350)는 상기한 격자 반사체(330)로 부터 반사되는 반사광의 균일도를 높이기 위해서 배치된다. The lens array 350 is disposed to increase the uniformity of the reflected light reflected from the grating reflector 330 described above.
상기한 렌즈 또는 렌즈 어레이(350) 대신 슬릿(Slit)을 채용해도 본 발명에 따른 목적을 달성할 수 있음은 물론이다.Of course, even if the slit (Slit) is employed in place of the lens or lens array 350 described above can achieve the object according to the present invention.
슬릿이란, 폭이 좁고 긴 틈을 다수 형성하여 단색의 빛을 비추게 되면 틈의 각 부분을 통과하는 빛이 멀리 진행하면서 서로 간섭이 되어 위치에 따라 밝고 어두운 무늬가 생기는 효과를 얻을 수 있는 광학장치이다. A slit is an optical device that forms a large number of narrow, long gaps, and illuminates monochromatic light so that the light passing through each part of the gap travels far away and interferes with each other, resulting in a bright and dark pattern depending on the location. to be.
계속해서, 도시한 바를 참조로 하여 본 발명에 따른 라인 레이져 모듈(10)의 작용 효과를 설명한다.Subsequently, the effect of the line laser module 10 according to the present invention will be described with reference to the drawings.
우선, 1차 광원부(10) 에서 1차 광이 조사(照射)되면, 이 1차 광은 본 발명에 따른, 빔 스프리터(100)를 통해 상호 직각방향으로 반사 및 투과되는 두 갈래의 빛으로 나누어진다.First, when the primary light is irradiated from the primary light source unit 10, the primary light is divided into two branched lights that are reflected and transmitted at right angles to each other through the beam splitter 100 according to the present invention. Lose.
이와 같이, 나누어진 1차 광은 대칭형으로 구비된 컨트롤 미러(200)를 통해 2차 광원부(300)에 다수 구비된 격자 반사체(330)에 반사되며, 2차 광, 즉, 라인 레이져를 생산하는 것이다.As such, the divided primary light is reflected by the grid reflector 330 provided in the secondary light source unit 300 through the control mirror 200 provided in a symmetrical manner, and produces secondary light, that is, a line laser. will be.
상기한 격자 반사체(330)를 통해 생산된 라인 레이져는 서로 중첩하여 증폭됨으로서, 높은 광효율과 전체적으로 고르게 분포되는 라인 광을 얻었으며, 중앙부위와 가장자리 부위의 빛의 균질도가 고르게 나타나도록 함으로서, 빛의 균질도 편차가 거의 없도록 하였다.The line laser produced through the lattice reflector 330 is amplified by overlapping each other, thereby obtaining high light efficiency and uniformly distributed line light, and by uniformizing the light uniformity at the center and the edge, There was little variation in the homogeneity of.
나아가, 상술한 격자 반사체(330)의 보강간섭 작용에 의해 증폭된 결맞음 반사광을 얻을 수 있다.Furthermore, the coherent reflected light amplified by the above-described constructive interference action of the grating reflector 330 can be obtained.
도 3에 도시한 것은 본 발명에 따른 라인 레이져 모듈(10)의 다른 실시예를 보이 것으로, 상술한 빔 스프리터(100)와 컨트롤 미러(200)와 2차 광원부(300)를 다수 구비하여 다양한 방향으로 라인레이져를 생산할 수 있다.3 shows another embodiment of the line laser module 10 according to the present invention, and includes the beam splitter 100, the control mirror 200, and the secondary light source unit 300 in various directions. Can produce line lasers.
이와 같이, 하나의 1차 광원부(10)에 다수의 빔 스프리터(100)와 컨트롤 미러(200) 및 2차 광원부(300)를 구성해도 본 발명에 따른 소기의 목적을 달성할 수 있음은 물론이다.As such, even if the plurality of beam splitter 100, the control mirror 200 and the secondary light source unit 300 in one primary light source unit 10 can achieve the desired purpose according to the present invention, of course. .
본 발명은 상술한 특정 바람직한 실시 예에 한정되지 아니하고, 청구범위에서 청구하는 본 발명의 요지를 벗어남이 없이 당해 발명이 속하는 기술분야에서 통상의 지식을 가진자라면 누구든지 다양한 변형실시가 가능한 것은 물론이고, 그와 같은 변형실시는 본 발명의 청구범위 기재 범위 내에 있게 된다.The present invention is not limited to the above-described specific preferred embodiments, and various modifications can be made by those skilled in the art without departing from the gist of the present invention as claimed in the claims. Such modifications will fall within the scope of the claims of the present invention.

Claims (6)

1차 광을 광원소스로 발광 다이오드(LED) 또는 레이져 다이오드(LD)중 어느 하나가 선택적으로 사용되는 1차 광원부를 이용한 레이져 모듈에 있어서,A laser module using a primary light source unit in which either a light emitting diode (LED) or a laser diode (LD) is selectively used as a light source as a light source,
상기 레이져 모듈은; The laser module is;
상기 1차 광원부에서의 1차 광을 반사 및 투과될 수 있도록, 상기 광원의 일단에 적어도 하나 이상 구비되는 빔 스프리터와;At least one beam splitter provided at one end of the light source to reflect and transmit the primary light from the primary light source;
상기 빔 스프리터를 통해 반사 및 투과된 두 갈래의 빛을 반사시키도록 대칭형으로 구비되는 컨트롤 미러와;A control mirror symmetrically provided to reflect the light of the two branches reflected and transmitted through the beam splitter;
상기 컨트롤 미러를 통해 반사된 빛을 보강간섭에 의한 증폭된 균질한 반사광으로 반사시키는 2차 광원부로 이루어진 것을 특징으로 하는 라인 레이져 모듈.And a secondary light source unit for reflecting the light reflected through the control mirror to the homogeneous reflected light amplified by constructive interference.
제 1항에 있어서,The method of claim 1,
상기 2차 광원부는, The secondary light source unit,
평판 형태로 구비된 격자판과 , 상기 격자판 일면에 적어도 2개 이상 다수 형성된 반사체 라인들로 이루어진 격자 반사체를 포함하며, 상기 격자 반사체의 라인들은 0.1㎛ 이상 10mm 이하의 피치간격으로 이루어진 것을 특징으로 하는 라인 레이져 모듈.And a lattice reflector comprising a lattice plate provided in a flat plate shape and at least two or more reflector lines formed on one surface of the lattice plate , wherein the lines of the lattice reflector have a pitch interval of 0.1 μm or more and 10 mm or less. Laser module.
제 1항에 있어서,The method of claim 1,
상기 빔 스프리터는, The beam splitter,
상기 광원의 전면에 배치하여, 상호 직각인 두 갈래의 빛을 구성하는 것을 특징으로 하는 라인 레이져 모듈.Line laser module, characterized in that arranged on the front of the light source, to configure the light of two branches perpendicular to each other.
제 1항 또는 제 2항에 있어서,The method according to claim 1 or 2,
상기 컨트롤 미러는, The control mirror,
레이저 라인용 미러로 상기 빔 스프리터에서 분리된 빛들을 상기 격자 반사체에 조사하여 결맞음 반사광을 생산하는 것을 특징으로 하는 라인 레이져 모듈.And a laser beam mirror to irradiate the grating reflector with light separated from the beam splitter to produce coherent reflected light.
제 1항에 있어서,The method of claim 1,
상기 컨트롤 미러는, 미러지지대 상단 좌, 우에 있는 조절레버로 상기 격자반사체에 조사되는 광을 조절하여 라인의 모양과 균질도를 조절하는 것을 특징으로 하는 라인 레이져 모듈.The control mirror is a line laser module, characterized in that for adjusting the shape and homogeneity of the line by adjusting the light irradiated to the grid reflector with the control lever on the upper left, right of the mirror support.
제 2항에 있어서,The method of claim 2,
상기 2차 광원부는 상기 격자반사체로 부터의 반사광 방향의 균일도를 높이기 위해 상기 격자 반사체 전면에 배치한 렌즈(렌즈 어레이) 또는 슬릿중 어느 하나를 더 포함하는 것을 특징으로 하는 라인 레이져 모듈.And the secondary light source unit further comprises any one of a lens (lens array) or a slit disposed in front of the grating reflector in order to increase the uniformity of the reflected light direction from the grating reflector.
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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100377388B1 (en) * 2000-09-06 2003-03-26 삼성전자주식회사 Fabrication device of overlapped long period optical fiber grating
US20050117187A1 (en) * 2003-11-28 2005-06-02 Yung-Hsin Chen Apparatus for forming nano-grating device
US20060170896A1 (en) * 2005-02-01 2006-08-03 Asml Holding, N.V. Interferometric lithographic projection apparatus
KR100881140B1 (en) * 2007-08-09 2009-02-02 삼성전기주식회사 Apparatus for forming a nano pattern and fabrication method a nano pattern using the same
KR100900684B1 (en) * 2007-07-19 2009-06-01 삼성전기주식회사 Line beam laser apparatus and surface measurement apparatus using the same

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100377388B1 (en) * 2000-09-06 2003-03-26 삼성전자주식회사 Fabrication device of overlapped long period optical fiber grating
US20050117187A1 (en) * 2003-11-28 2005-06-02 Yung-Hsin Chen Apparatus for forming nano-grating device
US20060170896A1 (en) * 2005-02-01 2006-08-03 Asml Holding, N.V. Interferometric lithographic projection apparatus
KR100900684B1 (en) * 2007-07-19 2009-06-01 삼성전기주식회사 Line beam laser apparatus and surface measurement apparatus using the same
KR100881140B1 (en) * 2007-08-09 2009-02-02 삼성전기주식회사 Apparatus for forming a nano pattern and fabrication method a nano pattern using the same

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