WO2013172634A1 - Module à laser en ligne - Google Patents

Module à laser en ligne Download PDF

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Publication number
WO2013172634A1
WO2013172634A1 PCT/KR2013/004267 KR2013004267W WO2013172634A1 WO 2013172634 A1 WO2013172634 A1 WO 2013172634A1 KR 2013004267 W KR2013004267 W KR 2013004267W WO 2013172634 A1 WO2013172634 A1 WO 2013172634A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
light source
laser module
reflected
reflector
Prior art date
Application number
PCT/KR2013/004267
Other languages
English (en)
Korean (ko)
Inventor
이성원
김영훈
Original Assignee
주식회사 이엔씨 테크놀로지
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 이엔씨 테크놀로지 filed Critical 주식회사 이엔씨 테크놀로지
Publication of WO2013172634A1 publication Critical patent/WO2013172634A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/102—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation
    • H01S3/1022—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling the active medium, e.g. by controlling the processes or apparatus for excitation by controlling the optical pumping
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
    • G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
    • G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
    • G02B19/0061—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a LED
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0905—Dividing and/or superposing multiple light beams
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938—Using specific optical elements
    • G02B27/095—Refractive optical elements
    • G02B27/0972—Prisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/06—Construction or shape of active medium
    • H01S3/063—Waveguide lasers, i.e. whereby the dimensions of the waveguide are of the order of the light wavelength
    • H01S3/0632—Thin film lasers in which light propagates in the plane of the thin film
    • H01S3/0635—Thin film lasers in which light propagates in the plane of the thin film provided with a periodic structure, e.g. using distributed feed-back, grating couplers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

Definitions

  • the present invention relates to a laser, and more particularly, the primary light generated by the primary light source unit is irradiated to the control mirror with two beams of light through a beam splitter, and the control mirror gratings of the secondary light source unit. (Grating) By irradiating the primary light to the reflector to obtain the reflected light, high light efficiency and evenness of the light at the center and the edge of the line laser appear evenly, there is little variation in the light homogeneity Relates to a line laser module.
  • LASER Light Amplification by the Stimulated Emission of Radiation
  • LASER Light Amplification by the Stimulated Emission of Radiation
  • Ordinary light can be made very thin by using a lens, but soon spreads greatly, and because it is mixed with various wavelengths, that is, light of various colors, the light by the discharge such as neon signs which can be relatively pure light
  • the Doppler effect caused by the motion of atoms has a slight wavelength width.
  • lasers are light that has traveled narrow and long tubes tens of thousands of times, so they can go very far and go straight forward with little spread, and emit light in resonance, resulting in pure light with almost a single wavelength. Emits.
  • Such lasers have generally used a lot of dot type lasers, but according to industrial development, linear lasers, that is, line lasers have been used in many industrial sites.
  • the line laser module MD (hereinafter referred to as a "module") is a typical one, and the contents thereof are as follows.
  • the module MD includes a light source LS, a first lens LZ1, and a second lens LZ2.
  • the light source LS may selectively use either a light emitting diode (LED) or a laser diode (LD) as the light source as the primary light source.
  • LED light emitting diode
  • LD laser diode
  • the light source LS transmits light primarily through the first lens LZ1 and produces line energy LL1 spread in the width direction, and the line energy LL1 receives the second lens LZ2. To form a wider line laser (LL2).
  • the first lens LZ1 is a cylinder lens, and the cylinder lens is generally a lens having at least one surface in a cylindrical shape, and linearly receives light incident from the light source LS in a horizontal direction. Permeate through.
  • the second lens LZ2 is a concave lens using the principle of concave lens that the light incident toward the focus is refracted and then exits in parallel.
  • the present invention has been made to solve the conventional problems as described above, and an object of the present invention is to obtain high light efficiency and evenly distributed line light through a grating reflector with almost no light loss.
  • Another object of the present invention is to make the uniformity of light at the central portion and the edge portion appear evenly, so that there is little variation in the uniformity of light.
  • the line laser module
  • At least one beam splitter provided at one end of the light source to reflect and transmit the primary light from the primary light source
  • a control mirror symmetrically provided to reflect the light of the two branches reflected and transmitted through the beam splitter
  • a secondary light source unit for reflecting the light reflected through the control mirror to the homogeneous reflected light amplified by constructive interference.
  • the uniformity of the light at the center portion and the edge portion of the line laser appear evenly, and there is an effect that there is little variation in the homogeneity of the light.
  • 1 is a view showing the configuration of a conventional line laser module
  • FIG. 2 is a view showing the configuration of a line laser module according to the present invention
  • FIG. 3 is a view showing another embodiment of a line laser module according to the present invention.
  • the line laser module 1 (hereinafter referred to as a “module”) according to the present invention includes a primary light source unit 10, a beam splitter 100, a control mirror 200, and a secondary light source unit 300. )
  • the primary light source unit 10 is a device for producing primary light, and may be selectively used either a light emitting diode (LED) or a laser diode (LD).
  • LED light emitting diode
  • LD laser diode
  • a beam splitter 100 is provided at one end of the primary light source unit 10, and the beam splitter 100 reflects and transmits primary light emitted from the primary light source unit 10 in a direction perpendicular to each other. To do.
  • the control mirror 200 is a mirror for the laser line is provided with a hinge 210 at one end, the hinge 210 On the other end opposite to the control lever 230 is provided.
  • the hinge 210 will be described later by adjusting the adjustment lever 230 provided in the upper left and right directions of the control mirror 200 to adjust the irradiation angle of the primary light irradiated through the beam splitter 100.
  • the homogeneity of the line laser irradiated through the secondary light source unit 300 can be increased.
  • the primary light reflected by the control mirror 200 having the above configuration is irradiated to the secondary light source unit 300.
  • the secondary light source unit 300 is a lattice body which emits secondary light, which is homogeneous reflected light amplified by constructive interference by transmitting and reflecting the primary light of the primary light source unit 10, and the secondary light source unit ( 300 is roughly divided into a grating plate 310, a grating reflector 330, and a lens or lens array 350.
  • the lattice reflector 330 is a multiple reflector, and is formed on the upper portion of the lattice plate 310 made of a flat plate at a predetermined interval, for example, an interval of 0.1 ⁇ m or more and 10 mm or less corresponding to an integer multiple of the primary light wavelength. Do.
  • the reason is that the light emitted from the adjacent grid points is constructively interfered with each other due to the phase difference, so that the secondary lights formed by the grid reflector 330 overlap each other and are amplified.
  • the diffraction phenomenon of the secondary light can be effectively shown to increase the diffusion and superposition of light.
  • the lens array 350 is disposed in front of the grating reflector 330.
  • the lens array 350 is disposed to increase the uniformity of the reflected light reflected from the grating reflector 330 described above.
  • a slit is an optical device that forms a large number of narrow, long gaps, and illuminates monochromatic light so that the light passing through each part of the gap travels far away and interferes with each other, resulting in a bright and dark pattern depending on the location. to be.
  • the primary light when the primary light is irradiated from the primary light source unit 10, the primary light is divided into two branched lights that are reflected and transmitted at right angles to each other through the beam splitter 100 according to the present invention. Lose.
  • the divided primary light is reflected by the grid reflector 330 provided in the secondary light source unit 300 through the control mirror 200 provided in a symmetrical manner, and produces secondary light, that is, a line laser. will be.
  • the line laser produced through the lattice reflector 330 is amplified by overlapping each other, thereby obtaining high light efficiency and uniformly distributed line light, and by uniformizing the light uniformity at the center and the edge, There was little variation in the homogeneity of.
  • the coherent reflected light amplified by the above-described constructive interference action of the grating reflector 330 can be obtained.
  • FIG 3 shows another embodiment of the line laser module 10 according to the present invention, and includes the beam splitter 100, the control mirror 200, and the secondary light source unit 300 in various directions. Can produce line lasers.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)
  • Semiconductor Lasers (AREA)

Abstract

La présente invention concerne un module à laser en ligne. La présente invention vise à obtenir un rendement optique élevé et une lumière linéaire totalement répartie de manière uniforme et à autoriser une faible déviation dans l'uniformité de la lumière au centre et au bord du laser en ligne. A cette fin, le module à laser en ligne selon la présente invention comprend : au moins un diviseur de faisceau agencé au niveau d'une extrémité d'une source lumineuse de manière à réfléchir et émettre la lumière primaire provenant d'une unité de source de lumière primaire ; des miroirs de commande agencés de manière symétrique de manière à réfléchir la lumière bifurquée réfléchie et émise par le diviseur de faisceau ; et une unité de source de lumière secondaire destinée à réfléchir la lumière réfléchie par les miroirs de commande en tant que lumière réfléchie de manière uniforme, amplifiée par interférence constructive. Ainsi, le module à laser en ligne selon la présente invention est bénéfique du fait qu'il permet à un rendement optique élevé d'être obtenu et une lumière linéaire répartie de manière uniforme partout, et autorise une faible déviation dans l'uniformité de la lumière au centre et au bord du laser en ligne.
PCT/KR2013/004267 2012-05-14 2013-05-14 Module à laser en ligne WO2013172634A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1020120050755A KR101356204B1 (ko) 2012-05-14 2012-05-14 라인 레이져 모듈
KR10-2012-0050755 2012-05-14

Publications (1)

Publication Number Publication Date
WO2013172634A1 true WO2013172634A1 (fr) 2013-11-21

Family

ID=49583986

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2013/004267 WO2013172634A1 (fr) 2012-05-14 2013-05-14 Module à laser en ligne

Country Status (2)

Country Link
KR (1) KR101356204B1 (fr)
WO (1) WO2013172634A1 (fr)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100377388B1 (ko) * 2000-09-06 2003-03-26 삼성전자주식회사 중첩된 장주기 광섬유 격자 제조 장치
US20050117187A1 (en) * 2003-11-28 2005-06-02 Yung-Hsin Chen Apparatus for forming nano-grating device
US20060170896A1 (en) * 2005-02-01 2006-08-03 Asml Holding, N.V. Interferometric lithographic projection apparatus
KR100881140B1 (ko) * 2007-08-09 2009-02-02 삼성전기주식회사 나노패턴 형성장치 및 이를 이용한 나노패턴 형성방법
KR100900684B1 (ko) * 2007-07-19 2009-06-01 삼성전기주식회사 라인 빔 레이저 장치 및 이를 이용한 표면 측정 장치

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100377388B1 (ko) * 2000-09-06 2003-03-26 삼성전자주식회사 중첩된 장주기 광섬유 격자 제조 장치
US20050117187A1 (en) * 2003-11-28 2005-06-02 Yung-Hsin Chen Apparatus for forming nano-grating device
US20060170896A1 (en) * 2005-02-01 2006-08-03 Asml Holding, N.V. Interferometric lithographic projection apparatus
KR100900684B1 (ko) * 2007-07-19 2009-06-01 삼성전기주식회사 라인 빔 레이저 장치 및 이를 이용한 표면 측정 장치
KR100881140B1 (ko) * 2007-08-09 2009-02-02 삼성전기주식회사 나노패턴 형성장치 및 이를 이용한 나노패턴 형성방법

Also Published As

Publication number Publication date
KR20130127100A (ko) 2013-11-22
KR101356204B1 (ko) 2014-01-27

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