TW201509690A - Drawing device - Google Patents

Drawing device Download PDF

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Publication number
TW201509690A
TW201509690A TW103126077A TW103126077A TW201509690A TW 201509690 A TW201509690 A TW 201509690A TW 103126077 A TW103126077 A TW 103126077A TW 103126077 A TW103126077 A TW 103126077A TW 201509690 A TW201509690 A TW 201509690A
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Taiwan
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unit
opening
closing
liquid
transfer
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TW103126077A
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Chinese (zh)
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Takashi Abe
Katsumi Shinkai
Sadaharu Komori
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Seiko Epson Corp
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Priority claimed from JP2014118420A external-priority patent/JP2015051426A/en
Priority claimed from JP2014118419A external-priority patent/JP2015044184A/en
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Publication of TW201509690A publication Critical patent/TW201509690A/en

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Abstract

A drawing device includes a drawing device main body which has a cartridge setting unit in which a drawing liquid cartridge is set in a detachable manner, and discharges a supplied drawing liquid from the drawing head to perform a drawing process, a chamber room which accommodates the drawing device main body, a booth opening which is provided in the chamber room and causes a drawing liquid cartridge to be received in the chamber room, a transport unit which transports the drawing liquid cartridge between the receiving area and the relay area, and a transfer unit which transfers the drawing liquid cartridge between the relay area and the cartridge setting unit.

Description

描繪裝置 Depiction device

本發明係關於一種描繪裝置。 The present invention relates to a rendering device.

作為此種描繪裝置,已知一種液滴噴出裝置,其藉由使用作為噴墨頭之功能液滴噴出頭之印刷技術(噴墨法)於基板上形成液晶顯示裝置之濾色器或有機EL(Electroluminescence,電致發光)裝置之成為各畫素之發光元件等功能層(參照專利文獻1)。 As such a drawing device, there is known a liquid droplet ejecting apparatus which forms a color filter or an organic EL of a liquid crystal display device on a substrate by using a printing technique (inkjet method) as a functional liquid droplet ejection head of an ink jet head. The (Electroluminescence) device is a functional layer such as a light-emitting element of each pixel (see Patent Document 1).

該液滴噴出裝置包括:基座;及描繪裝置,其藉由設置於基座上之功能液滴噴出頭對基板(工件)進行描繪。又,描繪裝置具有供工件搭載之X軸平台、與X軸平台正交之Y軸平台、及搭載於Y軸平台之托架單元。並且,於托架單元,搭載有噴出功能液之複數個功能液滴噴出頭。 The droplet discharge device includes a susceptor and a drawing device that draws a substrate (workpiece) by a functional liquid droplet ejection head provided on the susceptor. Further, the drawing device has an X-axis stage on which the workpiece is mounted, a Y-axis stage orthogonal to the X-axis stage, and a carriage unit mounted on the Y-axis stage. Further, a plurality of functional liquid droplet ejection heads for discharging the functional liquid are mounted on the carriage unit.

又,該液滴噴出裝置包括:吸入噴出罩,其面對所裝設之基板;維護裝置,其供描繪裝置之維護;及腔裝置,其收容描繪裝置、吸入噴出罩及維護裝置,並且將內部氣體維持為特定之潔淨度。又,腔裝置包括:腔室,其收容描繪裝置、吸入噴出罩及維護裝置;及潔淨空氣供給單元,其將腔室內之內部氣體維持為特定之潔淨度。 Further, the liquid droplet ejecting apparatus includes: a suction ejecting cover facing the mounted substrate; a maintenance device for maintaining the drawing device; and a cavity device accommodating the drawing device, the suction ejecting cover, and the maintenance device, and The internal gas is maintained at a specific cleanliness. Further, the chamber device includes a chamber that houses the drawing device, the suction and discharge hood, and the maintenance device, and a clean air supply unit that maintains the internal gas in the chamber to a specific degree of cleanliness.

[先前技術文獻] [Previous Technical Literature] [專利文獻] [Patent Literature]

[專利文獻1]日本專利特開2007-152259號公報 [Patent Document 1] Japanese Patent Laid-Open Publication No. 2007-152259

於此種先前之液滴噴出裝置中,於藉由墨匣供給功能液之情形時,墨匣之更換作業變得繁雜。例如,於液滴噴出裝置為大型且形狀較為複雜之情形時,墨匣之更換作業需要梯凳等腳手架,且必須注意不損傷液滴噴出裝置。 In such a conventional liquid droplet ejecting apparatus, when the functional liquid is supplied by the ink cartridge, the replacement operation of the ink cartridge becomes complicated. For example, when the droplet discharge device is large and complicated in shape, the replacement operation of the ink cartridge requires scaffolding such as a step stool, and care must be taken not to damage the droplet discharge device.

又,更換墨匣時,必須將腔室局部地打開,有腔室內之氣體被外部大氣污染之虞。 Further, when the ink cartridge is replaced, the chamber must be partially opened, and the gas in the chamber is contaminated by the outside air.

即,存在於更換墨匣時包括作業環境在內之作業性降低之問題。 That is, there is a problem that the workability including the working environment is lowered when the ink cartridge is replaced.

本發明係為了解決上述問題之至少一部分而成者,可實現為下述形態或應用例。 The present invention has been made to solve at least a part of the above problems, and can be realized as the following aspects or application examples.

[應用例]本應用例之描繪裝置之特徵在於包括:描繪處理部,其具有供可對描繪頭供給描繪液之描繪液匣裝卸自由地裝設之匣裝設部;搬送部,其於接收區域與中繼區域之間搬送描繪液匣,該接收區域係描繪處理部之周圍之任意區域,該中繼區域係匣裝設部側之任意區域;及移載部,其於中繼區域與匣裝設部之間移載描繪液匣。 [Application Example] The drawing device of the application example is characterized in that the drawing processing unit includes a arranging unit for attaching and detaching the drawing liquid to which the drawing liquid can be supplied to the drawing head, and a conveying unit for receiving The drawing liquid is conveyed between the area and the relay area, the receiving area is an arbitrary area around the processing unit, the relay area is an arbitrary area on the side of the mounting unit, and the transfer unit is in the relay area. The liquid raft is transferred between the arranging parts.

根據本應用例,描繪液匣被接收至描繪處理部之周圍之接收區域,自接收區域被搬送至中繼區域,進而自中繼區域被移載至匣裝設部。如此,使用搬送部及移載部將描繪液匣裝設於匣裝設部,因此,可無關描繪處理部之形態或匣裝設部之配置位置而簡單地裝設描繪液匣。即,可藉由將描繪液匣運入接收區域而簡單地裝設描繪液匣,可提高作業性。又,亦可將用完之描繪液匣自匣裝設部經由中繼區域退回至接收區域。 According to this application example, the liquid helium is drawn to the receiving area around the drawing processing unit, is transported from the receiving area to the relay area, and is transferred from the relay area to the cassette mounting unit. In this manner, since the drawing liquid cartridge is attached to the armor mounting portion by the transporting portion and the transfer portion, the drawing liquid can be easily installed irrespective of the form of the drawing processing portion or the arrangement position of the mounting portion. In other words, the drawing liquid can be easily installed by transporting the drawing liquid to the receiving area, and workability can be improved. Further, the used drawing liquid can be returned to the receiving area via the relay area from the mounting unit.

於此情形時,較佳為進而包括:潔淨棚,其收容描繪處理部、搬送部及移載部,並且將內部氣體維持為特定之潔淨度;及棚開口 部,其設置於潔淨棚,且連通於接收區域。 In this case, it is preferable to further include: a clean booth that houses the drawing processing unit, the transport unit, and the transfer unit, and maintains the internal gas to a specific cleanliness; and the shed opening The portion is disposed in the clean booth and is connected to the receiving area.

根據該構成,棚開口部為可接收描繪液匣之大小即可,且可縮短用於接收之打開時間。因此,於接收描繪液匣時,外部大氣向潔淨棚內之進入得到抑制,可儘可能地抑制潔淨度之降低。 According to this configuration, the shed opening can be configured to receive the size of the drawing liquid, and the opening time for receiving can be shortened. Therefore, when the liquid helium is drawn, the entry of the outside atmosphere into the clean room is suppressed, and the deterioration of the cleanliness can be suppressed as much as possible.

[應用例]本應用例之另一描繪裝置之特徵在於包括:描繪處理部,其具有供可對描繪頭供給描繪液之描繪液匣裝卸自由地裝設之匣裝設部;潔淨棚,其收容描繪處理部,並且將內部氣體維持為特定之潔淨度;棚開口部,其設置於潔淨棚,且用以將描繪液匣接收至潔淨棚內;搬送部,其於接收區域與中繼區域之間搬送經由棚開口部接收之描繪液匣,該接收區域係描繪處理部之周圍之任意區域,該中繼區域係匣裝設部側之任意區域;及移載部,其於中繼區域與匣裝設部之間移載描繪液匣。 [Application Example] Another drawing device of this application example includes a drawing processing unit having a mounting portion for attaching and detaching the drawing liquid to which the drawing liquid can be supplied to the drawing head, and a clean booth. Storing the drawing processing unit and maintaining the internal gas to a specific degree of cleanliness; the shed opening portion is disposed in the clean booth, and is configured to receive the drawing liquid raft into the clean shed; the conveying portion is in the receiving area and the relay area The drawing liquid that is received through the shed opening is conveyed between the receiving area, any area around the processing unit, the relay area is an arbitrary area on the side of the arranging unit, and the transfer unit is in the relay area The liquid raft is transferred between the arranging unit and the arranging unit.

根據本應用例,被運入描繪處理部之描繪液匣被接收至接收區域,並自接收區域被搬送至中繼區域,進而自中繼區域被移載至匣裝設部。因此,棚開口部為可接收描繪液匣之大小即可,且可縮短用於接收之打開時間。因此,於接收描繪液匣時,外部大氣向潔淨棚內之進入得到抑制,可抑制潔淨度之降低。 According to this application example, the drawing liquid that has been carried into the drawing processing unit is received in the receiving area, transported from the receiving area to the relay area, and transferred from the relay area to the mounting unit. Therefore, the shed opening portion is sized to receive the drawing liquid helium, and the opening time for receiving can be shortened. Therefore, when the liquid helium is drawn, the entry of the outside atmosphere into the clean room is suppressed, and the deterioration of the cleanliness can be suppressed.

於此情形時,較佳為,搬送部包括:搬送機構部,其搬送描繪液匣;殼體部,其內包接收區域及中繼區域,並且收容搬送機構部;外部開閉部,其設置於殼體部之棚開口部側之端部,對潔淨棚之外部開閉接收區域;及內部開閉部,其設置於殼體部之移載部側之端部,對潔淨棚之內部開閉中繼區域。 In this case, it is preferable that the conveying unit includes a conveying mechanism unit that conveys the drawing liquid enthalpy, and a casing unit that houses the receiving area and the relaying area, and houses the conveying mechanism unit; and the external opening and closing unit is provided at An end portion of the casing portion on the opening side of the shed is opened and closed to the outside of the clean shed; and an internal opening and closing portion is provided at an end portion of the casing portion on the side of the transfer portion, and the relay region is opened and closed to the inside of the clean shed .

根據該構成,於接收描繪液匣時,即便外部大氣進入潔淨棚內,亦可藉由外部開閉部及內部開閉部容易地將該外部大氣封閉於殼體部內,可降低潔淨棚內之氣體被外部大氣直接污染之可能性。 According to this configuration, even when the external atmosphere enters the clean room when the drawing liquid is received, the external atmosphere can be easily enclosed in the casing by the external opening and closing portion and the internal opening and closing portion, thereby reducing the gas in the clean room. The possibility of direct contamination of the external atmosphere.

於此情形時,較佳為,外部開閉部包括:外部開閉門,其對潔 淨棚之外部開閉接收區域;及鎖定機構,其將外部開閉門鎖定為閉合狀態或自閉合狀態解鎖;且內部開閉部包括:內部開閉門,其對潔淨棚之內部開閉中繼區域;及開閉機構,其使內部開閉門執行開閉動作。 In this case, it is preferable that the external opening and closing portion includes: an external opening and closing door, which is clean An external opening and closing receiving area of the net shed; and a locking mechanism that locks the external opening and closing door to a closed state or a self-closing state; and the internal opening and closing portion includes: an internal opening and closing door that opens and closes the relay area to the inside of the clean shed; and opens and closes The mechanism causes the internal opening and closing door to perform an opening and closing operation.

根據該構成,設為處於潔淨棚外之操作者可藉由開閉機構自動地開閉無法直接觸碰之內部開閉門之構造,故而可提高開閉之作業性。又,由於設為可藉由手動開閉可直接觸碰之外部開閉門之構造,因此,可省略開閉外部開閉門之機構,可簡化該部分之構造。又,由於設為將外部開閉門鎖定為閉合狀態或自閉合狀態解鎖之構造,因此,不存在外部開閉門被意外打開之情況,可防止由此導致之潔淨棚之污染。 According to this configuration, the operator who is outside the clean booth can automatically open and close the structure in which the internal opening and closing door cannot be directly touched by the opening and closing mechanism, so that the workability of opening and closing can be improved. Further, since the external opening and closing door can be directly opened and closed by a manual opening and closing, the mechanism for opening and closing the external opening and closing door can be omitted, and the structure of the portion can be simplified. Further, since the external opening and closing door is locked in the closed state or the self-closing state, the external opening and closing door is not accidentally opened, and the contamination of the clean booth can be prevented.

於此情形時,較佳為,搬送部進而包括分別控制鎖定機構及開閉機構之搬送控制部,搬送控制部根據接收指令使內部開閉門執行閉合動作,其後使外部開閉門解除鎖定,並根據搬送指令使外部開閉門鎖定,其後使內部開閉門執行打開動作。 In this case, it is preferable that the conveyance unit further includes a conveyance control unit that controls the lock mechanism and the opening and closing mechanism, and the conveyance control unit causes the internal opening and closing door to perform the closing operation according to the receiving command, and then unlocks the external opening and closing door, and The transfer command locks the external opening and closing door, and then causes the internal opening and closing door to perform the opening operation.

根據該構成,於接收描繪液匣時,內部開閉門成為「閉」,因此,即便外部大氣進入殼體部內,其亦不會流出至潔淨棚內。又,於搬送描繪液匣時,外部開閉門成為「閉」,因此,外部大氣不會流入殼體部內。 According to this configuration, when the drawing liquid raft is received, the internal opening and closing door is "closed". Therefore, even if the outside air enters the casing portion, it does not flow out into the clean shed. Further, when the drawing liquid is conveyed, the external opening and closing door is "closed", so that the outside air does not flow into the casing portion.

於此情形時,較佳為,搬送控制部進而控制搬送機構部,於根據接收指令進行之內部開閉門之閉合動作與外部開閉門之解除鎖定之期間,將描繪液匣自中繼區域搬送至接收區域,並於根據搬送指令進行之外部開閉門之鎖定與內部開閉門之打開動作之期間,將描繪液匣自上述接收區域搬送至中繼區域。 In this case, it is preferable that the conveyance control unit further controls the conveyance mechanism unit to convey the drawing liquid from the relay area to the closing operation of the internal opening and closing door and the unlocking of the external opening and closing door according to the reception command. In the receiving area, the drawing liquid is conveyed from the receiving area to the relay area during the locking of the external opening and closing door and the opening operation of the internal opening and closing door by the conveyance command.

根據該構成,於將描繪液匣於中繼區域與接收區域之相互間搬送時,內部開閉門及外部開閉門成為「閉」,可縮短外部開閉門成為 「開」之時間、即外部大氣進入之時間。 According to this configuration, when the drawing liquid is conveyed between the relay area and the receiving area, the internal opening/closing door and the external opening/closing door are "closed", and the external opening and closing door can be shortened. The time of "opening", that is, the time when the outside atmosphere enters.

又,較佳為,中繼區域被設定於潔淨棚內之較接收區域高之位置,搬送機構部使描繪液匣於接收區域與中繼區域之間升降。 Further, it is preferable that the relay area is set at a position higher than the receiving area in the clean booth, and the transport mechanism unit raises and lowers the drawing liquid between the receiving area and the relay area.

根據該構成,接收區域相對於中繼區域被設定於潔淨棚內之較低之位置,因此,可容易地進行描繪液匣之運入及運出。又,由於為搬送機構部使描繪液匣升降之構造,故可簡化搬送機構部之構造。 According to this configuration, since the receiving area is set at a lower position in the clean room with respect to the relay area, the drawing liquid can be easily carried in and out. Moreover, since the structure of the drawing liquid is lifted and lowered by the conveying mechanism unit, the structure of the conveying mechanism unit can be simplified.

於此情形時,較佳為,搬送機構部於中繼區域中使描繪液匣上升至其上端即將到達內部開閉部之前之位置。 In this case, it is preferable that the conveyance mechanism unit raises the drawing liquid helium to a position before the upper end thereof reaches the internal opening and closing portion in the relay region.

根據該構成,被搬送至中繼區域之描繪液匣不會阻礙內部開閉部之開閉,且可容易地於中繼區域與匣裝設部之間進行描繪液匣之移載。 According to this configuration, the drawing liquid 搬 conveyed to the relay area does not hinder the opening and closing of the internal opening and closing unit, and the drawing liquid raft can be easily transferred between the relay area and the cymbal mounting unit.

又,較佳為,描繪液匣以裝設於裝設托盤之狀態搭載於台車而被接收至接收區域,搬送機構部於上升動作中自台車接過裝設托盤而開始描繪液匣之搬送,於下降動作中將裝設托盤交付至台車而結束描繪液匣之搬送。 Moreover, it is preferable that the drawing liquid is mounted on the trolley in a state of being mounted on the mounting tray, and is received in the receiving area, and the conveying mechanism unit picks up the mounting tray from the trolley during the ascending operation, and starts the drawing of the liquid helium. The loading tray is delivered to the trolley during the lowering operation, and the drawing of the liquid raft is finished.

根據該構成,可藉由台車進行描繪液匣之運入及運出。又,由於搬送機構部以自台車接過或交付至台車之形式將描繪液匣與裝設托盤一併搬送,因此可簡單且穩定地進行描繪液匣之搬送。 According to this configuration, the drawing liquid can be carried in and out by the trolley. In addition, since the conveyance mechanism unit conveys the drawing liquid raft and the installation tray together in the form of being picked up by the trolley or delivered to the trolley, the drawing liquid raft can be easily and stably conveyed.

進而,較佳為進而包括將殼體部內之氣體排出至潔淨棚之外部之排氣部。 Furthermore, it is preferable to further include an exhaust portion that discharges the gas in the casing portion to the outside of the clean booth.

根據該構成,可將因外部開閉部之打開而進入殼體部內之外部大氣排出至潔淨棚之外部。因此,潔淨棚內不易被與描繪液匣一併被運入之塵埃或外部大氣污染。 According to this configuration, the outside air that has entered the casing portion due to the opening of the external opening and closing portion can be discharged to the outside of the clean room. Therefore, the clean shed is not easily contaminated by dust or external air that is transported together with the paint liquid.

於此情形時,較佳為,排氣部包括:排氣流路,其係自殼體部之棚開口部側之端部至潔淨棚之外部為止;排氣風扇,其係介存設置於排氣流路;及排氣控制部,其控制排氣風扇之驅動;且排氣控制部 於外部開閉部閉合時驅動排氣風扇。 In this case, it is preferable that the exhaust portion includes an exhaust flow path from an end portion of the casing portion on the opening side of the casing to the outside of the clean booth; and an exhaust fan is disposed in the exhaust fan An exhaust flow path; and an exhaust control unit that controls driving of the exhaust fan; and an exhaust control unit The exhaust fan is driven when the external opening and closing portion is closed.

根據該構成,藉由排氣風扇之驅動而使殼體部內之氣體自移載部側向棚開口部側流動,因此,可將殼體部內之被污染之氣體排出。又,此時,由於外部開閉部閉合,故可減少因排氣風扇之驅動而導致之外部大氣之進入。 According to this configuration, since the gas in the casing portion flows from the side of the transfer portion toward the side of the opening portion by the driving of the exhaust fan, the contaminated gas in the casing portion can be discharged. Further, at this time, since the external opening and closing portion is closed, the entry of the outside atmosphere due to the driving of the exhaust fan can be reduced.

另一方面,較佳為,於匣裝設部,裝設有描繪液不同之複數種描繪液匣,複數種描繪液匣以裝設於裝設托盤之狀態被搬送至上述中繼區域,且各描繪液匣具有用以檢測類別之被檢測部,移載部包括:移載機構部,其移載複數種描繪液匣;類別檢測部,其設置於移載機構部,經由被檢測部檢測成為移載對象之描繪液匣之類別;及移載控制部,其控制移載機構部;移載控制部基於類別檢測部之檢測結果而實施複數種描繪液匣之移載。 On the other hand, it is preferable that a plurality of kinds of drawing liquids having different drawing liquids are attached to the armor mounting portion, and a plurality of kinds of drawing liquids are transported to the relay area in a state of being mounted on the mounting tray, and Each of the drawing liquids has a detected portion for detecting a type, and the transfer unit includes a transfer mechanism unit that transfers a plurality of types of drawing liquids, and a type detecting unit that is provided in the transfer mechanism unit and that is detected by the detected portion. The type of the drawing liquid to be transferred to the object; and the transfer control unit that controls the transfer mechanism unit; and the transfer control unit performs the transfer of the plurality of drawing liquids based on the detection result of the type detecting unit.

根據該構成,可檢測描繪液匣之被檢測部,並基於其檢測結果實施複數種描繪液匣之移載,因此,可將裝設於裝設托盤之複數種描繪液匣準確地移載至匣裝設部。 According to this configuration, the detected portion of the liquid helium can be detected, and the transfer of the plurality of drawing liquids can be performed based on the detection result. Therefore, the plurality of drawing liquids installed in the mounting tray can be accurately transferred to匣Installation department.

於此情形時,較佳為,移載控制部於複數種描繪液匣之移載之前,於裝設托盤中實施基於類別之複數種描繪液匣之重新排列。 In this case, it is preferable that the transfer control unit performs rearrangement of the plurality of types of drawing liquids based on the types in the mounting tray before the transfer of the plurality of drawing liquids.

根據該構成,可將移載控制部劃分為關於匣之移載之部分與關於匣之整齊排列之部分,可整體上簡化控制系統。因此,可高效率地進行描繪液匣之移載。 According to this configuration, the transfer control unit can be divided into a portion in which the transfer of the crucible is performed and a portion in which the transfer is arranged in a neat manner, and the control system can be simplified as a whole. Therefore, the transfer of the liquid helium can be performed efficiently.

進而,較佳為,描繪處理部包括:平台部,其使所載置之描繪對象物移動;及描繪部,其配設於平台部之上方,具有描繪頭及匣裝設部;且一面藉由平台部使描繪對象物移動,一面自描繪頭噴出描繪液而實施描繪處理。 Furthermore, it is preferable that the drawing processing unit includes a platform unit that moves the object to be drawn, and a drawing unit that is disposed above the platform unit and has a drawing head and a mounting unit; When the drawing unit moves the drawing object, the drawing liquid is ejected from the drawing head to perform drawing processing.

根據該構成,可提高描繪液匣更換之作業性,因此,可於短時間內進行描繪液匣更換時之一連串作業。 According to this configuration, the workability of the replacement of the liquid helium can be improved. Therefore, it is possible to perform a series of operations at the time of the replacement of the drawing liquid in a short time.

1‧‧‧描繪裝置 1‧‧‧Drawing device

2‧‧‧描繪裝置本體 2‧‧‧Drawing device body

3‧‧‧腔裝置 3‧‧‧ cavity device

4‧‧‧匣供給裝置 4‧‧‧匣 supply device

6‧‧‧腔室 6‧‧‧ chamber

7‧‧‧潔淨空氣供給單元 7‧‧‧Clean air supply unit

11‧‧‧X軸支持基座 11‧‧‧X-axis support base

12‧‧‧裝設平台 12‧‧‧Installation platform

13‧‧‧X軸平台 13‧‧‧X-axis platform

14‧‧‧換行軸平台 14‧‧‧Washing shaft platform

15‧‧‧Y軸支持基座 15‧‧‧Y-axis support base

16‧‧‧Y軸平台 16‧‧‧Y-axis platform

17‧‧‧托架單元 17‧‧‧Bracket unit

18‧‧‧描繪區域 18‧‧‧Drawing area

19‧‧‧維護區域 19‧‧‧Maintenance area

21‧‧‧橋板 21‧‧‧ Bridge

22‧‧‧匣裝設部 22‧‧‧匣Installation Department

22a‧‧‧個別安裝裝設部 22a‧‧‧Individual Installation and Installation Department

23‧‧‧描繪頭 23‧‧‧Drawing head

25‧‧‧抽吸單元 25‧‧‧sucking unit

26‧‧‧擦拭單元 26‧‧‧Wiping unit

27‧‧‧閃蒸單元 27‧‧‧Flash unit

28‧‧‧檢查單元 28‧‧‧Check unit

31‧‧‧垂設構件 31‧‧‧Fan components

32‧‧‧頭單元 32‧‧‧ head unit

33‧‧‧頂板 33‧‧‧ top board

41‧‧‧棚開口部 41‧‧‧ shed opening

42‧‧‧搬送部 42‧‧‧Transportation Department

43‧‧‧接收區域 43‧‧‧ Receiving area

44‧‧‧中繼區域 44‧‧‧Relay area

45‧‧‧移載部 45‧‧‧Transportation Department

51‧‧‧搬送機構部 51‧‧‧Transportation Department

52‧‧‧殼體部 52‧‧‧Shell Department

53‧‧‧外部開閉部 53‧‧‧External opening and closing department

54‧‧‧內部開閉部 54‧‧‧Internal opening and closing department

55‧‧‧排氣部 55‧‧‧Exhaust Department

56‧‧‧搬送控制部 56‧‧‧Transportation Control Department

58‧‧‧殼體框架 58‧‧‧Shell frame

59‧‧‧面板材 59‧‧‧Face plate

61‧‧‧內部擋閘 61‧‧‧Internal gate

62‧‧‧內部氣缸 62‧‧‧Internal cylinder

64‧‧‧外部開閉門 64‧‧‧External opening and closing doors

65‧‧‧電磁鎖定機構 65‧‧‧Electromagnetic locking mechanism

67‧‧‧升降導件 67‧‧‧ Lifting guides

68‧‧‧搬送叉 68‧‧‧Transfer fork

69‧‧‧導螺桿機構 69‧‧‧ lead screw mechanism

70‧‧‧搬送用馬達 70‧‧‧Transport motor

71‧‧‧母螺紋部 71‧‧‧Female thread

72‧‧‧導螺桿 72‧‧‧ lead screw

74‧‧‧排氣腔室 74‧‧‧Exhaust chamber

75‧‧‧排氣風扇 75‧‧‧Exhaust fan

76‧‧‧排氣管 76‧‧‧Exhaust pipe

78‧‧‧操作面板 78‧‧‧Operator panel

81‧‧‧移載機構部 81‧‧‧Transportation Department

82‧‧‧類別檢測部 82‧‧‧Category Detection Department

83‧‧‧移載控制部 83‧‧‧Transportation Control Department

85‧‧‧機器人基座 85‧‧‧Robot base

86‧‧‧第1水平臂 86‧‧‧1st horizontal arm

87‧‧‧第2水平臂 87‧‧‧2nd horizontal arm

88‧‧‧垂直臂 88‧‧‧ vertical arm

89‧‧‧抓持頭 89‧‧‧Scratch head

89a‧‧‧抓持片 89a‧‧‧Scratch film

91‧‧‧描繪液導入口 91‧‧‧Drawing liquid inlet

92‧‧‧空氣供給口 92‧‧‧Air supply port

93‧‧‧卡合凸部 93‧‧‧Snap convex

95‧‧‧支持構件 95‧‧‧Support components

A‧‧‧台車 A‧‧‧Trolley

Aa‧‧‧載置框 Aa‧‧‧ mounting frame

C‧‧‧描繪液匣 C‧‧‧ depicting liquids

Ca‧‧‧描繪液容器 Ca‧‧‧Drawing liquid container

Cb‧‧‧密閉盒 Cb‧‧‧Closed box

Cc‧‧‧描繪液供給口 Cc‧‧‧ depicting liquid supply port

Cd‧‧‧空氣導入口 Cd‧‧‧air inlet

Ce‧‧‧卡合凹部 Ce‧‧‧Care recess

T‧‧‧裝設托盤 T‧‧‧Installation tray

Ta‧‧‧個別裝設部 Ta‧‧‧Individual Installation Department

W‧‧‧工件 W‧‧‧Workpiece

X‧‧‧軸 X‧‧‧ axis

Y‧‧‧軸 Y‧‧‧ axis

Z‧‧‧軸 Z‧‧‧ axis

圖1係實施形態之描繪裝置之整體立體圖。 Fig. 1 is an overall perspective view of a drawing device of an embodiment.

圖2係實施形態之描繪裝置之整體俯視圖。 Fig. 2 is an overall plan view of the drawing device of the embodiment.

圖3係實施形態之描繪裝置之X軸方向側視圖。 Fig. 3 is a side view in the X-axis direction of the drawing device of the embodiment.

圖4係匣供給裝置周圍之構造說明圖。 Fig. 4 is a structural explanatory view of the periphery of the supply device.

圖5(a)~(c)係匣供給裝置中之搬送部之構造圖。 5(a) to 5(c) are structural diagrams of the conveying unit in the weir supply device.

圖6係台車及裝設托盤之說明圖。 Figure 6 is an explanatory view of the trolley and the mounting tray.

圖7係表示搬送控制部之控制方法之流程圖。 Fig. 7 is a flowchart showing a method of controlling the transport control unit.

圖8係匣供給裝置中之移載部之構造圖。 Fig. 8 is a structural view showing a transfer portion in the crucible supply device.

圖9係匣供給裝置中之移載部周圍之俯視圖。 Figure 9 is a plan view of the periphery of the transfer portion in the crucible supply device.

圖10(a)、(b)係匣裝設部周圍之構造圖。 Fig. 10 (a) and (b) are structural views of the periphery of the cymbal mounting portion.

圖11係表示移載控制部之控制方法之流程圖。 Fig. 11 is a flow chart showing a control method of the transfer control unit.

以下,參照隨附圖式,對本發明之一實施形態之描繪裝置進行說明。 Hereinafter, a drawing device according to an embodiment of the present invention will be described with reference to the accompanying drawings.

該描繪裝置係使用組入至平板顯示器之生產線且導入有例如包含特殊之材料或發光性之材料之描繪液之描繪頭而形成液晶顯示裝置之濾色器或有機EL裝置之成為各畫素之發光元件等者。實施形態之描繪裝置係形成有機EL裝置之發光元件者,經由描繪液匣將構成發光元件之高價之描繪液供給至描繪頭。 The drawing device is formed by a color filter or an organic EL device in which a liquid crystal display device is formed by using a drawing head incorporated in a production line of a flat panel display and having a drawing liquid containing a material of a specific material or illuminance, for example. Light-emitting elements, etc. In the drawing device of the embodiment, the light-emitting element of the organic EL device is formed, and the high-priced drawing liquid constituting the light-emitting element is supplied to the drawing head via the drawing liquid.

圖1至圖3分別係模式性地表示本發明之描繪裝置1之立體圖、俯視圖、側視圖。如該等圖所示,描繪裝置1包括:描繪裝置本體2(描繪處理部),其對工件W(基板:描繪對象物)實施特定之描繪;腔裝置3(潔淨棚),其收容描繪裝置本體2;及匣供給裝置4,其對描繪裝置本體2供給描繪液匣C。 1 to 3 are a perspective view, a plan view, and a side view, respectively, schematically showing the drawing device 1 of the present invention. As shown in the figures, the drawing device 1 includes a drawing device main body 2 (drawing processing unit) that performs a specific drawing on the workpiece W (substrate: drawing object), and a cavity device 3 (clean shed) that houses the drawing device. The main body 2 and the crucible supply device 4 supply the drawing liquid 匣C to the drawing device main body 2.

於描繪裝置本體2搭載有描繪頭23,將描繪頭23與工件W對向配 置,於進行使工件W沿第1方向移動之主掃描與使工件W沿相對於第1方向正交之第2方向移動之副掃描之期間,自描繪頭23向工件W噴出描繪液。將該主掃描時之上述第1方向稱為主掃描方向,將第2方向稱為副掃描方向。本實施形態中,將主掃描方向表示為X軸方向,將副掃描方向表示為Y軸方向。又,將與X軸方向及Y軸方向正交之方向表示為Z軸方向。 A drawing head 23 is mounted on the drawing device body 2, and the drawing head 23 is aligned with the workpiece W. While the main scanning for moving the workpiece W in the first direction and the sub-scan for moving the workpiece W in the second direction orthogonal to the first direction are performed, the drawing liquid is ejected from the drawing head 23 to the workpiece W. The first direction in the main scanning is referred to as a main scanning direction, and the second direction is referred to as a sub-scanning direction. In the present embodiment, the main scanning direction is indicated as the X-axis direction, and the sub-scanning direction is indicated as the Y-axis direction. Further, a direction orthogonal to the X-axis direction and the Y-axis direction is indicated as a Z-axis direction.

匣供給裝置4藉由自腔裝置3之外部之操作將帶入之描繪液匣C供給至描繪裝置本體2(實質上係將用完之描繪液匣C更換為新的描繪液匣)。又,腔裝置3包括:腔室6,其收容描繪裝置本體2;及潔淨空氣供給單元7,其調整腔室6內之氣體之潔淨度或溫度等。 The crucible supply device 4 supplies the drawn drawing liquid C to the drawing device main body 2 by the operation outside the chamber device 3 (substantially, the used drawing liquid C is replaced with a new drawing liquid). Further, the chamber device 3 includes a chamber 6 that houses the drawing device body 2, and a clean air supply unit 7 that adjusts the cleanliness or temperature of the gas in the chamber 6.

描繪裝置本體2包括:X軸支持基座11,其沿X軸方向延伸,由石壓盤構成;X軸平台13,其配設於X軸支持基座11上,使吸附裝設於裝設平台12上之工件W沿X軸方向(主掃描方向)移動;換行軸平台14,其介存設置於X軸平台13與裝設平台12之間,使工件W沿Y軸方向(副掃描方向)移動;Y軸支持基座15,其為以橫跨X軸平台13之方式沿Y軸方向架設之框架構造;Y軸平台16,其配設於Y軸支持基座15上,且沿Y軸方向延伸;及複數個(例如10個)托架單元17,其等構成為可藉由Y軸平台16於描繪區域18與維護區域19之間移動。 The drawing device body 2 includes an X-axis supporting base 11 extending in the X-axis direction and composed of a stone pressing plate, and an X-axis platform 13 disposed on the X-axis supporting base 11 for absorbing and mounting The workpiece W on the platform 12 moves in the X-axis direction (main scanning direction); the lane-changing shaft platform 14 is disposed between the X-axis platform 13 and the mounting platform 12 to make the workpiece W along the Y-axis direction (sub-scanning direction) Moving; the Y-axis support base 15 is a frame structure that is erected in the Y-axis direction across the X-axis platform 13; the Y-axis platform 16 is disposed on the Y-axis support base 15 and along the Y The shaft direction extends; and a plurality of (for example, ten) bracket units 17 are configured to be movable between the drawing area 18 and the maintenance area 19 by the Y-axis stage 16.

各托架單元17吊設於沿X軸方向延伸之橋板21,並經由橋板21支持於Y軸平台16。各橋板21兼作Y軸平台16之Y軸滑件,複數個托架單元17構成為可藉由Y軸平台16分別經由橋板21個別地或整體上沿Y軸方向自由移動。 Each of the bracket units 17 is suspended from the bridge plate 21 extending in the X-axis direction, and is supported by the Y-axis stage 16 via the bridge plate 21. Each of the bridge plates 21 also serves as a Y-axis slide of the Y-axis stage 16, and the plurality of carriage units 17 are configured to be freely movable in the Y-axis direction by the Y-axis stage 16 via the bridge plate 21 individually or entirely.

又,於各橋板21,設置有匣裝設部22,於匣裝設部22,裝設有複數個描繪液匣C。並且,於各托架單元17,搭載有複數個描繪頭23,對該等描繪頭23,自裝設於對應之匣裝設部22之複數個描繪液匣C供給描繪液。再者,技術方案中所言及之「平台部」包括X軸平台 13及換行軸平台14,「描繪部」包括Y軸平台16、托架單元17、橋板21及匣裝設部22。 Further, the bridge plate 21 is provided with a cymbal mounting portion 22, and the cymbal mounting portion 22 is provided with a plurality of drawing liquids C. Further, a plurality of drawing heads 23 are mounted on each of the carriage units 17, and the drawing heads 23 supply the drawing liquid from a plurality of drawing liquids C attached to the corresponding side mounting units 22. Furthermore, the "platform department" mentioned in the technical solution includes an X-axis platform. 13 and the lane changing shaft platform 14, the "drawing portion" includes a Y-axis platform 16, a bracket unit 17, a bridge plate 21, and a cymbal mounting portion 22.

又,描繪裝置本體2包括作為描繪頭23之維護系統的配設於維護區域19之抽吸單元25及擦拭單元26(為了交替運轉而設置有2台),並且包括搭載於X軸平台13之閃蒸單元27及檢查單元28。抽吸單元25自描繪頭23強制性地抽吸描繪液(消除噴嘴堵塞),擦拭單元26拂拭描繪頭23之噴嘴面(防止飛行偏離)。又,閃蒸單元27容許描繪液自描繪頭23之捨棄式噴出,檢查單元28使描繪液以液滴之形式自描繪頭23之噴嘴噴出至檢查用片,並檢查噴附於檢查用片之液滴之形狀或噴附位置,藉此,檢查描繪頭23之噴出性能(噴出量、噴出位置精度等)。 Further, the drawing device main body 2 includes a suction unit 25 and a wiping unit 26 (two for alternate operation) disposed in the maintenance area 19 as the maintenance system of the drawing head 23, and includes the X-axis platform 13 Flash unit 27 and inspection unit 28. The suction unit 25 forcibly sucks the drawing liquid from the drawing head 23 (eliminating nozzle clogging), and the wiping unit 26 wipes the nozzle surface of the drawing head 23 (prevents flight deviation). Further, the flash unit 27 allows the drawing liquid to be ejected from the drawing head 23, and the inspection unit 28 causes the drawing liquid to be ejected from the nozzle of the drawing head 23 in the form of droplets to the inspection sheet, and is inspected and attached to the inspection sheet. The shape of the liquid droplets or the spray position is thereby checked for the discharge performance (discharge amount, discharge position accuracy, and the like) of the drawing head 23.

X軸平台13藉由利用線性馬達之馬達驅動使工件W沿X軸方向移動,與描繪頭23之噴出驅動一併對工件W進行主掃描。同樣,換行軸平台14藉由利用線性馬達之馬達驅動對工件W進行副掃描。即,藉由該主掃描與副掃描,對工件W進行描繪液之描繪。又,Y軸平台16藉由利用線性馬達之馬達驅動經由各托架單元17而於描繪時使描繪頭23移動至特定之描繪開始位置,此外亦於維護時使描繪頭23移動至維護區域19。進而,於更換描繪液匣C時,Y軸平台16使描繪頭23(托架單元17)移動至維護區域19(詳細內容將於下文進行敍述)。 The X-axis stage 13 is moved by the motor of the linear motor to move the workpiece W in the X-axis direction, and is driven by the ejection of the drawing head 23 to perform main scanning of the workpiece W. Similarly, the wrap-around shaft stage 14 performs sub-scanning of the workpiece W by a motor driven by a linear motor. That is, the drawing of the drawing liquid is performed on the workpiece W by the main scanning and the sub scanning. Further, the Y-axis stage 16 is driven by the motor of the linear motor to move the drawing head 23 to a specific drawing start position at the time of drawing through the respective carriage unit 17, and also moves the drawing head 23 to the maintenance area 19 during maintenance. . Further, when the drawing liquid 匣C is replaced, the Y-axis stage 16 moves the drawing head 23 (the cradle unit 17) to the maintenance area 19 (details will be described later).

各托架單元17包括:垂設構件31,其支持於橋板21;及頭單元32,其安裝於垂設構件31之下端。於頭單元32,以支持於封頭板(head plate)33之方式搭載有複數個描繪頭23。並且,對複數個描繪頭23,自上述描繪液匣C供給按照顏色等區分之複數種描繪液。即,於各托架單元17,搭載有對應於複數種描繪液之複數個描繪頭23,與此對應,於匣裝設部22裝設有複數個描繪液匣C(詳細內容將於下文進行敍述)。 Each of the bracket units 17 includes a hanging member 31 supported by the bridge plate 21 and a head unit 32 mounted to the lower end of the hanging member 31. The head unit 32 is provided with a plurality of drawing heads 23 so as to be supported by a head plate 33. Further, for a plurality of drawing heads 23, a plurality of kinds of drawing liquids which are distinguished by color or the like are supplied from the drawing liquid 匣C. In other words, a plurality of drawing heads 23 corresponding to a plurality of kinds of drawing liquids are mounted on the respective carriage units 17, and a plurality of drawing liquids C are mounted in the armor mounting unit 22 (details will be described below). Narrative).

如圖2所示,腔裝置3包括:腔室6,其由預製形式之潔淨棚構 成;及潔淨空氣供給單元7,其用以將腔室6內之氣體之潔淨度或溫度等調整為固定。雖未圖示詳細情況,但潔淨空氣供給單元7具有冷卻盤管、加熱器及送風機,並且具有對應於腔室6之頂板全域中之至少描繪區域18與維護區域19而組入之HEPA過濾器(High Efficiency Particulate Air Filter,高效率空氣微粒過濾器)。 As shown in Figure 2, the chamber device 3 comprises a chamber 6 which is constructed in a prefabricated form. And a clean air supply unit 7 for adjusting the cleanliness or temperature of the gas in the chamber 6 to be fixed. Although not shown in detail, the clean air supply unit 7 has a cooling coil, a heater, and a blower, and has a HEPA filter incorporated in at least the drawing area 18 and the maintenance area 19 corresponding to the entire top plate of the chamber 6. (High Efficiency Particulate Air Filter).

該腔裝置3中,經常藉由潔淨空氣供給單元7進行向腔室6內之空氣之送氣與排氣(經常換氣)。即,所送入之空氣自腔室6之頂板側成為降流而流動,從而腔室6內之氣體被維持為特定之溫度及特定之潔淨度。再者,腔室6內之氣體自設置於腔室6之下部之排氣口被排出至外部之排氣設備(真空抽吸)(均省略圖示)。 In the chamber device 3, air supply and exhaust (often ventilating) to the air in the chamber 6 is often performed by the clean air supply unit 7. That is, the fed air flows downward from the top plate side of the chamber 6, and the gas in the chamber 6 is maintained at a specific temperature and a specific degree of cleanliness. Further, the gas in the chamber 6 is discharged to the external exhaust device (vacuum suction) from the exhaust port provided at the lower portion of the chamber 6 (all of which are not shown).

匣供給裝置4配設於維護區域19,將自腔室6之外部被帶入之描繪液匣C暫時搬送至匣裝設部22之附近,並自該搬送位置移載(匣更換)至匣裝設部22。即,匣供給裝置4將匣裝設部22中用盡(用完)之描繪液匣C更換為新的描繪液匣C。 The crucible supply device 4 is disposed in the maintenance area 19, and temporarily transports the drawing liquid C brought in from the outside of the chamber 6 to the vicinity of the crucible mounting portion 22, and transfers (replaces) from the transport position to the crucible. Mounting section 22. In other words, the crucible supply device 4 replaces the depleted liquid (C) used in the crucible mounting portion 22 with the new drawing liquid C.

此處,參照圖2~圖5,對實施形態之匣供給裝置4詳細地說明。圖4係自描繪區域18側朝維護區域19觀察時之匣供給裝置4之側視圖。圖5(a)及圖5(b)係匣供給裝置4之側視圖,圖5(c)係表示搬送機構部51之構成之俯視圖。 Here, the crucible supply device 4 of the embodiment will be described in detail with reference to Figs. 2 to 5 . 4 is a side view of the weir supply device 4 as viewed from the side of the drawing area 18 toward the maintenance area 19. 5(a) and 5(b) are side views of the weir supply device 4, and Fig. 5(c) is a plan view showing the configuration of the transport mechanism portion 51.

如兩圖所示,匣供給裝置4於腔室6內之維護區域19中配置於腔室6之側壁之近旁。匣供給裝置4包括:棚開口部41,其用以將描繪液匣C接收至腔室6內;搬送部42,其於接收區域43與匣裝設部22附近之中繼區域44之間沿上下方向搬送經由棚開口部41接收之描繪液匣C;及移載部45,其於中繼區域44與匣裝設部22之間移載描繪液匣C。 As shown in the two figures, the helium supply device 4 is disposed in the maintenance area 19 in the chamber 6 in the vicinity of the side wall of the chamber 6. The crucible supply device 4 includes a shed opening portion 41 for receiving the drawing liquid hopper C into the chamber 6, and a conveying portion 42 between the receiving portion 43 and the relay region 44 in the vicinity of the cymbal mounting portion 22. The drawing liquid 匣C received through the shed opening 41 and the transfer unit 45 are transferred in the vertical direction, and the drawing liquid 匣C is transferred between the relay area 44 and the cymbal mounting unit 22.

即,於該匣供給裝置4中,藉由利用搬送部42進行之接收區域43與中繼區域44之間之搬送與利用移載部45進行之中繼區域44與匣裝設 部22之間之移載,而進行新舊之描繪液匣C之更換。再者,描繪液匣C向匣裝設部22之移載包括描繪液匣C之定位裝設及流路連接(詳細內容將於下文進行敍述)。 In other words, in the crucible supply device 4, the transfer region between the receiving region 43 and the relay region 44 by the transport unit 42 and the relay region 44 and the armor device 45 are disposed. The transfer between the parts 22 is carried out, and the replacement of the old and new drawing liquids C is performed. Further, the transfer of the liquid helium C to the crucible mounting portion 22 includes the positioning device and the flow path connection for drawing the liquid helium C (details will be described later).

如圖4及圖5(a)~(c)所示,搬送部42包括:搬送機構部51,其沿上下方向(Z軸方向)搬送描繪液匣C;殼體部52,其分別於下部內包接收區域43,且於上部內包中繼區域44,並且收容搬送機構部51;外部開閉部53,其設置於殼體部52之下端部側面,對腔室6之外部開閉接收區域43;及內部開閉部54,其設置於殼體部52之上端部,對腔室6之內部開閉中繼區域44。 As shown in FIGS. 4 and 5(a) to (c), the conveying unit 42 includes a conveying mechanism unit 51 that conveys the drawing liquid 匣C in the vertical direction (Z-axis direction), and a casing portion 52 that is respectively in the lower portion. The receiving area 43 is included in the upper portion, and the relay portion 44 is housed in the upper portion, and the transport mechanism portion 51 is housed. The external opening and closing portion 53 is provided on the side surface of the lower end portion of the casing portion 52, and opens and closes the receiving region 43 to the outside of the chamber 6. And an internal opening and closing portion 54 provided at an upper end portion of the casing portion 52 to open and close the relay region 44 to the inside of the chamber 6.

又,搬送部42包括:排氣部55,其將殼體部52內之氣體排出至腔室6之外部;及搬送控制部56,其控制搬送機構部51、外部開閉部53、內部開閉部54及排氣部55。再者,該搬送控制部56包括技術方案中所言及之「搬送控制部」與「排氣控制部」。 Further, the transport unit 42 includes an exhaust unit 55 that discharges the gas in the casing unit 52 to the outside of the chamber 6, and a transport control unit 56 that controls the transport mechanism unit 51, the external opening and closing unit 53, and the internal opening and closing unit. 54 and exhaust portion 55. Further, the transport control unit 56 includes a "transport control unit" and an "exhaust control unit" as described in the claims.

殼體部52具有:殼體框架58,其係由槽型材等構成;及複數個面板材59,其等自外側氣密地安裝於殼體框架58,構成周壁(參照圖5(c))。殼體部52形成為自腔室6之底面延伸至到達匣裝設部22之高度之位置之矩形之箱狀。於殼體部52之上端部,構成用以移載描繪液匣C之中繼區域44,又,於殼體部52之上端,設置有開閉該中繼區域44之擋閘形式之內部開閉部54。 The casing portion 52 has a casing frame 58 which is formed of a groove member or the like, and a plurality of surface plates 59 which are airtightly attached to the casing frame 58 from the outside to constitute a peripheral wall (refer to FIG. 5(c)). . The casing portion 52 is formed in a rectangular box shape extending from the bottom surface of the chamber 6 to a position reaching the height of the cymbal mounting portion 22. The upper end portion of the casing portion 52 constitutes a relay region 44 for transferring the drawing liquid 匣C, and at the upper end of the casing portion 52, an internal opening and closing portion for opening and closing the relay region 44 is provided. 54.

另一方面,於殼體部52之下端部,構成用以將描繪液匣C搬入搬出之接收區域43,又,於殼體部52之下端部側面,設置有開閉該接收區域43之鉸鏈門形式之外部開閉部53。設置有外部開閉部53之殼體部52之下端部側面與上述棚開口部41接近且連通。並且,搭載於台車A之描繪液匣C自該部分被運入或運出接收區域43。再者,棚開口部41與接收區域43氣密地連通。 On the other hand, a lower end portion of the casing portion 52 constitutes a receiving area 43 for carrying in and out the drawing liquid 匣C, and a hinged door for opening and closing the receiving area 43 is provided on a side surface of the lower end portion of the casing portion 52. The external opening and closing portion 53 of the form. The lower end side surface of the casing portion 52 provided with the outer opening and closing portion 53 is close to and communicates with the above-described shed opening portion 41. Then, the drawing liquid 匣C mounted on the carriage A is carried into or out of the receiving area 43 from this portion. Further, the shed opening portion 41 and the receiving region 43 are in airtight communication.

內部開閉部54係對腔室6之內部開閉中繼區域44者,包括:內部 擋閘61(內部開閉門),其開閉殼體部52之上端;及內部氣缸62(開閉機構),其使內部擋閘61執行開閉動作(參照圖4)。內部擋閘61基本上通常被打開,但於在接收區域43中藉由台車A將描繪液匣C搬入、搬出時被閉合,詳細情況將於下文進行敍述。 The internal opening and closing portion 54 is a member that opens and closes the relay region 44 to the inside of the chamber 6, and includes: The shutter 61 (internal opening and closing door) opens and closes the upper end of the casing portion 52, and the internal cylinder 62 (opening and closing mechanism) that opens and closes the internal shutter 61 (see Fig. 4). The internal shutter 61 is normally normally opened, but is closed when the drawing liquid C is carried in and out by the carriage A in the receiving area 43, and the details will be described later.

外部開閉部53係對腔室6之外部開閉接收區域43者,包括:外部開閉門64,其以單開之鉸鏈門形式開閉殼體部52之下端部側面;及電磁鎖定機構65(鎖定機構),其藉由外部開閉門64將接收區域43鎖定為閉合狀態或自閉合狀態解鎖(參照圖4)。外部開閉門64基本上被閉合鎖定,但於在接收區域43中進行描繪液匣C之運入及運出時,被解除鎖定並被手動打開,詳細情況將於下文進行敍述。 The external opening and closing portion 53 is a pair of external opening and closing receiving areas 43 of the chamber 6, and includes: an external opening and closing door 64 that opens and closes a lower end side surface of the housing portion 52 in the form of a single hinged door; and an electromagnetic locking mechanism 65 (locking mechanism) It is locked by the external opening and closing door 64 to the closed state or the self-closed state (refer to FIG. 4). The external opening and closing door 64 is basically closed and locked, but is unlocked and manually opened when the drawing liquid 匣C is carried in and out in the receiving area 43, and the details will be described later.

搬送機構部51包括:一對升降導件67,其等固定於殼體框架58之內側;搬送叉68,其滑動自由地安裝於一對升降導件67;導螺桿機構69,其使搬送叉68升降;及搬送用馬達70,其使導螺桿機構69作動(參照圖5(b)及(c))。導螺桿機構69包括設置於搬送叉68之母螺紋部71、及螺合於母螺紋部71且與升降導件67平行地延伸之導螺桿72(滾珠螺桿),於該導螺桿72連結有搬送用馬達70。搬送用馬達70正反驅動,而使導螺桿72正反旋轉,藉此,搬送叉68經由母螺紋部71升降。 The conveying mechanism portion 51 includes a pair of lifting guides 67 that are fixed to the inside of the casing frame 58, a conveying fork 68 that is slidably attached to the pair of lifting guides 67, and a lead screw mechanism 69 that causes the conveying fork 68 lifting and lowering; and a transport motor 70 that operates the lead screw mechanism 69 (see FIGS. 5(b) and (c)). The lead screw mechanism 69 includes a female screw portion 71 provided on the transfer fork 68, and a lead screw 72 (ball screw) that is screwed to the female screw portion 71 and extends in parallel with the elevation guide 67, and is connected to the lead screw 72. A motor 70 is used. The conveyance motor 70 is driven forward and backward, and the lead screw 72 is rotated forward and backward, whereby the conveyance fork 68 is moved up and down via the female screw portion 71.

如圖5及圖6所示,將被運入至腔室6之描繪液匣C搭載於帶有腳輪之台車A而與台車A一併被接收至腔室6內。於台車A之上表面,設置有「U」字狀之載置框Aa(參照圖5(c)),於該載置框Aa搭載有裝設托盤T。並且,裝設托盤T上之複數個描繪液匣C分別搭載於裝設托盤T之個別裝設部Ta。 As shown in FIGS. 5 and 6, the drawing liquid C carried to the chamber 6 is mounted on the trolley A with the casters, and is received into the chamber 6 together with the carriage A. A mounting frame Aa (see FIG. 5(c)) having a U shape is provided on the upper surface of the carriage A, and the mounting tray T is mounted on the mounting frame Aa. Further, a plurality of drawing liquids C on the mounting tray T are mounted on the individual mounting portions Ta of the mounting tray T, respectively.

因此,搬送機構部51(搬送叉68)於上升動作初期,自台車A接過裝設托盤T而開始描繪液匣C之搬送,於下降動作初期,將裝設托盤T交付至台車A而結束描繪液匣C之搬送。 Therefore, in the initial stage of the ascending operation, the conveyance mechanism unit 51 (transport fork 68) picks up the installation tray T from the carriage A and starts the conveyance of the drawing liquid hopper C, and delivers the installation tray T to the carriage A at the beginning of the lowering operation, and ends. Describe the transport of liquid helium C.

具體而言,處於下降端位置之搬送叉68位於台車A內(參照圖 5(b)),於開始上升而通過台車A之載置框Aa時,自下側以上推之方式接過載置框Aa上之裝設托盤T,並使其上升。又,下降過程之搬送叉68於通過台車A之載置框Aa時,自上側以放下之方式將裝設托盤T交付至載置框Aa,並下降至下降端位置。另一方面,不斷上升之搬送叉68於中繼區域44內之特定之上升端位置停止。該上升端位置被設定為所搭載之描繪液匣C之上端到達內部開閉部54之附近之位置,換言之,為描繪液匣C之上端不干涉閉合狀態之內部擋閘61之極限之位置(參照圖5(b))。 Specifically, the transfer fork 68 at the lower end position is located in the trolley A (refer to the figure). 5(b)), when the frame Aa of the carriage A is started to rise, the tray T on the overload frame Aa is connected to the upper side and pushed up. Further, when the transport fork 68 of the lowering process passes through the mounting frame Aa of the carriage A, the mounting tray T is delivered to the mounting frame Aa from the upper side and lowered to the lower end position. On the other hand, the rising transfer fork 68 stops at a specific rising end position in the relay area 44. The rising end position is set to a position at which the upper end of the drawing liquid C is mounted to reach the vicinity of the internal opening and closing portion 54, in other words, the position at which the upper end of the liquid helium C does not interfere with the closed state of the internal shutter 61 (refer to Figure 5 (b)).

如圖4及圖5所示,排氣部55包括:排氣腔室74,其連通於殼體部52;排氣風扇75,其設置於排氣腔室74;及排氣管76,其連接於排氣腔室74。排氣腔室74連通於殼體部52之下端部側面,若驅動設置於排氣腔室74之排氣風扇75,則殼體部52內之氣體自上向下以降流流動,經由排氣管76被排出至腔室6之外部(上述排氣設備)。於此情形時,殼體部52內之氣體之排氣實質上為將殼體部52內之氣體置換為腔室6內之氣體(換氣)。再者,技術方案中所言及之「排氣流路」包括排氣腔室74與排氣管76。 As shown in FIGS. 4 and 5, the exhaust portion 55 includes an exhaust chamber 74 that communicates with the housing portion 52, an exhaust fan 75 that is disposed in the exhaust chamber 74, and an exhaust pipe 76. Connected to the exhaust chamber 74. The exhaust chamber 74 communicates with the lower end side of the housing portion 52. If the exhaust fan 75 disposed in the exhaust chamber 74 is driven, the gas in the housing portion 52 flows downwardly from the top to the bottom, through the exhaust. The tube 76 is discharged to the outside of the chamber 6 (the above-described exhaust device). In this case, the exhaust of the gas in the casing portion 52 substantially replaces the gas in the casing portion 52 with the gas (ventilation) in the chamber 6. Furthermore, the "exhaust flow path" as used in the technical solution includes the exhaust chamber 74 and the exhaust pipe 76.

如上所述,搬送控制部56控制搬送機構部51、外部開閉部53、內部開閉部54及排氣部55。具體而言,搬送控制部56控制搬送機構部51之搬送用馬達70,使搬送叉68升降。又,搬送控制部56經由外部開閉部53之電磁鎖定機構65藉由外部開閉門64將接收區域43鎖定為閉合狀態或自閉合狀態解鎖,並且經由內部開閉部54之內部氣缸62開閉內部擋閘61。進而,搬送控制部56將排氣部55之排氣風扇75設為ON-OFF(開-關),而實施殼體部52內之排氣運轉/非排氣運轉。再者,搬送控制部56之操作面板78設置於棚開口部41之側面(參照圖4),可供操作者自外部進行操作。 As described above, the conveyance control unit 56 controls the conveyance mechanism unit 51, the outer opening and closing unit 53, the inner opening and closing unit 54, and the exhaust unit 55. Specifically, the conveyance control unit 56 controls the conveyance motor 70 of the conveyance mechanism unit 51 to raise and lower the conveyance fork 68. Further, the conveyance control unit 56 locks the receiving area 43 to the closed state or the self-closed state by the external opening and closing door 64 via the electromagnetic lock mechanism 65 of the external opening and closing unit 53, and opens and closes the internal shutter via the internal cylinder 62 of the internal opening and closing portion 54. 61. Further, the conveyance control unit 56 turns the exhaust fan 75 of the exhaust unit 55 ON-OFF, and performs the exhaust operation/non-exhaust operation in the casing unit 52. Further, the operation panel 78 of the conveyance control unit 56 is provided on the side surface of the shed opening portion 41 (see FIG. 4), and is operable by the operator from the outside.

此處,參照圖4、圖5及圖7之流程圖,對藉由搬送控制部56之搬 送部42之控制方法進行說明。 Here, with reference to the flowcharts of FIGS. 4, 5, and 7, the transport control unit 56 is moved. The control method of the delivery unit 42 will be described.

自如下狀態開始控制序列,即:搬送叉68處於上升端位置,內部擋閘61處於「開」之位置,外部開閉門64處於閉合鎖定、即「閉」之位置,且空的台車A處於接收區域43。再者,於處於上升端位置之搬送叉68,經由裝設托盤T搭載有用盡(用完)之複數個描繪液匣C。 The control sequence is started from the state in which the transfer fork 68 is at the rising end position, the internal shutter 61 is in the "on" position, the outer opening and closing door 64 is in the closed lock, that is, the "closed" position, and the empty carriage A is receiving. Area 43. Further, the transfer fork 68 at the rising end position is loaded with a plurality of drawing liquids C that are exhausted (used) via the mounting tray T.

於腔室6之外部,準備了應更換之複數個描繪液匣C之操作者按壓操作面板78之呼叫按鈕,藉此,搬送部42之運轉開始。當呼叫按鈕被按壓時(S01:接收指令),首先,內部擋閘61閉合(S02),繼而,搬送叉68下降,將複數個描繪液匣C與裝設托盤T一併交付至台車A(S03)。繼而,電磁鎖定機構65將外部開閉門64解除鎖定(S04)。於此狀態下,搬送部42之控制動作暫時結束。此處,操作者打開外部開閉門64,自接收區域43將描繪液匣C與台車A一併運出(拉出)。繼而,將新的描繪液匣C與台車A一併運入接收區域43。 Outside the chamber 6, an operator who has prepared a plurality of drawing liquids C to be replaced presses the call button of the operation panel 78, whereby the operation of the conveying unit 42 is started. When the call button is pressed (S01: receiving command), first, the internal shutter 61 is closed (S02), and then the transport fork 68 is lowered, and a plurality of drawing liquids C are delivered to the trolley A together with the mounting tray T ( S03). Then, the electromagnetic lock mechanism 65 unlocks the external opening and closing door 64 (S04). In this state, the control operation of the transport unit 42 is temporarily terminated. Here, the operator opens the external opening and closing door 64, and the drawing liquid 匣C is carried out (pulled out) together with the carriage A from the receiving area 43. Then, the new drawing liquid 匣C is carried into the receiving area 43 together with the trolley A.

將台車A運入接收區域43並將外部開閉門64閉合之後,操作者按壓操作面板78之裝設按鈕(S05:搬送指令)。藉此,搬送部42再次開始運轉。當裝設按鈕被按壓時,外部開閉門64被閉合鎖定(S06),繼而,搬送叉68開始上升。上升之搬送叉68自台車A接過裝設托盤T,進而上升至上升端位置(S07)。即,搬送叉68將複數個描繪液匣C搬送至中繼區域44。此處,藉由內部氣缸62自動地打開內部擋閘61(S08)。藉此,中繼區域44之複數個描繪液匣C成為藉由移載部45之移載待機狀態。 After the carriage A is carried into the receiving area 43 and the external opening and closing door 64 is closed, the operator presses the installation button of the operation panel 78 (S05: conveyance command). Thereby, the conveyance part 42 starts operation again. When the installation button is pressed, the external opening and closing door 64 is closed and locked (S06), and then the conveying fork 68 starts to rise. The rising transfer fork 68 is connected to the mounting tray T from the carriage A, and is further raised to the rising end position (S07). That is, the transfer fork 68 transports a plurality of drawing liquids C to the relay area 44. Here, the internal shutter 61 is automatically opened by the internal cylinder 62 (S08). Thereby, the plurality of drawing liquids C in the relay area 44 are in the transfer standby state by the transfer unit 45.

另一方面,排氣部55之排氣風扇75基本上經常為ON,但於外部開閉門64打開時會抽吸外部大氣,因此,搬送控制部56僅於打開外部開閉門64時、即電磁鎖定機構65為解鎖狀態時,才將排氣風扇75設為OFF。雖然外部大氣會因操作者所進行之外部開閉門64之打開而進入殼體部52內,但由於殼體部52藉由內部擋閘61被閉合,因此,外部大 氣滯留於殼體部52內。 On the other hand, the exhaust fan 75 of the exhaust unit 55 is constantly turned ON. However, when the external opening and closing door 64 is opened, the outside air is sucked. Therefore, the conveyance control unit 56 only opens the external opening and closing door 64, that is, electromagnetic. When the lock mechanism 65 is in the unlocked state, the exhaust fan 75 is turned OFF. Although the outside atmosphere enters the casing portion 52 due to the opening of the external opening and closing door 64 by the operator, since the casing portion 52 is closed by the internal shutter 61, the outside is large The gas is retained in the housing portion 52.

並且,由於排氣風扇75自外部開閉門64剛閉合後(閉合鎖定狀態)開始驅動,因此,進入之外部大氣自不必說,附著於台車A或描繪液匣C等而被帶入之塵埃等亦自殼體部52被排出。藉此,於內部擋閘61被打開而描繪液匣C成為移載待機狀態時,殼體部52內恢復為與腔室6內同等之潔淨度。再者,本實施形態中係將外部開閉門64設為手動開閉之構成,但亦可將其設為自動開閉之構成。 In addition, since the exhaust fan 75 is started to be driven immediately after the external opening/closing door 64 is closed (closed locked state), it is necessary to adhere to the external atmosphere, and it is attached to the trolley A or the drawing liquid 匣 C, etc. It is also discharged from the casing portion 52. As a result, when the internal shutter 61 is opened and the drawing liquid c is in the transfer standby state, the inside of the casing portion 52 is restored to the same degree of cleanliness as in the chamber 6. In the present embodiment, the external opening and closing door 64 is configured to be manually opened and closed, but it may be configured to be automatically opened and closed.

繼而,參照圖4、圖8及圖9,對移載部45進行說明。 Next, the transfer unit 45 will be described with reference to FIGS. 4, 8, and 9.

如上所述,於各托架單元17,搭載有對應於例如按照顏色等區分之複數種描繪液之複數個描繪頭23,與此對應,於匣裝設部22裝設有複數個描繪液匣C(參照圖4)。於此情形時,於匣裝設部22,針對描繪液之每種類別以2條為1組裝設有描繪液匣C。即,於描繪裝置本體2中,若將一描繪液匣C用盡,則自動地更換為另一描繪液匣C。 As described above, a plurality of drawing heads 23 corresponding to, for example, a plurality of drawing liquids classified by color or the like are mounted in each of the carriage units 17, and a plurality of drawing liquids are attached to the armor mounting unit 22 in response thereto. C (refer to Figure 4). In this case, the drawing unit 22 is provided with the drawing liquid 匣C for each of the types of the drawing liquids. That is, in the drawing device main body 2, when one drawing liquid C is used up, it is automatically replaced with another drawing liquid C.

因此,實施形態之移載部45於在中繼區域44待機之裝設托盤T與匣裝設部22之間,將用盡(用完)之描繪液匣C卸除而供給(更換)新的描繪液匣C。並且,描繪液匣C之更換時機係於描繪裝置本體2側進行管理,於所有匣裝設部22中,於將第2根描繪液匣C用盡之前,先實施已被用盡之第1根描繪液匣C之更換。 Therefore, the transfer unit 45 of the embodiment is to supply (replace) the new (depleted) drawing liquid 匣C between the mounting tray T and the cymbal mounting unit 22 which are in standby in the relay area 44. Depicting liquid 匣C. In addition, the timing of the replacement of the liquid helium C is managed on the side of the drawing device main body 2, and the first drawing unit 22 is used to execute the first one before the second drawing liquid C is used up. The root depicts the replacement of liquid helium C.

再者,於本實施形態中,假定用以形成例如紅(R)、綠(G)、藍(B)之彩色濾光器或發光層之3種描繪液(複數種描繪液)。又,托架單元17設置有10個。因此,於10個匣裝設部22之各者,搭載有各2個、共計6個對應於例如R、G、B各者之描繪液匣C。又,於裝設托盤T,搭載有各10個、共計30個對應於R、G、B之3種描繪液匣C(均參照圖9)。 Further, in the present embodiment, three types of drawing liquids (a plurality of drawing liquids) for forming color filters or light-emitting layers of, for example, red (R), green (G), and blue (B) are assumed. Further, there are ten bracket units 17 provided. Therefore, each of the ten cymbal mounting units 22 is provided with two drawing liquids C each corresponding to, for example, R, G, and B. In addition, in the installation tray T, three kinds of drawing liquids C corresponding to R, G, and B, each of ten, and a total of 30 are mounted (refer to FIG. 9, respectively).

移載部45包括:移載機構部81,其為逐個移載複數個(複數種)描繪液匣C之機器人構成;類別檢測部82,其設置於移載機構部81,經 由被檢測部檢測成為移載對象之描繪液匣C之類別;及移載控制部83,其基於類別檢測部82之檢測結果而控制移載機構部81(參照圖4)。 The transfer unit 45 includes a transfer mechanism unit 81 that is configured to transfer a plurality of (multiple types) drawing liquids C one by one, and a type detection unit 82 that is provided in the transfer mechanism unit 81. The type of the drawing liquid C to be transferred is detected by the detected portion, and the transfer control unit 83 controls the transfer mechanism unit 81 (see FIG. 4) based on the detection result of the type detecting unit 82.

另一方面,如圖9所示,於移載部45出入之各匣裝設部22,於整齊排列配置之6個的個別安裝裝設部22a,按照顏色(類別)安裝有各2個、共計6個描繪液匣C。又,於裝設托盤T,於按照顏色(類別)排列成3行、每行各12個之個別裝設部Ta,分別按照顏色(類別)裝設有10個描繪液匣C。因此,於此情形時,於裝設托盤T,未裝設描繪液匣C之空的個別裝設部Ta於每行各存在2個。 On the other hand, as shown in FIG. 9, each of the plurality of mounting portions 22 that are placed in the transfer unit 45 is mounted in two separate mounting units 22a arranged in a neat manner, and two for each color (type). A total of 6 depicting liquid 匣C. In addition, in the installation tray T, the individual installation parts Ta are arranged in three rows and twelve in each row in accordance with the color (category), and ten drawing liquids C are respectively arranged in accordance with the color (type). Therefore, in this case, in the mounting tray T, the individual mounting portions Ta in which the drawing liquid 匣C is not provided are present in two rows.

如圖8所示,移載機構部81係由所謂之水平多關節機器人(SCARA robot)構成,包括:機器人基座85;第1水平臂86,其回旋自由地安裝於機器人基座85;第2水平臂87,其回旋自由地安裝於第1水平臂86之前端部;垂直臂88,其上下移動自由地安裝於第2水平臂87之前端部;及抓持頭89,其安裝於垂直臂88之前端。抓持頭89具有剖面「L」字狀之一對抓持片89a,藉由該一對抓持片89a沿對角方向抓持描繪液匣C之上端部(參照圖10(a))。 As shown in Fig. 8, the transfer mechanism unit 81 is composed of a so-called horizontal multi-joint robot (SCARA robot), and includes a robot base 85; a first horizontal arm 86 that is rotatably attached to the robot base 85; 2 horizontal arm 87, which is rotatably attached to the front end of the first horizontal arm 86; vertical arm 88 which is movably mounted up and down at the front end of the second horizontal arm 87; and a gripping head 89 which is mounted vertically The front end of the arm 88. The gripping head 89 has a pair of gripping pieces 89a having an "L" shape in cross section, and the pair of gripping pieces 89a grip the upper end portion of the drawing liquid cartridge C in a diagonal direction (see Fig. 10 (a)).

另一方面,如圖10(b)所示,各描繪液匣C係將袋式之描繪液容器Ca收容於樹脂製之密閉盒Cb中而構成。於描繪液匣C,設置有連通於描繪液容器Ca之描繪液供給口Cc、及連通於描繪液容器Ca與密閉盒Cb之間之空隙之空氣導入口Cd。自空氣導入口Cd導入壓縮空氣而對描繪液容器Ca進行加壓,藉此,自描繪液供給口Cc對描繪頭23供給描繪液。又,於密閉盒Cb,設置有定位用之一對卡合凹部Ce。進而,雖然於圖示中省略,但於密閉盒Cb之頂面,貼合有成為上述被檢測部之二維碼(QR(Quick Response,快速回應)碼(註冊商標))。 On the other hand, as shown in FIG. 10(b), each of the drawing liquids C is configured by accommodating the bag-shaped drawing liquid container Ca in a resin-made sealed case Cb. The drawing liquid cartridge C is provided with a drawing liquid supply port Cc that communicates with the drawing liquid container Ca, and an air introduction port Cd that communicates with a gap between the drawing liquid container Ca and the sealed box Cb. The drawing liquid container Ca is pressurized by introducing compressed air from the air introduction port Cd, whereby the drawing liquid is supplied to the drawing head 23 from the drawing liquid supply port Cc. Further, in the sealed casing Cb, a pair of engaging concave portions Ce for positioning is provided. Further, although not shown in the drawing, a QR code (QR (Quick Response) code (registered trademark)) serving as the detected portion is bonded to the top surface of the sealed casing Cb.

另一方面,於匣裝設部22之各個別安裝裝設部22a,對應於描繪液供給口Cc設置有描繪液導入口91,又,對應於空氣導入口Cd設置 有空氣供給口92。進而,於各個別安裝裝設部22a,設置有對應於密閉盒Cb之一對卡合凹部Ce之一對卡合凸部93。移載機構部81使抓持頭89所抓持之描繪液匣C水平移動至個別安裝裝設部22a之正上方,其後使其下降而安裝(裝設)於個別安裝裝設部22a。藉此,使卡合凹部Ce卡合於卡合凸部93,並且分別使描繪液供給口Cc與描繪液導入口91接合(流路連接),使空氣導入口Cd與空氣供給口92接合(流路連接)。 On the other hand, the respective mounting and mounting portions 22a of the mounting portion 22 are provided with the drawing liquid introduction port 91 corresponding to the drawing liquid supply port Cc, and are provided corresponding to the air introduction port Cd. There is an air supply port 92. Further, the respective attachment mounting portions 22a are provided with one of the engagement recesses Ce corresponding to one of the engagement recesses Ce. The transfer mechanism unit 81 horizontally moves the drawing liquid C grasped by the gripping head 89 to the upper side of the individual mounting and mounting unit 22a, and then lowers and mounts (installs) the individual mounting and mounting unit 22a. By this, the engagement recessed portion Ce is engaged with the engagement convex portion 93, and the drawing liquid supply port Cc is joined to the drawing liquid introduction port 91 (flow path connection), and the air introduction port Cd is engaged with the air supply port 92 ( Flow path connection).

移載部45之類別檢測部82包括讀取描繪液匣C之二維碼之讀碼器。類別檢測部82以位於抓持頭89之附近之方式經由支持構件95安裝於第2水平臂87之前端(參照圖8)。該二維碼中,至少描繪液匣C之類別被編碼,類別檢測部82讀取描繪液匣C之類別,另一方面,移載控制部83基於該讀取結果而控制移載機構部81。 The class detecting unit 82 of the transfer unit 45 includes a code reader that reads a two-dimensional code of the drawing liquid 匣C. The type detecting unit 82 is attached to the front end of the second horizontal arm 87 via the support member 95 so as to be located in the vicinity of the gripping head 89 (see FIG. 8). In the two-dimensional code, at least the type of liquid 匣 C is encoded, and the type detecting unit 82 reads the type of the drawing liquid 匣 C. On the other hand, the transfer control unit 83 controls the transfer mechanism unit 81 based on the reading result. .

此處,參照圖4、圖9及圖11,對藉由移載控制部83之移載部45之控制方法進行說明。 Here, a method of controlling the transfer unit 45 by the transfer control unit 83 will be described with reference to FIGS. 4, 9, and 11.

此處,於中繼區域44中,每種顏色各10個之新的描繪液匣C搭載於裝設托盤T而處於移載待機狀態,又,於任意1個匣裝設部22,安裝有每種顏色各1個(6個中有3個)之用完之描繪液匣C。再者,移載控制部83之控制開始既可以搬送控制部56之控制結束為契機,亦可另外以來自操作者之指令為契機。 Here, in the relay area 44, ten new drawing liquids C of each color are mounted on the mounting tray T and are in the transfer standby state, and are mounted on any one of the armor mounting portions 22 One of each color (3 out of 6) used to draw liquid 匣C. Further, the control of the transfer control unit 83 may be started by the completion of the control of the transfer control unit 56, or may be triggered by an instruction from the operator.

移載控制部83首先確認裝設托盤T上之描繪液匣C是否按照顏色(類別)排列,並且,使裝設托盤T之位於最近前(匣裝設部22側)之各種顏色(各行)之個別裝設部Ta為空。即,驅動移載機構部81,藉由類別檢測部82對每行之複數個描繪液匣C進行讀取掃描,確認描繪液匣C是否被準確地裝設(S11)。於該各行之描繪液匣C未被按照顏色(類別)準確地裝設之情形時,利用空的個別裝設部Ta進行描繪液匣C之重新排列(S11)。 The transfer control unit 83 first checks whether or not the drawing liquid 匣C on the mounting tray T is arranged in accordance with the color (type), and sets the colors (the respective lines) of the mounting tray T in the most recent position (on the side of the mounting unit 22). The individual mounting portion Ta is empty. In other words, the drive transfer mechanism unit 81 scans a plurality of drawing liquids C for each line by the type detecting unit 82, and confirms whether or not the drawing liquid 匣C is accurately mounted (S11). When the drawing liquids C of the respective rows are not accurately mounted in accordance with the color (category), the empty liquid individual mounting portions Ta are used to rearrange the drawing liquids C (S11).

又,同時,為了使位於最近前之各種顏色(各行)之個別裝設部Ta為空,而進行描繪液匣C之移動(S12)。再者,亦可指定為先進行「S12」之步驟,後進行「S11」之步驟。 At the same time, in order to make the individual mounting portions Ta of the respective colors (the respective rows) in the nearest position empty, the movement of the drawing liquid 匣C is performed (S12). Furthermore, it is also possible to designate the step of "S12" first, and then the step of "S11".

如此,裝設托盤T側之準備結束後,使移載機構部81面對匣裝設部22。此處,自匣裝設部22抽出例如R用之用完之描繪液匣C,並移載至自裝設托盤T之近前起第1個(最近前)空的個別裝設部Ta(S13)。繼而,抓持自裝設托盤T之近前起為第2個的個別裝設部Ta之描繪液匣C,移載至空的匣裝設部22之個別安裝裝設部22a並安裝(S14)。 Thus, after the preparation for mounting the tray T side is completed, the transfer mechanism portion 81 faces the cymbal mounting portion 22. Here, the drawing unit 22C for the R, for example, is taken out from the arranging unit 22, and is transferred to the first (nearly) empty individual mounting unit Ta from the vicinity of the mounting tray T (S13). ). Then, the drawing liquid C of the second individual mounting portion Ta from the vicinity of the mounting tray T is gripped and transferred to the individual mounting and mounting portion 22a of the empty mounting portion 22 (S14). .

繼而,對於G用之描繪液匣C及B用之描繪液匣C重複此種同樣之動作(更換)。即,進行G用之描繪液匣C自匣裝設部22向裝設托盤T之移載(S15)、及G用之描繪液匣C自裝設托盤T向匣裝設部22之移載(S16)。又,進行B用之描繪液匣C自匣裝設部22向裝設托盤T之移載(S17)、及B用之描繪液匣C自裝設托盤T向匣裝設部22之移載(S18)。 Then, the same operation (replacement) is repeated for the drawing liquid 匣C for the drawing liquids C and B for G. That is, the transfer of the drawing liquid 匣C for the G to the mounting tray T (S15) and the drawing liquid 匣C for the G are carried out from the mounting tray T to the cymbal mounting unit 22 (S16). Further, the transfer liquid C is transferred from the mounting unit 22 to the mounting tray T (S17), and the drawing liquid C for B is transferred from the mounting tray T to the mounting unit 22. (S18).

針對10個托架單元17之每個,於匣裝設部22與裝設托盤T之間實施以上之動作。此時,以裝設托盤T上之空的個別裝設部Ta之位置依次向裏側移動之方式進行描繪液匣C之移載。即,於裝設托盤T中,自近前側實施各行之描繪液匣C之更換。藉此,即便於移載時於舊的描繪液匣C產生滴液,亦不會弄髒新的描繪液匣C。再者,較佳為,藉由Y軸平台16依次進給10個托架單元17,作業對象之匣裝設部22始終到達中繼區域44之附近之相同位置。如此,若10個托架單元17之每個之匣裝設部22中之描繪液匣C之更換結束,則移載機構部81返回至初始位置,中繼區域44之裝設托盤T成為搬出待機狀態。 The above operation is performed between the armor mounting portion 22 and the mounting tray T for each of the ten bracket units 17. At this time, the transfer of the drawing liquid 匣C is performed so that the position of the empty individual mounting portion Ta on the mounting tray T is sequentially moved to the back side. That is, in the mounting tray T, the replacement of the drawing liquid 匣C of each row is performed from the near front side. Thereby, even if a dripping liquid is generated in the old drawing liquid 匣C at the time of transfer, the new drawing liquid 匣C is not soiled. Further, it is preferable that the ten carriage units 17 are sequentially fed by the Y-axis stage 16, and the work-side arranging unit 22 always reaches the same position in the vicinity of the relay area 44. When the replacement of the drawing liquid 匣C in the cymbal mounting portion 22 of each of the ten cradle units 17 is completed, the transfer mechanism unit 81 returns to the initial position, and the mounting tray T of the relay area 44 is carried out. standby mode.

如上所述,根據本實施形態,於收容描繪裝置本體2之腔室6內具備匣供給裝置4,該匣供給裝置4具有於接收區域43與中繼區域44之間搬送描繪液匣C之搬送部42、及於中繼區域44與匣裝設部22之間移載描繪液匣C之移載部45,因此,可藉由自腔室6之外部之操作而更 換裝設匣裝設部22中之用完之描繪液匣C。又,與由操作者將裝設托盤T搬入腔室6內之情形相比,可使用以接收描繪液匣C之棚開口部41或外部開閉部53之大小縮小至台車A之大小程度,且可使其打開時間縮短至台車A之出入所需之時間左右。 As described above, according to the present embodiment, the sputum supply device 4 is provided in the chamber 6 in which the drawing device main body 2 is housed, and the sputum supply device 4 transports the drawing liquid 匣C between the receiving area 43 and the relay area 44. The portion 42 and the transfer portion 45 for drawing the liquid 匣C are transferred between the relay region 44 and the cymbal mounting portion 22, so that it can be operated from the outside of the chamber 6 The used liquid 匣C used in the arranging unit 22 is replaced. Moreover, compared with the case where the operator carries the mounting tray T into the chamber 6, the size of the shed opening portion 41 or the external opening/closing portion 53 that receives the drawing liquid 匣C can be reduced to the size of the carriage A, and It can shorten the opening time to about the time required for the entry and exit of the trolley A.

因此,於接收描繪液匣C時,外部大氣向腔室6內之進入得到抑制,可儘可能地抑制腔室6內之潔淨度之降低。又,於搬送部42設置殼體部52而於殼體部52內實施描繪液匣C之搬送,並且將殼體部52內之氣體適當地排出至腔室6外部,因此,於此方面而言,亦可防止腔室6內之潔淨度之降低。 Therefore, when the drawing liquid 匣C is received, the entry of the outside atmosphere into the chamber 6 is suppressed, and the deterioration of the cleanliness in the chamber 6 can be suppressed as much as possible. Further, the housing portion 52 is provided in the conveying portion 42, and the drawing liquid c is conveyed in the casing portion 52, and the gas in the casing portion 52 is appropriately discharged to the outside of the chamber 6, and therefore, in this respect, In other words, it is also possible to prevent a decrease in the cleanliness in the chamber 6.

如此,描繪裝置1可一面將腔室6內之潔淨度維持為大致固定,一面實施描繪液匣C之更換作業,因此,可於短時間內高效率地進行描繪液匣C之更換時之一連串作業。因此,可縮短描繪裝置本體2之描繪處理之暫停時間,可整體上縮短描繪處理之週期時間。 In this manner, the drawing device 1 can perform the replacement operation of the drawing liquid 匣C while maintaining the cleanliness in the chamber 6 substantially constant. Therefore, it is possible to efficiently perform the replacement of the drawing liquid 匣C in a short time. operation. Therefore, the pause time of the drawing process of the drawing device body 2 can be shortened, and the cycle time of the drawing process can be shortened as a whole.

1‧‧‧描繪裝置 1‧‧‧Drawing device

2‧‧‧描繪裝置本體 2‧‧‧Drawing device body

3‧‧‧腔裝置 3‧‧‧ cavity device

4‧‧‧匣供給裝置 4‧‧‧匣 supply device

6‧‧‧腔室 6‧‧‧ chamber

7‧‧‧潔淨空氣供給單元 7‧‧‧Clean air supply unit

12‧‧‧裝設平台 12‧‧‧Installation platform

13‧‧‧X軸平台 13‧‧‧X-axis platform

15‧‧‧Y軸支持基座 15‧‧‧Y-axis support base

16‧‧‧Y軸平台 16‧‧‧Y-axis platform

17‧‧‧托架單元 17‧‧‧Bracket unit

18‧‧‧描繪區域 18‧‧‧Drawing area

19‧‧‧維護區域 19‧‧‧Maintenance area

21‧‧‧橋板 21‧‧‧ Bridge

22‧‧‧匣裝設部 22‧‧‧匣Installation Department

25‧‧‧抽吸單元 25‧‧‧sucking unit

26‧‧‧擦拭單元 26‧‧‧Wiping unit

27‧‧‧閃蒸單元 27‧‧‧Flash unit

28‧‧‧檢查單元 28‧‧‧Check unit

41‧‧‧棚開口部 41‧‧‧ shed opening

42‧‧‧搬送部 42‧‧‧Transportation Department

45‧‧‧移載部 45‧‧‧Transportation Department

55‧‧‧排氣部 55‧‧‧Exhaust Department

C‧‧‧描繪液匣 C‧‧‧ depicting liquids

T‧‧‧裝設托盤 T‧‧‧Installation tray

W‧‧‧工件 W‧‧‧Workpiece

X‧‧‧軸 X‧‧‧ axis

Y‧‧‧軸 Y‧‧‧ axis

Z‧‧‧軸 Z‧‧‧ axis

Claims (15)

一種描繪裝置,其特徵在於包括:描繪處理部,其具有供可對描繪頭供給描繪液之描繪液匣裝卸自由地裝設之匣裝設部;搬送部,其於接收區域與中繼區域之間搬送上述描繪液匣,該接收區域係上述描繪處理部之周圍之任意區域,該中繼區域係上述匣裝設部側之任意區域;及移載部,其於上述中繼區域與上述匣裝設部之間移載上述描繪液匣。 A drawing device comprising: a drawing processing unit having an armoring unit for attaching and detaching a drawing liquid that can supply a drawing liquid to a drawing head; and a conveying unit that is disposed in the receiving area and the relay area The drawing liquid is conveyed between the drawing area, an arbitrary area around the drawing processing unit, the relay area being an arbitrary area on the side of the armoring unit, and a transfer unit in the relay area and the The drawing liquid 移 is transferred between the mounting portions. 如請求項1之描繪裝置,其進而包括:潔淨棚,其收容上述描繪處理部、上述搬送部及上述移載部,並且將內部氣體維持為特定之潔淨度;及棚開口部,其設置於上述潔淨棚,且連通於上述接收區域。 The drawing device of claim 1, further comprising: a clean booth that accommodates the drawing processing unit, the transport unit, and the transfer unit, and maintains the internal gas at a specific cleanliness; and the shed opening portion is provided at The clean booth is connected to the receiving area. 一種描繪裝置,其特徵在於包括:描繪處理部,其具有供可對描繪頭供給描繪液之描繪液匣裝卸自由地裝設之匣裝設部;潔淨棚,其收容上述描繪處理部,並且將內部氣體維持為特定之潔淨度;棚開口部,其設置於上述潔淨棚,用以將上述描繪液匣接收至上述潔淨棚內;搬送部,其於接收區域與中繼區域之間搬送經由上述棚開口部接收之上述描繪液匣,該接收區域係上述描繪處理部之周圍之任意區域,該中繼區域係上述匣裝設部側之任意區域;及移載部,其於上述中繼區域與上述匣裝設部之間移載上述描繪液匣。 A drawing device comprising: a drawing processing unit having a mounting portion for attaching and detaching a drawing liquid to which a drawing liquid can be supplied to a drawing head; and a cleaning booth for accommodating the drawing processing unit; The internal gas is maintained at a specific degree of cleanliness; the shed opening is provided in the clean booth for receiving the drawing liquid raft into the clean shed; and the transporting portion is transported between the receiving area and the relay area via the above The drawing liquid received by the shed opening, the receiving area being an arbitrary area around the drawing processing unit, the relay area being an arbitrary area on the side of the armoring unit, and the transfer unit being in the relay area The drawing liquid 移 is transferred between the arranging unit and the arranging unit. 如請求項2或3之描繪裝置,其中上述搬送部包括:搬送機構部,其搬送上述描繪液匣;殼體部,其內包上述接收區域及上述中繼區域,並且收容上述搬送機構部;外部開閉部,其設置於上述殼體部之上述棚開口部側之端部,對上述潔淨棚之外部開閉上述接收區域;及內部開閉部,其設置於上述殼體部之上述移載部側之端部,對上述潔淨棚之內部開閉上述中繼區域。 The drawing device of claim 2 or 3, wherein the conveying unit includes: a conveying mechanism unit that conveys the drawing liquid hopper; and a casing unit that houses the receiving area and the relay area, and houses the conveying mechanism unit; An external opening and closing portion provided at an end portion of the casing portion on the side of the opening portion of the casing, and opening and closing the receiving region to the outside of the clean booth; and an internal opening and closing portion provided on the transfer portion side of the casing portion The end portion opens and closes the relay region to the inside of the clean booth. 如請求項4之描繪裝置,其中上述外部開閉部包括:外部開閉門,其對上述潔淨棚之外部開閉上述接收區域;及鎖定機構,其將上述外部開閉門鎖定為閉合狀態或自閉合狀態解鎖;且上述內部開閉部包括:內部開閉門,其對上述潔淨棚之內部開閉上述中繼區域;及開閉機構,其使上述內部開閉門執行開閉動作。 The drawing device of claim 4, wherein the external opening and closing portion includes: an external opening and closing door that opens and closes the receiving area to the outside of the clean booth; and a locking mechanism that locks the external opening and closing door to a closed state or a self-closing state The internal opening and closing unit includes an internal opening and closing door that opens and closes the relay region to the inside of the clean booth, and an opening and closing mechanism that causes the internal opening and closing door to perform an opening and closing operation. 如請求項5之描繪裝置,其中上述搬送部進而包括分別控制上述鎖定機構及上述開閉機構之搬送控制部;上述搬送控制部根據接收指令使上述內部開閉門執行閉合動作,其後使上述外部開閉門解除鎖定;並根據搬送指令使上述外部開閉門鎖定,其後使上述內部開閉門執行打開動作。 The drawing device of claim 5, wherein the transport unit further includes a transport control unit that controls the lock mechanism and the opening and closing mechanism, respectively; the transport control unit causes the internal open/close door to perform a closing operation according to a receiving command, and then the external opening and closing The door is unlocked; the external opening and closing door is locked according to the conveyance command, and then the internal opening and closing door is opened. 如請求項6之描繪裝置,其中上述搬送控制部進而控制上述搬送機構部;於根據上述接收指令進行之上述內部開閉門之閉合動作與上述外部開閉門之解除鎖定之期間,將上述描繪液匣自上述中繼區域搬送至上述接收區域;於根據上述搬送指令進行之上述外部開閉門之鎖定與上述內 部開閉門之打開動作之期間,將上述描繪液匣自上述接收區域搬送至上述中繼區域。 The drawing device of claim 6, wherein the transport control unit further controls the transport mechanism unit; and the drawing liquid is ejected during a closing operation of the internal opening and closing door and a unlocking of the external opening and closing door by the receiving command. The transfer from the relay area to the receiving area; the locking of the external opening and closing door and the inner opening by the transfer command During the opening operation of the opening and closing door, the drawing liquid is conveyed from the receiving area to the relay area. 如請求項4至7中任一項之描繪裝置,其中上述中繼區域被設定於上述潔淨棚內之較上述接收區域高之位置;上述搬送機構部使上述描繪液匣於上述接收區域與上述中繼區域之間升降。 The drawing device according to any one of claims 4 to 7, wherein the relay area is set at a position higher than the receiving area in the clean room, and the conveying mechanism unit causes the drawing liquid to hang in the receiving area and the Lifting between relay areas. 如請求項8之描繪裝置,其中上述搬送機構部於上述中繼區域中使上述描繪液匣上升至其上端即將到達上述內部開閉部之前之位置。 The drawing device of claim 8, wherein the transport mechanism unit raises the drawing liquid raft in a position before the upper end thereof reaches the inner opening and closing portion in the relay region. 如請求項8或9之描繪裝置,其中上述描繪液匣以裝設於裝設托盤之狀態搭載於台車而被接收至上述接收區域;上述搬送機構部於上升動作中自上述台車接過上述裝設托盤而開始上述描繪液匣之搬送;且於下降動作中將上述裝設托盤交付至上述台車而結束上述描繪液匣之搬送。 The drawing device of claim 8 or 9, wherein the drawing liquid is mounted on the trolley in a state of being mounted on the mounting tray, and is received in the receiving area; and the conveying mechanism unit receives the loading from the trolley during the ascending operation The tray is used to start the conveyance of the liquid helium, and the installation tray is delivered to the trolley during the lowering operation to end the conveyance of the drawing liquid. 如請求項4至10中任一項之描繪裝置,其進而包括將上述殼體部內之氣體排出至上述潔淨棚之外部之排氣部。 The drawing device according to any one of claims 4 to 10, further comprising an exhaust portion that discharges the gas in the casing portion to the outside of the clean booth. 如請求項11之描繪裝置,其中上述排氣部包括:排氣流路,其係自上述殼體部之上述棚開口部側之端部至上述潔淨棚之外部為止;排氣風扇,其介存設置於上述排氣流路;及排氣控制部,其控制上述排氣風扇之驅動;且上述排氣控制部於上述外部開閉部閉合時驅動上述排氣風扇。 The drawing device of claim 11, wherein the exhaust portion includes an exhaust flow path from an end portion of the casing portion on the side of the opening portion of the casing portion to an outside of the clean booth; and an exhaust fan And an exhaust gas control unit that controls driving of the exhaust fan; and the exhaust control unit drives the exhaust fan when the external opening and closing unit is closed. 如請求項1至12中任一項之描繪裝置,其中於上述匣裝設部,裝設描繪液不同之複數種上述描繪液匣; 上述複數種描繪液匣以裝設於裝設托盤之狀態被搬送至上述中繼區域;且上述各描繪液匣具有用以檢測類別之被檢測部;上述移載部包括:移載機構部,其移載上述複數種描繪液匣;類別檢測部,其設置於上述移載機構部,經由上述被檢測部檢測成為移載對象之上述描繪液匣之類別;及移載控制部,其控制上述移載機構部;且上述移載控制部基於上述類別檢測部之檢測結果而實施上述複數種描繪液匣之移載。 The drawing device according to any one of claims 1 to 12, wherein the plurality of drawing liquids different in drawing liquid are installed in the armoring unit; The plurality of drawing liquids are transported to the relay area in a state of being mounted on the mounting tray; and each of the drawing liquids has a detected portion for detecting a type; the transfer unit includes a transfer mechanism unit, The plurality of types of drawing liquids are transferred; the type detecting unit is provided in the transfer mechanism unit, and detects the type of the drawing liquid to be transferred by the detecting unit; and the transfer control unit controls the above The transfer mechanism unit; and the transfer control unit performs the transfer of the plurality of drawing liquids based on the detection result of the type detection unit. 如請求項13之描繪裝置,其中上述移載控制部係於上述複數種描繪液匣之移載之前,於上述裝設托盤中實施基於類別之上述複數種描繪液匣之重新排列。 The drawing device of claim 13, wherein the transfer control unit performs rearrangement of the plurality of types of drawing liquids based on the type in the mounting tray before the transfer of the plurality of drawing liquids. 如請求項1至14中任一項之描繪裝置,其中上述描繪處理部包括:平台部,其使所載置之描繪對象物移動;及描繪部,其配設於上述平台部之上方,具有上述描繪頭及上述匣裝設部;且一面藉由上述平台部使上述描繪對象物移動,一面自上述描繪頭噴出描繪液而實施描繪處理。 The drawing device according to any one of claims 1 to 14, wherein the drawing processing unit includes: a platform unit that moves the object to be drawn; and a drawing unit that is disposed above the platform unit and has a drawing unit The drawing head and the cymbal mounting portion are configured to perform a drawing process by ejecting the drawing liquid from the drawing head while the drawing unit moves the drawing object.
TW103126077A 2013-08-02 2014-07-30 Drawing device TW201509690A (en)

Applications Claiming Priority (4)

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JP2013161075 2013-08-02
JP2013164824 2013-08-08
JP2014118420A JP2015051426A (en) 2013-08-08 2014-06-09 Plotting device
JP2014118419A JP2015044184A (en) 2013-08-02 2014-06-09 Drawing apparatus

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