JP5009602B2 - Lead frame supply device - Google Patents

Description

  The present invention relates to a lead frame supply apparatus in a semiconductor assembly apparatus.

  Conventionally, as a lead frame supply apparatus for supplying a strip-shaped lead frame to a semiconductor assembly apparatus, the lead frame is accommodated in a state where the lead frame is stacked in a number of grooves provided in a box-shaped jig generally called a magazine. Remove the lead frame contained in each magazine from the magazine loader type lead frame supply device that feeds the lead frame to the transport path of the main unit and the lead frame that is stacked with the lead frame alone or a spacer for preventing damage. 2. Description of the Related Art A lead frame stacker loader type lead frame supply device that sends out a lead frame to a conveyance path of a main body device via a guide rail is known.

  Here, the former lead frame supply device using the magazine is referred to as a magazine loader, and the latter lead frame supply device for supplying a single lead frame one by one is referred to as a lead frame stacker loader.

  FIG. 7 is a diagram showing an example of the magazine loader 1001. The magazine loader 1001 grasps and holds the magazine 1003 and a magazine supply unit 1004 for an operator to supply a magazine 1003 containing a lead frame 1002. Then, an elevator mechanism 1005 that operates up and down to move the target lead frame 1002 to the transport path of the main body apparatus, and a magazine discharge unit that accommodates the magazine 1003 discharged from the elevator mechanism 1005 so that the operator can take it out. It is composed of three types of elements 1006.

  The operation of the magazine loader 1001 will be described with reference to FIG. First, when an operator supplies a magazine 1003 containing a lead frame 1002 to the magazine supply unit 1004, the magazine 1003 is conveyed to a delivery unit to the elevator mechanism 1005 by a belt conveyor or the like. Next, the magazine 1003 is grasped by the magazine chuck 1011 provided in the elevator mechanism 1005, the lead frame 1002 in the magazine 1003 moves along the conveyance path of the main body device, and the lead frame 1002 is moved to the main body. Deliver to the device. The empty magazine 1003 is pushed out by the elevator mechanism 1005 or discharged to the magazine discharge unit 1006 by a belt conveyor or the like.

  FIG. 8 is a diagram showing an example of the lead frame stacker loader 1021. In the lead frame stacker loader 1021, the lead frames 1022 are stacked in the thickness direction along guides 1023 and 1023 set in accordance with the outer shape of the lead frame 1022, and between the lead frames 1022,. In some cases, damage prevention spacers are alternately stacked on each lead frame 1022.

  As shown in FIG. 8B, the stacked lead frames 1022,... Are lifted toward the lead frame suction portion 1032 by the elevator mechanism 1031 and / or the lead frame suction portion 1032 is lowered. In this operation, the uppermost one lead frame 1022 is held by the lead frame suction portion 1032. Whether the held frame is the lead frame 1022 or the spacer is discriminated by a sensor.

  However, both of these lead frame supply devices are mechanically different depending on the lead frame supply method.

  Therefore, when two types of supply methods are required in one semiconductor manufacturing apparatus, it is necessary to install the magazine loader 1001 and the lead frame stacker loader 1021 side by side in the horizontal direction as shown in FIG. There is an unfavorable problem for the semiconductor manufacturing apparatus that the occupied area becomes large.

  In addition, when the lead frame type is changed due to an increase in the supply method, there is a problem that it takes time because the number of parts to be adjusted increases.

  The present invention has been made in view of such a conventional problem, and two types of lead frame supply modes are possible: a lead frame housed in a magazine and a lead frame stacked in the thickness direction by itself. An object of the present invention is to provide a lead frame supply device that occupies a small area and can be easily changed in product type.

  In order to solve the above-mentioned problem, in the lead frame supply device according to claim 1 of the present invention, a magazine supply unit for supplying a magazine in which strip-shaped lead frames are accommodated and a magazine discharge unit for discharging the magazine are provided. A magazine loader section disposed above and below, a supply position moving mechanism that operates a magazine chuck that holds the supplied magazine and moves the lead frame in the magazine in accordance with the supply position to the main unit, and a strip shape A lead frame supply device comprising: a lead frame stacker that holds the lead frames in a stacked state; and a lead frame stacker loader unit that includes a transport mechanism that takes out and transports the lead frames from the lead frame stacker. The loader unit and the lead frame stacker loader unit are arranged in the height direction. On the other hand, the magazine chuck is provided with a guide rail on which the lead frame transferred by the transfer mechanism of the lead frame stacker loader unit is mounted, and the lead frame mounted on the guide rail is provided at the supply position. The movable range of the magazine chuck by the supply position moving mechanism is set so that it can be moved according to the movement.

  That is, when supplying the lead frame stored in the magazine to the main unit, the magazine supplied from the magazine supply unit is held by the magazine chuck of the supply position moving mechanism, and by operating the magazine chuck, The lead frame in the magazine is moved according to the supply position to the main unit.

  Thereby, the lead frame in the magazine arranged at the supply position is supplied to the main body device.

  Further, when supplying the lead frame stacked on the lead frame stacker to the main unit, the lead frame is taken out from the lead frame stacker by a transfer mechanism, and the taken out lead frame is provided in the magazine chuck. Place on the guide rail. Then, by operating the magazine chuck by the supply position moving mechanism, the lead frame placed on the guide rail is moved in accordance with the supply position.

  Thereby, the lead frame on the guide rail arranged at the supply position is supplied to the main body device.

  Thus, in this lead frame supply device, the lead frame accommodated in the magazine and the lead frame stacked on the lead frame stacker can be supplied to the main unit.

  The magazine loader unit and the lead frame stacker loader unit are arranged side by side in the height direction, and the occupied area is reduced as compared with the case where both are arranged side by side.

  Further, the guide rail on which the lead frame taken out from the lead frame stacker is placed is provided on the magazine chuck.

  Therefore, when the magazine is moved to the supply position, the guide rail can be moved together with the magazine chuck, and a moving space for moving the magazine held on the magazine chuck to the supply position is formed. Is done.

  In the lead frame supply device according to the second aspect of the present invention, a rail width adjusting mechanism that adjusts a rail width of the guide rail is provided.

  For this reason, by adjusting the rail width of the guide rail, it is possible to cope with lead frames having different width dimensions.

  Furthermore, in the lead frame supply device according to claim 3, the lead frame stacker is detachably provided, guides the lead frame held by the lead frame stacker, and can move according to the outer shape of the guided lead frame. The guide part was provided.

  Accordingly, the lead frame can be easily replenished by preparing a replenishment lead frame in another lead frame stacker in advance.

  If lead frames having different shapes are prepared in other lead frame stackers, the product type can be easily changed.

  At this time, the lead frame stacker is provided with a guide portion movable according to the outer shape of the lead frame. For this reason, it is possible to change the lead frame to a different shape by moving the guide portion in accordance with the outer shape of the lead frame.

  As described above, in the lead frame supply device according to the first aspect of the present invention, both the lead frame accommodated in the magazine and the stacked lead frame can be supplied to the main body device. Therefore, it is possible to make two types of lead frame supply forms as well as to easily change the type of lead frame.

  Further, by arranging the magazine loader unit and the lead frame stacker loader unit side by side in the height direction, the occupied area can be greatly reduced as compared with the case where both are arranged side by side.

  Then, by providing the magazine chuck with a guide rail for mounting the lead frame taken out from the lead frame stacker, the guide rail is moved together with the magazine chuck when the magazine is moved to the supply position. It is possible to secure a movement space for moving the magazine held on the magazine chuck to the supply position.

  Further, in the lead frame supply device according to the second aspect, the rail width adjusting mechanism for adjusting the rail width of the guide rail is provided, so that even when changing to a lead frame having a different width dimension, it is easy. Can respond.

  Further, in the lead frame supply device according to the third aspect, the lead frame can be replenished quickly by preparing a replenishment lead frame in the removable lead frame stacker in advance.

  If lead frames having different shapes are prepared in a detachable lead frame stacker, the product type can be easily changed.

  At this time, the lead frame stacker is provided with a guide portion movable according to the outer shape of the lead frame. For this reason, by moving the guide portion according to the outer shape of the lead frame, it is possible to easily change to a lead frame having a different shape.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a diagram showing a lead frame supply apparatus 1 according to the present embodiment. The lead frame supply device 1 is a device for supplying a lead frame to a main body device such as a die bonder constituting a semiconductor assembling apparatus, and has a function of supplying a lead frame accommodated in a magazine, and is stacked in the thickness direction as a single unit. And a function of supplying a lead frame.

  That is, the lead frame supply device 1 supplies a magazine loader unit 13 for supplying strip-shaped lead frames 12 housed in a magazine 11 and a stacked strip-shaped lead frame 12 (not shown). Lead frame stacker loader section 14 and a transport elevator section 15 as a supply position moving mechanism for moving each lead frame 12 to a supply position to the main unit.

  The magazine loader unit 13 and the lead frame stacker loader unit 14 are provided in the apparatus front F of the semiconductor assembly apparatus, and the transport elevator unit 15 is provided in the apparatus rear R. The magazine loader unit 13 and the lead frame stacker loader unit 14 are arranged side by side in the height direction, and the magazine loader unit 13 is arranged below the lead frame stacker loader unit 14.

  The magazine loader unit 13 includes a magazine supply unit 21 that supplies the magazine 11 in which the lead frame 12 is accommodated, and a magazine discharge unit 22 that discharges the magazine 11 that has finished supplying the lead frame 12. The magazine supply unit 21 is disposed above the magazine discharge unit 22. The magazine supply unit 21 is provided with a magazine carry-in conveyor 23 on the mounting surface thereof, and is configured so that the mounted magazine 11 can be moved to the end on the rear side R of the apparatus. Further, the magazine discharge section 22 is provided with a magazine discharge conveyor 24 on its mounting surface, so that the magazine 11 mounted on the rear side R of the apparatus can be moved to the front side F of the apparatus.

  As shown in FIG. 2, the lead frame stacker loader section 14 is provided with a stacker mounting portion 31, and a lead frame stacker 32 can be detachably attached to the stacker mounting portion 31 from the front side. It is configured.

  As shown in FIG. 3, the lead frame stacker 32 includes a rectangular frame-shaped outer frame 41 that holds strip-shaped lead frames 12 (not shown) stacked in the thickness direction. On the bottom plate 42, a lift plate 43 made of a movable bottom plate is disposed between both side plates 44, 44 so as to be movable up and down. The lift plate 43 is provided with elongated holes 45 extending in the width direction, and the elongated holes 45 are guided in sliding contact with the side edges of the accommodated lead frame 12. Lead frame guide rods 46,... Are provided as parts.

  Each lead frame guide rod 46,... Is screwed to a long hole provided in the outer frame 41 (not shown), and can move in the width direction of the lead frame stacker 32 along the long hole. It is configured as follows. As a result, each of the lead frame guide rods 46,... Guides the lead frame 12 held by the lead frame stacker 32 and is fixed at a position moved according to the width of the guided lead frame 12. It is configured to be able to. Positioning pin insertion holes 47 and 47 are provided on the upper surface of the outer frame 41 of the lead frame stacker 32.

  As shown in FIG. 2, the stacker attachment portion 31 to which the lead frame stacker 32 is attached is provided with a slide type stacker base 51, and the stacker base 51 includes the lead frame stacker 32. A positioning pin 52 to be inserted into the positioning pin insertion hole 47 is provided. The stacker mounting portion 31 is provided with a pair of floating prevention plates 53 and 53 for preventing the lead frame stacker 32 from floating and a stacker lock mechanism 54 formed of an air cylinder.

  Thus, in the state where the positioning pin 52 is inserted into the positioning pin insertion hole 47 of the lead frame stacker 32, the lead frame stacker 32 is restrained in the horizontal direction, and the stacker base 51 is attached to the apparatus. If the lead frame stacker 32 is pushed back to the operable position, the edge of the lead frame stacker 32 enters under the floating prevention plates 53 and 53 so that the lead frame stacker 32 cannot be removed and the possibility of unexpected deviation is eliminated.

  Further, when the pull-out type stacker base 51 is sensed by the sensor that it has been pushed back to the correct position, it is mechanically locked by the stacker lock mechanism 54, so that an erroneous operation of pulling out the stacker base 51 during operation of the apparatus is also possible. Ensures safety. Thereby, the detachable lead frame stacker 32 is configured to prevent unintentional disconnection during operation of the apparatus and to prevent damage to the apparatus.

  In this locked state, when the lift arm 56 is driven by the drive mechanism 55 provided in the stacker mounting portion 31, the lift arm receiver 57 that receives the lift arm 56 is provided in the four lift plates 43. The lead frame 12 supported by the lift plate 43 can be pushed upward.

  A container-like spacer receiver 61 is provided on the front F side of the stacker mounting portion 31, and the spacer receiver 61 is configured to be pulled out together with the lead frame stacker 32.

  The lead frame stacker loader unit 14 is provided with a transfer mechanism 71 for taking out and transferring the lead frame 12 from the attached lead frame stacker 32, and the transfer mechanism 71 includes the lead frame stacker 32. A lead frame adsorbing portion 72 is provided for adsorbing the lead frames 12 from each other and taking them one by one. The lead frame suction part 72 is configured to be driven in the front-rear direction of the apparatus by a lead frame suction part front-rear drive motor 73, and the lead in the lead frame stacker 32 pushed up by the lift plate 43 that moves upward. The frame 12 can be sucked and transferred. At this time, when the spacer disposed between the lead frames 12 and 12 is sucked, the spacer is moved to the spacer receiver 61 by detecting the sensor and moving the lead frame suction portion 72. It is configured so that it can be accommodated.

  As shown in FIG. 1, the transport elevator unit 15 includes a slider 82 that is driven along a slide rail 81 that extends vertically, and the slider 82 includes a slider 82 as shown in FIG. A magazine chuck 83 for holding the magazine 11 is provided so as to be movable in the horizontal direction by a drive mechanism.

  The magazine chuck 83 includes an upper claw portion 91 and a lower claw portion 92 that sandwich the magazine 11 from above and below, holds the magazine 11 disposed in the magazine supply portion 21, and The lead frame 12 can be moved in accordance with a supply position at which the lead frame 12 can be supplied to the conveyance path of the main unit. Further, when the supply of all the lead frames 12,... In the held magazine 11 is finished, the magazine 11 can be transferred to the magazine discharge section 22 and discharged.

  As shown in FIGS. 4 and 5, the lead frame 12 transferred by the transfer mechanism 71 of the lead frame stacker loader unit 13 is placed on the upper claw portion 91 of the magazine chuck 83. A guide rail 101 is provided, and the movable range of the magazine chuck 83 is set so that the transport elevator unit 15 can move the lead frame 12 placed on the guide rail 101 according to the supply position. ing.

  The guide rail 101 includes a rail width adjusting mechanism 112 that adjusts the rail width 111 as shown in FIG.

  That is, a rear rail 122 is fixed to the upper claw portion 91 of the magazine chuck 83 via a rail bracket 121, and the rail bracket 121 is supported by guide rail supporting linear motion guides 123 and 123. The front rail 125 is provided in parallel to the rear rail 122 via the support rods 124, 124. The rail bracket 121 is provided with a guide rail drive motor 126, and a pinion gear provided on the guide rail drive motor 126 meshes with a drive rack 127 provided on the support rod 124.

  Accordingly, the guide rail drive motor 126 is driven to move the front rail 125 with respect to the rear rail 122 so that the rail width 111 of the guide rail 101 can be varied. By detecting the position of the support rod 124 by the guide rail reference position detection sensor 131 provided on the rail bracket 121, the front rail 125 can be moved to the retracted position 132 as shown in FIG. When the lead frame supply device 1 is used as a magazine loader, interference with the periphery of the guide rail 101 can be prevented.

  Then, the guide rail 101 is automatically deployed at the commanded interval, and the magazine chuck 83 provided with the guide rail 101 is moved with respect to the transport elevator unit 15, thereby transporting the main body device. The front-rear position can be adjusted so that the center line of the road matches the center line of the guide rail 101.

  As a result, the lead rail adsorbing portion 72 that holds the lead frame 12 taken out from the lead frame stacker 32 is moved directly above the guide rail 101, and the guide rail 101 is moved to the lead by the transport elevator portion 15. The lead frame placed on the guide rail 101 by moving up the magazine chuck 83 after receiving the lead frame 12 from the lead frame suction part 72 and moving up to the frame suction part 72 12 is lowered to the supply position, which is the height position of the conveyance path of the main body apparatus, and is supplied to the main body apparatus.

  In the present embodiment having the above configuration, when the lead frame 12 housed in the magazine 11 is supplied to the main body device, the magazine 11 supplied from the magazine supply unit 21 is used as the magazine chuck of the transport elevator unit 15. The lead frame 12 in the magazine 11 is moved in accordance with the supply position to the main unit by operating the magazine chuck 83 while holding it at 83.

  Thereby, the lead frame 12 in the magazine 11 arranged at the supply position can be supplied to the main body device.

  When the lead frame 12 stacked on the lead frame stacker 32 is supplied to the main body device, the lead frame 12 in the lead frame stacker 32 is taken out from the lead frame stacker 32 by the transfer mechanism 71 and removed. The lead frame 12 is placed on the guide rail 101 provided on the magazine chuck 83. Then, by operating the magazine chuck 83 by the transport elevator unit 15, the lead frame 12 placed on the guide rail 101 is moved in accordance with the supply position.

  Thereby, the lead frame 12 on the guide rail 101 arranged at the supply position can be supplied to the main body device.

  Thus, in the lead frame supply device 1, both the lead frame 12 accommodated in the magazine 11 and the lead frame 12 stacked on the lead frame stacker 32 can be supplied to the main body device. Therefore, it is possible to make two types of lead frame supply forms as well as to easily change the type of the lead frame 12.

  The magazine loader unit 13 and the lead frame stacker loader unit 14 are arranged side by side in the height direction, and the occupied area can be greatly reduced as compared with the case where both are arranged side by side. it can.

  Further, the guide rail 101 on which the lead frame 12 taken out from the lead frame stacker 32 is placed is provided on the magazine chuck 83.

  Therefore, when the magazine 11 is moved to the supply position, the guide rail 101 can be moved together with the magazine chuck 83 that holds the magazine 11, and the magazine 11 that is held on the magazine chuck 83 is moved to the supply position. A movement space for moving to the supply position can be secured.

  On the other hand, the guide rail 101 includes a rail width adjusting mechanism 112 that adjusts the rail width 111 thereof.

  Therefore, by adjusting the rail width 111 of the guide rail 101, it is possible to cope with lead frames 12 having different width dimensions. Thereby, even if it is a case where it changes in the kind to the lead frame 12 from which a width dimension differs, it can respond easily.

  Further, the lead frame stacker 32 is detachably attached to the stacker attachment portion 31, and can be replaced with a separately prepared stacker attachment portion 31. For this reason, the lead frame 12 can be replenished quickly by storing the lead frame 12 for replenishment in the lead frame stacker 32 prepared separately.

  Further, if the lead frames 12 having different shapes are accommodated in a separately prepared lead frame stacker 32, the product type can be easily changed.

  At this time, the lead frame stacker 32 is provided with lead frame guide rods 46... That can move according to the outer shape of the lead frame 12. Therefore, the lead frame 12 can be easily changed to a different shape by moving in accordance with the outer shape of the lead frame 12 that accommodates the lead frame guide rods 46.

It is a perspective view which shows one embodiment of this invention. It is the perspective view which expanded the principal part of the embodiment. It is a perspective view which shows the lead frame stacker of the embodiment. It is a perspective view which shows the state holding the magazine with the magazine chuck of the embodiment. It is a perspective view which shows the state which mounted the lead frame in the guide rail of the embodiment. It is a perspective view which shows the guide rail of the embodiment. (A) is a figure which shows the conventional magazine loader, (b) is explanatory drawing which shows the operation | movement. (A) is a figure which shows the conventional lead frame stacker loader, (b) is explanatory drawing which shows the operation | movement. It is a figure which shows the lead frame supply apparatus which combined the conventional magazine loader and the lead frame stacker loader.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Lead frame supply apparatus 11 Magazine 12 Lead frame 13 Magazine loader part 14 Lead frame stacker loader part 21 Magazine discharge part 22 Magazine supply part 32 Lead frame stacker 46 Lead frame guide rod (guide part)
71 Transfer mechanism 83 Magazine chuck 101 Guide rail 111 Rail width 112 Rail width adjustment mechanism

Claims (3)

A magazine supply unit for supplying a magazine in which strip-shaped lead frames are accommodated, and a magazine loader unit in which a magazine discharge unit for discharging the magazine is arranged up and down,
A supply position moving mechanism that operates a magazine chuck that holds the supplied magazine and moves the lead frame in the magazine in accordance with the supply position to the main unit;
A lead frame stacker that includes a lead frame stacker that holds strip-shaped lead frames in a stacked state, and a transfer mechanism that takes out and transfers the lead frames from the lead frame stacker; and
A lead frame supply device comprising:
While arranging the magazine loader part and the lead frame stacker loader part side by side in the height direction,
A guide rail on which the lead frame transferred by the transfer mechanism of the lead frame stacker loader portion is placed is provided on the magazine chuck, and the lead frame placed on the guide rail is moved according to the supply position. A lead frame supply device characterized in that a movable range of the magazine chuck by the supply position moving mechanism is set so as to be able to.   The lead frame supply device according to claim 1, further comprising a rail width adjusting mechanism that adjusts a rail width of the guide rail.   The lead frame stacker is detachably provided, guides a lead frame held by the lead frame stacker, and a guide portion movable according to the outer shape of the guided lead frame. Item 3. The lead frame supply device according to Item 1 or 2.

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