TW201507829A - 升降取送裝置 - Google Patents

升降取送裝置 Download PDF

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Publication number
TW201507829A
TW201507829A TW102130164A TW102130164A TW201507829A TW 201507829 A TW201507829 A TW 201507829A TW 102130164 A TW102130164 A TW 102130164A TW 102130164 A TW102130164 A TW 102130164A TW 201507829 A TW201507829 A TW 201507829A
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TW
Taiwan
Prior art keywords
lifting
power
tray
motor
slide
Prior art date
Application number
TW102130164A
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English (en)
Chinese (zh)
Other versions
TWI513560B (enExample
Inventor
Yu-Ying Qiu
bo-wei Song
xin-jie Qiu
Original Assignee
Chiuan Yan Technology Co Ltd
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Application filed by Chiuan Yan Technology Co Ltd filed Critical Chiuan Yan Technology Co Ltd
Priority to TW102130164A priority Critical patent/TW201507829A/zh
Publication of TW201507829A publication Critical patent/TW201507829A/zh
Application granted granted Critical
Publication of TWI513560B publication Critical patent/TWI513560B/zh

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TW102130164A 2013-08-23 2013-08-23 升降取送裝置 TW201507829A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

Publications (2)

Publication Number Publication Date
TW201507829A true TW201507829A (zh) 2015-03-01
TWI513560B TWI513560B (enExample) 2015-12-21

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Application Number Title Priority Date Filing Date
TW102130164A TW201507829A (zh) 2013-08-23 2013-08-23 升降取送裝置

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TW (1) TW201507829A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116153845A (zh) * 2023-02-27 2023-05-23 东莞市智赢智能装备有限公司 一种晶圆机器人

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006016144A (ja) * 2004-07-01 2006-01-19 Daihen Corp トランスファロボット
TWM310796U (en) * 2006-09-14 2007-05-01 Sanwa Engineering Corp Multi-joint mechanical arm structure
JP5578973B2 (ja) * 2010-07-16 2014-08-27 日本電産サンキョー株式会社 産業用ロボット
TWM454064U (zh) * 2012-11-29 2013-05-21 Schmid Automation Asia Co Ltd 馬達驅動升降模組

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116153845A (zh) * 2023-02-27 2023-05-23 东莞市智赢智能装备有限公司 一种晶圆机器人
CN116153845B (zh) * 2023-02-27 2023-10-31 东莞市智赢智能装备有限公司 一种晶圆机器人

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Publication number Publication date
TWI513560B (enExample) 2015-12-21

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