TW201444632A - Laser processing machine - Google Patents

Abstract

This invention provides a laser processing machine capable of performing very small drilling operation. A processing head (20) comprises a piezoelectric platform rack (23) acting as a part moving on a plane perpendicular to the optical axis (a). By applying voltage to the electrode of the piezoelectric actuators (piezoelectric elements) (23b) of the piezoelectric platform rack (23), a specified movement is driven to perform processing control, making a condenser lens (25) held at the lens holder (24a) through the lens bracket (24) moving in the direction perpendicular to the optical axis (a), so as to enable the focus of the laser to move in the opening part (29a1) at the front end of the nuzzle (29a) to form a micro hole.

Description

Laser processing machine

The invention relates to a laser processing machine.

The laser cutting device is a laser processing machine that irradiates a concentrated laser beam on a workpiece of a metal plate and sprays an auxiliary gas to perform high-precision and high-quality fine cutting. FIG. 9 is a cross-sectional view showing a conventional laser processing machine 100.

In the laser processing machine 100, laser light is incident on the collecting lens 102 in the processing head 101 from a laser oscillator (not shown), and the laser light collected by the collecting lens 102 is irradiated from the opening of the distal end sealing member 110. The focus is placed on the workpiece W of the metal plate. The peripheral portion of the workpiece W is held by a mounting frame of a workpiece table (not shown), and the workpiece table (not shown) can be moved in the XY plane. Thereby, the workpiece W itself is relatively moved with respect to the processing head 101 by the movement of the workpiece table (not shown), thereby changing the irradiation range of the laser.

Patent Document 1: Japanese Laid-Open Patent Publication No. Hei 11-254169

Patent Document 2: Japanese Laid-Open Patent Publication No. 2003-215419.

However, in the structure in which the workpiece is moved by the table to change the irradiation range of the laser as in the above-described conventional laser processing machine, the irradiation range of the laser cannot be accurately changed, and it is difficult to perform a very small number of hundreds of μm such as electronic components. The problem of opening the hole.

The present invention has been made to solve the above problems, and an object thereof is to provide a laser processing machine capable of performing very small opening processing.

In order to achieve the object, a laser processing machine according to a first aspect of the present invention includes a processing head having a condensing lens for concentrating laser light and a discharge portion for illuminating an irradiation portion of the laser to the workpiece. In the nozzle of the gas, the processing table is disposed below the processing head and holds the workpiece, and the laser collected by the collecting lens is irradiated to the workpiece from the opening of the nozzle tip of the processing head. Processing, the laser processing machine comprising: a support member; a head movable mechanism interposed between the support member and the processing head, wherein the processing head is perpendicular to the optical axis of the laser with respect to the support member Moving upward; the workpiece is processed by moving the processing head to the workpiece on the plane by the head movable mechanism.

According to the laser processing machine of the first aspect of the present invention, the processing head includes a collecting lens for collecting the laser light and a nozzle for discharging the auxiliary gas to the irradiated portion of the laser beam to be processed, and the laser light collected by the collecting lens is used. The opening of the tip end of the nozzle illuminates the workpiece held on the processing table, and cuts (opens) the workpiece.

According to the laser processing machine of the first aspect, the machining head can be moved by a head movable mechanism interposed between the support member and the machining head with respect to the support member on a plane orthogonal to the optical axis of the laser. Thereby, by moving the processing head on the plane orthogonal to the optical axis of the laser with respect to the workpiece, it is possible to change the laser shot in a narrow range as compared with the case where the processing table is moved. Shooting range. Therefore, since high-speed and high-precision machining can be performed, it is possible to perform a very small hole drilling process of an electronic component or the like.

According to the laser processing machine of the second aspect, in addition to the effect of the laser processing machine according to the first aspect, the sleeve has a fitting hole for fitting the optical fiber, and is suspended by the head movable mechanism; A lens movable mechanism that moves relative to the sleeve in a plane orthogonal to the optical axis of the laser is suspended from the sleeve.

Thereby, by the lens movable mechanism, the condensing lens is moved on a plane orthogonal to the optical axis of the laser with respect to the sleeve, and can be changed within a narrow range within the range of the opening of the nozzle tip of the machining head. The range of exposure of the laser transmitted by the fiber. Thereby, high-speed and high-precision processing can be performed, and therefore, it is possible to perform a very small hole drilling process of an electronic component or the like.

According to the laser processing machine of the third aspect of the invention, in addition to the effect of the laser processing machine according to the second aspect, a through hole is formed in a central portion of the lens movable mechanism, and the lens holder is formed between the lens and the through hole. The gapped state is attached to the lens movable mechanism; the lens holder has a lens holding portion for accommodating the condensing lens, and the lower side member of the member constituting the machining head is configured to be movable relative to the sleeve.

Here, in the case where the lens holder is moved relative to the sleeve by a lens movable mechanism in a plane orthogonal to the optical axis of the laser, the column member is inserted into the gap so as not to interfere with the lens holder, and the nozzle is passed through the column member Since it is supported by the sleeve, there is an effect that the column member can be disposed by the remaining space of the through hole in which the lens holder is not disposed.

Therefore, the machining head can be made compact as compared with the case where the column member is not inserted into the transmission hole (when it is disposed outside the machining head). therefore, It is possible to bring the processing head closer to the end of the workpiece, and it is possible to reduce the waste of the material.

According to the laser processing machine of the fourth aspect of the invention, in addition to the effect of the laser processing machine according to the second aspect, since the lens holder for accommodating the condensing lens is detachably attached to the lens movable mechanism, The lens movable mechanism removes the lens holder and can perform maintenance of the condensing lens housed in the lens holder.

Further, after the concentrating lens is maintained, the lens holder or the other lens holder detached from the lens movable mechanism is attached to the lens movable mechanism, but in the case of mounting the lens holder to the lens movable mechanism, in order to prevent laser light The deviation of the irradiation position is adjusted as follows with respect to the position of the condensing lens.

First, after moving the processing table to a position (original position) defined by the position of the optical fiber and the condensing lens, the optical fiber is detached from the fitting hole of the sleeve, and the maintenance concentrating lens is housed in the lens. After the bracket, the lens holder is temporarily fixed to the lens movable mechanism.

Further, if the centering jig is inserted instead of the optical fiber detached from the fitting hole (corresponding to the "fitting" described in the fourth aspect), the centering jig is held by the centering or the outer periphery of the jig holding portion. The holding surface on the top.

If the holding surface of the holder holding portion of the lens holder is held by the centering jig, the lens holder is positioned relative to the sleeve, so the position of the lens holder relative to the fitting hole is uniquely determined. In this state (the state in which the holding surface of the holder holding portion of the lens holder is held by the centering jig), after the lens holder is officially fastened to the lens movable mechanism, the centering jig is taken out from the fitting hole instead of taking it. The centering jig is inserted to insert the optical fiber into the fitting hole, whereby the position adjustment of the collecting lens with respect to the optical fiber is completed.

Thereby, by positioning the lens holder with respect to the sleeve (fitting hole) by the centering jig, the position of the collecting lens relative to the optical fiber can be uniquely determined in the case where the lens holder is attached to the lens movable mechanism, It has the effect of being able to improve the assembly precision of a condensing lens with respect to an optical fiber.

Therefore, there is an effect that the lens holder can be attached to the lens movable mechanism without confirming the irradiation position of the laser to the workpiece. Therefore, when the lens holder is attached to the lens movable mechanism, the amount of work for confirming the irradiation position can be eliminated, and the positional accuracy by the adjustment work performed after confirming the irradiation position can be eliminated. Deviation. As a result, there is an effect that the workload of mounting the condensing lens can be saved, the efficiency of the mounting operation of the condensing lens can be improved, and the positional accuracy of the condensing lens can be made constant.

In addition, the optical fiber and the centering jig are inserted in the fitting holes. That is, the hole into which the centering jig is inserted is used in combination with the hole into which the optical fiber is inserted. Therefore, the hole for inserting the centering jig (hole for the centering jig) is not required, and the space and the amount of work for arranging the hole can be omitted. As a result, the cost reduction and downsizing of the laser processing machine can be achieved.

According to the laser processing machine of the fifth aspect, in addition to the effects of the laser processing machine according to the second aspect, the effects of the third and fourth aspects are achieved.

According to the laser processing machine of the sixth aspect of the invention, in addition to the effect of the laser processing machine according to the fourth aspect or the fifth aspect, since the holding surface is formed on the inner circumference of the jig holding portion of the lens holder, the holding surface is formed. In the lens Compared with the case of the outer periphery of the jig holding portion of the holder, there is an effect that the size of the collecting lens embedded in the lens fitting hole can be increased.

In other words, since the centering jig is formed in the same shape as the optical fiber, the holding surface of the jig holding portion of the fitting centering jig is set to a constant size based on the optical fiber. Here, in the case where the holding surface is formed on the inner circumference of the jig holding portion of the lens holder, the centering jig is fitted into the inner circumference of the jig holding portion, and in the case where the holding surface is formed on the outer circumference of the jig holding portion, The centering jig is externally fitted to the outer periphery of the jig holding portion.

With this configuration, when the holding surface is formed on the inner circumference of the jig holding portion, the jig holding portion can be increased in size as compared with the case where the holding surface is formed on the outer periphery of the jig holding portion. Also large. Therefore, there is an effect that the condensing lens that is embedded in the lens fitting hole can also be enlarged.

According to the laser processing machine of the seventh aspect of the invention, in addition to the effects of the laser processing machine according to claim 4 or 5, since the jig holding portion has a contact surface orthogonal to the holding surface, the centering jig is made The end surface on the insertion side abuts against the contact surface of the jig holding portion, and the fitting position in the axial direction of the centering jig can be uniquely determined. Thereby, the adjustment of the fitting length of the centering jig with respect to the lens holder is not required. Therefore, there is an effect that the efficiency of the mounting work of the lens holder can be improved and the positional accuracy of the condensing lens can be made constant.

1‧‧‧Laser cutting device (laser processing machine)

2‧‧‧Support parts

4‧‧‧1st linear motion bearing (part of the head movable mechanism)

5‧‧‧Part 1 (part of the head movable mechanism)

6‧‧‧1st drive mechanism (part of the head movable mechanism)

9‧‧‧2nd linear motion bearing (part of the head movable mechanism)

10‧‧‧Part 2 (part of the head movable mechanism)

11‧‧‧2nd drive mechanism (part of the head movable mechanism)

20‧‧‧Processing head

21‧‧‧Sleeve

21a‧‧‧ fitting holes

22‧‧‧ fiber

23‧‧‧Piezoic gantry (lens movable mechanism)

23a‧‧‧Fixed parts (part of the lens movable mechanism)

23b‧‧‧ Piezoelectric actuator (part of the lens movable mechanism)

23b2‧‧‧through hole

24‧‧‧ lens holder

24a‧‧‧Lens Holder

24a1‧‧‧ lens insert hole

24b‧‧‧Jig Holder

24b1‧‧‧ Keep face

24b2‧‧‧Outer circumference (maintenance surface formed on the outer circumference)

24b4‧‧‧ Meet the face

25‧‧‧ Concentrating lens

29‧‧‧column parts

29a‧‧‧Nozzles

29a1‧‧‧ openings

30‧‧‧ Centering fixture

40‧‧‧Processing table

60‧‧‧ head side gantry (head movable mechanism)

W‧‧‧Processed objects

A‧‧‧ optical axis

S‧‧ focus

Fig. 1 is a side view of a laser cutting device according to an embodiment of the present invention.

Fig. 2 is an enlarged front elevational view of the head side gantry and the machining head as seen from the direction of arrow II in Fig. 1;

Fig. 3 is an enlarged side elevational view of the head side gantry and the machining head as seen from the direction of the arrow III in Fig. 2;

Figure 4 (a) is an enlarged side view of the processing head, Figure 4 (b) is a partial enlarged side view of the processing head of the portion indicated by Y of Figure 4 (a), Figure 4 (c) is from Figure 4 (b) A portion of the workpiece viewed in the direction of the arrow IVc is enlarged from the front view.

Figure 5 is a bottom plan view of the piezoelectric gantry.

Fig. 6(a) is a front view of the lens holder, and Fig. 6(b) is a cross-sectional view of the lens holder of line VIb-VIb of Fig. 3(a).

Fig. 7 (a) is a side view of the centering jig, and Fig. 7 (b) shows a state in which the lens holder and the centering jig are fitted, and is a cross-sectional view of the lens holder and the centering jig including the respective axes.

Fig. 8 (a) is a partial cross-sectional view showing the processing head in a state in which the lens holder is attached, and Fig. 8 (b) is a partial cross-sectional view showing the processing head in a state in which the lens holder is removed. Further, Fig. 8(c) is a partial cross-sectional view showing the processing head in a state in which the lens holder is fitted to the centering jig inserted into the sleeve, and Fig. 8(d) is a view showing the lens holder to which the removed lens holder is attached. A partial cross-sectional view of the state of the processing head.

Fig. 9 is a side view of a conventional laser processing machine.

Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings. First, the configuration of the laser cutting device 1 will be described with reference to Fig. 1 . Fig. 1 is a side view of a laser cutting device 1 according to an embodiment of the present invention.

As shown in Fig. 1, the laser cutting device 1 is added to the metal plate. The workpiece W (see FIG. 2) is a laser processing machine that irradiates a concentrated laser beam and ejects an assist gas to perform high-precision and high-quality fine cutting, and mainly includes a processing head 20 and a processing table disposed below the processing head 20. 40. An XY stage 50 for moving the processing table 40 in parallel, a head side frame 60 for moving the processing head 20 in parallel, a flat plate 70 made of stone, fixing the XY stage 50, and an arm 80 extending from the flat plate 70 .

The processing head 20 is a member that irradiates laser light, is attached to an arm 80 extending from the flat plate 70, and is cut (opened) by a predetermined portion of the workpiece W (see FIG. 2) by laser irradiation from the processing head 20. The detailed structure of the processing head 20 will be described later with reference to FIGS. 2 and 3.

The processing table 40 is a member that is disposed below the processing head 20 and holds the workpiece W (see FIG. 2). In order to suck the auxiliary gas sent from the processing head 20 side, the processing head 20 is opposed to the processing head 20 and is provided with a lower bracket. (not shown). In addition, the processing table 40 can be moved up and down, and the workpiece W is lifted by the processing head 20 and the processing table 40 while the workpiece 40 is being held while the workpiece W is being held. Further, the processing table 40 is provided with a holding jig 41, and the workpiece W to be processed is held on the processing table 40 in a tensioned state by the holding jig 41.

The XY stage 50 is a member for moving the processing table 40 relative to the plane of the processing head 20, and is fixed to the flat plate 70. The processing table 40 can be lasered in a state where the laser cutting device 1 is placed on the ground (horizontal plane). The optical axis a (see FIG. 3) moves on an orthogonal plane (XY plane).

The head side gantry 60 is a member for moving the processing head 20 relative to the plane of the arm 80, and is disposed on the ground (horizontal plane) in the laser cutting device 1. In this state, the processing head 20 can be moved by a head-side stage 60 on a plane (UV plane) orthogonal to the optical axis a of the laser (see FIG. 3). The detailed structure of the head side gantry 60 will be described later with reference to FIGS. 2 and 3. The arm 80 is a member for hoisting the machining head 20, and the support member 2 is fixed to the lower surface thereof.

The initial position is set by the XY stage 50 and the head side gantry 60. That is, after the processing table 40 is moved by the XY stage 50, the machining head 20 is moved by the head side gantry 60, and the workpiece W is positioned at the initial position with respect to the machining head 20. After the workpiece W to be positioned is nipped by the processing head 20 and the processing table 40, the workpiece W to be processed is irradiated with laser light from the processing head 20 to perform cutting (opening) processing.

Next, a detailed configuration of the head side gantry 60 and the machining head 20 will be described with reference to Figs. 2 to 5 . 2 is an enlarged front view of the head side gantry 60 and the machining head 20 as seen from the direction of the arrow II of FIG. 1, and FIG. 3 is an enlarged side of the head side gantry 60 and the machining head 20 as seen from the direction of the arrow III of FIG. view. 4(a) is an enlarged side view of the processing head 20, and FIG. 4(b) is a partially enlarged side view of the processing head 20 of the portion indicated by Y in FIG. 4(a), and FIG. 4(c) is a view from FIG. Part (b) is an enlarged front view of a part of the workpiece viewed in the direction of the arrow IVc. FIG. 5 is a bottom view of the piezoelectric stage 23, showing a state in which a lens holder 24 and a column member 27 to be described later are attached. In addition, in FIG. 3, a part of the head side gantry 60 and the processing head 20 are shown in cross section, and FIG. 4(a) shows a state in which the processing head 20 of FIG. 3 is enlarged, and FIG. 4(c) shows FIG. 4(b). The workpiece W is enlarged. In addition, a circle indicated by a chain double-dashed line in FIG. 4(c) indicates a range of the opening 29a1 at the tip end of the nozzle 29a to be described later.

As shown in Figures 2 and 3, the head side gantry 60 is used to machine the processing head 20 The member that moves in parallel is interposed between the machining head 20 and the support member 2, and includes a first member 5 that can be configured to move relative to the support member 2, and a second member that can be moved relative to the first member 5 10. The machining head 20 is fixed to the second member 10.

The support member 2 is a member for supporting the first member 5 from above, and is formed in a rectangular plate shape in plan view. The support member 2 is set such that one of the two opposite sides of the rectangular shape is longer than the other, and is disposed above the workpiece W held by the holding device (not shown) at the peripheral edge portion. The support member 2 includes a pair of protruding portions 3 projecting downward from the both sides in the longitudinal direction (the left-right direction of FIG. 1) of the lower surface (the lower side in FIG. 1), and the pair of protruding portions 3 are formed in the short-side direction of the support member 2 (The vertical direction of the paper in Fig. 1) is parallel to each other. The first linear motion bearing 4 is fixed to the lower end of the protruding portion 3 along the longitudinal direction of the protruding portion 3.

The first linear motion bearing 4 is for supporting the first member 5 with respect to the protruding portion 3 and relatively moving the first member 5 relative to the protruding portion 3 along the longitudinal direction of the protruding portion 3 (the vertical direction of the paper surface in FIG. 1). component. The first linear motion bearing 4 includes a rail 4a and a slider 4b that is guided by the rail 4a to move relative to each other. The rail 4a is fixed to the protruding portion 3, and on the other hand, the slider 4b is fixed to the first member 5. .

The first member 5 is a member that can be moved on a straight line parallel to the lower surface of the support member 2, and is made of carbon fiber reinforced resin (CFRP) and formed into a rectangular plate shape in plan view. A first drive mechanism 6 composed of a linear motor is disposed between the upper surface of the first member 5 and the pair of first linear motion bearings 4.

The first drive mechanism 6 is for making the first member 5 and the first direct motion A mechanism in which the bearing 4 (slider 4b) linearly moves along the protruding portion 3, including a linear fixing member 6a fixed to the upper surface of the first member 5, and a movable portion 21a capable of moving relative to the fixing member 6a The movable member 6b is configured. The stator 6a is disposed in parallel with the rail 4a of the first linear motion bearing 4, and the movable member 6b is not movably locked to the lower surface of the support member 2 with respect to the support member 2. Thereby, the first member 5 can be moved relative to the support member 2 by driving the first drive mechanism 6. The first drive mechanism 6 is configured by arranging two linear motors of the same quality and the same size, and the first member 5 is moved by the driving force of the two linear motors.

Further, the protruding portion 3 protrudes downward from the lower surface of the support member 2, and the first linear motion bearing 4 that supports the first member 5 is fixed to the lower end of the protruding portion 3. Therefore, by setting the length in the optical axis direction (the vertical direction in FIG. 1) after the first linear member 4 is applied to the protruding portion 3 to be slightly larger than the height of the first drive mechanism 6, the support member 2 and the first member 5 can be provided. The interval at which the first drive mechanism 6 can be disposed is provided between them. As a result, the first drive mechanism 6 can be disposed by effectively utilizing the useless space between the support member 2 and the first member 5.

A cylindrical tubular portion 7 through which the optical fiber 13 (described later) is loosely inserted is provided on the upper surface of the first member 5 located between the two linear motors. The optical fiber 13 that has passed through the tubular portion 7 is loosely penetrated through a through hole (not shown) formed in the thickness direction of the first member 5 (vertical direction in FIG. 1).

As shown in FIG. 2, the second member 10 is supported by the first member 5 from above. The first member 5 includes a pair of protruding portions 8 that protrude downward from both sides in the short-side direction (the horizontal direction in FIG. 2) of the lower surface, and the pair of protruding portions 8 are formed throughout the longitudinal direction of the first member 5 (Fig. 2 Vertical direction) parallel to each other shape. The protruding portion 3 of the support member 2 and the protruding portion 8 of the first member 5 are arranged orthogonally in plan view. The second linear motion bearing 9 is fixed to the lower end of the protruding portion 8 along the longitudinal direction of the protruding portion 8.

The second linear motion bearing 9 is for supporting the second member 10 with respect to the protruding portion 8 and relatively moving the second member 10 relative to the protruding portion 8 along the longitudinal direction of the protruding portion 8 (the vertical direction of the paper surface in FIG. 2). component. The second linear motion bearing 9 includes a rail 9a and a slider 9b that is guided to be relatively moved by the rail 9a. The rail 9a is fixed to the protruding portion 8, and on the other hand, the slider 9b is fixed to the second member 10. .

The second member 10 is a member that can be formed to move orthogonally to the moving direction of the first member 5 on a straight line parallel to the lower surface of the first member 5, and is formed in a rectangular plate shape in plan view, and a processing head is fixed to the lower surface. 20. Similarly to the first member 5, the second member 10 is made of carbon fiber reinforced resin. A second drive mechanism 11 composed of a linear motor is disposed between the upper surface of the second member 10 and the pair of second linear motion bearings 9.

The second drive mechanism 11 is a mechanism for linearly moving the second member 10 together with the second linear motion bearing 9 (slider 9b) along the protruding portion 8, and includes a linear shape fixed to the upper surface of the second member 10. The fixing member 11a is configured as a movable member 11b that can be configured to move relative to the fixing member 11a. The stator 11a is disposed in parallel with the rail 9a of the second linear motion bearing 9, and the movable member 11b is not locked to the lower surface of the first member 5 with respect to the first member 5. Thereby, the second member 10 can be moved relative to the first member 5 by driving the second drive mechanism 11.

The second drive mechanism 11 is linear with the first drive mechanism 6 The motor is composed of a linear motor of the same specification and of the same quality. Since the first drive mechanism 6 and the second drive mechanism 11 are configured by components (linear motors) of the same specification, it is possible to reduce the types of components stored as stock.

Further, a protruding portion 8 projects downward from the lower surface of the first member 5, and a second linear motion bearing 9 that supports the second member 10 is fixed to the lower end of the protruding portion 8. Therefore, by setting the length in the optical axis direction (the vertical direction in FIG. 2) after the second linear motion bearing 9 is applied to the protruding portion 8 to be slightly larger than the height of the second drive mechanism 11, the first member 5 and the second member can be provided. A space at which the second drive mechanism 11 can be disposed is provided between the members 10. As a result, the second drive mechanism 11 can be disposed by effectively utilizing the useless space between the first member 5 and the second member 10.

Further, on the upper surface of the second member 10 located between the second drive mechanism 11 and the second linear motion bearing 9, a cylindrical tubular portion 12 through which the optical fiber 13 is loosely inserted is erected. The optical fiber 13 is a flexible member for transmitting laser light formed by a laser oscillator (not shown), and is inserted into a through hole (not shown) and the cylindrical portions 7 and 12 by looseness, and the through hole ( Not shown) is formed through the first member 5 and the second member 10 to propagate the laser light toward the processing head 20. Since the laser light propagates through the optical fiber 13 to the processing head 20, it is easy to correspond to the free movement of the machining head 20 as compared with a mechanism for causing laser light to enter the machining head via the mirror. Further, since the mirror can be eliminated, the laser propagation mechanism can be simplified, and the mass body (including the processing head 20) supported by the support member 2 can be made lighter. As a result, the inertial force of the mass body that moves relative to the support member 2 can be reduced. Therefore, the positional accuracy of the machining head 20 for driving control of the first drive mechanism 6 and the second drive mechanism 11 can be improved, and high speed and high speed can be achieved. Precision laser processing.

Further, the optical fiber 13 is loosely inserted into a through hole (not shown) formed in the thickness direction (vertical direction of FIG. 2) of the second member 10 in order to propagate the laser light to the processing head 20. By inserting the optical fiber 13 loosely into the through hole and the cylindrical portions 7 and 12 formed in the first member 5 and the second member 10, and avoiding the first linear motion bearing 4 and the second linear motion bearing 9, The optical fiber 13 is disposed by the first drive mechanism 6 and the second drive mechanism 11, and it is possible to prevent the bending radius of the optical fiber 13 from being more than necessary when the first member 5 and the second member 10 are moved in the direction orthogonal to the optical axis a. Become smaller. Thereby, it is possible to prevent the transmission efficiency of the laser from being lowered. Further, since the optical fiber 13 is loosely inserted into the tubular portions 7 and 12, the area where the outer periphery of the optical fiber 13 is exposed can be made smaller than in the case where the cylindrical portions 7 and 12 are not provided. Thereby, the optical fiber 13 can be protected from damage.

Since the laser processing machine 1 is configured as described above, by separately driving and controlling the first drive mechanism 6 and the second drive mechanism 11, the machining head 20 fixed to the second member 10 can be relatively moved to the optical axis with the laser. a orthogonal plane.

Further, since the fixing member 6a of the first drive mechanism 6 (two linear motors) is disposed on the first member 5, the mass body moved by the first drive mechanism 6 is the first member 5, the second member 10, and the machining head. 20. First drive mechanism 6 and second drive mechanism 11 (three linear motors). On the other hand, since the fixing member 11a of the second drive mechanism 11 (one linear motor) is disposed on the second member 10, the mass body moved by the second drive mechanism 11 is the second member 10, the processing head 20, and the 2 drive mechanism 11 (1 linear motor).

As described above, although the mass of the second drive mechanism 11 is the load of the first drive mechanism 6 and the second drive mechanism 11, the second drive is made The mass of the structure 11 is smaller than the mass of the first drive mechanism 6 (half the number of linear motors), and the mass of the mass as the load of the second drive mechanism 11 can be made small. As a result, the inertial force of the mass body which is the load of the second drive mechanism 11 can be reduced, and the positional accuracy of the drive control of the second drive mechanism 11 can be improved.

Further, the first drive mechanism 6 sets the driving force to about twice the driving force of the second drive mechanism 11 by making the number of linear motors twice that of the second drive mechanism 11. In the first drive mechanism 6, the mass of the mass as the load is larger than that of the second drive mechanism 11, but since the drive force is set larger than that of the second drive mechanism 11, the mass can be moved with a margin. As a result, the positional accuracy of the drive control of the first drive mechanism 6 can be improved. As described above, by setting the second drive mechanism 11 to be lighter than the first drive mechanism 6, and setting the drive force of the first drive mechanism 6 to be larger than the drive force of the second drive mechanism 11, it is possible to perform high speed. And high precision machining.

Further, the first drive mechanism 6 is doubled (the number of linear motors is increased) by using the linear motor constituting the second drive mechanism 11 and the number of linear motors with respect to the second drive mechanism 11, so that the drive force becomes the second drive. The agency 11 is about twice as large. In order to increase the driving force, the driving force of the linear motor itself can be increased without increasing the number of linear motors. However, since the specifications of the linear motor are made common, the driving force can be changed by changing the number of the linear motors. The number of types of linear motors that are secured as stocks is reduced to one, and inventory management can be facilitated.

In addition, when the first drive mechanism 6 is configured by one linear motor, the linear motor is increased in size in order to secure the driving force, but the first one is made. The driving force required for the drive mechanism 6 is separately borne by a plurality of (two) linear motors, so that each linear motor can be miniaturized (lower height). As a result, it is possible to effectively arrange the plurality of linear motors in a plane by the useless space of the first member 5. Thereby, the length from the support member 2 to the second member 10 in the optical axis direction can be shortened, and the size can be made compact.

Further, since the first member 5 and the second member 10 are formed of a carbon fiber reinforced resin (CFRP) having a higher specific strength and a specific modulus of elasticity than a steel and having a small coefficient of thermal expansion, the first member 5 and the second member 10 are provided. The first member 5 and the second member 10 can be made lighter than in the case of metal. As a result, the inertial force of the mass body that moves relative to the support member 2 can be reduced, so that the positional accuracy of the machining head 20 that controls the driving of the first drive mechanism 6 and the second drive mechanism 11 can be improved. Further, since the dimensional change of the first member 5 and the second member 10 with respect to temperature change can be made smaller than when the first member 5 and the second member 10 are made of metal, high-precision laser processing can be performed. .

As shown in FIG. 3 and FIG. 4, the processing head 20 is a member that cuts (opens) the workpiece W while irradiating the laser with respect to the workpiece W, and mainly includes an optical fiber 22 and transmits a laser. The sleeve 21 has a fitting hole 21a that fits the front end portion of the optical fiber 22 and is hung on the head side frame 60; the piezoelectric stage 23 is suspended on the sleeve 21; and the lens holder 24 can The piezoelectric stage 23 is configured to move relative to the sleeve 21; the collecting lens 25 is housed in the lens holder 24 to condense the laser beam irradiated from the optical fiber 22; the cover holder 26 covers the collecting lens 25 from below; The column member 27 supports the cover bracket 26 on the sleeve 21; the flow path member 28 is fitted to the cover bracket 26; and the upper bracket 29, The nozzle 29a is provided and fitted to the flow path member 28.

The sleeve 21 is a member that is fitted into the fitting hole 21a with a clearance fit through the front end portion of the optical fiber 22 to fix the optical fiber 22 to the head side frame 60, and a substantially circular shape having a fitting hole 21a having an inner diameter D2 is formed. The tubular portion and the portion extending from the outer circumference of the substantially cylindrical portion in a flange shape are connected to the second member 10 of the head-side gantry 60 by the bolt B1.

Further, an annular wall 21b projects from the inner edge of the lower end (the lower end in Fig. 2) of the sleeve 21 toward the optical axis a side of the laser, and the optical fiber 22 is locked by the wall 21b. Thereby, by locking the optical fiber 22 to the wall 21b, the position of the optical fiber 22 with respect to the height direction of the sleeve 21 (vertical direction of FIG. 2) can be determined.

The optical fiber 22 is a member for transmitting laser light formed by a laser oscillator (not shown), and is composed of a flexible member. The outer diameter D1 of the portion (front end portion) of the optical fiber 22 that is fitted into the fitting hole 21a and the inner diameter D2 of the fitting hole 21a indicate the same position in the drawing, but the outer diameter D1 of the optical fiber 22 is set to be larger than the sleeve. The inner diameter D2 of the cylinder 21 is small in size value (D1 < D2) at which clearance fit is possible.

As shown in FIGS. 3 to 5, the piezoelectric stage 23 is a member for moving the condensing lens 25 relative to the sleeve 21 on a plane orthogonal to the optical axis a of the laser, and mainly includes fitting to the sleeve. The fixing member 23a in 21 and the piezoelectric actuator 23b fixed to the fixing member 23a by a bolt B2.

The fixing member 23a is a member for fixing the piezoelectric actuator 23b to the head side gantry 60, and mainly includes a cylindrical tubular portion 23a1 that is externally fitted to the outer circumference of the sleeve 21, and a cylindrical portion 23a1. The upper end protrudes and is fixed to the flange portion 23a2 of the piezoelectric actuator 23b by a bolt B2.

The piezoelectric actuator 23b is a member having a predetermined thickness and formed in a substantially quadrangular shape in plan view, and mainly includes a movable table portion 23b1 that is displaced in the longitudinal or lateral direction or obliquely, and has a rectangular shape formed in a substantially quadrangular shape and formed in a central portion thereof. The through hole 23b2 and the frame-shaped main body portion 23b3 which is disposed on the outer periphery of the movable table portion 23b1 and fixed to the fixing member 23a. Further, the piezoelectric stage 23 moves on a plane orthogonal to the optical axis a of the laser after the movement of the machining head 20 by the head side gantry 60 is completed.

Since the piezoelectric actuator 23b is integrally provided with respect to the flange portion 23a2 of the fixing member 23a, the movable table portion 23b1 can be fitted to the sleeve 21 that fits the tubular portion 23a1 of the fixing member 23a (will The head side gantry 60) to which the sleeve 21 is fixed is moved to constitute. In other words, the piezoelectric actuator 23b is fixed to the upper side of the head side gantry 60 as a fixed side, and the lower side of the lens holder 24 to be described later is a movable side, and the lens holder 24 holding the condensing lens 25 is fixed to the piezoelectric element. The movable side of the actuator 23b.

An electrode is provided on the piezoelectric actuator 23b, and a predetermined operation is applied to the lens holder 24 (concentrating lens 25) fixed to the movable side by applying a voltage. In other words, the movable table portion 23b1 is controlled to be displaced in a predetermined direction with respect to the fixing member 23a (sleeve 21) by applying a voltage. Further, since the piezoelectric stage 23 is driven by the piezoelectric actuator 23b, it is possible to move in a micron unit. By this means, the condensing lens 25 is minutely moved (moved) in the direction orthogonal to the optical axis a of the laser, so that a very small hole drilling process of an electronic component or the like can be performed.

As shown in FIGS. 4 and 5, the lens holder 24 is a member for attaching the collecting lens 25 to the piezoelectric stage 23, and is formed by four recesses 24e. Face the cross shape. The lens holder 24 mainly includes a lens holding portion 24a formed in a substantially cylindrical shape having an axial center L (see FIG. 6) as a portion for holding the collecting lens 25, and a clamp holding portion 24b (see FIG. 6) as a holding to The mounting portion 24c has a mounting hole 24c1 through which the bolt B3 is inserted, and a leg portion 24d that connects the mounting portion 24c and the lens holding portion 24a. The detailed configuration of the lens holding portion 24a and the jig holding portion 24b of the lens holder will be described later with reference to Fig. 6 .

Further, on the lens holder 24, the four leg portions 24d are formed in the same shape, and the four leg portions 24d are respectively mounted on the four sides of the transmission hole 23b2 of the piezoelectric actuator 23b. Since the width of the leg portion 24d is set to be smaller than the opening width of the transmission hole 23b2, there is a penetration portion that is not blocked by the lens holder 24 at the four corners of the transmission hole 23b2 of the piezoelectric actuator 23b. In the four through portions, a column member 27 that connects the sleeve 21 and the cover holder 26 is disposed in a state in which a gap is formed between the transmission hole 23b2 and the lens holder 24.

As shown in FIG. 4, the cover holder 26 is disposed below the lens holder 24 so that the assist gas injected from the auxiliary gas passage 28a, which will be described later, of the flow path member 28 does not flow into the collecting lens 25 side (below FIG. 4). The member is composed of a flange-shaped portion disposed to face the cross-shaped portion, and a cylindrical portion extending from the flange-like portion along the lens holding portion 24a (concentrating lens 25). A lens cover 26a is provided on the cylindrical portion. The assist gas introduced from the assist gas passage 28a flows into the lower space of the lens cover 26a through the periphery of the cylindrical portion of the cover holder 26.

As shown in FIGS. 4 and 5, the column member 27 connects the fixing member 23a fixed to the head side frame 60 (sleeve 21) to the lower cover bracket 26. The member, the one end of the column member 27 is fixed to the lower end surface of the cylindrical portion 23a1 of the fixing member 23a, and the other end is fixed to the upper surface of the flange-like portion of the cover holder 26. In addition, the fixing method may be any of a connecting member (not shown) such as an adhesive material or a bolt. However, when a connecting member such as a bolt is used, the column member 27 can be detachably fixed to the fixing member. Since the 23a and the cover holder 26 are attached to the cover holder 26, the attachment and detachment of the lens holder 24 for the purpose of maintenance of the condensing lens 25 can be easily performed.

Further, the column member 27 is disposed at the four corners of the transmission hole 23b2 so as not to interfere with the lens holder 24 and the transmission hole 23b2, and a gap is formed between the lens holder 24 and the transmission hole 23b2. Since the piezoelectric actuator 23b is used for, for example, a hole having a diameter of 200 μm or less, it is provided between the lens holder 24 and the column member 27, and between the transmission hole 23b2 and the column member 27, and the opening is processed. The gap corresponding to the maximum moving area of the lens holder 24 is brought.

The column member 27 is provided with a first tapered surface 27a at a corner portion opposed to the lens holder 24 (recessed portion 24e), and is also provided on the column member 27 at a corner portion opposed to the four corners of the transmission hole 23b2. There is a second tapered surface 27b.

As shown in FIG. 4, the flow path member 28 is a cylindrical member that is fitted to the upper portion of the cover holder 26 and provided along the shape of the lens holder 24, and an auxiliary gas passage 28a is formed in the cylindrical portion. When the high-pressure auxiliary gas is supplied to the auxiliary gas passage 28a from the gas supply device (not shown), the supplied auxiliary gas flows into the flow path member 28 (the lower space of the lens cover 26a) through the auxiliary gas passage 28a. The nozzle 29a, which will be described later, is throttled, whereby the portion to be cut of the workpiece W is intensively blown.

The processing table 4 is formed of a hollow cylindrical shape so as to be able to be The lower side of the workpiece W attracts the assist gas. The assist gas flows into the processing table 4 through the cut portion of the workpiece W, and is introduced into the square tube 30 by evacuation. Therefore, scum, splashing, and the like which are generated in accordance with the cutting process of the workpiece W are transported along with the flow of the assist gas, and are discharged through the square pipe 30.

The processing table 4 is provided with an adjustment nut member 22 rotatably with respect to the base 21 attached to the side of the square tube 30, and can adjust the position of the vertical adjustment tube 23 in the axial direction of the inside. A lower bracket 26 is provided above the upper and lower adjusting tubes 23 to which the springs 24 are loaded. The internal space of the lower bracket 26 is supplied with compressed air from an air pump (not shown), and the compressed air is blown upward from the cover member 27 made of porous sintered metal or ceramic. This is a structure for avoiding a situation in which air is blown from the cover member 27 to form an air layer between the workpiece W and the scum or slag is bitten into the workpiece W and the lower bracket 26. During the process, the workpiece W is damaged.

Since a suction hole (not shown) is provided in the lower bracket (not shown), a suction pressure is attracted by a suction device (not shown), and it becomes a negative pressure. Therefore, the assist gas that has been concentratedly sprayed on the cut portion of the workpiece W flows into the suction hole (not shown) of the processing table 40 (see FIG. 1) through the cut portion of the workpiece W, so that The molten material such as scum generated by the cutting of the workpiece W is passed from the suction hole (not shown) to the suction pipe provided on the processing table 40 (see FIG. 1 ) by the flow of the auxiliary gas ( Not shown) is sucked and discharged.

The upper bracket 29 is a cylindrical member that presses the cut portion of the workpiece W to be irradiated with laser light from above, and is formed by a cylindrical upper member that is fitted to the inner circumference of the flow path member 28 and larger than the upper member. a cylindrical lower part In the configuration, a nozzle 29a is disposed on a portion of the lower portion where the laser is concentrated. An opening 29a1 having a diameter of 600 μm is formed on the tip end of the nozzle 29a, and the focal point S of the laser beam passing through the opening 29a1 is set to 30 μm or less.

The piezoelectric stage 23 changes the focus S of the laser within the range of the opening 29a1 at the tip end of the nozzle 29a. Thereby, even in the case where the lens holder 24 can be moved with respect to the sleeve (upper holder 29), the moving area of the lens holder 24 is set by the piezoelectric actuator 23b so that the laser does not exceed the nozzle 29a. Since the opening portion 29a1 moves in the range, it is possible to reliably prevent the opening of the opening of the nozzle 29a from being burnt.

The lens holder 24 can move in micrometer units with respect to the sleeve 21 on a plane orthogonal to the optical axis a of the laser by the piezoelectric stage 23, so that it can be within the range of the opening 29a1 at the tip end of the nozzle 29a of the processing head 20. The laser range is changed within a very narrow range. Thereby, since high-precision machining can be performed, it is possible to perform very small hole drilling processing of an electronic component or the like. Further, on the lower surface side of the upper bracket 29 that is in sliding contact with the workpiece W, an arc-shaped slider 29b that is convex toward the lower side (the lower side in FIG. 4(a)) is attached. The slider 29b is configured such that the arc-shaped surface abuts on the workpiece W, and it is easy to slide on the workpiece W without causing scratches on the workpiece W.

The column member 27 connects the fixing member 23a on the head side gantry 60 side to the cover holder 26, and is disposed at the four corners of the transmission hole 23b2 so as not to interfere with the lens holder 24 and the transmission hole 23b2, so that the piezoelectric stage 23 can be configured. The member of the processing head 20 on the lower side (the cover holder 26, the flow path member 28 fitted to the cover holder 26, and the upper holder 29 fitted to the flow path member 28, hereinafter referred to as "lower side processing" The head constituent member ") is not supported relative to the sleeve 21 The piezoelectric stage 23 that is slightly changed (moved) is supported on the sleeve 21 that does not change, and the size of the processing head 20 can be reduced by utilizing the remaining space.

That is, when the processing head constituent member on the lower side is supported on the piezoelectric stage 23, the piezoelectric actuator 23b of the piezoelectric stage is not only the lens holder 24, but also the processing head constituent member on the lower side and the sleeve. 21 moves. Therefore, when the processing head constituent member on the lower side is supported by the piezoelectric stage 23, the mass of the member moved by the piezoelectric actuator 23b is increased by the amount of the processing head constituent member on the lower side, so that the piezoelectric actuator is actuated. The size of the device 23b is increased. Therefore, in order to reduce the mass of the member that is moved by the piezoelectric actuator 23b, it is preferable that the upper bracket 29 (the processing head constituent member on the lower side) is supported not on the lens holder 24 but on the head side gantry. 60 on.

When the processing head constituent member on the lower side is supported by the head-side gantry 60, a member (hereinafter referred to as a "support member") that couples the cover holder 26 to the head-side gantry 60 is surrounded by piezoelectric actuation. The outer periphery of the device 23b is formed. In this case, the support member is enlarged in the width direction (the horizontal direction in FIG. 4(a)) by the amount surrounding the outer circumference of the piezoelectric actuator 23b, and accordingly, the processing head 20 is also in the width direction (FIG. 4). (a) The left and right direction) is enlarged.

On the other hand, in the transmission hole 23b2 of the lens holder 24, a remaining space (a space which is not used for the arrangement of the lens holder 24) is formed at the four corners thereof. By arranging the support member (column member 27) at the four corners of the transmission hole 23b2, the support member (column member 27) connects the fixing member 23a on the head side gantry 60 side to the cover holder 26, and can be utilized. The column member 27 is disposed in the remaining space of the transmission hole 23b2 of the piezoelectric actuator 23b. Thus, there is no need to pack Since the support member is provided so as to surround the outer circumference of the piezoelectric actuator 23b, the size of the machining head 20 can be reduced. Thereby, when the machining head 20 itself is moved and processed, the machining head 20 can be brought closer to the end of the workpiece W (holding jig 41), and waste of material can be reduced.

Further, since the first tapered surface 27a is provided in the column member 27, it is possible to prevent interference between the lens holder 24 and the column member 27, and to provide the second tapered surface 27b opposed to the first tapered surface 27a. It is possible to prevent interference between the column member 27 and the transmission hole 23b2.

Next, the laser cutting (opening) processing using the laser cutting device 1 of the present embodiment will be described with reference to Figs. 1 to 4 . As shown in Fig. 1, first, after the workpiece W (see Fig. 2) is held in the processing table 40, the processing table 40 and the processing head 20 are placed on the XY plane and the UV plane based on the cutting data set in advance. The machining head 20 is moved relative to the workpiece W (refer to FIG. 2). Then, the workpiece W is lifted by the processing table 40, and the workpiece W is sandwiched between the upper holder 29 (see FIG. 3) of the processing head 20 and the lower holder (not shown) of the processing table 40.

As shown in FIG. 2 to FIG. 4, the laser beam that has been transported from the processing head 20 via the optical fiber 22 enters parallel light via a collimator lens (not shown) as shown in the drawing, and the laser light collected by the collecting lens 25 passes through the nozzle 29a. The opening portion 29a1 is irradiated onto the workpiece W. The workpiece W is partially and instantaneously melted by the heat input of the laser, and is cut (opened). At this time, the assist gas injected into the processing head 20 from the assist gas passage 28a at a high pressure flows into the lower space of the lens cover 26a, is throttled by the opening 29a1 of the nozzle 29a, and is concentrated toward the cut portion of the workpiece W. Blowing.

According to the laser cutting device 1, the laser beam is irradiated from the processing head 20 to perform predetermined cutting (opening) processing on the workpiece W, but the XY stage is operated in the cutting (opening) processing of a large shape. 50 (refer to FIG. 1), the machining head 20 is moved in parallel with respect to the sleeve 21 on the UV plane by the head side gantry 60 in the cutting process of a narrower range. Further, in the present embodiment, the machining is performed by changing the position of the laser focus S by the piezoelectric gantry 23 in a very small hole drilling process or the like of an electronic component or the like.

The machining control is performed by applying a predetermined operation to the electrode application voltage of the piezoelectric actuator 23b (piezoelectric element), and the movable table portion 23b1 moves relative to the sleeve 21, and the movable table portion 23b1 passes through the movable table portion 23b1 with respect to the sleeve 21. The movement of the lens holder 24 (the collecting lens 25 held by the lens holding portion 24a) moves (changes) on a plane orthogonal to the optical axis a. Thereby, the focal point S having a diameter of 30 μm or less is moved in the opening portion 29a1 at the tip end of the nozzle 29a (within a circle having a diameter of 600 μm), whereby the minute hole h is formed. In other words, by moving the position of the collecting lens 25 by the piezoelectric actuator 23b by a small amount, the position of the laser focus S irradiated to the workpiece W is moved, and the workpiece W is melted, thereby forming the specific nozzle 29a. The opening 29a1 at the distal end has a small hole h of a predetermined shape such as a circular shape.

According to the laser cutting device 1 of the present embodiment, only the lens holder 24 (concentrating lens 25) is moved by the piezoelectric actuator 23b in the processing head 20, and the micro hole h is opened, so that high speed can be performed. High precision machining. In other words, when the lens holder 24 is moved as compared with the entire movement of the processing head 20, the mass of the moving member is small and is not easily affected by the inertial force, so that high-speed and high-precision processing can be performed, and no processing is performed. Head 20 and being The wear of the workpiece W is also advantageous for high speed and high precision machining. Further, since the relatively small piezoelectric actuator 23b is used for the micromachining, the machining head 120 can be made lighter, and the machining of the machining head 20 can be performed at high speed and with high precision.

On the other hand, in the laser cutting process in a range larger than the processing of the micro holes h, the machining head 20 is fixed to the processing table 40 after the XY stage 50 (see FIG. 1) is stopped. The operation of the workpiece W moving on the UV plane. In this case, since the optical fiber 22 has flexibility, it can be flexed as the processing head 20 moves, and it is easy to correspond to the free movement of the processing head 20.

Here, since the shape of the micro hole h is formed by changing the irradiation direction of the laser light with respect to the laser variator by the condensing lens 25, the processing of the micro hole h to the workpiece W is performed by numerical calculation using a computer. Next, the center position of the condensing lens 25 that requires computer recognition coincides with the center position of the actual condensing lens 25 within a predetermined accuracy range. That is, it is necessary to irradiate the laser at the center of the collecting lens 25.

This is because, in the case where the laser light is irradiated at a position largely deviated from the center of the collecting lens 25, even if the collecting lens 25 performs a perfect circular motion with respect to the laser, the laser light refracted by the collecting lens 25 is opposed to The workpiece W is not drawn as a perfect circle but an ellipse (since the degree of refraction of the condensing lens 25 is larger from the center). This is because of the problem that the accuracy of the shape of the micro hole h to be processed is lowered.

On the other hand, in the present embodiment, the condensing lens 25 is performed by the jig holding portion 24b and the centering jig 30 of the lens holder 24 to be described later. The laser is irradiated to the center of the collecting lens 25 with respect to the positioning of the optical fiber 22. Thereby, the accuracy of the shape of the micro hole h to be processed is ensured. Further, a specific method of positioning the condensing lens 25 with respect to the optical fiber 22 will be described later with reference to FIG.

Next, a detailed configuration of the lens holding portion 24a and the jig holding portion 24b of the lens holder 24 will be described with reference to Fig. 6 . Fig. 6(a) is a front view of the lens holder 24, and Fig. 6(b) is a cross-sectional view of the lens holder 24 taken along line VIb-VIb of Fig. 6(a). In FIG. 6(b), a part of the lens holder 24 (the lens holding portion 24a and the holder holding portion 24b) is enlarged.

The lens holding portion 24a is a portion that protrudes from the intersecting portion of the cross shape of the lens holder 24 to the lower surface side (lower side in FIG. 6(b)), and is formed in a substantially cylindrical shape having an axial center L and an inner diameter D3. A lens insertion hole 24a1 that holds the condensing lens 25 is formed on the inner circumferential surface of the lens holding portion 24a.

The jig holding portion 24b is a portion that protrudes from the intersecting portion of the cross shape of the lens holder 24 to the upper surface side (upper side in FIG. 6(b)), and is formed in a substantially cylindrical shape having the axis L. The jig holding portion 24b includes a holding surface 24b1 having an inner peripheral surface thereof, an outer periphery 24b2 formed by the outer peripheral surface of the jig holding portion 24b, and a jig abutting surface 24b3 formed by an end surface interposed between the holding surface 24b1 and the outer periphery 24b2. And an abutting surface 24b4 orthogonal to the holding surface 24b1.

The holding surface 24b1 has an inner diameter D4 and is held by an engaging surface 33a (see FIG. 7) of a centering jig 30 to be described later. Further, the holding surface 24b1 has the same axis L as the lens fitting hole 24a1. Thereby, the center of the holding surface 24b1 coincides with the center of the collecting lens 25 held in the lens insertion hole 24a1. Further, since the jig holding portion 24b is formed in a substantially cylindrical shape having the axis L, it is secured. The cross-sectional shape of the holding surface 24b1 orthogonal to the axis L is formed in a substantially circular shape.

The outer circumference 24b2 is configured as an outer peripheral surface of the jig holding portion 24b, and corresponds to the "retaining surface formed on the outer circumference" described in Patent Application No. 4. In other words, when the outer circumference 24b2 of the jig holding portion 24b corresponds to the "holding surface", the inner circumference 33b of the centering jig 30 to be described later is fitted to the outer periphery 24b2 of the jig holding portion 24b (see Fig. 7).

The jig abutting surface 24b3 is a portion that abuts against the bracket abutting surface 32c (see FIG. 7) of the centering jig 30 to be described later, and is configured as a flat surface that is continuous with the holding surface 24b1 and the outer circumference 24b2. Further, the jig abutting surface 24b3 is constituted by a surface orthogonal to the axial center L direction of the jig holding portion 24b (the vertical direction of FIG. 6(b)).

Next, the structure of the centering jig 30 will be described with reference to Fig. 7 . 7(a) is a side view of the centering jig 30, and FIG. 7(b) shows a state in which the centering jig 30 and the lens holder 24 are fitted, and is a centering jig 30 and a lens holder including the respective axes L and L2. A cross-sectional view of 24. In addition, FIG. 7(b) illustrates a fitting portion of the centering jig 30 and the lens holder 24, and other portions are omitted.

As shown in Fig. 7 (a) and Fig. 7 (b), the centering jig 30 is a sleeve 21 for determining the lens holder 24 and the fitting optical fiber 22 (see Fig. 3) for holding the condensing lens 25 (refer to Fig. 3). The relative position of the member is a member that irradiates the laser toward the center of the collecting lens 25, and includes a cylindrical body portion 31 formed in a cylindrical shape, and a cylindrical sleeve insertion portion 32 formed to be smaller than the body portion 31. A cylindrical holder holding portion 33 that is smaller than the sleeve insertion portion 32 and a handle portion 34 that is coupled to the body portion 31 are formed.

As shown in Fig. 7 (a), the body portion 31 is fitted into the fitting hole 21a (see Fig. 3) of the sleeve 21 (see Fig. 3) in a state in which the gap portion is fitted with a gap, and is formed as one end. The side (the lower side in FIG. 7(a)) is open and has a bottomed substantially cylindrical shape of the axial center L2, and the outer diameter D5 thereof is set to be substantially the same as the outer diameter D1 (see FIG. 4) of the optical fiber 22 (D1). D5).

As shown in Fig. 7 (a), the sleeve insertion portion 32 is formed in a substantially cylindrical shape having an outer diameter D6, and is connected to the opening side (the lower side of Fig. 7 (a)) provided in the end portion of the body portion 31. The end portion of the end portion opposite to the end portion (the lower side in FIG. 7) connected to the body portion 31 includes a bracket abutting surface 32c, and the bracket abutting surface 32c is configured to be positive with the shaft center L2. A flat, flat surface that intersects. Further, the sleeve insertion portion 32 has the same axis L2 as the body portion 31.

As shown in FIG. 7(a), the holder holding portion 33 is formed in a substantially cylindrical shape having an outer diameter D7, and is connected to the end portion of the sleeve insertion portion 32 opposite to the side to which the body portion 31 is connected. The end portion (on the left side of FIG. 7) includes an engagement surface 33a configured as an outer circumferential surface, an inner circumference 33b configured as an inner circumferential surface, and an end surface 33c interposed between the engagement surface 33a and the inner circumference 33b. Further, the holder holding portion 33 has the same axis L2 as the body portion 31. In addition, since the holder holding portion 33 has the same axial center L2 as the body portion 31 and is formed in a substantially cylindrical shape, the cross-sectional shape of the engagement surface 33a formed by the outer peripheral surface of the holder holding portion 33 orthogonal to the axial center L2 is formed. It is roughly circular.

As shown in FIGS. 7(a) and 7(b), the body portion 31 of the centering jig 30 is gap-fitted in the fitting hole 21a (refer to FIG. 3) of the sleeve 21, and the holder holding portion 33 is clearance-fitted to the jig. In the holding portion 24b, the engaging surface 33a is held by the holding surface 24b1, whereby the center of the fitting hole 21a coincides with the center of the collecting lens 25.

Further, the outer diameter D7 of the engagement surface 33a is set to a size value (D7 < D4) which is smaller than the inner diameter D4 of the holding surface 24b1 (refer to FIG. 6(b)). Thereby, the holder holding portion 33 is fitted into the clip holding portion 24b, and the holding surface 24b1 of the lens holder 24 can be held by the engaging surface 33a of the centering jig 30.

Further, the outer diameter D7 of the holder holding portion 33 is smaller than the outer diameter D6 of the sleeve insertion portion 32 (D7 < D6), and the outer diameter D6 of the sleeve insertion portion 32 is made larger than that of the body portion 31. A small value of the outer diameter D5 (D6 < D5). Further, the body portion 31, the sleeve insertion portion 32, and the holder holding portion 33 are integrally formed.

Further, a bracket abutting surface 32c is formed on the end portion of the sleeve insertion portion 32 by an amount of difference between the outer diameter D7 of the bracket holding portion 33 and the outer diameter D6 of the sleeve insertion portion 32, and the bracket abutting surface The inner diameter of the bracket 32c is the same as the outer diameter D7 of the bracket holding portion 33, and the outer diameter of the bracket abutting surface 32c is the same as the outer diameter D6 of the sleeve insertion portion 32. Thereby, when the holder holding portion 33 is fitted into the jig holding portion 24b, the holder abutting surface 32c can be brought into contact with the jig abutting surface 24b3.

Here, in the present embodiment, since the cross-sectional shape of the engaging surface 33a of the centering jig 30 is formed in a substantially circular shape, the cross-sectional shape of the holding surface 24b1 of the lens holder 24 is formed into a substantially circular shape, so regardless of the centering jig 30 The orientation of the circumferential direction is the same, and the holding surface 24b1 of the lens holder 24 can be held by the engaging surface 33a of the centering jig 30.

In other words, the centering jig 30 can be inserted into the fitting hole 21a of the sleeve 21 (see FIG. 3) fixed to the head side gantry 60 (see FIG. 3) regardless of the circumferential direction of the centering jig 30. The holding surface 24b1 of the lens holder 24 is held by the engaging surface 33a of the centering jig 30.

Therefore, it is easy to hold the holding surface 24b1 of the lens holder 24 by the holder holding portion 33 of the centering jig 30, and the amount of work for attaching the lens holder 24 to the laser cutting device 1 can be omitted. As a result, the efficiency of the mounting work of the lens holder 24 to the piezoelectric stage 23 can be improved.

Further, the jig abutting surface 24b3 is configured as a surface that is connected to the holding surface 24b1 of the jig holding portion 24b, and is disposed in a virtual arrangement direction (upward and downward direction in FIG. 3) along the fitting hole 21a (see FIG. 3). Since the plane is orthogonal, the holder abutting surface 32c of the centering jig 30 inserted into the fitting hole 21a abuts against the jig abutting surface 24b3 of the jig holding portion 24b, so that the centering jig 30 can be opposed to the lens holder. 24 is fixed in a stable state.

For example, in the case where the structure in which the jig abutting surface 24b3 is omitted is formed, the contact area of the centering jig 30 and the lens holder 24 becomes small, and the centering jig 30 is not fixed to the lens holder 24, and the lens holder is attached. When the centering jig 30 is held by the operator, the operator must maintain the malfunction of the lens holder 24.

On the other hand, in the present embodiment, the centering jig 30 is provided with the jig abutting surface 24b3, and the holder abutting surface 32c of the centering jig 30 inserted into the fitting hole 21a abuts against the jig. Since the surface 24b3 is provided, the operator can fix the centering jig 30 to the lens holder 24 without holding the centering jig 30. Thus, when the centering jig 30 is fitted to the lens holder 24, the workload of the operator can be saved, and the efficiency of the mounting work of the collecting lens 25 (see FIG. 3) can be improved.

Further, the thickness dimension value of the lens holder 24 (the dimension value in the up-and-down direction of FIG. 6(b)) is larger than the depth dimension value of the fitting hole 21a (refer to FIG. 3). (the dimension value in the vertical direction of FIG. 3) is small, so that it is difficult for the lens holder 24 to sufficiently ensure the size value of the engagement amount with the centering jig 30 (the dimensional value in the fitting direction of the jig holding portion 24b) (FIG. 7(b) The size value in the up and down direction).

In the case where the centering jig 30 is fixed (positioned) to the sleeve 21 (refer to FIG. 3) by bringing the body portion 31 of the centering jig 30 into contact with the wall 21b of the sleeve 21, by making the lens holder 24 The lens holder 24 is fitted to the centering jig 30 with respect to the centering jig 30 fixed to the sleeve 21 moving upward (above FIG. 7(b)). In this case, since a gap is provided between the lens holder 24 and the centering jig 30, if the size value of the engagement amount of the lens holder 24 with the centering jig 30 cannot be sufficiently ensured, the lens holder 24 is made When the centering jig 30 is fitted, the lens holder 24 is easily inclined with respect to the centering jig 30, and the mounting accuracy of the lens holder 24 is lowered.

On the other hand, in the present embodiment, the body portion 31 of the centering jig 30 is brought into contact with the wall 21b of the sleeve 21 (see FIG. 3), and the centering jig 30 is not opposed to the sleeve 21. By fixing, the holder abutting surface 32c of the centering jig 30 inserted into the fitting hole 21a (see FIG. 3) abuts against the jig abutting surface 24b3 of the lens holder 24, and fixes (positions) the lens holder 24 to Centering clamp 30. Thereby, the holder abutting surface 32c of the centering jig 30 abuts against the jig abutting surface 24b3 of the lens holder 24 (the gap between the lens holder 24 and the centering jig 30 is eliminated), and can be separated from the axis L The orthogonal jig abutting surface 24b3 and the bracket abutting surface 32c orthogonal to the axis L2 reduce the inclination of the lens holder 24 with respect to the centering jig 30. As a result, an improvement in the mounting accuracy of the lens holder 24 can be achieved.

The handle portion 34 is an operator who is moving the centering clamp 30 to the sleeve 21 (see 3) The portion held at the time of insertion includes a grip portion 34a having an outer diameter substantially the same as that of the body portion 31. Thus, by setting the length of the grip portion (the dimension value in the left-right direction of FIG. 7) to about half the length of the body portion 31, when the grip portion 34a and the body portion 31 are made of the same material, The weight balance of the core jig 30 is improved, and the insertion into the fitting hole 21a (see FIG. 3) of the sleeve 21 can be stably performed. Thereby, the efficiency of the mounting work of the condensing lens 25 can be improved.

Since the lens holder 24 is formed on the inner circumference of the holder holding portion 24b, the condensing lens 25 held on the lens holding portion 24a can be formed in comparison with the case where the holding surface 24b1 is formed on the outer circumference of the holder holding portion 24b. Large size.

In other words, since the body portion 31 of the centering jig 30 is formed in the same shape as the optical fiber 22 (see FIG. 3) (the size of the centering jig 30 is set constant), the centering portion 24b1 of the jig holding portion 24b is fitted to the centering portion. The engagement surface 33a of the jig 30 is set to a constant size based on the optical fiber 22. Here, since the holding surface 24b1 is formed on the inner circumference of the jig holding portion 24b of the lens holder 24, the engaging surface 33a of the centering jig 30 is embedded in the inner circumference of the jig holding portion 24b. On the other hand, when the holding surface 24b1 is formed on the outer circumference of the jig holding portion 24b, the engaging surface 33a of the centering jig 30 is externally fitted on the outer circumference of the jig holding portion 24b.

Thus, if the size of the engaging surface 33a of the centering jig 30 is constant, the holding surface 24b1 is formed on the inner circumference of the jig holding portion 24b (the engaging surface 33a of the centering jig 30 is fitted in the jig holding portion 24b) The case of the inner circumference) and the holding surface 24b1 are formed on the outer circumference of the jig holding portion 24b (centering jig) The clamp holding portion 24b can be made larger than the case where the engaging surface 33a of the 30 is fitted to the outer periphery of the clamp holding portion 24b. Therefore, the inner diameter D4 of the holding surface 24b1 can be set large. Therefore, since the lens insertion hole 24a1 can also be enlarged, the condensing lens 25 embedded in the lens insertion hole 24a1 can also be enlarged.

Finally, a procedure for attaching and detaching the lens holder 24 that houses the condensing lens 25 to the laser cutting device 1 will be described with reference to FIG. 8(a) is a partial cross-sectional view showing the processing head 20 in a state in which the lens holder 24 is attached, and FIG. 8(b) is a partial cross-sectional view showing the processing head 20 in a state in which the lens holder 24 is removed. Further, Fig. 8(c) is a partial cross-sectional view showing the processing head 20 in a state in which the lens holder 24 is fitted to the centering jig 30 inserted into the sleeve 21, and Fig. 8(d) shows the attachment and removal. A partial cross-sectional view of the processing head 20 in the state of the lens holder 24.

First, as shown in Fig. 8(a), when the power switch of the laser cutting device 1 (see Fig. 1) is turned on, the piezoelectric stage 23 is moved to the original position (the optical fiber 22 is aligned with the center of the collecting lens 25). s position). In a state where the piezoelectric stage 23 is moved to the origin position, the optical fiber 22 is pulled out from the fitting hole 21a of the sleeve 21, and the lower processing head constituent member is detached from the piezoelectric stage 23. In addition to this, the lens holder 24 is detached from the piezoelectric stage 23. As a result, the processing head 20 is in the state shown in Fig. 8(b).

Next, in the processing head 20 in the state shown in FIG. 8(b), the maintenance condenser lens 25 is housed in the lens holder 24, and the lens holder 24 accommodating the held condenser lens 25 is temporarily attached by the bolt B2. It is fixed to the piezoelectric stage 23. And, the centering jig 30 is inserted into the fitting hole 21a of the sleeve 21, and the branch is The holder holding portion 33 (see FIG. 7) is fitted into the holder holding portion 24b (see FIG. 6(b)) of the lens holder 24.

Then, the state in which the centering jig 30 is inserted in the sleeve 21 is maintained, and the lens holder 24 is officially fastened to the piezoelectric stage 23. As a result, the processing head 20 is in the state shown in Fig. 8(c). Thereby, the mounting position of the lens holder 24 to the sleeve 21 is determined, and as a result, the mounting position of the condensing lens 25 to the optical fiber 22 is determined.

Next, in the machining head 20 in the state shown in FIG. 8(c), the centering jig 30 is pulled out from the sleeve 21, and the optical fiber 22 is inserted into the sleeve 21. Further, the processing head constituent member on the lower side is attached to the piezoelectric stage 23. As a result, the processing head 20 is in the state shown in FIG. 8(d), and the mounting operation of the collecting lens 25 is completed.

In the present embodiment, as shown in FIGS. 6 to 8, the outer diameter D1 (see FIG. 2) of the optical fiber 22 and the outer diameter D5 (see FIG. 4) of the centering jig 30 are set to be substantially the same, so that the insertion can be performed. The hole of the centering jig 30 is used in combination with the hole into which the optical fiber 22 is inserted, and the optical fiber 22 can be detachably inserted into the fitting hole 21a. For example, in the case where the hole for inserting the centering jig 30 and the fitting hole 21a are separately provided, the manufacturing cost of the laser cutting device 1 is increased by the amount of work for processing the plurality of parts in order to provide the hole. Bad condition.

On the other hand, in the present embodiment, the centering jig 30 is inserted into the fitting hole 21a of the insertion optical fiber 22 to perform positioning. That is, the hole into which the centering jig 30 is inserted is used in combination with the hole into which the optical fiber 22 is inserted. Therefore, a dedicated hole for inserting the centering jig 30 can be eliminated. Thereby, the amount of work of the hole machining can be omitted, and the manufacturing cost of the laser cutting device 1 can be reduced.

In addition, a separate centering clip 21a is provided for inserting the centering clip. In the case of a hole having 30 holes, a portion for arranging the holes is required, and in order to provide such a portion, a plurality of components are enlarged, and there is a problem that the size of the laser cutting device 1 is increased.

On the other hand, in the present embodiment, as described above, the hole into which the centering jig 30 is inserted is used for the hole into which the optical fiber 22 is inserted. Therefore, the hole for inserting the centering jig 30 is not required, and the portion for arranging the hole can be omitted. Thereby, the size of the laser cutting device 1 can be reduced.

Further, in the case where the hole for inserting the centering jig 30 is additionally provided with the fitting hole 21a, the machining error amount of the hole for the centering jig 30 is separated from the position of the centering jig 30 with respect to the fitting hole 21a. If the difference is small, the mounting accuracy of the condensing lens 25 to the fitting hole 21a is lowered.

On the other hand, in the present embodiment, since the centering jig 30 is inserted into the fitting hole 21a of the insertion optical fiber 22, the positioning of the collecting lens 25 with respect to the optical fiber 22 is performed, so that the centering jig 30 and the optical fiber 22 can be The same benchmark is assigned. Thereby, the assembly accuracy of the lens holder 24 to the fitting hole 21a is improved, so that the assembly precision of the condensing lens 25 with respect to the optical fiber 22 can be improved.

Further, the laser cutting device 1 of the present embodiment includes a jig holding portion 24b having a holding surface 24b1 formed on the inner circumference thereof, the holding surface 24b1 having a concentric shape with a cross-sectional shape of the lens fitting hole 24a1. Section shape. Thus, by holding the holding surface 24b1 formed on the inner circumference of the jig holding portion 24b of the lens holder 24 by the centering jig 30 inserted in the fitting hole 21a, the fitting hole 21a and the lens fitting hole 24a1 can be made. The position is the same.

For example, in the case where the hole for inserting the centering jig 30 and the lens insertion hole 24a1 are additionally provided on the lens holder 24, since the hole is relatively transparent Since the position of the in-mirror fitting hole 24a1 is deviated from the machining error of the hole, the mounting accuracy of the collecting lens 25 to the fitting hole 21a is lowered.

On the other hand, in the present embodiment, the jig holding portion 24b (see FIG. 3) concentric with the lens insertion hole 24a1 (see FIG. 3) in which the condensing lens 25 is fitted is held by the centering jig 30 to perform positioning. Therefore, the processing reference can be made the same in accordance with the concentricity.

Thereby, the machining error of the jig holding portion 24b with respect to the lens inner fitting hole 24a1 can be reduced. As a result, the assembly accuracy of the lens holder 24 with respect to the fitting hole 21a is improved, and the assembly precision of the condensing lens 25 with respect to the optical fiber 22 can be improved.

As described above, the piezoelectric stage 23 is moved to a predetermined position (defined as a position where the position of the optical fiber 22 and the collecting lens 25 coincides with the position of the condensing lens 25, and the origin position) with respect to the head side gantry 60, and is moved to the origin position. When the lens holder 24 is attached to the piezoelectric stage 23, the centering jig 30 inserted into the fitting hole 21a of the sleeve 21 is fitted to the holder holding portion 24b of the lens holder 24, thereby being unique The position of the lens holding portion 24a with respect to the sleeve 21 (the fitting hole 21a) is determined.

In other words, by fitting the centering jig 30 to the jig holding portion 24b of the lens holder 24, the center of the fitting hole 21a can be aligned with the axis L of the lens holding portion 24a, so that the lens holding portion 24a can be uniquely determined. At the position of the sleeve 21 (fitting hole 21a). Thus, by the fitting state of the centering jig 30 and the jig holding portion 24b of the lens holder 24, the center of the fitting hole 21a of the sleeve 21 (the optical axis a of the optical fiber 22) and the lens holding portion 24a can be made. The lens holder 24 is attached to the piezoelectric stage 23 in a state where the axis L is aligned.

Therefore, the lens holder 24 can be attached to the piezoelectric stage 23 without confirming the irradiation position of the laser to the workpiece W, and the dispersion of the mounting accuracy due to the adjustment work performed after confirming the irradiation position can be eliminated. . As a result, the workload of mounting the condensing lens 25 (lens holder 24) can be eliminated, and the efficiency of mounting the condensing lens 25 can be improved, and the mounting accuracy of the condensing lens 25 can be made constant.

When the column member 27 is inserted into the gap formed at the four corners of the transmission hole 23b2 by the first tapered surface 27a and the second tapered surface 27b, interference between the column member 27 and the transmission hole 23b2 of the lens holder can be prevented, and When the centering jig 30 is fitted to the holding surface 24b1 of the jig holding portion 24b, interference between the centering jig 30 and the column member 27 can be prevented. Therefore, the work of inserting the column member 27 into the gap formed at the four corners of the transmission hole 23b2 and the work of fitting the centering jig 30 to the holding surface 24b1 of the jig holding portion 24b can be improved.

The present invention has been described above based on the embodiments, but the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

For example, the numerical values (for example, the number and size of each structure, etc.) mentioned in the above embodiment are examples, and of course, other numerical values can be employed.

Further, although the mechanism for slightly changing the lens holder 24 that accommodates the condensing lens 25 is described as the piezoelectric actuator 23b, the above-described mechanism is not limited to the piezoelectric actuator 23b, and other movable mechanisms may be used. For example, it can also be a voice coil.

In the above embodiment, the laser focus S is moved in the opening 29a1 at the tip end of the nozzle 29a, but there is no conventional example as shown in Fig. 9. In the case of the tip end sealing member 110 of the nozzle 29a, the laser focus S may be moved in the opening.

Further, in the above embodiment, the condensing lens 25 held on the lens holder 24 is positionally adjusted in the direction orthogonal to the optical axis a of the laser, but the positional adjustment is not limited to the optical axis a of the laser. In the intersecting direction, the position adjustment may be performed in a direction parallel to the optical axis a of the laser.

Further, the processing head 20 and the condensing lens 25 may be moved (varied) by the piezoelectric gantry 23 by the head gantry 60, but only one of them may be used. In other words, the processing head 20 may be moved by the head side gantry 60, but the condensing lens 25 may not be moved by the piezoelectric gantry 23, or the processing head 20 may be moved without passing through the head side gantry 60 but may be passed through the piezoelectric The gantry 23 moves the condensing lens 25. Thereby, the structure of the laser cutting device 1 can be simplified.

Furthermore, in the above-described embodiment, the case where the engagement surface 33a of the holder holding portion 33 is held by the holding surface 24b1 which is the inner peripheral surface of the jig holding portion 24b and the centering jig 30 holds the lens holder 24 is described. However, the bracket holding portion 33 may be configured as a groove that is recessed in the annular shape by being recessed in the sleeve insertion portion 32 of the centering jig 30. In this case, the holder holding portion 33 can hold both the holding surface 24b1 and the outer circumference 24b2. Thereby, the centering jig 30 can stably hold the lens holder 24.

In the above embodiment, the bracket holding portion 33 and the sleeve insertion portion 32 are configured to have a substantially cylindrical shape having the same axial center, and the outer diameter D7 of the bracket holding portion 33 is set to be larger than the sleeve insertion portion 32. In the case where the outer diameter D6 is small, the size is not limited thereto. For example, the engagement surface 33a of the holder holding portion 33 may be configured to be smaller in a direction away from the sleeve insertion portion 32. The side of the frustum.

In this case, the centering jig 30 can hold the jig holding portion 24b in a state where there is no gap in the radial direction of the holder holding portion 24b and the holder holding portion 33 (the gap is fitted with a certain gap for fitting). Thereby, when the lens holder 24 is held by the centering jig 30, no gap is formed between the jig holding portion 24b and the holder holding portion 33, so that the mounting of the lens holder 24 with respect to the fitting hole 21a can be correspondingly reduced. difference. As a result, the assembly accuracy of the lens holder 24 with respect to the fitting hole 21a is improved, and the assembly precision of the condensing lens 25 with respect to the optical fiber 22 can be improved.

In other words, the combination of the shape in which the radial gap is not formed between the jig holding portion 24b and the holder holding portion 33 when the lens holder 24 is held by the centering jig 30 can realize the condensing lens 25 for the optical fiber 22. Increased assembly accuracy. Both or one of the faces on which the jig holding portion 24b abuts against the holder holding portion 33 may be formed in a side shape of a truncated cone and the axes of the truncated cones may coincide.

Further, although the case where the holding surface 24b1 of the jig holding portion 24b is held by the engagement surface 33a of the holder holding portion 33 has been described, the present invention is not limited thereto, and the inner circumference 33b of the centering jig 30 may be configured. The diameter of the large gap fit amount with respect to the outer circumference 24b2 of the clamp holding portion 24b is set, and the outer circumference 24b2 of the clamp holding portion 24b is held by the inner circumference 33b of the centering jig 30.

In this case, the shape of the body portion 31 that can hold the centering jig 30 on the outer circumference 24b2 of the jig holding portion 24b is formed (the inner circumference 33b of the centering jig 30 is set to have a large clearance amount with respect to the outer circumference 24b2). The outer shape 24b2 is held by the inner circumference 33b of the centering jig 30.

When the outer circumference 24b2 of the jig holding portion 24b is held by the inner circumference 33b of the centering jig 30, the wear amount is generated even if the holder holding portion 33 and the jig holding portion 24b are in contact with each other, because the outer peripheral surface side of the jig holding portion 24b is present. Since the amount of wear occurs, it is possible to prevent the amount of wear from adhering to the collecting lens 25 disposed on the inner peripheral surface side of the jig holding portion 24b.

In the above embodiment, the case where the condensing lens 25 is configured as a convex lens has been described. However, the condensing lens 25 is not necessarily limited thereto, and may be configured as a lens group in which a plurality of lenses are combined.

In this case, the lens group can be held by changing the shape of the lens holder 24 to a shape corresponding to the shape of the lens group. Further, the positioning of the lens holder 24 with respect to the sleeve 21 can be performed by forming the shape of the centering jig 30 into a shape that can be fitted to the lens holder 24.

In the above embodiment, the lens abutting surface 32c of the centering jig 30 inserted into the fitting hole 21a (see FIG. 3) is abutted against the jig abutting surface 24b3 of the lens holder 24, and the lens is attached. The bracket 24 is fixed (positioned) with respect to the centering jig 30. However, the lens holder 24 may be opposed to the centering jig by abutting the end surface 33c of the centering jig 30 against the abutting surface 24b4 of the lens holder 24. 30 fixed (positioning).

Since the abutting surface 24b4 that the abutting end surface 33c of the centering jig 30 abuts is orthogonal to the holding surface 24b1, the end surface 33c on the insertion side of the centering jig 30 abuts against the abutting surface 24b4 of the jig holding portion 24b. In this way, the inclination of the lens holder 24 with respect to the centering jig 30 can be reduced, and the mounting accuracy of the lens holder 24 can be improved. In addition, on the insertion side of the centering jig 30 When the end surface 33c abuts on the abutting surface 24b4 of the clamp holding portion 24b, it is preferable to set a gap between the bracket abutting surface 32c of the centering jig 30 and the jig abutting surface 24b3 of the lens holder 24. Since the dimensional tolerance of the centering jig 30 and the lens holder 24 can be absorbed by this gap, the mounting accuracy of the lens holder 24 can be improved. Thereby, since the mounting accuracy of the lens holder 24 is improved, the adjustment of the mounting accuracy of the centering jig 30 with respect to the lens holder 24 is not required, so that the efficiency of the mounting work of the lens holder 24 can be improved and the collecting lens 25 can be improved. The positional accuracy becomes constant.

1‧‧‧Laser cutting device

2‧‧‧Support parts

3‧‧‧Protruding

4‧‧‧1st linear motion bearing (part of the head movable mechanism)

4a‧‧‧ Track

4b‧‧‧slider

5‧‧‧Part 1 (part of the head movable mechanism)

6‧‧‧1st drive mechanism (part of the head movable mechanism)

6a‧‧‧Fixed parts

6b‧‧‧ movable parts

8‧‧‧Protruding

9‧‧‧2nd linear motion bearing (part of the head movable mechanism)

10‧‧‧Part 2 (part of the head movable mechanism)

12, 23a1‧‧‧ tubular section

20‧‧‧Processing head

21‧‧‧Sleeve

21a‧‧‧ fitting holes

21b‧‧‧ wall

22‧‧‧ fiber

23‧‧‧Piezoic gantry (lens movable mechanism)

23a‧‧‧Fixed parts (part of the lens movable mechanism)

23b‧‧‧ Piezoelectric actuator (part of the lens movable mechanism)

23b2‧‧‧through hole

23a2‧‧‧Flange

24‧‧‧ lens holder

25‧‧‧ Concentrating lens

26‧‧‧ Cover bracket

26a‧‧‧ lens cover

27, 29‧‧‧ column parts

28‧‧‧Flow components

28a‧‧‧Auxiliary gas path

29a‧‧‧Nozzles

29b‧‧‧Sliding parts

60‧‧‧ head side gantry (head movable mechanism)

A‧‧‧ optical axis

B1, B2‧‧‧ bolts

W‧‧‧Processed objects

Claims (7)

A laser processing machine includes a processing head having a collecting lens for collecting laser light and a nozzle for discharging an auxiliary gas to an irradiation portion of the laser beam to be processed, wherein the processing head is disposed in the processing The workpiece is held under the head, and the laser beam condensed by the condensing lens is irradiated from the opening of the nozzle tip of the processing head to process the workpiece, and is characterized in that it includes a support member and a head movable a mechanism interposed between the support member and the processing head to move the processing head on a plane orthogonal to the optical axis of the laser with respect to the support member; and the processing head is opposed to the processing head by the head movable mechanism The workpiece is moved on the plane to process the workpiece. The laser processing machine according to claim 1, wherein the processing head comprises: an optical fiber for transmitting the laser; and a sleeve having a fitting hole for fitting the optical fiber, which is suspended by the head movable mechanism; the lens is movable a mechanism suspended on the sleeve to move the concentrating lens relative to the sleeve on a plane orthogonal to the optical axis of the laser; and the focus of the laser is on the processing head by the lens movable mechanism The workpiece is processed within a range of the opening of the nozzle tip. The laser processing machine according to claim 2, wherein the above-mentioned laser processing machine The mirror movable mechanism includes a through hole formed in the central portion; the processing head includes: the lens holder having a lens holding portion for accommodating the condensing lens, and is mounted on the lens in a state of forming a gap with the through hole The movable mechanism is configured to be movable relative to the sleeve by the lens movable mechanism; and the column member is configured to move the lens holder to a plane orthogonal to the optical axis of the laser with respect to the sleeve by the lens movable mechanism In the case of moving, it is inserted into the gap so as not to interfere with the lens holder; and the lower side member of the member constituting the processing head is supported by the sleeve by the column member. The laser processing machine according to claim 2, wherein the processing head includes a lens holder, and the lens holder is detachably attached to the lens movable mechanism, and is accommodated by the lens movable mechanism with respect to the above a concentrating lens that moves the sleeve; the lens holder includes: a lens insertion hole configured to be a through hole in which the condensing lens is embedded; and a clamp holding portion that forms a holding surface on the inner circumference or the outer circumference, the holding surface having a cross-sectional shape of the lens-embedded hole having a concentric cross-sectional shape; the optical fiber being detachably fitted into the fitting hole of the sleeve, the optical fiber being detached from the fitting hole, and the detached optical fiber A centering jig of the same shape of the optical fiber is mounted in the fitting hole, and the holding surface is held on the centering jig to position the lens holder relative to the sleeve. The laser processing machine of claim 2, wherein the adding The forehead includes a through hole formed in a central portion of the lens movable mechanism, and the lens holder has a lens holding portion that accommodates the condensing lens, and is detachably mounted in a state in which a gap is formed between the forcing hole and the through hole. The lens movable mechanism is configured to be movable relative to the sleeve by the lens movable mechanism; and the column member is orthogonal to the optical axis of the laser with respect to the sleeve by the lens movable mechanism In the case of moving in a plane, it is inserted into the gap so as not to interfere with the lens holder; and the lower side member of the member constituting the processing head is supported by the sleeve by the column member; the lens The bracket includes: a lens insertion hole formed as a through hole in which the condensing lens is embedded; a clamp holding portion that forms a holding surface on the inner circumference or the outer circumference, the holding surface having a concentric shape with a cross-sectional shape of the lens insertion hole a cross-sectional shape; the optical fiber is detachably fitted into the fitting hole of the sleeve, and the light is passed through the fitting hole Remove the centering clamp mounted above the same shape as the optical fiber is removed to the fitting hole, the holding surface of the holding jig on the centering of the lens holder described above with respect to the positioning sleeve. The laser processing machine according to claim 4, wherein the holding surface is formed on an inner circumference of the jig holding portion. The laser processing machine according to the fourth aspect of the invention, wherein the clamp holding portion has an end surface on the insertion side of the centering jig that abuts against a contact surface orthogonal to the holding surface.