CN109014621A - A kind of micro hole laser drilling device of superhard material - Google Patents
A kind of micro hole laser drilling device of superhard material Download PDFInfo
- Publication number
- CN109014621A CN109014621A CN201811252257.0A CN201811252257A CN109014621A CN 109014621 A CN109014621 A CN 109014621A CN 201811252257 A CN201811252257 A CN 201811252257A CN 109014621 A CN109014621 A CN 109014621A
- Authority
- CN
- China
- Prior art keywords
- fixed
- main shaft
- pneumatic main
- superhard material
- platform
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
- B23K26/402—Removing material taking account of the properties of the material involved involving non-metallic material, e.g. isolators
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to the micro hole laser drilling fields of superhard material, the micro hole laser drilling device of in particular a kind of superhard material, including marble platform, marble crossbeam is fixed on the end face of the marble platform, center on the marble crossbeam is fixed with accurate Z axis, the optical path of the upper vertical and fixed all aluminum material of precision Z axis sliding, the laser angle of the optical path transmitting can deflect at a high speed, high magnification CCD camera is fixedly mounted in the optical path side, precision XY linear drives platform is fixedly mounted in the marble platform, the precision XY linear drives platform is below optical path, the jig with angled adjustment is installed and fixed on the precision XY linear drives platform, the jig clamps and fixes the high rotating accuracy pneumatic main shaft of ultrahigh rotating speed.The present invention solves the problems, such as superhard material capillary processing, and punching aperture precision is high, processes impulse- free robustness, is not necessarily to post-processing.
Description
Technical field
The present invention relates to the micro hole laser drilling field of superhard material, specially a kind of micro hole of superhard material
Laser drilling device.
Background technique
At present for superhard material (including diamond, diamond, polycrystalline diamond, boron nitride, aluminium oxide ceramics, nitrogen
Change aluminium ceramics etc.) micro hole machining, mainly laser processing and electric spark.Existing superhard material laser micro hole machining master
If laser drawing mould processing technology, machining accuracy is not high, and roughness is poor, subsequent to need to do ultrasonic grinding and wire drawing grinding,
Taper hole can only be processed and be not capable of processing straight hole.In addition superhard material laser micro hole machining, external dedicated five axis ultrafast laser add
Construction equipment, can process straight hole and taper hole, and minimum aperture can accomplish 20 μm, but excessively high ten thousand or more the RMB500 of cost.Electric spark
Straight hole and taper hole can be processed in processing, is not capable of processing non electrically conductive material, and the hole of very difficult 30 μm of < of processing.Electric spark is straight
It is fast to connect punching rate, precision is low；Slow wire feeding cuts hole, needs to process pre-punching, and precision is high, and speed is very slow, processes aperture >
0.5mm.The present invention is used for the micro hole machining of superhard material, and straight hole and taper hole can be processed, and aperture precision ± 0.005mm is minimum
10 μm of aperture <, straight hole aspect ratio > 10:1.And existing laser beam perforation technique, positioning accuracy are insufficient, process bad straight hole, hole
Diameter is bigger than normal, and the ablation serious later period wants burr, pickling.Micro-Machining on EDM, micro hole is unstable, and processing efficiency is low.
In conclusion the present invention proposes a kind of micro hole laser drilling device of superhard material to solve the problems, such as to exist.
Summary of the invention
The purpose of the present invention is to provide a kind of micro hole laser drilling devices of superhard material, to solve above-mentioned background skill
The problem of being proposed in art.
To achieve the above object, the invention provides the following technical scheme:
A kind of micro hole laser drilling device of superhard material, including marble platform, it is solid on the end face of the marble platform
Surely it is equipped with marble crossbeam, the center on the marble crossbeam is fixed with the first driving motor, first driving
The first driving motor fixed plate is fixed with below motor, the first driving motor fixed plate is fixedly connected on marble cross
Liang Shang, the driving end of first driving motor are fixedly connected with the first precise ball screw and consolidate through the first driving motor
Fixed board on first precise ball screw and is located at below the first driving motor fixed plate and is threaded with accurate Z axis,
The precision Z axis is slidably connected Z axis sliding slot, and the Z axis sliding slot is fixedly connected on marble crossbeam, the precision Z axis it is another
One side wall is fixedly connected with optical path and is slidably connected with Z axis sliding slot, and CCD camera, institute are fixedly connected on the right side of the optical path
It states and is fixed with high power camera lens in CCD camera, the high power camera lens connect by the way that high power camera lens fixed ring is fixed
It connects in optical path, is correspondingly provided with XY linear drives platform below the optical path and on the end face of marble platform, it is described
It is fixed with elastic protective cover on XY linear drives platform, is threaded with loading on the end face of the XY linear drives platform
Platform is correspondingly provided with pneumatic main shaft jig on the end face of the objective table and with high power camera lens, and the XY linear drives are flat
The right side of platform and be located at marble platform end face on be fixed with control cabinet, the pneumatic main shaft jig includes pneumatic main shaft
Jig base and pneumatic main shaft jig angle adjusting are fixed with pneumatic main shaft on the end face of the main shaft jig base and control
Has column, the pneumatic main shaft jig angle adjusting is fixed on the side wall of pneumatic main shaft jig column, the gas
Pneumatic main shaft clamping and angle are fixed on dynamic side wall of the main shaft jig column far from pneumatic main shaft jig angle adjusting
Adjustment part, the pneumatic main shaft clamping and angle adjustment part grip pneumatic main shaft main body, the end of the pneumatic main shaft main body
Pneumatic main shaft automatic centering clamping head is fixed on face, the bottom of the pneumatic main shaft main body is fixed with pneumatic main shaft air inlet
With pneumatic main shaft gas outlet, the XY linear drives platform includes the first bottom plate and the second bottom plate, first bottom plate and second
Bottom plate is arranged in a mutually vertical manner, and first bottom plate center is fixed with the first U-type groove linear drive motor, first bottom
Board ends are equipped with the first flexible buffer, and two first straight line rollings are installed in the two sides of the first U-type groove linear drive motor in parallel
It moves guide rail group and it is high-precision to install first in parallel between the first U-type groove linear drive motor and first straight line rolling guide group
Spend grating scale, the first connecting plate of the first straight line rolling guide and upper installation, first connecting plate side installs two sets the
One dust cover, first connecting plate connect the second bottom plate and first straight line rolling guide group, second bottom plate center
It is fixed with the second U-type groove linear drive motor, second bottom plate both ends are equipped with the second flexible buffer, second U-type groove
Two second straight line rolling guide groups are installed in the two sides of linear drive motor in parallel, the second U-type groove linear drive motor and
Second high-precision grating scale, the second straight line rolling guide group and upper installation are installed in parallel between second straight line rolling guide group
Two set of second dust cover, the fixed objective table of the second connecting plate screw are installed in second connecting plate, second connecting plate side.
Preferably, the marble crossbeam is planer-type Dali stone structure.
Preferably, first driving motor is Panasonic A6 servo motor and to be electrically connected control cabinet (15), described the
One U-type groove linear drive motor and the second U-type groove linear drive motor are driven by Panasonic's A6 linear motor driver, and
It is electrically connected control cabinet.
Preferably, first precise ball screw is selected as BIF type, the first straight line rolling guide group and second straight line
Rolling guide group is SR type.
Preferably, the light channel structure uses full aluminium material, and has enough intensity, and mobile in Z-direction.
Preferably, general supply key, laser key, emergency stop control button and laser are fixed on the control cabinet
Control panel and it is electrically connected optical path, the built-in system of the control cabinet uses laser micro-machining system FM-UVM3.
Preferably, laser, model DCH-355-3 are fixed with inside the optical path, and projecting laser angle can
To deviate at a high speed.
Preferably, the pneumatic main shaft clamping and angle adjustment part can accurately read angle offset, and side is fixed with
Screw hold-down mechanism.
Preferably, pneumatic main shaft main body maximum (top) speed is not less than 30,000 turns/min, and greatest circle, which is jumped, is not higher than 2 μm.
Preferably, described 10 times of high power camera lens optical magnification >, field range < 0.5mm*0.5mm.
Compared with prior art, the beneficial effects of the present invention are:
1, in the present invention, by using laser micro-machining system FM-UVM3, which processes breadth 300*300, and machining accuracy ±
3 μm, 4 μm of minimum process line width, using the precise pneumatic main shaft rotational workpieces of ultrahigh rotating speed, it ensure that the circularity and precision in hole,
Laser is avoided excessively to burn material, 10 μm of aperture < of minimum punching.
2, in the present invention, superhard material capillary processing is solved the problems, such as by setting, punching aperture precision is high, processes hairless
Thorn is not necessarily to post-processing.
3, in the present invention, by using planer-type Dali stone structure, there is good anti-vibration and temperature drift ability, protect
Opposite precision has been demonstrate,proved, processing quality is improved.
Detailed description of the invention
Fig. 1 is overall structure of the present invention；
Fig. 2 is the whole schematic view of the front view of the present invention；
Fig. 3 is the whole left view structural representation of the present invention；
Fig. 4 is the left view structural representation of A of the present invention amplification；
Fig. 5 is the schematic perspective view of A of the present invention amplification
Fig. 6 is the explosion figure structure schematic representation of XY linear drives platform of the present invention；
In figure: 1- marble platform, 2- marble crossbeam, the first driving motor of 3-, the first driving motor of 4- fixed plate, 5- first
Precise ball screw, 6- precision Z axis, 7- Z axis sliding slot, 8- optical path, 9-CCD camera, 10- high power camera lens fixed ring, 11-
XY linear drives platform, 12- elastic protective cover, 13- objective table, 14- pneumatic main shaft jig, 15- control cabinet, 16- high power camera
Camera lens, 17- pneumatic main shaft jig base, 18- pneumatic main shaft jig column, 19- pneumatic main shaft jig angle adjusting, 20-
Pneumatic main shaft clamping and angle adjustment part, 21- pneumatic main shaft main body, 22- pneumatic main shaft automatic centering clamping head, 23- pneumatic main shaft
Air inlet, 24- pneumatic main shaft gas outlet, the first bottom plate of 25-, 26- first straight line guide rail group, the first flexible buffer of 27-, 28-
One U-shaped linear motor, 29- first straight line guide rail group, the high-accuracy grating scale of 30- first, the first connecting plate of 31-, 32- second are dust-proof
Cover, 33- second straight line guide rail group, the second bottom plate of 34-, the second flexible buffer of 35-, 36- second straight line guide rail group, 37- second are high
Precision linear encoder, the U-shaped linear motor of 38- second, the second dust cover of 39-, the second connecting plate of 40-.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments, is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1-6 is please referred to, the present invention provides a kind of technical solution:
A kind of micro hole laser drilling device of superhard material, including marble platform 1, it is fixed on the end face of marble platform 1
Equipped with marble crossbeam 2, the center on marble crossbeam 2 is fixed with the first driving motor 3, provides the effect of function,
The lower section of first driving motor 3 is fixed with the first driving motor fixed plate 4, and the first driving motor fixed plate 4 is fixedly connected on
On marble crossbeam 2, the driving end of the first driving motor 3 is fixedly connected with the first precise ball screw 5 and drives through first
Dynamic motor fixing plate 4 on first precise ball screw 5 and is located at the lower section of the first driving motor fixed plate 4 and is threaded with
Accurate Z axis 6, carries out the effect of the precision control of Z-direction, and accurate Z axis 6 is slidably connected Z axis sliding slot 7, and Z axis sliding slot 7 is fixed to be connected
It connects on marble crossbeam 2, another side wall of accurate Z axis 6 is fixedly connected with optical path 8 and is slidably connected with Z axis sliding slot 7, light
The right side on road 8 is fixedly connected with CCD camera 9, detects the effect of camera shooting, high power camera lens 16 are fixed in CCD camera 9,
High power camera lens 16 are fixedly connected in optical path 8 by high power camera lens fixed ring 10, below optical path 8 and are located at Dali
It is correspondingly provided with XY linear drives platform 11 on the end face of stone platform 1, can be realized the movement in the direction XY, XY linear drives platform 11
On be fixed with elastic protective cover 12, protect the effect of 11 internal structure of XY linear drives platform, XY linear drives platform 11
It is threaded with objective table 13 on end face, is correspondingly provided with pneumatic main shaft on the end face of objective table 13 and with high power camera lens 10
Jig 14, the right side of XY linear drives platform 11 and be located at marble platform 1 end face on be fixed with control cabinet 15, play
The effect of leading control, pneumatic main shaft jig 14 include pneumatic main shaft jig base 17 and pneumatic main shaft jig angle adjusting
19, its role is to so that workpiece is horizontal, carry out pinpoint for fixing pneumatic main shaft and adjustment pneumatic main shaft angle
It acts on, pneumatic main shaft jig column 18 is fixed on the end face of main shaft jig base 17, the adjustment of pneumatic main shaft jig angle is single
Member 19 is fixed on the side wall of pneumatic main shaft jig column 18, and pneumatic main shaft jig column 18 is far from pneumatic main shaft jig angle
It spends on the side wall of adjustment unit 19 and is fixed with pneumatic main shaft clamping and angle adjustment part 20, the pneumatic main shaft clamping and angle
Adjustment part 20 grips pneumatic main shaft main body 21, and it is automatic to be fixed with pneumatic main shaft on the end face of the pneumatic main shaft main body 21
The bottom of centring chuck 22, the pneumatic main shaft main body 21 is fixed with pneumatic main shaft air inlet 23 and pneumatic main shaft gas outlet
24, the XY linear drives platform 11 includes the first bottom plate 25 and the second bottom plate 34, first bottom plate 25 and the second bottom plate 34
It is arranged in a mutually vertical manner, 25 center of the first bottom plate is fixed with the first U-type groove linear drive motor 28, first bottom
25 both ends of plate are equipped with the first flexible buffer 27, and the two sides of the first U-type groove linear drive motor 28 install two first in parallel
Linear rolling track group 26 and 29 is put down between the first U-type groove linear drive motor 28 and first straight line rolling guide group 29
Row the first high-precision grating scale 30 of installation, installs the first connecting plate 31 on the first straight line rolling guide 26 and 29, and described the
Two set of first dust cover 39 is installed in one connecting plate, 31 side, and first connecting plate 31 connects the second bottom plate 34 and first straight line rolling
Dynamic guide rail group 26 and 29,34 center of the second bottom plate are fixed with the second U-type groove linear drive motor 38, and described second
34 both ends of bottom plate are equipped with the second flexible buffer 35, and the two sides of the second U-type groove linear drive motor 38 install two pieces the in parallel
Two linear rolling track groups 33 and 36, between the second U-type groove linear drive motor 38 and second straight line rolling guide group 36
It is parallel that second high-precision grating scale 37 is installed, second connecting plate 40, institute are installed in the second straight line rolling guide group 33 and 36
It states 40 side of the second connecting plate and two set of second dust cover 32, the fixed objective table 13 of 40 screw of the second connecting plate is installed.
Workflow of the present invention: when processing object, the object processed will be needed to be placed on rotating jig 15 and carried out
It is fixed, the control button of control cabinet 18 is opened, high-accuracy micro-machining system FM-UVM3 is used by built-in system, to warp knit
The good system of processing of journey is to the first U-type groove linear drive motor 28 in XY linear drives platform 11 and the second U-type groove linear drives
It is controlled under 38 state of motor, interact the lower movement for carrying out the direction XY, and the first driving motor 3 is accurate by drive first
Optical path 8 on ball screw 5 carries out the movement of Z axis, cooperates 9 positioning process part of CCD camera using XY linear drives platform 11,
High power camera lens 16 are focused, and the laser transmitting deflection angle laser in optical path 8 is processed, and solve superhard material micropore
Processing problems, punching aperture precision is high, processes impulse- free robustness, is not necessarily to post-processing.
Implementation steps:
The setting of laser boring path
1) taper hole
Pneumatic main shaft angle adjusting 19 is adjusted, so that workpiece is horizontal, machining path setting: Y(Z)=R1-Z*tan(θ 1/
2), wherein Y(Z) it is that Y is deviated with Z, Y(0) deviation post of laser spot opposite piece rotation center when processing when being Z=0,
R1 requires machining for out the entrance radius of circle of taper hole, and θ 1 is taper hole cone angle, and Z is workpiece surface to laser spot distance.I.e. with Z
Increase, Y reduces.
2) straight hole
Laser spot size is hyperbola distribution in transmission direction, so aperture is typically all taper hole, entrance when directly processing
Greatly, it exports small.When processing straight hole, cone angle is compensated, that is, to adjust pneumatic main shaft angle adjusting 19, so that workpiece
Inclination.Workpiece inclination after, the hole for needing to process also tilts, as Z axis declines, in the Y direction deviate the center of circle distance by
It is decrescence small.
Machining path setting: Y(Z)=R2*cos(θ 2)-Z*tan(θ 2), the radius of circle that wherein R2 is required machining for out, θ 2
It is workpiece inclination angle, Z is workpiece surface to laser spot distance.I.e. as Z increases, Y reduces；If hole is not straight hole, fine tuning
Pneumatic main shaft angle adjusting 19 continues to test
3) taper hole+straight hole
Pneumatic main shaft angle adjusting 19 is adjusted, straight hole is processed, according to pass, determines Y-axis with Z axis moving distance, reference
Taper hole and straight hole: taper hole section, machining path are arranged: Y(Z)=R1*cos(θ 2) 2), straight hole section process road to-Z*tan(θ 1/2+ θ
Diameter setting: Y(Z)=R2*cos(θ 2)-(Z-Z1*cos(θ 2)) * tan(θ 2), wherein R1 requires machining for out the entrance circle of taper hole
Radius, the radius of circle that R2 is required machining for out, θ 1 are taper hole cone angles, and θ 2 is workpiece inclination angle, and Z is workpiece surface to laser spot
Distance, Z1 are taper hole depth.
According to 1), 2), 3) and setting path, laser parameter is arranged according to material, pneumatic main shaft is opened, passes through CCD camera tune
Whole focus simultaneously finds rotation center, and rotating center is offset to laser center, can start to process.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
A variety of variations, modification, replacement can be carried out to these embodiments without departing from the principles and spirit of the present invention by understanding
And modification, the scope of the present invention is defined by the appended.
Claims (10)
1. a kind of micro hole laser drilling device of superhard material, including marble platform (1), it is characterised in that: the Dali
It is fixed on the end face of stone platform (1) marble crossbeam (2), the center on the marble crossbeam (2) is fixed with
First driving motor (3), is fixed with the first driving motor fixed plate (4) below first driving motor (3), and described
One driving motor fixed plate (4) is fixedly connected on marble crossbeam (2), and the driving end of first driving motor (3) is fixed
It is connected with the first precise ball screw (5) and through the first driving motor fixed plate (4), first precise ball screw
(5) it is threaded with accurate Z axis (6) on and below the first driving motor fixed plate (4), the precision Z axis (6) is sliding
Dynamic connection Z axis sliding slot (7), the Z axis sliding slot (7) are fixedly connected on marble crossbeam (2), the precision Z axis (6) it is another
Side wall is fixedly connected with optical path (8) and is slidably connected with Z axis sliding slot (7), is fixedly connected with CCD on the right side of the optical path (8)
Camera (9) is fixed with high power camera lens (16) on the CCD camera (9), and the high power camera lens (16) pass through high power
Camera lens fixed ring (10) is fixedly connected on optical path (8), below the optical path (8) and is located at marble platform (1)
It is correspondingly provided with XY linear drives platform (11) on end face, is fixed with elastic protective cover on the XY linear drives platform (11)
(12), it is threaded with objective table (13) on the end face of the XY linear drives platform (11), the end face of the objective table (13)
It above and with high power camera lens (10) is correspondingly provided with pneumatic main shaft jig (14), the right side of the XY linear drives platform (11)
And it is located on the end face of marble platform (1) and is fixed with control cabinet (15), the pneumatic main shaft jig (14) includes pneumatic
Main shaft jig base (17) and pneumatic main shaft jig angle adjusting (19), it is solid on the end face of the main shaft jig base (17)
Surely it is equipped with pneumatic main shaft jig column (18), the pneumatic main shaft jig angle adjusting (19) is fixed at pneumatic main shaft
On the side wall of jig column (18), the pneumatic main shaft jig column (18) is far from pneumatic main shaft jig angle adjusting (19)
Side wall on be fixed with pneumatic main shaft clamping and angle adjustment part (20), pneumatic main shaft clamping and angle adjustment part (20)
It grips pneumatic main shaft main body (21), is fixed with pneumatic main shaft self-centering on the end face of the pneumatic main shaft main body (21)
The bottom of collet (22), the pneumatic main shaft main body (21) is fixed with pneumatic main shaft air inlet (23) and pneumatic main shaft gas outlet
(24), the XY linear drives platform (11) include the first bottom plate (25) and the second bottom plate (34), first bottom plate (25) and
Second bottom plate (34) is arranged in a mutually vertical manner, and the first bottom plate (25) center is fixed with the first U-type groove linear drives electricity
Machine (28), the first bottom plate (25) both ends are equipped with the first flexible buffer (27), the first U-type groove linear drive motor (28)
Two sides two first straight line rolling guide groups (26) and (29), the first U-type groove linear drive motor (28) are installed in parallel
First high-precision grating scale (30), the first straight line rolling guide are installed in parallel between first straight line rolling guide group (29)
(26) and on (29) it installs the first connecting plate (31), two set of first dust cover (39) is installed in the first connecting plate (31) side,
First connecting plate (31) connection the second bottom plate (34) and first straight line rolling guide group (26) and (29), second bottom plate
(34) center is fixed with the second U-type groove linear drive motor (38), and it is soft that the second bottom plate (34) both ends are equipped with second
Property buffering (35), two second straight line rolling guide groups are installed in the two sides of the second U-type groove linear drive motor (38) in parallel
(33) and (36) it, is installed in parallel between the second U-type groove linear drive motor (38) and second straight line rolling guide group (36)
Second high-precision grating scale (37) installs the second connecting plate (40), institute on the second straight line rolling guide group (33) and (36)
It states the second connecting plate (40) side and two set of second dust cover (32), the fixed objective table of the second connecting plate (40) screw is installed
(13).
2. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: the Dali
Stone crossbeam (2) is planer-type Dali stone structure.
3. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: described first
Driving motor (3) is Panasonic A6 servo motor and is electrically connected control cabinet (15), the first U-type groove linear drive motor
(28) and the second U-type groove linear drive motor (38) it, is driven by Panasonic's A6 linear motor driver, and is electrically connected control
Case (15).
4. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: described first
Precise ball screw (5) is selected as BIF type, the first straight line rolling guide group (26) and (29) and second straight line rolling guide group
(33) and (36) are SR type.
5. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: the optical path
(8) structure uses full aluminium material, and has enough intensity, and mobile in Z-direction.
6. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: the control
It is fixed with general supply key, laser key, emergency stop control button and laser control panel on case (15) and electrically connects
It connects optical path (8), the built-in system of the control cabinet (15) uses laser micro-machining system FM-UVM3.
7. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: the optical path
(8) it is fixed with laser, model DCH-355-3 inside, and project laser angle to deviate at a high speed.
8. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: described pneumatic
Main shaft clamping and angle adjustment part (20) can accurately read angle offset, and side is fixed with screw hold-down mechanism.
9. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: pneumatic main shaft
Main body (21) maximum (top) speed is not less than 30,000 turns/min, and greatest circle, which is jumped, is not higher than 2 μm.
10. a kind of micro hole laser drilling device of superhard material according to claim 1, it is characterised in that: the height
Times 10 times of optical magnification > of camera lens (10), field range < 0.5mm*0.5mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811252257.0A CN109014621B (en) | 2018-10-25 | 2018-10-25 | Ultra-hard material micro-hole laser drilling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811252257.0A CN109014621B (en) | 2018-10-25 | 2018-10-25 | Ultra-hard material micro-hole laser drilling device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109014621A true CN109014621A (en) | 2018-12-18 |
| CN109014621B CN109014621B (en) | 2021-03-30 |
Family
ID=64613886
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811252257.0A Active CN109014621B (en) | 2018-10-25 | 2018-10-25 | Ultra-hard material micro-hole laser drilling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109014621B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110421353A (en) * | 2019-09-11 | 2019-11-08 | 哈尔滨理工大学 | Auxiliary complex milling machine tool and monitoring method are heated based on machine vision laser |
| CN110795900A (en) * | 2019-11-26 | 2020-02-14 | 北京智慧云测信息技术有限公司 | Intelligent burr design circuit |
| CN112496559A (en) * | 2020-12-14 | 2021-03-16 | 上海新奥林汽车传感器有限公司 | Safe and environment-friendly automatic laser marking device |
-
2018
- 2018-10-25 CN CN201811252257.0A patent/CN109014621B/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110421353A (en) * | 2019-09-11 | 2019-11-08 | 哈尔滨理工大学 | Auxiliary complex milling machine tool and monitoring method are heated based on machine vision laser |
| CN110795900A (en) * | 2019-11-26 | 2020-02-14 | 北京智慧云测信息技术有限公司 | Intelligent burr design circuit |
| CN110795900B (en) * | 2019-11-26 | 2023-04-28 | 北京智慧云测信息技术有限公司 | Intelligent burr design circuit |
| CN112496559A (en) * | 2020-12-14 | 2021-03-16 | 上海新奥林汽车传感器有限公司 | Safe and environment-friendly automatic laser marking device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109014621B (en) | 2021-03-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109014621A (en) | A kind of micro hole laser drilling device of superhard material | |
| CN101954518B (en) | Horizontal micro-electric spark machine tool and method for performing online processing by applying same | |
| TWI476069B (en) | Lens processing device | |
| CN102365149A (en) | Ram guiding apparatus of machine tool | |
| CN111716147A (en) | Device and method for accurately controlling and processing wall thickness error of rotary shell part | |
| CN211638957U (en) | Ray apparatus structure of digit control machine tool | |
| CN102333615A (en) | Flexure guide bearing for short stroke stage | |
| CN104759754A (en) | Laser processing equipment applied to circular tube materials | |
| US20120267352A1 (en) | Apparatus for the thermal processing of a workpiece | |
| CN111250865A (en) | Laser cutting device with good moving balance | |
| CN111702555A (en) | On-machine precision adjusting device and method for height of turning tool nose | |
| CN1788913A (en) | Automatic laser welding device for fibre-optical active component | |
| CN101152673A (en) | Technique for processing gyroscopes frame hole series and special equipment | |
| CN214054091U (en) | Laser processing apparatus | |
| CN110315427A (en) | Toolroom machine for workpieces processing | |
| CN111458810A (en) | Optical fiber clamping and coupling positioning device for COC packaging | |
| CN109877865A (en) | A kind of Lens Coupling clamp device | |
| CN109014629B (en) | Four-axis laser precision machining device with micrometer line width | |
| JP2009262245A (en) | Small hole electric discharge machining device | |
| CN104889830A (en) | Micropore ultrasound processing machine with online measurement function | |
| CN112828445A (en) | Laser cutting equipment and laser cutting system | |
| CN210451019U (en) | Turning machine tool | |
| CN216138149U (en) | Single armed BTA location structure | |
| KR200256534Y1 (en) | Variable setting jig for products fixing | |
| CN210209377U (en) | Composite processing equipment |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |