TW201429557A - Work device having a position correction function, and work method - Google Patents

Abstract

To provide a work device having a position correction function that can solve the problem of positioning accuracy of a drive device. A work device provided with a stage, a work head device, an image pick-up device, a drive device that causes the work head device and the stage to move relatively in the XYZ directions, and a control device that measures the displacement amount of the work head device, wherein a linear motion device is provided to which is attached the image pick-up device and the work head device and which can move back and forth between a first position and a second position in the X direction or the Y direction; the linear motion device is attached to the drive device so that the linear motion device can be moved back and forth by the drive device in the same direction as the back and forth motion of the linear motion device; and a control device calculates the positional displacement amount of the drive device on the basis of the difference between positional displacement amounts (X1, Y1) obtained by performing image processing on a first correction-use image captured by the image pick-up device when the linear motion device is at the first position, and positional displacement amounts (X2, Y2) obtained by performing image processing on a second correction-use image captured by the image pick-up device when the linear motion device is at the second position.

Description

Working device with position correction function and working method

The present invention relates to a working device and a working method having a position correcting function, for example, a coating device having a coating position correcting function for correcting a coating position generated by exchange of a discharge device (nozzle) Offset.

There is known a coating apparatus in which a discharge device and a coating object are relatively moved by a driving device to apply a liquid material to an object to be coated. When the coating operation is performed by the coating device, a coating pattern composed of the coated region and/or the non-coated region is formed, and on the one hand, the nozzle is moved relative to the workpiece, and the liquid material is supplied from the nozzle on the coated region. Discharge and apply a predetermined amount of liquid material to the workpiece. In such a device, there is a problem that the position of the discharge port (nozzle) of the discharge device is shifted before the start of the work, when the liquid material is replenished, or during the maintenance of the discharge device, and the offset has been corrected so far. A variety of technical solutions have been proposed.

For example, Patent Document 1 discloses a paste coater capable of exchanging nozzles, which is configured such that a substrate is placed on a table opposite to a paste discharge port of a nozzle, and is filled in a paste storage tube. The paste is spit out from the paste spit out of the substrate, and on the other hand, the relative positional relationship between the nozzle and the table is changed, and a paste pattern of a desired shape is formed on the substrate, and the paste coater is characterized by: The first means, the second means, and the third means are configured to correct a positional shift of the paste discharge port of the nozzle which is caused by the nozzle exchange, wherein the first means is to image and discharge the image by the image recognition camera. Assumption The dot paste on the substrate is subjected to image processing to determine the center position of the dot paste, thereby measuring the position of the paste discharge port of the nozzle, and the second means is based on the measurement result of the first means. The displacement amount of the paste discharge port of the nozzle is calculated. The third means adjusts the position of the substrate positioning camera based on the positional shift amount obtained by the second means, and positions the paste discharge port of the nozzle and the substrate. Set the camera to a predetermined positional relationship.

Further, Patent Document 2 discloses a coating apparatus which discharges a paste in a nozzle from a discharge hole toward a groove in a substrate, and moves the substrate and the nozzle relative to each other to apply the paste to the groove of the substrate. The coating apparatus is characterized by: a first means for measuring the position of the substrate, a second means for measuring the position of the reference groove of the substrate, and a third means for measuring the position of the reference hole of the nozzle, and The position information of the substrate obtained by the method, the angle of the substrate is adjusted, the substrate is positioned at a predetermined position, and the position information of the reference groove of the substrate obtained by the second means and the nozzle obtained by the third means are obtained. The position information of the reference hole relatively positions the position of the substrate and the nozzle.

Further, Patent Document 3 discloses a coating device for a sealant having a device body, a table provided on the device body and having a substrate placed on the upper surface thereof, a moving mechanism of the table, and a table above the table And driving the nozzle body of the sealant applied on the substrate in a direction orthogonal to the moving direction of the table, and applying the sealant discharged from the nozzle body to the substrate by the movement of the table, The coating apparatus is characterized by comprising: a camera for photographing a substrate placed on a table; and a control device for determining an actual position and a preset of the substrate on the table based on the image signal from the camera Based on the difference, the drive of the table is corrected when the sealant is applied to the substrate.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Laid-Open No. Hei 7-132259

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2003-251257

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2003-177411

A drive device for moving the discharge device and the photographing device is referred to as "positioning accuracy". This positioning accuracy has the following two types. One is "repetitive positioning accuracy", which is measured by repeating the difference in the stop position when a device is moved from the same direction to an arbitrary point and stopped at the point. The other type is "absolute positioning accuracy", which is to make a device automatically stop in a direction at a plurality of positions set at a certain interval in one direction, and measure the actual measured value at each positioning point for the entire range. And the difference between the theoretical values.

Up to now, since the above-mentioned positioning accuracy is allowed to be wide, there is no problem in the practical application by the conventional technique. However, with the trend toward miniaturization and high integration of parts in the electronic field in recent years, it is required that the accuracy of the coating position or the discharge position accuracy of the driving device is gradually increased, thereby causing the allowable range of the above positioning accuracy. Narrowed. In particular, the use of the positional offset measurement of the photographing device (camera) has become a problem. Here, in the relationship with the positional deviation measurement, the "absolute positioning accuracy" in the above positioning accuracy becomes more and more important.

In addition, the positional shift measurement using the photographing device (camera) is performed, for example, in the following procedure.

First, by operating the driving device, the discharge outlet center of the discharge device matches the correction position (for example, the corner of the application target), and the liquid is discharged from the discharge port of the discharge device. Material to form a coating point for correction.

Next, by operating the driving device, the correction position is aligned with the imaging center of the imaging device, and imaging is performed.

Finally, image processing is performed to determine whether the center of the coating point coincides with the center of photography.

However, since the driving device for moving the discharge device and the photographing device has a problem of the above-described positioning accuracy, a positional shift occurs at the discharge center and the photographing center. As a result, a positional shift occurs in the accuracy of the coating position. However, in the correction method described in each patent document, the positional shift cannot be corrected.

Further, in the case where the coating pattern is a continuous application of a plurality of portions, the positional deviation measuring portion also needs to be a plurality of portions. However, due to an increase in the moving distance, it is also susceptible to absolute positioning accuracy. The effect of positional offset.

Accordingly, it is an object of the present invention to provide a work apparatus and a work method having a position correcting function that can solve the above problems.

The working device according to the present invention includes: a work table in which a work object is disposed directly or indirectly; a work head device for performing work on the work object; and a photographing device that is at least on the work table a part of the photographing; a driving device for moving the working head device and the work table in the XYZ direction; and a control device for performing image processing on the image taken by the photographing device, thereby measuring the positional shift of the working head device The working device is characterized in that: a direct acting device is provided, and the directing device is mounted with a photographing device and a working head device, and is reciprocally movable in the first direction and the second position in the X direction or the Y direction, and is straight The moving device is mounted on the driving device, and is configured to enable the linear motion device to reciprocate in the same direction as the reciprocating movement direction of the linear motion device by the driving device, and the control device is photographed according to the position of the linear motion device in the first position. The first repair taken by the device The position shift amount (X1, Y1) obtained by performing image processing with an image, and the position obtained by performing image processing on the second correction image captured by the photographing device with respect to the linear motion device. The difference between the offsets (X2, Y2) is used to calculate the position offset of the drive.

In the above-described working device, the control device may be configured to perform a step of moving the linear motion device including the imaging device to the first imaging position by the driving device, and the second step The first correction image is captured by the imaging device. In the third step, the positional shift amount (X1, Y1) in the first correction image is obtained by image processing and stored in the control device; Step of moving the linear motion device in a direction by a certain distance, and then moving the linear motion device in the opposite direction to the one direction by the driving device to move the same distance as the certain distance, or by using the driving device to make the linear motion device Moving a certain distance in one direction, and then moving the linear motion device in the opposite direction to the one direction, moving the same distance as the predetermined distance, thereby moving to the second photographing position; and the fifth step, by the photographing device (2) correcting the image with the image; in the sixth step, the position shift amount (X2, Y2) in the second image for correction is obtained by image processing and stored in the control device; and the seventh step is the first step. Correction image The position shift amount (X1, Y1) is calculated by subtracting the position shift amount (X2, Y2) in the second correction image to calculate the correction amount; and the eighth step is based on the correction amount calculated in the seventh step. Correct the working position of the working head unit.

In the above-described working device, it is characterized in that it further includes a conveying device that performs delivery of the working object with the external device.

In the above-described working device, the reciprocating movement of the linear motion device may be such that the distance between the imaging device and the working head device is equal to or greater than the distance between the imaging device and the driving device.

In the above working device, the working head device may be a discharge device.

The working method of the present invention uses the working method of the above working device, The operation method is characterized in that before the start of the work of the work head device, the control device performs a step of moving the linear motion device including the photographing device to the first photographing position by the drive device. In the second step, the first correction image is captured by the imaging device; and in the third step, the positional shift amount (X1, Y1) in the first correction image is obtained by image processing and is stored in the control. The fourth step of moving the linear motion device in a direction by a certain distance, and then moving the linear motion device in the opposite direction to the one direction by the driving device to move the same distance as the certain distance, or by using the driving device Moving the linear motion device in a direction by a certain distance, and then moving the linear motion device to the second imaging position by moving the same distance from the predetermined distance in a direction opposite to the one direction; the fifth step The photographing device captures the second correction image; in the sixth step, the position shift amount (X2, Y2) in the second correction image is obtained by image processing and is stored in the control device; Free from the first The position shift amount (X1, Y1) in the correction image is subtracted from the position shift amount (X2, Y2) in the second correction image to calculate the correction amount; and the eighth step is based on the seventh The correction amount calculated in the step corrects the work position of the work head device.

In the above-described work method, the work object may be composed of a plurality of work objects, and the control device may perform the first to eighth steps before the start of each work on the work object.

According to the present invention, the influence of the absolute positioning accuracy can be minimized, so that the work position correction with high precision can be performed.

Moreover, according to the present invention, it is not necessary to use components having particularly excellent precision in the components of the drive device, and the work position correction with high precision can be realized at low cost.

1‧‧‧ Coating device

2‧‧‧ drive

3‧‧‧X-axis drive unit 3

4‧‧‧Y-axis drive unit 4

5‧‧‧Z-axis drive

6‧‧‧X drive direction

7‧‧‧Y drive direction

8‧‧‧Z drive direction

9‧‧‧Photographing device

10‧‧‧Directional device

11‧‧‧Direct drive direction

12‧‧‧Control device

13‧‧‧Applying object

14‧‧‧Substrate

15‧‧‧Working table

16‧‧‧ spitting device

17‧‧‧ 台台

18‧‧‧ Images

19‧‧‧Image Center Mark

21‧‧‧High Platform

22‧‧‧Transportation device

23‧‧‧Support components

24‧‧‧Transportation agencies

25‧‧‧Transportation direction

26‧‧‧Shell

27‧‧‧ moving into the hole

28‧‧‧ Moving out of the hole

29‧‧‧ spitting control device

30‧‧‧ display lights

31‧‧‧ touch panel

Fig. 1 is a schematic perspective view showing a coating device having a coating position correction function according to an embodiment.

Fig. 2 is an explanatory view showing a coating position correction process in the coating apparatus according to the embodiment. Here, (a) when the head is moved to the first photographing position, (b) when the head is moved to the position immediately before the discharge device, and (c) when the head is moved to the second photographing position.

Fig. 3 is an image of the coating position correction process in the coating apparatus of the embodiment. Here, (a) is an image at the first photographing position, and (b) is an image at the second photographing position.

Fig. 4 is an explanatory view showing another coating position correction process in the coating apparatus according to the embodiment. (a) when the display head moves to the first photographing position, (b) when the discharge device is moved to the position immediately before the photographing device, and (c) when the head moves to the second photographing position.

Fig. 5 is a schematic perspective view showing an embodiment of a coating device having a coating position correction function.

Hereinafter, an embodiment for carrying out the present invention will be described with reference to an example of a coating device when the working head device is a discharge device.

[composition]

Fig. 1 is a schematic perspective view showing a coating apparatus having a coating position correction function according to an embodiment.

In the coating device 1 of the embodiment, the driving device 2, the imaging device 9, the linear motion device 10, the control device 12, the work table 15, and the discharge device 16 are mainly configured. In the following description, the direction of the symbol 6 in the figure is referred to as the X direction, the direction of the symbol 7 is the Y direction, and the direction of the symbol 8 is referred to as the Z direction.

The driving device 2 includes an X-axis driving device 3, a Y-axis driving device 4, and a Z-axis driving device 5, and the driving device 2 is attached to the substrate 14 to make the head (the linear motion device 10 and the mounting device 10 are mounted on the linear motion device 10). The imaging device 9 and the ejection device 16) are moved in the XYZ direction. As the drive device 2, for example, a servo motor, a combination of a stepping motor and a screw, a linear motor, or the like can be used. In FIG. 1, the substrate 14 on which the object to be coated 13 is placed is used as a fixed position, and the drive device 2 is relatively moved on the substrate 14. However, the drive device 2 and the object to be coated 13 can be XYZ. The relative movement of the direction is not limited to this. For example, an XY-axis driving device may be disposed below the work table 15 on which the substrate 14 is placed, and a gantry frame may be provided to straddle the device, and a Z-axis driving device may be disposed on the gantry.

The photographing device 9 is a device for photographing the application target 13 itself or an identification mark (also referred to as an alignment mark) attached to the substrate 14 on which the application target 13 is placed. In order to perform image processing on an image after shooting, it is preferable to use a digital display using a CCD, CMOS or the like. The photographing device 9 is disposed at a predetermined interval from the discharge device 16, and is disposed side by side in the linear motion device 10 such that the photographing center of the photographing device 9 and the liquid outlet center of the discharge device 16 are aligned on a straight line. The arrangement direction of the photographing device 9 and the discharge device 16 coincides with the moving direction (symbol 11) of the linear motion device 10 to be described later.

The linear motion device 10 is a device that integrally moves the imaging device 9 and the discharge device 16 disposed on the side surface of the square mounting portion in the X direction. The linear motion device 10 has a first position in which the X-direction movement to the Y-axis driving device 4 is secured, and a second position in which the X-direction is not secured. The linear motion device 10 can be constituted, for example, by a mounting portion that is coupled to a cylinder that drives the piston by the action of the compressed gas, and the imaging device 9 and the discharge device 16 are attached to the side surface of the mounting portion. Here, the center of the photographing center of the photographing device 9 and the center of the liquid outlet of the discharge device 16 are disposed on the same straight line in the X direction (symbol 6). The movement of the photographing device 9 and the discharge device 16 by the linear motion device 10 does not include a positional deviation A small error that can be ignored, even if it contains a positional offset. The traverse system of the linear motion device 10 is set to be equal to or larger than the distance between the imaging device 9 and the discharge device 16 (distance between the imaging center and the discharge center) and shorter than the movement of the driving device 2 (more Preferably, the distance is less than half, and more preferably less than 1/3.)

The moving direction of the linear motion device 10 is parallel to one of the moving directions of the driving device 2, that is, the X direction or the Y direction. In the present embodiment, it is parallel to the X direction (symbol 6) of the drive device 2. This X direction (symbol 6) is parallel to the direction in which the photographing device 9 and the discharge device 16 are arranged side by side. Therefore, the three directions, that is, the moving direction of the linear motion device 10 (symbol 11), the direction in which the photographing device 9 and the discharge device 16 are arranged side by side, and one moving direction of the driving device 2, that is, the X direction (symbol 6) are mutual parallel. In this manner, by providing the linear motion device 10, positional measurement can be performed by one imaging device at the first imaging position and the second imaging position, and the influence of the absolute positioning accuracy can be reduced by obtaining the difference between the measurement results. At the very least, it is possible to perform position correction with good precision.

The coating device 1 of the embodiment includes a control device 12 for controlling each of the above devices. The control device 12 includes a display device for displaying an image captured by the imaging device 9, an input device for inputting a set value and the like, a memory device for storing data such as images and setting values, and various types of image processing and the like. Processing device for processing. The control device 12 can use, for example, a computer, a touch panel, a program controller, or the like. The control device 12 can be provided inside the gantry 17 of the coating device 1.

The coating device 1 of the embodiment includes a work table 15 that supports and fixes the substrate 14 on which the object 13 is applied from below. In order to fix the substrate 14 to the work table 15, for example, a plurality of holes that are opened from the inside of the work table 15 to the upper surface, and the substrate 14 is suction-fixed by sucking air from the holes; The substrate 14 is fixed to the work table 15 by a fixing means such as a screw to fix the substrate 14 Set the method and so on.

Further, the discharge device 16 for discharging the liquid material is arranged side by side with the photographing device 9 on the side surface of the linear motion device 10. Since the discharge device 16 of the present embodiment having one discharge port is detachably attached to the linear motion device 10, it can be detached during maintenance and exchanged with other types of discharge devices. As the discharge device 16, a discharge device of any type such as a pneumatic type, a spray type, a plunger type, or a screw type can be used. The ejection device 16 also includes a person who can remove only the nozzle portion from the body.

[action]

Fig. 2 is an explanatory view showing a coating position correction process in the coating apparatus of the embodiment. Further, Fig. 3 is an image reflected by the coating position correction process in the coating apparatus of the embodiment. Further, in Fig. 3, the cross line located at the center of the image 18 and the square line (symbol 19) surrounding the image 18 indicate the center of the image reflected by the photographing device (in other words, the center of the photographing device) ) the mark.

In the following description, the coordinates (Xa, Ya) of the head of the photographing center of the photographing device 9 are set as the "correction position" at the corner (upper right) of the application target 13 placed on the substrate 14. . However, the position for correction is not limited to this, as long as it is a part that can be easily recognized by the image with a relatively clear feature, for example, it can be used as an identification mark attached to the substrate 14, or it can be temporarily used for correction. The coating point is used as a correction position.

The coating position correction process for one application target 13 is performed as follows.

<Step 1>

When the linear motion device 10 is kept in a stopped state, the head of the imaging device 9 is moved to the correction position (Xa, Ya) by the drive device 2 (see FIG. 2(a)). Move this The position of the rear head is taken as the first photographing position. Actually, since the coordinates of the first photographing position include the positional shift of the driving device 2, it becomes (Xa', Ya'). In the first step, the linear motion device 10 is the first position, and the X-direction movement of the linear motion device 10 to the Y-axis driving device 4 on the substrate 14 in the next step is secured in the first position. Further, the position coordinates of the movement end point of the head may be set in advance by the control device 12 by using the reference substrate 14 as a reference or by inputting a design value or the like.

<Step 2>

At the first photographing position (Xa', Ya'), the corner portion (upper right) of the application target 13 is imaged by the photographing device 9 (see Fig. 3(a)). This image 18 (Fig. 3(a)) is observed, and the corner (upper right) of the object 13 is offset (X1, Y1) from the set position, that is, the center of the image. This offset is the offset caused by the absolute positioning accuracy of the drive unit 2 measured at the first photographing position (but the offset also includes the offset when the substrate 14 is placed on the work table 15). The value (X1, Y1) offset from this image center is measured by image processing and is memorized in the control device 12.

<Step 3>

When the driving device 2 is kept in a stopped state, the head unit is moved in the X direction (symbol 11, right direction of FIG. 2) by the linear motion device 10 so that the photographing device 9 comes to the position immediately before the ejection device 16 ( Position of Figure 2(a)) (Refer to Figure 2(b)). In other words, the movement of the head toward the X direction (symbol 11, the right direction of FIG. 2) of the Y-axis driving device 4 by the linear motion device 10 corresponds to the setting interval of the photographing device 9 and the discharge device 16 (X ₀ , Y). The position of the distance of ₀ ) (Xa'+X ₀ , Ya'+Y ₀ ). Thereby, the linear motion device 10 becomes the second position in which the X-direction movement to the Y-axis drive device 4 is not secured. Here, the moving direction (symbol 11) of the linear motion device 10 is only the X direction, and since the driving device 2 is not continuously operated, the head does not move in the Y direction (symbol 7) (that is, Y ₀ =0).

<Step 4>

When the linear motion device 10 is kept in a stopped state, the head of the imaging device 9 is moved to the correction position (Xa, Ya) by driving the X-axis driving device 3 of the drive device 2 (refer to the second (c) )))). The position of the head after the movement is taken as the second photographing position. Actually, since the coordinates of the second photographing position include the positional shift of the driving device 2, it becomes (Xa", Ya"). At this time, the linear motion device 10 is still in the second position where the X-direction stroke is not secured. The second photographing position (Xa", Ya") is such that the head portion from the third step (Xa'+X ₀ , Ya'+Y ₀ ) is moved away from the Y-axis driving device 4 by the driving device 2. The X direction (symbol 11, left direction of FIG. 2) is shifted by the distance corresponding to the installation interval (X ₀ , Y ₀ ) between the photographing device 9 and the discharge device 16. The position coordinates of the end point of the movement of the head may be set in advance to the control device 12 similarly to the first photographing position. When moving here, do not move the head in the Y direction (symbol 7).

<Step 5>

At the second imaging position (Xa", Ya"), the corner portion (upper right) of the object to be coated 13 is imaged by the imaging device 9 (see FIG. 3(b)). This image 18 (Fig. 3(b)) is observed, and the corner of the object 13 is offset (X2, Y2) from the set position, that is, the center of the image. However, since the head having the photographing device 9 does not move in the Y direction (symbol 7), Y2 is equal to Y1. This offset is the offset caused by the absolute positioning accuracy of the drive unit 2 measured at the second photographing position (but the offset also includes the offset when the substrate 14 is placed on the work table 15). The value (X2, Y2) offset from this image center is measured by image processing and is memorized in the control device 12.

<Step 6>

The offset due to the absolute positioning accuracy of the distance (X ₀ , Y ₀ ) between the imaging device 9 and the discharge device 16 is calculated based on the measurement result at the first imaging position and the measurement result at the second imaging position. the amount. In other words, by subtracting the measurement result (X2, Y2) of the second imaging position from the measurement result (X1, Y1) of the first imaging position, the absolute positioning accuracy of the distance between the imaging device 9 and the ejection device 16 is calculated. The resulting position offset. Here, as described above, since the center of the photographing center of the photographing device 9 and the center of the discharge port of the discharge device 16 are located on the same straight line in the X direction (symbol 6), the offset amount in the X direction (symbol 6) is calculated (X1- X2), you can find the position offset. Further, since the offset when the substrate 14 is placed on the work table 15 is removed by the above-described subtraction operation, the calculation result is only the positional shift amount caused by the absolute positioning accuracy of the drive device 2.

<Step 7>

After the positional shift amount (correction amount) after the subtraction is calculated, the position coordinate to which the correction amount is added is set as the application start position, and the coating position is corrected.

In the coating position correction process described above, since the measured position shift amount is used as the correction value at the time of coating, it is preferable to perform it before the coating operation. In the case where a plurality of application objects 13 are continuously performed (continuously), the above-described coating position correction process is repeatedly executed.

Fig. 4 is an explanatory view showing another coating position correction process in the coating apparatus of the embodiment. Further, in the coating position correction process, as in Fig. 2, the head does not move in the Y direction (symbol 7).

<Step 1>

When the linear motion device 10 is kept in the stopped state, the imaging device 9 is moved to the correction position by the drive device 2 (see FIG. 4(a)). The position (Xa', Ya') of the head after the movement is taken as the first photographing position. At this time, the linear motion device 10 is the first position, and the X-direction movement of the linear motion device 10 to the Y-axis driving device 4 on the substrate 14 in the next step is secured in the first position.

<Step 2>

At the first photographing position (Xa', Ya'), the corner portion (upper right) of the object to be coated 13 is imaged by the photographing device 9, and the image center is offset by the image processing. The value (X1, Y1) is stored in the control device 12.

<Step 3>

When the linear motion device 10 is kept in the stopped state, the X-axis driving device 3 of the driving device 2 is driven to move the head toward the X direction (symbol 11, left direction of FIG. 4) so that the ejection device 16 Go to the position immediately before the photographing device 9 (the position in Fig. 4(a)) (refer to Fig. 4(b)). The linear motion device 10 is held at the first position where the X-direction movement is ensured.

<Step 4>

The driving device 2 is moved to the X position (symbol 11, right direction of FIG. ). The position of the head after the movement is taken as the second photographing position (Xa", Ya"). The linear motion device 10 is the second position in which the X-direction stroke is not secured.

<Step 5>

At the second photographing position (Xa", Ya"), the object to be coated 13 is applied by the photographing device 9. The corner (upper right) is photographed, and the value (X2, Y2) offset from the center of the image is measured by image processing and stored in the control device 12.

<Steps 6 and 7>

The procedure for calculating the offset amount of the drive device 2 due to the absolute positioning accuracy on the distance (X ₀ , Y ₀ ) between the imaging device 9 and the discharge device 16 is the same as that of FIG. 2, and thus the description thereof is omitted.

In this manner, by using the linear motion device 10, the positional shift measurement of the same object 13 is performed by the one imaging device 9 at the first imaging position and the second imaging position, and the difference between the measurement results is obtained. The influence of the absolute positioning accuracy is minimized, so that the coating position correction with high precision can be performed.

Further, by performing the above-described coating position correction process, it is possible to perform measurement and correction with high precision even if components having particularly excellent precision are not used for the components of the drive device 2. Moreover, since it is not necessary to use a component with high precision, there is an advantage that cost can be suppressed.

Further, even if the components of the drive device 2 and the like are worn out due to long-term use, the accuracy is gradually lowered, and by using the above-described coating position correction process, it is possible to perform measurement and correction with high precision.

Hereinafter, the detailed configuration of the present invention will be described based on the embodiments, but the present invention is not limited to the embodiments.

[Examples]

Fig. 5 is a schematic perspective view showing an embodiment of a coating device having a coating position correction function.

The coating device 1 of the embodiment includes the driving device 2, the imaging device 9, the linear motion device 10, the control device 12, the work table 15, and the discharge device that constitute the coating device of the embodiment. In addition to the 16th, the discharge control device 29, the conveyance device 22, the gantry 17, the cover 26, the display lamp 30, the touch panel 31, and the like are added. In the following description, the description of the same portions as the embodiment will be omitted, and the different portions will be mainly described.

Comparing the embodiment and the comparative example, the Y-axis driving device 4 constituting the driving device 2 of the embodiment has different points of two axes of two sliders. When the application target 13 or the substrate 14 is large and the moving distance in the X direction (symbol 6) is long, in order to improve the accuracy, the Y-axis driving device 4 is set to the two axes as in the embodiment. good. Alternatively, the Y-axis driving device 4 may be provided as a single shaft, and a guide rail parallel to the track supporting the slider of the Y-axis driving device 4 may be provided to support at two points, thereby improving accuracy. Further, in order to provide the conveying device 22 across the entire width of the coating device 1, the driving device 2 is provided on the platform 21 so as to span the devices.

The coating device 1 of the embodiment includes a device for delivering a previous step (not shown), a loader/unloader, and a transfer device 22 on which the substrate 14 of the application target 13 is placed. The transport device 22 includes two support members 23 that are disposed in parallel with the width of the substrate 14 to be transported, and a transport mechanism 24 that is provided above the support member 23.

The support member 23 is provided with an open plate-like member and is provided on the stand 17 in an upright manner.

The conveyance mechanism 24 rotates a belt (not shown) by rotating a drum (not shown) by a motor or the like, and conveys the substrate 14 placed on the belt. That is, the substrate 14 is conveyed by the transport mechanism 24 in the direction of the arrow indicated by the symbol 25 (in other words, in the direction from the carry-in hole 27 to the carry-out hole 28). The embodiment of the conveying device 22 is not limited to the above-described belt, and as an alternative, for example, a robot having an arm may be used to deliver the substrate.

The work table 15 is provided between the two support members 23 of the conveyance device 22, and has a raised position and a lowered position. When the substrate 14 is stopped at the work position, the work table 15 The raised position is supported and fixed in such a manner that the substrate 14 is lifted from below. When the substrate is transported, the work table 15 is lowered from the substrate 14 so as not to come into contact with the substrate 14. As the means for lifting the work table 15, for example, a combination of a motor and a screw, a cylinder, or the like can be used. In order to fix the substrate 14 to the work table 15, in addition to the method of the embodiment, the substrate 14 may be sandwiched between the pressing member (not shown) and the work table 15 provided in the transport mechanism 24 at the work table ascending position. fixed.

In the substrate 14 of the embodiment, a plurality of application objects 13 may be arranged in a row, and not only the application object 13 may be provided, but also a plurality of application objects 13 as shown in the drawing may be continuously operated. When a plurality of application objects 13 are arranged in a row, it is preferable to perform the above-described measurement and correction operations for each of the application objects 13. By performing each of the plurality of coating objects 13, it is possible to reduce the error caused by the absolute positioning accuracy for the entire substrate 14 as well as not only the single object to be coated 13. For example, in the prior art, there is an error of about 30 μm as the coating position, but the apparatus of the present embodiment can be reduced to an error of several μm.

The gantry 17 of the coating apparatus 1 of the embodiment is upwardly covered by a casing 26 indicated by a broken line. This is to ensure safety and prevent the intrusion of foreign matter such as dust and dust. However, it is not a completely enclosed space, and holes 27 for carrying in the substrate 14 and holes 28 for carrying out are provided on both sides thereof to partially protrude the conveying mechanism 24 of the conveying device 22. Further, a door (not shown) is provided on the front surface to open and close, whereby the discharge device 16 and the like in the coating device 1 can be easily operated. Further, in order to be able to see the inside in a closed state, it is preferable that a portion of the cover 26 (for example, a front door or the like) is formed of a transparent material such as resin.

A space for accommodating the discharge control device 29 or the like for controlling the discharge device 16 is provided on the inner upper surface portion of the casing 26. If looking at the outside of the casing 26, then The upper surface of the casing 26, that is, the top surface, is provided with a display lamp 30 for notifying the worker or the like of the state of the apparatus 20.

Further, a touch panel 31 connected to the control device 12 and used to operate the coating device 1 is disposed on the front side of the left side surface of the casing 26. The touch panel 31 functions as an input device for inputting a setting value or the like and a display device for displaying an image 18 reflected by the imaging device 9 as a part of the control device 12.

(industrial availability)

The present invention can be used not only for the correction of the coating position in the coating device and the coating method, but also for the correction of the tool position in the case of a machine tool such as a lathe, a milling machine or a boring machine whose numerical operation is controlled. In the case where the working head device is a measuring device, the position of the measuring device is corrected, and the working device and the working method having high positional accuracy are required.

1‧‧‧ Coating device

3‧‧‧X-axis drive unit 3

4‧‧‧Y-axis drive unit 4

5‧‧‧Z-axis drive

9‧‧‧Photographing device

10‧‧‧Directional device

13‧‧‧Applying object

14‧‧‧Substrate

16‧‧‧ spitting device

17‧‧‧ 台台

Claims (7)

A working device including: a work table in which a work object is disposed directly or indirectly; a work head device for performing work on a work object; and an image capture device that performs at least a part of the work table a driving device that relatively moves the working head device and the work table in the XYZ direction; and a control device that performs image processing on the image captured by the photographing device, thereby measuring the positional offset of the working head device, The working device is characterized in that a linear motion device is provided, and the imaging device and the working head device are attached to the linear motion device, and are movable in the X direction or the Y direction to the first position and the second position, and are directly moved. The device is mounted on the driving device, and is configured to enable the linear motion device to reciprocate in the same direction as the reciprocating movement direction of the linear motion device by the driving device, and the control device is configured to be in the first position according to the directing device. The position shift amount (X1, Y1) obtained by performing image processing on the captured first correction image, and the second correction taken by the photographing device with respect to the linear motion device at the second position Offset difference between the position (X2, Y2) of the image processing of the acquired image, to be a position shift amount calculation means of the drive. The working device according to claim 1, wherein the control device can perform the following steps, that is, the first step of moving the linear motion device including the imaging device to the first imaging position by the driving device; The first correction image is captured by the imaging device; and in the third step, the positional shift amount (X1, Y1) in the first correction image is obtained by image processing and stored in the control device; In the fourth step, the linear motion device is moved in a direction by a certain distance, and then the driving device moves the linear motion device to the same distance as the one direction in the opposite direction to the one direction, or is driven by the driving device. The moving device moves a certain distance in one direction, and then moves the linear motion device in the opposite direction to the one direction, and moves the same distance to the second imaging position, thereby moving to the second imaging position; the fifth step, by means of the imaging device The second correction image is captured; in the sixth step, the position shift amount (X2, Y2) in the second correction image is obtained by image processing and stored in the control device; and the seventh step is the first step. The position shift amount (X1, Y1) in the correction image is subtracted from the position shift amount (X2, Y2) in the second correction image to calculate the correction amount; and the eighth step is based on the seventh The correction amount calculated in the step corrects the work position of the work head device. The working device according to claim 1 or 2, further comprising a conveying device that delivers an object to be worked with the external device. The working device of claim 1 or 2, wherein the reciprocating movement of the linear motion device is equal to or greater than a distance between the imaging device and the working head device and shorter than the driving force of the driving device. distance. The working device according to claim 1 or 2, wherein the working head device is a discharging device. An operation method is the operation method of the working device of the first application of the patent application, wherein the operation method is characterized in that the control device performs the following steps, that is, the first step, before the operation of the work head device is started. Moving the linear motion device including the imaging device to the first imaging position by the driving device; In the second step, the first correction image is captured by the imaging device. In the third step, the positional shift amount (X1, Y1) in the first correction image is obtained by image processing and stored in the control device. In the fourth step, the linear motion device is moved in a direction by a certain distance, and then the driving device moves the linear motion device to the same distance as the one direction in the opposite direction to the one direction, or is driven by the driving device. The linear motion device moves a certain distance in one direction, and then moves the linear motion device to the second imaging position by moving the same distance from the predetermined distance in the opposite direction to the one direction; the fifth step, by photography The device captures the second correction image; in the sixth step, the positional shift amount (X2, Y2) in the second correction image is obtained by image processing and is stored in the control device; (1) The position shift amount (X1, Y1) in the correction image is subtracted from the position shift amount (X2, Y2) in the second correction image to calculate the correction amount; and the eighth step is based on The correction amount calculated in step 7 corrects the working position of the working head device . The operation method of the sixth aspect of the invention, wherein the work object is composed of a plurality of work objects, and the control device executes the first to eighth steps before the start of each work on the work object.