TW201423019A - Vapor chamber and method of manufacturing the same - Google Patents

Vapor chamber and method of manufacturing the same Download PDF

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Publication number
TW201423019A
TW201423019A TW101145878A TW101145878A TW201423019A TW 201423019 A TW201423019 A TW 201423019A TW 101145878 A TW101145878 A TW 101145878A TW 101145878 A TW101145878 A TW 101145878A TW 201423019 A TW201423019 A TW 201423019A
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Taiwan
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metal cover
edge
capillary structure
temperature equalizing
equalizing plate
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TW101145878A
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Chinese (zh)
Inventor
Jen-Cheng Lin
Chien-Hung Sun
Chun Zhou
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Cooler Master Co Ltd
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Priority to TW101145878A priority Critical patent/TW201423019A/en
Publication of TW201423019A publication Critical patent/TW201423019A/en

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Abstract

A method of manufacturing a vapor chamber includes steps of: attaching a first edge of a first metal cover plate to a second edge of a second metal cover plate; placing the first metal cover plate and the second metal cover plate on a die after attachment; and using a punch head to punch the first edge and the second edge in a direction toward the die so as to seal the first edge and the second edge completely.

Description

均溫板及其製造方法 Temperature equalizing plate and manufacturing method thereof

本發明關於一種均溫板及其製造方法,尤指一種利用沖壓製程使二金屬蓋板邊緣形成密封狀態之均溫板及其製造方法。 The invention relates to a temperature equalizing plate and a manufacturing method thereof, in particular to a temperature equalizing plate which forms a sealed state of an edge of a two metal cover plate by a stamping process and a manufacturing method thereof.

均溫板之工作原理係以其封閉於板狀腔體中工作流體之蒸發凝結循環作動,使其具快速均溫的特性,從而具快速熱傳導及熱擴散的功能。一般而言,均溫板係由金屬殼體、毛細結構及工作流體經退火、抽真空及封焊等製程所製成。然而,相較於熱管,習知均溫板的劣勢主要展現於其高製造成本所衍生的高單價,而其高製造成本則主要來自於金屬殼體的封焊技術。因此,如何降低均溫板之金屬殼體封焊的製造成本,已成為現今均溫板的主要研究課題之一。 The working principle of the uniform temperature plate is operated by the evaporation condensation cycle of the working fluid enclosed in the plate-shaped cavity, so that it has the characteristics of rapid average temperature, thereby having the functions of rapid heat conduction and heat diffusion. In general, the uniform temperature plate is made of a metal casing, a capillary structure, and a working fluid through annealing, vacuuming, and sealing. However, compared with the heat pipe, the disadvantage of the conventional temperature plate is mainly reflected in the high unit price derived from its high manufacturing cost, and its high manufacturing cost mainly comes from the sealing technology of the metal casing. Therefore, how to reduce the manufacturing cost of the metal shell sealing welding of the uniform temperature plate has become one of the main research topics of the current uniform temperature plate.

本發明提供一種均溫板及其製造方法,其利用沖壓製程使二金屬蓋板邊緣形成密封狀態,以解決上述之問題。 The invention provides a temperature equalizing plate and a manufacturing method thereof, which use the stamping process to form a sealed state of the edge of the two metal cover plates to solve the above problems.

根據一實施例,本發明之均溫板之製造方法包含:將一第一金屬蓋板之一第一邊緣貼合於一第二金屬蓋板之一第二邊緣;將貼合後之該第一金屬蓋板與該第二金屬蓋板放置於一沖模上;以及以一沖頭朝該沖模的方向沖壓該第一邊緣與該第二邊緣,以使第一邊緣 與第二邊緣形成密封狀態。 According to an embodiment of the present invention, a method for manufacturing a temperature equalizing plate includes: bonding a first edge of a first metal cover to a second edge of a second metal cover; a metal cover plate and the second metal cover plate are placed on a die; and the first edge and the second edge are punched toward the die in a punch to make the first edge Forming a sealed state with the second edge.

根據另一實施例,本發明之均溫板包含一第一金屬蓋板、一第二金屬蓋板、一毛細結構以及一工作流體。第一金屬蓋板之一第一邊緣與第二金屬蓋板之一第二邊緣以上述製造方法經由沖壓製程而形成密封狀態。毛細結構形成於第一金屬蓋板與第二金屬蓋板之間。工作流體設置於第一金屬蓋板與第二金屬蓋板之間。 According to another embodiment, the temperature equalization plate of the present invention comprises a first metal cover, a second metal cover, a capillary structure, and a working fluid. The first edge of one of the first metal cover plates and the second edge of one of the second metal cover plates are sealed by a stamping process in the above manufacturing method. The capillary structure is formed between the first metal cover and the second metal cover. The working fluid is disposed between the first metal cover and the second metal cover.

綜上所述,本發明係利用沖壓製程使均溫板之二金屬蓋板邊緣形成密封狀態。不僅製程簡單,且可有效提高均溫板之製造效率,進而降低製造成本。 In summary, the present invention utilizes a stamping process to form a sealed state of the edges of the two metal cover plates of the temperature equalization plate. The process is simple, and the manufacturing efficiency of the temperature equalizing plate can be effectively improved, thereby reducing the manufacturing cost.

關於本發明之優點與精神可以藉由以下的發明詳述及所附圖式得到進一步的瞭解。 The advantages and spirit of the present invention will be further understood from the following detailed description of the invention.

請參閱第1圖至第4圖,第1圖為根據本發明第一實施例之均溫板之製造方法的流程圖,第2圖為沖壓前的均溫板1的剖面示意圖,第3圖為沖壓後的均溫板1的剖面示意圖,第4圖為沖壓後的均溫板1的第一邊緣100與第二邊緣120的顯微結構圖。 Please refer to FIG. 1 to FIG. 4 , FIG. 1 is a flow chart of a method for manufacturing a temperature equalizing plate according to a first embodiment of the present invention, and FIG. 2 is a schematic cross-sectional view of a temperature equalizing plate 1 before pressing, FIG. 3 . It is a schematic cross-sectional view of the temperature equalizing plate 1 after punching, and FIG. 4 is a microscopic structural view of the first edge 100 and the second edge 120 of the uniformly heated plate 1 after pressing.

首先,執行步驟S10,於第一金屬蓋板10與第二金屬蓋板12之間形成一毛細結構14,其中毛細結構14可為溝槽式毛細結構、 多孔性毛細結構、網狀毛細結構、粉末燒結毛細結構或複合式毛細結構,視實際應用而定。需說明的是,上述之複合式毛細結構可由溝槽式毛細結構、多孔性毛細結構、網狀毛細結構與粉末燒結毛細結構中的至少兩種毛細結構組成。接著,執行步驟S12,將第一金屬蓋板10之一第一邊緣100貼合於第二金屬蓋板12之一第二邊緣120,並且於第一金屬蓋板10與第二金屬蓋板12之間設置複數個支撐柱16,以支撐第一金屬蓋板10與第二金屬蓋板12,進而避免第一金屬蓋板10與第二金屬蓋板12產生凹陷或隆起等問題。 First, a step S10 is performed to form a capillary structure 14 between the first metal cover 10 and the second metal cover 12, wherein the capillary structure 14 can be a grooved capillary structure. The porous capillary structure, the network capillary structure, the powder sintered capillary structure or the composite capillary structure depends on the practical application. It should be noted that the composite capillary structure described above may be composed of at least two capillary structures of a grooved capillary structure, a porous capillary structure, a network capillary structure and a powder sintered capillary structure. Then, in step S12, the first edge 100 of the first metal cover 10 is attached to the second edge 120 of the second metal cover 12, and the first metal cover 10 and the second metal cover 12 are A plurality of support columns 16 are disposed to support the first metal cover 10 and the second metal cover 12, thereby avoiding problems such as depression or bulging of the first metal cover 10 and the second metal cover 12.

接著,執行步驟S14,將貼合後之第一金屬蓋板10與第二金屬蓋板12放置於一沖模30上。接著,執行步驟S16,以一沖頭32朝沖模30的方向(如第3圖中的箭頭A所指示的方向)沖壓第一邊緣100與第二邊緣120,以使第一邊緣100與第二邊緣120形成密封狀態。於此實施例中,第一金屬蓋板10與第二金屬蓋板12可由銅或鋁等軟質金屬製成,但不以此為限。在以適當的力量沖壓第一邊緣100與第二邊緣120後,第一邊緣100與第二邊緣120的金屬晶界會產生破裂然後再結合,而使第一邊緣100與第二邊緣120形成密封狀態,如第4圖所示。藉此,本發明即可經由簡單的沖壓製程快速且有效地密封均溫板1之四周邊緣,進而降低製造成本。需說明的是,由於第一邊緣100與第二邊緣120係經由沖壓製程而形成密封狀態,因此第一邊緣100與第二邊緣120之間不會有焊料、密封膠等外來物質殘留,也不會出現焊接的痕跡,如第4圖所示。 Next, step S14 is performed to place the bonded first metal cover 10 and the second metal cover 12 on a die 30. Next, step S16 is performed to punch the first edge 100 and the second edge 120 with a punch 32 in the direction of the die 30 (in the direction indicated by the arrow A in FIG. 3) so that the first edge 100 and the second edge The edge 120 forms a sealed state. In this embodiment, the first metal cover 10 and the second metal cover 12 may be made of soft metal such as copper or aluminum, but not limited thereto. After the first edge 100 and the second edge 120 are stamped with a suitable force, the metal grain boundaries of the first edge 100 and the second edge 120 may be broken and then recombined, so that the first edge 100 and the second edge 120 form a seal. Status, as shown in Figure 4. Thereby, the present invention can quickly and effectively seal the peripheral edges of the temperature equalizing plate 1 via a simple stamping process, thereby reducing the manufacturing cost. It should be noted that since the first edge 100 and the second edge 120 form a sealed state through the stamping process, no foreign matter such as solder or sealant remains between the first edge 100 and the second edge 120, and There will be traces of soldering, as shown in Figure 4.

接著,執行步驟S18,於第一金屬蓋板10與第二金屬蓋板12之間填充一工作流體(例如,水)18。接著,執行步驟S20,將第一金屬蓋板10與第二金屬蓋板12之間的腔體抽真空,以完成第3圖所示之均溫板1的製造。 Next, step S18 is performed to fill a working fluid (eg, water) 18 between the first metal cover 10 and the second metal cover 12. Next, in step S20, the cavity between the first metal cover 10 and the second metal cover 12 is evacuated to complete the manufacture of the temperature equalizing plate 1 shown in FIG.

如第3圖所示,製造完成之均溫板1即包含上述之第一金屬蓋板10、第二金屬蓋板12、毛細結構14、支撐柱16以及工作流體18。於沖頭32沖壓第一邊緣100與第二邊緣120時,沖頭32可自第一邊緣100與第二邊緣120切除尾端材料34,以使第一邊緣100與第二邊緣120之密封外側面較為平整。 As shown in FIG. 3, the manufactured uniform temperature plate 1 includes the first metal cover 10, the second metal cover 12, the capillary structure 14, the support column 16, and the working fluid 18 described above. When the punch 32 stamps the first edge 100 and the second edge 120, the punch 32 can cut the trailing end material 34 from the first edge 100 and the second edge 120 to seal the first edge 100 from the second edge 120. The side is relatively flat.

配合第3圖,請參閱第5圖,第5圖為根據本發明第二實施例之沖壓後的均溫板1'的剖面示意圖。均溫板1'與上述的均溫板1的主要不同之處在於,均溫板1'另包含一夾扣20,用以夾持形成密封狀態之第一邊緣100與第二邊緣120,以加強密封效果。需說明的是,第5圖中與第3圖中所示相同標號的元件,其作用原理大致相同,在此不再贅述。 Referring to Fig. 3, please refer to Fig. 5. Fig. 5 is a schematic cross-sectional view of the stamped uniform temperature plate 1' according to the second embodiment of the present invention. The main difference between the temperature equalizing plate 1' and the above-mentioned temperature equalizing plate 1 is that the temperature equalizing plate 1' further includes a clip 20 for clamping the first edge 100 and the second edge 120 forming the sealed state, Strengthen the sealing effect. It should be noted that the components of the same reference numerals as those shown in FIG. 3 are substantially the same, and will not be described again.

配合第2圖,請參閱第6圖,第6圖為根據本發明第三實施例之沖壓前的均溫板1"的剖面示意圖。均溫板1"與上述的均溫板1的主要不同之處在於,均溫板1"之第一邊緣100與第二邊緣120於沖壓前具有凹凸表面結構102、122。當均溫板1"之第一邊緣100與第二邊緣120以第3圖中的沖模30與沖頭32進行沖壓時,凹凸表面 結構102、122可加強破壞金屬晶界的效果,進而加強密封效果。於此實施例中,凹凸表面結構102、122可為鋸齒狀,但不以此為限。此外,本發明亦可僅於第一邊緣100上形成凹凸表面結構102或僅於第二邊緣120上形成凹凸表面結構122。換言之,第一邊緣100與第二邊緣120的至少其中之一於沖壓前可具有凹凸表面結構,視實際應用而定。需說明的是,第6圖中與第2圖中所示相同標號的元件,其作用原理大致相同,在此不再贅述。 Referring to FIG. 2, please refer to FIG. 6. FIG. 6 is a schematic cross-sectional view of the temperature equalizing plate 1" before punching according to the third embodiment of the present invention. The main temperature plate 1" is different from the above-mentioned uniform temperature plate 1. The first edge 100 and the second edge 120 of the temperature equalizing plate 1" have concave and convex surface structures 102, 122 before stamping. When the first edge 100 and the second edge 120 of the temperature equalizing plate 1" are in FIG. When the die 30 and the punch 32 are punched, the uneven surface The structures 102, 122 can enhance the effect of destroying the grain boundary of the metal, thereby enhancing the sealing effect. In this embodiment, the uneven surface structures 102, 122 may be in a zigzag shape, but are not limited thereto. In addition, the present invention may also form the concave-convex surface structure 102 only on the first edge 100 or the concave-convex surface structure 122 only on the second edge 120. In other words, at least one of the first edge 100 and the second edge 120 may have a textured surface structure prior to stamping, depending on the application. It should be noted that the components of the same reference numerals as those shown in FIG. 2 have substantially the same operation principle, and are not described herein again.

綜上所述,本發明係利用沖壓製程使均溫板之二金屬蓋板邊緣形成密封狀態。不僅製程簡單,且可有效提高均溫板之製造效率,進而降低製造成本。此外,本發明可夾扣夾持形成密封狀態之二金屬蓋板邊緣,以加強密封效果。 In summary, the present invention utilizes a stamping process to form a sealed state of the edges of the two metal cover plates of the temperature equalization plate. The process is simple, and the manufacturing efficiency of the temperature equalizing plate can be effectively improved, thereby reducing the manufacturing cost. In addition, the present invention can clamp and clamp the edges of the two metal cover sheets in a sealed state to enhance the sealing effect.

以上所述僅為本發明之較佳實施例,凡依本發明申請專利範圍所做之均等變化與修飾,皆應屬本發明之涵蓋範圍。 The above are only the preferred embodiments of the present invention, and all changes and modifications made to the scope of the present invention should be within the scope of the present invention.

1、1'、1"‧‧‧均溫板 1, 1 ', 1" ‧ ‧ temperate plate

10‧‧‧第一金屬蓋板 10‧‧‧First metal cover

12‧‧‧第二金屬蓋板 12‧‧‧Second metal cover

14‧‧‧毛細結構 14‧‧‧Capillary structure

16‧‧‧支撐柱 16‧‧‧Support column

18‧‧‧工作流體 18‧‧‧Working fluid

20‧‧‧夾扣 20‧‧‧ Clips

30‧‧‧沖模 30‧‧‧ die

32‧‧‧沖頭 32‧‧‧ Punch

34‧‧‧尾端材料 34‧‧‧End material

100‧‧‧第一邊緣 100‧‧‧ first edge

120‧‧‧第二邊緣 120‧‧‧ second edge

102、122‧‧‧凹凸表面結構 102, 122‧‧‧ concave surface structure

S10-S20‧‧‧步驟 S10-S20‧‧‧Steps

第1圖為根據本發明第一實施例之均溫板之製造方法的流程圖。 Fig. 1 is a flow chart showing a method of manufacturing a temperature equalizing plate according to a first embodiment of the present invention.

第2圖為沖壓前的均溫板的剖面示意圖。 Figure 2 is a schematic cross-sectional view of the temperature equalization plate before stamping.

第3圖為沖壓後的均溫板的剖面示意圖。 Figure 3 is a schematic cross-sectional view of the uniform temperature plate after stamping.

第4圖為沖壓後的均溫板的第一邊緣與第二邊緣的顯微結構圖。 Figure 4 is a micrograph of the first and second edges of the stamped isothermal plate.

第5圖為根據本發明第二實施例之沖壓後的均溫板的剖面示意圖。 Fig. 5 is a schematic cross-sectional view showing a stamped uniform temperature plate according to a second embodiment of the present invention.

第6圖為根據本發明第三實施例之沖壓前的均溫板的剖面示意圖。 Fig. 6 is a schematic cross-sectional view showing a temperature equalizing plate before punching according to a third embodiment of the present invention.

1‧‧‧均溫板 1‧‧‧Wall plate

10‧‧‧第一金屬蓋板 10‧‧‧First metal cover

12‧‧‧第二金屬蓋板 12‧‧‧Second metal cover

14‧‧‧毛細結構 14‧‧‧Capillary structure

16‧‧‧支撐柱 16‧‧‧Support column

18‧‧‧工作流體 18‧‧‧Working fluid

30‧‧‧沖模 30‧‧‧ die

32‧‧‧沖頭 32‧‧‧ Punch

34‧‧‧尾端材料 34‧‧‧End material

100‧‧‧第一邊緣 100‧‧‧ first edge

120‧‧‧第二邊緣 120‧‧‧ second edge

Claims (12)

一種均溫板之製造方法,包含:將一第一金屬蓋板之一第一邊緣貼合於一第二金屬蓋板之一第二邊緣;將貼合後之該第一金屬蓋板與該第二金屬蓋板放置於一沖模上;以及以一沖頭朝該沖模的方向沖壓該第一邊緣與該第二邊緣,以使該第一邊緣與該第二邊緣形成密封狀態。 A method for manufacturing a temperature equalizing plate includes: bonding a first edge of a first metal cover to a second edge of a second metal cover; and bonding the first metal cover to the first metal cover The second metal cover is placed on a die; and the first edge and the second edge are punched in a direction of the die with a punch to form a sealed state between the first edge and the second edge. 如請求項1所述之均溫板之製造方法,另包含:於該沖頭沖壓該第一邊緣與該第二邊緣時,自該第一邊緣與該第二邊緣切除尾端材料。 The manufacturing method of the temperature equalizing plate according to claim 1, further comprising: cutting the material of the tail end from the first edge and the second edge when the punch punches the first edge and the second edge. 如請求項1所述之均溫板之製造方法,其中該第一邊緣與該第二邊緣的至少其中之一於沖壓前具有一凹凸表面結構。 The method of manufacturing a temperature equalizing plate according to claim 1, wherein at least one of the first edge and the second edge has a concave-convex surface structure before punching. 如請求項1所述之均溫板之製造方法,另包含:以一夾扣夾持形成密封狀態之該第一邊緣與該第二邊緣。 The method for manufacturing a temperature equalizing plate according to claim 1, further comprising: clamping the first edge and the second edge in a sealed state by a clip. 如請求項1所述之均溫板之製造方法,其中該第一金屬蓋板與該第二金屬蓋板由銅或鋁製成。 The method of manufacturing a temperature equalizing plate according to claim 1, wherein the first metal cover and the second metal cover are made of copper or aluminum. 如請求項1所述之均溫板之製造方法,另包含: 於該第一金屬蓋板與該第二金屬蓋板之間形成一毛細結構;於該第一金屬蓋板與該第二金屬蓋板之間設置複數個支撐柱,以支撐該第一金屬蓋板與該第二金屬蓋板;以及於該第一金屬蓋板與該第二金屬蓋板之間填充一工作流體。 The method for manufacturing a temperature equalizing plate according to claim 1, further comprising: Forming a capillary structure between the first metal cover and the second metal cover; and providing a plurality of support columns between the first metal cover and the second metal cover to support the first metal cover a plate and the second metal cover; and filling a working fluid between the first metal cover and the second metal cover. 如請求項6所述之均溫板之製造方法,其中該毛細結構為溝槽式毛細結構、多孔性毛細結構、網狀毛細結構、粉末燒結毛細結構或複合式毛細結構。 The method for producing a uniform temperature plate according to claim 6, wherein the capillary structure is a grooved capillary structure, a porous capillary structure, a network capillary structure, a powder sintered capillary structure or a composite capillary structure. 一種均溫板,包含:一第一金屬蓋板;一第二金屬蓋板,該第一金屬蓋板之一第一邊緣與該第二金屬蓋板之一第二邊緣以如請求項1所述之製造方法經由沖壓製程而形成密封狀態;一毛細結構,形成於該第一金屬蓋板與該第二金屬蓋板之間;以及一工作流體,填充於該第一金屬蓋板與該第二金屬蓋板之間。 A temperature equalizing plate comprising: a first metal cover; a second metal cover, a first edge of the first metal cover and a second edge of the second metal cover as claimed in claim 1 The manufacturing method is formed into a sealed state by a stamping process; a capillary structure is formed between the first metal cover and the second metal cover; and a working fluid is filled in the first metal cover and the first Between two metal cover plates. 如請求項8所述之均溫板,另包含複數個支撐柱,設置於該第一金屬蓋板與該第二金屬蓋板之間,以支撐該第一金屬蓋板與該第二金屬蓋板。 The temperature equalizing plate according to claim 8, further comprising a plurality of supporting columns disposed between the first metal cover and the second metal cover to support the first metal cover and the second metal cover board. 如請求項8所述之均溫板,另包含一夾扣,用以夾持形成密封 狀態之該第一邊緣與該第二邊緣。 The temperature equalizing plate according to claim 8, further comprising a clip for clamping and forming a seal The first edge of the state and the second edge. 如請求項8所述之均溫板,其中該第一金屬蓋板與該第二金屬蓋板由銅或鋁製成。 The temperature equalizing plate of claim 8, wherein the first metal cover and the second metal cover are made of copper or aluminum. 如請求項8所述之均溫板,其中該毛細結構為溝槽式毛細結構、多孔性毛細結構、網狀毛細結構、粉末燒結毛細結構或複合式毛細結構。 The temperature equalizing plate according to claim 8, wherein the capillary structure is a grooved capillary structure, a porous capillary structure, a mesh capillary structure, a powder sintered capillary structure or a composite capillary structure.
TW101145878A 2012-12-06 2012-12-06 Vapor chamber and method of manufacturing the same TW201423019A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111141165A (en) * 2018-11-02 2020-05-12 昆山巨仲电子有限公司 Sealing method and structure of vapor chamber
CN113140830A (en) * 2020-01-20 2021-07-20 广州力及热管理科技有限公司 Temperature-equalizing plate element with heating function and power battery module applying same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111141165A (en) * 2018-11-02 2020-05-12 昆山巨仲电子有限公司 Sealing method and structure of vapor chamber
CN113140830A (en) * 2020-01-20 2021-07-20 广州力及热管理科技有限公司 Temperature-equalizing plate element with heating function and power battery module applying same

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