TW201420297A - Scribing wheel and manufacturing method thereof - Google Patents

Abstract

An object of the present invention is to make grinding or groove processing of a scribing wheel easy for a scribing wheel that comprises a diamond film formed on a surface thereof. The solution is that a V-shaped blade tip end is formed on a circumferential portion of a circular plate-like scribing wheel base material, and a diamond film that is doped with electrically conductive impurities is formed on the blade tip end through a CVD process. Afterwards, electrical power is supplied between the scribing wheel that comprises the diamond film formed thereon and a grindstone. In this way, a zero point that serves as a reference for grinding can be identified. Then a ridge portion of the diamond film is ground to be parallel with the ridge so as to make the tip end sharp. Since the diamond film is provided with electrical conductivity, it is possible to make grinding or groove processing easily performed.

Description

Scoring wheel and manufacturing method thereof

The present invention relates to crimping a substrate of a brittle material. Rotating and scoring the marking wheel and its manufacturing method.

A conventional scribing wheel is a base plate made of a super hard alloy or a polycrystalline sintered diamond (hereinafter referred to as PCD) as a base material, as shown in Patent Document 1. The PCD circular plate is formed by sintering diamond particles together with cobalt (Co) or the like. The scribing wheel is formed by cutting the edge of the circumference obliquely from both sides of the circular plate which becomes the base material, and forming a V-shaped blade front end on the circumferential surface. The scribing wheel formed in such a manner is rotatably mounted on the scribing head of the scoring device, and is pressed against the brittle material substrate with a predetermined load to move along the surface of the brittle material substrate. Scratch while turning.

Patent Document 2 discloses a glass cutting blade in which a front end surface of a diamond-shaped film has a V-shaped blade shape in order to increase the life of the glass cutting blade. This glass cutting blade is coated with a diamond film on the front end surface of a blade formed of a ceramic having good compatibility with diamonds, and the diamond film is subjected to surface polishing treatment and shaped. It is disclosed that the blade edge cutting blade can be used to shorten the life of the blade, and the high-hardness glass can be cut so that the cut surface becomes smooth.

Patent Document 1: International Publication WO2003/51784

Patent Document 2: Japanese Laid-Open Patent Publication No. 04-224128

A conventional scoring wheel formed of polycrystalline sintered diamond (PCD) is composed of diamond particles and a bonding material. Therefore, when a brittle material substrate having a high hardness such as ceramic is scribed, there is a strong wear. The shortcomings of the ground and short life. In addition, in recent years, the thickness of the glass has become thinner and larger, and the strength of the end surface of the brittle material substrate after the slashing and cracking of the brittle material substrate has been considerably required. However, in the conventional scoring wheel formed by PCD, the thickness of the front end of the blade and the ridge line are coarse due to the size of the diamond particles contained in the material, and it is also difficult to set the thickness of the blade to be coarse or not. Therefore, there is a disadvantage that the strength of the end surface of the brittle material substrate after the slashing of the brittle material substrate is reduced.

In the glass cutting blade described in Patent Document 2, the diamond film is polished. However, since the diamond film is not electrically conductive, the zero point of the reference position at the time of polishing cannot be detected by energization. Therefore, when the diamond film is polished, the deviation of the polishing start point is large due to the operator. In particular, in the case where the thickness of the diamond film is thin and the polishing operation is performed in the range of several μm to 10 μm, there is a problem that the influence is large and the workability at the time of processing becomes poor.

The present invention has been made in view of such a problem, and an object thereof is to provide a scribing wheel which can easily perform grinding or groove processing of a diamond film, and a method of manufacturing the same.

In order to solve the problem, the scribing wheel of the present invention is a scribing wheel having a ridge line along a circumferential portion and a tip end of the blade formed by the ridge line and inclined surfaces on both sides of the ridge line, and has a base and a base formed thereon. The diamond film on the front end surface of the knives is formed by a diamond film which is electrically conductive.

Here, it is also possible to have grooves formed at a predetermined interval in the ridge line portion of the diamond film, and to provide protrusions therebetween.

In order to solve the problem, the method for manufacturing a scribe wheel according to the present invention is a method for manufacturing a scriber wheel having a knurled end formed by a ridge line and an inclined surface on both sides of the ridge line along a circumferential portion of the circular plate. The center is provided with a through hole, and the center is a rotating shaft, and a front end portion of the blade is formed along the circumferential portion to form a scribing wheel substrate, and the front end portion of the scribing wheel substrate is doped by a chemical vapor phase growth method. Impurities and a diamond film on one side.

Here, the impurity is preferably boron (B).

Here, the diamond film may be polished while supplying power between the scribing wheel and the grindstone on which the diamond film is formed.

Here, the diamond film may be subjected to electric discharge machining to further form a tip end of the blade formed by the ridge line and the inclined surface.

Here, the cut grooves may be formed at predetermined intervals in the ridge line portion of the diamond film, and protrusions may be formed therebetween.

Here, the groove may be cut while supplying power between the diamond film and the grindstone.

Here, the groove may be formed by electrical discharge machining on the diamond film.

According to the invention having such characteristics, a diamond film having conductivity is formed on the scoring wheel, and the diamond film at the tip end of the blade is ground. In this way, it is possible to perform zero-point detection as a reference for grinding, perform sliding polishing by applying electric current and heating, and perform electric discharge machining, and can be easily manufactured. Further, in the inventions of claims 2 and 4, the front end of the blade using the scoring wheel is electrically conductive, the groove processing can be easily performed, and the scribing wheel having a high-permeation type having a diamond layer on the surface can be realized.

10, 30‧‧‧ marking wheel

11, 31‧‧‧ round board

12, 32‧‧‧through holes

13, 33‧‧‧ grinding surface

14, 34‧‧‧Diamond film

16‧‧‧Circular surface

25‧‧‧Power supply

35‧‧‧ trench

41‧‧‧Milling machine motor

42‧‧‧磨石

Fig. 1A is a front elevational view of a scribe wheel according to a first embodiment of the present invention.

Fig. 1B is a side view of the scribe wheel of the first embodiment.

Fig. 2A is an enlarged cross-sectional view showing a ridge line portion before the tip end of the blade of the first embodiment is polished.

Fig. 2B is an enlarged cross-sectional view showing a ridge line portion after polishing in the first embodiment.

Fig. 3A is a front elevational view of a scribe wheel of a third embodiment of the present invention.

Fig. 3B is an enlarged cross-sectional view showing a ridge line portion after polishing in the third embodiment.

Fig. 3C is an enlarged view of the circular portion shown in Fig. 3A.

Fig. 4 is a view showing a state of groove processing in the third embodiment.

Fig. 1A is a front view of a scribe wheel of an embodiment of the present invention, and Fig. 1B is a side view thereof. When the scribing wheel is manufactured, for example, first, as shown in FIG. 1A, a through hole 12 serving as a shaft hole is formed in the center of the disc 11 which becomes a scribing wheel base material such as a cemented carbide. Then, a shaft such as a motor (not shown) is communicated with the through hole 12, and the entire circumference of the circular plate 11 is rotated from the circular plate by rotating the central axis of the through hole 12 as the rotating shaft 12a. Both sides of the front and back are polished obliquely with respect to the rotating shaft 12a, and as shown in Fig. 1B, the inclined faces on both sides of the ridge line and the ridge line are formed in a V-shaped vertical cross section. The V-shaped bevel thus formed is used as the polishing surface 13.

Next, the formation of the diamond film will be described using an enlarged cross-sectional view of the ridge line portion of the tip end of the blade of Fig. 2A. First, the V-shaped abrasive surface 13 is previously set to a rough surface to facilitate adhesion of the diamond film. Next, after the diamond film which is a core having a submicron particle diameter or less is formed on the slope portion, the diamond film is grown by a chemical vapor phase growth reaction. Thus, the V-shaped bevel portion of the scoring wheel is formed by a chemical vapor phase growth method (CVD method) to form a film thickness. Such as 20~30μm diamond film 14.

In the present embodiment, when the diamond film is grown by the chemical vapor growth reaction, impurities such as boron are doped. Thereby, the diamond film 14 can be made into a film having conductivity. The conductivity of the diamond film 14 depends on the doping amount, and by increasing the conductivity, the discharge during discharge machining can be easily stabilized, the value of the electric discharge machining condition can be lowered, and the efficiency of electric discharge machining can be improved.

Thereafter, at least the front end portion is ground to sharpen the front end as described below. Fig. 2B is a partially enlarged cross-sectional view showing the state after the polishing. When it is so polished, it may become an obtuse angle of, for example, 5 to 10 degrees from the original diamond film 14. Further, the surface including the circle formed by the polished ridge line is made perpendicular to the rotation shaft 12a. Here, the region to be polished may be only a strip-shaped portion including a ridge line of the inclined surface at the center. The area of the width w of Fig. 2B indicates the polishing area of the diamond film on both sides of the front end portion, that is, the ridge line, for example, the width w is set to 10 to 20 μm.

At the time of grinding, the grindstone is rotated, and the tip end of the knurling wheel having the diamond film is ground. At this time, a power source is connected between the scoring wheel and the grindstone. Then, while the grindstone is rotated at a constant speed while the scoring wheel 10 is also rotated along the rotating shaft 12a, the distance to the grindstone is made close. Since the diamond film 14 is energized at the time of contact with the linear grindstone 20, it can be detected that the scoring wheel 10 and the grindstone 20 are in contact by energization. The contact is set to the zero point of the polishing start point, from which the diamond film is polished to an appropriate thickness. Further, by energization, in addition to heat generation due to frictional resistance upon contact, the diamond film 14 is heated by the Joule heat generated by the diamond film having a moderate electrical resistance. Therefore, the grinding of the diamond film 14 can also be carried out at a higher energy rate. When the polishing of one side is completed, the other surface is also polished in the same manner. In this way, the diamond film is electrically conductive, and the grindstone and the scribing wheel that is the object of processing are used to circulate a current, and the electric current can be supplied by the grinding. The grinding operation is carried out efficiently.

Next, a second embodiment of the present invention will be described. This embodiment differs from the first embodiment in the method of processing the inclined surface of the tip end of the blade. Since the diamond film 14 is electrically conductive, the inclined surface can be processed not only by mechanical polishing but also by electrical discharge machining to form a sharp ridge line. In the electrical discharge machining, wire electrical discharge machining can be performed by processing a wire that has been energized along the diamond film to be processed into a desired shape. Further, in addition to this, Die-sinking Electrical Discharge Machining can also be used. In the eagle-type electric discharge machining, the tip end of the knives can be processed by pressing the jig electrode with a mold having a reversed shape of the tip end of the knives for processing. After such a wire electric discharge machining or a sculpt electric discharge machining, in order to remove the deteriorated layer generated by the electric discharge machining, it is preferable to further perform the finishing polishing using the grindstone.

By performing the polishing or electric discharge machining in this manner, the thickness of the ridge line of the tip end portion of the blade which contributes to the diamond film scoring can be made thin. Therefore, when the brittle material substrate, for example, the ceramic substrate is scored and divided by using the scribing wheel, the end surface precision of the cut surface of the brittle material substrate can be improved, and the end surface strength can be improved.

Next, a third embodiment of the present invention will be described. Japanese Patent No. 3074143 discloses a scribing wheel having a high-permeation type in which a plurality of grooves are formed at a predetermined interval on a circumferential surface of a scribing wheel and a projection is formed therebetween. The invention can also be applied to such a rowing wheel. Fig. 3A is a front view of the scribing wheel of the embodiment, Fig. 3B is an enlarged cross-sectional view of a ridge line portion of the front end, and Fig. 3C is an enlarged view of a circular portion indicated by a one-dot chain line in Fig. 3A. When manufacturing the scribing wheel, first, as shown in FIG. 3A, a through hole 32 serving as a shaft hole is formed in the center of the disc 31 which is a scribing wheel base material such as a superhard alloy or a ceramic. Next, the rotation axis of the motor, etc. The through hole 32 communicates with the through hole 32, and the entire circumference of the circular plate 31 is polished from both sides to form a V shape. The V-shaped bevel thus formed is used as the polishing surface 33. Also in this case, as in the first embodiment, the diamond film 34 is plated by the CVD method at the tip end portion of the knurling wheel, and is polished by the above method.

Next, when the diamond film 34 is set to 20 μm, the groove 35 is formed in the range of the thickness of the diamond film 34 as shown in Fig. 3C. FIG. 4 is a view showing a state in which the grooves 35 are formed. As shown in FIG. 4, a disk-shaped grindstone 42 is attached to the shaft of the grinder motor 41 and rotated. The circumferential surface of the grindstone is formed in a V shape, and the groove 35 is formed on the circumferential portion of the scoring wheel 10 by the grindstone. In this case, as shown in FIG. 4, the power source 25 energizes between the scribing wheel 10 and the disc-shaped grindstone 42, and by detecting the zero point, the depth of the groove can be surely controlled. Further, the grinding process can be promoted by heating at the time of energization. After forming one groove as described above, the scribing wheel is rotated by a predetermined angle to be fixed, and the grinder motor 41 is further rotated to bring the grindstone 42 close to form a groove. Thus, grooves are formed at a certain distance from the entire circumference of the scoring wheel. Thus, in the case of manufacturing a high-impregnation type of marking wheel, the depth of the groove can be made uniform. The depth of the groove of the scoring wheel is, for example, about 0.5 to 10 μm depending on the thickness of the brittle material substrate.

In addition to the grinding, the grooves may be formed by electrical discharge machining of the diamond film or by laser processing.

Further, in addition to this, a groove may be formed in advance in the front end portion of the V-shaped blade of the scribing wheel substrate, and the diamond substrate may be plated by the CVD method and ground by the etched wheel substrate. Rowing.

The scribing wheel of the present invention provides a scribing wheel having a high abrasion resistance and peeling resistance and capable of cutting a brittle material substrate having a high end face strength, and is suitable for use in a scoring apparatus.

13‧‧‧Grinding surface

14‧‧‧Diamond film

w‧‧‧Width

Claims (9)

A scribing wheel is a lance having a ridge line along a circumferential portion and having an inclined surface on both sides of the ridge line, and is characterized in that: a diamond film having a front end surface of the blade formed on the substrate and the substrate The ridgeline is formed of a diamond film; the diamond film is electrically conductive. A scriber wheel according to the first aspect of the patent application, which has a groove formed at a predetermined interval in a ridge line portion of the diamond film, and is provided as a protrusion therebetween. A method for manufacturing a scoring wheel, wherein the scoring wheel has a blade front end formed by a ridge line and an inclined surface on both sides of the ridge line along a circumferential portion of the circular plate, wherein a through hole is provided at a center of the circular plate to The center is a rotating shaft, and a front end portion of the blade is formed along the circumferential portion to form a scoring wheel base material; at the front end portion of the scribing wheel substrate, a diamond film is formed by doping impurities while chemical vapor phase growth. . The manufacturing method of the marking wheel of claim 3, wherein the impurity is boron (B). A method of manufacturing a scriber according to the third aspect of the invention, wherein the diamond film is polished while supplying power between the scribe wheel and the grindstone on which the diamond film is formed. A manufacturing method of a scriber wheel according to the third aspect of the invention, wherein the diamond film is subjected to electrical discharge machining to further form a knives end end which is formed by a ridge line and a sloped surface. A method of manufacturing a scriber according to the third aspect of the invention, wherein the ridge line portion of the diamond film forms a cut groove at a predetermined interval, and a projection is formed therebetween. For example, the manufacturing method of the marking wheel of the seventh application patent scope, wherein one side of the diamond A power source is supplied between the film and the grindstone to cut the groove. The manufacturing method of the marking wheel of claim 7, wherein the groove is formed by electrical discharge machining on the diamond film.