TW201419930A - Infrared heater - Google Patents

Abstract

If first electromagnetic waves which include ultraviolet rays discharged by a filament (12) irradiate an inner tube (14), second electromagnetic waves in which the wavelength of the first electromagnetic waves is shifted to the longer wavelength side are discharged from the inner tube (14) by a membrane (14b). Thus, the proportion of ultraviolet rays included in the second electromagnetic waves is smaller than that in the first electromagnetic waves. Therefore, the ultraviolet rays discharged by an infrared heater (10) can be reduced more. In addition, the proportion of near infrared rays (for example, infrared rays with a wavelength of 0.7 - 3 [mu]m) in the infrared rays included in the second electromagnetic waves can be made larger by a first outer tube (22) and a second outer tube (24) that are disposed outside of the inner tube (14) when viewed from the filament (12) and absorb infrared rays that exceed a wavelength of 3 [mu]m.

Description

Infrared heater

The present invention relates to an infrared heater.

Conventionally, as an infrared heater, as disclosed in Patent Document 1, it is known to include a rod-shaped heating element that emits infrared rays upon heating and is composed of carbon or tantalum carbide; and a light-transmitting alumina. The ceramic tubular protective tube is a gas-tightly accommodated heat generating body. The protective tube has a total transmittance of electromagnetic waves having a wavelength of 0.4 to 6 μm of 80% or more.

[Prior patent documents] [Patent Literature]

[Patent Document 1] JP-A-2006-294337

However, ultraviolet rays (electromagnetic waves having a wavelength of 10 to 400 nm) are emitted from such an infrared heater, and ultraviolet radiation is a problem depending on the object to be heated (workpiece). For example, when an object to be heated containing an organic material is dried by an infrared heater, there is a possibility that decomposition of the object to be heated by ultraviolet rays may occur. Alternatively, the object is formed on the substrate via a release agent and dried, and after the drying, the release agent is reduced by ultraviolet rays and the object is peeled off from the substrate, and the release agent is reduced by the ultraviolet rays of the infrared heater. Have in The possibility of the object being peeled off from the substrate during drying.

The present invention has been developed to solve such problems, and its main object is to further reduce ultraviolet rays emitted from an infrared heater.

The infrared heater of the present invention employs the following means in order to achieve the above-mentioned main object.

The infrared heater according to the present invention includes a heating element that emits a first electromagnetic wave containing infrared rays when heated, and a filter surface that emits a wavelength of the first electromagnetic wave to a long wavelength side when the first electromagnetic wave is irradiated. The second electromagnetic wave.

In the infrared ray heater, when the first electromagnetic wave including the ultraviolet ray emitted from the heating element is irradiated onto the filter surface, the second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the longer wavelength side is emitted from the filter surface. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays emitted from the infrared heater 10 can be further reduced. Further, the first electromagnetic wave system may have a peak wavelength in an infrared region (for example, a region having a wavelength of 0.7 to 8 μm).

In the infrared heater of the present invention, the filter surface may be configured to absorb the first electromagnetic wave when the first electromagnetic wave is irradiated, and may be the source of the second electromagnetic wave. In this manner, since the filter surface absorbs the ultraviolet ray contained in the first electromagnetic wave, the ultraviolet ray emitted from the infrared ray heater 10 can be more reliably reduced. Further, the filter surface in this case is not limited to those in which all of the first electromagnetic waves are absorbed, or may be absorbed.

In the infrared heater of the present invention, it is also possible to include from the hair When the heat is observed, it is disposed on the outer side of the filter surface and absorbs the absorption surface of the infrared ray having a wavelength exceeding 3 μm. In this manner, the ratio of near-infrared rays (for example, infrared rays having a wavelength of 0.7 to 3 μm) in the infrared rays contained in the second electromagnetic wave can be increased. Further, since the near-infrared rays can efficiently cut hydrogen bonds in molecules such as water, an organic solvent, and a binder in the object to be heated, heating or drying of the object to be heated can be efficiently performed. In addition, by arranging the absorption surface outside the filter surface, the second electromagnetic wave having a wavelength of more than 3 μm can be absorbed from the second electromagnetic wave after the shift to the long wavelength side, and the infrared ray can be obtained from the infrared ray when the absorption surface is disposed inside. The proportion of near-infrared rays in the electromagnetic waves radiated by the heater becomes more surely larger. Further, the absorption surface is not limited to all of the infrared rays having a wavelength exceeding 3 μm. For example, it is also possible to use infrared rays that absorb a predetermined wavelength region of infrared rays having a wavelength of more than 3 μm. It is also possible to use an infrared ray having an absorption wavelength of 3.5 μm or more. Further, even if the infrared ray of the wavelength absorbed by the absorbing surface is used, a part of the ray may be transmitted.

In the infrared heater of the present invention, the infrared ray transmitting surface may be disposed on the outer side of the filter surface when viewed from the heat generating body, and the temperature adjusting means may adjust the temperature of the infrared ray transmitting surface. In this way, the surface temperature of the infrared heater can be lowered. For example, when the object containing the organic solvent is made dry, the vapor of the organic solvent exists around the infrared heater, but since the surface temperature of the infrared heater can be lowered, the safety is high. In this case, the infrared ray transmitting surface may be disposed on the outer side of the filter surface when viewed from the heat generating body, and may include a refrigerant flow path formed between the infrared ray transmitting surfaces of the two layers. The adjustment means adjusts the flow rate of the refrigerant flowing through the refrigerant flow path. In this way, by adjusting the flow path in the refrigerant The flow rate of the flowing refrigerant makes the surface temperature of the infrared heater relatively easy to become low. Further, the infrared ray transmitting surface may have the absorbing surface. In other words, the infrared ray transmitting surface may be such that infrared rays having a wavelength of 3 μm or less are transmitted and infrared rays having a wavelength exceeding 3 μm are absorbed.

10,110‧‧‧Infrared heater

12‧‧‧filament

12a‧‧‧Electric wiring

14‧‧‧Inside

14a‧‧‧ tube

14b‧‧‧ film

16, 16a‧‧‧ heater body

18‧‧‧ Filter Tube

18a‧‧‧ tube

18b‧‧‧ film

22‧‧‧1st outer tube

24‧‧‧2nd outer tube

26‧‧‧Temperature Sensor

33‧‧‧Refrigerant flow path

40‧‧‧ Cover

42, 43‧‧‧Cylinder

44‧‧‧ Cover

46‧‧‧Clamps

48‧‧‧Wiring pull out

50‧‧‧Power supply

53‧‧‧ vent

60‧‧‧ Controller

70‧‧‧Refrigerant supply

73‧‧‧Opening and closing valve

83‧‧‧Flow adjustment valve

112‧‧‧heating body

114‧‧‧Filter face

114a‧‧‧ plates

114b‧‧‧ film

120‧‧‧Protection tube

122‧‧‧1st outer transmission surface

124‧‧‧2nd outer transmission surface

133‧‧‧Refrigerant flow path

Fig. 1 is an explanatory view of the infrared heater 10.

Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1.

Fig. 3 is an explanatory diagram showing an example of wavelength characteristics of the first electromagnetic wave and the second electromagnetic wave.

Fig. 4 is an explanatory view of an infrared heater according to a modification.

Fig. 5 is an explanatory view of an infrared heater according to a modification.

Fig. 6 is a graph showing the wavelength characteristics of electromagnetic waves radiated from the infrared heater of the first comparative example.

Fig. 7 is a graph showing the wavelength characteristics of electromagnetic waves radiated from the infrared heater of the second comparative example.

Fig. 8 is a graph showing the wavelength characteristics of electromagnetic waves radiated from the infrared heater of the first embodiment.

Next, a suitable embodiment of the present invention will be described using the drawings. Fig. 1 is an explanatory view of the infrared heater 10, and Fig. 2 is a cross-sectional view taken along line A-A of Fig. 1. Further, the cross section shown in Fig. 1 is cut into a plane passing through the center line of the heater body 16.

The infrared heater 10 is used, for example, to contain an organic solvent or a sticky The mixture of the objects becomes a dryer, and includes: a heater body 16 formed by surrounding the tungsten filament 12 with the inner tube 14; and the first and second outer tubes 22, 24 being attached to the heater body 16 A double layer is provided on the outer side, and a cover 40 is attached to both ends of these elements. The space between the first outer tube 22 and the second outer tube 24 serves as a refrigerant flow path 33 through which a refrigerant (here, air) can flow. Further, the infrared heater 10 includes a temperature sensor 26 that detects the surface temperature of the second outer tube 24, and a controller 60 that responds to the temperature of the second outer tube 24 detected by the temperature sensor 26. The temperature of the second outer tube 24 or the first outer tube 22 is controlled.

The heater body 16 is supported by a clamp 46 that is disposed at both ends inside the cover 40. The heater main body 16 supplies electric power from the electric power supply source 50 to the filament 12, and when the filament 12 is heated to a predetermined temperature (for example, 1200 to 1500 ° C), the first electromagnetic wave including the infrared ray is radiated. The first electromagnetic wave system radiated by the filament 12 is not particularly limited, and for example, the peak wavelength is around 2 μm. Further, the inside of the inner tube 14 serves as a vacuum atmosphere gas or a halogen atmosphere gas. The electric wiring 12a connected to the filament 12 is airtightly pulled to the outside via the wiring pull-out portion 48 provided in the cover 40, and is connected to the power supply source 50. The inner tube 14 is formed by a film formation method using sputtering or CVD or thermal spraying to form a film 14b on the outer surface of a tube 14a formed of an infrared ray transmitting material, and the film 14b has a first electromagnetic wave irradiated from the filament 12. The radiation shifts the wavelength of the first electromagnetic wave to the characteristic of the second electromagnetic wave on the long wavelength side. Examples of the infrared ray transmissive material used for the tube 14a include yttrium, lanthanum, sapphire, calcium fluoride, lanthanum fluoride, zinc selenide, zinc sulfide, chalcogenide glass, and translucent alumina ceramic. Through the quartz glass and so on. When the first electromagnetic wave is irradiated from the filament 12, the film 14b absorbs most of the first electromagnetic wave and is itself an irradiation source of the second electromagnetic wave. As having this The material of the properties is, for example, a ceramic heat-resistant paint in which titanium oxide or zirconium oxide is mixed with an alumina-based or cerium oxide-based ceramic, and red quartz or the like. The film thickness of the film 14b is not particularly limited and is, for example, 2 μm to 20 μm. In the present embodiment, the film 14b is made of a heat-resistant paint in which titanium oxide is mixed with alumina. Further, the film 14b is heated by the first electromagnetic wave from the filament 12 when the filament 12 is heated to 1200 ° C to 1500 ° C. At this time, in order to maintain the film 14b at a temperature of 700 ° C to 900 ° C, the distance from the filament 12 (outer diameter of the tube 14a) or the material of the tube 14a is determined in advance. Further, the second electromagnetic wave system that radiates the first electromagnetic wave to the long wavelength side by the film 14b also changes depending on the temperature of the film 14b. For example, the lower the temperature, the longer the shift to the long wavelength side, etc., therefore, in order to maintain the film 14b at an appropriate temperature depending on its characteristics, the distance from the filament 12 (outer diameter of the tube 14a) or the tube 14a is determined in advance. Material and so on.

The first and second outer tubes 22 and 24 are tubes formed of quartz glass that absorbs infrared rays having a wavelength of more than 3 μm and transmits infrared rays of 3 μm or less in the above-described infrared ray transmitting material. In addition, the first outer tube 22 and the second outer tube 24 are cooled by the refrigerant flowing through the refrigerant flow path 33 (for example, 200 ° C or lower) to suppress the irradiation source which is itself infrared rays.

The cover 40 is formed by integrally forming a disk-shaped cover 44 and two cylindrical portions 42 and 43 which are erected on the cover 44 and have different radii. The left and right ends of the first outer tube 22 are fixed to the inner cylindrical portion 42 , and the left and right ends of the second outer tube 24 are fixed to the outer cylindrical portion 43 .

The refrigerant flow path 33 is a space between the first outer tube 22 and the second outer tube 24, and is permeable to the refrigerant via the vent opening 53 provided in the cover 40. The refrigerant that flows through the refrigerant flow path 33 is reduced in the outer surface of the infrared heater 10 2 The function of the temperature of the outer tube 24 or the temperature of the first outer tube 22.

The controller 60 is constituted by a CPU-centered microprocessor. The controller 60 inputs the temperature of the second outer tube 24 detected by the temperature sensor 26 of the thermocouple. Further, the controller 60 outputs a control signal to the on-off valve 73 and the flow rate adjustment valve 83 provided in the middle of the piping connecting the refrigerant supply source 70 and the vent port 53. Further, the controller 60 outputs a control signal for adjusting the magnitude of the power supplied from the power supply source 50 to the filament 12 to the power supply source 50.

Next, the operation of the infrared heater 10 of this embodiment constructed in this manner will be described. When the infrared heater 10 is operated, the controller 60 controls the electric power from the electric power supply source 50 so that the filament 12 is 1200 ° C to 1500 ° C. Further, the controller 60 controls the flow rate of the refrigerant flowing through the refrigerant flow path 33 based on the temperature of the second outer tube 24 detected by the temperature sensor 26, and sets the temperatures of the first outer tube 22 and the second outer tube 24 It becomes 200 ° C or less. Thereby, the first electromagnetic wave containing the infrared rays is emitted from the filament 12. Further, the film 14b absorbs the first electromagnetic wave and itself irradiates the second electromagnetic wave. Here, when the filament 12 is 1200 ° C to 1500 ° C, as described above, the temperature of the film 14b is maintained at 700 ° C to 900 ° C. Fig. 3 is an explanatory diagram showing an example of wavelength characteristics of the first electromagnetic wave and the second electromagnetic wave at this time. Fig. 3(a) shows the wavelength characteristics of the first electromagnetic wave, and Fig. 3(b) shows the wavelength characteristic of the second electromagnetic wave. As shown in Fig. 3(a), the first electromagnetic wave has a peak wavelength of about 2 μm, and the ultraviolet light having a wavelength of 10 to 400 nm also contains a part. On the other hand, as shown in FIG. 3(b), the second electromagnetic wave shifts the first electromagnetic wave to the long wavelength side, and the peak wavelength is also shifted to about 3 μm. Therefore, compared with the first electromagnetic wave, the component of the ultraviolet ray in the second electromagnetic wave is small, and the ultraviolet ray is hardly emitted. line. As a result, the ultraviolet rays radiated from the infrared heater 10 can be further reduced. In addition, since the first outer tube 22 and the second outer tube 24 are formed of quartz glass that absorbs infrared rays having a wavelength of more than 3 μm, the infrared-ray portion of the second electromagnetic wave exceeding 3 μm is absorbed. Further, the region indicated by oblique lines in Fig. 3(a) is the infrared ray absorbed by the first outer tube 22 and the second outer tube 24. Thereby, the ratio of near-infrared rays (for example, infrared rays having a wavelength of 0.7 to 3 μm) in the infrared rays contained in the second electromagnetic wave can be increased.

Here, the correspondence between the constituent elements of the present embodiment and the constituent elements of the present invention will be clarified. The filament 12 of the present embodiment corresponds to the heating element of the present invention, and the inner tube 14 corresponds to the filter surface. Further, the first outer tube 22 and the second outer tube 24 correspond to an absorption surface and an infrared transmission surface, the controller 60 corresponds to a temperature adjustment means, and the refrigerant flow path 33 corresponds to a refrigerant flow path.

According to the infrared heater 10 of the present embodiment described above, when the first electromagnetic wave containing ultraviolet rays emitted from the filament 12 is irradiated onto the inner tube 14, the wavelength of the first electromagnetic wave is shifted to the long wavelength side. The second electromagnetic wave. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays emitted from the infrared heater 10 can be further reduced.

Further, when the inner tube 14 is irradiated with the first electromagnetic wave, the first electromagnetic wave is absorbed and becomes the irradiation source of the second electromagnetic wave. Therefore, the ultraviolet rays contained in the first electromagnetic wave are absorbed by the inner tube 14, and the ultraviolet rays emitted from the infrared heater 10 can be more reliably reduced.

Further, the first outer tube 22 and the second outer tube 24 which are disposed on the outer side of the inner tube 14 and absorb infrared rays having a wavelength exceeding 3 μm when viewed from the filament 12 are The ratio of near-infrared rays (for example, infrared rays having a wavelength of 0.7 to 3 μm) in the infrared rays included in the second electromagnetic wave can be increased. Further, since the near-infrared rays can efficiently cut hydrogen bonds in molecules such as water, an organic solvent, and a binder in the object to be heated, heating or drying of the object to be heated can be efficiently performed. Further, by disposing the first outer tube 22 and the second outer tube 24 as the absorption surfaces on the outer side of the inner tube 14, the second electromagnetic wave after shifting to the long wavelength side can absorb infrared rays having a wavelength exceeding 3 μm and absorb The ratio of near-infrared rays in the electromagnetic waves radiated from the infrared heater 10 can be made more surely larger than when the surface is disposed inside the inner tube 14.

Further, the first outer tube 22 and the second outer tube 24, which are the infrared ray transmitting surfaces, are disposed on the outer side of the inner tube 14 when viewed from the filament 12, and the controller 60 is configured to adjust the refrigerant flow path 33. The temperature of the infrared ray transmitting surface is adjusted by the flow rate of the refrigerant; therefore, the surface temperature of the infrared heater 10 can be lowered. For example, when the object containing the organic solvent is dried, the vapor of the organic solvent exists around the infrared heater 10, but since the surface temperature of the infrared heater 10 can be lowered, the safety is high. Further, when viewed from the filament 12, the infrared ray transmitting surfaces of the first outer tube 22 and the second outer tube 24 are disposed on the outer side of the inner tube 14, and include a refrigerant flow formed between the infrared ray transmitting surfaces disposed in the double layer. In the path 33, the controller 60 adjusts the flow rate of the refrigerant flowing through the refrigerant flow path 33. Therefore, by adjusting the flow rate of the refrigerant flowing through the refrigerant flow path 33, the surface temperature of the infrared heater 10 can be relatively easily lowered.

Further, the present invention is not limited to the above-described embodiments, and can be implemented in various forms as long as it falls within the technical scope of the present invention.

For example, in the above embodiment, the refrigerant is the first outer tube. The refrigerant flow path 33 in the space between the 22 and the second outer tube 24 flows, but the refrigerant may flow between the inner tube 14 and the first outer tube 22 in addition or in addition. In this case, the flow rate of the refrigerant between the inner tube 14 and the first outer tube 22 can also be adjusted to adjust the temperature of the film 14b of the inner tube 14.

In the above-described embodiment, the first outer tube 22 and the second outer tube 24 are disposed on the outer side of the inner tube 14, but the first outer tube 22 and the second outer tube 24 are not provided. In this case, the space between the other of the first outer tube 22 and the second outer tube 24 and the inner tube 14 may be used as a refrigerant flow path, and the refrigerant may flow in the space.

In the above embodiment, the first outer tube 22 and the second outer tube 24 are disposed on the outer side of the inner tube 14, but the infrared heater 10 may not include the first outer tube 22 and the second outer tube 24. .

In the above embodiment, the first outer tube 22 and the second outer tube 24 are used to absorb infrared rays having a wavelength of more than 3 μm, but the invention is not limited thereto. For example, at least one of the first outer tube 22 and the second outer tube 24 may be used to transmit infrared rays having a wavelength exceeding 3 μm. Further, in addition to the first outer tube 22 and the second outer tube 24, an absorption surface that absorbs infrared rays having a wavelength of more than 3 μm may be provided on the outer side of the inner tube 14.

In the above-described embodiment, the inner tube 14 including the membrane 14b on the outer circumferential surface of the tube 14a is a filter surface that radiates the wavelength of the first electromagnetic wave to the second electromagnetic wave on the long wavelength side when the first electromagnetic wave is irradiated. Limited to this. For example, the film 14b may be formed on the inner circumferential surface of the tube 14a. In addition, the inner tube 14 may not include the film 14b, and may have a material shape that emits a characteristic of the second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the long wavelength side when the first electromagnetic wave is irradiated. For example, the tube 14a may be formed of red quartz to form the tube 14a.

In the above embodiment, the inner tube 14 of the heater body 16 is provided with the membrane 14b, but the invention is not particularly limited. For example, a tube other than the heater body 16 may be provided with the membrane 14b. Fig. 4 is an explanatory view of an infrared heater according to a modification. Further, Fig. 4 is a cross-sectional view showing a plane perpendicular to the central axis of the infrared heater as in the second drawing. In the fourth embodiment, the same components as those in the above-described embodiments are denoted by the same reference numerals, and the detailed description thereof will be omitted. The infrared heater of FIG. 4 includes a heater body 16a, a filter tube 18 disposed outside the heater body 16a, and first and second outer tubes 22 and 24 connected to the filter tube 18. Set the double layer on the outside. The heater body 16a has a filament 12 and a tube 14a. The filter tube 18 is a film having a property of irradiating the first electromagnetic wave from the filament 12 to emit a characteristic of the second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the long wavelength side by sputtering, CVD, or thermal spraying. 18b is formed on the outside of the tube 18a formed of the above-mentioned infrared ray transmitting material. The space between the first outer tube 22 and the second outer tube 24 serves as a refrigerant flow path 33 through which the refrigerant can flow. Also in the infrared heater of the present modification, as in the above-described embodiment, the ultraviolet rays radiated from the infrared heater 10 can be further reduced.

In the above-described embodiment, the film 14b of the inner tube 14 absorbs the first electromagnetic wave when the first electromagnetic wave is irradiated, and is itself the source of the second electromagnetic wave. However, the film 14b is not limited thereto, and is irradiated when the first electromagnetic wave is irradiated. It suffices that the wavelength of the first electromagnetic wave is shifted to the second electromagnetic wave on the long wavelength side.

In the above-described embodiment, W (tungsten) is exemplified as the material of the heating element, but it is not particularly limited as long as it emits infrared rays upon heating. For example, it may be Mo, Ta, Fe-Cr-Al alloy, and Ni-Cr alloy.

In the above-described embodiment, the plurality of branch pipes are arranged in a concentric shape, but other configurations may be employed. For example, as shown in FIG. 5, the infrared heater 110 may include a protective tube 120 having a hexagonal cylindrical body and a bottom surface open; and a heating element 112 disposed in the protective tube 120; The plurality of faces 114, 122, and 124 are disposed from the heat generating body 112 toward the bottom surface of the protective tube 120. The plurality of faces 114, 122, and 124 are from the heating element 112 side toward the bottom surface, and are sequentially the filter surface 114, the first outer transmission surface 122, and the second outer transmission surface 124, and are respectively configured as the inner tube of the above embodiment. 14. The first outer tube 22 and the second outer tube 24 are formed of the same material. The filter surface 114 has a film 114b that emits a characteristic of a second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the long wavelength side when the first electromagnetic wave from the heating element 112 is irradiated, and is formed on the plate material 114a formed of the infrared ray transmitting material. One-sided person. Since the film 114b is performed by sputtering or CVD, the sheet is more easily formed into a film than the tube. The space (the space in which the heating element 112 is disposed) separated by the filter surface 114 in the protective tube 120 is a vacuum atmosphere gas or a halogen atmosphere gas. Further, a refrigerant flow path 133 is provided between the first outer permeation surface 122 and the second outer permeation surface 124. In this case, when the first electromagnetic wave including the ultraviolet ray emitted from the heating element 112 is irradiated onto the filter surface 114, the second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the longer wavelength side is emitted from the filter surface 114. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays radiated from the infrared heater 110 can be further reduced.

In the above embodiment, air is used as the refrigerant, but an inert gas such as nitrogen or argon may be used, or a liquid such as oil or ionic liquid may be used. Replace the air.

[Examples] [First Embodiment]

The infrared heater 10 having the configuration shown in Figs. 1 and 2 is taken as the first embodiment, and the filament 12 of the heater main body 16 has an outer diameter of 2 mm, a material of tungsten, and a heat generation length of 600 mm, and the inner tube 14 The tube 14a is made of quartz glass, and the film 14b is made of a heat-resistant paint in which titanium oxide is mixed with alumina, and the film thickness is 5 μm. Further, the first outer tube 22 is made of quartz glass, and the second outer tube 24 is made of quartz glass.

[First Comparative Example]

An infrared heater having the same configuration as that of the infrared heater 10 of the first embodiment except that the inner tube 14 is not provided with the membrane 14b, the second outer tube 24 is not provided, and the refrigerant is not cooled by the refrigerant is used as the first comparative example.

[2nd comparative example]

An infrared heater having the same configuration as that of the infrared heater 10 of the first embodiment except that the inner tube 14 is not provided with the film 14b is used as the second comparative example.

[Comparison of wavelength characteristics]

The relationship between the wavelength and the intensity (monochromatic radiation intensity) was examined for each of the first embodiment and the first to second comparative examples. More specifically, the relationship between the wavelength from the infrared heater and the intensity in the same state was output per unit area at a position 150 mm apart from the surface of each infrared heater. Further, in the infrared heater of the first embodiment, the temperature of the filament 12 was set to 1200 °C. The surface temperature of the film 14b at this time was 800 °C. Also, control the flow rate of the refrigerant to the first 2 The surface temperature of the outer tube 24 is 200 ° C or lower. In the infrared heater of the first comparative example, the temperature of the filament 12 was set to 2000 °C. In the infrared heater of the second comparative example, the temperature of the filament 12 was set to 1,350 °C. Moreover, the flow rate of the refrigerant is controlled so that the surface temperature of the second outer tube 24 becomes 200 ° C or lower. 6 to 8 are wavelength characteristic diagrams showing the relationship between the wavelength and the intensity of the infrared heaters of the first comparative example, the second comparative example, and the first embodiment, respectively.

As can be seen from Fig. 6 to Fig. 8, the infrared heater of the first embodiment shifts the peak wavelength of the electromagnetic wave radiated to the longer wavelength side than the infrared heater of the first and second comparative examples. When the output ratio of 400 nm or less of the electromagnetic wave from the infrared heater is calculated based on the relationship between the wavelength and the intensity of the infrared heater of the first embodiment, the first comparative example, and the second comparative example, the first embodiment is 2.3 × 10 ^-7 %, the first comparative example was 0.068%, and the second comparative example was 5.7 × 10 ^-4 %. As a result of the above, in the infrared heater of the first embodiment, it is confirmed that the electromagnetic wave from the filament 12 is moved to the long wavelength side by the film 14b, and the ultraviolet light in the electromagnetic wave radiated from the infrared heater 10 can be further reduced.

The present invention is based on Japanese Patent Application No. 2012-160521, filed on Jan. 19, 2012, which is hereby incorporated by reference.

[Industrial Applicability]

The present invention can be utilized in industries requiring heating or drying, such as a battery industry for manufacturing an electrode coating film of a lithium ion secondary battery or a ceramic industry for manufacturing a ceramic laminate composed of a double-layer ceramic sintered body, and manufacturing an optical film product. The film industry and so on.

10‧‧‧Infrared heater

12‧‧‧filament

12a‧‧‧Electric wiring

14‧‧‧Inside

14a‧‧‧ tube

14b‧‧‧ film

16‧‧‧ heater body

22‧‧‧1st outer tube

24‧‧‧2nd outer tube

26‧‧‧Temperature Sensor

33‧‧‧Refrigerant flow path

40‧‧‧ Cover

42, 43‧‧‧Cylinder

44‧‧‧ Cover

46‧‧‧Clamps

48‧‧‧Wiring pull out

50‧‧‧Power supply

53‧‧‧ vent

60‧‧‧ Controller

70‧‧‧Refrigerant supply

73‧‧‧Opening and closing valve

83‧‧‧Flow adjustment valve

Claims (9)

An infrared heater includes: a heating element that emits a first electromagnetic wave including infrared rays when heated; and a filter surface that emits a second electromagnetic wave when the first electromagnetic wave is irradiated to shift the wavelength of the first electromagnetic wave to a long wavelength side Electromagnetic waves. The infrared heater according to claim 1, wherein the filter surface absorbs the first electromagnetic wave when the first electromagnetic wave is irradiated, and is itself an irradiation source of the second electromagnetic wave. An infrared heater according to claim 1 or 2, which comprises an absorption surface disposed on the outer side of the filter surface when viewed from the heat generating body and absorbing infrared rays having a wavelength exceeding 3 μm. The infrared heater according to claim 1 or 2, wherein the infrared ray transmitting surface is disposed outside the filter surface when viewed from the heat generating body, and the temperature adjusting means adjusts the temperature of the infrared ray transmitting surface. An infrared heater according to claim 4, comprising: an infrared ray transmissive surface, wherein a double layer is disposed on an outer side of the filter surface when viewed from the heat generating body; and a refrigerant flow path is formed in the double layer of the infrared ray The temperature adjustment means adjusts the flow rate of the refrigerant flowing through the refrigerant flow path. An infrared heater according to claim 1 or 2, wherein the filter surface has a film composed of a ceramic heat-resistant paint in which alumina or cerium oxide ceramics are mixed with titanium oxide or zirconium oxide, or red Made up of quartz. An infrared heater according to claim 1 or 2, wherein the filter surface surrounds a tubular member of the heat generating body. An infrared heater according to claim 1 or 2, wherein the first electromagnetic wave system has a peak wavelength in an infrared region. The infrared heater according to claim 1 or 2, which includes an absorption surface which is disposed on the outer side of the filter surface when viewed from the heat generating body and absorbs infrared rays having a wavelength of 3.5 μm or more.