JP5469285B1 - Infrared heater - Google Patents

Abstract

  When the first electromagnetic wave including the ultraviolet rays emitted from the filament 12 is irradiated to the inner tube 14, the second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted from the inner tube 14 to the longer wavelength side is emitted from the inner tube 14 by the film 14b. Is done. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays radiated from the infrared heater 10 can be further reduced. Further, the first outer tube 22 and the second outer tube 24 that are disposed outside the inner tube 14 as viewed from the filament 12 and absorb infrared rays having a wavelength exceeding 3 μm, make it possible to use near infrared rays (for example, near infrared rays) , The ratio of infrared rays having a wavelength of 0.7 to 3 μm can be increased.

Description

  The present invention relates to an infrared heater.

  Conventionally, as disclosed in Patent Document 1, as an infrared heater, a rod-shaped heating element made of carbon or silicon carbide that emits infrared rays when heated, and a light-transmitting property in which the heating element is hermetically accommodated What is provided with a cylindrical protective tube made of alumina ceramics is known. This protective tube has a total transmittance of electromagnetic waves having a wavelength of 0.4 to 6 μm of 80% or more.

JP 2006-294337 A

  However, ultraviolet rays (electromagnetic waves having a wavelength of 10 to 400 nm) are also radiated from such infrared heaters, and depending on the object to be heated (workpiece), the radiation of the ultraviolet rays may be a problem. For example, when an object to be heated containing an organic material is dried by an infrared heater, the object to be heated may be decomposed by ultraviolet rays. Alternatively, when an object is formed and dried on a base material via a release agent, and the release agent is depopulated with ultraviolet rays after drying to release the object from the base material, the release is performed with ultraviolet rays from an infrared heater. The agent may become depopulated, and the object may peel off from the substrate during drying.

  The present invention has been made to solve such problems, and has as its main object to further reduce the ultraviolet rays emitted from the infrared heater.

  The infrared heater of the present invention employs the following means in order to achieve the main object described above.

The infrared heater of the present invention is
A heating element that emits a first electromagnetic wave containing infrared when heated;
A filter surface that emits a second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted to the longer wavelength side when irradiated with the first electromagnetic wave;
It is equipped with.

  In this infrared heater, when the filter surface is irradiated with the first electromagnetic wave containing ultraviolet rays emitted from the heating element, the second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted to the long wavelength side is emitted from the filter surface. The Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays emitted from the infrared heater can be further reduced. The first electromagnetic wave may have a peak wavelength in an infrared region (for example, a region having a wavelength of 0.7 to 8 μm).

  In the infrared heater of the present invention, the filter surface may absorb the first electromagnetic wave when irradiated with the first electromagnetic wave, and may be the irradiation source of the second electromagnetic wave. By so doing, the filter surface absorbs the ultraviolet rays contained in the first electromagnetic wave, so that the ultraviolet rays emitted from the infrared heater can be more reliably reduced. Note that the filter surface in this case is not limited to the one that absorbs all of the first electromagnetic wave, but may be a portion that absorbs a part of the filter surface.

  The infrared heater of the present invention may include an absorption surface that is disposed outside the filter surface as viewed from the heating element and absorbs infrared rays having a wavelength exceeding 3 μm. If it carries out like this, the ratio of near infrared rays (for example, infrared rays whose wavelength is 0.7-3 micrometers) among infrared rays contained in the 2nd electromagnetic wave can be enlarged. And since near infrared rays can cut | disconnect the hydrogen bond in molecules, such as water in a to-be-heated material, an organic solvent, and a binder efficiently, a to-be-heated material can be heated and dried efficiently. In addition, by arranging the absorption surface outside the filter surface, infrared light having a wavelength exceeding 3 μm can be absorbed from the second electromagnetic wave after being shifted to the long wavelength side, and the absorption surface is arranged inside As compared with, the ratio of near infrared rays in the electromagnetic waves radiated from the infrared heater can be increased more reliably. In addition, an absorption surface is not restricted to what absorbs all the infrared rays in which a wavelength exceeds 3 micrometers. For example, it is good also as what absorbs the infrared rays of a predetermined wavelength area | region among the infrared rays whose wavelength exceeds 3 micrometers. The absorption surface may absorb infrared rays having a wavelength of 3.5 μm or more. Moreover, even if it is the infrared rays of the wavelength which an absorption surface absorbs, it is good also as what permeate | transmits partially.

  The infrared heater according to the present invention may include an infrared transmission surface disposed outside the filter surface as viewed from the heating element, and temperature adjusting means for adjusting a temperature of the infrared transmission surface. By doing so, the surface temperature of the infrared heater can be lowered. For example, when an object containing an organic solvent is dried, vapor of the organic solvent is present around the infrared heater, but the surface temperature of the infrared heater can be lowered, so that safety is high. In this case, the infrared transmission surface is disposed in two layers on the outer side of the filter surface when viewed from the heating element, and includes a refrigerant channel formed between the infrared transmission surfaces arranged in the two layers. The temperature adjusting means may adjust the flow rate of the refrigerant flowing through the refrigerant flow path. In this way, the surface temperature of the infrared heater can be relatively easily lowered by adjusting the flow rate of the refrigerant flowing in the refrigerant flow path. The infrared transmission surface may also serve as the absorption surface. That is, the infrared transmission surface may transmit infrared light having a wavelength of 3 μm or less and absorb infrared light having a wavelength exceeding 3 μm.

It is explanatory drawing of the infrared heater. It is AA sectional drawing of FIG. It is explanatory drawing which shows an example of the wavelength characteristic of a 1st electromagnetic wave and a 2nd electromagnetic wave. It is explanatory drawing of the infrared heater of a modification. It is explanatory drawing of the infrared heater of a modification. 4 is a wavelength characteristic graph of electromagnetic waves radiated from the infrared heater of Comparative Example 1. 6 is a wavelength characteristic graph of electromagnetic waves radiated from the infrared heater of Comparative Example 2. 3 is a wavelength characteristic graph of electromagnetic waves radiated from the infrared heater of Example 1.

  Next, preferred embodiments of the present invention will be described with reference to the drawings. FIG. 1 is an explanatory diagram of the infrared heater 10, and FIG. 2 is a cross-sectional view taken along the line AA of FIG. The cross section shown in FIG. 1 is a surface cut so as to pass through the center line of the heater body 16.

  The infrared heater 10 is used for drying an object containing, for example, an organic solvent or a binder, and includes a heater body 16 formed so that an inner tube 14 surrounds a filament 12 made of tungsten, and the heater body. First and second outer tubes 22 and 24 provided in two layers on the outside of 16 are provided, and caps 40 are attached to both ends thereof. A space between the first outer tube 22 and the second outer tube 24 is a refrigerant flow path 33 through which a refrigerant (here, air) can flow. The infrared heater 10 includes a temperature sensor 26 that detects the surface temperature of the second outer tube 24, and the second outer tube 24 and the first outer tube 22 according to the temperature of the second outer tube 24 detected by the temperature sensor 26. And a controller 60 for controlling the temperature.

  The heater body 16 is supported at both ends by holders 46 arranged inside the cap 40. The heater body 16 emits a first electromagnetic wave including infrared rays when electric power is supplied from the power supply source 50 to the filament 12 and the filament 12 is heated to a predetermined temperature (for example, 1200 to 1500 ° C.). The first electromagnetic wave radiated from the filament 12 is not particularly limited. For example, the peak wavelength is around 2 μm. Further, the inside of the inner tube 14 is in a vacuum atmosphere or a halogen atmosphere. The electric wiring 12 a connected to the filament 12 is drawn out to the outside airtightly via a wiring drawing portion 48 provided in the cap 40, and is connected to the power supply source 50. When the first electromagnetic wave from the filament 12 is irradiated on the outer surface of the tube 14a formed of an infrared transmitting material, the inner tube 14 shifts the second electromagnetic wave that has shifted the wavelength of the first electromagnetic wave to the longer wavelength side. The film 14b having the characteristics to be emitted is formed using a film forming method such as sputtering, CVD, or thermal spraying. Examples of the infrared transmitting material used for the tube 14a include germanium, silicon, sapphire, calcium fluoride, barium fluoride, zinc selenide, zinc sulfide, chalcogenide glass, transparent alumina ceramics, and quartz capable of transmitting infrared rays. Glass etc. are mentioned. When the first electromagnetic wave is irradiated from the filament 12, the film 14 b absorbs most of the first electromagnetic wave and becomes the irradiation source of the second electromagnetic wave. Examples of the material having such characteristics include ceramic heat-resistant paints obtained by mixing titania or zirconia with alumina-based or silica-based ceramics, red quartz, and the like. Although the film thickness of the film | membrane 14b is not specifically limited, For example, they are 2 micrometers-20 micrometers. In the present embodiment, the film 14b is made of a heat resistant paint in which alumina is mixed with titania. Further, the film 14b is heated by the first electromagnetic wave from the filament 12 when the filament 12 is heated to 1200 to 1500 ° C. At this time, the distance from the filament 12 (the outer diameter of the tube 14a), the material of the tube 14a, and the like are determined in advance so that the film 14b is maintained at a temperature of 700 to 900 ° C. Note that how much the first electromagnetic wave is shifted to the longer wavelength side by the film 14b is emitted depending on the temperature of the film 14b. For example, the lower the temperature, the longer the wavelength is shifted. Therefore, the distance from the filament 12 (the outer diameter of the tube 14a), the material of the tube 14a, and the like are determined in advance so that the film 14b is maintained at an appropriate temperature according to the characteristics.

  The first and second outer tubes 22 and 24 are tubes formed of quartz glass that absorbs infrared rays exceeding 3 μm and transmits infrared rays of 3 μm or less among the infrared transmitting materials described above. Note that the first outer tube 22 and the second outer tube 24 are cooled by the refrigerant flowing through the refrigerant flow path 33 (for example, 200 ° C. or lower), and are suppressed from being an infrared irradiation source.

  The cap 40 is formed by integrally molding a disc-shaped lid 44 and two cylindrical portions 42 and 43 having different radii concentrically provided on the lid 44. The left and right ends of the first outer tube 22 are fixed to the inner cylindrical portion 42, and the left and right ends of the second outer tube 24 are fixed to the outer cylindrical portion 43.

  The refrigerant flow path 33 is a space between the first outer tube 22 and the second outer tube 24, and the refrigerant can flow through the vent 53 provided in the cap 40. The refrigerant flowing through the refrigerant flow path 33 plays a role of lowering the temperature of the second outer tube 24 that is the outer surface of the infrared heater 10 and the temperature of the first outer tube 22.

  The controller 60 is configured as a microprocessor centered on a CPU. The controller 60 inputs the temperature of the second outer tube 24 detected by the temperature sensor 26 that is a thermocouple. Further, the controller 60 outputs a control signal to the on-off valve 73 and the flow rate adjustment valve 83 provided in the middle of the pipe connecting the refrigerant supply source 70 and the vent 53. Further, the controller 60 outputs a control signal for adjusting the magnitude of the power supplied from the power supply source 50 to the filament 12 to the power supply source 50.

  Next, operation | movement of the infrared heater 10 of this embodiment comprised in this way is demonstrated. During the operation of the infrared heater 10, the controller 60 controls the power from the power supply source 50 so that the filament 12 becomes 1200 to 1500 ° C. Further, the controller 60 controls the flow rate of the refrigerant flowing through the refrigerant flow path 33 based on the temperature of the second outer pipe 24 detected by the temperature sensor 26, and sets the temperatures of the first outer pipe 22 and the second outer pipe 24. Set to 200 ° C. or lower. As a result, a first electromagnetic wave including infrared rays is radiated from the filament 12. The film 14b absorbs the first electromagnetic wave and irradiates the second electromagnetic wave by itself. When the temperature of the filament 12 is 1200 to 1500 ° C., the temperature of the film 14b is maintained at 700 to 900 ° C. as described above. FIG. 3 is an explanatory diagram showing an example of wavelength characteristics of the first electromagnetic wave and the second electromagnetic wave at this time. FIG. 3A shows the wavelength characteristic of the first electromagnetic wave, and FIG. 3B shows the wavelength characteristic of the second electromagnetic wave. As shown in FIG. 3A, the first electromagnetic wave has a peak wavelength of about 2 μm, and includes a part of ultraviolet rays having a wavelength of 10 to 400 nm. On the other hand, as shown in FIG. 3B, the second electromagnetic wave is obtained by shifting the first electromagnetic wave to the long wavelength side, and the peak wavelength is also shifted to about 3 μm. Thereby, compared with the 1st electromagnetic wave, the ultraviolet-ray component in the 2nd electromagnetic wave is few, and an ultraviolet-ray is hardly radiated | emitted. As a result, the ultraviolet rays radiated from the infrared heater 10 can be further reduced. Moreover, since the 1st outer tube | pipe 22 and the 2nd outer tube | pipe 24 are formed with the quartz glass which absorbs the infrared rays exceeding 3 micrometers, the infrared rays exceeding 3 micrometers among 2nd electromagnetic waves are partially absorbed. In addition, the area | region shown with the oblique line in Fig.3 (a) is the infrared rays which the 1st outer tube | pipe 22 and the 2nd outer tube | pipe 24 absorb. Thereby, the ratio of near infrared rays (for example, infrared rays having a wavelength of 0.7 to 3 μm) in the infrared rays contained in the second electromagnetic wave can be increased.

  Here, the correspondence between the components of the present embodiment and the components of the present invention will be clarified. The filament 12 of this embodiment corresponds to the heating element of the present invention, and the inner tube 14 corresponds to the filter surface. Further, the first outer tube 22 and the second outer tube 24 correspond to an absorption surface and an infrared transmission surface, the controller 60 corresponds to a temperature adjusting means, and the refrigerant channel 33 corresponds to a refrigerant channel.

  According to the infrared heater 10 of the present embodiment described in detail above, when the first electromagnetic wave including the ultraviolet rays emitted from the filament 12 is irradiated to the inner tube 14, the wavelength of the first electromagnetic wave from the inner tube 14 is changed to a long wavelength. A second electromagnetic wave shifted to the side is emitted. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays radiated from the infrared heater 10 can be further reduced.

  Further, when the first electromagnetic wave is irradiated, the inner tube 14 absorbs the first electromagnetic wave and becomes an irradiation source of the second electromagnetic wave. For this reason, the inner tube 14 absorbs the ultraviolet rays contained in the first electromagnetic wave, whereby the ultraviolet rays emitted from the infrared heater 10 can be more reliably reduced.

  Further, the first outer tube 22 and the second outer tube 24 that are arranged outside the inner tube 14 as viewed from the filament 12 and absorb infrared rays having a wavelength exceeding 3 μm, make it possible to use near infrared rays (for example, near infrared rays among the infrared rays contained in the second electromagnetic wave (for example, , The ratio of infrared rays having a wavelength of 0.7 to 3 μm can be increased. And since near infrared rays can cut | disconnect the hydrogen bond in molecules, such as water in a to-be-heated material, an organic solvent, and a binder efficiently, a to-be-heated material can be heated and dried efficiently. Further, by arranging the first outer tube 22 and the second outer tube 24 as absorption surfaces outside the inner tube 14, infrared light having a wavelength exceeding 3 μm is emitted from the second electromagnetic wave after being shifted to the long wavelength side. Compared with the case where the absorption surface is arranged inside the inner tube 14, the ratio of near infrared rays in the electromagnetic waves radiated from the infrared heater 10 can be increased more reliably.

  Furthermore, the flow rate of the refrigerant in the refrigerant flow path 33 is adjusted by adjusting the temperatures of the first outer tube 22 and the second outer tube 24 as infrared transmission surfaces arranged on the outer side of the inner tube 14 when viewed from the filament 12 and the infrared transmission surface. Therefore, the surface temperature of the infrared heater 10 can be lowered. For example, when an object containing an organic solvent is dried, vapor of the organic solvent exists around the infrared heater 10, but the surface temperature of the infrared heater 10 can be lowered, so that safety is improved. high. Moreover, when viewed from the filament 12, two layers of infrared transmission surfaces of the first outer tube 22 and the second outer tube 24 are arranged outside the inner tube 14, and formed between the infrared transmission surfaces arranged in two layers. The refrigerant flow path 33 is provided, and the controller 60 adjusts the flow rate of the refrigerant flowing through the refrigerant flow path 33. For this reason, the surface temperature of the infrared heater 10 can be relatively easily lowered by adjusting the flow rate of the refrigerant flowing through the refrigerant flow path 33.

  It should be noted that the present invention is not limited to the above-described embodiment, and it goes without saying that the present invention can be implemented in various modes as long as it belongs to the technical scope of the present invention.

  For example, in the above-described embodiment, the refrigerant is caused to flow through the refrigerant flow path 33 that is a space between the first outer tube 22 and the second outer tube 24. However, in addition to or instead of this, the inner tube 14 A refrigerant may be allowed to flow between the first outer tube 22 and the first outer tube 22. In this case, the temperature of the film 14b of the inner tube 14 may be adjusted by adjusting the flow rate of the refrigerant between the inner tube 14 and the first outer tube 22.

  In the embodiment described above, the two layers of the first outer tube 22 and the second outer tube 24 are arranged outside the inner tube 14, but one of the first outer tube 22 and the second outer tube 24 is provided. It may not be. In this case, the space between the other of the first outer tube 22 and the second outer tube 24 and the inner tube 14 may be used as a refrigerant flow path, and the refrigerant may flow through this space.

  In the above-described embodiment, the two layers of the first outer tube 22 and the second outer tube 24 are arranged outside the inner tube 14. However, the infrared heater 10 includes the first outer tube 22 and the second outer tube 24. It is good also as what does not have.

  In the embodiment described above, the first outer tube 22 and the second outer tube 24 absorb infrared rays having a wavelength exceeding 3 μm. However, the present invention is not limited to this. For example, at least one of the first outer tube 22 and the second outer tube 24 may transmit infrared light having a wavelength exceeding 3 μm. In addition to the first outer tube 22 and the second outer tube 24, an outer surface of the inner tube 14 may be provided with an absorption surface that absorbs infrared rays having a wavelength exceeding 3 μm.

  In the above-described embodiment, when the inner tube 14 having the film 14b on the outer peripheral surface of the tube 14a is irradiated with the first electromagnetic wave, the second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted to the long wavelength side. Although it becomes the filter surface to discharge | release, it is not limited to this in particular. For example, the film 14b may be formed on the inner peripheral surface of the tube 14a. In addition, the inner tube 14 does not include the film 14b, and when the first electromagnetic wave is irradiated, the tube 14a is made of a material having a characteristic of emitting the second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted to the long wavelength side. It may be formed. For example, the tube 14a may be formed of red quartz.

  In the above-described embodiment, the inner tube 14 of the heater body 16 includes the film 14b. However, the present invention is not particularly limited thereto. For example, a tube other than the heater body 16 may include the membrane 14b. FIG. 4 is an explanatory diagram of a modified infrared heater. FIG. 4 is a cross-sectional view showing a plane perpendicular to the central axis of the infrared heater as in FIG. In FIG. 4, the same components as those in the above-described embodiment are denoted by the same reference numerals, and detailed description thereof is omitted. The infrared heater of FIG. 4 includes a heater body 16a, a filter tube 18 provided outside the heater body 16a, and first and second outer tubes 22 and 24 provided in two layers outside the filter tube 18. It has. The heater body 16a has a filament 12 and a tube 14a. When the first electromagnetic wave from the filament 12 is irradiated to the outer surface of the pipe 18a formed of the above-described infrared transmitting material, the filter pipe 18 shifts the wavelength of the first electromagnetic wave to the long wavelength side. The film 18b having the characteristic of emitting electromagnetic waves is formed using a film forming method such as sputtering, CVD, or thermal spraying. A space between the first outer tube 22 and the second outer tube 24 is a refrigerant flow path 33 through which a refrigerant can flow. Also in the infrared heater of this modification, the ultraviolet rays radiated from the infrared heater 10 can be further reduced as in the above-described embodiment.

  In the above-described embodiment, the film 14b of the inner tube 14 absorbs the first electromagnetic wave when irradiated with the first electromagnetic wave and becomes the irradiation source of the second electromagnetic wave, but is not limited thereto. First, it is sufficient if it emits a second electromagnetic wave in which the wavelength of the first electromagnetic wave is shifted to the long wavelength side when the first electromagnetic wave is irradiated.

  In the embodiment described above, W (tungsten) is exemplified as the material of the heating element, but it is not particularly limited as long as it emits infrared rays when heated. For example, Mo, Ta, Fe—Cr—Al alloy and Ni—Cr alloy may be used.

  In the above-described embodiment, a plurality of tubes are arranged concentrically, but other configurations may be used. For example, like the infrared heater 110 shown in FIG. 5, a protective tube 120 having a hexagonal cross section with a bottom opened, a heating element 112 disposed in the protection tube 120, and the heating element 112 A plurality of surfaces 114, 122, and 124 disposed toward the bottom surface of the protective tube 120 may be provided. The plurality of surfaces 114, 122, and 124 are the filter surface 114, the first outer transmission surface 122, and the second outer transmission surface 124 from the heating element 112 side to the bottom surface, and each of the inner tubes 14 of the above-described embodiment. The first outer tube 22 and the second outer tube 24 are made of the same material. The filter surface 114 is a second electromagnetic wave obtained by shifting the wavelength of the first electromagnetic wave to the longer wavelength side when the first electromagnetic wave from the heating element 112 is irradiated on one surface of the plate material 114a formed of an infrared transmitting material. Is formed. Since the film 114b is formed by sputtering, CVD, or the like, a plate material is easier to form than a tube. A space (a space where the heating element 112 is disposed) partitioned by the filter surface 114 in the protective tube 120 is a vacuum atmosphere or a halogen atmosphere. The refrigerant flow path 133 is between the first outer transmission surface 122 and the second outer transmission surface 124. Also in this case, when the filter surface 114 is irradiated with the first electromagnetic wave including ultraviolet rays emitted from the heating element 112, the second electromagnetic wave obtained by shifting the wavelength of the first electromagnetic wave from the filter surface 114 to the long wavelength side is generated. Released. Therefore, the ratio of the ultraviolet rays contained in the second electromagnetic wave is smaller than that of the first electromagnetic wave. Therefore, the ultraviolet rays radiated from the infrared heater 110 can be further reduced.

  In the embodiment described above, air is used as the refrigerant. However, an inert gas such as nitrogen gas or argon gas may be used instead of air, or a liquid such as oil or ionic liquid may be used.

[Example 1]
An infrared heater 10 having the configuration shown in FIGS. The filament 12 of the heater body 16 has an outer diameter of 2 mm, the material is tungsten, and the heat generation length is 600 mm. The film thickness was 5 μm. The first outer tube 22 is made of quartz glass, and the second outer tube 24 is made of quartz glass.

[Comparative Example 1]
An infrared heater having the same configuration as that of the infrared heater 10 of Example 1 is compared with Comparative Example 1 except that the inner tube 14 does not include the film 14b, the second outer tube 24 is not provided, and the cooling by the refrigerant is not performed. did.

[Comparative Example 2]
An infrared heater having the same configuration as that of the infrared heater 10 of Example 1 was used as Comparative Example 2 except that the inner tube 14 did not include the film 14b.

[Comparison of wavelength characteristics]
About the infrared heater of Example 1 and Comparative Examples 1-2, the relationship between a wavelength and intensity | strength (monochromatic radiation intensity | strength) was investigated, respectively. More specifically, the relationship between the wavelength from the infrared heater and its intensity in the same output per unit area at a position 150 mm away from the surface of each infrared heater was examined. In addition, in the infrared heater of Example 1, the temperature of the filament 12 was 1200 degreeC. At this time, the surface temperature of the film 14b was 800 ° C. Further, the flow rate of the refrigerant was controlled so that the surface temperature of the second outer tube 24 was 200 ° C. or lower. In the infrared heater of Comparative Example 1, the temperature of the filament 12 was 2000 ° C. In the infrared heater of Comparative Example 2, the temperature of the filament 12 was 1350 ° C. Further, the flow rate of the refrigerant was controlled so that the surface temperature of the second outer tube 24 was 200 ° C. or lower. 6 to 8 are wavelength characteristic graphs showing the relationship between wavelength and intensity in the infrared heaters of Comparative Example 1, Comparative Example 2, and Example 1, respectively.

As apparent from FIGS. 6 to 8, in the infrared heater of Example 1, the peak wavelength of the electromagnetic wave radiated compared to the infrared heaters of Comparative Examples 1 and 2 was shifted to the longer wavelength side. Further, based on the relationship between the wavelength and intensity in the infrared heaters of Example 1, Comparative Example 1, and Comparative Example 2 obtained, the output ratio of 400 nm or less of the electromagnetic waves from the infrared heater was calculated. 2.3 × 10 ⁻⁷ %, Comparative Example 1 was 0.068%, and Comparative Example 2 was 5.7 × 10 ⁻⁴ %. From these results, in the infrared heater of Example 1, it was confirmed that the ultraviolet rays among the electromagnetic waves radiated from the infrared heater could be further reduced by shifting the electromagnetic waves from the filament 12 to the long wavelength side by the film 14b. did it.

  This application is based on Japanese Patent Application No. 2012-160521, filed on July 19, 2012, and the contents of which are incorporated herein by reference in their entirety.

  The present invention relates to industries that require heating and drying, such as the battery industry that manufactures electrode coatings for lithium ion secondary batteries, the ceramic industry that manufactures ceramic laminates composed of two layers of ceramic sintered bodies, and optical film products. It can be used for the film industry to manufacture.

  10, 110 Infrared heater, 12 filament, 12a electrical wiring, 14 inner tube, 14a tube, 14b membrane, 16, 16a heater body, 18 filter tube, 18a tube, 18b membrane, 22 first outer tube, 24 second outer tube , 26 Temperature sensor, 33, 133 Refrigerant flow path, 40 Cap, 42 Cylindrical part, 43 Cylindrical part, 44 Lid, 46 holder, 48 Wire lead-out part, 50 Power supply source, 53 Vent, 60 Controller, 70 Refrigerant supply source 73 On-off valve, 83 Flow control valve, 112 Heating element, 114 Filter surface, 114a Plate material, 114b Membrane, 120 Protective tube, 122 First outer transmission surface, 124 Second outer transmission surface

Claims (4)

A heating element that emits a first electromagnetic wave containing infrared when heated;
A filter surface that, when irradiated with the first electromagnetic wave, shifts the wavelength of the first electromagnetic wave to a longer wavelength side and emits a second electromagnetic wave having a peak wavelength that is longer than the first electromagnetic wave ; ,
An absorption surface that is disposed outside the filter surface as viewed from the heating element and absorbs infrared rays having a wavelength exceeding 3 μm;
An infrared transmitting surface disposed outside the filter surface as viewed from the heating element;
Temperature adjusting means for adjusting the temperature of the infrared transmitting surface with a refrigerant;
Infrared heater with. When the first electromagnetic wave is irradiated, the filter surface absorbs the first electromagnetic wave and becomes an irradiation source of the second electromagnetic wave.
The infrared heater according to claim 1. The infrared heater according to claim 1 or 2 ,
The infrared transmission surface is disposed in two layers on the outside of the filter surface as viewed from the heating element,
Refrigerant flow path formed between the infrared transmission surfaces arranged in two layers,
With
The temperature adjusting means adjusts the flow rate of the refrigerant flowing through the refrigerant flow path.
Infrared heater.   The infrared transmission surface doubles as the absorption surface;
  The infrared heater according to any one of claims 1 to 3.

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