TW201413901A - Antenna substrate - Google Patents

Antenna substrate Download PDF

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Publication number
TW201413901A
TW201413901A TW102121880A TW102121880A TW201413901A TW 201413901 A TW201413901 A TW 201413901A TW 102121880 A TW102121880 A TW 102121880A TW 102121880 A TW102121880 A TW 102121880A TW 201413901 A TW201413901 A TW 201413901A
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Taiwan
Prior art keywords
antenna
pad
layer
hole
antenna substrate
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TW102121880A
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Chinese (zh)
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TWI578480B (en
Inventor
Kohichi Ohsumi
Sumiko Noguchi
Yuuki Kosuga
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Kyocera Slc Technologies Corp
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Publication of TW201413901A publication Critical patent/TW201413901A/en
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Publication of TWI578480B publication Critical patent/TWI578480B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6661High-frequency adaptations for passive devices
    • H01L2223/6677High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

An antenna substrate of the present invention is provided with a ground conductor 3 on one main surface of a core insulating plate 1 having a through hole 2, and alternately laminated with a built-up insulating layer 4 and a built-up wiring layer 6 having a thickness thinner than the core insulating plate on the one main surface containing the ground conductor 3, an antenna pad 7 is provided at a position opposed to the ground conductor 3 on the other main surface of the core insulating plate 1, and the antenna pad 7 is electrically connected to the built-up wiring layer 6 through the through hole 2.

Description

天線基板 Antenna substrate

本發明係關於將天線焊墊與接地用導體以相對向之方式設在多層配線基板中的天線基板。 The present invention relates to an antenna substrate in which an antenna pad and a grounding conductor are provided opposite to each other in a multilayer wiring board.

以往,以天線基板而言,已知有一種天線基板30,如第3圖所示,該天線基板30係在多層配線基板之一方的主面側設置有天線焊墊27,並且,以與天線焊墊27電性連接的方式在另一方的主面側搭載有半導體元件S。該天線基板30係在具有貫通孔22之芯絕緣板21的兩主面,交互地積層複數層具有連通孔(via hole)25之增層絕緣層24與增層配線層26。天線焊墊27係藉由增層配線層26而形成,且設在一方之主面側最表層的增層絕緣層24上。此外,在該一方之主面側的芯絕緣板21的主面,係以與天線焊墊27相對向的方式配置有接地用導體23。該接地用導體23係為用以使從天線焊墊27發射之電波反射之反射用導體,藉此,形成為從天線焊墊27發射之電波從天線基板30一方的主面側有效率地朝外部發射。另外,天線焊墊27與接地用導體23係包夾複數個增層絕緣層24而相對向,藉此,能夠在天線焊墊27與接地用導體23之 間確保適當的間隔。當天線焊墊27與接地用導體23的間隔過窄時,會在兩者間形成大的蓄電體而成為電波發射的障礙。 Conventionally, an antenna substrate 30 is known as an antenna substrate. As shown in FIG. 3, the antenna substrate 30 is provided with an antenna pad 27 on one side of a main surface of a multilayer wiring substrate, and an antenna The semiconductor element S is mounted on the other main surface side in such a manner that the pad 27 is electrically connected. The antenna substrate 30 is formed on both main faces of the core insulating sheet 21 having the through holes 22, and a plurality of layers of the build-up insulating layer 24 having the via holes 25 and the build-up wiring layer 26 are alternately laminated. The antenna pad 27 is formed by the build-up wiring layer 26, and is provided on the outermost layer of the build-up insulating layer 24 on one of the main surface sides. Further, the grounding conductor 23 is disposed on the main surface of the core insulating sheet 21 on the main surface side of the one surface so as to face the antenna pad 27. The grounding conductor 23 is a reflection conductor for reflecting the electric wave emitted from the antenna pad 27, whereby the radio wave emitted from the antenna pad 27 is efficiently directed from the main surface side of the antenna substrate 30. External launch. Further, the antenna pad 27 and the grounding conductor 23 are opposed to each other by sandwiching a plurality of build-up insulating layers 24, whereby the antenna pad 27 and the grounding conductor 23 can be used. Ensure proper spacing. When the distance between the antenna pad 27 and the ground conductor 23 is too narrow, a large power storage body is formed between the two, which becomes an obstacle to radio wave emission.

在天線基板30另一方之主面側最表層的增層絕緣層24上,係形成有藉由增層配線層26而形成,且與半導體元件S連接之複數個半導體元件連接焊墊29。而且,該等半導體元件連接焊墊29的其中之一與天線焊墊27係經由以彼此上下重疊的方式形成之連通孔25以及貫通孔22而電性連接。在貫通孔22內形成有貫通孔導體22a,在連通孔25內形成有連通導體25a。此外,在上下相互重疊的連通導體25a彼此之間形成有連通焊盤(via land)25b。連通焊盤25b係為與連通導體25a一體形成,且其直徑比連通孔25之直徑稍大者。如此,藉由使連通焊盤25b的直徑比連通孔25之直徑稍大,而即使在位於上下之連通孔25彼此的位置相互地稍微偏移時,仍然能夠確實地連接該等連通孔25之間。此外,在貫通孔導體22a的兩端形成有貫通孔焊盤22b。貫通孔焊盤22b係為與貫通孔導體22a一體形成,且其直徑比貫通孔22的直徑稍大者。如此,藉由使貫通孔焊盤22b的直徑比貫通孔22的直徑稍大,而即使在貫通孔22與位在上下之連通孔25之位置相互地稍微偏移時,仍然能夠確實地連接該等貫通孔22與連通孔25之間。再者,在天線基板30的兩主面之最表面披覆有阻焊劑(solder resist)層28。阻焊劑層28係具有用以使增層配線層26的一部分露出作為半導體元件連接焊 墊29的開口部28a,並且披覆增層配線層26之剩餘的部份。 A plurality of semiconductor element connection pads 29 formed by the buildup wiring layer 26 and connected to the semiconductor element S are formed on the outermost layer of the buildup insulating layer 24 on the other main surface side of the antenna substrate 30. Further, one of the semiconductor element connection pads 29 and the antenna pad 27 are electrically connected via the communication hole 25 and the through hole 22 which are formed to overlap each other. A through-hole conductor 22a is formed in the through hole 22, and a communication conductor 25a is formed in the communication hole 25. Further, a via land 25b is formed between the communication conductors 25a which are vertically overlapped with each other. The communication pad 25b is formed integrally with the communication conductor 25a and has a diameter slightly larger than the diameter of the communication hole 25. In this manner, by making the diameter of the communication pad 25b slightly larger than the diameter of the communication hole 25, even when the positions of the communication holes 25 located at the upper and lower sides are slightly shifted from each other, the communication holes 25 can be reliably connected. between. Further, through hole pads 22b are formed at both ends of the through hole conductor 22a. The through hole pad 22b is formed integrally with the through hole conductor 22a, and its diameter is slightly larger than the diameter of the through hole 22. As described above, by making the diameter of the through hole pad 22b slightly larger than the diameter of the through hole 22, even when the through hole 22 and the position of the upper and lower communication holes 25 are slightly shifted from each other, the connection can be surely connected. The through hole 22 and the communication hole 25 are provided. Further, a solder resist layer 28 is coated on the outermost surfaces of both main surfaces of the antenna substrate 30. The solder resist layer 28 has a portion for exposing a portion of the build-up wiring layer 26 as a semiconductor element. The opening portion 28a of the pad 29 is covered with the remaining portion of the build-up wiring layer 26.

而且,在該天線基板30中,係從半導體元件S經由貫通孔22及連通孔25而對天線焊墊27供應高頻訊號,藉此從天線焊墊27發射高頻訊號作為電波。 Further, in the antenna substrate 30, a high frequency signal is supplied from the semiconductor element S to the antenna pad 27 via the through hole 22 and the communication hole 25, whereby a high frequency signal is emitted from the antenna pad 27 as a radio wave.

另外,此種天線基板30係組入通訊機器,而使用於例如送訊至位於遠離聲音或影像等高頻訊號之場所的其他通訊機器之用途等。例如,在日本特開平5-183328號公報記載有一種微波電路,該微波電路係使用於路面車輛間通訊系統等行動無線通訊系統的行動台無線通訊終端。近年來,要求將該等通訊機器作成為能夠以更廣的範圍進行收送訊。為了應對該要求,必須以更高輸出來發射高頻訊號。 Further, such an antenna substrate 30 is incorporated in a communication device and used for, for example, the purpose of transmitting to a communication device located at a place away from a high-frequency signal such as a sound or a video. For example, JP-A-5-183328 discloses a microwave circuit for use in a mobile station wireless communication terminal of a mobile wireless communication system such as a road-to-vehicle communication system. In recent years, these communication devices have been required to be able to transmit and receive signals in a wider range. In order to cope with this requirement, high frequency signals must be transmitted with higher output.

然而,隨著高輸出化的進展,會有從天線焊墊27發射之電波中之朝天線基板30的內部方向發射之電波的一部分,變成由介設於連接天線焊墊27與貫通孔焊盤22b之連通導體25a彼此之間之連通焊盤25b中之位在比接地用導體23更靠近天線焊墊27側處的連通焊盤25b來接收的情況。結果,連通焊盤25b所接收之電波的一部分會與從天線焊墊27發射之電波混合為雜訊,而有無法正常地發送聲音或影像等高頻訊號的情況。 However, as the high output progresses, a part of the radio wave emitted from the antenna pad 30 in the inner direction of the antenna substrate 30 becomes a portion interposed between the connection antenna pad 27 and the through hole pad 22b. The position of the communication pad 25b between the communicating conductors 25a is received by the communication pad 25b closer to the antenna pad 27 than the grounding conductor 23. As a result, a part of the radio wave received by the communication pad 25b mixes with the radio wave emitted from the antenna pad 27 as noise, and there is a case where a high frequency signal such as sound or video cannot be normally transmitted.

本發明之課題係為提供一種藉由減少與從 天線焊墊發射之電波混合的雜訊,即能夠正常地發送高頻訊號的天線基板。 The subject of the present invention is to provide a reduction and The noise mixed by the radio wave emitted by the antenna pad is an antenna substrate capable of transmitting a high frequency signal normally.

本發明之天線基板係在具有貫通孔之芯絕緣板之一方的主面設置接地用導體,並且在包含該接地用導體的前述一方的主面上交互地積層厚度比前述芯絕緣板薄的增層絕緣層與增層配線層,在前述芯絕緣板之另一方的主面於,與前述接地用導體相對向的位置設置有天線焊墊,該天線焊墊係經由前述貫通孔與前述增層配線層電性連接。 In the antenna substrate of the present invention, a grounding conductor is provided on one main surface of the core insulating sheet having the through hole, and the thickness of the laminated main layer on the one main surface including the grounding conductor is thinner than that of the core insulating sheet. The layer insulating layer and the build-up wiring layer are provided with an antenna pad at a position facing the grounding conductor on the other main surface of the core insulating plate, and the antenna pad is connected to the build-up via the through hole The wiring layer is electrically connected.

本發明之天線基板係在具有貫通孔之芯絕緣板之一方的主面設置接地用導體,並且在前述芯絕緣板之另一方的主面形成有與接地用導體相對向的天線焊墊。亦即,天線焊墊與接地用導體係包夾芯絕緣板而相對向。芯絕緣板即使其厚度較厚也不須在貫通孔導體的中途設置焊墊。因此,不須在比接地用導體更靠近天線焊墊側處介設不必要的焊盤,而能夠在天線焊墊與接地用導體之間確保充分的間隔。因此,可提供一種能夠防止因焊盤產生的雜訊混合到從天線焊墊發射的電波中,且能夠正常地發送聲音或影像等高頻訊號之天線基板。 In the antenna substrate of the present invention, a grounding conductor is provided on one main surface of the core insulating sheet having the through hole, and an antenna pad facing the grounding conductor is formed on the other main surface of the core insulating sheet. That is, the antenna pads are opposed to the grounding conductor system sandwiching the core insulating sheets. The core insulating plate does not have to be provided with a solder pad in the middle of the through-hole conductor even if its thickness is thick. Therefore, it is not necessary to provide an unnecessary pad at the side closer to the antenna pad than the grounding conductor, and it is possible to ensure a sufficient space between the antenna pad and the grounding conductor. Therefore, it is possible to provide an antenna substrate capable of preventing noise generated by the pad from being mixed into the radio wave emitted from the antenna pad and capable of normally transmitting a high frequency signal such as a sound or a video.

1、11、21‧‧‧芯絕緣板 1, 11, 21‧ ‧ core insulation board

2、22‧‧‧貫通孔 2, 22‧‧‧through holes

2a、22a‧‧‧貫通孔導體 2a, 22a‧‧‧through hole conductor

2b、22b‧‧‧貫通孔焊盤 2b, 22b‧‧‧through hole pads

3、13、23‧‧‧接地用導體 3, 13, 23‧‧‧ Grounding conductor

4、14、24‧‧‧增層絕緣層 4,14,24‧‧‧Additional insulation

5、25‧‧‧連通孔 5, 25‧‧‧Connected holes

5a‧‧‧連通導體 5a‧‧‧Connected conductor

5b、25b‧‧‧連通焊盤 5b, 25b‧‧‧Connecting pads

6、26‧‧‧增層配線層 6, 26‧‧‧Addition wiring layer

7、17、27‧‧‧天線焊墊 7, 17, 27‧‧‧ Antenna pads

8、28‧‧‧阻焊劑層 8, 28‧‧‧ solder resist layer

8a‧‧‧開口部 8a‧‧‧ openings

9、29‧‧‧半導體元件連接焊墊 9, 29‧‧‧Semiconductor component connection pads

10、20、30‧‧‧天線基板 10, 20, 30‧‧‧ antenna substrate

11a、11b、11c‧‧‧絕緣層 11a, 11b, 11c‧‧‧ insulation

18‧‧‧芯配線層 18‧‧‧core wiring layer

28a‧‧‧開口部 28a‧‧‧ openings

S‧‧‧半導體元件 S‧‧‧Semiconductor components

T‧‧‧電極 T‧‧‧ electrodes

第1圖係為本發明之一實施形態之天線基板的概略剖 面圖。 Fig. 1 is a schematic cross-sectional view showing an antenna substrate according to an embodiment of the present invention; Surface map.

第2圖係為顯示本發明之天線基板的其他實施形態的概略剖面圖。 Fig. 2 is a schematic cross-sectional view showing another embodiment of the antenna substrate of the present invention.

第3圖係為顯示習知之天線基板的概略剖面圖。 Fig. 3 is a schematic cross-sectional view showing a conventional antenna substrate.

接著,根據第1圖說明本發明之天線基板的一實施形態。如第1圖所示,本發明之天線基板10,係僅在具有貫通孔2之芯絕緣板1之一方的主面側交互地積層具有連通孔5之增層絕緣層4與增層配線層6而形成。在該一方主面側之最表層的增層絕緣層4上,形成有以增層配線層6所構成,且用以連接在半導體元件S的電極T之半導體元件連接焊墊9。在芯絕緣板1之一方的主面,係配置有接地用導體3,而且,在芯絕緣板1之另一方的主面,係以與接地用導體3相對向之方式形成有天線焊墊7。再者,該天線焊墊7與半導體元件連接焊墊9的其中之一(連通焊盤5b),係經由以互相上下重疊的方式形成之貫通孔2及連通孔5而互相電性連接。而且,在兩主面側的最表面披覆有阻焊劑層8。 Next, an embodiment of an antenna substrate of the present invention will be described based on Fig. 1 . As shown in Fig. 1, the antenna substrate 10 of the present invention alternately laminates the build-up insulating layer 4 having the communication holes 5 and the build-up wiring layer only on the main surface side of one of the core insulating sheets 1 having the through holes 2. Formed by 6. On the outermost layer of the buildup insulating layer 4 on the one main surface side, a semiconductor element connection pad 9 formed of the buildup wiring layer 6 and connected to the electrode T of the semiconductor element S is formed. The grounding conductor 3 is disposed on one of the main surfaces of the core insulating plate 1, and the antenna pad 7 is formed on the other main surface of the core insulating plate 1 so as to face the grounding conductor 3. . Further, one of the antenna pads 7 and the semiconductor element connection pads 9 (the communication pads 5b) is electrically connected to each other via the through holes 2 and the communication holes 5 which are formed to overlap each other. Further, the solder resist layer 8 is coated on the outermost surface of the both main faces.

在上述之貫通孔2內形成有貫通孔導體2a,且在連通孔5內形成有連通導體5a。在上下相重疊之連通導體5a之間形成有連通焊盤5b。在貫通孔導體2a的兩端形成有貫通孔焊盤2b。此外,半導體元件連接焊墊9(亦包含形成於最表層之增層絕緣層4的連通焊盤5b)與半導體元件S的電極T係經由焊料凸塊而電性連接。從半 導體元件S經由連通孔5及貫通孔2而對天線焊墊7供應高頻信號,藉此從天線焊墊7發射高頻信號作為電波。 A through-hole conductor 2a is formed in the through hole 2 described above, and a communication conductor 5a is formed in the communication hole 5. A communication pad 5b is formed between the communication conductors 5a that overlap each other. Through-hole pads 2b are formed at both ends of the through-hole conductor 2a. Further, the semiconductor element connection pad 9 (including the communication pad 5b of the build-up insulating layer 4 formed on the outermost layer) and the electrode T of the semiconductor element S are electrically connected via solder bumps. From half The conductor element S supplies a high frequency signal to the antenna pad 7 via the communication hole 5 and the through hole 2, thereby transmitting a high frequency signal from the antenna pad 7 as an electric wave.

芯絕緣板1係例如由使環氧樹脂或雙馬來醯亞胺-三嗪樹脂等熱硬化性樹脂含浸於玻璃纖維布的電性絕緣材料所構成。芯絕緣板1的厚度為後述之增層絕緣層4的厚度以上。天線焊墊7與接地用導體3必須隔開某種程度的間隔來設置,以抑制形成在兩者間的電容成分(蓄電體)。因此,芯絕緣板1必須具有某種程度的厚度。而且,藉由將芯絕緣板1的厚度設為增層絕緣層4的厚度以上,而不須使天線焊墊7與接地用導體3包夾增層絕緣層而相對向。結果,設於被包夾之增層絕緣層的連通焊盤亦不會接收到電波,而能夠減少雜訊。 The core insulating sheet 1 is made of, for example, an electrically insulating material in which a thermosetting resin such as an epoxy resin or a bismaleimide-triazine resin is impregnated into a glass fiber cloth. The thickness of the core insulating sheet 1 is equal to or greater than the thickness of the buildup insulating layer 4 to be described later. The antenna pad 7 and the ground conductor 3 must be provided at a certain interval to suppress a capacitance component (an electric storage body) formed therebetween. Therefore, the core insulating sheet 1 must have a certain thickness. Further, by setting the thickness of the core insulating sheet 1 to be equal to or greater than the thickness of the buildup insulating layer 4, it is not necessary to sandwich the antenna pad 7 and the ground conductor 3 with the buildup insulating layer. As a result, the communication pads provided in the sandwiched insulating layer do not receive radio waves, and noise can be reduced.

芯絕緣板1的厚度較佳為150至400μm左右。當比150μm小時,會有在天線焊墊7與接地用導體3之間形成蓄電體的可能性,且有成為從天線焊墊7正常發射電波的障礙之虞。此外,當比400μm大時,必須使貫通孔2開口徑擴大以形成貫通孔導體2a,而有成為高密度配線化之妨礙之虞。 The thickness of the core insulating sheet 1 is preferably about 150 to 400 μm. When the ratio is less than 150 μm, there is a possibility that an electric storage body is formed between the antenna pad 7 and the grounding conductor 3, and there is a problem that the electric wave is normally emitted from the antenna pad 7. In addition, when it is larger than 400 μm, it is necessary to enlarge the opening diameter of the through hole 2 to form the through-hole conductor 2a, which may hinder the high-density wiring.

貫通孔2之開口徑為100至150μm左右,且例如藉由鑽孔加工而形成。當使貫通孔的開口徑過大時,會如上述有成為高密度配線化之妨礙之虞。貫通孔導體2a係由鍍銅層所構成,在藉由例如無電解鍍銅法而對貫通孔內壁披覆鍍銅層後,藉由電解鍍銅法使鍍銅層析出而形成。 The through hole 2 has an opening diameter of about 100 to 150 μm and is formed, for example, by drilling. When the opening diameter of the through hole is excessively large, the high density wiring may be hindered as described above. The through-hole conductor 2a is formed of a copper-plated layer, and is formed by coating a copper plating layer on the inner wall of the through-hole by, for example, electroless copper plating, and then performing copper plating by electrolytic copper plating.

貫通孔焊盤2b、接地用導體3及天線焊墊7,主要係以銅等金屬而藉由鍍覆法而形成,例如藉由公知之半加成法而以較佳為5至25μm左右的厚度形成。 The through-hole pad 2b, the grounding conductor 3, and the antenna pad 7 are mainly formed by a plating method using a metal such as copper, and are preferably, for example, about 5 to 25 μm by a known semi-additive method. The thickness is formed.

天線焊墊7係作為發射從半導體元件S供應之高頻訊號作為電波之天線而發揮作用。天線焊墊7係為具有預定面積之圓形或方形、多角形,其大小在例如為方形時,較佳係一邊為0.3至1.5μm左右。 The antenna pad 7 functions as an antenna that emits a high-frequency signal supplied from the semiconductor element S as a radio wave. The antenna pad 7 is a circular or square or polygonal shape having a predetermined area, and when the size is, for example, a square shape, it is preferably about 0.3 to 1.5 μm on one side.

接地用導體3係為與天線焊墊7相對向之整面狀的圖案,且作為使從天線焊墊7發射之電波中之朝天線基板10內部方向發射的電波朝外部反射之反射板而發揮功能。 The grounding conductor 3 is a pattern that faces the antenna pad 7 in a planar shape, and serves as a reflecting plate that reflects the radio wave emitted from the antenna pad 7 toward the inside of the antenna substrate 10 and reflects it to the outside. Features.

此時,天線焊墊7與接地用導體3係包夾厚度為150至400μm左右的芯絕緣板1而相對向。芯絕緣板1即使在將其厚度設為150至400μm左右而較厚時,仍然不須在貫通孔導體2a的中途設置焊盤。因此,能夠在天線焊墊7與接地用導體3之間確保充分的間隔,而不須在比接地用導體3更靠近天線焊墊7側處介設不必要的焊盤。 At this time, the antenna pad 7 and the grounding conductor 3 are opposed to each other with the core insulating sheet 1 having a thickness of about 150 to 400 μm. The core insulating sheet 1 does not have to be provided with a pad in the middle of the through-hole conductor 2a even when the thickness thereof is made thicker by about 150 to 400 μm. Therefore, it is possible to ensure a sufficient space between the antenna pad 7 and the grounding conductor 3 without interposing an unnecessary pad on the side closer to the antenna pad 7 than the grounding conductor 3.

增層絕緣層4係使含有例如環氧樹脂或聚醯亞胺樹脂等熱硬化性樹脂的電性絕緣材料熱硬化而成者。增層絕緣層4係形成為比芯絕緣板1薄。當增層絕緣層4過厚時,連通孔5的深寬比會在使連通孔5縮小時高,而難以利用連通導體5a來充填連通孔5內。增層絕緣層4的厚度係較佳為每1層為30至70μm。另外,連通孔5係 藉由雷射加工而形成。在連通孔5充填有構成連通焊盤5b等增層配線層6之導體的一部分以作為連通導體5a,藉此進行增層配線層之上下的導通。 The buildup insulating layer 4 is obtained by thermally curing an electrical insulating material containing a thermosetting resin such as an epoxy resin or a polyimide resin. The buildup insulating layer 4 is formed to be thinner than the core insulating sheet 1. When the build-up insulating layer 4 is too thick, the aspect ratio of the communication hole 5 is high when the communication hole 5 is reduced, and it is difficult to fill the inside of the communication hole 5 by the communication conductor 5a. The thickness of the buildup insulating layer 4 is preferably from 30 to 70 μm per layer. In addition, the communication hole 5 is Formed by laser processing. A part of the conductor constituting the build-up wiring layer 6 such as the communication pad 5b is filled in the communication hole 5 as the communication conductor 5a, whereby conduction of the build-up wiring layer is performed.

增層配線層6係主要以藉由鍍覆法而利用銅等金屬而形成之配線,並利用例如公知的半加成法而形成,且在半導體元件S與天線焊墊7之間作為供給電力或訊號之路徑而發揮功能。在交互地積層增層絕緣層4與增層配線層6之際,係以增層配線層6形成於最表層的方式進行積層。半導體元件連接焊墊9及連通焊盤5b係由增層配線層6的一部分所形成。增層配線層6的厚度係較佳為每一層為10至25μm左右。 The buildup wiring layer 6 is mainly formed of a wiring formed of a metal such as copper by a plating method, and is formed by, for example, a known semi-additive method, and is supplied between the semiconductor element S and the antenna pad 7 as a power supply. Or function as a signal path. When the buildup insulating layer 4 and the buildup wiring layer 6 are alternately laminated, the buildup wiring layer 6 is laminated on the outermost layer. The semiconductor element connection pad 9 and the communication pad 5b are formed by a part of the buildup wiring layer 6. The thickness of the build-up wiring layer 6 is preferably about 10 to 25 μm per layer.

增層絕緣層4及增層配線層6係僅披覆形成於芯絕緣板1上之形成有接地用導體3的主面上。因此,在例如對增層絕緣層4進行熱硬化時,會有產生熱收縮而在加工中的天線基板10產生翹曲之虞,為了避免此情形,係在依序形成複數層增層配線層6之際,也同時使鍍覆析出於成為前述天線焊墊7之金屬上表面,而增加該金屬之厚度。藉此,能夠對未形成增層絕緣層4及增層配線層6之另一方的主面側賦予剛性,並能夠抑制因增層絕緣層4的熱收縮所造成之天線基板10的翹曲。而且,在全部增層配線層6的形成結束之後,只要藉由蝕刻或研磨等將作為天線焊墊7之金屬上表面的鍍覆薄化至預定的厚度即可。 The buildup insulating layer 4 and the buildup wiring layer 6 are only coated on the main surface of the core insulating sheet 1 on which the ground conductor 3 is formed. Therefore, when the build-up insulating layer 4 is thermally hardened, for example, heat shrinkage occurs and warpage occurs in the antenna substrate 10 during processing. To avoid this, a plurality of build-up wiring layers are sequentially formed. At the same time, the plating is also deposited as the upper surface of the metal of the antenna pad 7, and the thickness of the metal is increased. Thereby, rigidity can be imparted to the other main surface side where the buildup insulating layer 4 and the buildup wiring layer 6 are not formed, and warpage of the antenna substrate 10 due to thermal contraction of the buildup insulating layer 4 can be suppressed. Further, after the formation of all the buildup wiring layers 6 is completed, the plating of the upper surface of the metal as the antenna pad 7 may be thinned to a predetermined thickness by etching, polishing, or the like.

增層絕緣層4及增層配線層6較佳係分別交互地積層2層或3層。藉由設為前述層數,能夠進一步 抑制因增層絕緣層4的熱收縮所造成之天線基板10的翹曲。 The buildup insulating layer 4 and the buildup wiring layer 6 are preferably alternately laminated in two or three layers. By setting the number of layers as described above, it is possible to further The warpage of the antenna substrate 10 due to thermal contraction of the buildup insulating layer 4 is suppressed.

阻焊劑層8係由使丙烯酸改質環氧樹脂等具有感光性的熱硬化性樹脂硬化後之電性絕緣材料所構成。阻焊劑層8具有使增層配線層6的一部分露出作為半導體元件連接焊墊9的開口部8a,並且披覆增層配線層6之剩餘部份。藉此,能夠使半導體元件S的電極T連接至半導體元件連接焊墊9,並且保護增層配線層6之剩餘的部份免於受到外部環境之影響。 The solder resist layer 8 is made of an electrically insulating material obtained by curing a thermosetting resin such as an acrylic modified epoxy resin. The solder resist layer 8 has an opening portion 8a which exposes a part of the build-up wiring layer 6 as a semiconductor element connection pad 9, and covers the remaining portion of the build-up wiring layer 6. Thereby, the electrode T of the semiconductor element S can be connected to the semiconductor element connection pad 9, and the remaining portion of the build-up wiring layer 6 can be protected from the external environment.

如此,本發明之天線基板10係在芯絕緣板1之一方的主面形成有接地用導體3,且在與接地用導體3相對向之芯絕緣板1的另一方主面形成有天線焊墊7,因此能夠在接地用導體3與天線焊墊7之間確保充分的間隔,而不須在比接地用導體3更靠近天線焊墊7側處介設不必要之焊盤。因此,可提供一種能夠防止因焊盤所造成的雜訊混合到從天線焊墊7發射的電波中,且能夠正常地發送聲音或影像等高頻訊號之天線基板10。 As described above, in the antenna substrate 10 of the present invention, the grounding conductor 3 is formed on one main surface of the core insulating sheet 1, and the antenna pad is formed on the other main surface of the core insulating sheet 1 facing the grounding conductor 3. 7, it is possible to ensure a sufficient space between the grounding conductor 3 and the antenna pad 7, without having to place an unnecessary pad on the side closer to the antenna pad 7 than the grounding conductor 3. Therefore, it is possible to provide the antenna substrate 10 capable of preventing the noise caused by the pad from being mixed into the radio wave emitted from the antenna pad 7, and capable of transmitting a high-frequency signal such as a sound or an image normally.

另外,本發明並不限定於上述實施形態之一例,只要在不脫離本發明之要旨的範圍內,皆可進行各種變更。 The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

在上述之實施形態中,芯絕緣板1係為單層構造。但是,如第2圖所示,亦可為將由相同或不同的電性絕緣材料所構成之複數個絕緣層11a、11b、11c予以多層地積層之多層構造。藉由作成為此種多層構造,而能 夠例如在芯絕緣板11中之以接地用導體13與天線焊墊17所包夾之區域以外形成芯配線層18。另外,芯配線層18係為形成在芯絕緣板11之內部(例如,絕緣層11a及11b間、絕緣層11b及11c間等)的配線層,且為與增層配線層不同者。藉此,可提供一種能夠進行高密度的配線形成而不須增加增層絕緣層14的層數,且芯絕緣板11的剛性高之天線基板20。 In the above embodiment, the core insulating sheet 1 has a single layer structure. However, as shown in Fig. 2, a plurality of layers in which a plurality of insulating layers 11a, 11b, and 11c made of the same or different electrically insulating materials are laminated in a plurality of layers may be used. By making this multilayer structure, The core wiring layer 18 is formed, for example, in a region of the core insulating plate 11 surrounded by the grounding conductor 13 and the antenna pad 17. Further, the core wiring layer 18 is a wiring layer formed inside the core insulating sheet 11 (for example, between the insulating layers 11a and 11b and between the insulating layers 11b and 11c), and is different from the build-up wiring layer. Thereby, it is possible to provide the antenna substrate 20 capable of forming a high-density wiring without increasing the number of layers of the build-up insulating layer 14, and having high rigidity of the core insulating sheet 11.

此外,在上述實施形態中,天線焊墊7係直接形成在芯絕緣板1之另一方的主面。但是,如第2圖所示,天線焊墊17也能夠形成在1層積層於芯絕緣板11之另一方主面的增層絕緣層14上。如此,藉由在芯絕緣板11的上側積層1層增層絕緣層14,而能夠緩和起因於積層於芯絕緣板11的下表面之增層絕緣層14因製造時的熱歷程而伸縮所產生的翹曲。因此,能夠提供翹曲小的天線基板20。 Further, in the above embodiment, the antenna pad 7 is directly formed on the other main surface of the core insulating sheet 1. However, as shown in Fig. 2, the antenna pad 17 can also be formed on the build-up insulating layer 14 which is laminated on the other main surface of the core insulating sheet 11. By laminating one layer of the insulating layer 14 on the upper side of the core insulating sheet 11, it is possible to alleviate the expansion and contraction of the build-up insulating layer 14 which is laminated on the lower surface of the core insulating sheet 11 due to the thermal history during manufacture. Warp. Therefore, the antenna substrate 20 with small warpage can be provided.

1‧‧‧芯絕緣板 1‧‧‧core insulation board

2‧‧‧貫通孔 2‧‧‧through holes

2a‧‧‧貫通孔導體 2a‧‧‧through hole conductor

2b‧‧‧貫通孔焊盤 2b‧‧‧through hole pads

3‧‧‧接地用導體 3‧‧‧ Grounding conductor

4‧‧‧增層絕緣層 4‧‧‧Additional insulation

5‧‧‧連通孔 5‧‧‧Connected holes

5a‧‧‧連通導體 5a‧‧‧Connected conductor

5b‧‧‧連通焊盤 5b‧‧‧Connecting pads

6‧‧‧增層配線層 6‧‧‧Additional wiring layer

7‧‧‧天線焊墊 7‧‧‧Antenna pads

8‧‧‧阻焊劑層 8‧‧‧ solder resist layer

8a‧‧‧開口部 8a‧‧‧ openings

9‧‧‧半導體元件連接焊墊 9‧‧‧Semiconductor component connection pads

10‧‧‧天線基板 10‧‧‧Antenna substrate

S‧‧‧半導體元件 S‧‧‧Semiconductor components

T‧‧‧電極 T‧‧‧ electrodes

Claims (6)

一種天線基板,係在具有貫通孔之芯絕緣板之一方的主面設置接地用導體,並且在包含該接地用導體的前述一方的主面上交互地積層厚度比前述芯絕緣板薄的增層絕緣層與增層配線層;在前述芯絕緣板之另一方的主面,於與前述接地用導體相對向的位置設置有天線焊墊,該天線焊墊係經由前述貫通孔與前述增層配線層電性連接。 An antenna substrate in which a grounding conductor is provided on one main surface of a core insulating plate having a through hole, and a buildup layer having a thickness thinner than the core insulating plate is alternately laminated on the one main surface including the grounding conductor An insulating layer and a build-up wiring layer; and an antenna pad provided at a position facing the grounding conductor on the other main surface of the core insulating plate, wherein the antenna pad passes through the through hole and the build-up wiring Layer electrical connection. 如申請專利範圍第1項所述之天線基板,其中,前述芯絕緣板的厚度係為150至400μm,前述增層絕緣層的厚度係為30至70μm。 The antenna substrate according to claim 1, wherein the core insulating plate has a thickness of 150 to 400 μm, and the build-up insulating layer has a thickness of 30 to 70 μm. 如申請專利範圍第1項或第2項所述之天線基板,其中,前述貫通孔之開口徑為100至150μm。 The antenna substrate according to claim 1 or 2, wherein the through hole has an opening diameter of 100 to 150 μm. 如申請專利範圍第1項或第2項所述之天線基板,其中,前述增層絕緣層及前述增層配線層係分別交互地積層2層或3層。 The antenna substrate according to claim 1 or 2, wherein the buildup insulating layer and the buildup wiring layer are alternately laminated in two or three layers. 如申請專利範圍第1項或第2項所述之天線基板,其中,在前述芯絕緣板之另一方的主面積層增層絕緣層,並且在該增層絕緣層上設置前述天線焊墊。 The antenna substrate according to claim 1 or 2, wherein the other main layer of the core insulating sheet is provided with an insulating layer, and the antenna pad is provided on the build-up insulating layer. 如申請專利範圍第1項或第2項所述之天線基板,其中,前述芯絕緣板係由複數個絕緣層所形成。 The antenna substrate according to claim 1 or 2, wherein the core insulating plate is formed of a plurality of insulating layers.
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CN110676556B (en) * 2018-07-03 2021-07-06 三星电子株式会社 Antenna module
CN109378584A (en) * 2018-12-04 2019-02-22 深圳迈睿智能科技有限公司 Anti-interference antenna and its manufacturing method
CN109378584B (en) * 2018-12-04 2024-04-16 深圳迈睿智能科技有限公司 Anti-interference antenna and manufacturing method thereof

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