JP4360617B2 - Wiring board - Google Patents

Wiring board Download PDF

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JP4360617B2
JP4360617B2 JP2003428253A JP2003428253A JP4360617B2 JP 4360617 B2 JP4360617 B2 JP 4360617B2 JP 2003428253 A JP2003428253 A JP 2003428253A JP 2003428253 A JP2003428253 A JP 2003428253A JP 4360617 B2 JP4360617 B2 JP 4360617B2
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conductor
wiring
insulating layer
signal
layer
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JP2005191142A (en
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貴志 井上
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Kyocera Corp
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/1517Multilayer substrate
    • H01L2924/15172Fan-out arrangement of the internal vias
    • H01L2924/15174Fan-out arrangement of the internal vias in different layers of the multilayer substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

Description

本発明は、半導体素子等の電子部品を搭載するための配線基板に関するものである。   The present invention relates to a wiring board for mounting electronic components such as semiconductor elements.

一般に、移動体通信機器に代表されるような電子機器の小型化、薄型化の要求に伴い、このような電子機器に使用される半導体素子等の電子部品を搭載するための配線基板にも小型化、薄型化、多端子化が求められてきている。そして、そのような小型化、薄型化、多端子化を実現するための配線基板として、外部電気回路基板上に半田バンプを介して表面実装可能としたボールグリッドアレイパッケージ(BGA)用やチップスケールパッケージ(CSP)用の配線基板が実用化されている。   In general, along with the demand for downsizing and thinning of electronic devices such as mobile communication devices, wiring boards for mounting electronic components such as semiconductor elements used in such electronic devices are also small. There is a demand for reduction in size, thickness, and number of terminals. As a wiring board for realizing such miniaturization, thinning, and multi-terminal, for ball grid array packages (BGA) and chip scales that can be surface-mounted on the external electric circuit board via solder bumps. A wiring board for a package (CSP) has been put into practical use.

このようなBGA用やCSP用の配線基板は、複数の絶縁層が積層された絶縁基板の上面に電子部品の電極が半田を介して接続される電子部品接続用パッドが設けられているとともに絶縁基板の下面に外部電気回路基板の配線導体に半田を介して接続される外部接続用パッドが設けられている。そして、これらの電子部品接続用パッドと外部接続用パッドとを電気的に接続するための配線導体が絶縁基板の絶縁層を貫通して上下に延びるとともに各絶縁層間を水平に延びるように配設されている。   Such a BGA or CSP wiring board is provided with an electronic component connection pad on which an electrode of an electronic component is connected via solder on the upper surface of an insulating substrate in which a plurality of insulating layers are stacked. An external connection pad connected to the wiring conductor of the external electric circuit board via solder is provided on the lower surface of the board. A wiring conductor for electrically connecting the electronic component connecting pad and the external connecting pad extends vertically through the insulating layer of the insulating substrate and extends horizontally between the insulating layers. Has been.

そして、このような配線基板によれば、絶縁基板上に電子部品を、その電極が電子部品接続用パッドに半田を介して接続されるようにして搭載することにより電子装置となり、この電子装置は、その外部接続用パッドを外部電気回路基板の配線導体に半田を介して接続することにより外部電気回路基板上に実装されるとともに搭載する電子部品が外部電気回路に電気的に接続されることとなる。   And according to such a wiring board, it becomes an electronic device by mounting an electronic component on an insulating substrate so that its electrode is connected to an electronic component connecting pad via solder. The external connection pads are connected to the wiring conductors of the external electric circuit board via solder to be mounted on the external electric circuit board and the electronic components to be mounted are electrically connected to the external electric circuit; Become.

このような配線基板における配線導体は、用途によって信号用と接地用と電源用の配線導体に機能化されている。   Wiring conductors in such a wiring board are functionalized into wiring conductors for signals, grounds, and power supplies depending on applications.

このうち信号用の配線導体は、半導体素子等の電子部品と外部電気回路基板との間で電気信号を伝播させるための導電路として機能し、絶縁層間を絶縁基板の中央部から外周部に向けて互いの間隔が拡がるようにして延びる複数の細い帯状の配線導体を有するとともに、絶縁層を貫通する貫通導体により上下の配線導体同士が接続されており、さらに、絶縁層を貫通する貫通導体により信号用の電子部品接続用パッドおよび外部接続用パッドに接続されている。   Among these, the signal wiring conductor functions as a conductive path for propagating an electric signal between an electronic component such as a semiconductor element and the external electric circuit board, and the insulating layer is directed from the central portion to the outer peripheral portion of the insulating substrate. A plurality of thin strip-shaped wiring conductors extending so as to increase the distance between each other, and the upper and lower wiring conductors are connected to each other by a through conductor penetrating the insulating layer, and further, by the through conductor penetrating the insulating layer It is connected to a signal electronic component connection pad and an external connection pad.

また、接地用の配線導体や電源用の配線導体は、配線基板に搭載される電子部品にそれぞれ接地電位や電源電位を供給するための供給路としての機能を有しているとともに信号用の配線導体に対する電磁シールド機能や特性インピーダンスの調整機能を有しており、信号用の配線導体が形成された絶縁層の層間にその外周部から中央部に向けて信号用の導体層の間に端部を有して延在するように形成された広面積の導体層や絶縁層を挟んで信号用の配線導体と対向するように配置された広面積の導体層を有するとともに、絶縁層を貫通する貫通導体によりそれぞれ接地用や電源用の電子部品接続用パッドおよび外部接続用パッドに接続されている。   In addition, the wiring conductor for grounding and the wiring conductor for power supply function as a supply path for supplying the ground potential and the power supply potential to the electronic components mounted on the wiring board, respectively, and the signal wiring It has an electromagnetic shielding function for the conductor and a characteristic impedance adjustment function, and an end portion between the signal conductor layers between the outer peripheral portion and the central portion between the insulating layers where the signal wiring conductors are formed. A large-area conductor layer and a large-area conductor layer arranged so as to face the signal wiring conductor across the insulating layer and extending through the insulating layer The through-conductors are connected to the grounding and power supply electronic component connection pads and the external connection pads, respectively.

なお、このような配線基板においては、信号用の配線導体は、同じ絶縁層を挟んだ上下の絶縁層の層間にそれぞれその中央部から外周部にかけて形成されることがある。
特開平11−135676号公報
In such a wiring board, the signal wiring conductor may be formed between the upper and lower insulating layers sandwiching the same insulating layer from the center to the outer periphery.
JP-A-11-135676

しかしながら、近時、半導体素子等の高集積化に伴い、信号用の配線導体の数が増加してきているとともに、配線基板の小型、高密度化に伴い、各絶縁層の中央部における信号用の配線導体の隣接間隔が狭いものとなってきている。そのため、信号用の配線導体が形成された絶縁層の層間にその外周部から中央部に向けて信号用の導体層の間に端部を有して延在するように接地用または電源用の導体層が形成される場合、絶縁層の中央領域では信号用の配線導体同士の間隔が狭く、接地用または電源用の配線導体が入り込む余地がないことから、接地用または電源用の導体層が信号用の配線導体の間の途中までしか入り込めない場合がある。その場合、絶縁層の層間では信号用の配線導体が存在する中央部に接地用または電源用の導体層が存在しない部位が形成される。   Recently, however, the number of signal wiring conductors has increased with the high integration of semiconductor elements, etc., and the signal board at the center of each insulating layer has become smaller and more dense with the wiring board. The interval between adjacent wiring conductors is becoming narrower. Therefore, between the insulating layer where the signal wiring conductor is formed and extending from the outer periphery to the center with an end between the signal conductor layers, the grounding or power supply When the conductor layer is formed, the distance between the signal wiring conductors is narrow in the central region of the insulating layer, and there is no room for the wiring conductor for grounding or power supply to enter. In some cases, it can only enter partway between signal wiring conductors. In that case, a portion where the grounding or power supply conductor layer does not exist is formed in the central portion where the signal wiring conductor exists between the insulating layers.

そして、同じ絶縁層を挟んだ上下の絶縁層の層間のうち、一方の絶縁層の層間にその中央部から外周部に向けて複数の信号用の配線導体が互いの間隔が拡がるように形成されているとともに、その層間の外周部から中央部に向けて信号用の配線導体の間の途中まで接地用または電源用の導体層が形成されており、かつ他方の絶縁層の層間にその中央部から外周部にかけて高周波の信号を伝播させるための配線導体が形成されている場合、他方の絶縁層の層間に形成された信号用の配線導体は、一方の絶縁層の層間に形成された接地用または電源用の導体層と絶縁層の中央部位では対向せず、外周部位では対向した状態となり、一方の絶縁層の層間に形成された接地用または電源用の導体層と対向しない部位と対向する部位とでその特性インピーダンスが変わってしまう。このように特性インピーダンスが途中で変わる配線導体に例えば5GHz以上の高周波信号を伝播させると、信号の反射や減衰が起こり、その反射や減衰のために信号用の配線導体を伝播する高周波信号の正常な伝播が阻害されて配線基板に搭載する半導体素子等の電子部品を正常に作動させることができないという問題点を有していた。   Then, among the upper and lower insulating layers sandwiching the same insulating layer, a plurality of signal wiring conductors are formed between the insulating layers between the central portion and the outer peripheral portion so that the distance between them is increased. In addition, a grounding or power supply conductor layer is formed partway between the signal wiring conductors from the outer peripheral portion of the interlayer toward the central portion, and the central portion is interposed between the other insulating layers. When a wiring conductor for propagating high-frequency signals from the outer periphery to the outer periphery is formed, the signal wiring conductor formed between the other insulating layers is used for grounding between the other insulating layers. Alternatively, the power supply conductor layer and the insulating layer are not opposed to each other at the central portion, but are opposed to each other at the outer peripheral portion, and are opposed to the portion that is not opposed to the grounding or power supply conductor layer formed between the insulating layers. And its characteristics Dance would change. When a high frequency signal of, for example, 5 GHz or more is propagated to a wiring conductor whose characteristic impedance changes midway in this way, signal reflection or attenuation occurs, and normality of the high frequency signal propagating through the signal wiring conductor due to the reflection or attenuation is caused. Therefore, there is a problem that electronic components such as semiconductor elements mounted on the wiring board cannot be normally operated due to hindered propagation.

本発明は、かかる従来の問題点に鑑み完成されたものであり、その目的は、同じ絶縁層を挟んだ上下の絶縁層の層間のうち、一方の絶縁層の層間にその中央部から外周部に向けて複数の信号用の配線導体が互いの間隔が拡がるように形成されているとともに、その層間の外周部から中央部に向けて信号用の配線導体の間の途中まで接地用または電源用の導体層が形成されており、かつ他方の絶縁層の層間にその中央部から外周部にかけて高周波の信号を伝播させるための配線導体が形成された配線基板において、他方の絶縁層の層間に形成された信号用の配線導体に周波数が5GHz以上の高周波の信号を伝播させた場合であっても、その信号用の配線導体で信号の反射や減衰が起こることがなく、信号用の配線導体に高周波の信号が良好に伝播されて、搭載する電子部品を正常に作動させることが可能な配線基板を提供することにある。   The present invention has been completed in view of such conventional problems, and the object thereof is to provide an outer peripheral portion from the central portion between the insulating layers between the upper and lower insulating layers sandwiching the same insulating layer. A plurality of signal wiring conductors are formed so as to extend toward each other, and the grounding or power supply is partway between the signal wiring conductors from the outer peripheral portion to the center portion between the layers. Is formed between the other insulating layers in a wiring board on which a wiring conductor for propagating a high-frequency signal is formed between the other insulating layer and the center to the outer periphery. Even when a high-frequency signal having a frequency of 5 GHz or more is propagated through the signal wiring conductor, no signal reflection or attenuation occurs in the signal wiring conductor. Good high-frequency signal Is sown, it is to provide a wiring substrate capable of successfully operating the electronic components mounted.

本発明の配線基板は、絶縁層と、該絶縁層の一方主面にその中央部から外周部に向けて互いの間隔が拡がる領域を有する複数の第1信号用配線導体と、前記絶縁層の前記一方主面で、且つ前記第1信号用配線導体の間の部位に、前記一方主面の外周部から中央部に向けて途中まで形成された接地用または電源用の導体層と、前記絶縁層の他方主面にその中央部から外周部にかけて形成された第2信号用配線導体と、を具備しており、前記絶縁層の前記他方主面に設けられた前記第2信号用配線導体が、前記絶縁層の前記一方主面に設けられた前記導体層及び前記第1信号用配線導体と平面視して重畳しないように配置されていることを特徴とするものである。 Wiring board of the present invention, an insulating layer, a plurality of first signal wiring conductor having a region extending the distance therebetween toward the outer periphery from the central portion on one main surface of the insulating layer, the insulating layer The grounding or power supply conductor layer formed on the one main surface and between the first signal wiring conductors to the middle from the outer periphery to the center of the one main surface , and the insulation A second signal wiring conductor formed on the other main surface of the layer from the central portion to the outer peripheral portion, and the second signal wiring conductor provided on the other main surface of the insulating layer The conductive layer and the first signal wiring conductor provided on the one main surface of the insulating layer are arranged so as not to overlap in plan view .

本発明の配線基板は、絶縁層と、該絶縁層の一方の主面にその中央部から外周部に向けて互いの間隔が拡がるように形成された複数の第1の配線導体と、前記一方の主面の前記第1の配線導体の間の部位に前記一方の主面の外周部から中央部に向けて途中まで形成された接地用または電源用の導体層と、前記絶縁層の他方の主面にその中央部から外周部にかけて形成された第2の配線導体とを具備し、前記一方の主面における前記第2の配線導体と対向する部位に前記導体層が存在しないことから、前記第2の配線導体はその全部が前記導体層と対向することはなく、そのため特性インピーダンスが一定に保たれる。したがって、第2の配線導体に周波数が5GHz以上の高周波の信号を伝播させた場合であっても、第2の配線導体で信号の反射や減衰が起こることがなく、第2の配線導体に高周波の信号が良好に伝播されて、搭載する電子部品を正常に動作させることが可能な配線基板を提供することができる。   The wiring board of the present invention includes an insulating layer, a plurality of first wiring conductors formed on one main surface of the insulating layer so that a distance from the central portion toward the outer peripheral portion increases, and the one A grounding or power supply conductor layer formed partway from the outer peripheral portion of the one main surface toward the central portion at a portion between the first wiring conductors of the main surface of the main surface, and the other of the insulating layers A second wiring conductor formed on the main surface from the central portion to the outer peripheral portion, and the conductor layer does not exist in a portion facing the second wiring conductor on the one main surface. The second wiring conductor does not entirely face the conductor layer, so that the characteristic impedance is kept constant. Therefore, even when a high-frequency signal having a frequency of 5 GHz or more is propagated to the second wiring conductor, no signal reflection or attenuation occurs in the second wiring conductor, and the second wiring conductor has a high frequency. Thus, it is possible to provide a wiring board in which the above-mentioned signal is propagated satisfactorily and the mounted electronic component can be operated normally.

次に、本発明の配線基板を添付の図面に基づき詳細に説明する。図1は、本発明を実施するための最良の形態を、半導体素子を搭載するための配線基板に適用した場合の例を示す断面図であり、図中、1は絶縁基板、2a,2b,2cはそれぞれ信号用,接地用,電源用の電子部品接続用パッド、3a,3b,3cはそれぞれ信号用,接地用,電源用の外部接続用パッド、4a,4b,4cはそれぞれ信号用,接地用,電源用の配線導体である。   Next, the wiring board of the present invention will be described in detail with reference to the accompanying drawings. FIG. 1 is a cross-sectional view showing an example in which the best mode for carrying out the present invention is applied to a wiring board for mounting a semiconductor element, in which 1 is an insulating substrate, 2a, 2b, 2c is an electronic component connection pad for signal, grounding and power supply, 3a, 3b and 3c are external connection pads for signal, grounding and power supply, and 4a, 4b and 4c are for signal and grounding, respectively. Wiring conductor for power and power supply.

なお、本例では、ガラス織物に熱硬化性樹脂を含浸させて成る絶縁層1aの上下面に熱硬化性樹脂から成る絶縁層1bを3層ずつ積層して絶縁基板1を形成しており、最表層の絶縁層1bはソルダーレジスト層である。また、絶縁基板1の上面にはそれぞれ信号用、接地用および電源用の電子部品接続用パッド2a,2b,2cが形成されているとともに絶縁基板1の下面にはそれぞれ信号用、接地用および電源用の外部接続用パッド3a,3b,3cが縦横の並びに配列形成されており、絶縁基板1の上面から下面にかけてはそれぞれ対応する電子部品接続用パッド2a,2b,2cと外部接続用パッド3a,3b,3cとを互いに電気的に接続する信号用、接地用および電源用の配線導体4a,4b,4cが配設されている。   In this example, the insulating substrate 1 is formed by laminating three insulating layers 1b made of thermosetting resin on the upper and lower surfaces of the insulating layer 1a made by impregnating glass fabric with thermosetting resin, The outermost insulating layer 1b is a solder resist layer. Also, signal, grounding and power supply electronic component connection pads 2a, 2b and 2c are formed on the upper surface of the insulating substrate 1, and signals, grounding and power supply are formed on the lower surface of the insulating substrate 1, respectively. External connection pads 3a, 3b, 3c are arranged in rows and columns, and corresponding electronic component connection pads 2a, 2b, 2c and external connection pads 3a, 3b are arranged from the upper surface to the lower surface of the insulating substrate 1, respectively. Wiring conductors 4a, 4b, and 4c for signal, grounding, and power supply that electrically connect 3b and 3c to each other are disposed.

絶縁層1aは、本例の配線基板の芯体となる部材であり、例えばガラス繊維束を縦横に織り込んだガラス織物にエポキシ樹脂やビスマレイミドトリアジン樹脂等の熱硬化性樹脂を含浸させて成り、厚みが0.3〜1.5mm程度であり、その上面から下面にかけて直径が0.1〜1mm程度の複数の貫通孔5を有している。そして、その上下面には配線導体4a,4b,4cの一部を構成する導体層および各貫通孔5の内面には円筒状の貫通導体が被着されており、絶縁層1a上下面の導体層同士が貫通孔5内の貫通導体を介して電気的に接続されている。   The insulating layer 1a is a member that becomes the core of the wiring board of this example, and is formed by impregnating a glass fabric in which glass fiber bundles are woven vertically and horizontally with a thermosetting resin such as epoxy resin or bismaleimide triazine resin, The thickness is about 0.3 to 1.5 mm, and a plurality of through holes 5 having a diameter of about 0.1 to 1 mm are provided from the upper surface to the lower surface. The upper and lower surfaces of the conductor layers 4a, 4b, and 4c are covered with a conductor layer that is a part of the wiring conductors 4a and 4c, and cylindrical through conductors are attached to the inner surfaces of the through holes 5. The layers are electrically connected via a through conductor in the through hole 5.

このような絶縁層1aは、ガラス織物に未硬化の熱硬化性樹脂を含浸させた絶縁シートを熱硬化させた後、これに上面から下面にかけてドリル加工を施すことにより製作される。なお、絶縁層1a上下面の導体層は、絶縁層1a用の絶縁シートの上下全面に厚みが3〜50μm程度の銅箔を貼着しておくとともにこの銅箔をシートの硬化後にエッチング加工することにより所定のパターンに形成される。また、貫通孔5内面の貫通導体は、絶縁層1aに貫通孔5を設けた後に、この貫通孔5内面に無電解めっき法および電解めっき法により厚みが3〜50μm程度の銅めっき膜を析出させることにより形成される。   Such an insulating layer 1a is manufactured by thermally curing an insulating sheet in which a glass fabric is impregnated with an uncured thermosetting resin, and then drilling the insulating sheet from the upper surface to the lower surface. In addition, the conductor layers on the upper and lower surfaces of the insulating layer 1a are obtained by attaching a copper foil having a thickness of about 3 to 50 μm to the entire upper and lower surfaces of the insulating sheet for the insulating layer 1a and etching the copper foil after the sheet is cured. Thus, a predetermined pattern is formed. Further, the through conductor on the inner surface of the through hole 5 is provided with a through hole 5 in the insulating layer 1a, and then a copper plating film having a thickness of about 3 to 50 μm is deposited on the inner surface of the through hole 5 by an electroless plating method and an electrolytic plating method. Is formed.

さらに、絶縁層1aは、その貫通孔5の内部にエポキシ樹脂やビスマレイミドトリアジン樹脂等の熱硬化性樹脂から成る樹脂柱6が充填されている。樹脂柱6は、貫通孔5を塞ぐことにより貫通孔5の直上および直下に各絶縁層1bを形成可能とするためのものであり、未硬化のペースト状の熱硬化性樹脂を貫通孔5内にスクリーン印刷法により充填し、それを熱硬化させた後、その上下面を略平坦に研磨することにより形成される。そして、この樹脂柱6を含む絶縁層1aの上下面に絶縁層1bがそれぞれ3層ずつ積層されている。   Furthermore, the insulating layer 1a is filled with a resin column 6 made of a thermosetting resin such as an epoxy resin or a bismaleimide triazine resin in the through hole 5 thereof. The resin pillar 6 is for making it possible to form each insulating layer 1b directly above and below the through-hole 5 by closing the through-hole 5, and an uncured paste-like thermosetting resin is placed in the through-hole 5 After the film is filled by screen printing and thermally cured, the upper and lower surfaces thereof are polished substantially flatly. Three insulating layers 1b are laminated on the upper and lower surfaces of the insulating layer 1a including the resin pillars 6 respectively.

絶縁層1aの上下面に積層された各絶縁層1bは、それぞれの厚みが20〜60μm程度であり、各層の上面から下面にかけて直径が30〜100μm程度の複数の貫通孔7を有している。これらの各絶縁層1bは、配線導体4a,4b,4cを高密度に配線するための絶縁間隔を提供するためのものであり、最表層の絶縁層1bを除く各絶縁層1bの表面には配線導体4a,4b,4cの一部を構成する導体層が被着されているとともに貫通孔7内には貫通導体が被着されている。そして、上層の導体層と下層の導体層とが貫通孔7内の貫通導体を介して電気的に接続されることにより立体的な高密度配線が可能となっている。このような各絶縁層1bは、厚みが20〜60μm程度の未硬化の熱硬化性樹脂から成る絶縁フィルムを絶縁層1aの上下面に貼着し、これを熱硬化させるとともにレーザ加工により貫通孔7を穿孔し、さらにその上に同様にして次の絶縁樹脂層を順次積み重ねることによって形成される。なお、各絶縁層1bの表面の導体層および貫通孔7内の貫通導体は、各絶縁層1bを形成する毎に各絶縁層1bの表面および貫通孔7内に5〜50μm程度の厚みの銅めっき膜を公知のセミアディティブ法やサブトラクティブ法等のパターン形成法により所定のパターンに被着させることによって形成される。   Each insulating layer 1b laminated on the upper and lower surfaces of the insulating layer 1a has a thickness of about 20 to 60 μm, and has a plurality of through holes 7 having a diameter of about 30 to 100 μm from the upper surface to the lower surface of each layer. . Each of these insulating layers 1b is for providing an insulating interval for wiring the wiring conductors 4a, 4b, 4c with high density, and on the surface of each insulating layer 1b except the outermost insulating layer 1b. A conductor layer that constitutes a part of the wiring conductors 4 a, 4 b, 4 c is deposited and a through conductor is deposited in the through hole 7. The upper conductor layer and the lower conductor layer are electrically connected via the through conductor in the through hole 7 to enable three-dimensional high-density wiring. Each of such insulating layers 1b has an insulating film made of an uncured thermosetting resin having a thickness of about 20 to 60 [mu] m attached to the upper and lower surfaces of the insulating layer 1a, thermally cured, and laser-processed through-holes. 7 is drilled, and the next insulating resin layers are sequentially stacked thereon in the same manner. The conductive layer on the surface of each insulating layer 1b and the through conductor in the through hole 7 are formed of copper having a thickness of about 5 to 50 μm on the surface of each insulating layer 1b and in the through hole 7 each time each insulating layer 1b is formed. It is formed by depositing a plating film in a predetermined pattern by a pattern forming method such as a known semi-additive method or subtractive method.

また、絶縁基板1の上面に形成された電子部品接続用パッド2a,2b,2cおよび絶縁基板1の下面に形成された外部接続用パッド3a,3b,3cは、厚みが3〜50μm程度の銅めっき膜から成り、それぞれ電子部品の電極および外部電気回路基板の配線導体と各配線導体4a,4b,4cとを電気的に接続するための接続用電極として機能する。そして、それぞれの露出表面には半田8a,8bが接合されており、電子部品接続用パッド2a,2b,2cには半田8aを介して電子部品の各電極が接続され、外部接続用パッド3a,3b,3cには半田8bを介して外部電気回路基板の配線導体が接続される。このような電子部品接続用パッド2a,2b,2cおよび外部接続用パッド3a,3b,3cは、絶縁層2bの表面に公知のセミアディティブ法やサブトラクティブ法により銅めっき膜を所定のパターンに被着させることにより形成され、その表面に半田ペーストを塗布するとともにそれをリフローすることにより半田8a,8bが接合される。なお、電子部品接続用パッド2a,2b,2cは直径が50〜100μm程度の円形であり、外部接続用パッド3a,3b,3cは直径が200〜500μm程度の円形である。   Also, the electronic component connection pads 2a, 2b, 2c formed on the upper surface of the insulating substrate 1 and the external connection pads 3a, 3b, 3c formed on the lower surface of the insulating substrate 1 are copper having a thickness of about 3 to 50 μm. It consists of a plating film and functions as a connection electrode for electrically connecting the electrodes of the electronic component and the wiring conductor of the external electric circuit board to the wiring conductors 4a, 4b, 4c, respectively. Solder 8a, 8b is bonded to each exposed surface, and each electrode of the electronic component is connected to the electronic component connecting pads 2a, 2b, 2c via the solder 8a, and the external connecting pad 3a, A wiring conductor of an external electric circuit board is connected to 3b and 3c via solder 8b. Such electronic component connection pads 2a, 2b, 2c and external connection pads 3a, 3b, 3c are coated with a copper plating film in a predetermined pattern on the surface of the insulating layer 2b by a known semi-additive method or subtractive method. The solder 8a and 8b are joined by applying a solder paste to the surface and reflowing it. The electronic component connection pads 2a, 2b and 2c are circular with a diameter of about 50 to 100 μm, and the external connection pads 3a, 3b and 3c are circular with a diameter of about 200 to 500 μm.

これらの電子部品接続用パッド2a,2b,2cと外部接続用パッド3a,3b,3cとを接続するようにして絶縁基板1の上面から下面にかけて配設された信号用、接地用および電源用の各配線導体4a,4b,4cは、それぞれ電子部品の各電極を外部電気回路基板に接続するための導電路として機能し、絶縁層1bの各層間毎にそれぞれの機能に応じた配線導体のパターンを有するように配設されている。   These electronic component connection pads 2a, 2b and 2c are connected to the external connection pads 3a, 3b and 3c so as to be connected from the upper surface to the lower surface of the insulating substrate 1 for signal, grounding and power supply. Each wiring conductor 4a, 4b, 4c functions as a conductive path for connecting each electrode of the electronic component to the external electric circuit board, and a wiring conductor pattern corresponding to each function for each layer of the insulating layer 1b. It is arrange | positioned so that it may have.

本例の配線基板においては、例えば図2に要部平面図で示すように、ある絶縁層1bの層間には、信号用の配線導体4aの一部として絶縁層1bの中央部から外周部に向けて互いの間隔が拡がるように延びる複数の細い帯状の第1の配線導体4a1が形成されているとともに、接地用の配線導体4bの一部として絶縁層1bの外周部から中央部に向けて第1の配線導体4a1の間の途中まで延在する導体層4b1が形成されている。第1の配線導体4a1は信号用の伝送線路であり、絶縁基板1の中央部から外周部に向けて互いの間隔が拡がるように形成されることにより絶縁基板1の上面中央部に形成された信号用の電子部品接続用パッド2aと絶縁基板1の下面外周部に形成された信号用の外部接続用パッド3aとが接続可能となる。また、導体層4b1は、接地用の電位を安定して供給するとともに第1の配線導体4a1の間に延在することにより第1の配線導体4a1の電磁的なシールドを強化する機能を為す。   In the wiring board of this example, for example, as shown in the plan view of the main part in FIG. 2, there is a signal wiring conductor 4a between the central portion and the outer peripheral portion of the insulating layer 1b between the insulating layers 1b. A plurality of thin strip-shaped first wiring conductors 4a1 extending so as to increase the distance from each other are formed, and as a part of the grounding wiring conductor 4b, from the outer peripheral portion toward the central portion of the insulating layer 1b. A conductor layer 4b1 extending partway between the first wiring conductors 4a1 is formed. The first wiring conductor 4a1 is a transmission line for signals, and is formed in the central portion of the upper surface of the insulating substrate 1 by being formed so that the distance from each other increases from the central portion of the insulating substrate 1 toward the outer peripheral portion. The signal electronic component connection pad 2a and the signal external connection pad 3a formed on the outer periphery of the lower surface of the insulating substrate 1 can be connected. The conductor layer 4b1 functions to reinforce the electromagnetic shield of the first wiring conductor 4a1 by supplying a grounding potential stably and extending between the first wiring conductors 4a1.

さらに、これらの第1の配線導体4a1および導体層4b1が形成された絶縁層1bの次の層間には、図3に要部平面図で示すように、信号用の配線導体4aの一部として絶縁層1bの中央部から外周部に向けて延びる細い帯状の第2の配線導体4a2が形成されている。この第2の配線導体4a2は、高周波の信号を伝播させるための導電路であり、例えば5GHz以上の高周波信号が伝播される。   Further, as shown in a plan view of the main part in FIG. 3, as a part of the signal wiring conductor 4a, the insulating layer 1b on which the first wiring conductor 4a1 and the conductor layer 4b1 are formed is interposed between the layers. A thin strip-shaped second wiring conductor 4a2 extending from the central portion of the insulating layer 1b toward the outer peripheral portion is formed. The second wiring conductor 4a2 is a conductive path for propagating a high frequency signal. For example, a high frequency signal of 5 GHz or more is propagated.

なお、図2および図3においては、その上側が絶縁基板1の外周部側を示し、その下側が絶縁基板1の中央部側を示している。また、図2および図3は、本例の配線基板の同じ箇所を同じ側から見た要部平面図であり、簡略のために配線導体として図2においては第1の配線導体4a1および導体層4b1のみを、図3においては第2の配線導体4a2のみを示している。   2 and 3, the upper side indicates the outer peripheral side of the insulating substrate 1, and the lower side indicates the central side of the insulating substrate 1. 2 and 3 are main part plan views of the same part of the wiring board of this example as viewed from the same side. For the sake of simplicity, the first wiring conductor 4a1 and the conductor layer are shown as wiring conductors in FIG. Only 4b1 is shown, and only the second wiring conductor 4a2 is shown in FIG.

なお、本例の配線基板においては、図2に示すように、導体層4b1には、第2の配線導体4a2に対向する部位に導体層4b1が存在しない切欠き部Cが形成されている。このように、導体層4b1には、第2の配線導体4a2に対応する部位に導体層4b1が存在しない切欠き部Cが形成されていることから、図3に図2を重ねて透視した透視図である図4に示すように、第2の配線導体4a2は、その全部が導体層4b1と対向することはなく、そのため第2の配線導体4a2の特性インピーダンスが一定に保たれる。したがって、第2の配線導体4a2に周波数が5GHz以上の高周波の信号を伝播させた場合であっても、第2の配線導体4a2で信号の反射や減衰が起こることがなく、第2の配線導体4a2に高周波の信号が良好に伝播されて、搭載する電子部品を正常に動作させることが可能な配線基板を提供することができる。なお、切欠き部Cの幅が第2の配線導体4a2の幅よりも片側に10μm未満広い場合には、第2の配線導体4a2と導体層4b1との間の電磁的な結合が大きなものとなって第2の配線導体4a2の特性インピーダンスが不均一となってしまう危険性が大きくなる。したがって切欠き部Cの幅は、第2の配線導体4a2の幅よりも両側にそれぞれ10μm以上広いことが好ましく、さらには両側にそれぞれ第2の配線導体4a2の幅以上広いことがより好ましい。   In the wiring board of this example, as shown in FIG. 2, the conductor layer 4b1 is provided with a notch C where the conductor layer 4b1 does not exist at a portion facing the second wiring conductor 4a2. As described above, the conductor layer 4b1 is formed with the notched portion C where the conductor layer 4b1 does not exist in a portion corresponding to the second wiring conductor 4a2. As shown in FIG. 4, which is a diagram, the second wiring conductor 4a2 does not entirely face the conductor layer 4b1, and therefore the characteristic impedance of the second wiring conductor 4a2 is kept constant. Therefore, even when a high-frequency signal having a frequency of 5 GHz or more is propagated to the second wiring conductor 4a2, no signal reflection or attenuation occurs in the second wiring conductor 4a2, and the second wiring conductor 4a2. It is possible to provide a wiring board in which a high-frequency signal can be satisfactorily propagated to 4a2 and a mounted electronic component can be operated normally. When the width of the notch C is less than 10 μm on one side than the width of the second wiring conductor 4a2, the electromagnetic coupling between the second wiring conductor 4a2 and the conductor layer 4b1 is large. This increases the risk that the characteristic impedance of the second wiring conductor 4a2 becomes non-uniform. Therefore, the width of the notch C is preferably 10 μm or more on both sides than the width of the second wiring conductor 4a2, and more preferably wider than the width of the second wiring conductor 4a2 on both sides.

かくして、本発明の配線基板によれば、絶縁基板1の上面に電子部品をその電極が半田8aを介して各電子部品接続用パッド2a,2b,2cに接続されるようにして搭載することにより電子装置となり、この電子装置における外部接続用パッド3a,3b,3cを外部電気回路基板の配線導体に半田8bを介して接続することにより電子装置が外部電気回路基板に実装されるとともに搭載する電子部品の各電極が外部電気回路に電気的に接続されることとなる。   Thus, according to the wiring board of the present invention, the electronic component is mounted on the upper surface of the insulating substrate 1 so that the electrode thereof is connected to each of the electronic component connecting pads 2a, 2b, 2c via the solder 8a. The electronic device is mounted on the external electric circuit board and mounted on the electronic device by connecting the external connection pads 3a, 3b, 3c to the wiring conductor of the external electric circuit board via the solder 8b. Each electrode of the component is electrically connected to an external electric circuit.

なお、本発明は上述の実施の形態例に限定されるものではなく、本発明の要旨を逸脱しない範囲であれば種々の変更は可能であり、例えば上述の実施の形態例では導体層4b1が接地用の導体層である例を示したが、この導体層は電源用の導体層であってもよい。   It should be noted that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. For example, in the above-described embodiment, the conductor layer 4b1 is formed. Although an example of a grounding conductor layer has been shown, this conductor layer may be a power source conductor layer.

本発明の配線基板を実施するための最良の形態例を示す断面図である。It is sectional drawing which shows the example of the best form for implementing the wiring board of this invention. 本発明の配線基板の一つの絶縁層の層間を示す要部平面図である。It is a principal part top view which shows the interlayer of one insulating layer of the wiring board of this invention. 図2に示した次の絶縁層の層間を示す要部平面図である。FIG. 3 is a plan view of a principal part showing an interlayer of a next insulating layer shown in FIG. 2. 図3に図2を重ねて透視した透視図である。FIG. 4 is a perspective view of FIG. 3 superimposed on FIG. 2.

符号の説明Explanation of symbols

1a,1b:絶縁層
4a1:第1の配線導体
4b1:接地または電源用の導体層
4a2:第2の配線導体
DESCRIPTION OF SYMBOLS 1a, 1b: Insulating layer 4a1: 1st wiring conductor 4b1: Conductive layer for earth | ground or power supply 4a2: 2nd wiring conductor

Claims (3)

絶縁層と、
該絶縁層の一方主面にその中央部から外周部に向けて互いの間隔が拡がる領域を有する複数の第1信号用配線導体と、
前記絶縁層の前記一方主面で、且つ前記第1信号用配線導体の間の部位に、前記一方主面の外周部から中央部に向けて途中まで形成された接地用または電源用の導体層と、
前記絶縁層の他方主面にその中央部から外周部にかけて形成された第2信号用配線導体と、
を具備しており、
前記絶縁層の前記他方主面に設けられた前記第2信号用配線導体が、前記絶縁層の前記一方主面に設けられた前記導体層及び前記第1信号用配線導体と平面視して重畳しないように配置されていることを特徴とする配線基板。
An insulating layer;
A plurality of first signal wiring conductors having a region in which one of the main surfaces of the insulating layer has an interval that increases from the central portion toward the outer peripheral portion;
A grounding or power supply conductor layer formed on the one main surface of the insulating layer and at a position between the first signal wiring conductors from the outer peripheral portion to the middle portion of the one main surface. When,
A second signal wiring conductor formed on the other main surface of the insulating layer from the center to the outer periphery;
It has
The second signal wiring conductor provided on the other main surface of the insulating layer overlaps the conductor layer and the first signal wiring conductor provided on the one main surface of the insulating layer in plan view. A wiring board characterized in that the wiring board is arranged so as not to occur .
請求項1に記載の配線基板において、The wiring board according to claim 1,
前記絶縁層の一方主面のうち、前記第2信号用配線導体に対向する部位を対向領域とすると、  Of the one main surface of the insulating layer, when a portion facing the second signal wiring conductor is a facing region,
前記導体層は、前記第1信号用配線導体と前記対向領域との間に、前記一方主面の外周部から中央部に向かって形成された延在部を有することを特徴とする配線基板。The wiring board according to claim 1, wherein the conductor layer has an extending portion formed from an outer peripheral portion of the one main surface toward a central portion between the first signal wiring conductor and the opposing region.
請求項1に記載の配線基板と、The wiring board according to claim 1;
前記配線基板に搭載された電子部品と、Electronic components mounted on the wiring board;
を具備した電子装置。An electronic device comprising:
JP2003428253A 2003-12-24 2003-12-24 Wiring board Expired - Fee Related JP4360617B2 (en)

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Publication number Priority date Publication date Assignee Title
JP5891585B2 (en) 2011-01-24 2016-03-23 株式会社ソシオネクスト Semiconductor device and wiring board

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