TW201412461A - Method of supplying injection grains in direct pressure abrasive blasting machine, and direct pressure abrasive blasting machine - Google Patents

Abstract

This direct pressure abrasive blasting machine supplies fine grains to an injection nozzle without causing said grains to agglomerate. This direct pressure abrasive blasting machine (1) is provided with: a pressurization tank (11), a grain acceleration path (12) into which grains in the pressurization tank (11) are introduced; a grain supply tube (13) communicating between the grain acceleration path (12) and an injection nozzle (40); and a compressed gas supply source (not shown) for introducing a compressed gas (2) into the pressurization tank (11) and the grain acceleration path (12), wherein the pressure of the compressed gas introduced into the pressurization tank (11) and the grain acceleration path (12) is repeatedly fluctuated by at least a prescribed pressure difference. By means of these pressure fluctuations, the gas present in the gaps between the grains is repeatedly compressed and expanded, preventing agglomeration of the grains and ensuring flowability.

Description

Spray granular material supply method and direct pressure type bead processing device for direct pressure type bead processing device

The present invention relates to a method of supplying a sprayed granule to an injection nozzle provided in a direct pressure type bead processing apparatus, and a direct pressure type bead processing apparatus for realizing the above method. More specifically, the present invention relates to a granular material supply method and a direct pressure type bead processing apparatus which are suitable for a sprayed granular body for supplying fine powder in a direct pressure type bead processing apparatus.

Further, in the present invention, the "bead processing" includes, in addition to the blasting treatment, the bead blasting treatment, and the shot peening, in order to adhere or diffuse the components of the granules or the granules to the workpiece. All of the processing or processing methods are performed by spraying the granular body together with the compressed gas, such as the granular body spraying performed on the surface.

In the conventional direct pressure type bead processing apparatus, as shown in FIG. 9, the pipe having the granular body introduction hole 212a is passed through the deposition position of the granular body at the bottom of the pressure tank 211, by the tube. The road forms a granular acceleration path 212. Further, the direct-pressure type bead processing apparatus includes a granular material supply device 210 that supplies compressed gas from a compressed gas supply source (not shown) to the pressurizing tank 211 and the granular material. One end 212' of the body acceleration path 212, whereby the granular body in the pressurized tank 211 is introduced into the granule acceleration path 212, and is passed through the flow of compressed gas flowing through the granule acceleration path 212. The granules are pressurized and the granules are accelerated, and the granules are supplied to the injection nozzle.

In the example shown in FIG. 8, such a direct pressure with the granular body supply device 210 is provided. The bead processing apparatus 200 is configured such that the other end 212b of the granular acceleration path 212 communicates with the injection nozzle 240 via the granular material supply pipe 213, and the funnel 233 that houses the processing chamber 230 of the injection nozzle 240 is provided. The lower end communicates with the cyclone separator 222 disposed above the pressurized tank 211 via the granular body recovery pipe 237, and is provided with a dust collector 238 that sucks the inside of the cyclone separator 222.

Further, in the direct-pressure type bead processing apparatus 200 having the above-described configuration, when the inside of the cyclone 222 is sucked by the dust collector 238, the granular body is ejected from the ejection nozzle 240, and the particles ejected from the ejection nozzle 240 are ejected. The cutting body is introduced into the cyclone 222 disposed above the pressurized tank 211 via the granular body collecting pipe 237 together with the cutting powder or the like generated when the workpiece is cut. Then, the reusable granules can be recovered into the granule box 229 provided at the bottom of the cyclone 222 by wind sorting, and on the other hand, dust such as cutting powder can be sucked to the dust collector 238. Remove it.

When the granular material in the pressurizing tank 211 is exhausted by the ejection, the compressed gas is introduced into the pressurizing tank 211 and the granular acceleration path 212, and then the granular body box 229 and the pressurizing tank are opened. The 211 discharge valve 227 introduces the granular body collected in the granular container 229 by the cyclone 222 into the pressurized tank 211. Thereafter, the discharge valve 227 is closed again, and the compressed gas is introduced into the pressurized tank 211 and the granular acceleration path 212, whereby the granular body in the pressurized tank 211 can be pressure-fed to the injection nozzle 240. Spray.

In the direct-pressure type bead processing apparatus 20 configured as described above, the granular material introduced into the pressurizing tank 211 is compressed by the pressure in the pressurizing tank 211, so that the particles are coupled to each other to reach a stable state, thereby Loss of mobility. As a result, when the granular body provided on the granular body introduction hole 212a of the granular body acceleration path 212 is carried out, a mortar is formed in the deposited granular body. In the shape of the hole, the granular body cannot be further introduced into the granular body acceleration path 212, and although the granular body remains in the pressurized tank 211, the granular body cannot be ejected from the ejection nozzle 240.

Therefore, in the direct-pressure type bead processing apparatus 200, in order to prevent the granular bodies from being bonded to each other and agglomerating and losing fluidity, vibration is generally applied by a tapper or a vibrator provided in the pressurizing tank 211. Ensure the fluidity of the granules.

However, there is a problem in that the method of applying vibration by a tap or a vibrator is effective for a granular body having an average particle diameter of more than 10 μm, but for a granular shape having an average particle diameter of 10 μm or less. In the body, since the mass of each granule is small, it is difficult to separate the granules due to the combination of the van der Waals force. Even if vibration is applied, the condensed granules will maintain a stable state in a block, thereby producing Poor supply of granules.

In addition, even if the granular material can be supplied, since the granular body is ejected from the ejection nozzle 240 in a state of being aggregated, there is a problem that the processing state varies.

On the other hand, in recent years, with the miniaturization and weight reduction of various products, it is required that the bead processing is also fine and precise processing, the particle size of the granular body used in the processing is further reduced, and the processing precision is required to be improved. When the granular material is supplied by a conventional supply method, the above requirements cannot be met. Therefore, even if the granular material is fine powder, it is necessary to smoothly and surely supply the quantitative granular material to the direct injection type of the spray nozzle. A method of supplying a granulated body of a bead processing apparatus.

In order to solve the problem associated with the use of the fine powder granules as described above, a method is also proposed in which the compressed air injection port is disposed upward at the bottom of the pressure tank, and the compressed air is introduced from the injection port to the addition. In the pressure box, the granular body in the tank is blown up, and the blown granular body and the compressed gas in the pressurized tank are passed through the granular body disposed above the ejection opening. The supply port is carried out and supplied to the injection nozzle (Japanese Patent Application Laid-Open No. 2003-25228 (JP200325228A)).

Further, although it is not related to the supply of the fine powder granules, the following quantitative supply device has been proposed as a quantitative supply device for a granular body used in a direct pressure type bead processing device, and the quantitative supply device is used in a pressurized box. a granular body in which a partially-occluded collecting turntable is disposed and which is trapped into a measuring recess formed on a circumferential surface of the collecting turntable, is close to a circumferential surface of the collecting turntable The pressure feed port of the granular material supply tube is pressure-fed to the outside of the pressure tank, whereby the quantitative granular body can be supplied to the injection nozzle (JP2000326230A).

In the conventional granular material supply method disclosed in '228, since the compressed air is introduced into the pressurized tank through the injection port provided at the bottom of the pressurized tank, the granularity deposited on the injection port by the air flow In this state, the granular body and the pressure in the pressurized tank are carried out together through the supply port disposed above the injection port. Therefore, the conventional granular body supply method can be applied to the spray nozzle. The sprayed granules are smoothly supplied.

However, in this method, as the amount of the granules remaining in the pressurized tank is reduced, the amount of granules (granular body concentration) contained in the compressed gas is also reduced, thereby causing supply to the spray nozzle. The supply of granules changes with time.

Further, as described above, the method is a method of carrying out the granular body in a state of being lifted up in the pressurized tank and dispersed in the collapsed air to the outside of the pressurized tank, which cannot be quantitatively disclosed as disclosed in '230 The quantitative supply device that measures and transports the granular material in a stacked state is used in combination, and it is difficult to always supply the granular body with a fixed amount.

Accordingly, the present invention is an invention made to eliminate the disadvantages of the prior art described above. It is an object of the present invention to provide a sprayed granule supply method and a sprayed granule supply device which can prevent the granules from agglomerating and ensure the fluidity of the granules even when the fine granules are used in a relatively simple manner. .

Hereinafter, the technical means for solving the problem will be described together with the symbols used in the embodiment for carrying out the invention. The symbol is used to clarify the correspondence between the description of the invention and the description of the form of the invention, and is not intended to limit the technical scope of the invention.

In the granular material supply method of the direct pressure type bead processing apparatus 1 of the present invention for achieving the above object, the direct pressure type bead processing apparatus 1 includes a pressure tank 11 and a granular body acceleration path 12 into which the above-described introduction a granular body in the pressurizing tank 11; a granular body supply pipe 13 that communicates the granular body acceleration path 12 with the injection nozzle 40; and a compressed gas supply source (not shown) that introduces the compressed gas 2 to The pressurizing tank 11 and the granular acceleration path 12 are characterized in that the pressure of the compressed gas introduced into the pressurizing tank 11 and the granular acceleration path 12 is set to a predetermined pressure difference, for example, 0.03 MPa or more. Further, for example, it is repeatedly changed at intervals of 1 second or shorter.

Any of the above-described granular material supply methods may be configured such that the outer peripheral surface of the roller 142 is disposed in contact with the granular body layer in the pressurizing tank 11 or the granular body layer extruded from the pressurizing tank 11 In a part of the roller 142, a groove or a hole for collecting a granular body is formed in a predetermined pattern on the outer peripheral surface, and a rotation trajectory of the outer peripheral surface of the roller 142 is formed with respect to the roller 142. The tangential direction of the outer peripheral surface is the slit-shaped granular acceleration path 12 in the longitudinal direction, and the granular body collected on the outer peripheral surface of the roller 142 is quantitatively introduced into the granular shape by the rotation of the roller 142. The body accelerates within the path 12.

Further, a buffer chamber 21 that communicates with the pressure tank 11 and a granular material supplement source (in the illustrated example, a cyclone separator) 22 that communicates with the buffer chamber 21 may be provided, and the above-described addition may be provided. The lower side valve 23 is opened and closed between the pressure tank 11 and the buffer chamber 21, the upper side valve 24 is opened and closed between the buffer chamber 11 and the granular body replenishing source, and the inside of the buffer chamber 21 is pressurized and exhausted. The buffer chamber supply and exhaust mechanism 25; in the process of introducing the compressed gas into the pressurizing tank 11 and the granular acceleration path 12, continuously introducing the granular body into the pressurizing tank by repeating a series of operations 11. The above-described series of operations refers to a state in which the granular body of the granular body replenishing source (cyclone) 22 from which the lower side valve 23 is closed and the upper side valve 24 is opened is introduced into the buffer chamber 21. (refer to T1 of FIG. 7), after the upper side valve 24 is closed, and the compressed gas is introduced into the buffer chamber 21 by the buffer chamber supply and exhaust mechanism 25 and pressurized (T2 of FIG. 7), the above is opened. The lower side valve 23 causes the granular body in the buffer chamber 21 to fall to the pressurizing tank 1 1 (T3 of FIG. 7), after which the lower side valve 23 is closed again, and after the buffer chamber supply and exhaust mechanism 25 releases the compressed gas in the buffer chamber 21 (T4 of FIG. 7), The upper side valve 24 is opened, and the granular body in the granular body replenishing source 22 is introduced into the buffer chamber 21.

Further, the direct pressure type bead processing apparatus 1 of the present invention for realizing the above-described method of supplying a granular material includes a pressurizing tank 11: a granular body acceleration path 12 into which a granular body in the pressurizing tank 11 is introduced; a shape supply pipe 13 that communicates the granular body acceleration path 12 with the injection nozzle 40, and a compressed gas supply source that introduces the compressed gas 2 to the pressure tank 11 and the granular body The acceleration path 12 is characterized in that a pressure fluctuation mechanism (not shown) is provided, and the pressure of the compressed gas introduced into the pressure tank 11 and the granular body acceleration path 12 is repeatedly changed by a predetermined pressure difference or more.

In the direct pressure type bead processing apparatus 1 having the above configuration, a quantitative supply device 14 may be provided between the pressure tank 11 and the granular material supply tube 13, and the quantitative supply device 14 may include an introduction path 14a for communication. The outlet 11a of the pressurizing tank 11; the circular roll chamber 14b communicating with the introduction path 14a; and the outer casing 141 having a slit-shaped granular acceleration path 12 formed therein. The granular body acceleration path 12 extends in a tangential direction with respect to the outer circumference of the roll chamber 14b and communicates with the above-described roll chamber 14b, and a roller 142 which is formed on the outer peripheral surface with a predetermined pattern to form a granular body for collecting a groove or a hole and rotating in the above-described roll chamber 14b.

Further, a configuration may be adopted in which a buffer chamber 21 that communicates with the pressurizing tank 11 and a particulate replenishing source (cyclone) 22 that communicates with the buffer chamber 21 are provided, and the above-described addition is provided. The lower side valve 23 is opened and closed between the pressure tank 11 and the buffer chamber 21, the upper side valve 24 is opened and closed between the buffer chamber 11 and the granular body replenishing source, and the inside of the buffer chamber 21 is pressurized and exhausted. a buffer chamber supply and exhaust mechanism 25; and a control mechanism 26 composed of an electronic control device such as a microcontroller, which is configured to introduce compressed gas into the pressurizing tank 11 and the particulate acceleration path 12 Controlling the operations of the upper and lower valves 23, 24 and the buffer chamber supply and exhaust mechanism 25, and performing a series of operations, the series of operations refer to a state in which the lower valve 23 is closed and the upper valve 24 is opened. Starting, the upper side valve 24 is closed, and the compressed gas is guided by the buffer chamber supply and exhaust mechanism 25 After being introduced into the buffer chamber 21 and pressurized, the lower valve 23 is opened, the granular body in the buffer chamber 21 is dropped into the pressurizing tank 11, and thereafter, the lower valve 23 is closed again. After the compressed air in the buffer chamber 21 is released by the buffer chamber supply and exhaust mechanism 25, the upper valve 24 is opened, and the granular material in the granular material supplement source 22 is introduced into the buffer chamber 21.

According to the configuration of the present invention described above, according to the granular material supply method of the direct pressure type bead processing apparatus of the present invention and the direct pressure type bead processing apparatus 1 which performs the above method, the following remarkable effects can be obtained.

The compressed gas introduced into the pressurizing tank 11 and the granular body acceleration path 12 is repeatedly changed by a predetermined pressure difference or more, whereby the gas existing in the gap S between the granular bodies P functions as follows. That is, it is compressed at the time of pressurization, and expands under reduced pressure, so that the gap S between the granular bodies P to be joined expands against the van der Waals force. Therefore, by repeatedly changing the pressure of the compressed gas introduced into the pressurizing tank 11 and the granular body accelerating path 12, the gas between the granules is repeatedly expanded even when the fine granules are used. It is compressed without causing agglomeration, thereby ensuring the fluidity of the granules.

In particular, when the pressure difference is set to 0.03 MPa or more, the effect of preventing aggregation can be more surely exhibited.

Further, by performing the pressure fluctuation at intervals of 1 second or less, it is possible to reliably prevent temporary aggregation in the interval between the pressure fluctuation and the pressure fluctuation.

Further, in the bead processing apparatus of the present invention, the granular body stored in the state of the bottom of the pressurizing tank 11 is supplied to the injection nozzle 40, so that it can be disposed between the pressurizing tank 11 and the granular material supply pipe 13. The quantitative supply device 14 supplies the accurately measured granular material to the injection nozzle 40, and the quantitative supply device 14 includes a roller 142 having a groove or a hole for collecting the granular body on the outer peripheral surface.

Further, the configuration is such that the granular body from the granular body replenishing source 22 is supplied to the pressurizing tank while maintaining the inside of the pressurizing tank 11 in a pressurized state, and the configuration is provided to communicate with the pressurizing tank 11 a buffer chamber 21, a particulate replenishing source (cyclone) 22 connected to the buffer chamber 21, and a side valve 23 for opening and closing between the pressurizing tank 11 and the buffer chamber 21, Opening and closing the upper side valve 24 between the buffer chamber 21 and the granular body replenishing source 22, the buffer chamber supply and exhaust mechanism 25 for pressurizing and exhausting the inside of the buffer chamber 21, and controlling the operation of the members Agency 26. Further, the granular body can be continuously introduced into the pressurizing tank 11 without interrupting the ejection of the granular body by the spray nozzle 40.

1‧‧‧(Direct pressure type) bead processing device

2‧‧‧Compressed gas (for granular pressurization)

3‧‧‧Compressed gas (for granular transport)

10‧‧‧Party body supply device

11‧‧‧ Pressurized box

11a‧‧‧Export

12‧‧‧Grain body acceleration path (slit)

13‧‧‧Grain body supply tube

13a‧‧‧ (one end of the granular supply tube)

13b‧‧‧ (the other end of the granule supply tube)

14‧‧‧Quantitative supply device

14a‧‧‧Importing path

14b‧‧‧ Roll Room

141‧‧‧ Shell

142‧‧‧roll

20‧‧‧Grain body supplementation mechanism

21‧‧‧ buffer room

22‧‧‧Cyclone separator (granular body supplement source)

23‧‧‧Bottom valve

24‧‧‧Upper valve

25‧‧‧buffer room supply and exhaust mechanism

26‧‧‧Control agency

27‧‧‧Dumping valve

28‧‧‧Vibrator

29‧‧‧Grain box

30‧‧‧Processing room

33‧‧‧ funnel

37‧‧‧Grain recovery tube

38‧‧‧ dust collector

39‧‧‧Conveyor

40‧‧‧jet nozzle

P‧‧‧Grain

S‧‧‧ gap

200‧‧‧(Direct pressure type) bead processing device

210‧‧‧Grain body supply device

211‧‧‧pressure box

212‧‧ ‧ granule acceleration path

212a‧‧‧granular body introduction hole

212'‧‧‧ (one end of the granulocyte acceleration path)

212b‧‧‧ (the end of the granulocyte acceleration path)

213‧‧‧granular body supply tube

222‧‧‧Cyclone separator

227‧‧‧Dumping valve

229‧‧‧Grain box

230‧‧‧Processing room

233‧‧‧ funnel

237‧‧‧granular body recovery tube

238‧‧‧ dust collector

240‧‧‧jet nozzle

Fig. 1 is a schematic explanatory view of a direct pressure type bead processing apparatus to which a granular material supply method of the present invention is applied.

Fig. 2 is an explanatory view of a granular material supply device.

Fig. 3 is a schematic view of a granular body, (A) is an explanatory diagram of a large number of aggregated states, and (B) is an explanatory diagram of the action of pressure fluctuation on a granular body P and a gap S of a portion surrounded by a broken line in (A). .

Figure 4 is a reference perspective view of a slit nozzle.

Fig. 5 is an explanatory view of a granular material supply device including a granular body replenishing mechanism.

Fig. 6 is a schematic view of a granular material supply device having a granular body replenishing mechanism.

Fig. 7 is a timing chart showing the operation of each part of the granular body replenishing mechanism.

Fig. 8 is an explanatory view of a conventional direct pressure type bead processing apparatus.

Fig. 9 is an enlarged explanatory view showing a portion of a granular body supply device of a conventional direct pressure type bead processing device.

Next, the embodiments of the present invention will be described below with reference to the drawings.

In Fig. 1, reference numeral 1 denotes a direct pressure type bead processing apparatus to which the granular material supply method of the present invention is applied. The direct pressure type bead processing apparatus 1 includes a granular body supply device 10 including a pressurizing tank 11 and a granular body acceleration path 12, and a granular body supply pipe 13 for the granular material supply device 10 The transported granular material is introduced into the spray nozzle 40; a compressed gas supply source (not shown) that introduces the compressed gas 2 for granular body pressurization into the pressurizing tank 11 and the particulate acceleration path 12; A replenishing mechanism 20 that replenishes the granular body into the above-described pressurized tank 11; and the above-described spray nozzle 40.

In the granular material supply device 10, the granular material and the compressed gas are supplied to the spray nozzle 40 via the granular material supply pipe 13, and the compressed gas 2 for pressurizing the granular material is introduced into the granular body. Both the pressurizing tank 11 of the supply device 10 and the granular body accelerating path 12, and introducing the granular body in the pressurizing tank 11 into the granular body accelerating path 12, can flow through the granular acceleration path The compressed gas in 12 pressurizes the granules, accelerates the granules, and then supplies the granules to the spray nozzles 40.

The configuration of the granular material supply device 10 may be the same as that of the conventional granular material supply device 210 described with reference to Fig. 9, and may be provided through the granular body deposition position at the bottom of the pressure tank 211. A pipe is provided, and the pipe is provided with a granular body introduction hole 212a, and the pipe is provided as the above-mentioned granular body acceleration path. Further, in the present embodiment, the granular material supply device 14 is provided at the outlet 11a of the pressurizing tank 11, and the quantitative supply device 14 is provided with the granular body introduced from the pressurizing tank 11 to be accelerated. The granule accelerates the path 12.

In the present embodiment, as shown in FIG. 2, the bottom portion of the pressurizing tank 11 is formed in a funnel shape in which the cross-sectional shape is tapered downward, and is formed in the pressurizing tank 11. The outer casing 141 of the quantitative supply device 14 in which the granular body acceleration path 12 is formed is attached to the outlet 11a at the lowermost end.

The casing 141 is provided with an introduction path 14a that communicates with the outlet 11a of the pressurizing tank 11, a circular chamber 14b that accommodates a circular space 142, and a roller chamber 14b that communicates with the roller chamber 14b and The slit-shaped granular acceleration path 12 extending in the tangential direction of the outer circumference of the roll chamber 14b accommodates the roller 142 in the roll chamber 14b, whereby the introduction path 14a is separated from the granular acceleration path 12.

The groove or hole for collecting and measuring the granular body is formed on the outer circumferential surface of the roller 142 accommodated in the roller chamber 14b at a predetermined depth and pattern, and the roller 142 is rotated in the roller chamber, thereby adding The granular body introduced into the introduction path 14a by the pressure box 11 is collected into a groove or a hole formed in the surface of the rotating roller 142, and if the roller 142 is further rotated, the granular body trapped in the above manner is introduced into the narrow portion. The slit-like granular body accelerates the path 12.

Therefore, as shown in FIGS. 1 and 2, the compressed gas 2 for pressurizing the granular material from the compressed gas supply source (not shown) is introduced into the granular body acceleration provided in the pressurizing tank 11 and the dosing device 14, respectively. The path 12 is introduced into the granular body in the slit-shaped granular acceleration path 12 in a state of being trapped by the surface of the roller 142, and is compressed by the flow in the granular acceleration path 12. The gas is taken out from a groove or a hole formed in the outer circumference of the roller 142, and is pressurized, accelerated, and then carried out, and introduced into the granular material supply pipe 13, and ejected from the injection nozzle 40.

In the embodiment shown in the drawing, the compressed gas 3 for particulate matter conveyance introduced from a compressed gas supply source (not shown) is introduced into the one end 13a side of the granular material supply pipe 13, and is generated from the granular material supply pipe 13 The one end 13a side flows toward the compressed gas flow of the spray nozzle 40, and introduces the granular body from the granular body acceleration path 12 to the intermediate position of the granular body supply pipe 13, whereby the granular body can be accelerated The granular body accelerated in the path 12 merges with the compressed gas flow in the granular material supply pipe 13 and is supplied to the injection nozzle 40.

The pressure of the compressed gas 2 for pressurizing the granular material introduced into the pressurizing tank 11 and the granular body acceleration path 12 is repeatedly changed by a predetermined pressure difference, and in order to generate such a pressure fluctuation, it is not shown. A pressure fluctuation mechanism (not shown) is provided in the compressed gas supply source or the pipeline from the compressed gas supply source to the pressurizing tank 11 and the particulate acceleration path 12.

Such a pressure varying mechanism may be a pressure varying mechanism that generates a pulsating compressed gas flow from the compressed gas supply source itself, as in the case of using, for example, a reciprocating type or a telescopic type compressor as a compressed gas supply source. When the compressed gas from the compressed gas supply source is not rectified or is not completely rectified, the compressed gas is introduced into the pressurizing tank 11 or the particulate acceleration path 12 in a state of remaining pulsation, thereby obtaining the above pressure. change. Further, a pressure varying mechanism may be employed in which a purge valve is provided in a circuit from the compressed gas supply source to the pressurizing tank 11 and the particulate acceleration path 12, by intermittently making the purge valve intermittently The above pressure change is obtained by opening and closing. Further, a pressure varying mechanism may be employed in which two pipes having different flow path areas are connected in parallel to the self-compressed gas supply source to pressurization In the circuit of the tank 11 and the granular body acceleration path 12, the pressure fluctuation is obtained by repeatedly opening and closing either of the flow paths or by alternately opening only one of the flow paths. Further, an electro-pneumatic regulator may be used to vary the pressure of the electro-pneumatic regulator at regular intervals in accordance with commands from the sequencer. As long as the predetermined pressure fluctuation can be obtained by the compressed gas 2 for pressurizing the granular material introduced into the pressurizing tank 11 and the granular body acceleration path 12, a pressure varying mechanism using any configuration can be employed.

For example, an electro-pneumatic regulator (ITV3030 manufactured by SMC) can be used to vary the pressure at regular intervals according to instructions from the sequencer. The electropneumatic regulator (ITV3030 manufactured by SMC) can be based on the signal from the sequencer. And set the pressure.

In this manner, the pressure of the compressed gas introduced into the pressurizing tank 11 and the granular body acceleration path 12 is repeatedly changed, whereby the pressure in the granular body transport path from the pressurizing tank 11 to the jetting nozzle 40 is not kept constant. It will change over and over again.

As a result, as shown in FIG. 3(A), the granular body P in a stacked state is in a state in which a gas is sealed in the gap S of each granular body P, and the gas S functions as follows. When the pressure of the compressed gas 2 for pressurization fluctuates, the gas S is compressed in a state where the pressure is high, and when the pressure is lowered, the gas S expands to expand the gap S between the granular bodies P (refer to Fig. 3(B)), therefore, by repeating such compression and expansion, even when the fine powder granules are used, the granules do not aggregate into a block.

As described above, in the pressure fluctuation of the compressed gas introduced into the pressurizing tank 11 and the granular body acceleration path 12, if the pressure difference between the high pressure and the low pressure is small, the gas expansion in the gap S of the granular body P Since the shrinkage is also small, the effect of preventing aggregation is weakened, so that it is preferable to generate 0.03 MPa or more.

Moreover, when a long pressure variation interval is employed, there are cases where The granular material is agglomerated in the intermittent change and change, and the granular body cannot be ejected during this period. Therefore, it is preferable to switch the high pressure state and the low pressure state at intervals of 1 second or shorter.

As described above, the granular material conveyed to the injection nozzle 40 is injected together with the compressed gas in a state in which the aggregates are not aggregated and the respective granular bodies are separated, and the workpiece is processed.

The granular body is replenished to the pressurizing tank 11 by the granular body replenishing mechanism 20, and the granular body replenishing mechanism 20 includes at least an opening and closing mechanism such as a granular body replenishing source 22 and a discharge valve 27, and the discharge valve 27 The introduction of the granular body replenishing source 22 and the pressurizing tank 11 is performed to control the introduction of the granular body to the pressurizing tank 11.

In the embodiment shown in FIG. 1, the lower end of the funnel 33 provided in the processing chamber 30 in which the injection nozzle 40 is housed can be communicated to the cyclone 22 via the granular body recovery pipe 37, and the dust collector 38 can be connected. The cyclone separator 22 sucks the inside of the cyclone separator 22, whereby the granular body sprayed in the processing chamber 30 is introduced into the cyclone 22 together with the cutting powder or the like, and the reusable granular body can be used. It is recovered into a granular box 29 provided at the bottom of the cyclone. On the other hand, the dust such as the cutting powder can be removed by the dust collector 38, whereby the granular body recovered by the cyclone 22 can be replenished to the pressurizing tank 11.

Therefore, in the illustrated embodiment, the cyclone separator 22 serves as a source of particulate matter for the pressurized tank 11.

The supply of the granular body to the spray nozzle 40 may also be a batch operation, which is performed once until the supply of the predetermined amount of granular material into the pressurization tank 11 is completed, once every time. When the supply of the granular material is completed, the operation is stopped, and the granular body is put into the pressurizing tank 11.

In this case, as shown in FIG. 1, the pressure tank 11 and the cyclone separator 22 may be communicated via the granular body box 29, and the pressure box 11 and the granular body box 29 may be opened and closed in advance. The discharge valve 27 opens the discharge valve 27 every time the injection of the granular body is completed, and the primary granular body is dropped to the pressurizing tank 11.

In this case, the cyclone separator 22, the granular body box 29, and the discharge valve 27 are the granular body replenishing mechanism 20 that replenishes the granular body to the pressurizing tank 11 (see FIGS. 1 and 2).

Further, instead of the above-described batch type configuration, the granular body replenishing mechanism 20 may continuously replenish the granular body to the pressurizing tank 11 without stopping the ejection of the granular body.

In the configuration example shown in FIGS. 5 and 6, the granular body replenishing mechanism 20 is provided with a buffer chamber 21 between the pressurizing tank 11 and the cyclone 22, and is provided with a pressurizing tank 11 and a buffer. The lower side valve 23 is opened and closed between the chambers 21, and the upper side valve 24 is opened and closed between the buffer chamber 21 and the cyclone separator 22.

Further, an air supply and exhaust mechanism 25 for pressurizing and deflation in the buffer chamber 21 is provided, and an operation of controlling the upper and lower valves 23, 24 and the air supply and exhaust mechanism 25 is provided and is performed by a sequencer or a microcontroller The control mechanism 26 is constituted by an electronic control device. By constituting the granular body replenishing mechanism 20, the granular body can be replenished into the pressurizing tank 11 while maintaining the inside of the pressurizing tank 11 in a pressurized state, so that it can be continuously ejected from the jetting nozzle 40. Granulated.

Here, the sequencer is used to control the timing with electronic control.

In Fig. 7, the state of control of each portion by the above-described control mechanism 26 for making such continuous ejection is shown in a timing chart.

As shown in Fig. 7, the granular body replenishing mechanism 20 is not supplied with the compressed gas 2 for the granular body pressurization or the granular body for transport in the stopped state of the bead processing apparatus 1. In the state of the compressed gas 3, and in the state in which the valves 23 and 24 on the upper side and the lower side are both opened, the inside of the buffer chamber 21 is in an unpressurized state (T0 in Fig. 7).

Further, since the two valves 23 and 24 on the upper side and the lower side are opened, all of the granular bodies existing in the cyclone 22 and the buffer chamber 21 are in a state of being dropped into the pressurizing tank 11.

When the bead processing apparatus 1 is started in this state, the control unit 26 closes the lower side valve 23, and starts to introduce the compressed gas 3 for the granular material transfer from the one end 13a of the granular material supply tube 13, and starts the granulation. The compressed gas 2 for pressurizing the body is introduced into the pressurizing tank 11 and the granular acceleration path 12, and the pressure in the granular body transport path from the pressurizing tank 11 to the spray nozzle 40 rises, and the injection from the injection nozzle 40 is started. Granular body (T1 of Figure 7).

After the granules are started to be ejected, if a predetermined time has elapsed, the control mechanism 26 closes the upper side valve 24 and opens the compressed gas to the buffer chamber 21, so that the pressure in the buffer chamber 21 rises until it reaches and increases. The pressure in the pressure tank 11 is the same as the pressure (T2 in Fig. 7).

As described above, when the pressure in the buffer chamber 21 rises to the same pressure as the pressure in the pressurizing tank 11, the control mechanism 26 opens the lower valve 23 to drop the granular body in the buffer chamber 21 into the pressurizing tank 11. Thereby, the granular body reduced by the ejection is replenished into the pressurizing tank 11 (T3 of Fig. 7).

When the replenishment of the granular body of the pressurizing tank 11 is completed, the control mechanism 26 closes the opened lower side valve 23, and deflates the inside of the buffer chamber 21 (T4 of Fig. 7).

When the deflation in the buffer chamber 21 is completed, the control unit 26 opens the upper valve 24 to drop the granular body recovered by the cyclone 22 into the buffer chamber 21 (T1 of Fig. 7). Thereafter, by repeating the above operation, the inside of the pressurizing tank 11 is maintained in a pressurized state, and the granular body is replenished to the pressurizing tank 11, whereby the granular body can be continuously ejected from the jetting nozzle 40. .

When the bead processing apparatus 1 is stopped, the compressed gas 3 for transporting the granular material is stopped from being introduced into the granular material supply tube 13, and the compressed gas 2 for pressurizing the granular material is stopped from being introduced into the pressurized tank. 11 and the granular body acceleration path 12, and the inside of the buffer chamber 21 is deflated, and thereafter, the upper and lower valves 23, 24 are both opened, and return to the initial state (T0 of Fig. 7).

[Examples]

Next, a processing example in which the direct pressure type bead processing apparatus 1 of the present invention is processed will be described below.

Furthermore, the processing conditions are as follows.

[Processing Example 1]

Use of granules: alumina #5000 (average particle size: 3 μm)

Use compressed gas: high pressure air

Pressure 1: The pressure of 0.23 MPa and 0.28 MPa is changed in a period of 1 second.

Pressure 2: 0.2 MPa

Granular supply: 30 g/min

Processing substrate: silicon wafer

Dry film: NCM155 (manufactured by Nichigo-Morton Co., Ltd.)

Nozzle moving speed: 8 m/min

Nozzle movement width: 200 mm

Nozzle distance: 100 mm

Nozzle diameter: Φ8 mm

Conveyor moving speed: 20 mm/min

Conveyor flow: 8 processes

Cutting depth: 30 μm

[Processing Example 2]

Use of granular material: copper powder with an average particle diameter of 1.8 μm (ultrafine Cu powder PF-1F manufactured by Epson Atmix)

Use compressed gas: nitrogen

Air pressure 1: The pressure of 0.23 MPa and 0.26 MPa is changed in a period of 0.7 seconds.

Air pressure 2: 0.2 MPa

Granular supply: 120 g/min

Processing substrate: alumina

Dry film: NCM155 (manufactured by Nichigo-Morton Co., Ltd.)

Nozzle moving speed: 8 m/min

Nozzle movement width: 200 mm

Nozzle distance: 10 mm

Nozzle diameter: slit nozzle with a slit of 1 mm and a width of 30 mm

Conveyor moving speed: 5 mm/min

Conveyor flow: 1 process

Copper thickness: about 6 μm

[Processing Example 3]

Use of granules: glass frit with an average particle size of 2.5 μm (ASF-6001 manufactured by Asahi Glass)

Use compressed gas: high pressure air

Pressure 1: The pressure of 0.23 MPa and 0.28 MPa is changed by a period of 0.5 second.

Pressure 2: 0.2 MPa

Granular supply: 120 g/min

Processing substrate: stainless steel

Dry film: NCM155 (manufactured by Nichigo-Morton Co., Ltd.)

Nozzle moving speed: 8 m/min

Nozzle movement width: 200 mm

Nozzle distance: 10 mm

Nozzle diameter: slit nozzle with a slit of 1 mm and a width of 30 mm

Nozzle reciprocating: 30 reciprocating

Glass thickness: about 10 μm

In the above-mentioned conditions, "pressure 1" is the pressure of the compressed gas (symbol "2" in FIGS. 1 and 2) introduced into the pressurized tank 11 and the granular acceleration path 12 by the granular body. The "pressure 2" is the pressure of the compressed gas (symbol "3" in FIGS. 1 and 2) introduced into the granular body of one end of the granular material supply pipe 13.

In addition, the "slot nozzle" in the "nozzle diameter" is a description of the nozzle which has a slit-shaped injection port, as shown in FIG.

The results of the processing under the above conditions were not observed in any of the processing examples, and it was not confirmed that the supply of the granular material due to aggregation was caused, and the granulated body in which the aggregation was ejected was not confirmed.

Moreover, the processing state of the workpiece was also good, and processing defects such as processing unevenness were not confirmed, and it was confirmed that the method of the present invention is suitable for conveying fine powder granules.

2‧‧‧Compressed gas (for granular pressurization)

3‧‧‧Compressed gas (for granular transport)

11‧‧‧ Pressurized box

11a‧‧‧Export

12‧‧‧Grain body acceleration path (slit)

13‧‧‧Grain body supply tube

13a‧‧‧ (one end of the granular supply tube)

14a‧‧‧Importing path

14b‧‧‧ Roll Room

20‧‧‧Grain body supplementation mechanism

22‧‧‧Cyclone separator (granular body supplement source)

27‧‧‧Dumping valve

28‧‧‧Vibrator

29‧‧‧Grain box

40‧‧‧jet nozzle

141‧‧‧ Shell

142‧‧‧roll

Claims (8)

A granular body supply method for a direct pressure type bead processing apparatus, the direct pressure type bead processing apparatus comprising: a pressure tank; a granular body acceleration path into which a granular body in the pressurized tank is introduced; a body supply pipe that communicates the granule acceleration path with the injection nozzle; and a compressed gas supply source that introduces the compressed gas into the pressure tank and the granule acceleration path; The pressure of the compressed gas in the pressure tank and the granular body acceleration path is repeatedly changed by a predetermined pressure difference or more. The granular material supply method of the direct pressure type bead processing apparatus according to the first aspect of the invention, wherein the predetermined pressure difference is set to 0.03 MPa or more. The method of supplying a granular material to a direct pressure type bead processing apparatus according to claim 1 or 2, wherein the pressure is varied at intervals of 1 second or shorter. The method of supplying a granular body of a direct pressure type bead processing apparatus according to claim 1 or 2, wherein the granular body layer in the pressurized box or the granular body layer extruded from the pressurized box is In a contact manner, a part of the outer peripheral surface of the roller is disposed, and the roller is formed with a groove or a hole for collecting the granular body in a predetermined pattern on the outer peripheral surface, and is formed on a rotation locus of the outer peripheral surface of the roller. The tangential direction with respect to the outer peripheral surface of the roller is defined as a slit-like granular acceleration path in the longitudinal direction, and the granular body collected on the outer peripheral surface of the roller is quantitatively introduced by the rotation of the roller to The granules accelerate within the path. The method of supplying a granular body of a direct pressure type bead processing apparatus according to claim 1 or 2, wherein a buffer chamber connected to the pressure tank and a granular body connected to the buffer chamber are provided a supplement source and a side valve that opens and closes between the pressure tank and the buffer chamber, and the buffer chamber and the grain Opening and closing the upper side valve between the supplemental sources and the buffer chamber supply and exhaust mechanism for pressurizing and exhausting the buffer chamber; during the process of introducing the compressed gas into the pressurizing tank and the granular acceleration path, The granules are continuously introduced into the pressurized tank by repeatedly performing a series of actions, which refer to the granules from the source of the granules from which the lower valve is closed and the upper valve is opened. After the state is introduced into the buffer chamber, the upper side valve is closed, and after the compressed air is introduced into the buffer chamber by the buffer chamber supply and exhaust mechanism and pressurized, the lower side valve is opened to make the buffer chamber The granular body is dropped into the pressurized tank, and thereafter, the lower side valve is closed again, and after the compressed air in the buffer chamber is released by the buffer chamber supply and exhaust mechanism, the upper side valve is opened, and the upper side valve is opened. The granules in the granule supplement source are introduced into the buffer chamber. A direct pressure type bead processing device comprising: a pressure tank; a granular body acceleration path into which a granular body in the pressurized tank is introduced; and a granular body supply pipe which accelerates the granular body and sprays a nozzle communicating; and a compressed gas supply source for introducing the compressed gas into the pressurizing tank and the granular acceleration path; wherein a pressure varying mechanism is provided to introduce the pressurized tank and the granular acceleration path The pressure of the compressed gas is repeatedly changed by a predetermined pressure difference or more. The direct pressure type bead processing apparatus according to claim 6, wherein a quantitative supply device is provided between the pressure tank and the granular material supply tube, and the quantitative supply device includes an introduction path that communicates with An outlet of the pressure tank; a circular roller chamber communicating with the introduction path; and an outer casing having a slit-shaped acceleration path of the granular body formed therein, extending along a tangential direction with respect to an outer circumference of the roller chamber And communicating with the roller chamber; and a roller having a groove or a hole for collecting the granular body in a predetermined pattern on the outer peripheral surface, and rotating in the roller chamber. For example, the direct pressure type bead processing device of the sixth or seventh patent application, wherein Providing a buffer chamber connected to the pressure tank, a granular body replenishing source connected to the buffer chamber, and a side valve for opening and closing between the pressure tank and the buffer chamber, and the buffer chamber is provided An upper side opening and closing valve and a buffer chamber supply and exhaust mechanism for pressurizing and exhausting the buffer chamber; and a control mechanism for introducing the compressed gas into the pressurization During the acceleration path of the tank and the granular body, controlling the actions of the upper and lower valves and the buffer chamber supply and exhaust mechanism, and performing a series of actions, the series of actions means that the lower side valve is closed and the upper side valve In the opened state, after the upper side valve is closed, and the compressed air is introduced into the buffer chamber by the buffer chamber supply and exhaust mechanism and pressurized, the lower side valve is opened to cause the granular body in the buffer chamber to fall. After the pressure tank is closed, the lower side valve is closed again, and after the buffer chamber supply and exhaust mechanism releases the compressed gas in the buffer chamber, the upper side valve is opened to supplement the granular body. The introduction of the granules into the Indoor.