JP2005205530A - Blast processing method and device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and a device capable of performing clean fine processing without requiring post-cleaning, by performing the processing while restraining condensation, by holding a nozzle of a structure capable of providing a uniform blast area for the large area in a blast method. <P>SOLUTION: The inside of one nozzle is divided into a plurality of areas in the longitudinal direction of the nozzle by a partition wall. A pair of liquefied carbonic acid cutoff valves, liquefied carbonic acid supply ports, auxiliary gas cutoff valves and auxiliary gas supply ports, are arranged to the respective areas. Pressure in the respective areas is always measured, and a change in a blast state is monitored from a pressure variation. The uniform blast area is provided by feeding back supply pressure of a liquefied carbonic acid or supply pressure of auxiliary gas. The nozzle is arranged in a plurality in the carrying direction of a processing object. After performing the processing by the first nozzle, the processing is performed by the third nozzle after time for recovering the temperature of the processing object, to thereby restrain the condensation in a fixed quantity or less. <P>COPYRIGHT: (C)2005,JPO&NCIPI

Description

  The present invention relates to a blasting apparatus for performing microfabrication, and more particularly, to a method and apparatus for selectively performing blast etching with a mask.

  Conventionally, in this type of blasting technique, a sand blast method in which silicon particles or plastic particles are sprayed on a processing symmetry surface as a blasting material is mainly used. In these methods, solid particles prepared in advance are accelerated with compressed air or the like, sprayed onto the surface of the workpiece, and the workpiece is cut. In this type of technology, there is a problem that the blast material remains on the processed surface after processing, and post-cleaning is required. Here, in order to facilitate post-cleaning, a method of using a water-soluble solid such as sodium hydrogen carbonate as a blast material (for example, see Patent Document 1) has been proposed. Furthermore, a clean processing method that does not require post-cleaning by using fine dry ice particles obtained by adiabatic expansion from liquefied carbonic acid as a blasting material has also been proposed.

JP 2000-306503 A

  The biggest drawback of the sandblasting method is that the blast material remains on the processed surface after processing. For this reason, cleaning after processing is required. This is not only an indispensable cleaning device, but also requires secondary costs such as cleaning liquid management and waste liquid processing, which increase production costs.

On the other hand, the CO ₂ blasting method using fine dry ice particles obtained by adiabatic expansion from liquefied carbon dioxide as a blasting material does not require post-cleaning, but there is a method of performing blasting uniformly over a large area. It has not been proposed, and since the heat energy of the processed surface is taken when dry ice particles sublimate after processing, the temperature of the processed object decreases, and condensation occurs on the surface of the processed object. Condensation on the surface to be processed serves as a cushioning material against blasting, which causes a reduction in processing speed.

Therefore, an object of the present invention is to perform processing while having a nozzle having a structure capable of obtaining a uniform blast region over a large area in a dry ice particle blasting method using CO ₂ or argon and suppressing condensation. Then, it is providing the method and apparatus which can perform the clean microfabrication which does not require post-cleaning.

  In the present invention, particles are made to collide with the object to be processed, and the object to be processed is cut with physical energy at the time of the collision. By liquefying carbonic acid or liquefied argon adiabatically expanding the particles to be collided with the object to be processed. In the blasting apparatus and blasting method using fine dry ice particles that are generated, the elongated nozzle has an expansion chamber in which liquefied carbonic acid or liquefied argon adiabatically expands inside, and the elongated nozzle includes the expansion chamber. A blasting apparatus and a blasting method in which a plurality of liquid carbonic acid or liquefied argon supply apparatuses and auxiliary gas supply apparatuses connected in parallel are connected.

  In addition, the present invention is to cut particles with physical energy at the time of collision by colliding the particles with the workpiece, and adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles colliding with the workpiece. In the blasting apparatus and the blasting method using fine dry ice particles generated by the above, the elongated nozzle is provided with an expansion chamber in which liquefied carbon dioxide adiabatically expands, and the elongated nozzle is provided in the expansion chamber. Provided are a blasting apparatus and a blasting method in which a liquid carbonic acid or liquefied argon supply device and an auxiliary gas supply device having openings and parallel openings along the expansion chamber are connected.

  In addition, the present invention is to cut particles with physical energy at the time of collision by colliding the particles with the workpiece, and adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles colliding with the workpiece. In the blasting apparatus and blasting method using fine dry ice particles generated by the above, the elongated nozzle has an expansion chamber in which liquefied carbon dioxide or liquefied argon adiabatically expands, and the expansion chamber is elongated. A liquid carbon dioxide or liquefied argon supply device and an auxiliary gas supply, which are partitioned by a partition wall in a direction and provided with a plurality of expansion portions each having an opening, connected to each expansion portion in an elongated nozzle, and arranged in parallel along the expansion chamber A blasting apparatus and a blasting method provided with the apparatus are provided.

According to the present invention, it is possible to suppress occurrence of condensation and obtain a uniform blast corresponding to a large area in a clean process that does not require post-cleaning by a dry ice blasting method using CO ₂ or argon. .

  The feature of the present embodiment that achieves the above object is that, firstly, the inside of one nozzle is divided into a plurality of regions with a partition in the length direction of the nozzle, and each region is divided. Uniform blasting area by providing a pair of liquefied carbonic acid or liquefied argon shutoff valve, liquefied carbonic acid or liquefied argon supply port, auxiliary gas shutoff valve and auxiliary gas supply port, and further integrating the respective areas in the vicinity of the nozzle injection port There is in getting.

  Second, the pressure in each region is constantly measured, the change in the blast state is monitored from the pressure fluctuation, and the feedback is applied to the supply pressure of the liquefied carbonic acid or liquefied argon or the supply pressure of the auxiliary gas to restore the uniformity.

  Third, for the purpose of preventing condensation, by providing a plurality of nozzles in the conveying direction of the object to be processed, after processing with the first nozzle, a time for the temperature of the object to be recovered is set, By performing processing with the second and third nozzles, condensation is suppressed to a certain level or less.

  Fourth, always monitor the temperature of the workpiece during processing, and provide feedback on the injection amount of dry ice particles and the processing speed so that the temperature of the workpiece does not drop below the temperature at which condensation occurs. Control by.

  Finally, in order to inject dry ice particles at an efficient angle with respect to the surface to be processed, processing is performed while changing the angle of the nozzle.

As described above, in clean processing that does not require post-cleaning by CO ₂ or argon blasting, one nozzle is divided into multiple regions, and the supply of liquefied carbonic acid or liquefied argon and the supply of auxiliary gas are individually controlled. By doing so, it is possible to obtain CO ₂ with good uniformity corresponding to a large area or argon blast.
Further, it is possible to perform processing while suppressing the occurrence of condensation by providing a time for the temperature of the processing object to recover during processing, monitoring temperature decrease by a temperature sensor, and changing processing conditions.

Hereinafter, the method of the present invention will be described based on one embodiment shown in FIGS. In the following examples, an example in which dry ice particles made of CO ₂ are used as blast particles will be described, but dry ice made of argon particles can be used in the same manner instead of the dry ice particles. You may use the particle | grains which mixed the dry ice particle as a main particle and the ice particle as a subparticle. Incidentally, the dry ice particles by CO ₂ has the advantage that it can be cheaper to bid compared with dry ice with argon particles.

  FIG. 1 is a diagram showing an embodiment of the present invention. This embodiment is an apparatus for processing a barrier rib of a plasma display panel (hereinafter referred to as PDP). Reference numeral 1 denotes a PDP rear panel to be processed, on which an address electrode, a protective film, and the like are formed on a base glass substrate. The surface of the barrier rib paste material to be processed is applied in a frame shape and dried, and the outermost surface has a mask formed by dry coating and etching. 100 is a processing machine main body, 110 is a supply pipe for supplying dry gas, auxiliary gas, liquefied carbon dioxide, air, etc. from the house line to the processing machine main body 100 and other units, and 120 is used from a processing chamber inside the processing machine main body 100. The exhaust pipe for discharging CO2 and processing waste is connected to a dust collection filter and an exhaust pump shown at 121. 122 is an exhaust pipe for exhausting CO2 and processing waste used for processing from downstream from the dust collection filter and exhaust pump 121, and its end is connected to the house line. 123 is a dry gas supply pipe for introducing dry gas into the processing machine main body 100, 200 is a preheating and dry gas replacement unit, and 201 is an exhaust pipe for exhausting the air inside the preheating and dry gas replacement unit. The end is connected to the house line. Reference numeral 202 denotes a dry gas supply pipe for introducing dry gas into the preheating and dry gas replacement unit. The dry gas supply pipe 202 supplies the dry gas into the shower from the top of the preheating and dry gas replacement unit 200. Reference numeral 300 denotes an air replacement unit, which is not shown for the sake of simplicity, but has an exhaust pipe for exhausting the internal gas, similar to the preheating and dry gas replacement unit 200, and its end is an exhaust pipe. Similar to 201, it is connected to the house line. Reference numeral 302 denotes an air supply pipe that supplies air from the top of the air replacement unit 300 into the shower. Reference numeral 400 denotes an entrance conveyor unit, and 401 denotes a positioning mechanism for installing the supplied PDP back panel 1 at an appropriate position. Note that shutters are provided upstream and downstream of the preheating and dry gas replacement unit 200, the processing apparatus main body 100, and the atmospheric replacement unit 300, and this shutter is provided when the PDP rear panel 1 is carried in and out. It is a mechanism that opens and closes.

  FIG. 2 is a diagram showing an internal structure of the processing apparatus main body 1 shown in FIG. 2, the supply pipe 110, the exhaust pipe 120, the dust collection filter and exhaust pump 121, the exhaust pipe 122, the dry gas supply pipe 123, the decorative cover, and the like described in FIG. 1 are complicated. It is omitted. In FIG. 2, reference numeral 130 denotes a nozzle unit, which is a two-stage flat nozzle in this embodiment. In addition, in the processing apparatus main body 100, there is a space in which two or more PDP rear panels 1 can enter, and the nozzle unit 130 is installed on the downstream side. 131 is a lifting mechanism for moving the entire nozzle unit in the vertical direction, 103 is a transport roller for transporting the PDP back panel 1, 104 is a positioning mechanism, and 105 is a motor for operating the transport roller, using a servo motor. Yes. Reference numeral 106 denotes a heater for heating the PDP rear panel 1 and is arranged in a matrix in the gap between the conveyance rollers 103.

  The transport roller 103, the positioning mechanism 104, and the motor 105 are similarly disposed in the preheating and dry gas replacement unit 200, the atmospheric replacement unit 300, and the entrance conveyor unit 400 in addition to the processing apparatus main body 100. The heater 106 is similarly disposed in the preheating and dry gas replacement unit 200 and the atmospheric replacement unit 300 in addition to the processing apparatus main body 100.

  FIG. 3 is a diagram showing the positional relationship between the nozzle unit 130 and the PDP back panel 1. The arrows in the figure indicate the direction in which the PDP back panel 1 is conveyed by the conveyance roller 103. Moreover, in order to avoid complication of the figure, specific piping and the like are saved. In FIG. 3, 1a is a glass substrate which is a base material of the PDP back panel 1, 1b is a region to be processed, and an address electrode, a protective film, etc. are formed on the base, and the surface is a barrier rib paste material whose object is to be processed The frame is always formed by applying and drying, and the outermost surface has a mask formed by dry coating and etching. Reference numeral 140 denotes a first-stage nozzle head unit, and reference numeral 141 denotes a second-stage nozzle head unit. The nozzle head units 140 and 141 have the same structure. Further, the length of the nozzle head units 140 and 141 in the direction perpendicular to the conveyance direction of the PDP back panel 1 needs to be sufficiently longer than the processing target region 1b. In this embodiment, both ends are processed. The length protrudes 200 mm from the target region 1b. 133 is a nozzle head arm that holds the nozzle head units 140 and 141, 134 is a non-contact thermometer, and its measuring element faces the surface of the processing target region 1b, and monitors the temperature of the surface of the processing target region 1b. . The non-contact thermometer 134 is installed on the downstream side of the nozzle head unit 140 and the upstream side of the nozzle head unit 141 with respect to the transport direction of the PDP back panel 1.

FIG. 4 is a view showing the appearance of the nozzle head unit 140 or 141 constituting the nozzle. Reference numeral 142 denotes a nozzle head, 143 denotes a liquefied carbon dioxide supply unit, 144 denotes an auxiliary gas supply unit, and 145 denotes a pressure sensor. As shown in FIG. 4, in the present embodiment, a single liquefied carbon dioxide supply unit 143, an auxiliary gas supply unit 144, and a pressure sensor 145 are configured as one set for one nozzle head 142. ing. A single elongated nozzle is provided with a set of a plurality of liquid carbonic acid supply units 143 and auxiliary gas supply units 144 arranged in parallel along the expansion chamber. An opening 159 is provided at the tip of the nozzle head 142.
The number of sets and the pitch between sets are determined by the size, shape, and processing conditions of the object to be processed. In this embodiment, the number of sets is 7 and the pitch between sets is 220 mm.

  FIG. 5 is a view showing a cross-sectional structure of the nozzle shown in FIG. 142a is a nozzle head front plate constituting the nozzle head 142, 142b is a nozzle head rear plate, 142c is a nozzle head upper plate, 146 is an orifice through which liquefied carbon dioxide is discharged to the nozzle head 142, and 147 is adiabatic expansion of liquefied carbon dioxide. In the expansion chamber, the liquefied carbon dioxide is adiabatically expanded in the expansion chamber 147 immediately after being discharged from the orifice 146, and fine dry ice particles are generated. Reference numeral 148 denotes an aperture, and reference numeral 149 denotes an open end. Dry ice particles generated in the expansion chamber 147 are accelerated by the aperture 148 and injected from the open end 149 formed by the opening 159 toward the PDP rear panel 1. The 150 is a liquefied carbon dioxide supply pipe, 151 is a liquefied carbon dioxide cutoff valve, 152 is a compressed air supply pipe for controlling a liquefied carbon dioxide cutoff valve, 153 is an auxiliary gas supply pipe, 154 is an auxiliary gas cutoff valve, and 155 is compressed air for controlling an auxiliary gas cutoff valve The supply pipe 156 is a check valve, and the throttle 148 and the open end 149 are clogged due to excessive generation of dry ice particles, and the internal pressure of the expansion chamber 147 becomes excessive, resulting in dry ice particles and liquefied carbonic acid. Is intended to prevent backflow to the auxiliary gas supply side.

Here, the mechanism of generation and injection of dry ice particles will be described with reference to FIG.
First, when the blast is stopped, liquefied carbon dioxide is supplied to the liquefied carbon dioxide supply pipe 150 at a pressure of about 5.5 MPa, and auxiliary gas is supplied to the auxiliary gas supply pipe 153 at a pressure of about 2 MPa. Compressed air is not supplied to the shutoff valve control compressed air supply pipe 152 and the auxiliary gas shutoff valve control compressed air supply pipe 154, the liquefied carbon dioxide shutoff valve 151 and the auxiliary gas shutoff valve 154 are closed, and the nozzle head 142 is not supplied with liquefied carbonic acid and auxiliary gas.

  Next, first, compressed air is supplied to the compressed air supply pipe 154 for controlling the auxiliary gas shut-off valve, and the auxiliary gas shut-off valve 154 is opened so that the auxiliary gas passes through the auxiliary gas shut-off valve 154 and check valve 156 and the expansion chamber 147. Flow into.

  Next, the pressure sensor 145 is held to measure the pressure inside the expansion chamber 147 and stabilized at about 0.3 MPa, and then compressed air is supplied to the compressed carbon supply valve 152 for controlling the liquefied carbon dioxide cutoff valve, and the liquefied carbon dioxide cutoff valve 151 is supplied. open. As a result, liquefied carbon dioxide is supplied from the liquefied carbon dioxide supply pipe 150 to the orifice 146 through the liquefied carbon dioxide cutoff valve 151.

Here, the opening area of the orifice 146 is sufficiently small with respect to the cross-sectional areas in the piping of the liquefied carbon dioxide supply pipe 150 and the liquefied carbon dioxide shutoff valve 151, and the liquefied carbon dioxide is in a liquid state of 5.5 MPa until it passes through the orifice 146. is there.
Since the pressure of the expansion chamber 147 is about 0.3 MPa, the liquefied carbon dioxide that has passed through the orifice 146 expands adiabatically and changes into fine dry ice particles.

The dry ice particles are mixed with the auxiliary gas in the expansion chamber 147 and accelerated by moving toward the throttle 148 having a small cross-sectional area, and are ejected from the open end 149 at a high speed.
After spraying the dry ice particles, the pressure in the expansion chamber 147 is measured by holding the pressure sensor 145, and after stabilizing at a pressure of about 0.5 MPa, the PDP back panel 1 is conveyed and processing is started.

  During processing, the pressure sensor 145 is always used to measure the pressure in the expansion chamber 147. If there is a pressure fluctuation, first, the auxiliary gas supply pressure is changed to return the pressure in the expansion chamber 147 to an appropriate value. Alternatively, secondly, the pressure in the expansion chamber 147 can be controlled with feedback control such as changing the supply pressure of liquefied carbon dioxide to return the pressure in the expansion chamber 147 to an appropriate value. However, when the pressure of the liquefied carbonic acid is lowered to a certain value or less, the liquefied carbonic acid is vaporized inside the liquefied carbonic acid supply pipe 150. Therefore, the control range is wider when the pressure control of the auxiliary gas is performed. Taking control methods.

  After finishing the processing of the PDP rear panel 1, first, the compressed air of the compressed carbon supply valve 152 for controlling the liquefied carbonic acid shutoff valve is evacuated, the liquefied carbonicidal shutoff valve 151 is closed, and the supply of liquefied carbonic acid to the orifice 146 is stopped.

  Next, the pressure sensor 145 is held to measure the pressure in the expansion chamber 147, and when the pressure in the expansion chamber 147 drops to about 0.3 MPa, the compressed air supply pipe 154 for auxiliary gas shutoff valve control is extracted, By closing the auxiliary gas shut-off valve 154, the supply of auxiliary gas is stopped.

  As described above, the supply of the liquefied carbonic acid and the auxiliary gas to the nozzle head 142 always supplies the auxiliary gas first. When shutting off, liquefied carbonic acid is shut off first. The purpose of this is to form a flow field with a high flow velocity in advance by an auxiliary gas in order to avoid dry ice particles being generated excessively due to excessive supply of liquefied carbonic acid and clogging the dry ice particles in the throttle 148 and the like. It is said.

  FIG. 6 is a view in which the nozzle head front plate 142 a is removed from the nozzle head unit 140 or 141. In FIG. 6, reference numeral 157 denotes a partition wall. The partition wall 157 divides the expansion chamber 147 into sets each composed of one liquefied carbon dioxide supply unit 143, auxiliary gas supply unit 144, and pressure sensor 145 described above. Since each set is divided by the partition wall 157, measurement by the pressure sensor 145 and pressure control of the auxiliary gas are possible without being affected by the adjacent sets.

  Further, the partition wall 157 extends only before the throttle 148 when viewed from the orifice 146 side, and the expansion chamber 147 is integrated before the throttle 148. For this reason, at the open end 149, the difference in the blast state at the joint between adjacent sets becomes small, and uniform blasting can be obtained over the entire nozzle.

  As described above, the elongated nozzle is provided with an expansion chamber 147 in which liquefied carbon dioxide adiabatically expands, and the expansion chamber 147 is partitioned into a plurality of expansion portions 160 by the partition walls 157 in the elongated direction. Each expansion chamber 160 has an opening 159, and has one opening tip having a shape penetrating through the release end 149. That is, the release end 149 is an opening tip having a penetrating shape.

  In the present embodiment, the nozzle head units 140 and 141 can be shaken during processing as shown in FIG. This purpose will be described with reference to FIG. In FIG. 8, 2 is an object to be processed, 3 is a mask, 4 is dry ice particles, 5 is the energy of the dry ice particles 4 before the dry ice particles 4 collide with the object to be processed 2, and 6 is processed by the dry ice particles 4 The actual machining energy given to the machining object 2 by colliding with the object 2 is shown.

  When the nozzle head unit 140 or 141 is installed perpendicular to the surface to be processed and the dry ice particles 4 are ejected vertically, the dry ice particles 4 are placed on the processing object 2 as shown in FIG. Since it is incident perpendicularly, the energy 5 is efficiently converted into the actual machining energy 6.

  As processing progresses, the processing object 2 near the mask 3 has a taper angle, and as shown in FIG. 8B, the dry ice particles 4 enter the processing surface obliquely. In this case, the actual machining energy 6 becomes smaller and the machining speed is reduced.

  Here, by swinging the nozzle head units 140 and 141 as shown in FIG. 7, the dry ice particles 4 are made to enter the portion having a taper angle as shown in FIG. It is possible to prevent the processing speed from being lowered.

  In this embodiment, the swing angle of the nozzle head units 140 and 141 is ± 10 °, and the swing speed is also related to the transport speed of the PDP back panel 1 and the distance between the PDP back panel 1 and the release end 149. Is about 1 round-trip / s.

  Hereinafter, the processing procedure of the PDP back panel 1 according to the present embodiment will be described. Note that the dry gas used in the present embodiment is nitrogen, but a dry gas such as argon that is in a dry state can also be used. Further, although nitrogen is used as the auxiliary gas, it is in a dry state like the dry gas, and a gas such as argon having no reactivity can be used. In all units, the heater is always warmed.

  The PDP rear panel 1 is transported from the upstream apparatus onto a transport roller of the entrance conveyor unit 400 by a conveyor or a robot. Next, the PDP rear panel 1 is centered with the positioning mechanism 401.

  The preheating and dry gas replacement unit 200 does not have the PDP back panel 1 inside and is filled with air in advance.

  Next, the shutter on the entrance conveyor unit 400 side of the dry gas replacement unit 200 is opened, the entrance conveyor unit 400 and the transport roller of the preheating and dry gas replacement unit 200 are driven, and the PDP rear panel 1 is preheated and dry gas replacement unit. 200 is taken in, the shutter is closed, and the inside of the preheating and dry gas replacement unit 200 is shut off from the outside.

  When the PDP back panel 1 is sent to the preheating and dry gas replacement unit 200, the entrance conveyor unit 400 is ready to receive the next PDP back panel 1.

Next, the air inside the preheating and dry gas replacement unit 200 is exhausted through the exhaust pipe 201, and at the same time, the dry gas is supplied from the dry gas supply pipe 202, so that the inside of the preheating and dry gas replacement unit 200 is brought into a dry atmosphere. Replace. At the same time, the PDP back panel 1 is preheated by the heater.
The inside of the processing apparatus main body 100 is replaced with a dry atmosphere in advance.

  Next, the upstream shutter of the preheating and dry gas replacement unit 200 and the downstream shutter of the processing apparatus main body 100 are opened, and the transport roller of the preheating and dry gas replacement unit 200 and the transport roller of the processing apparatus main body 100 are driven, and PDP The back panel 1 is transported from the preheating and dry gas replacement unit 200 to the processing apparatus main body 100.

  After the PDP rear panel 1 is completely transferred to the processing apparatus main body 100, the upstream shutter of the preheating and dry gas replacement unit 200 and the downstream shutter of the processing apparatus main body 100 are closed. As described above, there is a space in the processing apparatus main body 100 in which a plurality of PDP rear panels 1 are inserted, and the PDP rear panel 1 immediately after being taken into the processing apparatus main body 100 is in a standby state on the most upstream side, Here, the heater is again heated.

  The preheating and dry gas replacement unit 200 delivers the PDP back panel 1 to the processing apparatus main body 100, closes the shutter, discharges the dry gas inside through the exhaust pipe 201, and simultaneously introduces the atmosphere from the dry gas supply pipe 202. Then, by replacing the inside with the atmosphere, the next PDP rear panel 1 can be received.

After receiving the PDP back panel 1, the processing apparatus main body 100 discharges the internal dry gas to the exhaust pipe 122 through the exhaust pipe 120, and at the same time supplies the dry gas from the dry gas supply pipe 123. Form a flow field.
At the same time, dry ice particles are generated by the procedure described in the explanation of FIG. 5 and blasting is started. If necessary, the swing operation described in the explanation of FIG. 7 is started.

When the blast pressure is stabilized, the transport roller is operated, the PDP back panel 1 is sent to the blast region, and processing is started.
During processing, the temperature of the PDP rear panel 1 is measured with the non-contact thermometer 134 at all times. If there is a risk of dew condensation due to a decrease in temperature, the temperature of the heater rises, the conveyance speed rises, and the auxiliary gas supply pressure rises. Temperature recovery is performed using one or a plurality of methods. On the contrary, when the temperature of the PDP rear panel 1 is rising more than necessary, temperature recovery is performed by using any one of a heater temperature drop, a conveyance speed drop, a supplementary gas supply pressure drop, or a plurality of methods. .

While processing is performed in the processing apparatus main body 100, the air replacement unit 300 is replaced with a dry gas atmosphere.
When the PDP back panel 1 is processed and transported inside the processing apparatus main body 100, when it comes to the vicinity of the downstream end inside the processing apparatus main body 100, the shutter on the downstream side of the processing apparatus main body 100 and the shutter on the upstream side of the atmospheric substitution unit 300. At the same time, the inside of the atmosphere replacement unit 300 is exhausted and the transport roller is driven to transport the PDP back panel 1 to the atmosphere replacement unit 300. At this time, the processing apparatus main body 100 may perform processing.

When the PDP rear panel 1 has completely passed under the nozzle head units 140 and 141, the production of dry ice particles is stopped by the procedure described in the description of FIG.
When the PDP rear panel 1 is completely transported to the atmosphere replacement unit 300, the shutter on the downstream side of the apparatus main body 100 and the shutter on the upstream side of the atmosphere replacement unit 300 are closed. At this point, the apparatus main body 100 is ready to accept the next PDP rear panel 1.

  The atmosphere replacement unit 300 receives the PDP back panel 1 and monitors the temperature of the PDP back panel 1 when the shutter is closed. This is because the temperature of the PDP back panel 1 may be lowered due to the processing. When the temperature of the PDP rear panel 1 is sufficiently recovered by the heater inside the atmosphere replacement unit 300, the dry gas is exhausted, and at the same time, the atmosphere is introduced from the atmosphere supply section 302 to replace the inside with the atmosphere. In this way, the blasting method is configured such that the dry ice particles are ejected from the nozzle ejection hole (open end 149) at a plurality of intervals and the machining speed depends on the temperature of the workpiece.

Next, the shutter on the downstream side of the atmospheric replacement unit 300 is opened, the transport roller is driven, and the PDP rear panel 1 is discharged.
The discharged PDP back panel 1 is received by the conveyor or robot of the next process apparatus.

After completely discharging the PDP rear panel 1, the atmospheric replacement unit 300 closes the shutter on the downstream side of the atmospheric replacement unit 300, exhausts the internal atmosphere from the exhaust pipe, and simultaneously supplies dry gas from the atmospheric supply pipe 302. By replacing the inside with dry gas, the next PDP back panel 1 can be received.
By performing the above continuously, the PDP back panel 1 can be processed.

As described above, particles are made to collide with an object to be processed, and the object to be processed is cut with the physical energy at the time of collision, and liquefied carbon dioxide or liquefied argon is adiabatically expanded to particles that collide with the object to be processed. In the blasting method using the blasting device using the fine dry ice particles generated by the above, from the openings connected to the liquid carbonic acid or liquefied argon supply device and the auxiliary gas supply device respectively into the expansion chamber formed in the nozzle Liquid ice or liquefied argon and auxiliary gas are introduced and adiabatically expanded in an expansion chamber to form dry ice particles, which are made to collide with an object to be processed from the nozzle injection port. Dry ice particles from the nozzle injection port A blasting method in which spraying is performed at multiple intervals and the processing speed depends on the temperature of the workpiece Constructed.
Regardless of the embodiment described above, it may be carried out as follows.

Instead of the non-contact thermometer 134, a contact-type thermometer may be used.
This method may be performed in vacuum or low pressure without replacing with dry gas.

It is the figure which showed the apparatus external appearance in this invention. It is the figure which showed the internal structure of the process part in this invention. It is the figure which showed the positional relationship of the nozzle and workpiece in this invention. It is the figure which showed the nozzle external appearance in this invention. It is the figure which showed the nozzle cross-section in this invention. It is the figure which showed the nozzle internal structure in this invention. It is the figure which showed operation | movement of the nozzle in this invention. It is a figure showing the collision direction of the dry ice particle to the processing surface.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... PDP back panel, 1a ... Glass substrate, 1b ... Processing object area | region, 2 ... Processing object, 3 ... Mask, 4 ... Dry ice particle, 5 ... Energy, 6 ... Actual processing energy, 100 ... Processing apparatus main body, 103 ... Conveying roller, 104 ... Positioning mechanism, 105 ... Motor, 106 ... Heater, 110 ... Supply pipe, 120 ... Exhaust pipe, 121 ... Dust collection filter and exhaust pump, 122 ... Exhaust pipe, 123 ... Dry gas supply pipe, 130 ... Nozzle Unit: 131 ... Elevating mechanism, 133 ... Nozzle head arm, 134 ... Non-contact thermometer, 140 ... Nozzle head unit, 141 ... Nozzle head unit, 142 ... Nozzle head, 142a ... Nozzle head front plate, 142b ... Nozzle head rear plate 142c ... Nozzle head top plate, 143 ... Liquefied carbon dioxide supply unit, 144 ... Auxiliary gas supply unit, 1 DESCRIPTION OF SYMBOLS 5 ... Pressure sensor, 146 ... Orifice, 147 ... Expansion chamber, 148 ... Restriction, 149 ... Open end, 150 ... Liquefied carbon dioxide supply pipe, 151 ... Liquefied carbon dioxide cutoff valve, 152 ... Compressed air supply pipe for liquefied carbon dioxide cutoff valve control, 153 ... Auxiliary gas supply pipe, 154 ... Auxiliary gas cutoff valve, 155 ... Compressed air supply pipe for controlling the auxiliary gas cutoff valve, 156 ... Check valve, 157 ... Partition, 200 ... Preheating and dry gas replacement unit, 201 ... Exhaust Pipe 202, Dry gas supply pipe, 300 ... Air replacement unit, 302 ... Air supply pipe, 400 ... Entrance conveyor unit, 401 ... Positioning mechanism.

Claims (9)

Particles that collide with the object to be processed and cut the object to be processed with the physical energy at the time of the collision. The fine particles generated by adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles that collide with the object to be processed In blasting equipment using dry ice particles,
The elongated nozzle is provided with an expansion chamber in which liquefied carbonic acid or liquefied argon adiabatically expands, and a plurality of liquid carbonic acid or liquefied argon supply devices arranged in parallel along the expansion chamber in the elongated nozzle, and A blasting machine characterized by connecting an auxiliary gas supply device. Particles that collide with the object to be processed and cut the object to be processed with the physical energy at the time of the collision. The fine particles generated by adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles that collide with the object to be processed In blasting equipment using dry ice particles,
The elongated nozzle is provided with an expansion chamber in which liquefied carbon dioxide adiabatically expands, and the elongated nozzle is open to the expansion chamber, and has a liquid crystal opening that is provided along the expansion chamber. A blasting apparatus, wherein a carbonic acid or liquefied argon supply device and an auxiliary gas supply device are connected. Particles that collide with the object to be processed and cut the object to be processed with the physical energy at the time of the collision. The fine particles generated by adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles that collide with the object to be processed In blasting equipment using dry ice particles,
The elongated nozzle is provided with an expansion chamber in which liquefied carbonic acid or liquefied argon adiabatically expands. The expansion chamber is partitioned by a partition in the elongated shape direction, and has a plurality of expansion portions each having an opening. A blasting apparatus characterized in that a liquid carbonic acid or liquefied argon supply device and an auxiliary gas supply device, which are connected to each expansion portion in a shape nozzle and are arranged in parallel along the expansion chamber, are provided.   4. A blasting apparatus according to claim 2, wherein a plurality of nozzles are arranged side by side with a partition wall. Particles that collide with the object to be processed and cut the object to be processed with the physical energy at the time of the collision. The fine particles generated by adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles that collide with the object to be processed In a blasting method using a blasting apparatus using dry ice particles,
A plurality of liquid carbonic acid or liquefied argon and auxiliary gas are introduced in parallel from the openings connected to the liquid carbonic acid or liquefied argon supply device and auxiliary gas supply device, respectively, into the expansion chamber inside the elongated nozzle, and expanded. A blasting method characterized in that fine dry ice particles are formed by adiabatic expansion in a chamber and collide with an object to be processed from a nozzle injection port. Fine dry ice particles generated by abutting particles against a workpiece and cutting the workpiece with the physical energy at the time of collision, and adiabatic expansion of liquefied carbon dioxide to the particles that collide with the workpiece. In a blasting method using a blasting apparatus using
Liquid carbonic acid or liquefied argon and auxiliary gas in parallel from the openings connected to the liquid carbonic acid or argon gas supply device and the auxiliary gas supply device, respectively, in the expansion chamber section in which the nozzle formed in the elongated shape is partitioned To form a dry ice particle by adiabatic expansion in the expansion chamber portion, perform uniform mixing of the dry ice particles injected from the adjacent expansion chamber portion in the vicinity of the nozzle injection port, from the nozzle injection port A blasting method characterized by causing a workpiece to collide.   8. The blasting method according to claim 6 or 7, wherein a plurality of dry ice particles are ejected from the nozzle ejection port at intervals, and the machining speed depends on the temperature of the workpiece.   8. The blasting method according to claim 6 or 7, wherein dry ice particles are jetted in a direction perpendicular to a machining surface of a workpiece by adjusting an ejection angle of a nozzle ejection port. Particles that collide with the object to be processed and cut the object to be processed with the physical energy at the time of the collision. The fine particles generated by adiabatic expansion of liquefied carbonic acid or liquefied argon to the particles that collide with the object to be processed In a blasting method using a blasting apparatus using dry ice particles,
Liquid ice or liquefied argon and auxiliary gas are introduced into the expansion chamber formed inside the nozzle from the openings connected to the liquid carbon dioxide or liquefied argon supply device and auxiliary gas supply device, respectively, and are adiabatically expanded in the expansion chamber to dry ice. Particles are formed and collide with the object to be processed from the nozzle outlet, and multiple sprays of dry ice particles from the nozzle outlet are performed at intervals, and the processing speed depends on the temperature of the object to be processed. A blasting method characterized in that

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