TW201403077A - Termination discriminant method and termination discriminant device of built-in substrate - Google Patents

Termination discriminant method and termination discriminant device of built-in substrate Download PDF

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TW201403077A
TW201403077A TW102105754A TW102105754A TW201403077A TW 201403077 A TW201403077 A TW 201403077A TW 102105754 A TW102105754 A TW 102105754A TW 102105754 A TW102105754 A TW 102105754A TW 201403077 A TW201403077 A TW 201403077A
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terminal
terminals
potential difference
current
electronic component
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TW102105754A
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Chinese (zh)
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Munehiro Yamashita
Akira Goto
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Nidec Read Corp
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/165Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values
    • G01R19/16533Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application
    • G01R19/16538Indicating that current or voltage is either above or below a predetermined value or within or outside a predetermined range of values characterised by the application in AC or DC supplies
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/12Measuring rate of change
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/27Testing of devices without physical removal from the circuit of which they form part, e.g. compensating for effects surrounding elements
    • G01R31/275Testing of devices without physical removal from the circuit of which they form part, e.g. compensating for effects surrounding elements for testing individual semiconductor components within integrated circuits

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  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Testing Of Short-Circuits, Discontinuities, Leakage, Or Incorrect Line Connections (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

To provide a terminal discrimination device for built-in substrates that is capable of identifying the terminal type of an electronic component embedded in a built-in substrate. For every terminal pair combination of a plurality of terminals T1 to T6 of an electronic component 8 embedded in a built-in substrate 7, a current is supplied at various levels while switching the current between a forward and a reverse supply direction between the terminals, and the potential difference between the terminals when the current is supplied is detected as a detected potential value for each of the two supply directions and for each current supply level. Furthermore, based on the detection results, among the plurality of terminals of the electronic component 8, terminals for which the detected potential difference with another terminal in one of the two supply directions is less than a predetermined reference potential difference value with respect to all other terminals and all current supply levels, and for which the rate of change between the detected potential difference when the current is at the minimum current supply level and the detected potential difference when the current is at the maximum current supply level is less than a predetermined reference rate of change, are identified as power supply terminals.

Description

設於基板內之電子零件之端子判別方法與端子判別裝置 Terminal discriminating method and terminal discriminating device for electronic components provided in a substrate

本發明係關於一種設於基板內之電子零件之端子判別方法與端子判別裝置,其對於電子零件之端子種類進行判別,該電子零件設於內設零件基板內、與設置在內設零件基板上的佈線圖案連接並具有被分類為多個種類的多個端子。 The present invention relates to a terminal discriminating method and a terminal discriminating device for an electronic component provided in a substrate, which discriminates a terminal type of the electronic component, and the electronic component is disposed in the inner component substrate and on the inner component substrate The wiring patterns are connected and have a plurality of terminals classified into a plurality of types.

目前,內設有電容器、電阻器、IC等電子零件的內設零件基板(也稱作嵌入式基板)已開始普及,迫切需要建立針對設於這種內設零件基板內的電子零件的檢查方法。 At present, an internal component substrate (also referred to as an embedded substrate) in which electronic components such as capacitors, resistors, and ICs are provided has been popularized, and it is urgent to establish an inspection method for electronic components provided in such a built-in component substrate. .

例如,在諸如IC(Integrated Circuit:積體電路)等具有被分類為多個種類的多個端子的電子零件的情況下,電特性與應檢查的內容等根據其端子種類(例如電源類與信號類等)而不同。因此,在內設有這種具有多個種類的端子的電子零件的情況下,需要根據內設零件基板的佈線圖案是與電子零件的哪個端子相連接,來確定檢查條件與檢查內容等。 For example, in the case of an electronic component having a plurality of terminals classified into a plurality of types, such as an IC (Integrated Circuit), the electrical characteristics and the contents to be inspected are based on the types of terminals (for example, power sources and signals). Classes, etc.) are different. Therefore, when such an electronic component having a plurality of types of terminals is provided, it is necessary to determine which of the terminals of the electronic component is connected to the wiring pattern of the built-in component substrate, and to check the inspection condition, the inspection content, and the like.

然而,製造內設零件基板的基板廠商有時必須在不知道與要設於基板中的電子零件的各端子的種類等相關的信息的情況下,進行基板的製造與基板的檢查。在此情況下,由於不清楚設置在內設零件基板中的電子零件 的各端子的種類等,所以存在不能恰當地對該電子零件、以及與該電子零件相連接的佈線圖案進行檢查等問題。 However, the substrate manufacturer who manufactures the component substrate sometimes needs to perform the manufacture of the substrate and the inspection of the substrate without knowing the information on the type of each terminal of the electronic component to be provided on the substrate. In this case, since the electronic parts set in the internal component substrate are not clear Since the type of each terminal is the same, there is a problem that the electronic component and the wiring pattern connected to the electronic component cannot be properly inspected.

另外,由於內設零件基板本身是新產品,因此,針對這種檢查方法,現狀是不存在可稱作習知技術的現存技術。就與針對內設有電子零件的內設零件基板的檢查技術相關的現有技術文獻而言,例如可以舉出專利文獻1記載的技術。 In addition, since the built-in component substrate itself is a new product, there is no existing technology that can be called a conventional technique for such an inspection method. The prior art document related to the inspection technique for the built-in component substrate in which the electronic component is provided includes, for example, the technique described in Patent Document 1.

【先前技術文獻】 [Previous Technical Literature]

【專利文獻】 [Patent Literature]

專利文獻1:日本特開2007-309814號公報 Patent Document 1: Japanese Laid-Open Patent Publication No. 2007-309814

因此,本發明要解決的問題是提供一種設於基板內之電子零件之端子判別方法與端子判別裝置,其對於電子零件的端子的種類進行判別,該電子零件設於內設零件基板內、與設置在內設零件基板上的佈線圖案相連接並具有被分類為多個種類的多個端子。 Therefore, the problem to be solved by the present invention is to provide a terminal discriminating method and terminal discriminating device for an electronic component provided in a substrate, which discriminates the type of the terminal of the electronic component, and the electronic component is disposed in the internal component substrate, and The wiring patterns provided on the internal component substrate are connected and have a plurality of terminals classified into a plurality of types.

為了解決上述問題,本發明的第一態樣為一種設於基板內之電子零件端子判別方法,其對設於內設零件基板內、與設置在內設零件基板上的佈線圖案相連接並具有被分類為多個種類的多個端子的電子零件的端子的種類進行判別,該方法的特徵在於,具備:端子特性檢測步驟,其針對上述電子零件的上述多個端子的所有端子對的組合,在上述端子之間使電流在正反兩個供給方向上切換並改變為多個電流供給位準,並且經由上述佈線圖案供給該電流,針對上述兩個供給方向的每個以及上述電流供給位準的每個來檢測該電流供給時的各端子間的電位差作為檢測電位差值;以及端子判別步驟,其根據上述端子特性檢測步驟的檢測結果,將上述電子零件的上述多個端子中的、滿足下述條件的端子判別為用於電源輸入或接地的電源類端子,上述條件為:與其他端子之間的在上述兩個供給方向中的任 一個方向上的檢測電位差值針對其他所有端子與全部電流供給位準都未達到規定的基準電位差值、且電流為最小的上述電流供給位準時的檢測電位差值與電流為最大的上述電流供給位準時的檢測電位差值之間的變化度未達到規定的基準變化度。 In order to solve the above problems, a first aspect of the present invention is an electronic component terminal discriminating method provided in a substrate, which is provided in a built-in component substrate and connected to a wiring pattern provided on the internal component substrate and has The type of the terminal of the electronic component classified into a plurality of types of terminals is determined, and the method includes a terminal characteristic detecting step for all combinations of terminal pairs of the plurality of terminals of the electronic component. The current is switched between the terminals in the forward and reverse directions, and is changed to a plurality of current supply levels, and the current is supplied via the wiring pattern, for each of the two supply directions and the current supply level. Each of the terminals detects a potential difference between the terminals when the current is supplied as a detected potential difference value, and a terminal determining step of satisfying the plurality of the plurality of terminals of the electronic component based on the detection result of the terminal characteristic detecting step The terminal of the condition is discriminated as a power supply type terminal for power supply input or grounding, and the above conditions are: Between any two of the above sub-feeding directions The detection potential difference in one direction is the same as the detection potential difference at the current supply level when all the terminals and all the current supply levels have not reached the predetermined reference potential difference, and the current is at the maximum current supply level. The degree of change between the detected potential differences does not reach the specified reference degree of change.

另外,本發明的第二態樣是在上述第一態樣的設於基板內之電子零件之端子判別方法中,在上述的端子判別步驟中,在判別為上述電源類端子的上述端子中的、當該端子被設定為正極側並供給上述電流時該端子與其他所有端子之間的檢測電位差值都大於或等於上述規定的基準電位差值的端子判別為電源輸入端子,在判別為上述電源類端子的上述端子中的、當該端子被設定為負極側並供給上述電流時該端子與其他所有端子之間的檢測電位差值都大於或等於上述規定的基準電位差值的端子判別為接地端子。 According to a second aspect of the present invention, in the terminal determining method of the electronic component provided in the substrate of the first aspect, in the terminal determining step, the terminal of the power source terminal is determined. When the terminal is set to the positive side and the current is supplied, the terminal whose detection potential difference between the terminal and all other terminals is greater than or equal to the predetermined reference potential difference is determined as the power input terminal, and is determined to be the power source. Among the above-mentioned terminals of the terminal, when the terminal is set to the negative side and the current is supplied, the terminal whose detection potential difference between the terminal and all other terminals is greater than or equal to the predetermined reference potential difference is determined as the ground terminal.

另外,本發明的第三態樣是在上述第二態樣的設於基板內之電子零件之端子判別方法中,在上述端子判別步驟中,將上述電子零件的上述多個端子中的被判別為上述電源類端子的端子之外的端子判別為用於信號輸入或信號輸出的信號類端子。 According to a third aspect of the present invention, in the terminal determining method of the electronic component provided in the substrate of the second aspect, in the terminal determining step, the plurality of terminals of the electronic component are discriminated A terminal other than the terminal of the power source terminal is discriminated as a signal type terminal for signal input or signal output.

另外,本發明的第四態樣是在上述第三態樣的設於基板內之電子零件之端子判別方法中,在該端子判別步驟中,根據在判別為該電源輸入端子的端子被設定為負極側時、被判別為該信號類端子的該各端子與被判別為該電源輸入端子的端子之間的與任一個該電流供給位準相對應的檢測電位差值的大小關係、或在判別為該接地端子的端子被設定為正極側時、被判別為該信號類端子的該各端子與被判別為該接地端子的端子之間的與任一個該電流供給位準相對應的檢測電位差值的大小關係,來判別被判別為該信號類端子的該端子是信號輸入端子還是信號輸出端子。 According to a fourth aspect of the present invention, in the terminal determining method of the electronic component provided in the substrate of the third aspect, in the terminal determining step, the terminal determined to be the power input terminal is set to At the negative electrode side, the magnitude relationship between the detection potential difference values corresponding to any one of the current supply levels between the terminals of the signal terminals and the terminals determined to be the power input terminals is determined as When the terminal of the ground terminal is set to the positive electrode side, the detection potential difference value corresponding to any one of the current supply levels between each of the terminals determined to be the signal type terminal and the terminal determined to be the ground terminal The magnitude relationship determines whether the terminal judged to be the signal type terminal is a signal input terminal or a signal output terminal.

另外,本發明的第五態樣為一種設於基板內之電子零件之端子判別裝置,其對設於內設零件基板內、與設置在內設零件基板上的佈線圖案相連 接並具有被分類為多個種類的多個端子的電子零件的端子的種類進行判別,該裝置具備:與設置在上述內設零件基板的上述佈線圖案上的檢查點相接觸的多個探針;經由上述探針與上述佈線圖案,以多個電流供給位準向上述電子零件的端子之間供給電流的電源部;經由上述探針與上述佈線圖案,檢測上述電子零件的端子之間的電位差的電位差檢測部;對上述探針與上述電源部以及上述電位差檢測部之間的電連接關係進行切換的連接切換部;以及對上述電源部與上述連接切換部進行控制,並根據上述電位差檢測部的檢測結果來判別上述電子零件的上述端子的種類的控制部,其中,上述控制部執行端子特性檢測處理與端子判別處理,其中,該端子特性檢測處理藉由控制上述連接切換部與上述電源部,來針對上述電子零件的上述多個端子的所有端子對的組合,在上述端子間將電流在正反兩個供給方向上切換、改變為多個電流供給位準並經由上述佈線圖案施加該電流,並經由上述電位差檢測部針對上述兩個供給方向中的每個與上述電流供給位準的每個來檢測該電流的供給時各端子間的電位差作為檢測電位差值;上述端子判別處理根據在上述端子特性檢測處理中的檢測結果,將上述電子零件的上述多個端子中的、滿足下述條件的端子判別為用於電源輸入或接地的電源類端子,該條件為:與其他端子之間的在上述兩個供給方向中的任一個上的檢測電位差值針對其他所有端子與全部電流供給位準都未達到規定的基準電位差值、且電流為最小的上述電流供給位準時的檢測電位差值與電流為最大的上述電流供給位準時的檢測電位差值之間的變化度未達到規定的基準變化度。 Further, a fifth aspect of the present invention is a terminal discriminating device for an electronic component provided in a substrate, which is provided in a built-in component substrate and connected to a wiring pattern provided on the component substrate. The type of the terminal having the electronic component classified into a plurality of types of terminals is determined, and the apparatus includes a plurality of probes that are in contact with the inspection points provided on the wiring pattern of the built-in component substrate a power supply unit that supplies a current between the terminals of the electronic component at a plurality of current supply levels via the probe and the wiring pattern; and detects a potential difference between the terminals of the electronic component via the probe and the wiring pattern a potential difference detecting unit; a connection switching unit that switches an electrical connection relationship between the probe and the power supply unit and the potential difference detecting unit; and controls the power supply unit and the connection switching unit, and the potential difference detecting unit The control unit that determines the type of the terminal of the electronic component, wherein the control unit performs terminal characteristic detection processing and terminal determination processing, wherein the terminal characteristic detection processing controls the connection switching unit and the power supply unit , for all the terminal pairs of the above plurality of terminals of the above electronic component The current is switched between the terminals in the forward and reverse directions, and is changed to a plurality of current supply levels, and the current is applied via the wiring pattern, and the potential difference detecting unit is used for each of the two supply directions. Each of the current supply levels detects a potential difference between the terminals when the supply of the current is detected as a detected potential difference; and the terminal determining process performs the above-described plurality of electronic components based on the detection result in the terminal characteristic detecting process. Among the terminals, the terminal that satisfies the following conditions is determined to be a power source terminal for power supply input or grounding, and the condition is that the detected potential difference value between the other terminals in either of the above two supply directions is The change between the detection potential difference at the above-mentioned current supply level and the detection potential difference at the current supply level at which the current is the maximum at which all the terminals and all the current supply levels do not reach the predetermined reference potential difference and the current is the smallest. The degree does not reach the specified baseline change.

根據本發明的第一態樣的設於基板內之電子零件之端子判別方法,即使在不知道設於內設零件基板中的電子零件的各端子的種類的情況下,也可以判別設於內設零件基板內的電子零件的多個端子中的用於電源輸入或接地的電源類端子。 According to the terminal identification method of the electronic component provided in the substrate according to the first aspect of the present invention, even if the type of each terminal of the electronic component provided in the component substrate is not known, it can be determined that the terminal is provided. A power supply type terminal for power supply input or grounding among a plurality of terminals of the electronic component in the component substrate.

根據本發明的第二態樣的設於基板內之電子零件之端子判別方法,即使在不知道設於內設零件基板中的電子零件的各端子的種類的情況下,也可以判別設於內設零件基板內的電子零件的多個端子中的電源類端子,並 可判別該電源類端子是電源輸入端子還是接地端子。 According to the terminal identification method of the electronic component provided in the substrate according to the second aspect of the present invention, even if the type of each terminal of the electronic component provided in the component substrate is not known, it can be determined that it is provided. a power source terminal among a plurality of terminals of the electronic component in the component substrate, and It can be determined whether the power source terminal is a power input terminal or a ground terminal.

根據本發明的第三態樣的設於基板內之電子零件之端子判別方法,即使在不知道設於內設零件基板中的電子零件的各端子的種類的情況下,也可以判別設於內設零件基板內的電子零件的多個端子中的、用於信號輸入或信號輸出的信號類端子。 According to the third aspect of the present invention, the method for determining the terminal of the electronic component provided in the substrate can be determined even if the type of each terminal of the electronic component provided in the component substrate is not known. Among the plurality of terminals of the electronic component in the component substrate, a signal type terminal for signal input or signal output is provided.

根據本發明的第四態樣的設於基板內之電子零件之端子判別方法,即使在不知道設於內設零件基板中的電子零件的各端子的種類的情況下,也可以判別設於內設零件基板內的電子零件的多個端子中的信號類端子,並可判別該信號類端子是信號輸入端子還是信號輸出端子。 According to the fourth aspect of the present invention, the method for determining the terminal of the electronic component provided in the substrate can be determined even if the type of each terminal of the electronic component provided in the component substrate is not known. A signal type terminal among the plurality of terminals of the electronic component in the component substrate is provided, and it can be determined whether the signal type terminal is a signal input terminal or a signal output terminal.

根據本發明的第五態樣的設於基板內之電子零件之端子判別裝置,可獲得與上述第一態樣的設於基板內之電子零件的端子判別方法大致相同的效果。 According to the terminal discriminating device for an electronic component provided in the substrate according to the fifth aspect of the present invention, substantially the same effect as the terminal discriminating method of the electronic component provided in the substrate in the first aspect can be obtained.

1‧‧‧基板檢查裝置 1‧‧‧Substrate inspection device

2‧‧‧連接切換部 2‧‧‧Connection Switching Department

3‧‧‧電源部 3‧‧‧Power Supply Department

3a‧‧‧第一輸出端子 3a‧‧‧First output terminal

3b‧‧‧第二輸出端子 3b‧‧‧second output terminal

4‧‧‧電位差檢測部 4‧‧‧ Potential Difference Detection Department

5‧‧‧電流檢測部 5‧‧‧ Current Detection Department

6‧‧‧控制部 6‧‧‧Control Department

7‧‧‧內設零件基板 7‧‧‧ Built-in parts substrate

8‧‧‧電子零件 8‧‧‧Electronic parts

D1~D14‧‧‧檢查點 D1~D14‧‧‧ checkpoint

N1~N10‧‧‧佈線圖案 N1~N10‧‧‧ wiring pattern

P1~P14‧‧‧探針 P1~P14‧‧‧ probe

T1~T6‧‧‧端子 T1~T6‧‧‧ terminal

SW1、SW2‧‧‧開關元件 SW1, SW2‧‧‧ switching components

SWG1~SWG14‧‧‧開關組 SWG1~SWG14‧‧‧ switch group

S1~S4‧‧‧步驟 S1~S4‧‧‧ steps

圖1是表示應用有本發明的一個實施方式的設於基板內之電子零件之端子判別方法的基板檢查裝置的電結構的圖。 1 is a view showing an electrical configuration of a substrate inspecting apparatus to which a terminal discriminating method for an electronic component provided in a substrate according to an embodiment of the present invention is applied.

圖2是示意地表示檢查對象的內設零件基板的結構的圖。 FIG. 2 is a view schematically showing a configuration of an internal component substrate to be inspected.

圖3是將設於圖2的內設零件基板中的電子零件與與該電子零件的端子相連接的佈線圖案抽出並進行表示的圖。 3 is a view in which an electronic component provided in the internal component substrate of FIG. 2 and a wiring pattern connected to a terminal of the electronic component are extracted and shown.

圖4是表示圖1所示基板檢查裝置的動作步驟的圖。 Fig. 4 is a view showing an operational procedure of the substrate inspecting apparatus shown in Fig. 1;

圖5是將圖4的步驟S1的檢測結果表示在表格中的圖。 FIG. 5 is a view showing the detection result of step S1 of FIG. 4 in a table.

參照圖1~圖5,對應用有本發明的一個實施方式的設於基板內之電子零件之端子判別方法的基板檢查裝置進行說明。如圖1所示,該基板檢查 裝置1具備具有多個探針P1~P14(在統稱的情況下使用符號“P”)的未圖示的檢查夾具、連接切換部2、電源部3、電位差檢測部4、電流檢測部5與控制部6,並對設置在圖2所示內設零件基板(以下簡稱“基板”)7上的佈線圖案與設於基板7內的電子零件8的電特性進行檢查。另外,在本實施方式中,雖然以將IC設於基板7內作為電子零件8的情況為例進行了說明,但並不限於IC,只要是具有能夠被分類為電源類與信號類等多個種類的端子的電子零件,均可適用本實施方式的技術。另外,在本實施方式中,在用於電子零件8的端子判別等的電位差檢測中,雖然使用了將電源供給用探針與電位差檢測用探針共用的兩端子法,但也可以使用分別設置電源供給用探針與電位差檢測用探針來進行電位差檢測的四端子法。 A substrate inspection apparatus to which a terminal determination method for an electronic component provided in a substrate according to an embodiment of the present invention is applied will be described with reference to FIG. 1 to FIG. As shown in Figure 1, the substrate inspection The device 1 includes an inspection jig (not shown) having a plurality of probes P1 to P14 (indicated by the symbol "P" in the collective name), a connection switching unit 2, a power supply unit 3, a potential difference detecting unit 4, and a current detecting unit 5, and The control unit 6 inspects the electrical characteristics of the wiring pattern provided on the internal component substrate (hereinafter referred to as "substrate") 7 shown in FIG. 2 and the electronic component 8 provided in the substrate 7. In the present embodiment, the case where the IC is provided in the substrate 7 as the electronic component 8 has been described as an example. However, the present invention is not limited to the IC, and may be classified into a plurality of power sources and signals. The technology of the present embodiment can be applied to the electronic components of the terminal types. In the present embodiment, the two-terminal method in which the power supply probe and the potential difference detecting probe are shared is used in the potential difference detection for determining the terminal of the electronic component 8 or the like. A four-terminal method for detecting a potential difference by a power supply probe and a potential difference detecting probe.

基板7藉由將多個基板貼合而構成,在內部內設有具有被分類為多個種類的多個端子T1~T6(在統稱的情況下,使用符號“T”)的電子零件(IC)8,並設置有多個佈線圖案N1~N10(在統稱的情況下使用符號“N”)。如圖3所示,佈線圖案N1~N10中的佈線圖案N1~N6與電子零件8的端子T1~T6相連接。另外,在基板7的上側表面與下側表面上設置有可與基板檢查裝置1的探針P接觸的多個檢查點D1~D15(在統稱的情況下,使用符號“D”)。例如,可將設置在佈線圖案N1~N10上的連接盤(land)部或焊錫凸塊等設為檢查點D1~D15。各檢查點D1~D15與佈線圖案N1~N10的關係如圖2所示。 The substrate 7 is formed by laminating a plurality of substrates, and an electronic component (IC having a plurality of terminals T1 to T6 classified as a plurality of types (in the case of collective use, the symbol "T" is used) is provided in the inside. 8), and a plurality of wiring patterns N1 to N10 are provided (the symbol "N" is used in the case of collectively). As shown in FIG. 3, the wiring patterns N1 to N6 in the wiring patterns N1 to N10 are connected to the terminals T1 to T6 of the electronic component 8. Further, on the upper surface and the lower surface of the substrate 7, a plurality of inspection points D1 to D15 (refer to the symbol "D" in the case of collective use) which can be in contact with the probe P of the substrate inspection apparatus 1 are provided. For example, a land portion, a solder bump, or the like provided on the wiring patterns N1 to N10 can be used as the inspection points D1 to D15. The relationship between each of the inspection points D1 to D15 and the wiring patterns N1 to N10 is as shown in FIG. 2 .

返回到圖1的結構,檢查夾具具備:上側檢查夾具,其具有可與基板7的上側表面的檢查點D1~D3、D7~D10接觸的探針P1~P3、P7~P10;以及下側檢查夾具,其具有可與基板7的下側表面的檢查點D4~D6、D11~D14接觸的探針P4~P6、P11~P14。在檢查時,上側檢查夾具的探針P1~P3、P7~P10與下側檢查夾具的探針P4~P6、P11~P14可與基板7的對應的檢查點D1~D14一起地接觸。 Returning to the configuration of FIG. 1, the inspection jig includes: an upper inspection jig having probes P1 to P3, P7 to P10 which can be in contact with inspection points D1 to D3 and D7 to D10 on the upper surface of the substrate 7, and a lower inspection The jig has probes P4 to P6 and P11 to P14 which are in contact with the inspection points D4 to D6 and D11 to D14 on the lower surface of the substrate 7. At the time of inspection, the probes P1 to P3 and P7 to P10 of the upper inspection jig and the probes P4 to P6 and P11 to P14 of the lower inspection jig are in contact with the corresponding inspection points D1 to D14 of the substrate 7.

連接切換部2構成為具備設置在探針P的每個上的開關組SWG1~SWG14,並利用控制部6的控制來切換各個探針P與電源部3的第一與第 二輸出端子3a、3b、電位差檢測部4以及電流檢測部5之間的電連接關係。在各個開關組SWG1~SWG14中,具備利用控制部6而被導通、斷開控制的兩個開關元件(例如半導體開關元件)SW1、SW2。在開關元件SW1導通的情況下,相應的探針P經由開關元件SW1與電源部3的第一輸出端子3a相連接。在開關元件SW2導通的情況下,相應的探針P經由開關元件SW2與電源部3的第二輸出端子3b相連接。 The connection switching unit 2 is configured to include the switch groups SWG1 to SWG14 provided on each of the probes P, and to switch the first and the first probes P and the power supply unit 3 by the control of the control unit 6. The electrical connection relationship between the two output terminals 3a and 3b, the potential difference detecting unit 4, and the current detecting unit 5. Each of the switch groups SWG1 to SWG14 includes two switching elements (for example, semiconductor switching elements) SW1 and SW2 that are turned on and off by the control unit 6. In the case where the switching element SW1 is turned on, the corresponding probe P is connected to the first output terminal 3a of the power supply unit 3 via the switching element SW1. When the switching element SW2 is turned on, the corresponding probe P is connected to the second output terminal 3b of the power supply unit 3 via the switching element SW2.

電源部3藉由控制部6的控制來輸出檢查用的檢查電力,並具有輸出檢查電力的、成對的第一與第二輸出端子3a、3b。電源部3可切換並輸出作為檢查電力的直流穩定電流與直流穩定電壓,並可以多個階段對提供給檢查對象的電流值的供給電流位準與供給電壓位準進行切換。另外,也可以根據檢查內容,使電源部3輸出作為檢查電力的交流電流(例如交流穩定電流)、交流電壓(例如交流穩定電壓)、輸出電流值呈週期變化的直流變動電流、或輸出電壓值呈週期變化的直流變動電壓。另外,在電源部3所輸出的檢查電力具有極性的情況下,可將第一輸出端子3a設定為正極側,將第二輸出端子3b設定為負極側。 The power supply unit 3 outputs inspection power for inspection by the control of the control unit 6, and has paired first and second output terminals 3a and 3b that output inspection power. The power supply unit 3 can switch and output a DC stabilized current and a DC stabilized voltage as the inspection power, and can switch the supply current level and the supply voltage level of the current value supplied to the inspection target in a plurality of stages. Further, the power supply unit 3 may output an alternating current (for example, an alternating current stable current), an alternating current voltage (for example, an alternating current stable voltage), a direct current fluctuation current whose output current value changes periodically, or an output voltage value, depending on the inspection content. A cyclically varying DC voltage that varies. Further, when the inspection power outputted from the power supply unit 3 has a polarity, the first output terminal 3a can be set to the positive electrode side, and the second output terminal 3b can be set to the negative electrode side.

電位差檢測部4經由探針P檢測由電源部3施加在基板7的檢查點D之間的電位差,並將檢測結果提供給控制部6。 The potential difference detecting unit 4 detects a potential difference applied between the inspection points D of the substrate 7 by the power supply unit 3 via the probe P, and supplies the detection result to the control unit 6.

電流檢測部5插設在從電源部3的第一輸出端子3a或第二輸出端子3b(在本實施方式中為第二輸出端子3b)經由連接切換部2而朝向探針P的佈線中,對由電源部3經由探針P而供給到檢查對象的電子零件的電流進行檢測,並將檢測結果提供給控制部6。 The current detecting unit 5 is inserted into the wiring from the first output terminal 3a or the second output terminal 3b (the second output terminal 3b in the present embodiment) of the power supply unit 3 via the connection switching unit 2 toward the probe P. The current supplied to the electronic component to be inspected by the power supply unit 3 via the probe P is detected, and the detection result is supplied to the control unit 6.

控制部6進行該基板檢查裝置1的控制、用於電子零件8的各端子T的判別的處理、以及針對基板7的佈線圖案N與電子零件8的檢查處理。關於該控制部6進行的用於端子T的判別的處理、以及檢查處理的具體內容,以下根據圖4與圖5詳細說明。 The control unit 6 performs control of the substrate inspection device 1 , processing for determining the respective terminals T of the electronic component 8 , and inspection processing for the wiring pattern N of the substrate 7 and the electronic component 8 . The details of the processing for determining the terminal T and the inspection processing performed by the control unit 6 will be described in detail below with reference to FIGS. 4 and 5 .

如圖4所示,在本實施方式中,在步驟S4進行檢查處理之前,在步驟S1~S3進行用於檢查的準備處理。該步驟S1~S3的準備處理,用於判別設於基板7中的電子零件8的各端子T的種類,並決定對設置在基板7上的佈線圖案N與電子零件8的檢查內容以及檢查條件等。在針對相同種類的多個基板7進行檢查的情況下,步驟S1~S3的準備處理可以僅在針對第一個基板7的檢查時進行,而在針對第二個或以後的基板7的檢查時可以省略。 As shown in FIG. 4, in the present embodiment, before the inspection process is performed in step S4, preparation processing for inspection is performed in steps S1 to S3. The preparation process of the steps S1 to S3 is for determining the type of each terminal T of the electronic component 8 provided in the substrate 7, and determining the inspection contents and inspection conditions of the wiring pattern N and the electronic component 8 provided on the substrate 7. Wait. In the case of inspecting a plurality of substrates 7 of the same kind, the preparation processing of steps S1 to S3 may be performed only at the time of inspection for the first substrate 7, and at the time of inspection for the second or subsequent substrate 7. Can be omitted.

在步驟S1中,檢測出電子零件8的各端子T的特性。具體而言,針對從電子零件8的端子T中選出的兩個端子T的所有組合,由電源部3供給用於在所選出的端子T之間檢測端子特性的電流,由電位差檢測部4經由探針P1~P6、檢查點D1~D6與佈線圖案N1~N6對所選出的端子T之間的電位差進行檢測。此時,針對所選出的各端子T對,將電流的供給方向在正反兩個供給方向上切換,並使供給的電流值變化為多個電流供給位準(在本實施方式中為第一與第二這兩個電流供給位準)。即,所選出的兩個端子T之間的電位差的檢測是針對電流的兩個供給方向與多個電流供給位準的所有組合的每個組合而進行的。另外,在本實施方式中,為了端子特性檢測而供給的電流的第一電流供給位準例如設定為0.2mA,第二電流供給位準例如設定為1mA。 In step S1, the characteristics of the respective terminals T of the electronic component 8 are detected. Specifically, for all combinations of the two terminals T selected from the terminals T of the electronic component 8, a current for detecting the terminal characteristics between the selected terminals T is supplied from the power supply unit 3, and the potential difference detecting portion 4 is passed through the potential difference detecting portion 4 via The probes P1 to P6, the inspection points D1 to D6, and the wiring patterns N1 to N6 detect the potential difference between the selected terminals T. At this time, for each of the selected terminal T pairs, the supply direction of the current is switched between the positive and negative supply directions, and the supplied current value is changed to a plurality of current supply levels (in the present embodiment, the first With the second two current supply levels). That is, the detection of the potential difference between the selected two terminals T is performed for each combination of all the combinations of the two supply directions of the current and the plurality of current supply levels. Further, in the present embodiment, the first current supply level of the current supplied for terminal characteristic detection is set to, for example, 0.2 mA, and the second current supply level is set to, for example, 1 mA.

在該端子特性檢測步驟中,雖然組合的更替項目為端子T對的更替、電流供給方向的正反的更替、以及供給電流位準的兩個階段的更替共三個項目,但針對這三個項目,用何種順序進行更替是任意的。例如,可以按這樣的方式進行:針對所選出的端子T對,將電流供給方向設定為正向,並以兩個階段切換電流供給位準並提供電流後,將電流供給方向切換為反向,並以兩個階段再次切換電流供給位準並提供電流。然後,選出下一個端子T對,針對所選出的端子T對,以相同的要領提供端子特性檢測用的電流,並且在結束時,再選出下一個端子對。 In the terminal characteristic detecting step, although the combined replacement items are the replacement of the terminal T pair, the replacement of the positive and negative directions of the current supply direction, and the replacement of the two stages of the supply current level, for the three items, The order in which the items are replaced is arbitrary. For example, it can be performed in such a manner that the current supply direction is set to the forward direction for the selected terminal T pair, and the current supply direction is switched to the reverse direction after the current supply level is switched in two stages and the current is supplied. The current supply level is switched again and the current is supplied in two stages. Then, the next terminal T pair is selected, and the current for terminal characteristic detection is provided in the same manner for the selected terminal T pair, and at the end, the next terminal pair is selected.

另外,在本實施方式中,為了防止在端子特性檢測時在端子T上施加 過度的電位差而導致在電子零件8上施加過剩的負載,在控制部6上設置有保護功能。例如,在開始由電源部3向所選出的端子T對之間供給端子特性檢測用的電流時,經由電位差檢測部4監視端子T對之間的電位差,當端子T對之間的電位差達到規定的上限電位差值(在本實施方式中為3V)時,停止電源部3的電流供給。 Further, in the present embodiment, in order to prevent application on the terminal T at the time of terminal characteristic detection Excessive potential difference causes an excessive load to be applied to the electronic component 8, and the control unit 6 is provided with a protection function. For example, when the current for detecting the terminal characteristic is supplied from the power supply unit 3 to the selected pair of terminals T, the potential difference detecting unit 4 monitors the potential difference between the pair of terminals T, and the potential difference between the pair of terminals T reaches the predetermined value. When the upper limit potential difference (3 V in the present embodiment) is exceeded, the supply of current to the power supply unit 3 is stopped.

將針對各端子T對的組合所檢測出的電位差值歸納在表中則如圖5所示。在圖5的表中,在從上數第一行中,記入了在電流供給時被設為正極側的端子T的符號,在從左數第一列中,記入了在電流供給時被設為負極側的端子T的符號。在除此以外的欄位中,記入在將位於該欄位的縱向上側第一行欄位的端子T1~T6設定為正極側、並將位於該欄位的橫向左側第一列欄位的端子T1~T6設定為負極側時的、與兩個電流供給位準相對應的兩個檢測電位差值。斜分隔線左側的數值為供給第一電流供給位準(0.2mA)的電流時的檢測電位差值,斜分隔線右側的數值為供給第二電流供給位準(1mA)的電流時的檢測電位差值。記入到各個欄位中的檢測電位差值的單位為V。 The potential difference detected for the combination of each terminal T pair is summarized in the table as shown in FIG. In the table of FIG. 5, in the first row from the top, the symbol of the terminal T which is set to the positive electrode side at the time of current supply is written, and in the first column from the left, it is recorded that the current supply is set. It is the symbol of the terminal T on the negative side. In the other fields, the terminals T1 to T6 in the first row of the vertical upper side of the field are set as the positive side, and the terminal in the first column of the horizontal left side of the field is recorded. The two detection potential differences corresponding to the two current supply levels when T1 to T6 are set to the negative side. The value on the left side of the oblique dividing line is the detected potential difference when the current of the first current supply level (0.2 mA) is supplied, and the value on the right side of the oblique dividing line is the detected potential difference when the current is supplied to the second current supply level (1 mA). . The unit of the detection potential difference recorded in each field is V.

例如,在圖5的表的欄位G1中,記入了在端子T4被設定為正極側且端子T1被設定為負極側時的與第一與第二供給電流位準相對應的兩個檢測電位差值,其中,0.5(V)為供給第一電流供給位準(0.2mA)的電流時的檢測電位差值,0.6(V)為供給第二電流供給位準(1mA)的電流時的檢測電位差值。另外,如欄位G2所示,記入了3(V)的檢測電壓值的地方表示利用控制部6的保護功能來限制了向端子T之間施加的電位差的情況。 For example, in the field G1 of the table of FIG. 5, two detection potential differences corresponding to the first and second supply current levels when the terminal T4 is set to the positive side and the terminal T1 is set to the negative side are recorded. a value in which 0.5 (V) is a detected potential difference when a current of a first current supply level (0.2 mA) is supplied, and 0.6 (V) is a detected potential difference when a current of a second current supply level (1 mA) is supplied . Further, as indicated by the field G2, the place where the detection voltage value of 3 (V) is written indicates that the potential difference applied between the terminals T is restricted by the protection function of the control unit 6.

接下來,在步驟S2中,根據步驟S1的檢測結果,判別電子零件8的各端子T的種類。具體而言,將電子零件8的多個端子T中滿足下述條件的端子判別為用於電源輸入或接地的電源類端子,該條件為:與其他端子T之間的在兩個供給方向中的任一個方向上的檢測電位差值針對所有其他端子與全部的電流供給位準都未達到規定的基準電位差值、且電流為最小的電流供給位準(在本實施方式中為第一電流供給位準)時的檢測電位差值 與電流為最大的電流供給位準(在本實施方式中為第二電流供給位準)時的檢測電位差值之間的變化度未到規定的基準變化度。換而言之,在該判別步驟中,從多個端子T中找出與其他所有端子T之間的電特性有檢測出二極體順向特性的端子T,並將該端子T判別為電源類端子。 Next, in step S2, the type of each terminal T of the electronic component 8 is discriminated based on the detection result of step S1. Specifically, among the plurality of terminals T of the electronic component 8 , the terminal that satisfies the following condition is determined as a power source terminal for power supply input or grounding, in the case where the two terminals are in the two supply directions. The detection potential difference in either direction is the current supply level at which the current reference level difference is not reached for all other terminals and all current supply levels, and the current supply level is the smallest (in the present embodiment, the first current supply level) Detection potential difference The degree of change between the detected potential difference values when the current is at the maximum current supply level (the second current supply level in the present embodiment) does not reach a predetermined reference degree of change. In other words, in the discriminating step, the terminal T having the polarity characteristic of the diode is detected from the plurality of terminals T and the electrical characteristics between all the other terminals T, and the terminal T is discriminated as a power source. Class terminal.

上述規定的基準電位差值被設定為例如3V。另外,關於向端子T之間提供的供給電流為第一電流供給位準時的檢測電位差值與供給電流為第二電流供給位準時的檢測電位差值之間的變化度,使用兩個檢測電位差值的差值或比值(相除值)等。在本實施方式中,使用兩個檢測電位差值的差值作為兩個檢測電位差值的變化度,在該差值小於規定的基準變化差值(例如0.15V)的情況下,判別為電源類端子。在圖5的檢測結果的情況下,如圈起的區域A1、A2所示,端子T3、T4被判別為電源類端子。 The predetermined reference potential difference value is set to, for example, 3V. Further, regarding the degree of change between the detected potential difference when the supply current supplied between the terminals T is the first current supply level and the detected potential difference when the supply current is the second current supply level, two detected potential difference values are used. Difference or ratio (division value), etc. In the present embodiment, the difference between the two detected potential differences is used as the degree of change of the two detected potential differences, and when the difference is smaller than the predetermined reference change difference (for example, 0.15 V), the power supply type terminal is discriminated . In the case of the detection result of FIG. 5, the terminals T3 and T4 are discriminated as power supply type terminals as indicated by the circled areas A1 and A2.

另外,在該步驟S2中,對被判別為電源類端子的端子T3、T4是電源輸入端子還是接地端子進行判別。具體而言,在該端子T3、T4被設定為正極側並供給端子判別用的電流時,將該端子T3、T4與其他所有端子T1~T6之間的檢測電位差值大於或等於上述規定的基準電位差值的端子判別為電源輸入端子,在該端子T3、T4被設定為負極側並供給端子判別用的電流時,將該端子T3、T4與其他所有端子T1~T6之間的檢測電位差值大於或等於上述規定的基準電位差值的端子判別為接地端子。在圖5的檢測結果的情況下,如圈起的區域A3、A4所示,端子T3被判別為電源輸入端子,端子T4被判別為接地端子。 Further, in this step S2, it is determined whether the terminals T3 and T4 determined as the power source terminals are the power supply input terminal or the ground terminal. Specifically, when the terminals T3 and T4 are set to the positive electrode side and the current for terminal determination is supplied, the difference between the detection potentials of the terminals T3 and T4 and all the other terminals T1 to T6 is greater than or equal to the predetermined reference. The terminal of the potential difference is determined as the power input terminal. When the terminals T3 and T4 are set to the negative side and the current for terminal identification is supplied, the difference between the detection potentials of the terminals T3 and T4 and all other terminals T1 to T6 is greater than A terminal equal to or equal to the predetermined reference potential difference is determined to be a ground terminal. In the case of the detection result of FIG. 5, as shown in the circled areas A3 and A4, the terminal T3 is determined as the power supply input terminal, and the terminal T4 is determined as the ground terminal.

換而言之,在這種判別步驟中,在將被判別為電源類端子的端子T3、T4設定為正極側並向與其他端子T1~T6之間供給電流時在與其他端子T1~T6之間未檢測出二極體順向特性的端子被判別為電源輸入端子。另外,在將被判別為電源類端子的端子T3、T4設定為負極側並向與其他端子T1~T6之間供給電流時在與其他端子T1~T6之間未檢測到二極體順向特性的端子被判別為接地端子。 In other words, in the determination step, when the terminals T3 and T4 that are determined to be the power source terminals are set to the positive side and supplied with current to the other terminals T1 to T6, they are connected to the other terminals T1 to T6. A terminal that does not detect the forward direction characteristic of the diode is determined as a power input terminal. In addition, when the terminals T3 and T4 that are determined to be the power source terminals are set to the negative side and the current is supplied to the other terminals T1 to T6, the diode forward characteristics are not detected between the other terminals T1 and T6. The terminal is judged to be a ground terminal.

此外,在該步驟S2中,將電子零件8的多個端子T中的除被判別為電源類端子的端子T3、T4之外的端子T1、T2、T5、T6判別為用於信號輸入或信號輸出的信號類端子,並判別該端子T1、T2、T5、T6是信號輸入端子還是信號輸出端子。 Further, in this step S2, the terminals T1, T2, T5, and T6 other than the terminals T3 and T4 which are determined to be power source terminals among the plurality of terminals T of the electronic component 8 are discriminated as signal input or signals. The output signal type terminal determines whether the terminals T1, T2, T5, and T6 are signal input terminals or signal output terminals.

具體而言,作為第一判別方法,根據在判別為電源輸入端子的端子T3被設定為負極側時各端子T1、T2、T5、T6與端子T3之間的與第一或第二電流供給位準相對應的檢測電位差值的大小關係,來判別端子T1、T2、T5、T6是信號輸入端子還是信號輸出端子。或者,作為第二判別方法,根據在判別為接地端子的端子T4被設定為正極側時各端子T1、T2、T5、T6與端子T4之間的與第一或第二電流供給位準相對應的檢查電位差值的大小關係,來判別端子T1、T2、T5、T6是信號輸入端子還是信號輸出端子。另外,也可採用第一或第二判別方法中的任一種方法,也可以在各判別方法中,使用與第一電流供給位準相對應的檢測電位差值以及與第二電流供給位準對應的檢測電位差值中的任一個的大小關係來進行判別。在此,該信號類端子的輸入側或輸出側的判別方法是利用了信號類端子與電源類端子之間的二極體特性的順向電壓通常為在輸入側比輸出側小這樣的特性的方法。 Specifically, as the first determination method, the first or second current supply bit between each of the terminals T1, T2, T5, T6 and the terminal T3 when the terminal T3 of the power supply input terminal is determined to be set to the negative side It is determined whether the terminals T1, T2, T5, and T6 are signal input terminals or signal output terminals due to the magnitude relationship of the corresponding detection potential difference values. Alternatively, as the second discriminating method, the first or second current supply level between the respective terminals T1, T2, T5, T6 and the terminal T4 is determined according to the terminal T4 determined to be the ground terminal being set to the positive side. Check the magnitude relationship of the potential difference to determine whether the terminals T1, T2, T5, and T6 are signal input terminals or signal output terminals. In addition, any one of the first or second discriminating methods may be employed, or in each discriminating method, a detected potential difference corresponding to the first current supply level and a second current supply level may be used. The magnitude relationship of any one of the potential difference values is detected to determine. Here, the method of determining the input side or the output side of the signal type terminal is that the forward voltage using the diode characteristic between the signal type terminal and the power source type terminal is generally such that the input side is smaller than the output side. method.

作為與該信號類端子的輸入側或輸出側的判別有關的更具體的例子,例如,與上述第一判別方法相對應地,將在判別為電源輸入端子的端子T3被設定為負極側時各端子T1、T2、T5、T6與端子T3之間的與第一或第二電流供給位準相對應的檢查電位差值按照從小到大的順序排列並在其中央處分為兩個組,將屬於檢測電位差值小的一組的端子T1、T2、T5、T6判別為信號輸入端子,將屬於檢測電位差值大的一組的端子T1、T2、T5、T6判別為信號輸出端子。或者,與上述第二判別方法相對應地,將在判別為接地端子的端子T4被設定為正極側時各端子T1、T2、T5、T6與端子T4之間的與第一或第二電流供給位準相對應的檢查電位差值按照從小到大的順序排列並在其中央處分為兩個組,將屬於檢測電位差值小的一組的端子T1、T2、T5、T6判別為信號輸入端子,將屬於檢測電位差值大的一組的端 子T1、T2、T5、T6判別為信號輸出端子。 More specific example of the determination of the input side or the output side of the signal type terminal, for example, in accordance with the first determination method, when the terminal T3 determined as the power supply input terminal is set to the negative side The check potential difference between the terminals T1, T2, T5, T6 and the terminal T3 corresponding to the first or second current supply level is arranged in order from small to large and is divided into two groups at the center thereof, and belongs to the detection. The terminals T1, T2, T5, and T6 of a group having a small potential difference are discriminated as signal input terminals, and the terminals T1, T2, T5, and T6 belonging to one group having a large detection potential difference are discriminated as signal output terminals. Alternatively, in correspondence with the second determination method, the first or second current supply between the terminals T1, T2, T5, T6 and the terminal T4 when the terminal T4 determined to be the ground terminal is set to the positive side The check potential difference corresponding to the level is arranged in order from small to large and is divided into two groups at the center thereof, and the terminals T1, T2, T5, and T6 belonging to a group having a small difference in detection potential are discriminated as signal input terminals, and Belong to the end of a group whose detection potential difference is large The sub-T1, T2, T5, and T6 are discriminated as signal output terminals.

例如,在圖5的檢查結果的情況下,在用上述第一判別方法進行的判別中,如圈起的區域A1所示,若將與第一電流供給位準(0.2mA)相對應的檢測電位差值按從小到大的順序排列,則為端子T1、端子T2、端子T5、端子T6的順序,端子T1、T2被判別為信號輸入端子,端子T5、T6被判別為信號輸出端子。 For example, in the case of the inspection result of FIG. 5, in the discrimination by the above-described first discriminating method, as indicated by the circled area A1, the detection corresponding to the first current supply level (0.2 mA) is performed. The potential difference values are arranged in order from small to large, and are the order of the terminal T1, the terminal T2, the terminal T5, and the terminal T6. The terminals T1 and T2 are determined as signal input terminals, and the terminals T5 and T6 are determined as signal output terminals.

接下來,在步驟S3中,根據在步驟S2中的電子零件8的各端子T的種類的判別結果,設定針對電子零件8與各佈線圖案N執行的檢查內容(導通檢查、絕緣檢查等)以及檢查條件(例如,施加檢查用的電力時的極性、電力供給位準等)。 Next, in step S3, based on the determination result of the type of each terminal T of the electronic component 8 in step S2, the inspection contents (conduction inspection, insulation inspection, etc.) performed on the electronic component 8 and each wiring pattern N are set and Inspection conditions (for example, polarity when power for inspection is applied, power supply level, etc.).

接下來,在步驟S4中,根據在步驟S3中所設定的檢查內容與檢查條件,執行對設置在基板7中的電子零件8與各佈線圖案N的檢查。此時的檢查例如包含與佈線圖案N的導通性相關的檢查、以及與佈線圖案N的絕緣性相關的檢查。佈線圖案N的導通性檢查也包含經由電子零件8而連接的佈線圖案N之間(例如,佈線圖案N1、N4之間)的導通檢查。 Next, in step S4, inspection of the electronic component 8 and each wiring pattern N provided in the substrate 7 is performed based on the inspection contents and inspection conditions set in step S3. The inspection at this time includes, for example, an inspection relating to the conductivity of the wiring pattern N and an inspection relating to the insulation of the wiring pattern N. The continuity check of the wiring pattern N also includes a conduction check between the wiring patterns N connected via the electronic component 8 (for example, between the wiring patterns N1 and N4).

在導通檢查的情況下,例如,一邊與被依次選出的檢查對象的佈線圖案N(或經由電子零件8而連接的佈線圖案N之間)相對應地進行基於連接切換部2的連接關係切換,一邊經由探針P從電源部3向檢查對象的佈線圖案N供給檢查用的電力,利用電位差檢測部4檢測此時被施加到各佈線圖案N的電位差,利用電流檢測部5檢測被供給到各佈線圖案N的電流,並根據這些檢測電位差值與檢測電流值來檢查各佈線圖案N之間的導通性。 In the case of the continuity check, for example, the connection relationship by the connection switching unit 2 is switched in accordance with the wiring pattern N (or between the wiring patterns N connected via the electronic component 8) to be sequentially selected. The power for inspection is supplied from the power supply unit 3 to the wiring pattern N to be inspected via the probe P, and the potential difference detecting unit 4 detects the potential difference applied to each of the wiring patterns N at this time, and the current detecting unit 5 detects that the power is supplied to each. The current of the wiring pattern N is checked for the continuity between the wiring patterns N based on the detected potential difference and the detected current value.

在絕緣檢查的情況下,例如,一邊與被依次選出的檢查對象的兩個佈線圖案N相對應地進行基於連接切換部2的連接關係切換,一邊經由探針P從電源部3向檢查對象的兩個佈線圖案N之間供給檢查用的電力,利用 電流檢測部5來檢測是否具有流過這兩個佈線圖案N之間的電流等,並根據檢測結果來檢查各佈線圖案N之間的絕緣性。 In the case of the insulation inspection, for example, the connection relationship by the connection switching unit 2 is switched in accordance with the two wiring patterns N of the inspection objects to be sequentially selected, and the inspection target is supplied from the power supply unit 3 via the probe P. The electric power for inspection is supplied between the two wiring patterns N, and the utilization is utilized. The current detecting unit 5 detects whether or not there is a current flowing between the two wiring patterns N, and checks the insulation between the wiring patterns N based on the detection result.

如上所述,根據本實施方式,即使在不知道設於基板7中的電子零件8的各端子T的種類的情況下,也能夠針對設於基板7內的電子零件8的各端子T,自動地判別電源輸入端子、接地端子、信號輸入端子或信號輸出端子之別。因此,可恰當地進行針對內置的電子零件8與與電子零件8相連接的佈線圖案N的檢查。 As described above, according to the present embodiment, even when the type of each terminal T of the electronic component 8 provided in the substrate 7 is not known, the terminal T of the electronic component 8 provided in the substrate 7 can be automatically Identify the power input terminal, ground terminal, signal input terminal or signal output terminal. Therefore, the inspection of the built-in electronic component 8 and the wiring pattern N connected to the electronic component 8 can be performed appropriately.

8‧‧‧電子零件 8‧‧‧Electronic parts

D1~D6‧‧‧檢查點 D1~D6‧‧‧ checkpoint

N1~N6‧‧‧佈線圖案 N1~N6‧‧‧ wiring pattern

T1~T6‧‧‧端子 T1~T6‧‧‧ terminal

Claims (5)

一種設於基板內之電子零件之端子判別方法,其對於電子零件的端子的種類進行判別,該電子零件設於內設零件基板內、與設置在內設零件基板上的佈線圖案相連接並具有被分類為多個種類的多個端子,該方法的特徵在於,具備:端子特性檢測步驟,其針對該電子零件的該多個端子的所有端子對的組合,在該端子之間使電流在正反兩個供給方向上切換並改變為多個電流供給位準,並且經由該佈線圖案供給該電流,針對該兩個供給方向的每個以及該電流供給位準的每個來檢測該電流供給時的各端子間的電位差作為檢測電位差值;以及端子判別步驟,其根據該端子特性檢測步驟的檢測結果,將該電子零件的該多個端子中的、滿足下述條件的端子判別為用於電源輸入或接地的電源類端子,該條件為:與其他端子之間的在該兩個供給方向中的任一個方向上的檢測電位差值對於其他所有端子與全部電流供給位準都未達到規定的基準電位差值、且電流為最小的該電流供給位準時的檢測電位差值與電流為最大的該電流供給位準時的檢測電位差值之間的變化度未達到規定的基準變化度。 A terminal discriminating method for an electronic component provided in a substrate, wherein the electronic component is provided in a built-in component substrate and connected to a wiring pattern provided on the component substrate; A method of classifying a plurality of terminals into a plurality of types, the method comprising: a terminal characteristic detecting step of making a current between the terminals for a combination of all terminal pairs of the plurality of terminals of the electronic component Switching in the two supply directions and changing to a plurality of current supply levels, and supplying the current via the wiring pattern, detecting the current supply for each of the two supply directions and each of the current supply levels A potential difference between each of the terminals is used as a power source for determining a potential difference; and a terminal determining step for determining, as a result of the detection result of the terminal characteristic detecting step, a terminal that satisfies the following condition among the plurality of terminals of the electronic component Input or grounded power type terminal, in the direction of either of the two supply directions with other terminals The detection potential difference is the difference between the detection potential difference at the current supply level when all other terminals and all current supply levels do not reach the specified reference potential difference, and the current is at the minimum, and the detection potential difference when the current is at the maximum current supply level. The degree of change between the two does not reach the specified baseline change. 如申請專利範圍第1項的設於基板內之電子零件之端子判別方法,其中,在該端子判別步驟中,在判別為該電源類端子的該端子中的、當該端子被設定為正極側並供給該電流時該端子與其他所有端子之間的檢測電位差值都大於或等於該規定的基準電位差值的端子判別為電源輸入端子,在判別為該電源類端子的該端子中的、當該端子被設定為負極側並供給該電流時該端子與其他所有端子之間的檢測電位差值都大於或等於該規定的基準電位差值的端子判別為接地端子。 The method for discriminating a terminal for an electronic component provided in a substrate according to the first aspect of the invention, wherein in the terminal determining step, the terminal is determined to be a positive electrode side of the terminal of the power source terminal. And the terminal having the detection potential difference between the terminal and all other terminals greater than or equal to the predetermined reference potential difference is determined as the power input terminal when the current is supplied, and is determined in the terminal of the power supply type terminal. When the terminal is set to the negative side and the current is supplied, the terminal whose detection potential difference between the terminal and all other terminals is greater than or equal to the predetermined reference potential difference is determined as the ground terminal. 如申請專利範圍第2項的設於基板內之電子零件之端子判別方法,其中,在該端子判別步驟中,將該電子零件的該多個端子中的被判別為該電 源類端子的端子之外的端子判別為用於信號輸入或信號輸出的信號類端子。 A terminal discriminating method for an electronic component provided in a substrate according to the second aspect of the invention, wherein in the terminal determining step, the plurality of terminals of the electronic component are determined to be the electric The terminals other than the terminals of the source terminal are discriminated as signal terminals for signal input or signal output. 如申請專利範圍第3項的設於基板內之電子零件之端子判別方法,其中,在該端子判別步驟中,根據在判別為該電源輸入端子的端子被設定為負極側時、被判別為該信號類端子的該各端子與被判別為該電源輸入端子的端子之間的與任一個該電流供給位準相對應的檢測電位差值的大小關係、或在判別為該接地端子的端子被設定為正極側時、被判別為該信號類端子的該各端子與被判別為該接地端子的端子之間的與任一個該電流供給位準相對應的檢測電位差值的大小關係,來判別被判別為該信號類端子的該端子是信號輸入端子還是信號輸出端子。 The terminal discriminating method of the electronic component provided in the substrate according to the third aspect of the invention, wherein the terminal determining step determines that the terminal is determined to be the negative side when the terminal of the power input terminal is set to the negative electrode side. a magnitude relationship between a detection potential difference corresponding to any one of the current supply levels between the respective terminals of the signal type terminal and a terminal determined to be the power input terminal, or a terminal determined to be the ground terminal is set to In the case of the positive electrode side, the magnitude of the detected potential difference corresponding to any one of the current supply levels between the respective terminals of the signal terminal and the terminal determined to be the ground terminal is determined as Whether the terminal of the signal type terminal is a signal input terminal or a signal output terminal. 一種設於基板內之電子零件之端子判別裝置,其對於電子零件的端子的種類進行判別,該電子零件設於內設零件基板內、與設置在內設零件基板上的佈線圖案相連接並具有被分類為多個種類的多個端子,該裝置的特徵在於,具備:多個探針,與設置在該內設零件基板的該佈線圖案上的檢查點相接觸;電源部,經由該探針與該佈線圖案,以多個電流供給位準向該電子零件的端子之間供給電流;電位差檢測部,經由該探針與該佈線圖案,檢測該電子零件的端子之間的電位差;連接切換部,對該探針與該電源部以及該電位差檢測部之間的電連接關係進行切換;以及控制部,對該電源部與該連接切換部進行控制,並根據該電位差檢測部的檢測結果來判別該電子零件的該端子的種類;且該控制部執行端子特性檢測處理與端子判別處理,其中,該端子特性檢測處理藉由控制該連接切換部與該電源部,針對該電子零件的該多個端子的所有端子對的組合,在該端子間將電流在正反兩個供給方向上切換、改變為多個電流供給位準並經由該佈線圖案施加該 電流,並經由該電位差檢測部針對該兩個供給方向中的每個與該電流供給位準的每個來檢測該電流的供給時各端子間的電位差作為檢測電位差值;該端子判別處理根據在該端子特性檢測處理中的檢測結果,將該電子零件的該多個端子中的、滿足下述條件的端子判別為用於電源輸入或接地的電源類端子,該條件為:與其他端子之間的在該兩個供給方向中的任一個上的檢測電位差值針對其他所有端子與全部電流供給位準都未達到規定的基準電位差值、且電流為最小的該電流供給位準時的檢測電位差值與電流為最大的該電流供給位準時的檢測電位差值之間的變化度未達到規定的基準變化度。 A terminal discriminating device for an electronic component provided in a substrate, wherein the electronic component is provided in a built-in component substrate and connected to a wiring pattern provided on the component substrate; The device is classified into a plurality of types of terminals, and the device includes a plurality of probes that are in contact with a checkpoint provided on the wiring pattern of the built-in component substrate, and a power supply unit via the probe a current is supplied to the terminal of the electronic component at a plurality of current supply levels with the wiring pattern; the potential difference detecting unit detects a potential difference between the terminals of the electronic component via the probe and the wiring pattern; and connects the switching portion Switching the electrical connection between the probe and the power supply unit and the potential difference detecting unit; and the control unit controls the power supply unit and the connection switching unit, and determines based on the detection result of the potential difference detecting unit a type of the terminal of the electronic component; and the control section performs terminal characteristic detecting processing and terminal discriminating processing, wherein the terminal characteristic detecting By controlling the connection switching unit and the power supply unit, a combination of all terminal pairs of the plurality of terminals of the electronic component switches current between the terminals in two supply directions, and changes to a plurality of currents. Supplying a level and applying the same via the wiring pattern And detecting, by the potential difference detecting unit, a potential difference between each terminal when the current is supplied for each of the two supply directions and the current supply level as a detected potential difference; the terminal discrimination processing is based on As a result of the detection in the terminal characteristic detecting process, the terminal satisfying the following conditions among the plurality of terminals of the electronic component is determined as a power source terminal for power supply input or grounding, and the condition is: between the other terminals The detection potential difference value in any one of the two supply directions is different from the detection potential difference when the current supply level is not the same as the predetermined reference potential difference and all the current supply levels are the minimum The degree of change between the detected potential differences when the current is at the maximum current supply level does not reach a predetermined reference degree of change.
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