JP5672783B2 - Measuring apparatus, measuring program and measuring method - Google Patents

Description

  The present invention relates to a measurement apparatus, a measurement program, and a measurement method.

  2. Description of the Related Art Conventionally, a clip test is known in which a pseudo failure is generated at an arbitrary location on a circuit and an operation when the circuit fails is evaluated. A clip tester that performs such a clip test, for example, fixes a via voltage to 0 V (volt) by bringing a probe having the same potential as GND (ground) into contact with the via of the circuit to be evaluated. generate. Then, the clip tester evaluates the operation of the circuit under evaluation that has caused the simulated fault.

  Further, the clip tester may destroy an element installed in the circuit under evaluation when the voltage of the power supply via or the feedback terminal among the vias of the circuit under evaluation is fixed to 0V. In other words, in the circuit to be evaluated, power supply vias, feedback terminals, and logic vias are mixed, and if the clip tester targets the power supply vias or feedback terminals for the clip test, the elements installed in the circuit are destroyed. It will be. For this reason, the clip tester determines the type of via to be measured, and excludes the power supply via and the feedback terminal from the target of the clip test, so that only the logic via is the target of the clip test.

  For example, in the example shown in FIG. 14, the clip tester uses CAD (Computer Aided Design) data of the PT board (printed board), which is the circuit to be evaluated, to determine the type and coordinates of each via that the PT board has. To do. Then, the clip tester excludes the power supply via and the feedback terminal from the target of the clip test, and executes the clip test on the logic via. FIG. 14 is a diagram for explaining a conventional clip tester.

  Here, the clip tester may not be able to use the CAD data of the circuit to be evaluated, such as when a clip test is performed on a circuit made by another company. In such a case, in order to determine the type of via of the circuit to be evaluated, a technique for determining the power supply via using a DC resistance between the power line installed in the circuit to be evaluated and each via is known. Yes. Specifically, the clip tester measures the DC resistance between the power supply line installed on the circuit to be evaluated and each via. When the measured DC resistance value is lower than a predetermined threshold, the clip tester determines that the measurement target via is a power supply via and excludes it from the clip test target.

JP 2006-053043 A

  However, in the technique for discriminating the power supply via described above, the via type is discriminated using the DC resistance between the power supply line and the via, so that the via type of the circuit to be evaluated is discriminated appropriately with a small number of measurements. There was a problem that I could not.

  In other words, the above-described technique for determining the power supply via cannot determine the feedback terminal and the logic via only by determining whether the via to be measured is a power supply via using the measured DC resistance. In the above-described method for determining the power supply via, when a current that bypasses various components from the power supply line flows to the via to be measured, the value of the measured DC resistance becomes low, so the feedback terminal or logic A via is mistaken for a power supply via.

  Further, in the above-described technology for determining the power supply via, when there are a plurality of power supplies on the circuit to be evaluated, the DC resistance between the power supply line and the via related to each power supply is measured. There was a problem that the number of measurements was enormous.

  The technique disclosed in the present application has been made in view of the above-described problems, and has an effect of appropriately determining the type of via of the circuit to be evaluated with a small number of measurements.

According to one aspect, the technology disclosed in the present application is a measuring apparatus that applies a voltage to an arbitrary via of an information processing circuit while changing the voltage. Further, the measurement device measures a change in the value of the magnitude of the current flowing through the via to which the voltage is applied when the voltage is applied to the via while changing the voltage. The measuring device includes a change in the voltage applied to the via, if the relationship between the change in size of the measured current, satisfies the voltage-current characteristics of the power supply via a pre measured, the via power When the relationship satisfies the voltage-current characteristic of the via related to the feedback terminal measured in advance, the via is determined to be a via related to the feedback terminal, and the relationship is determined to be the power via. If not satisfied the voltage-current characteristics and voltage-current characteristics of the vias according to the feedback terminal, the via is determined to be in logic via.

  According to one aspect, the technique disclosed in the present application has an effect of appropriately determining the type of via of the circuit to be evaluated with a small number of measurements.

FIG. 1 is a diagram for explaining the measurement apparatus according to the first embodiment. FIG. 2 is a block diagram for explaining the automatic inspection apparatus according to the second embodiment. FIG. 3 is a diagram illustrating an example of voltage-current characteristics measured for various vias. FIG. 4 is a diagram for explaining an example of the voltage-current characteristic of the power supply via. FIG. 5 is a diagram (1) for explaining an example of the voltage-current characteristic of the feedback terminal. FIG. 6 is a diagram (2) for explaining an example of the voltage-current characteristic of the feedback terminal. FIG. 7 is a diagram for explaining an example of the voltage-current characteristic of the logic via. FIG. 8 is a diagram for explaining the measurement phase. FIG. 9 is a diagram for explaining the separation phase. FIG. 10 is a diagram for explaining the clip test execution phase. FIG. 11 is a flowchart for explaining the flow of processing of each apparatus. FIG. 12 is a flowchart for explaining processing for determining the type of each via. FIG. 13 is a diagram for explaining a computer that executes a measurement program. FIG. 14 is a diagram for explaining a conventional clip tester.

  Hereinafter, a measuring apparatus according to the present application will be described with reference to the accompanying drawings.

  In Example 1 below, an example of a measurement apparatus will be described with reference to FIG. FIG. 1 is a diagram for explaining the measurement apparatus according to the first embodiment. Note that the measuring device is a device that measures the voltage-current characteristics of at least an arbitrary circuit portion in the information processing circuit.

  As shown in FIG. 1, the measurement apparatus 1 includes a voltage application unit 2, a current measurement unit 3, and a determination unit 4. The voltage application unit 2 applies a voltage to the via 6 of the information processing circuit 5. The via 6 is an arbitrary via among all the vias of the information processing circuit 5. The current measuring unit 3 measures the magnitude of the current flowing through the via 6 when a voltage is applied to the via 6 by the voltage applying unit 2. The determination unit 4 determines the type of the via 6 using the relationship between the strength of the voltage applied by the voltage application unit 2 and the magnitude of the current measured by the current measurement unit 3. That is, the measuring apparatus 1 measures the voltage / current characteristic of the via 6 and determines the type of the via 6 based on the measured voltage / current characteristic.

  For example, since a capacitor having a larger capacity than that of other types of vias is connected to the power supply via, a larger current flows than other types of vias when a voltage is applied to the power supply via. For this reason, the measuring apparatus 1 can determine that a via through which a large current flows is a power supply via. In addition, since a resistance is connected to the feedback terminal, when a voltage is applied to the feedback terminal, a current having a magnitude proportional to the strength of the applied voltage flows. For this reason, the measuring apparatus 1 can determine that the via in which the current proportional to the applied voltage is measured is the feedback terminal.

  As a result, the measuring apparatus 1 can appropriately determine the type of the via 6 using the voltage-current characteristic of the via 6. Further, the measuring apparatus 1 only needs to measure the voltage-current characteristics of the via 6 only once, and can appropriately determine the type of the via 6 with a small number of measurements.

  In Example 2 below, an example of an automatic inspection apparatus will be described. Note that the automatic inspection apparatus is an apparatus that measures voltage-current characteristics in at least an arbitrary via installed in a circuit.

  FIG. 2 is a block diagram for explaining the automatic inspection apparatus according to the second embodiment. As shown in FIG. 2, the automatic inspection device 10 is connected to the information processing device 16. The information processing device 16 is connected to the clip tester 20.

  The evaluated circuit 23 is a circuit having a plurality of vias 24 to 27. The via 24 is a power supply via located at the coordinates (100, 100) on the circuit under evaluation 23. The via 25 is a feedback terminal located at coordinates (100, 200) on the circuit under evaluation 23. The via 26 is a feedback terminal located at coordinates (100, 300) on the circuit under evaluation 23. The via 27 is a logic via located at the coordinates (100, 400) on the circuit under evaluation 23.

  The automatic inspection apparatus 10 applies a voltage to an arbitrary via installed in the circuit to be evaluated 23, measures a current flowing through the via, and indicates a relationship between the strength of the applied voltage and the magnitude of the measured current. Create a list of characteristics. Then, the automatic inspection device 10 transmits a list of voltage-current characteristics to the information processing device 16.

  The information processing device 16 determines the type of each via installed in the circuit under evaluation 23 from the list of voltage-current characteristics measured by the automatic inspection device 10. Then, the information processing apparatus 16 notifies the clip tester 20 of the position of the via determined to be the logic via among the vias installed in the circuit under evaluation 23. Thereafter, the clip tester 20 forcibly clamps the voltage of the via installed at the notified position to 0 V (volt), thereby generating a pseudo failure.

  In the following description, each part of the automatic inspection device 10, the information processing device 16, and the clip tester 20 will be described, and then the flow of processing executed by the automatic inspection device 10, the information processing device 16, and the clip tester 20 will be described. .

  First, the automatic inspection apparatus 10 will be described. As shown in FIG. 2, the automatic inspection apparatus 10 includes a voltage / current characteristic measuring instrument 11, a probe position notification unit 14, and a probe 15. The voltage / current characteristic measuring instrument 11 includes a voltage application unit 12 and a current measurement unit 13.

  The probe 15 contacts an arbitrary circuit portion in the circuit under evaluation 23 to connect the voltage / current characteristic measuring instrument 11 and an arbitrary circuit portion in the circuit under evaluation 23. For example, the probe 15 connects the vias 24 to 27 and the voltage / current characteristic measuring instrument 11 by contacting the vias 24 to 27 of the circuit under evaluation 23.

  The probe position notifying unit 14 notifies the voltage applying unit 12 of the coordinates indicating the position where the probe 15 is contacted among all the locations to be clamped by the circuit under evaluation 23. For example, when the probe 15 comes into contact with the via 24 of the circuit under evaluation 23, the probe position notification unit 14 notifies the voltage application unit 12 of the coordinates (100, 100) indicating the position of the via 24.

  The voltage application unit 12 applies the voltage to any via of the circuit under evaluation 23 while changing the voltage. Specifically, when the voltage application unit 12 is notified of the coordinates indicating the position of the via contacted by the probe 15 from the probe position notification unit 14, the voltage application unit 12 applies the voltage to the via contacted by the probe 15 via the probe 15. Apply while changing. For example, the voltage application unit 12 applies the voltage values “−1.2V”, “1.2V”, and “−1.2V” while changing the strength of the voltage so as to reciprocate.

  Then, the voltage application unit 12 creates a voltage list in which the coordinates of the via and the value of the applied voltage are stored in association with each other, and each time the voltage is applied to the via, the coordinate of the via is associated with the value of the applied voltage. And store it in the voltage list. Thereafter, the voltage application unit 12 transmits a voltage list to the determination unit 17 of the information processing device 16 when a voltage is applied to all the vias of the circuit under evaluation 23.

  For example, when the coordinates (100, 100) indicating the position of the via 24 are notified from the probe position notification unit 14, the voltage application unit 12 sends “−1.2 V”, “ The voltage is applied while changing so as to reciprocate between “1.2V” and “−1.2V”. Then, the voltage application unit 12 associates the coordinates (100, 100) indicating the position of the via 24 with the voltage value -1.2V to 1.2V applied while changing so as to reciprocate in the voltage list. Store.

  In addition, when the voltage application unit 12 is notified of the coordinates (100, 200) indicating the position of the via 25 from the probe position notification unit 14, the voltage application unit 12 supplies “−1.2 V” to the via 25 via the probe 15. A voltage is applied while changing so as to reciprocate between “1.2 V” and “−1.2 V”. Then, the voltage application unit 12 associates the coordinates (100, 200) indicating the position of the via 25 with the value of the voltage applied while changing so as to reciprocate—1.2 V to 1.2 V in the voltage list. Store.

  When the voltage application unit 12 is notified of the coordinates (100, 300) indicating the position of the via 26 from the probe position notification unit 14, the voltage application unit 12 supplies “−1.2 V” to the via 26 via the probe 15. A voltage is applied while changing so as to reciprocate between “1.2 V” and “−1.2 V”. Then, the voltage application unit 12 associates the coordinates (100, 300) indicating the position of the via 26 with the value of the voltage applied while reciprocating -1.2V to 1.2V in the voltage list. Store.

  Further, when the coordinates (100, 400) indicating the position of the via 27 are notified from the probe position notification unit 14, the voltage application unit 12 supplies “−1.2 V” to the via 27 via the probe 15. A voltage is applied while changing so as to reciprocate between “1.2 V” and “−1.2 V”. Then, the voltage application unit 12 associates the coordinates (100, 400) indicating the position of the via 27 with the value of the voltage applied while changing so as to reciprocate—1.2 V to 1.2 V in the voltage list. Store.

  Thereafter, when a voltage is applied to all the vias 24 to 27 of the circuit under evaluation 23, the voltage application unit 12 associates the coordinates of each via 24 to 27 with the value of the voltage applied to each via 24 to 27. The attached voltage list is transmitted to the determination unit 17 of the information processing device 16.

  When the voltage application unit 12 changes the voltage applied to any via, the current measurement unit 13 measures a change in the magnitude of the current flowing through the via to which the voltage is applied. Specifically, when the probe 15 comes into contact with any of the vias 24 to 27, the current measurement unit 13 measures the current value of the current flowing through the probe 15 through which the probe 15 is in contact. To do. That is, the current measuring unit 13 measures the current value of the current flowing through the via to which the voltage is applied by the voltage applying unit 12.

  The current measuring unit 13 creates a current list for storing the measured current values, and stores the measured current values in the current list every time the current values are measured. Thereafter, when the current measurement unit 13 measures current values for all the vias 24 to 27 included in the circuit under evaluation 23, the current measurement unit 13 processes the recurrent list storing the current values measured for the respective vias 24 to 27. It transmits to the discrimination | determination part 17 of the apparatus 16.

  For example, when the probe 15 is in contact with the via 24, the current measuring unit 13 measures the current value flowing through the via 24 and stores the measured current value in the current list. In addition, when the probe 15 is in contact with the via 25, the current measuring unit 13 measures the current value flowing through the via 25 and stores the measured current value in the current list.

  In addition, when the probe 15 is in contact with the via 26, the current measuring unit 13 measures the current value flowing through the via 26 and stores the measured current value in the current list. In addition, when the probe 15 is in contact with the via 27, the current measuring unit 13 measures the current value flowing through the via 27 and stores the measured current value in the current list. Thereafter, the current measurement unit 13 transmits a current list storing current values measured for the respective vias 24 to 27 to the determination unit 17 of the information processing device 16 described later.

  Thus, the voltage / current characteristic measuring instrument 11 measures the voltage / current characteristic of each of the vias 24 to 27 by applying a voltage to each of the vias 24 to 27 and measuring the current flowing due to the applied voltage. . The voltage / current characteristic measuring instrument 11 transmits the voltage / current characteristics of the vias 24 to 27 and the coordinates indicating the positions of the vias 24 to 27 to the information processing device 16.

  Next, each part of the information processing apparatus 16 will be described. The information processing device 16 includes a determination unit 17 and a condition storage unit 18. The condition storage unit 18 stores a plurality of conditions for determining the via type. Specifically, the condition storage unit 18 stores a condition for determining that a via is a power supply via and a condition for determining that a via is a feedback terminal.

  Here, the conditions stored in the condition storage unit 18 will be described. For example, the condition storage unit 18 stores conditions based on voltage-current characteristics of various vias measured in advance by the automatic inspection apparatus 10. That is, the condition storage unit 18 stores conditions based on experience values. An example of this condition is a discriminant set by the user based on, for example, the voltage-current characteristic of the power supply via, the voltage-current characteristic of the feedback terminal, and the voltage-current characteristic of the logic via, which are measured in advance.

  Here, an example of a discriminant based on the voltage-current characteristics of various vias will be described with reference to FIG. FIG. 3 is an example of voltage-current characteristics of vias whose types are determined. For example, in the graphs shown in “Power supply via example 1” and “Power supply via example 2” in FIG. 3, a larger current flows than the feedback terminal or the logic via. That is, since a current flows into the capacitor connected to the voltage via in the power supply via, a larger current flows than in the feedback terminal or the logic via.

  Therefore, the condition storage unit 18 stores a discriminant for determining whether or not a current larger than the current flowing through the feedback terminal or the logic via flows as a condition for determining the power via. For example, the condition storage unit 18 stores “Ia (Va = −1V) ≦ −290 mA or Ia (Va = 0.2 V) ≧ 1 mA” as a discriminant for determining that the via is a power supply via.

  Here, “Ia (Va = xV)” indicates “a magnitude of current measured when a voltage of xV is applied”. That is, the discriminant “Ia (x = −1 V) ≦ −290 mA” indicates a condition “whether or not a current of −290 mA or less flows when a voltage of −1 V is applied”. The discriminant “Ia (Va = 0.2 V) ≧ 1 mA” indicates a condition “whether a current of 1 mA or more flows when a voltage of 0.2 V is applied”. Since the discriminant indicating these conditions is connected with “or”, the discriminating unit 17 described later determines that the via is a power supply via when the measured voltage-current characteristic satisfies any of the conditions indicated by the discriminant. It is determined that

  Also, in the example of the graph shown in “Example 1 of feedback terminal” and the example of the graph shown in “Example 2 of feedback terminal” in FIG. 3, unlike the power supply via and the logic via, a current proportional to the applied voltage flows. That is, in the feedback terminal, a current proportional to the applied voltage flows due to the resistance factor of the feedback terminal.

  Therefore, the condition storage unit 18 stores a discriminant for determining whether or not the measured voltage-current characteristic has linearity as a condition for determining the feedback terminal. For example, the condition storage unit has “Ia (Va = 0.2 V) ≧ 20 μA and Ia (Va = 1 V) ≧ Ia (Va = 0.2 V) × 3 as a first discriminant for determining that the terminal is a feedback terminal. and Ia (Va = 1 V) ≦ Ia (Va = 0.2 V) × 7 ”. Here, “Ia (Va = 0.2 V) ≧ 20 μA” indicates a condition “whether or not a current of 20 μA or more flows when a voltage of 0.2 V is applied”.

  Also, “Ia (Va = 1V) ≧ Ia (Va = 0.2V) × 3” means that “when a voltage of 1 V is applied, it is three times or more when a voltage of 0.2 V is applied. The condition “whether or not current flows” is shown. “Ia (Va = 1 V) ≦ Ia (Va = 0.2 V) × 7” means that “when a voltage of 1 V is applied, a current not more than 7 times that when a voltage of 0.2 V is applied is applied. Indicates whether or not it flows. Since the discriminants indicating these conditions are connected with “and”, the discriminating unit 17 described later determines that the vias are inserted when the measured voltage-current characteristics satisfy all the conditions indicated by the first discriminant. It is determined that it is a feedback terminal.

  In addition, the condition storage unit 18 has “Ia (Va = 1 V) ≧ 50 μA and Ia (Va = −1 V) ≦ Ia (Va = 1 V) × −0.8 and as a second discriminant that determines that the terminal is a feedback terminal. “Ia (Va = −1V) ≧ Ia (Va = 1V) × −1.2” ”is stored. Here, “Ia (Va = 1V) ≧ 50 μA” indicates a condition “whether or not a current of 50 μA or more flows when a voltage of 1 V is applied”.

  Further, “Ia (Va = −1V) ≦ Ia (Va = 1V) × −0.8” means that “−1 .0 when a voltage of 1 V is applied when a voltage of −1 V is applied. The condition “whether or not a current of 8 times or less flows” is indicated. Further, “Ia (Va = −1V) ≧ Ia (Va = 1V) × −1.2” means “−1.2 times that when a voltage of 1V is applied when a voltage of −1V is applied. The condition “whether or not the above current flows” is shown. The determining unit 17 described later determines that the via is a feedback terminal when it is determined that the measured voltage-current characteristics satisfy all the conditions indicated by the second discriminant.

  Also, in the graphs shown in “logic via example 1” and “logic via example 2” in FIG. 3, a current as large as that of the power supply via is not measured, and proportional to the feedback terminal. The voltage / current characteristics are also not measured. For this reason, the condition storage unit 18 does not store a discriminant that indicates a condition for determining a logic via, and the determination unit 17 described later does not satisfy a condition for a measured via to identify each via. The via was determined to be a logic via.

  Returning to FIG. 2, the determination unit 17 applies the voltage by the voltage application unit 12 using the relationship between the strength of the voltage applied by the voltage application unit 12 and the magnitude of the current measured by the current measurement unit 13. Determine the type of via. When the change in the magnitude of the current measured by the current measurement unit 13 has linearity with respect to the strength of the voltage applied by the voltage application unit 12, the determination unit 17 determines the voltage application unit 12. The via to which the voltage is applied is discriminated as a feedback terminal.

  In addition, when the predetermined voltage is applied to the via of the circuit to be evaluated 23 by the voltage application unit 12, the determination unit 17 determines that the current measured by the current measurement unit 13 exceeds a predetermined threshold value. Then, it is determined that the via to which the voltage is applied is the power supply via.

  Specifically, the determination unit 17 acquires the voltage list created by the voltage application unit 12 and the current list created by the current measurement unit 13. Then, the determination unit 17 acquires the voltage / current characteristics of the vias 24 to 27 from the acquired voltage list and current list. Further, the determination unit 17 acquires a determination formula for determining a power supply via stored in the condition storage unit 18 and a determination formula for determining a feedback terminal.

  In addition, the determination unit 17 determines whether or not the acquired voltage-current characteristics of each of the vias 24 to 27 satisfy a determination formula for determining a power supply via. If the determination unit 17 determines that the measured voltage-current characteristics of each of the vias 24 to 27 satisfy the determination formula for determining the power via, the determination unit 17 determines that the via is a voltage via. If the determination unit 17 determines that the via is a voltage via, the determination unit 17 discards the coordinates indicating the position of the via determined to be a voltage via.

  Further, when the determination unit 17 determines that the measured voltage-current characteristics of each of the vias 24 to 27 do not satisfy the determination formula for determining the power supply via, the determined voltage-current characteristic is determined to be a feedback terminal. It is determined whether or not the first discriminant for satisfying is satisfied. If the determination unit 17 determines that the measured voltage-current characteristic satisfies the first discriminant for determining the feedback terminal, the determination unit 17 determines that the via is the feedback terminal.

  In addition, when the determination unit 17 determines that the measured voltage-current characteristic does not satisfy the first discriminant for determining the feedback terminal, the determination unit 17 determines the measured voltage-current characteristic as the feedback terminal. It is determined whether or not the two discriminant is satisfied. When determining that the measured voltage-current characteristic satisfies the second discriminant for determining the feedback terminal, the determining unit 17 determines that the via is the feedback terminal. Thereafter, when the determination unit 17 determines that the via is a feedback terminal, the determination unit 17 discards the coordinates indicating the position of the via determined to be the feedback terminal.

  Further, when the determination unit 17 determines that the measured voltage-current characteristic does not satisfy the second discriminant for determining the feedback terminal, the determination unit 17 determines that the via is a logic via. Thereafter, the determination unit 17 creates a coordinate list that stores coordinates indicating the positions of the vias determined to be logic vias, and each time the via is determined to be a logic via, the determination unit 17 is determined to be a logic via. Coordinates indicating via positions are stored in the coordinate list. Then, the determination unit 17 transmits the coordinate list to the information processing device 16.

  Hereinafter, a specific example of processing executed by the determination unit 17 will be described. For example, the determination unit 17 obtains the coordinates (100, 100) of the via 24 to which the voltage application unit 12 applied a voltage and the voltage-current characteristics of the via 24 illustrated in FIG. 4 from the voltage list and the current list. FIG. 4 is a diagram for explaining an example of the voltage-current characteristic of the power supply via.

  Here, in the example illustrated in FIG. 4, when the voltage application unit 12 applies a voltage of −1 V, a current of −290 mA or less is measured by the current measurement unit 13. In the example shown in FIG. 4, when the voltage application unit 12 applies a voltage of 0.2 V, the current measurement unit 13 measures a current of 1 mA or more.

  Therefore, in the example illustrated in FIG. 4, the determination unit 17 determines that the voltage / current characteristic of the via 24 satisfies the determination formula “Ia (Va = −1 V) ≦ −290 mA or Ia (Va = 0.2 V) ≧ 1 mA”. judge. As a result, the determination unit 17 determines that the via 24 at the coordinates (100, 100) is a power supply via. Then, the determination unit 17 discards the coordinates of the via 24 and excludes them from the clip test target.

  Further, the determination unit 17 acquires the coordinates (100, 200) of the via 25 to which the voltage application unit 12 applied a voltage, and the voltage-current characteristics of the via 25 illustrated in FIG. FIG. 5 is a diagram for explaining an example of the voltage-current characteristic of the power supply via.

  Here, in the example shown in FIG. 5, when the voltage application unit 12 applies a voltage of −1 V, a current of 0 A is measured by the current measurement unit 13, and when a voltage of 0.2 V is applied, current measurement is performed. A current of 20 μA is measured by the unit 13. As a result, in the example illustrated in FIG. 5, the determination unit 17 does not satisfy the determination formula “Ia (Va = −1 V) ≦ −290 mA or Ia (Va = 0.2 V) ≧ 1 mA”. Is determined.

  For this reason, the discriminator 17 determines that the voltage / current characteristics of the via 25 have the discriminant formula “Ia (Va = 0.2 V) ≧ 20 μA and Ia (Va = 1 V) ≧ Ia (Va = 0.2 V) × 3 and Ia (Va = 1V) ≦ Ia (Va = 0.2 V) × 7 ”is determined. In the example shown in FIG. 5, a current of 100 μA is measured when the voltage application unit 12 applies a voltage of 1V. That is, a current five times as large as when the voltage applying unit 12 applies a voltage of 0.2 V is measured.

  For this reason, the determination unit 17 determines that the voltage / current characteristic of the via 25 satisfies the first determination formula for determining that it is a feedback terminal. As a result, the determination unit 17 determines that the via 25 at the coordinates (100, 200) is a feedback terminal. Then, the determination unit 17 discards the coordinates of the via 25 and excludes them from the clip test target.

  In addition, the determination unit 17 acquires the coordinates (100, 300) of the via 26 to which the voltage application unit 12 applied a voltage and the voltage-current characteristics of the via 26 illustrated in FIG. FIG. 6 is a diagram (2) for explaining an example of the voltage-current characteristic of the feedback terminal.

  Here, in the example illustrated in FIG. 6, when the voltage application unit 12 applies a voltage of 1 V, a current of 50 μA is measured by the current measurement unit 13. In the example shown in FIG. 6, when the voltage application unit 12 applies a voltage of −1 V, a current of −45 μA is measured. That is, a current that is −0.9 times that when the voltage application unit 12 applies a voltage of 1 V is measured.

  For this reason, in the example illustrated in FIG. 6, the determination unit 17 does not satisfy the determination formula for determining that the voltage / current characteristic of the via 26 is a power supply via and the first determination formula for determining that the via 26 is a feedback terminal. Is determined. Then, the determination unit 17 determines that the voltage / current characteristics of the via 26 have a determination formula “Ia (Va = 1 V) ≧ 50 μA and Ia (Va = −1 V) ≦ Ia (Va = 1 V) × −0.8 and Ia (Va = −1 V) ≧ Ia (Va = 1 V) × −1.2 ”is satisfied.

  In the example shown in FIG. 6, when the voltage application unit 12 applies a voltage of 1 V, a current of 50 μA is measured by the current measurement unit 13, and when the voltage application unit 12 applies a voltage of −1 V, −45 μA. The current is being measured. That is, in the example illustrated in FIG. 6, when the voltage application unit 12 applies a voltage of −1 V, a current that is −0.9 times that when the voltage application unit 12 applies a voltage of 1 V is measured. Therefore, the determination unit 17 determines that the voltage / current characteristic of the via 26 satisfies the second determination formula for determining that it is a feedback terminal.

  As a result, the determination unit 17 determines that the via 26 at the coordinates (100, 300) is a feedback terminal. Then, the determination unit 17 discards the coordinates of the via 26 and excludes them from the clip test target.

  Further, the determination unit 17 acquires the coordinates (100, 400) of the via 27 to which the voltage application unit 12 applied a voltage and the voltage-current characteristics of the via 27 illustrated in FIG. FIG. 7 is a diagram for explaining an example of the voltage-current characteristic of the logic via.

  Here, when the voltage application unit 12 applies a voltage of −1 V, the determination unit 17 measures a current of −0.05 A by the current measurement unit 13 and the voltage application unit 12 applies a voltage of 0 V or more. A current of 0V is measured. For this reason, the determination unit 17 determines that the voltage / current characteristics of the via 27 do not satisfy the respective discriminants stored in the condition storage unit 18.

  As a result, the determination unit 17 determines that the via 27 is a logic via, and stores coordinates (100, 400) indicating the position of the via 27 determined to be a logic via in the coordinate list. Thereafter, the determination unit 17 determines the via type for all the vias of the circuit under evaluation 23, and transmits the coordinate list to the clip test execution unit 21.

  As described above, the information processing apparatus 16 can appropriately determine the type of via using the voltage-current characteristic. Further, the information processing apparatus 16 transmits only the coordinates of the logic via among the vias whose types are determined to the clip tester 20. For this reason, the information processing apparatus 16 can exclude the power supply via and the feedback terminal from the target of the clip test.

  Next, each part of the clip tester 20 will be described. The clip test execution unit 21 removes the power supply via and the feedback terminal from the target of the clip test among the vias 24 to 27 included in the circuit to be evaluated 23, and executes the clip test only on the logic via.

  Specifically, the clip test execution unit 21 acquires a coordinate list in which coordinates indicating the position of the logic via are stored from the determination unit 17. Then, the clip test execution unit 21 performs a clip test by bringing a probe 22 (to be described later) into contact with the logic via located at the coordinates of the acquired coordinate list.

  For example, the clip test execution unit 21 acquires a coordinate list in which the coordinates (100, 400) are stored from the determination unit 17. Then, the clip test execution unit 21 performs the clip test by bringing the probe 22 into contact with the logic via (via 27) located at the coordinates (100, 400).

  The probe 22 contacts an arbitrary circuit portion of the circuit to be evaluated 23 and forcibly fixes the potential of the contacted circuit portion to 0 V, thereby generating a pseudo failure. For example, the probe 22 contacts the via 27 of the circuit under evaluation 23 and fixes the potential of the via 27 to 0 V, thereby causing a pseudo failure.

  For example, the voltage / current characteristic measuring instrument 11, the voltage application unit 12, the current measurement unit 13, the probe position notification unit 14, the information processing device 16, the determination unit 17, and the clip test execution unit 21 are electronic circuits. Here, as an example of the electronic circuit, an integrated circuit such as an application specific integrated circuit (ASIC) or a field programmable gate array (FPGA), or a central processing unit (CPU) or a micro processing unit (MPU) is applied.

  The condition storage unit 18 is a semiconductor memory element such as a random access memory (RAM), a read only memory (ROM), or a flash memory, or a storage device such as a hard disk or an optical disk.

  Next, the flow of processing executed by the automatic inspection device 10, the information processing device 16, and the clip tester 20 according to the second embodiment will be described with reference to FIGS. FIG. 8 is a diagram for explaining the measurement phase. FIG. 9 is a diagram for explaining the separation phase. FIG. 10 is a diagram for explaining the clip test execution phase. As shown in FIGS. 8 to 10, the automatic inspection device 10 executes processing in the measurement phase, the information processing device 16 executes processing in the separation phase, and the clip tester 20 performs processing in the clip test execution phase. Run.

  First, the measurement phase will be described with reference to FIG. 8 among the processes executed by the automatic inspection apparatus 10. The automatic inspection apparatus 10 measures voltage-current characteristics at all points to be clamped as a measurement phase. That is, the automatic inspection apparatus 10 measures the voltage / current characteristics of the vias 24 to 27 of the circuit under evaluation 23. And the automatic test | inspection apparatus 10 produces the measurement result list | wrist of the voltage-current characteristic of each via | veer 24-27. Thereafter, the automatic inspection apparatus 10 transmits the created measurement result list to the information processing apparatus 16 and ends the measurement phase.

  Next, a separation phase executed by the information processing apparatus 16 will be described with reference to FIG. In the separation phase, the information processing device 16 separates vias that are not clamped using a discriminant that indicates a condition based on experience values. For example, the information processing device 16 receives a measurement result list from the automatic inspection device 10. Then, the information processing device 16 determines whether or not the voltage / current characteristics of each of the vias 24 to 27 included in the measurement result list satisfy the discriminant for determining the type of each via. Then, the information processing device 16 outputs a list of coordinates that can be clamped.

  That is, the information processing apparatus 16 excludes the coordinates of the power supply via and the coordinates of the feedback terminal, and outputs only the coordinates of the logic via. Thereafter, the information processing apparatus 16 transmits the output list to the clip tester 20, and ends the clip test execution phase.

  Here, the condition based on the empirical value is a condition based on voltage-current characteristics of various vias measured in advance. For example, the automatic inspection apparatus 10 applies a voltage of −3 V to 3 V so as to reciprocate to a plurality of vias whose types are determined in advance, and measures voltage-current characteristics. And the condition memory | storage part 18 memorize | stores the discriminant which shows the conditions which the user set based on the measured voltage-current characteristic.

  Next, a clip test execution phase executed by the clip tester 20 will be described with reference to FIG. First, the clip tester 20 receives a list of coordinates that can be clamped from the information processing device 16. Then, the clip tester 20 performs a clip test on the coordinates included in the received list.

  That is, the clip tester 20 performs the clip test only on the logic via that is the clamp target. For example, in the example illustrated in FIG. 10, the clip tester 20 performs the clip test only on the logic via 27 located at the coordinates (100, 400) among the vias included in the circuit to be evaluated 23.

  As described above, the automatic inspection apparatus 10 measures the voltage-current characteristics of the vias 24 to 27 included in the circuit under evaluation 23. In addition, the information processing device 16 determines the type of each via using the measured voltage-current characteristics of each of the vias 24 to 27. For this reason, the clip tester 20 can target only the vias 27 determined to be logic vias by the information processing device 16 among the vias 24 to 27.

[Processing flow of each device]
Next, a flow of processing executed by the automatic inspection device 10 and the information processing device 16 will be described with reference to FIG. FIG. 11 is a flowchart for explaining the flow of processing of each apparatus. The automatic inspection apparatus 10 starts processing by receiving a command for determining a via included in the circuit under evaluation 23 from a user as a trigger.

  First, the automatic inspection apparatus 10 moves the probe 15 to a via that is a measurement target of voltage-current characteristics (step S101). Next, the automatic inspection apparatus 10 applies a voltage to the via using the probe 15 (step S102). Then, the automatic inspection apparatus 10 measures the current flowing through the via to which the voltage is applied (Step S103).

  Next, the automatic inspection apparatus 10 determines whether or not voltage-current characteristics have been measured for all the vias included in the circuit under evaluation 23 (step S104). If the automatic inspection apparatus 10 determines that the voltage-current characteristics have not been measured for all the vias of the circuit under evaluation 23 (No at Step S104), the probe 15 is moved to the next via to be measured (Step S101). ). When the automatic inspection apparatus 10 determines that the voltage / current characteristics have been measured for all the vias included in the circuit to be evaluated 23 (Yes in step S104), the measured voltage / current characteristics of each via are sent to the information processing apparatus 16. Transmit (step S105).

  Next, when the information processing apparatus 16 receives the voltage-current characteristics of each via measured by the automatic inspection apparatus 10, the information processing apparatus 16 uses the measured voltage-current characteristics of each via to determine the type of each via. Is executed (step S106). Next, the information processing device 16 notifies the clip tester 20 of the position of the via determined to be a logic via (step S107). Thereafter, the information processing device 16 ends the process.

  Next, a process in which the information processing device 16 determines the type of each via will be described with reference to FIG. FIG. 12 is a flowchart for explaining processing for determining the type of each via.

  First, the information processing apparatus 16 determines whether or not all via types have been determined (step S201). Next, when the information processing apparatus 16 determines that all via types have not been determined (No in step S201), the measured voltage-current characteristic satisfies the condition for determining that the via is a power supply via. Whether or not (step S202).

  That is, the information processing apparatus 16 determines whether or not the voltage-current characteristic satisfies the discriminant “Ia (Va = −1 V) ≦ −290 mA or Ia (Va = 0.2 V) ≧ 1 mA”. When the information processing device 16 determines that the measured voltage-current characteristic satisfies the discriminant for determining that it is a power supply via (Yes in step S202), the information processing device 16 determines that the via is a power supply via, Not subject to clip test (step S203).

  Further, when the information processing device 16 determines that the voltage-current characteristic does not satisfy the discriminant for determining the power supply via (No in step S202), the information processing device 16 determines the first terminal for determining the feedback via. It is determined whether or not the expression is satisfied (step S204).

  That is, the information processing apparatus 16 determines that the discriminant “Ia (Va = 0.2 V) ≧ 20 μA and Ia (Va = 1 V) ≧ Ia (Va = 0.2 V) × 3 and Ia (Va = 1 V) ≦ Ia (Va = 0.2V) × 7 ”is determined whether or not the voltage-current characteristic is satisfied. If the information processing device 16 determines that the voltage-current characteristic satisfies the first discriminant for determining that it is a feedback terminal (Yes in step S204), it determines that the via is a feedback terminal, and clips It is excluded from the test target (step S205).

  Further, when the information processing device 16 determines that the voltage-current characteristic does not satisfy the condition in step S204 (No in step S204), the voltage-current characteristic satisfies the second discriminant for determining that it is a feedback terminal. It is determined whether or not (step S206).

  That is, the information processing apparatus 16 determines that the discriminant “Ia (Va = 1 V) ≧ 50 μA and Ia (Va = −1 V) ≦ Ia (Va = + 1 V) × −0.8 and Ia (Va = −1V) ≧ Ia ( It is determined whether or not the voltage-current characteristic satisfies “Va = + 1 V) × −1.2”. If the information processing device 16 determines that the voltage / current characteristic satisfies the second discriminant for determining that it is a feedback terminal (Yes in step S206), it determines that the via is a feedback terminal, and clips It is excluded from the test target (step S205).

  If the information processing device 16 determines that the voltage-current characteristic does not satisfy the condition in step S206 (No in step S206), the information processing device 16 can determine that the via is a logic via and clamp the coordinates indicating the position of the via. It adds to a coordinate list (step S207).

  Next, the information processing apparatus 16 determines whether or not all via types have been determined (step S208). If the information processing device 16 determines that the types of all vias have been determined (Yes at step S208), the processing ends. If the information processing device 16 determines that the type of all vias has not been determined (No at step S208), the information processing device 16 sets a condition for determining that the voltage-current characteristics of the vias whose types have not been determined are power supply vias. It is determined whether or not it is satisfied (step S202).

[Effect of Example 2]
As described above, the automatic inspection apparatus 10 and the information processing apparatus 16 according to the second embodiment measure the voltage / current characteristics of the vias 24 to 27 of the circuit under evaluation 23, and use the measured voltage / current characteristics. The type of the vias 24 to 27 is determined. For this reason, the automatic inspection device 10 and the information processing device 16 can appropriately determine the type of via in one measurement process.

  For example, since the automatic inspection apparatus 10 and the information processing apparatus 16 determine the type of via using the voltage-current characteristic of the via, it is possible to determine the feedback terminal and the logic via. In addition, since the automatic inspection apparatus 10 and the information processing apparatus 16 determine the via type using the voltage-current characteristics of the via, the via type is appropriately determined without misidentifying the power supply via and other types of vias. Can be determined.

  The information processing device 16 determines whether the via is a feedback terminal by determining whether the voltage-current characteristic is linear. Further, the information processing device 16 determines whether or not the via is a power supply via according to the magnitude of a current that flows when a predetermined voltage is applied. For this reason, the information processing apparatus 16 can appropriately determine the power supply via, the feedback terminal, and the logic via without misidentifying them.

  Although the embodiments of the present invention have been described so far, the embodiments may be implemented in various different forms other than the embodiments described above. Therefore, another embodiment included in the present invention will be described below as a third embodiment.

(1) Relationship between automatic inspection apparatus and information processing apparatus Although the automatic inspection apparatus 10 and the information processing apparatus 16 of the above-described second embodiment are separate apparatuses, the embodiment is not limited thereto. For example, the automatic inspection apparatus may be an automatic inspection apparatus having each part of the information processing apparatus. Moreover, you may implement as a clip tester which has an automatic test | inspection apparatus and information processing apparatus. In such a case, the probe for measuring the voltage-current characteristic and the probe for executing the clip test may be a common probe or probe.

(2) Conditions for discriminating between various vias In the second embodiment described above, a plurality of discriminants have been described as examples of conditions for discriminating various vias. However, the embodiments are not limited to this. Absent. For example, the voltage / current characteristics of a plurality of vias whose types are determined in advance by CAD data or the like may be measured, and different conditions may be calculated based on the voltage / current characteristics measured for various types of vias. For example, not only a discriminant but also a threshold value may be used as a condition.

  That is, if the measurement time of the voltage-current characteristic and the range of applied voltage are different, different measurement results may be obtained for the same via. For this reason, different conditions may be calculated according to the measurement time when measuring the voltage-current characteristics of the via whose type has been determined in advance.

(3) Intensity of applied voltage In Example 2 described above, a voltage of −1.2 V to 1.2 V was applied to determine the type of via. However, the embodiment is not limited to this, and a voltage in a different range may be applied depending on the circuit.

(4) Position for Measuring Voltage / Current Characteristics In the above-described embodiments, the voltage / current characteristics of vias were measured. However, the embodiments are not limited to this, and for example, terminal portions connected to vias, You may measure a voltage-current characteristic about arbitrary circuit parts on a to-be-evaluated circuit, such as a bonding wire.

(5) Program By the way, the measurement apparatus of Example 1, and the automatic test | inspection apparatus and information processing apparatus of Example 2 demonstrated the case where various processes were implement | achieved using hardware. However, the embodiment is not limited to this, and may be realized by executing a program prepared in advance by a computer included in the measurement device, the automatic inspection device, or the clip tester. Therefore, in the following, an example of a computer that executes a program having the same function as that of the measurement apparatus shown in the first embodiment will be described with reference to FIG. FIG. 13 is a diagram for describing an example of a computer that executes a measurement program.

  In the computer 200 illustrated in FIG. 13, a random access memory (RAM) 120, a read only memory (ROM) 130, and a hard disk drive (HDD) 150 are connected by a bus 180. Further, the computer 200 illustrated in FIG. 13 is connected to a CPU (Central Processing Unit) 140 via a bus 180. Further, the bus 180 includes an I / O (Input Output) 160 connected to a probe for applying a voltage to the via, and an I / O 170 connected to a probe for measuring the magnitude of the current flowing through the via. Is connected.

  In the ROM 130, a voltage application program 131, a current measurement program 132, and a discrimination program 133 are stored in advance. When the CPU 140 reads out and executes the respective programs 131 to 133 from the ROM 130, in the example illustrated in FIG. 13, the respective programs 131 to 133 function as a voltage application process 141, a current measurement process 142, and a determination process 143. . In addition, each process 141-143 exhibits the function similar to each part 2-4 shown in FIG. Moreover, each process 141-145 can also be made to exhibit the function equivalent to each part of Example 2. FIG.

  The measurement program described in the present embodiment can be realized by executing a program prepared in advance on a computer such as a personal computer or a workstation. This program can be distributed via a network such as the Internet. The program is recorded on a computer-readable recording medium such as a hard disk, a flexible disk (FD), a CD-ROM (Compact Disc Read Only Memory), an MO (Magneto Optical Disc), a DVD (Digital Versatile Disc). The The program can also be executed by being read from a recording medium by a computer.

DESCRIPTION OF SYMBOLS 1 Measuring apparatus 2 Voltage application part 3 Current measurement part 4 Discrimination part 10 Automatic inspection apparatus 11 Voltage current characteristic measuring instrument 12 Voltage application part 13 Current measurement part 16 Information processing apparatus 17 Discrimination part 20 Clip tester 23 Evaluated circuit 24-27 Via

Claims (7)

A voltage application unit for applying voltage to any via in the circuit while changing the voltage;
A current measuring unit that measures a change in a value of a current flowing through the via when the voltage applying unit is applied while changing the voltage to the via; and
And the change in voltage by the voltage applying portion is applied to the via, if the relationship between the change in the magnitude of the value of the measured current by the current measuring unit satisfies the voltage-current characteristics of the power supply via a pre measured Determining that the via is a power supply via, and determining that the via is a via associated with a feedback terminal if the relationship satisfies a voltage-current characteristic of the via associated with the feedback terminal measured in advance. but it does not satisfy the voltage-current characteristic of the via according to the voltage-current characteristic and the feedback terminal of the power supply via the measuring device, characterized in that the vias and a discrimination unit for discriminating as being logic via.   When the predetermined voltage is applied to the arbitrary via by the voltage application unit and the magnitude of the current measured by the current measurement unit exceeds a predetermined threshold, the determination unit The measuring apparatus according to claim 1, wherein it is determined that is a power supply via.   When the change in the magnitude of the current measured by the current measurement unit has a linearity with respect to the strength of the voltage applied by the voltage application unit, the determination unit determines the voltage by the voltage application unit. The measurement apparatus according to claim 1, wherein the via to which the voltage is applied is determined to be a via related to a feedback terminal.   The determination unit is configured to measure a current of −290 mA or less by the current measurement unit when a voltage of −1V is applied to the arbitrary via by the voltage application unit, or by the voltage application unit. 4. The method according to claim 1, wherein when a current of 1 mA or more is measured by the current measuring unit when a voltage of 0.2 V is applied, the via is determined as a power supply via. The measuring apparatus as described in any one.   The determination unit measures a current of 20 μA or more by the current measurement unit when a voltage of 0.2 V is applied to the arbitrary via by the voltage application unit, and the via is applied by the voltage application unit. When a current of 3 to 7 times the current measured when the voltage of 0.2 V is applied when a voltage of 1 V is applied to the current measurement unit, or by the voltage application unit When a voltage of 1 V is applied to the arbitrary via, a current of 50 μA or more is measured by the current measuring unit, and when a voltage of −1 V is applied to the via by the voltage applying unit, When a current that is −0.8 to −12 times the current measured when a voltage of 1 V is applied is measured by the current measurement unit, the via is determined to be a via related to a feedback terminal. The The measuring apparatus according to claim 1, wherein the measuring apparatus is characterized in that A voltage application procedure for applying voltage to any via in the circuit while changing the voltage;
A current measurement procedure for measuring a change in a value of a current flowing through the via when the voltage is applied to the via while changing the voltage in the voltage application procedure;
The change of the voltage applied to the via in the voltage application step, when the relationship between the change in the magnitude of the value of the measured current by the current measurement procedure satisfies the voltage-current characteristics of the power supply via a pre measured Determining that the via is a power supply via, and determining that the via is a via associated with a feedback terminal if the relationship satisfies a voltage-current characteristic of the via associated with the feedback terminal measured in advance. measurements but does not satisfy the voltage-current characteristic of the via according to the voltage-current characteristic and the feedback terminal of the power supply via is characterized in that to execute a determination procedure in which the vias is determined to be in the logic via the computer program. A voltage application process for applying voltage to any via in the circuit while changing the voltage;
A current measurement process for measuring a change in a value of a current flowing in the via when the voltage is applied to the via by changing the voltage by the voltage application process; and
The change of the voltage applied to the via in the voltage application process, when the relationship between the change in the magnitude of the value of the measured current by the current measuring process, meets the voltage-current characteristics of the power supply via a pre measured Determining that the via is a power supply via, and determining that the via is a via associated with a feedback terminal if the relationship satisfies a voltage-current characteristic of the via associated with the feedback terminal measured in advance. but it does not satisfy the voltage-current characteristic of the via according to the voltage-current characteristic and the feedback terminal of the power supply via a measurement method which comprises a determination process of the via is determined to be in logic via.

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