TW201400989A - Pattern drawing apparatus, pattern drawing method - Google Patents

Abstract

The uniformity of the illumination distribution of irradiation light (Re) on a substrate (S) may be improved for a pattern drawing device (1) wherein light incident on a spatial modulator (80) through a rod integrator (70) is modulated by a spatial light modulator (80) and irradiated onto the substrate (S). Provided is a light source array (60) having a plurality of light-emitting elements (601) which emits light with the brightness in accordance with the magnitude of a driving current (Id). The rod integrator (70) equalizes the illumination distribution for the light entering from the light source array (60). Also provided is an irradiation control unit (130) which individually controls the magnitude of the driving signal (Id) for each light-emitting element (601). Therefore, by individually controlling the brightness of the light-emitting element (601) the illumination distribution of the light incident on the subsequent rod integrator (70) can be suitably adjusted. As a result, it is possible to improve the uniformity of the illumination distribution of the irradiation light on an irradiation region (Re) using an optical head (6).

Description

Pattern drawing device, pattern drawing method

The present invention relates to a pattern drawing device and a pattern drawing method for illuminating a substrate by modulating a light incident on a spatial light modulator via an illuminance uniformizing element by a spatial modulator.

Conventionally, a pattern drawing device that draws a target such as a substrate coated with a photosensitive material such as a resist and exposes it into a pattern and draws a pattern on the drawing object is known. Further, in the pattern drawing device of Japanese Laid-Open Patent Publication No. 2006-337475, a spatial light modulator including a DMD (Digital Micromirror Device) is provided, and the spatial light modulator will be derived from the super The light of the high-pressure mercury lamp is modulated in accordance with the pattern to be formed and irradiated to the object to be drawn, and the pattern is drawn on the object to be drawn.

Incidentally, in such a pattern drawing device, in order to uniformly form a pattern, it is required that the illuminance distribution of the light to be irradiated to the drawing object must be uniform. Therefore, in Japanese Laid-Open Patent Publication No. 2006-337475, an illuminance uniformizing element, that is, an integrator, is provided in an optical path from an ultrahigh pressure mercury lamp to a spatial light modulator, and the uniformity of illuminance distribution is improved by the function of the integrator. After the light, the space light modulator is illuminated. Thereby, it is possible to uniformize the illuminance distribution of the light to be irradiated.

However, the luminance distribution of the light-emitting points of the ultra-high pressure mercury lamp may not be the same, and there may be unevenness. Once the optical system is condensed by an optical system such as an elliptical mirror and introduced into an illuminance equalizing element such as an integrator, the illuminance at the incident end of the integrator is obtained. distributed There will be serious unevenness. Further, even in the case where the optical fiber bundle arbitrarily arranged using the respective optical fibers is used to introduce light from the light source into the integrator, the illuminance distribution at the incident end of the integrator may not be the same. Thus, in the case where the illuminance distribution at the incident end of the integrator is uneven, the integrator has a limited ability to homogenize the illuminance distribution. Therefore, once the situation of unevenness is severe, it is not always possible to sufficiently ensure the uniformity of the illuminance distribution of the light that illuminates the object to be drawn. That is, when the illuminance distribution at the incident end of the integrator is such that the inability of the integrator cannot be compensated for, the uniformity of the illuminance distribution of the light that illuminates the object to be drawn becomes insufficient. Alternatively, the integrator itself may have a manufacturing error and a poor function, or the uniformity of the illuminance distribution of the light irradiated to the drawing object may be insufficient due to the unevenness of the transmittance or the reflectance of the optical element in the optical path.

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a pattern drawing device and a pattern that illuminate a light to be irradiated by a spatial light modulator by illuminating a device to illuminate a spatial light modulator. In the drawing method, not only the ability of the illuminance equalizing element but also the uniformity of the illuminance distribution of the illumination light to the drawing object can be improved.

In order to achieve the above object, a pattern drawing device according to the present invention includes: a light-emitting unit having a plurality of light-emitting portions that emit light in accordance with a brightness corresponding to a magnitude of a driving signal; and an illuminance equalizing element that is incident on the self-light-emitting unit Light is emitted after homogenizing the illuminance distribution of the light; the spatial light modulator is configured to modulate and illuminate the light emitted by the self-illumination uniformizing element to the drawing object; and drive the control unit to each of the light emitting parts Individually control the size of the drive signal.

In the invention (pattern drawing device) thus constituted, a light emitting unit is provided. The light-emitting portion has a plurality of light-emitting portions that emit light at a luminance corresponding to the magnitude of the drive signal; and the illuminance-homogenizing device uniformizes the illuminance distribution on the light incident from the light-emitting unit. Further, in the present invention, a drive control unit that individually controls the magnitude of the drive signal for each of the light-emitting portions is provided. Therefore, the brightness of each of the light-emitting portions can be individually controlled, and the illuminance distribution of the light incident to the illuminance-homogenizing element can be appropriately adjusted. As a result, not only the ability of the illuminance equalizing element but also the uniformity of the illuminance distribution of the illumination light to the drawing object can be improved.

However, while the light-emitting unit is relatively moved in the first direction with respect to the drawing object, the light emitted from the light-emitting unit is modulated by the spatial light modulator, and the pattern is drawn on the drawing device on the drawing target. The plurality of light-emitting portions may constitute a pattern drawing device so that the light is irradiated to a position different from each other in the second direction orthogonal to the first direction. In such a configuration, when the illuminance unevenness of the light to be irradiated is generated in the second direction, the difference in the exposure amount distribution is exhibited on the object to be drawn, which is not preferable. On the other hand, as long as the configuration of the driving signal is individually controlled for each of the light-emitting portions as described above, the occurrence of such illuminance unevenness in the second direction can be effectively suppressed.

Specifically, the pattern drawing device may be configured by a plurality of light-emitting portions that illuminate light at positions where the incident ends of the illuminance-homogenizing elements are different from each other in the second direction. In such a configuration, by individually controlling the size of the drive signal for each of the light-emitting portions, the illuminance of the light incident on the incident end of the illuminance-homogenizing element can be varied in the second direction. At this time, if the illuminance uniformity element incident end illuminance distribution changes in the second direction, Illumination equalizes the exit end of the component, and the illumination distribution also changes slightly in the second direction. Therefore, by utilizing the characteristics of the illuminance equalizing element, the size of the driving signal can be individually controlled for each of the light-emitting portions, and the illuminance distribution of the light after the illuminating uniformizing element exits the end can be adjusted, and the illuminance can be effectively suppressed. The illuminance unevenness in the second direction described above occurs.

In this case, the pattern drawing device may be configured such that each of the light-emitting portions emits light at a luminance corresponding to the magnitude of the drive signal, and a plurality of light-emitting elements each illuminating the light in the first direction are arranged. And the drive control unit collectively controls the magnitude of the drive signal for the plurality of light-emitting elements belonging to the same light-emitting portion. In such a configuration, the light-emitting regions of the plurality of light-emitting elements belonging to the same light-emitting portion are arranged in a direction (first direction) relative to the relative movement of the light-emitting unit to be drawn. Therefore, a plurality of light-emitting elements belonging to the same light-emitting portion are irradiated with light while moving in the first direction with respect to the drawing target, and are exposed in the same direction. Therefore, even if the illumination light of the light-emitting elements has uneven illuminance, the influence on the finally formed pattern is small. Therefore, it is also possible to control the size of the drive signal for a plurality of light-emitting elements belonging to the same light-emitting portion to simplify the drive control.

Specifically, the pattern drawing device may be configured such that each of the light-emitting portions emits light at a luminance corresponding to the magnitude of the drive signal, and is configured by a plurality of light-emitting elements that respectively illuminate the light with illumination. a position where the element incident ends are linearly arranged in the first direction; and the drive control unit drives the plurality of light-emitting elements belonging to the same light-emitting portion in common Control of the size of the motion signal. In such a configuration, the light-emitting regions of the plurality of light-emitting elements belonging to the same light-emitting portion are arranged in a direction (first direction) relative to the relative movement of the light-emitting unit to be drawn. Therefore, a plurality of light-emitting elements belonging to the same light-emitting portion are irradiated with light while moving in the first direction with respect to the drawing target, and are exposed in the same direction. Therefore, even if the illumination light of the light-emitting elements has uneven illuminance, the influence on the finally formed pattern is small. Therefore, it is also possible to collectively control the magnitude of the drive signal for a plurality of light-emitting elements belonging to the same light-emitting portion, thereby simplifying the drive control.

Further, the pattern drawing device may be configured to further include an illuminance detector that detects the illuminance distribution of the light emitted from the illuminance uniformizing element, and the driving control unit performs the detection result according to the illuminance detector. The light emitting sections individually control the magnitude of the drive signal. In such a configuration, since the size of the driving signal for each of the light-emitting portions is controlled based on the result of the illuminance distribution of the light after the illuminance uniformizing element is emitted, the illuminance of the illumination light to the drawing object can be more surely improved. Uniformity of distribution.

At this time, the illuminance detector may detect the illuminance distribution of the light that is irradiated on the drawing object to form a pattern drawing device. Thereby, the uniformity of the illuminance distribution of the illumination light to the drawing object can be more reliably improved.

In addition, as the spatial light modulator, various types can be used. Therefore, the spatial light modulator can be configured as a DMD to form a pattern drawing device.

Further, in order to achieve the above object, the pattern drawing method of the present invention is characterized in that the step of individually controlling the magnitude of the driving signal for each of the light-emitting portions is provided, and the driving signal is supplied to correspond to the magnitude of the driving signal. a plurality of light-emitting portions that emit light with luminance; a step of causing light from a plurality of light-emitting portions to be incident on an illuminance-homogenizing element that homogenizes and emits the incident light; and a light that emits the self-illuminating uniformizing element to the spatial light The modulator modulates and illuminates the step of rendering the object.

In the invention (pattern drawing method) configured as described above, a plurality of light-emitting portions that emit light in accordance with the brightness of the magnitude of the driving signal are provided, and the illuminance-homogenizing device uniformly distributes the illuminance distribution of the light incident from the plurality of light-emitting portions. Chemical. Further, in the present invention, a step of individually controlling the magnitude of the drive signal for each of the light-emitting portions is provided. Therefore, the brightness can be individually controlled for each of the light-emitting portions, and the illuminance distribution of the light incident to the illuminance-homogenizing element can be appropriately adjusted. As a result, not only the ability of the illuminance equalizing element but also the uniformity of the illuminance distribution of the illumination light to the drawing object can be improved.

According to the present invention, the light that is incident on the spatial light modulator via the illuminance equalizing element is modulated by the spatial light modulator to illuminate the pattern drawing device and the pattern drawing method of the drawing object, thereby not only improving the illuminance uniformizing element The ability to improve the uniformity of the distribution of the illumination to the object to be drawn.

[Embodiment]

Fig. 1 is a side view schematically showing an example of a pattern drawing device to which the present invention is applicable. Fig. 2 is a partial plan view schematically showing the pattern drawing device of Fig. 1. Fig. 3 is a partial plan view showing the conveying mechanism of the optical sensor. In order to display the positional relationship of each part of the pattern drawing device 1, in the figures, it is suitable to display the XYZ orthogonal coordinates in the vertical direction of the Z-axis direction. axis. Further, the side of the arrow in the graph of each coordinate axis is referred to as a positive side as needed, and the side opposite to the arrow in the figure of each coordinate axis is referred to as a negative side.

The pattern drawing device 1 is a substrate 11 that is loaded from the negative side of the Y-axis direction, and is loaded into the substrate S inside the device, and is patterned by the pattern of the exposure, and the substrate 12 is drawn from the positive side in the Y-axis direction. S moved out. The substrate S is a semiconductor substrate coated with a photosensitive material such as a resist or a substrate for FPC (Flexible Printed Circuits) on its upper surface (one main plane), a plasma display device or an organic EL (Electro-Luminescence) : electroluminescence) A glass substrate for a surface display device such as a display device, or a printed circuit board or the like. The pattern drawing device 1 has a schematic configuration including a support portion 3 that supports the substrate S loaded therein, an exposure portion 5 that exposes the substrate S supported by the support portion 3, and an imaging portion that photographs the alignment mark of the substrate S. 9; and controller 100 of each of the 3, 5, and 9 controls.

The support portion 3 is provided with a support table 31 that adsorbs and supports the substrate S placed on the upper surface thereof, and a pair of peeling rollers 32 that are provided on both sides of the support table 31 on the Y-axis direction. That is, the support table 31 has a plurality of suction holes on the horizontally formed upper surface, and the suction holes are attracted by the suction mechanism (not shown), and the substrate S placed on the upper surface of the support table 31 is adsorbed to the support table. on. Thereby, the substrate S loaded therein can be reliably supported by the support table 31, and the pattern drawing of the substrate S can be performed stably. When the substrate S is finished and the substrate S is finished, the suction of the suction holes is stopped, and the pair of peeling rollers 32 are lifted up to lift the substrate S, thereby peeling off the substrate S from the support table 31.

Further, in the support portion 3, the support base 31 is connected to the movable member 37a of the linear motor 37 via the lift table 33, the turntable 34, and the support plate 35. Therefore, The support 31 is freely movable up and down by the lift table 33, and is freely rotatable by the turntable 34. Further, by driving the movable member 37a along the stator 37b of the linear motor 37 extending in the Y-axis direction, the support table 31 can be driven in the Y-axis direction within the range from the inlet 11 to the outlet 12. Further, the pair of peeling rollers 32 are also moved in accordance with the support table 31.

Further, as shown in FIG. 3, the support table 31 is provided with illumination at the front end portion of the support table 31 in the Y-axis direction to detect the light that the optical head 6 is irradiated on the surface (equivalent position) of the substrate S supported by the support table 31. The distributed optical sensor SC and the transport mechanism 20 that moves the optical sensor SC in the X-axis direction. The optical sensor SC is disposed on the (+Y) side of the support table 31 on the upper surface of the support table 31. As will be understood later, when the operation of adjusting the illuminance distribution of the light by the optical head 6 is performed, the optical head 6 is placed in the optical sensor SC by moving the support table 31 in the main scanning direction (Y-axis direction). The state above.

The optical sensor SC has a structure in which a pinhole, a diffusion plate, and a photodiode which is a light receiving element are disposed inside the casing 41. The modulated light of the two-dimensional region irradiated from the optical head 6 is introduced into the inside of the casing 41 to detect the amount of light. The transport mechanism 20 includes a ball screw 21 disposed in the sub-scanning direction (X-axis direction), two guide rails 22 fixed to the support table 31 and disposed in the sub-scanning direction of the support frame 41, and a ball screw connected thereto. 21 motor 23.

When the pattern drawing device 1 is operated by the illuminance distribution of the detection light described later, the ball screw 21 is rotated by the motor 23 of the conveying mechanism 20, and the optical sensor SC is specified along the guide rail 22, that is, along the sub-scanning direction. Move in direction. Thereby, the modulated light irradiated from the optical head 6 is sequentially received and detected by each of the light-emitting elements 601 by the photodiode of the optical sensor SC. The detected optical signals are sent to the illumination control unit 130 for storage and subjected to specific arithmetic processing.

Here, the optical sensor SC detects light by moving by the driving of the transport mechanism 20 while receiving light. However, the specific form of the detection light is not limited to this. Therefore, the optical sensor SC may be fixedly disposed with respect to the support base 31 without providing the transport mechanism 20. In this case, the optical sensor SC detects light relative to the optical head 6 by relative movement of the main scanning direction of the support table 31 and the sub-scanning direction of the support table 51.

The exposure unit 5 has a plurality of optical heads 6 that are disposed on the upper side with respect to the movable area of the support base 31. Each of the optical heads 6 emits light to the substrate S supported by the support table 31 below, and exposes the substrate S. Further, a plurality of optical heads 6 are arranged in the X-axis direction, and are exposed to mutually different regions in the X-axis direction. Further, the support table 51 supporting the plurality of optical heads 6 is freely movable to the linear guide 52 along one of the X-axis directions. Therefore, the support table is driven along the linear guide 52 by a linear motor (not shown), and the plurality of optical heads 6 can be moved in the X-axis direction in common.

The imaging unit 9 has two CCD (Charge Coupled Device) cameras 91 arranged at intervals in the X-axis direction. These CCD cameras 91 are configured to be freely movable in the X-axis direction by a drive mechanism (not shown), and are moved above the alignment marks formed on the substrate S to take the alignment marks.

The outline of the mechanical configuration of the above-described pattern drawing device 1. Then, just The controller 100 will be described as an electrical configuration of the pattern drawing device 1. The controller 100 mainly performs an operation of scanning the surface of the substrate S supported by the support table 31 by the irradiation of the optical head 6 and drawing a pattern on the surface of the substrate S, and the data processing unit 110 and the scanning control unit 120 are The illumination control unit 130 is configured.

The data processing unit 110 converts image data generated by CAD (computer aided design) or the like into drawing data, and outputs the image data to the scan control unit 120. On the other hand, the scan control unit 120 controls the movement of the support table 31 and the optical head 6 in the pattern drawing operation based on the drawing data. Further, the irradiation control unit 130 controls the irradiation of the light of the optical head 6 in the pattern drawing operation. More specifically, the pattern drawing operation is performed as follows.

When the pattern drawing operation is started, the controller 100 causes the imaging unit 9 to take an alignment mark attached to the substrate S. Further, the controller 100 adjusts the positional relationship between the support table 31 and the optical head 6 based on the imaging result of the imaging unit 9, and positions the plurality of optical heads 6 at positions where the exposure of the substrate S on the support table 31 is started.

When the positioning is completed, the support table 31 starts moving toward one side in the Y-axis direction (for example, the negative side of the Y-axis). Further, each of the plurality of optical heads 6 illuminates the surface of the substrate S that moves with the support table 31 with the pattern corresponding to the drawing material. Thereby, each of the plurality of optical heads 6 scans the substrate S in the Y-axis direction (main scanning direction), and forms a pattern (line diagram) of one line on the surface of the substrate S. In this manner, a plurality of line patterns corresponding to the number of the optical heads 6 are formed at intervals in the X-axis direction.

After the formation of the plurality of line graphs, the controller 100 causes the optical head 6 to be X. The axis direction (sub-scan direction) moves. Thereby, each of the plurality of optical heads 6 is opposed to a plurality of pre-formed line patterns. Further, when the support table 31 starts moving toward the other side (for example, the Y-axis positive side) of the Y-axis direction opposite to the opposite side, each of the plurality of optical heads 6 moves the substrate S with the support table 31. The surface illuminates the light of the pattern corresponding to the data.

In this manner, the illumination light of the optical head 6 is scanned between the plurality of line patterns formed in advance to form a new line pattern. In this manner, a plurality of line patterns are sequentially formed while intermittently moving the optical head 6 in the X-axis direction, and a pattern is drawn on the entire surface of the substrate S.

The outline of the above-described pattern drawing device 1. Next, the details of the optical head 6 will be described. Further, since the plurality of optical heads 6 have the same configuration, only one optical head 6 will be described here. Fig. 4 is a perspective view schematically showing a schematic configuration of an optical head.

The optical head 6 has a schematic configuration in which light emitted from the light source array 60 is incident on a spatial light modulator 80, which is a light modulator, via a rod integrator 70, and is modulated by spatial light. The light 80 that has been spatially modulated by the device 80 is irradiated to the irradiation region Re of the surface of the substrate S. As shown in FIG. 4, two optical arrays 60 are provided in the optical head 6, and a lens array 61 is disposed opposite to each of the light source arrays 60. Further, the light source array 60 and the lens array 61 that face each other are integrated as the light source panel 62.

Fig. 5 is a side view schematically showing a schematic configuration of a light source panel. Fig. 6 is a plan view schematically showing a schematic configuration of a light source panel. Fig. 7 is a perspective view schematically showing a schematic configuration of a light source panel. In the figures, the symbol Aoa indicates the optical axis direction of the optical head 6. In addition, the two light source panels 62 are only The wavelengths of the light emitted from the light-emitting elements are different, and the other configurations are identical to each other. Therefore, the following description basically shows one light source panel 62. As shown in FIGS. 5 to 7, the light source array 60 of the light source panel 62 has twelve light-emitting elements 601 arranged in two rows and four rows on the flat electrode substrate 602. At this time, the interval between the adjacent light-emitting elements 601 is equal regardless of the column direction or the row direction, and a plurality of light-emitting elements 601 are equally arranged. Here, in particular, a set of three light-emitting elements 601 arranged in the row direction is referred to as a light-emitting element row 601C.

Each of the light-emitting elements 601 is configured to emit light having a luminance corresponding to the driving current Id (FIG. 1), specifically, a bare wafer of an LED (Light Emitting Diode) that emits ultraviolet light. That is, in the present embodiment, a plurality of LEDs are arranged and used. More specifically, the light-emitting element 601 is composed of a ceramic package in which an LED chip having a square light-emitting region is housed. Further, a cover glass for protecting the inside is provided in front of each ceramic package.

One of the reasons for arranging a plurality of LEDs in this manner is as follows. Previously, an ultrahigh pressure mercury lamp was generally used as a light source. On the other hand, compared with the ultra-high pressure mercury lamp, the LED has the advantages of high efficiency, long life, monochromatic illumination and space saving. This embodiment focuses on such an advantage and uses an LED as a light source. However, a single LED system may lack the amount of light required for exposure. Therefore, a sufficient amount of light is ensured by arranging a plurality of LEDs. Moreover, since the ratio of the LED to the ultra-high pressure mercury lamp is obviously small, even if a plurality of LEDs are arranged, the advantage of saving space is not lost. Thus, this embodiment is achieved by arranging a plurality of LEDs. Use, while ensuring a sufficient amount of light, while effectively playing the advantages of LED.

On the other hand, the lens array 61 of the light source panel 62 corresponds to the twelve light-emitting elements 601 one-to-one, and the lens groups forming the image of the light-emitting areas of the respective LED chips are arranged in the same manner as the arrangement of the LED chips. 12 vertical and horizontal two-dimensional 3×4, and each of the light-emitting elements 601 is formed of two of the first lens 611 and the second convex lens 612 which are biconvex, as viewed from the side of the light-emitting element 601. The lens group is configured by being mounted on a frame. That is, in the same manner as the arrangement of the light-emitting elements 601 of the light source array 60, in the lens array 61, the twelve first lenses 611 and the twelve second lenses 612 are arranged in three rows and four rows, respectively. As described above, in each of the twelve light-emitting elements 601, the two lenses 611 and 612 are opposed to each other, and the light from each of the light-emitting elements 601 is transmitted through the first lens 611 and the second lens 612 to the outside of the light source panel 62. Further, as described above, two light source panels 62 are provided in the optical head 6. In these cases, the light-emitting element 601 of the light source panel 62a emits light having a center wavelength of 385 [nm], and the light-emitting element 601 of the light source panel 62b emits light having a center wavelength of 365 [nm]. That is, the light source panels 62a, 62b emit light having different center wavelengths from each other.

Returning to Figure 4, the description of Continuation Optics 6 is continued. The light beams respectively emitted from the two light source panels 62 are incident on the dichroic mirror 63. The dichroic mirror 63 faces the light source panel 62a while facing the other side (reverse side) of the light source panel 62a. Further, light (12 lights) from each of the light-emitting elements 601 of the light source panel 62a is transmitted from one surface of the dichroic mirror 63 to the other surface; and light (12 light) from each of the light-emitting elements 601 of the light source panel 62b, In the double The other side of the color mirror 63 reflects. In this manner, light of different center wavelengths is synthesized by the dichroic mirror 63.

Incidentally, since the difference in the center wavelength of the light synthesized by the dichroic mirror 63 is about 20 [nm], the dichroic mirror 63 is required to have the characteristic of the spectral reflectance (the spectral transmittance) of the inclined edge. On the other hand, when the incident angle to the dichroic mirror 63 is 45 degrees or more, the optical characteristics of the PS polarized component are separated and the tilt property is not obtained. Therefore, the light beams respectively emitted from the light source panels 62a and 62b are set such that the incident angle incident on the dichroic mirror 63 is less than 40 degrees.

The twelve light beams emitted from the dichroic mirror 63 are incident on the lens array 64. The lens array 64 has the same configuration as the lens array 61, and has twelve lenses 641 arranged in a one-to-one correspondence with the twelve light-emitting elements 601. That is, the lens array 64 is provided with twelve lenses 641 that correspond one-to-one with the twelve lights emitted from the dichroic mirror 63. Further, an enlarged projection image of each of the corresponding light-emitting elements 601 is formed on each of the lenses 641, and each of the light-emitting elements 601 and the corresponding lenses 641 are optically conjugated, and each lens 641 is used as a field lens. Play the function. Therefore, after the respective lights emitted from the dichroic mirror 63 pass through the lens 641, the chief ray is parallel to the optical axis direction. In this way, it becomes the system which is emitted from the lens array 64, and the main beam is 12 beams parallel to the optical axis.

The light emitted from the lens array 64 is incident on the optical system 65 composed of the three lenses 65a, 65b, and 65c. The optical system 65 is a telecentric optical system on both sides, and the image of the lens array 64 is reduced and projected onto the incident end 70a of the rod accumulator 70, and the light emitted from the optical system 65 is incident in such a manner that the chief ray is parallel to the optical axis. To the rod totalizer 70.

FIG. 8 is an optical path diagram of light incident on the rod totalizer 70. In the figure, the symbol No. Aoa indicates the optical axis direction of the optical head 6. As shown in the figure, the light emitted from the light source array 60 is imaged on the lens array 64 by the lens array 61. The imaging magnification at this time is set such that the image of the light-emitting element 601 of the light source array 60 is equal to or larger than the shape of the lens 641 of the lens array 64. Further, the shape of the lens array 64 is similar to the shape of the incident end 70a of the rod totalizer 70. The light transmitted through the lens array 64 is incident on the bilateral telecentric optical system 65 as parallel light in which the chief ray is parallel to the optical axis direction Aoa. Further, the light emitted from the optical system 65 is reduced as parallel light which is parallel to the optical axis direction Aoa, and is projected and projected on the incident end 70a of the rod totalizer 70.

Returning to Figure 4, the description continues. The rod totalizer 70 homogenizes the light incident on the incident end 70a to illuminate the light, and emits it from the exit end 70b. Further, as the rod totalizer 70, various types such as a hollow rod type or a solid rod type can be used. Further, although the incident end 70a and the exit end 70b of the rod totalizer 70 are similar to each other, the sizes of the rod totalizers 70a need not be the same, and the rod-shaped totalizer 70 may be formed from the incident ends 70a to 70b.

The light emitted from the exit end 70b of the rod totalizer 70 is incident on the spatial light modulator 80 via the two lenses 66, the plane mirror 67a, and the concave mirror 67b. In addition, the exit end 70b of the rod totalizer 70 is optically conjugated to the spatial light modulator 80. The spatial light modulator 80 is constructed by a DMD in which a plurality of micromirrors are arranged in a lattice shape. The micromirror of the spatial light modulator 80 is controlled by a control signal from the illumination control unit 130, and adopts a posture corresponding to either the open state or the closed state. The micromirror corresponding to the posture of the open state, the light from the rod totalizer 70 is directed to the first projection lens 68 reflections. On the other hand, the microlens corresponding to the posture of the closed state reflects the light from the rod totalizer 70 in a direction deviating from the first projection lens 68. Therefore, the light from the rod totalizer 70 is reflected by the micromirror in the open state of the spatial light modulator 80, and is incident on the first projection lens 68.

Further, the first projection lens 68 and the second projection lens 69 have a function as a pair of projection lenses, and after adjusting the magnification by changing the interval therebetween, the image of the spatial light modulator 80 is projected on the surface of the substrate S. Irradiation area Re. In addition, the micromirror of the spatial light modulator 80 and the illumination region Re of the surface of the substrate S are optically conjugated. Further, the optical head 6 shown in Fig. 4 is provided with an autofocus mechanism 95 for automatically adjusting the focus. The autofocus mechanism 95 is configured by an illuminating unit 96 that illuminates the irradiation area Re and a light receiving unit 97 that receives reflected light from the irradiation area Re, and is driven in the vertical direction based on the light receiving result of the light receiving unit 97. 2 Projection lens 69, whereby the focus is automatically adjusted.

FIG. 9 is a plan view schematically showing an image of the light-emitting element 601 of the illumination rod totalizer 70. In the figure, the unit image IM is irradiated with light from one light-emitting element 601 to an image obtained by the rod totalizer 70. As shown in the figure, in the rod totalizer 70, twelve unit images are arranged in three rows and four rows, which are arranged in three rows and four rows corresponding to the twelve light-emitting elements 601 of the light source array 60. As a result, the three unit images IM irradiated by the three light-emitting elements 601 belonging to the 601C of the same light-emitting element row are linearly arranged in the direction corresponding to the Y-axis direction of the substrate S to constitute the unit image line IMC. That is, the three unit images IM belonging to the same unit image line IMC are arranged in the scanning direction of the light corresponding to the substrate S, that is, in the direction of the Y-axis direction of the substrate S.

Further, in the present embodiment, as shown in Fig. 9, in order to adjust the illuminance distribution of the light of the illumination rod totalizer 70, the illuminance of the unit image IM can be individually changed. Specifically, the illumination control unit 130 individually controls the magnitude of the drive current Id for each of the light-emitting elements 601. Thereby, the luminance of the unit image IM is individually controlled for each of the light-emitting elements 601 by individually controlling the luminance thereof. Thereby, the illuminance distribution of the irradiation area Re can be adjusted. At this time, the irradiation control unit 130 controls the driving current Id of each of the light-emitting elements 601 based on the result of the illuminance distribution of the irradiation region Re detected by the optical sensor SC.

As described above, in the present embodiment, the light source array 60 is provided having a plurality of light-emitting elements 601 that emit light in accordance with the luminance of the driving current Id, and the rod totalizer 70 performs light incident on the light source array 60. Uniformity of illuminance distribution. Further, in the present embodiment, the illumination control unit 130 is provided to individually control the magnitude of the drive signal Id for each of the light-emitting elements 601. The rod totalizer 70 has a characteristic that when the illuminance is uneven in one of the incident ends 70a of the rod totalizer 70, the exit end 70b of the rod totalizer 70 also produces a slight illuminance distribution in the same direction. Therefore, the brightness can be individually controlled for each of the light-emitting elements 601, and the illuminance distribution of the exit end 70b of the rod totalizer 70 can be appropriately adjusted. As a result, not only the ability of the rod totalizer 70 but also the uniformity of the illuminance distribution of the exit end 70b of the rod totalizer 70 can be improved.

However, the pattern drawing device 1 of the present embodiment modulates the light emitted from the light source array 60 to the spatial light modulator 80 while relatively moving the light source array 60 in the Y-axis direction with respect to the surface of the substrate S. The surface of the substrate S is patterned. At this time, the illuminance of the light irradiated on the surface of the substrate S is uneven. When the X-axis direction is generated, the difference in the exposure amount distribution appears on the surface of the substrate S, which is not preferable. On the other hand, in the present embodiment, the emission end 70b of the rod totalizer 70 is projected onto the spatial modulation element 80, and further, the first projection lens 68 and the second projection lens 69 are projected onto the irradiation region Re. Since the size of the drive signal Id of the four light-emitting elements 601 in the mutually different regions in the X-axis direction is individually controlled for each of the light-emitting elements 601, the occurrence of illuminance unevenness in the X-axis direction can be effectively suppressed.

Further, in the present embodiment, an optical sensor SC that detects the illuminance distribution of the light emitted from the optical head 6 is provided. Further, the illumination control unit 130 individually controls the magnitude of the drive signal Id for each of the light-emitting elements 601 in accordance with the detection result of the optical sensor SC. In such a configuration, since the magnitude of the illumination signal Id for each of the light-emitting elements 601 can be controlled based on the detected illuminance distribution of the light emitted from the rod totalizer 70, the substrate S can be more surely improved. The uniformity of the illuminance distribution of the illumination of the surface.

In particular, in the present embodiment, the optical sensor SC detects the illuminance distribution of the light irradiated on the surface of the substrate S. Thereby, the uniformity of the illuminance distribution of the irradiation light to the surface of the substrate S can be more surely improved.

In the present embodiment, the pattern drawing device 1 corresponds to the "pattern drawing device" of the present invention, the substrate S corresponds to the "drawing object" of the present invention, and the light-emitting element 601 or the light-emitting element row 601C corresponds to the "lighting" of the present invention. The light source array 60 corresponds to the "light-emitting unit" of the present invention, the rod totalizer 70 corresponds to the "illuminance equalization element" of the present invention, and the spatial light modulator 80 corresponds to the "space light modulator" of the present invention. The illumination control unit 130 corresponds to the "drive control unit" of the present invention, and the drive current Id corresponds to the present invention. In the "drive signal", the Y-axis direction corresponds to the "first direction" of the present invention, the X-axis direction corresponds to the "second direction" of the present invention, and the optical sensor SC corresponds to the "illuminance detector" of the present invention.

Further, the present invention is not limited to the above-described embodiments, and various modifications can be made in addition to the above without departing from the spirit thereof. For example, in the above embodiment, the entirety of the twelve light-emitting elements 601 provided in the light source array 60 is individually controlled by the drive current Id. However, the application of the present invention is not limited thereto, and the present invention can also be applied to, for example, the following aspects.

As described above, the three light-emitting elements 601 belonging to the same light-emitting element row 601C are irradiated with light while moving relative to the surface of the substrate S, and are repeatedly exposed in the same region. Therefore, even if the respective illumination lights of the light-emitting elements 601 have illuminance unevenness, the influence on the finally formed pattern is small. Therefore, for the three light-emitting elements 601 belonging to the same light-emitting element row 601C, the magnitude of the drive current Id can be collectively controlled to simplify the drive control. Incidentally, in the related variation, the light-emitting element row 601C corresponds to the "light-emitting portion" of the present invention.

Further, in this modification, the same effects as described above can be achieved by individually controlling the magnitudes of the driving currents Id of the different light-emitting element rows 601C. FIG. 10 is a block diagram showing the circuits of the illumination control unit 130 for individually controlling the light-emitting elements 601. The three light-emitting elements 601 belonging to the same light-emitting element row 601C are connected in series, and the input end and the output end thereof are connected to the power source 100 via the DC-DC converter 102. Further, the current detecting unit 103 is connected in series to the output side of the three light-emitting elements 601, and the control sent to the DC-DC converter 101 is changed in the irradiation control unit 130 based on the detection result of the current detecting unit 103. The voltage, thereby controlling the drive current Id supplied to the three light-emitting elements 601. Further, a circuit having the same configuration is provided for each of the four rows of the light-emitting element rows 601C. Therefore, the driving current Id supplied to the light-emitting element 601 can be individually controlled for each of the light-emitting element rows 601C. Further, four DC-DC converters 101 corresponding to mutually different light-emitting element rows 601C are connected to the power source 100 via the AC-DC converter 102, and receive power supply.

Further, in the above embodiment, the drive signal Id sent to the light-emitting element 601 is controlled based on the result of detecting the illuminance distribution. Thereby, the integrated value (accumulated light amount) of the amount of light irradiated by the exposure can be made uniform over substantially the entire area of the substrate S. In this case, the integrated light amount profile indicating the relationship between the drive signal Id and the integrated light amount may be measured in advance, and stored in the illumination control unit 130 or the like in advance. Further, by controlling the drive signal Id based on the integrated light amount setting, the integrated light amount can be made uniform over substantially the entire area of the substrate S, and better pattern drawing can be performed.

Further, in the above embodiment, the brightness of the light-emitting element 601 is adjusted by controlling the magnitude of the drive current Id supplied to the light-emitting element 601. However, the driving voltage Vd supplied to the light-emitting element 601 can also be controlled to adjust the brightness of the light-emitting element 601.

Further, although specific values of the drive current Id and the drive voltage Vd are not particularly mentioned, the values may be variously changed. Therefore, for example, the values of the drive current Id and the drive voltage Vd may be set to be larger than the rated current and the rated voltage. Specifically, the rated current and the rated voltage may be twice or more or three times or more. Thereby, the brightness of the light-emitting element 601 can be remarkably improved.

Further, in the above embodiment, the same unit image line IMC is made 3 The exposure of the unit like IM on the same area of the surface of the substrate S is performed. However, it is also possible to expose the surface of the substrate S without using such a method of exposure. Specifically, when the substrate S is moved toward the X-axis direction of the unit image line IMC, the twelve light-emitting elements 601 are turned on, and the substrate S of the 12 unit images IM shown in FIG. 9 is irradiated. The way it is structured.

Further, the arrangement of the plurality of light-emitting elements 601 of the light source array 60 is not limited to the above. Therefore, the number of rows and the number of rows in which the plurality of light-emitting elements 601 are arranged can be appropriately changed, or the interval between the adjacent light-emitting elements 601 can be appropriately changed. Alternatively, a plurality of light-emitting elements 601 may be arranged in a manner other than the aspect of the array.

Further, in the above embodiment, the substrate S and the optical head 6 are relatively moved by moving the substrate S in the Y-axis direction. However, the substrate S and the optical head 6 can be relatively moved by moving the optical head 6 in the Y-axis direction.

Further, the configuration of the optical sensor SC that detects the illuminance distribution is not limited to the above. An illuminance distribution can also be detected using a separately provided two-dimensional image sensor. Further, the position at which the optical sensor SC detects the illuminance distribution is not limited to the surface of the substrate S. Therefore, one of the light incident on the spatial light modulator 80 can also be branched, and the optical sensor SC or a separately provided two-dimensional image sensor can be used to detect the illuminance distribution.

Moreover, the optical configuration of the optical head 6 is not limited to the above, and the addition, modification, and reduction of the optical elements constituting the optical element can be appropriately performed. Therefore, the optical system 65 from the light source array 60 to the rod totalizer 70 can also be excluded, and the rod totalizer 70 is disposed immediately after the lens array 64. Alternatively, all of the optical components from the light source array 60 to the rod totalizer 70 can be excluded, and immediately The rod totalizer 70 is disposed after the light source array 60.

Further, an integrator other than the rod totalizer 70 may be used. For example, a fly-eye lens integrator composed of a fly-eye lens may be used. That is to say, the fly-eye lens integrator can also function as an integrator that homogenizes the illuminance distribution. At this time, it is preferable to arrange the fly-eye lens integrator at a position where the chief ray of the light in the optical system 65 intersects the optical axis. Further, the shape of each of the lenses constituting the fly-eye lens integrator preferably forms a shape similar to that of the DMD 80.

Further, in the above embodiment, two lights of different wavelengths are combined. However, it is also possible to construct without such a combination of light. Alternatively, three light beams of different wavelengths may be combined. In this case, a plurality of dichroic mirrors may be used, and a dichroic color (orthogonal chirp, Phillips type, Worcester, etc.) may also be used. Alternatively, these may be used in combination.

The type of the light-emitting element 601 is not limited to the LED, and various other light sources can be used.

The present invention is applicable to a pattern drawing device and a pattern drawing method for illuminating a substrate by modulating light incident on a spatial light modulator through an illuminance equalizing element such as the rod totalizer 70 by a spatial light modulator.

1‧‧‧ pattern drawing device

3‧‧‧Support

5‧‧‧Exposure Department

6‧‧‧ Optical head

9‧‧‧Photography Department

11‧‧‧ Move in

12‧‧‧Moving out

20‧‧‧Transportation agency

21‧‧‧Rolling screw

22‧‧‧ rails

23‧‧‧Motor

31‧‧‧Support table

32‧‧‧ peeling roller

33‧‧‧ lifting platform

34‧‧‧Rotating table

35‧‧‧Support board

37‧‧‧Linear motor

37a‧‧‧ movable

37b‧‧‧fixer

41‧‧‧ frame

51‧‧‧Support table

52‧‧‧Linear Guides

60‧‧‧Optical array

61‧‧‧ lens array

62‧‧‧Light source panel

62a‧‧‧Light source panel

62b‧‧‧Light source panel

63‧‧‧Dual color mirror

64‧‧‧ lens array

65‧‧‧Optical system

65a‧‧ lens

65b‧‧ lens

65c‧‧ lens

66‧‧‧ lens

67a‧‧‧Optical mirror

67b‧‧‧Optical mirror

68‧‧‧ zoom lens

69‧‧‧ Objective lens

70‧‧‧ rod totalizer

70a‧‧‧Injected end

70b‧‧‧Outlet

80‧‧‧Space light modulator

91‧‧‧Camera

95‧‧‧Autofocus mechanism

96‧‧‧ Department of Irradiation

97‧‧‧Receiving Department

100‧‧‧ Controller

101‧‧‧DC-DC converter

102‧‧‧AC-DC Converter A

103‧‧‧ Current Detection Department

110‧‧‧Data Processing Department

120‧‧‧Scan Control Department

130‧‧‧Emission Control Department

601‧‧‧Lighting elements

601C‧‧‧Lighting element line

611‧‧‧1st lens

612‧‧‧1st lens

641‧‧‧ lens

IM‧‧‧ unit image

IMC‧‧‧ units like

Re‧‧‧illuminated area

S‧‧‧Substrate

SC‧‧‧Optical Sensor

Fig. 1 is a side view schematically showing an example of a pattern drawing device to which the present invention is applicable.

Fig. 2 is a partial plan view schematically showing the pattern drawing device of Fig. 1.

Fig. 3 is a partial plan view showing the conveying mechanism of the optical sensor.

Fig. 4 is a perspective view schematically showing a schematic configuration of an optical head.

Fig. 5 is a side view schematically showing a schematic configuration of a light source panel.

Fig. 6 is a plan view schematically showing a schematic configuration of a light source panel.

Fig. 7 is a perspective view schematically showing a schematic configuration of a light source panel.

Fig. 8 is a view showing a ray diagram of light incident on a rod totalizer.

Fig. 9 is a plan view schematically showing an example of an image of a light-emitting element of an illumination rod totalizer.

Fig. 10 is a block diagram showing an example of a circuit for individually controlling a light-emitting element.

6‧‧‧ Optical head

60‧‧‧Lighting elements

61‧‧‧ lens array

62‧‧‧Light source panel

62a‧‧‧Light source panel

62b‧‧‧Light source panel

63‧‧‧Dual color mirror

64‧‧‧ lens array

65‧‧‧Optical system

65a‧‧ lens

65b‧‧ lens

65c‧‧ lens

66‧‧‧ lens

67a‧‧‧Optical mirror

67b‧‧‧Optical mirror

68‧‧‧ zoom lens

69‧‧‧ Objective lens

70‧‧‧ rod totalizer

70a‧‧‧Injected end

70b‧‧‧Outlet

80‧‧‧Space light modulator

95‧‧‧Autofocus mechanism

96‧‧‧ Department of Irradiation

97‧‧‧Receiving Department

641‧‧‧ lens

Re‧‧‧illuminated area

Claims (7)

A pattern drawing device, comprising: a light emitting unit comprising a plurality of light emitting portions that emit light in brightness corresponding to a size of a driving signal; and an illuminance equalizing device that emits light from the light emitting unit The illuminance distribution of the light is uniformized and emitted; the spatial light modulator modulates and emits the light emitted from the illuminance equalizing element to the drawing object; and the driving control unit individually for each of the light emitting parts The size of the above drive signal is controlled. The pattern drawing device of claim 1, wherein the light emitted from the light-emitting unit is modulated by the spatial light modulator while the light-emitting unit is relatively moved in the first direction with respect to the drawing object; The pattern is drawn on the drawing target; and the plurality of light-emitting portions irradiate light to positions different from each other in the second direction orthogonal to the first direction. The pattern drawing device of claim 2, wherein the light-emitting portion is formed by a plurality of light-emitting elements, each of which emits light at a luminance corresponding to a magnitude of the driving signal, and each of which illuminates the first direction The driving control unit collectively controls the magnitude of the driving signal for the plurality of light-emitting elements belonging to the same light-emitting unit. A pattern drawing device as claimed in claim 1, wherein Furthermore, the illuminance detector for detecting the illuminance distribution of the light after the illuminance equalizing element is emitted is included; and the driving control unit individually controls the driving signal for each of the light emitting units according to the detection result of the illuminance detector. The size. The pattern drawing device of claim 4, wherein the illuminance detector detects an illuminance distribution of the light that is irradiated onto the drawing object. The pattern drawing device of any one of claims 1 to 5, wherein the spatial light modulator is a DMD. A pattern drawing method comprising the steps of individually controlling a size of a driving signal for each of the light-emitting portions, wherein the driving signal is supplied to a plurality of the light-emitting portions that emit light at a luminance corresponding to a magnitude of the driving signal; a step of illuminating the light from the plurality of light-emitting portions into an illuminance equalizing element that equalizes and emits the incident light; and modulating and illuminating the light emitted from the illuminance equalizing element by the spatial light modulator The step of depicting the object.