TW201400388A - Elevating module and elevating apparatus using the same - Google Patents

Elevating module and elevating apparatus using the same Download PDF

Info

Publication number
TW201400388A
TW201400388A TW102107484A TW102107484A TW201400388A TW 201400388 A TW201400388 A TW 201400388A TW 102107484 A TW102107484 A TW 102107484A TW 102107484 A TW102107484 A TW 102107484A TW 201400388 A TW201400388 A TW 201400388A
Authority
TW
Taiwan
Prior art keywords
lifting
rotating
lifting device
coupled
module
Prior art date
Application number
TW102107484A
Other languages
Chinese (zh)
Other versions
TWI623474B (en
Inventor
Suk-Min Ko
Jong-Il Jang
Original Assignee
Soonhan Eng Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Soonhan Eng Corp filed Critical Soonhan Eng Corp
Publication of TW201400388A publication Critical patent/TW201400388A/en
Application granted granted Critical
Publication of TWI623474B publication Critical patent/TWI623474B/en

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303Apparatus specially adapted to the manufacture of LCDs
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1313Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells specially adapted for a particular application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02Articles
    • B65G2201/0214Articles of special size, shape or weigh
    • B65G2201/022Flat

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Forklifts And Lifting Vehicles (AREA)
  • Liquid Crystal (AREA)

Abstract

The present invention provides an elevating module and the elevating apparatus using the same which can raise and lower a panel member directly with relatively simple structure, easily control of horizontal posture of the panel member, and precisely control the position of a heavy panel member. The elevating module of an embodiment of the present invention is comprised of: a fixed part (200) including a base member (210); a rotating device (300) which is coupled with the shaft member (220), formed on the base member (210), in a rotatable and vertically-movable manner; the elevating apparatus (400) which is connected to the rotating device (300) and the guide member (230), which moves up and down along on the guide member (230) formed on the fixed part (200) driven by the rotary motion and upward and downward motion of the rotating device (300); and the driving device (500) linked with the rotating device (300) and elevating apparatus (400) to rotate the rotating device (300). As set forth and described hereinabove, using the elevating module and the elevating apparatus using the same can move a plate member, such as an LCD or LED, directly up and down with simple structure, can control the level of the plate member, can handle heavy plate members maintaining level posture at high accuracy.

Description

升降模組及使用此模組之升降裝置 Lifting module and lifting device using the same

本發明係有關於升降模組,其可在保時水平姿勢的情形下攜帶一板構件,例如一LCD或LED面板上升或下降,以及使用該模組的升降裝置。更具體地說,一升降模組,其可以簡單的結構升高及降低板構件、輕易地控制該板片的水平姿勢、以及準確地將一重的板片升高及降低至所需高度,以及一使用該模組的升降裝置。 The present invention relates to a lifting module that can carry a panel member in a time-saturated horizontal position, such as an LCD or LED panel ascending or descending, and a lifting device using the module. More specifically, a lifting module capable of raising and lowering the plate member in a simple structure, easily controlling the horizontal posture of the plate, and accurately raising and lowering a heavy plate to a desired height, and A lifting device that uses the module.

在例如LCD及LED等板構件的製程中,該等會以水平姿勢升高或降低,以供進行例如說表面檢驗。 In the manufacturing process of plate members such as LCDs and LEDs, these may be raised or lowered in a horizontal posture for performing, for example, surface inspection.

傳統上,可以水平姿勢升高及降低板構件的升降裝置是使用至少一個或多個升降模組。在該等升降模組中,透過一步進馬達或一伺服馬達的旋轉,一升降構件的傾斜表面會沿著一固定構件的傾斜表面移動,以升高或降低升降模組。換言之,升降模組係呈楔形,以供進行升降運動。 Traditionally, lifting devices that can raise and lower the panel members in a horizontal position use at least one or more lifting modules. In the lifting modules, the inclined surface of a lifting member is moved along the inclined surface of a fixing member by a stepping motor or a servo motor to raise or lower the lifting module. In other words, the lifting module is wedge-shaped for lifting movement.

該等楔形的升降模組具有複雜的結構,透過 使用許多的動力轉換零件來將步進馬達或伺服馬達的旋轉運動轉換成升降構件的線性垂直運動。此種複雜的結構會造成準確控上升及下降運動及位置上的困難。 The wedge-shaped lifting modules have a complex structure A number of power conversion parts are used to convert the rotational motion of the stepper motor or servo motor into linear vertical motion of the lifting member. This complex structure can cause accurate control of ascending and descending movements and positional difficulties.

此外,包含有一個或多個上述升降模組的升降裝置在控制例如LCD或LED之類板構件的水平姿勢(水平)上有其困難。再者,此等升降模組在精確控制例如LCD或LED之類板構件的上升及下降位置上有其困難。 Further, the lifting device including one or more of the above-described lifting modules has difficulty in controlling the horizontal posture (horizontal) of a plate member such as an LCD or an LED. Moreover, such lifting modules have difficulties in accurately controlling the rise and fall positions of plate members such as LCDs or LEDs.

另一方面,當電視機之類平板顯示裝置的螢幕變得更寬時,顯示區域內所用的LCD及LED面板也會變得更大。因此之故,LCD或LED之類板構件的重量也會增加。但是,前面所述之習用的楔形升降模組及使用該模組的升降裝置在將重的LCD或LED面板以水平姿勢精確地保持於所需位置上有其困難。 On the other hand, when the screen of a flat panel display device such as a television becomes wider, the LCD and LED panels used in the display area also become larger. Therefore, the weight of the panel member such as an LCD or an LED is also increased. However, the conventional wedge-shaped lifting module described above and the lifting device using the same have difficulty in accurately holding the heavy LCD or LED panel in a desired position in a horizontal posture.

本發明的目的在於解決先前的升降模組及使用該模組的升降裝置的需求及/或問題。 It is an object of the present invention to address the need and/or problems of prior lift modules and lifting devices using the modules.

本發明之一目的在於提供一種升降模組,其可以簡單的結構來沿著垂直方向上升及下降,以及一種使用該升降模組的升降裝置。 An object of the present invention is to provide a lifting module which can be raised and lowered in a vertical direction with a simple structure, and a lifting device using the lifting module.

本發明之另一目的在於使其能夠輕易地控制板構件的水平姿勢。 Another object of the present invention is to make it possible to easily control the horizontal posture of the plate member.

本發明之再另一目的在於使其能夠在保持水 平姿勢下升高及降低一重的板構件。 Still another object of the present invention is to enable it to retain water Raise and lower a heavy plate member in a flat position.

本發明之再另一目的在於使其能夠準確地將一重的板構件升高及降低至在高度所需要的位置。 Still another object of the present invention is to enable it to accurately raise and lower a heavy panel member to a desired position at a height.

有關於本發明一實施例之用於達成至少一前述技術目的升降模組及使用該模組的升降裝置,係包括有下文中所描述的特點。 The lifting module for achieving at least one of the foregoing technical objects and the lifting device using the same according to an embodiment of the present invention include the features described below.

本發明的主要目的要使使其能夠以簡單的結構來直接升高及降低一板構件,輕易地控制該板構件的水平姿勢,以及精確地控制一重的板構件的位置。 The main object of the present invention is to enable it to directly raise and lower a plate member with a simple structure, to easily control the horizontal posture of the plate member, and to precisely control the position of a heavy plate member.

根據本發明的升降模組可包含:一固定裝置,包括一基座構件;一旋轉裝置,以可垂直移動的方式受旋轉運動的驅動而結合於設置在基座構件上的一軸桿構件上;一升降裝置,結合於旋轉裝置及一導引構件上,以使得該裝置可由旋轉裝置因旋轉運動所驅動的垂直移動運動加以沿著形成在固定裝置上的導引構件上下移動;以及驅動裝置,連結於旋轉裝置及升降裝置,以驅動旋轉裝置。 The lifting module according to the present invention may comprise: a fixing device comprising a base member; a rotating device coupled to a shaft member disposed on the base member by a rotationally movable driving in a vertically movable manner; a lifting device coupled to the rotating device and a guiding member such that the device can be moved up and down along a guiding member formed on the fixing device by a vertical moving motion driven by the rotating device by the rotating motion; and a driving device The rotating device and the lifting device are coupled to drive the rotating device.

在此種架構中,旋轉裝置係由固定環構件連接至升降裝置上,而固定環構件則連接至升降裝置上,一旋轉結合構件包括一旋轉環構件,其一端以可轉動方式連接至固定環構件,而另一端則連接至並隨旋轉裝置旋轉。 In this configuration, the rotating device is coupled to the lifting device by a retaining ring member, and the retaining ring member is coupled to the lifting device, a rotating coupling member including a rotating ring member rotatably coupled to the retaining ring at one end The member is connected to the other end and rotates with the rotating device.

在此種架構中,升降裝置可由結合於導引構件上的固定構件連接至導引構件上,而升降結合構件則包含一活動構件,其一側末端係以可移動方式連接至固定構 件,而另一側末端則結合至升降裝置。 In this configuration, the lifting device can be coupled to the guiding member by a fixing member coupled to the guiding member, and the lifting coupling member includes a movable member, one end of which is movably connected to the fixed structure And the other end is coupled to the lifting device.

此外,旋轉裝置可包括一旋轉構件,其係以可旋轉及垂直移動的方式形成在軸桿構件上。 Further, the rotating device may include a rotating member that is formed on the shaft member in a rotatable and vertically movable manner.

此外,軸桿構件可以是一滾珠螺桿,而旋轉構件則可以是一滾珠螺帽。 Further, the shaft member may be a ball screw, and the rotating member may be a ball nut.

此外,旋轉裝置可包括一個或多個結合構件,其連接旋轉構件及一旋轉環構件。 Additionally, the rotating device can include one or more coupling members that connect the rotating member and a rotating ring member.

此外,升降裝置可包括一升降構件,其係連接至固定環構件及一活動構件。 Further, the lifting device may include a lifting member coupled to the stationary ring member and a movable member.

此外,升降構件可形成有一貫穿孔,其內可設置軸桿構件及旋轉裝置。 Further, the lifting member may be formed with a continuous perforation in which a shaft member and a rotating device may be disposed.

此外,升降裝置可進一步包括一升降板,其係連接至升降構件。 Further, the lifting device may further include a lifting plate coupled to the lifting member.

此外,升降構件可設有一磁性構件。 Further, the lifting member may be provided with a magnetic member.

此外,驅動裝置可包含:一轉子,其係設置於旋轉裝置上,並設有一個或多個永久磁鐵;以及一定子,其係設置於升降裝置上,並可在供電時透過磁性旋轉轉子。 In addition, the driving device may include: a rotor disposed on the rotating device and provided with one or more permanent magnets; and a stator disposed on the lifting device and capable of transmitting the magnetic rotating rotor during power supply.

此外,本發明可進一步包含一測量裝置,其可連結於升降裝置而測量升降裝置向上/向下移動的距離。 Furthermore, the present invention may further comprise a measuring device connectable to the lifting device to measure the distance the lifting device moves up/down.

此外,測量裝置可進一步包含:一手動調整單元,其係以距基座構件一特定之距離結合於基座構件;一編碼器,連接至手動調整單元;以及一標尺構件,其係連接至升降裝置,以使其連結至編碼器。 Furthermore, the measuring device may further comprise: a manual adjustment unit coupled to the base member at a specific distance from the base member; an encoder coupled to the manual adjustment unit; and a scale member coupled to the lift The device is connected to the encoder.

此外,可另外設置一掉落防止裝置,其係建構成可防止升降裝置在不運轉時,因其自身重量而掉落。 Further, a drop preventing device may be additionally provided, which is constructed to prevent the lifting device from falling due to its own weight when it is not in operation.

此外,掉落防止裝置可包含掉落偵測感應器,分別安裝在導引構件及升降裝置上,以偵測升降裝置因其自身重量而致的掉落;以及一夾持單元,其係形成在基座構件上,並連接於掉落偵測感應器,以在升降裝置因自身重量而掉落時將其夾住。 In addition, the drop preventing device may include a drop detecting sensor respectively mounted on the guiding member and the lifting device to detect the falling of the lifting device due to its own weight; and a clamping unit that is formed On the base member, and connected to the drop detecting sensor to clamp the lifting device when it falls due to its own weight.

根據本發明一實施例的升降裝置包含:一裝置基座;一個或多個設置在裝置基座上的升降模組;以及固定在包含於升降模組內之升降裝置上的升降夾頭。 A lifting device according to an embodiment of the invention comprises: a device base; one or more lifting modules disposed on the base of the device; and a lifting chuck fixed to the lifting device included in the lifting module.

在此情形中,升降夾頭可裝設在升降裝置上並由磁力固定。 In this case, the lifting chuck can be mounted on the lifting device and fixed by magnetic force.

此外,升降夾頭進一步包含一輔助附著構件,其係固定在包含於升降裝置內的升降構件上。 Further, the lifting chuck further includes an auxiliary attachment member that is fixed to the lifting member included in the lifting device.

此外,升降構件可形成有水平控制突出部,而一個或多個可供至少一部分的該水平控制突出部插入其內的水平控制溝槽則形成於該輔助附著構件。 Further, the lifting member may be formed with a horizontal control protrusion, and one or more horizontal control grooves into which at least a portion of the horizontal control protrusion is inserted are formed in the auxiliary attachment member.

此外,水平控制突出部係以球形之一部分的形式形成於該升降構件的中心頂端,而水平控制溝槽則形成於輔助附著構件的底側上對應於水平控制突出部的位置。 Further, the horizontal control protrusion is formed at a center top end of the lifting member in the form of a spherical portion, and the horizontal control groove is formed at a position on the bottom side of the auxiliary attachment member corresponding to the horizontal control protrusion.

此外,水平控制溝槽係形成為複數個,該水平控制溝槽中至少一個具有對應於該水平控制突出部之形狀的形狀,該水平控制溝槽中至少一個具有只能讓該水平控制突出部沿向前及向後方向移動的形狀,該水平控制溝 槽中至少一個具有只能讓該水平控制突出部沿著向左及向右方向移動的形狀,以及該水平控制溝槽中至少一個具有可以讓該水平控制突出部沿所有方向移動的形狀。 Further, the horizontal control grooves are formed in plural, and at least one of the horizontal control grooves has a shape corresponding to a shape of the horizontal control protrusion, at least one of the horizontal control grooves having only the horizontal control protrusion a shape that moves in the forward and backward directions, the horizontal control groove At least one of the grooves has a shape that allows only the horizontal control protrusion to move in the left and right directions, and at least one of the horizontal control grooves has a shape that allows the horizontal control protrusion to move in all directions.

此外,升降夾頭可在一特定的間隙下裝設在升降裝置上。 In addition, the lifting chuck can be mounted on the lifting device at a specific clearance.

根據前面所述的本發明實施例,可以利用簡單的機構將例如LCD或LED之類的板構件升高或降低,其中一升降裝置連接至並由一旋轉裝置加以驅動,該旋轉裝置可由一驅動裝置加以在一軸桿構件向上及向下移動時,同時轉動。 According to the embodiments of the present invention described above, a plate member such as an LCD or an LED can be raised or lowered by a simple mechanism, wherein a lifting device is coupled to and driven by a rotating device, and the rotating device can be driven by a The device is rotated simultaneously as the shaft member moves up and down.

此外,本發明一實施例可控制一板構件的水平。 Moreover, an embodiment of the invention can control the level of a panel member.

此外,本發明一實施例可在保持水平的情形下將一重的板構件升高或降低。 Moreover, an embodiment of the present invention can raise or lower a heavy panel member while maintaining a level.

此外,本發明一實施例可將一重的板構件精確升高或降低至所需的位置處。 Moreover, an embodiment of the present invention can accurately raise or lower a heavy plate member to a desired position.

10‧‧‧升降裝置 10‧‧‧ lifting device

30‧‧‧升降夾頭 30‧‧‧ lifting chuck

31a‧‧‧水平控制溝槽 31a‧‧‧Horizontal control trench

200‧‧‧固定部 200‧‧‧ fixed department

220‧‧‧軸桿構件 220‧‧‧ shaft member

222‧‧‧止擋構件 222‧‧‧stop members

230‧‧‧導引構件 230‧‧‧Guide members

310‧‧‧旋轉構件 310‧‧‧Rotating components

330‧‧‧第二結合構件 330‧‧‧Second joint member

20‧‧‧裝置基座 20‧‧‧ device base

31‧‧‧輔助附著構件 31‧‧‧Auxiliary attachment members

100‧‧‧升降模組 100‧‧‧ lifting module

210‧‧‧基座構件 210‧‧‧Base member

221‧‧‧軸桿支撐構件 221‧‧‧ shaft support members

223‧‧‧止擋支撐構件 223‧‧‧stop support member

300‧‧‧旋轉裝置 300‧‧‧Rotating device

320‧‧‧第一結合構件 320‧‧‧First joint member

400‧‧‧升降裝置 400‧‧‧ lifting device

410‧‧‧升降構件 410‧‧‧ lifting member

420‧‧‧升降構件 420‧‧‧ Lifting members

421‧‧‧磁鐵支撐構件 421‧‧‧Magnet support member

422‧‧‧水平控制突出部 422‧‧‧Horizontal Control Projection

430‧‧‧磁鐵構件 430‧‧‧Magnetic components

500‧‧‧驅動裝置 500‧‧‧ drive

510‧‧‧轉子 510‧‧‧Rotor

520‧‧‧定子 520‧‧‧stator

600‧‧‧旋轉結合構件 600‧‧‧Rotary joint components

610‧‧‧固定環構件 610‧‧‧Fixed ring members

620‧‧‧旋轉環構件 620‧‧‧Rotating ring members

700‧‧‧升降結合構件 700‧‧‧ lifting joint components

710‧‧‧固定構件 710‧‧‧Fixed components

720‧‧‧活動構件 720‧‧‧Active components

800‧‧‧測量裝置 800‧‧‧Measurement device

810‧‧‧手動調整單元 810‧‧‧Manual adjustment unit

811‧‧‧調整單元支撐構件 811‧‧‧Adjustment unit support member

820‧‧‧編碼器 820‧‧‧Encoder

830‧‧‧標尺構件 830‧‧‧ ruler components

900‧‧‧掉落防止裝置 900‧‧‧Drop preventer

910、920‧‧‧掉落偵測感應器 910, 920‧‧‧Drop detection sensor

930‧‧‧夾持單元 930‧‧‧Clamping unit

931‧‧‧夾持單元支撐構件 931‧‧‧Clamping unit support member

932‧‧‧夾持構件 932‧‧‧Clamping members

第1圖是根據本發明之升降模組一實施例的立體圖。 Figure 1 is a perspective view of an embodiment of a lifting module in accordance with the present invention.

第2圖是根據本發明之升降模組一實施例的立體分解圖。 Figure 2 is an exploded perspective view of an embodiment of a lifting module in accordance with the present invention.

第3圖是沿著第1圖中線A-A’所取的剖面圖。 Fig. 3 is a cross-sectional view taken along line A-A' in Fig. 1.

第4a圖是本發明之升降模組一實施例的測量裝置的 放大立體圖,第4b圖是分解立體圖。 Figure 4a is a measuring device of an embodiment of the lifting module of the present invention An enlarged perspective view, and Fig. 4b is an exploded perspective view.

第5a圖是本發明之升降模組一實施例的掉落防止裝置的放大立體圖,第5b圖是分解立體圖。 Fig. 5a is an enlarged perspective view of the drop preventing device of the embodiment of the lifting module of the present invention, and Fig. 5b is an exploded perspective view.

第6圖是根據本發明之升降模組一實施例的立體圖,顯示其作動情形。 Figure 6 is a perspective view of an embodiment of a lifting module in accordance with the present invention showing its actuation.

第7圖是根據本發明之升降模組一實施例的剖面圖,顯示其作動情形。 Figure 7 is a cross-sectional view of an embodiment of a lifting module in accordance with the present invention showing its actuation.

第8圖是根據本發明之升降裝置一實施例的立體圖。 Figure 8 is a perspective view of an embodiment of a lifting device in accordance with the present invention.

第9圖是根據本發明之升降裝置一實施例的立體分解圖。 Figure 9 is an exploded perspective view of an embodiment of a lifting device in accordance with the present invention.

第10圖是根據本發明之升降裝置一實施例的立體圖,顯示其作動情形。 Figure 10 is a perspective view of an embodiment of a lifting device in accordance with the present invention showing its actuation.

第11圖是根據本發明之升降裝置一實施例的升降夾頭的底視圖。 Figure 11 is a bottom plan view of a lifting chuck according to an embodiment of the lifting device of the present invention.

第12圖是根據本發明之升降裝置一實施例的放大側視圖。 Figure 12 is an enlarged side elevational view of an embodiment of a lifting device in accordance with the present invention.

為有助於瞭解本發明的特點,下文中將更詳細地描述有關於本發明之實施例的升降模組及使用該模組的升降裝置。 To facilitate an understanding of the features of the present invention, a lifting module and an lifting device using the same will be described in more detail below with respect to embodiments of the present invention.

下文中所說明的例示性實施例係因其適合於展現本發明的技術特徵而選取的,並不是用來限制本發明的技術特徵及特點,而僅係用來例示本發明的實施。在不 脫離本發明之範疇的情形下,對於所討論的例示性實施例,其可有多種的變化及加添。因此,本發明的範圍應涵蓋所有的這些屬於申請專利範圍及其所有等效者內的變化、改良、及改變。為有助於瞭解下文所述的例示性實施例,在所有的附圖中將固定採用相同的編號模式,相關的組件/零件會以相同或擴張的數字加以標示。 The exemplified embodiments described below are selected for the purpose of illustrating the technical features of the present invention, and are not intended to limit the technical features and characteristics of the present invention, but are merely illustrative of the implementation of the present invention. Not Without departing from the scope of the invention, various variations and additions may be made to the illustrative embodiments discussed. Therefore, the scope of the invention is intended to cover all such modifications, modifications, and To assist in understanding the exemplary embodiments described below, the same numbering patterns will be used in all of the figures, and the associated components/parts will be labeled with the same or expanded numbers.

本發明的實施例實質是可以簡單的結構來將一板構件直接升高及降低、可以輕易地控該板構件的水平姿勢、且能精確地控制重的板構件的位置。 The embodiment of the present invention is substantially capable of directly raising and lowering a plate member in a simple structure, easily controlling the horizontal posture of the plate member, and accurately controlling the position of the heavy plate member.

如第2圖及第3圖之實施例所示,根據本發明的升降模組(100)包含:一固定部(200);一旋轉裝置(300);一升降裝置(400);以及一驅動裝置(500)。 As shown in the embodiments of Figures 2 and 3, the lifting module (100) according to the present invention comprises: a fixing portion (200); a rotating device (300); a lifting device (400); and a driving Device (500).

固定部(200)可進一步包含一基座構件(210),顯示第1圖至第3圖的實施例中。基座構件(210)並沒任何特別的限制,可以是任何能夠提供基座功能給升降模組(100)者。 The fixing portion (200) may further include a base member (210), which is shown in the embodiments of Figs. 1 to 3. The base member (210) is not particularly limited, and may be any one that can provide the function of the base to the lifting module (100).

如第2圖及第3圖之實施例所示,基座構件(210)可設有一軸桿構件(220),其可進一步以一可旋轉及垂直移動的方式設置將於稍後說明的該旋轉裝置(300)。軸桿構件(220)是使用一軸桿支撐構件(221)來形成於基座構件(210)上,如實施例的圖式所示。 As shown in the embodiments of Figures 2 and 3, the base member (210) may be provided with a shaft member (220) which may be further provided in a rotatable and vertically movable manner as will be described later. Rotating device (300). The shaft member (220) is formed on the base member (210) using a shaft support member (221) as shown in the drawings of the embodiment.

也就是說,軸桿支撐構件(221)可以使用螺栓等來加以形成於基座構件(210),如第2圖及第3圖的實施例所示。此外,軸桿構件(220)可透過將其一末 端插入軸桿支撐構件(221)內,並以螺栓或類似方式加以固定而形成在基座構件(210)上。雖然說明如上,但將軸桿構件(220)實施於基座構件(210)上的設計並不限於本文所例示的實施例,可以是能提供相同功能的任何一般知悉的設計。 That is, the shaft support member (221) can be formed on the base member (210) using a bolt or the like as shown in the embodiments of Figs. 2 and 3. In addition, the shaft member (220) can pass through The end is inserted into the shaft support member (221) and fixed by bolts or the like to be formed on the base member (210). Although illustrated above, the design of the shaft member (220) on the base member (210) is not limited to the embodiments illustrated herein, and can be any generally well-known design that provides the same functionality.

軸桿構件(220)可以是一滾珠螺桿。但是,軸桿構件(220)並不僅限於滾珠螺桿,可以是可供稍後會說明之旋轉裝置(300)以可旋轉及垂直移動的方式結合至其上的任何已知的裝置。 The shaft member (220) can be a ball screw. However, the shaft member (220) is not limited to the ball screw, and may be any known device to which the rotating device (300), which will be described later, is coupled in a rotatable and vertically movable manner.

如第2圖及第3圖的實施例所示,軸桿構件(220)可設有一個或多個止擋構件(220),其可限制稍後會說明的旋轉裝置(300)的移動距離。 As shown in the embodiments of Figures 2 and 3, the axle member (220) may be provided with one or more stop members (220) that limit the distance of movement of the rotating device (300) as will be described later. .

如第2圖及第3圖的實施例所示,一止擋構件(222)透過以螺栓鎖固於稍後會說明的軸桿支撐構件(221)上或類似方式而形成於軸桿構件(220)的一側。因此之故,可以限制旋轉裝置(300)在軸桿構件(220)上的下降距離。 As shown in the embodiments of FIGS. 2 and 3, a stopper member (222) is formed on the shaft member by bolting to a shaft support member (221) which will be described later or the like ( 220) on one side. Therefore, the falling distance of the rotating device (300) on the shaft member (220) can be limited.

此外,如第2圖及第3圖的實施例所示,一止擋支撐構件(223)透過以螺栓鎖固或類似方式設置於軸桿構件(220)的另一側。此外,如圖式中所示,另一止擋構件(222)可透過螺栓鎖固或類似方式而固定至止擋支撐構件(223),並設置於軸桿構件(220)上。因此之故,可以限制旋轉裝置(300)在軸桿構件(220)上的上升距離。 Further, as shown in the embodiments of Figs. 2 and 3, a stop support member (223) is disposed on the other side of the shaft member (220) by bolting or the like. Further, as shown in the drawing, another stop member (222) may be fixed to the stopper support member (223) by bolt locking or the like and provided on the shaft member (220). Therefore, the rising distance of the rotating device (300) on the shaft member (220) can be limited.

此外,旋轉裝置(300)的上升及下降距離可由設置在軸桿構件(220)二側末端的止擋構件(222)加以限制。 Further, the rising and falling distance of the rotating device (300) may be limited by a stopper member (222) provided at both ends of the shaft member (220).

如第1圖至第3圖之實施例所示,基座構件(210)可設有一導引構件(230),其可導引稍後會說明之升降裝置(400)的移動。導引構件(230)並不限制特定的結構,可以是能導引升降裝置(400)之移動的任何已知裝置。 As shown in the embodiment of Figures 1 to 3, the base member (210) can be provided with a guiding member (230) which can guide the movement of the lifting device (400) which will be described later. The guide member (230) is not limited to a particular configuration and may be any known device that can guide the movement of the lifting device (400).

如第2圖及第3圖的實施例所示,旋轉裝置(300)可形成於軸桿構件(220)上,而該軸桿構件則是形成於稍後會說明的固定部(200)的基座構件(210)。就此而言,旋轉裝置(300)可包括一旋轉構件(310),如圖式中之實施例所示。 As shown in the embodiments of Figs. 2 and 3, the rotating device (300) may be formed on the shaft member (220), and the shaft member is formed in the fixing portion (200) which will be described later. Base member (210). In this regard, the rotating device (300) can include a rotating member (310) as shown in the embodiment of the drawings.

如第2圖及第3圖的實施例所示,旋轉構件(310)可以可旋轉及垂直移動的方式形成在軸桿構件(220)。如先前說明的,當軸桿構件(220)是滾珠螺桿時,則旋轉構件(310)可以是一滾珠螺帽,其可沿著該滾珠螺桿旋轉及垂直移動。但是,旋轉構件(310)並不限於滾珠螺桿,可以是能以可旋轉及垂直移動的方式結合於軸桿構件(220)上的任何已知裝置。 As shown in the embodiments of Figures 2 and 3, the rotating member (310) can be formed on the shaft member (220) in a rotatable and vertically movable manner. As previously explained, when the shaft member (220) is a ball screw, the rotating member (310) can be a ball nut that can be rotated and moved vertically along the ball screw. However, the rotating member (310) is not limited to a ball screw and may be any known device that can be coupled to the shaft member (220) in a rotatable and vertically movable manner.

此外,如第2圖及第3圖的實施例所示,旋轉裝置(300)進一步包括一個或多個結合構件(320、330)。結合構件(320、330)可連接先前說明過的旋轉構件(310)及旋轉環構件(620),該旋轉環構件是包含 於稍後會說明且連接著旋轉裝置(300)及升降裝置(400)的旋轉結合構件(600)內。 Furthermore, as shown in the embodiments of Figures 2 and 3, the rotating device (300) further includes one or more coupling members (320, 330). The coupling member (320, 330) can connect the rotating member (310) and the rotating ring member (620) previously described, and the rotating ring member is included The rotary coupling member (600) of the rotating device (300) and the lifting device (400) will be described later and connected.

如第2圖及第3圖的實施例所示,結合構件(320、330)包括第一結合構件(320)及第二結合構件(330)。第一結合構件(320)可連接於先前說明過的旋轉構件(310)。因此之故,如第6圖及第7圖所示,第一結合構件(320)及旋轉構件(310)可被稍後會說明的驅動裝置(500)驅動而沿著軸桿構件(220)旋轉及上下移動。 As shown in the embodiments of Figures 2 and 3, the coupling members (320, 330) include a first coupling member (320) and a second coupling member (330). The first coupling member (320) can be coupled to the previously described rotating member (310). Therefore, as shown in FIGS. 6 and 7, the first coupling member (320) and the rotating member (310) can be driven along the shaft member (220) by a driving device (500) which will be described later. Rotate and move up and down.

就此而言,如第2圖及第3圖的實施例所示,以可旋轉及垂直移動的方式形成於軸桿構件(220)上旋轉構件(310),係插入於形成在第一結合構件(320)上的貫穿孔內,並以螺栓鎖固或類似方式結合至第一結合構件(320)上。雖然說明如上,用以將旋轉構件(310)結合於第一結合構件(320)上的結構並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知設計。 In this regard, as shown in the embodiments of FIGS. 2 and 3, the rotating member (310) is formed on the shaft member (220) in a rotatable and vertically movable manner, and is inserted into the first coupling member. (320) in the through hole and bonded to the first coupling member (320) by bolting or the like. Although illustrated above, the structure for bonding the rotating member (310) to the first joining member (320) is not limited to the embodiments exemplified herein, and may be any known design that provides the same function.

如第2圖及第3圖的實施例所示,第二結合構件(330)可以連接於第一結合構件(320)及稍後會說明的旋轉環構件(620)。就此而言,如圖式中之實施例所示,第二結合構件(330)也可以是環狀的形狀。此外,該環狀第二結合構件(330)的內周表面可以透過螺栓鎖固或類似方式連接於第一結合構件(320)的頂端,如圖式中之實施例所示。此外,該環狀第二結合構件(330)的外周表面可以透過螺栓鎖固或類似方式連接於旋轉環 構件(620)的頂端。 As shown in the embodiments of FIGS. 2 and 3, the second coupling member (330) may be coupled to the first coupling member (320) and the rotating ring member (620) which will be described later. In this regard, the second joining member (330) may also be in the shape of a ring as shown in the embodiment of the drawings. Further, the inner peripheral surface of the annular second coupling member (330) may be coupled to the top end of the first coupling member (320) by bolt locking or the like, as shown in the embodiment of the drawing. In addition, the outer peripheral surface of the annular second coupling member (330) may be coupled to the rotating ring by bolt locking or the like. The top end of the member (620).

雖然說明如上,但第二結合構件(330)的形狀及第二結合構件(330)連接於第一結合構件(320)及環構件(620)的結構並不限於本文例示的實施例,可以是能提供相同功能的任何已知設計。 Although the above description, the shape of the second coupling member (330) and the structure in which the second coupling member (330) is coupled to the first coupling member (320) and the ring member (620) are not limited to the embodiments exemplified herein, and may be Any known design that provides the same functionality.

因此之故,如第6圖及第7圖所示,隨著第一結合構件(320),第二結合構件(330)及旋轉構件(310)可在稍後會說明的驅動裝置(500)驅動下,沿著軸桿構件(220)旋轉及上下移動。此外,連接於第二結合構件(330)的旋轉環構件(620)也可以旋轉及上下移動。因此之故,如圖式所示,供旋轉環構件(620)以可旋轉方式連接於其上的固定環構件(610)可以上下移動,而連接至固定環構件(610)的升降裝置(400)即可上下移動。 Therefore, as shown in FIGS. 6 and 7, with the first coupling member (320), the second coupling member (330) and the rotating member (310) can be driven (500) which will be described later. Under the drive, it rotates along the shaft member (220) and moves up and down. Further, the rotating ring member (620) connected to the second coupling member (330) can also be rotated and moved up and down. Therefore, as shown in the figure, the fixing ring member (610) to which the rotating ring member (620) is rotatably coupled can be moved up and down, and the lifting device (400) connected to the fixing ring member (610) ) You can move up and down.

升降裝置(400)係連接至旋轉裝置(300)及導引構件(230),因此可在先前說明過之旋轉裝置(300)的旋轉動作驅動下,沿著如先前所說明地形成在固定部(200)上的導引構件(230)上下移動。 The lifting device (400) is coupled to the rotating device (300) and the guiding member (230), and thus can be formed in the fixing portion as previously described, driven by the rotational action of the rotating device (300) previously described. The guiding member (230) on (200) moves up and down.

就此而言,升降裝置(400)可包括升降構件(410),如第2圖及第3圖的實施例所示。如這些圖式所示,升降構件(410)係連接至包含於稍後會說明的旋轉結合構件(600)內的固定環構件(610)及包含於稍後會說明的升降結合構件(700)內的活動構件(720),其可將升降裝置(400)連接至導引構件(230)。 In this regard, the lifting device (400) can include a lifting member (410) as shown in the embodiments of Figures 2 and 3. As shown in these figures, the elevating member (410) is coupled to a stationary ring member (610) included in a rotating coupling member (600) to be described later and a lifting coupling member (700) to be described later. A movable member (720) that can connect the lifting device (400) to the guiding member (230).

透過如此的架構,如第6圖及第7圖所示,當旋轉裝置(300)被驅動裝置(500)驅動而沿著軸桿構件(220)旋轉及上下移動時,升降構件(410)會沿著導引構件(230)上下移動。 Through such an arrangement, as shown in FIGS. 6 and 7, when the rotating device (300) is driven by the driving device (500) to rotate along the shaft member (220) and move up and down, the lifting member (410) will Move up and down along the guiding member (230).

如第2圖及第3圖的實施例所示,升降構件(410)可形成有一貫穿孔。如這些圖式之實施例所示,在升降構件(410)的貫穿孔內設有形成在基座構件(210)的該軸桿構件(220)及可沿著軸桿構件(220)旋轉及上下移動的旋轉裝置(300)。透過此種架構,升降模組(100)的設計可以簡化,而其尺寸可以縮小。 As shown in the embodiments of Figures 2 and 3, the lifting member (410) can be formed with a consistent perforation. As shown in the embodiments of the drawings, the shaft member (220) formed on the base member (210) and the shaft member (220) are rotatable in the through hole of the lifting member (410) and A rotating device (300) that moves up and down. Through this architecture, the design of the lifting module (100) can be simplified, and its size can be reduced.

此外,升降裝置(400)可進一步包括升降構件(420),如第2圖及第3圖的實施例所示。升降構件(420)係連接至升降構件(410),如此圖式中之實施例所示。如這些圖式中之實施例所示,升降構件(420)可透過螺栓鎖固或類似方式連接至升降構件(410)。雖然說明如上,但升降構件(420)連接至升降構件(410)的設計並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知設計。 Further, the lifting device (400) may further include a lifting member (420) as shown in the embodiments of Figures 2 and 3. The lifting member (420) is coupled to the lifting member (410) as shown in the embodiment of the drawings. As shown in the embodiments of these figures, the lifting member (420) can be coupled to the lifting member (410) by bolt locking or the like. Although illustrated above, the design of the lifting member (420) coupled to the lifting member (410) is not limited to the embodiments exemplified herein, and may be any known design that provides the same function.

透過此種架構,如先前所說明的及第6及第7中所示,在升降裝置(400)的升降構件(410)上下移動時,升降構件(420)可隨著升降構件(410)上下移動。 Through such an arrangement, as previously described and illustrated in FIGS. 6 and 7, when the lifting member (410) of the lifting device (400) moves up and down, the lifting member (420) can be moved up and down with the lifting member (410). mobile.

如第1圖至第3圖之實施例所示,升降構件(420)設有一磁鐵構件(430)。如這些圖式中之實施例所示,升降構件(420)以螺栓鎖固或類似方式設有一磁 鐵支撐構件(421)。磁鐵構件(420)係由磁鐵支撐構件(421)裝設在升降構件(420)上。雖然說明如上,在升降構件(420)上實施磁鐵構件(430)的設計並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知設計。 As shown in the embodiment of Figures 1 to 3, the lifting member (420) is provided with a magnet member (430). As shown in the embodiments of the drawings, the lifting member (420) is provided with a magnetic body by bolt locking or the like. Iron support member (421). The magnet member (420) is attached to the elevating member (420) by a magnet supporting member (421). Although illustrated above, the design of the magnet member (430) implemented on the lifting member (420) is not limited to the embodiments exemplified herein, and may be any known design that provides the same function.

設置在升降構件(420)上磁鐵構件(430)可以是例如說一永久磁鐵。雖然說明如上,但升降構件(420)上磁鐵構件(430)並不限於永久磁鐵,可以是任何能提供磁性的已知裝置。 The magnet member (430) disposed on the lifting member (420) may be, for example, a permanent magnet. Although illustrated above, the magnet member (430) on the lifting member (420) is not limited to a permanent magnet, and may be any known device capable of providing magnetism.

透過使用磁鐵構件(430),在如第8圖及第9圖所示般,以一個或多個根據本發明的升降模組(100)來實施升降裝置(10)時,升降夾頭(30)可透過磁力固定在升降構件(420)上。因此之故,升降夾頭(30)可以輕易地固定至升降構件(420)上。 By using the magnet member (430), as shown in Figs. 8 and 9, when the lifting device (10) is implemented by one or more lifting modules (100) according to the present invention, the lifting chuck (30) ) can be fixed to the lifting member (420) by magnetic force. Therefore, the lifting chuck (30) can be easily fixed to the lifting member (420).

如第2圖及第3圖的實施例所示,旋轉裝置(300)係由固定環構件(610)及包括有旋轉環構件(620)之旋轉結合構件(600)加以連接至升降裝置(400)上。 As shown in the embodiments of Figures 2 and 3, the rotating device (300) is coupled to the lifting device (400) by a stationary ring member (610) and a rotating coupling member (600) including a rotating ring member (620). )on.

如第2圖及第3圖的實施例所示,固定環構件(610)係形成為環狀的形狀。且固定環構件(610)係裝設在升降裝置(400)頂端上,更具體地說,是透過螺栓鎖固或類似方式裝設在先前說明過並顯示於圖式之實施例中的升降裝置(400)的升降構件(410)上。 As shown in the embodiments of Figs. 2 and 3, the fixing ring member (610) is formed into a ring shape. And the retaining ring member (610) is mounted on the top end of the lifting device (400), more specifically, by bolts or the like, mounted on the lifting device previously described and shown in the embodiment of the drawings. (400) on the lifting member (410).

如第2圖及第3圖的實施例所示,旋轉環構 件(620)也可形成為一環狀的形狀。此外,旋轉環構件(620)的一側,特別是旋轉環構件(620)的外周表面,如這些圖式中之實施例所示,係以可旋轉的方式連接至固定環構件(610)的內周表面。例如說,旋轉環構件(620)的外周表面是插置於固定環構件(610)的內周表面內,而在旋轉環構件(620)的外周表面與固定環構件(610)的內周表面之間設置多個滾子,旋轉環構件(620)的外周表面得以以可旋轉方式設置於固定環構件(610)內。 As shown in the embodiments of Figures 2 and 3, the rotating ring structure The member (620) may also be formed in a ring shape. Further, one side of the rotating ring member (620), particularly the outer peripheral surface of the rotating ring member (620), is rotatably coupled to the stationary ring member (610) as shown in the embodiments of the drawings. Inner peripheral surface. For example, the outer peripheral surface of the rotating ring member (620) is inserted into the inner peripheral surface of the fixed ring member (610), and the outer peripheral surface of the rotating ring member (620) and the inner peripheral surface of the fixed ring member (610). A plurality of rollers are disposed therebetween, and an outer peripheral surface of the rotating ring member (620) is rotatably disposed in the fixed ring member (610).

如第3圖之實施例所示,旋轉環構件(620)的另一側,特別是旋轉環構件(620)的頂端是連接至旋轉裝置(300)上,例如說如此圖式之實施例所示,連接至旋轉裝置(300)的第二結合構件(330)外周表面上。透過此種架構,如第6圖及第7圖之實施例所示,旋轉環構件(620)可在旋轉裝置(300)旋轉時旋轉。 As shown in the embodiment of Figure 3, the other side of the rotating ring member (620), and in particular the top end of the rotating ring member (620), is coupled to the rotating device (300), such as in the embodiment of the drawings Shown to the outer peripheral surface of the second coupling member (330) of the rotating device (300). With this configuration, as shown in the embodiments of Figures 6 and 7, the rotating ring member (620) can be rotated as the rotating device (300) rotates.

本架構的旋轉結合構件(600)可以是例如說十字型滾子環。但是,旋轉結合構件(600)的架構並不限於本文中所例示的實施例,可以是能夠將旋轉裝置(300)連接至升降裝置(400)的任何已知設計。 The rotary coupling member (600) of the present architecture may be, for example, a cross-type roller ring. However, the architecture of the rotating joint member (600) is not limited to the embodiments exemplified herein, but may be any known design capable of connecting the rotating device (300) to the lifting device (400).

透過此種架構,如第6圖及第7圖所示,當旋轉裝置(300)在軸桿構件(220)上旋轉及上下移動時,升降裝置(400)可以上下移動。更具體地說,當旋轉裝置(300)被稍後會說明的驅動裝置(500)驅動而在軸桿構件(220)上旋轉及上下移動時,連接至旋轉裝置(300)上的旋轉環構件(620)也可以旋轉及上下移動。因 此之故,固定環構件(610)能上下移動,而連接於固定環構件(610)的升降構件(410)及連接於升降構件(410)的升降板(420)也能上下移動。因此之故,升降裝置(400)可因旋轉裝置(300)在軸桿構件(220)上的旋轉及垂直運動而上下移動。 With this configuration, as shown in FIGS. 6 and 7, when the rotating device (300) is rotated on the shaft member (220) and moved up and down, the lifting device (400) can be moved up and down. More specifically, when the rotating device (300) is driven by the driving device (500) to be described later to rotate on the shaft member (220) and move up and down, the rotating ring member connected to the rotating device (300) (620) can also be rotated and moved up and down. because For this reason, the fixing ring member (610) can be moved up and down, and the lifting member (410) connected to the fixing ring member (610) and the lifting plate (420) connected to the lifting member (410) can also move up and down. For this reason, the lifting device (400) can be moved up and down by the rotation and vertical movement of the rotating device (300) on the shaft member (220).

此外,如第2圖及第3圖的實施例所示,升降裝置(400)可透過包括有活動構件(720)之升降結合構件(700)而連接至固定構件(710)及導引構件(230)。 Further, as shown in the embodiments of FIGS. 2 and 3, the lifting device (400) is connectable to the fixing member (710) and the guiding member through the lifting coupling member (700) including the movable member (720). 230).

如第2圖及第3圖的實施例所示,固定構件(710)係連接至導引構件(230)。如這些圖式中之實施例所示,固定構件(710)可透過螺栓鎖固或類似方式連接至導引構件(230)。並且,如這些圖式中之實施例所示,活動構件(720)一端係以可活動的方式連接至固定構件(710)。例如說,活動構件(720)的一側可以一種能夠進行滑動運動的方式插置於固定構件(710)內,而在活動構件(720)的一側與固定構件(710)設置多個滾子或滾珠,以使得活動構件(720)的一側以可活動的方式連接至固定構件(710)。 As shown in the embodiments of Figures 2 and 3, the securing member (710) is coupled to the guiding member (230). As shown in the embodiments of these figures, the securing member (710) can be coupled to the guiding member (230) by bolt locking or the like. Also, as shown in the embodiments of these figures, one end of the movable member (720) is movably coupled to the stationary member (710). For example, one side of the movable member (720) may be inserted into the fixed member (710) in a manner capable of sliding movement, and a plurality of rollers may be disposed on one side of the movable member (720) and the fixed member (710). Or a ball such that one side of the movable member (720) is movably coupled to the stationary member (710).

活動構件(720)的另一側可以連接至升降裝置(400),例如說,如第2圖及第3圖中之實施例所示,透過螺栓鎖固或類似方式連接至升降裝置(400)的升降構件(410)。 The other side of the movable member (720) may be coupled to the lifting device (400), for example, as shown in the embodiments of Figures 2 and 3, connected to the lifting device (400) by bolt locking or the like. Lifting member (410).

本架構的升降結合構件(700)可以是例如說十字型滾子導件或十字型滾珠導件。但是,升降結合構件 (700)的架構並不限於本文中所例示的實施例,可以是能夠將升降裝置(400)連接至導引構件(230)的任何已知設計。 The lifting coupling member (700) of the present architecture may be, for example, a cross-shaped roller guide or a cross-shaped ball guide. However, the lifting joint member The architecture of (700) is not limited to the embodiments exemplified herein, and may be any known design that is capable of connecting the lifting device (400) to the guiding member (230).

透過前述的升降結合裝置(700)的架構,如第6圖及第7圖所示,當升降裝置(400)因旋轉裝置(300)在軸桿構件(220)上旋轉而向上或向下移動時,升降裝置(400)會沿著導引構件(230)向上或向下移動。當升降裝置(400),特別是升降裝置(400)的升降構件(410)向上或向下移動時,連接至升降構件(410)上的活動構件(720)可沿著固定構件(710)向上或向下移動。因此,升降構件(410)可上下移動而不會偏離運動的垂直軸線。 Through the structure of the aforementioned lifting and lowering device (700), as shown in FIGS. 6 and 7, when the lifting device (400) is moved up or down due to the rotation of the rotating device (300) on the shaft member (220) The lifting device (400) will move up or down along the guiding member (230). When the lifting device (400), particularly the lifting member (410) of the lifting device (400) moves up or down, the movable member (720) connected to the lifting member (410) may be upward along the fixing member (710) Or move down. Therefore, the lifting member (410) can move up and down without deviating from the vertical axis of the movement.

驅動裝置(500)可連結至旋轉裝置(300)及升降裝置(400),以供驅動旋轉裝置(300)旋轉。就此而言,驅動裝置(500)可包括轉子(510)及定子(520),如第2圖及第3圖的實施例所示。 The driving device (500) is connectable to the rotating device (300) and the lifting device (400) for driving the rotating device (300) to rotate. In this regard, the drive device (500) can include a rotor (510) and a stator (520) as shown in the embodiments of Figures 2 and 3.

轉子(510)可設置於旋轉裝置(300),在第3圖所示的實施例中是設置於旋轉裝置(300)的第一結合構件(320)上。如圖式中之實施例所示,轉子(510)是環狀的,係透過插入至的第一結合構件(320)而設置在第一結合構件(320)上。雖然說明如上,但與第一結合構件(320)結合的形狀及結構並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知形狀及結構。 The rotor (510) may be disposed on the rotating device (300), and in the embodiment illustrated in Fig. 3, is disposed on the first coupling member (320) of the rotating device (300). As shown in the embodiment of the drawings, the rotor (510) is annular and is disposed on the first coupling member (320) through the first coupling member (320) inserted therein. Although illustrated above, the shapes and structures incorporated with the first joining member (320) are not limited to the embodiments exemplified herein, and may be any known shapes and structures that provide the same function.

轉子(510)可設有一個或多個永久磁鐵。這些形成於轉子(510)上的永久磁鐵可產生磁性。 The rotor (510) may be provided with one or more permanent magnets. These permanent magnets formed on the rotor (510) can generate magnetism.

定子(520)可形成於升降裝置(400)上,如第2圖及第3圖的實施例所示。如此圖式中之實施例所示,定子(520)可透過插入於升降構件(410)的貫穿孔內而設置於升降裝置(400)的升降構件(410)上。雖然說明如上,但在升降裝置(400)上實施定子(520)的設計並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知設計。 The stator (520) may be formed on the lifting device (400) as shown in the embodiments of Figures 2 and 3. As shown in the embodiment of the drawing, the stator (520) is disposed on the lifting member (410) of the lifting device (400) through the through hole inserted into the lifting member (410). Although illustrated above, the design of the stator (520) implemented on the lifting device (400) is not limited to the embodiments illustrated herein, and may be any known design that provides the same functionality.

此外,定子(520)係建構成能夠在施加電力時轉動轉子(510)。定子(520)可以例如說包括一線圈。因此,當定子(520)被施以電力時,流經該線圈的電流會產生磁性。轉子(510)可因轉子(510)內之永久磁鐵的磁性與定子(520)所產生的磁性間的交互作用而轉動。 Further, the stator (520) is constructed to be capable of rotating the rotor (510) when electric power is applied. The stator (520) may, for example, comprise a coil. Therefore, when the stator (520) is energized, the current flowing through the coil generates magnetism. The rotor (510) is rotatable by the interaction between the magnetism of the permanent magnets in the rotor (510) and the magnetism generated by the stator (520).

驅動裝置(500)的該架構可以是一轉矩馬達。轉矩馬達可產生反比於速度的高轉矩。因此,升降模組及升降裝置可移動比使用傳統步進馬達或伺服馬達之升降模組及升降裝置所能移動的更重的板構件。 The architecture of the drive unit (500) can be a torque motor. The torque motor produces a high torque that is inversely proportional to speed. Therefore, the lifting module and the lifting device can move a heavier plate member that can be moved than the lifting module and the lifting device of the conventional stepping motor or servo motor.

如前所述,直接的垂直運動可以透過相當簡單之結構來加以實施,其中升降裝置(400)是連接至能由驅動裝置(500)驅動而沿著一軸桿構件(220)旋轉及上下移動的旋轉裝置(300)上。 As previously mentioned, direct vertical movement can be implemented by a relatively simple structure in which the lifting device (400) is coupled to be rotatable and movable up and down along a shaft member (220) by the drive unit (500). On the rotating device (300).

由於根據本發明的升降模組及裝置可以直接 上下移動,因此能源效率很高,且可使用能產生高轉矩的轉矩馬達來處理重的板構件。 Since the lifting module and device according to the present invention can be directly Moving up and down, it is energy efficient, and a heavy torque can be used to handle heavy plate members.

因此之故,根據本發明的升降模組及裝置可將重的板構件精確地舉升或降低至所需的位置。 For this reason, the lifting module and apparatus according to the present invention can accurately lift or lower the heavy plate member to a desired position.

根據本發明的升降模組(100)可進一步包括如第2圖及第3圖實施例所示的測量裝置(800)。測量裝置(800)可測量升降裝置(400)的移動距離。就此,測量裝置(800)可包括如第4a圖及第4b圖實施例所示的手動調整單元(810)、編碼器(820)、及標尺構件(830)。 The lifting module (100) according to the present invention may further comprise a measuring device (800) as shown in the embodiments of Figures 2 and 3. The measuring device (800) can measure the moving distance of the lifting device (400). In this regard, the measuring device (800) can include a manual adjustment unit (810), an encoder (820), and a scale member (830) as shown in the embodiments of Figures 4a and 4b.

手動調整單元(810)可如第4a圖及第4b圖之實施例所示,連接至基座構件(210)而距基座構件(210)一段特定的距離。就此,手動調整單元(810)可連接至以螺栓鎖固或類似方式連接於基座構件(210)的調整單元支撐構件(811)上,如所示之圖式中所示。 The manual adjustment unit (810) can be coupled to the base member (210) a specified distance from the base member (210) as shown in the embodiments of Figures 4a and 4b. In this regard, the manual adjustment unit (810) can be coupled to the adjustment unit support member (811) that is bolted or similarly coupled to the base member (210), as shown in the drawings shown.

手動調整單元(810)係建構成能進行稍後會說明之編碼器(820)的高度的手動調整。手動調整單元(810)的結構並不侷限於特定的設計,可以是能夠讓編碼器(820)之高度進行手動調整的任何已知設計。 The manual adjustment unit (810) is constructed to allow manual adjustment of the height of the encoder (820) which will be described later. The structure of the manual adjustment unit (810) is not limited to a particular design and may be any known design that enables manual adjustment of the height of the encoder (820).

編碼器(820)可以如第4a圖及第4b圖之實施例所示般連接至手動調整單元(810)。升降裝置(400)的移動距離可由編碼器(820)及稍後會說明的標尺構件(830)加以測量。編碼器(820)的架構並不侷限於特定的設計,可以是能夠測量升降裝置(400)之移動距離 的任何已知設計。 The encoder (820) can be coupled to the manual adjustment unit (810) as shown in the embodiment of Figures 4a and 4b. The moving distance of the lifting device (400) can be measured by an encoder (820) and a scale member (830) which will be described later. The architecture of the encoder (820) is not limited to a specific design, and may be capable of measuring the moving distance of the lifting device (400) Any known design.

標尺構件(830)可連接至升降裝置(400),並連結於編碼器(820),如第4a圖及第4b圖之實施例所示。如此圖式中之實施例所示,標尺構件(830)可連接至升降裝置(400)的升降構件(410)上。如此圖式中之實施例所示,標尺構件(830)可透過螺栓鎖固或類似方式連接至升降構件(410)上。雖然說明如上,但標尺構件(830)與升降構件(410)間的連接並不限於本文中所例示的實施例,可以是能提供相同功能的任何已知設計。 The scale member (830) is connectable to the lifting device (400) and to the encoder (820) as shown in the embodiments of Figures 4a and 4b. As shown in the embodiment of the drawings, the scale member (830) can be coupled to the lifting member (410) of the lifting device (400). As shown in the embodiment of the drawings, the scale member (830) can be coupled to the lifting member (410) by bolt locking or the like. Although illustrated above, the connection between the scale member (830) and the lift member (410) is not limited to the embodiments exemplified herein, and may be any known design that provides the same function.

此外,標尺構件(830)設有可由前述編碼器(820)讀取的刻度。這些刻度可以是例如說以微米為單位加以標記的。如此可以微米尺度來測量及控制升降裝置(400)的移動距離。因此之故,可以實施精準的動作控制。 In addition, the scale member (830) is provided with a scale that can be read by the aforementioned encoder (820). These scales can be, for example, marked in microns. Thus, the moving distance of the lifting device (400) can be measured and controlled on a micrometer scale. Therefore, precise motion control can be implemented.

標尺構件(830)的架構並不侷限於特定的設計,可以是能夠透過連結於前述編碼器(820)而測量升降裝置(400)移動距離的任何已知設計。 The architecture of the scale member (830) is not limited to a particular design and may be any known design that is capable of measuring the distance traveled by the lifting device (400) by being coupled to the aforementioned encoder (820).

透過此架構,如第6圖及第7圖所示,當升降構件(410)向上或向下移動時,標尺構件(830)可隨著升降裝置(400)的升降構件(410)而向上或向下移動。編碼器(820)可以測量標尺構件(830)的移動距離,並決定升降裝置(400)的升降構件(410)的移動距離。例如說,編碼器(820)可透過讀取標尺構件(830)的刻 度而測量升降裝置(400)的升降構件(410)的移動距離。 Through this architecture, as shown in FIGS. 6 and 7, when the lifting member (410) moves up or down, the scale member (830) can be lifted up with the lifting member (410) of the lifting device (400) or Move Downward. The encoder (820) can measure the moving distance of the scale member (830) and determine the moving distance of the lifting member (410) of the lifting device (400). For example, the encoder (820) can read the engraving of the scale member (830). The moving distance of the lifting member (410) of the lifting device (400) is measured.

此外,在如第8圖及第9圖中之實施例所示般以一個或多個根據本發明的升降模組(100)來建構升降裝置(10)時,升降夾頭(30)的水平可由每一升降模組(100)之升降構件(410)的垂直運動來加以控制。此外,編碼器(820)的高度亦可以手動調整單元(810)來調整,以使得每一升降模組(100)之升降構件(410)的位置成為標尺構件(830)的零位置。因此之故,升降夾頭(30)的水平可透過將升降夾頭(30)附著於升降模組(100)的升降構件(420)來加以實施,而不需要另外的調整。 In addition, the level of the lifting chuck (30) is constructed when the lifting device (10) is constructed by one or more lifting modules (100) according to the present invention as shown in the embodiments of Figures 8 and 9. It can be controlled by the vertical movement of the lifting member (410) of each lifting module (100). In addition, the height of the encoder (820) can also be adjusted by the manual adjustment unit (810) such that the position of the lifting member (410) of each lifting module (100) becomes the zero position of the scale member (830). For this reason, the level of the lifting chuck (30) can be implemented by attaching the lifting chuck (30) to the lifting member (420) of the lifting module (100) without additional adjustment.

根據本發明的升降模組(100)可進一步包括如第5a圖及第5b圖中之實施例所示的掉落防止裝置(900)。掉落防止裝置(900)係建構成能在先前說明過之驅動裝置(500)失去功效時,例如說電力無法供應至定子(520),防止升降裝置(400)因其自身之重量而掉落。就此,掉落防止裝置(900)可包括有如這些圖式之實施例所示的掉落偵測感應器(910、920)及夾持單元(930)。 The lifting module (100) according to the present invention may further comprise a drop preventing device (900) as shown in the embodiments of Figures 5a and 5b. The fall prevention device (900) is constructed such that when the previously described drive device (500) loses power, for example, power cannot be supplied to the stator (520), preventing the lift device (400) from falling due to its own weight. . In this regard, the drop prevention device (900) may include a drop detection sensor (910, 920) and a clamping unit (930) as shown in the embodiments of the drawings.

掉落偵測感應器(910、920)可分別安裝於導引構件(230)及升降裝置(400)上,如第5a圖及第5b圖中之實施例所示。也就是說,一掉落偵測感應器(910)是安裝在導引構件(230)上。如此此圖式中之實施例所示,掉落偵測感應器(910)係安裝在連接於導引構 件(230)的固定構件(710)上。 Drop detection sensors (910, 920) can be mounted on the guiding member (230) and the lifting device (400), respectively, as shown in the embodiments of Figures 5a and 5b. That is, a drop detection sensor (910) is mounted on the guiding member (230). As shown in the embodiment of this figure, the drop detection sensor (910) is mounted on the connection structure. On the fixing member (710) of the piece (230).

此外,另一掉落偵測感應器(910)則可安裝在升降裝置(400)上。該另一掉落偵測感應器(910)可以安裝在升降裝置(400)的升降構件(410)上,如第5a圖及第5b圖中之實施例所示。如前面所提過的,如果升降裝置(400)因為驅動裝置(500)的故障而因其重量而下落時,掉落偵測感應器(910、920)即可偵測之。 In addition, another drop detection sensor (910) can be mounted on the lifting device (400). The other drop detection sensor (910) can be mounted on the lifting member (410) of the lifting device (400) as shown in the embodiments of Figures 5a and 5b. As mentioned above, if the lifting device (400) falls due to its weight due to the failure of the driving device (500), the drop detecting sensor (910, 920) can detect it.

例如說,掉落偵測感應器(910、920)可建構成能偵測升降裝置(400)的移動速度。因此,若升降裝置(400)以高於其被驅動裝置(500)驅動時之速度下降時,掉落偵測感應器(910、920)即可偵測之。因此之故,可以偵測到升降裝置(400)因其自身重量而致之掉落。 For example, the drop detection sensor (910, 920) can be constructed to detect the speed of movement of the lifting device (400). Therefore, if the lifting device (400) is lowered at a higher speed than when the driven device (500) is driven, the falling detection sensor (910, 920) can detect it. For this reason, it can be detected that the lifting device (400) is dropped due to its own weight.

但是,掉落偵測感應器(910、920)用來偵測升降裝置(400)因其自身重量而致之掉落的架構,並不限於本文中所例示的實施例,可以是能夠偵測升降裝置(400)因其自身之重量而致之掉落的任何已知設計。 However, the fall detection sensor (910, 920) is used to detect the structure of the lifting device (400) falling due to its own weight, and is not limited to the embodiment exemplified herein, and can be detected. Any known design in which the lifting device (400) is dropped due to its own weight.

夾持單元(930)可如第5a圖及第5b圖中之實施例所示般形成在基座構件(210)上。如這些圖式中之實施例所示,夾持單元(930)可連接至單元支撐構件(931)並形成於基座構件(210)上。此外,夾持單元(930)可以連接至先前說明過的掉落偵測感應器(910、920),如此圖式中之實施例所示。 The clamping unit (930) can be formed on the base member (210) as shown in the embodiment of Figures 5a and 5b. As shown in the embodiments of these figures, the clamping unit (930) can be coupled to the unit support member (931) and formed on the base member (210). Additionally, the clamping unit (930) can be coupled to the drop detection sensor (910, 920) previously described, as shown in the embodiment of the drawings.

以此方式,夾持單元(930)可建構成能在掉 落偵測感應器(910、920)如前述般偵測到升降裝置(400)掉落時,夾持住因自身重量而掉落的升降裝置(400)。 In this way, the clamping unit (930) can be constructed to be able to As described above, the fall detection sensor (910, 920) detects that the lifting device (400) is dropped, and holds the lifting device (400) that is dropped by its own weight.

就此,升降裝置(400),更具體地說升降裝置(400)的升降構件(410),可透過螺栓鎖固或類似方式來設置夾持構件(932),如第5a圖及第5b圖中之實施例所示。當升降裝置(400)因其自身重量所致之掉落動作被掉落偵測感應器(910、920)偵測到時,夾持單元(930)會夾持住升降構件(410)的夾持構件(932)。因此之故,可以保護升降裝置(400)免於在驅動裝置(500)故障時因其自身之重量而致的掉落。 In this regard, the lifting device (400), and more particularly the lifting member (410) of the lifting device (400), can be provided with a clamping member (932) by bolt locking or the like, as shown in Figures 5a and 5b. The embodiment is shown. When the lifting action of the lifting device (400) due to its own weight is detected by the drop detecting sensor (910, 920), the clamping unit (930) clamps the clip of the lifting member (410). Hold the member (932). For this reason, the lifting device (400) can be protected from falling due to its own weight when the driving device (500) fails.

就夾持構件(932)的夾持而言,夾持單元(930)可以建構成能在例如說被供給以壓縮空氣時鬆開夾持構件(932),而在不被供給以壓縮空氣時夾緊夾持構件(932)。但是,夾持單元(930)的架構並不限於本文中所例示的實施例,可以是能夠使用掉落偵測感應器(910、920)來偵測升降裝置(400)因其自身之重量而致之掉落並夾緊夾持構件(932)來防止該裝置(400)掉落的任何設計。 With respect to the clamping of the clamping member (932), the clamping unit (930) can be constructed to release the clamping member (932), for example, when supplied with compressed air, while not being supplied with compressed air. The clamping member (932) is clamped. However, the architecture of the clamping unit (930) is not limited to the embodiments exemplified herein, and the drop detecting sensor (910, 920) can be used to detect the lifting device (400) due to its own weight. Any design that drops and clamps the clamping member (932) to prevent the device (400) from falling.

根據本發明的升降裝置(10)可包含裝置基座(20)、一個或多個先前說明過的升降模組(100)、以及升降夾頭(30),如第8圖及第9圖之實施例所示。 The lifting device (10) according to the present invention may comprise a device base (20), one or more previously described lifting modules (100), and a lifting chuck (30), as shown in Figures 8 and 9. The examples are shown.

如第8圖及第9圖中之實施例所示,裝置基座(20)可構成該裝置的基座。如這些圖式中之實施例所示,裝置基座(20)可以是一板,設置在根據本發明的升 降裝置(10)所要使用的位置。該板及/或裝置基座(20)的架構並不限於特定的形狀及/或架構,可以是能做為該裝置之基座並能設置在根據本發明之升降裝置(10)所要使用之位置的任何已知形狀及/或架構。 As shown in the embodiments of Figures 8 and 9, the device base (20) may constitute the base of the device. As shown in the embodiments of the drawings, the device base (20) may be a plate disposed in accordance with the present invention. The position to be used by the lowering device (10). The structure of the board and/or device base (20) is not limited to a particular shape and/or architecture, but may be a base of the device and can be used in the lifting device (10) according to the present invention. Any known shape and/or architecture of the location.

如圖式中之實施例所示,升降模組(100)係形成於裝置基座(20)上。如圖式中之實施例所示,四個升降模組(100)形成於裝置基座(20)上。此外,該四個升降模組(100)係對稱地配置在裝置基座(20)上。 As shown in the embodiment of the figure, the lifting module (100) is formed on the device base (20). As shown in the embodiment of the figure, four lifting modules (100) are formed on the device base (20). In addition, the four lifting modules (100) are symmetrically disposed on the device base (20).

藉由將升降模組(100)對稱地配置在裝置基座(20)上,其可將稍後會說明的升降夾頭(30)輕易地安裝在包含於升降模組(100)內的升降裝置(400),更具體地說,升降裝置(400)的升降構件(420),的頂端的水平位置。換言之,用來移動升降模組(100)之升降裝置(400)且可供例如LCD或LED面板之類板構件牢固地放置於其上的升降夾頭(30)的水平可以輕易地加以控制。 By arranging the lifting module (100) symmetrically on the device base (20), the lifting chuck (30) to be described later can be easily installed in the lifting module (100). The device (400), and more specifically, the horizontal position of the top end of the lifting member (420) of the lifting device (400). In other words, the level of the lifting chuck (30) for moving the lifting device (100) of the lifting module (100) and for which the plate member such as the LCD or LED panel can be firmly placed can be easily controlled.

但是,升降模組(100)的數量及他們在裝置基座(20)上的配置並不限於圖式之實施例所示的四個對稱配置的升降模組(100),可以是能夠將升降夾頭(30)以水平姿勢附著至升降模組(100)之升降裝置(400)頂端上並輕易地控制升降夾頭(30)之水平的一個或多個的任何數量及任何配置方式。 However, the number of the lifting modules (100) and their arrangement on the device base (20) are not limited to the four symmetrically arranged lifting modules (100) shown in the embodiment of the drawings, and may be capable of lifting The collet (30) is attached to the top end of the lifting device (400) of the lifting module (100) in a horizontal position and easily controls any number and any configuration of one or more of the levels of the lifting collet (30).

如第8圖及第9圖之實施例所示,升降模組(100)可透過螺栓鎖固或類似方式裝設在裝置基座(20 )上。也就是說,升降模組(100)的基座構件(200)可透過螺栓鎖固或類似方式結合於裝置基座(20),使得升降模組(100)形成在裝置基座(20)上。 As shown in the embodiments of Figures 8 and 9, the lifting module (100) can be mounted on the base of the device by bolt locking or the like. )on. That is, the base member (200) of the lifting module (100) can be coupled to the device base (20) by bolt locking or the like, so that the lifting module (100) is formed on the device base (20). .

升降夾頭(30)可固定在升降裝置(400)頂端上,更具體地說固定在升降裝置(400)的升降構件(420)上,如第8圖及第9圖之實施例所示。就此,升降夾頭(30)可由磁性固定在升降裝置(400)的頂端。 The lifting chuck (30) can be fixed to the top end of the lifting device (400), more specifically to the lifting member (420) of the lifting device (400), as shown in the embodiments of Figs. 8 and 9. In this regard, the lifting chuck (30) can be magnetically fixed to the top end of the lifting device (400).

也就是說,如先前說明的,升降構件(420)設有一磁鐵構件(430),其磁性可將升降夾頭(30)附著至升降構件(420)上。因此之故,升降夾頭(30)可輕易地固定在升降構件(420)上。 That is, as previously explained, the lifting member (420) is provided with a magnet member (430) whose magnetism can attach the lifting chuck (30) to the lifting member (420). Therefore, the lifting chuck (30) can be easily fixed to the lifting member (420).

如第9圖之實施例所示,升降夾頭(30)可設有一輔助附著構件(31)。如此圖式中之實施例所示,輔助附著構件(31)可透過螺栓鎖固或類似方式固定至升降夾頭(30)上。輔助附著構件(31)可由例如說磁性加以固定於包含在升降模組(100)內之升降裝置(400)的升降構件(420)上。 As shown in the embodiment of Fig. 9, the lifting chuck (30) may be provided with an auxiliary attachment member (31). As shown in the embodiment of the drawings, the auxiliary attachment member (31) can be fixed to the lifting collet (30) by bolt locking or the like. The auxiliary attachment member (31) may be fixed to the lifting member (420) of the lifting device (400) included in the lifting module (100), for example, magnetically.

也就是說,如先前說明的,輔助附著構件(31)可透過由磁鐵支撐構件(421)支撐之磁鐵構件(430)所提供的磁性而固定於包含在升降模組(100)內之升降裝置(400)的升降構件(420)上。 That is, as previously explained, the auxiliary attachment member (31) can be fixed to the lifting device included in the lifting module (100) by the magnetic property provided by the magnet member (430) supported by the magnet supporting member (421). (400) on the lifting member (420).

輔助附著構件(31)的形狀可對應於升降裝置(400)的升降構件(420)的形狀。但是,輔助附著構件(31)的形狀並不限於圖式中所示之實施例,可以是能 夠輕易地固定至包含於升降模組(100)內之升降裝置(400)的升降構件(420)上的任何形狀。 The shape of the auxiliary attachment member (31) may correspond to the shape of the lifting member (420) of the lifting device (400). However, the shape of the auxiliary attachment member (31) is not limited to the embodiment shown in the drawings, and may be capable of Any shape that is easily fixed to the lifting member (420) of the lifting device (400) contained in the lifting module (100).

當有輔助附著構件(31)設置在升降夾頭(30)上,且如果升降夾頭(30)是固定在包含於升降模組(100)內之升降裝置(400)的升降構件(420)上時,升降夾頭(30)的全部材料並不一定都要是磁性物質。也就是說,即使只有輔助附著構件(31)是磁性物質,升降夾頭(30)也能固定在包含於升降模組(100)內之升降裝置(400)的升降構件(420)上。 When the auxiliary attachment member (31) is disposed on the lifting clamp (30), and if the lifting clamp (30) is a lifting member (420) fixed to the lifting device (400) included in the lifting module (100) In the case of the upper, the entire material of the lifting chuck (30) does not have to be a magnetic substance. That is, even if only the auxiliary attachment member (31) is a magnetic substance, the lifting chuck (30) can be fixed to the lifting member (420) of the lifting device (400) included in the lifting module (100).

如先前說明的,在升降夾頭(30)是固定至包含於形成在裝置基座(20)上之升降模組(100)內之升降裝置(400)的升降構件(420)上的情形下,升降模組(100)的升降裝置(400)能夠適當地升高或降低,以使升降夾頭(30)成為水平。此外,如先前說明的,升降模組(100)的測量裝置(800)的手動調整單元(810)可調整編碼器(820)至位於標尺構件(830)的零點。 As previously explained, in the case where the lifting chuck (30) is fixed to the lifting member (420) of the lifting device (400) included in the lifting module (100) formed on the device base (20) The lifting device (400) of the lifting module (100) can be appropriately raised or lowered to make the lifting chuck (30) horizontal. Additionally, as previously explained, the manual adjustment unit (810) of the measurement device (800) of the lift module (100) can adjust the encoder (820) to a zero point at the scale member (830).

在此狀態下,諸如LCD或LED之類的板構件可裝設並固定至升降夾頭(30)上。此外,透過升降模組(100)的驅動裝置(500)將升降模組(100)的升降裝置(400)移動相同的距離,可以讓升降夾頭(30)以水平的姿勢上下移動。因此之故,裝設並固定在升降夾頭(30)上的板構件,例如LCD或LED,可以升高至所需的位置處,以供例如說做表面檢驗。 In this state, a plate member such as an LCD or an LED can be mounted and fixed to the lift chuck (30). In addition, the lifting device (400) of the lifting module (100) is moved by the driving device (500) of the lifting module (100) by the same distance, so that the lifting chuck (30) can be moved up and down in a horizontal posture. For this reason, a plate member, such as an LCD or an LED, mounted and fixed to the lifting collet (30) can be raised to a desired position for, for example, surface inspection.

另一方面,升降模組(100)的升降裝置( 400)的升降構件(420)可形成有水平控制突出部(420),如第1圖至第3圖之實施例所示。如此圖式中之實施例所示,水平控制突出部(422)可形成在升降構件(420)之頂面的中心處。此外,他們的形狀可以是球形的一部分,如此圖式中之實施例所示。 On the other hand, the lifting device of the lifting module (100) ( The lifting member (420) of 400) may be formed with a horizontal control protrusion (420) as shown in the embodiments of Figs. 1 to 3. As shown in the embodiment of the drawings, a horizontal control protrusion (422) may be formed at the center of the top surface of the lifting member (420). Moreover, their shape may be part of a sphere, as shown in the embodiment of the drawings.

此外,如第11圖之實施例所示,輔助附著構件(31)可形成有一個或多個水平控制溝槽(31a),可供至少一部分的水平控制突出部(422)插入其內,如第12圖之實施例所示。如此圖式中之實施例所示,水平控制溝槽(31a)可以形成在輔助附著構件(31)的底面上對應於水平控制突出部(422)的位置。 Furthermore, as shown in the embodiment of Fig. 11, the auxiliary attachment member (31) may be formed with one or more horizontal control grooves (31a) into which at least a portion of the horizontal control projections (422) are inserted, such as The embodiment of Fig. 12 is shown. As shown in the embodiment of the drawing, the horizontal control groove (31a) may be formed at a position corresponding to the horizontal control protrusion (422) on the bottom surface of the auxiliary attachment member (31).

透過此種架構,升降夾頭(30)可輕易地固定在升降構件(420)的頂端。也就是說,升降夾頭(30)可藉著將至少一部分形成在包含於升降模組(100)內之升降裝置(400)的升降構件(420)上的水平控制突出部(422)插入至形成在升降夾頭(30)之輔助附著構件(31)上的水平控制溝槽(31a)內,而輕易地固定在升降構件(420)的頂端上。 Through this configuration, the lifting chuck (30) can be easily fixed to the top end of the lifting member (420). That is, the lifting chuck (30) can be inserted into the horizontal control protrusion (422) of at least a portion of the lifting member (420) formed on the lifting device (400) included in the lifting module (100). It is formed in the horizontal control groove (31a) on the auxiliary attachment member (31) of the lifting chuck (30), and is easily fixed to the top end of the lifting member (420).

如第11圖之實施例所示,水平控制溝槽(31a)可以複數個形成在輔助附著構件(31)的底面上。此外,如此圖式中之實施例所示,水平控制溝槽(31a)中至少有一個具有對應於水平控制突出部(422)的形狀。也就是說,他們的形狀是球狀內凹部的一部分,如此圖式中之實施例所示。 As shown in the embodiment of Fig. 11, the horizontal control grooves (31a) may be formed in plural on the bottom surface of the auxiliary attachment member (31). Further, as shown in the embodiment of the drawing, at least one of the horizontal control grooves (31a) has a shape corresponding to the horizontal control protrusion (422). That is, their shape is part of the spherical inner recess, as shown in the embodiment of the drawings.

此外,如第11圖之實施例所示,水平控制溝槽(31a)中至少有一個具有的形狀是只能讓水平控制突出部(422)沿著向前及向後的方向移動。此外,水平控制溝槽(31a)中至少有一個所具有的形狀係只能讓水平控制突出部(422)沿著向左及向右的方向移動。就此,水平控制溝槽(31a)的形狀可以是四角錐。 Further, as shown in the embodiment of Fig. 11, at least one of the horizontal control grooves (31a) has a shape that allows only the horizontal control projections (422) to move in the forward and backward directions. Further, at least one of the horizontal control grooves (31a) has a shape that allows only the horizontal control protrusions (422) to move in the left and right directions. In this regard, the shape of the horizontal control groove (31a) may be a quadrangular pyramid.

此外,水平控制溝槽(31a)中至少有一個所具有的形狀是能讓水平控制突出部(422)沿著所有的方向移動。就此,水平控制溝槽(31a)的形狀可以是如此圖式中之實施例所示的圓柱狀溝槽。 Further, at least one of the horizontal control grooves (31a) has a shape that allows the horizontal control protrusions (422) to move in all directions. In this regard, the shape of the horizontal control groove (31a) may be a cylindrical groove as shown in the embodiment of the drawings.

透過此種架構,如先前說明的,透過移動升降模組(100)的升降裝置(400)來控制升降夾頭(30)的水平,升降夾頭(30)將可自由地移動。例如說,透過相對於插入在具有對應於水平控制突出部(422)之形狀的水平控制溝槽(31a)內的水平控制突出部(422)來控制升降夾頭(30)的水平,升降夾頭(30)將可自由地移動。 Through this configuration, as previously explained, the level of the lifting chuck (30) is controlled by the lifting device (400) of the moving lifting module (100), and the lifting jaw (30) will be freely movable. For example, the level of the lifting chuck (30) is controlled by a horizontal control protrusion (422) inserted in a horizontal control groove (31a) having a shape corresponding to the horizontal control protrusion (422), the lifting clamp The head (30) will be free to move.

也就是說,如先前說明的,即使升降夾頭(30)或升降夾頭(30)的輔助附著構件(31)是透過包含於升降裝置(400)內之升降構件(420)的磁鐵構件(430)所提供的磁性而固定至升降構件(420)上,仍可輕易地控制升降夾頭(30)的水平。 That is, as previously explained, even the auxiliary attachment member (31) of the lift chuck (30) or the lift chuck (30) is a magnet member that transmits the lift member (420) included in the lift device (400) ( 430) The magnetic force provided is fixed to the lifting member (420), and the level of the lifting chuck (30) can still be easily controlled.

此外,為能在本發明的升降夾頭(30)與升降裝置(400)之間提供特定的間隙(D),如第12圖所 示,升降夾頭(30)的輔助附著構件(31)可以在特定的距離(D)下固定至升降裝置(400)的升降構件(420)。 Further, in order to provide a specific gap (D) between the lifting chuck (30) of the present invention and the lifting device (400), as shown in Fig. 12. It is shown that the auxiliary attachment member (31) of the lifting clamp (30) can be fixed to the lifting member (420) of the lifting device (400) at a specific distance (D).

如先前說明的,此種架構可以讓升降夾頭(30)自由移動。因此之故,即使升降夾頭(30)或升降夾頭(30)的輔助附著構件(31)是透過包含於升降裝置(400)內之升降構件(420)的磁鐵構件(430)所提供的磁性而固定至升降構件(420)上,仍可輕易地控制升降夾頭(30)的水平。 As previously explained, this architecture allows the lift chuck (30) to move freely. Therefore, even the auxiliary attachment member (31) of the lifting chuck (30) or the lifting chuck (30) is provided by the magnet member (430) of the lifting member (420) included in the lifting device (400). Magnetically fixed to the lifting member (420), the level of the lifting jaw (30) can still be easily controlled.

如前文所提出及說明的,利用該升降模組及使用該模組的升降裝置將可以簡單的結構來將一板構件,例如LCD或LED,直接向上及向下移動、可以控該板構件的水平、且能在以高精確度保持水平姿勢的情形下處理重的板構件。 As proposed and explained above, the lifting module and the lifting device using the module can directly move a board member, such as an LCD or an LED, upward and downward, and can control the panel member. The horizontal plate member can be handled horizontally with a high level of accuracy.

100‧‧‧升降模組 100‧‧‧ lifting module

200‧‧‧固定部 200‧‧‧ fixed department

210‧‧‧基座構件 210‧‧‧Base member

220‧‧‧軸桿構件 220‧‧‧ shaft member

221‧‧‧軸桿支撐構件 221‧‧‧ shaft support members

222‧‧‧止擋構件 222‧‧‧stop members

223‧‧‧止擋支撐構件 223‧‧‧stop support member

230‧‧‧導引構件 230‧‧‧Guide members

300‧‧‧旋轉裝置 300‧‧‧Rotating device

310‧‧‧旋轉構件 310‧‧‧Rotating components

320‧‧‧第一結合構件 320‧‧‧First joint member

330‧‧‧第二結合構件 330‧‧‧Second joint member

400‧‧‧升降裝置 400‧‧‧ lifting device

410‧‧‧升降構件 410‧‧‧ lifting member

420‧‧‧升降構件 420‧‧‧ Lifting members

421‧‧‧磁鐵支撐構件 421‧‧‧Magnet support member

422‧‧‧水平控制突出部 422‧‧‧Horizontal Control Projection

430‧‧‧磁鐵構件 430‧‧‧Magnetic components

500‧‧‧驅動裝置 500‧‧‧ drive

510‧‧‧轉子 510‧‧‧Rotor

520‧‧‧定子 520‧‧‧stator

600‧‧‧旋轉結合構件 600‧‧‧Rotary joint components

610‧‧‧固定環構件 610‧‧‧Fixed ring members

620‧‧‧旋轉環構件 620‧‧‧Rotating ring members

700‧‧‧升降結合裝置 700‧‧‧ Lifting combined device

710‧‧‧固定構件 710‧‧‧Fixed components

720‧‧‧活動構件 720‧‧‧Active components

Claims (22)

一種升降模組,包含:一固定部(200),包括一基座構件(210);一旋轉裝置(300),其係以可旋轉及垂直移動的方式結合於形成在該基座構件(210)上的軸桿構件(220);升降裝置(400),其係連接至該旋轉裝置(300)及該導引構件(230)上,其可由該旋轉裝置(300)的該旋轉運動及上下運動驅動而沿著形成在該固定部(200)上的該導引構件(230)上下移動;以及驅動裝置(500),連結於該旋轉裝置(300)及該升降裝置(400),以旋轉該旋轉裝置(300)。 A lifting module comprising: a fixing portion (200) including a base member (210); and a rotating device (300) coupled to the base member in a rotatable and vertically movable manner a shaft member (220); a lifting device (400) coupled to the rotating device (300) and the guiding member (230), which can be rotated by the rotating device (300) Moving up and down along the guiding member (230) formed on the fixing portion (200); and driving device (500) coupled to the rotating device (300) and the lifting device (400) for rotation The rotating device (300). 如申請專利範圍第1項的升降模組,其中該旋轉裝置(300)的特徵在於係由旋轉結合構件(600)連接於連接至該升降裝置(400)上的固定環構件(610)及該升降裝置(400),該旋轉結合構件包括旋轉環構件(620),其一端以可轉動方式連接至該固定環構件(610),而另一端則連接至並隨該旋轉裝置(300)旋轉。 The lifting module of claim 1, wherein the rotating device (300) is characterized by a rotating coupling member (600) coupled to a fixing ring member (610) coupled to the lifting device (400) and the A lifting device (400) comprising a rotating ring member (620) rotatably coupled to the stationary ring member (610) at one end and coupled to and rotatable with the rotating device (300). 如申請專利範圍第2項的升降模組,其中該升降裝置(400)的特徵在於係由連接於該導引構件(230)及該升降結合構件(700)的該固定構件(710)連接至該導引構件(230),該升降結合構件包括活動構件(720),其一側末端係以可移動方式連接至該固定構件(710), 而另一側末端則連接至該升降裝置(400)。 The lifting module of claim 2, wherein the lifting device (400) is characterized by being connected to the fixing member (710) connected to the guiding member (230) and the lifting coupling member (700) to The guiding member (230) includes a movable member (720) having a side end movably coupled to the fixing member (710), The other end is connected to the lifting device (400). 如申請專利範圍第2項的升降模組,其中該旋轉裝置(300)的特徵在於包括該旋轉構件(310),其係以可旋轉及垂直移動的方式結合於該軸桿構件(220)。 A lifting module according to claim 2, wherein the rotating device (300) is characterized by comprising the rotating member (310) coupled to the shaft member (220) in a rotatable and vertically movable manner. 如申請專利範圍第4項的升降模組,其中該軸桿構件(220)的特徵在於係為一滾珠螺桿,而該旋轉構件(310)為一滾珠螺帽。 The lifting module of claim 4, wherein the shaft member (220) is characterized by a ball screw and the rotating member (310) is a ball nut. 如申請專利範圍第4項的升降模組,其中該旋轉裝置(300)的特徵在於進一步包括一個或多個結合構件(320、330),其連接該旋轉構件(310)及該旋轉環構件(620)。 A lifting module according to claim 4, wherein the rotating device (300) is characterized by further comprising one or more coupling members (320, 330) connecting the rotating member (310) and the rotating ring member ( 620). 如申請專利範圍第3項的升降模組,其中該升降裝置(400)的特徵在於包括該升降構件(410),其係連接至該固定環構件(610)及該活動構件(720)。 A lifting module according to claim 3, wherein the lifting device (400) is characterized by comprising the lifting member (410) coupled to the fixing ring member (610) and the movable member (720). 如申請專利範圍第7項的升降模組,其中該升降構件(410)的特徵在於其形成有一貫穿孔,其內設置該軸桿構件(220)及該旋轉裝置(300)。 The lifting module of claim 7, wherein the lifting member (410) is characterized in that it is formed with a permanent perforation in which the shaft member (220) and the rotating device (300) are disposed. 如申請專利範圍第7項的升降模組,其中該升降裝置(400)的特徵在於進一步包括該升降構件(420),其係連接至該升降構件(410)。 The lifting module of claim 7, wherein the lifting device (400) is characterized by further comprising the lifting member (420) coupled to the lifting member (410). 如申請專利範圍第9項的升降模組,其中該升降構件(420)的特徵在於其形成有一磁鐵構件(430)。 A lifting module according to claim 9, wherein the lifting member (420) is characterized in that it is formed with a magnet member (430). 如申請專利範圍第1項的升降模組,其中該驅動裝置(500)包含:轉子(510),具有一個或多個永久磁 鐵,其形成於該旋轉裝置(300)上;以及定子,其係形成於該升降裝置(400)上,並可在供電時透過磁性旋轉該轉子(510)。 The lifting module of claim 1, wherein the driving device (500) comprises: a rotor (510) having one or more permanent magnets Iron is formed on the rotating device (300); and a stator is formed on the lifting device (400) and can magnetically rotate the rotor (510) during power supply. 如申請專利範圍第1項的升降模組,其中該升降模組的特徵在於進一步包括測量裝置(800),其係連結於該升降裝置(400),並可測量該升降裝置(400)的移動距離。 The lifting module of claim 1, wherein the lifting module is further characterized by further comprising a measuring device (800) coupled to the lifting device (400) and measuring movement of the lifting device (400) distance. 如申請專利範圍第12項的升降模組,其中該測量裝置(800)的特徵在於包括:手動調整單元(810),其係以一特定的距離連接於該基座構件(210);一編碼器,連接至該手動調整單元(810);以及標尺構件(830),其係連接至該升降裝置(400),以使其連結至該編碼器(820)。 The lifting module of claim 12, wherein the measuring device (800) is characterized by comprising: a manual adjusting unit (810) connected to the base member (210) at a specific distance; Connected to the manual adjustment unit (810); and a scale member (830) coupled to the lifting device (400) for attachment to the encoder (820). 如申請專利範圍第1項的升降模組,其中該升降模組的特徵在於進一步包含一掉落防止裝置(900),其可防止該升降裝置(400)在該驅動裝置(500)故障時,因其自身重量而掉落。 The lifting module of claim 1, wherein the lifting module is further characterized by further comprising a drop preventing device (900) for preventing the lifting device (400) from malfunctioning when the driving device (500) fails Dropped by its own weight. 如申請專利範圍第14項的升降模組,其中該掉落防止裝置(900)的特徵在於包含:掉落偵測感應器(910、920),裝設於該導引構件(230)及該升降裝置(400)上,以偵測該升降裝置(400)因其自身重量而致的掉落;以及夾持單元(930),其係裝設在該基座構件(210)上,並連接至該掉落偵測感應器(910、920),以使其在該升降裝置(400)因自身重量而掉落時可將其 夾住。 The lifting module of claim 14, wherein the drop preventing device (900) is characterized by comprising: a drop detecting sensor (910, 920) mounted on the guiding member (230) and the a lifting device (400) for detecting a drop of the lifting device (400) due to its own weight; and a clamping unit (930) mounted on the base member (210) and connected Up to the drop detecting sensor (910, 920) so that the lifting device (400) can be dropped when it is dropped by its own weight Clamped. 一種升降裝置,包含:一裝置基座(20);至少一個或多個申請專利範圍第1至15項中任一項所述的該升降模組(100);以及升降夾頭(30),裝設在包含於該升降模組(100)內的該升降裝置(400)。 A lifting device comprising: a device base (20); at least one or more of the lifting module (100) according to any one of claims 1 to 15; and a lifting chuck (30), The lifting device (400) is included in the lifting module (100). 如申請專利範圍第16項的升降裝置,其中該升降夾頭(30)係透過磁性牢固地附著至該升降裝置(400)的頂端。 The lifting device of claim 16, wherein the lifting chuck (30) is firmly attached to the top end of the lifting device (400) by magnetic force. 如申請專利範圍第16項的升降裝置,其中該升降夾頭(30)設有輔助附著構件(31),其係固定在包含於該升降裝置(400)內的該升降構件(420)上。 The lifting device of claim 16, wherein the lifting chuck (30) is provided with an auxiliary attachment member (31) fixed to the lifting member (420) contained in the lifting device (400). 如申請專利範圍第18項的升降裝置,其中該升降構件(420)形成有水平控制突出部(422),而該輔助附著構件(31)則形成有一個或多個水平控制溝槽(31a),可供至少一部分的該水平控制突出部(422)插入其內。 The lifting device of claim 18, wherein the lifting member (420) is formed with a horizontal control protrusion (422), and the auxiliary attachment member (31) is formed with one or more horizontal control grooves (31a) At least a portion of the horizontal control protrusion (422) is insertable therein. 如申請專利範圍第19項的升降裝置,其中該水平控制突出部(422)係以球狀形式形成於該升降構件(420)的中心頂端,而該水平控制溝槽(31a)則形成於該輔助附著構件(31)的底側上對應於該水平控制突出部(422)的位置。 The lifting device of claim 19, wherein the horizontal control protrusion (422) is formed in a spherical shape at a center top end of the lifting member (420), and the horizontal control groove (31a) is formed in the The position on the bottom side of the auxiliary attachment member (31) corresponds to the horizontal control protrusion (422). 如申請專利範圍第20項的升降裝置,其中該水平控制溝槽(31a)係形成為複數個,該水平控制溝槽(31a)中至少一個具有對應於該水平控制突出部(422) 之形狀的形狀,該水平控制溝槽(31a)中至少一個具有只能讓該水平控制突出部(422)沿向前及向後方向移動的形狀,該水平控制溝槽(31a)中至少一個具有只能讓該水平控制突出部(422)沿著向左及向右方向移動的形狀,以及該水平控制溝槽(31a)中至少一個具有可以讓該水平控制突出部(422)沿所有方向移動的形狀。 The lifting device of claim 20, wherein the horizontal control groove (31a) is formed in plurality, and at least one of the horizontal control grooves (31a) has a corresponding horizontal control protrusion (422) a shape of a shape, at least one of the horizontal control grooves (31a) having a shape that only moves the horizontal control protrusion (422) in the forward and backward directions, at least one of the horizontal control grooves (31a) having The shape of the horizontal control protrusion (422) can only be moved in the leftward and rightward directions, and at least one of the horizontal control grooves (31a) has the horizontal control protrusion (422) movable in all directions. shape. 如申請專利範圍第16項的升降裝置,其中該升降夾頭(30)係以一特定距離(D)附著至該升降裝置(400)上。 The lifting device of claim 16, wherein the lifting chuck (30) is attached to the lifting device (400) at a specific distance (D).
TW102107484A 2012-05-11 2013-03-04 Elevating module and elevating apparatus TWI623474B (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
??10-2012-0050369 2012-05-11
KR1020120050369A KR101379834B1 (en) 2012-05-11 2012-05-11 Elevating module and elevating apparatus using the same

Publications (2)

Publication Number Publication Date
TW201400388A true TW201400388A (en) 2014-01-01
TWI623474B TWI623474B (en) 2018-05-11

Family

ID=49854448

Family Applications (1)

Application Number Title Priority Date Filing Date
TW102107484A TWI623474B (en) 2012-05-11 2013-03-04 Elevating module and elevating apparatus

Country Status (3)

Country Link
JP (1) JP6261185B2 (en)
KR (1) KR101379834B1 (en)
TW (1) TWI623474B (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101474695B1 (en) 2014-09-18 2014-12-18 (주)삼정오토메이션 Z-axis stage using direct drive motor
KR102567650B1 (en) 2021-12-28 2023-08-18 주식회사 한성시스코 Stage device including a z-axis stage and a z-axis stage
KR20240105986A (en) 2022-12-29 2024-07-08 주식회사 한성시스코 Stage device equipped with a chuck rotating part

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2876388B2 (en) * 1994-09-02 1999-03-31 東京エレクトロン株式会社 Transfer device
KR20000002236U (en) * 1998-06-19 2000-02-07 김영환 Linear motor
JP4032911B2 (en) * 2002-10-02 2008-01-16 豊和工業株式会社 Spindle head drop prevention device for linear motor driven machine tools
JP2005051188A (en) * 2003-07-28 2005-02-24 Yasuhito Itagaki Carrying-process layout method, composite-function robot, and clamping type aligner device having completely hermetic structure
KR100637590B1 (en) * 2005-07-08 2006-10-23 주식회사 탑 엔지니어링 Apparatus for cutting glass substrates in manufacturing process of flat type displayer
JP4836684B2 (en) * 2006-06-21 2011-12-14 株式会社日本マイクロニクス Inspection stage and inspection device
KR100779029B1 (en) * 2006-12-15 2007-11-23 세크론 주식회사 Probe station and testing method for a wafer using the same
JP5387760B2 (en) * 2010-04-07 2014-01-15 株式会社安川電機 θZ drive device and stage device

Also Published As

Publication number Publication date
TWI623474B (en) 2018-05-11
JP2014003281A (en) 2014-01-09
KR101379834B1 (en) 2014-04-01
KR20130126328A (en) 2013-11-20
JP6261185B2 (en) 2018-01-17

Similar Documents

Publication Publication Date Title
CN108358058B (en) Gesture-adjusting intelligent lifting appliance
CN208843606U (en) A kind of intelligent suspender of posture adjustment
KR101477185B1 (en) 3-Dimension Scanner Platform and Scanning Device Having the Same
JP6122512B2 (en) Probe deployment mechanism of measuring machine with disconnected locator coupling
TWI623474B (en) Elevating module and elevating apparatus
CN113247823B (en) Automatic aligning gear of steel construction installation qxcomm technology
JP2007185086A (en) Magnetically elevated wide-area stage device
TW201344213A (en) Electromagnetic controlled point contact apparatus
US6766996B1 (en) Manipulator
CN205685296U (en) Device for equipment installation alignment
JP3940277B2 (en) Stage equipment
CN202507265U (en) Automatic adjusting device of operating platform
CN102507996B (en) Probe card lifting mechanism
KR20230164930A (en) Lifting apparatus and method using thereof
CN112490158B (en) Chip back-mounted splicing equipment and splicing method
KR20180045255A (en) A apparatus for rotating heavy parts
CN204211424U (en) A kind of lifting support
CN113448194A (en) Photoetching machine and leveling structure and leveling method of mask mounting plate of photoetching machine
CN113325673A (en) Lithography machine and exposure mechanism capable of achieving accurate alignment
TW201524730A (en) Nano-grade optical alignment and embossment leveling device
CN109188321B (en) Synchronous linear motor secondary magnetic field non-uniform test experiment table
CN209247011U (en) A kind of intelligence mapping laying out apparatus based on BIM
CN221190592U (en) Electronic component handling device capable of being adjusted at multiple angles
CN108163527A (en) A kind of tipper for turning box for cylinder type lithium battery
KR20130101460A (en) Stage apparatus