TW201350887A - Module for exchanging an interface unit in a testing system for testing semiconductor elements and testing system with such module - Google Patents

Abstract

The invention relates to a module for exchanging an approximately planar interface unit in a testing system for testing semiconductor elements. The module includes a base element, a holder, and guide elements. The guide elements are embodied so that the interface unit can be moved by means of a linear, translatory movement from an end position into an intermediate position and from the intermediate position into a removal position that is situated outside the testing system. The mechanism includes a lever mechanism that is controlled by a sliding guide and is supported so that it can move crosswise to the linear translation movement of the holder.

Description

Module for replacing a joint unit in a test system for testing a semiconductor component and a test system having the same

The present invention relates to a module for replacing an Interface Unit in a test system for testing a semiconductor component and a test system having the same.

JP 9 159 730 A discloses a test device for testing a semiconductor component in which a performance board is attached to the test head so that it can be pulled out of the test head laterally like a drawer. The performance board has a guide hole through which the guide pin of the test head extends for placement of the performance board. The performance board can be easily replaced by being pulled laterally.

Another test device for testing semiconductor components is disclosed in EP 1 495 339 B1 and US 2003/019 4821 A1, in which the secondary assembly supporting the joint unit is pivotally attached to the test system. The pivoting configuration of the secondary assembly makes it easy to easily remove the joint unit from the test system and replace it. Preferably, a sub-assembly is provided with a telescopic extension that allows the engagement unit to be pulled out of the area of the test system.

DE 102 05 115 B4 discloses a coupling device which is embodied to connect a first plate of a test device fastened to an electronic component and a second plate fastened to an operating device of the electronic component. The feed frame is guided on the first plate to be allowed to move perpendicular to the plane of the plate. The second plate is connected to an additional coupling device in the form of an auxiliary frame located in its edge region. The second plate can be detachably coupled to the feed frame via the auxiliary frame. On each of the opposite sides, the auxiliary frame has two respective outwardly extending swaying bosses that can be inserted into corresponding sliding guides of the feed frame and parallel to the plane of the feed frame A sliding auxiliary frame that can be slidably engaged with these corresponding sliding guides to engage in precisely defined positions. This starting action takes place by means of a conveyor belt.

DE 197 52 229 A1 describes a telescopic coupling for a wafer tester. In this case, the test head is mounted on a trolley. The test head is mounted on the trolley in a pivotal connection. This manner of pivotal connection allows the test head to be placed in an upwardly placed position such that the loading plate and the calibration or fastening plate and the DUT board can be slotted in a manner that is attached to the test head of the electronic circuit tester. The test head can be pivoted to a different angle so that an interface is formed between the slot and the automated material handling device. To create an interface between the slot and the wafer tester of the automated material handling device or wafer test station, the frame can be attached to the test head. The fixture device corresponding to the frame is mounted to the automated material handling device or wafer test station for aligning the test head to the processing device or test station such that the socket or wafer probe contacts the component or circuit to be tested.

It is also known that the joint unit can be pulled out and pushed in as a drawer; in the retracted position of the drawer, the joint unit is moved to the end position by linear movement of the plane of the vertical joint unit. The movement to the end position is initiated by the pneumatic cylinder and is performed automatically. An additional pneumatic cylinder is also provided to the stationary unit at the end position. This device is quite advantageous compared to the device known from EP 1 495 339 B1, since the joint unit is brought to the end position in a linear movement. The pivoting movement known from EP 1 495 339 B1 poses a significant risk in contacting the pins of the test system with the engagement unit, or the pins that align with the corresponding alignment holes in the engagement unit. The complex trajectory of the joint unit moving in and out of the test system requires a plurality of cylinder/piston units that are independently pneumatically drivable. This mechanism does allow for a safer replacement of the engaging unit without causing damage to the contact pins, allowing the user to quickly perform the replacement with a small amount of motion. However, this device is much more expensive than the devices known from EP 1 495 339 B1.

It is an object of the present invention to create a module for replacing an approximately planar joint unit in a test system for testing semiconductor components that allows for safe and reliable replacement of the joint unit without damaging the contact pins or the calibration pins, which is an inexpensive design. With basically no maintenance.

This object is achieved by a module having the features of the first item of the patent application. Preferred embodiments of the invention are disclosed in the dependent claims.

A module for replacing an approximately planar joint unit in a test system for testing a semiconductor component according to the present invention, comprising: a base member that can be fastened to a test system; a support device that can accommodate the joint unit; and a plurality of guides a guiding member by which the supporting device can be fastened to the base member such that the supporting device can move between the end position of the base member and the removed position; in the end position, the engaging unit is located at a joint plane, and the guiding support device passes The guiding unit of a predetermined trajectory comprises: at least one crossbar mechanism designed to guide at least a certain distance of the linear translation movement from the end position toward the vertical joint plane; At least one slide guide for actuating a crossbar mechanism, the slide guide being supported for movement in a direction of linear translational movement of the cross-engagement unit; and activation means for moving the slide guide such that the slide The lever mechanism is activated.

This module can be fastened to the test system with its base element. Conventionally, a test system for testing semiconductor components includes a test unit ("tester") and an operating unit ("handler" or "prober"). The test unit contains a test head that is used to contact the semiconductor component to be tested and is equipped with evaluation electronics. The operating unit contains elements that provide the semiconductor component to be tested to the test unit. In order for such a test system to test different semiconductor components, a bonding unit is provided which is located in the junction area between the test unit and the operating unit and has contact elements for contacting the electronic semiconductor component to be tested. The contact elements are each configured to be specific to the pattern of the semiconductor component to be tested so that it can properly contact the contact points of the semiconductor component. Depending on the test system, this joint unit must be fastened to the test unit or the operating unit. The module according to the invention is fastened to the test unit or the operating unit with the base element instead of being fastened directly to the test unit or the operating unit with the joint unit.

The bonding unit is an approximately planar element that is typically comprised of a rigid circuit board. Contact pins and electronic components integrated into the bonding unit can protrude from the circuit board. When the test system is used, the joint unit must be placed in a specific location in the test unit or in the operating unit of the test system. A plane that includes an approximately planar joint unit at its location in use will be referred to hereinafter as the joint plane. The module according to the invention is designed such that the base member is fastened to the test system in a manner corresponding to the guiding element such that it can move the engaging unit to an end position at the joint plane.

The guiding element of the module is designed such that the engaging unit is movable between the end position and the removal position with a supporting means supporting the engaging unit guided through the predetermined trajectory. The trajectory includes at least one linear translational movement starting from an end position that is perpendicular to the junction and the plane. The linear component of this predetermined trajectory is guided by the crossbar mechanism. The guiding element further comprises at least one sliding guide that is supported to be movable across the direction of linear translational movement of the support device. The slide guide can be moved with the slide guide engaging the crossbar mechanism to activate the device such that the crossbar mechanism is activated as the slide guide moves.

Preferably, the slide guide is designed to secure the crossbar mechanism to the end position.

Preferably, the module has two crossbar mechanisms that engage individual opposing sides of the support device, and each crossbar mechanism can be activated by a slide guide.

The actuating device of the mobile slide guide is preferably an endless conveyor belt. This conveyor belt can be a toothed belt, a steel cable or a chain. The starting device can also be a rod mechanism.

Preferably, the crossbar mechanism has at least one crossbar arm, one end of which is pivotally fastened to the base member and the other end of which is pivotally fastened to the support device; the slide guide has a cam track (cam track) And engaging the pivoting pins located on the crossbar arm in sequence, by controlling the movement of the sliding guide to control the pivotal movement of the crossbar relative to the base member; the crossbar arm having a fixed pin located at the pivot The turn pin is fastened to the end of the crossbar arm of the base member and engages the other fixed cam track on the slide guide at least at the end position.

The cam rails are implemented to be inclined with respect to the joint plane; each of the cam rails preferably has an individual fixed portion, wherein the corresponding stitch is located at the end position, and the fixed portion has a gentler relationship with respect to the joint plane than the remaining portion of the cam rail The inclination. With this fixed portion, the support device and the engagement unit are both fixed to their end positions by the slide guide, and only a slight force is required to support the slide guide at this position. The frictional force or spring element of this system is sufficient to achieve this, particularly a gas spring that can be used to assist in the ingress and egress action at the end position.

Preferably, a launch rail is provided that can be used to activate the slide guide. The actuating crossbar can have a tilting mechanism having at least a tilting position corresponding to the end position and the intermediate position.

The crossbar mechanism preferably has a linear guide comprising two crossbar arms pivotally coupled to each other by a shared pivot joint; the two crossbar arms are individually pivoted The means of the joint is pivotally connected to the base member and/or the support device at one end, and at least one of the crossbar arms is pivotally disposed in the pair of the crossbar arms including the support device and the base member The other parts are the same length from the shared pivot joint to the crossbar arm attached to the individual pivot joints of the base member.

In an embodiment, the crossbar mechanism can have a linear guide having two mutually coupled crossbar arms, and an additional guide having at least one crossbar arm, the pivoting action of which is respectively guided by the sliding guide The splitter cam track of the deflector is controlled such that the support device begins at the end position, first performing a linear translational movement perpendicular to the joint plane, and then performing a pivotal movement.

Preferably, the support device has a slide rail that is extendable in a telescopic manner to allow the engagement unit to move in a straight line.

According to the module of the present invention, when the engaging unit is replaced, the engaging unit is moved out from the end position to enter the intermediate position, in which all the contacts are released and all the calibrated stitches and the calibrating holes are separated from each other, followed by the telescopic slide , moving out of the intermediate position, and entering the removal position where the joint unit can be simply replaced. In this case, it is only necessary to raise the test unit by a certain distance. There is no need to completely remove the test unit from the operating unit. This way saves a lot of time on the replacement joint unit.

The module according to the invention consists essentially of mechanical elements and requires substantially no electronic or pneumatic control. Therefore maintenance requirements are quite low and reliable.

The module can be integrated into a fully automated test system and connected to the corresponding control unit. This requires only a separate automatic control starter, such as an electric motor or pneumatic piston/cylinder unit to activate the conveyor belt.

The engagement unit can have two downwardly projecting positioning pins to engage the corresponding positioning sleeve. The positioning sleeve is fixed to the operating unit. The positioning pin and the positioning sleeve form a pneumatically actuatable positioning system (docking system) and are implemented in accordance with US 6,870,362 B2. A combination of a module that replaces the joint unit with a mechanism that lifts the joint unit from the end position to the intermediate position in a straight line manner, and a device that pulls out the joint unit, such as a telescopic slide rail, constitutes an independent inventive concept, since the module It is only necessary to roughly position the joint unit at the end position, and fine adjustments can be made to locate the system.

The module may have a distance adjustment device comprising a plurality of threaded elements coupled to each other in a conveyor belt manner, in a special threaded flange or threaded sleeve that engages a corresponding threaded element on the operating unit or test unit. The conveyor belt can activate components, such as a manual runner, to initiate rotation of all of the threaded elements of the distance adjustment device and change the distance of the module to the operating unit or test unit. The combination of the distance adjusting device for replacing the engaging unit with a mechanism for lifting the engaging unit from the end position to the intermediate position in a linear lifting motion, and a device for pulling out the engaging unit, such as a telescopic slide, are advantageous. This makes it possible to use a plurality of different types of joining units of different thicknesses and heights, and to easily replace, position and adjust the joining unit.

1. . . Test system

2. . . Module

3. . . Operating unit

4. . . Test unit

5. . . Base element

6. . . Front side bracket

7. . . Rear side bracket

8. . . Right side longitudinal bracket

9. . . Left end longitudinal bracket

10. . . Crossbar mechanism

11. . . Cross arm

12. . . Cross arm

13. . . Pivot joint

14. . . Pivot joint

15. . . Telescopic rail

16. . . Pivot joint

17. . . Pivot joint

18. . . Pivot joint

19. . . Support frame

20. . . Joint unit

20/1. . . Enhanced framework

20/2. . . Joint plate

twenty one. . . Groove

twenty two. . . Convex

twenty three. . . Support plate

twenty four. . . Positioning sleeve

25. . . Sliding guide

26. . . Pivot cam track

26/1. . . First flat part

26/2. . . Inclined section

26/3. . . Second flat portion

27. . . Fixed cam track

28. . . Fixed pin

29. . . conveyor

30. . . Guide roller

31. . . Pull rod

32. . . Start crossbar

33. . . Gas spring

34. . . Joint plane

35. . . support

36. . . Slide rail

37. . . Fastening frame

38. . . Pivoting stitch

39. . . Fixed plate

40. . . Fixed part

41. . . Long hole

42. . . stitch

43. . . Wafer

44. . . Connection plate

45. . . Long crossbar arm

46. . . Short crossbar arm

47. . . Separate crossbar arm

48. . . Pivot joint

49. . . Pivot joint

50. . . Pivot joint

51. . . Pivot joint

52. . . Pivot joint

53. . . Pivot joint

54. . . Rotating stitch

55. . . stitch

56. . . Long hole

57. . . Pivoting stitch

58. . . Sliding guide

59. . . Pivot cam track

60. . . Pivot cam track

60/1, 59/1. . . Startup section below

60/2, 59/2. . . Upper fixed part

61. . . Fixed cam track

62. . . Fixed pin

63. . . handle

64. . . Small board

65. . . Distance adjustment device

66. . . Distance adjustment component

67. . . Threaded flange

68. . . gear

69. . . Bearing washer

70. . . conveyor

71. . . Guide roller

72. . . Pull rod

73. . . Manual runner

74. . . Pre-centering stitch

75. . . Deflection link

The invention will be explained in more detail by way of examples shown in the drawings. In the schema:
Figure 1 is a schematic and perspective view of a test system having a module for replacing a mating unit.
Figure 2 shows the module in Figure 1 at the removal position.
Figure 3 shows the module of Figure 1 in the middle position.
Figure 4 shows the module of Figure 1 at the end position.
Figure 5 is a side elevational view of the slide guide of the module of Figure 1.
Figure 6 is a perspective view of a module for replacing a joint unit in a vertical test system.
Figure 7 is a partial perspective view of the module of Figure 6 in the upper crossbar mechanism region.
Figure 8 is a cross-bar mechanism and a telescopic slide of Figure 7, without a perspective view of the remainder of the module.
Figures 9 through 11 are perspective views of the replacement module of the horizontal test system that are fastened to the underside of the test system at various locations.
Figure 12 is a partial perspective view of the crossbar mechanism of the replacement module of Figures 9 through 11.
Figure 13 shows the crossbar mechanism of Figure 12, in which the support plate is removed from the slide guide so that other portions are visible.
Fig. 14 to Fig. 16 are partial cutaway views of different planes of the crossbar mechanism of Figs. 12 and 13.
Figures 17 and 18 show the two sides of the sliding guide.
Figure 19 is a perspective view of the module of Figure 6, with the engagement unit at the end position and distance adjustment device depicted in an exploded view.
Figure 20 is a partial perspective view of the distance adjusting member of the distance adjusting device according to Figure 19.
Figure 21 is a partial perspective view of the crossbar mechanism of the replacement module of the horizontal test system that can be fastened to the test system.
Figure 22 is a side elevational view of the slide guide of the crossbar mechanism of Figure 21.

FIGS. 1 through 5 schematically depict a test system 1 for testing a semiconductor component in accordance with a first exemplary embodiment of a module 2 for replacing an interface unit according to the present invention.

The term "semiconductor elements" includes semiconductor components and wafers.

The test system has an operating unit 3 (probe) and a test unit 4 (tester). During operation, the operating unit 3 is located below the testing unit 4 (Fig. 1); the module 2 for replacing the joining unit is located between the operating unit 3 and the testing unit 4. This module 2 will be referred to as a replacement module 2 hereinafter.

In the first exemplary embodiment, the operation unit 3 is used to supply the wafer 43 to the bonding unit 20. Both the operation unit 3 and the test unit 4 are implemented in an approximately block shape, and the side surfaces of the module 2 facing each other are placed horizontally. This test system is called a horizontal test system.

The replacement module 2 has a base member 5 fastened to the test system 1. In the present exemplary embodiment, the base member 5 is fastened to the operating unit 3. The base member 5 is a frame-like object made of aluminum or steel, which conforms to the contour of the operating unit 3. The base member 5 has front and rear side brackets 6, 7 and right and left longitudinal brackets 8, 9. The positions of "forward" and "reverse" and "left" and "right" refer to the perspective of the operator of the test system 1, as such test systems usually have one side that enables the operator to operate the system, in this exemplary implementation. For example, it is the lower right of the figures in Figures 1 to 4.

Each of the longitudinal brackets 8, 9 has a respective crossbar mechanism 10 connected thereto. In the present exemplary embodiment, each crossbar mechanism 10 is implemented identically, so only one of the two crossbar mechanisms 10 will be explained below.

The crossbar mechanism has a scissor joint composed of a first crossbar arm 11 and a second crossbar arm 12.

At one end, the first crossbar arm 11 is connected to the interior of the longitudinal brackets 8, 9 by a fixed pivot joint 13. At its other end, the first crossbar arm 11 is connected to the telescopic slide rail 15 with another pivot joint 14. The telescopic slide 15 will be described in more detail below. The pivot joint 14 is implemented to move in the longitudinal direction of the telescopic slide rail 15.

The first crossbar arm 11 and the second crossbar arm 12 are pivotally connected to their longitudinal intermediate positions using a pivot joint 16.

At one end, the second crossbar arm 12 is connected by a pivot joint 17 to the interior of the longitudinal brackets 8, 9 which are movable in the longitudinal direction of the longitudinal brackets 8, 9. At its other end, the second crossbar arm 12 is coupled to the telescoping rail 15 with another fixed pivot joint 18.

The scissor joint can be folded open (Fig. 2 and Fig. 3) or closed (Fig. 4) as a pair of scissors. When the scissor joint is folded open or closed, the telescopic slide is raised or lowered relative to the base member 5. When this occurs, the telescopic slide 15 is always parallel to the individual longitudinal supports 8, 9.

Since the two fixed pivot joints 13, 18 are located opposite each other, the crossbar arms extend from the shared pivot joint 16 to the portions of the pivot joints 13, 14, 17, 18, wherein the crossbar arms 11, 12 The connection to the base member 5 and the telescopic slide rail 15 are all of the same length, and opening and closing the scissor joint can cause linear movement of the telescopic slide rail 15. The scissor joint thus constitutes a linear guide because it guides the telescopic slide 15 to move along a linear trajectory.

The two telescopic slides 15 support to form a support to support the support frame 19 of the joint unit 20. The joint unit 20 is composed of a reinforcing frame 20/1 and a joint plate 20/2.

The support frame is supported by the telescopic rail 15 in a moving manner so that it can be pulled out of the area above the operating unit 3.

The support frame 19 has a groove 21 so that the convex portion 22 protruding from the joint unit can be inserted, and thus the joint unit 20 can be fixed to the support frame 19.

The two support plates 23 are protruded from the outside of the reinforcing frame 20/1 of the joint unit 20. Two downwardly projecting positioning pins are located on each of the support plates. The positioning pins can engage the corresponding positioning sleeves 24. The positioning sleeve 24 is fastened to the operating unit 3. The positioning pins and the positioning sleeve 24 constitute a pneumatic starting positioning system (docking system) and are implemented in accordance with US 6,870,362 B2.

The crossbar mechanisms 10 are each connected to a respective slide guide 25. The slide guide 25 is supported by the base member 5 to move in a linear manner. The slide guide 25 of the present exemplary embodiment has a first cam rail 26 and a second cam rail 27. The first cam track 26 will be represented by a pivoting cam track 26, while the second cam track 27 is represented by a fixed cam track 27. The cam rails 26, 27 are elongated grooves in the slide guide such that the first rail arm 11 engages the pivot pin (not visible in Figures 1 through 5) and the fixed pin 28.

Two sliding guides 25, which are implemented identically in the exemplary embodiment of the invention, are coupled to the conveyor belt 29, and a plurality of guiding rollers 30 are provided on the base member 5 such that the conveyor belt One portion extends along one of the two crossbar mechanisms, and the portions of the conveyor belts are respectively engaged with one of the two slide guides, so that when the conveyor belt 29 moves, the conveyor belt makes two The slide guide moves in a linear manner.

The conveyor belt 29 of the present exemplary embodiment may be a toothed belt. However, it can also be implemented in the form of a chain, a steel cable or a rod mechanism.

On the base member, a tie rod 31 is provided which projects a specific distance from the front end of the base member. Having a launching crossbar 32 at the distal end of the pull rod 31 provides a swaying mechanism. The actuating crossbar 32 is coupled to a pinion that engages the conveyor belt in a cogged fashion, thus causing the conveyor belt 29 to move as the pinion rotates in a manner that activates the crossbar. This tie rod 31 projects a sufficient distance from the base member 5 so that the actuating crossbar 32 can be used freely even when the test system is closed.

When the actuating crossbar 32 is to be replaced, an automatic actuating device, such as a pneumatic lift/piston mechanism, may also be provided to move the conveyor belt 29.

A spring element 33, which in the present exemplary embodiment may be a gas spring 33, is coupled between the conveyor belt 29 and the base member 5. In the present exemplary embodiment, one end of the gas spring 33 is connected to one of the two slide guides, and the other end is connected to the base member 5.

Figure 4 depicts an adapter 20 at the end position where the positioning pins engage and secure with the corresponding positioning sleeve 24. At this end position, the joint unit is in the position required for the operation of the test system 1. In Fig. 4, the joint unit 20 is described in a simplified schematic engagement plate 20/2. This joint plate 20/2 at the end position is indicated by the joint plane 34 as follows.

The pivot cam track 26 (Fig. 5) has a first flat portion 26/1 (lower in Fig. 5), a steeper inclined portion 26/2 and a second flat portion 26/3 (above the fifth figure). The inclination of the three portions is the inclination with respect to the joint plane, that is, the flat portions 26/1 and 26/3 have only a gentle inclination with respect to the joint plane 34, and the inclined portion 26/2 with respect to the joint plane 34 Has a large slope. In the following, the first inclined portion 26/1 is represented by the first fixed portion 26/1, the second inclined portion 26/2 is represented by the starting portion 26/2, and the third inclined portion 26/3 is represented by the first fixed portion 26/ 3 said.

During the sliding of the slide guide 25, the pivot pin of the cross arm 11 slides within the pivot cam rail 26 such that the pivot pin slides from the first fixed portion 26/1 along the activation portion 26/2 to the second The fixed portion 26/3, the stitch is lifted up, and the crossbar arm 11 pivots around the pivot joint 13. The pivoting action is mainly performed by the cooperation of the pivot pin and the starting portion 26/2. The fixed portions 26/1 and 26/3 are implemented to be flat so that no pivoting action or only a slight pivoting action is produced. In the action of the pivot pin being slid from the first fixed portion 26/1 along the actuating portion 26/2 to the second fixed portion 26/3, the scissor joint is opened, and the support frame 19 having the adapter 20 is from the end The position is raised to the middle position (Fig. 3). Since the second fixed portion 26/3 is implemented to be relatively flat, the slide guide 25 fixes the scissor joint at this intermediate position.

In this intermediate position, the support frame 19 and the adapter 20 can be pulled out of the area of the operating unit 3 in the manner of a telescopic slide. The support frame 19 and the adapter 20 are then located at a removal position (Fig. 2) at which the user can easily replace the adapter 20. Some devices are provided to prevent the telescoping slide from being pulled out when not in the intermediate position. These devices are not described in the simplified illustrations of Figures 1 through 5.

If the slide guide 25 is moved back such that the pivot pin slides from the second fixed portion 26/3 along the activation portion 26/2 to the first fixed portion 26/1, the crossbar arm 11 pivots downward to close Scissor joint. The closed position (Fig. 4) is the end position. In the process of lowering the crossbar arm, the securing pin 28 engages the fixed cam rail 27 with an opening above the fixed cam rail and extending in a direction flat with respect to the mating plane 34 (slightly inclined relative to the mating plane 34). Both the fixed pin 28 and the fixed cam track 27 are located further away from the pivot joint 13 than the pivot pin and the corresponding pivot cam track 26, and a better scissor joint at the end position due to the longer crossbar The ground is additionally fixed.

The fixed stitch 28 and the fixed cam rail 27 provide additional fixation of the telescopic rail 15 and prevent the bracket from bending. Thus, the required tolerances can be met, even without the positioning system comprising the positioning pins and the positioning sleeve 24. This applies in particular to test systems for testing semiconductor components, since the tolerances of this system can be greater than those of test wafer test systems.

During the lowering process, the gas spring 33 is compressed such that the gas spring 33 offsets the weight of the support frame 19, the adapter 20, and the joint unit. As a result, the actuating crossbar 32 can be activated with less force to move the module from the end position (Fig. 4) into the intermediate position (Fig. 3) and back. The swaying mechanism of the actuating crossbar has at least a tilting position of the end position and the intermediate position, so that in the case of connecting the pivoting cam rail 26 and the fixed cam rail 27 in a fixed motion, the replacement module 2 is at the end position and the intermediate position. Supported safely.

In the intermediate position, the support frame can be pulled out in a manner that the telescopic rails 15 can be displaced to replace the adapter 20 using the engagement unit.

Linearly guiding the scissor joints with the crossbar arms 11, 12 ensures that the positioning pins can be properly guided out of the positioning sleeve 24, such as providing additional contact pins on the engagement unit to ensure that the contact pins are not damaged.

The first exemplary embodiment described above is a test system for testing wafers, and an engagement unit equipped with an operation unit (probe) is provided. In the context of the present invention, the test system can be further implemented to test semiconductor components. It will be appreciated by those skilled in the art that the operating unit providing the wafer is represented as a probe and the operating unit providing the individual integrated circuit is represented as an operator.

Figures 6 through 8 depict a second exemplary embodiment of a replacement module 2 in a test system designed to test semiconductor components. The test system is a vertical test system. In other words, the operating unit and the test unit (not shown) are located next to each other and the connecting sides connecting the two are vertically positioned. Correspondingly, the approximate plane between the operating unit 3 and the test unit 4 must be placed vertically.

The replacement module 2 of the vertical test system is basically implemented in the same manner as the replacement module of the horizontal test system, as described in FIGS. 1 to 5. Therefore, the same components are provided with the same reference numerals and will not be described again. The replacement module 2 also has two crossbar mechanisms 10, a lower crossbar mechanism and an upper crossbar mechanism, each having a scissor joint composed of a first crossbar arm 11 and a second crossbar arm 12, respectively. These two rail mechanisms 10 are implemented identically. The lower rail mechanism 10 must support the weight of the joint unit 20, the support frame 19, and the telescopic slide rail 15. Therefore, the first rail arm 11 and the second rail arm 12 are implemented to be thicker and wider than the crossbar arm of the first exemplary embodiment to absorb the weight of the gravity without distorting and transmitting to Base member 5.

Each of the sliding guides 25 is fastened to the two individual brackets 35 by individual connecting plates 43. As shown in Fig. 7, the web is omitted to provide a preferred viewing angle for the bracket and the slide guide. The bracket 35 is movably supported on the slide rail 36. The bracket 35 is connected in the manner of a fastening frame 37 which is fastened to the conveyor belt 29.

The slide guide 25 has the same cam rails 26, 27 as the first exemplary embodiment. The fixed pin 28 and the pivot pin 38 (Fig. 8) are joined to the cam track. The fixed stitch 28 and the pivot pin 38 are implemented in the manner of a roller projecting from the crossbar arm 11 and are embedded in the grooves of the cam rails 26, 27.

The telescopic slide rail 15 has a fixed plate 39 pivotally mounted thereon; the fixed plate 39 is pivotally connected to the longitudinal center of the telescopic slide rail 15 and is coupled to the first and second crossbar arms 11, 12 Part of it. From this connection point, the first fixing plate 39 extends to the end of the portion so that portions of the other telescopic slides 15 can be pulled out therefrom. The end of the portion is closed by the fixed portion 40 of the fixing plate. Adjacent to the fixed portion 40, the fixing plate 39 has an elongated hole 41 through which the stitch 42 fixed to the telescopic slide 15 extends, thereby defining the pivoting action of the fixed plate 39. In the fixing plate 39, a cam rail adjacent to the crossbar arm 11 is provided, which is engaged by a pin projecting from the crossbar arm 11, so that when the scissor joint is closed, the fixing plate 39 is pivoted so that it is fixed The portion 40 secures the telescopic slide so that it cannot be extended. If the telescopic slide is in the extended position (Fig. 7), then the fixed portion 40 of the fixed plate 39 strikes the extended portion of the telescopic slide 15 to prevent the pivotal movement from moving back to the fixed state of the fixed plate 39. This fixing action is transmitted via the cam track/pin mechanism between the fixed plate 39 and the first crossbar arm 11 such that when the telescopic slide 15 is extended, the crossbar mechanism 10 is fixed and cannot be folded closed.

The fixing plate 39 thus ensures that the telescopic rail 15 can only be extended to an intermediate position and is retracted when the crossbar mechanism 10 is folded closed.

Figures 9 through 18 depict a third exemplary embodiment of a replacement module. This permutation module 2 is implemented similarly to the first two exemplary embodiments, and thus the same components are provided with the same reference symbols. These components will not be described again.

The replacement module 2 according to the third exemplary embodiment is again provided as a horizontal test system for testing semiconductor components; in this case, the replacement module is connected below the test system 4, which is attached to FIG. 9 to 11 is only depicted in the form of a plate in a schematic manner.

In this exemplary embodiment, the crossbar mechanism 10 differs from the previous exemplary embodiment in the guidance of the support frame 19 and the engagement unit 20, since a scissor joint is not provided, but a long crossbar arm 45 is provided. A linear guide for the crossbar arm 46, and an additional guide with a separate crossbar arm 47 (Figs. 15 and 16).

The short rail arm 46 of the linear guide corresponds to the first rail arm 11 of the first and second exemplary embodiments. The long crossbar arm 45 is coupled to the telescoping slide rail 15 by a fixed pivot joint 48 and to the base member 5 with a movable pivot joint 49. The short rail arm 46 is coupled to the base member 5 with a fixed pivot joint 50 and to the intermediate portion of the long crossbar arm 45 with another pivot joint 51. The distance between the pivot joints 48 and 49 at one end to the pivot joint 51 at the other end (the effective crossbar distance of the long crossbar arm), and between the pivot joint 50 and the pivot joint 51 The distance (relative to the effective crossbar distance of the short rail arm 46 from the connection point to the long crossbar 45) is the same. The two opposing joints 48, 50 are fixed such that the linear guide guides the pivot joint 50 during pivoting of the long crossbar arm 45 around the movable pivot joint 49, which is fixed at The base member 5 extends along a line perpendicular to the joint unit.

The split rail arm 47 is coupled to the base member 5 with a fixed pivot joint 52 and to the telescoping rail 15 with a movable pivot joint 53. The movable pivot joint 53 is composed of a rotary pin 54 supported on the telescopic slide rail 15 and an elongated hole 56 provided in the split rail arm and extending in the longitudinal direction of the crossbar arm 47.

The movable pivot joint 49 is composed of a long hole 56 and a rotary pin 54, wherein the long hole extends parallel to the joint plane.

The crossbar arm 46 has an outwardly projecting pivot pin 56, and the split rail arm 47 also has another outwardly projecting pivot pin 57.

The linearly movable slide guide 58 has a first pivot cam track 59 and a second pivot cam track 60. The first pivot cam track 59 is engaged by the first pivot pin 56 of the linear guide. The second pivot cam rail 60 is coupled by a second pivot pin 57 of the split rail arm 47 (Fig. 14). The two pivot cam rails 59, 60 are each located at the end region of the respective slat-like slide guide 58.

The slide guide 58 has a fixed cam track 61 with a bottom open in its longitudinal intermediate region. The fixed stitch 62 is fastened to the telescopic slide 15 with the opposing support means such that the fixed stitch 62 can engage the fixed cam track 61.

Each of the pivoting cam rails 59, 60 has an inclined lower starting portion 59/1 and 60/1, respectively, and upper fixing portions 59/2 and 60/2 which are slightly inclined with respect to the engaging unit or parallel thereto.

If the slide guide is moved such that the pivot pins 56, 57 slide upward from the lower ends of the start portions 59/1 and 60/1 toward the fixed portions 59/2 and 60/2, the short cross arms 46 are upward. The pivot joint is pivoted about the pivot joint 50 while the split rail arm 47 pivots upwardly about the pivot joint 52. This raises the telescopic slide rail 15, the support frame 19, and the joint unit 20 together.

When the telescopic slide 15 reaches a certain height, the fixed stitch 62 engages the fixed cam rail 61. Like the two other cam rails 59, 60, the fixed cam rail 61 has a flat fixed portion such that when the slide guide 58 is slid to its end position, all three stitches 56, 57, 62 are simultaneously at the fixed portion.

When the slide guide 58 is moved back, the three stitches slide along the pivot cam rails 59, 60 and the fixed cam rail 61. The shape of the starting portions 59/1 and 60/1 defines the pivoting motion of the crossbar arms 46 and 47; the distance the sliding guide 58 moves defines how far the two crossbars 45, 47 pivot. In the present exemplary embodiment, the shapes of the activation portions 59/1 and 60/1 have been selected such that when the slide guide 58 is moved, the ends of the crossbar arms 45 and 47 connected to the telescopic slide rail 15 are the most The same length is first lowered, and after moving a certain distance, the split rail arm 47 is lowered lower than the long rail arm 45 of the linear guide. As a result, the telescopic slide rail 15 is slightly inclined with respect to the joint plane 34. This different actuation system utilizing the different pivoting cam rails 59, 60 is difficult to observe when viewing the pivoting cam rails 59, 60 by the naked eye. These pivoting elements can be manufactured, for example, in a more inclined manner in the lower region of the starting portion 60/1. In this case, the point of engagement of the length of the crossbar with the pivot pin must be considered so that the more slanting tilt of the cam track does not cause a faster drop. Basically, however, the greater the degree of inclination of the cam track, the faster the corresponding crossbar or crossbar mechanism descends.

The opposing slide guides 58 move in opposite directions when activated by the conveyor belt 29. Each cam track is located inside the corresponding slide guide 58. As a result, each of the slide guides moves in the same direction as viewed in the direction of the cam track, for example, from left to right in Figs. 17 and 18. The cam tracks of the two slide guides 58 thus face in the same direction. These two sets of cam rails, however, have minor differences due to pivoting elements.

In this exemplary embodiment, the split rail arms 47 are controlled by separate pivot cam rails, independent of the respective linear guides. This independence is used to cause the telescopic slides 15 to initially move in the direction of the parallel joint planes, and after a certain distance, they are lowered by a pivoting action.

Fig. 9 depicts that the support frame 19 and the joint unit 20 of the replacement module 2 are all lifted up. In Fig. 10, the support frame is lowered by a certain distance while still being parallel to the joint plane 34. In Fig. 11, the support frame is in an intermediate position in which the telescopic slide rail 15 is lowered relative to the base member 5. The front end of the support frame descends faster than the rear end due to the faster lowering of the split crossbar arm 47 relative to the linear guide 45. Because of this inclination, the support frame of the engaging unit 20 can be pulled out in a downwardly inclined direction. A corresponding handle 63 is provided on the support frame 19 to facilitate pulling out.

The base member 5 has two small plates 64 located at the front ends of the adjacent retracted telescopic slides 15. The small plate 64 extends downward from the base member until it covers a portion of the telescopic slide rail as long as the telescopic slide rail 15 is parallel to the base member and parallel to the joint plane. If the telescopic slide is pivoted to the intermediate position (Fig. 11), it is no longer covered by the small plate 64. The telescopic slide rail can be extended together with the support frame 19 and the joint unit 20. These small plates thus prevent the support frame from being pulled out before the support frame or joint unit is sufficiently far from the joint plane.

The displacement module 2 of the second exemplary embodiment, which is depicted in Fig. 6, has a distance adjustment device 65, which is depicted in an exploded view in Fig. 19, which is raised away from the base member 5. This distance adjusting device 65 has four distance adjusting members 66 (Fig. 20). Each distance adjustment element 66 has a threaded flange 67. The threaded flange 67 is embodied as a thin tube and has external threads on its outer surface. One end of the threaded flange 67 is broken into the gear 68. Gear 68 is located on bearing washer 69. The gear 68 is supported by an axial or radial bearing rotation (not shown).

The four distance adjusting elements 66 are distributed at the edge of the base member with their threaded flanges 67 projecting from the base member 5 in the direction of the operating member.

The second conveyor belt 70 is guided along the edge region of the base member 5 by the guide rollers 71 such that the conveyor belt 70 engages all of the gears 68. The base member has another tie rod 72 projecting from the base member 5 fastened thereto. The pull rod 72 supports a manually activated manual wheel 73 that is coupled to another gear (not shown). This gear is also engaged with the conveyor belt 70 so that the conveyor belt can be moved by rotating the manual runner 73. The rotation of the manual runner 73 is thus transmitted to the entire threaded flange 67 of the distance adjusting member 66. The manual wheel 73 has a digital scale (not shown) which calculates the number of revolutions of the manual wheel.

The individual hollow threaded flanges 67 are fastened in the test unit with screws to corresponding threaded holes (not shown); the screws extend through the hollow threaded flanges 67.

In order to add the test unit 4 to the operating unit 3, a pre-centering stitch 74 is provided which projects from the base member and engages the corresponding hole in the operating unit 3. When the two elements are combined, the pre-centering stitches 74 are guided into the corresponding holes.

By rotating the threaded flange 67 with the manual runner 73, the gear that meshes with the threaded flange 67 moves along the threaded flange 67, causing the base member coupled to the gear by the bearing washer 69 to move along the flange. Therefore, the distance of the base member 5 can be adjusted from the operation unit. In this embodiment, the distance can be freely changed to 40 mm. In principle, the threaded flange 67 can be implemented longer and therefore has a larger adjustment range. The distance adjustment is carried out with an accuracy of 1/100 mm.

The distance adjustment device 65 makes it possible to use different types of engagement units 20, which must be located at different distances from the operating unit. The displacement module 2 equipped with the distance adjustment device here enables various types of engagement units to be quickly and easily replaced and correctly positioned with a small amount of motion adjustment.

The provision of a distance adjusting device on the replacement module 2, which can lift the joint unit to the intermediate position in a linear manner from the end position and has a device such as a telescopic slide to pull out the joint unit, constitutes an independent inventive concept, since it is effective The flexibility of all test systems is increased and different types of joint units are allowed to be used.

In the third exemplary embodiment described above, the crossbar mechanism 10 is activated with a single slide guide having linear guides 45, 46 and separate crossbar arms 47. In order to be coupled to the present invention, it is naturally more desirable to provide two slide guides to activate the linear guide and the separate crossbar arms, respectively.

In the illustrative embodiment explained above, the two slide guides 25, 28 are respectively moved by the conveyor belt in opposite directions. In order to be connected to the present invention, the two slide guides may also be moved in the same direction such that each slide guide moves in the same direction at the same time, i.e., synchronously toward the front end side bracket 6 or synchronously toward the rear end side support. As they move in the same direction, the cam track on a sliding guide must be steered in a mirror image.

Another exemplary embodiment of a replacement module 2 (Figs. 21, 22) having a crossbar mechanism 10 will be described below; the crossbar mechanism 10 is provided for a horizontal test system for testing semiconductor components, wherein the replacement module is Fasten to the bottom of the test unit 4.

The crossbar mechanism 10 roughly corresponds to the crossbar mechanism described in the first exemplary embodiment. The same components are provided with the same reference symbols.

A crossbar mechanism 10 of this type is fastened to the inside of each longitudinal bracket 8, 9. According to the fourth exemplary embodiment, the two rail mechanisms 10 are implemented in a mirror image manner.

The crossbar mechanism 10 has a scissor joint to connect the first and second crossbar arms 11, 12.

One end of the first crossbar arm 11 is connected to the inside of the longitudinal brackets 8, 9 by a fixed pivot joint 13. At its other end, the first crossbar arm 11 is connected to the telescopic rail 15 in the manner of a pivot joint 14. The pivot joint 14 is embodied to be movable in the longitudinal direction of the telescopic slide rail 15.

In the middle of its longitudinal direction, the first and second crossbar arms 11, 12 are pivotally connected to the pivot joint 16.

One end of the second rail arm 12 is connected to the inside of the longitudinal brackets 8, 9 by a pivot joint 17 that is movable in the longitudinal direction of the telescopic rail 15. The other end of the second rail arm 12 is coupled to the telescopic rail 15 by another fixed pivot joint 18.

The two crossbar arms 11, 12 form a scissor joint. The scissor joint can be folded open or closed as a pair of scissors. When the scissor joint is folded open and closed, the telescopic slide is lowered and raised relative to the base member 5. When this occurs, the telescopic slides 15 are always parallel to the respective longitudinal supports 8, 9.

Since the two fixed pivot joints 13, 18 are located opposite each other, the crossbar arms extend from the shared joint pivot joint 16 to the portions of the pivot joints 13, 14, 17, 18, wherein the crossbar arms 11, 12 is connected to the base member 5 and the telescopic slide rail 15, all of the same length, the telescopic slide rail 15 is linearly moved by the scissors-like joint opening and closing shear, and the telescopic slide rail 15 and the individual longitudinal brackets 8, 9 are always mutually parallel. The scissor joint constitutes a linear crossbar guide because it guides the telescopic slide 15 to move along a linear trajectory without causing it to swing back and forth.

The two telescopic slides 15 support to form a support device to support the support frame 19 of the joint unit 20.

Each rail mechanism 10 is coupled to a slide guide 25. The slide guide 25 is supported on the base member to be movable in a linear manner. The slide guide 25 of the present exemplary embodiment has a first cam rail 26 and two second cam rails 27. The first cam track 26 is referred to below as a pivot cam track 26, while the second cam track 27 is referred to below as a fixed cam track 27. The cam rails 26, 27 are elongated grooves in the slide guide 25, wherein the crossbar arms 11, 12 engage the pivot pin and the fixed pin 28, respectively. The free ends of the fixed pins 28 joined by the cam rails, i.e., the ends of the two crossbar arms 11, 12 of the pivot joints 14, 18 are attached.

The fixed stitch 28 and the fixed cam rail 27 can also secure the telescopic slide 15 and prevent the bracket from bending. This is particularly advantageous because the displacement module secured to the underside of the test system has a force applied thereto from below.

The two sliding guides 25, which in the present exemplary embodiment are embodied as mirror-symmetrical to symmetrical vertical planes, are coupled to the deflection link 75 at both ends. The two sliding guides thus move in the same direction at startup. By moving the deflection link 75, the two slide guides can be moved in a linear manner.

Instead of the deflection link 75, a toothed belt, a chain or a steel cable may also be provided. However, the two deflection links 75 can then be implemented as symmetrical or asymmetrical.

A crossbar 32 is provided that is equipped with a tilting mechanism that is provided to move the deflection link 75. The actuating crossbar 32 is coupled to a pinion that engages the deflecting link 75 in a cogging manner, thus moving the deflecting link 75 as the pinion rotates in a manner that activates the crossbar.

An automatic actuating device may also be provided in place of the actuating crossbar 32, such as a pneumatic lift/piston structure, to move the deflection link 75.

Some of the above-described exemplary embodiments are shown to be preferred implementations and can be used to test horizontal test systems or vertical test systems for semiconductor components. In the context of the present invention, all of the exemplary embodiments can be used to test horizontal test systems or vertical test systems for semiconductor components, even if they are specifically implemented as horizontal test systems or vertical test systems for testing semiconductor components.

The present invention can be briefly summarized as follows:

The present invention relates to a module for replacing an approximately planar joint unit in a test system for testing semiconductor components. The module includes a base member, a support device, and a guide member. The guiding element is implemented such that the engaging unit can move in a linear, translational manner from the end position to the intermediate position and then from the intermediate position to a removal position outside the test system. The structure includes a crossbar mechanism controlled by a slide guide and is supported to be movable across the Linear Translation Movement of the support device.

The module according to the invention thus constitutes a removable system which allows the engagement unit to be moved in and out quickly; linear movement into the end position ensures a safe and reliable insertion of the engagement unit into the test system so that the positioning pins are correctly positioned Guide into the corresponding positioning hole without hurting the protruding spring contact pin.

2. . . Module

3. . . Operating unit

4. . . Test unit

5. . . Base element

6. . . Front side bracket

7. . . Rear side bracket

8. . . Right side longitudinal bracket

9. . . Left end longitudinal bracket

10. . . Crossbar mechanism

11. . . Cross arm

12. . . Cross arm

13. . . Pivot joint

14. . . Pivot joint

15. . . Telescopic rail

16. . . Pivot joint

17. . . Pivot joint

18. . . Pivot joint

19. . . Support frame

twenty one. . . Groove

twenty four. . . Positioning sleeve

25. . . Sliding guide

29. . . conveyor

30. . . Guide roller

31. . . Pull rod

32. . . Start crossbar

43. . . Wafer

Claims (15)

A module for replacing an approximately planar interface unit (20) in a test system (1) for testing a semiconductor component, comprising:
a base member (5) is fastened to the test system (1);
a supporting device (19) for accommodating the engaging unit (20); and a plurality of guiding members (10, 15) by which the supporting device (19) is fastened to the base member (5) such that the support The device (19) moves between an end position of the base member (5) and a removal position; in the end position, the engagement unit (20) is located in a joint plane (34) to guide the support device (19) The plurality of guiding elements (10, 15) passing through a predetermined trajectory comprises:
At least one crossbar mechanism (10) is designed to guide at least the support device (19), from the end position, to a direction perpendicular to the joint plane (34), linearly shifting by a certain distance;
At least one slide guide (25, 58) for actuating the crossbar mechanism (10), the slide guide (25, 58) being supported for movement in a linear translation across the support device (19) The direction is moved; and a starting device (29) for moving the sliding guide (25, 58) such that the rail mechanism (10) is activated. The module of claim 1, wherein the sliding guide (25, 58) is implemented to secure the crossbar mechanism (10) at an end position. A module according to claim 1 or 2, wherein two of the crossbar mechanisms (10) are provided, which engage respective opposite sides of the support device (19), each of the crossbar mechanisms The manner of the slide guide (25, 58) is activated. The module of any one of claims 1 to 3, wherein the starting device for moving the sliding guide is a conveyor belt (29) or a rod mechanism. The module of any one of clauses 1 to 4, wherein the crossbar mechanism (10) has at least one crossbar arm (11), one end of which is pivotally fastened to the a base member (5), the other end being pivotally fastened to the support device (19); the slide guide having a cam track that is pivoted with a pin located at one of the crossbar arms (11) Sequentially engaged, by the movement of the sliding guide (25) to control the pivotal movement of the crossbar arm (11) relative to the base member (5); the crossbar arm (11) has a fixed pin (28) a further fixed cam that is located at the end of the crossbar arm (11) of the base member (5) that is farther than the pivoting pin and engages at least the end position of the slide guide (25) Rail (27). The module of claim 5, wherein the crossbar mechanism (10) has at least one crossbar arm (11), one end of which is pivotally fastened to the base member (5), and the other One end is pivotally fastened to the support device (19); the slide guide has the cam track engaged in sequence with the pivot pin located on the crossbar arm (11) through the sliding guide Movement of the deflector (25) to control pivotal movement of the crossbar arm (11) relative to the base member (5); the fixed stitch being located at the crossbar arm or another portion of the guiding member (15) or On the support device (19), another fixed cam rail (61) is located on the slide guide (58) which engages the fixed stitch at least at the end position. The module of claim 5, wherein the cam track is implemented to be inclined with respect to the joint plane; each of the cam rails has a respective fixed portion, wherein the respective stitches are located at the end positions, The fixed portion has a greater inclination relative to the joint plane than the remainder of the cam track. The support device is a support frame (19), as claimed in any one of claims 1 to 7. The module of any one of clauses 1 to 8, wherein the crossbar mechanism (10) has at least one linear guide (45, 46) and a linear guide independent of the linear guide a separate crossbar arm (47), each of the linear guide and the crossbar arm connecting the base member (5) and the supporting device (19); both of the linear guides (45, 46) are Independently, the split crossbar arm (47) has pivoting pins (56, 57), each of which engages an individual cam track (59, 60) of one of the sliding guides (58). The module of claim 9, wherein the cam track (59, 60) is shaped such that the support device starts from the end position, first performs a linear translational movement, and reaches the engagement unit at the end position ( 20) After one of the predetermined distances, a pivotal movement is then performed. The module of any one of clauses 1 to 10, wherein the guiding element has a device (15) for pulling the support device (19) in a direction that substantially cross-linear translational movement, which allows The support device is moved from the intermediate position to the removal position. According to the module of claim 11, if the supporting device is not in the region extending from the intermediate position to the removing position, the fixing device (39, 40, 64) for fixing the supporting device (19) cannot Move across the linear translation movement. A module for replacing an approximately planar joint unit (20) in a test system for testing a semiconductor component, in particular according to any one of claims 1 to 12, comprising:
Moving the joining unit (20) from the end position to a mechanism in an intermediate position in a linear translational movement, wherein the engaging unit is in an end position during operation of the test system; and substantially intersecting the linearity from the intermediate position Translating the direction of movement, pulling out the engagement unit into one of the removal positions; the engagement unit is provided with a plurality of positioning pins that are implemented to engage the corresponding plurality of positioning sleeves. A module for replacing an approximately planar joint unit (20) in a test system for testing a semiconductor component, in particular according to any one of claims 1 to 13 of the patent application, comprising:
Moving the joint unit (20) from a tip position to a mechanism in an intermediate position in a linear translational movement, wherein the joint unit is in an end position during operation of the test system; and substantially intersecting the linear translation from the intermediate position In the direction of movement, the device that pulls the engaging unit into the removal position; the module has a distance adjusting device for adjusting the distance between the module and an operating unit or a testing unit of the testing system. A test system for testing a semiconductor component, comprising an operation unit and a test unit, wherein the module according to any one of claims 1 to 14 is located in the operation unit (3) and the test unit (4) ) between the areas.