TW201350293A - Moving mechanism, electronic component transport device, electronic component inspection device - Google Patents

Abstract

A moving mechanism includes a first moving body which is arranged to move in a first direction with respect to a support, a second moving body which is provided on an opposite side to the support through the first moving body, and is movable in a second direction intersecting the first direction with respect to the first moving body, and a first vibrating body which is arranged in the support and biased to press the moving body or is arranged in the first moving body and biased to press the support. A direction in which a first groove and a second groove face each other intersects a direction in which the support and the moving body face each other, and a biasing direction in which the first vibrating body is biased intersects the direction in which the first groove and the second groove face each other and the direction in which the support and the moving body face each other.

Description

Mobile mechanism, electronic component transport device, electronic component inspection device

The present invention relates to a moving mechanism, an electronic component conveying device, and an electronic component inspection device.

Various devices equipped with a moving mechanism for moving a moving body in a specific direction with respect to a support body are known. For example, in the robot of Patent Document 1, a plurality of rolling elements (balls) are inserted between the rails disposed in parallel with the moving direction and the rail bearings that are fitted with the rails on both sides, and are formed and moved. Two rows of ball guides (moving axes) that are parallel in direction. In the above-described moving mechanism, when the drive generated by the drive motor or the like is transmitted to the moving body, the balls facilitate the rolling between the rail and the rail support, whereby the moving body can be smoothly moved.

Further, a moving mechanism in which a plurality of moving bodies having different moving directions are combined is known. For example, as disclosed in Patent Document 2, the first moving body movable in the X-axis direction with respect to the supporting body is The second movable body that moves in the Y-axis direction with respect to the first movable body is superposed, and the second movable body can be moved on the XY plane.

[Previous Technical Literature] [Patent Literature]

[Patent Document 1] Japanese Patent Publication No. 5-16172

[Patent Document 2] Japanese Patent Laid-Open No. Hei 11-271480

However, in the moving mechanism that supports the moving body by the two rows of moving shafts as in Patent Document 1, there is a problem in that the moving body is shaken by applying a load or the like to the moving body. In particular, in a moving mechanism including a plurality of moving bodies, there is a case where the sway generated by one moving body is transmitted to other moving bodies, causing a large sway of the entire moving mechanism.

The present invention has been made in order to solve at least a part of the above problems of the prior art, and an object of the invention is to provide a moving mechanism capable of suppressing rattling caused by a moving body.

In order to solve at least a part of the above problems, the moving mechanism of the present invention has the following configuration. That is, the moving mechanism of the present invention includes: a support body that is provided at a specific position and supports a moving mechanism; and a first moving body that is movable in the first direction with respect to the support body; and the first vibrating body; The piezoelectric material is provided to generate the vibration in the first direction, and is supported by any one of the support body or the first movable body. The second movable body is supported by the second movable body. The first movable body is disposed on the opposite side of the support body, moves along with the movement of the first movable body, and is movable in a second direction intersecting the first moving body with respect to the first moving body. The second vibrating body includes a piezoelectric material to generate the vibration in the second direction, and is supported by any one of the first moving body or the second moving body. a first groove, which is provided on the support body with a pair and is parallel to the first direction a second groove formed in the first movable body and formed to face the first groove; a plurality of rolling elements disposed between the first groove and the second groove, and Rolling with the movement of the first moving body; and moving the shaft including the rolling element parallel to the first direction; and the moving axis intersecting with the direction in which the support body and the first moving body face each other Two rows are provided in the direction, and the direction in which the first groove and the second groove face each other intersects with the direction in which the support body faces the first movable body, and the positions of the first groove and the second groove In contrast to one of the two rows of movement axes and the other, the energization direction of the first vibrating body is inclined with respect to the moving surface including the two columns of movement axes.

Here, the "direction of tilting with respect to the moving surface" is not intended to include a direction parallel to the moving surface or a direction perpendicular to the moving surface.

In the above-described moving mechanism of the present invention, when the first vibrating body is supported on the support side, the first movable body receives the capability of the first vibrating body, and when the first vibrating body is supported by the first movable body, the first movement is performed. The body is subjected to a reaction force in a direction opposite to the direction in which the first vibrating body is energized. Further, since the energizing direction of the first vibrating body is inclined with respect to the moving surface, the imparting force or the reaction force received by the first moving body includes a component parallel to the moving surface and a component perpendicular to the moving surface. When the first moving body receives a force parallel to the moving surface, the distance between the first groove and the second groove in the direction parallel to the moving surface is shortened in one of the moving axes of the two moving axes, thereby The 1st groove and the 2nd groove hold the rolling elements. Further, in the other moving axis, although the distance between the first groove and the second groove is increased, the first moving body receives a force perpendicular to the moving surface, and the first moving axis is the rotating axis to make the first movement. Since the torque of the body rotates, the first groove and the second groove hold the rolling elements in a direction perpendicular to the moving surface. As a result, the first 1 The movement of the moving body. Further, by arranging on the side close to the support body as described above, it is possible to suppress the sway of the first moving body caused by the weight of the second movable body, thereby improving the rigidity of the entire moving mechanism.

In the above-described moving mechanism of the present invention, when the support body is provided on the transfer body that can move the moving mechanism in a specific direction, the first direction may be different from the transfer direction of the transfer body.

As the transfer body transfers the moving mechanism, the inertial force acts on the moving mechanism in the transfer direction of the transfer body. When the first direction is different from the transfer direction of the transfer body, the inertial force is less likely to be applied to the first movable body in the moving direction. Therefore, the weight of the second movable body is applied to the first movable body disposed on the side closer to the support. It is also possible to suppress the displacement of the first moving body caused by the inertial force (sliding in the moving direction). Further, when the weight applied to the second movable body is reduced, even if the second direction overlaps with the transfer direction of the transfer body, a large inertial force is not applied to the second movable body, and the second movable body can be suppressed. Shift (sliding in the direction of movement). As a result, it is not necessary to add a brake mechanism or the like to prevent displacement due to the inertial force, and it is possible to reduce the size of the moving mechanism.

Further, in the moving mechanism of the present invention, the rotating body that is rotated about the third direction orthogonal to the first direction and the second direction and the third vibration that generates the vibration by the vibration may be provided. The direction of the vibration generated by the third vibrating body is different from the direction in which the transfer body is transferred. Furthermore, the term "orthogonal" as used herein is not limited to being completely orthogonal, and includes substantially orthogonal.

When the vibration direction of the third vibrating body is different from the transfer direction of the transfer body, even if the inertial force is applied to the moving mechanism as the transfer body is transferred, the rotating body is driven by the vibration of the third vibrating body. The direction (the direction in which the driving force of the vibrating body is transmitted to the rotating body) does not coincide with the direction of the inertia, and the displacement of the rotating body caused by the inertial force (sliding in the direction of the rotation) can be suppressed.

Further, in the above-described moving mechanism of the present invention, it may be in the support or the first moving body. In the portion to which the first vibrating body is energized, a pressure body formed into a substantially rectangular parallelepiped shape is fitted in a posture in which the surface on which the first vibrating body is energized is perpendicular to the energizing direction.

In this way, even if the first vibrating body is energized obliquely with respect to the support or the first moving body, the pressed body does not move away due to the ability to be applied (the position of the pressed body is shifted in the direction parallel to the moving surface) Therefore, the driving force of the vibrating body can be appropriately transmitted to the pressure receiving body, and the first moving body can be accurately moved with respect to the support body.

Further, in the above-described moving mechanism of the present invention, the pressure receiving body may be formed of a material having a higher hardness than the side of the support body or the first movable body embedded in the pressure receiving body.

As a result, it is possible to prevent the pressure receiving body from being worn by the frictional force acting between the first vibrating body and the pressure receiving body. As a result, even if it is used for a long period of time, it is possible to suppress a decrease in the movement accuracy of the moving body.

Further, the present invention can also be understood as follows. That is, the present invention is also understood to be an electronic component transporting apparatus, comprising: a grip portion that holds an electronic component; and a moving mechanism that moves the grip portion holding the electronic component; The moving mechanism includes a support body that is disposed at a specific position and supports the moving mechanism, and a first movable body that is movable in the first direction with respect to the support body, and the first vibrating body includes a piezoelectric material and can be generated. The vibration in the first direction is supported by either one of the support body or the first movable body; and the second movable body is sandwiched between the first movable body And being disposed on a side opposite to the support body, moving along with the movement of the first movable body, and movable in a second direction intersecting the first direction with respect to the first moving body; and the second vibrating body includes The piezoelectric material generates vibration in the second direction, and is supported by the first movable body or the second movable body. Any one of the first grooves, wherein the pair of supports are provided on the support body and formed in parallel with the first direction; and the second groove is provided on the first movable body, and the first groove is provided One groove is formed to face each other; a plurality of rolling elements are disposed between the first groove and the second groove, and roll along with movement of the first moving body; and a moving shaft including the rolling element, and Parallel to the first direction; and the movement axis is provided in two rows spaced apart from each other in a direction intersecting the direction in which the support body and the first movable body face each other, and the first groove and the second groove face each other The direction in which the support body and the first movable body face each other intersects, and the position of the first groove and the second groove is opposite to one of the two rows of movement axes, and the first vibrating body is The energizing direction of the energization is inclined with respect to the moving surface including the two columns of moving axes.

In the electronic component conveying apparatus of the present invention described above, since the sway of the moving mechanism can be suppressed, the accuracy of transporting the electronic component can be improved.

Further, the present invention can also be understood as follows. That is, the present invention is also understood to be an electronic component inspection apparatus, comprising: a grip portion that holds an electronic component; a moving mechanism that moves the grip portion holding the electronic component; and an inspection portion The moving mechanism includes: a support body disposed at a specific position and supporting the moving mechanism; and a first movable body movable in the first direction with respect to the support body; the first vibrating body And comprising a piezoelectric material to generate the vibration in the first direction, and The other movable body is supported by any one of the support body or the first movable body; the second movable body is disposed opposite to the support body with the first movable body interposed therebetween The side moves along with the movement of the first movable body, and is movable in a second direction intersecting the first direction with respect to the first movable body; and the second vibrating body includes a piezoelectric material to generate the first The vibration in the two directions is supported by any one of the first movable body or the second movable body; the first groove is provided with a pair on the support And the second groove is formed in the first movable body and is formed to face the first groove; the plurality of rolling elements are disposed in the first groove and The second groove is rolled along with the movement of the first moving body; and the moving shaft includes the rolling element and is parallel to the first direction; and the moving axis is opposite to the support and the first 1 The moving bodies are separated by the direction in which the directions are opposite to each other. a direction in which the first groove and the second groove face each other intersects with a direction in which the support body and the first movable body face each other, and a position of the first groove and the second groove is related to one of the two column movement axes Contrary to the other, the energizing direction of the first vibrating body is inclined with respect to the moving surface including the two rows of moving axes.

In the electronic component inspection device of the present invention described above, since the sway of the moving mechanism can be suppressed, the accuracy of inspecting the electronic component can be improved.

1‧‧‧Electronic parts

100‧‧‧Electronic parts inspection device

110‧‧‧Abutment

112d‧‧‧ downstream side stage

112u‧‧‧Upstream side stage

114‧‧‧ camera

116‧‧‧Checkpoint

118‧‧‧Control device

130‧‧‧Support table

132‧‧‧Y stage

134‧‧‧arm

136‧‧‧X stage

138‧‧‧Camera

140‧‧‧Bearing device

142‧‧‧ grip

150‧‧‧Mobile agencies

200‧‧‧ unit base

202‧‧‧X track support

204‧‧‧ outer trough

206‧‧‧ balls

208‧‧‧through holes

210‧‧‧Subjected body

220‧‧‧X block

222‧‧‧X track

224‧‧‧ inner slot

226‧‧‧through holes

240‧‧‧θ block

242‧‧‧Guide axis

244‧‧‧through holes

246‧‧‧ Inside slot

248‧‧‧ balls

250‧‧‧ Pressure platform

252‧‧‧Subjected body

254‧‧‧Y track

256‧‧‧ inner slot

260‧‧‧Y block

262‧‧‧Y track support

264‧‧‧ outer trough

266‧‧‧ balls

268‧‧‧Subjected body

270‧‧‧ shaft support

280‧‧‧Axis

300‧‧‧ Piezoelectric motor

300x, 300y, 300θ‧‧‧ Piezoelectric motors

302‧‧‧Vibration body shell

304‧‧‧ containment housing

306‧‧‧Side pressure spring

308‧‧‧Roller

310‧‧‧ vibrating body

312‧‧‧ convex

314‧‧‧ surface electrode

314a, 314b, 314c, 314d‧‧

320‧‧‧Energy spring

Fig. 1 is a view showing the stand of an electronic component inspection apparatus equipped with the moving mechanism of the embodiment. Body map.

Fig. 2 is a perspective view showing the configuration of the moving mechanism of the embodiment built in the holding device.

Fig. 3 is a perspective view showing a state in which the moving mechanism is disassembled.

Fig. 4 is a cross-sectional view showing the internal structure of the piezoelectric motor.

5(a)-(c) are explanatory views showing the principle of operation of the piezoelectric motor.

Figure 6 is a cross-sectional view of the moving mechanism taken in a plane perpendicular to the X direction.

FIG. 1 is a perspective view showing an electronic component inspection device 100 on which the moving mechanism 150 of the present embodiment is mounted. The illustrated electronic component inspection apparatus 100 generally includes a base 110 and a support table 130 that is erected on the side of the base 110. On the upper surface of the base 110, an upstream stage 112u on which the electronic component 1 to be inspected is placed and transported, and a downstream stage 112d on which the electronic component 1 that has been inspected is placed and transported are placed. Further, an imaging device 114 for confirming the posture of the electronic component 1 and an inspection table 116 (inspection portion) for arranging the electronic component 1 for checking electrical characteristics are provided between the upstream stage 112u and the downstream stage 112d. In addition, as a representative of the electronic component 1, "semiconductor", "semiconductor wafer", "CLD (Chemiluminescence Detector), or OLED (Organic Light Emitting Diode)" "display device", "crystal device", "various sensors", "inkjet head", "various MEMS (Microelectromechanical System) devices", etc.

A Y stage 132 is provided on the support table 130 so as to be movable in a direction (Y direction) parallel to the upstream stage 112u and the downstream stage 112d of the base 110, and is applied to the Y stage from the Y stage 132. The arm portion 134 is extended in the direction (X direction) in which the directions are orthogonal to the base 110. Further, an X stage 136 is provided on the side surface of the arm portion 134 so as to be movable in the X direction. Further, a camera 138 and a holding device 140 are provided on the X stage 136. As described below, a moving mechanism 150 for finely adjusting coordinates in the X direction and the Y direction is built in the holding device 140, or A Z stage or the like that moves in the up-down direction (Z direction) orthogonal to the X direction and the Y direction. Further, a grip portion 142 for holding the electronic component 1 is provided at the front end of the grip device 140. Further, a control device 118 for controlling the overall operation of the electronic component inspection device 100 is also provided on the front surface side of the base 110. Further, in the present embodiment, the Y stage 132, the arm portion 134, the X stage 136, or the holding device 140 provided on the support table 130 corresponds to the "electronic component conveying device" of the present invention.

The electronic component inspection apparatus 100 having the above configuration performs inspection of the electronic component 1 as follows. First, the electronic component 1 to be inspected is placed on the upstream side stage 112u and moved to the vicinity of the inspection table 116. Then, the Y stage 132 and the X stage 136 are operated, and the holding device 140 is moved to a position directly above the electronic component 1 placed on the upstream stage 112u. At this time, the position of the electronic component 1 can be confirmed using the camera 138. Then, the grip portion 142 is lowered using the Z stage built in the holding device 140, and after the electronic component 1 is held by the grip portion 142, the grip device 140 is moved onto the imaging device 114, and used. The imaging device 114 confirms the posture (coordinate) of the electronic component 1. Then, the posture of the electronic component 1 is adjusted using the moving mechanism 150 built in the holding device 140. Then, after the holding device 140 is moved above the inspection table 116, the Z stage built in the holding device 140 is operated to place the electronic component 1 on the inspection table 116. Since the posture of the electronic component 1 is adjusted using the moving mechanism 150 in the holding device 140, the electronic component 1 can be placed at the correct position of the inspection table 116. Then, after checking the electrical characteristics of the electronic component 1 by using the inspection table 116, the electronic component 1 is picked up from the inspection table 116, and then the Y stage 132 and the X stage 136 are operated, and the holding device 140 is moved to the downstream side. Above the stage 112d, the electronic component 1 is placed on the downstream side stage 112d. Thereafter, the downstream stage 112d is operated to transport the inspected electronic component 1 to a specific position.

FIG. 2 is a perspective view showing the configuration of the moving mechanism 150 of the present embodiment built in the holding device 140. As shown in the figure, the moving mechanism 150 of the present embodiment is provided with a unit base 200 on the uppermost layer, and the unit base 200 is mounted on the X stage 136. Yu Dan Below the element base 200, an X block 220 is provided movably with respect to the unit base 200 in the X direction. Further, below the X block 220, the X block 220 operates in accordance with the operation of the X block 220, and the θ block 240 is rotatably provided in a rotation direction (θ direction) in which the Z direction is the axis. Further, below the θ block body 240, the Y block body 260 is provided to move in the Y direction with respect to the θ block body 240 as the θ block body 240 operates. Furthermore, the dotted arrows in the figure indicate the moving directions of the respective blocks (220, 240, 260). Further, the unit base 200 of the present embodiment corresponds to the "support" of the present invention, and the X block 220 of the present embodiment corresponds to the "first moving body" of the present invention, and the Y block 260 of the present embodiment is equivalent to In the "second moving body" of the present invention, the θ block 240 of the present embodiment corresponds to the "rotating body" of the present invention.

Further, the moving mechanism 150 is provided with an X-direction piezoelectric motor 300x for driving the X block 220, a θ-direction piezoelectric motor 300θ for driving the θ block 240, and a Y-direction piezoelectric motor 300y for driving the Y block 260. Three piezoelectric motors. Further, when it is not necessary to particularly distinguish three piezoelectric motors (300x, 300θ, 300y), the piezoelectric motor 300 may be simply referred to as the piezoelectric motor 300. Further, the principle of operation of the piezoelectric motor 300 will be described later.

Further, the moving mechanism 150 is provided with a shaft 280 that penetrates the unit base 200, the X block body 220, the θ block body 240, and the Y block body 260 in the vertical direction (Z direction). The shaft 280 is movably mounted in the Z direction with respect to the Y block 260, and moves in the Z direction by the operation of the Z stage 260 (not shown) in association with the movement of the Y block 260. Further, a grip portion 142 is attached to the lower end of the shaft 280.

FIG. 3 is a perspective view showing a state in which the moving mechanism 150 is disassembled. As shown, the unit base 200 is generally rectangular in the shape of a flat plate and is provided with a through hole 208 having a circular cross section through the axis 280 in the Z direction. The size of the through hole 208 is such that the shaft 280 does not contact the inner peripheral surface even if the shaft 280 moves in the X direction and the Y direction in association with the operation of the Y block 260. Further, on the lower surface of the unit base 200 (the surface facing the X block 220), two X-track holders 202 formed in a downwardly concave cross section are provided extending in parallel with the X direction. The track supports 202 are arranged to be spaced apart in the Y direction. On the inner wall of the X-track support 202 A groove 204 having a cross-sectional outer shape is formed, and a plurality of balls 206 are disposed along the outer groove 204. Further, the outer groove 204 of the present embodiment corresponds to the "first groove" of the present invention, and the ball 206 of the present embodiment corresponds to the "rolling element" of the present invention.

The upper surface of the X block body 220 (the surface facing the unit base 200) corresponds to the two X-track holders 202 on the unit base 200 side, and two X-tracks 222 extend in parallel with the X direction. Inner grooves 224 are formed on both sides of the X-track 222 with a semi-circular cross-section that faces the outer groove 204 of the X-track support 202. In a state in which the X-track 222 is fitted to the corresponding X-track holder 202, a plurality of balls 206 are inserted between the inner groove 224 and the outer groove 204, thereby forming ball guides on both sides of each of the X-tracks 222. Further, the balls 206 are smoothly moved relative to the unit base 200 by the balls 206 rolling along the inner grooves 224 and the outer grooves 204. Furthermore, the inner groove 224 of this embodiment corresponds to the "second groove" of the present invention.

Further, a piezoelectric motor 300x is attached to one side surface (the front side of the drawing surface) of the X block 220 facing the Y direction, and a piezoelectric motor 300θ is attached to the other side surface (far side in the drawing). A piezoelectric body 310 having a rectangular parallelepiped shape including a piezoelectric material is incorporated in the piezoelectric motor 300, and a ceramic projection 312 formed in a cylindrical shape is provided on an end surface of the vibrating body 310 in the longitudinal direction. Further, as described below, the piezoelectric motor 300 of the present embodiment has a structure in which the vibrating body 310 is energized to the side where the convex portion 312 is provided. The piezoelectric motor 300x that drives the X block 220 is mounted such that the short side direction of the vibrating body 310 coincides with the X direction, and the convex portion 312 of the vibrating body 310 is energized to the unit base 200. A ceramic pressure-receiving body 210 formed into a substantially rectangular parallelepiped shape is embedded in a portion where the convex portion 312 on the unit base 200 side is energized. Further, the piezoelectric motor 300θ that drives the θ block body 240 is such that the short side direction of the vibrating body 310 coincides with the X direction, and the convex portion 312 of the vibrating body 310 is attached to the θ block body 240. In addition, the vibrating body 310 incorporated in the piezoelectric motor 300x of the present embodiment corresponds to the "first vibrating body" of the present embodiment, and the vibrating body 310 incorporated in the piezoelectric motor 300? of the present embodiment corresponds to the present invention. "The third vibrating body".

Further, in the X block 220, a circular cross section through the shaft 280 is provided to penetrate in the Z direction. Through hole 226. The through hole 226 of the X block 220 is formed to have an inner diameter larger than the through hole 208 of the unit base 200.

A cylindrical guide shaft 242 provided with a through hole 244 passing through the shaft 280 is erected from the upper surface of the θ block (the surface facing the X block 220). On the outer peripheral surface of the guide shaft 242, two inner grooves 246 having a semicircular cross-sectional shape are provided spaced apart in the vertical direction (Z direction), and a plurality of balls 248 are disposed along the inner groove 246. The outer diameter of the guide shaft 242 is smaller than the inner diameter of the through hole 226 of the X block 220, and the inner circumferential surface of the through hole 226 is provided with two outer grooves facing the inner groove 246 of the guide shaft 242 (not shown). Show). In a state in which the guide shaft 242 is inserted into the through hole 226 of the X block body 220, a plurality of balls 248 are inserted between the inner groove 246 of the guide shaft 242 and the outer groove of the corresponding through hole 226 to form a ring shape. Ball guides. Further, the balls 248 are rolled along the inner groove 246 and the outer groove, and the θ block body 240 is smoothly rotated with respect to the X block body 220.

Further, a pressure receiving table 250 is erected at a position facing the piezoelectric motor 300θ on the upper surface of the θ block body 240. A ceramic pressure receiving body 252 is attached to the upper surface of the pressure receiving table 250, and the convex portion 312 of the vibrating body 310 built in the piezoelectric motor 300θ is energized to the ceramic pressure receiving body 252.

Further, on the θ block body 240, the piezoelectric motor 300y for driving the Y block body 260 is attached so that the short side direction of the vibrating body 310 coincides with the Y direction, and the convex portion 312 of the vibrating body 310 faces the Y block body 260. Further, the vibrating body 310 incorporated in the piezoelectric motor 300y of the present embodiment corresponds to the "second vibrating body" of the present invention.

Further, on the lower surface of the θ block 240 (the surface facing the Y block 260), two Y tracks 254 are extended in parallel with the Y direction, and the two Y tracks 254 are spaced apart in the X direction and the Y direction. And configuration. An inner groove 256 having a semicircular cross section is formed on both sides of the Y rail 254.

The upper surface of the Y block 260 (the surface facing the θ block 240) corresponds to the two Y tracks 254 on the θ block body 240 side, and two Y track supports 262 are extended in parallel with the Y direction. Y track In the support 262, the cross-sectional shape is formed as an upwardly concave shape, and a groove 264 is formed on the side of the inner wall with a semicircular cross section facing the inner groove 256 of the Y track 254, and a plurality of grooves are arranged along the outer groove 264. Ball 266. In a state in which the Y-track holder 262 is fitted to the corresponding Y-track 254, a plurality of balls 266 are inserted between the inner groove 256 and the outer groove 264 to form ball guides on both sides of each of the Y-tracks 254. Further, the balls 266 are rolled along the inner groove 256 and the outer groove 264, and the Y block body 260 is smoothly moved relative to the θ block body 240.

Further, a ceramic pressure receiving body 268 is attached to the upper surface of the Y block body 260 at a position facing the piezoelectric motor 300y, and the convex portion 312 of the vibrating body 310 incorporated in the piezoelectric motor 300y is made of ceramic. The body 268 is energized. Further, a shaft support portion 270 having a cylindrical shape that supports the shaft 280 that is movable in the Z direction is provided in the Y block body 260.

In the moving mechanism 150 of the present embodiment having the above configuration, by applying a voltage to the vibrating body 310 of the piezoelectric motor 300x of the three piezoelectric motors 300, the X block 220 can be along the X with respect to the unit base 200. Move in direction. Further, by applying a voltage to the vibrating body 310 of the piezoelectric motor 300θ, the θ block 240 can be rotated in the θ direction. Further, by applying a voltage to the vibrating body 310 of the piezoelectric motor 300y, the Y block body 260 can be moved in the Y direction with respect to the θ block body 240.

4 is a cross-sectional view showing the internal structure of the piezoelectric motor 300. Further, as shown in FIG. 3, although three piezoelectric motors (300x, 300?, 300y) are provided in the moving mechanism 150 of the present embodiment, the basic structure or operation principle of any of the piezoelectric motors 300 is the same. Therefore, the piezoelectric motor 300x will be described below as an example. As shown in the figure, the vibrating body 310 is held in the vibrating body case 302 in a state where the convex portion 312 is protruded, and the vibrating body case 302 is moved in a direction (Z direction) in which the convex portion 312 can protrude. It is housed in the housing case 304. A side pressure spring 306 that energizes the vibrating body case 302 in the Y direction is provided between one side of the side surface of the vibrating body case 302 (the surface facing the Y direction orthogonal to the Z direction) and the housing case 304. Further, a roller 308 that rolls in the Z direction is provided between the other side of the side surface of the vibrating body case 302 (the side opposite to the side where the side pressure spring 306 is provided) and the housing case 304. therefore, The vibrating body case 302 is restricted from moving in the Y direction on the one hand, and smoothly moves in the Z direction on the other hand. Further, an energizing spring 320 is provided on the same side as the side on which the roller 308 is provided, and the energizing spring 320 energizes the vibrating body case 302 in the Z direction (the side on which the convex portion 312 is provided). Further, as shown in FIG. 2, in a state in which the moving mechanism 150 is assembled, the convex portion 312 of the vibrating body 310 is energized to the pressure receiving body 210 of the unit base 200, and a voltage is applied to the vibrating body 310. The X block 220 is driven.

FIG. 5 is an explanatory view showing the principle of operation of the piezoelectric motor 300. As shown in Fig. 5 (a), on the side surface on the outer side of the vibrating body 310 of the piezoelectric motor 300x, four rectangular-shaped surface electrodes 314a to d are formed by dividing the side surface by two sides (total of four divisions). . Further, when it is not necessary to distinguish the four surface electrodes 314a to d, the surface is sometimes simply referred to as the surface electrode 314. Further, although not shown, a back electrode is formed on the side surface on the back side of the vibrating body 310 over substantially the entire surface of the side surface. When a voltage is applied to the surface electrode 314 of the vibrating body 310 at a fixed period, the convex portion 312 of the vibrating body 310 performs an elliptical motion, whereby the piezoelectric motor 300 operates. The elliptical motion of the convex portion 312 of the vibrating body 310 is caused by the following reason.

First, it is known that the vibrating body 310 including a piezoelectric material has a property of stretching when a positive voltage is applied. Therefore, as shown in FIG. 5(a), when a positive voltage is applied to all of the four surface electrodes 314 and the voltage application is released, the vibrating body 310 repeats the expansion and contraction in the longitudinal direction. The operation of repeatedly expanding and contracting the vibrating body 310 in the longitudinal direction is referred to as "stretching vibration". Hereinafter, the direction in which the vibrating body 310 expands and contracts (the ±Z direction in the drawing) is referred to as "stretching direction". Further, when the frequency at which the positive voltage is applied is changed, the amount of expansion and contraction rapidly increases at a certain frequency, and a resonance phenomenon occurs. The frequency (resonance frequency) at which resonance occurs due to the stretching vibration depends on the physical properties of the vibrating body 310 and the size (width W, length L, thickness T) of the vibrating body 310.

Further, as shown in FIG. 5(b) or FIG. 5(c), two surface electrodes 314 located at diagonal positions are grouped together (group of surface electrode 314a and surface electrode 314d, or surface electrode 314b and table). A group of electrodes 314c), and a positive voltage is applied at a fixed period. In this way, the vibrating body 310 repeats as The front end portion (the portion where the convex portion 312 is provided) in the longitudinal direction is swung in the direction of the short side (the left and right directions on the drawing). For example, as shown in FIG. 5(b), when a positive voltage is applied to the group of the front electrode 314a and the front electrode 314d at a fixed period, the vibrating body 310 repeats the operation of moving the end portion in the longitudinal direction to the right direction. Further, as shown in FIG. 5(c), when a positive voltage is applied to the group of the front electrode 314b and the front electrode 314c at a fixed period, the vibrating body 310 repeats the operation of moving the end portion in the longitudinal direction to the left direction. The operation of the vibrating body 310 is referred to as "bending vibration". Hereinafter, the direction in which the vibrating body 310 is bent and vibrated (the ±X direction in the drawing) is referred to as a "bending direction". Such bending vibration also depends on the physical properties of the vibrating body 310 and the resonance frequency of the size (width W, length L, thickness T) of the vibrating body 310. Therefore, when a positive voltage is applied to the two surface electrodes 314 located at diagonal positions with respect to the resonance frequency, the vibrating body 310 largely oscillates the head in the bending direction and vibrates.

Here, the resonance frequency of the stretching vibration shown in FIG. 5(a) and the resonance frequency of the bending vibration shown in FIG. 5(b) or FIG. 5(c) are both dependent on the physical properties of the vibrating body 310 or the size of the vibrating body 310. (width W, length L, thickness T). Therefore, by appropriately selecting the size (width W, length L, and thickness T) of the vibrating body 310, the two resonance frequencies can be made uniform. Then, if a voltage of a form of bending vibration as shown in FIG. 5(b) or FIG. 5(c) is applied to the vibrating body 310 at a resonance frequency, the result of FIG. 5(b) or FIG. 5(c) is generated. At the same time as the bending vibration, the stretching vibration of Fig. 5(a) is induced by the resonance. As a result, when a voltage is applied to the group of the front electrode 314a and the front electrode 314d in the state shown in FIG. 5(b), the front end portion (the portion where the convex portion 312 is provided) on the surface of the vibrating body 310 is on the surface. Perform an elliptical motion (elliptical motion) in a clockwise direction. Further, when a voltage is applied to the group of the front electrode 314b and the front electrode 314c in the state shown in Fig. 5(c), the front end portion of the vibrating body 310 is subjected to an elliptical motion in the counterclockwise direction on the drawing. In the above description, a description will be given of a case where a positive voltage is applied to the vibrating body 310. However, it is well known that piezoelectric materials are also deformed by the application of a negative voltage. Therefore, bending vibration (and stretching vibration) can be generated by applying a negative voltage to the vibrating body 310, and bending vibration can be generated by applying an alternating voltage such as repeating a positive voltage and a negative voltage (and Telescopic vibration). Further, in the above description, the case where the voltage of the resonance frequency is applied will be described. However, it suffices to apply a voltage including a waveform of a resonance frequency, for example, a pulsed voltage.

The piezoelectric motor 300x drives the X block 220 by such elliptical motion. In other words, as shown in FIG. 3, the piezoelectric motor 300x fixes the short side direction (bending direction) of the vibrating body 310 in the X direction and is fixed to the X block 220 side, and the convex portion 312 of the vibrating body 310 is directed to the unit base. Elliptical motion is generated in a state in which the body 210 of the seat 200 is energized. In this way, the convex portion 312 repeats the operation in which the vibrating body 310 moves in either of the bending directions while being energized to the pressure receiving body 210, and the vibrating body 310 is separated when it is contracted. The body 210 is restored to its original position. As a result, the X block 220 moves in either of the bending directions (X directions) with respect to the unit base 200 by the frictional force acting between the pressure receiving body 210 and the convex portion 312.

Further, the piezoelectric motor 300θ is fixed to the X block 220 side, and the convex portion 312 of the vibrating body 310 is energized to the pressure receiving body 252 of the pressure receiving table 250 provided on the side of the θ block body 240. Therefore, when the piezoelectric motor 300θ is operated, the θ block body 240 is rotated in the θ direction by the frictional force acting between the convex portion 312 and the pressure receiving body 252.

In addition, the piezoelectric motor 300y fixes the short side direction (bending direction) of the vibrating body 310 to the θ block body 240 in accordance with the Y direction, and the convex portion 312 of the vibrating body 310 is disposed on the side of the Y block body 260. The state in which the pressed body 268 is energized. Therefore, when the piezoelectric motor 300y is operated, the Y block 260 moves in the Y direction with respect to the θ block body 240 by the frictional force acting between the convex portion 312 and the pressure receiving body 268. Therefore, by operating the piezoelectric motor 300x, the piezoelectric motor 300θ, and the piezoelectric motor 300y of the moving mechanism 150, the electronic component inspection apparatus 100 can finely adjust the posture of the electronic component 1 held by the grip portion 142. Further, the piezoelectric motor 300 can be easily miniaturized as compared with an electromagnetic motor that rotates the rotor by electromagnetic force, and the driving force can be directly transmitted without using a gear or the like. Therefore, the pressure is applied to the actuator of the moving mechanism 150. The electric motor 300 can reduce the size of the moving mechanism 150.

Here, in the moving mechanism 150 of the present embodiment, the X block body 220, the θ block body 240, and the Y block body 260 are movably disposed in different directions (X direction, θ direction, and Y direction), thereby There is a case where the respective blocks (220, 240, 260) are shaken due to the application of the load or the like. In particular, the X block 220 near the side of the unit base 200 supporting the entire moving mechanism 150 is easily swayed due to the weight of the θ block 240 or the Y block 260, and is transmitted due to the sloshing of the X block 220. The θ block body 240 or the Y block body 260 that operates in conjunction with the operation of the X block body 220 causes a large sway of the entire moving mechanism 150. In this regard, the moving mechanism 150 of the present embodiment suppresses the rattling in the following manner.

Figure 6 is a cross-sectional view of the moving mechanism 150 taken in a plane perpendicular to the X direction. In Fig. 6, the vicinity of a portion in which the piezoelectric motor 300x is mounted in the X block 220 is shown enlarged. As described above, a plurality of balls 206 are inserted between the outer groove 204 formed on the X-track support 202 on the unit base 200 side and the inner groove 224 formed on the X-track 222 on the side of the X block 220. Ball guides parallel to the X direction are formed on both sides of the X-track 222 by the plurality of balls 206. The X block 220 smoothly moves relative to the unit base 200 by a plurality of balls 206 rolling along the two rows of ball guides. Hereinafter, a plane including two rows of ball guides is referred to as a "moving surface". Further, for the smooth rolling of the balls 206, a plurality of gaps (plays) are provided between the balls 206 and the inner grooves 224 or the outer grooves 204.

Further, the piezoelectric motor 300x attached to the side surface of the X block body 220 has the short side direction (bending direction) of the built-in vibrating body 310 coincident with the X direction, and the upper end side (the side on which the convex portion 312 is provided) is The X block 220 is inclined and fixed on the opposite side. Further, the vibrating body 310 is energized in the longitudinal direction (stretching direction) by the energizing spring 320, and is in a state in which the convex portion 312 is energized to the pressure receiving body 210 of the unit base 200. Therefore, the direction in which the convex portion 312 of the vibrating body 310 is energized to the pressure receiving body 210 (the energizing direction) is inclined at a specific angle (75 degrees in the illustrated example) with respect to the moving surface.

Further, the pressure-receiving body 210 of the present embodiment is formed in a substantially rectangular parallelepiped shape, and is orthogonal to the energizing direction of the vibrating body 310 on the lower surface (the surface on which the convex portion 312 of the vibrating body 310 abuts). The state is embedded in the unit base 200. Thereby, even if the convex portion 312 of the vibrating body 310 is obliquely energized to the lower surface of the unit base 200, the position of the pressed body 210 is not shifted in the lateral direction (Y direction) due to the ability to be imparted, thereby The X block 220 is moved accurately with respect to the unit base 200 by the frictional force between the convex portion 312 and the pressure receiving body 210. Further, in the moving mechanism 150 of the present embodiment, the unit base 200 is formed of a plastic material, whereas the pressure receiving body 210 is formed of a material having a hardness higher than that of the plastic material such as a ceramic material or a metal material. Therefore, it is possible to suppress the pressure receiving body 210 from being worn by the frictional force acting between the convex portion 312 and the pressure receiving body 210.

Here, the X block 220 is energized to the body 210 of the unit base 200 by the convex portion 312 of the vibrating body 310 built in the piezoelectric motor 300x, and is subjected to a reaction force in a direction opposite to the energizing direction. The reaction force includes a component in the right direction parallel to the moving surface and a component in the lower direction in the figure perpendicular to the moving surface. Moreover, by the X block 220 being subjected to a reaction force parallel to the moving surface, in the ball guide on the side of the X-track 222 on both sides away from the piezoelectric motor 300x (the right side in the figure), the ball 206 The gap between the inner groove 224 and the outer groove 204 is shortened, and the ball 206 is held by the inner groove 224 and the outer groove 204.

Further, in the ball guide close to the side of the piezoelectric motor 300x (the left side in the drawing), although the interval between the inner groove 224 and the outer groove 204 is enlarged, the X block 220 is subjected to a reaction force perpendicular to the moving surface. The ball guide which is shortened by the gap on the right side in the figure is a torque for rotating the X block 220 downward, and the ball 206 is held by the upper end side of the inner groove 224 and the lower end side of the outer groove 204.

As described above, in the moving mechanism 150 of the present embodiment, by making the energizing direction of the vibrating body 310 inclined with respect to the moving surface, any of the ball guides on both sides of the X-track 222 can be The inner groove 224 and the outer groove 204 hold the ball 206. Moreover, since the balls 206 are held in a direction parallel to the moving surface in one ball guide, the balls 206 are held in the direction perpendicular to the moving surface in the other ball guide, so that the holding directions are different from each other, In which direction the load is applied to the X block body 220, the shaking of the X block body 220 can be suppressed. Further, by arranging on the side close to the unit base 200 as described above, the sway of the X block 220 caused by the weight of the θ block body 240 and the Y block body 260 is suppressed, and the rigidity of the entire moving mechanism 150 can be improved.

Further, in the moving mechanism 150 of the present embodiment, the X block 220 moving in the X direction is disposed at a position close to the upper layer of the unit base 200, and the Y block 260 moving in the Y direction is disposed away from the unit base. The position of the lower floor of the seat 200. The reason is as follows. First, as described above, in the electronic component inspection apparatus 100, the gripping device 140 in which the moving mechanism 150 is incorporated is attached to the X stage 136, and the Y stage 132 and the X stage 136 are operated to enable the holding. Device 140 moves in the XY plane. Then, when the electronic component 1 is moved to the inspection table 116, since the Y stage 132 is mainly operated, the inertial force in the Y direction acts on the movement mechanism 150. Since the X block 220 movable in the X direction orthogonal to the Y direction is not subjected to the inertial force in the moving direction, even if it is disposed close to the upper layer of the unit base 200, even the θ block 240 and the Y block The weight of 260 is applied to the X block 220, and the displacement of the X block 220 caused by the inertial force (sliding in the moving direction) can also be prevented. Further, the Y stage 132 of the present embodiment corresponds to the "transfer body" of the present invention.

On the other hand, the Y block 260 movable in the Y direction is subjected to an inertial force in the moving direction, but if it is disposed at a position where the weight of the other components (220, 240) is not applied, the Y block is not The body 260 acts on a large inertial force, thereby suppressing the displacement of the Y block 260 (sliding in the moving direction). As a result, it is not necessary to add a brake mechanism or the like for preventing the displacement of the Y block 260 due to the inertial force, and it is possible to reduce the size of the moving mechanism 150.

Further, in the moving mechanism 150 of the present embodiment, the θ block body 240 is disposed between the X block body 220 and the Y block body 260, and the piezoelectric motor 300θ for driving the θ block body 240 is shortened by the built-in vibrating body 310. The side direction (bending direction) is arranged in conformity with the X direction. When the piezoelectric motor 300θ is disposed as described above, even if the inertial force in the Y direction is applied to the moving mechanism 150 as the Y stage 132 moves, the friction between the convex portion 312 of the vibrating body 310 and the pressure receiving body 252 is also caused. The direction in which the force acts (the direction of the bending of the vibrating body 310) does not coincide with the direction of the inertia, and the inertia can be suppressed. The displacement of the θ block 240 caused by the sexual force (sliding in the θ direction).

In the above, the moving mechanism of the present invention or the various devices in which the moving mechanism is mounted have been described. However, the present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

For example, in the above embodiment, the X block 220, the θ block 240, and the Y block 260 are arranged downward from the unit base 200, but the arrangement of each block is not limited thereto, for example, The θ block 240, the X block 220, and the Y block 260 may be arranged in this order. In this case, the energizing direction of the vibrating body 310 may be inclined with respect to the moving surface including the annular ball guide formed by the plurality of balls 248, and the piezoelectric motor 300θ that drives the θ block 240 may be disposed. Thereby, the force parallel to the moving surface and the force perpendicular to the moving surface are applied to the θ block 240, in one of two portions symmetrical with respect to the center of the annular ball guide, by parallel movement The force of the surface shortens the distance between the inner groove 246 and the outer groove, so that the ball 248 is held by the inner groove 246 and the outer groove. Further, in another portion, although the interval between the inner groove 246 and the outer groove is enlarged, the moment perpendicular to the moving surface generates a moment at which the θ block 240 is rotated by a portion as an axis, thereby the inner groove 246 and The outer groove holds the balls 248 in the up and down direction (perpendicular to the direction of the moving surface). As a result, since the sway of the θ block body 240 disposed on the side close to the unit base 200 is suppressed, the rigidity of the entire moving mechanism 150 can be improved. Further, the Y block body 260 in which the inertial force acts on the moving direction as the Y stage 132 moves is preferably disposed at a position below the weight where the other members (220, 240) are not applied, and the lowering acts on the Y. The inertial force of the block 260.

Further, in the above-described embodiment, the piezoelectric motor 300x of the X block 220 that is only driven to the side closer to the unit base 200 is disposed such that the energizing direction of the vibrating body 310 is obliquely arranged with respect to the moving surface, but the piezoelectric motor 300θ Similarly, the piezoelectric motor 300y may be disposed such that the energizing direction of the vibrating body 310 is inclined with respect to the moving surface. As a result, since the sway of the θ block body 240 or the Y block body 260 is suppressed, the rigidity of the entire moving mechanism 150 can be further improved.

Moreover, in the above embodiment, the piezoelectric motor 300x is fixed to the X block 220. On the side, the convex portion 312 of the vibrating body 310 is configured to be energized to the unit base 200 side (the pressure receiving body 210). Alternatively, the piezoelectric motor 300x may be fixed to the unit base 200 side. The convex portion 312 of the vibrating body 310 is configured to energize the X block 220 side. In this case, the X block 220 is directly subjected to the ability of the vibrating body 310. Further, by inclining the energizing direction of the vibrating body 310 with respect to the moving surface, the X block 220 receives the component parallel to the moving surface and the component perpendicular to the moving surface, and thus the above-described implementation Similarly, in any of the ball guides on both sides of the X-track 222, the balls 206 are held by the inner groove 224 and the outer groove 204, so that the sway of the X block 220 can be suppressed.

Further, in the above embodiment, the X block 220, the θ block 240, and the Y block 260 are suspended below the unit base 200. However, the present invention is not limited thereto, and X may be used. The block body 220, the θ block body 240, and the Y block body 260 are placed above the unit base 200. In this case, when the piezoelectric motor 300x that drives the X block 220 disposed on the side closer to the unit base 200 is disposed in a state where the energizing direction of the vibrating body 310 is inclined with respect to the moving surface, it is possible to suppress The sway of the X block 220 on the proximal end side of the weight of the other members (240, 260) is applied, so that the rigidity of the entire moving mechanism 150 can be improved.

Further, in the above embodiment, the cross-sectional shape of the outer groove 204 and the inner groove 224 is formed in a semicircular shape. However, the cross-sectional shape of the outer groove 204 and the inner groove 224 is not limited thereto, and may be a shape in which the rolling elements such as the balls 206 are rollably held. For example, it can also be set to a V shape.

Further, in the above embodiment, a plurality of balls 206 are inserted between the outer groove 204 and the inner groove 224 as rolling elements. However, the rolling element is not limited to the ball 206 as long as it is a rolling element that can smoothly move the X block 220 by rolling between the outer groove 204 and the inner groove 224. For example, a cross roller in which a plurality of cylindrical rollers are alternately arranged along the outer groove 204 and the inner groove 224 may be used. The cross roller can withstand high load by contacting the roller line with the V-groove, so if the cross roller is used, the rigidity of the moving mechanism 150 can be improved.

200‧‧‧ unit base

202‧‧‧X track support

204‧‧‧ outer trough

206‧‧‧ balls

208‧‧‧through holes

210‧‧‧Subjected body

220‧‧‧X block

222‧‧‧X track

224‧‧‧ inner slot

226‧‧‧through holes

240‧‧‧θ block

242‧‧‧Guide axis

244‧‧‧through holes

246‧‧‧ Inside slot

248‧‧‧ balls

250‧‧‧ Pressure platform

252‧‧‧Subjected body

254‧‧‧Y track

256‧‧‧ inner slot

260‧‧‧Y block

262‧‧‧Y track support

264‧‧‧ outer trough

266‧‧‧ balls

268‧‧‧Subjected body

270‧‧‧ shaft support

300x, 300y, 300θ‧‧‧ Piezoelectric motors

310‧‧‧ vibrating body

312‧‧‧ convex

320‧‧‧Energy spring

Claims (17)

A moving mechanism comprising: a support body disposed at a specific position and supporting a moving mechanism; a first moving body movable in a first direction with respect to the support body; and a first vibrating body including a pressure The electric material is generated to vibrate in the first direction, and is supported by any one of the support body or the first movable body; the second movable body is sandwiched therebetween The first movable body is disposed on a side opposite to the support, moves along with the movement of the first movable body, and is movable in a second direction intersecting the first direction with respect to the first movable body; The vibrating body includes a piezoelectric material to generate the vibration in the second direction, and is supported by any one of the first moving body or the second moving body in a state of being energized; a first groove formed on the support body and formed in parallel with the first direction; and a second groove formed on the first movable body and facing the first groove; a plurality of rolling elements disposed in the first slot and Between the second grooves, the first moving body moves and rolls; and the moving shaft includes the rolling elements and is parallel to the first direction; and the moving axis is opposite to the support and the first 1 that two rows are provided in a direction in which the moving bodies are opposed to each other, and the first groove and the second groove face each other in a direction intersecting the support body and the first moving body, and the first The position of the groove and the second groove is opposite to one of the two columns of movement axes, and the other is opposite. The energizing direction in which the first vibrating body is energized is inclined with respect to the moving surface including the two rows of moving axes. The moving mechanism of claim 1, wherein the support body is disposed on a transfer body that can transfer the moving mechanism in a specific direction, and the first direction is different from a direction in which the transfer body is transferred. The moving mechanism of claim 2, comprising: a rotating body that is rotated about a third direction orthogonal to the first direction and the second direction; and a third vibrating body that includes a piezoelectric material Vibration may be generated, and the rotating body may be driven by the vibration; and the direction of the vibration generated by the third vibrating body may be different from the direction in which the transfer body is transferred. The moving mechanism according to any one of claims 1 to 3, wherein a portion of the support body or the first movable body in which the first vibrating body is energized is a surface that the vibrating body abuts A pressure body formed into a substantially rectangular parallelepiped shape is embedded in a posture perpendicular to the above-described energizing direction. The moving mechanism of claim 4, wherein the pressure receiving body is formed of a material having a hardness higher than a side of the support body or the moving body embedded in the pressure receiving body. An electronic component conveying apparatus comprising: a grip portion that holds an electronic component; and a moving mechanism that moves the grip portion that holds the electronic component; and the moving mechanism includes: a support body Provided at a specific position and supporting the moving mechanism; the first movable body is movable in the first direction with respect to the support; and the first vibrating body includes the piezoelectric material to generate the vibration in the first direction, and a state of energizing the support body or the first mobile body The second movable body is provided on the opposite side of the support body with the first movable body interposed therebetween, and moves along with the movement of the first movable body, and is movable relative to the first (1) the moving body moves in a second direction intersecting the first direction; the second vibrating body includes a piezoelectric material to generate the vibration in the second direction, and the first moving body or the second moving body The first groove is supported by any one of the other, and the first groove is formed in the support body in a pair and is formed in parallel with the first direction; the second groove is in the above a movable body is provided with a pair and formed to face the first groove; a plurality of rolling elements are disposed between the first groove and the second groove, and roll with the movement of the first moving body And a moving shaft including the rolling element parallel to the first direction; and the moving shaft is provided in two rows spaced apart from a direction in which the support body and the first moving body face each other, wherein The first groove and the second groove face each other in the direction of the support a direction intersecting the first moving body, and a position of the first groove and the second groove is opposite to one of the two column moving axes, and the first vibrating body is energized The energy direction is inclined with respect to the moving surface including the above two columns of moving axes. An electronic component inspection apparatus, comprising: a grip portion that holds an electronic component; a moving mechanism that moves the grip portion that holds the electronic component; and an inspection portion that inspects the electronic component; The above moving mechanism includes: The support body is disposed at a specific position and supports the moving mechanism; the first movable body is movable in the first direction with respect to the support body; and the first vibrating body includes the piezoelectric material to generate the first direction The vibration is supported by either one of the support body or the first movable body, and the second movable body is disposed between the first movable body and the first movable body. The opposite side of the support moves along with the movement of the first movable body, and is movable in a second direction intersecting the first direction with respect to the first movable body; the second vibrating body includes a piezoelectric material The vibration in the second direction is generated, and is supported by any one of the first moving body or the second moving body; the first groove is on the support a pair is provided in parallel with the first direction; a second groove is formed on the first movable body and is formed to face the first groove; and a plurality of rolling elements are provided in the above Between the first slot and the second slot, and along with the first shift And moving the shaft including the rolling element parallel to the first direction; and the moving axis is spaced apart from a direction intersecting the direction in which the support body and the first moving body face each other In two rows, the direction in which the first groove and the second groove face each other intersects with the direction in which the support body faces the first movable body, and the position of the first groove and the second groove moves in the two columns Contrary to one of the axes and the other, the energizing direction of the first vibrating body is inclined with respect to the moving surface including the two rows of moving axes. A moving mechanism characterized by comprising: a support body that supports a movable mechanism; a first movable body that is displaceable relative to the support body in a first direction; and a first groove that is disposed on the support body and that is parallel to the first direction The first vibrating body is disposed on the support body to be energized by pressing the movable body, or is disposed on the first movable body to be energizable by pressing the support body; and the second movable body is configured to be capable of pressing the support body; The first movable body is disposed on a side opposite to the support body, and is movable in a second direction intersecting with the first direction with respect to the first movable body; and the second groove is provided on the first side The moving body is formed in parallel with the moving direction, and is formed at a position facing the first groove; and the second vibrating body is disposed on the first moving body to be energized by pressing the moving body Or being disposed on the second movable body to be energized by pressing the support body; and the direction in which the first groove and the second groove face each other intersects with the direction in which the support body and the movable body face each other. The energization direction of the first vibrating body is energized Said first groove and the second groove to the cross direction of the direction of, and the support body and the movable body. The moving mechanism of claim 8, wherein the support body is disposed on a transfer body that can transport the movable body in a specific direction, and the first direction is different from a direction in which the transfer body is transferred. The moving mechanism of claim 9, comprising: a rotating body that rotates about a third direction orthogonal to the first direction and the second direction; and a third vibrating body that drives the swirling body. The moving mechanism of claim 10, wherein the rotating body is disposed between the first moving body and the second moving body. The moving mechanism according to any one of claims 8 to 11, wherein a pressure receiving body is disposed in a portion of the support body or the first movable body in which the first vibrating body is energized, and the pressure receiving body The surface on which the vibrating body abuts is perpendicular to the energizing direction. The moving mechanism of claim 12, wherein the hardness of the pressed body is formed by a material having a hardness higher than a hardness of the support body or the movable body on which the pressure-receiving body is disposed. The moving mechanism according to any one of claims 8 to 13, wherein the first vibrating body, the second vibrating body, and the third vibrating body include a piezoelectric material, and the vibration generated in the energizing direction is expanded and contracted. The vibration in which the above-described energizing directions are orthogonal to each other. The moving mechanism of claim 14, wherein the first vibrating body, the second vibrating body, and the third vibrating body are pressed by the elastic member in a direction orthogonal to the energizing direction. An electronic component conveying apparatus comprising: a grip portion that holds an electronic component; a support body that supports a movable mechanism; and a first movable body that is movable in a first direction with respect to the support body a first groove formed on the support body and formed in parallel with the first direction; the first vibrating body disposed on the support body to be energized by pressing the movable body, or disposed on the first groove The first movable body is energized to press the support body, and the second movable body includes the grip portion and is provided with the first movable body interposed therebetween The second movable body is movable in a second direction intersecting the first direction with respect to the first movable body, and the second groove is disposed on the first movable body in parallel with the moving direction. And being formed at a position facing the first groove; and the second vibrating body disposed on the first movable body to be energized by the movable body or disposed on the second movable body And the support body is biased to be energized; and the direction in which the first groove and the second groove face each other intersects with the direction in which the support body and the movable body face each other, and the first vibrating body is energized. The energy direction intersects the direction in which the first groove and the second groove face each other and the direction in which the support body faces the moving body. An electronic component inspection apparatus, comprising: a grip portion that holds an electronic component; an inspection portion that inspects the electronic component; a support body that supports the movable mechanism; and a first moving body that is opposite to the above The support body is disposed to move in the first direction; the first groove is formed on the support body and formed in parallel with the first direction; and the first vibrating body is disposed on the support body to press the movable body The ground is energized or placed on the first movable body to be energized by pressing the support; the second movable body includes the grip portion, and is provided to the first movable body via the first movable body The opposite side of the support body is movable in a second direction intersecting the first direction with respect to the first movable body, and the second groove is provided on the first movable body, and is formed in parallel with the moving direction, and is formed Positioned opposite the first slot; and The second vibrating body is disposed on the first movable body to be energized by pressing the movable body, or is disposed on the second movable body to be energizable by pressing the support; and the first groove The direction opposite to the second groove intersects with the direction in which the support body and the moving body face each other, and the energizing direction of the first vibrating body is opposite to the first groove and the second groove. The direction and the support body intersect the direction in which the moving body faces.