TW201336616A - 運動平台回授控制系統 - Google Patents
運動平台回授控制系統 Download PDFInfo
- Publication number
- TW201336616A TW201336616A TW101107635A TW101107635A TW201336616A TW 201336616 A TW201336616 A TW 201336616A TW 101107635 A TW101107635 A TW 101107635A TW 101107635 A TW101107635 A TW 101107635A TW 201336616 A TW201336616 A TW 201336616A
- Authority
- TW
- Taiwan
- Prior art keywords
- control system
- feedback control
- platform
- motion
- actuator
- Prior art date
Links
- 238000012546 transfer Methods 0.000 claims abstract description 18
- 238000013519 translation Methods 0.000 claims description 26
- 238000005096 rolling process Methods 0.000 claims description 18
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000001133 acceleration Effects 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000005516 engineering process Methods 0.000 description 24
- 238000000034 method Methods 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 230000003287 optical effect Effects 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 5
- 238000006073 displacement reaction Methods 0.000 description 3
- 238000001459 lithography Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000004044 response Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000005459 micromachining Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 238000001015 X-ray lithography Methods 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000001352 electron-beam projection lithography Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
- 238000000233 ultraviolet lithography Methods 0.000 description 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101107635A TW201336616A (zh) | 2012-03-07 | 2012-03-07 | 運動平台回授控制系統 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101107635A TW201336616A (zh) | 2012-03-07 | 2012-03-07 | 運動平台回授控制系統 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201336616A true TW201336616A (zh) | 2013-09-16 |
| TWI480118B TWI480118B (enrdf_load_stackoverflow) | 2015-04-11 |
Family
ID=49627637
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101107635A TW201336616A (zh) | 2012-03-07 | 2012-03-07 | 運動平台回授控制系統 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201336616A (enrdf_load_stackoverflow) |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5278634A (en) * | 1991-02-22 | 1994-01-11 | Cyberoptics Corporation | High precision component alignment sensor system |
| US6819974B1 (en) * | 2000-03-29 | 2004-11-16 | The Boeing Company | Process for qualifying accuracy of a numerically controlled machining system |
| CN100554876C (zh) * | 2005-10-14 | 2009-10-28 | 鸿富锦精密工业（深圳）有限公司 | 光学式定位装置 |
| TWI340680B (en) * | 2005-11-04 | 2011-04-21 | Hon Hai Prec Ind Co Ltd | A running platform |
| TW201809913A (zh) * | 2006-09-01 | 2018-03-16 | 日商尼康股份有限公司 | 曝光裝置、曝光方法、以及元件製造方法 |
| TW200841981A (en) * | 2007-04-20 | 2008-11-01 | Univ Nat Formosa | Laser array measurement system for testing three dimensional positioning performance, measuring three dimensional orbit and straightness of arbitrary axis |
| TW200908015A (en) * | 2007-08-15 | 2009-02-16 | Chroma Ate Inc | Horizontal adjusting method of optical mechanism and related device |
| TWI387507B (zh) * | 2010-05-12 | 2013-03-01 | Univ Nat Formosa | Error Measurement Device for Micro Machining Machine |
| CN101979248B (zh) * | 2010-09-08 | 2012-03-07 | 东莞市凯格精密机械有限公司 | 平面任意位置调整平台及全自动视觉印刷机 |
| TWM398462U (en) * | 2010-09-14 | 2011-02-21 | Chiuan Yan Technology Co Ltd | Modualized positioning device |
| TWM401195U (en) * | 2010-09-14 | 2011-04-01 | Chiuan Yan Technology Co Ltd | Multi-directional adjustment device |
| TWM420940U (en) * | 2011-09-16 | 2012-01-11 | Chiuan Yan Technology Co Ltd | Carrier shifting mechanism using wireless transmission module |
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2012
- 2012-03-07 TW TW101107635A patent/TW201336616A/zh not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| TWI480118B (enrdf_load_stackoverflow) | 2015-04-11 |
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| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |