TW201329483A - Probe pressure calibration method and calibration apparatus thereof - Google Patents

Abstract

A probe pressure calibration method is disclosed. After a first probe and a second probe are electrically contacted with a subject under test, the first probe is removed from the subject under test and then moved toward the subject under test and contacted therewith, during which a cross-voltage of a pressure detection unit electrically connected with the probes is captured, and after the reduction of the cross-voltage from a constant value is detected, the feeding operation of the first probe is stopped. Finally, the operations of the first probe are repeated on the second probe. Therefore, this invention ensures that the probes use a substantially identical pressure to form electrical contact with the subject under test. This invention also discloses a probe pressure calibration apparatus for implementing the pressure calibration method mentioned above.

Description

Probe needle pressure correction method and calibration device thereof

The invention relates to a method for correcting a probe probing force of a probe, in particular to a method for correcting a two-needle needle pressure by using a needle pressure detecting circuit, so that the two probes Substantially the same acupressure is indeed in electrical contact with the object to be tested. The invention also relates to a calibration device for implementing the aforementioned probe acupressure correction method, which can positively correct the acupressure so as to facilitate the subsequent test object test operation to proceed smoothly.

A probe is a device that utilizes a probe to detect semiconductor grain performance or characteristic parameters such as light-emitting diodes. When the spotting operation is carried out, if the probing force of the probe is too large, not only the surface of the crystal grain may be affected by the appearance of the needle mark, but also the surface quality of the crystal may be damaged, and the probe may be worn easily. Once the needle pressure is too small, the probe and the die contact may be poorly contacted, which may affect the spot measurement result. Therefore, how to ensure that the probe can abut the die contact with a proper needle pressure has been an issue of concern to the industry.

Conventionally, it has been possible to secure a probe by using a mechanical edge sensor mounted in a spot measuring device, for example, various types of edge finder disclosed in a new patent specification such as the Republic of China No. M345241, M382589, and the like. It can be surely contacted and given a certain pressure to press the joint of the die to be tested. In general, the structure of the conventional mechanical edge finder generally includes a base, a swing arm that is elastically coupled to the base by a spring piece and swingable relative to the base, and an adjustable a pre-applied device, wherein the probe is fixed to the swing arm, and the adjustable pre-applicator applies a magnetic attraction, a magnetic repulsive force or a spring restoring force to act on the base and the swing arm The pre-force is such that the probe is in an unstressed state, and the two electrical contacts respectively disposed on the base and the swing arm can be in contact and electrically conductive, and once the probe contacts and continues When the contact of the die to be tested is pressed to the extent that the pre-force is overcome, the swing arm will swing relative to the base to separate the two electrical contacts to cause an open circuit, and therefore, the adjustable pre-applied applicator Give a specific pre-force and stop the rise and fall of the load-bearing die at the key point when the two electrical contacts are disconnected, to ensure that the probe has actually touched and applied a test during the spotting operation. The specific pressing force is on the joint of the die to be tested.

Although the above method of setting the probe needle pressure by using the mechanical edge finder is a long time, the mechanical edge finder has several disadvantages in essence, for example, the elastic piece connected between the base and the swing arm is used for a long time. It is easy to be elastic and tired, so that in the spot test operation, it may be necessary to disassemble the edge finder to detect and adjust the applied pre-force to correct the needle pressure. Secondly, the two electrical properties respectively set on the base and the swing arm The contact is easy to carbonize under long-term use, not only must be cleaned and maintained, but also needs to re-correct the entire mechanical edge finder after cleaning, and increase the working time; in addition, the spot measurement operation of the general light-emitting diode package module In this case, two sets of mechanical edge finder are used to respectively clamp a probe, and the light emitting diode package module to be tested is fixed on a vertical lifting platform, by which the lifting load is carried. The rising action of the stage or the mechanical edge finder is synchronously lowered, so that the two electrical contacts of the object to be tested are respectively in contact with the two probes, and the needle pressure setting and the point measurement operation are performed. However, the two probes respectively Erected in machinery When the edge finder is placed, the position of the needle tip may be high or low, and the bearing surface carrying the object to be tested may also have a problem of poor surface flatness or poor levelness due to tilting during assembly. During the process in which the object to be tested rises or the two probes are synchronously descended with the mechanical edge finder, the two probes may occur at the same time, but not in the same time. In the case of a sexual contact, the needle pressure applied to the two contacts of the object to be tested is not evenly averaged, and even the probe needle pressure of the post-contact is moderate and the probe pressure that is first contacted has been excessively problematic.

In view of the above, one of the objects of the present invention is to provide a method for correcting the needle pressure of a probe, which can make the two probes contact the object to be tested with substantially the same needle piezoelectricity, without being affected by the difference in position of the two needle tips and the object to be tested. The influence of the flatness or inclination of the bearing surface.

In order to achieve the above object, a probe needle pressure setting method according to the present invention comprises the following steps: a) electrically contacting a first probe with a second probe, wherein the first probe The pin and the second probe are respectively electrically coupled to a first contact and a second contact of a pin pressure detecting circuit, wherein the pin pressure detecting circuit has a power source and a pin electrically connected to the power source a pressure detecting unit, the pin pressure detecting unit includes a boosting element and a probe connecting line connected in parallel with the boosting element, the probe connecting line has the first contact and the second contact; b) The first probe is electrically insulated from the object to be tested; c) capturing a voltage across the pin pressure detecting unit, and simultaneously displacing the first probe toward the object to be tested The object to be tested is electrically contacted, and after detecting that the voltage across the acupressure detecting unit drops from a constant value, stopping the action of the first probe; d) causing the second probe to leave the object to be tested Electrically insulating from the object to be tested; and e) extracting a voltage across the pin pressure detecting unit while making the The second probe is in close contact with the object to be tested and is in electrical contact with the object to be tested again, and stops detecting the cross-voltage of the acupressure detecting unit after decreasing from a constant value. .

According to the above probe pin pressure correction method, when the object to be tested is electrically connected to the probes, the pin connection is measured because the probe connection line is turned on and connected in parallel with the step-up element. The cross-voltage of the detecting unit will be significantly decreased. With this characteristic, the feeding action of the first probe or the second probe toward the object to be tested is stopped immediately after determining the aforementioned voltage drop, or within a predetermined time range. Not only can the probes be surely abutted against the object to be tested by a predetermined needle pressure, but also the needle pressures of the first and second probes can be corrected, so that the first and second probes can be substantially the same The needle pressure abuts against the object to be tested, and is not affected by the flatness or inclination of the bearing surface of the object to be tested.

According to the acupressure detecting circuit provided by the present invention, the present invention further provides another probe acupressure correction method, which comprises the following steps: the same step a) as the above method; b) lifting the first probe away from the first probe; The object to be tested is electrically insulated from the object to be tested, and the first probe is electrically converted from being electrically connected to the object to be tested into electrical insulation by drawing a voltage across the pin pressure detecting unit. At a time point, the critical position of the first probe; c) causing the first probe to descend to be closely displaced toward the object to be tested, and stopping at a first contact position at a predetermined distance below the critical position, such that The first probe is electrically contacted with the object to be tested again; d) the second probe is lifted away from the object to be tested and electrically insulated from the object to be tested, and the cross section of the pin pressure detecting unit is captured a voltage to determine a critical position of the second probe when the second probe is electrically connected to the object to be electrically insulated, and e) lowering the second probe toward the The object to be tested is closely displaced and stops below the critical position of the second probe substantially And c) the predetermined distance from the second contact position of the same distance, so that the second probe is in electrical contact with the object to be tested again. In this way, it is also ensured that the first and second probes can abut the object to be tested with substantially the same needle pressure.

In the probe needle pressure setting method provided by the present invention, the needle pressure detecting circuit further includes a voltage dividing component electrically connected to the power source and connected in series with the pin pressure detecting unit to protect the pin pressure detecting circuit.

Preferably, the resistance value of the voltage dividing component is less than the resistance value of the boosting component of the acupressure detecting unit, for example, 100K ohms and 400K ohms, but not limited thereto.

In the probe acupressure correction method provided by the present invention, preferably, the step of: "connecting a first probe and a second probe to a test object" comprises the following steps: A1) spacing the first probe from the second probe to correspond to the top of the object to be tested; a2) extracting a voltage across the acupressure detecting unit; a3) causing the object to be tested and the first and the first The two probes are relatively closely displaced, so that the object to be tested can be electrically connected to the first and second probes by being spaced apart from each other; and a4) when the acupressure detecting unit is detected After the voltage across the constant value decreases, the object to be tested is stopped from being relatively close to the first and second probes.

In the above step a3), the phrase "make the object to be tested relatively close to the first and second probes" means that the probes are fixed and the object to be tested is closely displaced toward the probes, or The object to be tested is not moved and the probes are closely displaced toward the object to be tested, or the probes and the object to be tested are closely displaced toward each other. In steps b) to e), the first or second probe is moved away from the object to be tested or is closely displaced toward the object to be tested, meaning that the object to be tested is not moved, and the first or second probe is Leaving the object to be tested or moving toward the object to be tested.

The above object can be achieved in the following manner: in step a1), the object to be tested is placed on a lifting platform, and the first and second probe systems respectively correspond to the upper side of the object to be tested; in step a3 The purpose of "relaxing the object to be tested relative to the first and second probes" by the rise of the lifting stage; and in step a4), stopping the lifting load The stage rises to achieve the purpose of "stopping the relative displacement of the object to be tested and the first and second probes".

Preferably, in the above step a4), after the cross voltage of the acupressure detecting unit is determined to fall from the constant value to a threshold value, the elevating stage is stopped.

Alternatively, in step a1), the first probe and the second probe system are respectively fixed to a first lifting shaft and a second lifting shaft corresponding to the object to be tested; in step a3), By the lowering of the first lifting shaft and the second lifting shaft, the purpose of "relaxing the object to be tested relative to the first and second probes" is achieved; and in step a4), by stopping The first and the second lifting shaft are lowered to achieve the purpose of "stopping the object to be tested from being relatively close to the first and second probes".

Preferably, in step a4), after determining that the voltage across the needle pressure detecting unit drops from the constant value to a threshold, the first and second lifting shafts are stopped to descend.

Preferably, in step a1), the object to be tested is placed on a lifting platform, and the first probe and the second probe are respectively fixed to a first lifting shaft and a second lifting shaft. Corresponding to the top of the object to be tested; in step a2), the object to be tested is relatively close to the first and second probes by the rising of the lifting platform; and in step a4) Stopping the relative displacement of the object to be tested and the first and second probes by stopping the lifting of the lifting platform; in step b), the first detecting is performed by the rising of the first lifting shaft The needle leaves the object to be tested; in step c), the first probe is closely displaced toward the object to be tested by the first lifting shaft falling, and the first lifting axis is stopped by stopping the first lifting axis The action of the first probe; in step d), the second probe is moved away from the object to be tested by the second lifting shaft rising; in step e), the second lifting shaft is lowered by the second lifting shaft And the second probe is closely displaced toward the object to be tested, and the action of the second probe is stopped by stopping the lowering of the second lifting shaft.

In order to practice the foregoing various displacement modes, in a preferred embodiment of the present invention, the object to be tested is placed on a lifting platform, and the first probe and the second probe system are respectively fixed on the lifting platform. A first lifting shaft and a second lifting shaft correspond to the upper side of the object to be tested. However, it is not actually limited to the manner provided by this embodiment.

In addition, in the probe pin pressure setting method provided by the present invention, the voltage across the pin voltage detecting unit can be captured by a signal converter electrically connected to the pin voltage detecting circuit, and used to determine the cross. Whether the voltage drops from this constant value.

Another object of the present invention is to provide a probe acupressure correction device for implementing the aforementioned probe acupressure correction method, which comprises: a lifting and lowering platform for carrying a test object; a first and a second lifting a shaft for respectively measuring a first probe and a second probe of the object to be tested; a pin pressure detecting circuit having a power source and a pin pressure detecting unit electrically connected to the power source The pin pressure detecting unit includes a boosting component and a probe connecting circuit connected in parallel with the boosting component, the probe connecting circuit having a first electrically coupled to the first probe and the second probe a contact and a second contact; a signal converter is electrically connected to the pin pressure detecting circuit for capturing a voltage across the pin pressure detecting unit; and a lifting controller is coupled to the signal The lifting platform and the first and second lifting shafts are electrically connected to control the lifting platform and the first and second lifting shafts according to the voltage value drawn by the signal converter .

The details and features of the probe acupressure correction method and apparatus thereof provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited to the scope of the invention.

The applicant firstly illustrates that the main technical feature of the probe acupressure correction method provided by the present invention is that after the first probe and the second probe are in electrical contact with an object to be tested, the first The probe leaves the object to be tested, and then the first probe is fed to the object to be tested and contacts the object to be tested. In the process, a pin pressure detecting unit electrically connected to the probes is matched. The voltage across the voltage, and after detecting the voltage drop from a constant value, stops the feeding action of the first probe, so that the first probe can be pressed against the object to be tested with an appropriate needle pressure. Then, the second probe is repeated to perform the aforementioned action of the first probe to complete the acupressure correction of the first and second probes.

In detail, the method for correcting the probe needle pressure provided by the present invention comprises the following main steps: a) electrically contacting a first probe with a second probe, and the first probe The pin and the second probe are respectively electrically coupled to a first contact and a second contact of a pin pressure detecting circuit, wherein the pin pressure detecting circuit has a power source and a pin electrically connected to the power source a pressure detecting unit, the pin pressure detecting unit includes a boosting element and a probe connecting line connected in parallel with the boosting element, the probe connecting line has the first contact and the second contact; b) The first probe is electrically insulated from the object to be tested; c) capturing a voltage across the pin pressure detecting unit, and simultaneously displacing the first probe toward the object to be tested The object to be tested is electrically contacted, and after detecting that the voltage across the acupressure detecting unit drops from a constant value, stopping the action of the first probe; d) causing the second probe to leave the object to be tested Electrically insulating from the object to be tested; and e) drawing a voltage across the pin pressure detecting unit while making the second probe The needle is in close contact with the object to be tested and is in electrical contact with the object to be tested again, and after detecting that the voltage across the pin pressure detecting unit drops from a constant value, the action of the second probe is stopped.

In other words, after determining that the captured cross voltage drops from a constant value or falls to the set threshold, stopping the feeding operation of the first or second probe toward the object to be tested, not only ensures the probe The needle can positively abut the object to be tested by a predetermined needle pressure, and can correct the needle pressure of the first and second probes so that the first and second probes can be free from the bearing surface of the object to be tested. The flatness or the inclination is affected, and the object to be tested can be abutted with substantially the same needle pressure to facilitate the subsequent test object test operation.

Next, in order to achieve the purpose of "a first probe and a second probe electrically contact with a test object" in the step a), the step a) comprises the following detailed steps: a1) making the first The probe and the second probe are spaced apart from the object to be tested; a2) capturing the voltage across the acupressure detecting unit; a3) causing the object to be tested to be relatively close to the first and second probes俾 enabling the object to be tested to be electrically connected to the first and second probes that are in contact with each other and in contact with each other; and a4) detecting a voltage across the constant value of the acupressure detecting unit from a constant value After the falling, the object to be tested is stopped from being relatively close to the first and second probes.

The detailed structure and characteristics of the calibration apparatus which can be used to implement the above-described probe acupressure correction method will be described first. Through this correction apparatus, a more specific understanding of the above method can be obtained.

Please refer to the first to fifth figures. The calibration apparatus provided by the first preferred embodiment of the present invention and which can be used to implement the above-mentioned probe acupressure correction method is integrated into a testable object for batch spotting operation. In the spotting system 10, the spotting system 10 mainly includes a lifting platform 12, a needle pressure detecting module 14, a detecting machine 16, and a testing machine 18.

The lifting platform 12 is the same as the working platform which can be vertically moved up and down along the Z axis or can be moved along the X, Y and Z axes, generally used in a machine tool or a pointing device, and the top surface of the lifting platform 12 is used. The object to be tested 20 can be mounted, and the object to be tested 20 can be, but is not limited to, an LED chip, an LED package module, a wafer having a plurality of wafers, and a conductive for correcting the needle pressure. Blocks and other objects. As shown in the fifth figure, in this embodiment, the object to be tested 20 is exemplified by an LED package module.

The acupressure detecting module 14 mainly includes a pin pressure detecting circuit 22 and a first probe 24a and a second probe 24b corresponding to the first contact 20a and the second contact 20b of the object 20 to be tested 20 . The pin voltage detecting circuit 22 has a power source (such as the DC power source provided in this embodiment) 26, a voltage dividing component electrically connected to the power source 26 (such as the resistor R1 provided in this embodiment), and the same The pressure element is connected in series with one of the needle pressure detecting units 28. Wherein, the voltage dividing component has the function of protecting the loop current of the pin pressure detecting circuit 22 for withstanding the short circuit current that may be generated by the pin pressure detecting unit 28; the pin pressure detecting unit 28 includes a boosting component (such as the present embodiment) The resistor R2) and the probe connection line 30 connected in parallel with the boosting element have a first contact 30a and a second contact 30b. The boosting element is provided. It is used to provide a specific bias voltage to the first contact 30a and the second contact 30b. In addition, the pin pressure detecting circuit 22 further includes a first switch SW1 electrically connected to the first probe 24a at one end, and a second switch SW2 electrically connected to the second probe 24b at one end, through which the second switch SW2 is electrically connected a second switch SW1, SW2, the first contact 30a is electrically coupled to the first probe 24a, and the second contact 30b is electrically coupled to the second probe 24b. The specific bias voltage provided by the boosting component can be input to the first contact 20a and the second contact 20b of the object to be tested 20 through the first probe 24a and the second probe 24b, respectively. Furthermore, the boosting element is mainly designed to overcome the energy barrier required for the conduction between the first contact 20a and the second contact 20b of the object to be tested 20, or to trigger the internal component characteristic of the object to be tested 20 The operation bias voltage between the first contact 20a and the second contact 20b is required to be applied to the specific conductive state, and the power supply 26 and the voltage dividing component can be withstand according to the test object 20 in a conductive state. The current power provides the optimum electrical specifications. Therefore, in this embodiment, when the object to be tested 20 is an LED package module, if the positive and negative electrodes of the LED element are electrically connected to the first contact 20a and the second contact 20b, respectively, The specific bias voltage provided by the boosting component needs to be greater than the forward-bias of the LED component, so that the LED package module is turned on and between the first probe 24a and the second probe 24b. There is an equivalent resistance including an ohmic contact resistance of the first and second probes 24a, 24b and the first and second contacts 20a, 20b, a module wire resistance, an ohmic contact resistance of the module wire and the LED component, and The ohmic contact resistance of the LED component and the lateral resistance of the junction are lower than or even close to the short-circuit resistance characteristic of the boosting component. At this time, the voltage dividing component is required to withstand a higher DC partial voltage or even a direct current of the power supply 26 Voltage. Therefore, under the simplest circuit design structure, the power source 26 actually used by the applicant can generate a 5V DC power supply, and the voltage dividing component and the boosting component respectively have a resistor R1 that can be adjusted or fixed to 100K and 400K ohms. And R2, when the first probe 24a and the second probe 24b are in ohmic contact with the first contact 20a and the second contact 20b of the object to be tested 20, the boosting element can provide an operation of about 4V. Biasing to the object to be tested 20, the LED element is turned from off to on, and the on-resistance characteristic of the step element and the probe connection line 30 is reduced by the on-current characteristic of the LED element to be close to the voltage dividing element or even The equivalent resistance of the object to be tested 20 is approximated, thereby reducing the partial pressure of the acupressure detecting unit 28 in the acupressure detecting circuit 22.

It should be noted that the first and second switches SW1 and SW2 are arranged for the purpose of quickly switching the probes 24a and 24b to be electrically connected to a test circuit (described in detail below). After the completion of the acupressure correction operation, it is possible to quickly switch to a test object test operation state, and therefore, it is not a necessary and indispensable component for the acupressure correction method provided by the present invention.

Next, the shape of the probes 24a and 24b described above is not particularly limited, and may be, for example, a linear needle body held by a probe holder or a curved needle having a predetermined bending angle. In this embodiment, the first probe 24a is fixed to a first lifting shaft 24a2 by a first probe holder 24a1, whereby the first probe 24a can follow the first lifting shaft The falling or rising action of 24a2 is closely displaced or separated from the first contact 20a of the object to be tested 20. The second probe 24b is fixed to a second lifting shaft 24b2 by a second probe holder 24b1, whereby the second probe 24b can be lowered or raised with the second lifting shaft 24b2. The action is closely displaced or separated from the second contact 20b of the object to be tested 20.

The detector 16 mainly has a signal converter 32, a lifting controller 34 and an interface controller 36. The signal converter 32 can be a potentiometer for generally drawing a voltage signal or an analog/digital converter (A/D converter) for converting the voltage signal, and the signal extraction circuit 32a is connected across the signal. The two ends of the pin pressure detecting unit 28 of the pin pressure detecting circuit 22 capture and interpret the voltage across the pin voltage detecting unit 28. The lifting controller 34 is electrically connected to the signal converter 32, the lifting platform 12 and the first and second lifting shafts 24a2, 24b2, and the lifting controller 34 can control the lifting platform 12 and the Driving motors (not shown) of the first and second lifting shafts 24a2, 24b2 control the lifting operation of the lifting stage 12 and the first and second lifting shafts 24a2, 24b2. In other words, by the control of the lifting controller 34, the lifting platform 12 can drive the object to be tested 20, and the object to be tested 20 is separated from the first and second probes 24a, 24b and electrically connected to each other. a preliminary position of the insulation (as shown in the first figure and the third figure A), and a contact position electrically connected to the probe 20 and the probes 24a, 24b (such as the second figure and the Reciprocating displacement between the three figures B), and in the process of the lifting controller 34 controlling the lifting stage 12 to rise from the preparatory position to the contact position, the lifting controller 34 can further according to the signal converter The voltage signal drawn by 32 determines whether the object to be tested 20 has risen to contact with the probes 24a and 24b to determine whether the lifting operation of the lifting platform 12 should be stopped. Similarly, the first lifting shaft 24a2 and the second lifting shaft 24b2 can respectively drive the first probe 24a and the second probe 24b to rise away from the object to be tested 20 by the control of the lifting controller 34 ( As shown in the third figure C and E), or descending from the position away from the object to be tested 20, and feeding the object 20 to the displacement, so that the first contact 20a of the object to be tested 20 or The second contact 20b is electrically contacted (as shown in the third figures D and F), and the first probe 24a or the second lift shaft 24b2 drives the first probe 24a or the second probe 24b to descend. During the displacement, the lifting controller 34 can determine whether the first probe 24a or the second probe 24b has descended to the first object 24 according to the voltage signal captured by the signal converter 32. A contact 20a or a second contact 20b is in contact to determine whether the lower lifting shaft 24a2 or the second lifting shaft 24b2 should be stopped. In addition, in the case of the interface controller 36, the interface controller 36 is electrically connected to one of the interface controllers 38 of the testing machine 18 to facilitate the exchange of control commands between the testing machine 16 and the testing machine 18.

The test machine 18 mainly includes the interface controller 38 electrically connected to the interface controller 36 of the detector 16 and a test unit 40 electrically connected to the interface controller 38. The test unit 40 has a test. The circuit 42 has a first contact 42a and a second contact 42b that are disconnected, and as shown in the fourth figure, the first connection is performed through the switching actions of the first and second switches SW1 and SW2. The point 42a is electrically coupled to the first probe 24a, and the second contact 42b is electrically coupled to the second probe 24b, such that after the probe needle pressure correction is completed, via the foregoing By means of the switching means, the testing machine 18 can perform a spotting operation on the object to be tested 20, in other words, the testing machine 18 is not a necessary device for achieving the probe acupressure correction method of the present invention.

The following is a detailed description of the principle and steps of how to perform the acupressure correction using the acupressure detection circuit 22, and the operation flow of the spot measurement system incorporating the acupressure correction device of the present invention, in order to make Those skilled in the art will have a better understanding of the technical features of the present invention and can practice the invention accordingly.

When the object to be tested is fixed to the lifting platform 12 and is ready for testing (as shown in the first figure), the detecting machine 16 of the spotting system 10 first uses the lifting controller 34 to actuate the lifting platform 12 to make the lifting The stage 12 is displaceable and held in the preparatory position.

Secondly, the entire spotting system will switch to the acupressure detection mode, that is, the detector 16 will issue a control command to synchronously switch the first switch SW1 and the second switch SW2 to the first probe 24a and the probe connection line. The first contact 30a of the 30 is electrically coupled, and the second probe 24b is electrically coupled to the second contact 30b (as shown in the first figure). In this way, the step a1) in the method for correcting the probe needle pressure of the present invention is completed, that is, the first probe 24a and the second probe 24b are electrically coupled to the first contact 30a, respectively. The second contact 30b presents a state corresponding to the object 20 to be tested.

Then, the detecting machine 16 starts the step of reading the voltage across the pin pressure detecting unit 28 by the signal converter 32, that is, completing the step a2) in the probe pin pressure correcting method of the present invention. The pin connection line 30 is in an open state, and the measured voltage across the voltage is the voltage across the resistor R2.

Then, the detecting machine 16 controls the lifting platform 12 to rise to the first and second contacts 20a and 20b of the object to be tested 20 to be in contact with the first and second probes 24a and 24b, respectively. The contact position of the sexual connection (as shown in the second figure). That is, the action of "moving the object to be tested and the first and second probes in close proximity" in the step a3) of the probe acupressure correction method of the present invention is realized by the ascending operation of the elevating stage 12. . However, it should be noted that the manner of implementing the step c) is not limited thereto. For example, the object to be tested 20 may be fixedly disposed on a workbench, and the probes 24a, 24b are fixed. The first lifting shaft 24a2 is moved downward in synchronization with the second lifting shaft 24b2, and is fed toward the object to be tested 20, and the step a3) can also be realized. Alternatively, the elevating stage 14 carrying the object to be tested 20 and the first and second elevating shafts 24a2 and 24b2 on which the probes are mounted are simultaneously actuated to be displaced toward each other, and step a3) can also be realized.

During the above-mentioned step a3), that is, during the entire ascending process of the lifting stage 12, the signal converter 32 continuously reads the voltage across the acupressure detecting unit 28, even if the object to be tested 20 contacts the After the probes 24a and 24b are continuously read, the lifting stage 12 is still kept in a rising state, so that the needle pressure applied to the analyte contacts 20a, 20b by the probes 24a, 24b will continue. increase.

In the following, the step a4) of the probe acupressure correction method of the present invention will be further described, that is, how to determine whether to stop the object to be tested and the first and second probes by judging whether the voltage across the acupressure detecting unit is decreased. The needle is relatively close to displacement.

In this embodiment, the signal converter 32 is used to simultaneously capture the voltage across the pin voltage detecting unit 28 and determine whether the value of the voltage across the voltage reaches a predetermined threshold value to determine whether to stop the voltage. The lifting action of the lifting stage 12 is performed. In detail, please refer to the fifth figure, the sixth figure A and B. In the sixth figure A and B, the left vertical axis represents the position of the lifting stage 12, and the right vertical axis represents the measurement of the signal converter 32. The voltage across the acupressure detecting unit 28, the horizontal axis represents time, and the curve C1 represents the position of the lifting stage versus time, and the curve C2 represents the curve across voltage versus time. As shown in the figure, in the interval from the start of time to t1 (approximately ten milliseconds), the curve C1 increases with time, meaning that the lifting stage 12 continues to rise from the initial position Xi, at this time due to the first and second The probes 24a, 24b are not yet in contact with the object to be tested 20, so the probe connection line 30 is in an open state. At this time, the voltage across the signal converter 32 is the voltage across the resistor R2 (about 4V). Therefore, in this interval, the curve C2 is in a straight line, that is, the voltage is maintained at a constant value. Secondly, after the first and second probes 24a, 24b are in contact with the first and second contacts 20a, 20b of the object to be tested 20 (after t1), due to the amount of the signal converter 32 at this time The voltage across the voltage of the pin voltage detecting unit 28 is the voltage across the resistor R2 and the resistance of the probes 24a, 24b plus the equivalent resistance of the resistor 20 in parallel, so that the curve C2 will exhibit a significant voltage drop trend. At the same time, when the signal converter 32 detects that the cross-voltage value has decreased by the constant value, it can immediately notify the lifting controller 34 to issue an instruction to control the lifting stage 12 to stop rising (stop position Xf); or Alternatively, as provided in this embodiment, the notification lifting controller 34 can issue an instruction to control the lifting stage 12 to be stepped at a lower rate of ascent, and stop the movement of the lifting stage 12 after a predetermined time. . In detail, please refer to the sixth figure B, and the sixth figure B is a partial enlarged view of the sixth figure A for explaining the displacement relationship of the lifting stage. When the signal converter 32 detects the voltage drop, it is controlled. The lifting stage 12 is slowly stepped, so that the pin pressure of each of the probes 24a, 24b applied to the objects to be tested 20a, 20b is gradually increased, and then the signal converter 32 captures and judges the needle pressure detection. When the voltage value of the unit 28 drops to a predetermined threshold value Vt, corresponding to the time t2, the elevator controller 34 is immediately notified to issue an instruction to control the lifting station 12 to stop rising (stop position Xf) to make the object to be tested. The 20 can be held in a state of being in proper contact with the probes 24a and 24b (i.e., the probes 24a and 24b are reliably received by the contacts 20a and 20b with a specific needle pressure). It should be noted that the setting of the threshold Vt may be determined by the probe, the type of the object to be tested, the structure of the package module, or other needs. In fact, if the predetermined threshold is set lower to make the first and second probes There is a minimum ohmic contact resistance between the pins 24a, 24b and the first and second contacts 20a, 20b (the voltage across the voltage of the pin pressure detecting unit 28 is close to the end horizontal line of the curve C2), and the needle pressure of the probe will be relatively Increase (because the lift of the lifting platform will increase), conversely, if the threshold is set higher, the needle pressure will be relatively lower (because the lifting stage stops earlier). In addition, the applicant has compared the needle pressure setting method of the conventional mechanical edge finder with this method. The experimental results show that the needle pressure setting is performed using this method, and the lifting stage is stopped when the voltage across the threshold reaches the predetermined threshold value Vt. The rising time point t2 is about 5 ms earlier than the time point t3 at which the lifting of the lifting stage is stopped by the mechanical edge finder being disconnected by the two electrical contacts. In other words, the present invention has a better reaction. The speed can avoid the occurrence of needle pressure and overload, effectively improve the appearance inspection quality of the needle marks on the surface of the object to be tested, and reduce the defects of surface damage and probe wear of the object to be tested.

After the step a4) of the probe acupressure correction method of the present invention is completed, the first and second probes 24a, 24b should theoretically be pressed against each other with substantially the same acupressure and electrically contacted with the test. The first contact 20a and the second contact 20b of the object 20, however, when the first and second probes 24a, 24b are erected, it may happen that the position of the needle tip is high or low and not in the same plane, or bear the waiting The bearing surface of the lifting platform 12 of the measuring object 20 has a poor flatness, or the bearing surface has a problem of tilting. In such a case, the first and second probes 24a, 24b may not be simultaneously. The first contact 20a and the second contact 20b of the object to be tested are pressed one after another, so that the needle pressure applied to the first contact 20a and the second contact 20b is uneven, even occurs. The post-contact probe has a moderate needle pressure and the probe pressure that was first contacted has been overdone.

The main technical features of the probe acupressure correction method of the present invention, step b) to step e), are to solve the above-mentioned problems that may occur, that is, to solve the above-mentioned two probes that may have been in electrical contact with the object to be tested. problem. The method for electrically contacting the first and second probes with the object to be tested is not limited to the steps a1) to a4) disclosed above, for example, by manual or other automatic control. The above-described object is achieved by driving the lifting and lowering stage, and it is possible to visually or otherwise determine whether the probe is actually in contact with the object to be tested, and is not limited to the above-described manner of judging by the needle pressure detecting circuit 22.

The acupuncture correction steps b) to e) will be continued below. Please refer to the third diagrams A to F, wherein the third diagrams A and B respectively show the steps a1) and a4) of the present invention. Then, as shown in FIG. 3C, step b) of the present invention is performed, that is, the first lifting shaft 24a2 is controlled to rise by the lifting controller 34, so that the first probe 24a is obtained from the original and the first The state in which a contact 20a contacts is separated from the object to be tested 20, and becomes electrically insulated from the first contact 20a of the object to be tested 20. At this time, since the probe connection line 30 returns to the open state again, the voltage across the signal converter 32 becomes the voltage across the resistor R2 again, that is, the curve C2 in the sixth graph A before the time t1. The constant voltage value shown (about 4V).

Then, the step c) of the present invention is further performed, and the lifting and lowering controller 34 controls the first lifting shaft 24a2 to descend, so that the first probe 24a can be away from the object to be tested 20 toward the object to be tested. The first contact 20a of 20 is closely displaced until it is in electrical contact with the first contact 20a of the object to be tested 20 (as shown in the third figure D). During this process, the signal converter 32 continuously captures the voltage across the pin voltage detecting unit 28, and after the first probe 24a contacts the first contact 20a, the same judgment as described in step a4) is utilized. In principle, that is, after the signal converter 32 detects that the voltage across the pin pressure detecting unit 28 has decreased from the constant value or falls to a threshold, the lifting controller 34 will issue an instruction to stop the first lifting axis. The lowering action of 24a2, and then stopping the first probe 24a to continue to fall down against the first contact 20a, so that the first probe can be properly pinched to the first connection of the object to be tested 20 Point 20a is contacted again.

Then, as shown in FIG. 3E, step d) of the present invention is performed, that is, the second lifting shaft 24b2 is controlled to rise by the lifting controller 34, so that the second probe 24b can be self-originated and the first The state in which the two contacts 20b are in contact with the object to be tested 20 becomes electrically insulated from the second contact 20b of the object to be tested 20. At this time, since the probe connecting line 30 returns to the state of being disconnected again, the voltage across the signal converter 32 will return to the aforementioned constant value again.

Finally, step e) of the present invention is further controlled to control the lowering of the second lifting shaft 24b2 by the lifting controller 34, so that the second probe 24b can be separated from the original object 20 toward the object to be tested. The second contact 20b of the object 20 is closely displaced until it is in electrical contact with the second contact 20b of the object to be tested 20 (as shown in the third figure F). After the second probe 24b contacts the second contact 20b, using the same judgment principle, the signal converter 32 detects that the voltage across the acupressure detecting unit 28 drops from the constant value or decreases. After the threshold value is reached, the lifting controller 34 will issue an instruction to stop the lowering movement of the second lifting shaft 24b2, thereby stopping the second probe 24b from continuing to descend to the second contact 20b, so that the first The second probe 20b can be brought into contact with the second contact 20b of the object to be tested 20 again by a suitable needle pressure.

By the above steps b) to e), since the first probe 20a and the second probe 20b stop feeding by the same judgment principle, the first and second probes in the step a4) can be corrected. The needles of the needles 24a, 24b enable the first and second probes 24a, 24b to abut the first and second contacts 20a, 20b of the object to be tested, respectively, without substantially the same needle pressure, without It is affected by the flatness or inclination of the bearing surface of the object to be tested.

After the above steps are completed, the test operation of the test object can be performed, that is, the test machine 16 will issue a control command, so that the first switch SW1 and the second switch SW2 are synchronously switched to the first probe 24a and the test. The first contact 42a of the circuit 42 is electrically coupled, and the second probe 24b is electrically coupled to the second contact 42b (as shown in the fourth figure). Thereafter, the detector 16 will issue an instruction through its interface controller 36 to notify the test machine 18 via the interface controller 38 to perform the spot test operation.

Furthermore, after the test machine 18 completes the spot test operation, the lift stage 12 is lowered back to the standby position, and the first and second switches SW1, SW2 are switched to make the first probe 24a and the first probe The two probes 24b are electrically coupled to the first contact 30a and the second contact 30b of the acupressure detecting circuit respectively (as shown in the first figure) to prepare another step of the object to be tested.

It can be seen from the above description that the probe acupressure correction method provided by the present invention can ensure the probes 24a, 24b substantially by using a simple pin pressure detecting circuit 22 in conjunction with the voltage reading and judgment of the pin pressure detecting unit 28. The same appropriate pin piezoelectricity is used to receive the object 20, so that the setting and correction of the entire pin pressure is very simple. Secondly, the present invention can provide a very simple and fast point measurement method by using the aforementioned pin pressure correction method and a switch switching means. In addition, when the batch inspection of the object to be tested is performed by using the above detection system, it is not necessary to perform the correction steps of step b) to step e) in the point measurement operation of each step because the first correction step is performed. After completion, the positions of the first and second probes are fixed and only steps a1) to a2) are performed, and the first and second probes 24a, 24b should still maintain a substantially identical pin piezoelectricity. The test object 20, of course, can be subjected to the calibration procedure of steps b) to e) at any time in the subsequent test operation.

On the other hand, in the above-disclosed embodiment, the calibration device for implementing the acupressure correction method of the present invention is integrated into a point measurement which is applied to a general LED module and requires only a pair of probes for performing a point measurement operation. In the system, however, the acupressure correction method of the present invention can also be applied to a spotting system in which a plurality of pairs of probes are used, for example, in a spotting operation in which the object to be tested is a wafer containing a plurality of wafers. Or in a spotting operation of a high-power light-emitting diode chip that requires a pair of probes to perform a spotting operation on a single electrical contact, at this time, the first and second probes are touched at the high-power light A single electrical contact of the diode chip.

In addition, in the above embodiment, the first and second probes 24a, 24b are respectively fixed to the first and second lifting shafts 24a2, 24b2, and can be controlled by the lifting controller 34 to be lowered or raised. In fact, the first and second probes 24a, 24b can also be respectively fixed on a one-dimensional linear displacement mechanism capable of reciprocating displacement, and the first and second probes 24a, 24b are controlled by manual or automatic means. The action.

Furthermore, by applying the technical features of the acupressure detecting circuit 22 provided by the present invention, and matching the one-dimensional linear displacement control of the first and second lifting shafts 24a2, 24b2, the present invention further provides another probe acupressure correction method. It contains the following steps:

First, step a) is performed to electrically contact the first probe 24a and the second probe 24b with the object to be tested 20, which is the same as step a) of the first probe needle pressure correction method; As shown, the first and second probes 24a, 24b are respectively fixed to the first and second lifting shafts driven by a one-dimensional linear displacement mechanism (for example, but not limited to a voice coil motor). 24a2, 24b2.

Next, step b) is performed to cause the first probe 24a to be lifted away from the object to be tested 20 to be electrically insulated from the object to be tested 20, and in the process, the pinch pressure detecting unit is captured by the signal converter 32. The voltage across the voltage of 28 is used to determine the critical position of the first probe 24a when the first probe 24a is electrically connected to the object 20 to be electrically insulated; that is, when detected The voltage across the first and second probes 24a, 24b is electrically low, and the first and second probes 24a, 24b are disconnected (the first probe 24a rises and the object to be tested) When one of the first contacts 20a of 20 is insulated (i.e., the aforementioned voltage constant value), the time point when the cross-over voltage starts to rise is recorded, that is, the first probe 24a is from the test The time point at which the electrical conduction of the object 20 is converted into electrical insulation corresponds to the position of the first lifting shaft 24a2, that is, the first probe 24a just leaves the first contact 20a of the object to be tested 20 The critical position of the object to be tested 20 is electrically insulated.

Then, step c) is performed to lower the first probe 24a to be closely displaced toward the object to be tested 20, and stop at one of the predetermined feeds (ie, a predetermined distance) below the critical position. Positioning, the first probe 24a is again in electrical contact with the first contact 20a of the object to be tested 20; that is, the first lifting shaft 24a2 is controlled by the lifting controller 34 to carry the first probe 24a. Feeding downward toward the object to be tested 20, and stopping the first probe 24a at a contact position lower than the aforementioned critical position by a predetermined distance, thus ensuring that the first probe 24a is again with a certain needle pressure The first contact 20a of the object to be tested 20 is in electrical contact.

It should be noted that, the critical position or the contact position of the first probe 24a (that is, a position lower than the critical position by a predetermined distance) may utilize a position sensor such as, but not limited to, an optical ruler. (linear scale) to measure. Similarly, the critical position or contact position of the second probe 24b can also be measured using a position sensor such as, but not limited to, an optical scale.

Then, the step d) is performed, and the second probe 24b is lifted off the object to be tested 20 to be electrically insulated from the second contact 20b of the object to be tested 20, and the needle pressure detecting unit 28 is taken by Judging the critical position of the second probe 24b when the second probe 24b is electrically connected to the object to be tested 20 to be electrically insulated from the voltage, and determining the second position due to the step d) The principle of the critical position of the probe 24b is similar to that described in the above step b), and therefore the applicant will not repeat it here.

Finally, step e) is performed to lower the second probe 24b to be closely displaced toward the object to be tested 20, and stop at the same distance as the predetermined distance used in step c) below the critical position of the second probe 24b. A second contact position causes the second probe 24b to be in electrical contact with the object to be tested 20 again.

In this way, by the lifting controller 34 or other means, the stopping positions of the first probe 24a and the second probe 24b in the step c) and the step e) are respectively at the first and second contact positions. That is, both are controlled at positions below the critical position by the same predetermined distance, thereby ensuring that the first and second probes 24a, 24b can be substantially identical to the first and second of the object to be tested 20 The contacts 20a, 20b abut, respectively, without being affected by the difference in tip position of the two probes 24a, 24b, the flatness or inclination of the bearing surface of the object to be tested. In other words, the second probe acupressure correction method disclosed herein can also achieve the object of the present invention, and the method is particularly suitable for, but not limited to, the contact is not provided with a protective passivation layer (passivation). Point) The spotting operation of the object to be tested.

In summary, the present invention provides a very simple and reliable method for correcting the acupressure using the acupressure detection circuit and the cross voltage extraction and determination step disclosed in the present invention, and an acupressure correction device capable of implementing the foregoing method. . However, it must be noted that the acupuncture correction device disclosed in the description of the present invention and the drawings for implementing the foregoing method is merely an exemplary illustration that it can be integrated into the spot measuring device, and is not limited thereto. The structure of the calibration device of the acupressure correction method of the present invention, in other words, various alternative device modifications or component integrations, for example, integrating the spot measuring machine 16 and the testing machine 18 into a cross-voltage capture and judgment, lifting control The acupressure detection mode and the test mode switching mechanism and the control machine of the test circuit shall also be covered by the patent application scope of the present application.

10. . . Spot measurement system

12. . . Lifting platform

14. . . Acupressure test module

16. . . Testing machine

18. . . Test machine

20. . . Analyte

20a~20b. . . DUT contact

twenty two. . . Acupressure detection circuit

24a. . . First probe

24a1. . . First probe fixture

24a2. . . First lifting shaft

24b. . . Second probe

24b1. . . Second probe fixture

24b2. . . Second lifting shaft

26. . . DC power supply

28. . . Acupressure test unit

30. . . Probe connection line

30a, 30b. . . contact

32. . . Signal converter

32a. . . Signal capture line

34. . . Lift controller

36. . . Interface controller

38. . . Interface controller

40. . . Test unit

42. . . Test circuit

42a, 42b. . . contact

C1. . . Lifting table position curve

C2. . . Cross voltage curve

R1. . . resistance

R2. . . resistance

SW1, SW2. . . switch

Vt. . . Threshold

Xi. . . initial position

Xf. . . Stop position

The first figure is a schematic diagram of a spotting system provided by a preferred embodiment of the present invention, wherein the display probe is coupled to the pin pressure detecting circuit and the object to be tested is not yet in contact with the probe to illustrate the probe of the present invention. Step a1) of the acupressure correction method.

The second figure is similar to the first figure except that the test object is in contact with the probe to illustrate step a4) of the probe acupressure correction method of the present invention.

3A to F are schematic views for explaining respective steps of the probe acupressure correction method of the present invention.

The fourth figure is similar to the second figure except that the display probe is coupled to a test circuit.

The fifth figure is an equivalent circuit diagram of the acupressure detection circuit of the spot measurement system provided by the preferred embodiment.

Fig. 6 is a diagram showing the relationship between the position of the lifting stage and the voltage across the acupressure detecting unit with respect to time.

Figure 6B is a partial enlarged view of the sixth figure A for explaining the displacement relationship of the lifting stage.

10. . . Spot measurement system

12. . . Lifting platform

14. . . Acupressure test module

16. . . Testing machine

18. . . Test machine

20. . . Analyte

20a, 20b. . . DUT contact

twenty two. . . Acupressure detection circuit

24a. . . First probe

24a1. . . First probe fixture

24a2. . . First lifting shaft

24b. . . Second probe

24b1. . . Second probe fixture

24b2. . . Second lifting shaft

26. . . DC power supply

28. . . Acupressure test unit

30. . . Probe connection line

30a, 30b. . . contact

32. . . Signal converter

32a. . . Signal capture line

34. . . Lift controller

36. . . Interface controller

38. . . Interface controller

40. . . Test unit

42. . . Test circuit

42a, 42b. . . contact

R1. . . resistance

R2. . . resistance

SW1, SW2. . . switch

Claims (14)

A probe acupressure correction method includes the following steps: a) electrically contacting a first probe and a second probe with a test object, wherein the first probe and the second probe are respectively powered Is coupled to a first contact and a second contact of a pin pressure detecting circuit, the pin pressure detecting circuit has a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit includes a boosting element and a probe connection line in parallel with the boosting element, the probe connecting line having the first contact and the second contact; b) leaving the first probe away from the object to be tested Electrically insulating from the object to be tested; c) taking the voltage across the pin pressure detecting unit, and simultaneously causing the first probe to be closely displaced toward the object to be tested and electrically contacting the object to be tested again, and detecting After detecting that the voltage across the pin pressure detecting unit drops from a constant value, stopping the action of the first probe; d) causing the second probe to leave the object to be tested and electrically insulated from the object to be tested; e) taking the voltage across the acupressure detecting unit while facing the second probe toward the object to be tested The device is in electrical contact with the object to be tested, and the action of the second probe is stopped after detecting that the voltage across the pin pressure detecting unit drops from a constant value. A probe acupressure correction method includes the following steps: a) electrically contacting a first probe and a second probe with a test object, wherein the first probe and the second probe are respectively powered Is coupled to a first contact and a second contact of a pin pressure detecting circuit, the pin pressure detecting circuit has a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit includes a boosting element and a probe connection line connected in parallel with the boosting element, the probe connecting line having the first contact and the second contact; b) lifting the first probe away from the object to be tested And electrically insulating the object to be tested, and by taking a voltage across the pin pressure detecting unit, determining a time point when the first probe is electrically connected to the object to be tested and electrically insulated. a critical position of the first probe; c) causing the first probe to descend to be closely displaced toward the object to be tested, and stopping at a first contact position at a predetermined distance below the critical position, so that the first probe Reconnecting electrically with the test object; d) raising the second probe away from the object to be tested And electrically insulating the object to be tested, and by taking the voltage across the pin pressure detecting unit, determining the time when the second probe is electrically connected to the object to be tested to be electrically insulated a critical position of the second probe; and e) lowering the second probe to be closely displaced toward the object to be tested, and stopping below the critical position of the second probe substantially as described in step c) The second contact position is one of the same distances, and the second probe is electrically contacted with the object to be tested again. The probe acupressure correction method according to claim 1 or 2, wherein the acupressure detection circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the acupressure detecting unit. The probe acupressure correction method according to claim 3, wherein the resistance value of the voltage dividing component is smaller than a resistance value of the boosting component of the acupressure detecting unit. The probe acupressure correction method according to claim 1 or 2, wherein the step a) further comprises the following steps: a1) spacing the first probe from the second probe corresponding to the object to be tested; A2) capturing the voltage across the acupressure detecting unit; a3) causing the object to be tested to be relatively close to the first and second probes, so that the object to be tested can be coupled to the first and second probes Stopping from being electrically connected to each other corresponding to each other; and a4) stopping the test object from being opposite to the first and second probes after detecting that the voltage across the acupressure detecting unit drops from a constant value Proximity displacement. The probe acupressure correction method according to claim 5, wherein in step a1), the object to be tested is placed on a lifting platform; in step a3), the lifting platform is raised by the lifting platform. The object to be tested is relatively close to the first and second probes; and in step a4), stopping the lifting of the lifting platform to achieve stopping the object to be tested from the first and second probes Proximity displacement. The probe acupressure correction method according to claim 6, wherein in step a4), after the cross voltage of the acupressure detecting unit is determined to fall from the constant value to a threshold value, the elevating stage is stopped. The probe needle pressure correction method according to claim 5, wherein in the step a1), the first probe and the second probe system are respectively fixed to a first lifting shaft and a second lifting shaft to correspond to the Above the object to be tested; in step a3), the first lifting axis and the second lifting axis are lowered to achieve relative displacement of the object to be tested and the first and second probes; In a4), stopping the relative displacement of the object to be tested and the first and second probes by stopping the descending of the first and the second lifting shaft. The probe acupressure correction method according to claim 8, wherein in the step a4), after determining that the voltage across the acupressure detecting unit drops from the constant value to a threshold, the first and the second lifting are stopped. The shaft is lowered. The probe acupressure correction method according to claim 5, wherein in step a1), the object to be tested is placed on a lifting platform, and the first probe and the second probe are respectively fixed to one a first lifting shaft and a second lifting shaft corresponding to the object to be tested; in step a2), the object to be tested and the first and second probes are raised by the lifting platform Relatively short-distance displacement; and in step a4), stopping the lifting of the lifting platform to stop the relative displacement of the object to be tested and the first and second probes; in step b), The first lifting shaft is raised to move the first probe away from the object to be tested; in step c), the first probe is moved to the object to be tested by the lowering of the first lifting shaft, and borrowed Stopping the movement of the first probe by stopping the lowering of the first lifting shaft; in step d), the second probe is moved away from the object to be tested by the rising of the second lifting shaft; in step e) Stopping the second probe toward the object to be tested by the lowering of the second lifting shaft, and stopping by stopping the lowering of the second lifting shaft The operation of the second probe. The probe needle pressure correction method according to claim 1 or 2, wherein in the step a), the first probe and the second probe system are respectively fixed to a first lifting shaft and a second lifting shaft. Above the object to be tested; in step b), the first probe is moved away from the object to be tested by the rising of the first lifting axis; and in the step c), the first lifting axis is Decreasing to close the first probe toward the object to be tested, and stopping the action of the first probe by stopping the first lifting shaft to descend; in step d), by the second lifting shaft Raising to move the second probe away from the object to be tested; in step e), the second probe is closely displaced toward the object to be tested by the lowering of the second lifting axis, and by stopping the The lifting shaft is lowered to stop the action of the second probe. The probe acupressure correction method according to claim 1 or 2, wherein the voltage across the pin voltage detecting unit is captured by a signal converter electrically connected to the pin voltage detecting circuit. A probe acupressure correction device includes: a lifting and lowering platform for carrying an object to be tested; a first and a second lifting shaft for separately setting one of the objects to be tested a probe and a second probe; a pin pressure detecting circuit having a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit including a boosting component and a parallel connection with the boosting component a probe connection line having a first contact and a second contact electrically coupled to the first probe and the second probe; a signal converter The pin pressure detecting circuit is electrically connected to capture the voltage across the pin pressure detecting unit; and a lifting controller is electrically connected to the signal converter, the lifting platform and the first and second lifting shafts And controlling the operation of the lifting platform and the first and second lifting shafts according to the value of the voltage across the signal converter. The probe acupressure correction device of claim 13, wherein the acupressure detection circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the acupressure detecting unit.