TW201337287A - Probe probing force setting method and probing method and system using the method - Google Patents

Abstract

A probe probing force setting method is used for ensuring a probe to form electrical contact with a subject under test with a proper voltage pressure by determining whether to stop the probe from approaching the subject under test according to whether the cross-voltage of a probing force detection unit electrically connected with the probe has reached a predetermined threshold during the electrical contact and approaching process of the probe toward the subject under test. The probing forcedetection unit has a boosting component and a probe connection wire in parallel connection with the boosting component. The probe connection wire contains two contacts respectively electrically coupled with two probes for probing the subject under test. This invention also discloses a probing method and a probing system using the probe probing force setting method, which can rapidly and substantially set the probing forceso as to facilitate the testing operation of the subject under test.

Description

Probe needle pressure setting method and point measuring method and system using the same

The present invention relates to a probe probing force setting method of a probe, in particular to a probe needle that uses a pin pressure detection circuit instead of a conventional mechanical edge sensor to set a probe needle. The method of pressing. The present invention also relates to a point measurement method using the above-described probe needle pressure setting method, and a point measurement system using the above-described needle pressure setting method for a double probe or a plurality of pairs of probes.

A probe is a device that utilizes a probe to detect semiconductor grain performance or characteristic parameters such as light-emitting diodes. When the spotting operation is carried out, if the probing force of the probe is too large, not only the surface of the crystal grain may be affected by the appearance of the needle mark, but also the surface quality of the crystal may be damaged, and the probe may be worn easily. Once the needle pressure is too small, the probe and the die contact may be poorly contacted, which may affect the spot measurement result. Therefore, how to ensure that the probe can abut the die contact with a proper needle pressure has been an issue of concern to the industry.

Conventionally, it has been possible to secure a probe by using a mechanical edge sensor mounted in a spot measuring device, for example, various types of edge finder disclosed in a new patent specification such as the Republic of China No. M345241, M382589, and the like. It can be surely contacted and given a certain pressure to press the joint of the die to be tested. In general, the structure of the conventional mechanical edge finder generally includes a base, a swing arm that is elastically coupled to the base by a spring piece and swingable relative to the base, and an adjustable a pre-applied device, wherein the probe is fixed to the swing arm, and the adjustable pre-applicator applies a magnetic attraction, a magnetic repulsive force or a spring restoring force to act on the base and the swing arm The pre-force is such that the probe is in an unstressed state, and the two electrical contacts respectively disposed on the base and the swing arm can be in contact and electrically conductive, and once the probe contacts and continues When the contact of the die to be tested is pressed to the extent that the pre-force is overcome, the swing arm will swing relative to the base to separate the two electrical contacts to cause an open circuit, and therefore, the adjustable pre-applied applicator Give a specific pre-force and stop the rise and fall of the load-bearing die at the key point when the two electrical contacts are disconnected, to ensure that the probe has actually touched and applied a test during the spotting operation. The specific pressing force is on the joint of the die to be tested.

Although the above method of setting the probe needle pressure by using the mechanical edge finder is a long time, the mechanical edge finder has several disadvantages in essence, for example, the elastic piece connected between the base and the swing arm is used for a long time. It is easy to be elastic and tired, so that in the spot test operation, it may be necessary to disassemble the edge finder to detect and adjust the applied pre-force to correct the needle pressure. Secondly, the two electrical properties respectively set on the base and the swing arm The joint is easy to carbonize under long-term use, not only must be cleaned and maintained, but also needs to re-correct the entire mechanical edge finder after cleaning, and increase the working time; in addition, because the traditional mechanical edge finder has a considerable height, When performing the spot test with the integrating sphere, the opening of the integrating sphere cannot be as close as possible to the light-emitting area of the die to be tested, so that the measurement accuracy is easily affected.

In addition, the new patent No. M406740 of the Republic of China discloses an automatic adjusting device for confirming the position of a needle tip by using optical identification technology. However, the automatic adjusting device uses a monitoring component to capture a needle tip image and is supplemented with a light emitting component to illuminate the needle tip. Improve the recognition rate of its monitoring components, so it is not suitable for use in the spotting operation of detecting the photoelectric components by using the integrating sphere. Moreover, whether the optical identification technology can ensure that the probe can be pressed with the same and appropriate needle pressure every time. The contact of the object to be tested is still open to question.

In short, the above two conventional probe acupressure setting methods have disadvantages such as time consuming, inconvenient work, and repetitive problems to be improved.

In view of the above, it is an object of the present invention to provide a probe needle pressure setting method that does not require a mechanical edge finder or optical identification technique to set the needle pressure to avoid the disadvantages of the above conventional techniques.

In order to achieve the above object, a probe needle pressure setting method provided by the present invention comprises the following steps: a) spacing a first probe and a second probe to correspond to a test object, wherein the first probe And the second probe system is electrically coupled to one of the first contact and the second contact of the pin pressure detecting circuit, wherein the pin pressure detecting circuit has a power source and a pin voltage electrically connected to the power source a detecting unit, the pin pressure detecting unit includes a boosting element and a probe connecting line connected in parallel with the boosting element, the probe connecting line has the first and second contacts; b) the object to be tested and the The first and second probes are relatively closely displaced, so that the object to be tested can be electrically connected to the first and second probes; c) when the step b) is performed, the needle pressure detecting unit is taken The voltage across the voltage; and d) determining whether to stop the relative displacement of the object to be tested and the first and second probes by determining whether the voltage across the pin pressure detecting unit reaches a predetermined threshold.

According to the above probe needle pressure setting method, when the object to be tested is electrically connected to the probes, the probe connection line is turned on and connected in parallel with the step-up element, and the measured acupressure The cross-voltage of the detecting unit is significantly decreased. With this characteristic, when it is determined that the cross-voltage drops to a predetermined threshold value, the relative displacement of the object to be tested and the first and second probes is immediately stopped, that is, It can be ensured that the probes are surely abutted with the object to be tested with a predetermined needle pressure for subsequent testing operations. In other words, the needle pressure setting method provided by the present invention does not require the use of a conventional mechanical edge finder or optical identification technology to set the needle pressure, thereby eliminating the disadvantages of the conventional mechanical edge finder and optical identification technology.

In the probe needle pressure setting method provided by the present invention, the needle pressure detecting circuit further includes a voltage dividing component electrically connected to the power source and connected in series with the pin pressure detecting unit to protect the pin pressure detecting circuit.

Preferably, the resistance value of the voltage dividing component is less than the resistance value of the boosting component of the acupressure detecting unit, for example, 100K ohms and 400K ohms, but not limited thereto.

In a preferred embodiment of the present invention, the pin pressure detecting circuit further includes a first switch and a second switch, wherein one end of the first switch is electrically connected to the first probe, and the other end is switchable. To be electrically connected to the first contact; one end of the second switch is electrically connected to the second probe, and the other end is switchable to be electrically connected to the second contact. However, the setting of the switches enables the probes to be quickly switched to be electrically connected to the acupressure detection circuit or a test circuit, so as to quickly switch to the test object after the pin pressure setting operation is completed. Work, therefore, is not a necessary and indispensable component in terms of the needle pressure setting method.

In step c) of the probe needle pressure setting method provided by the present invention, the voltage across the needle pressure detecting unit can be captured by a signal converter electrically connected to the needle pressure detecting circuit. Next, in step d), the cross-voltage drawn by the signal converter can be read by using a conventional judging module including a software or a judging circuit, or even manually, to determine whether the cross-over voltage reaches a predetermined threshold.

In the step b) of the probe acupressure setting method provided by the present invention, the phrase "make the object to be tested relatively close to the first and second probes" means that the probes are fixed. The object to be tested is closely displaced toward the probes, or the object to be tested is not moved and the probes are closely displaced toward the object to be tested, or the probes and the object to be tested are closely displaced toward each other. In a preferred embodiment of the present invention, in step a), the object to be tested is placed on a lifting platform, and the first and second probe systems are respectively clamped by a probe. The device is clamped and fixedly disposed correspondingly to the object to be tested; therefore, in step b), the first and second probes are brought close to the object to be tested by the rising of the lifting platform. The purpose of the displacement; and in the step d), when the voltage across the acupressure detecting unit reaches the predetermined threshold, the lifting of the lifting platform is stopped, thereby achieving "stopping the object to be tested and the first and second The purpose of the probe is relatively close to displacement.

In addition, in step d) of the probe needle pressure setting method provided by the present invention, when it is determined that the voltage across the needle pressure detecting unit has not reached the predetermined threshold, the method may further include the following steps: Whether the stage rises to a predetermined maximum position determines whether to stop the lifting stage from rising. In order to avoid the possibility of overloading the needle pressure applied to the test object.

Another object of the present invention is to provide a spotting method using the aforementioned probe needle pressure setting method, wherein steps a) to d) are similar to the foregoing, except in step a), the needle pressure detecting circuit further includes a first switch and a second switch, the first open switch electrically switching the first probe to a first contact of the probe connection line or a first contact of a test circuit, The second open relationship electrically switches the second probe to be electrically coupled to the second contact of the probe connection line or the second contact of the test circuit; thereby, after performing step d), That is, after the voltage across the voltage sensing unit reaches a predetermined threshold, after the first and second probes are stopped from being displaced from the object to be tested, a switching step may be performed, that is, step e) is switched. The first switch and the second switch respectively electrically couple the first probe and the second probe to the first contact and the second contact of the test circuit, so as to facilitate the test circuit to perform the test operation of the test object .

According to a preferred embodiment of the present invention, in step d), when it is determined that the voltage across the voltage detection unit has not reached the predetermined threshold, the method further includes the following steps: determining the position of the lifting platform, If the lifting platform has reached a predetermined maximum position, stop the lifting platform from rising, and proceed to step e), if the lifting platform has not reached the predetermined highest position, return to step b) or step c) That is, the lifting stage is continuously raised, and the voltage across the voltage is continuously taken and the step of judging step d) is further performed.

In addition, in order to speed up the overall spotting operation speed, the point measurement method provided by the present invention may further include the following steps:

f) after the test operation is completed, lowering the lift stage to a preparatory position for separating the object to be tested from the first and second probes for electrically insulating insulation;

g) switching the first and second switches to electrically couple the first probe and the second probe to the first contact and the second contact of the pin pressure detecting circuit respectively to facilitate the next batch Dot measurement of the object to be tested.

It is still another object of the present invention to provide a spot measuring system for implementing the above-mentioned spot measuring method, comprising: a lifting and lowering stage for carrying an object to be tested, and the top of the lifting and lowering table is used for spacing corresponding setting Measuring a first probe and a second probe of the object to be tested; a test circuit having a first and a second contact; a pin pressure detecting circuit having a power source and a power source a pinch detecting unit of the connection, the pin pressure detecting unit comprises a boosting component, a probe connecting circuit connected in parallel with the boosting component and having a first contact and a second contact, and a first switch And a first switch, the first open switch electrically switches the first probe to be electrically coupled to the first contact of the probe connection line or the first contact of the test circuit, and the second open The second probe is switchably electrically coupled to the second contact of the probe connection line or the second contact of the test circuit; and is electrically connected to the pin pressure detection circuit and used for capturing a cross-voltage signal converter of the acupressure detecting unit; and a lifting controller The system and the signal converter and the lift carrier TPC connected for controlling the lift actuation of the stage in accordance with the voltage across the retrieved value of the signal converter.

Each probe of the above-mentioned spotting system may be a linear needle fixed by a probe holder or a curved needle having a predetermined bending angle, or a cantilever probe fixed to a probe card.

Secondly, the spot measuring system provided by the present invention can also be applied to a spotting operation in which a plurality of pairs of probes are used, for example, in a spotting operation in which the object to be tested is a wafer containing a plurality of wafers, The plurality of pairs of probes can be fixed to a probe card, and each pair of probes can be electrically coupled to a separate pin pressure detection circuit, and each of the pin pressure detection circuits is captured by the detector. The voltage across the voltage detecting unit is used to confirm whether each pair of probes has actually contacted the electrical contacts of the respective corresponding wafers; on the other hand, the spot measuring system of the present invention can also be applied to the high power LED chip. In the spotting operation, a pair of probes electrically coupled to a pin voltage detecting circuit simultaneously contact one of the electrical contacts of the high power LED chip, and the other pair of probes simultaneously Another electrical contact that contacts the high power LED wafer.

In other words, it is still another object of the present invention to provide a spot measuring system capable of implementing the above-described spot measuring method and having a plurality of pairs of probes, comprising: a lifting and lowering stage for carrying a sample to be tested, and the lifting stage The first test circuit is configured to detect the first to fourth probes of the object to be tested; a first test circuit and a second test circuit, the first test circuit has a first contact and a second contact The second test circuit has a third and a fourth contact; a pin pressure detecting circuit having a power source and one of the first and a second pin pressure detecting unit electrically connected to the power source; the first pin The voltage detecting unit includes a first boosting component, a first probe connecting circuit connected in parallel with the first boosting component and having a first and a second contact, and a first switch and a second switch. The first open relationship electrically switches the first probe to be electrically coupled to the first contact of the first probe connection line or the first contact of the first test circuit, and the second open relationship is The second probe is switchably coupled to the second contact of the first probe connection line or the a second contact of the test circuit is electrically coupled; the second pin pressure detecting unit includes a second boosting component, a parallel with the second boosting component, and a third and a fourth contact a second probe connection line, and a third switch and a fourth switch, the third open relationship enables the third probe to be switchably connected to the third contact of the second probe connection line or the second test circuit The third contact is electrically coupled, and the fourth open relationship enables the fourth probe to be switchably connected to the fourth contact of the second probe connection line or the fourth contact of the second test circuit. Coupling; a signal converter electrically connected to the pin pressure detecting circuit for respectively capturing the voltage across the first pin pressure detecting unit and the second pin pressure detecting unit; and a lifting controller The signal converter and the lifting platform are electrically connected to control the operation of the lifting platform according to the value of the voltage across the signal converter.

The details and characteristics of the probe acupressure setting method, the spot measuring method and the spot measuring system provided by the present invention will be described in the detailed description of the subsequent embodiments. However, it should be understood by those of ordinary skill in the art that the present invention is not limited to the scope of the invention.

The technical content and features of the present invention will be described in detail below with reference to the accompanying drawings, in which: FIG. 1 is a schematic diagram of a point measurement system provided by a first preferred embodiment of the present invention. The display probe is coupled to the pin pressure detecting circuit and the object to be tested has not been in contact with the probe; the second picture is similar to the first picture, but the object to be tested is in contact with the probe; the third picture is similar to the second picture. The figure shows that the probe is coupled to the test circuit; the fourth figure is the operation flow chart of the spot measurement system provided by the first preferred embodiment of the present invention; and the fifth figure is provided by the first preferred embodiment. The equivalent circuit diagram of the acupressure detection circuit of the point measurement system; the sixth figure A is the relationship between the position of the lifting stage and the voltage of the acupressure detecting unit relative to the time; the sixth figure B is the part of the sixth figure A The enlarged view is for explaining the displacement relationship of the lifting platform; the seventh drawing is a schematic diagram of the spot measuring system provided by a second preferred embodiment of the present invention; and the eighth drawing A is a third preferred embodiment of the present invention. The schematic diagram of the spot measurement system provided by the example; the eighth figure B is a Intended to show that one pair of probes simultaneously contact one electrical contact of the object to be tested, and the other pair of probes simultaneously contact another electrical contact of the object to be tested; and FIG. An equivalent circuit diagram of the acupressure detection circuit of the spotting system provided by the preferred embodiment.

The Applicant first describes the same reference numerals in the embodiments to be described below, which represent the same or similar elements or structural features.

The main technical feature of the probe needle pressure setting method provided by the present invention is that the needle pressure detecting unit electrically connected to the probe is determined during the electrical contact between the probe and the object to be tested. Whether the voltage across the threshold reaches a predetermined threshold determines whether to stop the proximity displacement of the probe and the object to be tested, so as to ensure that the probe can be in electrical contact with the object to be tested with an appropriate needle pressure.

In detail, the probe needle pressure setting method provided by the present invention comprises the following main steps: a) spacing a first probe and a second probe to correspond to a test object, wherein the first probe And the second probe system is electrically coupled to one of the first contact and the second contact of the pin pressure detecting circuit, wherein the pin pressure detecting circuit has a power source and a pin voltage electrically connected to the power source a detecting unit, the pin pressure detecting unit includes a boosting element and a probe connecting line connected in parallel with the boosting element, the probe connecting line has the first and second contacts; b) the object to be tested and the The first and second probes are relatively closely displaced, so that the object to be tested can be electrically connected to the first and second probes; c) when the step b) is performed, the needle pressure detecting unit is taken The voltage across the voltage; and d) determining whether to stop the relative displacement of the object to be tested and the first and second probes by determining whether the voltage across the pin pressure detecting unit reaches a predetermined threshold.

In other words, when it is judged that the crossed voltage reaches the set threshold, the relative displacement of the object to be tested and the first and second probes is stopped immediately, thereby ensuring that the probes can be pressed at a predetermined needle. It is true that the object to be tested is electrically connected to facilitate subsequent test operations of the object to be tested.

Secondly, by using the probe needle pressure setting method described above, the present invention can simultaneously provide a simple and rapid point measurement method, which mainly includes the following steps: a) making a first probe and a second probe The first probe and the second probe are respectively electrically coupled to a first contact and a second contact of a pin pressure detecting circuit; the pin pressure detecting circuit has a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit includes a boosting component, a probe connecting circuit connected to the boosting component and having the first and second contacts, and a first switch and a second switch, wherein the first switch is switchably electrically coupled to the first contact of the probe connection line or the first contact of one of the test circuits, The second open relationship is such that the second probe is switchably electrically coupled to the second contact of the probe connection line or the second contact of the test circuit; b) the object to be tested is The first and second probes are relatively closely displaced, so that the object to be tested can be compared with the first and second probes The needle contacts are electrically connected to each other; c) when the step b) is performed, the voltage across the acupressure detecting unit is taken; d) when the voltage across the acupressure detecting unit reaches a predetermined threshold, the test is stopped. Relatively close to the first and second probes; and e) switching the first and second switches such that the first probe and the second probe are respectively coupled to the first and second contacts of the test circuit The contacts are electrically coupled to facilitate the test circuit for testing operations.

The detailed structure and characteristics of the point measurement system that can be used to implement the probe needle pressure setting method and the point measurement method will be first described below. Through the point measurement system, a more specific understanding of the above method can be obtained.

Please refer to the first to third and fifth figures. The point measurement system 10 provided by the first preferred embodiment of the present invention and which can be used to implement the probe needle pressure setting method and the point measurement method mainly includes a lifting platform. 12. A needle pressure detecting module 14, a detecting machine 16, and a testing machine 18.

The lifting platform 12 is the same as the working platform which can be vertically moved up and down along the Z axis or can be moved along the X, Y and Z axes, generally used in a machine tool or a pointing device, and the top surface of the lifting platform 12 is used. The object to be tested 20 can be loaded and fixed, and the object to be tested 20 can be, but not limited to, an LED chip, an LED package module, a wafer having a plurality of wafers, and the like. As shown in the fifth figure, in this embodiment, the object to be tested 20 is exemplified by an LED package module.

The acupressure detecting module 14 mainly includes a pin pressure detecting circuit 22 and a first probe 24a and a second probe 24b corresponding to the first contact 20a and the second contact 20b of the object 20 to be tested 20 . The pin voltage detecting circuit 22 has a power source (such as the DC power source provided in this embodiment) 26, a voltage dividing component electrically connected to the power source 26 (such as the resistor R1 provided in this embodiment), and the same The pressure element is connected in series with one of the needle pressure detecting units 28. Wherein, the voltage dividing component has the function of protecting the loop current of the pin pressure detecting circuit 22 for withstanding the short circuit current that may be generated by the pin pressure detecting unit 28; the pin pressure detecting unit 28 includes a boosting component (such as the present embodiment) The resistor R2) and the probe connection line 30 connected in parallel with the boosting element have a first contact 30a and a second contact 30b. The boosting element is provided. It is used to provide a specific bias voltage to the first contact 30a and the second contact 30b. In addition, the pin pressure detecting circuit 22 further includes a first switch SW1 electrically connected to the first probe 24a at one end, and a second switch SW2 electrically connected to the second probe 24b at one end, through which the second switch SW2 is electrically connected a second switch SW1, SW2, the first contact 30a is electrically coupled to the first probe 24a, and the second contact 30b is electrically coupled to the second probe 24b. The specific bias voltage provided by the boosting component can be input to the first contact 20a and the second contact 20b of the object to be tested 20 through the first probe 24a and the second probe 24b, respectively. Furthermore, the boosting element is mainly designed to overcome the energy barrier required for the conduction between the first contact 20a and the second contact 20b of the object to be tested 20, or to trigger the internal component characteristic of the object to be tested 20 The operation bias voltage between the first contact 20a and the second contact 20b is required to be applied to the specific conductive state, and the power supply 26 and the voltage dividing component can be withstand according to the test object 20 in a conductive state. The current power provides the optimum electrical specifications. Therefore, in this embodiment, when the object to be tested 20 is an LED package module, if the positive and negative electrodes of the LED element are electrically connected to the first contact 20a and the second contact 20b, respectively, The specific bias voltage provided by the boosting component needs to be greater than the forward-bias voltage of the LED component, so that the LED package module has an equivalent resistance including the ohmic contact resistance and the line resistance of the module wire and the LED. The ohmic contact resistance of the component and the lateral resistance of the junction are lower or even close to the short-circuit resistance characteristics of the boosting component, and the voltage divider component is subjected to a higher DC voltage divider or even a DC voltage of the power source 26 at this time. . Therefore, under the simplest circuit design structure, the power source 26 actually used by the applicant can generate a 5V DC power supply, and the voltage dividing component and the boosting component respectively have a resistor R1 that can be adjusted or fixed to 100K and 400K ohms. And R2, when the first probe 24a and the second probe 24b are in ohmic contact with the first contact 20a and the second contact 20b of the object to be tested 20, the boosting element can provide an operation of about 4V. Biasing to the object to be tested 20 causes the LED element to turn from the off state to the on state of the linear operation, and the on-resistance characteristic of the step element and the probe connection line 30 is reduced to be close to the point by the on-current characteristic of the LED element. The pressing element even approximates the equivalent resistance of the object to be tested 20, thereby reducing the partial pressure of the acupressure detecting unit 28 in the acupressure detecting circuit 22. Secondly, the type of the probes 24a, 24b is not particularly limited. For example, it may be a linear needle held by a probe holder or a curved needle having a predetermined bending angle, or may be fixed to a probe. Card cantilever probe.

The detector 16 mainly has a signal converter 32, a lifting controller 34 and an interface controller 36. The signal converter 32 can be a potentiometer for generally drawing a voltage signal or an analog/digital converter (A/D converter) for converting the voltage signal, and the signal extraction circuit 32a is connected across the signal. The pin pressure detecting circuit 22 abuts the two ends of the spot measuring unit 28 to capture the voltage across the pin voltage detecting unit 28. The lifting controller 34 is electrically connected to the signal converter 32 and the lifting platform 12, and the lifting controller 34 can control the driving motor (not shown) of the lifting platform 12 to make the lifting load The table 12 can drive the object to be tested 20, and a preliminary position (as shown in the first figure) in which the object to be tested 20 is separated from the first and second probes 24a and 24b and electrically insulated from each other. Reciprocating displacement between the contact position of the object to be tested 20 in contact with the probes 24a, 24b and electrically connected (as shown in the second figure), and the lifting controller 34 controls the lifting stage 12 by During the rise of the standby position to the contact position, the lifting controller 34 can further display that the object to be tested 20 is indeed in contact with the probes 24a, 24b according to the voltage signal captured by the signal converter 32. The operation of the lifting platform 12 is stopped, so that the object to be tested 20 can be surely kept in contact with the probes 24a, 24b and electrically connected, so that the testing machine 18 performs a spotting operation. The interface controller 36 is electrically connected to one of the interface controllers 38 of the testing machine 18 to facilitate the exchange of control commands between the testing machine 16 and the testing machine 18.

The test machine 18 mainly includes the interface controller 38 electrically connected to the interface controller 36 of the detector 16 and a test unit 40 electrically connected to the interface controller 38. The test unit 40 has a test. The circuit 42 has a first contact 42a and a second contact 42b that are disconnected. Moreover, as shown in the third figure, the first connection is performed through the switching actions of the first and second switches SW1 and SW2. The point 42a is electrically coupled to the first probe 24a, and the second contact 42b is electrically coupled to the second probe 24b, such that after the probe needle pressure setting is completed, via the foregoing By means of switching, the testing machine 18 can perform a spotting operation on the object to be tested 20.

In particular, with the fourth diagram and other figures, the following will be used to determine how to use the needle pressure detecting circuit 22 to determine that the probe has actually contacted the electrical contact of the object to be tested (the probe has been applied with a sufficient electrical contact) The principle of the pressure), that is, the probe needle pressure setting method provided by the present invention, and the operation flow of the entire spot measuring system (that is, the point measuring method using the aforementioned needle pressure setting method) are further described in detail to make the technical field Those skilled in the art will be able to understand the technical features of the present invention and to practice the invention.

When the object to be tested is fixed to the lifting platform 12 and the test is started (as shown in the first figure), that is, when the step S1 shown in the fourth figure is entered, the detecting machine 16 of the spotting system 10 first utilizes the The lift controller 34 actuates the lift stage 12 to displace and hold the lift stage 12 in the preparatory position.

Next, in step S2, the entire spotting system will switch to the acupressure detection mode, that is, the detector 16 will issue a control command to synchronously switch the first switch SW1 and the second switch SW2 to the first probe 24a. The first contact 30a of the probe connection line 30 is electrically coupled, and the second probe 24b is electrically coupled to the second contact 30b (as shown in the first figure). In this way, the step a) in the probe pin pressure setting method of the present invention is completed, that is, the first probe 24a and the second probe 24b are electrically coupled to the first contact 30a, respectively. The second contact 30b presents a state corresponding to the object 20 to be tested.

Then, the detecting machine 16 starts the step S3 of reading the voltage across the pin pressure detecting unit 28 by the signal converter 32. At this time, the probe connecting line 30 is in an open state, and the measured voltage is crossed. Is the voltage across the resistor R2.

Then, as shown in step S4 of the fourth figure, the detecting machine 16 controls the lifting platform 12 to rise to the first and second contacts 20a and 20b of the object to be tested 20 through the lifting controller 34, respectively, and the first and the second The contact position of the two probes 24a and 24b in electrical contact (as shown in the second figure). That is, the action of "moving the object to be tested and the first and second probes in close proximity" in the step b) of the probe needle pressure setting method of the present invention is realized by the raising operation of the lifting platform 12. . However, it should be noted that the manner of implementing the step b) is not limited thereto. For example, the object to be tested can be fixedly disposed on a worktable, and the probes are clamped. The spindle head of the probe holder is moved downward and fed toward the object to be tested, and step b) can also be realized. Alternatively, the lifting stage carrying the object to be tested and the spindle head on which the probes are mounted are simultaneously actuated to be displaced toward each other, and step b) can also be realized.

In order to complete step c) of the probe needle pressure setting method of the present invention, as shown in step S5 of the fourth embodiment, the signal converter 32 continuously reads the needle pressure detecting unit 28 during the entire ascending process of the lifting platform 12 described above. After the voltage is applied, even after the object 20 is in contact with the probes 24a and 24b, the lifting platform 12 continues to rise, so that the probes 24a, 24b are applied to the object to be tested. The acupressure of 20a and 20b continues to increase.

In the following, the step d) of the probe needle pressure setting method of the present invention will be further described, that is, how to determine whether to stop the object to be tested and the first by determining whether the voltage across the needle pressure detecting unit reaches a predetermined threshold. And the second probe is relatively close to displacement.

As shown in step S6 of the fourth embodiment, in the embodiment, the voltage converter 32 is used to capture the voltage across the pin voltage detecting unit 28, and is integrated or integrated (or externally connected) to the signal converter 32. A determination module such as a determination circuit determines whether the value of the voltage across the threshold reaches a predetermined threshold value. If the threshold value is reached, the process proceeds to step S7. If not, the process proceeds to step S8. In detail, please refer to the sixth diagrams A and B. In the sixth diagrams A and B, the left vertical axis represents the position of the lifting stage 12, and the right vertical axis represents the needle pressure measured by the signal converter 32. The cross-voltage of the detecting unit 28, the horizontal axis represents time, and the curve C1 represents the relationship between the position of the lifting stage and time, and the curve C2 represents the curve of the voltage across time. As shown in the figure, in the interval from the start of time to t1 (approximately ten milliseconds), the curve C1 increases with time, meaning that the lifting stage 12 continues to rise from the initial position Xi, at this time due to the first and second The probes 24a, 24b are not yet in contact with the object to be tested 20, so the probe connection line 30 is in an open state. At this time, the voltage across the signal converter 32 is the voltage across the resistor R2 (about 4V). Therefore, in this interval, the curve C2 is in a straight line. Secondly, after the first and second probes 24a, 24b are in contact with the first and second contacts 20a, 20b of the object to be tested 20 (after t1), due to the amount of the signal converter 32 at this time The voltage across the voltage of the pin voltage detecting unit 28 is the voltage across the resistor R2 and the resistance of the probes 24a, 24b plus the equivalent resistance of the resistor 20 in parallel, so that the curve C2 will exhibit a significant voltage drop trend. At the same time, when the signal converter 32 detects that the voltage across the voltage is decreased by a constant value, the lifting controller 34 can issue an instruction to control the lifting stage 12 to be stepped at a lower rising rate. Each of the probes 24a, 24b applies a slow increase in the needle pressure of the object to be tested 20a, 20b, and then the voltage value of the needle pressure detecting unit 28 captured by the signal converter 32 reaches a predetermined threshold. At Vt (for example, about 2 to 3 V), corresponding to time t2, the lifting controller 34 issues an instruction to control the lifting stage 12 to stop rising (stop position Xf), so that the object to be tested 20 can be kept and The state in which the pins 24a and 24b are actually in contact (i.e., the probes 24a and 24b are indeed received by a specific needle pressure) Contact points 20a and 20b). It should be noted that the setting of the threshold Vt may be determined by the type of the probe, the type of the object to be tested, or other needs, and is not limited to the voltage range of 2 to 3 V of the Vt. In fact, if the predetermined threshold is set lower, The needle pressure of the probe will increase relatively (because the lift of the lift stage will increase), whereas if the threshold is set higher, the needle pressure will be relatively lower (because the lifting stage stops earlier). In addition, the applicant has compared the needle pressure setting method of the conventional mechanical edge finder with this method. The experimental results show that the needle pressure setting is performed using this method, and the lifting stage is stopped when the voltage across the threshold reaches the predetermined threshold value Vt. The rising time point t2 is about 5 ms earlier than the time point t3 at which the lifting of the lifting stage is stopped by the mechanical edge finder being disconnected by the two electrical contacts. In other words, the present invention has a better reaction. The speed can avoid the occurrence of needle pressure and overload, effectively improve the appearance inspection quality of the needle marks on the surface of the object to be tested, and reduce the defects of surface damage and probe wear of the object to be tested.

Next, in step S6, if it is determined that the value of the cross voltage has not reached the set threshold value, the determination step S8 of whether the lifting stage reaches the set highest position is performed, and if not yet, the operation of the entire spotting system 10 is performed. Going back to step S5, if it has arrived (although the measured cross-over voltage has not reached the set threshold), step S7 is performed to immediately stop the operation of the lifting stage to avoid the needle pressure applied to the object to be tested 20 is super The possibility of load. In other words, in the point measurement method provided by the present invention, in step d), a judgment mechanism of overload protection may be further added, and it is determined whether to stop the lifting stage by determining whether the lifting stage rises to a predetermined highest position. rise. In detail, when performing the step d) of the spotting operation, the step of determining the position of the lifting platform may be further added, and if the lifting platform has reached a predetermined highest position, the lifting of the lifting platform is stopped. And carry out the subsequent test operation, if the lifting stage has not reached the predetermined highest position, then return to the step before step d), even if the lifting stage continues to rise, and continue to draw and determine whether the cross voltage reaches the set Threshold. However, it must be noted that this additional step is only a protection mechanism and is not a necessary step of the probe needle setting method of the present invention.

After the spotting system performs step S7, step S9 is performed, and the entire spotting system 10 will switch to the object testing mode, that is, the detecting machine 16 will issue a control command to make the first switch SW1 and the second switch SW2. Synchronously switching to a state in which the first probe 24a is electrically coupled to the first contact 42a of the test circuit 42 and the second probe 24b is electrically coupled to the second contact 42b (eg, the third Figure shows). In this way, the test of the test object can be performed.

Thereafter, the detector 16 will determine whether the lift stage 12 has actually stopped rising, step S10, and until it is determined that the lift stage 12 has stopped, the detector 16 will issue an instruction through its interface controller 36 via the interface controller 38. The test machine 18 is notified to perform the spot test operation step S11.

Thereafter, in step S12, after it is determined that the testing machine 18 completes the spotting operation, the lifting stage 12 is lowered back to the preparatory position (back to step S1) to prepare another point of the object to be tested. In other words, the spotting method provided by the present invention, after step e), may further comprise the following steps: f) after the test operation is completed, lowering the lifting stage to a position of the object to be tested and the first and the first The two probes are separated by a preliminary position of the passive insulation, such as step S1 in the fourth figure; and g) switching the first and second switches to respectively detect the first probe and the second probe with the acupressure The first contact of the circuit is electrically coupled to the second contact, as in step S2 in the fourth figure. Thereby, the purpose of continuous measurement of the object to be tested can be achieved.

It can be seen from the above description that the probe needle pressure setting method provided by the present invention can ensure that the probes 24a, 24b are properly used by using a simple needle pressure detecting circuit 22 in conjunction with the voltage reading and judgment of the needle pressure detecting unit 28. The pin piezoelectricity is received by the measuring object 20, so that the entire acupressure setting method is very simple. In addition, the present invention can provide a very simple and fast point measurement method by using the aforementioned pin pressure setting method and a switch switching means. In short, the needle pressure setting method provided by the present invention does not need to use the conventional mechanical edge finder or optical identification technology to set the needle pressure, thereby eliminating the disadvantages of the conventional mechanical edge finder and the optical identification technology. Secondly, the probe applied to the acupressure setting method of the present invention can be clamped using a simple jig so that the integrating sphere can be closer to the light-emitting area of the photoelectric object to be measured to obtain a more accurate measurement result. Furthermore, the acupressure test method of the present invention can be used with the existing spot measuring equipment in the industry, and therefore has considerable applicability.

On the other hand, in the above-disclosed embodiment, the spot measuring system for implementing the acupressure setting method (point measuring method) of the present invention is applied to a general LED module requiring only a pair of probes for performing a spotting operation. In other words, however, the acupressure setting method (spot measurement method) of the present invention can also be applied to a spot measurement system in which a plurality of pairs of probes are used, for example, when the object to be tested is a wafer containing a plurality of wafers. In the spot test operation, or in the point measurement operation of a high-power light-emitting diode chip that requires a pair of probes to perform a spot test operation on a single electrical contact.

In detail, in a multi-wafer wafer spotting operation, a probe card containing a plurality of pairs of probes can be used for spotting operations, in which case each pair of probes can be electrically coupled to a separate one. Acupuncture detection unit, and by detecting and judging whether the cross-voltage values of the respective acupressure detecting units all reach the set threshold value, it is confirmed whether each pair of probes has actually contacted each corresponding wafer with a predetermined needle pressure. The electrical contacts are then tested. For the specific technical content of this part, reference may be made to the point measurement system 10' disclosed in the second preferred embodiment of the present invention. In this embodiment, the acupressure detection module 14' includes four pairs. The probe is exemplified, of course, depending on the type of the analyte, the number of probes may be less or more.

As shown in the seventh figure, the pin pressure detecting circuit 22' of the spotting system 10' includes a common DC power source 26 and four sets of parallel pin pressure detecting units 28a-28d, each of which has parallel connections. a resistor (R21-R24) and a probe connecting line (301-304) electrically coupled to the two probes (24a-24h), respectively, and the four sets of acupressure detecting units 28a-28d are electrically connected to The signal converter 32 of the measuring machine 16 can monitor the voltage across the pin pressure detecting units 28a-28d at the same time, and determine the pin pressure detecting unit 28a by the determining module. Whether the value of the voltage across 28d reaches the set threshold value to determine whether to stop the operation of the lifting stage 12, so as to ensure that each pair of probes is in contact with the electrical contacts of the respective corresponding wafers with appropriate acupressure. Follow-up test operations. Since the entire operation flow of the spotting system 10' of this embodiment is similar to the operation flow disclosed in the first preferred embodiment, the only difference is that each of the acupressure detecting units 28a to 28d must be confirmed in this embodiment. The cross-voltage value reaches the set threshold to stop the operation of the lifting and lowering stage 12. Therefore, the detailed operation procedure of the point measuring system with multiple pairs of probes will not be repeated here.

Secondly, in the case of high-power LEDs, the positive and negative electrodes are mostly designed as large-area contact electrodes to reduce the ohmic contact resistance to withstand large currents. Similarly, the chip package modules mostly have a large area of electrical properties. The contacts are electrically connected to the positive and negative electrodes; therefore, in terms of the spotting operation of the high-power LED chip, as shown in the eighth diagrams A to C, a pair of probes (first probe 24a and second) are usually used. The probe 24b) simultaneously contacts one of the electrical contacts 20a of the high power LED wafer (the object to be tested 20), and the other pair of probes (the third probe 24c and the fourth probe 24d) simultaneously contact the Another electrical contact 20b of the high power LED wafer 20. When applied to this spotting operation, the spotting system provided by the present invention can be embodied as follows.

As shown in the eighth embodiment of FIG. A to C, the spotting system 10" provided by the third preferred embodiment of the present invention also includes a lifting platform 12 for carrying the object to be tested 20 and a needle pressure detecting module 14" A detector 16 and a tester 18.

The acupressure detecting module 14" has a pin pressure detecting circuit 22" and first to fourth probes 24a-24b corresponding to the object to be tested, and the pinch voltage detecting circuit 22" has a DC power source 26 and The DC power source 26 is electrically connected to one of the first pin pressure detecting unit 28a and the second pin pressure detecting unit 28b. The first pin voltage detecting unit 28a includes a first resistor R21 and one of the first resistors R21 in parallel. The first probe connection line 301 has a first contact 30a and a second contact 30b for electrically coupling the first and second probes 24a and 24b, respectively. Similarly, the second pin pressure detecting unit 28b includes a second resistor R22 and a second probe connecting line 302 connected in parallel with the second resistor R22. The second probe connecting line 302 has a third contact 30c. And a fourth contact 30d for electrically coupling the third and fourth probes 24c and 24d respectively. Secondly, the pin pressure detecting circuit 22 ′′ further includes an electrical connection with the DC power source 26 and The first pin pressure detecting unit 28a is connected in series with the resistor R11, and is electrically connected to the DC power source 26. Another resistor R12 is connected in series with the second pin pressure detecting unit 28b.

The detector 16 mainly has a signal converter 32, a lifting controller 34 and an interface controller 36. The difference from the first embodiment is that the signal converter 32 is electrically connected to the pin pressure detecting circuit 22", so that the signal converter 32 can simultaneously capture the first and second pin pressure detecting units 28a. With the voltage across 28b.

The tester 18 is substantially identical to the first embodiment, and has a interface controller 38 electrically connected to the interface controller 36 of the detector 16, and is electrically connected to the interface controller 38. Test unit 40. The test circuit 42 of the test unit 40 has two first contacts 42a, 42b connected in parallel for electrically coupling the first and second probes 24a and 24b, respectively, and two second contacts connected in parallel. 42c, 42d for electrically coupling the third and fourth probes 24c and 24d, respectively.

Further, the first to fourth probes 24a to 24b are switchably respectively associated with the first of the pin pressure detecting circuits 22 by one of the first to fourth switches SW1 to SW4 provided in the pin pressure detecting circuit 22. The fourth contacts 30a to 30d are synchronously coupled or electrically coupled to the first to second contacts 42a to 42d of the test unit 40. In this way, the spotting system 10 provided by the third preferred embodiment of the present invention can be applied to the spotting operation of the high power light emitting diode chip.

Of course, the acupressure detection circuit provided by the present invention can also be applied to one of the contacts of the object to be touched while having a first probe and a second probe, and the other contact is only touched by a third probe. In the case of the spot test operation, the first and second probes can be electrically connected to a set of pin pressure detecting circuits, and the third probe and the first and second probes can be set according to the actual pin pressure. Whether it is needed or not, and another set of pin pressure detection circuits is connected or not connected.

In summary, the present invention provides a very simple and accurate method for setting a needle pressure, and a point measurement method and point using the same method, by using the acupressure detection circuit and the cross voltage extraction and determination step disclosed in the present invention. Measurement system. However, it should be noted that the spotting system disclosed in the present invention and the drawings disclosed in the drawings for implementing the foregoing method are merely exemplary examples of several feasible ways of implementing the aforementioned probe needle pressure setting method and point measuring method. The system is not limited to the construction of the spotting system for implementing the acupressure setting and spotting method of the present invention. In other words, various alternative device modifications or component integrations, for example, integrating the spot measuring machine 16 with the testing machine 18 The control machine with cross-voltage acquisition and judgment, lifting stage control, pin pressure detection mode and test mode switching mechanism and test circuit shall also be covered by the patent application scope of this case.

10, 10', 10"... point measurement system

12. . . Lifting platform

14, 14', 14"... Acupressure test module

16. . . Testing machine

18. . . Test machine

20. . . Analyte

20a~20b. . . DUT contact

22, 22', 22"... Acupressure detection circuit

24a~24h. . . Probe

26. . . DC power supply

28. . . Acupressure test unit

28a~28d. . . Acupressure test unit

30. . . Probe connection line

301~304. . . Probe connection line

30a~30d. . . contact

32. . . Signal converter

32a. . . Signal capture line

34. . . Lift controller

36. . . Interface controller

38. . . Interface controller

40. . . Test unit

42. . . Test circuit

42a~42d. . . contact

C1. . . Lifting table position curve

C2. . . Cross voltage curve

R1. . . resistance

R11, R12. . . resistance

R2. . . resistance

R21～R24. . . resistance

SW1~SW4. . . switch

Vt. . . Threshold

Xi. . . initial position

Xf. . . Stop position

The first figure is a schematic diagram of a spotting system according to a first preferred embodiment of the present invention, wherein the display probe is coupled to the pin pressure detecting circuit and the object to be tested has not been in contact with the probe;

The second figure is similar to the first figure, but shows that the object to be tested is in contact with the probe;

The third figure is similar to the second figure, but the display probe is coupled to the test circuit;

The fourth figure is a flowchart of the operation of the spotting system provided by the first preferred embodiment of the present invention;

The fifth figure is an equivalent circuit diagram of the pin pressure detecting circuit of the spot measuring system provided by the first preferred embodiment;

Figure 6 is a diagram showing the relationship between the position of the lifting stage and the voltage across the voltage of the acupressure detecting unit;

Figure 6B is a partial enlarged view of the sixth figure A for explaining the displacement relationship of the lifting platform;

Figure 7 is a schematic diagram of a spotting system provided by a second preferred embodiment of the present invention;

Figure 8 is a schematic diagram of a spotting system provided by a third preferred embodiment of the present invention;

Figure B is a schematic diagram showing that one pair of probes simultaneously contact one electrical contact of the object to be tested, and the other pair of probes simultaneously contact another electrical contact of the object to be tested;

Figure 8C is an equivalent circuit diagram of the acupressure detection circuit of the spot measurement system provided by the third preferred embodiment of the present invention.

S1～S12. . . Spot test step

Claims (17)

A probe needle pressure setting method includes the following steps: a) spacing a first probe and a second probe to correspond to a test object, wherein the first probe and the second probe system are respectively electrically And coupled to a first contact and a second contact of the pin pressure detecting circuit, the pin pressure detecting circuit has a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit includes a boosting element and a probe connecting circuit connected in parallel with the boosting element, the probe connecting line having the first and second contacts; b) causing the object to be tested to be relatively close to the first and second probes俾 enabling the object to be tested to be electrically connected to the first and second probes; c) taking the voltage across the acupressure detecting unit when performing step b); and d) by judging Whether the voltage across the acupressure detecting unit reaches a predetermined threshold determines whether to stop the relative displacement of the object to be tested and the first and second probes. The probe pin pressure setting method of claim 1, wherein the pin pressure detecting circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the pin pressure detecting unit. The probe needle pressure setting method according to claim 2, wherein the resistance value of the voltage dividing element is smaller than a resistance value of the boosting element of the acupressure detecting unit. The probe pin pressure setting method of claim 1, wherein the pin pressure detecting circuit further comprises a first switch and a second switch, one end of the first switch being electrically connected to the first probe, and the other end Switching to the first contact is electrically connected; one end of the second switch is electrically connected to the second probe, and the other end is switchable to be electrically connected to the second contact. The probe pin pressure setting method according to claim 1, wherein in step c), the voltage across the pin pressure detecting unit is captured by a signal converter electrically connected to the pin voltage detecting circuit. The probe needle pressure setting method according to claim 1, wherein in step a), the object to be tested is placed on a lifting platform, and the first and second probe systems respectively correspond to the object to be tested Above, in step b), the object to be tested is relatively closely displaced with the first and second probes by the rising of the lifting platform; and in step d), when the needle pressure is detected When the voltage across the cell reaches the predetermined threshold, the rise and fall of the lift stage is stopped. The probe needle pressure setting method according to claim 6, wherein in step d), when it is determined that the voltage across the needle pressure detecting unit has not reached the predetermined threshold, the method further includes the following steps: determining the lifting load Whether the station rises to a predetermined maximum position determines whether to stop the lifting platform from rising. A method of measuring a method includes the following steps: a) spacing a first probe and a second probe to correspond to a test object, wherein the first probe and the second probe are electrically coupled to the second probe system, respectively a first contact and a second contact of a pin pressure detecting circuit; the pin pressure detecting circuit has a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit includes a boosting component a probe connection line connected to the boosting element and having the first and second contacts, and a first switch and a second switch, the first open relationship enabling the first probe to be switchably a first contact of the probe connection line or a first contact of a test circuit is electrically coupled, and the second open relationship enables the second probe to be switchably connected to the second contact of the probe connection line Or the second contact of the test circuit is electrically coupled; b) the object to be tested is relatively closely displaced with the first and second probes, so that the object to be tested can be combined with the first and second probes The needle contacts are electrically connected to each other; c) when step b) is performed, the voltage across the acupressure detecting unit is taken; d) Stopping the relative displacement of the object to be tested and the first and second probes when the voltage across the acupressure detecting unit reaches a predetermined threshold; and e) switching the first and second switches to make the first The probe and the second probe are electrically coupled to the first contact and the second contact of the test circuit, respectively, to facilitate the test circuit to perform a test operation. The method of claim 8, wherein the pin pressure detecting circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the pin pressure detecting unit. The method of claim 1 is as follows. In step c), the voltage across the pin voltage detecting unit is captured by a signal converter electrically connected to the pin voltage detecting circuit. The method of claim 8, wherein in step a), the object to be tested is placed on a lifting platform, and the first and second probe systems respectively correspond to the top of the object to be tested; In step b), the object to be tested is relatively closely displaced with the first and second probes by the rise of the lifting stage; and in step d), when the needle pressure detecting unit is spanned When the voltage reaches the predetermined threshold, the lifting of the lifting stage is stopped. The method of claim 11, wherein in step d), when it is determined that the voltage across the voltage detection unit has not reached the predetermined threshold, the method further includes the following steps: determining the position of the lifting platform, When the lifting stage has reached a predetermined maximum position, the lifting stage is stopped and step e) is performed. If the lifting stage has not reached the predetermined highest position, return to step c). The method of claim 12 as claimed in claim 12, further comprising the following steps: f) after the test operation is completed, lowering the lifting stage to a point that separates the object to be tested from the first and second probes to call a preliminary position of the insulating; and g) switching the first and second switches to electrically couple the first probe and the second probe to the first contact and the second contact of the pin voltage detecting circuit . A point measuring system includes: a lifting platform for carrying an object to be tested, and a top portion of the lifting platform for spacing corresponding ones for spotting the first probe and the object to be tested a second probe; a test circuit having a first and a second contact; a pin pressure detecting circuit having a power source and a pin pressure detecting unit electrically connected to the power source, the pin pressure detecting unit including a boosting component, a probe connecting circuit connected in parallel with the boosting component and having a first contact and a second contact, and a first switch and a second switch, the first open relationship making the first The probe is switchably electrically coupled to the first contact of the probe connection line or the first contact of the test circuit, and the second open relationship allows the second probe to be switchably coupled to the probe a second contact of the line or a second contact of the test circuit is electrically coupled; a signal converter is electrically connected to the pin pressure detecting circuit for capturing a voltage across the pin pressure detecting unit; a lifting controller electrically connected to the signal converter and the lifting platform The voltage across the retrieved value of the signal converter to control the lift of the actuating stage. The detection system of claim 14, wherein the pin pressure detecting circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the pin pressure detecting unit. A point measuring system includes: a lifting platform for carrying a sample to be tested, and a top of the lifting platform for spacing corresponding first to fourth probes for measuring the object to be tested a first test circuit and a second test circuit, the first test circuit has a first and a second contact, the second test circuit has a third and a fourth contact; a pin pressure detection circuit Having a power source and one of a first and a second pin pressure detecting unit electrically connected to the power source; the first pin pressure detecting unit includes a first boosting element, a parallel with the first boosting element, and having a first probe connection line of a first contact and a second contact, and a first switch and a second switch, the first open relationship causing the first probe to be switchably connected to the first probe The first contact or the first contact of the first test circuit is electrically coupled, and the second open relationship enables the second probe to be switchably connected to the second contact of the first probe connection line or The second contact of the first test circuit is electrically coupled; the second pin pressure detecting unit includes a first a boosting component, a second probe connecting line connected in parallel with the second boosting component and having a third and a fourth contact, and a third switch and a fourth switch, the third open relationship The three probes are switchably electrically coupled to the third contact of the second probe connection line or the third contact of the second test circuit, and the fourth open relationship enables the fourth probe to be switchably The fourth contact of the second probe connection line or the fourth contact of the second test circuit is electrically coupled; a signal converter is electrically connected to the pin pressure detection circuit for respectively capturing a voltage across the first pin pressure detecting unit and the second pin pressure detecting unit; and a lifting controller electrically connected to the signal converter and the lifting stage for capturing according to the signal converter The voltage across the voltage is used to control the actuation of the lifting stage. The point measurement system of claim 16, wherein the pin pressure detecting circuit further comprises a voltage dividing component electrically connected to the power source and connected in series with the first pin voltage detecting unit, and electrically connected to the power source and Another voltage dividing element in series with the second needle pressure detecting unit.