TWI438461B - - Google Patents
Info
- Publication number
- TWI438461B TWI438461B TW101101282A TW101101282A TWI438461B TW I438461 B TWI438461 B TW I438461B TW 101101282 A TW101101282 A TW 101101282A TW 101101282 A TW101101282 A TW 101101282A TW I438461 B TWI438461 B TW I438461B
- Authority
- TW
- Taiwan
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101101282A TW201329483A (en) | 2012-01-12 | 2012-01-12 | Probe pressure calibration method and calibration apparatus thereof |
| CN201210462130.8A CN103207293B (en) | 2012-01-12 | 2012-11-16 | Probe needle pressure correction method and correction equipment thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW101101282A TW201329483A (en) | 2012-01-12 | 2012-01-12 | Probe pressure calibration method and calibration apparatus thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201329483A TW201329483A (en) | 2013-07-16 |
| TWI438461B true TWI438461B (en) | 2014-05-21 |
Family
ID=48754578
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW101101282A TW201329483A (en) | 2012-01-12 | 2012-01-12 | Probe pressure calibration method and calibration apparatus thereof |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN103207293B (en) |
| TW (1) | TW201329483A (en) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI498565B (en) * | 2013-12-11 | 2015-09-01 | Mpi Corp | Probe system, probe height adjusting method, and probe position sensing method |
| TWI522637B (en) | 2013-12-13 | 2016-02-21 | Mpi Corp | Detection of the operation of the system |
| TWI526132B (en) * | 2013-12-13 | 2016-03-11 | Mpi Corp | Correction film structure |
| TWI516786B (en) * | 2013-12-13 | 2016-01-11 | Mpi Corp | Detection and debugging of the system |
| TWI503556B (en) * | 2013-12-31 | 2015-10-11 | Mpi Corp | Detection and operation of detection system |
| CN103855049B (en) * | 2014-03-27 | 2016-08-17 | 上海华力微电子有限公司 | A kind of intelligent probe card pin pressure control system and control method |
| CN104251923B (en) * | 2014-09-17 | 2017-06-30 | 大族激光科技产业集团股份有限公司 | Measure with two cable probe unit and its application process |
| JP6436321B2 (en) * | 2015-04-09 | 2018-12-12 | 株式会社村田製作所 | Method and apparatus for measuring electrical characteristics of electronic parts |
| CN110045269A (en) * | 2019-05-09 | 2019-07-23 | 肇庆学院 | A kind of apparatus for testing chip and method |
| CN110187259A (en) * | 2019-06-10 | 2019-08-30 | 德淮半导体有限公司 | A kind of adjustment system and method for adjustment preventing probe mark shift in wafer test |
| CN112014710B (en) * | 2020-08-27 | 2023-04-21 | 泉芯集成电路制造(济南)有限公司 | Acupressure adaptation method, acupressure adaptation device, acupressure equipment and readable storage medium |
| CN113075525B (en) * | 2021-04-14 | 2022-03-22 | 东莞市谷麦光学科技有限公司 | Voltage correction method for LED light splitting station |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI302201B (en) * | 2006-04-11 | 2008-10-21 | Promos Technologies Inc | Inspecting method and adjusting method of pressure of probe |
| CN200959017Y (en) * | 2006-08-14 | 2007-10-10 | 北京京城清达电子设备有限公司 | Probe applicating mechanism |
| JP5101152B2 (en) * | 2007-04-11 | 2012-12-19 | 日置電機株式会社 | Circuit board inspection equipment |
| JP5074878B2 (en) * | 2007-10-15 | 2012-11-14 | 東京エレクトロン株式会社 | Inspection device |
| CN101726673B (en) * | 2008-10-16 | 2012-12-05 | 旺矽科技股份有限公司 | Spot measurement device |
| TWI398650B (en) * | 2009-04-20 | 2013-06-11 | Chroma Ate Inc | Device and method for controlling test current of chip prober |
-
2012
- 2012-01-12 TW TW101101282A patent/TW201329483A/en unknown
- 2012-11-16 CN CN201210462130.8A patent/CN103207293B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN103207293B (en) | 2016-01-06 |
| TW201329483A (en) | 2013-07-16 |
| CN103207293A (en) | 2013-07-17 |