TW201326734A - Optical measuring apparatus - Google Patents

Abstract

An optical measuring apparatus has a head part, a controller part, an optical fiber, and a storage part. The head part has an optical system and the optical system receives light from an object for measurement. The controller part has an optical unit and the optical unit converts the light to an electric signal. The controller part performs arithmetic operation to the electric signal and outputs a measurement result. The optical fiber connects the head part and the controller part, and links the optical system and the optical unit as an optical path. The storage part stores information necessary for the arithmetic operation. The information is associated with each head part as individual information of the head part. The controller part reads the individual information from the storage part and performs the arithmetic operation based on the individual information. The controller part is physically independent from the storage part.

Description

Optical measuring device

The present invention relates to an optical measuring device for performing measurement on a measuring object using light, and more particularly to an optical measuring device comprising an optical system for receiving light from a measuring object in one of the heads.

In recent years, an optical measuring device that uses light to measure a measuring object has been developed. For example, as an optical measuring device that measures the displacement of the measuring object in a non-contact manner, a confocal measuring device that uses a confocal optical system to measure the displacement of a measuring object has been developed. The confocal measuring device is disclosed in particular in U.S. Patent No. 4,585,349. The confocal measuring device disclosed in U.S. Patent No. 4,585,349 includes a chromatic aberration lens that produces chromatic aberration along an optical axis in a light emitted from a light source (e.g., a white light source) that emits light of a plurality of wavelengths (chromatic Aberration lens). In the confocal measuring device disclosed in U.S. Patent No. 4,585,349, the wavelength of the focused light from the color difference lens differs depending on the displacement of the measuring object, thereby changing the wavelength of light passing through a pinhole so as to measure the light passing through the pinhole. The wavelength of the measurement object to measure the displacement of the object.

In addition, in the confocal measuring device disclosed in U.S. Patent No. 5,785,651, a diffractive lens is used in place of the chromatic aberration lens to generate chromatic aberration along an optical axis in light emitted from a light source. In the confocal measuring device disclosed in U.S. Patent No. 5,785,651, an optical fiber is used as a slave. The light source is a light path to a collimator lens and a light path from the collimating lens to a spectroscope.

As in U.S. Patent No. 5,785,651, an optical measuring device in which a head including an optical system (such as a collimating lens) is connected by an optical fiber and an optical unit (such as a beam splitter) is included. In the controller section, the optical system of the head has large individual differences, and the head and the controller section need to be adjusted in a one-to-one correspondence manner in order to perform high-accuracy measurement. Therefore, when the head is damaged, for the optical measuring device such as US Pat. No. 5,785,651, it is not only necessary to return the head, but also to return the controller portion to the manufacturer, and adjust the waiting in a one-to-one correspondence manner. Repair the head with the controller section.

Furthermore, in the optical measuring device such as US Pat. No. 5,785,651, since the head portion and the controller portion are adjusted in a one-to-one correspondence manner, the head cannot be replaced even when a plurality of optical measuring devices are provided. To change the configuration of the device, the head and the controller portion need to be moved as a whole. In the optical measuring device such as U.S. Patent No. 5,785,651, it takes more labor to change the configuration of the device than to change the configuration of the device.

In addition, an optical measuring device has been developed in which the head and the adjustment information (for example, correction coefficient, etc.) of the controller portion are stored in a storage portion provided in the head, and when the head is connected and In the controller unit, the information is read from the storage unit. In this optical measuring device, because in the head The information of the adjustment is stored, so the head and the controller portion do not need to correspond to each other on a one-to-one basis, so that when the head is damaged, the head is only sent back to the manufacturer, and only the replacement can be performed. This header changes the configuration of the device.

However, in this optical measuring device, it is necessary to provide a circuit portion including the storage portion in the head, thereby increasing the size of the head. Furthermore, since it is necessary to read the information stored in the storage unit of the head from the controller unit, electrical wiring is required in addition to the optical fiber between the head and the controller unit.

The present invention has been devised in view of the above circumstances, and an object of the present invention is to provide an optical measuring apparatus in which a head can be made compatible with a controller portion such that the head portion can be reduced in size without increasing the size of the head portion. Replaced.

An optical measuring device according to the present invention includes a head, a controller portion, an optical fiber, and a storage portion. The head includes an optical system that receives light from a measuring object. The controller portion includes an optical unit that converts the light received in the head into an electrical signal and performs an arithmetic operation on the electrical signal converted in the optical unit to output a measurement result. The optical fiber connects the head to the controller portion to act as a light path connecting the optical system of the head to the optical unit of the controller portion. The storage unit is associated with each individual of the manufacturing head and the information required to store the arithmetic operations performed in the controller unit as individual information of the head. The controller unit reads the individual information from the existing storage unit physically separate from the controller unit, and performs the arithmetic operation using the read individual information.

In addition, the storage unit has a storage medium for electrically storing the individual information, and the individual information can be read from the storage medium by connecting the storage medium to an input end of the controller unit. .

Preferably, the storage portion has a storage medium for magnetically and optically storing the individual information, and is obtainable by using a reading portion included in the controller portion or connected to the controller portion. The storage medium reads the individual information.

Preferably, the storage portion is attached to the head or to an optical fiber of the head.

Preferably, the storage portion is included in a connector portion of the optical fiber connected to the controller portion, and the operation of connecting the connector portion to the controller portion allows the storage portion to be connected to the controller The input of the department.

Preferably, the controller portion stores information required for the arithmetic operation, wherein the information can be used when the individual information cannot be read from the storage portion.

According to the above configuration, in the optical measuring apparatus according to the present invention, the storage portion for storing the individual information of the head is provided in association with each individual of the manufacturing head, and the controller portion is stored from the storage unit The portion reads the individual information of the header to perform the arithmetic operation using the individual information, and the individual information can perform high accuracy measurement even when the head is replaced.

Hereinafter, specific examples of the present invention will be described in detail with reference to the drawings.

(Specific example 1)

1 is a view showing the configuration of an optical measuring apparatus according to a specific example 1 of the present invention. Schematic diagram. The optical measuring device shown in Fig. 1 is a confocal measuring device 100 that measures the displacement of a measuring object 200 (change in the distance to the measuring object 200) using a confocal optical system. The measurement object 200 measured by the confocal measurement device 100 has, for example, a cell gap of a liquid crystal display panel or the like.

The confocal measuring device 100 includes a head 10 having a confocal optical system, a controller unit 20 optically coupled via an optical fiber 11, a monitoring unit 30 for displaying signals output from the controller unit 20, and a storage unit. The storage unit 40 of the individual information of the head 10 will be described later.

The head 10 includes a diffractive lens 1 and an objective lens 2 disposed on the side of the measuring object 200 with respect to the diffractive lens 1. The focal length of the diffractive lens 1 is made larger than the difference between the distance from the diffractive lens to the objective lens and the focal length of the objective lens.

Here, the diffractive lens 1 is an optical element that generates chromatic aberration in an optical axis direction from light emitted from a light source (for example, a white light source) that emits light having a plurality of wavelengths to be described later. In the diffraction lens 1, an oscillating type zone plate is formed on one surface of the lens, which periodically forms a minute wave shape (such as a kinoform shape, a binary shape ( The step shape, the step shape, etc., or periodically change the transmittance of the light. The arrangement of the diffractive lens 1 is not limited to the above description.

The objective lens 2 is an optical element that is collected on the measuring object 200 and has light of the chromatic aberration generated by the diffraction lens 1. With regard to the confocal measuring device 100, the use of a white light source for emitting the plurality of wavelengths of light will be described below. The case of this light source.

Light emitted from the white light source is guided to the head 10 via the optical fiber 11. In order to effectively utilize the light emitted from the optical fiber 11 in the diffractive lens 1, the numerical aperture (NA) of the optical fiber 11 and the numerical aperture of the diffractive lens 1 need to match each other. Therefore, a collecting lens 3 is provided between the optical fiber 11 and the diffractive lens 1 for adjustment so that the numerical aperture of the optical fiber 11 matches the numerical aperture of the diffractive lens 1.

The optical fiber 11 is a light path from the head 10 to the controller portion 20 and serves as a pinhole. That is, in the light collected by the objective lens 2, the light focused on the measuring object 200 is focused by the opening of the optical fiber 11. Therefore, the optical fiber 11 serves as a pinhole for blocking light having a wavelength that is not focused on the measuring object 200, and for passing light focused on the measuring object 200. The use of the optical fiber 11 for the light path from the head 10 to the controller portion 20 makes the pinhole unnecessary.

In the confocal measurement device 100, since the optical fiber 11 is used for the optical path from the head portion 10 to the controller portion 20, the head portion 10 can be elastically moved with respect to the controller portion 20.

The controller unit 20 includes a white LED (light emitting diode) 21 as a white light source, a divergent optical fiber 22, a beam splitter 23, an imaging element 24, and a control circuit portion 25. Although the white LED 21 is used as the white light source, another light source may be used as long as it is a light source capable of emitting white light.

The diverging fiber 22 has an optical fiber on a side connected to the optical fiber 11 22a and two optical fibers 22b and 22c on an opposite side. The optical fiber 22b is connected to the white LED 21, and the optical fiber 22c is connected to the beam splitter 23. The diverging fiber 22 can thus direct the light emitted from the white LED 21 to the fiber 11, and the light returned from the head 10 via the fiber 11 can be directed to the beam splitter 23.

The beam splitter 23 has a concave mirror 23a for reflecting light returned from the head 10, a diffraction grating 23b for allowing light reflected on the concave mirror 23a to enter, and a focusing grating for emitting from the diffraction grating 23b. Light collecting lens 23c. The beam splitter 23 may have any configuration such as a Zernitana type, a Littrow type, as long as the beam splitter can separate the light returned from the head 10 according to the wavelength.

The imaging element 24 is a one-line CMOS (Complementary Metal Oxide Semiconductor) or a CCD (Charge Coupled Device) that measures the intensity of light emitted from the beam splitter 23. Here, in the confocal measurement device 100, the beam splitter 23 and the imaging element 24 constitute a measuring portion for measuring the intensity of light returned from the head portion 10 in accordance with the wavelength. The measuring portion may be constituted by a single object such as the imaging element 24 of the CCD as long as it can measure the intensity of light returned from the head 10 according to the wavelength. Additionally, the imaging element 24 can be a 2-dimensional CMOS or a 2-dimensional CCD.

The control circuit unit 25 has a spectrum control circuit unit 25a for controlling the operation of the white LED 21, the imaging element 24, and the like, and a signal processing circuit unit 25b for processing signals output from the imaging element 24. Furthermore, The control circuit unit 25 has an input interface 25c for inputting signals for adjusting the operation of the white LED 21, the imaging element 24, etc., and individual information of the head 10 described later, and electrically connected to The monitoring unit 30 outputs an output interface 25d as a result of signal processing of the imaging element 24.

In the controller unit 20, an optical unit that converts light received in the head 10 into an electrical signal is provided by the beam splitter 23, the imaging element 24, and the spectral control circuit portion 25a of the control circuit portion 25. Composition. The signal processing circuit unit 25b of the control circuit unit 25 performs an arithmetic operation on the electrical signal converted in the optical unit to output a measurement result.

The monitoring unit 30 displays the signal output by the imaging element 24. The monitoring unit 30 plots the spectral waveform of the light returned from the head 10, and displays the distance of the measuring object 200 as, for example, 123.45 μm.

The storage unit 40 stores the information of the head 10 as individual information, which is associated with each individual of the manufacturing head 10, and the information is necessary for performing arithmetic operations in the controller unit 20. Here, in the case of the confocal measuring device 100 that measures the displacement of the measuring object 200, the individual information of the head 10 is a wavelength-distance correction coefficient described later.

Next, the wavelength-distance correction coefficient as the individual information of the head 10 will be described. 2 is a schematic view showing the configuration of a confocal optical system of the head 10 used in the confocal measurement device 100 according to Concrete Example 1 of the present invention. In the configuration of the confocal optical system shown in FIG. 2, the objective lens 2 is disposed on the side of the measuring object 200 with respect to the diffraction lens 1. That is, in the total In the focal length measuring device 100, chromatic aberration occurs in the optical axis direction of the light emitted from one end of the optical fiber 11 by the diffraction lens 1, and the chromatic aberration light is generated by the objective lens 2 on the measuring object 200. .

First, in the optical system of the confocal measuring device 100 shown in Fig. 2, the distance from the end of the optical fiber 11 to the diffractive lens 1 is a, and the distance from the diffractive lens 1 to the objective lens 2 is b. The distance from the objective lens 2 to the point at which the objective lens 2 focuses the light is c(λ). Further, with respect to the diffractive lens 1, when the wavelength of the light is λ ₀ , the focal length is f _d0 , and an effective diameter is φ _a . This distance a is equal to the focal length f _d0 . As for the objective lens 2, the focal length is f0 and the effective diameter is φ _b (λ).

In the optical system of the confocal measuring device 100 shown in FIG. 2, a general lens formula can be used, and the distance a from the end of the optical fiber 11 to the diffractive lens 1 can be expressed by the equation (1). The relationship between the distance from the lens 1 to the point at which the diffracting lens 1 focuses the light emitted from the optical fiber 11 by a _g (λ) (not shown) and the focal length f _d (λ) of the diffractive lens 1 And the relationship between the distance b from the diffractive lens 1 to the objective lens 2, the distance c (λ) from the objective lens 2 to the point at which the objective lens 2 focuses the light, and the focal length f _{0 of} the objective lens 2. The color difference of the objective lens 2 is negligible.

Furthermore, the relationship of the formula (1) can be used, and the effective diameter φ _b (λ) of the objective lens 2 can be expressed by the equation (2).

Further, the relationship (1) and (2) can be used, and the distance c(λ) from the objective lens 2 to the point at which the light is focused by the objective lens 2 can be expressed by the equation (3).

Although in theory, the equation (3) represents the relationship between the distance c(λ) from the objective lens 2 to the point at which the objective lens 2 focuses the light, and the optical system of the head 10 The individual differences are large, and in order to implement high accuracy measurements, the controller portion 20 of the head 10 needs to be adjusted in a one-to-one correspondence. The wavelength-distance correction coefficient obtained by the adjustment is stored in the storage unit 40 as the individual information of the head 10. The storage portion 40 is attached to the optical fiber 11 connected to the head portion 10, whereby the confocal measuring device 100 can use the individual of the head portion 10 even if the head portion 10 in which the storage portion 40 is mounted is replaced. Information to implement high accuracy measurements.

Here, the adjustment for obtaining the wavelength-distance correction coefficient will be specifically described with reference to the drawings. 3A and 3B are diagrams for explaining the adjustment of the wavelength-distance correction coefficient obtained in the confocal measurement device 100 according to the specific example 1 of the present invention.

First, the confocal measuring device 100 moves the measuring object 200 disposed on an automatic stage (not shown) within a measurable range as shown in FIG. 3A, and reads a measurement waveform from each distance. Peak wavelength. The graph of Fig. 3B can show the relationship of each distance to the peak wavelength read from the measured waveform, and the relationship between the distance c(λ) and the wavelength λ can be calculated as c(λ)=αλ ⁿ + Βλ ^n-1 +... Here, α and β are the wavelength-distance correction coefficients, and the correlation wavelength-distance correction coefficients are stored in the storage unit 40.

Although not shown, the storage unit 40 has a flash memory (the flash memory system-non-volatile memory), a control circuit for implementing storage and reading of the data to the flash memory, and an implementation. The input/output interface of this information. The storage portion 40 can be electrically stored or read in the flash memory by the connection interface to the input interface 25c of the controller portion 20 (for example, installed in the connector) to obtain the adjustment. Wavelength-distance correction factor information.

In the confocal measurement device 100, the storage portion 40 for storing information of the wavelength-distance correction coefficient is associated with the head portion 10, whereby the controller portion 20 is connected when the head portion 10 is connected The wavelength-distance correction factor can be read from the storage portion 40 associated with the additional head 10. The confocal measurement device 100 performs a predetermined arithmetic operation in the signal processing circuit portion 25b using the read wavelength-distance correction coefficient, whereby high accuracy can be considered in consideration of individual differences in the optical system of the connection head 10. The measurement of the displacement of the measuring object 200 is carried out.

As long as the storage portion 40 is configured to electrically store the wavelength-distance The positive coefficient, the storage portion 40 is not limited to the non-volatile memory. Further, the controller portion 20 is not limited to the case where it is directly connected to the storage portion 40 via the connectors to read the wavelength-distance correction coefficient, and for example, it can be wirelessly connected in a non-contact manner An electric wave is connected to the storage portion 40 to read the wavelength-distance correction coefficient.

Furthermore, in the confocal measuring device 100 shown in FIG. 1, the storage portion 40 is connected to the optical fiber 11 connected to the head 10 by a string, wherein the line causes the head 10 It is associated with the storage portion 40, but the confocal measurement device 100 according to the present invention is not limited thereto. For example, the storage portion 40 is not connected to the optical fiber 11 connected to the head 10 by the wire, but the storage portion 40 is directly connected to the head portion 10 by a line, whereby the head portion 10 is The storage unit 40 is associated.

Further, FIG. 4 is a schematic diagram showing another configuration in which the head 10 is associated with the storage portion 40 in the confocal measurement device 100 according to the specific example 1 of the present invention. As shown in FIG. 4, the optical fiber 11 connected to the head 10 includes the storage portion 40 in a connector portion 12 to be connected to the controller portion 20, and in the connector portion 12, One end 40a of the reservoir 40 is disposed parallel to one end 13 of the optical fiber 11. In the input interface 25c of the controller unit 20, an input end 25c1 in which the end 13 of the optical fiber 11 is mounted and an input end 25c2 in which the end 40a of the storage portion 40 is mounted are provided. Inserting the connector portion 12 of the optical fiber 11 into the input interface 25c of the controller portion 20, thereby optically connecting the head portion 10 to the controller portion 20, and The storage unit 40 is electrically connected to the controller unit 20. In the confocal measuring device 100 shown in FIG. 4, the head unit 10 can be connected to the controller unit 20 without the user knowing the reading operation, and the wavelength-distance correction coefficient is stored in the storage unit. 40.

Furthermore, as for the association between the head portion 10 and the storage portion 40, the head portion 10 and the storage portion 40 need not be physically connected, but the same number as the head portion 10 is adhered to the storage portion. 40.

As described above, in the confocal measurement device 100 according to the specific example 1 of the present invention, the storage portion 40 for storing the wavelength-distance correction coefficient is disposed to be associated with each individual of the manufacturing head portion 10, And the controller unit 20 reads the wavelength-distance correction coefficient from the storage unit 40 to perform the arithmetic operation using the correlation wavelength-distance correction coefficient, thereby enabling high-accuracy measurement even if the head 10 is replaced. become possible. Further, in the confocal measurement device 100 according to the specific example 1 of the present invention, the head portion 10 is made compatible with the controller portion 20, so that the head portion 10 is replaceable, whereby the head portion 10 is When damaged, it is possible to return only the head 10 to the manufacturer. Furthermore, when a plurality of confocal measuring devices 100 are provided, only the head 10 can be replaced to change the configuration of the device. Since the confocal measurement device 100 according to the specific example 1 of the present invention is not configured to dispose the storage portion for storing the wavelength-distance correction coefficient in the head portion 10, the size of the head portion 10 can be reduced.

Here, the individual information of the head 10 stored in the storage unit 40 is not limited to the wavelength-distance correction coefficient, but may include something like the device. Information related to the serial number, type and model of the device, measurement center distance, measurable range, presence or absence of the mode corresponding to the work type, presence or absence of the sensitivity adjustment mode, automatic light quantity control coefficient, etc. Software related information such as version information.

Further, although the confocal measuring device 100 using the confocal optical system to measure the displacement of the measuring object 200 has been described as the confocal measuring device according to the specific example 1 of the present invention, the present invention is not limited thereto. As long as the optical measuring device according to the present invention has an optical system in which the optical system of the head and the optical unit of the controller portion are connected by the optical fiber, it may be a film thickness meter that measures the film thickness of the measuring object, and a measurement A color sensor that measures the color or wavelength of the object, a photometer that measures the amount of light of the object, and the like.

(Specific example 2)

In the optical measuring apparatus according to the specific example 2 of the present invention, a configuration will be described in which individual information of a head is stored in a storage portion, which is not stored electrically, but optically or magnetically. Fig. 5 is a schematic view showing the configuration of an optical measuring apparatus according to a specific example 2 of the present invention. The optical measuring device shown in FIG. 5 is also a confocal measuring device 110, and a storage portion 41 for optically storing individual information of a head 10 and a reader (reading portion) of the storage portion 41. In addition to the configuration of 27, it has the same configuration as that of the confocal measuring device 100 shown in Fig. 1, and therefore, the same components will be given the same reference numerals, and detailed description thereof will not be repeated.

The storage unit 41 is for storing individual information of the head 10 (such as a wave 2-dimensional bar code for long-distance correction factor). The reader 27 included in a controller unit 20 is a one-chip reader or a camera for reading the 2-dimensional bar code of the storage unit 41. As shown in FIG. 5, in the confocal measuring device 110, a tag of the 2-dimensional bar code of the storage portion 41 described above is connected in a line to an optical fiber 11 connected to the head 10. When the head 10 is connected to the controller unit 20, the confocal measuring device 110 thus reads the 2-dimensional bar code described on the tag by the reader 27 in the controller unit 20, Thereby, the wavelength-distance correction coefficient stored in the storage unit 41 can be read.

The information stored in the storage unit 41 is not limited to the 2-dimensional barcode, but may be a 1-dimensional barcode, a numeric string or the like as long as the reader 27 can optically read the information. The storage unit 41 may be a compact disc (CD-ROM, DVD-ROM or the like) for optically storing individual information of the head 10. In the case where the storage unit 41 is the optical disc, the reader 27 is a drive device that reads the individual information of the head 10 from the optical disc.

In addition, the correlation between the head 10 and the storage portion 41 is not limited to the fiber of the 2-dimensional bar code of the storage portion 41 described above being connected to the optical fiber 11 connected to the head portion 10 by the wire. Alternatively, a seal of the 2-dimensional bar code of the storage portion 41 described above may be adhered to the head portion 10.

Furthermore, the storage portion 41 may be a magnetic card, a magnetic disk or the like for magnetically storing the individual information of the head 10. In the case where the storage portion 41 is the magnetic card or the magnetic disk, the reader 27 is read from the magnetic card or the magnetic disk. A reader or drive for the individual information of the head 10. The storage portion 41 can be a storage medium that stores the individual information of the head 10 and combines at least two of electrical, optical, and magnetic methods. For example, the storage portion 41 may be a magneto-optical disk that combines the optical method with the magnetic method, a magnetoresistive memory that incorporates the electrical method and the magnetic method, and the like.

Fig. 6 is a schematic view showing another configuration of an optical measuring apparatus according to a specific example 2 of the present invention. The optical measuring device shown in FIG. 6 is also a confocal measuring device 120, and has the same configuration as the confocal measuring device 110 shown in FIG. 5 except for the configuration of the reader 28 of the storage portion 41. And, therefore, the same components will be given the same component symbols, and the detailed description thereof will not be repeated.

The reader 28 is provided outside the controller unit 20 and connected via electrical wiring. In particular, in the case where the storage unit 41 stores a 2-dimensional barcode of individual information of the head 10 (such as the wavelength-distance correction coefficient), the reader 28 is connected to the control by the wiring. The unit 20 is a bar code reader that reads the 2-dimensional bar code of the storage unit 41. In the confocal measuring device 120, the 2-dimensional bar code described on the tag is read by the reader 28 without the wire being connected to the optical fiber 11 connected to the head 10 The fiber (storage portion 41) is adjacent to the controller portion 20 so that the wavelength-distance correction coefficient stored in the storage portion 41 can be read.

In addition, in the confocal measurement device 120, even if the storage portion 41 associated with the head portion 10 stores the individual information in different methods, The reader 28 is coupled to the controller unit 20 to read the wavelength-distance correction coefficient stored in the storage unit 41.

As described above, in the confocal measuring devices 110, 120 according to the specific example 2 of the present invention, the individual information of the head 10 is optically or magnetically stored in the storage portion 41, and the corresponding reading is performed by the corresponding reading. The device 27 or 28 reads the individual information of the head 10, thereby enabling high accuracy measurement even when the head 10 is replaced. In the confocal measuring device 120, the provision of the reader 28 outside the controller portion 20 increases the degree of freedom in the location of the storage portion 41 and the method for storing.

In addition, in the confocal measuring device 120, the storage portion 40 for electrically storing the individual information of the head 10 as shown in FIG. 1 can be provided by the reading provided outside the controller portion 20. The extractor 28 reads the individual information of the head 10 stored in the storage unit 40.

(Specific example 3)

An optical measuring apparatus according to a third embodiment of the present invention includes a controller unit including a beam splitter unit and a signal processing unit, and the beam splitter unit and the signal processing unit are physically independent. Fig. 7 is a schematic view showing the configuration of an optical measuring apparatus according to a specific example 3 of the present invention. The optical measuring device shown in FIG. 7 is also a confocal measuring device 130, and includes a controller 20 composed of a beam splitter portion 71 and a signal processing portion 72 (the beam splitter portion 71 and the signal processing portion). In addition to being physically separate, it has the same configuration as the confocal measuring device 100 shown in Figure 1, and therefore, the same components will be given The same component symbols are given, and detailed description thereof will not be repeated.

The controller unit 20 includes the beam splitter unit 71, the signal processing unit 72, and a wiring 73 that electrically connects the beam splitter unit 71 to the signal processing unit 72. The beam splitter portion 71 includes a white LED 21, a divergent fiber 22, a beam splitter 23, an imaging element 24, and a spectral control circuit portion 25a of a control circuit portion 25. The signal processing unit 72 includes a signal processing circuit unit 25b, an input interface 25c, and an output interface 25d of the control circuit unit 25. Although not described, the confocal measurement device 130 is connected to a monitoring unit 30 via the output interface 25d of the signal processing unit 72.

The wiring 73 is an electrical path for supplying a signal output from the imaging element 24 of the spectroscopic unit 71 to the signal processing unit 72 and supplying necessary electric power from the signal processing unit 72 to the spectroscopic unit 71.

In the confocal measurement device 130, the controller unit 20 is divided into the beam splitter unit 71 and the signal processing unit 72. This makes it possible to connect the plurality of spectroscope units 71 to the single signal processing unit 72. This reduces the size of the entire device.

Further, in the confocal measurement device 130, as described in the specific example 1, the signal processing unit 72 of the controller unit 20 reads the wavelength-distance correction coefficient stored in the storage unit 40 to use the The read wavelength-distance correction coefficient performs a predetermined arithmetic operation in the signal processing circuit portion 25b, thereby performing a measurement of the displacement of the object 200 with high accuracy under consideration of the individual differences of the optical systems of the connection head 10. measuring. At the confocal measuring device 130 In the case where the plurality of beam splitter portions 71 are connected, the signal processing circuit portions 25b are provided corresponding to the connected beam splitter portions 71 to read the wavelength-distance correction coefficients stored in the storage portion 40. To the respective signal processing circuit units 25b. Obviously, in the confocal measuring device 130, the reading function of the wavelength-distance correction coefficient stored in the storage portion 40 may be provided on the side of the signal processing 72, but on the side of the beam splitter portion 71. .

Further, in the confocal measurement device 130, as shown in FIG. 7, a representative value holding portion 75 can be provided in the signal processing portion 72. The representative value holding unit 75 stores information necessary for the arithmetic operation in the case where the individual information of the head 10 cannot be read from the storage unit 40 (the representative value of the head 10 (preset) value)).

Here, the representative value of the head 10 is a value obtained by averaging the individual differences of the optical systems of the heads 10, and although the use of the representative value cannot implement the measuring object 200 with high accuracy. The measurement of the displacement, but the representative value is information used to temporarily perform the measurement of the head 10 (e.g., the wavelength-distance correction factor).

In the confocal measuring device 130, the storage unit 40 cannot be read from the storage unit 40 even when the storage unit 40 associated with the head unit 10 is lost, and when the device reading the information from the storage unit 40 fails. Taking the individual information of the head 10, the provision of the representative value holding portion 75 allows the displacement of the measuring object 200 to be measured without looseness with high accuracy.

Further, in the confocal measurement device 130, the representative value holding portion 75 It is provided to allow the omitting of reading the individual information of the head 10 from the storage unit 40 in the case of a simple confirmation that does not require high precision or in the case of use in an emergency program. In particular, the case where the simple confirmation is performed without requiring high accuracy and the use of the confocal measurement device in an emergency procedure include promotion activities, simple tests, introduction, simple operation inspection at the time of installation, repair, replacement of the head Simple operation check at 10 o'clock.

The representative value holding portion 75 is not limited to the case where the representative value holding portion 75 is provided in the confocal measurement device 130 shown in FIG. 7, but may be in the confocal measurement device 100 shown in FIG. 1, in FIG. The representative value holding unit 75 is provided in the confocal measuring device 110 shown and in the confocal measuring device 120 shown in FIG.

As described above, in the confocal measurement device 130 according to the third specific example of the present invention, the controller unit 20 is divided into the spectroscopic portion 71 and the signal processing portion 72, thereby increasing the degree of freedom in the arrangement of the device. And reducing the size of the entire device. In the confocal measurement device 130 according to the specific example 3 of the present invention, even if the individual information of the head 10 cannot be read from the storage portion 40, the provision of the representative value holding portion 75 can easily measure the measurement object 200. Displacement.

The specific examples described herein are not to be considered as limiting, but should be considered as illustrative. The scope of the present invention is to be construed as being limited by the scope of the claims and the scope of the invention.

1‧‧‧Diffractive lens

2‧‧‧ Objective lens

3‧‧‧ Concentrating lens

10‧‧‧ head

11‧‧‧Fiber

12‧‧‧Connector Department

13‧‧‧

20‧‧‧Controller Department

21‧‧‧White LED

22‧‧‧Differential fiber

22a‧‧‧Fiber

22b‧‧‧Fiber

22c‧‧‧ fiber

23‧‧‧beam splitter

23a‧‧‧ concave mirror

23b‧‧‧Diffraction grating

23c‧‧‧ Condenser lens

24‧‧‧ imaging components

25‧‧‧Control Circuit Department

25a‧‧‧Spectrum Control Circuits Division

25b‧‧‧Signal Processing Circuits Division

25c‧‧‧Input interface

25c1‧‧‧ input

25c2‧‧‧ input

25d‧‧‧output interface

27‧‧‧Reader (reading unit)

28‧‧‧Reader

30‧‧‧Monitor

40‧‧‧ Storage Department

40a‧‧‧

41‧‧‧ Storage Department

71‧‧‧Splitter section

72‧‧‧Signal Processing Department

73‧‧‧ wiring

75‧‧‧Representative Value Maintenance Department

100‧‧‧Confocal measuring device

110‧‧‧Confocal measuring device

120‧‧‧Confocal measuring device

130‧‧‧Confocal measuring device

200‧‧‧Measurement objects

1 is a schematic view showing the configuration of an optical measuring apparatus according to a specific example 1 of the present invention; and FIG. 2 is a view showing a confocal optical system of a head used in the confocal measuring apparatus according to the specific example 1 of the present invention. 3A and 3B are schematic diagrams for obtaining an adjustment of a wavelength-distance correction coefficient in a confocal measurement apparatus according to a specific example 1 of the present invention; and FIG. 4 is a description of a specific example 1 according to the present invention. FIG. 5 is a schematic diagram showing the configuration of an optical measuring device according to a specific example 2 of the present invention; FIG. 6 is a view showing a configuration of another configuration in which the head portion and a storage portion are associated with each other; FIG. A schematic view of another configuration of the optical measuring apparatus of the specific example 2 of the invention; and FIG. 7 is a schematic view showing the configuration of the optical measuring apparatus according to the specific example 3 of the present invention.

1‧‧‧Diffractive lens

2‧‧‧ Objective lens

3‧‧‧ Concentrating lens

10‧‧‧ head

11‧‧‧Fiber

20‧‧‧Controller Department

21‧‧‧White LED

22‧‧‧Differential fiber

22a‧‧‧Fiber

22b‧‧‧Fiber

22c‧‧‧ fiber

23‧‧‧beam splitter

23a‧‧‧ concave mirror

23b‧‧‧Diffraction grating

23c‧‧‧ Condenser lens

24‧‧‧ imaging components

25‧‧‧Control Circuit Department

25a‧‧‧Spectrum Control Circuits Division

25b‧‧‧Signal Processing Circuits Division

25c‧‧‧Input interface

25c1‧‧‧ input

25c2‧‧‧ input

25d‧‧‧output interface

30‧‧‧Monitor

40‧‧‧ Storage Department

100‧‧‧Confocal measuring device

200‧‧‧Measurement objects

Claims (6)

An optical measuring device comprising: a head having an optical system configured to receive light from a measuring object; a controller portion having an optical unit configured to Converting the light received in the header into an electrical signal, and the controller is configured to perform an arithmetic operation on the electrical signal to output a measurement result; an optical fiber configured to connect the head with The controller unit, and the optical unit connecting the optical system of the head and the controller unit as an optical path; and a storage unit configured to store information necessary for the arithmetic operation, the information system Associated with each individual of the head to become individual information of the head, wherein the controller portion reads the individual information from the storage portion and performs the arithmetic operation according to the individual information, and the controller portion and the controller The storage sections are physically separate from each other. The optical measuring device of claim 1, wherein the storage portion has a storage medium for electrically storing the individual information, and the storage device can be connected to the input end of the controller portion from the storage device. The media reads the individual information. The optical measuring device of claim 1, wherein the storage portion has a magnetic or optical storage for storing the individual information. The media, and the individual information can be read from the storage medium by using a reading unit included in or connected to the controller unit. An optical measuring device according to claim 2, wherein the storage portion is connected to the head or to the optical fiber connected to the head. The optical measuring device of claim 2, wherein the storage portion is included in one of the connector portions of the optical fiber, and the operation of connecting the connector portion to the controller portion allows the storage portion to be connected to the The input of the controller unit. The optical measuring device according to any one of claims 1 to 3, wherein the controller portion stores information necessary for the arithmetic operation, and when the individual information cannot be read from the storage portion, the News.