WO2013042594A1

WO2013042594A1 - Optical measurement device

Info

Publication number: WO2013042594A1
Application number: PCT/JP2012/073320
Authority: WO
Inventors: 慎介山川; 賢一的場; 松井　優貴; 浩二嶋田
Original assignee: オムロン株式会社
Priority date: 2011-09-22
Filing date: 2012-09-12
Publication date: 2013-03-28
Also published as: JP2013068523A; CN103988046B; CN103988046A; TWI463106B; TW201326734A; JP5870576B2

Abstract

With an optical measurement device according to the present invention, a measurement is carried out on an object to be measured (200) using light, said optical measurement device comprising a head unit (10), a controller unit (20), an optical fiber (11), and a storage unit (40). In the optical measurement device according to the present invention, the head unit (10) and the controller unit (20) are connected with the optical fiber (11). The storage unit (40) stores information which is related to specific manufactured head units (10) and which is necessary to an operation which is carried out with the controller unit as specific information of the respective head units (10). The controller unit (20) reads out the specific information from the storage unit (40) which is physically independent from the controller unit (20), and carries out the operation using the read-out specific information.

Description

Optical measuring device

The present invention relates to an optical measurement apparatus that performs measurement on a measurement object using light, and more particularly to an optical measurement apparatus that includes an optical system that receives light from the measurement object in a head portion.

In recent years, an optical measurement device that measures light on a measurement object using light has been developed. For example, a confocal measurement device that measures the displacement of a measurement object using a confocal optical system has been developed as an optical measurement device that measures the displacement of the measurement object in a non-contact manner. The confocal measurement device is specifically disclosed in US Pat. No. 4,585,349 (Patent Document 1). The confocal measurement device disclosed in Patent Document 1 includes a chromatic aberration lens that causes chromatic aberration along the optical axis in light emitted from a light source (for example, a white light source) that emits light having a plurality of wavelengths. The confocal measurement device disclosed in Patent Document 1 changes the wavelength of the light from the focused chromatic aberration lens according to the displacement of the measurement object, so that the wavelength of the light passing through the pinhole changes. The displacement of the measurement object is measured by measuring the wavelength of the light passing through the pinhole.

In addition, the confocal measurement device disclosed in US Pat. No. 5,785,651 (Patent Document 2) uses a diffractive lens instead of a chromatic aberration lens to chromatic aberration along the optical axis to light emitted from a light source. Is caused. Note that the confocal measurement device disclosed in Patent Document 2 uses optical fibers in the optical path from the light source to the collimating lens and in the optical path from the collimating lens to the spectroscope.

US Pat. No. 4,585,349 US Pat. No. 5,785,651

In an optical measurement device in which a head unit including an optical system such as a collimator lens and a controller unit including an optical unit such as a spectroscope are connected with an optical fiber as in Patent Document 2, individual differences in the optical system of the head unit are large. In order to perform highly accurate measurement, it is necessary to adjust the head unit and the controller unit in a one-to-one correspondence. Therefore, when the head part is damaged, the optical measuring device as in Patent Document 2 returns not only the head part but also the controller part to the manufacturer, and the repaired head part and controller part have a one-to-one correspondence. It was necessary to adjust with.

Furthermore, in the optical measuring device as in Patent Document 2, the head unit and the controller unit are adjusted in a one-to-one correspondence. Therefore, even when a plurality of optical measuring devices are provided, only the head unit is replaced. Thus, the layout of the apparatus cannot be changed, and it is necessary to move the head unit and the controller unit as a unit. For this reason, the optical measuring device as in Patent Document 2 has a problem that it takes time and effort when changing the layout of the device, compared to changing the layout of the device by exchanging only the head portion.

Also, information (for example, correction coefficients) adjusted between the head unit and the controller unit is stored in a storage unit provided in the head unit, and when the head unit and the controller unit are connected, the information is read from the storage unit. An optical measuring device has been developed. In this optical measuring device, since the adjusted information is stored in the head unit, it is not necessary to have a one-to-one correspondence between the head unit and the controller unit, and only the head unit is returned to the manufacturer when the head unit is damaged. It is possible to change the layout of the apparatus by exchanging only the head part.

However, in this optical measuring device, since it is necessary to provide a circuit part including a storage part in the head part, the head part becomes large. Furthermore, since information stored in the storage unit of the head unit needs to be read from the controller unit, electrical wiring other than the optical fiber is required between the head unit and the controller unit.

The present invention has been made in view of such circumstances, and optical measurement capable of providing compatibility so that the head portion can be replaced with respect to the controller portion without increasing the size of the head portion. An object is to provide an apparatus.

The optical measuring device according to the present invention includes a head unit, a controller unit, an optical fiber, and a storage unit. The head unit includes an optical system that receives light from the measurement object. The controller unit includes an optical unit that converts light received by the head unit into an electrical signal, performs an operation on the electrical signal converted by the optical unit, and outputs a measurement result. The optical fiber is an optical path that connects the head unit and the controller unit, and connects the optical system of the head unit and the optical unit of the controller unit. The storage unit is associated with each individual head unit to be manufactured, and stores information necessary for calculation performed by the controller unit as individual information of the head unit. The controller unit reads individual information from a storage unit that is physically independent of the controller unit, and performs an operation using the read individual information.

Also preferably, the storage unit has a storage medium that electrically stores the individual information, and the individual information can be read from the storage medium by connecting to the input terminal of the controller unit.

Preferably, the storage unit has a storage medium for magnetically or optically storing the individual information, and the individual information can be read from the storage medium using a reading unit built in or connected to the controller unit. It becomes.

Also preferably, the storage unit is linked to the head unit or an optical fiber connected to the head unit.

Also preferably, the storage unit is built in the connector part of the optical fiber connected to the controller unit, and can be connected to the input terminal of the controller unit by an operation of connecting the connector unit to the controller unit.

Preferably, the controller unit stores information necessary for calculation that can be used when individual information cannot be read from the storage unit.

According to the above configuration, in the optical measurement device according to the present invention, the storage unit storing the individual information of the head unit is provided in association with each individual of the manufactured head unit, and the controller unit stores the storage unit. Since the individual information of the head unit is read from the unit and the calculation is performed using the individual information, highly accurate measurement can be performed even if the head unit is replaced.

It is a schematic diagram which shows the structure of the optical measuring device which concerns on Embodiment 1 of this invention. It is a schematic diagram which shows the structure of the confocal optical system of the head part employ | adopted in the confocal measurement apparatus which concerns on Embodiment 1 of this invention. It is a schematic diagram for demonstrating the adjustment for obtaining a wavelength-distance correction coefficient in the confocal measurement apparatus which concerns on Embodiment 1 of this invention. In the confocal measurement apparatus which concerns on Embodiment 1 of this invention, it is a schematic diagram for demonstrating another structure which connects a head part and a memory | storage part. It is a schematic diagram which shows the structure of the optical measuring device which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows another structure of the optical measuring device which concerns on Embodiment 2 of this invention. It is a schematic diagram which shows the structure of the optical measuring device which concerns on Embodiment 3 of this invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
(Embodiment 1)
FIG. 1 is a schematic diagram showing a configuration of an optical measuring device according to Embodiment 1 of the present invention. The optical measurement apparatus shown in FIG. 1 is a confocal measurement apparatus 100 that measures the displacement of the measurement object 200 (change in the distance to the measurement object 200) using a confocal optical system. Examples of the measurement object 200 measured by the confocal measurement device 100 include a cell gap of a liquid crystal display panel.

The confocal measurement apparatus 100 includes a head unit 10 having a confocal optical system, a controller unit 20 optically connected via an optical fiber 11, a monitor unit 30 that displays a signal output from the controller unit 20, and will be described later. A storage unit 40 that stores individual information of the head unit 10 is provided.

The head unit 10 includes a diffractive lens 1 and an objective lens 2 disposed on the measurement object 200 side from the diffractive lens 1. The focal length of the diffractive lens 1 is larger than the difference between the distance from the diffractive lens to the objective lens and the focal length of the objective lens.

Here, the diffractive lens 1 is an optical element that causes chromatic aberration along the optical axis direction in light emitted from a light source (for example, a white light source) that emits light having a plurality of wavelengths described later. The diffractive lens 1 is an amplitude type in which a fine undulation shape such as a kinoform shape or a binary shape (step shape, step shape) is periodically formed on the surface of the lens, or the light transmittance is periodically changed. The zone plate is formed. The configuration of the diffractive lens 1 is not limited to the configuration described above.

The objective lens 2 is an optical element that condenses the light generated by the diffractive lens 1 on the measurement object 200. The confocal measurement apparatus 100 will be described below in the case where a white light source is used as a light source that emits light of a plurality of wavelengths.

The light emitted from the white light source is guided to the head unit 10 through the optical fiber 11. In order to effectively use the light emitted from the optical fiber 11 in the diffraction lens 1, it is necessary to make the numerical aperture (NA) of the optical fiber 11 and the numerical aperture of the diffraction lens 1 coincide. Therefore, the condensing lens 3 is provided between the optical fiber 11 and the diffractive lens 1 so that the numerical aperture of the optical fiber 11 and the numerical aperture of the diffractive lens 1 are adjusted.

The optical fiber 11 is an optical path from the head unit 10 to the controller unit 20 and also functions as a pinhole. That is, of the light collected by the objective lens 2, the light focused on the measurement object 200 is focused on the opening of the optical fiber 11. Therefore, the optical fiber 11 functions as a pinhole that blocks light having a wavelength that is not focused on the measurement target 200 and allows light focused on the measurement target 200 to pass. By using the optical fiber 11 in the optical path from the head unit 10 to the controller unit 20, a pinhole is not necessary.

Since the confocal measurement device 100 uses the optical fiber 11 in the optical path from the head unit 10 to the controller unit 20, the head unit 10 can be moved flexibly with respect to the controller unit 20.

The controller unit 20 includes a white LED (Light Emitting Diode) 21 that is a white light source, a branch optical fiber 22, a spectroscope 23, an image sensor 24, and a control circuit unit 25. Although the white LED 21 is used as the white light source, other light sources may be used as long as the light source can emit white light.

The branch optical fiber 22 has one optical fiber 22a on the side connected to the optical fiber 11 and two

optical fibers

22b and 22c on the opposite side. The optical fiber 22b is connected to the white LED 21 and the optical fiber 22c is connected to the spectroscope 23. Therefore, the branch optical fiber 22 can guide the light emitted from the white LED 21 to the optical fiber 11 and guide the light returning from the head unit 10 via the optical fiber 11 to the spectroscope 23.

The spectroscope 23 includes a concave mirror 23a that reflects light returning from the head unit 10, a diffraction grating 23b that receives light reflected by the concave mirror 23a, and a condenser lens 23c that collects light emitted from the diffraction grating 23b. ing. The spectroscope 23 may be of any configuration such as a Zernitana type or a Littrow type as long as the light returning from the head unit 10 can be divided for each wavelength.

The image sensor 24 is a line CMOS (Complementary Metal Oxide Semiconductor) or a CCD (Charge Coupled Device) that measures the intensity of light emitted from the spectroscope 23. Here, in the confocal measurement device 100, the spectroscope 23 and the imaging device 24 constitute a measurement unit that measures the intensity of light returning from the head unit 10 for each wavelength. Note that the measurement unit may be configured by a single image sensor 24 such as a CCD as long as the intensity of light returning from the head unit 10 can be measured for each wavelength. Further, the image sensor 24 may be a two-dimensional CMOS or a two-dimensional CCD.

The control circuit unit 25 includes a spectral control circuit unit 25a that controls operations of the white LED 21 and the image sensor 24, and a signal processing circuit unit 25b that processes a signal output from the image sensor 24. Furthermore, the control circuit unit 25 is electrically connected to the monitor unit 30 and an input interface 25c for inputting signals for adjusting the operations of the white LED 21 and the image sensor 24 and individual information of the head unit 10 described later. And an output interface 25d for outputting the result of processing the signal of the image sensor 24.

The controller unit 20 includes a spectroscope 23, an image sensor 24, and a spectral control circuit unit 25a of the control circuit unit 25, and constitutes an optical unit that converts light received by the head unit 10 into an electrical signal. The signal processing circuit unit 25b of the control circuit unit 25 performs an operation on the electric signal converted by the optical unit and outputs a measurement result.

The monitor unit 30 displays the signal output from the image sensor 24. The monitor unit 30 draws a spectrum waveform of light returning from the head unit 10 and displays that the distance of the measurement target 200 is, for example, 123.45 μm.

The storage unit 40 is associated with each individual head unit 10 to be manufactured, and stores information on the head unit 10 necessary for calculations performed by the controller unit 20 as individual information. Here, in the case of the confocal measurement apparatus 100 that measures the displacement of the measurement object 200, the individual information of the head unit 10 is a wavelength-distance correction coefficient described later.

Next, the wavelength-distance correction coefficient that is individual information of the head unit 10 will be described. FIG. 2 is a schematic diagram showing the configuration of the confocal optical system of the head unit 10 employed in the confocal measurement apparatus 100 according to Embodiment 1 of the present invention. The configuration of the confocal optical system shown in FIG. 2 is a configuration in which the objective lens 2 is arranged closer to the measurement object 200 than the diffraction lens 1. That is, in the confocal measurement device 100, light emitted from the end of the optical fiber 11 is caused to cause chromatic aberration along the optical axis direction by the diffraction lens 1, and the light having the chromatic aberration is applied to the measurement object 200 by the objective lens 2. Condensate.

First, in the optical system of the confocal measurement device 100 shown in FIG. 2, the distance from the end of the optical fiber 11 to the diffraction lens 1 is a, the distance from the diffraction lens 1 to the objective lens 2 is b, and the objective lens 2 is objective. Let c (λ) be the distance to the point of focus by the lens 2. Further, in the diffractive lens 1, the focal length at the light wavelength λ ₀ is f _d0 and the effective diameter is φ _a . Note that the distance a is equal to the focal length _fd0 . The objective lens 2 has a focal length of f _o and an effective diameter of φ _b (λ).

Then, in the optical system of the confocal measurement apparatus 100 shown in FIG. 2, the distance a from the end of the optical fiber 11 to the diffractive lens 1 and the diffractive lens 1 to the diffractive lens 1 are determined using a general lens formula. The relationship between the distance a _g (λ) (not shown) to the point where the light emitted from the optical fiber 11 is in focus and the focal length f _d (λ) of the diffractive lens 1, and from the diffractive lens 1 to the objective lens 2 Of the objective lens 2, the distance c (λ) from the objective lens 2 to the focal point by the objective lens 2, and the focal length f _o of the objective lens 2 can be expressed as (Equation 1). The chromatic aberration of the objective lens 2 is assumed to be negligible.

Furthermore, the effective diameter φ _b (λ) of the objective lens 2 can be expressed as (Equation 2) using the relationship of (Equation 1).

Further, the distance c (λ) from the objective lens 2 to the point focused by the objective lens 2 can be expressed as (Equation 3) using the relationship of (Equation 1) and (Equation 2).

Theoretically, the relationship between the distance c (λ) from the objective lens 2 to the focal point by the objective lens 2 and the wavelength can be expressed as (Equation 3). In order to perform measurement with a large difference and high accuracy, it is necessary to adjust the head unit 10 and the controller unit 20 in a one-to-one correspondence. The confocal measurement apparatus 100 stores the wavelength-distance correction coefficient obtained by this adjustment in the storage unit 40 as individual information of the head unit 10 and associates it with the optical fiber 11 connected to the head unit 10. Even if the head unit 10 associated with the unit 40 is replaced, highly accurate measurement can be performed by using the individual information of the head unit 10.

Here, the adjustment for obtaining the wavelength-distance correction coefficient will be specifically described with reference to the drawings. FIG. 3 is a schematic diagram for explaining adjustment for obtaining a wavelength-distance correction coefficient in the confocal measurement apparatus 100 according to Embodiment 1 of the present invention.

First, as shown in FIG. 3A, the confocal measurement apparatus 100 moves the measurement object 200 placed on an automatic stage (not shown) within a measurable range, and determines the peak wavelength from the measurement waveform for each distance. Read. The relationship of each distance with respect to the peak wavelength read from the measurement waveform can be expressed as a graph of FIG. 3B, and the relational expression between the distance c (λ) and the wavelength λ is c (λ) = αλ ⁿ + βλ. ^n-1 +... can be calculated. Here, α and β are wavelength-distance correction coefficients, and the storage unit 40 stores the wavelength-distance correction coefficients.

Although not shown, the storage unit 40 includes a flash memory that is a non-volatile memory, a control circuit that stores and reads information in and from the flash memory, and an interface that inputs and outputs information. Then, the storage unit 40 connects the interface to the input interface 25c of the controller unit 20 (for example, by fitting the connectors together), so that the information on the wavelength-distance correction coefficient obtained by the adjustment is electrically stored in the flash memory. It can be stored and read.

The confocal measurement device 100 associates the storage unit 40 storing the wavelength-distance correction coefficient information with the head unit 10 so that the head unit 10 is associated with the attached head unit 10 when the head unit 10 is installed. The wavelength-distance correction coefficient can be read from the storage unit 40 by the controller unit 20. The confocal measurement device 100 performs a predetermined calculation in the signal processing circuit unit 25b using the read wavelength-distance correction coefficient, and thus takes into account individual differences in the optical system of the attached head unit 10; The displacement of the measurement object 200 can be measured with high accuracy.

Note that the storage unit 40 is not limited to a nonvolatile memory as long as it can electrically store a wavelength-distance correction coefficient. The controller unit 20 is not limited to the case where the wavelength-distance correction coefficient is read out by directly connecting to the storage unit 40 via a connector. For example, the controller unit 20 is connected to the storage unit 40 in a non-contact manner via radio waves. Then, the wavelength-distance correction coefficient may be read out.

Furthermore, in the confocal measurement apparatus 100 shown in FIG. 1, the storage unit 40 is associated with the optical fiber 11 connected to the head unit 10 with a string, thereby associating the storage unit 40 with the head unit 10. The confocal measurement device 100 according to the present invention is not limited to this. For example, instead of tying the storage unit 40 to the optical fiber 11 connected to the head unit 10 with a string, the head unit 10 and the storage unit 40 are related by directly tying the storage unit 40 to the head unit 10 with a string. Also good.

FIG. 4 is a schematic diagram for explaining another configuration relating the head unit 10 and the storage unit 40 in the confocal measurement apparatus 100 according to Embodiment 1 of the present invention. As shown in FIG. 4, the optical fiber 11 connected to the head unit 10 incorporates a storage unit 40 in the connector unit 12 connected to the controller unit 20, and the connector unit 12 is parallel to the terminal 13 of the optical fiber 11. A terminal 40a of the storage unit 40 is provided. The input interface 25 c of the controller unit 20 is provided with an input terminal 25 c 1 that fits with the terminal 13 of the optical fiber 11 and an input terminal 25 c 2 that fits with the terminal 40 a of the storage unit 40. Therefore, by inserting the connector part 12 of the optical fiber 11 into the input interface 25c of the controller part 20, the head part 10 is optically connected to the controller part 20, and the storage part 40 is electrically connected to the controller part 20. Can be connected. Therefore, the confocal measurement apparatus 100 shown in FIG. 4 can attach the head unit 10 without being aware of the operation of reading the wavelength-distance correction coefficient stored in the storage unit 40 by the user into the controller unit 20. it can.

Further, the relationship between the head unit 10 and the storage unit 40 is not necessarily physically linked to the head unit 10 and the storage unit 40, and the same number as the serial number attached to the head unit 10 is stored. You may affix on the part 40. FIG.

As described above, the confocal measurement apparatus 100 according to Embodiment 1 of the present invention relates the storage unit 40 storing the wavelength-distance correction coefficient to each individual head unit 10 to be manufactured. Since the controller unit 20 reads the wavelength-distance correction coefficient from the storage unit 40 and performs calculation using the wavelength-distance correction coefficient, high-precision measurement can be performed even if the head unit 10 is replaced. it can. In addition, the confocal measurement device 100 according to the first embodiment of the present invention is compatible with the controller unit 20 so that the head unit 10 can be replaced, so that the head unit 10 is damaged. Sometimes only the head 10 can be returned to the manufacturer. Furthermore, in the case of having a plurality of confocal measurement devices 100, the layout of the device can be changed by replacing only the head unit 10. Note that the confocal measurement apparatus 100 according to the first embodiment of the present invention does not include a storage unit that stores the wavelength-distance correction coefficient in the head unit 10, and thus the head unit 10 can be downsized.

Here, the individual information of the head unit 10 to be stored in the storage unit 40 is not limited to the wavelength-distance correction coefficient, but device-related information such as the serial number, model, and model of the device, measurement center distance, and measurement possible Software-related information such as range information, measurement-related information such as the presence / absence of a workpiece-specific correspondence mode, presence / absence of a sensitivity adjustment mode, automatic light quantity control coefficient, and version information may be included.

In the optical measurement device according to the first embodiment of the present invention, the confocal measurement device 100 that measures the displacement of the measurement target 200 using the confocal optical system has been described. However, the present invention is not limited to this. It is not something. As long as the optical measuring device according to the present invention is configured to connect the optical system of the head unit and the optical unit of the controller unit with an optical fiber, the film thickness meter for measuring the film thickness of the measuring object, the color of the measuring object, It may be a color sensor that measures the wavelength, a photometer that measures the amount of light of the measurement object, or the like.

(Embodiment 2)
In the optical measuring device according to the second embodiment of the present invention, a configuration of a storage unit in which individual information of the head unit is stored not optically but optically or magnetically will be described. FIG. 5 is a schematic diagram showing a configuration of an optical measurement apparatus according to Embodiment 2 of the present invention. The optical measurement device shown in FIG. 5 is also a confocal measurement device 110, and is a diagram other than the configuration of the storage unit 41 that optically stores the individual information of the head unit 10 and the reader (reading unit) 27 of the storage unit 41. Since the configuration is the same as that of the confocal measurement apparatus 100 shown in FIG. 1, the same components are denoted by the same reference numerals, and detailed description thereof will not be repeated.

The storage unit 41 is a two-dimensional barcode that stores individual information of the head unit 10 such as a wavelength-distance correction coefficient. The reader 27 built in the controller unit 20 is a barcode reader or camera that reads the two-dimensional barcode of the storage unit 41. As shown in FIG. 5, in the confocal measurement device 110, the tag describing the two-dimensional barcode in the storage unit 41 is tied to the optical fiber 11 connected to the head unit 10 with a string. Therefore, when the head unit 10 is attached to the controller unit 20, the confocal measurement device 110 stores the two-dimensional barcode described on the tag in the controller unit 20 by the reader 27 and stores it in the storage unit 41. The wavelength-distance correction coefficient can be read out.

Note that the storage unit 41 is not limited to a two-dimensional barcode, and may be a one-dimensional barcode, a numeric string, or the like as long as the reader 27 that optically reads information can read the information. Further, the storage unit 41 may be an optical disc (CD-ROM, DVD-ROM, etc.) that optically stores individual information of the head unit 10. When the storage unit 41 is an optical disk, the reader 27 is a drive device that reads individual information of the head unit 10 from the optical disk.

Further, the relationship between the head unit 10 and the storage unit 40 is not limited to the case where the tag describing the two-dimensional barcode of the storage unit 41 is tied to the optical fiber 11 connected to the head unit 10 with a string. Alternatively, a sticker describing the two-dimensional barcode of the storage unit 41 may be attached to the head unit 10.

Furthermore, the storage unit 41 may be a magnetic card, a magnetic disk, or the like in which individual information of the head unit 10 is magnetically stored. When the storage unit 41 is a magnetic card or a magnetic disk, the reader 27 is a reader or a drive device that reads individual information of the head unit 10 from the magnetic card or the magnetic disk. The storage unit 41 may be a storage medium in which the individual information of the head unit 10 is stored by combining at least two methods among electrical, optical, and magnetic methods. For example, the storage unit 41 may be a magneto-optical disk that combines an optical method and a magnetic method, a magnetoresistive memory that combines an electric method and a magnetic method, or the like.

FIG. 6 is a schematic diagram showing another configuration of the optical measuring device according to the second embodiment of the present invention. The optical measurement device shown in FIG. 6 is also a confocal measurement device 120, and is the same as the configuration of the confocal measurement device 110 shown in FIG. 5 except for the configuration of the reader 28 of the storage unit 41. A detailed description will not be repeated with reference numerals.

The reader 28 is provided outside the controller unit 20 and is connected via electrical wiring. Specifically, when the storage unit 41 is a two-dimensional barcode that stores individual information of the head unit 10 such as a wavelength-distance correction coefficient, the reader 28 is connected to the controller unit 20 by wiring, and the storage unit 41 This is a bar code reader that reads the two-dimensional bar code. The confocal measurement device 120 is a two-dimensional bar written on the tag by the reader 28 without bringing the tag (storage unit 41) connected to the optical fiber 11 connected to the head unit 10 with a string close to the controller unit 20. The wavelength can be read and the wavelength-distance correction coefficient stored in the storage unit 41 can be read.

Further, the confocal measurement device 120 connects the reader 28 suitable for the method to the controller unit 20 even if the storage unit 41 associated with the head unit 10 stores the individual information in a different method. The wavelength-distance correction coefficient stored in the storage unit 41 can be read out.

As described above, in the

confocal measurement devices

110 and 120 according to the second embodiment of the present invention, the individual information of the head unit 10 is optically or magnetically stored in the storage unit 41, and the head is read by the corresponding reader 27. By reading the individual information of the unit 10, highly accurate measurement can be performed even if the head unit 10 is replaced. In addition, the confocal measurement device 120 can increase the degree of freedom of the position where the storage unit 41 is provided and the storage method by providing the reader 28 outside the controller unit 20.

In addition, the confocal measuring device 120 is provided outside the controller unit 20 and stored in the reader 28 with respect to the storage unit 40 that electrically stores the individual information of the head unit 10 as shown in FIG. The individual information of the head unit 10 stored in the unit 40 can be read.

(Embodiment 3)
The optical measurement apparatus according to Embodiment 3 of the present invention includes a controller unit that includes a physically independent spectroscope unit and a signal processing unit. FIG. 7 is a schematic diagram showing the configuration of the optical measurement apparatus according to the third embodiment of the present invention. The optical measuring device shown in FIG. 7 is also a confocal measuring device 130, except that the controller unit 20 including a physically independent spectroscope unit 71 and a signal processing unit 72 is provided, and the optical measuring device shown in FIG. Since the configuration is the same as that of the focus measuring apparatus 100, the same components are denoted by the same reference numerals and detailed description thereof will not be repeated.

The controller unit 20 includes a spectroscope unit 71, a signal processing unit 72, and a wiring 73 that electrically connects the spectroscope unit 71 and the signal processing unit 72. The spectroscope unit 71 includes a white LED 21 that is a white light source, a branch optical fiber 22, a spectroscope 23, an image sensor 24, and a spectroscopic control circuit unit 25 a of a control circuit unit 25. The signal processing unit 72 includes a signal processing circuit unit 25b of the control circuit unit 25, an input interface 25c, and an output interface 25d. Although not shown, the confocal measurement device 130 is connected to the monitor unit 30 via the output interface 25d of the signal processing unit 72.

The wiring 73 is an electrical path for supplying the signal output from the image sensor 24 of the spectroscope unit 71 to the signal processing unit 72 and supplying necessary power from the signal processing unit 72 to the spectroscope unit 71. .

The confocal measurement device 130 can be configured to connect a plurality of spectrometer units 71 to one signal processing unit 72 by dividing the controller unit 20 into a spectrometer unit 71 and a signal processing unit 72. The whole can be reduced in size.

Further, as described in the first embodiment, the confocal measurement device 130 reads the wavelength-distance correction coefficient stored in the storage unit 40 with the signal processing unit 72 of the controller unit 20, and the read wavelength-distance correction coefficient. By using the signal processing circuit unit 25b to perform a predetermined calculation, the displacement of the measurement target 200 can be measured with high accuracy in consideration of individual differences in the optical system of the attached head unit 10. it can. In addition, when connecting the several spectrometer part 71, the confocal measuring device 130 is provided with the signal processing circuit part 25b corresponding to the spectrometer part 71 to connect, and the memory | storage part 40 is provided in each signal processing circuit part 25b. The wavelength-distance correction coefficient stored in is read out. Of course, the confocal measurement device 130 may have a function of reading the wavelength-distance correction coefficient stored in the storage unit 40 on the spectroscope unit 71 side instead of the signal processing unit 72 side.

Further, the confocal measurement device 130 may include a representative value holding unit 75 in the signal processing unit 72 as shown in FIG. The representative value holding unit 75 stores information (representative value (default value) of the head unit 10) necessary for calculation that can be used when the individual information of the head unit 10 cannot be read from the storage unit 40. It is.

Here, the representative value of the head unit 10 is a value obtained by averaging the individual differences of the optical system of the head unit 10, and the displacement of the measurement object 200 cannot be measured with high accuracy. This is information (for example, wavelength-distance correction coefficient) of the head unit 10 for performing measurement.

The confocal measurement device 130 is provided with the representative value holding unit 75 so that the storage unit 40 associated with the head unit 10 is lost or the device for reading information from the storage unit 40 is broken. Even when the individual information of the head unit 10 cannot be read from the storage unit 40, the displacement of the measurement object 200 can be easily measured although it is not highly accurate.

In addition, the confocal measurement device 130 is provided with the representative value holding unit 75, so that the accuracy is not necessary and simple confirmation is performed, or the head unit 10 is stored in the storage unit 40 in the case of emergency treatment. It is possible to omit the work of reading the individual information. Specifically, in the case of performing a simple check without accuracy, or in the case of use as a first aid, sales promotion activities, simple testing, introduction, simple operation confirmation during installation, maintenance, head unit 10 There is a simple operation check at the time of replacement.

The representative value holding unit 75 is not limited to the case where the representative value holding unit 75 is provided in the confocal measurement device 130 shown in FIG. 7, but the confocal measurement device 100 shown in FIG. 1, the confocal measurement device 110 shown in FIG. You may provide in the confocal measurement apparatus 120 shown in FIG.

As described above, the confocal measurement device 130 according to Embodiment 3 of the present invention increases the degree of freedom of the device configuration by dividing the controller unit 20 into the spectroscope unit 71 and the signal processing unit 72, and the entire apparatus. Can be miniaturized. Further, the confocal measurement device 130 according to the third embodiment of the present invention is provided with the representative value holding unit 75, so that the individual information of the head unit 10 cannot be read from the storage unit 40 easily. The displacement of the measurement object 200 can be measured.

The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is defined by the terms of the claims, rather than the description above, and is intended to include any modifications within the scope and meaning equivalent to the terms of the claims.

1 diffractive lens, 2 objective lens, 3 condenser lens, 10 head part, 11, 22a, 22b, 22c optical fiber, 12 connector part, 13, 40a terminal, 20 controller part, 22 branch optical fiber, 23 spectroscope, 23a Concave mirror, 23b diffraction grating, 24 image sensor, 25 control circuit unit, 25a spectral control circuit unit, 25b signal processing circuit unit, 25c1, 25c2 input terminal, 25c input interface, 25d output interface, 27, 28 reader, 30 monitor Unit, 40, 41 storage unit, 71 spectroscope unit, 72 signal processing unit, 73 wiring, 75 representative value holding unit, 100, 110, 120, 130 confocal measurement device, 200 measurement object.

Claims

An optical measurement device that performs measurement on a measurement object using light,
A head portion (10) including an optical system for receiving light from the measurement object;
A controller unit (20) that includes an optical unit that converts light received by the head unit (10) into an electrical signal, performs an operation on the electrical signal converted by the optical unit, and outputs a measurement result;
An optical fiber (11) serving as an optical path connecting the head unit (10) and the controller unit (20) and connecting the optical system of the head unit (10) and the optical unit of the controller unit (20). When,
A storage unit that stores information necessary for the calculation performed by the controller unit (20) as individual information of the head unit (10), which is associated with each individual unit of the head unit (10) to be manufactured. 40, 41), and the controller unit (20) reads and reads the individual information from the storage unit (40, 41) that is physically independent of the controller unit (20). An optical measurement device that performs the calculation using the individual information.
The storage unit (40, 41) has a storage medium for electrically storing the individual information, and is connected to the input terminal (25c2) of the controller unit (20), so that the individual information is stored from the storage medium. The optical measuring device according to claim 1, wherein the optical measuring device can be read out.
The storage unit (40, 41) has a storage medium for magnetically or optically storing the individual information, and the reading unit built in or connected to the controller unit (20) is used to store the individual information from the storage medium. The optical measurement device according to claim 1, wherein individual information can be read.
The optical measurement device according to claim 2 or 3, wherein the storage unit (40, 41) is linked to the head unit (10) or the optical fiber (11) connected to the head unit (10). .
The storage unit (40, 41) is built in a connector unit of the optical fiber (11) connected to the controller unit (20), and the controller unit is operated by connecting the connector unit to the controller unit (20). The optical measurement device according to claim 2, wherein the optical measurement device can be connected to the input terminal (25 c 2) of the unit (20).
The controller unit (20) stores information necessary for the calculation that can be used when the individual information cannot be read from the storage unit (40, 41). Item 4. The optical measurement device according to any one of Items 3 to 3.