TW201325336A - Copper foil for printed circuit - Google Patents

Copper foil for printed circuit Download PDF

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TW201325336A
TW201325336A TW101140645A TW101140645A TW201325336A TW 201325336 A TW201325336 A TW 201325336A TW 101140645 A TW101140645 A TW 101140645A TW 101140645 A TW101140645 A TW 101140645A TW 201325336 A TW201325336 A TW 201325336A
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layer
nickel
copper foil
copper
printed circuit
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TW101140645A
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TWI590719B (en
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Hideta Arai
Atsushi Miki
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Jx Nippon Mining & Metals Corp
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    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/38Improvement of the adhesion between the insulating substrate and the metal
    • H05K3/382Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal
    • H05K3/384Improvement of the adhesion between the insulating substrate and the metal by special treatment of the metal by plating
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/38Electroplating: Baths therefor from solutions of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/562Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of iron or nickel or cobalt
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00Electroplating: Baths therefor
    • C25D3/02Electroplating: Baths therefor from solutions
    • C25D3/56Electroplating: Baths therefor from solutions of alloys
    • C25D3/58Electroplating: Baths therefor from solutions of alloys containing more than 50% by weight of copper
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/10Electroplating with more than one layer of the same or of different metals
    • C25D5/12Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium
    • C25D5/14Electroplating with more than one layer of the same or of different metals at least one layer being of nickel or chromium two or more layers being of nickel or chromium, e.g. duplex or triplex layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/60Electroplating characterised by the structure or texture of the layers
    • C25D5/605Surface topography of the layers, e.g. rough, dendritic or nodular layers
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/627Electroplating characterised by the visual appearance of the layers, e.g. colour, brightness or mat appearance
    • CCHEMISTRY; METALLURGY
    • C25ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25DPROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00Electroplating characterised by the article coated
    • C25D7/06Wires; Strips; Foils
    • C25D7/0614Strips or foils
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/09Use of materials for the conductive, e.g. metallic pattern
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/03Conductive materials
    • H05K2201/0332Structure of the conductor
    • H05K2201/0335Layered conductors or foils
    • H05K2201/0355Metal foils

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Parts Printed On Printed Circuit Boards (AREA)
  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Provided is a roughened copper foil that has a black surface and good etching properties. This copper foil for a printed circuit has a non-black roughened layer and a nickel-tungsten alloy plating layer formed in this order on at least one of the surfaces of the copper foil, and the amount of nickel in the nickel-tungsten alloy plating layer is 2,000 [mu]g/dm2 or more.

Description

印刷電路用銅箔 Copper foil for printed circuit

本發明係關於一種印刷電路用銅箔,且係關於例如適合於精細圖案印刷電路及磁頭用FPC(Flexible Printed Circuit,可撓性印刷電路)之印刷電路用銅箔。 The present invention relates to a copper foil for a printed circuit, and is related to, for example, a copper foil for a printed circuit suitable for a fine pattern printed circuit and a FPC (Flexible Printed Circuit) for a magnetic head.

銅及銅合金箔(以下稱為銅箔)非常有助於電氣‧電子相關產業之發展,尤其是,作為印刷電路材料成為不可或缺之存在。一般而言,印刷電路用銅箔係於合成樹脂板、膜等絕緣基板經由接著劑、或不使用接著劑而於高溫高壓下進行積層接著,從而製造覆銅積層板,之後為了形成所需之電路,經由抗蝕劑塗佈及曝光步驟而印刷必需之電路之後,實施除去多餘部分之蝕刻處理。 Copper and copper alloy foils (hereinafter referred to as copper foils) contribute greatly to the development of electrical and electronic related industries, and in particular, they are indispensable as printed circuit materials. In general, a copper foil for a printed circuit is laminated on an insulating substrate such as a synthetic resin sheet or a film via an adhesive or a high temperature and high pressure without using an adhesive, thereby producing a copper clad laminate, and then forming a desired copper sheet. After the necessary circuit is printed by the resist coating and exposure steps, an etching process for removing excess portions is performed.

最終,焊接所需之元件,而形成電子裝置用之各種印刷電路板。 Finally, the required components are soldered to form various printed circuit boards for electronic devices.

於覆銅積層板中,絕緣基板與導電性材料之接著性係重要特性之一,為了提昇與絕緣基板之接著性,通常實施被稱作粗化處理之於銅箔表面形成凹凸的表面處理。例如存在如下方法:於電解銅箔之M面(粗糙面),利用硫酸銅酸性鍍浴,使多數銅電沈積為樹枝狀或小球狀而形成微細之凹凸,並且藉由抓固效果而改善接著性。 In the copper clad laminate, one of the important properties of the insulating substrate and the conductive material is one of the important characteristics, and in order to improve the adhesion to the insulating substrate, a surface treatment called roughening is performed on the surface of the copper foil to form irregularities. For example, there is a method in which, on the M surface (rough surface) of the electrolytic copper foil, a copper sulfate acid plating bath is used to electrodeposit a plurality of copper into a dendritic or small spherical shape to form fine irregularities, and is improved by the grasping effect. Follow-up.

又,發展利用電沈積銅粒之粗化處理的技術,眾所周知有如下技術:例如如日本特開平4-96395號公報(專利文獻1)及日本特開平10-18075號公報(專利文獻2)之 記載,於銅箔之表面進行利用鍍銅-鈷-鎳合金之粗化處理。 In addition, as a technique for the roughening treatment of the electrodeposited copper particles, there is known a technique in which, for example, Japanese Patent Laid-Open No. Hei 4-96395 (Patent Document 1) and Japanese Patent Laid-Open No. Hei 10-18075 (Patent Document 2) are known. It is described that the surface of the copper foil is subjected to a roughening treatment using a copper-cobalt-nickel alloy.

[專利文獻1]日本特開平4-96395號公報 [Patent Document 1] Japanese Patent Laid-Open No. Hei 4-96395

[專利文獻2]日本特開平10-18075號公報 [Patent Document 2] Japanese Patent Laid-Open No. 10-18075

作為印刷電路用銅箔所要求之另一個重要之特性,可列舉黑色這一方面。第一,黑色具有對位精度及熱吸收率高之優勢。於印刷電路板之製作過程中,藉由自動步驟而搭載IC或電阻、電容器等零件,此時,藉由感測器讀取電路且進行貼片(chip mount)。此時,有時通過Kapton等膜而進行粗化處理面之對位。又,形成通孔時之定位亦同樣。而且,處理面越接近黑色,光之吸收越優良,因此定位之精度變高。 Another important characteristic required for the copper foil for printed circuits is black. First, black has the advantage of high alignment accuracy and high heat absorption rate. In the process of manufacturing a printed circuit board, an IC, a resistor, a capacitor, and the like are mounted by an automatic step. At this time, the circuit is read by the sensor and chip mounted. At this time, the alignment of the roughened surface may be performed by a film such as Kapton. Moreover, the positioning at the time of forming the through hole is also the same. Further, the closer the processing surface is to black, the better the absorption of light, and thus the accuracy of positioning becomes high.

第二,於製作印刷電路板之時,多數情況為一面加熱銅箔及絕緣基板一面使其固化而接著。此時,於藉由使用遠紅外線、紅外線等長波而進行加熱之情況下,處理面之色調較黑者加熱效率變得較佳。 Second, when manufacturing a printed circuit board, in many cases, the copper foil and the insulating substrate are heated while being solidified. In this case, when heating is performed by using a long wave such as far infrared ray or infrared ray, the heating efficiency of the black color of the treated surface is better.

就此方面而言,於利用電沈積銅粒之傳統粗化處理中,由於表面變紅故而不合適。又,根據專利文獻1或專利文獻2中記載之藉由鍍銅-鈷-鎳合金而進行之粗化處理,雖然可獲得黑色表面,但由於形成於銅箔之表面之由鍍銅-鈷-鎳合金構成的粗化粒子之形狀為樹枝狀,故而存在自該樹枝之上部或根部剝落,通常被稱作落粉現象之問題。該落粉現象係難解決之問題,儘管鍍銅-鈷-鎳合 金之粗化處理層具有與樹脂層之密合性優異、且耐熱性亦優異之特徵,但粒子容易因外力而脫落,並產生因處理中之「摩擦」所致之剝離、因剝離粉所致之輥之污染、因剝離粉所致之蝕刻殘渣。 In this respect, in the conventional roughening treatment using electrodeposited copper particles, it is not suitable because the surface becomes red. Further, according to the roughening treatment by the copper-cobalt-nickel alloy described in Patent Document 1 or Patent Document 2, although a black surface can be obtained, it is formed of copper-cobalt-plated on the surface of the copper foil. The shape of the roughened particles composed of the nickel alloy is dendritic, and thus there is a problem that it is peeled off from the upper portion or the root portion of the branch, and is generally called a falling powder phenomenon. The powder falling phenomenon is difficult to solve, despite the copper-cobalt-nickel alloy The gold roughening treatment layer is excellent in adhesion to the resin layer and excellent in heat resistance. However, the particles are liable to fall off due to external force, and peeling due to "friction" during the treatment is caused by the peeling powder. The contamination caused by the roller and the etching residue due to the peeling powder.

進而,就形成精細圖案之觀點而言,亦要求於蝕刻後不存在蝕刻殘餘。 Further, from the viewpoint of forming a fine pattern, it is also required that there is no etching residue after etching.

因此,本發明之課題在於提供一種表面為黑色、且蝕刻性亦良好之粗化處理銅箔,較佳為提供一種進而落粉之問題得到改善之粗化處理銅箔。又,本發明進一步之課題在於提供一種具備此種粗化處理銅箔之覆銅積層板。 Accordingly, an object of the present invention is to provide a roughened copper foil having a black surface and excellent etchability, and it is preferable to provide a roughened copper foil having improved problems in powder falling. Further, a further object of the present invention is to provide a copper clad laminate having such a roughened copper foil.

本發明於一態樣中,係一種印刷電路用銅箔,於銅箔之至少一個表面依此序形成有非黑色之粗化處理層與鎳-鎢合金鍍層,該鎳-鎢合金鍍層之鎳量為2000μg/dm2以上。 In one aspect of the invention, a copper foil for a printed circuit is formed with a non-black roughening treatment layer and a nickel-tungsten alloy plating layer on at least one surface of the copper foil, the nickel-tungsten alloy plating nickel The amount is 2000 μg/dm 2 or more.

於本發明之印刷電路用銅箔之一實施形態中,上述鎳-鎢合金鍍層之鎳量為2000~5000μg/dm2In one embodiment of the copper foil for a printed circuit of the present invention, the nickel-tungsten alloy plating layer has a nickel content of 2000 to 5000 μg/dm 2 .

於本發明之印刷電路用銅箔之另一實施形態中,在上述鎳-鎢合金鍍層上形成有耐熱層。 In another embodiment of the copper foil for printed circuit of the present invention, the heat-resistant layer is formed on the nickel-tungsten alloy plating layer.

於本發明之印刷電路用銅箔之再另一實施形態中,在上述鎳-鎢合金鍍層上、或是形成於上述鎳-鎢合金鍍層上的耐熱層上,形成有防銹層。 In still another embodiment of the copper foil for a printed circuit of the present invention, a rustproof layer is formed on the nickel-tungsten alloy plating layer or the heat-resistant layer formed on the nickel-tungsten alloy plating layer.

於本發明之印刷電路用銅箔之再另一實施形態中,上述粗化處理層係於形成銅之一次粒子層後,在該一次粒子層上形成銅-鈷-鎳合金之二次粒子層而成者。 In still another embodiment of the copper foil for a printed circuit of the present invention, the roughening layer is formed on a primary particle layer of copper, and a secondary particle layer of a copper-cobalt-nickel alloy is formed on the primary particle layer. Founder.

於本發明之印刷電路用銅箔之再另一實施形態中,上述銅之一次粒子層之平均粒徑為0.25~0.45μm,由銅-鈷-鎳合金構成之二次粒子層之平均粒徑為0.05~0.25μm。 In still another embodiment of the copper foil for a printed circuit of the present invention, the average particle diameter of the primary particle layer of copper is 0.25 to 0.45 μm, and the average particle diameter of the secondary particle layer composed of a copper-cobalt-nickel alloy It is 0.05~0.25μm.

於本發明之印刷電路用銅箔之再另一實施形態中,上述一次粒子層及二次粒子層為電鍍層。 In still another embodiment of the copper foil for a printed circuit of the present invention, the primary particle layer and the secondary particle layer are a plating layer.

本發明於另一態樣中,係一種覆銅積層板,其具備本發明之印刷電路用銅箔。 In another aspect, the present invention provides a copper clad laminate comprising the copper foil for a printed circuit of the present invention.

本發明於再另一態樣中,係一種印刷電路板,其係以本發明之覆銅積層板為材料。 In still another aspect, the present invention is a printed circuit board using the copper clad laminate of the present invention as a material.

根據本發明,可提供一種表面為黑色、蝕刻性亦良好之粗化處理銅箔,且較佳為提供一種進而落粉之問題得到改善之粗化處理銅箔。 According to the present invention, it is possible to provide a roughened copper foil having a black surface and excellent etching properties, and it is preferable to provide a roughened copper foil having an improved problem of powder falling.

於本發明之印刷電路用銅箔之一實施形態中,於銅箔之至少一個表面,依此序形成有粗化處理層、及鎳-鎢合金鍍層。例如,可藉由於非黑色之粗化處理層上形成鎳-鎢合金鍍層而獲得黑色之表面。 In one embodiment of the copper foil for a printed circuit of the present invention, a roughened layer and a nickel-tungsten alloy plating layer are formed on at least one surface of the copper foil in this order. For example, a black surface can be obtained by forming a nickel-tungsten alloy plating layer on the non-black roughening treatment layer.

<粗化處理層> <Coarsening layer>

本發明中所使用之銅箔可為電解銅箔或壓延銅箔中之任一種。通常,於銅箔之與樹脂等絕緣基板接著之面即粗化面,以提昇積層後之銅箔之剝離強度為目的,而於脫脂後之銅箔之表面實施進行「瘤節」狀之電沈積的粗化處理。電解銅箔之M面於製造時具有凹凸,藉由粗化處理而增強電解銅箔之凸部從而使凹凸進一步增大。 The copper foil used in the present invention may be any one of an electrolytic copper foil or a rolled copper foil. Usually, the rough surface of the copper foil and the insulating substrate such as a resin is used to enhance the peeling strength of the copper foil after lamination, and the surface of the copper foil after degreasing is subjected to a "tumor" shape. The roughening treatment of the deposit. The M surface of the electrolytic copper foil has irregularities at the time of production, and the convex portion of the electrolytic copper foil is reinforced by the roughening treatment to further increase the unevenness.

於壓延銅箔與電解銅箔中,有時處理之內容略為不同。於本發明中,亦包含此種預處理及最終處理,且視需要而包含與銅箔粗化相關之眾所周知之處理,稱作「粗化處理」。 In the rolled copper foil and the electrolytic copper foil, the contents of the treatment are sometimes slightly different. In the present invention, such pretreatment and final treatment are also included, and a well-known process relating to roughening of copper foil is included as needed, and is referred to as "roughening treatment".

作為粗化處理之方法,例如可列舉於銅箔表面形成電沈積銅粒子層之方法。又,作為用於提高剝離強度之較佳之方法,存在於銅箔表面形成銅-鈷-鎳合金鍍層之方法。其中,若為單獨之銅-鈷-鎳合金鍍層,則遺留落粉之問題。因此,本發明人發現,將電沈積銅粒子層作為一次粒子層、並且於其上形成鍍銅-鈷-鎳合金之二次粒子層之方法較佳。根據該較佳之方法,不存在因處理中之「摩擦」所致之剝離、因剝離粉所致之輥之污染、因剝離粉所致之蝕刻殘渣,即,可獲得一種可抑制被稱作落粉之現象及處理不均、可提高剝離強度且可提昇耐熱性之印刷電路用銅箔。 As a method of roughening treatment, for example, a method of forming an electrodeposited copper particle layer on the surface of a copper foil can be mentioned. Further, as a preferred method for improving the peel strength, there is a method of forming a copper-cobalt-nickel alloy plating layer on the surface of a copper foil. Among them, if it is a separate copper-cobalt-nickel alloy plating layer, the problem of remaining powder is left. Therefore, the inventors have found that a method of forming an electrodeposited copper particle layer as a primary particle layer and forming a secondary particle layer of a copper-cobalt-nickel alloy thereon is preferable. According to the preferred method, there is no peeling due to "friction" in the treatment, contamination of the roll due to the peeling powder, and etching residue due to the peeling powder, that is, a kind of suppression can be called falling A copper foil for a printed circuit which has a phenomenon of powder and uneven handling, and which can improve peeling strength and can improve heat resistance.

對將電沈積銅粒子層作為一次粒子層、並且於其上形成鍍銅-鈷-鎳合金之二次粒子層而成之粗化處理層進行詳細描述。 The roughened layer obtained by forming the electrodeposited copper particle layer as a primary particle layer and forming a secondary particle layer of a copper-cobalt-nickel alloy thereon is described in detail.

若僅單純地於銅箔上形成銅-鈷-鎳合金鍍層,則由於成為樹枝狀,故而如上所述產生落粉之問題。 When the copper-cobalt-nickel alloy plating layer is formed only on the copper foil, since it is dendritic, the problem of falling powder is generated as described above.

將於銅箔上形成有銅-鈷-鎳合金鍍層之銅箔之表面的顯微鏡照片示於圖3。如該圖3所示,可看見成長為樹枝狀之微細粒子。一般而言,該圖3所示之成長為樹枝狀之微細粒子係以高電流密度製作。 A micrograph of the surface of a copper foil on which a copper-cobalt-nickel alloy plating layer is formed on a copper foil is shown in Fig. 3. As shown in Fig. 3, fine particles grown into dendrites can be seen. In general, the fine particles grown in the dendritic shape shown in Fig. 3 are produced at a high current density.

於已在此種高電流密度下進行處理之情況下,由於抑制了初始電沈積中之粒子之核生成,故而於粒子前端形成新的粒子核,因此,粒子逐漸地生長為細長之樹枝狀。 When the treatment has been carried out at such a high current density, since the nucleation of the particles in the initial electrodeposition is suppressed, a new particle nucleus is formed at the tip end of the particle, and therefore, the particle gradually grows into an elongated dendritic shape.

將形成有如圖3所示之銅-鈷-鎳合金鍍層之情況時的落粉之情況示於圖1之概念說明圖中。該落粉之原因在於如上所述於銅箔上產生樹枝狀之微細粒子,但該樹枝狀之粒子容易因外力而導致樹枝之一部分折斷,且自根部脫落。該微細之樹枝狀粒子則成為因處理中之「摩擦」所致之剝離、因剝離粉所致之輥之污染、及因剝離粉所致之蝕刻殘渣的產生原因。 The case where the powder is dropped in the case where the copper-cobalt-nickel alloy plating layer shown in Fig. 3 is formed is shown in the conceptual explanatory diagram of Fig. 1. The reason for this falling powder is that dendritic fine particles are generated on the copper foil as described above, but the dendritic particles are liable to be partially broken by the external force and fall off from the root portion. The fine dendritic particles cause peeling due to "friction" during the treatment, contamination of the roll due to the peeling powder, and generation of etching residue due to the peeling powder.

另一方面,於將電沈積銅粒子層作為一次粒子層、且於其上形成鍍銅-鈷-鎳合金之二次粒子層而成之粗化處理層之情況下,如圖2所示,於粒徑較大之一次粒子層之上,形成有粒徑比其小的二次粒子層,因此,可兼顧確保剝離強度與防止落粉。於圖4中揭示有該情況下之顯微鏡照片。就防止落粉之觀點而言,理想的是一次粒子層之平均粒徑比二次粒子層之平均粒徑大。而且,根據如下所示之實施例可知,防止落粉之最佳條件係使上述一次粒子層之平均粒徑為0.25~0.45μm、使由銅-鈷-鎳合金構成之二次粒子層之平均粒徑為0.05~0.25μm、典型的是0.1~0.25μm。 On the other hand, in the case where the electrodeposited copper particle layer is used as a primary particle layer and a roughened layer of a copper-cobalt-nickel alloy secondary particle layer is formed thereon, as shown in FIG. 2, A secondary particle layer having a particle diameter smaller than that of the primary particle layer having a large particle diameter is formed. Therefore, both the peel strength and the powder fall prevention can be ensured. A photomicrograph of this case is disclosed in FIG. From the viewpoint of preventing powder falling, it is desirable that the average particle diameter of the primary particle layer is larger than the average particle diameter of the secondary particle layer. Further, according to the examples shown below, the optimum conditions for preventing the falling powder are such that the average particle diameter of the primary particle layer is 0.25 to 0.45 μm, and the average of the secondary particle layers composed of the copper-cobalt-nickel alloy is obtained. The particle size is 0.05 to 0.25 μm, typically 0.1 to 0.25 μm.

上述一次粒子層及二次粒子層係藉由電鍍層而形成。該二次粒子之特徵為生長於上述一次粒子上的1個或複數個樹枝狀之粒子。 The primary particle layer and the secondary particle layer are formed by a plating layer. The secondary particles are characterized by one or a plurality of dendritic particles grown on the primary particles.

如上所述,將二次粒子層之平均粒徑設為較小之0.05~0.25μm,但亦可將該粒徑改稱作粒子之高度。即,亦可說抑制二次粒子之高度、且抑制粒子之剝離(落粉)為本申請發明之特徵之一。 As described above, the average particle diameter of the secondary particle layer is set to be as small as 0.05 to 0.25 μm, but the particle diameter may be referred to as the height of the particles. That is, it can be said that suppressing the height of the secondary particles and suppressing the peeling of the particles (falling powder) is one of the features of the invention of the present application.

於表面具有以此方式形成之由一次粒子層及二次粒子層構成之粗化處理層的印刷電路用銅箔與絕緣基板之接著強度可達到0.80kg/cm以上,進而接著強度可達到0.90kg/cm以上。 The bonding strength between the copper foil for a printed circuit and the insulating substrate having the roughened layer formed of the primary particle layer and the secondary particle layer formed on the surface can be 0.80 kg/cm or more, and the subsequent strength can reach 0.90 kg. /cm or more.

(銅之一次粒子之鍍敷條件) (plating conditions of primary particles of copper)

若列舉銅之一次粒子之鍍敷條件之一例,則如下所述。 An example of plating conditions of primary particles of copper is as follows.

再者,該鍍敷條件僅表示較佳之例,且銅之一次粒子係形成於銅箔上且平均粒徑扮演防止落粉之作用。因此,只要平均粒徑處於本申請發明之範圍內,則亦可為以下所示以外之鍍敷條件。本申請發明係包含該等條件者。 Further, the plating conditions are only a preferred example, and the primary particles of copper are formed on the copper foil and the average particle diameter acts to prevent falling powder. Therefore, as long as the average particle diameter is within the range of the present invention, plating conditions other than those shown below may be employed. The invention of the present application includes such conditions.

液體組成:銅10~20g/L、硫酸50~100g/L Liquid composition: copper 10~20g/L, sulfuric acid 50~100g/L

液溫:25~50℃ Liquid temperature: 25~50°C

電流密度:1~58A/dm2 Current density: 1~58A/dm 2

庫侖量:4~81As/dm2 Coulomb amount: 4~81As/dm 2

(二次粒子之鍍敷條件) (plating conditions of secondary particles)

再者,與上述同樣,該鍍敷條件僅表示較佳之例,二次粒子係形成於一次粒子上、且平均粒徑扮演防止落粉之作用。因此,只要平均粒徑處於本申請發明之範圍,則亦可為以下所示以外之鍍敷條件。本申請發明係包含該等條件者。 Further, similarly to the above, the plating conditions are only a preferred example, and the secondary particles are formed on the primary particles, and the average particle diameter acts to prevent the falling powder. Therefore, as long as the average particle diameter is within the range of the present invention, plating conditions other than those shown below may be employed. The invention of the present application includes such conditions.

液體組成:銅10~20g/L、鎳5~15g/L、鈷5~15g/L Liquid composition: copper 10~20g/L, nickel 5~15g/L, cobalt 5~15g/L

pH值:2~3 pH: 2~3

液溫:30~50℃ Liquid temperature: 30~50°C

電流密度:24~50A/dm2 Current density: 24~50A/dm 2

庫侖量:34~48As/dm2 Coulomb amount: 34~48As/dm 2

若Ni附著量未達50μg/dm2,則耐熱性變差。另一方面,若Ni附著量超過500μg/dm2,則蝕刻性降低。即,會產生蝕刻殘餘,雖並非無法進行蝕刻之程度,但變得難以形成精細圖案。較佳之Co附著量為500~2000μg/dm2,而且較佳之鎳附著量為50~300μg/dm2When the Ni adhesion amount is less than 50 μg/dm 2 , the heat resistance is deteriorated. On the other hand, when the Ni adhesion amount exceeds 500 μg/dm 2 , the etching property is lowered. That is, etching residue is generated, and although it is not impossible to perform etching, it becomes difficult to form a fine pattern. A preferred Co adhesion amount is 500 to 2000 μg/dm 2 , and a preferred nickel adhesion amount is 50 to 300 μg/dm 2 .

根據以上內容,可以說理想的是鍍銅-鈷-鎳合金之附著量係10~30mg/dm2銅-100~3000μg/dm2鈷-50~500μg/dm2鎳。該三元系合金層之各附著量僅為理想之條件,而並非否定超過該量之範圍。 From the above, it can be said that preferably copper - cobalt - nickel-alloy-based deposition amount of 10 ~ 30mg / dm 2 of copper -100 ~ 3000μg / dm 2 of cobalt -50 ~ 500μg / dm 2 of nickel. The adhesion amount of the ternary alloy layer is only an ideal condition, and does not negate the range exceeding the amount.

<黑化層> <black layer>

於粗化處理層上形成鎳-鎢合金鍍層,有助於銅箔表面之黑化。例如,上述之由一次粒子層及二次粒子層構成的粗化處理層為灰色,該一次粒子層由銅構成,該二次粒子層由銅-鈷-鎳合金構成。然而,藉由於粗化處理層之表面形成鎳-鎢合金層而可獲得黑色。製作鎳及鎢之鍍二元系合金之原因在於,可藉由鎳而獲得黑化效果,並可藉由鎢而確保蝕刻性。關於該鎳-鎢合金鍍層,就黑化之觀點而言,較佳為使鎳之附著量為2000μg/dm2以上,更佳 為3000μg/dm2以上。關於鎳-鎢合金鍍層,就黑化之觀點而言,雖無需特別設定鎳之附著量上限,但若附著量過多,經濟性亦降低,因此例如可為15000μg/dm2以下,或10000μg/dm2以下,或8000μg/dm2以下,或7000μg/dm2以下。又,於鎳-鎢合金鍍層之鎳之附著量過多之情況下,剝離強度開始降低,因此較佳為5500μg/dm2以下,更佳為5000μg/dm2以下。鎢可共存於合金鍍層中。 A nickel-tungsten alloy plating layer is formed on the roughened layer to contribute to blackening of the surface of the copper foil. For example, the roughening layer composed of the primary particle layer and the secondary particle layer is gray, and the primary particle layer is made of copper, and the secondary particle layer is made of a copper-cobalt-nickel alloy. However, black is obtained by forming a nickel-tungsten alloy layer on the surface of the roughened layer. The reason why the binary alloy of nickel and tungsten is formed is that the blackening effect can be obtained by nickel, and the etching property can be ensured by tungsten. Respect of the nickel - tungsten alloy coating, blackening on the viewpoint, preferably nickel, deposition amount of 2000μg / dm 2 or more, more preferably 3000μg / dm 2 or more. In the nickel-tungsten alloy plating layer, the upper limit of the adhesion amount of nickel is not particularly required from the viewpoint of blackening, but if the amount of adhesion is too large, the economic efficiency is also lowered. For example, it may be 15,000 μg/dm 2 or less, or 10000 μg/dm. 2 or less, or 8000 μg/dm 2 or less, or 7000 μg/dm 2 or less. Further, nickel - nickel plating layer of the excess of tungsten alloy deposition amount, the peeling strength begins to decrease, and therefore is preferably 2 or less 5500μg / dm, more preferably 5000μg / dm 2 or less. Tungsten can coexist in the alloy plating.

(形成黑化層之鍍敷條件) (plating conditions for forming a blackening layer)

代表性之鍍浴組成及鍍敷條件係如下所述。 Representative plating bath compositions and plating conditions are as follows.

液體組成:鎳10~40g/L、鎢10~30mg/L Liquid composition: nickel 10~40g/L, tungsten 10~30mg/L

pH值:3~4 pH: 3~4

液溫:35~45℃ Liquid temperature: 35~45°C

電流密度:2~3A/dm2 Current density: 2~3A/dm 2

庫侖量:15~25As/dm2 Coulomb amount: 15~25As/dm 2

<耐熱層> <heat-resistant layer>

亦可於上述鎳-鎢合金鍍層上形成耐熱層,尤其是鋅-鎳合金鍍層之耐熱層。於印刷電路之製造步驟中進行之處理進一步變為高溫,且在成為產品後之機器使用中會生熱。例如,在藉由熱壓接而將銅箔接合於樹脂之所謂二層材料中,在接合時受到300℃以上之熱。即便於此種狀況下,亦需要防止銅箔與樹脂基材之間之接合力的降低,而該鍍鋅-鎳合金有效。 A heat-resistant layer, particularly a heat-resistant layer of a zinc-nickel alloy plating layer, may also be formed on the above nickel-tungsten alloy plating layer. The processing performed in the manufacturing steps of the printed circuit further becomes high temperature, and heat is generated during use of the machine after it becomes a product. For example, in a so-called two-layer material in which a copper foil is bonded to a resin by thermocompression bonding, heat of 300 ° C or more is applied at the time of bonding. That is, in such a case, it is also necessary to prevent a decrease in the bonding force between the copper foil and the resin substrate, and the galvanization-nickel alloy is effective.

較佳為使鋅-鎳合金鍍層之總量為150~500μg/dm2,且使鎳之比率為16~40質量%。藉此,可具有如下效 果:具備耐熱防銹層之作用,且可抑制軟蝕刻時所使用之蝕刻劑(例:H2SO4:10wt%、H2O2:2wt%之蝕刻水溶液)之滲入,並且可防止因腐蝕而使電路之接合強度弱化。若鋅-鎳合金鍍層之總量未達150μg/dm2,則耐熱力會降低而變得難以發揮作為耐熱層之作用,若鋅-鎳合金鍍層之總量超過500μg/dm2,則有耐鹽酸性變差之傾向。又,若合金層中之鎳比率之下限值未達16質量%,則軟蝕刻時的滲入量超過9μm,故而不佳。關於鎳比率之上限值40質量%,係可形成鋅-鎳合金鍍層之技術上之極限值。 Preferably, the total amount of the zinc-nickel alloy plating layer is 150 to 500 μg/dm 2 , and the ratio of nickel is 16 to 40% by mass. Thereby, it is possible to provide an effect of providing a heat-resistant rust-preventing layer and suppressing an etchant used in soft etching (for example, H 2 SO 4 : 10 wt %, H 2 O 2 : 2 wt% of an etching aqueous solution). It penetrates and prevents the joint strength of the circuit from being weakened by corrosion. If the total amount of the zinc-nickel alloy plating layer is less than 150 μg/dm 2 , the heat resistance is lowered and it becomes difficult to function as a heat-resistant layer. If the total amount of the zinc-nickel alloy plating layer exceeds 500 μg/dm 2 , it is resistant. The tendency of hydrochloric acid to deteriorate. In addition, when the lower limit of the nickel ratio in the alloy layer is less than 16% by mass, the amount of penetration during soft etching exceeds 9 μm, which is not preferable. Regarding the upper limit of the nickel ratio of 40% by mass, the technical limit value of the zinc-nickel alloy plating layer can be formed.

(形成耐熱層之鍍敷條件) (Formation conditions for forming a heat-resistant layer)

代表性之鍍浴組成及鍍敷條件係如下所述。 Representative plating bath compositions and plating conditions are as follows.

液體組成:鎳2~30g/L、鋅2~30g/L Liquid composition: nickel 2~30g/L, zinc 2~30g/L

pH值:3~4 pH: 3~4

液溫:30~50℃ Liquid temperature: 30~50°C

電流密度:1~2A/dm2 Current density: 1~2A/dm 2

庫侖量:1~2As/dm2 Coulomb amount: 1~2As/dm 2

<防銹層> <rustproof layer>

又,亦可於上述鎳-鎢合金鍍層之上、或是形成於上述鎳-鎢合金鍍層上的耐熱層上形成防銹層,尤其是鉻酸鹽層之防銹層。於本發明中,較佳之防銹處理係鉻氧化物單獨皮膜處理或鉻氧化物與鋅/鋅氧化物之混合物皮膜處理。所謂鉻氧化物與鋅/鋅氧化物之混合物皮膜處理係如下處理:利用含有鋅鹽或氧化鋅及鉻酸鹽之鍍浴,藉由電鍍而被覆由鋅或氧化鋅與鉻氧化物構成的鋅-鉻基混合物 之防銹層。 Further, a rustproof layer, particularly a rust preventive layer of a chromate layer, may be formed on the nickel-tungsten alloy plating layer or on the heat-resistant layer formed on the nickel-tungsten alloy plating layer. In the present invention, the preferred rust-preventing treatment is a chromium oxide treatment alone or a mixture of chromium oxide and zinc/zinc oxide. The coating treatment of a mixture of chromium oxide and zinc/zinc oxide is carried out by coating a zinc consisting of zinc or zinc oxide with chromium oxide by electroplating using a plating bath containing zinc or zinc oxide and chromate. -Chromium-based mixture Anti-rust layer.

作為鍍浴,代表性地使用:K2Cr2O7、Na2Cr2O7等重鉻酸鹽或CrO3等中之至少一種、例如ZnO、ZnSO4.7H2O等水溶性鋅鹽中之至少一種、與鹼金屬氫氧化物的混合水溶液。代表性之鍍浴組成及電解條件係如下所述。於下述內容中,表示浸漬鉻酸鹽處理之條件,但亦可為電解鉻酸鹽處理。 As the plating bath, at least one of a dichromate such as K 2 Cr 2 O 7 or Na 2 Cr 2 O 7 or CrO 3 or the like, for example, ZnO or ZnSO 4 is typically used. A mixed aqueous solution of at least one of a water-soluble zinc salt such as 7H 2 O and an alkali metal hydroxide. Representative plating bath compositions and electrolysis conditions are as follows. The conditions for impregnating the chromate treatment are shown below, but may also be an electrolytic chromate treatment.

(形成防銹層之鍍敷條件) (Formation conditions for forming a rustproof layer)

液體組成:重鉻酸鉀1~10g/L、鋅0~5g/L Liquid composition: potassium dichromate 1~10g/L, zinc 0~5g/L

pH值:3~4 pH: 3~4

液溫:50~60℃ Liquid temperature: 50~60°C

電流密度:0~2A/dm2(用於浸漬鉻酸鹽處理) Current density: 0~2A/dm 2 (for impregnation chromate treatment)

庫侖量:0~2As/dm2(用於浸漬鉻酸鹽處理) Coulomb amount: 0~2As/dm 2 (for impregnation chromate treatment)

<矽烷處理> <Hydrane treatment>

最後,視需要,以改善銅箔與樹脂基板之接著力為主要目的,亦可實施於防銹層上之至少粗化面塗佈矽烷偶合劑之矽烷處理。作為該矽烷處理中使用之矽烷偶合劑,可列舉烯烴系矽烷、環氧系矽烷、丙烯酸系矽烷、胺基系矽烷、巰基系矽烷,但可適當選擇其等而使用。 Finally, if necessary, for the purpose of improving the adhesion between the copper foil and the resin substrate, the decane treatment of the decane coupling agent may be applied to at least the roughened surface of the rustproof layer. The decane coupling agent to be used for the decane treatment may, for example, be an olefin decane, an epoxy decane, an acrylic decane, an amine decane or a decyl decane, and may be appropriately selected and used.

關於塗佈方法,可為利用矽烷偶合劑溶液之噴射之噴塗、藉由塗佈機之塗佈、浸漬、流延等中之任一種。例如,日本特公昭60-15654號中記載有如下內容:於銅箔之粗糙面側實施鉻酸鹽處理後進行矽烷偶合劑處理,藉此改善銅箔與樹脂基板之接著力。詳細情況可參照該文獻。之後, 若需要,有時以改善銅箔之延展性為目的而實施退火處理。 The coating method may be any one of spraying by spraying of a decane coupling agent solution, coating by a coater, dipping, casting, or the like. For example, Japanese Patent Publication No. Sho 60-15654 discloses a chromate treatment on a rough surface side of a copper foil and then a decane coupling agent treatment to improve the adhesion between the copper foil and the resin substrate. For details, please refer to this document. after that, If necessary, annealing treatment may be performed for the purpose of improving the ductility of the copper foil.

以此方式獲得之銅箔具有優異之耐熱性剝離強度、耐氧化性及耐鹽酸性。又,可利用CuCl2蝕刻液蝕刻150μm間距電路寬度以下之印刷電路,而且亦可進行鹼性蝕刻。又,可抑制軟蝕刻時之向電路邊緣部之滲入。 The copper foil obtained in this manner has excellent heat-resistant peel strength, oxidation resistance, and hydrochloric acid resistance. Further, a printed circuit having a circuit width of 150 μm or less can be etched by a CuCl 2 etching solution, and alkaline etching can also be performed. Further, it is possible to suppress penetration into the edge portion of the circuit during soft etching.

於軟蝕刻液中,可使用H2SO4:10Wt%、H2O2:2wt%之水溶液。處理時間及溫度可任意地調節。 In the soft etching liquid, an aqueous solution of H 2 SO 4 : 10 wt%, H 2 O 2 : 2 wt% can be used. The processing time and temperature can be adjusted arbitrarily.

作為鹼性蝕刻液,眾所周知有例如NH4OH:6莫耳/升、NH4Cl:5莫耳/升、CuCl2:2莫耳/升(溫度50℃)等溶液。 As the alkaline etching solution, for example, a solution such as NH 4 OH: 6 mol/liter, NH 4 Cl: 5 mol/liter, CuCl 2 : 2 mol/liter (temperature: 50 ° C) is known.

[實施例] [Examples]

以下基於實施例及比較例進行說明。再者,本實施例僅為一例,本發明並不限於該例。即,包含本發明中所含之其他態樣或變形。再者,作為以下之實施例之原箔,係使用標準壓延銅箔TPC。 Hereinafter, description will be made based on examples and comparative examples. Furthermore, this embodiment is merely an example, and the present invention is not limited to this example. That is, other aspects or modifications included in the present invention are included. Further, as the original foil of the following examples, a standard rolled copper foil TPC was used.

(實施例1) (Example 1)

在以下所示之條件範圍內,於壓延銅箔形成一次粒子層(Cu)、二次粒子層(鍍銅-鈷-鎳合金)。結果,可獲得一次粒徑為0.40μm、二次粒徑為0.15μm。一次粒子層及二次粒子層之平均粒徑係藉由SEM像且利用切割法而測量。一次粒子層之平均粒徑係於形成二次粒子層之前測定。 In the condition range shown below, a primary particle layer (Cu) and a secondary particle layer (copper-cobalt-nickel alloy) were formed on the rolled copper foil. As a result, a primary particle diameter of 0.40 μm and a secondary particle diameter of 0.15 μm were obtained. The average particle diameters of the primary particle layer and the secondary particle layer were measured by an SEM image and by a dicing method. The average particle diameter of the primary particle layer is measured before the formation of the secondary particle layer.

所使用之浴組成及鍍敷條件係如下所述。 The bath composition and plating conditions used are as follows.

[浴組成及鍍敷條件] [Bath composition and plating conditions] (A)一次粒子層之形成(鍍Cu) (A) Formation of primary particle layer (Cu plating)

液體組成:銅15g/L、硫酸75g/L Liquid composition: copper 15g / L, sulfuric acid 75g / L

液溫:35℃ Liquid temperature: 35 ° C

電流密度:2~58A/dm2 Current density: 2~58A/dm 2

庫侖量:8~81As/dm2 Coulomb amount: 8~81As/dm 2

(B)二次粒子層之形成(鍍Cu-Co-Ni合金) (B) Formation of secondary particle layer (Cu-Co-Ni alloy plating)

液體組成:銅15g/L、鎳8g/L、鈷8g/L Liquid composition: copper 15g / L, nickel 8g / L, cobalt 8g / L

pH值:2 pH: 2

液溫:40℃ Liquid temperature: 40 ° C

電流密度:24~31A/dm2 Current density: 24~31A/dm 2

庫侖量:34~44As/dm2 Coulomb amount: 34~44As/dm 2

其次,按以下條件,於上述二次粒子層上(粗化處理後),進而形成鎳-鎢合金鍍層。 Next, a nickel-tungsten alloy plating layer was further formed on the secondary particle layer (after the roughening treatment) under the following conditions.

(形成鎳-鎢合金鍍層之鍍敷條件) (Formation conditions for forming a nickel-tungsten alloy plating layer)

液體組成:鎳25g/L、鎢20mg/L Liquid composition: nickel 25g / L, tungsten 20mg / L

pH值:3.6 pH: 3.6

液溫:40℃ Liquid temperature: 40 ° C

再者,電流密度與庫侖量係如表1所示。 Furthermore, the current density and coulomb amount are shown in Table 1.

將結果示於表1中。於鎳-鎢合金鍍層之鎳量為2000μg/dm2以上之例中獲得了黑色,蝕刻性亦良好。 The results are shown in Table 1. In the case where the amount of nickel in the nickel-tungsten alloy plating layer was 2000 μg/dm 2 or more, black was obtained, and the etching property was also good.

再者,作為不含鎢之液體組成,於以上述條件在二次粒子層上形成鍍鎳層之情況下(編號A)為黑色,但與形成鎳-鎢合金鍍層之情況相比,結果為蝕刻性較差。 Further, in the case where a nickel plating layer is formed on the secondary particle layer under the above conditions as a liquid composition containing no tungsten, the number (No. A) is black, but compared with the case of forming a nickel-tungsten alloy plating layer, the result is Poor etchability.

‧利用顏色樣本來判斷是否為黑色。 ‧ Use color samples to determine if it is black.

‧剝離強度係藉由FR-4基材10mm電路試片而測定。 ‧ Peel strength was measured by FR-4 substrate 10 mm circuit test piece.

‧鎳-鎢合金鍍層之Ni之附著量係利用ICP對鍍敷層溶解液進行測定。 ‧ The adhesion amount of Ni in the nickel-tungsten alloy plating layer is measured by ICP for the plating layer solution.

‧落粉之評價係藉由膠帶轉印法而進行,將膠帶中完全不存在粗化粒子之轉印之情形記為◎,將局部地存在輕微之粗化粒子轉印之情形記為○,將全體可觀察到粗化粒子之轉印之情形(雖然輕微但遍佈整個面之情形)記為×。 ‧ The evaluation of the falling powder was carried out by the tape transfer method, and the case where the transfer of the roughened particles was not present in the tape was marked as ◎, and the case where the slightly roughened particles were partially transferred was recorded as ○, The case where the transfer of the roughened particles was observed as a whole (although slight but throughout the entire surface) was recorded as ×.

‧蝕刻性係藉由溶解於鹼性蝕刻液之情況下的殘渣之有無而評價。 ‧ Etchability is evaluated by the presence or absence of residue dissolved in an alkaline etching solution.

(實施例2) (Example 2)

其次,以與實施例1同樣之條件,形成一次粒子層(Cu)、二次粒子層(鍍銅-鈷-鎳合金)。進而,如表2所示,改變電流密度及庫侖量而形成鎳-鎢合金鍍層。 Next, a primary particle layer (Cu) and a secondary particle layer (copper-cobalt-nickel alloy) were formed under the same conditions as in Example 1. Further, as shown in Table 2, the current density and the coulomb amount were changed to form a nickel-tungsten alloy plating layer.

將結果示於表2中。於鎳-鎢合金鍍層之Ni附著量超過5000μg/dm2之例中可觀察到剝離強度之降低。 The results are shown in Table 2. A decrease in peel strength was observed in the case where the Ni adhesion amount of the nickel-tungsten alloy plating layer exceeded 5000 μg/dm 2 .

(實施例3) (Example 3)

在以下所示之條件範圍內,於壓延銅箔形成一次粒子 層(Cu)、二次粒子層(鍍銅-鈷-鎳合金)。所使用之浴組成及鍍敷條件係如下所述,將一次粒子電流條件及二次粒子電流條件示於表3中。其中,No.14(Cu層)、No.15(銅-鈷-鎳合金鍍層)為先前之粗化處理之參考例。 Forming primary particles in the rolled copper foil within the conditions shown below Layer (Cu), secondary particle layer (copper-cobalt-nickel alloy). The bath composition and plating conditions used are as follows, and the primary particle current conditions and the secondary particle current conditions are shown in Table 3. Among them, No. 14 (Cu layer) and No. 15 (copper-cobalt-nickel alloy plating layer) are reference examples of the previous roughening treatment.

[浴組成及鍍敷條件] [Bath composition and plating conditions] (A)一次粒子層之形成(鍍Cu) (A) Formation of primary particle layer (Cu plating)

液體組成:銅15g/L、硫酸75g/L Liquid composition: copper 15g / L, sulfuric acid 75g / L

液溫:35℃ Liquid temperature: 35 ° C

(B)二次粒子層之形成(鍍Cu-Co-Ni合金) (B) Formation of secondary particle layer (Cu-Co-Ni alloy plating)

液體組成:銅15g/L、鎳8g/L、鈷8g/L Liquid composition: copper 15g / L, nickel 8g / L, cobalt 8g / L

pH值:2 pH: 2

液溫:40℃ Liquid temperature: 40 ° C

按以下之條件形成上述二次粒子層上(粗化處理後)之鎳-鎢合金鍍層。 A nickel-tungsten alloy plating layer on the above secondary particle layer (after roughening treatment) was formed under the following conditions.

(形成鎳-鎢合金鍍層之鍍敷條件) (Formation conditions for forming a nickel-tungsten alloy plating layer)

液體組成:鎳25g/L、鎢20mg/L Liquid composition: nickel 25g / L, tungsten 20mg / L

pH值:3.6 pH: 3.6

液溫:40℃ Liquid temperature: 40 ° C

電流密度:2A/dm2 Current density: 2A/dm 2

庫侖量:20As/dm2 Coulomb amount: 20As/dm 2

再者,No.14、15、16中並非形成鎳-鎢合金鍍層,而是形成Co-Ni合金鍍層。 Further, in No. 14, 15, and 16, a nickel-tungsten alloy plating layer was not formed, but a Co-Ni alloy plating layer was formed.

將結果示於表3中,藉由形成鎳-鎢合金鍍層而獲得黑色表面。另一方面,具有Co-Ni合金鍍層之No.16之表 面為灰色。又,於二次粒子層過大之No.17、18、19中,存在落粉現象,故而不佳。 The results are shown in Table 3, and a black surface was obtained by forming a nickel-tungsten alloy plating layer. On the other hand, the No. 16 sheet having a Co-Ni alloy plating layer The face is gray. Further, in No. 17, 18, and 19 in which the secondary particle layer is too large, there is a powder falling phenomenon, which is not preferable.

如上所述,於形成由鍍銅-鈷-鎳合金構成之二次粒子層(粗化處理)時,具有可抑制形成為樹枝狀之粗化粒子自銅箔表面剝落,即通常被稱作落粉現象的優異之效果。 As described above, when a secondary particle layer (roughening treatment) composed of a copper-plated cobalt-nickel alloy is formed, it is possible to prevent the roughened particles formed into dendrites from peeling off from the surface of the copper foil, which is generally called falling. Excellent effect of the powder phenomenon.

圖1係表示於先前之銅箔上進行由鍍銅-鈷-鎳合金構成之粗化處理之情況時的落粉情況的概念說明圖。 Fig. 1 is a conceptual explanatory view showing a state of falling powder in a case where a roughening treatment by a copper-cobalt-nickel alloy is performed on a conventional copper foil.

圖2係於銅箔上預先形成銅之一次粒子層,並且於該一次粒子層上形成由鍍銅-鈷-鎳合金構成之二次粒子層而成的粗化處理層之概念說明圖。 2 is a conceptual explanatory view of a roughened layer formed by forming a primary particle layer of copper on a copper foil and forming a secondary particle layer made of a copper-cobalt-nickel alloy on the primary particle layer.

圖3係於銅箔上進行由鍍銅-鈷-鎳合金構成之粗化處理之情況時的表面之顯微鏡照片。 Fig. 3 is a photomicrograph of the surface in the case where a roughening treatment by a copper-cobalt-nickel alloy is performed on a copper foil.

圖4係於銅箔上預先形成一次粒子層,並且於該一次粒子層上形成由鍍銅-鈷-鎳合金構成之二次粒子層的無落粉之銅箔處理面之層的顯微鏡照片。 Fig. 4 is a photomicrograph of a layer of a copper foil-treated surface on which a primary particle layer is formed in advance on a copper foil, and a secondary particle layer composed of a copper-cobalt-nickel alloy is formed on the primary particle layer.

Claims (10)

一種印刷電路用銅箔,於銅箔之至少一個表面依此序形成有非黑色之粗化處理層與鎳-鎢合金鍍層,該鎳-鎢合金鍍層之鎳量為2000μg/dm2以上。 A copper foil for a printed circuit in which a non-black roughening treatment layer and a nickel-tungsten alloy plating layer are formed on at least one surface of the copper foil, and the nickel-tungsten alloy plating layer has a nickel content of 2000 μg/dm 2 or more. 如申請專利範圍第1項之印刷電路用銅箔,其中,該鎳-鎢合金鍍層之鎳量為2000~5000μg/dm2The copper foil for a printed circuit according to the first aspect of the invention, wherein the nickel-tungsten alloy plating layer has a nickel content of 2000 to 5000 μg/dm 2 . 如申請專利範圍第1或2項之印刷電路用銅箔,其中,於該鎳-鎢合金鍍層上形成有耐熱層。 A copper foil for a printed circuit according to claim 1 or 2, wherein a heat-resistant layer is formed on the nickel-tungsten alloy plating layer. 如申請專利範圍第1或2項之印刷電路用銅箔,其中,於該鎳-鎢合金鍍層上、或是形成於該鎳-鎢合金鍍層上的耐熱層上,形成有防銹層。 A copper foil for a printed circuit according to claim 1 or 2, wherein a rustproof layer is formed on the nickel-tungsten alloy plating layer or on the heat-resistant layer formed on the nickel-tungsten alloy plating layer. 如申請專利範圍第1或2項之印刷電路用銅箔,其中,該粗化處理層係於形成銅之一次粒子層後,在該一次粒子層上形成銅-鈷-鎳合金之二次粒子層而成者。 The copper foil for a printed circuit according to claim 1 or 2, wherein the roughening layer is formed on a primary particle layer of copper, and a secondary particle of a copper-cobalt-nickel alloy is formed on the primary particle layer. Layered. 如申請專利範圍第5項之印刷電路用銅箔,其中,該銅之一次粒子層的平均粒徑為0.25~0.45μm,由銅-鈷-鎳合金構成之二次粒子層的平均粒徑為0.05~0.25μm。 The copper foil for a printed circuit according to claim 5, wherein the primary particle layer of the copper has an average particle diameter of 0.25 to 0.45 μm, and the average particle diameter of the secondary particle layer composed of the copper-cobalt-nickel alloy is 0.05~0.25μm. 如申請專利範圍第5項之印刷電路用銅箔,其中,該一次粒子層及二次粒子層為電鍍層。 The copper foil for printed circuit of claim 5, wherein the primary particle layer and the secondary particle layer are electroplated layers. 如申請專利範圍第6項之印刷電路用銅箔,其中,該一次粒子層及二次粒子層為電鍍層。 The copper foil for printed circuit of claim 6, wherein the primary particle layer and the secondary particle layer are electroplated layers. 一種覆銅積層板,其具備有申請專利範圍第1至8項中任一項之印刷電路用銅箔。 A copper-clad laminate comprising the copper foil for a printed circuit according to any one of claims 1 to 8. 一種印刷電路板,其係以申請專利範圍第9項之覆 銅積層板為材料。 A printed circuit board which is covered by the ninth application patent The copper laminate is made of material.
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Cited By (3)

* Cited by examiner, † Cited by third party
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CN105706182A (en) * 2013-10-31 2016-06-22 住友金属矿山股份有限公司 Electrically conductive substrate and method for manufacturing electrically conductive substrate
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Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3295308B2 (en) * 1996-06-28 2002-06-24 株式会社日鉱マテリアルズ Electrolytic copper foil
JP3429290B2 (en) * 2000-09-18 2003-07-22 日本電解株式会社 Manufacturing method of copper foil for fine wiring
US7026059B2 (en) * 2000-09-22 2006-04-11 Circuit Foil Japan Co., Ltd. Copper foil for high-density ultrafine printed wiring boad
JP3709142B2 (en) * 2001-01-19 2005-10-19 福田金属箔粉工業株式会社 Copper foil for printed wiring board and method for producing the same
JP3564460B2 (en) * 2001-09-28 2004-09-08 福田金属箔粉工業株式会社 Copper foil for printed wiring board and method for producing the same
JP2004263300A (en) * 2003-02-12 2004-09-24 Furukawa Techno Research Kk Copper foil for fine pattern printed circuit and manufacturing method therefor
JP2006210689A (en) * 2005-01-28 2006-08-10 Fukuda Metal Foil & Powder Co Ltd Copper foil for high frequency printed wiring board and its production method
JP2007314855A (en) * 2006-05-29 2007-12-06 Furukawa Circuit Foil Kk Ultra-thin copper foil provided with carrier, copper-clad laminate and printed circuit board
WO2010074072A1 (en) * 2008-12-26 2010-07-01 日鉱金属株式会社 Rolled copper foil or electrolytic copper foil for electronic circuit, and method for forming electronic circuit using the rolled copper foil or electrolytic copper foil
US9580829B2 (en) * 2010-05-07 2017-02-28 Jx Nippon Mining & Metals Corporation Copper foil for printed circuit

Cited By (5)

* Cited by examiner, † Cited by third party
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TWI580818B (en) * 2014-06-24 2017-05-01 Okuno Chemical Industries Co Ltd And a composition for blackening a copper-based metal or a silver-based metal
CN106249938A (en) * 2015-06-04 2016-12-21 住友金属矿山股份有限公司 Conductive board and the manufacture method of conductive board
CN106249938B (en) * 2015-06-04 2019-02-12 住友金属矿山股份有限公司 The manufacturing method of conductive board and conductive board

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