TW201324617A - 具熱膨脹間隙監測功能的加熱裝置 - Google Patents
具熱膨脹間隙監測功能的加熱裝置 Download PDFInfo
- Publication number
- TW201324617A TW201324617A TW100145957A TW100145957A TW201324617A TW 201324617 A TW201324617 A TW 201324617A TW 100145957 A TW100145957 A TW 100145957A TW 100145957 A TW100145957 A TW 100145957A TW 201324617 A TW201324617 A TW 201324617A
- Authority
- TW
- Taiwan
- Prior art keywords
- heating
- light
- heating device
- monitoring function
- detecting unit
- Prior art date
Links
- 238000010438 heat treatment Methods 0.000 title claims abstract description 73
- 238000012544 monitoring process Methods 0.000 title claims abstract description 17
- 238000012360 testing method Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 abstract description 3
- 238000007689 inspection Methods 0.000 abstract 2
- 239000000919 ceramic Substances 0.000 description 10
- 238000001514 detection method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011158 quantitative evaluation Methods 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100145957A TW201324617A (zh) | 2011-12-13 | 2011-12-13 | 具熱膨脹間隙監測功能的加熱裝置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| TW100145957A TW201324617A (zh) | 2011-12-13 | 2011-12-13 | 具熱膨脹間隙監測功能的加熱裝置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| TW201324617A true TW201324617A (zh) | 2013-06-16 |
| TWI449109B TWI449109B (enrdf_load_stackoverflow) | 2014-08-11 |
Family
ID=49033091
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW100145957A TW201324617A (zh) | 2011-12-13 | 2011-12-13 | 具熱膨脹間隙監測功能的加熱裝置 |
Country Status (1)
| Country | Link |
|---|---|
| TW (1) | TW201324617A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112531380A (zh) * | 2020-11-24 | 2021-03-19 | 娄底市安地亚斯电子陶瓷有限公司 | 一种航空连接器及其制作方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2003052804A1 (ja) * | 2001-12-17 | 2005-04-28 | 株式会社ニコン | 基板保持装置、露光装置及びデバイス製造方法 |
| US7824498B2 (en) * | 2004-02-24 | 2010-11-02 | Applied Materials, Inc. | Coating for reducing contamination of substrates during processing |
| TW200826198A (en) * | 2006-12-13 | 2008-06-16 | Metal Ind Res & Dev Ct | Combination method and structure of heating plate of substrate |
-
2011
- 2011-12-13 TW TW100145957A patent/TW201324617A/zh unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112531380A (zh) * | 2020-11-24 | 2021-03-19 | 娄底市安地亚斯电子陶瓷有限公司 | 一种航空连接器及其制作方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI449109B (enrdf_load_stackoverflow) | 2014-08-11 |
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