TW201323501A - Resin composition, photosensitive resin composition, spacer and display device - Google Patents
Resin composition, photosensitive resin composition, spacer and display device Download PDFInfo
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本發明係關於樹脂組成物、含該樹脂組成物之感光性樹脂組成物、使用該感光性樹脂組成物形成之間隔物、及具備該間隔物之顯示裝置。 The present invention relates to a resin composition, a photosensitive resin composition containing the resin composition, a spacer formed using the photosensitive resin composition, and a display device including the spacer.
至少將鹼可溶性樹脂、光聚合性單體、光聚合起始劑溶解於溶劑中而成之感光性樹脂組成物已使用於各種用途。該感光性樹脂組成物,基於使鹼可溶性樹脂良好地溶解,易於獲得可形成所需厚度之塗膜之感光性樹脂組成物、蒸發性優異、對人體之毒性較小等,而廣泛使用丙二醇單甲基醚乙酸酯(以下亦記為「PGMEA」)作為溶劑。該感光性樹脂組成物之用途之具體例列舉為例如形成顯示裝置中之間隔物之用途。 A photosensitive resin composition obtained by dissolving at least an alkali-soluble resin, a photopolymerizable monomer, and a photopolymerization initiator in a solvent has been used in various applications. The photosensitive resin composition is widely used because it dissolves the alkali-soluble resin well, and it is easy to obtain a photosensitive resin composition which can form a coating film having a desired thickness, is excellent in evaporability, and is less toxic to human body. Methyl ether acetate (hereinafter also referred to as "PGMEA") is used as a solvent. Specific examples of the use of the photosensitive resin composition are, for example, applications for forming a spacer in a display device.
顯示裝置基於各種目的而利用在兩片基板間形成特定高度之空間之間隔物。例如,液晶面板中,由於採用以兩片玻璃基板等透明基板中夾持液晶材料之構造,故有必要於兩片基板間形成間隔物,而可充填液晶材料。 The display device utilizes a spacer that forms a space of a certain height between the two substrates for various purposes. For example, in the liquid crystal panel, since a liquid crystal material is sandwiched between transparent substrates such as two glass substrates, it is necessary to form a spacer between the two substrates to fill the liquid crystal material.
以往,形成間隔物係採用於基板之整面上散布成為間隔物之珠粒狀粒子之方法。然而,該方法難以以高的位置精度形成間隔物,且由於像素顯示部分亦會附著珠粒,而有影像之對比性或顯示畫質降低之問題。 Conventionally, a spacer is used as a method of dispersing bead particles as spacers on the entire surface of a substrate. However, this method is difficult to form spacers with high positional accuracy, and since the pixel display portion also adheres to the beads, there is a problem that the contrast of the image or the display image quality is lowered.
另一方面,以感光性樹脂組成物形成間隔物之方法係 將感光性樹脂組成物塗佈於基板上,透過特定之遮罩曝光後,經顯像,形成點狀之間隔物者。因此,依據該方法,可僅在畫素顯示部分以外之特定部分形成間隔物,可製造可形成對比性或畫質優異之圖像之顯示裝置。 On the other hand, a method of forming a spacer from a photosensitive resin composition is The photosensitive resin composition is applied onto a substrate, exposed to a specific mask, and developed to form a dot-like spacer. Therefore, according to this method, the spacer can be formed only in a specific portion other than the pixel display portion, and a display device capable of forming an image excellent in contrast or image quality can be manufactured.
該方法中可較好地使用之感光性樹脂組成物,提案有使用使由乙烯性不飽和羧酸及乙烯性不飽和羧酸酐所組成群組選出之至少一種,與含有環氧基之乙烯性不飽和化合物至少經共聚合而成之共聚物作為鹼可溶性樹脂之感光性樹脂組成物(參照專利文獻1)。 In the photosensitive resin composition which can be preferably used in the method, it is proposed to use at least one selected from the group consisting of an ethylenically unsaturated carboxylic acid and an ethylenically unsaturated carboxylic anhydride, and an epoxy group containing an epoxy group. A copolymer obtained by copolymerizing at least an unsaturated compound is used as a photosensitive resin composition of an alkali-soluble resin (see Patent Document 1).
[專利文獻1]特開2006-184841號公報 [Patent Document 1] JP-A-2006-184841
然而,感光性樹脂組成物中,使用由乙烯性不飽和羧酸及乙烯性不飽和羧酸酐所組成群組選出之至少一種,與含有環氧基之乙烯性不飽和化合物至少經共聚合而成之共聚物作為鹼可溶性樹脂,且使用含有PGMEA之溶劑作為溶劑時,因鹼可溶性樹脂之自我反應而容易使鹼可溶性樹脂之分子量增大,伴隨此而有感光性樹脂組成物之顯像性降低之問題。 However, in the photosensitive resin composition, at least one selected from the group consisting of an ethylenically unsaturated carboxylic acid and an ethylenically unsaturated carboxylic anhydride is used, and at least one of the epoxy group-containing ethylenically unsaturated compounds is copolymerized. When the copolymer is used as an alkali-soluble resin and a solvent containing PGMEA is used as a solvent, the molecular weight of the alkali-soluble resin is likely to increase due to self-reaction of the alkali-soluble resin, and the development of the photosensitive resin composition is lowered. The problem.
本發明係有鑑於該以往之情況而完成者,其目的係提 供一種即使使用含有PGMEA之溶劑,仍可抑制使不飽和羧酸(a1)與含有環氧基之不飽和化合物(a2)聚合而成之共聚物(A1)之分子量增大之樹脂組成物、含有該樹脂組成物之感光性樹脂組成物、由該感光性樹脂組成物形成之間隔物,及具備該間隔物之顯示裝置。 The present invention has been made in view of the conventional circumstances, and its object is to provide A resin composition capable of suppressing an increase in molecular weight of a copolymer (A1) obtained by polymerizing an unsaturated carboxylic acid (a1) and an epoxy group-containing unsaturated compound (a2), even when a solvent containing PGMEA is used, A photosensitive resin composition containing the resin composition, a spacer formed of the photosensitive resin composition, and a display device including the spacer.
本發明人等為解決上述課題而重複積極研究。其結果發現藉由於含有至少使乙烯性不飽和羧酸(a1)與含有環氧基之不飽和化合物(a2)聚合而成之共聚物(A1)之鹼可溶性樹脂(A)、及包含PGMEA之溶劑(S)之樹脂組成物中,調配特定構造之化合物,可獲得可抑制鹼可溶性樹脂之分子量增大之樹脂組成物,且藉由使用該樹脂組成物調製感光性樹脂組成物可解決上述課題,因而完成本發明。具體而言,本發明係提供以下者。 The inventors of the present invention have repeatedly conducted active research to solve the above problems. As a result, it has been found to be an alkali-soluble resin (A) containing a copolymer (A1) obtained by polymerizing at least an ethylenically unsaturated carboxylic acid (a1) and an epoxy group-containing unsaturated compound (a2), and a PGMEA-containing product. In the resin composition of the solvent (S), a compound having a specific structure is blended, and a resin composition capable of suppressing an increase in the molecular weight of the alkali-soluble resin can be obtained, and the above problem can be solved by preparing the photosensitive resin composition using the resin composition. Thus, the present invention has been completed. Specifically, the present invention provides the following.
本發明之第一樣態為一種樹脂組成物,其含有鹼可溶性樹脂(A)、以下述式(1)表示之化合物、及溶劑(S),前述鹼可溶性樹脂(A)至少包含使不飽和羧酸(a1)與含環氧基之不飽和化合物(a2)聚合而成之共聚物(A1),前述溶劑(S)包含丙二醇單甲醚乙酸酯,
本發明之第二樣態為含有第一樣態之樹脂組成物、光聚合性單體(B)、與光聚合起始劑(C)之感光性樹脂組成物。 The second aspect of the present invention is a photosensitive resin composition containing a resin composition of the first form, a photopolymerizable monomer (B), and a photopolymerization initiator (C).
本發明之第三樣態為由第二樣態之感光性樹脂組成物形成之間隔物。 The third aspect of the present invention is a spacer formed of the photosensitive resin composition of the second aspect.
本發明之第四樣態為具備第三樣態之間隔物之顯示裝置。 A fourth aspect of the present invention is a display device having a spacer of a third aspect.
依據本發明,可提供一種即使使用含有PGMEA之溶劑,仍可抑制使不飽和羧酸(a1)與含有環氧基之不飽和化合物(a2)聚合而成之共聚物(A1)之分子量增大之樹脂組成物、含有該樹脂組成物之感光性樹脂組成物、由該感光性樹脂組成物形成之間隔物,及具備該間隔物之顯示裝置。 According to the present invention, it is possible to provide an increase in the molecular weight of the copolymer (A1) obtained by polymerizing the unsaturated carboxylic acid (a1) and the epoxy group-containing unsaturated compound (a2) even when a solvent containing PGMEA is used. A resin composition, a photosensitive resin composition containing the resin composition, a spacer formed of the photosensitive resin composition, and a display device including the spacer.
本發明之樹脂組成物至少含有鹼可溶性樹脂(A)、以上述式(1)表示之化合物、及溶劑(S),且鹼可溶性樹脂(A)為至少含有使不飽和羧酸(a1)與含有環氧基之不飽和化合物(a2)聚合而成之共聚物(A1)者,溶劑(S)包含丙二醇單甲基醚乙酸酯(PGMEA)。本發明之樹脂組成物由於抑制保存時之鹼可溶性樹脂(A)之分子量增大,故可較好地用於後述之感光性樹脂組成物之調製。以下針對本發明之樹脂組成物所含有之各成分加以說明。 The resin composition of the present invention contains at least an alkali-soluble resin (A), a compound represented by the above formula (1), and a solvent (S), and the alkali-soluble resin (A) contains at least an unsaturated carboxylic acid (a1) and The copolymer (A1) containing the epoxy group-containing unsaturated compound (a2) is polymerized, and the solvent (S) contains propylene glycol monomethyl ether acetate (PGMEA). Since the resin composition of the present invention suppresses the increase in the molecular weight of the alkali-soluble resin (A) during storage, it can be preferably used for the preparation of the photosensitive resin composition described later. Hereinafter, each component contained in the resin composition of the present invention will be described.
鹼可溶性樹脂意指由樹脂濃度20質量%之樹脂溶液(溶劑:丙二醇單甲基醚乙酸酯),於基板上形成膜厚1μm之樹脂膜,且在23℃,於2.38質量%之氫氧化四甲基銨(TMAH)水溶液中浸漬1分鐘時,溶解膜厚0.01μm以上者。 The alkali-soluble resin means a resin solution (solvent: propylene glycol monomethyl ether acetate) having a resin concentration of 20% by mass, and a resin film having a film thickness of 1 μm is formed on the substrate, and is oxidized at 2.38 mass% at 23 ° C. When immersed in a tetramethylammonium (TMAH) aqueous solution for 1 minute, the film thickness is 0.01 μm or more.
至於鹼可溶性樹脂(A)為自以往使用於感光性樹脂組成物中之樹脂,且只要包含至少使不飽和羧酸(a1)與含有環氧基之不飽和化合物(a2)聚合而成之共聚物(A1)者即無特別限制。該鹼可溶性樹脂(A)中所含之共聚物(A1)在成為PGMEA溶液時容易因自我反應而使分子量增大。然而,本發明之樹脂組成物由於含有後述之以式(1)表示之化合物,故可抑制共聚物(A1)之分子量增大。且,藉由含有該共聚物A1,易於獲得破壞強度及對基板之密著性優異之間隔物。 The alkali-soluble resin (A) is a resin which has been conventionally used in a photosensitive resin composition, and is copolymerized by containing at least an unsaturated carboxylic acid (a1) and an epoxy group-containing unsaturated compound (a2). The substance (A1) is not particularly limited. When the copolymer (A1) contained in the alkali-soluble resin (A) is a PGMEA solution, the molecular weight is likely to increase due to self-reaction. However, since the resin composition of the present invention contains a compound represented by the formula (1) described later, the molecular weight of the copolymer (A1) can be suppressed from increasing. Further, by containing the copolymer A1, it is easy to obtain a spacer excellent in breaking strength and adhesion to a substrate.
至於不飽和羧酸(a1)列舉為(甲基)丙烯酸、巴豆酸等單羧酸;馬來酸、富馬酸、檸康酸、仲康酸、衣康酸等二羧酸;該等二羧酸之酸酐等。該等中,就共聚合反應性、所得樹脂之鹼溶解性、取得之容易性等方面而言,以(甲基)丙烯酸及馬來酸酐較佳。該等不飽和羧酸(a1)可單獨使用一種或組合兩種以上使用。 The unsaturated carboxylic acid (a1) is exemplified by a monocarboxylic acid such as (meth)acrylic acid or crotonic acid; a dicarboxylic acid such as maleic acid, fumaric acid, citraconic acid, orthraic acid or itaconic acid; An acid anhydride or the like. Among these, (meth)acrylic acid and maleic anhydride are preferable in terms of copolymerization reactivity, alkali solubility of the obtained resin, ease of availability, and the like. These unsaturated carboxylic acids (a1) may be used alone or in combination of two or more.
共聚物(A1)中所佔之源自不飽和羧酸(a1)之構成單位之比例較好為20質量%以上,更好為20~30質量%。共聚物(A1)以該範圍含有源自不飽和羧酸(a1)之構成單位時,使用樹脂組成物可容易地調製顯像性優異之感光 性樹脂組成物。 The proportion of the constituent unit derived from the unsaturated carboxylic acid (a1) in the copolymer (A1) is preferably 20% by mass or more, more preferably 20 to 30% by mass. When the copolymer (A1) contains a constituent unit derived from the unsaturated carboxylic acid (a1) in this range, the photosensitive composition can be easily used to prepare a photosensitive property excellent in developability. Resin composition.
作為含有環氧基之不飽和化合物(a2)之較佳者列舉為含脂環式環氧基之不飽和化合物、及不具有脂環式基之含有環氧基之不飽和化合物,更好為含有脂環式環氧基之不飽和化合物。 The epoxy group-containing unsaturated compound (a2) is preferably an alicyclic epoxy group-containing unsaturated compound and an epoxy group-containing unsaturated compound having no alicyclic group, more preferably An unsaturated compound containing an alicyclic epoxy group.
以下,針對較適用之含有環氧基之不飽和化合物(a2)的含有脂環式環氧基之不飽和化合物加以說明。作為含有脂環式環氧基之不飽和化合物只要是含有脂環式環氧基之不飽和化合物即無特別限制。構成脂環式環氧基之脂環式基可為單環亦可為多環。單環脂環式基列舉為環戊基、環己基等。另,多環之脂環式基列舉為降冰片基、異冰片基、三環壬基、三環癸基、四環十二烷基等。該等含脂環式環氧基之不飽和化合物可單獨使用或組合兩種以上使用。 Hereinafter, an alicyclic epoxy group-containing unsaturated compound containing a suitable epoxy group-containing unsaturated compound (a2) will be described. The unsaturated compound containing an alicyclic epoxy group is not particularly limited as long as it is an unsaturated compound containing an alicyclic epoxy group. The alicyclic group constituting the alicyclic epoxy group may be a single ring or a polycyclic ring. The monocyclic alicyclic group is exemplified by a cyclopentyl group, a cyclohexyl group and the like. Further, the polycyclic alicyclic group is exemplified by norbornyl group, isobornyl group, tricyclodecyl group, tricyclodecyl group, tetracyclododecyl group and the like. These alicyclic epoxy group-containing unsaturated compounds may be used singly or in combination of two or more.
具體而言,含有脂環式環氧基之不飽和化合物列舉為例如以下述式(a2-1)~(a2-16)表示之化合物。該等中,為使使用樹脂組成物調製之感光性樹脂組成物之顯像性成為適度者,較好為以下述式(a2-1)~(a2-6)表示之化合物,更好為以下述式(a2-1)~(a2-4)表示之化合物。 Specifically, the unsaturated compound containing an alicyclic epoxy group is exemplified by a compound represented by the following formulas (a2-1) to (a2-16). In the above, in order to make the developability of the photosensitive resin composition prepared by using the resin composition moderate, it is preferably a compound represented by the following formulas (a2-1) to (a2-6), more preferably the following The compounds represented by the formulae (a2-1) to (a2-4).
上述式中,R11表示氫原子或甲基,R12表示碳數1~6之二價脂肪族飽和烴基,R13表示碳數1~10之二價烴基,n表示0~10之整數。R12較好為直鏈狀或分支鏈狀伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。R13較好為例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基、伸苯基、伸環己基、-CH2-Ph-CH2-(Ph表示伸苯基)。 In the above formula, R 11 represents a hydrogen atom or a methyl group, R 12 represents a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, R 13 represents a divalent hydrocarbon group having 1 to 10 carbon atoms, and n represents an integer of 0 to 10. R 12 is preferably a linear or branched alkylene group such as methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene or hexamethylene. R 13 is preferably, for example, methylene, ethyl, propyl, tetramethylene, ethylethyl, pentamethylene, hexamethylene, phenyl, cyclohexyl, -CH 2 - Ph-CH 2 - (Ph represents a phenylene group).
接著,針對不具有脂環式基之含有環氧基之不飽和化合物加以說明。不具有脂環式基之含有環氧基之不飽和化 合物列舉為(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯、(甲基)丙烯酸3,4-環氧基丁酯、(甲基)丙烯酸6,7-環氧基庚酯等之(甲基)丙烯酸環氧基烷酯類;α-乙基丙烯酸縮水甘油酯、α-正丙基丙烯酸縮水甘油酯、α-正丁基丙烯酸縮水甘油酯、α-乙基丙烯酸6,7-環氧基庚酯等之α-烷基丙烯酸環氧基烷酯類等。該等中,由共聚合反應性、硬化後之樹脂強度等之方面而言,較好為(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2-甲基縮水甘油酯、及(甲基)丙烯酸6,7-環氧基庚酯。該等不具有脂環式基之含有環氧基之不飽和化合物可單獨使用或組合兩種以上使用。 Next, an epoxy group-containing unsaturated compound having no alicyclic group will be described. Oxidation-free desaturation without alicyclic groups The compounds are exemplified by glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, 3,4-epoxybutyl (meth)acrylate, 6,7-(meth)acrylate. Ethoxyalkyl (meth)acrylates such as epoxyheptyl ester; glycidyl α-ethyl acrylate, glycidyl α-n-propyl acrylate, glycidyl α-n-butyl acrylate, α- An α-alkyl acrylate epoxy alkoxylate such as 6,7-epoxyheptyl ethacrylate. Among these, from the viewpoints of copolymerization reactivity, resin strength after curing, and the like, glycidyl (meth)acrylate, 2-methylglycidyl (meth)acrylate, and (methyl) are preferred. ) 6,7-epoxyheptyl acrylate. These epoxy group-containing unsaturated compounds having no alicyclic group may be used singly or in combination of two or more.
又,共聚物(A1)中所佔之源自含有環氧基之不飽和化合物(a2)之構成單位之比例較好為30質量%以上,更好為35質量%以上,最好為35~80質量%。共聚物(A1)以該範圍含有源自含有環氧基之不飽和化合物(a2)之構成單位時,使用樹脂組成物,可容易地調製可形成破壞強度及與基板之密著性優異之間隔物之感光性樹脂組成物。又,含有環氧基之不飽和化合物(a2)中,含有脂環式環氧基之不飽和化合物之比率較好為50質量%以上,更好為80質量%以上,最好為100質量%。 Further, the proportion of the constituent unit derived from the epoxy group-containing unsaturated compound (a2) in the copolymer (A1) is preferably 30% by mass or more, more preferably 35% by mass or more, and most preferably 35%. 80% by mass. When the copolymer (A1) contains a constituent unit derived from the epoxy group-containing unsaturated compound (a2) in this range, the resin composition can be used to easily prepare an interval which is excellent in breaking strength and adhesion to the substrate. A photosensitive resin composition of the object. Further, in the epoxy group-containing unsaturated compound (a2), the ratio of the unsaturated compound containing an alicyclic epoxy group is preferably 50% by mass or more, more preferably 80% by mass or more, and most preferably 100% by mass. .
共聚物(A1)亦可為使上述不飽和羧酸(a1)及上述含有環氧基之不飽和化合物(a2)一起與不具有環氧基之含有脂環式基之不飽和化合物(a3)聚合而成者。 The copolymer (A1) may be one in which the unsaturated carboxylic acid (a1) and the above epoxy group-containing unsaturated compound (a2) together with an alicyclic group-containing unsaturated compound (a3) having no epoxy group. Aggregated.
含有脂環式基之不飽和化合物(a3),只要是具有脂 環式基之不飽和化合物即無特別限制。脂環式基可為單環亦可為多環。單環脂環式基列舉為環戊基、環己基等。又,多環之脂環式基列舉為金剛烷基、降冰片基、異冰片基、三環壬基、三環癸基、四環十二烷基等。該等含脂環式基之不飽和化合物(a3)可單獨使用或組合兩種以上使用。 An alicyclic group-containing unsaturated compound (a3) as long as it has a fat The cyclic unsaturated compound is not particularly limited. The alicyclic group may be a single ring or a polycyclic ring. The monocyclic alicyclic group is exemplified by a cyclopentyl group, a cyclohexyl group and the like. Further, the polycyclic alicyclic group is exemplified by adamantyl group, norbornyl group, isobornyl group, tricyclodecyl group, tricyclodecyl group, tetracyclododecyl group or the like. These alicyclic group-containing unsaturated compounds (a3) may be used singly or in combination of two or more.
具體而言,含有脂環式基之不飽和化合物(a3),列舉為例如以下述式(a3-1)~(a3-8)表示之化合物。該等中,為使使用樹脂組成物調製之感光性樹脂組成物之顯像性適當者,較好為以下述式(a3-3)~(a3-8)表示之化合物,更好為以下述式(a3-3)、(a3-4)表示之化合物。 Specifically, the alicyclic group-containing unsaturated compound (a3) is exemplified by the compounds represented by the following formulas (a3-1) to (a3-8). In the above, the photosensitive resin composition prepared by using the resin composition is preferably a compound represented by the following formulas (a3-3) to (a3-8), more preferably A compound represented by the formula (a3-3) or (a3-4).
上述式中,R21表示氫原子或甲基,R22表示單鍵或碳數1~6之二價脂肪族飽和烴基,R23表示氫原子或碳數1~5之烷基。R22較好為單鍵、直鏈狀或分支鏈狀伸烷基,例如亞甲基、伸乙基、伸丙基、四亞甲基、乙基伸乙基、五亞甲基、六亞甲基。R23較好為例如甲基、乙基。 In the above formula, R 21 represents a hydrogen atom or a methyl group, R 22 represents a single bond or a divalent aliphatic saturated hydrocarbon group having 1 to 6 carbon atoms, and R 23 represents a hydrogen atom or an alkyl group having 1 to 5 carbon atoms. R 22 is preferably a single bond, a linear or branched alkyl group, such as methylene, ethyl, propyl, tetramethylene, ethyl ethyl, pentamethylene, hexamethylene base. R 23 is preferably, for example, a methyl group or an ethyl group.
共聚物(A1)中所佔之源自含上述脂環式基之不飽和化合物(a3)之構成單位之比例較好為1~50質量%,更好為10~50質量%,最好為15~45質量%。 The proportion of the constituent unit derived from the unsaturated compound (a3) containing the above alicyclic group in the copolymer (A1) is preferably from 1 to 50% by mass, more preferably from 10 to 50% by mass, most preferably 15~45% by mass.
又,共聚物(A1)亦可為使上述以外之其他化合物進一步聚合者。該其他化合物列舉為(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙基化合物、乙烯醚類、乙烯酯類、苯乙烯類等。該等化合物可單獨使用或組合兩種以上 使用。 Further, the copolymer (A1) may be one which further polymerizes other compounds than the above. The other compounds are exemplified by (meth) acrylates, (meth) acrylamides, allyl compounds, vinyl ethers, vinyl esters, styrenes and the like. These compounds may be used alone or in combination of two or more. use.
(甲基)丙烯酸酯類列舉為(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丙酯、(甲基)丙烯酸戊酯、(甲基)丙烯酸第三辛酯等之直鏈狀或分支鏈狀之(甲基)丙烯酸烷酯,(甲基)丙烯酸氯乙酯、(甲基)丙烯酸2,2-二甲基羥基丙酯、(甲基)丙烯酸2-羥基乙酯、單(甲基)丙烯酸三羥甲基丙酯、(甲基)丙烯酸苄酯、(甲基)丙烯酸糠酯等。 The (meth) acrylates are exemplified by methyl (meth) acrylate, ethyl (meth) acrylate, propyl (meth) acrylate, amyl (meth) acrylate, and trioctyl (meth) acrylate. A linear or branched chain alkyl (meth)acrylate, chloroethyl (meth)acrylate, 2,2-dimethylhydroxypropyl (meth)acrylate, 2-(meth)acrylate Hydroxyethyl ester, trimethylolpropyl mono(meth)acrylate, benzyl (meth)acrylate, decyl (meth)acrylate, and the like.
(甲基)丙烯醯胺類列舉為(甲基)丙烯醯胺、N-烷基(甲基)丙烯醯胺、N-芳基(甲基)丙烯醯胺、N,N-二烷基(甲基)丙烯醯胺、N,N-芳基(甲基)丙烯醯胺、N-甲基-N-苯基(甲基)丙烯醯胺、N-羥基乙基-N-甲基(甲基)丙烯醯胺等。 The (meth) acrylamides are exemplified by (meth) acrylamide, N-alkyl (meth) acrylamide, N-aryl (meth) acrylamide, N, N-dialkyl ( Methyl) acrylamide, N,N-aryl (meth) acrylamide, N-methyl-N-phenyl (meth) acrylamide, N-hydroxyethyl-N-methyl (A Base) acrylamide and the like.
烯丙基化合物列舉為乙酸烯丙酯、己酸烯丙酯、辛酸烯丙酯、月桂酸烯丙酯、棕櫚酸烯丙酯、硬脂酸烯丙酯、苯甲酸烯丙酯、乙醯基乙酸烯丙酯、乳酸烯丙酯等烯丙酯類;烯丙基氧基乙醇等。 The allyl compound is exemplified by allyl acetate, allyl hexanoate, allyl octanoate, allyl laurate, allyl palmitate, allyl stearate, allyl benzoate, ethenyl Allyl acetate, allyl lactate, etc.; allyloxyethanol and the like.
乙烯基醚類列舉為己基乙烯基醚、辛基乙烯基醚、癸基乙烯基醚、乙基己基乙烯基醚、甲氧基乙基乙烯基醚、乙氧基乙基乙烯基醚、氯乙基乙烯基醚、1-甲基-2,2-二甲基丙基乙烯基醚、2-乙基丁基乙烯基醚、羥基乙基乙烯基醚、二乙二醇乙烯基醚、二甲胺基乙基乙烯基醚、二乙胺基乙基乙烯基醚、丁胺基乙基乙烯基醚、苄基乙烯基醚、四氫糠基乙烯基醚等之烷基乙烯基醚;乙烯基苯基醚、乙 烯基甲苯基醚、乙烯基氯苯基醚、乙烯基-2,4-二氯苯基醚、乙烯基萘基醚、乙烯基蒽基醚等乙烯基芳基醚等。 Vinyl ethers are exemplified by hexyl vinyl ether, octyl vinyl ether, mercapto vinyl ether, ethylhexyl vinyl ether, methoxy ethyl vinyl ether, ethoxyethyl vinyl ether, chlorine B Vinyl ether, 1-methyl-2,2-dimethylpropyl vinyl ether, 2-ethylbutyl vinyl ether, hydroxyethyl vinyl ether, diethylene glycol vinyl ether, dimethyl An alkyl vinyl ether such as aminoethyl vinyl ether, diethylaminoethyl vinyl ether, butylaminoethyl vinyl ether, benzyl vinyl ether or tetrahydrofurfuryl vinyl ether; vinyl Phenyl ether, B A vinyl aryl ether such as an alkenyl tolyl ether, a vinyl chlorophenyl ether, a vinyl-2,4-dichlorophenyl ether, a vinyl naphthyl ether or a vinyl decyl ether.
乙烯酯類列舉為丁酸乙烯酯、異丁酸乙烯酯、三甲基乙酸乙烯酯、二乙基乙酸乙烯酯、戊酸乙烯酯、己酸乙烯酯、氯乙酸乙烯酯、二氯乙酸乙烯酯、甲氧基乙酸乙烯酯、丁氧基乙酸乙烯酯、苯基乙酸乙烯酯、乙醯基乙酸乙烯酯、月桂酸乙烯酯、乙烯基-β-苯基丁酸酯、苯甲酸乙烯酯、水楊酸乙烯酯、氯苯甲酸乙烯酯、四氯苯甲酸乙烯酯、萘甲酸乙烯酯等。 The vinyl esters are exemplified by vinyl butyrate, vinyl isobutyrate, trimethyl vinyl acetate, diethyl vinyl acetate, vinyl valerate, vinyl hexanoate, vinyl chloroacetate, vinyl dichloroacetate. , methoxyvinyl acetate, butoxy vinyl acetate, vinyl phenyl acetate, vinyl acetate, vinyl laurate, vinyl-β-phenylbutyrate, vinyl benzoate, water Vinyl salicylate, vinyl chlorobenzoate, vinyl tetrachlorobenzoate, vinyl naphthoate, and the like.
苯乙烯類列舉為苯乙烯;甲基苯乙烯、二甲基苯乙烯、三甲基苯乙烯、乙基苯乙烯、二乙基苯乙烯、異丙基苯乙烯、丁基苯乙烯、己基苯乙烯、環己基苯乙烯、癸基苯乙烯、苄基苯乙烯、氯甲基苯乙烯、三氟甲基苯乙烯、乙氧基甲基苯乙烯、乙醯氧基甲基苯乙烯等之烷基苯乙烯;甲氧基苯乙烯、4-甲氧基-3-甲基苯乙烯、二甲氧基苯乙烯等之烷氧基苯乙烯;氯苯乙烯、二氯苯乙烯、三氯苯乙烯、四氯苯乙烯、五氯苯乙烯、溴苯乙烯、二溴苯乙烯、碘苯乙烯、氟苯乙烯、三氟苯乙烯、2-溴-4-三氟甲基苯乙烯、4-氟-3-三氟甲基苯乙烯等之鹵苯乙烯等。 Styrenes are listed as styrene; methyl styrene, dimethyl styrene, trimethyl styrene, ethyl styrene, diethyl styrene, isopropyl styrene, butyl styrene, hexyl styrene Alkylbenzene such as cyclohexylstyrene, mercaptostyrene, benzylstyrene, chloromethylstyrene, trifluoromethylstyrene, ethoxymethylstyrene, ethoxymethylmethylstyrene Ethylene styrene such as ethylene; methoxystyrene, 4-methoxy-3-methylstyrene, dimethoxystyrene; chlorostyrene, dichlorostyrene, trichlorostyrene, tetra Chlorostyrene, pentachlorostyrene, bromostyrene, dibromostyrene, iodine styrene, fluorostyrene, trifluorostyrene, 2-bromo-4-trifluoromethylstyrene, 4-fluoro-3- A halogenated styrene such as trifluoromethylstyrene.
共聚物(A1)之質量平均分子量(Mw:以凝膠滲透層析儀(GPC)之苯乙烯換算之測定值,本說明書中均同)較好為2000~200000,更好為5000~30000。藉由成為上述範圍,有容易使使用樹脂組成物調製之感光性樹脂組成物之膜形成能、曝光後之顯像性獲得均衡之傾向。 The mass average molecular weight of the copolymer (A1) (Mw: the measured value in terms of styrene in terms of gel permeation chromatography (GPC), which is the same in the specification) is preferably from 2,000 to 200,000, more preferably from 5,000 to 30,000. When it is in the above range, the film formation ability of the photosensitive resin composition prepared by using the resin composition tends to be balanced, and the development performance after exposure tends to be balanced.
且,鹼可溶性樹脂(A)亦可較好地使用含有至少具有源自上述不飽和羧酸(a1)之構成單位、與具有可與後述之光聚合性單體(B)聚合之部位之構成單位之共聚物(A2),或至少具有源自上述不飽和羧酸(a1)之構成單位與源自上述含有環氧基之不飽和化合物(a2)之構成單位、及具有可與後述之光聚合性單體(B)聚合之部位之構成單位之共聚物(A3)之樹脂。鹼可溶性樹脂(A)含共聚物(A2)或(A3)時,可提高感光性樹脂組成物對基板之密著性、感光性樹脂組成物之硬化後之破壞強度。 Further, the alkali-soluble resin (A) can also preferably be used in a composition containing at least a constituent unit derived from the unsaturated carboxylic acid (a1) and a portion polymerizable with a photopolymerizable monomer (B) to be described later. a unit copolymer (A2), or at least a constituent unit derived from the unsaturated carboxylic acid (a1) and a constituent unit derived from the epoxy group-containing unsaturated compound (a2), and having light which can be described later A resin of a copolymer (A3) which is a constituent unit of a polymerizable monomer (B). When the alkali-soluble resin (A) contains the copolymer (A2) or (A3), the adhesion of the photosensitive resin composition to the substrate and the breaking strength of the photosensitive resin composition after curing can be improved.
共聚物(A2)及共聚物(A3)亦可為進而與關於共聚物(A1)中作為其他化合物所記載之(甲基)丙烯酸酯類、(甲基)丙烯醯胺類、烯丙基化合物、乙烯基醚類、乙烯酯類、苯乙烯類等共聚合而成者。 The copolymer (A2) and the copolymer (A3) may further be (meth)acrylates, (meth)acrylamides, allyl compounds described as other compounds in the copolymer (A1). And vinyl ethers, vinyl esters, styrenes, etc. are copolymerized.
具有可與光聚合性單體(B)聚合之部位之構成單位較好為包含具有乙烯性不飽和基之部位作為可與光聚合性單體(B)聚合之部位者。具有該構成單位之共聚物,於共聚物(A2),可藉由使上述不飽和羧酸(a1)之均聚物所含之羧基之一部分,與上述含有環氧基之不飽和化合物所含之環氧基反應而調製。又,共聚物(A3)可藉由使具有源自上述不飽和羧酸(a1)之構成單位與源自上述含有環氧基之不飽和化合物(a2)之構成單位之共聚物中之環氧基之一部分,與不飽和羧酸(a1)反應而調製。 The constituent unit having a portion polymerizable with the photopolymerizable monomer (B) is preferably a portion containing an ethylenically unsaturated group as a site polymerizable with the photopolymerizable monomer (B). The copolymer having the constituent unit may be contained in the copolymer (A2) by a part of a carboxyl group contained in the homopolymer of the unsaturated carboxylic acid (a1) and the above-mentioned epoxy group-containing unsaturated compound. The epoxy group is reacted to prepare. Further, the copolymer (A3) can be obtained by reacting an epoxy group having a constituent unit derived from the above unsaturated carboxylic acid (a1) and a constituent unit derived from the above-mentioned epoxy group-containing unsaturated compound (a2). One part of the base is prepared by reacting with an unsaturated carboxylic acid (a1).
共聚物(A2)及共聚物(A3)之質量平均分子量較好為2000~50000,更好為5000~30000。藉由成為上述範 圍,而有使使用樹脂組成物調製之感光性樹脂組成物之膜形成能、曝光後之顯像性容易均衡之傾向。 The mass average molecular weight of the copolymer (A2) and the copolymer (A3) is preferably from 2,000 to 50,000, more preferably from 5,000 to 30,000. By becoming the above In addition, there is a tendency that the film formation ability of the photosensitive resin composition prepared by using the resin composition and the development performance after exposure are easily balanced.
又,鹼可溶性樹脂(A),除了由共聚物(A1)及(A3)選擇之樹脂以外,亦包含以往習知之其他鹼可溶性樹脂。但,鹼可溶性樹脂(A)中所佔之由共聚物(A1)及(A3)選出之樹脂之比例較好為80質量%以上,更好為90質量%以上,最好為100質量%。 Further, the alkali-soluble resin (A) contains, in addition to the resins selected from the copolymers (A1) and (A3), other conventionally alkali-soluble resins. However, the proportion of the resin selected from the copolymers (A1) and (A3) in the alkali-soluble resin (A) is preferably 80% by mass or more, more preferably 90% by mass or more, and most preferably 100% by mass.
又,樹脂組成物中之鹼可溶性樹脂(A)之含量並無特別限制。典型上,樹脂組成物中之鹼可溶性樹脂(A)之含量較好為5~60質量%,更好為10~30質量%。該情況下,可容易地調製黏度低且作業容易之樹脂組成物。 Further, the content of the alkali-soluble resin (A) in the resin composition is not particularly limited. Typically, the content of the alkali-soluble resin (A) in the resin composition is preferably from 5 to 60% by mass, more preferably from 10 to 30% by mass. In this case, the resin composition having a low viscosity and easy work can be easily prepared.
本發明之樹脂組成物含有以下述式(1)表示之化合物。藉由使含有上述鹼可溶性樹脂(A)與含PGMEA之溶劑(C)之樹脂組成物中含有該化合物,可抑制鹼可溶性樹脂(A)之高分子量化。 The resin composition of the present invention contains a compound represented by the following formula (1). By including the compound in the resin composition containing the alkali-soluble resin (A) and the solvent (C) containing PGMEA, the amount of the alkali-soluble resin (A) can be suppressed.
上述式(1)中,R1及R2各獨立表示氫原子或有機基,但R1及R2之至少一者表示有機基。 In the above formula (1), R 1 and R 2 each independently represent a hydrogen atom or an organic group, but at least one of R 1 and R 2 represents an organic group.
R1及R2中之有機基列舉為烷基、烯基、環烷基、環 烯基、芳基、芳烷基等。該有機基亦可於有機基中含雜原子等之烴基以外之鍵或取代基。又,該有機基可為直鏈狀、分支鏈狀、環狀之任一種。該有機基通常為一價,但形成環狀構造之情況等,可成為二價以上之有機基。 The organic group in R 1 and R 2 is exemplified by an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, an aralkyl group or the like. The organic group may also have a bond or a substituent other than a hydrocarbon group such as a hetero atom in the organic group. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain. The organic group is usually monovalent, but when it forms a cyclic structure, it can be a divalent or higher organic group.
R1及R2可彼等鍵結形成環狀構造,亦可進而含有雜原子之鍵。至於環狀構造例舉為雜環烷基、雜芳基等,亦可為縮合環。 R 1 and R 2 may be bonded to each other to form a cyclic structure, and may further contain a bond of a hetero atom. The cyclic structure is exemplified by a heterocycloalkyl group, a heteroaryl group or the like, and may be a condensed ring.
R1及R2之有機基中之烴基以外之鍵只要不損及本發明之效果即無特別限制,列舉為含氧原子、氮原子、矽原子等雜原子之鍵。具體而言列舉為醚鍵、硫醚鍵、羰基鍵、硫羰基鍵、酯鍵、醯胺鍵、胺基甲酸酯鍵、亞胺鍵(-N=C(-R)-、-C(=NR)-:R表示氫原子或有機基)、碳酸酯鍵、磺醯基鍵、亞磺醯基鍵、偶氮鍵等。 The bond other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited as long as it does not impair the effects of the present invention, and is exemplified by a bond containing a hetero atom such as an oxygen atom, a nitrogen atom or a ruthenium atom. Specifically, it is an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, a guanamine bond, a urethane bond, or an imine bond (-N=C(-R)-, -C( =NR)-: R represents a hydrogen atom or an organic group, a carbonate bond, a sulfonyl bond, a sulfinium bond, an azo bond, or the like.
就耐熱性之觀點而言,R1及R2之有機基中之烴基以外之鍵較好為醚鍵、硫醚鍵、羰基鍵、硫羰基鍵、酯鍵、醯胺鍵、胺基甲酸酯鍵、亞胺鍵(-N=C(-R)-、-C(=NR)-:R表示氫原子或一價有機基)、碳酸酯鍵、磺醯基鍵、亞磺醯基鍵。 From the viewpoint of heat resistance, the bond other than the hydrocarbon group in the organic group of R 1 and R 2 is preferably an ether bond, a thioether bond, a carbonyl bond, a thiocarbonyl bond, an ester bond, a guanamine bond, or an aminocarboxylic acid. Ester bond, imine bond (-N=C(-R)-, -C(=NR)-: R represents a hydrogen atom or a monovalent organic group), a carbonate bond, a sulfonyl bond, a sulfinyl bond .
R1及R2之有機基中之烴基以外之取代基只要不損及本發明之效果即無特別限制,列舉為鹵原子、羥基、巰基、硫醚基、氰基、異氰基、氰酸酯基、異氰酸酯基、硫代氰酸酯基、異硫代氰酸酯基、矽烷基、矽烷醇基、烷氧基、烷氧基羰基、胺甲醯基、硫代胺甲醯基、硝基、亞硝基、羧基、羧酸酯基、醯基、醯氧基、亞磺基、磺基、磺 酸酯基、膦基、氧膦基、膦醯基、磷酸酯基、羥基亞胺基、烷基醚基、烯基醚基、烷基硫醚基、烯基硫醚基、芳基醚基、芳基硫醚基、胺基(-NH2、-NHR、-NRR’:R及R’各獨立表示烴基)等。上述取代基所含之氫原子亦可經烴基取代。且,上述取代基所含之烴基可為直鏈狀、分支鏈狀、及環狀之任一種。 The substituent other than the hydrocarbon group in the organic group of R 1 and R 2 is not particularly limited as long as it does not impair the effects of the present invention, and is exemplified by a halogen atom, a hydroxyl group, a thiol group, a thioether group, a cyano group, an isocyano group, and a cyanic acid. Ester group, isocyanate group, thiocyanate group, isothiocyanate group, decyl group, decyl alcohol group, alkoxy group, alkoxycarbonyl group, amine carbaryl group, thioamine mercapto group, nitrate Base, nitroso, carboxyl, carboxylate, sulfhydryl, decyloxy, sulfinyl, sulfo, sulfonate, phosphino, phosphinyl, phosphonium, phosphate, hydroxyimine Base, alkyl ether group, alkenyl ether group, alkyl sulfide group, alkenyl sulfide group, aryl ether group, aryl sulfide group, amine group (-NH 2 , -NHR, -NRR':R And R' each independently represents a hydrocarbon group). The hydrogen atom contained in the above substituent may also be substituted with a hydrocarbon group. Further, the hydrocarbon group contained in the substituent may be any of a linear chain, a branched chain, and a cyclic group.
R1及R2之有機基中之烴基以外之取代基較好為鹵原子、羥基、巰基、硫醚基、氰基、異氰基、氰酸酯基、異氰酸酯基、硫代氰酸酯基、異硫代氰酸酯基、矽烷基、矽烷醇基、烷氧基、烷氧基羰基、胺甲醯基、硫代胺甲醯基、硝基、亞硝基、羧基、羧酸酯基、醯基、醯氧基、亞磺基、磺基、磺酸酯基、膦基、氧膦基、膦醯基、磷酸酯基、羥基亞胺基、烷基醚基、烯基醚基、烷基硫醚基、烯基硫醚基、芳基醚基、芳基硫醚基。 The substituent other than the hydrocarbon group in the organic group of R 1 and R 2 is preferably a halogen atom, a hydroxyl group, a thiol group, a thioether group, a cyano group, an isocyano group, a cyanate group, an isocyanate group or a thiocyanate group. , isothiocyanate, decyl, decyl, alkoxy, alkoxycarbonyl, amine, mercapto, thiocarbamyl, nitro, nitroso, carboxyl, carboxylate , fluorenyl, decyloxy, sulfinyl, sulfo, sulfonate, phosphino, phosphinyl, phosphonium, phosphate, hydroxyimino, alkyl ether, alkenyl ether, An alkyl sulfide group, an alkenyl sulfide group, an aryl ether group, an aryl sulfide group.
上述中,R1及R2至少一者為碳數1~12之烷基或碳數1~12之芳基,或較好彼此鍵結形成碳數2~20之雜環烷基或雜芳基者。雜環烷基列舉為哌啶基、嗎啉基等。雜芳基列舉為咪唑基、吡唑基等。 In the above, at least one of R 1 and R 2 is an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms, or preferably bonded to each other to form a heterocycloalkyl group or heteroaryl group having 2 to 20 carbon atoms. Base. The heterocycloalkyl group is exemplified by piperidinyl group, morpholinyl group and the like. The heteroaryl group is exemplified by an imidazolyl group, a pyrazolyl group or the like.
上述式(1)中,R3表示單鍵或有機基。 In the above formula (1), R 3 represents a single bond or an organic group.
R3中之有機基列舉為自烷基、烯基、環烷基、環烯基、芳基、芳烷基等除去一個氫原子之基。該有機基亦可於該有機基中含有取代基。至於取代基列舉為R1及R2中例示者。又,該有機基可為直鏈狀、分支鏈狀之任一種。 The organic group in R 3 is exemplified by a group which removes one hydrogen atom from an alkyl group, an alkenyl group, a cycloalkyl group, a cycloalkenyl group, an aryl group, an aralkyl group or the like. The organic group may also have a substituent in the organic group. The substituents are exemplified as R 1 and R 2 . Further, the organic group may be either a linear chain or a branched chain.
上述中,R3較好為單鍵、或自碳數1~12之烷基或碳 數1~12之芳基除去一個氫原子之基。 In the above, R 3 is preferably a single bond or a group in which one hydrogen atom is removed from an alkyl group having 1 to 12 carbon atoms or an aryl group having 1 to 12 carbon atoms.
上述式(1)中,R4及R5各獨立表示氫原子、鹵原子、羥基、巰基、硫醚基、矽烷基、矽烷醇基、硝基、亞硝基、亞磺基、磺基、磺酸酯基、膦基、氧膦基、膦醯基、磷酸酯基、或有機基。 In the above formula (1), R 4 and R 5 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a thiol group, a thioether group, a decyl group, a decyl alcohol group, a nitro group, a nitroso group, a sulfinyl group, a sulfo group, Sulfonate, phosphino, phosphinyl, phosphonium, phosphate, or organic.
R4及R5中之取代基例舉為R1及R2中例示者。該有機基與R1及R2之情況相同,可於該有機基中含有雜原子等之烴基以外之鍵或取代基。又,該有機基可為直鏈狀、分支鏈狀、環狀之任一種。 The substituents in R 4 and R 5 are exemplified as R 1 and R 2 . The organic group is the same as in the case of R 1 and R 2 , and the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain.
上述中,R4及R5各較好獨立為氫原子、碳數1~10之烷基、碳數4~13之環烷基、碳數4~13之環烯基、碳數7~16之芳氧基烷基、碳數7~20之芳烷基、具有氰基之碳數2~11之烷基、具有羥基之碳數1~10之烷基、碳數1~10之烷氧基、碳數2~11之醯胺基、碳數1~10之烷硫基、碳數1~10之醯基、碳數2~11之酯基(-COOR、-OCOR:R表示烴基)、碳數6~20之芳基、取代電子供給性基及/或拉電子性基之碳數6~20之芳基、取代電子供給性基及/或拉電子性基之苄基、氰基、甲硫基。更好R4及R5二者均為氫原子,或R4為甲基,R5為氫原子。 In the above, each of R 4 and R 5 is independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, a cycloalkenyl group having 4 to 13 carbon atoms, and a carbon number of 7 to 16 An aryloxyalkyl group, an aralkyl group having 7 to 20 carbon atoms, an alkyl group having 2 to 11 carbon atoms having a cyano group, an alkyl group having 1 to 10 carbon atoms and a alkoxy group having 1 to 10 carbon atoms Base, amidino group having 2 to 11 carbon atoms, an alkylthio group having 1 to 10 carbon atoms, an alkyl group having 1 to 10 carbon atoms, and an ester group having 2 to 11 carbon atoms (-COOR, -OCOR: R represents a hydrocarbon group) An aryl group having 6 to 20 carbon atoms, an aryl group having 6 to 20 carbon atoms substituted by an electron-donating group and/or an electron-donating group, a benzyl group or a cyano group substituted with an electron-donating group and/or an electron-donating group , methylthio. More preferably, both R 4 and R 5 are a hydrogen atom, or R 4 is a methyl group, and R 5 is a hydrogen atom.
上述式(1)中,R6、R7、R8及R9各獨立表示氫原子、鹵原子、羥基、巰基、硫醚基、矽烷基、矽烷醇基、硝基、亞硝基、亞磺基、磺基、磺酸酯基、膦基、氧膦基、膦醯基、磷酸酯基、胺基、銨基、或有機基。 In the above formula (1), R 6 , R 7 , R 8 and R 9 each independently represent a hydrogen atom, a halogen atom, a hydroxyl group, a thiol group, a thioether group, a decyl group, a decyl alcohol group, a nitro group, a nitroso group, and a arylene group. Sulfo, sulfo, sulfonate, phosphino, phosphinyl, phosphonium, phosphate, amine, ammonium, or organic.
R6、R7、R8及R9中之有機基列舉為R1及R2中例示 者。該有機基與R1及R2之情況相同,可於該有機基中含有雜原子等之烴基以外之鍵或取代基。另外,該有機基可為直鏈狀、分支鏈狀、環狀之任一種。 The organic groups in R 6 , R 7 , R 8 and R 9 are exemplified as R 1 and R 2 . The organic group is the same as in the case of R 1 and R 2 , and the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain.
又,上述式(1)中,R6及R7不為羥基。 Further, in the above formula (1), R 6 and R 7 are not a hydroxyl group.
R6、R7、R8及R9亦可彼等之兩個以上鍵結形成環狀構造,亦可含有雜原子之鍵。環狀構造列舉為雜環烷基、雜芳基等,亦可為縮合環。例如,R6、R7、R8及R9亦可彼等之兩個以上鍵結,共用R6、R7、R8及R9所鍵結之苯環之原子形成萘、蒽、菲、茚等之縮合環。 R 6 , R 7 , R 8 and R 9 may be bonded to each other by two or more of them to form a cyclic structure, or may contain a bond of a hetero atom. The cyclic structure is exemplified by a heterocycloalkyl group, a heteroaryl group or the like, and may also be a condensed ring. For example, R 6 , R 7 , R 8 and R 9 may be bonded to two or more of them, and the atoms of the benzene ring bonded by R 6 , R 7 , R 8 and R 9 are combined to form naphthalene, anthracene and phenanthrene. Condensation ring of hydrazine, etc.
上述中,R6、R7、R8及R9較好各獨立為氫原子、碳數1~10之烷基、碳數4~13之環烷基、碳數4~13之環烯基、碳數7~16之芳氧基烷基、碳數7~20之芳烷基、具有氰基之碳數2~11之烷基、具有羥基之碳數1~10之烷基、碳數1~10之烷氧基、碳數2~11之醯胺基、碳數1~10之烷硫基、碳數1~10之醯基、碳數2~11之酯基、碳數6~20之芳基、取代電子供給性基及/或拉電子性基之碳數6~20之芳基、取代電子供給性基及/或拉電子性基之苄基、氰基、甲硫基、硝基。 In the above, R 6 , R 7 , R 8 and R 9 are each independently a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, a cycloalkyl group having 4 to 13 carbon atoms, and a cycloalkenyl group having 4 to 13 carbon atoms. , an aryloxyalkyl group having 7 to 16 carbon atoms, an aralkyl group having 7 to 20 carbon atoms, an alkyl group having 2 to 11 carbon atoms having a cyano group, an alkyl group having 1 to 10 carbon atoms having a hydroxyl group, and a carbon number 1 to 10 alkoxy groups, 2 to 11 carbon atoms, 1 to 10 alkylthio groups, 1 to 10 carbon atoms, 2 to 11 carbon groups, carbon number 6~ An aryl group of 20, an electron-donating group and/or an electron-donating group having an aryl group having 6 to 20 carbon atoms, a substituted electron-donating group, and/or an electron-donating group, a cyano group, a cyano group, a methylthio group, Nitro.
又,R6、R7、R8及R9亦可彼等之兩個以上鍵結,共用R6、R7、R8及R9所鍵結之苯環之原子而形成萘、蒽、菲、茚等之縮合環。 Further, R 6 , R 7 , R 8 and R 9 may be bonded to two or more of them, and the atoms of the benzene ring bonded by R 6 , R 7 , R 8 and R 9 are shared to form naphthalene, anthracene, A condensed ring of phenanthrene, anthracene, etc
更好,R6、R7、R8及R9均為氫原子,或R6、R7、R8及R9之任一者為硝基,其餘三者為氫原子。 More preferably, R 6 , R 7 , R 8 and R 9 are each a hydrogen atom, or any one of R 6 , R 7 , R 8 and R 9 is a nitro group, and the other three are hydrogen atoms.
上述式(1)中,R10表示氫原子或有機基。 In the above formula (1), R 10 represents a hydrogen atom or an organic group.
R10中之有機基例舉為R1及R2中所例示者。該有機基與R1及R2之情況相同,可於該有機基中含有雜原子等之烴基以外之鍵或取代基。另外,該有機基可為直鏈狀、分支鏈狀、環狀之任一種。 The organic group in R 10 is exemplified as R 1 and R 2 . The organic group is the same as in the case of R 1 and R 2 , and the organic group may contain a bond or a substituent other than a hydrocarbon group such as a hetero atom. Further, the organic group may be any of a linear chain, a branched chain, and a cyclic chain.
以上述式(1)表示之化合物由於在苯環之對位具有-OR10基,故對溶劑之溶解性良好。 Since the compound represented by the above formula (1) has a -OR 10 group at the para position of the benzene ring, the solubility in a solvent is good.
上述中,R10較好為氫原子、或碳數1~12之烷基,更好為甲基。 In the above, R 10 is preferably a hydrogen atom or an alkyl group having 1 to 12 carbon atoms, more preferably a methyl group.
以上述式(1)表示之化合物中,最佳之具體例列舉為以下述式表示之化合物。 Among the compounds represented by the above formula (1), the most preferable specific examples are compounds represented by the following formula.
以上述式(1)表示之化合物之合成方法並無特別限制,可依據後述實施例所記載之方法合成。 The method for synthesizing the compound represented by the above formula (1) is not particularly limited, and it can be synthesized according to the method described in the examples below.
樹脂組成物中,以上述式(1)表示之化合物之含量,在不妨礙本發明目的之範圍內並無特別限制。以上述式(1)表示之化合物之含量典型上相對於鹼可溶性樹脂(A)100質量份,較好為0.01~10質量份,更好為0.01~5質量份。 In the resin composition, the content of the compound represented by the above formula (1) is not particularly limited as long as it does not impair the object of the present invention. The content of the compound represented by the above formula (1) is preferably 0.01 to 10 parts by mass, more preferably 0.01 to 5 parts by mass, per 100 parts by mass of the alkali-soluble resin (A).
樹脂組成物含有含丙二醇單甲基醚乙酸酯(PGMEA)之溶劑作為溶劑(S)。 The resin composition contains a solvent containing propylene glycol monomethyl ether acetate (PGMEA) as a solvent (S).
溶劑(S)中之PGMEA含量在不妨礙本發明目的之範圍內並無特別限制,但較好為50質量%以上,更好為70質量%以上,最好為100質量%。溶劑(S)中之PGMEA含量為50質量%以上時,容易引起鹼可溶性樹脂(A)之分子量增大,故利用本發明之效果顯著。 The PGMEA content in the solvent (S) is not particularly limited as long as it does not impair the object of the present invention, but is preferably 50% by mass or more, more preferably 70% by mass or more, and most preferably 100% by mass. When the PGMEA content in the solvent (S) is 50% by mass or more, the molecular weight of the alkali-soluble resin (A) tends to increase, and the effect of the present invention is remarkable.
溶劑(S)包含PGMEA以外之其他有機溶劑時,其他有機溶劑在不妨礙本發明目的之範圍內並無特別限制。PGMEA以外之其他有機溶劑具體列舉為乙二醇單甲基醚、乙二醇單乙基醚、乙二醇單正丙基醚、乙二醇單正丁基醚、二乙二醇單甲基醚、二乙二醇單乙基醚、二乙二醇單正丙基醚、二乙二醇單正丁基醚、三乙二醇單甲基醚、三乙二醇單乙基醚、丙二醇單甲基醚、丙二醇單乙基醚、丙二醇單正丙基醚、丙二醇單正丁基醚、二丙二醇單甲基醚、二丙二醇單乙基醚、二丙二醇單正丙基醚、二丙二醇單正丁基醚、三丙二醇單甲基醚、三丙二醇單乙基醚等之(多)烷二醇單烷基醚類;乙二醇單甲基醚乙酸酯、乙二醇單乙基醚乙酸酯、二乙二醇單甲基醚乙酸酯、二乙二醇單乙基醚乙酸酯、丙二醇單乙基醚乙酸酯等之(多)烷二醇單烷基醚乙酸酯類;甲基乙基酮、環己酮、2-庚酮、3-庚酮等酮類;2-羥基丙酸甲酯、2-羥基丙酸乙酯等之乳酸烷酯類;2-羥基-2-甲基丙酸乙酯、3-甲氧基丙酸甲酯、3- 甲氧基丙酸乙酯、3-乙氧基丙酸甲酯、3-乙氧基丙酸乙酯、乙氧基乙酸乙酯、羥基乙酸乙酯、2-羥基-3-甲基丁酸甲酯、乙酸3-甲氧基丁基酯、乙酸3-甲基-3-甲氧基丁酯、丙酸3-甲基-3-甲氧基丁酯、乙酸乙酯、乙酸正丙酯、乙酸異丙酯、乙酸正丁酯、乙酸異丁酯、甲酸正戊酯、乙酸異戊酯、丙酸正丁酯、丁酸乙酯、丁酸正丙酯、丁酸異丙酯、丁酸正丁酯、丙酮酸甲酯、丙酮酸乙酯、丙酮酸正丙酯、乙醯基乙酸甲酯、乙醯基乙酸乙酯、2-氧代丁酸乙酯等其他酯類;甲苯、二甲苯等芳香族烴類;N-甲基吡咯烷酮、N,N-二甲基甲醯胺、N,N-二甲基乙醯胺等醯胺類等。該等中,以烷二醇單烷基醚類、烷二醇單烷基醚乙酸酯類、乳酸烷酯類較佳,更好為烷二醇單烷基醚乙酸酯類。該等溶劑可單獨使用或組合兩種以上使用。 When the solvent (S) contains an organic solvent other than PGMEA, the other organic solvent is not particularly limited insofar as it does not impair the object of the present invention. Other organic solvents other than PGMEA are specifically exemplified by ethylene glycol monomethyl ether, ethylene glycol monoethyl ether, ethylene glycol mono-n-propyl ether, ethylene glycol mono-n-butyl ether, diethylene glycol monomethyl Ether, diethylene glycol monoethyl ether, diethylene glycol mono-n-propyl ether, diethylene glycol mono-n-butyl ether, triethylene glycol monomethyl ether, triethylene glycol monoethyl ether, propylene glycol Monomethyl ether, propylene glycol monoethyl ether, propylene glycol mono-n-propyl ether, propylene glycol mono-n-butyl ether, dipropylene glycol monomethyl ether, dipropylene glycol monoethyl ether, dipropylene glycol mono-n-propyl ether, dipropylene glycol single (poly)alkylene glycol monoalkyl ethers such as n-butyl ether, tripropylene glycol monomethyl ether, tripropylene glycol monoethyl ether; ethylene glycol monomethyl ether acetate, ethylene glycol monoethyl ether (poly)alkylene glycol monoalkyl ether acetates such as acetate, diethylene glycol monomethyl ether acetate, diethylene glycol monoethyl ether acetate, propylene glycol monoethyl ether acetate a ketone such as methyl ethyl ketone, cyclohexanone, 2-heptanone or 3-heptanone; an alkyl lactate such as methyl 2-hydroxypropionate or ethyl 2-hydroxypropionate; Ethyl 2-methylpropionate, 3- Oxypropanoate, 3- Ethyl methoxypropionate, methyl 3-ethoxypropionate, ethyl 3-ethoxypropionate, ethyl ethoxyacetate, ethyl hydroxyacetate, 2-hydroxy-3-methylbutyric acid Methyl ester, 3-methoxybutyl acetate, 3-methyl-3-methoxybutyl acetate, 3-methyl-3-methoxybutyl propionate, ethyl acetate, n-propyl acetate , isopropyl acetate, n-butyl acetate, isobutyl acetate, n-amyl formate, isoamyl acetate, n-butyl propionate, ethyl butyrate, n-propyl butyrate, isopropyl butyrate, butyl Other esters such as n-butyl acrylate, methyl pyruvate, ethyl pyruvate, n-propyl pyruvate, methyl acetoxyacetate, ethyl acetoacetate, ethyl 2-oxobutanoate; toluene, An aromatic hydrocarbon such as xylene; an amide such as N-methylpyrrolidone, N,N-dimethylformamide or N,N-dimethylacetamide. Among these, an alkanediol monoalkyl ether, an alkylene glycol monoalkyl ether acetate, and an alkyl lactate are preferable, and an alkanediol monoalkyl ether acetate is more preferable. These solvents may be used singly or in combination of two or more.
樹脂組成物中之溶劑(S)之含量並無特別限制,可考慮使用樹脂組成物調製之感光性樹脂組成物之組成適當決定。 The content of the solvent (S) in the resin composition is not particularly limited, and the composition of the photosensitive resin composition prepared by using the resin composition can be appropriately determined.
本發明之樹脂組成物可以三輥研磨機、球磨機、砂磨機等攪拌機混合(分散.混練)上述各成分,且視需要以5μm之薄膜過濾器等過濾器過濾而調製。 The resin composition of the present invention can be mixed (dispersed and kneaded) with a mixer such as a three-roll mill, a ball mill, or a sand mill to prepare the above components, and if necessary, filtered by a filter such as a membrane filter of 5 μm.
感光性樹脂組成物,除上述樹脂組成物以外,含有光 聚合性單體(B)、及光聚合起始劑(C)。以下針對感光性樹脂組成物中所含各成分加以說明。 The photosensitive resin composition contains light in addition to the above resin composition A polymerizable monomer (B) and a photopolymerization initiator (C). Hereinafter, each component contained in the photosensitive resin composition will be described.
可作為鹼可溶性樹脂(A)使用之樹脂,係如關於樹脂組成物之上述者。 The resin which can be used as the alkali-soluble resin (A) is as described above for the resin composition.
感光性樹脂組成物中之鹼可溶性樹脂(A)之含量相對於感光性樹脂組成物之固體成分較好為40~85質量%,更好為45~75質量%。藉由成為上述範圍,有使顯像性易於均衡之傾向。 The content of the alkali-soluble resin (A) in the photosensitive resin composition is preferably from 40 to 85% by mass, more preferably from 45 to 75% by mass, based on the solid content of the photosensitive resin composition. By setting it as the said range, it exists in the tendency for the imaging property to be easy to balance.
以上述式(1)表示之化合物,係如關於樹脂組成物之上述者。感光性樹脂組成物中之以上述式(1)表示之化合物之含量係與樹脂組成物中之含量相同。以上述式(1)表示之化合物之含量,典型上相對於鹼可溶性樹脂(A)100質量份,較好為0.01~10質量份,更好為0.01~5質量份。以上述式(1)表示之化合物亦可在使用上述樹脂組成物調製感光性樹脂組成物時追加。 The compound represented by the above formula (1) is as described above for the resin composition. The content of the compound represented by the above formula (1) in the photosensitive resin composition is the same as the content in the resin composition. The content of the compound represented by the above formula (1) is preferably 0.01 to 10 parts by mass, more preferably 0.01 to 5 parts by mass, per 100 parts by mass of the alkali-soluble resin (A). The compound represented by the above formula (1) may be added when the photosensitive resin composition is prepared by using the above resin composition.
本發明之感光性樹脂組成物中所含有之光聚合性單體(B)(以下亦稱為「(B)成分」)可較好地使用具有乙烯性不飽和基之單體。該具有乙烯性不飽和基之單體有單 官能單體與多官能單體。 The photopolymerizable monomer (B) (hereinafter also referred to as "(B) component") contained in the photosensitive resin composition of the present invention can preferably use a monomer having an ethylenically unsaturated group. The monomer having an ethylenically unsaturated group has a single Functional monomers and polyfunctional monomers.
單官能單體例舉為(甲基)丙烯醯胺、羥甲基(甲基)丙烯醯胺、甲氧基甲基(甲基)丙烯醯胺、乙氧基甲基(甲基)丙烯醯胺、丙氧基甲基(甲基)丙烯醯胺、丁氧基甲氧基甲基(甲基)丙烯醯胺、N-羥甲基(甲基)丙烯醯胺、N-羥基甲基(甲基)丙烯醯胺、(甲基)丙烯酸、富馬酸、馬來酸、馬來酸酐、衣康酸、衣康酸酐、檸康酸、檸康酸酐、巴豆酸、2-丙烯醯胺-2-甲基丙烷磺酸、第三丁基丙烯醯胺磺酸、(甲基)丙烯酸甲酯、(甲基)丙烯酸乙酯、(甲基)丙烯酸丁酯、(甲基)丙烯酸2-乙基己酯、(甲基)丙烯酸環己酯、(甲基)丙烯酸2-羥基乙酯、(甲基)丙烯酸2-羥基丙酯、(甲基)丙烯酸2-羥基丁酯、(甲基)丙烯酸2-苯氧基-2-羥基丙酯、2-(甲基)丙烯醯氧基-2-羥基丙基苯二甲酸酯、丙三醇單(甲基)丙烯酸酯、(甲基)丙烯酸四氫糠酯、二甲胺基(甲基)丙烯酸酯、(甲基)丙烯酸縮水甘油酯、(甲基)丙烯酸2,2,2-三氟乙酯、(甲基)丙烯酸2,2,3,3-四氟丙酯、苯二甲酸衍生物之半(甲基)丙烯酸酯等。該等單官能單體可單獨使用或組合兩種以上使用。 Monofunctional monomers are exemplified by (meth) acrylamide, hydroxymethyl (meth) acrylamide, methoxymethyl (meth) acrylamide, ethoxymethyl (meth) propylene oxime Amine, propoxymethyl (meth) acrylamide, butoxymethoxymethyl (meth) acrylamide, N-methylol (meth) acrylamide, N-hydroxymethyl ( Methyl) acrylamide, (meth)acrylic acid, fumaric acid, maleic acid, maleic anhydride, itaconic acid, itaconic anhydride, citraconic acid, citraconic anhydride, crotonic acid, 2-propenylamine - 2-methylpropanesulfonic acid, tert-butylacrylamide, methyl (meth)acrylate, ethyl (meth)acrylate, butyl (meth)acrylate, 2-ethyl (meth)acrylate Hexyl hexyl ester, cyclohexyl (meth) acrylate, 2-hydroxyethyl (meth) acrylate, 2-hydroxypropyl (meth) acrylate, 2-hydroxybutyl (meth) acrylate, (methyl) 2-phenoxy-2-hydroxypropyl acrylate, 2-(methyl)propenyloxy-2-hydroxypropyl phthalate, glycerol mono(meth) acrylate, (methyl) Tetrahydrofurfuryl acrylate, dimethylamino (meth) acrylate, glycidyl (meth) acrylate, (methyl) Acid 2,2,2-trifluoroethyl acrylate, (meth) acrylate, 2,2,3,3-tetrafluoro-propyl, semi-phthalic acid derivative of (meth) acrylate. These monofunctional monomers may be used singly or in combination of two or more.
另一方面,多官能單體列舉為乙二醇二(甲基)丙烯酸酯、二乙二醇二(甲基)丙烯酸酯、四乙二醇二(甲基)丙烯酸酯、丙二醇二(甲基)丙烯酸酯、聚丙二醇二(甲基)丙烯酸酯、丁二醇二(甲基)丙烯酸酯、新戊二醇二(甲基)丙烯酸酯、1,6-己二醇二(甲基)丙烯酸 酯、三羥甲基丙烷三(甲基)丙烯酸酯、丙三醇二(甲基)丙烯酸酯、季戊四醇三丙烯酸酯、季戊四醇四丙烯酸酯、二季戊四醇五丙烯酸酯、二季戊四醇六丙烯酸酯、季戊四醇二(甲基)丙烯酸酯、季戊四醇三(甲基)丙烯酸酯、季戊四醇四(甲基)丙烯酸酯、二季戊四醇五(甲基)丙烯酸酯、二季戊四醇六(甲基)丙烯酸酯、2,2-雙(4-(甲基)丙烯醯氧基二乙氧基苯基)丙烷、2,2-雙(4-(甲基)丙烯醯氧基聚乙氧基苯基)丙烷、2-羥基-3-(甲基)丙烯醯氧基丙基(甲基)丙烯酸酯、乙二醇二縮水甘油醚二(甲基)丙烯酸酯、二乙二醇二縮水甘油醚二(甲基)丙烯酸酯、苯二甲酸二縮水甘油酯二(甲基)丙烯酸酯、丙三醇三丙烯酸酯、丙三醇聚縮水甘油醚聚(甲基)丙烯酸酯、胺基甲酸酯(甲基)丙烯酸酯(亦即,甲苯二異氰酸酯)、三甲基六亞甲基二異氰酸酯與六亞甲基二異氰酸酯等與(甲基)丙烯酸2-羥基乙基酯之反應物,亞甲基雙(甲基)丙烯醯胺、(甲基)丙烯醯胺亞甲基醚、多元醇與N-羥甲基(甲基)丙烯醯胺之縮合物等之多官能單體,或三丙烯甲醛等。該等多官能單體可單獨使用或組合兩種以上使用。 On the other hand, polyfunctional monomers are exemplified by ethylene glycol di(meth)acrylate, diethylene glycol di(meth)acrylate, tetraethylene glycol di(meth)acrylate, propylene glycol di(methyl) Acrylate, polypropylene glycol di(meth)acrylate, butanediol di(meth)acrylate, neopentyl glycol di(meth)acrylate, 1,6-hexanediol di(meth)acrylic acid Ester, trimethylolpropane tri(meth)acrylate, glycerol di(meth)acrylate, pentaerythritol triacrylate, pentaerythritol tetraacrylate, dipentaerythritol pentaacrylate, dipentaerythritol hexaacrylate, pentaerythritol II (Meth) acrylate, pentaerythritol tri(meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol penta (meth) acrylate, dipentaerythritol hexa (meth) acrylate, 2, 2-double (4-(Methyl)propenyloxydiethoxyphenyl)propane, 2,2-bis(4-(methyl)propenyloxypolyethoxyphenyl)propane, 2-hydroxy-3 -(Meth)acryloxypropyl (meth) acrylate, ethylene glycol diglycidyl ether di(meth) acrylate, diethylene glycol diglycidyl ether di(meth) acrylate, benzene Diglycidyl dicarboxylate di(meth)acrylate, glycerol triacrylate, glycerol polyglycidyl ether poly(meth)acrylate, urethane (meth) acrylate (ie , toluene diisocyanate), trimethylhexamethylene diisocyanate and hexamethylene diisocyanate, etc. with (meth)acrylic acid 2- The reaction of a ethyl ethyl ester, a condensate of methylene bis(meth) acrylamide, (meth) acrylamide, methylene ether, a polyol and N- hydroxymethyl (meth) acrylamide Such as a polyfunctional monomer, or tripropylene formaldehyde. These polyfunctional monomers may be used singly or in combination of two or more.
該等具有乙烯性不飽和基之單體中,就感光性樹脂組成物對基板之密著性、提高感光性樹脂組成物硬化後之破壞強度之觀點而言,較好為三官能以上之多官能單體,更好為六官能以上之多官能單體。 Among the monomers having an ethylenically unsaturated group, the adhesion of the photosensitive resin composition to the substrate and the improvement of the breaking strength of the photosensitive resin composition after curing are preferably three or more A functional monomer, more preferably a polyfunctional monomer having more than six functional groups.
(B)成分之含量相對於感光性樹脂組成物之固體成 分較好為5~50質量%,更好為10~40質量%。藉由成為上述範圍,有使感度、顯像性、解向性易於獲得均衡之傾向。 The content of the component (B) is relative to the solid content of the photosensitive resin composition The fraction is preferably from 5 to 50% by mass, more preferably from 10 to 40% by mass. In the above range, sensitivity, development, and dissociation tend to be balanced.
本發明之感光性樹脂組成物中含有之光聚合起始劑(C)(以下亦稱為「(C)成分」)並無特別限制,可使用以往習知之光聚合起始劑。 The photopolymerization initiator (C) (hereinafter also referred to as "(C) component)) contained in the photosensitive resin composition of the present invention is not particularly limited, and a conventional photopolymerization initiator can be used.
光聚合起始劑之具體例列舉為1-羥基環己基苯基酮、2-羥基-2-甲基-1-苯基丙烷-1-酮、1-[4-(2-羥基乙氧基)苯基]-2-羥基-2-甲基-1-丙烷-1-酮、1-(4-異丙基苯基)-2-羥基-2-甲基丙烷-1-酮、1-(4-十二烷基苯基)-2-羥基-2-甲基丙烷-1-酮、2,2-二甲氧基-1,2-二苯基乙烷-1-酮、雙(4-二甲胺基苯基)酮、2-甲基-1-[4-(甲硫基)苯基]-2-嗎啉基丙烷-1-酮、2-苄基-2-二甲胺基-1-(4-嗎啉基苯基)-丁烷-1-酮、乙酮、1-[9-乙基-6-(2-甲基苯甲醯基)-9H-咔唑-3-基]、1-(O-乙醯基肟)、1,2-辛烷二酮、1-[4-(苯硫基)-,2-(O-苯甲醯基肟)]、2,4,6-三甲基苯甲醯基二苯基氧化膦、4-苯甲醯基-4'-甲基二甲基硫醚、4-二甲胺基苯甲酸、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸丁酯、4-二甲胺基-2-乙基己基苯甲酸、4-二甲胺基-2-異戊基苯甲酸、苄基-β-甲氧基乙基乙縮醛、苄基二甲基縮酮、1-苯基-1,2-丙二酮-2-(O-乙氧基羰基)肟、鄰-苯甲醯基苯甲酸甲酯、2,4-二乙 基噻噸酮、2-氯噻噸酮、2,4-二甲基噻噸酮、1-氯-4-丙氧基噻噸酮、噻噸(thioxanthene)、2-氯噻噸、2,4-二乙基噻噸、2-甲基噻噸、2-異丙基噻噸、2-乙基蒽醌、八甲基蒽醌、1,2-苯并蒽醌、2,3-二苯基蒽醌、偶氮雙異丁腈、苯甲醯基過氧化物、異丙苯過氧化物、2-巰基苯并咪唑、2-巰基苯并噁唑、2-巰基苯并噻唑、2-(鄰-氯苯基)-4,5-二(間-甲氧基苯基)-咪唑二聚物、二苯甲酮、2-氯二苯甲酮、p,p'-雙二甲胺基二苯甲酮、4,4'-雙二乙胺基二苯甲酮、4,4’-二氯二苯甲酮、3,3-二甲基-4-甲氧基二苯甲酮、苯偶醯、苯偶因、苯偶因甲基醚、苯偶因乙基醚、苯偶因異丙基醚、苯偶因正丁基醚、苯偶因異丁基醚、苯偶因丁基醚、苯乙酮、2,2-二乙氧基苯乙酮、對-二甲基苯乙酮、對-二甲胺基苯丙酮、二氯苯乙酮、三氯苯乙酮、對-第三丁基苯乙酮、對-二甲胺基苯乙酮、對-第三丁基三氯苯乙酮、對-第三丁基二氯苯乙酮、α,α-二氯-4-苯氧基苯乙酮;噻噸酮、2-甲基噻噸酮、2-異丙基噻噸酮、二苯并環庚酮(dibenzosuberone)、戊基-4-二甲胺基苯甲酸酯、9-苯基吖啶、1,7-雙-(9-吖啶基)庚烷、1,5-雙-(9-吖啶基)戊烷、1,3-雙-(9-吖啶基)丙烷、對-甲氧基三嗪、2,4,6-參(三氯甲基)-s-三嗪、2-甲基-4,6-雙(三氯甲基)-s-三嗪、2-[2-(5-甲基呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(呋喃-2-基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(4-二乙胺基-2-甲基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-[2-(3,4-二甲氧 基苯基)乙烯基]-4,6-雙(三氯甲基)-s-三嗪、2-(4-甲氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-乙氧基苯乙烯基)-4,6-雙(三氯甲基)-s-三嗪、2-(4-正丁氧基苯基)-4,6-雙(三氯甲基)-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯基-s-三嗪、2,4-雙-三氯甲基-6-(3-溴-4-甲氧基)苯乙烯基苯基-s-三嗪、2,4-雙-三氯甲基-6-(2-溴-4-甲氧基)苯乙烯基苯基-s-三嗪等。其中亦以使用肟系的光聚合起始劑時,由感度之層面來看為特佳。該等光聚合起始劑可單獨使用或組合兩種以上使用。 Specific examples of the photopolymerization initiator are 1-hydroxycyclohexyl phenyl ketone, 2-hydroxy-2-methyl-1-phenylpropan-1-one, 1-[4-(2-hydroxyethoxy) Phenyl]-2-hydroxy-2-methyl-1-propan-1-one, 1-(4-isopropylphenyl)-2-hydroxy-2-methylpropan-1-one, 1- (4-dodecylphenyl)-2-hydroxy-2-methylpropan-1-one, 2,2-dimethoxy-1,2-diphenylethane-1-one, bis ( 4-dimethylaminophenyl)one, 2-methyl-1-[4-(methylthio)phenyl]-2-morpholinylpropan-1-one, 2-benzyl-2-dimethyl Amino-1-(4-morpholinylphenyl)-butan-1-one, ethyl ketone, 1-[9-ethyl-6-(2-methylbenzylidene)-9H-carbazole -3-yl], 1-(O-acetylindenyl), 1,2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzhydrylhydrazine)] , 2,4,6-trimethylbenzimidyldiphenylphosphine oxide, 4-benzylidene-4'-methyldimethyl sulfide, 4-dimethylaminobenzoic acid, 4-di Methyl methylaminobenzoate, ethyl 4-dimethylaminobenzoate, butyl 4-dimethylaminobenzoate, 4-dimethylamino-2-ethylhexylbenzoic acid, 4-dimethylamine 2-isoamylbenzoic acid, benzyl-β-methoxyethyl acetal, benzyldimethylketal, 1-phenyl-1,2-propanol Ketone -2- (O- ethoxycarbonyl) oxime, o - benzoyl benzoate, 2,4-diethyl Thiophenone, 2-chlorothioxanthone, 2,4-dimethylthioxanthone, 1-chloro-4-propoxythioxanthone, thioxanthene, 2-chlorothioxan, 2, 4-Diethyl thioxanthene, 2-methyl thioxanthene, 2-isopropyl thioxanthene, 2-ethyl hydrazine, octamethyl hydrazine, 1,2-benzopyrene, 2,3-di Phenylhydrazine, azobisisobutyronitrile, benzhydryl peroxide, cumene peroxide, 2-mercaptobenzimidazole, 2-mercaptobenzoxazole, 2-mercaptobenzothiazole, 2 -(o-chlorophenyl)-4,5-di(m-methoxyphenyl)-imidazole dimer, benzophenone, 2-chlorobenzophenone, p,p'-bisdimethyl Aminobenzophenone, 4,4'-bisdiethylaminobenzophenone, 4,4'-dichlorobenzophenone, 3,3-dimethyl-4-methoxybiphenyl Ketone, benzoin, benzoin, benzoin methyl ether, benzoin ethyl ether, benzoin isopropyl ether, benzoin n-butyl ether, benzoin isobutyl ether, benzoate Butyl ether, acetophenone, 2,2-diethoxyacetophenone, p-dimethylacetophenone, p-dimethylaminopropiophenone, dichloroacetophenone, trichloroacetophenone , p-t-butylacetophenone, p-dimethylaminoacetophenone, p-tert-butyl three Chloroacetophenone, p-t-butyldichloroacetophenone, α,α-dichloro-4-phenoxyacetophenone; thioxanthone, 2-methylthioxanthone, 2-isopropyl Thiophenone, dibenzosuberone, pentyl-4-dimethylaminobenzoate, 9-phenyl acridine, 1,7-bis-(9-acridinyl) heptane 1,5-bis-(9-acridinyl)pentane, 1,3-bis-(9-acridinyl)propane, p-methoxytriazine, 2,4,6-paran (trichloro) Methyl)-s-triazine, 2-methyl-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(5-methylfuran-2-yl)vinyl] -4,6-bis(trichloromethyl)-s-triazine, 2-[2-(furan-2-yl)vinyl]-4,6-bis(trichloromethyl)-s-triazine 2-[2-(4-Diethylamino-2-methylphenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-[2-(3, 4-dimethoxy Phenyl)vinyl]-4,6-bis(trichloromethyl)-s-triazine, 2-(4-methoxyphenyl)-4,6-bis(trichloromethyl)-s -triazine, 2-(4-ethoxystyryl)-4,6-bis(trichloromethyl)-s-triazine, 2-(4-n-butoxyphenyl)-4,6 - bis(trichloromethyl)-s-triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy)phenyl-s-triazine, 2,4- Bis-trichloromethyl-6-(2-bromo-4-methoxy)phenyl-s-triazine, 2,4-bis-trichloromethyl-6-(3-bromo-4-methoxy Styrylphenyl-s-triazine, 2,4-bis-trichloromethyl-6-(2-bromo-4-methoxy)styrylphenyl-s-triazine, and the like. Among them, the use of a lanthanide photopolymerization initiator is particularly preferable from the viewpoint of sensitivity. These photopolymerization initiators may be used singly or in combination of two or more.
(C)成分之含量相對於感光性樹脂組成物之固體成分較好為0.5~30質量%,更好為1~20質量%。藉由成為上述範圍,可獲得充分之耐熱性、耐藥品性,且可提高塗膜形成能,抑制硬化不良。 The content of the component (C) is preferably from 0.5 to 30% by mass, more preferably from 1 to 20% by mass, based on the solid content of the photosensitive resin composition. When it is in the above range, sufficient heat resistance and chemical resistance can be obtained, and coating film formation energy can be improved, and curing failure can be suppressed.
又,該(C)成分中亦可組合光起始助劑。光起始助劑列舉為三乙醇胺、甲基二乙醇胺、三異丙醇胺、4-二甲胺基苯甲酸甲酯、4-二甲胺基苯甲酸乙酯、4-二甲胺基苯甲酸異戊酯、4-二甲胺基苯甲酸2-乙基己酯、苯甲酸2-二甲胺基乙酯、N,N-二甲基對甲苯胺、4,4’-雙(二甲胺基)二苯甲酮、9,10-二甲氧基蒽、2-乙基-9,10-二甲氧基蒽、9,10-二乙氧基蒽、2-乙基-9,10-二乙氧基蒽等。該等光起始助劑可單獨使用或組合兩種以上使用。 Further, a photoinitiator may be combined in the component (C). The photoinitiating aids are exemplified by triethanolamine, methyldiethanolamine, triisopropanolamine, methyl 4-dimethylaminobenzoate, ethyl 4-dimethylaminobenzoate, 4-dimethylaminobenzene. Isoamyl formate, 2-ethylhexyl 4-dimethylaminobenzoate, 2-dimethylaminoethyl benzoate, N,N-dimethyl-p-toluidine, 4,4'-double (two Methylamino)benzophenone, 9,10-dimethoxyanthracene, 2-ethyl-9,10-dimethoxyanthracene, 9,10-diethoxyanthracene, 2-ethyl-9 , 10-diethoxyanthracene, and the like. These photoinitiating aids may be used singly or in combination of two or more.
本發明之感光性樹脂組成物亦可視需要含有著色劑(D)。尤其,感光性樹脂組成物含有遮光劑作為著色劑時,可較好地用於黑色間隔物之形成用。若為黑色間隔物,則可抑制來自顯示裝置之間隔物部分之漏光,可製造對比性高之可顯示較佳圖像之顯示裝置。 The photosensitive resin composition of the present invention may contain a coloring agent (D) as needed. In particular, when the photosensitive resin composition contains a light-shielding agent as a coloring agent, it can be suitably used for formation of a black spacer. In the case of a black spacer, light leakage from the spacer portion of the display device can be suppressed, and a display device capable of displaying a better image with high contrast can be manufactured.
本發明之感光性樹脂組成物中所含有之著色劑(D)並無特別限制,但較好使用例如色彩指數(C.I.;The Society of Dyers and Colourists公司發行)中歸類為顏料(Pigment)之化合物,具體為使用附有如下述之色彩指數(C.I.)編號者。 The coloring agent (D) contained in the photosensitive resin composition of the present invention is not particularly limited, but is preferably classified into a pigment (Pigment) by, for example, a color index (CI; issued by The Society of Dyers and Colourists). The compound, specifically the one using the color index (CI) number attached below.
可使用之黃色顏料之例列舉為C.I.顏料黃-1(以下,同樣為「C.I.顏料黃」,僅列出編號)、3、11、12、13、14、15、16、17、20、24、31、53、55、60、61、65、71、73、74、81、83、86、93、95、97、98、99、100、101、104、106、108、109、110、113、114、116、117、119、120、125、126、127、128、129、137、138、139、147、148、150、151、152、153、154、155、156、166、167、168、175、180、及185。 Examples of yellow pigments that can be used are listed as CI Pigment Yellow-1 (hereinafter, also referred to as "CI Pigment Yellow", only the number is listed), 3, 11, 12, 13, 14, 15, 16, 17, 20, 24 , 31, 53, 55, 60, 61, 65, 71, 73, 74, 81, 83, 86, 93, 95, 97, 98, 99, 100, 101, 104, 106, 108, 109, 110, 113 , 114, 116, 117, 119, 120, 125, 126, 127, 128, 129, 137, 138, 139, 147, 148, 150, 151, 152, 153, 154, 155, 156, 166, 167, 168 , 175, 180, and 185.
可較好使用之橙色顏料之例列舉為C.I.顏料橙1(以下,同樣為「C.I.顏料橙」,僅列出編號)、5、13、14、16、17、24、34、36、38、40、43、46、49、51、55、59、61、63、64、71、及73。 Examples of the orange pigment which can be preferably used are CI Pigment Orange 1 (hereinafter, also referred to as "CI Pigment Orange", only the number is listed), 5, 13, 14, 16, 17, 24, 34, 36, 38, 40, 43, 46, 49, 51, 55, 59, 61, 63, 64, 71, and 73.
可較好使用之紫色顏料之例列舉為C.I.顏料紫1(以下,同樣為「C.I.顏料紫」,僅列出編號)、19、23、 29、30、32、36、37、38、39、40、及50。 An example of a purple pigment which can be preferably used is C.I. Pigment Violet 1 (hereinafter, also referred to as "C.I. Pigment Violet", only the number is listed), 19, 23, 29, 30, 32, 36, 37, 38, 39, 40, and 50.
可較好使用之紅色顏料之例列舉為C.I.顏料紅1(以下,同樣為「C.I.顏料紅」,僅列出編號)、2、3、4、5、6、7、8、9、10、11、12、14、15、16、17、18、19、21、22、23、30、31、32、37、38、40、41、42、48:1、48:2、48:3、48:4、49:1、49:2、50:1、52:1、53:1、57、57:1、57:2、58:2、58:4、60:1、63:1、63:2、64:1、81:1、83、88、90:1、97、101、102、104、105、106、108、112、113、114、122、123、144、146、149、150、151、155、166、168、170、171、172、174、175、176、177、178、179、180、185、187、188、190、192、193、194、202、206、207、208、209、215、216、217、220、223、224、226、227、228、240、242、243、245、254、255、264、及265。 Examples of red pigments which can be preferably used are CI Pigment Red 1 (hereinafter, also referred to as "CI Pigment Red", only numbers are listed), 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 14, 15, 16, 17, 18, 19, 21, 22, 23, 30, 31, 32, 37, 38, 40, 41, 42, 48:1, 48:2, 48:3, 48:4, 49:1, 49:2, 50:1, 52:1, 53:1, 57, 57:1, 57:2, 58:2, 58:4, 60:1, 63:1 63:2, 64:1, 81:1, 83, 88, 90:1, 97, 101, 102, 104, 105, 106, 108, 112, 113, 114, 122, 123, 144, 146, 149, 150, 151, 155, 166, 168, 170, 171, 172, 174, 175, 176, 177, 178, 179, 180, 185, 187, 188, 190, 192, 193, 194, 202, 206, 207, 208, 209, 215, 216, 217, 220, 223, 224, 226, 227, 228, 240, 242, 243, 245, 254, 255, 264, and 265.
可較好使用之藍色顏料之例列舉為C.I.顏料藍-1(以下,同樣為「C.I.顏料藍」,僅列出編號)、2、15、15:3、15:4、15:6、16、22、60、64、及66。 Examples of blue pigments which can be preferably used are CI Pigment Blue-1 (hereinafter, also referred to as "CI Pigment Blue", only numbers are listed), 2, 15, 15:3, 15:4, 15:6, 16, 22, 60, 64, and 66.
可較好使用之上述其他色相之顏料之例列舉為C.I.顏料綠7、C.I.顏料綠36、C.I.顏料綠37等綠色顏料,C.I.顏料棕23、C.I.顏料棕25、C.I.顏料棕26、C.I.顏料棕28等茶色顏料,C.I.顏料黑1、C.I.顏料黑7等黑色顏料。 Examples of the pigments of the above other hue which can be preferably used are listed as green pigments such as CI Pigment Green 7, CI Pigment Green 36, CI Pigment Green 37, CI Pigment Brown 23, CI Pigment Brown 25, CI Pigment Brown 26, CI Pigment Brown. 28 and other brown pigments, CI pigment black 1, CI pigment black 7 and other black pigments.
又,以著色劑作為遮光劑時,遮光劑較好使用黑色顏料。作為黑色顏料可列舉為碳黑、鈦黑、銅、鐵、錳、鈷、鉻、鎳、鋅、鈣、銀等金屬氧化物、複合氧化物、金 屬硫化物、金屬硫酸鹽或金屬碳酸鹽等,無論是有機物、無機物之各種顏料。該等中,較好使用具有高遮光性之碳黑。 Further, when a coloring agent is used as the light shielding agent, a black pigment is preferably used as the light shielding agent. Examples of the black pigment include metal oxides such as carbon black, titanium black, copper, iron, manganese, cobalt, chromium, nickel, zinc, calcium, and silver, and composite oxides and gold. It is a sulfide, a metal sulfate or a metal carbonate, etc., whether it is an organic or inorganic pigment. Among these, carbon black having high light blocking property is preferably used.
至於碳黑可使用煙囪黑、爐黑、熱裂碳黑、燈黑等習知之碳黑,但較好使用遮光性優異之煙囪黑。又,亦可使用被覆樹脂之碳黑。 As the carbon black, a conventional black carbon such as chimney black, furnace black, thermal black carbon, or lamp black can be used, but chimney black having excellent light shielding properties is preferably used. Further, carbon black coated with a resin can also be used.
又,為了調整碳黑之色調,亦可適當添加上述有機顏料作為輔助顏料。 Further, in order to adjust the color tone of carbon black, the above organic pigment may be appropriately added as an auxiliary pigment.
為使上述著色劑均勻分散於感光性樹脂組成物中,可進而使用分散劑。該種分散劑較好使用聚伸乙亞胺系、胺基甲酸酯樹脂系、丙烯酸樹脂系高分子分散劑。尤其,使用碳黑作為著色劑時,較好使用丙烯酸樹脂系之分散劑作為分散劑。 In order to uniformly disperse the above coloring agent in the photosensitive resin composition, a dispersing agent may be further used. As the dispersant, a polyethylenimine-based, urethane-based resin or acrylic resin-based polymer dispersant is preferably used. In particular, when carbon black is used as the colorant, an acrylic resin-based dispersant is preferably used as the dispersant.
又,無機顏料與有機顏料可分別單獨使用或併用兩種以上,但併用時,相對於無機顏料與有機顏料之總量100質量份,較好使用10~80質量份範圍之有機顏料,更好使用20~40質量份之範圍。 Further, the inorganic pigment and the organic pigment may be used alone or in combination of two or more. When used in combination, it is preferably used in an amount of from 10 to 80 parts by mass based on 100 parts by mass of the total of the inorganic pigment and the organic pigment. Use a range of 20 to 40 parts by mass.
感光性樹脂組成物中之著色劑之使用量可在不妨礙本發明目的之範圍內適當選擇,典型為相對於感光性樹脂組成物之固體成分之合計100質量份,較好為5~70質量份,更好為25~60質量份。藉由在上述範圍內,可以形成期望形狀之間隔物。 The amount of the coloring agent to be used in the photosensitive resin composition can be appropriately selected within the range not impairing the object of the present invention, and is usually 100 parts by mass, preferably 5 to 70% by mass based on the total of the solid content of the photosensitive resin composition. It is preferably 25 to 60 parts by mass. By being within the above range, a spacer of a desired shape can be formed.
尤其,使用感光性樹脂組成物形成黑色間隔物時,較好以使黑色間隔物之被膜每1μm之OD值為0.5以上之方 式調整感光性樹脂組成物中之遮光劑之量。黑色間隔物中被膜每1μm之OD值若為0.5以上,則容易良好地抑制由顯示裝置之間隔物部分之漏光,可獲得充分之顯示對比性。 In particular, when a black spacer is formed using a photosensitive resin composition, it is preferred that the OD value per 1 μm of the film of the black spacer is 0.5 or more. The amount of the opacifier in the photosensitive resin composition is adjusted. When the OD value per 1 μm of the film in the black spacer is 0.5 or more, light leakage from the spacer portion of the display device can be easily suppressed, and sufficient display contrast can be obtained.
著色劑較好使用分散劑以適當濃度分散成分散液後,添加於感光性樹脂組成物中。 The colorant is preferably dispersed in a dispersion at a suitable concentration using a dispersant, and then added to the photosensitive resin composition.
感光性樹脂組成物所含有之溶劑(S)可使用與上述樹脂組成物中可使用之溶劑(S)同種之有機溶劑。調製感光性樹脂組成物時,以使感光性樹脂組成物成為期望之固體成分濃度之方式追加溶劑(S),或可濃縮樹脂組成物。濃縮樹脂組成物時,較好在減壓下以極低溫餾除溶劑(S)。樹脂組成物含充分量之溶劑(S)作為感光性樹脂組成物時,相對於樹脂組成物,並不需要追加新的溶劑(S)。 As the solvent (S) contained in the photosensitive resin composition, an organic solvent of the same kind as the solvent (S) which can be used in the above resin composition can be used. When the photosensitive resin composition is prepared, the solvent (S) may be added so that the photosensitive resin composition has a desired solid content concentration, or the resin composition may be concentrated. When the resin composition is concentrated, it is preferred to distill off the solvent (S) at a very low temperature under reduced pressure. When the resin composition contains a sufficient amount of the solvent (S) as the photosensitive resin composition, it is not necessary to add a new solvent (S) to the resin composition.
感光性樹脂組成物中之(S)成分之含量並無特別限制,可藉可塗佈於基板等之濃度,依據塗佈膜厚適當設定。感光性樹脂組成物之黏度較好為5~500cp,更好為10~50cp,又更好為20~30cp。又,固體成分濃度較好為5~100質量%,更好為20~50質量%。 The content of the component (S) in the photosensitive resin composition is not particularly limited, and can be appropriately set depending on the coating film thickness by the concentration which can be applied to a substrate or the like. The viscosity of the photosensitive resin composition is preferably from 5 to 500 cp, more preferably from 10 to 50 cp, even more preferably from 20 to 30 cp. Further, the solid content concentration is preferably from 5 to 100% by mass, more preferably from 20 to 50% by mass.
感光性樹脂組成物中可視需要含有光吸收劑、界面活 性劑、密著性提升劑、熱聚合抑制劑、消泡劑等添加劑。任一種添加劑均可使用以往習知者。作為光吸收劑列舉為1,5-二羥基萘、α-萘酚等,作為界面活性劑列舉為陰離子系、陽離子系、非離子系等之化合物,密著性提升劑列舉為以往習知之矽烷偶合劑,作為熱聚合抑制劑列舉為氫醌、氫醌單乙基醚等,作為消泡劑列舉為聚矽氧系、氟系化合物等。 The photosensitive resin composition may contain a light absorbing agent as needed, and the interface may be live. Additives such as agents, adhesion promoters, thermal polymerization inhibitors, and defoamers. Any of the additives can be used by conventional ones. Examples of the light absorbing agent include 1,5-dihydroxynaphthalene and α-naphthol, and examples of the surfactant include compounds such as anionic, cationic, and nonionic. The adhesion promoters are conventionally known as decane. The coupling agent is exemplified by hydroquinone or hydroquinone monoethyl ether, and examples of the defoaming agent are polyfluorene-based or fluorine-based compounds.
感光性樹脂組成物可藉三輥研磨機、球磨機、砂磨機等攪拌機混合(分散.混練)上述各成分,且視需要以5μm薄膜過濾器等過濾器過濾而調製。 The photosensitive resin composition can be mixed (dispersed and kneaded) by a mixer such as a three-roll mill, a ball mill, or a sand mill to prepare the above components, and if necessary, filtered by a filter such as a 5 μm membrane filter.
又,就可使鹼可溶性樹脂(A)之分子量保持在低狀態之觀點而言,感光性樹脂組成物較好在上述樹脂組成物中添加光聚合性單體(B)、光聚合起始劑(C)、及視需要之其他成分後,將溶劑(S)調整成期望之量予以調製。 In addition, the photosensitive resin composition preferably has a photopolymerizable monomer (B) and a photopolymerization initiator added to the resin composition from the viewpoint of maintaining the molecular weight of the alkali-soluble resin (A) in a low state. After (C) and other components as needed, the solvent (S) is adjusted to a desired amount to prepare.
另一方面,感光性樹脂組成物亦可藉由混合鹼可溶性樹脂(A)、以上述式(1)表示之化合物、光聚合性單體(B)、光聚合起始劑(C)、及視需要之其他成分後,以溶劑(S)將感光性樹脂組成物之固體成分濃度調整成期望之範圍予以調製。此情況下,鹼可溶性樹脂(A)之分子量或許會比調製感光性樹脂組成物前稍微增加,但就調配以上述式(1)表示之化合物等調製感光性樹脂組成物 後,鹼可溶性樹脂(A)之分子量之增大受到抑制方面而言則較佳。 On the other hand, the photosensitive resin composition may be obtained by mixing an alkali-soluble resin (A), a compound represented by the above formula (1), a photopolymerizable monomer (B), a photopolymerization initiator (C), and After the other components are required, the solid content concentration of the photosensitive resin composition is adjusted to a desired range by a solvent (S). In this case, the molecular weight of the alkali-soluble resin (A) may be slightly increased before the preparation of the photosensitive resin composition, but the compound represented by the above formula (1) may be blended to prepare a photosensitive resin composition. After that, it is preferred that the increase in the molecular weight of the alkali-soluble resin (A) is suppressed.
本發明之間隔物除使用上述之感光性樹脂組成物以外,餘與使用感光性樹脂組成物形成之以往之間隔物相同。另外,本發明之顯示裝置除具備以上述之感光性樹脂組成物形成之間隔物以外,餘與以往之顯示裝置相同。顯示裝置之具體例列舉為液晶顯示裝置、有機EL方式之顯示裝置等。以下僅針對間隔物之形成方法加以說明。 The spacer of the present invention is the same as the conventional spacer formed using the photosensitive resin composition except that the above-mentioned photosensitive resin composition is used. Further, the display device of the present invention is the same as the conventional display device except that the spacer formed of the above-described photosensitive resin composition is provided. Specific examples of the display device are exemplified by a liquid crystal display device, an organic EL display device, and the like. Hereinafter, only the method of forming the spacer will be described.
使用上述之感光性樹脂組成物形成間隔物之方法並無特別限制,可由以往採用之顯示裝置用之間隔物之形成方法適當選擇。較佳之間隔物之形成方法列舉為包含將上述之感光性樹脂組成物塗佈於基板上,形成感光性樹脂層之塗佈步驟,對應於特定間隔物之圖型使感光性樹脂層曝光之曝光步驟,及使曝光之感光性樹脂層顯像,形成間隔物之圖型之顯像步驟之方法。 The method of forming the spacer by using the photosensitive resin composition described above is not particularly limited, and can be appropriately selected from the method for forming a spacer for a conventional display device. A preferred method for forming the spacer is to include a coating step of applying the above-described photosensitive resin composition onto a substrate to form a photosensitive resin layer, and exposing the photosensitive resin layer to a pattern corresponding to a specific spacer. And a method of developing a photosensitive resin layer to be exposed to form a pattern of a pattern of spacers.
首先,於塗佈步驟,使用輥塗佈器、逆輥塗佈器、棒塗佈器等接觸轉印型塗佈裝置或旋轉塗佈器(旋轉式塗佈裝置)、簾流式塗佈器等非接觸型塗佈裝置,將本發明之感光性樹脂組成物塗佈於欲形成間隔物之基板上,且視需要藉乾燥去除溶劑,形成感光性樹脂層。 First, in the coating step, a contact transfer type coating device or a spin coater (rotary coating device) or a curtain flow coater is used using a roll coater, a reverse roll coater, a bar coater or the like. In the non-contact type coating device, the photosensitive resin composition of the present invention is applied onto a substrate on which a spacer is to be formed, and if necessary, the solvent is removed by drying to form a photosensitive resin layer.
接著,將表面形成感光性樹脂層之基板供給至曝光步驟中。曝光步驟係透過負型之遮罩對該感光性樹脂層照射 紫外線、準分子雷射光等活性能量線,對應於特定之間隔物之圖型使感光性樹脂層部分地曝光。曝光可使用高壓水銀燈、超高壓水銀燈、氙氣燈、碳弧燈等之發出紫外線之光源。曝光量係依據感光性樹脂組成物之組成而異,但較好為例如50~600 mJ/cm2左右。 Next, the substrate on which the photosensitive resin layer is formed on the surface is supplied to the exposure step. In the exposure step, the photosensitive resin layer is irradiated with an active energy ray such as ultraviolet rays or excimer laser light through a mask of a negative type, and the photosensitive resin layer is partially exposed in accordance with a pattern of a specific spacer. The exposure may use a high-pressure mercury lamp, an ultra-high pressure mercury lamp, a xenon lamp, a carbon arc lamp, or the like that emits ultraviolet light. The exposure amount varies depending on the composition of the photosensitive resin composition, but is preferably, for example, about 50 to 600 mJ/cm 2 .
顯像步驟係以顯像液使曝光後之感光性樹脂層顯像,形成間隔物。顯像方法並無特別限制,可使用浸漬法、噴霧法等。顯像液之具體例列舉為單乙醇胺、二乙醇胺、三乙醇胺等有機系者,或氫氧化鈉、氫氧化鉀、碳酸鈉、氨、四級銨鹽等水溶液。本發明之感光性樹脂組成物由於抑制鹼可溶性樹脂之分子量之增大故而顯示適度之顯像性,故可適當地顯像。 In the developing step, the photosensitive resin layer after exposure is developed with a developing liquid to form a spacer. The development method is not particularly limited, and a dipping method, a spray method, or the like can be used. Specific examples of the developing liquid are organic compounds such as monoethanolamine, diethanolamine, and triethanolamine, or aqueous solutions such as sodium hydroxide, potassium hydroxide, sodium carbonate, ammonia, and quaternary ammonium salts. Since the photosensitive resin composition of the present invention exhibits an appropriate developing property by suppressing an increase in the molecular weight of the alkali-soluble resin, it can be appropriately developed.
接著,視需要對顯像後之間隔物施以後烘烤予以加熱硬化。後烘烤之溫度較好為150~250℃。 Next, the spacer after the development is subjected to post-baking as needed to be heat-hardened. The post-baking temperature is preferably from 150 to 250 °C.
以下,以實施例更詳細說明本發明,但本發明並不受限於該等實施例。 Hereinafter, the present invention will be described in more detail by way of examples, but the invention is not limited thereto.
實施例及比較例係使用下述之化合物1~7作為以上述式(1)表示之化合物,使用下述之比較化合物1~6作為對於以上述式(1)表示之化合物之比較化合物。化合物1~7之合成方法示於下。又,實施例及比較例中,以上述式(1)表示之化合物及比較化合物亦稱為「添加化合物」。 In the examples and comparative examples, the following compounds 1 to 7 were used as the compound represented by the above formula (1), and the following comparative compounds 1 to 6 were used as the comparative compound for the compound represented by the above formula (1). The synthesis method of the compounds 1 to 7 is shown below. Further, in the examples and comparative examples, the compound represented by the above formula (1) and the comparative compound are also referred to as "addition compound".
將3-(4-甲氧基苯基)丙烯醯氯5.90g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、二乙醇胺2.41ml(當量比1.1),在室溫攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙 酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物1(4.65g,20 mmol)。丙烯醯氯基準之收率為67%。 5.90 g (30 mmol) of 3-(4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine and 2.41 ml of diethanolamine (equivalent ratio 1.1) were added. ), stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 1 (4.65 g, 20 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of propylene chloride standard was 67%.
將3-(2-硝基-4-甲氧基苯基)丙烯醯氯7.25g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、咪唑2.25ml(當量比1.1),在室溫攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物2(4.08g,15 mmol)。丙烯醯氯基準之收率為50%。 7.25 g (30 mmol) of 3-(2-nitro-4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine and 2.25 ml of imidazole were added. (Equivalent ratio 1.1), stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 2 (4.08 g, 15 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of the propylene ruthenium chloride standard was 50%.
將3-(3-硝基-4-甲氧基苯基)丙烯醯氯7.25g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、咪唑2.25ml(當量比1.1),在室溫攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物3(4.08g,15 mmol)。丙烯醯氯基準之收率為50%。 7.25 g (30 mmol) of 3-(3-nitro-4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine was added, and the imidazole was 2.25 ml. (Equivalent ratio 1.1), stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 3 (4.08 g, 15 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of the propylene ruthenium chloride standard was 50%.
將2-甲基-3-(2-硝基-4-甲氧基苯基)丙烯醯氯7.67g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、咪唑2.25ml(當量比1.1),在室溫攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物4(4.29g,15 mmol)。丙烯醯氯基準之收率為50%。 7.67 g (30 mmol) of 2-methyl-3-(2-nitro-4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml of triethylamine was added (equivalent ratio 1.1). ), 2.25 ml of imidazole (equivalent ratio of 1.1), and stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 4 (4.29 g, 15 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of the propylene ruthenium chloride standard was 50%.
將3-(4-甲氧基苯基)丙烯醯氯5.90g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、咪唑2.25ml(當量比1.1),在室溫攪拌1小時。 以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物5(3.41g,15 mmol)。丙烯醯氯基準之收率為50%。 5.90 g (30 mmol) of 3-(4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine and 2.25 ml of imidazole (equivalent ratio of 1.1) were added. Stir at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 5 (3.41 g, 15 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of the propylene ruthenium chloride standard was 50%.
將3-(2-硝基-4-甲氧基苯基)丙烯醯氯7.25g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、二乙胺2.41ml(當量比1.1),在室溫攪 拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物6(5.55g,20 mmol)。丙烯醯氯基準之收率為67%。 7.25 g (30 mmol) of 3-(2-nitro-4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine was added, diethylamine. 2.41 ml (equivalent ratio 1.1) and stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 6 (5.55 g, 20 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of propylene chloride standard was 67%.
將3-(3-硝基-4-甲氧基苯基)丙烯醯氯7.25g(30 mmol)溶解於50ml之經乾燥乙醚中,添加三乙胺4.59ml(當量比1.1)、二乙胺2.41ml(當量比1.1),在室溫攪拌1小時。以水50ml、飽和NaHCO3水溶液50ml、及1N鹽酸洗淨後,以硫酸鎂乾燥,且在減壓下濃縮。以己烷-乙酸乙酯作為展開溶劑,以矽膠作為支撐擔體藉由管柱層析進行純化,獲得對應之化合物7(5.55g,20 mmol)。丙烯醯氯基準之收率為67%。 7.25 g (30 mmol) of 3-(3-nitro-4-methoxyphenyl)propene fluorene chloride was dissolved in 50 ml of dry diethyl ether, and 4.59 ml (equivalent ratio 1.1) of triethylamine was added, diethylamine. 2.41 ml (equivalent ratio 1.1) and stirred at room temperature for 1 hour. After washing with 50 ml of water, 50 ml of a saturated NaHCO 3 aqueous solution, and 1N hydrochloric acid, the mixture was dried over magnesium sulfate and evaporated. The title compound 7 (5.55 g, 20 mmol) was obtained by hexane-ethyl acetate as a solvent. The yield of propylene chloride standard was 67%.
將表1所記載之種類及量之鹼可溶性樹脂(A)、與添加化合物溶解於PGMEA中,調製樹脂濃度30質量%之樹脂組成物。使用所得樹脂組成物,依據下述方法,進行分子量增加之評價。 The alkali-soluble resin (A) of the type and amount described in Table 1 and the additive compound were dissolved in PGMEA to prepare a resin composition having a resin concentration of 30% by mass. Using the obtained resin composition, the evaluation of the molecular weight increase was carried out according to the following method.
又,表1中,各簡寫符號分別表示以下者,且括號內之數值為調配量(質量份)。 In addition, in Table 1, each shorthand symbol shows the following, and the numerical value in parentheses is a compounding quantity (mass part).
使用以下述之質量比含有源自下述單體之單位之樹脂作為鹼可溶性樹脂。 As the alkali-soluble resin, a resin containing a unit derived from the following monomers in a mass ratio described below is used.
A-1:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯=30:45:35 A-1: methacrylic acid: tricyclomethacrylate [5.2.1.0 2,6 ]癸-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate=30: 45:35
A-2:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯=30:25:55 A-2: methacrylic acid: tricyclo[meth] methacrylate [5.2.1.0 2,6 ] 癸-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate = 30: 25:55
A-3:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸烷-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:丙烯酸環氧化二環戊烯基酯=30:45:35:35 A-3: Methacrylic acid: Tricyclomethacrylate [5.2.1.0 2,6 ]decane-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: acrylic acid Epoxidized dicyclopentenyl ester = 30:45:35:35
A-4:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:丙烯酸環氧化二環戊烯基酯=30:25:55:55 A-4: Methacrylic acid: Tricyclo[meth] methacrylate [5.2.1.0 2,6 ]癸-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: acrylic ring Dicyclopentenyloxylate = 30:25:55:55
A-5:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸烷-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:2-(3,4-環氧基環己烷-1-基)-6-甲基丙烯醯氧基庚酸=30:45:35:35 A-5: Methacrylic acid: Tricyclomethacrylate [5.2.1.0 2,6 ]decane-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: 2 -(3,4-epoxycyclohexane-1-yl)-6-methylpropenyloxyheptanoic acid=30:45:35:35
A-6:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:2-(3,4-環氧基環己烷-1-基)-6-甲基丙烯醯氧基庚酸=30:25:55:55 A-6: Methacrylic acid: Tricyclo[meth] methacrylate [5.2.1.0 2,6 ]癸-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: 2- (3,4-epoxycyclohexane-1-yl)-6-methylpropenyloxyheptanoic acid=30:25:55:55
A-7:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸烷- 8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:甲基丙烯酸縮水甘油酯=30:45:35:35 A-7: Methacrylic acid: Tricyclomethacrylate [5.2.1.0 2,6 ]decane-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: A Glycidyl acrylate = 30:45:35:35
A-8:甲基丙烯酸:甲基丙烯酸三環[5.2.1.02,6]癸-8-基酯:甲基丙烯酸3,4-環氧基環己烷-1-基甲酯:甲基丙烯酸縮水甘油酯=30:25:55:55 A-8: Methacrylic acid: Tricyclo[meth] methacrylate [5.2.1.0 2,6 ]癸-8-yl ester: 3,4-epoxycyclohexane-1-ylmethyl methacrylate: methyl Glycidyl acrylate = 30:25:55:55
針對剛調製之實施例1~14、及比較例1~6之樹脂組成物,以凝膠滲透層析儀測定各樹脂組成物中所含鹼可溶性樹脂之質量平均分子量(Mw1)。接著,將實施例1~14、及比較例1~6之樹脂組成物於恆溫槽中,於25℃靜置168小時(一週)後,以凝膠滲透層析儀測定各樹脂組成物中所含鹼可溶性樹脂之質量平均分子量(Mw2)。使用Mw1及Mw2,由下式算出分子量之增加率。各樹脂組成物之分子量增加率列於表1。 The mass average molecular weight (Mw 1 ) of the alkali-soluble resin contained in each resin composition was measured by gel permeation chromatography on the resin compositions of Examples 1 to 14 and Comparative Examples 1 to 6 which were just prepared. Next, the resin compositions of Examples 1 to 14 and Comparative Examples 1 to 6 were allowed to stand in a thermostatic chamber at 25 ° C for 168 hours (one week), and then each resin composition was measured by a gel permeation chromatography. The mass average molecular weight (Mw 2 ) of the alkali-soluble resin. Using Mw 1 and Mw 2 , the increase rate of the molecular weight was calculated from the following formula. The molecular weight increase rate of each resin composition is shown in Table 1.
分子量增加率(%)=Mw2/Mw1×100 Molecular weight increase rate (%) = Mw 2 / Mw 1 × 100
依據算出之分子量增加率,依照下列基準,判定分子量增加之程度。判定結果列於表1。 Based on the calculated molecular weight increase rate, the degree of increase in molecular weight was determined in accordance with the following criteria. The judgment results are shown in Table 1.
○:分子量增加率為120%以下 ○: The molecular weight increase rate is 120% or less
×:分子量增加率超過120% ×: The molecular weight increase rate exceeds 120%
依據表1可知,含以上述式(1)表示之化合物之實施例1~14之樹脂組成物之分子量增加率均抑制在120%以下。另一方面,含類似於以上述式(1)表示之化合物之構造之比較化合物之比較例1~6之樹脂組成物之分子量增加率均為125%以上。由該等結果可知,若於樹脂組成物中未添加以上述式(1)表示之化合物,則容易地進行樹脂組成物中所含之至少使不飽和羧酸與含有環氧基之不飽和化合物聚合之共聚物的鹼可溶性樹脂之分子量之增大。 According to Table 1, it is understood that the molecular weight increase rate of the resin compositions of Examples 1 to 14 containing the compound represented by the above formula (1) is suppressed to 120% or less. On the other hand, the resin compositions of Comparative Examples 1 to 6 containing a comparative compound having a structure similar to the compound represented by the above formula (1) had a molecular weight increase rate of 125% or more. From these results, it is understood that when the compound represented by the above formula (1) is not added to the resin composition, at least the unsaturated carboxylic acid and the epoxy group-containing unsaturated compound contained in the resin composition are easily carried out. The molecular weight of the alkali-soluble resin of the polymerized copolymer is increased.
使用實施例1~14及比較例1~6中所得之剛調製後之樹脂組成物,與在25℃下保存168小時後之樹脂組成物,調製實施例15~28及比較例7~12之感光性樹脂組成物。具體而言含表2所記載之量之鹼可溶性樹脂(A)與添加化合物,於表2所記載之種類之樹脂組成物中添加表2所記載之種類及量之光聚合性單體(B)與光聚合起始劑(C)後,以PGMEA調整固體成分濃度,調製固體成分濃度15質量%之感光性樹脂組成物。使用所得感光性樹脂組成物,依據下列方法進行感光性樹脂組成物之顯像性評價。 Using the resin compositions immediately after preparation in Examples 1 to 14 and Comparative Examples 1 to 6, and the resin compositions stored at 25 ° C for 168 hours, Examples 15 to 28 and Comparative Examples 7 to 12 were prepared. A photosensitive resin composition. Specifically, the alkali-soluble resin (A) and the additive compound in the amounts shown in Table 2 were added, and the type and amount of the photopolymerizable monomer described in Table 2 were added to the resin composition of the type described in Table 2 (B). After the photopolymerization initiator (C), the solid content concentration was adjusted with PGMEA to prepare a photosensitive resin composition having a solid concentration of 15% by mass. Using the obtained photosensitive resin composition, the development of the photosensitive resin composition was evaluated by the following method.
又,表2中,各簡寫符號分別表示以下者,且括號內之數值為調配量(質量份)。 In addition, in Table 2, each abbreviation symbol shows the following, and the numerical value in parentheses is a compounding quantity (mass part).
DPHA:二季戊四醇六丙烯酸酯(日本化藥股份有限公司製造) DPHA: dipentaerythritol hexaacrylate (manufactured by Nippon Kayaku Co., Ltd.)
OXE01:1,2-辛二酮,1-[4-(苯硫基)-,2-(O-苯甲醯基肟)](BASF公司製造之「IRGACURE OXE01」) OXE01:1, 2-octanedione, 1-[4-(phenylthio)-, 2-(O-benzylidenefluorene)] ("IRGACURE OXE01" manufactured by BASF)
以旋轉塗佈器將上述各實施例及比較例中調製之感光性樹脂組成物塗佈於玻璃基板(康寧公司製造,Eagle-XG)上後,在80℃乾燥5分鐘,獲得3.0~5.0μm膜厚之感光性樹脂層。接著,透過形成有5~10μm之點狀圖型之遮罩對該感光性樹脂層照射紫外線。接著,在加溫至23℃之濃度0.04質量%之氫氧化鉀水溶液中藉噴霧顯像,形成點狀之圖型。接著,藉由量測直到未曝光部完全溶解之時間(BP:斷裂點(Breakpoint),評價顯像性。顯像性之評價係對使用剛調製後之樹脂組成物獲得之感光性樹脂組成物,與使用在25℃保存168小時後之樹脂組成物獲得之感光性樹脂組成物進行。結果列於表2。 The photosensitive resin composition prepared in each of the above Examples and Comparative Examples was applied onto a glass substrate (Eagle-XG, manufactured by Corning Incorporated) by a spin coater, and then dried at 80 ° C for 5 minutes to obtain 3.0 to 5.0 μm. A photosensitive resin layer having a film thickness. Next, the photosensitive resin layer was irradiated with ultraviolet rays through a mask having a dot pattern of 5 to 10 μm. Subsequently, it was developed by a spray in a potassium hydroxide aqueous solution having a concentration of 0.04% by mass which was heated to 23 ° C to form a dot pattern. Next, the developing property was evaluated by measuring the time until the unexposed portion was completely dissolved (BP: Breakpoint). The evaluation of the developing property was a photosensitive resin composition obtained by using the resin composition immediately after the preparation. This was carried out with a photosensitive resin composition obtained by using a resin composition which was stored at 25 ° C for 168 hours. The results are shown in Table 2.
依據表2,於含有以上述式(1)表示之化合物之實施例1~14之樹脂組成物中添加光聚合性單體(B)與光聚合起始劑(C)之實施例15~28之感光性樹脂組成物,關於使用剛調製後之樹脂組成物獲得之感光性樹脂組成物、與使用168小時保存後之樹脂組成物獲得之感光性樹脂組成物,BP之差為0~5秒,可知二者之顯像時間幾乎沒有差異。 According to Table 2, Examples 15 to 28 in which a photopolymerizable monomer (B) and a photopolymerization initiator (C) were added to the resin compositions of Examples 1 to 14 containing the compound represented by the above formula (1) The photosensitive resin composition is a photosensitive resin composition obtained by using the resin composition immediately after preparation, and a photosensitive resin composition obtained by using the resin composition after storage for 168 hours, the difference of BP is 0 to 5 seconds. It can be seen that there is almost no difference in the imaging time between the two.
另一方面,於添加類似於以上述式(1)表示之化合物之構造之比較化合物之比較例1~6之樹脂組成物中添加光聚合性單體(B)與光聚合起始(C)之比較例7~12之感光性樹脂組成物,關於使用剛調製後之樹脂組成物獲得之感光性樹脂組成物、與使用168小時保存後之樹脂組成物獲得之感光性樹脂組成物,BP差為10秒以上,可知若未使用剛調製後之樹脂組成物調製感光性樹脂組成物,則顯像時間大幅延遲。 On the other hand, a photopolymerizable monomer (B) and a photopolymerization initiation (C) are added to the resin composition of Comparative Examples 1 to 6 in which a comparative compound similar to the structure of the compound represented by the above formula (1) is added. The photosensitive resin composition of Comparative Examples 7 to 12, the photosensitive resin composition obtained using the resin composition immediately after preparation, and the photosensitive resin composition obtained by using the resin composition after storage for 168 hours, BP difference When the photosensitive resin composition was prepared without using the resin composition immediately after preparation, the development time was largely delayed.
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