TW201318063A - Inductance coupling plasma device for improving uniformity and efficiency of plasmon - Google Patents
Inductance coupling plasma device for improving uniformity and efficiency of plasmon Download PDFInfo
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本發明涉及等離子反應器，特別是涉及電感耦合反應器中的氣體均一分佈的設計。 This invention relates to plasma reactors, and more particularly to designs for uniform distribution of gases in an inductively coupled reactor.
等離子反應器或反應腔在習知技術中是公知的，並廣泛應用於半導體積體電路、平板顯示器，發光二極體(LED)，太陽能電池等的製造工業內。在等離子腔中通常會施加一個射頻電源以產生並維持等離子於反應腔中。其中，有許多不同的方式施加射頻功率，每個不同方式的設計都將導致不同的特性，比如效率、等離子解離、均一性等等。其中，一種設計是電感耦合(ICP)等離子腔。 Plasma reactors or reaction chambers are well known in the art and are widely used in the manufacturing industries of semiconductor integrated circuits, flat panel displays, light emitting diodes (LEDs), solar cells, and the like. A radio frequency power source is typically applied to the plasma chamber to create and maintain plasma in the reaction chamber. Among them, there are many different ways to apply RF power, and each different design will lead to different characteristics, such as efficiency, plasma dissociation, uniformity and so on. One design is an inductively coupled (ICP) plasma chamber.
在電感耦合等離子處理腔中，一個通常是線圈狀的天線用於向反應腔內發射射頻能量。為了使來自天線的射頻功率耦合到反應腔內，在天線處放置一個絕緣材料視窗。反應腔可以處理各種基片，比如矽晶圓等，基片被固定在夾盤上，等離子在基片上方產生。因此，天線被放置在反應器頂板上方，使得反應腔頂板是由絕緣材料製成或者包括一個絕緣材料視窗。 In an inductively coupled plasma processing chamber, a generally coiled antenna is used to emit RF energy into the reaction chamber. In order to couple the RF power from the antenna into the reaction chamber, a window of insulating material is placed at the antenna. The reaction chamber can handle a variety of substrates, such as tantalum wafers, etc., the substrate is attached to the chuck, and plasma is generated over the substrate. Therefore, the antenna is placed above the top plate of the reactor such that the top of the reaction chamber is made of an insulating material or includes an insulating material window.
在等離子處理腔中，各種氣體被注入到反應腔中，以使得離子和基片之間的化學反應和/或物理作用可被用於在所述基片上形成各種特徵結構，比如刻蝕、沉積等等。在許多工藝流程中，一個很重要的指數是晶圓內部的加工均一性。也就是，一個作用於基片中心區域的工藝流程應和作用於基片邊緣區域的工藝流程相同或者高度相近。因此，例如，當執行工藝流程時，晶圓中 心區域的刻蝕率應與晶圓邊緣區域的刻蝕率相同。 In the plasma processing chamber, various gases are injected into the reaction chamber so that chemical reactions and/or physical interactions between the ions and the substrate can be used to form various features on the substrate, such as etching, deposition. and many more. In many processes, a very important index is the processing uniformity inside the wafer. That is, a process flow on the central area of the substrate should be the same as or similar to the process flow applied to the edge region of the substrate. So, for example, when performing a process flow, in the wafer The etch rate of the core region should be the same as the etch rate of the edge region of the wafer.
一個有助於獲得較好工藝均一性的參數是在反應腔內均勻分佈的處理氣體。要獲得這樣的均一性，許多反應腔設計採用安裝在晶圓上方的氣體噴淋頭，以均勻的注入處理氣體。然而，如上所述，在電感耦合(ICP)反應腔頂板必須包括一個使射頻功率從天線發射到反應腔中的絕緣窗。因此，ICP的結構中並沒有給氣體噴淋頭留出相應的空間來實現其氣體均勻注入的功能。 One parameter that contributes to better process uniformity is the process gas that is evenly distributed within the reaction chamber. To achieve such uniformity, many reactor designs use a gas showerhead mounted above the wafer to uniformly inject the process gas. However, as noted above, the inductively coupled (ICP) reaction chamber top plate must include an insulating window that allows RF power to be emitted from the antenna into the reaction chamber. Therefore, the structure of the ICP does not leave a corresponding space for the gas shower head to achieve the function of uniform gas injection.
圖1示出了習知電感耦合反應腔設計的截面圖。ICP反應腔100包括基本呈圓筒狀的金屬側壁105和絕緣頂板107，構成可被抽真空器125抽真空的氣密空間。基座110支撐夾盤115，所述夾盤115支撐待處理的基片120。來自射頻功率源145的射頻功率被施加到呈線圈狀的天線140。來自氣源150的處理氣體通過管線155被供應到反應腔內，以點燃並維持等離子，並由此對基片120進行加工。在標準電感耦合反應腔中，氣體通過在反應腔周圍的注入器/噴頭130和中間的噴頭135之一或者兩者一同注入來供應到真空容器內的。 Figure 1 shows a cross-sectional view of a conventional inductively coupled reaction chamber design. The ICP reaction chamber 100 includes a substantially cylindrical metal sidewall 105 and an insulating top plate 107, which constitute an airtight space that can be evacuated by the evacuator 125. The susceptor 110 supports a chuck 115 that supports the substrate 120 to be processed. The RF power from the RF power source 145 is applied to the antenna 140 in the form of a coil. Process gas from gas source 150 is supplied to the reaction chamber through line 155 to ignite and sustain plasma, and thereby process substrate 120. In a standard inductively coupled reaction chamber, gas is supplied into the vacuum vessel by injection of one or both of the injector/head 130 and the intermediate nozzle 135 around the reaction chamber.
從圖1可知，來自週邊噴頭130的氣體被大量抽出了120的表面。因此，從週邊噴頭130注入的大量氣體可能實現對晶圓邊緣區域的處理，但是幾乎沒有能達到晶圓120的中心區域，這會導致不均一性。相反地，中心噴頭135注入的大量氣體集中在晶圓中心並沒有到達邊緣區域，也會造成不均一性。 As can be seen from Fig. 1, the gas from the peripheral head 130 is largely extracted from the surface of 120. Therefore, a large amount of gas injected from the peripheral head 130 may effect processing of the edge region of the wafer, but hardly reach the central region of the wafer 120, which may result in inhomogeneity. Conversely, the large amount of gas injected by the center nozzle 135 is concentrated in the center of the wafer and does not reach the edge region, which also causes inhomogeneity.
因此，業內需要一種改進電感耦合反應腔設計，可以優化反應腔內的氣體分佈以改進加工工藝的均一性。 Therefore, there is a need in the industry for an improved inductively coupled reaction chamber design that optimizes gas distribution within the reaction chamber to improve process uniformity.
本發明的發明內容只提供一個對本發明部分方面 和特點的基本理解。其不是對本發明的廣泛概述，也不是用於特別指出本發明的關鍵要素或者示意發明的範圍。其唯一的目的是簡化的呈現本發明的一些概念，為後續詳細的描述本發明作鋪墊。 The inventive content of the invention provides only a partial aspect of the invention And a basic understanding of the characteristics. It is not intended to be exhaustive or to limit the scope of the invention. Its sole purpose is to present some concepts of the invention in a simplified
根據本發明的一個方面，提供了一種等離子反應器，其包括封閉殼體，絕緣窗，設置在絕緣窗上方的射頻天線，多個氣體注入器(gas injectors)向所述封閉殼體內供氣，設置於所述封閉殼體內的擋板，其用於限制或引導從氣體注入器中的氣體流動。 According to an aspect of the invention, there is provided a plasma reactor comprising a closed casing, an insulating window, a radio frequency antenna disposed above the insulating window, and a plurality of gas injectors supplying air to the closed casing, A baffle disposed within the enclosed housing for restricting or directing the flow of gas from the gas injector.
根據本發明的一個方面，提供了一個電感耦合等離子反應器，其中，包括封閉殼體，其中所述封閉殼體頂板的至少一部分構成一個絕緣材料窗。基片支撐裝置設置於所述封閉殼體內和所述絕緣材料窗的下方。射頻功率發射裝置設置於所述絕緣材料窗上，以發射射頻功率並使其穿過所述絕緣材料窗到封閉殼體內。多個氣體注入器均勻分佈在所述基片支撐裝置上方，以提供處理氣體到所述封閉殼體內。設置於封閉殼體內的環形擋板，其位於所述基片支撐裝置上方和多個氣體注入器下方，以引導處理氣體流動。根據本發明的另一個方面，所述擋板可由由導體或絕緣材料製成。比如擋板可由陽極化的鋁，陶瓷，石英等製成。 According to one aspect of the invention, an inductively coupled plasma reactor is provided, comprising a closed casing, wherein at least a portion of the top plate of the closed casing constitutes an insulating material window. A substrate support device is disposed within the enclosed housing and below the insulating material window. A radio frequency power transmitting device is disposed on the insulating material window to emit radio frequency power and pass through the insulating material window into the closed casing. A plurality of gas injectors are evenly distributed over the substrate support to provide process gas into the enclosed housing. An annular baffle disposed within the enclosed housing is positioned above the substrate support and below the plurality of gas injectors to direct the flow of process gas. According to another aspect of the invention, the baffle may be made of a conductor or an insulating material. For example, the baffle may be made of anodized aluminum, ceramic, quartz, or the like.
根據本發明的另一個方面，擋板可為帶中心開口的環形平板。所述擋板也可包括分佈在中心開口周圍的次級開口。所述擋板可以包括從所述中心開口處開始延伸的延伸部。所述延伸部可以是圓筒形的也可以是圓錐形的，等等。所述擋板可集成進一個射頻天線。所述擋板可以是在絕緣材料中集成該射頻天線，擋板的一面也可以是導體材料製成的使得絕緣窗上的射頻功率發射裝 置或者射頻天線產生的射頻能量無法穿過該導體層。所述擋板可以在所述基片支撐裝置上方垂直上下移動，因而得以改變與基片之間的間隙。 According to another aspect of the invention, the baffle can be an annular flat plate with a central opening. The baffle may also include a secondary opening distributed around the central opening. The baffle may include an extension that extends from the central opening. The extension may be cylindrical or conical, and the like. The baffle can be integrated into an RF antenna. The baffle may be integrated with the radio frequency antenna in an insulating material, and one side of the baffle may also be made of a conductive material so that the RF power transmitting device on the insulating window The RF energy generated by the RF antenna or the RF antenna cannot pass through the conductor layer. The baffle can be moved up and down vertically above the substrate support device, thereby changing the gap between the substrate and the substrate.
根據本發明的再一個方面，提供了一種在基片上製造半導體器件的方法，包括放置基片於等離子反應器中的基片支撐裝置上，其中等離子反應器包括封閉殼體，其包括圓柱形的側壁和頂板，其頂板的至少一部分構成一絕緣材料窗，位於所述絕緣材料窗上方的射頻發射器，其用於發射射頻功率並使其穿過所述絕緣材料窗到達所述封閉殼體內，多個在基片上方均勻分佈的氣體注入器；在封閉殼體內放置環形擋板，以使得所述擋板位於基片支撐裝置上方和多個氣體注入器的下方，從而在所述擋板和所述基片之間直接形成一個間隙；往氣體注入器提供反應氣體；施加射頻功率到射頻發射器。 According to still another aspect of the present invention, there is provided a method of fabricating a semiconductor device on a substrate comprising placing a substrate on a substrate support device in a plasma reactor, wherein the plasma reactor comprises a closed housing comprising a cylindrical shape a sidewall and a top panel, at least a portion of the top panel forming an insulating material window, a radio frequency transmitter positioned above the insulating material window for transmitting radio frequency power and passing through the insulating material window into the closed housing a plurality of gas injectors uniformly distributed over the substrate; placing an annular baffle within the enclosed housing such that the baffles are positioned above the substrate support device and below the plurality of gas injectors, thereby A gap is formed directly between the substrates; a reactive gas is supplied to the gas injector; and RF power is applied to the RF emitter.
本發明涉及電感耦合等離子體腔的實施例改進了均一性，特別是氣體分佈的均勻性。本發明實施例中的反應腔中添加了預設裝置使噴頭中流出的氣體被重新引導流動方向，以改進反應腔中的氣體分佈，從而使得晶圓上的均一性得到了改善。 The present invention relates to an embodiment of an inductively coupled plasma chamber that improves uniformity, particularly uniformity of gas distribution. A preset device is added to the reaction chamber in the embodiment of the invention to redirect the gas flowing out of the nozzle to change the flow direction of the gas in the reaction chamber, thereby improving the uniformity on the wafer.
下文將結合圖2對本發明的一個實施例進行詳細描述。圖2示出根據本發明一個實施例的等離子處理裝置200。除了2XX系列附圖標記外，圖2中示出的對應於圖1中的要素具有相同的附圖標記。應當理解，其中的反應腔裝置200僅僅是示例性的，所述200裝置實際上也可以包括更少或額外的部件，部件的排列也可以不同於圖2中所示出。 An embodiment of the present invention will be described in detail below with reference to FIG. FIG. 2 shows a plasma processing apparatus 200 in accordance with one embodiment of the present invention. Elements in FIG. 2 corresponding to those in FIG. 1 have the same reference numerals except for the 2XX series of reference numerals. It should be understood that the reaction chamber apparatus 200 therein is merely exemplary, and the 200 apparatus may actually include fewer or additional components, and the arrangement of the components may also differ from that shown in FIG.
圖2示出了根據本發明第一實施例的ICP反應腔的 截面圖，其執行了氣體受控流動的特點。ICP反應腔200包括金屬側壁205和絕緣頂板207，構成一個氣密的真空封閉殼體，並且由抽真空泵225抽真空。所述絕緣頂板207僅作為示例，也可以採用其他的頂板樣式，比如穹頂形狀的，帶有絕緣材料視窗的金屬頂板等。基座210支撐夾盤215，所述夾盤上放置著待處理的基片220。偏置功率被施加到所述夾盤215上，但是由於與揭露的本發明實施例無關，在圖2中未示出。所述射頻電源245的射頻功率被施加到天線240，該天線基本是線圈狀的。 Figure 2 shows an ICP reaction chamber in accordance with a first embodiment of the present invention. A cross-sectional view that performs the characteristics of controlled gas flow. The ICP reaction chamber 200 includes a metal sidewall 205 and an insulating top plate 207 that form a hermetic vacuum enclosure and is evacuated by an evacuation pump 225. The insulating top plate 207 is merely an example, and other top plate patterns such as a dome-shaped metal top plate with an insulating window may be used. The susceptor 210 supports a chuck 215 on which a substrate 220 to be processed is placed. Bias power is applied to the chuck 215, but is not shown in Figure 2, regardless of the disclosed embodiment of the invention. The RF power of the RF power source 245 is applied to an antenna 240, which is substantially coiled.
處理氣體從氣源250經過管線225被供應到反應腔內，以點燃並維持等離子，從而對基片220進行加工。在本實施例中，氣體通過週邊注入器或噴頭230被供應到真空空間中，但是額外的氣體也可以選擇性的從中心噴頭235注入反應腔。如果氣體從注入器230和噴頭235同時供應，每個的氣體流量都可獨立控制。任何這些用於注入氣體的設置可稱為等離子氣體注入器。在圖2中，擋板270設置於反應腔中以限制和/或引導散發自氣體噴頭230的氣體流動。根據附圖標記所示，在上述實施例中擋板基本是中間帶孔或開口的圓盤形。所述擋板位於氣體噴頭下方但是在基片所在位置上方。這樣，氣體在向下流向基片前被限制為進一步流向反應腔中間，如圖中虛線箭頭所示。 Process gas is supplied from gas source 250 through line 225 to the reaction chamber to ignite and maintain plasma to process substrate 220. In the present embodiment, gas is supplied to the vacuum space through the peripheral injector or showerhead 230, but additional gas may also be selectively injected into the reaction chamber from the central nozzle 235. If gas is supplied simultaneously from the injector 230 and the showerhead 235, the gas flow rate of each can be independently controlled. Any of these settings for injecting gas can be referred to as a plasma gas injector. In FIG. 2, a baffle 270 is disposed in the reaction chamber to restrict and/or direct the flow of gas emanating from the gas showerhead 230. According to the reference numerals, in the above embodiment, the baffle is substantially in the shape of a disk with a hole or opening in the middle. The baffle is located below the gas showerhead but above the location of the substrate. Thus, the gas is restricted from flowing further into the middle of the reaction chamber before flowing downward toward the substrate, as indicated by the dashed arrows in the figure.
通常地，所述擋板270可由金屬材料製成，如陽極化的鋁。用金屬材料來製造擋板能夠有利於限制所述擋板上方的等離子，因為來自線圈的射頻能量被所述擋板阻擋了傳播。另一方面，所述擋板270也可以是由絕緣材料製成，比如陶瓷或石英。在採用絕緣檔板的實施例 中，來自線圈的射頻(RF)能量能夠穿過所述擋板，使得等離子體能夠被維持在所述擋板下方(虛線部分顯示)，其依賴於到達所述擋板下方的氣體量。 Generally, the baffle 270 can be made of a metallic material such as anodized aluminum. Fabricating the baffle with a metallic material can advantageously limit the plasma above the baffle because the RF energy from the coil is blocked from propagating by the baffle. Alternatively, the baffle 270 can be made of an insulating material such as ceramic or quartz. Embodiment in which an insulating baffle is used Radio frequency (RF) energy from the coil can pass through the baffle such that plasma can be maintained below the baffle (shown in phantom) depending on the amount of gas reaching below the baffle.
在部分應用場景下，需要進一步限制氣體流動使得氣體有更多時間位於晶圓中心位置上方，以保證在整個晶圓上方獲得足夠的等離子解離。得益于上述應用的實施例在圖3中示出。除了編號為3XX系列的附圖標記外，圖3與圖2中相同的要素具有相同的附圖標記。如圖3及圖3中附圖標記所示，本實施例的擋板372具有圓盤形的外形並具有一個環形垂直方向延伸部373，基本呈一圓筒形狀。垂直延伸部與基片間構成一個間隙374，通過該間隙氣體可以流到邊緣，比如流向腔體內超過基片週邊的區域。所述間隙374的尺寸確定了基片上方氣體的流動以及氣體流過所述基片所需的時間，以使得氣體被等離子解離。 In some applications, it is necessary to further limit the gas flow so that the gas has more time above the center of the wafer to ensure sufficient plasma dissociation over the entire wafer. An embodiment that benefits from the above application is shown in FIG. The same elements in FIG. 3 and FIG. 2 have the same reference numerals except for the reference numerals numbered 3XX. As shown by the reference numerals in Figs. 3 and 3, the baffle 372 of the present embodiment has a disk-shaped outer shape and has an annular vertical extending portion 373 which is substantially in the shape of a cylinder. A gap 374 is formed between the vertical extension and the substrate through which gas can flow to the edge, such as to the region of the cavity beyond the periphery of the substrate. The size of the gap 374 determines the flow of gas over the substrate and the time required for gas to flow through the substrate to cause the gas to be dissociated by the plasma.
在圖3所示的實施例中，環形開口的直徑d的尺寸可與基片直徑相同，或者大於或小於所述基片直徑。所述環形開口的直徑取決於所需的氣體流動限制。同時，因為垂直方向環形延伸部設置為與圓盤形基片呈直角，所述環形延伸部373的開口直徑與環形盤372本身的開口直徑相同。 In the embodiment shown in Figure 3, the diameter d of the annular opening may be the same as the diameter of the substrate or greater or smaller than the diameter of the substrate. The diameter of the annular opening depends on the required gas flow restriction. Meanwhile, since the vertical direction annular extending portion is disposed at a right angle to the disk-shaped substrate, the opening diameter of the annular extending portion 373 is the same as the opening diameter of the annular disk 372 itself.
另一方面，有時需要限制氣體從圓環向基片流出，但是一旦氣體向所述基片方向流動，有時也需要強化氣體在水準方向上向腔體週邊流動。一個得益於上述設置的設計由附圖4示出。在圖4中，擋板475由一個環型部和一個圓錐形延伸部476構成，所述圓錐形延伸部476具有上開口直徑d，其小於所述圓錐形延伸部476的下開口直徑d’，其中所述下開口靠近基片。設置了 下開口以定義間隙477，氣體通過該間隙在水準方向朝反應腔側壁流動。錐形部分的側壁與環形部之間構成夾角φ，其中該夾角φ小於90度。 On the other hand, it is sometimes necessary to restrict the gas from flowing out of the ring to the substrate, but once the gas flows in the direction of the substrate, it is sometimes necessary to intensify the gas to flow toward the periphery of the cavity in the horizontal direction. A design that benefits from the above arrangement is illustrated in Figure 4. In FIG. 4, the baffle 475 is comprised of a toroidal extension 476 having an upper opening diameter d that is smaller than the lower opening diameter d' of the conical extension 476. Where the lower opening is adjacent to the substrate. already setup The lower opening defines a gap 477 through which gas flows in the leveling direction toward the side wall of the reaction chamber. An angle φ is formed between the side wall of the tapered portion and the annular portion, wherein the angle φ is less than 90 degrees.
在上述的任一實施例中，有時可能需要讓部分氣體在到達擋板中心開口前流出。圖5示出了第四實施例是對圖2所示實施例的部分修改。如圖5所示，擋板578是帶有一個中心開口盤型結構，有些類似於圖2所示的擋板272。所述中間開口的直徑可與圖2中的相同或不同。此外，輔助/次級開口589設置在所述中心開口邊，以使得部分氣體在到達所述中心開口前下漏。所述次級開口的直徑可小於所述中心開口的直徑。所述次級開口可以應用到前述任一實施例，並且可在中心開口周圍均勻設置。比如，圖5示出了與圖3中的擋板類似的改進的擋板558，除了在延伸部周圍添加了次級開口的安排，以使得氣體在到達中心開口前下漏並流向所述延伸部。 In any of the above embodiments, it may sometimes be desirable to have a portion of the gas flow out before reaching the center opening of the baffle. Fig. 5 shows a fourth embodiment which is a partial modification of the embodiment shown in Fig. 2. As shown in Figure 5, the baffle 578 is constructed with a central open disc type, somewhat similar to the baffle 272 shown in Figure 2. The diameter of the intermediate opening may be the same as or different from that of FIG. Further, an auxiliary/secondary opening 589 is provided at the center opening side so that a part of the gas leaks down before reaching the center opening. The secondary opening may have a diameter that is smaller than a diameter of the central opening. The secondary opening can be applied to any of the foregoing embodiments and can be evenly disposed around the central opening. For example, Figure 5 shows an improved baffle 558 similar to the baffle of Figure 3 except that a secondary opening arrangement is added around the extension to allow the gas to leak and flow toward the extension before reaching the central opening. unit.
在上述實施例中，所述擋板用於控制處理氣體的流動。此外，所述擋板也可用於被動地控制等離子。通常，等離子可以通過所述擋板上的孔洞擴散到反應腔下部。所述孔洞越大，所述等離子濃度越高。通過改變所述孔洞的數量和位置，在反應腔中分佈的等離子濃度也可同時改變。所述擋板也可用於主動控制所述等離子。圖6示出了上述實施例。 In the above embodiment, the baffle is used to control the flow of the process gas. In addition, the baffles can also be used to passively control plasma. Typically, plasma can diffuse through the holes in the baffle to the lower portion of the reaction chamber. The larger the hole, the higher the plasma concentration. By varying the number and location of the holes, the plasma concentration distributed in the reaction chamber can also be varied simultaneously. The baffle can also be used to actively control the plasma. Fig. 6 shows the above embodiment.
在圖6所示的實施例中，擋板680用於主動控制等離子。如圖所示，次級天線682嵌入所述擋板680中。所述輔助天線可為線圈狀。如圖所示，所述天線可為單圈線圈的(圖中用虛線示出)，但也可採用其他設計。所述輔助天線可以同主天線一樣採用電源645(虛線箭 頭所示)供電，或者採用一個不同的射頻電源647供電。不管採用何電源供電，施加到所述輔助天線682上的功率幅度(amplitude)是獨立於施加到主天線640的電源功率之外來控制的。 In the embodiment shown in Figure 6, the baffle 680 is used to actively control the plasma. As shown, secondary antenna 682 is embedded in the baffle 680. The auxiliary antenna may be coiled. As shown, the antenna can be a single turn coil (shown in phantom in the figure), although other designs are possible. The auxiliary antenna can use the same power source 645 as the main antenna (dotted arrow Power is supplied as shown in the head or powered by a different RF power supply 647. Regardless of the power supply used, the power amplitude applied to the auxiliary antenna 682 is controlled independently of the power supply applied to the main antenna 640.
根據上述實施例，所述擋板680是由絕緣材料製成，且所述線圈嵌入該絕緣材料。比如，擋板680可以是由燒結的陶瓷材料製成，其中金屬線圈嵌入所述陶瓷材料。如此，來自次級線圈的功率可施加于擋板上方和下方的等離子。另一方面，根據另一實施例，所述擋板680也可由一面是絕緣材料另一面是導體材料製成，以使得射頻功率只能施加到擋板的其中一面。比如，所述擋板680的上層可由導體材料製成，以便來自次級線圈682的射頻功率僅施加到所述擋板下方的等離子中。這種設計可由圖6示出，其中線圈682嵌入陶瓷盤685，使得所述線圈中產生的射頻能量可施加到所述擋板下方的等離子，但導體盤683設置於所述陶瓷盤685上方，使得來自所述線圈682的射頻能量無法施加於所述擋板上方。此外，這種設計結構也會阻擋主線圈640產生的射頻能量施加於所述擋板680下方。因此，所述主天線640的射頻能量可被調整(如頻率，功率等)以控制所述擋板680上方的等離子，同時次級天線682的射頻能量可調整來控制所述擋板下方的等離子。 According to the above embodiment, the baffle 680 is made of an insulating material, and the coil is embedded in the insulating material. For example, the baffle 680 can be made of a sintered ceramic material in which a metal coil is embedded. As such, power from the secondary coil can be applied to the plasma above and below the baffle. On the other hand, according to another embodiment, the baffle 680 can also be made of a conductor material on one side of the insulating material and the other side so that RF power can only be applied to one side of the baffle. For example, the upper layer of the baffle 680 can be made of a conductor material such that RF power from the secondary coil 682 is only applied to the plasma below the baffle. Such a design can be illustrated in Figure 6, wherein the coil 682 is embedded in the ceramic disk 685 such that RF energy generated in the coil can be applied to the plasma below the baffle, but the conductor disk 683 is disposed over the ceramic disk 685. Radio frequency energy from the coil 682 is rendered unappliable above the baffle. In addition, this design structure also blocks RF energy generated by the main coil 640 from being applied under the baffle 680. Thus, the RF energy of the primary antenna 640 can be adjusted (eg, frequency, power, etc.) to control plasma above the baffle 680 while the RF energy of the secondary antenna 682 can be adjusted to control the plasma below the baffle .
前述任何實施例都可作近一步改進，使擋板成為可移動的。這種設計由圖6示出。圖6中的步進電機690通過例如齒條和齒輪之類機構耦合到擋板680，使得所述步進電機690能夠通電並垂直地驅動所述擋板上下移動，使得所述擋板680和基片620之間的空隙可被調整。 Any of the foregoing embodiments can be further modified to make the baffle movable. This design is illustrated by Figure 6. The stepper motor 690 of FIG. 6 is coupled to the baffle 680 by a mechanism such as a rack and pinion such that the stepper motor 690 can energize and vertically drive the baffle up and down, such that the baffle 680 and The gap between the substrates 620 can be adjusted.
應該理解，本發明提到的處理流程和技術並不限於提到的特定裝置，也可以是實現本發明的多個部件的組合。進一步地，各種類型的通用設備也可以在本發明技術中被採用。本發明描述了多個特定實施例，這些實施例都在各個方面說明了本發明的內容，其並不是對本發明內容的限制。本領域技術人員應當理解，除了本發明所舉例子，還有很多不同的組合可以適用本發明。 It should be understood that the processing flow and techniques referred to in the present invention are not limited to the specific devices mentioned, but may be a combination of various components for implementing the present invention. Further, various types of general purpose devices can also be employed in the present technology. The present invention has been described in terms of various specific embodiments, which are intended to be illustrative of the invention. Those skilled in the art will appreciate that many different combinations are applicable to the present invention in addition to the examples of the present invention.
此外，本領域技術人員通過對本發明說明書的理解和對本發明的實踐，能夠容易地想到其他實現方式。本文所描述的多個實施例中各個方面和/或部件可以被單獨採用或者組合採用。需要強調的是，說明書和實施例僅作為舉例，本發明實際的範圍和思路通過下面的權利要求來定義。 In addition, other implementations will be readily apparent to those skilled in the <RTIgt; Various aspects and/or components of the various embodiments described herein can be employed individually or in combination. It is to be understood that the specification and examples are by way of illustration
100‧‧‧ICP反應腔 100‧‧‧ICP reaction chamber
105‧‧‧金屬側壁 105‧‧‧Metal side wall
107‧‧‧絕緣頂板 107‧‧‧Insulated roof
110‧‧‧基座 110‧‧‧Base
115‧‧‧支撐夾盤 115‧‧‧Support chuck
120‧‧‧基片 120‧‧‧Substrate
125‧‧‧可被抽真空器 125‧‧‧ can be vacuumed
130‧‧‧週邊噴頭 130‧‧‧ peripheral nozzle
135‧‧‧中心噴頭 135‧‧‧Center nozzle
140‧‧‧天線 140‧‧‧Antenna
145‧‧‧射頻功率源 145‧‧‧RF power source
150‧‧‧氣源 150‧‧‧ gas source
155‧‧‧管線 155‧‧‧ pipeline
200‧‧‧反應腔裝置 200‧‧‧reaction chamber device
205‧‧‧金屬側壁 205‧‧‧Metal sidewall
207‧‧‧絕緣頂板 207‧‧‧Insulated roof
210‧‧‧基座 210‧‧‧Base
215‧‧‧支撐夾盤 215‧‧‧Support chuck
220‧‧‧基片 220‧‧‧ substrates
225‧‧‧抽真空泵 225‧‧ ‧ vacuum pump
230‧‧‧氣體噴頭 230‧‧‧ gas nozzle
230‧‧‧週邊注入器/噴頭 230‧‧‧ Peripheral injector/nozzle
235‧‧‧中心噴頭 235‧‧‧Center nozzle
240‧‧‧天線 240‧‧‧Antenna
245‧‧‧射頻電源 245‧‧‧RF power supply
250‧‧‧氣源 250‧‧‧ gas source
270‧‧‧擋板 270‧‧ ‧ baffle
272‧‧‧擋板 272‧‧ ‧ baffle
372‧‧‧擋板 372‧‧ ‧Baffle
373‧‧‧環形延伸部 373‧‧‧Circular extension
374‧‧‧間隙 374‧‧‧ gap
475‧‧‧擋板 475‧‧ ‧Baffle
476‧‧‧圓錐形延伸部 476‧‧‧Conical extension
477‧‧‧間隙 477‧‧‧ gap
558‧‧‧擋板 558‧‧ ‧Baffle
578‧‧‧擋板 578‧‧‧Baffle
589‧‧‧輔助/次級開口 589‧‧‧Auxiliary/secondary opening
620‧‧‧基片 620‧‧‧ substrates
640‧‧‧主天線 640‧‧‧Main antenna
645‧‧‧電源 645‧‧‧Power supply
647‧‧‧射頻電源 647‧‧‧RF power supply
680‧‧‧擋板 680‧‧ ‧ baffle
682‧‧‧天線 682‧‧‧Antenna
683‧‧‧導體盤 683‧‧‧Conductor disk
685‧‧‧陶瓷盤 685‧‧‧Ceramic plate
690‧‧‧步進電機 690‧‧‧Stepper motor
φ‧‧‧夾角 Φ‧‧‧ angle
d‧‧‧上開口直徑 d‧‧‧Upper opening diameter
d’‧‧‧下開口直徑 D’‧‧‧ lower opening diameter
附圖作為本發明說明書的一部分，例證了本發明的實施例，並與說明書一起解釋和說明本發明的原理。附圖用圖解的方式來解釋舉例實施例的主要特徵。附圖不是用於描述實際實施例所有特徵也不用於說明圖中元素間的相對尺寸，也不是按比例繪出。 The accompanying drawings illustrate the embodiments of the invention, The drawings illustrate the main features of the exemplary embodiments by way of illustration. The figures are not intended to describe all of the features of the actual embodiments or the relative dimensions of the elements in the figures, and are not drawn to scale.
圖1是習知技術的電感耦合反應腔的截面圖；圖2是本發明實施例的電感耦合反應腔的截面圖；圖3是本發明第二實施例的電感耦合反應腔的截面圖；圖4是本發明第三實施例電感耦合反應腔的截面圖；圖5是本發明第四實施例電感耦合反應腔的截面圖；圖6是本發明第五實施例電感耦合反應腔的截面圖。 1 is a cross-sectional view of an inductively coupled reaction cavity of a prior art; FIG. 2 is a cross-sectional view of an inductively coupled reaction cavity of an embodiment of the present invention; and FIG. 3 is a cross-sectional view of an inductively coupled reaction cavity of a second embodiment of the present invention; 4 is a cross-sectional view of the inductively coupled reaction chamber of the third embodiment of the present invention; FIG. 5 is a cross-sectional view of the inductively coupled reaction chamber of the fourth embodiment of the present invention; and FIG. 6 is a cross-sectional view of the inductively coupled reaction chamber of the fifth embodiment of the present invention.
其中，相同或相似的附圖標記表示相同或相似的裝置(模組)。 Wherein the same or similar reference numerals denote the same or similar devices (modules).
200‧‧‧反應腔裝置 200‧‧‧reaction chamber device
205‧‧‧金屬側壁 205‧‧‧Metal sidewall
207‧‧‧絕緣頂板 207‧‧‧Insulated roof
210‧‧‧基座 210‧‧‧Base
215‧‧‧支撐夾盤 215‧‧‧Support chuck
220‧‧‧基片 220‧‧‧ substrates
225‧‧‧抽真空泵 225‧‧ ‧ vacuum pump
230‧‧‧氣體噴頭 230‧‧‧ gas nozzle
230‧‧‧週邊注入器/噴頭 230‧‧‧ Peripheral injector/nozzle
235‧‧‧中心噴頭 235‧‧‧Center nozzle
240‧‧‧天線 240‧‧‧Antenna
245‧‧‧射頻電源 245‧‧‧RF power supply
250‧‧‧氣源 250‧‧‧ gas source
270‧‧‧擋板 270‧‧ ‧ baffle
272‧‧‧擋板 272‧‧ ‧ baffle
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| Application Number | Priority Date | Filing Date | Title |
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| CN2011103192527A CN102395243A (en) | 2011-10-19 | 2011-10-19 | Inductance coupling plasma device for improving uniformity and efficiency of plasmon |
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| TW201318063A true TW201318063A (en) | 2013-05-01 |
| TWI495004B TWI495004B (en) | 2015-08-01 |
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| CN103796413B (en) * | 2012-11-01 | 2017-05-03 | 中微半导体设备(上海)有限公司 | Plasma reactor and method for manufacturing semiconductor substrate |
| CN103874314B (en) * | 2012-12-17 | 2016-10-05 | 中微半导体设备(上海)有限公司 | A kind of inductively coupled plasma device |
| CN103997843B (en) * | 2013-02-17 | 2017-02-15 | 中微半导体设备(上海)有限公司 | Plasma reactor improving gas distribution |
| CN117080062B (en) * | 2023-10-13 | 2024-01-26 | 无锡邑文微电子科技股份有限公司 | Bowl-shaped etching method |
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| JPH0729890A (en) * | 1993-07-08 | 1995-01-31 | Kokusai Electric Co Ltd | Plasma producing equipment |
| JP2638443B2 (en) * | 1993-08-31 | 1997-08-06 | 日本電気株式会社 | Dry etching method and dry etching apparatus |
| US6164241A (en) * | 1998-06-30 | 2000-12-26 | Lam Research Corporation | Multiple coil antenna for inductively-coupled plasma generation systems |
| JP2001267248A (en) * | 2000-03-15 | 2001-09-28 | Shibaura Mechatronics Corp | Semiconductor processor |
| TWI241868B (en) * | 2002-02-06 | 2005-10-11 | Matsushita Electric Ind Co Ltd | Plasma processing method and apparatus |
| US20040118344A1 (en) * | 2002-12-20 | 2004-06-24 | Lam Research Corporation | System and method for controlling plasma with an adjustable coupling to ground circuit |
| KR100561848B1 (en) * | 2003-11-04 | 2006-03-16 | 삼성전자주식회사 | Helical resonator type plasma processing apparatus |
| US20050241767A1 (en) * | 2004-04-30 | 2005-11-03 | Ferris David S | Multi-piece baffle plate assembly for a plasma processing system |
| KR100774521B1 (en) * | 2005-07-19 | 2007-11-08 | 주식회사 디엠에스 | Plasma reactor having multiple antenna structure |
| JP4904202B2 (en) * | 2006-05-22 | 2012-03-28 | ジーイーエヌ カンパニー リミッテッド | Plasma reactor |
| JP6097471B2 (en) * | 2007-04-27 | 2017-03-15 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Annular baffle |
| CN101797394A (en) * | 2009-02-09 | 2010-08-11 | 王龙哲 | Radio-frequency inductance coupling plasma sterilizer |
| CN101805895B (en) * | 2010-03-31 | 2011-09-07 | 河北大学 | Helicon wave plasma enhanced chemical vapor deposition unit |
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