TW201315553A - Welding device - Google Patents

Abstract

The object of the present invention is to suppress operation cost and to realize increase of yield. The technical solution of the present invention is a welding device (1) that comprises: a vacuum chamber (100) that keeps an interior thereof in a vacuum environment, an X-direction welding element (200) that carries out welding in X-direction along each column, in X-direction, of a plurality of work-pieces (10) that is arranged in X-direction and Y-direction in an array form in the vacuum chamber (100), and a Y-direction welding element (300) that carries out welding in Y-direction along each row, in Y-direction, of the plurality of work-pieces (10) in the vacuum chamber (100).

Description

Welding device

The present invention relates to a welding device suitable for seam welding.

The electronic component such as a crystal oscillator is manufactured by seam-welding a cover (hereinafter, the package and the cover are collectively referred to as a workpiece) located in the opening of the package (for example, refer to Patent Documents 1 to 3). In the seam welding, the roller electrode is pressed against a plurality of workpieces arranged in an array of X and Y directions, and is rotated while applying a pulse voltage.

This seam welding is carried out under a nitrogen atmosphere in which a nitrogen gas is filled in a room, or in a vacuum environment in which a room is maintained in a vacuum environment (substantially vacuum). Thereby, air can be prevented from entering the workpiece.

In the seam welding, each row in the X direction is performed on all the workpieces in the X direction, and thereafter, each row in the Y direction is performed on all the workpieces in the Y direction. Thereby, the plurality of electronic components can be efficiently manufactured in a short time.

[prior technical literature] [Patent Document]

[Patent Document 1] Japanese Patent Laid-Open Publication No. 2009-147097

[Patent Document 2] Japanese Patent Laid-Open Publication No. 2009-147288

[Patent Document 3] Japanese Patent Laid-Open Publication No. 2010-194544

In the case of seam welding under a nitrogen gas, it is necessary to continuously fill the nitrogen gas. In this case, if there is a problem in the room, after the problem is resolved, it is necessary to refill the nitrogen gas to return. The refilling of the nitrogen gas needs to be sufficiently carried out in order to lower the dew point. In this way, since the nitrogen gas is consumed, there is a problem that the running cost is high. Further, in the case where a problem occurs indoors, it takes a long time to refill the nitrogen gas, and there is a problem that the productivity of the electronic component is lowered.

In addition, electronic components tend to be less expensive, and in order to compensate for the tendency to lower prices, production capacity is required to be improved.

The present invention has been made in view of the above problems, and an object thereof is to provide a welding apparatus capable of suppressing an operation cost and improving productivity.

According to the intensive research of the present inventors, the above object can be attained by the following means.

(1) The present invention provides a welding apparatus comprising: a vacuum chamber that holds a self inside thereof in a vacuum environment; and a Y direction in which the X direction and the X direction are orthogonal to the X direction in the vacuum chamber. An X-direction welding element in which the array-shaped plurality of workpieces are welded along the X direction in each of the X-direction rows, and a Y-direction welding element in which the plurality of workpieces are welded in the Y direction in the Y-direction in the vacuum chamber And the temporary storage station, wherein the plurality of workpieces are welded by one of the X-direction welding element and the Y-direction welding element, and the other is Several workpieces are welded.

(2) The welding device according to the above aspect (1), wherein the X-direction welding element includes a first Y-direction shifting means for shifting the plurality of workpieces in the Y direction, and the first The Y-direction shifting means welds the plurality of workpieces offset in the Y direction, and the Y-direction welding element includes a second Y-direction shifting means for shifting the plurality of workpieces in the Y direction. The two Y-direction shifting means welds the plurality of workpieces offset in the Y direction.

(3) The welding device according to the above aspect (2), further comprising: a conveyance path that extends from the X-direction welding element and the Y-direction welding element, from the loading to the removal of the vacuum chamber The plurality of workpieces are linearly conveyed in the X direction.

(4) The welding device according to the above aspect (3), wherein the X-direction welding element is provided with the first Y-direction positioning means, and is arranged in the first Y-direction shifting means The plurality of workpieces on the workpiece tray are placed together with the workpiece tray and movable in the Y direction; and the X-direction fusion joint is movable above the first Y-direction positioning carrier in the X direction; and X The direction welding roller is configured to be rotatable about a Y-axis parallel to the Y direction in the X-direction fusion joint, and is movable in the X direction together with the X-direction fusion joint; and welding the X direction The head is moved while the X-direction welding roller is moved and welded, and the first Y-direction positioning carrier is moved to switch the row of the plurality of workpieces to be welded, and the Y-direction welding element is provided with: Second Y direction positioning The second Y-direction shifting means is configured such that the plurality of workpieces arranged on the workpiece tray are placed together with the workpiece tray and movable in the Y direction; and the Y-direction fusion joint is in the The Y-direction positioning carrier is movable upward in the X direction; and the Y-direction welding roller is disposed in the Y-direction fusion joint so as to be rotatable around the X-axis parallel to the X direction, and The Y-direction fusion joint moves together in the X direction; and the second Y-direction positioning carrier is moved and the plurality of workpieces are moved while being welded, and the Y-direction fusion joint is moved to switch the aforementioned columns of the plurality of workpieces to be welded .

(5) The welding device according to the above aspect (4), wherein the X-direction fusion joint includes a base for the X-direction fusion joint, and a base for the X-direction fusion joint and may be different a first Z-direction movable member that moves in a Z direction that is perpendicular to the X direction and the Y direction, and a first Z-direction movable member that is rotatable around the Y-axis and that is disposed around the Y-axis And holding the X-direction welding roller holding portion that supplies current to the X-direction welding roller, and the first Z-direction movable member is welded in the X direction by having thermal conductivity, thermal radiation, and insulation properties. The welding heat generated by the roller is radiated from the surface of the first Z-direction movable member to the outside while the X-direction welding roller holding portion is conveyed toward the first Z-direction movable member, and the X-direction welding roller is heated. The sub-holding portion and the susceptor for the X-direction fusion nip are insulated by the first Z-direction movable member.

(6) The welding device according to (5) above, wherein the first Z-direction movable member has a thermal conductivity of 170 W/(m.K) ) The above materials are formed.

(7) The welding device according to the above (5) or (6), wherein the first Z-direction movable member is made of a material having a thermal emissivity of 0.8 or more.

(8) The welding device according to any one of the items (5) to (7), wherein the first Z-direction movable member has an insulation resistance value of 10 ³ Ω. Composition of materials above cm.

(9) The welding device according to any one of the items (5) to (8), wherein the first Z-direction movable member is made of ceramic.

(10) The present invention is the welding device according to (9) above, wherein the ceramic is tantalum carbide or aluminum nitride.

The welding device according to any one of the above aspects, wherein the Y-direction fusion joint includes: a Y-direction fusion joint base; and the Y-direction welding a second Z-direction movable member that is movable in the Z direction, and a second Z-direction movable member that is rotatably held around the X-axis and that is rotatable toward the X-axis a Y-direction welding roller holding portion that supplies a current in the Y-direction welding roller, and the second Z-direction movable member is formed by welding the roller in the Y direction by thermal conductivity, thermal radiation, and insulation. The welding heat is radiated from the surface of the second Z-direction movable member to the outside while the Y-direction welding roller holding portion is conveyed toward the second Z-direction movable member, and the Y-direction welding roller holding portion and The yoke for the Y-direction fusion joint is by the aforementioned second Z-side The movable member is insulated.

(12) The welding device according to any one of the above (4), wherein the X-direction welding element includes a first conveying finger and positioning the carrier in the first Y direction. The first proximity position and the first remote position away from the first Y-direction positioning carrier are movably disposed in the X-direction fusion joint, and when located in the first proximity position, and the X-direction fusion joint The workpiece tray is pushed together in the X direction, and the plurality of workpieces are conveyed in the X direction together with the workpiece tray.

(13) The welding device according to the above aspect (12), wherein the X-direction welding element moves the X-direction fusion joint while the first conveying finger is located at the first distant position. The X-direction welding roller is moved while being welded.

(14) The welding device according to any one of the preceding claims, wherein the Y-direction welding element is provided with a second conveying finger and positioning the carrier in the second Y direction a second Y-direction fusion joint is movably disposed between the second proximity position and the second remote position away from the second Y-direction positioning carrier, and is located in the second proximity position together with the Y-direction fusion joint The workpiece tray is pushed in the X direction, and the plurality of workpieces are conveyed in the X direction together with the workpiece tray.

(15) The welding device according to the above (13) or (14), wherein the Y-direction welding element is configured to move the Y-direction when the second conveying finger is located at the second distant position Melt joint The column of the aforementioned plurality of workpieces to be welded is switched.

(16) The welding device according to any one of the above (4), wherein the X-direction welding element is provided with a first supporting mechanism and can be placed on the first Y Or aligning the workpiece tray of the direction positioning carrier, and the Y-direction welding element is provided with a second supporting mechanism for supporting the workpiece tray placed on the second Y-direction positioning carrier, or It is lifted.

(17) The welding apparatus according to the above aspect (16), wherein the first support mechanism includes a workpiece tray that is movable in the Y direction and that moves in the Y direction. a first protruding contact member and a first pushing member that moves in the Y direction together with the first Y-direction positioning carrier and that pushes the workpiece tray that collides with the first protruding contact member in the Y direction, and the first The protruding contact member is a first pressing member that urges the first protruding contact member toward the recovery direction when moving in the Y direction, and the second supporting mechanism is configured to be movable in the Y direction a second projecting contact member that collides with the workpiece tray that moves in the Y direction, and the workpiece tray that moves in the Y direction together with the second Y-direction positioning carrier and collides with the second projecting contact member toward the aforementioned The second pushing member pushed in the Y direction and the second protruding contact member are the second pressing members that urge the second protruding contact members in the direction of the recovery when moving in the Y direction.

(18) The welding device according to any one of the above (4), wherein the X-direction welding element includes a first exchange carrier and the X-direction welding for exchange Roller, before and before The first Y-direction positioning carrier moves together in the Y direction, and automatically exchanges the X-direction welding roller disposed in the X-direction fusion joint and the aforementioned exchange for the first exchange carrier. In the X-direction welding roller, the Y-direction welding element is provided with a second exchange carrier, and the Y-direction welding roller for exchange is placed, and is movable in the Y direction together with the second Y-direction positioning carrier, and is automatically exchanged: The Y-direction welding roller disposed in the Y-direction fusion joint and the Y-direction welding roller to be placed in the second exchange carrier.

(19) The welding apparatus according to any one of the above-mentioned (1), wherein the vacuum chamber is provided with a temporary storage station, and is cooled by the X-direction welding element and the Y-direction welding After the one of the elements is welded, the other plurality of workpieces before being welded by the other side are welded.

(20) The welding device according to any one of the above (1), wherein the vacuum chamber is provided with an external cooling element that cools the vacuum chamber from the outside.

According to the present invention, it is possible to obtain an excellent effect of suppressing the running cost and preventing the yield from being lowered.

Hereinafter, an example of an embodiment of the present invention will be described in detail with reference to the drawings. also, In the following description, the directions based on the X, Y, and Z axes shown in the drawing will be described. The X and Y axes are horizontal axes at right angles to each other, and the Z axis is a vertical axis at right angles to the X and Y axes. The X-axis direction of the drawing is the X direction of the present invention, the Y-axis direction is the Y direction of the present invention, and the Z-axis direction is the Z direction of the present invention, but the present invention is not limited thereto. In each of the drawings, the illustration of the configuration of the part is omitted, and the drawing is simplified.

Fig. 1A is a plan view of a welding apparatus 1 according to an embodiment of the present invention, showing the lower side of the welding apparatus 1. Fig. 1B is a plan view of the welding device 1, showing the upper portion of the welding device. Fig. 2 is a rear view of the welding device 1. Fig. 3A is a right side view of the welding device 1, showing the X-direction welding element 200 on the upstream side. Fig. 3B is a right side view of the welding device 1, showing the Y-direction welding element 300 on the downstream side. Further, in the first to third figures and the other figures described below, a part is divided into sections, and the section is shown by oblique lines.

The welding device 1 as shown in these figures is used in a production line for manufacturing electronic parts, and is used for seam welding of the workpiece 10 in a vacuum environment. The workpiece 10 is placed on the workpiece tray 20 in a state in which the cover is placed on the opening of the package or in a state of being placed on the dummy. In the workpiece tray 20, a plurality of depressions for accommodating the workpiece 10 are formed in an array in the X and Y-axis directions, and the plurality of workpieces 10 are arranged in an array in the X and Y-axis directions.

In the welding device 1, the plurality of workpieces 10 arranged on the workpiece pallet 20 are integrally welded in the X-axis direction while being conveyed as a whole. Specifically, the welding device 1 is provided with: holding the inside in a vacuum chamber vacuum chamber 100, the X-direction welding element 200 welded along the X-axis direction on the upstream side in the vacuum chamber 100, and the Y-direction welding element 300 welded along the Y-axis direction on the downstream side in the vacuum chamber 100, and in the vacuum The intermediate flow in the chamber 100 is a temporary storage station 400 in which the workpiece 10 in the middle of welding is placed, an external cooling element 500 that cools the vacuum chamber 100 from the outside, and a preparation chamber that is disposed on the upstream side of the vacuum chamber 100 (load lock) 600), a take-out chamber (unload lock) 700 disposed downstream of the vacuum chamber 100, and an upstream transport member 800 that feeds the workpiece 10 into the vacuum chamber 100, and the workpiece 10 is sent from the vacuum chamber 100. The downstream side transport element 900, and a control element (not shown) are used.

The various parts of these welding devices 1 are collectively controlled by control elements. The control element is composed of a CPU, a RAM, a ROM, and the like, and performs various controls. The CPU is a central processing unit that implements various functions (for example, a function of calculating the number of times of welding) by executing various programs. RAM is used as a work area of the CPU. The ROM is a program whose memory is executed by the CPU.

The control element of such a configuration is as described in detail later. The exchange period of the X-direction welding roller 240 is determined according to the number of welding times. In the exchange period, the X-direction welding roller 240 and the X-direction welding roller for exchange are used. 292 exchange control. Similarly, the control element determines the exchange timing of the Y-direction welding roller 340 by the number of welding cycles, and controls the Y-direction welding roller 340 and the Y-direction welding roller 392 for exchange in the exchange timing.

The vacuum chamber 100 is a box-shaped container having a substantially hexahedron The chamber body 110, the vacuum pump 120, and the atmosphere opening valve 130. In the chamber body 110, a first opening 112 communicating with the preparation chamber 600 is formed on the side wall on the upstream side, and a second opening 114 communicating with the take-out chamber 700 is formed on the side wall on the downstream side. The first opening 112 is opened and closed by the upstream side partition door 615 of the preparation chamber 600 to be described later. The second opening 114 is opened and closed by the downstream side partition door 715 of the take-out chamber 700 to be described later. The vacuum chamber 100 in which the first opening 112 and the second opening 114 are closed is controlled by the operation of the vacuum pump 120 to control the air pressure in the chamber body 110 to an arbitrary pressure from atmospheric pressure to a vacuum environment. The atmosphere opening valve 130 is used during maintenance or the like. Further, in the chamber main body 110, a beam 116 along the X-axis direction is formed in order to arrange the X-direction fusion joint moving mechanism 260 and the Y-direction fusion joint moving mechanism 360 which will be described later. Further, in the chamber body 110, a support member 118 extending from the beam 116 in the Y-axis direction is formed in order to arrange the first Z-direction moving mechanism 270 and the second Z-direction moving mechanism 370 which will be described later.

The X-direction welding element 200 is obtained by welding a plurality of workpieces 10 arranged in an array in the X-axis direction along the X-axis direction. Specifically, the X-direction welding element 200 includes a plurality of workpieces 10 that are placed in the first Y-direction positioning carrier 205 together with the workpiece tray 20 and that move the first Y-direction positioning carrier 205 in the Y-axis direction. a first Y-direction positioning carrier moving mechanism 210, and a first supporting mechanism 220 for supporting or releasing the workpiece tray 20 on the first Y-direction positioning carrier 205, and having a pair of X-direction welding rollers 240 and three (two pairs) The X-direction fusion joint 230 of the first conveying finger 250 and the X-direction fusion joint 230 are moved toward the X-axis direction a movable X-direction fusion-joint moving mechanism 260 and a pair of first Z-direction movable members 268 movably disposed in the Z-axis direction with respect to the X-direction fusion joint pedestal 231 constituting the X-direction fusion joint 230, and The first Z-direction movable member 268 is disposed in the first Z-direction movable member 268, and the X-direction welding roller housing 269 is rotatably supported by the X-direction welding roller 240, and the X-direction welding roller 240 is moved in the Z-axis direction or the like. The first Z-direction moving mechanism 270 that moves the first conveyance finger 250 in the Z-axis direction and the first exchange carrier 290 on which the X-direction welding roller 292 for exchange is placed.

The first Y-direction positioning carrier 205 functions as a first Y-direction shifting means for shifting the plurality of workpieces 10 transported in series in the X-axis direction in the Y-axis direction by the first transport finger 250, which will be described later in detail. . The X-direction welding element 200 is welded to a plurality of workpieces 10 that are displaced in the Y-axis direction by the first Y-direction positioning carrier 205. Specifically, the first Y-direction positioning carrier 205 is disposed on the upstream side bottom surface of the chamber body 110 so as to be linearly movable in the Y-axis direction. The first Y-direction positioning carrier moving mechanism 210 is a power source of the first Y-direction positioning carrier 205, and is disposed on the upstream side bottom surface in the chamber body 110. Specifically, the first Y-direction positioning carrier moving mechanism 210 includes two first Y-direction positioning carrier rails 211 arranged in parallel with each other along the Y-axis direction, and positioning along the two first Y directions. Two pairs of first Y-direction positioning carrier slides 212 for linearly moving the carrier rail 211 in the Y-axis direction, and a first Y-direction positioning carrier drive shaft 213 having a thread formed on the outer peripheral surface thereof, and positioning the first Y direction a pair of first Y-direction positioning carrier drive shaft bearings 214, 215 rotatably supported by the carrier drive shaft 213, and the first Y direction The first Y-direction positioning carrier nut 216 to which the carrier driving shaft 213 is screwed, and the first Y-direction positioning carrier position control motor 217 connected to the first Y-direction positioning carrier driving shaft 213.

The first Y-direction positioning carrier rail 211 is a base portion constituting the first Y-direction positioning carrier moving mechanism 210, and constitutes a base portion of the first supporting mechanism 220 which will be described later in detail. That is, the track for the first Y-direction positioning carrier 205 and the track for the first protruding contact member 221 which will be described later in detail are integrally formed. The pair of first Y-direction positioning carrier sliders 212 are mounted on the first Y-direction positioning carrier 205. For the first Y-direction positioning carrier 205, the carrier rails 211 can be positioned along the two first Y directions. A linear movement in the Y-axis direction. The first Y-direction positioning carrier drive shaft 213 is disposed in parallel between the two first Y-direction positioning carrier rails 211. One end of the first Y-direction positioning carrier drive shaft 213 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the first Y-direction positioning carrier position control motor 217. One of the first Y-direction positioning carrier drive shaft bearings 214 is a bottom surface disposed in the chamber body 110. The other first Y-direction positioning carrier drive shaft bearing 215 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The first Y-direction positioning carrier drive shaft bearing 215 maintains the inside of the chamber body 110 in a vacuum environment during and during the rotation of the first Y-direction positioning carrier drive shaft 213. The first Y-direction positioning carrier nut 216 is fixed to the lower surface of the first Y-direction positioning carrier 205, and the first Y-direction positioning carrier driving shaft 213 is driven by the position control motor 217 by the first Y-direction positioning carrier. The rotation of the first Y-direction positioning carrier 205 linearly moves in the Y-axis direction. Further, the first Y-direction positioning carrier drive shaft 213 and the first Y-direction positioning carrier nut 216 are so-called ball screws having a ball at the screw portion, and the resistance caused by the sliding can be reduced.

Here, the configuration of the first support mechanism 220 will be described in detail. 4A is a perspective view of the first support mechanism 220.

The first support mechanism 220 shown in this figure is disposed below the upstream side in the chamber body 110. Specifically, the first support mechanism 220 includes a first projecting contact member 221 that is protruded in the Y-axis direction and that moves in the Y-axis direction together with the first Y-direction positioning carrier 205, and is movable in the Y-axis direction. Two first Y-direction positioning carrier rails 211 for positioning the carrier moving mechanism 210 in the first Y direction, and a pair of first protruding contact members linearly moving in the Y-axis direction along the two first Y-direction positioning carrier rails 211 The slider 222 and the first push member 223 that pushes the workpiece tray 20 in the Y-axis direction together with the first Y-direction positioning carrier 205 and the recovery of the first projecting contact member 221 in the Y-axis direction a first stop member 224 that urges the first protruding contact member 221 and a first stop that limits a range of movement of the first protruding contact member 221 urged toward the first pressing member 224 in a recovery direction 225.

The first protruding contact member 221 is disposed on the side of the workpiece tray 20 along the X-axis direction so as to face the first pushing member 223. The first protruding contact member 221 is a case where the first pushing member 223 is moved in the Y-axis direction by a predetermined amount, and the workpiece tray 20 is inserted into the first Y-direction positioning carrier 205 together with the first pushing member 223. on. a pair of first protrusions In the contact member slider 222, the first projecting contact member 221 is mounted, and the first projecting contact member 221 is linearly movable in the Y-axis direction in which the carrier rails 211 are positioned along the two first Y directions. The first push member 223 is disposed on the first Y-direction positioning carrier 205 along the X-axis direction so as to face the first projecting contact member 221. When the first push member 223 is moved by a predetermined amount in the Y-axis direction, the workpiece holder 20 is slid together with the first projecting contact member 221 to be supported by the first Y-direction positioning carrier 205.

Here, the configuration of the X-direction fusion joint 230 will be described in detail. Fig. 5A is an enlarged front view of the X-direction fusion joint 230. Fig. 5B is an enlarged side view of the X-direction fusion joint 230.

The X-direction fusion joint 230 includes a base 231 for the X-direction fusion joint to be used as a base, and a pair of Y-directions arranged in parallel with each other in the Y-axis direction with respect to the front surface of the X-direction fusion joint base 231. a rail 232, and two linear Y-direction Y-direction sliders 233 linearly moving in the Y-axis direction along the pair of Y-direction rails 232, and parallel to each other in the Z-axis direction for the two pairs of Y-direction sliders 233 a pair of first Z-direction rails 234 disposed, and linear motor-type two pairs of first Z-direction sliders 235 that linearly move in the Z-axis direction along the pair of first Z-direction rails 234, and are mounted on A pair of first Z-direction movable members 268 that are movable in the Z-axis direction by the two pairs of first Z-direction sliders 235, and a pair of X-direction welded joints disposed at the lower ends of the pair of first Z-direction movable members 268 a roller holding portion 236 and a pair of X-direction welded roller housings 269 that are detachably disposed in the pair of X-direction welded roller holding portions 236, and an X-side A pair of X-direction welding rollers 240 that are rotatably supported by the pair of X-direction welding roller housings 269 to the welding roller rotating shaft 237.

Return to the first to third figures. The X-direction fusion joint 230 is a beam 116 that is disposed above the first Y-direction positioning carrier 205 and that is linearly movably disposed in the chamber body 110 in the X-axis direction. The X-direction fusion splice moving mechanism 260 is a power source of the X-direction fusion splice 230 and is disposed above the first Y-direction positioning carrier 205. Specifically, the X-direction welded joint moving mechanism 260 includes two welded joint rails 261 that are disposed in parallel with each other along the X-axis direction on the side surface of the beam 116 through the support member 118, and are welded along the two strips. Two pairs of X-direction fusion joint sliders 262 that linearly move in the X-axis direction, and an X-direction fusion joint drive shaft 263 that is formed with a thread on the outer peripheral surface, and the X-direction fusion joint drive shaft 263 are rotatable A pair of X-direction welded joint drive shaft bearings 264 and 265 supported by the ground, and an X-direction welded joint nut 266 screwed to the X-direction welded joint drive shaft 263 and an X connected to the X-direction welded joint drive shaft 263 The position welding motor 267 is used for the directional weld.

This weld joint rail 261 is a base portion constituting the X-direction weld joint moving mechanism 260, and constitutes a base portion of the Y-direction weld joint moving mechanism 360 to be described later. In other words, the rail for the X-direction fusion joint 230 and the rail for the Y-direction fusion joint 330 to be described later are integrally formed. The two pairs of X-direction welded joint sliders 262 are fixed to the X-direction welded joint 230, and the X-direction welded joint 230 is linearly movable in the X-axis direction along the two welded joint rails 261. The X-direction fusion joint drive shaft 263 is disposed on the upstream side in the chamber body 110, and is disposed in parallel in two welding The head is used between the tracks 261. One end of the X-direction welded joint drive shaft 263 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the X-direction welded joint position control motor 267. One of the X-direction fusion joint drive shaft bearings 264 is a side surface of the support member 118 disposed in the chamber body 110. The other X-direction welded joint drive shaft bearing 265 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The X-direction weld joint drive shaft bearing 265 maintains the inside of the chamber body 110 in a vacuum environment during and during the rotation of the X-direction weld joint drive shaft 263. The X-direction welding joint nut 266 is fixed to the back surface of the X-direction welding joint base 231, and is rotated by the X-direction welding joint drive shaft 263 driven by the X-direction welding joint position control motor 267. The direction fusion joint 230 moves linearly in the X-axis direction. Further, the X-direction welded joint drive shaft 263 and the X-direction welded joint nut 266 are so-called ball screws that are provided with balls at the screwing portion, and the resistance caused by the sliding can be reduced.

The first Z-direction movable member 268 is movably disposed in the Z-axis direction with respect to the front surface of the X-direction fusion joint base 231. The first Z-direction movable member 268 is made of a material having thermal conductivity, thermal radiation, and insulation, and can improve heat dissipation performance of heat generated by seam welding. The heat of fusion generated in the X-direction fusion joint 230 can be radiated from the surface of the first Z-direction movable member 268 to the outside while being transmitted to the first Z-direction movable member 268 via the X-direction welding roller holding portion 236. Further, the X-direction welded roller holding portion 236 and the X-direction welded joint base 231 are insulated by the first Z-direction movable member 268. Moreover, the area of the front surface of the first Z-direction movable member 268 is set as large as possible, and the heat radiation performance is improved. Specifically, the first Z-direction movable member 268 is formed to have a heat-receiving surface 268A having a predetermined area, and the area of the heat-dissipating surface is 3 cm ² or more, and preferably 5 cm ² or more.

The material of the first Z-direction movable member 268 preferably has a thermal conductivity of 170 W/(m.K) or more. Further, the material of the first Z-direction movable member 268 has a thermal emissivity of 0.8 or more, that is, preferably close to 1. Moreover, the material of the first Z-direction movable member 268 has an insulation resistance of 10 ³ Ω. More preferably cm or more. Further, the material of the first Z-direction movable member 268 is preferably rust-proof and lightweight. Among the materials of the first Z-direction movable member 268, ceramic is preferable, and tantalum carbide or aluminum nitride is more preferable. The thermal emissivity of the ceramic to be used is preferably 0.8 or more and 1.0 or less, more preferably 0.93 or more and 0.95 or less. In other words, the thermal emissivity of the ceramic is higher than 0.02 or more and 0.1 or less of the thermal emissivity of aluminum and 0.5 or more and 0.9 or less of the thermal emissivity of iron. Tantalum carbide has a thermal conductivity of 170 W/(m.K), a thermal emissivity of 0.8 or more and 1.0 or less, and an insulation resistance of 10 ³ Ω. Above cm 5 × 10 ⁶ Ω. Below cm. Aluminum nitride has a thermal conductivity of 170 W/(m.K) or more and 230 W/(m.K) or less, a thermal emissivity of 0.93, and an insulation resistance of 10 ¹³ Ω. More than cm. Further, all of the above-described preferable conditions are satisfied for both tantalum carbide and aluminum nitride.

The X-direction welding roller holding portion 236 is rotatably held by the X-direction welding roller 240 at the lower end of the first Z-direction movable member 268, and supplies current to the X-direction welding roller 240. The welding roller 240 is welded.

The X-direction welded roller housing 269 is a conductive adhesive for energizing between the X-direction welding roller 240. The X-direction welded roller outer casing 269 is integrally formed with the X-direction welded roller 240 so as to be integrally exchangeable with the X-direction welded roller 240.

The pair of X-direction welding rollers 240 are rotatable about the Y-axis around the Y-axis of the conjugate base 231 in the X direction, and are movable in the Z-axis direction, and are detachably arranged. It is movable in the X-axis direction together with the X-direction fusion joint base 231. Further, the pair of X-direction welding rollers 240 are moved in the Y direction by the Y-direction slider 233 so that the interval between them is adjustable. Specifically, the pair of X-direction welding rollers 240 are automatically exchanged for exchange with the X-direction welding roller housing 269 by moving in the Z-axis direction above the first exchange carrier 290 which will be described later in detail. The X direction welds the roller 292. A pair of X-direction welding rollers 240 constitute a welding electrode and perform seam welding on the workpiece 10. In other words, the pair of X-direction welding rollers 240 are welded to the workpiece 10 by rotating a pulsed voltage to the workpiece 10. Therefore, the pair of X-direction welded rollers 240 need to be insulated from the X-direction welded joint base 231, but the insulation is achieved by the insulating first Z-direction movable member 268.

The first Z-direction moving mechanism 270 includes a first Z-direction moving drive shaft 271 that is disposed along the X-axis direction through the X-direction fusion joint 230, and the first Z-direction moving drive shaft 271. Rotaryly supported pair of first Z-direction moving drive shaft bearings 272, 273, and The rotational force of the predetermined first direction (for example, the left direction viewed from the first Z-direction movement position control motor 274 side) of the drive shaft 271 in the first Z direction is converted into the pair of X-direction welding rollers 240. a power conversion mechanism (not shown) for the X-direction welding roller in the Z-axis direction, and a predetermined second direction (for example, a position for moving from the first Z direction) to the first Z-direction moving drive shaft 271 The first transfer finger power conversion mechanism (not shown) that converts the rotational force in the right direction viewed from the motor 274 side into the Z-axis direction of the three first transport fingers 250, and the first Z direction The first Z-direction moving position control motor 274 connected to the movement drive shaft 271 and the X-direction welding roller interval changing mechanism (not shown) for changing the interval between the pair of X-direction welding rollers 240, and The X-direction welding roller interval changing position control motor (not shown) is connected to the X-direction welding roller interval changing mechanism.

In the first Z-direction moving drive shaft 271, a spline shaft is employed. One end of the first Z-direction moving drive shaft 271 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the first Z-direction moving position control motor 274. One of the first Z-direction moving drive shaft bearings 272 is a side surface of the support member 118 disposed in the chamber body 110. The other Z-direction moving drive shaft bearing 273 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The first Z-direction moving drive shaft bearing 273 can hold the inside of the chamber body 110 in a vacuum environment during and after the rotation of the first Z-direction moving drive shaft 271. The X-direction welding roller power conversion mechanism is disposed in the X-direction fusion joint 230, and the first Z side is The rotation in the predetermined first direction (for example, the left direction viewed from the first Z-direction movement position control motor 274 side) of the first Z-direction movement drive shaft 271 driven by the movement position control motor 274 causes the X direction The welding roller 240 moves linearly in the Z-axis direction. The X-direction welding roller spacing changing mechanism and the X-direction welding roller spacing changing position control motor are disposed in the X-direction welding joint 230. The X-direction welding roller interval changing mechanism is driven by the position control motor for changing the X-direction welding roller interval, and the interval between the Y-axis directions of the pair of X-direction welding rollers 240 is changed.

The three first transport fingers 250 function as transport means for transporting the plurality of workpieces 10 in series in the X-axis direction. The three first conveyance fingers 250 are spaced apart from each other in the X-axis direction with respect to the X-direction fusion joint 230, and are movably disposed in the Z-axis direction so as to be slidable together with the X-direction fusion joint 230. Move in the X-axis direction. Specifically, the three first transport fingers 250 are a first proximity position that is closer to a predetermined interval from the first Y-direction positioning carrier 205, and a first distant position that is positioned away from the carrier 205 by a predetermined interval from the first Y-direction. Between, it can move in the Z axis direction. Moreover, when the three first transporting fingers 250 are in the first approaching position, the two workpiece pallets 20 are inserted back and forth, and move together with the X-direction fusion joint 230 in the X-axis direction to push the workpiece pallet 20 The plurality of workpieces 10 are conveyed in the X-axis direction together with the workpiece tray 20. On the other hand, when the three first transporting fingers 250 are located at the first remote position, they are not pushed to the workpiece tray 20. The pair of first transport fingers 250 keeps the interval between the X-axis directions constant.

The aforementioned first power transmitting mechanism for carrying fingers is disposed at X The direction fusion joint 230 follows a predetermined second direction of the first Z-direction movement drive shaft 271 driven by the first Z-direction movement position control motor 274 (for example, from the first Z-direction movement position control motor 274) The rotation of the right direction as viewed from the side causes the first conveyance finger 250 to linearly move in the Z-axis direction.

The first exchange carrier 290 is fixed to one end of the first Y-direction positioning carrier 205 in the Y-axis direction, and is movable in the Y-axis direction together with the first Y-direction positioning carrier 205. In the first exchange carrier 290, the plurality of X-direction welding roller holding tables 294 held by the X-direction welding rollers 292 for exchange are placed along the Y-axis direction. In the plurality of X-direction welding roller holding stages 294, the pair of X-direction welding rollers 292 for exchange are placed in the Y-axis direction.

In the Y-direction welding element 300, a plurality of workpieces 10 arranged in an array are welded in the Y-axis direction in each row in the Y-axis direction. Specifically, the Y-direction welding element 300 includes a second Y-direction positioning carrier 305 that mounts the plurality of workpieces 10 together with the workpiece tray 20, and moves the second Y-direction positioning carrier 305 in the Y-axis direction. a second Y-direction positioning carrier moving mechanism 310, and a second supporting mechanism 320 for supporting or releasing the workpiece tray 20 on the second Y-direction positioning carrier 305, and a pair of Y-direction welding rollers 340 and a pair of second handling The Y-direction fusion joint 330 of the finger 350, the Y-direction fusion-joint movement mechanism 360 that moves the Y-direction fusion joint 330 in the X-axis direction, and the first portion that is movably disposed in the Z-axis direction with respect to the Y-direction fusion joint 330 a second Z-direction movable member 368 and detachably disposed in the second Z-direction movable member 368 to weld the Y direction A pair of Y-direction welded roller housings 369 rotatably held by the sub-340, and a second Z-direction moving mechanism that moves the Y-direction welding roller 340 in the Z-axis direction or the second conveying finger 350 in the Z-axis direction 370, and a second exchange carrier 390 on which the Y-direction welding roller 392 for exchange is placed.

The second Y-direction positioning carrier 305 functions as a second Y-direction shifting means for shifting the plurality of workpieces 10 transported in series in the X-axis direction in the Y-axis direction by the second transport finger 350 which will be described later in detail. . The Y-direction welding element 300 is welded by a plurality of workpieces 10 that are displaced in the Y-axis direction by the second Y-direction positioning carrier 305. Specifically, the second Y-direction positioning carrier 305 is disposed on the downstream side bottom surface in the chamber body 110 so as to be linearly movable in the Y-axis direction. The second Y-direction positioning carrier moving mechanism 310 is a power source of the second Y-direction positioning carrier 305, and is disposed on the downstream side bottom surface in the chamber body 110. Specifically, the second Y-direction positioning carrier moving mechanism 310 includes two second Y-direction positioning carrier rails 311 arranged in parallel with each other along the Y-axis direction, and positioning along the two second Y directions. Two pairs of second Y-direction positioning carrier slides 312 for linearly moving the carrier track 311 in the Y-axis direction, and a second Y-direction positioning carrier drive shaft 313 having a thread formed on the outer peripheral surface thereof, and positioning the second Y direction a pair of second Y-direction positioning carrier drive shaft bearings 314, 315 rotatably supported by the carrier drive shaft 313, and a second Y-direction positioning carrier nut 316 screwed to the second Y-direction positioning carrier drive shaft 313, And a second Y-direction positioning carrier position control motor 317 connected to the second Y-direction positioning carrier drive shaft 313.

The second Y-direction positioning carrier rail 311 is a base portion constituting the second Y-direction positioning carrier moving mechanism 310, and constitutes a base portion of the second supporting mechanism 320 which will be described later in detail. That is, the track for the second Y-direction positioning carrier 305 and the track for the second protruding contact member 321 which will be described later in detail are integrally formed. Two pairs of the second Y-direction positioning carrier sliders 312 are mounted on the second Y-direction positioning carrier 305, and the second Y-direction positioning carrier 305 is configured to position the carrier rails 311 along the two second Y directions. A linear movement in the Y-axis direction. The second Y-direction positioning carrier drive shaft 313 is disposed in parallel between the two second Y-direction positioning carrier rails 311. One end of the second Y-direction positioning carrier drive shaft 313 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the second Y-direction positioning carrier position control motor 317. One of the second Y-direction positioning carrier drive shaft bearings 314 is a bottom surface disposed in the chamber body 110. The other second Y-direction positioning carrier drive shaft bearing 315 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The second Y-direction positioning carrier nut 316 is fixed to the lower surface of the second Y-direction positioning carrier 305, and is positioned in the second Y-direction positioning carrier drive shaft driven by the position control motor 317 in the second Y direction. The rotation of 313 causes the second Y-direction positioning carrier 305 to move linearly in the Y-axis direction. Further, the second Y-direction positioning carrier drive shaft 313 and the second Y-direction positioning carrier nut 316 are so-called ball screws having a ball at the screw portion, and the resistance caused by the sliding can be reduced.

Here, the configuration of the second support mechanism 320 will be described in detail. Figure 4B It is a perspective view of the second support mechanism 320.

The second support mechanism 320 shown in this figure is disposed below the downstream side in the chamber body 110. Specifically, the second support mechanism 320 includes a second projecting contact member 321 that protrudes in the Y-axis direction and that moves in the Y-axis direction together with the second Y-direction positioning carrier 305, and is also used in the Y-axis direction. Two second Y-direction positioning carrier rails 311 for positioning the carrier moving mechanism 310 in the second Y direction, and a pair of second protruding contact members linearly moving in the Y-axis direction along the two second Y-direction positioning carrier rails 311 The slider 322 and the second push member 323 that pushes the workpiece tray 20 in the Y-axis direction together with the second Y-direction positioning carrier 305, and the case where the second projecting contact member 321 is moved in the Y-axis direction The second urging member 324 that urges the second protruding contact member 321 and the second stop of the movement range of the second protruding contact member 321 that is urged by the second urging member 324 in the recovery direction 325.

The second protruding contact member 321 is disposed on the side of the workpiece tray 20 along the X-axis direction so as to face the second pushing member 323. The second projecting contact member 321 is a case where the second push member 323 is moved in a predetermined amount toward the Y-axis direction, and the workpiece tray 20 is inserted into the second Y-direction positioning carrier together with the second push member 323. 305. The pair of second protruding contact member sliders 322 are mounted on the second protruding contact member 321 , and the second protruding contact member 321 is capable of positioning the carrier rail 311 in the Y-axis direction along the two second Y directions. The straight line moves. The first push member 323 is disposed on the second Y-direction positioning carrier 305 along the X-axis direction so as to face the second projecting contact member 321 . This second push When the member 323 is moved by a predetermined amount in the Y-axis direction, the workpiece tray 20 is slid together with the second projecting contact member 321 to be supported by the second Y-direction positioning carrier 305.

Here, the configuration of the Y-direction fusion joint 330 will be described in detail. Fig. 5C is an enlarged front view of the Y-direction fusion joint 330. Fig. 5D is an enlarged side view of the Y-direction fusion joint 330.

The Y-direction fusion joint 330 includes a base 331 for the Y-direction fusion joint to be used as a base, and a pair of X directions that are arranged in parallel with each other in the X-axis direction with respect to the front surface of the Y-direction fusion joint 331 a rail 332, and two linear X-direction X-direction sliders 333 linearly moving in the X-axis direction along the pair of X-direction rails 332, and parallel to each other in the Z-axis direction for the two pairs of X-direction sliders 333 a pair of second Z-direction rails 334 disposed, and linear motor-type two pairs of second Z-direction sliders 335 that linearly move in the Z-axis direction along the pair of second Z-direction rails 334, and are mounted on a pair of second Z-direction movable members 368 that are movable in the Z-axis direction by the two pairs of second Z-direction sliders 335, and a pair of Y-direction welded joints disposed at the lower ends of the pair of second Z-direction movable members 368 The roller holding portion 336 and the pair of Y-direction welded roller housings 369 that are detachably disposed in the pair of Y-direction welded roller holding portions 236 and the pair of Y-direction welded roller housings 369 are rotatable A pair of Y-direction welding rollers 3 supported by a rotating shaft 337 for the Y-direction welding roller 40.

Return to the first to third figures. The Y-direction fusion joint 330 is made of a material having a high thermal conductivity such as tantalum carbide or aluminum nitride, and has a high heat dissipation capability. The Y-direction fusion joint 330 is in the second Y direction Above the positioning carrier 305, a beam 116 that is linearly movably disposed in the X-axis direction is disposed in the chamber body 110. The Y-direction fusion joint moving mechanism 360 is a power source of the Y-direction fusion joint 330 and is disposed above the second Y-direction positioning carrier 305. Specifically, the Y-direction melt joint moving mechanism 360 includes two welded joint rails 261 that also use the X-direction welded joint moving mechanism 260, and two pairs that linearly move in the X-axis direction along the two welded joint rails 261. a Y-direction welded joint slider 362, a Y-direction welded joint drive shaft 363 having a thread formed on the outer peripheral surface thereof, and a pair of Y-direction welded joint drive shaft bearings rotatably supported by the Y-direction welded joint drive shaft 363 364, 365, and a Y-direction weld joint nut 366 screwed to the Y-direction weld joint drive shaft 363 and a Y-direction weld joint position control motor 367 connected to the Y-direction weld joint drive shaft 363.

The two pairs of the Y-direction welded joint sliders 362 are fixed to the Y-direction welded joints 330, and the Y-direction welded joints 330 are linearly movable in the X-axis direction along the two welded joint rails 361. The Y-direction fusion-joint drive shaft 363 is disposed on the downstream side in the chamber body 110, and is disposed in parallel between the two weld joint rails 261. One end of the Y-direction welded joint drive shaft 363 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the Y-direction welded joint position control motor 367. One of the Y-direction fusion-joint drive shaft bearings 364 is a side surface of the support member 118 disposed in the chamber body 110. The other Y-direction melt joint drive shaft bearing 365 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The Y-direction fusion joint drive shaft bearing 365 is in the rotation and stop of the Y-direction fusion joint drive shaft 363. The chamber body 110 can be maintained in a vacuum environment. The Y-direction weld joint nut 366 is fixed to the back surface of the Y-direction weld joint 331, and is rotated by the Y-direction weld joint drive shaft 363 driven by the Y-direction weld joint position control motor 367. The direction fusion joint 330 moves linearly in the X-axis direction. Further, the Y-direction weld joint drive shaft 363 and the Y-direction weld joint nut 366 are so-called ball screws that are provided with balls at the screw portion, and the resistance caused by the sliding can be reduced.

The second Z-direction movable member 268 is movably disposed in the Z-axis direction with respect to the front surface of the Y-direction fusion joint base 331. The second Z-direction movable member 368 is made of a material having thermal conductivity, thermal radiation, and insulation, and can improve heat dissipation performance of heat generated by seam welding. The heat of fusion generated by the Y-direction fusion joint 330 can be radiated from the surface of the second Z-direction movable member 368 to the outside while being transmitted to the second Z-direction movable member 368 via the Y-direction welding roller holding portion 336. Further, the Y-direction welded roller holding portion 336 and the Y-direction welded joint base 331 are insulated by the second Z-direction movable member 368. Further, the area of the front surface of the second Z-direction movable member 368 is set as large as possible to improve the heat radiation performance. Specifically, the second Z-direction movable member 368 is formed to have a heat-receiving surface 368A having a predetermined area, and the area of the heat-dissipating surface is 3 cm ² or more, and preferably 5 cm ² or more. The material of the second Z-direction movable member 368 is preferably the same as the material of the first Z-direction movable member 268. Among the materials of the second Z-direction movable member 368, ceramic is preferable, and tantalum carbide or aluminum nitride is more preferable.

In the Y-direction welding roller holding portion 336, the Y-direction welding roller 340 is rotatably held at the lower end of the second Z-direction movable member 368, and the current is supplied to the Y-direction welding roller 340. The welding is performed by the Y-direction welding roller 340.

The Y-direction welded roller case 369 is a conductive paste for energization between the welding roller 340 and the Y-direction. The Y-direction welded roller outer casing 369 is integrally formed with the Y-direction welded roller 340, and is integrally exchangeable with the Y-direction welded roller 340.

The pair of Y-direction welding rollers 340 are rotatably arranged around the X-axis around the X-axis of the susceptor base 331 in the Y-direction, and are detachably arranged. It is movable in the X-axis direction together with the Y-direction weld joint 331. Further, the pair of Y-direction welding rollers 340 are moved in the X direction by the X-direction sliders 333 so that the intervals therebetween are adjustable. Specifically, the pair of Y-direction welding rollers 340 are moved in the Z-axis direction by the upper side of the second exchange carrier 390 which will be described later in detail, and the Y-direction welding roller housing 369 is automatically exchanged for Y exchange. The direction welds the roller 392. A pair of Y-direction welding rollers 340 constitute a welding electrode, and seam welding is performed on the workpiece 10. In other words, the pair of Y-direction welding rollers 340 are welded to the workpiece 10 by applying a pulsed voltage to the workpiece 10. Therefore, the pair of Y-direction welding rollers 340 need to be insulated from the Y-direction fusion joint 331, but the insulation is achieved by the insulating second Z-direction movable member 368.

The second Z-direction moving mechanism 370 is provided to: penetrate the Y direction a second Z-direction moving drive shaft 371 disposed along the X-axis direction and a pair of second Z-direction moving drive shafts rotatably supported by the second Z-direction moving drive shaft 371 The bearings 372 and 373 and the rotational force of the predetermined first direction (for example, the left direction viewed from the second Z-direction moving position control motor 374 side) in the second Z-direction moving drive shaft 371 are converted into one. A Y-direction welding roller power conversion mechanism (not shown) for moving the Z-axis direction of the Y-direction welding roller 340 and a predetermined second direction to move the driving shaft 371 toward the second Z direction (for example) The second transfer finger power conversion mechanism that shifts the rotational force in the right direction viewed from the second Z-direction movement position control motor 374 side into the Z-axis direction of the pair of second conveyance fingers 350 (illustration omitted And a second Z-direction moving position control motor 374 connected to the second Z-direction moving drive shaft 371 and a Y-direction welding roller interval changing mechanism that changes the interval between the pair of Y-direction welding rollers 340 (not shown), and the welding roller between the Y direction Y-direction changing mechanism is connected to control fusing roller gap changing motor (not shown) the position.

In the second Z-direction moving drive shaft 371, a spline shaft is employed. One end of the second Z-direction moving drive shaft 371 is a side wall of the through-chamber main body 110 and is exposed to the outside, and is connected to the second Z-direction moving position control motor 374. One of the second Z-direction moving drive shaft bearings 372 is a side surface of the support member 118 disposed in the chamber body 110. The other Z-direction moving drive shaft bearing 373 is a magnetic fluid seal or the like, and is disposed in a through portion of the side wall of the chamber body 110 to seal the through portion. The second Z-direction moving drive shaft bearing 373 is During the rotation and the stop of the second Z-direction movement drive shaft 371, the inside of the chamber body 110 can be held in a vacuum environment. The Y-direction welding roller power conversion mechanism is a predetermined first one of the second Z-direction movement drive shaft 371 that is disposed in the Y-direction fusion joint 330 and that is driven by the second Z-direction movement position control motor 374. The rotation of the direction (for example, the left direction viewed from the second Z-direction movement position control motor 374 side) causes the Y-direction welding roller 340 to linearly move in the Z-axis direction. The Y-direction welding roller spacing changing mechanism and the Y-direction welding roller spacing changing position control motor are disposed in the Y-direction welding joint 330. The Y-direction welding roller interval changing mechanism is driven by the position control motor for changing the Y-direction welding roller interval, and the interval between the X-axis directions of the pair of Y-direction welding rollers 340 is changed.

The pair of second transport fingers 350 functions as a transport means for transporting the plurality of workpieces 10 in series in the X direction. The pair of second conveyance fingers 350 are spaced apart from each other in the X-axis direction with respect to the Y-direction fusion joint 330, and are movably disposed in the Z-axis direction so as to be compatible with the Y-direction fusion joint 330. Move in the direction of the X axis. Specifically, the pair of second transport fingers 350 are at a second proximity position that is closer to a predetermined interval from the second Y-direction positioning carrier 305, and a second distance from the second Y-direction positioning carrier 305 away from the predetermined interval. Move away from the position toward the Z axis. Further, when the pair of second transport fingers 350 are located at the second approach position, the front and rear of the workpiece tray 20 are pushed in, and the workpiece tray 20 is pushed in the X-axis direction together with the Y-direction weld joint 330, and The workpiece tray 20 collectively transports the plurality of workpieces 10 in the X-axis direction. On the other hand, when the pair of second transport fingers 350 are in the second remote position, It will not be pushed to the workpiece tray 20. The pair of second transport fingers 350 keeps the interval between the X-axis directions constant.

Further, the welding device 1 is a conveying means for conveying the plurality of workpieces 10 in series in the X-axis direction, and the first welding element 200 includes three (two pairs) of first conveying fingers 250, and the second welding element 300 is provided in the second welding element 300. The pair of second transport fingers 350 are not limited thereto. In other words, the welding device 1 may be provided with four (three pairs) conveying fingers on one of the first welding element 200 or the second welding element 300 as the conveying means.

The second transfer finger power conversion mechanism is a predetermined one of the second Z-direction movement drive shaft 371 that is disposed in the Y-direction fusion joint 330 and that is driven by the second Z-direction movement position control motor 374. The rotation of the second conveyance finger 350 in the Z-axis direction is linearly moved in the two directions (for example, the right direction viewed from the second Z-direction movement position control motor 374 side).

The second exchange carrier 390 is fixed to one end of the second Y-direction positioning carrier 305 in the Y-axis direction, and is movable in the Y-axis direction together with the second Y-direction positioning carrier 305. In the second exchange carrier 390, the Y-direction welding roller holding table 394 held by the Y-direction welding roller 392 for exchange is placed along the X-axis direction. In the Y-direction welding roller holding base 394, a pair of Y-direction welding rollers 392 for exchange are placed in the X-axis direction.

The temporary storage station 400 is for avoiding the X-direction welding element 200 itself or the workpiece 10 and the Y-direction welding element located in the X-direction welding element 200. The member 300 itself or the interference between the workpieces 10 of the Y-direction welding elements 300 is disposed. This temporary storage station 400 has a function of cooling together with the workpiece tray 20 after the X-direction welding elements 200 are welded, and before the Y-direction welding elements 300 are welded. Specifically, the temporary storage station 400 includes a transport surface 410 disposed along the X-axis direction below the range in which the first transport finger 250 and the second transport finger 350 are movable, and a side of the transport surface 410 A pair of side guides 420 and 430 disposed along the X-axis direction, a pair of internal cooling pipes 440 and 450, an internal cooling heat exchanger 460, and an internal cooling pump 470.

The conveyance surface 410 accommodates the workpiece pallet 20 conveyed on the first Y-direction positioning carrier 205 by the first conveyance finger 250. The contained workpiece tray 20 is cooled by water in the side guide 420 which will be described later in detail, and thereafter, the carrier 305 is positioned in the second Y direction by the second conveyance finger 350. The pair of side guides 420 and 430 guide the workpiece tray 20 on the conveyance surface 410 in the X-axis direction. One of the side guides 420 is a tank for forming a refrigerant, and a pair of internal cooling pipes 440 and 450 are connected. The pair of internal cooling pipes 440 and 450 are connected to each other: a side guide 420 and an internal cooling pump 470 disposed outside the chamber body 110. One of the internal cooling pipes 440 sends the refrigerant from the internal cooling pump 470 to the side guide 420. The other internal cooling pipe 450 is a refrigerant that circulates through the side guide 420 and is collected by the internal cooling heat exchanger 460 toward the internal cooling pump 470. The internal cooling heat exchanger 460 and the internal cooling pump 470 are disposed outside the chamber body 110. The internal cooling heat exchanger 460 is used to cool and cool the hot refrigerant. internal The cooling pump 470 circulates the refrigerant. The refrigerant is water or the like.

Here, the configuration of the external cooling element 500 will be described in detail. Fig. 6 is an external perspective view of the external cooling element 500.

The external cooling element 500 shown in this figure is disposed on the outer surface of the chamber body 110. The external cooling element 500 absorbs radiant heat generated by welding the workpiece, and further cools the workpiece 10 and the like. Specifically, the external cooling element 500 includes a casing 510 serving as a tank for the refrigerant, a pair of external cooling pipes 520 and 530, an external cooling heat exchanger 540, and an external cooling pump 550.

Box 510 is formed Glyph, with a thickness of a few millimeters. In the casing 510, a pair of external cooling pipes 520 and 530 are connected to both ends. The pair of external cooling pipes 520 and 530 are connected to each other: a casing 510 and an external cooling pump 550. One of the external cooling pipes 520 sends the refrigerant from the external cooling pump 550 to the casing 510. The other external cooling pipe 530 is a refrigerant that is circulated in the casing 510 and is collected by the external cooling heat exchanger 540 to the external cooling pump 550. The external cooling heat exchanger 540 is used to cool and cool the hot refrigerant. The external cooling pump 550 circulates the refrigerant. The refrigerant is water or the like.

The preparation chamber 600 has a function of feeding a plurality of workpieces 10 from the atmosphere toward the vacuum chamber 100 while holding the vacuum chamber 100 in a vacuum environment. Specifically, the preparation chamber 600 is a box-shaped container having a substantially hexahedron, that is, a preparation chamber main body 610, a preparation chamber main body vacuum pump 620, and a preparation chamber main body atmosphere opening valve 630. In the preparation room body 610 The preparation chamber main external opening 612 that communicates with the upstream side wall and the outside is formed, and the preparation room main body external part 613 that opens and closes the preparation chamber main external opening 612 is provided. In the preparation chamber main body 610, a preparation chamber main body communication port 614 that communicates with the vacuum chamber 100 through the first opening 112 is formed in the side wall on the vacuum chamber 100 side, and the upstream side of the preparation chamber main body communication port 614 is opened and closed. Side partition door 615. The preparation chamber 600 in which the preparation chamber main body opening 612 and the preparation chamber main body communication port 614 are closed is controlled by the operation of the chamber main body vacuum pump 620 to control the air pressure in the preparation chamber main body 610 from atmospheric pressure to Any pressure in a vacuum environment. In addition, the preparation chamber 600 may be used as the preparation chamber main body vacuum pump 620, but the vacuum pump 120 may be used in combination, and the preparation chamber main body vacuum pump 620 may be omitted.

The take-out chamber 700 has a function of feeding a plurality of workpieces 10 from the vacuum chamber 100 to the atmosphere while holding the vacuum chamber 100 in a vacuum environment. Specifically, the take-out chamber 700 is a box-shaped container having a substantially hexahedron, that is, a take-out chamber main body 710, a take-out chamber main body vacuum pump 720, and an take-out chamber main body open valve 730. In the take-out chamber main body 710, an outer opening 712 for the take-out chamber main body that communicates with the outer side wall and the outer side is formed, and an outer portion 713 for the take-out chamber main body that opens and closes the outer opening 712 for the take-out chamber main body is provided. In the take-out chamber main body 710, a take-out chamber main body communication port 714 that communicates with the vacuum chamber 100 through the second opening 114 is formed in the side wall on the vacuum chamber 100 side, and is provided downstream of the take-out chamber main body communication port 714. Side partition door 715. The take-out chamber in which the external opening 712 for the chamber main body and the communication port 714 for the take-out chamber main body are closed are taken out In the 700, the air pressure in the take-out chamber main body 710 is controlled to an arbitrary pressure from atmospheric pressure to a vacuum environment by taking out the operation of the vacuum pump 720 for the chamber main body. Further, the take-out chamber 700 may be a vacuum pump 720 for taking out the main body, but the vacuum pump 120 may be used in combination, and the vacuum pump 720 for taking out the main body may be omitted.

The upstream side transporting member 800 includes an upstream first transporting mechanism 810, an upstream second transporting mechanism 820, and an upstream third transporting mechanism 830, which are sequentially disposed from the upstream side. The upstream first conveying mechanism 810 is disposed in the vicinity of the preparation chamber main external portion 613 disposed on the outer bottom surface of the preparation chamber main body 610, and conveys the workpiece tray 20 from the outside to the inside of the preparation chamber main body 610. Specifically, the upstream first transport mechanism 810 includes a plurality of upstream first transport rollers 812 that are continuously disposed in the X-axis direction. The plurality of upstream first transport rollers 812 are disposed so as to be rotatable about the Y-axis, and the workpiece pallet 20 is transported in the X-axis direction. The upstream second transport mechanism 820 is disposed on the inner bottom surface of the preparation chamber main body 610, and transports the workpiece tray 20 from the preparation chamber main body 610 toward the chamber main body 110. Specifically, the upstream second transport mechanism 820 includes a plurality of upstream second transport rollers 822 that are continuously disposed in the X-axis direction. The plurality of upstream second transport rollers 822 are disposed so as to be rotatable about the Y-axis, and the workpiece pallet 20 is transported in the X-axis direction. The upstream third transport mechanism 830 is disposed in the vicinity of the first opening 112 in the inner bottom surface of the chamber body 110, and transports the workpiece tray 20 from the upstream in the chamber body 110 toward the middle. Specifically, the upstream third transport mechanism 830 includes a plurality of upstream sides that are continuously disposed in the X-axis direction. The third carrying roller 832. The plurality of upstream third transport rollers 832 are disposed so as to be rotatable about the Y-axis, and the workpiece pallet 20 is transported in the X-axis direction.

The downstream side conveyance element 900 includes a downstream first conveyance mechanism 910, a downstream second conveyance mechanism 920, and a downstream third conveyance mechanism 930, which are sequentially disposed toward the downstream side. The downstream first transport mechanism 910 is disposed in the vicinity of the second opening 114 in the inner bottom surface of the take-out chamber main body 710, and transports the workpiece tray 20 from the middle flow in the chamber main body 110 toward the downstream. Specifically, the downstream first transport mechanism 910 includes a plurality of downstream first transport rollers 912 that are continuously disposed in the X-axis direction. The plurality of downstream first transport rollers 912 are disposed so as to be rotatable about the Y-axis, and the workpiece pallet 20 is transported in the X-axis direction. The downstream second transport mechanism 920 is disposed on the inner bottom surface of the take-out chamber main body 710, and transports the workpiece tray 20 from the inner side of the take-out chamber main body 710 toward the outside. Specifically, the downstream second transport mechanism 920 includes a plurality of downstream second transport rollers 922 that are continuously disposed in the X-axis direction. The plurality of downstream second transfer rollers 922 are disposed so as to be rotatable about the Y-axis, and the workpiece tray 20 is conveyed in the X-axis direction. The downstream third transport mechanism 930 is disposed in the vicinity of the take-out chamber main body 713 disposed in the outer bottom surface of the take-out chamber main body 710, and transports the workpiece tray 20 away from the outside of the take-out chamber main body 710. Specifically, the downstream third transport mechanism 930 includes a plurality of downstream third transport rollers 932 that are continuously disposed in the X-axis direction. The plurality of downstream third transport rollers 932 are respectively rotatably arranged around the Y-axis, and the workpiece tray 20 is oriented Handling in the X-axis direction.

In the welding device 1, in the X-direction welding element 200, by moving the first Y-direction positioning carrier 205 in the Y-axis direction and moving the X-direction fusion joint 230 in the X-axis direction, it is possible to form an array. A pair of X-direction welding rollers 240 are disposed on any of the workpieces 10 arranged on the workpiece pallet 20. Further, in the Y-direction welding element 300, the second Y-direction positioning carrier 305 is moved in the Y-axis direction, and the Y-direction fusion joint 330 is moved in the X-axis direction to be arranged in an array on the workpiece tray 20. A pair of Y-direction welding rollers 340 may be disposed on any of the workpieces 10.

Next, the procedure of the seam welding by the welding device 1 will be described using FIG. Fig. 7 is a flow chart showing the procedure of seam welding by the welding device 1.

First, a plurality of workpieces 10 to be arranged in the workpiece tray 20 are fed into the vacuum chamber 100 (step S100). The plurality of workpieces 10 fed into the chamber body 110 are welded in the X-axis direction along the X-axis direction in the X-direction welding element 200 (step S200). Then, it is determined whether or not the exchange period of the X-direction welding roller 240 is (step S210), and when the exchange period is the case (YES in step S210), the exchange is performed (step S220). Thereafter, during the conveyance from the X-direction welding element 200 to the Y-direction welding element 300, the plurality of workpieces 10 are cooled by the temporary storage station 400 (step S300). In the Y-direction welding element 300, the plurality of workpieces 10 are welded in the Y-axis direction in each row in the Y-axis direction (step S400). And, it is judged whether it is the exchange period of the Y-direction welding roller 340 (step S410) If the exchange period is the case (YES in step S310), the exchange is performed (step S420). Thereafter, the plurality of welded workpieces 10 are sent out from the inside of the vacuum chamber 100 to the atmosphere (step S500).

Next, a detailed procedure of step S100, that is, a program in which a plurality of workpieces 10 arranged in the workpiece tray 20 are fed into the vacuum chamber 100 will be described. In this procedure, the vacuum chamber 100, the preparation chamber 600, and the upstream side transport member 800 operate.

In advance, the upstream side partition door 615 and the downstream side partition door 715 are closed, and after the inside of the chamber main body 110 is sealed, the vacuum pump 120 is operated to decompress the inside of the chamber main body 110, and is held in a vacuum environment. First, the preparation chamber main body is opened by the outer door 613, and the plurality of conveyance rollers 812 and 822 are rotationally driven. Thereby, the plurality of workpieces 10 placed on the transport rollers 812 and 822 are moved in the X-axis direction together with the workpiece tray 20, and are transported into the preparation chamber main body 610 through the external opening 612 of the preparation chamber main body. Then, the preparation chamber main body 613 is closed, and after the inside of the preparation chamber main body 610 is sealed, the preparation chamber main body is operated by the vacuum pump 620 to decompress the inside of the preparation chamber main body 610, and is kept in a vacuum environment. Next, the upstream side partition door 615 is opened, and the plurality of transport rollers 822, 832 are rotationally driven. As a result, the plurality of workpieces 10 placed on the transport rollers 822 and 832 are moved in the X-axis direction together with the workpiece tray 20, and are transported into the chamber body 110 through the communication chamber communication port 614 and the first opening 112. . Thereafter, the upstream side partition door 615 is closed to seal the inside of the chamber body 110.

Next, for the detailed procedure of step S200, step S210, and step S220, that is, in the X-direction fusion splicing element 200, the plurality of workpieces The procedure of welding 10 rows in the X-axis direction along the X-axis direction will be described using FIG. Fig. 8 is a view for explaining a procedure of welding the respective rows of the plurality of workpieces 10 in the X-axis direction in the X-axis direction in the X-direction welding element 200.

First, the first transporting finger 250 is moved upward in the Z-axis direction to be in the first distant position. When the X-direction fusion joint 230 is moved to the upstream side in the X-axis direction, and the first conveyance finger 250 is moved upward toward the upstream third conveyance roller 832, the first conveyance finger 250 is moved downward in the Z-axis direction to be positioned. A close position. Then, the X-direction fusion joint 230 is moved to the downstream side in the X-axis direction, and the first conveyance finger 250 is moved to the downstream side in the X-axis direction, and the plurality of workpieces 10 are conveyed toward the first Y-direction positioning carrier 205 together with the workpiece pallet 20. Further, the first transporting finger 250 is moved upward in the Z-axis direction so as to be at the first distant position, and is a height at which the X-direction welding roller 240 is moved in the Z-axis direction to be weldable. Thereby, preparation for welding in the X-direction welding element 200 is completed.

When the preparation is completed, first, the X-direction fusion joint 230 is moved in the X-axis direction to move the X-direction welding roller 240 in the X-axis direction, and the first row of the plurality of workpieces 10 is welded along the X-axis direction (Fig. 8 (a) Reference). After the first Y-direction positioning carrier 205 is moved one line in the Y-axis direction (refer to FIG. 8(b)), the X-direction fusion joint 230 is moved in the direction of the folding in the X-axis direction so that the X-direction welding roller 240 faces. The direction of the folding in the X-axis direction is moved, and the second row of the plurality of workpieces 10 is welded along the X-axis direction (refer to FIG. 8(c)). Similarly, the first Y-direction positioning carrier 205 is moved one line in the Y-axis direction. After that (refer to FIG. 8(d)), the X-direction fusion joint 230 is moved in the direction of the folding in the X-axis direction, and the X-direction welding roller 240 is moved in the direction of the folding in the X-axis direction, and the plurality of workpieces 10 are on the X-axis. Each row of the direction is welded along the X-axis direction (refer to Fig. 8(e)). In this manner, the X-direction welding element 200 is configured to move the X-direction fusion joint 230 while moving the X-direction welding roller 240, and move the first Y-direction positioning carrier 205 to switch the rows of the plurality of welded workpieces 10. Further, when the first conveyance finger 250 is located at the first distance position, the X-direction welding element 200 moves the X-direction fusion joint 230 while welding the X-direction welding roller 240 while moving. Further, in the X-direction welding element 200 of the present embodiment, the X-direction fusion joint 230 is relatively curved in a continuous curved shape for the plurality of workpieces 10, but may be relatively moved in a three-shape.

After the welding of the X-direction welding element 200 is completed, the number of welding in the X-axis direction is increased by one. The exchange period of the X-direction welding roller 240 is judged by whether or not the number of welding times after the addition reaches a predetermined number of times (for example, 25,000 times). When the predetermined number of times is reached, the X-direction welding roller 240 is exchanged for the X-direction welding roller 292 for exchange.

The first transport finger 250 located above the first Y-direction positioning carrier 205 is moved downward in the Z-axis direction so as to be located at the first approach position. Then, the X-direction fusion joint 230 is moved to the downstream side in the X-axis direction, and the first conveyance finger 250 is moved to the downstream side in the X-axis direction, and the plurality of workpieces 10 are conveyed toward the conveyance surface 410 together with the workpiece pallet 20. Thus, the plurality of workpieces 10 are delivered to the staging station 400.

Next, the detailed procedure of step S400, step S410, and step S420, that is, the procedure of welding the plurality of workpieces 10 in the Y-axis direction along the Y-axis direction in the Y-direction welding element 300, uses the ninth Figure description. FIG. 9 is a view for explaining a procedure of welding the plurality of workpieces 10 in the Y-axis direction along the Y-axis direction in the Y-direction welding element 300.

First, the second transport finger 350 is moved upward in the Z-axis direction to be located at the second distant position. When the Y-direction fusion joint 330 is moved to the upstream side in the X-axis direction and the second conveyance finger 350 is moved upward of the conveyance surface 410, the second conveyance finger 350 is moved downward in the Z-axis direction to be positioned at the second proximity position. Then, the Y-direction fusion joint 330 is moved to the downstream side in the X-axis direction, and the second conveyance finger 350 is moved toward the downstream side in the X-axis direction, and the plurality of workpieces 10 are conveyed toward the second Y-direction positioning carrier 305 together with the workpiece tray 20. Further, the second conveyance finger 350 is moved upward in the Z-axis direction so as to be at the second distant position, and is a height at which the Y-direction welding roller 340 is moved in the Z-axis direction to be weldable. Thereby, preparation for welding in the Y-direction welding element 200 is completed.

When the preparation is completed, first, the second Y-direction positioning carrier 305 is moved in the Y-axis direction to move the plurality of workpieces 10 in the Y-axis direction, and the first column of the plurality of workpieces 10 is welded along the Y-axis direction (Fig. 9 ( a) Reference). Further, after the Y-direction fusion joint 330 is moved in the X-axis direction by one row (refer to FIG. 9(b)), the second Y-direction positioning carrier 305 is moved in the Y-axis direction in the direction of the Y-axis direction so that the plurality of workpieces 10 are oriented in the Y-axis direction. The direction of the foldback moves for the second column in the plurality of workpieces 10 along the Y axis Direction welding (refer to Figure 9 (c)). Similarly, after the Y-direction fusion joint 330 is moved in the X-axis direction by one row (refer to FIG. 9(d)), the second Y-direction positioning carrier 305 is moved in the Y-axis direction to cause the plurality of workpieces 10 to face Y. The direction in which the axial direction is folded back is moved, and the plurality of workpieces 10 are welded in the Y-axis direction along the Y-axis direction (refer to FIG. 9(e)). In this manner, the Y-direction welding element 300 moves the second Y-direction positioning carrier 305 and moves while moving the plurality of workpieces 10, and moves the Y-direction fusion joint 330 to switch the rows of the plurality of welded workpieces 10. Further, in the Y-direction welding element 300, when the second conveying finger 350 is located at the second distant position, the Y-direction welding joint 330 is moved to switch the rows of the plurality of welded workpieces 10. Further, in the Y-direction welding element 300 of the present embodiment, the Y-direction fusion joint 330 is relatively moved in a continuous curved shape for the plurality of workpieces 10, but may be relatively moved in a zigzag shape.

After the welding in the Y-direction welding element 300 is completed, the number of welding in the Y-axis direction is increased by one. It is judged whether or not the number of weldings after the addition is reached, and whether or not the exchange period of the Y-direction welding roller 340 is reached a predetermined number of times (for example, 25,000 times). When the predetermined number of times is reached, the Y-direction welding roller 340 is exchanged for the Y-direction welding roller 392 for exchange.

The second transport finger 350 located above the second Y-direction positioning carrier 305 is moved downward in the Z-axis direction so as to be located at the second approach position. Further, the Y-direction fusion joint 330 is moved to the downstream side in the X-axis direction, and the second conveyance finger 350 is moved to the downstream side in the X-axis direction, and the plurality of workpieces 10 are conveyed toward the downstream first conveyance roller 912 together with the workpiece pallet 20. . Thus, plural The workpiece 10 is delivered to the downstream side carrying member 900.

Next, a detailed procedure of step S500, that is, a procedure of sending the welded plurality of workpieces 10 from the inside of the vacuum chamber 100 to the atmosphere will be described. In this procedure, the vacuum chamber 100, the take-out chamber 700, and the downstream side transport member 900 operate.

First, the take-out chamber main body 713 is closed, and after the take-out chamber main body 710 is sealed, the take-out chamber main body is operated by the vacuum pump 720 to decompress the inside of the take-out chamber main body 710, and is kept in a vacuum environment. Further, the downstream side partition door 715 is opened, and the plurality of transport rollers 912, 914 are rotationally driven. As a result, the plurality of workpieces 10 placed on the transport rollers 912 and 914 move in the X-axis direction together with the workpiece tray 20, and are transmitted through the second opening 114 and the take-out chamber main body communication port 714 toward the take-out chamber body 710. Handling. Next, the take-out chamber main body is operated by the atmosphere opening valve 730 to increase the pressure in the take-out chamber main body 710, and after the atmospheric pressure is maintained, the take-out chamber main body outer portion 713 is opened, and the plurality of transport rollers 914 and 916 are rotationally driven. As a result, the plurality of workpieces 10 placed on the transport rollers 914 and 916 move in the X-axis direction together with the workpiece tray 20, and are transported outside the take-out chamber body 710 through the take-out chamber main body opening 712. Thereafter, the downstream side partition door 715 is closed, and the take-out chamber body 710 is sealed.

Next, the X-direction welding element 200 will be described as an example of the path of heat generated by seam welding.

The heat generated by the seam welding of the workpiece 10 and the X-direction welding roller 240 is to move the roller housing 269 in the X direction. The heat that moves the roller housing 269 in the X direction is from the X-direction roller housing 269 toward the first The Z-direction movable member 268 moves. The heat moving toward the first Z-direction movable member 268 is conducted in the first Z-direction movable member 268 and diffused toward the front surface of the first Z-direction movable member 268. The heat diffused toward the front surface of the movable member 268 in the first Z direction is radiated toward the vacuum environment and is discharged toward the outside of the vacuum chamber 100.

As described above, in the welding apparatus 1 of the present embodiment, the X-direction welding element 200 in which the plurality of workpieces 10 are welded in the X-axis direction along the X-axis direction, and the plurality of workpieces 10 are disposed in the vacuum chamber 100. The Y-direction welding element 300 welded in the Y-axis direction in each row in the Y-axis direction. Further, after the plurality of workpieces 10 are welded by the X-direction welding element 200, the plurality of workpieces 10 are welded by the Y-direction welding elements 300.

Therefore, the seam welding can be completed in the vacuum chamber 100 in which the vacuum environment is maintained, and the productivity can be improved. Further, compared with the case where seam welding is performed in a chamber filled with a nitrogen gas and the nitrogen gas is consumed, the running cost can be suppressed. Further, when a problem occurs in a chamber filled with a nitrogen gas, after the problem is resolved, it is necessary to refill the nitrogen gas to fill the ground to lower the dew point. As a result, it takes a long time, and there is a problem that the productivity of the electronic component is lowered, but the present invention has no problem because the nitrogen gas is not required.

The X-direction welding element 200 is provided with a first Y-direction positioning carrier 205 as a first Y-direction shifting means for shifting the plurality of workpieces 10 in the Y-axis direction, and the first Y-direction positioning carrier 205 is directed toward Y. The plurality of workpieces 10 whose directions are offset are welded. The Y-direction welding element 300 is a second Y-direction positioning carrier having a plurality of workpieces 10 offset in the Y-axis direction. 305. The plurality of workpieces 10 offset in the Y direction are welded by the second Y-direction positioning carrier 305. Therefore, the plurality of workpieces 10 are conveyed in series in the X-axis direction, and only the movement shifted in the Y-axis direction is welded. That is, there is no unnecessary operation in the operation of the plurality of workpieces 10. As a result, it is possible to shorten the time taken for welding, and it is possible to achieve an increase in productivity, and space saving can be achieved.

Further, the transport path is provided so as to be able to straddle both the X-direction welding element 200 and the Y-direction welding element 300, and linearly transport the plurality of workpieces 10 in the X-axis direction from the loading and unloading of the vacuum chamber 100. Therefore, there is no unnecessary action on the operation of the plurality of workpieces 10. As a result, it is possible to shorten the time taken for welding, and it is possible to achieve an increase in productivity, and space saving can be achieved.

Further, the X-direction welding element 200 is provided with a first Y-direction positioning carrier 205 that is movable in the Y-axis direction, and an X-direction welding that is movable in the X-axis direction above the first Y-direction positioning carrier 205. The head 230 and the X-direction welding roller 240 that is rotatable around the Y-axis are disposed in the X-direction fusion joint 230. Further, the X-direction welding element 200 is configured to move the X-direction fusion joint 230 while moving the X-direction welding roller 240, and to move the first Y-direction positioning carrier 205 to switch the rows of the plurality of welded workpieces 10. Therefore, the plurality of workpieces 10 arranged in an array in the X and Y-axis directions can be efficiently welded in the X-axis direction in the X-axis direction for a short period of time.

Next, the Y-direction welding element 300 is provided with a second Y-direction positioning carrier 305 movable in the Y-axis direction, and a second Y-direction A Y-direction fusion joint 330 that is movable in the X-axis direction above the bit carrier 305, and a Y-direction fusion roller 340 that is rotatable around the X-axis around the Y-direction fusion joint 330. Further, the Y-direction welding element 300 moves the second Y-direction positioning carrier 305 and moves while moving the plurality of workpieces 10, and moves the Y-direction fusion joint 330 to switch the rows of the plurality of welded workpieces 10. Therefore, the plurality of workpieces 10 arranged in an array in the X and Y-axis directions can be efficiently welded in the Y-axis direction in the Y-axis direction for a short period of time.

The X-direction fusion joint 230 includes a base 231 for the X-direction fusion joint, and a first Z-direction movable member 268 that is movable in the Z-axis direction with respect to the X-direction fusion joint base 231, and is disposed in the The first Z-direction movable member 268 can hold the X-direction welding roller 240 around the Y-axis and feed the X-direction welding roller holding portion 236 to the X-direction welding roller 240.

Further, the first Z-direction movable member 268 is insulating. Therefore, it is not necessary to provide an insulator between the X-direction welded roller housing 269 and the first Z-direction movable member 268 in order to insulate the X-direction fusion joint 230 from the X-direction welding roller 240. Providing such an insulator does not impair the movement of the X-direction welded roller outer casing 269 to the first Z-direction movable member 268 by the seam welding of the heat generated by the X-direction welding roller 240. Further, the first Z-direction movable member 268 has thermal conductivity. Therefore, heat that moves from the X-direction welded roller housing 269 toward the first Z-direction movable member 268 can be diffused toward the front surface of the first Z-direction movable member 268. Further, the first Z-direction movable member 268 has thermal radioactivity. So can The heat radiated toward the front surface of the first Z-direction movable member 268 is radiated, and further heat is prevented from being accumulated in the X-direction welding roller 240 and the X-direction welding roller housing 269. That is, the heat release performance can be improved. As a result, it is possible to prevent the conductive paste between the X-direction welding roller 240 and the X-direction welding roller housing 269 from melting and flowing outward, and further, it is possible to prevent the problem of the energization of the welding roller 240 in the X direction. As a result, the welding device 1 can be continuously used for a long time.

Similarly, the Y-direction fusion joint 330 includes a Y-direction fusion joint base 331 and a second Z-direction movable member 368 that can move in the Z-axis direction with respect to the Y-direction fusion joint base 331. In the second Z-direction movable member 368, the Y-direction welding roller 340 is rotatably held around the X-axis and the Y-direction welding roller holding portion 336 for supplying current to the Y-direction welding roller 340. Further, the second Z-direction movable member 368 has thermal conductivity, thermal radiation, and insulation properties. Therefore, the same effect as the first Z-direction movable member 268 can be achieved.

Further, the X-direction fusion joint 230 includes the first conveying finger 250 that conveys the plurality of workpieces 10 in the X-axis direction instead of only the X-direction welding roller 240. Further, the Y-direction fusion joint 330 includes the second conveying finger 350 that conveys the plurality of workpieces 10 in the X-axis direction instead of only the Y-direction welding roller 340. Therefore, the power for conveying the workpiece 10 can be used in combination with the power of the X-direction welding roller 240 and the Y-direction welding roller 340. Further, the structure for conveying the workpiece 10 can be simplified. Further, since only the workpiece 10 is linearly conveyed in the X-axis direction, the layout of the entire line including the welding device 1 can be linearly arranged, and the layout can be efficient. Configuration.

Further, the X-direction welding element 200 is provided with a first support mechanism 220 that supports the workpiece tray 20 placed on the first Y-direction positioning carrier 205. Further, the Y-direction welding element 300 is provided with a second support mechanism 320 that supports the workpiece tray 20 placed on the second Y-direction positioning carrier 305. Therefore, the workpiece tray 20 and the workpiece 10 can be prevented from being deviated during welding, and further, seam welding can be performed with high precision.

Then, the first support mechanism 220 includes a first projecting contact member 221 that is disposed to be movable in the Y-axis direction and that collides with the first Y-direction positioning carrier 205 in the Y-axis direction, and The first push member 223 that pushes the workpiece tray 20 in the Y-axis direction together with the first Y-direction positioning carrier 205, and the direction in which the first projecting contact member 221 is moved in the Y-axis direction The first urging member 224 urged by the contact member 221. Therefore, the workpiece tray 20 can be automatically pushed into the support by the movement of the first Y-direction positioning carrier 205 placed on the workpiece tray 20 in the Y-axis direction. That is, the workpiece tray 20 can be reliably supported by a simple configuration.

Further, the X-direction welding element 200 is provided with a first exchange carrier 290 on which the X-direction welding roller 292 for exchange is placed. The first exchange carrier 290 is movable in the Y-axis direction together with the first Y-direction positioning carrier 205. Further, the Y-direction welding element 300 is a second exchange carrier 390 provided with a Y-direction welding roller 392 for exchange. The second exchange carrier 390 is movable in the Y-axis direction together with the second Y-direction positioning carrier 305. Therefore, the first Y direction positioning carrier 205 and the second Y The power for directional positioning carrier 305 can also be used to move the X-direction welding roller 292 for exchange and the Y-direction welding roller 392 for exchange. Further, the X-direction welding roller 292 for exchange and the exchange can be used. The structure for moving the Y-direction welding roller 392 is simplified.

Further, in the vacuum chamber 100, a temporary storage station 400 is provided to cool a plurality of workpieces 10 after the X-direction welding elements 200 are welded, and before the Y-direction welding elements 300 are welded. Therefore, in the temporary storage station 400, once the plurality of workpieces 10 in the middle of the welding are cooled, it is possible to prevent a decrease in the yield due to the occurrence of defective products by heat. Further, when the heat countermeasure is not required, the bending and extension of the first Y-direction positioning carrier 205 and the second Y-direction positioning carrier 305 may occur, and the members of the chamber body 110 and the like may be deformed, but by the temporary storage station 400 The thermal countermeasures in the middle prevent deformation of each member.

Further, the welding device 1 is provided on the outer surface of the chamber body 110, and includes an external cooling element 500 that cools the vacuum chamber 100 from the outside. Therefore, it is possible to prevent a decrease in the yield due to the occurrence of defective heat. Further, occurrence of bending and extension of the first Y-direction positioning carrier 205 and the second Y-direction positioning carrier 305, and deformation of each member of the chamber body 110 and the like can be prevented.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit and scope of the invention.

That is, in the above embodiment, after the X-direction welding element 200 is welded in the X-axis direction, and the Y-direction welding element 300 is welded along the Y-axis direction, the plurality of workpieces 10 are in the temporary storage station. 400 cooling, but the invention is not limited thereto, after being welded along the Y-axis direction, and The plurality of workpieces 10 before being welded along the X-axis direction may be cooled by the temporary storage station 400.

In the above embodiment, the first and second Z-direction movable members 268, 368 are not entirely composed of materials having thermal conductivity, thermal radiation, and insulation, but only a part of them are thermally conductive. It can also be composed of materials that are thermally radioactive and insulating. In this case, at least a part of it is located between the contact portions of the roller holding portion, and it is important to recover the heat of the roller holding portion while ensuring insulation. Further, at least a part of it is opposite to the inner wall of the vacuum chamber to ensure a certain degree of surface. Since this surface can be used as a heat releasing surface, heat recovered from the roller holding portion is radiated to the inner wall of the vacuum chamber.

[Industrial use possibility]

The welding device of the present invention can be utilized in the field of manufacturing or logistics of electronic equipment and electronic parts or other various articles.

1‧‧‧welding device

10‧‧‧Workpiece

20‧‧‧Workpiece tray

100‧‧‧vacuum room

110‧‧‧ room body

112‧‧‧ first opening

114‧‧‧second opening

116‧‧‧ beams

118‧‧‧Support materials

120‧‧‧vacuum pump

130‧‧‧Atmospheric open valve

200‧‧‧X direction welding elements

205‧‧‧First Y-direction positioning carrier

210‧‧‧First Y-direction positioning carrier moving mechanism

211‧‧‧The first Y-direction positioning carrier track

212‧‧‧First Y-direction positioning carrier slider

213‧‧‧First Y-direction positioning carrier drive shaft

214‧‧‧First Y-direction positioning carrier drive shaft bearing

215‧‧‧First Y-direction positioning carrier drive shaft bearing

216‧‧‧First Y-direction positioning carrier nut

217‧‧‧ Position control motor for positioning carrier in the first Y direction

220‧‧‧First support mechanism

221‧‧‧First protruding contact member

222‧‧‧Sliding parts for the first protruding contact member

223‧‧‧First push member

224‧‧‧First forced component

225‧‧‧First stop

230‧‧‧X direction fusion joint

231‧‧‧X-direction fusion joint base

232‧‧‧Y-orbit

233‧‧‧Y direction slider

234‧‧‧First Z-direction orbit

235‧‧‧First Z-direction slider

236‧‧‧X-direction welding roller retaining section

237‧‧‧Rotary shaft for X-direction welding roller

240‧‧‧X direction welding roller

250‧‧‧First carrying fingers

260‧‧‧X-direction fusion joint moving mechanism

261‧‧‧Fuse joint track

262‧‧‧Sliding parts for X-direction fusion joints

263‧‧‧X-direction fusion joint drive shaft

264‧‧‧X-direction fusion joint drive shaft bearing

265‧‧‧X-direction fusion joint drive shaft bearing

266‧‧‧X-direction fusion joint nut

Position control motor for 267‧‧‧X direction fusion joint

268‧‧‧First Z-direction movable member

268A‧‧ ‧heat release surface

269‧‧‧X-direction welded roller shell

270‧‧‧First Z-direction moving mechanism

271‧‧‧First Z-direction mobile drive shaft

272‧‧‧First Z-direction moving drive shaft bearing

273‧‧‧First Z-direction moving drive shaft bearing

274‧‧‧First Z-direction mobile position control motor

290‧‧‧First exchange carrier

292‧‧‧X direction welding roller

294‧‧‧X-direction welding roller holding table

300‧‧‧Y-direction welding elements

305‧‧‧Second Y-direction positioning carrier

310‧‧‧Second Y-direction positioning carrier moving mechanism

311‧‧‧Second Y-direction positioning carrier track

312‧‧‧Second Y-direction positioning carrier slider

313‧‧‧Second Y-direction positioning carrier drive shaft

314‧‧‧Second Y-direction positioning carrier drive shaft bearing

315‧‧‧Second Y-direction positioning carrier drive shaft bearing

316‧‧‧Second Y-direction positioning carrier nut

317‧‧‧Location control motor for positioning carrier in the second Y direction

320‧‧‧Second support mechanism

321‧‧‧Secondary contact member

322‧‧‧Sliding parts for second protruding contact members

323‧‧‧second push member

324‧‧‧Secondary members

325‧‧‧second stopper

330‧‧‧Y direction fusion joint

331‧‧‧Y-direction fusion joint base

332‧‧‧X-orbit

333‧‧‧X direction slider

334‧‧‧Second Z-direction orbit

335‧‧‧Second Z-direction slider

336‧‧‧Y-direction welding roller retaining section

337‧‧‧Drilling roller for Y-direction welding roller

340‧‧‧Y direction welding roller

350‧‧‧Second handling fingers

360‧‧‧Y direction fusion joint moving mechanism

361‧‧‧Fuse joint track

362‧‧‧Sliding parts for Y-direction fusion joints

363‧‧‧Y-direction fusion joint drive shaft

364‧‧‧Y direction fusion joint drive shaft bearing

365‧‧‧Y direction fusion joint drive shaft bearing

366‧‧‧N-direction fusion joint nut

367‧‧‧ Position control motor for Y-direction fusion joint

368‧‧‧Second Z-direction movable member

368A‧‧‧heating surface

369‧‧‧Y-direction welded roller shell

370‧‧‧Second Z-direction moving mechanism

371‧‧‧Second Z-direction moving drive shaft

372‧‧‧Second Z-direction moving drive shaft bearing

373‧‧‧Second Z-direction moving drive shaft bearing

374‧‧‧Second Z-direction mobile position control motor

390‧‧‧Second exchange carrier

392‧‧‧Y-direction welding roller

394‧‧‧Y-direction welding roller holding table

400‧‧‧Scratch station

410‧‧‧Transport surface

420‧‧‧ side guides

430‧‧‧ side guides

440‧‧‧Internal cooling piping

450‧‧‧Internal cooling piping

460‧‧‧Internal cooling heat exchanger

470‧‧‧Internal cooling pump

500‧‧‧External cooling components

510‧‧‧Box

520‧‧‧External cooling piping

530‧‧‧External cooling piping

540‧‧‧External cooling heat exchanger

550‧‧‧External cooling pump

600‧‧‧ preparation room

610‧‧‧Preparation room

612‧‧‧External opening for the preparation room body

613‧‧‧External department for preparation room

614‧‧‧Communication port for the preparation room

615‧‧‧Upstream side divider door

620‧‧‧Preparation chamber vacuum pump

630‧‧‧Air chamber open valve for preparation room

700‧‧‧Extraction room

710‧‧‧Remove the room body

712‧‧‧Extracting the external opening of the chamber body

713‧‧‧Extracting the external department of the room

714‧‧‧Receive the communication port for the main body

715‧‧‧ downstream side divider door

720‧‧‧Remove the vacuum pump for the chamber body

730‧‧‧Extracting room body with atmospheric open valve

800‧‧‧Upstream side handling components

810‧‧‧The first transport mechanism on the upstream side

812‧‧‧The first carrying roller on the upstream side

820‧‧‧2nd transport mechanism on the upstream side

822‧‧‧Second transport roller on the upstream side

830‧‧‧3rd transport mechanism on the upstream side

832‧‧‧3rd upstream carrying roller

900‧‧‧Downstream handling components

910‧‧‧The first transport mechanism on the downstream side

912‧‧‧The first carrying roller on the downstream side

912,914,916‧‧‧Handling rollers

920‧‧‧Second transport mechanism on the downstream side

922‧‧‧Second transport roller on the downstream side

930‧‧‧3rd transport mechanism on the downstream side

932‧‧‧3rd carrying roller on the downstream side

[Fig. 1A] A plan view of a welding apparatus according to an embodiment of the present invention, showing the lower side of the welding apparatus.

[Fig. 1B] A plan view of the welding device showing the upper side of the welding device.

[Fig. 2] Rear view of the welding device.

[Fig. 3A] A right side view of the welding device showing the X-direction welding element on the upstream side.

[Fig. 3B] A right side view of the welding device, showing the Y-direction welding element on the downstream side.

[Fig. 4A] A perspective view of the first support mechanism.

[Fig. 4B] A perspective view of the second support mechanism.

[Fig. 5A] An enlarged front view of the X-direction fusion joint.

[Fig. 5B] An enlarged side view of the X-direction fusion joint.

[Fig. 5C] An enlarged front view of the Y-direction fusion joint.

[Fig. 5D] An enlarged side view of the Y-direction fusion joint.

[Fig. 6] A perspective view showing the appearance of an external cooling element.

[Fig. 7] A flow chart showing a procedure of seam welding by a welding device.

[Fig. 8] A diagram for explaining a procedure of welding the respective rows of the plurality of workpieces in the X-axis direction along the X-axis direction in the X-direction welding element.

[Fig. 9] A diagram for explaining a procedure of welding the plurality of workpieces in the Y-axis direction along the Y-axis direction in the Y-direction welding element.

1‧‧‧welding device

10‧‧‧Workpiece

20‧‧‧Workpiece tray

100‧‧‧vacuum room

110‧‧‧ room body

112‧‧‧ first opening

114‧‧‧second opening

120‧‧‧vacuum pump

130‧‧‧Atmospheric open valve

200‧‧‧X direction welding elements

205‧‧‧First Y-direction positioning carrier

210‧‧‧First Y-direction positioning carrier moving mechanism

211‧‧‧The first Y-direction positioning carrier track

213‧‧‧First Y-direction positioning carrier drive shaft

214‧‧‧First Y-direction positioning carrier drive shaft bearing

215‧‧‧First Y-direction positioning carrier drive shaft bearing

217‧‧‧ Position control motor for positioning carrier in the first Y direction

220‧‧‧First support mechanism

221‧‧‧First protruding contact member

223‧‧‧First push member

290‧‧‧First exchange carrier

292‧‧‧X direction welding roller

294‧‧‧X-direction welding roller holding table

300‧‧‧Y-direction welding elements

305‧‧‧Second Y-direction positioning carrier

310‧‧‧Second Y-direction positioning carrier moving mechanism

311‧‧‧Second Y-direction positioning carrier track

313‧‧‧Second Y-direction positioning carrier drive shaft

314‧‧‧Second Y-direction positioning carrier drive shaft bearing

315‧‧‧Second Y-direction positioning carrier drive shaft bearing

317‧‧‧Location control motor for positioning carrier in the second Y direction

320‧‧‧Second support mechanism

321‧‧‧Secondary contact member

323‧‧‧second push member

390‧‧‧Second exchange carrier

392‧‧‧Y-direction welding roller

394‧‧‧Y-direction welding roller holding table

400‧‧‧Scratch station

410‧‧‧Transport surface

420‧‧‧ side guides

430‧‧‧ side guides

440‧‧‧Internal cooling piping

450‧‧‧Internal cooling piping

460‧‧‧Internal cooling heat exchanger

470‧‧‧Internal cooling pump

500‧‧‧External cooling components

510‧‧‧Box

520‧‧‧External cooling piping

530‧‧‧External cooling piping

540‧‧‧External cooling heat exchanger

550‧‧‧External cooling pump

600‧‧‧ preparation room

610‧‧‧Preparation room

612‧‧‧External opening for the preparation room body

613‧‧‧External department for preparation room

614‧‧‧Communication port for the preparation room

615‧‧‧Upstream side divider door

620‧‧‧Preparation chamber vacuum pump

630‧‧‧Air chamber open valve for preparation room

700‧‧‧Extraction room

710‧‧‧Remove the room body

712‧‧‧Extracting the external opening of the chamber body

713‧‧‧Extracting the external department of the room

714‧‧‧Receive the communication port for the main body

715‧‧‧ downstream side divider door

720‧‧‧Remove the vacuum pump for the chamber body

730‧‧‧Extracting room body with atmospheric open valve

800‧‧‧Upstream side handling components

810‧‧‧The first transport mechanism on the upstream side

812‧‧‧The first carrying roller on the upstream side

820‧‧‧2nd transport mechanism on the upstream side

822‧‧‧Second transport roller on the upstream side

830‧‧‧3rd transport mechanism on the upstream side

832‧‧‧3rd upstream carrying roller

900‧‧‧Downstream handling components

910‧‧‧The first transport mechanism on the downstream side

912‧‧‧The first carrying roller on the downstream side

920‧‧‧Second transport mechanism on the downstream side

922‧‧‧Second transport roller on the downstream side

930‧‧‧3rd transport mechanism on the downstream side

932‧‧‧3rd carrying roller on the downstream side

Claims (20)

A welding device comprising: a vacuum chamber that holds a vacuum inside thereof in a vacuum environment; and an array of a plurality of workpieces arranged in an array in the X direction and a Y direction at right angles to the X direction in the vacuum chamber An X-direction welding element that is welded in the X direction, and a Y-direction welding element that welds the plurality of workpieces along the Y direction in the vacuum chamber, and the plural number of the X-direction welding element and the Y-direction welding element After the workpiece is welded, the other workpiece is welded by the other party. The welding device according to claim 1, wherein the X-direction welding element includes a first Y-direction shifting means for shifting the plurality of workpieces in the Y direction, and the first Y-direction shifting means The plurality of workpieces offset in the Y direction are welded, and the Y-direction welding element includes a second Y-direction shifting means for shifting the plurality of workpieces in the Y direction, and the second Y-direction is offset by the second Y-direction The means welds the plurality of workpieces offset in the Y direction. The welding device according to claim 2, further comprising: a conveying path that can extend across the X-direction welding element and the Y-direction welding element, and the plurality of workpieces are moved from the loading to the removal of the vacuum chamber The X direction is linearly conveyed. The welding device of claim 3, wherein the X-direction welding element is provided by: The first Y-direction positioning carrier is the first Y-direction shifting means, wherein the plurality of workpieces arranged on the workpiece tray are placed together with the workpiece tray and movable in the Y direction; and the X-direction fusion joint, The first Y-direction positioning carrier is movable in the X direction; and the X-direction welding roller is disposed in the X-direction fusion joint so as to be rotatable around the Y-axis parallel to the Y-direction. And moving in the X direction together with the X-direction fusion joint; moving the X-direction fusion joint and welding the X-direction welding roller while moving, and moving the first Y-direction positioning carrier to be welded In the above-described row switching of the plurality of workpieces, the Y-direction welding element is provided with the second Y-direction positioning carrier, and the second Y-direction biasing means, the plurality of workpieces arranged on the workpiece pallet and the plurality of workpieces The workpiece tray is placed together and movable in the Y direction; and the Y-direction fusion joint is movable above the X-direction positioning carrier in the second Y-direction; and the Y-direction welding roller And being disposed in the Y-direction fusion joint so as to be rotatable around the X-axis parallel to the X direction, and movable in the X direction together with the Y-direction fusion joint; and moving the second Y-direction positioning carrier The plurality of workpieces are welded while being moved, and the Y-direction fusion joint is moved to switch the aforementioned rows of the plurality of workpieces to be welded. The welding device of claim 4, wherein the foregoing The X-direction fusion joint includes a base for the X-direction fusion joint and a first Z-direction movable member, and the base for the X-direction fusion joint can be perpendicular to the X direction and the Y direction. a direction shifting; and an X-direction welded roller holding portion disposed in the first Z-direction movable member and capable of holding the X-direction welded roller around the Y-axis and welding the roller toward the X-direction Supplying current; the first Z-direction movable member is capable of passing the welding heat generated in the X-direction welding roller by thermal conductivity, thermal radiation, and insulation, and passing through the X-direction welding roller holding portion The first Z-direction movable member is conveyed while being radiated from the surface of the first Z-direction movable member to the outside, and the X-direction welded roller holding portion and the X-direction welded joint base are by the aforementioned A Z-direction movable member is insulated. The welding device according to claim 5, wherein the first Z-direction movable member is made of a material having a thermal conductivity of 170 W/(m.K) or more. The welding device according to claim 5, wherein the first Z-direction movable member is made of a material having a thermal emissivity of 0.8 or more. The welding device of claim 5 or 6, wherein the first Z-direction movable member has an insulation resistance value of 10 ³ Ω. Composition of materials above cm. The welding device according to claim 5 or 6, wherein the first Z-direction movable member is made of ceramic. The fusion splicing device of claim 9, wherein the ceramic is tantalum carbide or aluminum nitride. The welding device according to the fourth or fifth aspect of the invention, wherein the Y-direction fusion joint includes: a Y-direction fusion joint base; and a second Z-direction movable member; and the Y-direction fusion joint base; The Y-direction welding roller holding portion is disposed in the second Z-direction movable member and can hold the Y-direction welding roller around the X-axis and rotate toward the Y The direction welding roller supplies a current; the second Z-direction movable member is configured to weld the welding roller in the Y direction by heat conductivity, thermal radiation, and insulation, and can be welded through the Y direction. The roller holding portion is radiated from the surface of the second Z-direction movable member to the outside while being conveyed toward the second Z-direction movable member, and the Y-direction welded roller holding portion and the Y-direction welded joint base are The movable member is insulated by the aforementioned second Z direction. The welding device of claim 4 or 5, wherein the X-direction welding element is provided with a first conveying finger, and the positioning carrier is positioned at a first proximity position close to the first Y direction and away from the first Y direction. The first remote position is movably disposed in the X-direction fusion joint, and when located in the first proximity position, and the X The directional weld joint moves together in the X direction to push the workpiece tray, and the plurality of workpieces are conveyed together with the workpiece tray in the X direction. The welding device according to claim 12, wherein the X-direction welding element is configured to move the X-direction fusion joint while the first conveying finger is located at the first distant position. The roller moves while welding. The welding device of claim 4, wherein the Y-direction welding element is provided with a second conveying finger, and is a second proximity position for positioning the carrier in the second Y direction and a positioning carrier away from the second Y direction. The second distance position is movably disposed in the Y-direction fusion joint, and when located in the second proximity position, the workpiece tray is pushed in the X direction together with the Y-direction fusion joint, and The workpiece tray together carries the plurality of workpieces in the X direction. The welding device of claim 13, wherein the Y-direction welding element moves the Y-direction weld joint when the second conveyance finger is located at the second distance position, and the plurality of workpieces to be welded The column switches. The welding device of claim 4 or 5, wherein the X-direction welding element has a first supporting mechanism for supporting the workpiece tray placed on the first Y-direction positioning carrier, or In the release, the Y-direction welding element includes a second support mechanism that can support or release the workpiece tray placed on the second Y-direction positioning carrier. The welding device according to claim 16, wherein the first supporting mechanism includes: a first protruding contact member that is disposed to be movable in the Y direction and that collides with the workpiece tray that moves in the Y direction, And the first pushing member that is moved in the Y direction together with the first Y-direction positioning carrier and that pushes the workpiece tray that collides with the first protruding contact member in the Y direction, and the first protruding contact member is toward the foregoing When the Y direction is moved, the first projecting member that urges the first projecting contact member toward the recovery direction, and the second support mechanism is provided to be movable in the Y direction and to move in the Y direction a second protruding contact member that collides with the workpiece tray, and a second push that moves in the Y direction together with the second Y-direction positioning carrier and that pushes the workpiece tray that collides with the second protruding contact member toward the Y direction The member and the second projecting contact member are second urging members that urge the second projecting contact member toward the recovery direction when moving in the Y direction. The welding device according to claim 4 or 5, wherein the X-direction welding element is provided with a first exchange carrier, and the X-direction welding roller for exchange is placed, together with the first Y-direction positioning carrier. Moving in the Y direction, automatic exchange: the X-direction welding roller disposed in the X-direction fusion joint, and the exchange for being placed on the first exchange carrier The X-direction welding roller, wherein the Y-direction welding element includes a second exchange carrier, and the Y-direction welding roller for exchange is placed, and is movable in the Y direction together with the second Y-direction positioning carrier, and automatically Exchanging: the Y-direction welding roller disposed in the Y-direction fusion joint and the Y-direction welding roller to be placed in the second exchange carrier. The welding device according to any one of claims 1 to 6, wherein the vacuum chamber includes a temporary storage station, and one of the X-direction welding element and the Y-direction welding element is welded, and One of the plurality of workpieces before being welded is cooled. The welding device according to any one of claims 1 to 6, further comprising an external cooling element that cools the vacuum chamber from the outside.