200932414 九、發明說明 【發明所屬之技術領域】 本發明，係有關於在真空氛圍中進行縫溶接（seam welding)等之各種處理的真空內溶接處理裝置。 【先前技術】 於先前技術中，作爲將壓電振動元件或是半導體元件 〇 等之電子構件的封裝以及頂蓋作溶接之手段，係使用有縫 溶接裝置。此縫溶接裝置，係經由將一對之溶接輥推壓抵 接於封裝與頂蓋之接觸部處並使其轉動，同時施加脈衝狀 之電壓’而將封裝與頂蓋作溶接。此種電子構件之封裝的 縫溶接’一般係在氮氣氛圍中進行，但是，在近年，伴隨 著電子構件之小型化以及高精確度化，係產生有將封裝內 保持爲真空的必要性，而在真空氛圍中進行縫溶接的情況 係增加。 〇 相對於此，在真空氛圍中進行縫溶接等之處理的先前 計數之裝置中’係與縫溶接裝置等之處理裝置一同地，而 將以矩陣狀而配置著被載置有頂蓋之封裝的X-Y平台、以 及此X-Y平台之驅動裝置，一起收容在大型之真空處理室 內，並在將真空處理室內保持在真空氛圍的狀態下，而進 行處理。 然而，在採用此種大型之真空處理室的情況時，爲了 將內部保持在真空氛圍下，由於係會被要求有非常高之強 度，因此，係存在著不但真空處理室之外形尺寸會變得非 -4- 200932414 常大’且成本亦會增大的問題。進而，由於若是將馬達等 之驅動裝置收容在真空處理室內並作使用，則會有無法將 發出之熱作散熱的問題，因此，係有著不得不採用高價之 真空規格的問題。因此，先前技術中之裝置係成爲非常大 型’而製造成本以及維修管理成本係成爲非常高。 另一方面，係提案有：藉由將驅動X-Υ平台之驅動裝 置配設在真空處理室之外，來謀求真空處理室之小型化的 ❹ 真空處理室內之定位機構（例如，參考專利文獻1 )。 [專利文獻1]日本特開2005-5543號公報 【發明內容】 [發明所欲解決之課題] 然而，由於不僅是需要大的可動範圍之X-Y平台，而 亦有需要將電子構件以矩陣狀來作搭載，因此，實際上， 係被要求有寬廣的底面積，而有著無法將真空處理室小型 © 化的問題。特別是，由於係有必要將與X-Y平台相卡合而 用以使其在X方向上作移動之其他的可動構件一倂設置在 X-Y平台上，因此，係有著需要更加寬廣之底面積的問 題。 又，當使用X-Y平台的情況時，由於係有必要在將載 體搬入至真空處理室內之X-Y平台上之後，再將此載體定 位於X方向與γ方向之雙方的基準位置（零點）上，而 後再開始溶接，因此，會有準備時間變長的問題。 本發明，係爲有鑑於此種問題點而進行者，並係爲提 -5- 200932414 供一種：能夠將真空處理室相較於先前技術而更加小型 化，且溶接效率爲佳之真空內溶接處理裝置者。 [用以解決課題之手段] 藉由本發明者們之努力硏究’上述目的，係經由以下 之手段而被達成者。 (1) —種真空內溶接處理裝置，其特徵爲，具備 Φ 有：真空處理室，係將其本身之內部保持爲真空氛圍；和 載體，係被配設在前述真空處理室內’並載置工件而在X 方向上移動；和載體驅動裝置，係被配設在前述真空處理 室外，並使前述載體移動；和溶接頭’係被配設在前述真 空處理室內，並在與前述X方向成直角之 γ方向上移 動；和溶接頭驅動裝置，係被配設在前述真空處理室外， 並使前述溶接頭移動；和Z方向可動構件，係被搭載於前 述溶接頭上，並在與前述X方向以及前述Y方向成直角 〇 之Z方向上作相對移動；和溶接輥，係被搭載於前述Z方 向可動構件上，並將前述工件作溶接；和第1輥驅動軸， 係與前述Y方向平行地而被配設在前述真空處理室內；和 第1輥驅動軸驅動裝置，係被配設在前述真空處理室外， 並驅動前述第1輥驅動軸；和第1變換裝置，係被搭載於 前述溶接頭上，並將前述第1輥驅動軸之動力變換爲前述 Z方向可動構件之Z方向移動動力。 (2) 如上述（1)所記載之真空內溶接處理裝置，其 中，係更進而具備有：Y方向可動構件，係被搭載於前述 -6 - 200932414 溶接頭上，並在前述Y方向上作相對移動；和第2輥驅 軸’係與前述Υ方向平行地被配設在前述真空處理室內 和第2輥驅動軸驅動裝置’係被配設在前述真空處理 外’並驅動前述第2輥驅動軸：和第2變換裝置，係被 載於前述溶接頭上’並將前述第2輥驅動軸之動力變換 前述Υ方向可動構件之Υ方向移動動力，前述溶接輥 係被搭載於前述Υ方向可動構件上。 〇 (3)如上述（2)所記載之真空內溶接處理裝置， 中，前述溶接輥，係在前述溶接輥上被搭載有2個，前 第2變換裝置，係經由前述第2輥驅動軸之動力而使2 的前述溶接輥間之距離作變化。 (4) 如上述（3)所記載之真空內溶接處理裝置， 中，藉由將2個的前述溶接輥間之距離作變更，而改變 述溶接輥之與前述工件相接觸的部分。 (5) 如上述（2)乃至（4)中之任一項所記載之 〇 空內溶接處理裝置，其中，係更進而具備有：保持部， 經由作開閉之開閉構件而將前述溶接輥可裝著脫離地作 持；和裝著脫離切換裝置，係使前述開閉構件作開閉； 第3變換裝置，係被搭載於前述溶接頭上，並將前述第 輥驅動軸又或是前述第2輥驅動軸之動力變換爲前述裝 脫離切換裝置之動力。 (6) 如上述（5)所記載之真空內溶接處理裝置， 中，前述第3變換裝置，係成爲將前述第2輥驅動軸之 力作變換，前述第2變換裝置’係具備有經由前述第2 動 * 室 搭 爲 ， 其 述 個 其 、•一 刖 真 係 挾 和 1 著 其 動 輥 200932414 驅動軸之旋轉相位來將前述溶接輥於Y方向上作 方向誘導區域、以及無關於前述第2輥驅動軸 位，而使前述溶接頭不在Υ方向上作移動之Υ 區域，前述第3變換裝置，係具備有經由前述第 軸之旋轉相位而將前述溶接輥作開放之開放區域 由前述第2輥驅動軸之旋轉相位而將前述溶接輥 持狀態之保持區域，前述第2變換裝置之前述γ ❹ 區域的範圍，係成爲被包含在前述第3變換裝置 持區域的範圍內，前述第3變換裝置之前述開放 圍，係成爲被包含在前述第2變換裝置之前述Υ 區域的範圍內。 (7) 如上述（5)又或是（6)中所記載之 接處理裝置，其中，前述第2變換裝置以及前述 裝置’係爲與BU述第2輕驅動軸一同旋轉之凸輪 (8) 如上述（5)所記載之真空內溶接處理 Ο 中，前述第3變換裝置，係成爲將前述第1輥驅 力作變換，前述第1變換裝置，係具備有經由前 驅動軸之旋轉相位來將前述溶接輥於ζ方向上作 方向誘導區域、以及無關於前述第1輥驅動軸 位，而使前述溶接頭不在Ζ方向上作移動之Ζ方 域，前述第3變換裝置，係具備有經由前述第1 之旋轉相位而將前述溶接輥維持在開放狀態之開 以及經由前述第1輥驅動軸之旋轉相位而將前述 持在保持狀態之保持區域，前述第1變換裝置之 移動之Υ 之旋轉相 方向靜止 2輥驅動 、以及經 維持在保 方向誘導 之前述保 區域的範 方向靜止 真空內溶 第3變換 〇 裝置，其 動軸之動 述第1輥 移動之ζ 之旋轉相 向靜止區 聿昆驅動軸 放區域、 溶接輥維 前述ζ方 -8 - 200932414 向誘導區域的範圍，係成爲被包含在前述第3變換裝 前述保持區域的範圍內，前述第3變換裝置之前述開 域的範圍，係成爲被包含在前述第1變換裝置之前述 向靜止區域的範圍內。 (9)如上述（5)又或是（8)中所記載之真空 接處理裝置，其中，前述第1變換裝置以及前述第3 裝置，係爲與前述第1輥驅動軸一同旋轉之凸輪。 〇 ( 1 〇 )如上述（5 )乃至（9 )中之任一項所記載 空內溶接處理裝置，其中，在前述真空處理室內，係 置有交換用之前述溶接輥，將前述保持部所保持之前 接輥’和被配置在前述真空處理室中之前述交換用的 溶接輥作自動交換。 (11)如上述（10)所記載之真空內溶接處理裝 其中’前述交換用之前述溶接輥，係被載置於經由前 體驅動裝置而在X方向上作移動之交換台上。 φ ( 12 )如上述（1 )乃至（11 )中之任—項所記 真空內溶接處理裝置，其中，係更進而具備有：將前 方向可動構件朝向前述工件而作彈推之彈推裝置，前 方向可動構件，係經由前述彈推裝置之彈推力而被與 第1變換裝置相連接。 (13)如上述（12)所記載之真空內溶接處理裝 其中，前述Z方向可動構件，係以具備有可經由前述 裝置而將由前述工件而來之反作用力作吸收之自由度 式而被連接於前述第1變換裝置。 置之 放區 Z方 內溶 變換 之真 被配 述溶 前述 置， 述載 載之 述Z 述Z 前述 置， 彈推 的方 -9- 200932414 (1 4 )如上述（1 )乃至（1 3 )中之任一項所記 真空內溶接處理裝置，其中，係構成爲：前述工件係 述X方向之其中一側而被載置於前述載體上，並在被 了溶接處理後，由前述X方向之另外一側而被搬出。 [發明之效果] 若藉由本發明之真空內溶接處理裝置，則能夠得 ❹ 真空處理室小型化，並能夠削減成本之優良的效果。 【實施方式】 以下，參考圖面，針對本發明之實施形態的例子 細說明。另外，在以下之說明中，係將圖中所示之 Y、z軸爲基準而對方向作說明。圖中之X軸方向， 本發明之X方向，Υ軸方向，係爲本發明之Υ方向， 方向，係爲本發明之Ζ方向，但是，本發明係並不被 ❹ 於此。 圖1，係爲本發明之實施形態的真空內溶接處理 1之正面圖，圖2係爲真空內溶接處理裝置1之平面 圖3係爲真空內溶接處理裝置1之左側面圖。另外， 1〜3中，係以剖面來展示真空處理室100之內部。如 些之圖中所示一般，真空內溶接處理裝置1，係具備 可將內部保持爲真空氛圍之箱狀的真空處理室100、 有一對之縫溶接輥單元200之溶接頭300、和被載置 件10之載體400。 載之 由前 進行 到將 作詳 X、 係爲 Ζ軸 限定 裝置 圖， 在圖 同此 有： 和具 有工 -10- 200932414 縫溶接輥單元200，係爲具備有旋轉之輥狀的溶接電 極（將此稱爲溶接輕），並進行縫溶接者。故而，本實施 形態之真空內溶接處理裝置1，係成爲在真空氛圍中將電 子構件封裝等作縫溶接的裝置。 溶接頭300，係爲將一對之縫溶接輥單元200可在Z 軸方向移動地且可裝著脫離地作保持者。進而，溶接頭 300，係被構成爲可將一對之縫溶接輥單元200的Y軸方 0 向之間隔作變更。針對溶接頭3 00之構造的詳細內容，係 於後述。 溶接頭300，係在被形成於真空處理室1〇〇內部之樑 110的側面處，被配設爲可在Y軸方向上作直線移動。具 體而言，在樑110之側面處，係被配設有沿著Y軸方向而 被相互平行地作配設之2根的導引軌500，在此2根之導 引軌5 00處，係分別被組合有沿著該導引軌而作直線移動 之2個的滑動構件510。溶接頭300，係被固定在此合計4 φ 個的滑動構件處，並成爲能夠與滑動構件510而一同沿著 導引軌500來在Y軸方向上作直線移動。 進而’在2根的導引軌500之間，係與導引軌500相 平行地而被配設著於外週面處被形成有公螺紋之溶接頭驅 動軸520。溶接頭驅動軸520，係經由被配設在真空處理 室100之相對向的側壁處之軸承522、524，而可旋轉地被 支持。而，溶接頭驅動軸520之其中一端，係貫通真空處 理室100之側壁而露出於外部，同時，被連接於配設在真 空處理室1〇〇之外部的溶接頭驅動裝置540處。在貫通部 -11 - 200932414 分之軸承524處’係將溶接頭驅動軸520與真空處理室 1 〇〇之間藉由磁性流體密封構件等而作密封。因此，係成 爲在由於外部之溶接頭驅動裝置540所致之驅動而使溶接 頭驅動軸520作旋轉時，亦能夠將真空處理室10〇內保持 爲略真空。溶接頭驅動裝置5 4 0，在本實施形態中，係爲 步進馬達。 在溶接頭300處，係被配設有與溶接頭驅動軸52〇相 φ 螺合之螺帽530。另外，此螺帽530係成爲在螺合部分處 具備有球之所謂滾珠螺桿，而降低滑動阻抗。故而，溶接 頭300’係伴隨著被溶接頭驅動裝置540所驅動之溶接頭 驅動軸5 20的旋轉，而與螺帽530 —同在Y軸方向上作直 線移動。 又，在溶接頭3 00處，係貫通連接有在真空處理室 100內沿著Y軸方向而被配設之第1輥驅動軸600以及第 2輥驅動軸610。此第1輥驅動軸600以及第2輥驅動軸 ❹ 610，係爲栓槽軸，並相互平行地在X軸方向上被並排配 設。而，第1輥驅動軸600以及第2輥驅動軸610，係經 由被配設在真空處理室100之其中一方的側壁處之軸承 602以及軸承612，還有配設在另外一方之側壁處的軸承 604以及軸承614，而分別可旋轉地被支持。第1輥驅動 軸600以及第2輥驅動軸610之其中一端，係貫通真空處 理室1 〇〇之側壁而分別露出於外部，並分別被連接於配設 在真空處理室100之外部的第1輥驅動軸驅動裝置620以 及第2輥驅動軸驅動裝置630處。在貫通部分之軸承6 04 -12- 200932414 以及軸承614處，係與溶接頭驅動軸520同樣的’分別被 設置有磁性流體密封構件等。第1輥驅動軸驅動裝置62〇 以及第2輥驅動軸驅動裝置630’在本實施形態中’係爲 步進馬達。 此第1輥驅動軸600以及第2輥驅動軸610 ’係分別 被連接於溶接頭300所具備之第1變換裝置360以及第2 變換裝置370(詳細係於後述）處。此些之第1變換裝置 @ 360以及第2變換裝置3 70，係成爲在可藉由成爲栓槽之 第1輥驅動軸600及第2輥驅動軸630而被傳達有旋轉力 的同時，沿著各軸而進行滑動。 載體400，係在真空處理室100內部之底面處，被配 設爲可在X軸方向上作直線移動。在真空處理室100之底 面處，係被配設有沿著X軸方向而被相互平行地作配設之 2根的導引軌700，在此2根之導引軌700處，係分別被 組合有沿著導引軌700而作直線移動之2個的滑動構件 Q 710。而’載體400，係被固定在此合計4個的滑動構件 710處，並成爲能夠與滑動構件710而一同沿著導引軌 700來在X軸方向上作直線移動。 在2根的導引軌700之間，係與導引軌700相平行地 而被配設著於外週面處被形成有公螺紋之載體驅動軸 720。此載體驅動軸720之其中一端，係貫通真空處理室 100之側壁而露出於外部，同時，被連接於配設在真空處 理室100之外部的載體驅動裝置74〇處。而，在載體4〇〇 之下面處，係被配設有與載體驅動軸720相螺合之螺帽 -13- 200932414 730。故而，載體400，係伴隨著被載體驅動裝置740所驅 動之在體驅動軸720的旋轉，而與螺帽730 —同在X軸方 向上作直線移動。 載體驅動軸720，係經由被配設在真空處理室100之 底面處之軸承722、以及被配設在側壁之底部處的軸承 724，而可旋轉地被支持。在貫通部分之軸承724處，係 與溶接頭驅動軸5 2 0同樣的，分別被設置有磁性流體密封 0 構件等。載體驅動裝置740，在本實施形態中，係爲步進 馬達。 在載體400之上面處，係被載置有將複數之工件1〇 以X軸以及Y軸之矩陣狀來作保持的工件托盤410。工件 托盤410，係在保持有複數之工件10的狀態下’從前一工 程而被搬送至真空處理室100內，並被載置在載體40 0 上。又，在載體400之Y軸方向的其中一端處，係被設置 有將交換用縫溶接輥單元201作保持之交換台420。在交 ❹ 換台420之上面，係被配設有複數之保持台430，交換用 縫溶接輥單元210，係以成對的狀態而被載置於此保持台 430上。亦即是，此交換用縫溶接輥單元201，亦係經由 載體驅動軸720而成爲可在X方向上作移動。 在此真空內溶接處理裝置1中，藉由在使載體400於 X軸方向上作移動的同時，使溶接頭3 00在Y軸方向上作 移動’而成爲能夠將一對之縫溶接輥單元200配置在以矩 陣狀而被配置於工件托盤410處之任意的工件1〇上。 又’真空內溶接處理裝置1，藉由在使載體4 00於X軸方 -14- 200932414 向上作移動的同時，使溶接頭300在Y軸方向上作移動， 而成爲能夠在交換台420上之任意的保持台430之上，將 縫溶接輥單元200作開放，或是將新的交換用縫溶接輥單 元201作保持。藉由此，真空內溶接處理裝置1，係在能 夠對工件托盤410上之所有的工件10作自動性處理（縫 溶接）的同時，亦成爲能夠將由於摩擦等而交換頻度爲高 之縫溶接輥單元2 00在真空處理室100內作自動交換。 φ 接下來，針對真空內溶接處理裝置1所致之縫溶接的 操作程序作說明。 圖4(a)，係爲將真空內溶接處理裝置1所致之縫溶 接的模樣作擴大展示之正面圖，同圖之（b )則係爲將真 空內溶接處理裝置1所致之縫溶接的模樣作擴大展示的左 側面圖。如同此些之圖中所示一般，縫溶接輥單元200， 係將身爲溶接電極之溶接輥210可旋轉地保持在殼體220 處者。工件10，係在於封裝12之上而被載置又或是被假 〇 安裝有頂蓋14的狀態下，而被收容在被形成於工件托盤 410上的複數之凹陷412之內。 首先，使溶接頭300在Y方向上移動，並使載體400 在X方向上移動，而將一對之縫溶接輥單元200配置在特 定之位置的工件10之正上方。而後，如圖4(a)中所示 一般，溶接頭3 00，係使一對之縫溶接輥單元200下降 (在Z軸方向上移動），並以特定之壓力而使溶接輥210 與頂蓋14的相對向之2個的端緣相接觸。接下來，在將 脈衝狀之電壓施加於溶接輥210處的同時，如同圖（b) 200932414 中所示一般，使載體400在X軸方向上移動。伴隨著載體 400之移動，溶接輥210係一面轉動一面沿著頂蓋14之端 緣而相對性移動。藉由此，沿著頂蓋1 4的相對向之2個 的端緣，頂蓋14與封裝12係被作溶接。載體400係持續 維持移動，而並排於X方向上之工件10係連續地被溶 接。 當X軸方向之一列的工件10之溶接全部結束的情況 ❹ 時，溶接頭300，係在使一對之縫溶接輥單元200上升 (在Z軸方向上移動）的同時，在γ軸方向上作移動，而 將一對之縫溶接輥單元200配置在相鄰之列的工件1 〇之 正上方。而後，與上述同樣的，連續進行此X軸方向之一 列的工件10之溶接。藉由反覆進行此，被保持在工件托 盤410上之所有的工件1〇之X軸方向端緣係被溶接。另 外，當將工件10之Y軸方向端緣作溶接的情況時，係只 要將工件托盤410搬入至X、Y方向爲90度相異之相同 © 構造的真空內溶接處理裝置中並進行溶接，或是暫時將工 件托盤410取出並作90度旋轉，而後再度搬入至真空內 溶接處理裝置1中並進行溶接即可。又，採用在真空處理 室1〇〇內而將載體400作90度旋轉之構造亦爲理想。 接下來’針對溶接頭300之構造作詳細說明。 圖5，係爲將溶接頭3 00之一部分作剖面後的正面 圖’圖6 ’係爲將溶接頭3 00之一部分作剖面後之平面 圖，圖7 ’係爲將溶接頭3 0 0之一部分作剖面後之左側面 圖。 -16- 200932414 如同此些之圖中所示—般’溶接頭300 ’係具備有： 於背面處被固定有滑動構件510以及螺帽530之框架 302;和在框架302之正面下側處，以可在Y軸方向上作 相對移動的方式而被配設之2個的Y方向可動構件320; 和可相對於2個的Y方向可動構件3 20之正面的各個而在 Z軸方向上作相對移動之Z方向可動構件310。在Z方向 可動構件310之上部，係被連接有用以使Z方向可動構件 @ 310移動之連接構件330。又，在Z方向可動構件310之 下部，係被配設有將縫溶接輥單元2 00可裝著脫離地作保 持之保持部340。 溶接頭3 00，係進而在2個的Y方向可動構件320之 間，具備有用以對保持部340所致之縫溶接輥單元200的 保持/開放作切換之裝著脫離切換構件350。又，係於框 架302之上部，具備有用以使2個的Z方向可動構件310 分別在Z軸方向上作移動之2個的第1變換裝置360;和 ❿ 用以使2個的Y方向可動構件320分別在Z軸方向上作移 動之2個的第2變換裝置3 70;和用以使裝著脫離切換構 件350在Z軸方向上作移動之第3變換裝置380。另外， 雖然部分內容係已作了敘述，但是，第1變換裝置360, 係成爲被卡合於成爲栓槽之第1輥驅動軸600處，第2變 換裝置370，係成爲被卡合於成爲栓槽之第2輥驅動軸 610處，第3變換裝置3 80，係成爲被卡合於第2輥驅動 軸610處。 框架3 02’係成爲在板狀之構件的上部處被連接有箱 -17- 200932414 狀之構件一般的形狀，在箱狀之上部的內部處，係被收容 有第1變換裝置360、第2變換裝置370以及第3變換裝 置 3 80。 Y方向可動構件320，係經由在框架302之下部正面 處而被沿著Y軸方向作配設之2個的導引軌304、以及沿 著導引軌304而作直線移動之2個的滑動構件306，而被 配設在框架302處。2個的Y方向可動構件320，係在身 〇 爲移動方向之Y軸方向上被並排配設，並成爲藉由分別相 互朝向反方向移動，而將兩者間的距離擴大又或是縮小。 在Y方向可動構件3 20之上端，係被突出設置有被連接於 第2變換裝置3 70之下部的凸輪從動構件3 26。在此凸輪 從動構件326之前端處，係被設置有輥（省略圖示）。 Z方向可動構件310，係經由在Y方向可動構件320 之正面處而被沿著Z軸方向作配設之導引軌322、以及沿 著導引軌322而作直線移動之2個的滑動構件324，而被 Q 配設在Y方向可動構件320上。在Z方向可動構件310之 正面上部，係被設置有與連接構件330相連接之承受板 3 12° 連接構件330，係爲將Z方向可動構件310與第1變 換裝置360作連接之從側面視之時成爲C字狀的構件，並 在框架302上以可在Z軸方向上作移動的方式而被配設。 在連接構件330之上側的端部處，係被設置有抵接於第1 變換裝置360之上面的上輥332。又，在連接構件330之 下側的端部處，係被設置有抵接於承受板3 1 2之下面的下 -18- 200932414 輥334。2個的連接構件330，係經由在框架3 02之箱狀部 分的正面側之內側面處而被沿著Z軸方向作配設之導引軌 336、以及沿著導引軌336而作直線移動之2個的滑動構 件3 3 8，而分別被作配設。 在本實施形態中，係藉由未圖示之彈推裝置而將Z方 向可動構件朝向下方作彈推。藉由此，下輥334，係成爲 恆常從承受板312而被朝向下方作推壓之狀態。而，上輥 φ 332，係經由從此承受板312而來之推壓力而被推壓於第1 變換裝置360之上面。如此這般，經由以彈推裝置而將Z 方向可動構件310朝向下方作彈推，能夠使承受板312與 下輥334之接觸以及第1變換裝置360與上輥332之接觸 成爲安定。進而，能夠使對於工件10之溶接輥210的推 壓力安定爲特定之値。 另外’詳細內容雖於後述，但是，此第1變換裝置 360係成爲凸輪，並與第1輥驅動軸600 —同旋轉。經由 φ 此凸輪之旋轉’連接構件330係上下移動，並成爲經由此 連接構件之上下移動而使Z方向可動構件310上升•下 降。 保持部340，係由固定構件342與開閉構件344所 成’並被構成爲藉由此兩者來挾持縫溶接輥單元200之殼 體220。開閉構件344，係經由旋動銷346而可旋動地被 配設於固定構件3 42之背面處。又，開閉構件344，係經 由彈簧等之彈推裝置（省略圖示）而被朝向將縫溶接輥單 元200作挾持之方向作彈推。亦即是，保持部34〇，係成 -19- 200932414 爲經由彈推裝置所致之彈推力而將縫溶接輥單元200作挾 持的構造。 開閉構件3 44，係具備有朝向上方而突出設置之桿 348，在此桿348之前端處，係被設置有輥349。裝著脫離 切換構件350，係被構成爲藉由將此桿348之輥349朝向 特定之方向而推壓，來與彈推裝置之彈推力作抵抗，並朝 向使開閉構件344開啓之方向作旋動，而將縫溶接輥單元 φ 200從保持部340而解放。另外，關於裝著脫離構件350 之詳細內容、以及從保持部3 40之縫溶接輥單元200的解 放之詳細內容，係於後述。 在縫溶接輥單元200之殻體220的外週面處，係沿著 週方向而被形成有定位溝222。而，在保持部340之固定 構件3 42以及開閉構件344之與定位溝222相對應的位置 處，係被突出設置有定位突起（省略圖示）。藉由將此定 位突起收容在殻體220之定位溝222中，而進行縫溶接輥 〇 單元200之Y軸方向的定位。 第1變換裝置3 60，係爲從旋轉中心起直到外週面爲 止之距離作連續性變化的形狀之凸輪（參考圖7)，並在 框架3 02之上部處可旋轉地被配設有2個。2個的第1變 換裝置360’係將旋轉軸設爲與γ軸方向平行而串聯配 設，同時’在2個的第1變換裝置3 60之旋轉中心處，係 分別被貫通有成爲栓槽軸之第1輥驅動軸60 0。此第1變 換裝置360’係分別保持有與第1輥驅動軸600之栓槽溝 相咬合的球。亦即是，第1變換裝置360，係成爲可藉由 -20- 200932414 球栓槽機構而與第1輥驅動軸60 0共同旋轉，並進而成爲 能夠沿著第1輥驅動軸600而在Y軸方向上移動。經由此 第1變換裝置3 60之旋轉，連接構件330以及Z方向可動 構件310係成爲作上下移動。在本實施形態中，於第1變 換裝置360之凸輪處，係將縫溶接輥單元200被下降至可 進行溶接之狀態的狀態稱爲「溶接實行區域」，並將縫溶 接輥單元200被上升至可進行溶接之狀態的狀態稱爲「溶 〇 接非實行區域J 。 第2變換裝置3 70，係爲於外週面處被形成有將Y方 向可動構件320之凸輪從動構件326的輥作收容之誘導溝 3 72的圓筒狀之凸輪（參考圖6) 。2個的第2變換裝置 3 70，係從正面視之而在第1變換裝置360之後方處平行 於Y軸方向而被串聯配設。在此第2變換裝置3 70之旋轉 中心處，係分別被貫通有第2輥驅動軸610。2個的第2 變換裝置3 70，係與第1變換裝置360同樣的，成爲可藉 φ 由球拴槽機構而與第2輥驅動軸610共同旋轉，並進而成 爲能夠與溶接頭300 —同地沿著第2輥驅動軸610而在Y 軸方向上移動。誘導溝3 72，係由被形成爲螺旋狀之Y方 向誘導區域3 72A、和以非螺旋狀而被形成於圓周方向之 Y方向靜止區域372B所構成。此誘導溝372，係以由正面 視之而成爲左右對稱的方式，而分別被形成於2個的第2 變換裝置370處。故而，凸輪從動構件325之輥，若是在 誘導溝372之Y方向誘導區域372A內移動，則Y方向可 動構件3 20係在Y方向上滑動。另一方面，凸輪從動構件 -21 - 200932414 325之輥，若是在誘導溝372之Y方向靜止區域372B內 移動’則無關於第2變換裝置370之旋轉，Υ方向可動構 件320之滑動係成爲停止。 第3變換裝置3 80，係爲具備有從旋轉中心起之距離 作連續性變化之凸部382以及從旋轉中心起之距離被形成 爲一定之平滑部3 84所成的外週面之凸輪。詳細內容雖於 後再述’但是，伴隨著此凸部3 82以及平滑部384之旋 Φ 轉’裝著脫離切換構件350係上下移動，並使挾持縫溶接 輥單元200之保持部340作開閉。另外，在本實施形態 中’凸部382，係作爲使保持部340開放之開放區域而起 作用’平滑部3 84，係作爲使保持部3 40關閉之保持區域 而起作用。第3變換裝置3 70,係將旋轉軸設爲與Υ軸方 向平行，而在2個的第2變換裝置3 70之間被串聯配設， 同時，在旋轉中心處，係被貫通有第2輥驅動軸610。此 第3變換裝置380，係成爲可藉由球栓槽機構而與第2輥 ❹ 驅動軸610共同旋轉，並沿著第2輥驅動軸610而在Υ軸 方向上移動。另外，凸部3 82 (開放區域）係被設置在對 應於方向靜止區域3 72Β之位置處，而平滑部3 84 (保持 區域）係被設置在對應於第2變換裝置3 70之Υ方向誘導 區域372Α的位置處。 接下來，針對Υ方向可動構件3 20之移動作說明。 圖8 ( a)以及（b)，係爲展示Υ方向可動構件320 之移動的模樣之正面圖。另外，在此些之圖中，係將一部 份作爲剖面，同時將一部份的構件作切缺展示。 -22- 200932414 圖8(a)，係爲展示2個的Y方向可動構件320爲 存在於相互最爲接近之位置處的狀態。而後’若是從此狀 態起而藉由第2輥驅動軸驅動裝置630來將第2輥驅動軸 610作旋轉驅動，並使第2變換裝置3 70以從左側方視之 而作順時針旋轉的方式來旋轉，則經由誘導溝3 72之Υ方 向誘導區域3 72Α，凸輪從動構件326係被誘導，而2個 的Υ方向可動構件3 20係朝向相互遠離的方向而在Υ軸 @ 方向上移動。 另外，當從圖8 ( a )之狀態起而從左側方視之來以逆 時針方向而使第2變換裝置370旋轉的情況時，由於凸輪 從動構件3 26係進入Y方向靜止區域3 72B內，因此，2 個的Y方向可動構件3 20係不會在Y軸方向上移動’而 維持在相互最爲接近之位置。 當凸輪從動構件326爲位在誘導溝372之Y方向誘導 區域372A內的情況時，係如圖8(b)中所示一般，藉由 〇 從左側方視之而以順時針方向來使第2變換裝置370旋 轉，2個的方向可動構件320係朝向相互遠離的方向而移 動，藉由從左側方視之而以逆時針方向來使第2變換裝置 3 70旋轉，2個的方向可動構件320係朝向相互接近的方 向而移動。2個的第2變換裝置3 70，由於係爲相互對稱 之形狀，並在同一方向上旋轉同一角度，因此，2個的Y 方向可動構件320，係成爲相互在反方向上移動同一之距 離。藉由此，成爲能夠將1對之溶接輥210的間隔，與成 爲工件10之電子構件的尺寸作配合。 -23- 200932414 又，經由對1對之溶接輥210的間隔作變更，成爲能 夠對溶接輥210側面之與工件10相接觸的部分、亦即是 溶接部分作變更。溶接輥210側面之溶接部分，雖會由於 在溶接時所反覆作用之荷重與發熱而有所消耗，但是，例 如，藉由以特定之週期來對一對之溶接輥210的間隔作變 更，而變更溶接部分之位置，能夠延長溶接輥210之壽 命。亦即是，藉由不將溶接輥2 1 0側面之同一部份連續地 φ 使用於溶接中，能夠減少溶接輥2 1 0側面之磨耗量，同 時，能夠防止溶接輥21 0側面被局部性的磨耗。又，當在 溶接輥210之側面發生有異常時，係有著就算是不對溶接 輥單元200作交換，亦可僅藉由將一對之溶接輥210的間 隔作變更並變更溶接部分，而繼續溶接作業的情況。 伴隨著Y方向可動構件3 20在Y軸方向上移動，被 設置於其上之Z方向可動構件310、保持部340以及縫溶 接輥單元200，亦成爲在Y軸方向上移動。Z方向可動構 Q 件310之承受板312，由於係具備有對應於Y方向可動構 件320之移動距離的Y軸方向之寬幅，因此，就算是Z方 向可動構件310之Y軸方向的位置與Y方向可動構件320 一同地作變化，亦能夠保持連接部330之下輥334與承受 板312間之接觸。又，伴隨著承受板312之移動’由於下 輥3 3 4係轉動，故而，係不會有對Y方向可動構件320以 及Z方向可動構件310之Y軸方向的移動造成妨礙的事 態。 如此這般，在本實施形態中，經由以第2輥驅動軸驅 -24- 200932414 動裝置630來使第2變換裝置370旋轉並使Y方向可動構 件3 20移動，而成爲能夠對一對之溶接輥2 i 0之間的距離 任意作設定。藉由此，在本實施形態中，係成爲能夠進行 對應於各種尺寸之工件10的縫溶接。 接下來，針對Z方向可動構件310之移動作說明。 圖9(a)以及（b)，係爲展示Z方向可動構件310 之移動的模樣之左側面圖。另外，在此些之圖中，係將一 φ 部份作剖面展示。 圖9(a)，係爲展示Z方向可動構件310之最爲上 升的狀態。亦即是，連接構件3 3 0之上輥3 3 2，係抵接於 從第1變換裝置3 60之旋轉中心而最爲遠離的外週面（溶 接非實行區域）上。而後，若是從此狀態起而藉由第1輥 驅動軸驅動裝置620來將第1輥驅動軸600作旋轉驅動， 並在同圖中使第1變換裝置3 60以順時針旋轉的方式來旋 轉，則上輥3 32係伴隨著第1變換裝置3 60之旋轉而轉 〇 動，同時，伴隨著第1變換裝置360之接觸面的從旋轉中 心之距離的減少（朝向溶接實行區域之移動）而下降。亦 即是，接觸構件330係下降，伴隨於此，Z方向可動構件 310、保持部340以及縫溶接輥單元22 0亦下降，並與工 件1 〇相接觸，而成爲可進行溶接之狀態。 如圖9(b)中所示一般，藉由在同圖中以順時針方向 來使第1變換裝置3 60旋轉，Z方向可動構件310係下 降，而藉由在同圖中以逆時針方向來使第1變換裝置3 60 旋轉，Z方向可動構件310係上升。2個的第1變換裝置 -25- 200932414 360，由於係爲同一形狀，並在同—方向上旋轉同一角 度，因此’ 2個的Z方向可動構件310’係成爲在同一方 向上移動同一之距離。 如此這般，在本實施形態中’經由以第1輥驅動軸驅 動裝置620來使第1變換裝置360旋轉並使Z方向可動構 件310移動，而成爲能夠使縫溶接輥單元200上升或下 降。藉由此，在能夠使縫溶接輥單元200下降並對工件10 φ 作處理（縫溶接）的同時’當使溶接頭3 〇〇又或是載體 400移動的情況時，係可使縫溶接輥單元200上升並作退 避。 另外，Z方向可動構件310’由於係成爲經由承受板 310而被掛在連接構件330之下輥334之上的狀態’因 此，此Z方向可動構件係成爲能夠在縫溶接中而逃離至上 方。故而，在本實施形態中’縫溶接輥單元200’係成爲 不會在縫溶接中對於工件1〇而施加必要以上之推壓力。 〇 又，一對之縫溶接輥單元200’由於係可各別地朝向上方 逃離，因此，就算是在例如工件1〇傾斜的情況時，亦成 爲能夠使一對之溶接輥210所致的推壓力成爲略均等。 接下來，針對裝著脫離構件350之詳細內容、以及從 保持部340之縫溶接輥單元200的解放之詳細內容作說 明。 圖10(a)以及（b)，係爲展示從保持部3 40而將縫 溶接輥單元200作解放的的模樣之左側面圖。另外，在此 些之圖中，係將一部份作爲剖面，同時將同圖中之裝著脫 -26- 200932414 離切換構件3 50的前方之構件作省略展示。 如同在此些之圖中所示一般，裝著脫離彳 3 50 ’係經由在框架302之正面下部處而被沿著 作配設之導引軌308、以及沿著導引軌3 08而作 之2個的滑動構件309，而被可移動地配設在 上。裝著脫離切換構件3 50之上端，係在正面側 側）被作偏位（offset )，同時，被連接於搖 Q 處。裝著脫離切換構件3 50之下端，係從正面視 爲左右兩個，並被構成爲能夠略同時地將2個的 340之桿3 48前端的輥349從上方來作推壓 5)。又，在裝著脫離切換構件350之2個的下 分別被形成有與輥3 4 9相接觸之推壓斜面3 5 0 A。 如圖10(a)以及（b)中所示一般，搖動桿 經由被連接於背面側（圖之左側）之端部處E 354，而被配設於第3變換裝置380之下方的 〇 處，並成爲能夠以搖動軸3 54爲中心來搖動。而 3 52之正面側（圖之右側）的端部，係經由被插 中之銷356而被連接於裝著脫離切換構件350之 又，搖動桿352，係在與第3變換裝置380之下 的位置處，具備有與第3變換裝置380相抵接之 裝著脫離切換構件350，由於係藉由未圖示之彈 被朝向上方作彈推，因此，輥358，係成爲恆常 第3變換裝置3 80的下面處。 圖10(a)，係爲展示在第2變換裝置370; 換構件 Z軸方向 直線移動 z軸方向 (圖之右 動桿 3 5 2 之而被分 保持構件 (參考圖 端處 '係 3 52，係 β搖動軸 框架 302 ，搖動桿 通於長孔 上端處。 面相對向 輕 3 5 8。 推裝置而 被推壓於 之Υ方向 -27- 200932414 誘導區域3 72A內，使2個的Y方向可動構件最爲近接的 狀態（亦即是，位置於Υ方向誘導區域372Α與Υ方向靜 止區域372Β之邊界處的狀態），在此狀態下，輥358, 係成爲抵接於第3變換裝置3 80之平滑部3 84 (保持區 域）與凸部382(開放區域）之邊界附近的狀態。而後， 若是從此狀態起而更進而藉由第2輥驅動軸驅動裝置630 來將第2輥驅動軸610作旋轉驅動，並在同圖中使第3變 φ 換裝置3 80以逆時針旋轉的方式來旋轉，則輥3 5 8係成爲 抵接於凸部3 82 (開放區域）側，並成爲因應於凸部382 之突出量而被壓下。藉由此，搖動桿3 52係搖動，並使裝 著脫離切換構件350朝向下方移動。 如此這般，若是更進而使第3變換裝置旋轉，則第2 變換裝置3 70亦成爲同時作旋轉。但是，由於Υ方向可動 構件320之凸輪從動構件326係進入 Υ方向靜止區域 372Β內，因此，Υ方向可動構件320係不會在Υ軸方向 〇 上移動。另一方面，當爲了使Υ方向可動構件320移動， 而從圖10(b)之狀態起來在同圖中使第3變換裝置380 與第2變換裝置370以順時針方向而旋轉的情況時，搖動 桿352之輥358，係成爲與平滑部384(保持區域）相接 觸之狀態，而裝著脫離切換構件3 50係不會朝向下方移 動。亦即是，在本實施形態中，在裝著脫離切換構件350 爲可移動的狀態下，Υ方向可動構件320係不會移動，而 在Υ方向可動構件3 20爲可移動的狀態下，裝著脫離切換 構件3 5 0係成爲不會移動。 -28- 200932414 如圖10(b)中所示一般，若是裝著脫離切換構件 3 5 0朝向下方移動，則前端之推壓斜面3 50A，係將保持部 3 4 0之桿3 4 8前端的輥3 4 9朝向正面側（圖之右側）推 壓，並使開閉構件344朝向從固定構件342而開啓的方向 而作移動。藉由此，縫溶接輥單元200，係成爲從保持部 3 40所致之挾持而被解放並落下。 進而，在開閉構件344開啓了的狀態下，經由將交換 0 用縫溶接輥單元201設置在固定構件342與開閉構件344 之間，並藉由第2輥驅動軸驅動裝置630來將第3變換裝 置380在圖10中以順時針方向而旋轉，而使裝著脫離切 換構件3 50朝向上方移動，能夠將交換用縫溶接輥單元 201挾持於保持部處。 如此這般，在本實施形態中，經由以第2輥驅動軸驅 動裝置630來使第3變換裝置380旋轉並使裝著脫離切換 構件3 50移動，而成爲能夠使縫溶接輥單元200自動地作 Q 交換。特別是，在交換時之一對的縫溶接輥單元201之間 隔，由於係經由第2變換裝置3 70之Y方向靜止區域 3 72B之間隔，而恆常成爲一定，因此，能夠實現安定之 交換作業。 若是對縫溶接輥單元200之自動交換的程序作詳細說 明，則係如下所述一般。首先，使溶接頭3 00以及載體 4〇〇分別作移動，並使保持部340所挾持之縫溶接輥單元 2〇〇對向於被載置在交換台420之上面的空的保持台 430。而後，使Z方向可動構件310下降，而使縫溶接輥 -29- 200932414 單元200接近保持台430，同時，使裝著脫離切換構件 350下降，並將縫溶接輥單元200從保持部340而解放， 再載置於保持台430上。接著，使Z方向可動構件310上 升，同時，使溶接頭3 00以及載體400作移動，並使保持 部340與被載置在交換台420之保持台430上的交換用縫 溶接輥單元201相對向。而後，使Z方向可動構件310下 降，而使交換用縫溶接輥單元201位置在保持部3 40之固 φ 定構件342與開閉構件344之間，同時，使裝著脫離切換 構件350上升，並將交換用縫溶接輥單元201挾持於保持 部3 40處。 如以上所說明一般，在本實施形態之真空內溶接處理 裝置1中，係在真空處理室100內配設於X軸方向上移動 之載體400以及於Y軸方向上移動之溶接頭300，同時， 在真空處理室1〇〇外，配設溶接頭驅動裝置540以及載體 驅動裝置740。進而，在溶接頭300處，配設與縫溶接輥 單元200 —同在Z軸方向上移動之Z方向可動構件310、 以及使Z方向移動構件310移動之第1變換裝置360，並 在真空處理室1〇〇內，將被連接於第1變換裝置360處之 第1輥驅動軸600平行於Y軸方向地作配設，同時，在真 空處理室外，配設驅動第1輥驅動軸600之第1輥驅動軸 驅動裝置6 2 0。 因此，能夠將真空處理室100較先前技術而更加小型 化，並能夠削減製造成本以及維修管理成本。又，藉由^ 真空處理室100內之容積減少，能夠在短時間內進行真空 -30- 200932414 處理室100內之減壓。又，藉由使溶接頭300在Y方向上 作直線移動、使載體400在X方向上作直線移動，相較於 先前技術之Χ-Υ平台，構造係變得簡潔，且位置控制系變 得容易，因此，相較於先前技術，能夠更高速且更高精確 度的進行對於工件10之縫溶接輥單元2 0 0的定位。又， 由於能夠把將真空處理室100外之驅動裝置與真空處理室 1 00內之可動物作連接的軸之根數設爲最低限度，因此， II 在能夠提昇真空處理室1 00之密閉性的同時，亦能夠削減 製造成本以及維持管理成本。 又，由於載體400係僅在X方向上作直線移動，因 此，例如，係可採用從真空處理室1 00之其中一側來接收 載置有工件10之工件托盤410，並在溶接結束後從真空處 理室1〇〇之另外一側而將工件托盤410朝向下一工程而搬 出的構成。藉由採用此種構成，成爲能夠將包含有真空內 溶接處理裝置1之生產線全體的配設設爲直線性的配置， 〇 而能夠成爲有效率的配設。 又，真空內溶接處理裝置1之溶接頭300，係具備有 與縫溶接輥單元200 —同移動之Υ方向可動構件320、以 及使Υ方向可動構件320移動之第2變換裝置370，並在 真空處理室100內，將被連接於第2變換裝置370處之第 2輥驅動軸610平行於Υ軸方向地作配設，並在真空處理 室外，配設驅動第2輥驅動軸610之第2輥驅動軸驅動裝 置63 0。因此，就算是不在真空處理室內配設致動器或使 馬達等，亦能夠使縫溶接輥單元200進行多樣化的動作。 -31 - 200932414 故而，在能夠對多種類之工件作處理的同時，亦能夠對工 件施加更爲複雜之處理。又，在此情況中，由於亦不需要 使用高價之真空規格的致動器或是馬達等，且亦不需要將 真空處理室100大型化，因此，能夠削減製造成本以及維 持管理成本。 又，由於係藉由在2個的方向可動構件320處分別配 設Z方向可動構件310，並以第2變換裝置3 70來使2個 φ 的Y方向可動構件320在Y軸方向上移動，來使兩者之 間的距離變化，因此，能夠對各種尺寸之工件作處理。 又，係成爲能夠對溶接輥210側面之與工件10相接觸的 部分（溶接部分）作變更，而能夠延長溶接輥210之壽 命。進而，藉由此，由於能夠減少溶接輥210之交換頻 度，因此，能夠使裝置之稼動率提昇。 又，溶接頭3 00，係具備有裝著脫離切換構件3 5 0、 和使裝著脫離切換構件350移動之第3變換裝置380，同 〇 時，在z方向可動構件310處，係被配設有伴隨著前述裝 著脫離切換構件350之移動而將縫溶接輥單元200可裝著 脫離地作保持的保持部340。因此，就算是不使用高價之 真空規格的致動器等，亦能夠在真空處理室100內將縫溶 接輥單元200自動地作交換。。進而，由於第3變換裝置 380係被連接於第2輥驅動軸610處，因此，不會使將真 空處理室100外之驅動裝置與真空處理室100內之可動物 作連接的軸之根數增加，便成爲能夠在真空處理室1〇〇內 將縫溶接輥單元2 0 0自動地作交換。 -32- 200932414 又，由於第2變換裝置370之誘導溝372的Y方向誘 導區域3 72Α，係被形成在對應於第3變換裝置3 80處之 縫溶接輥單元200的保持區域（平滑部3 84 )之位置處， 而第3變換裝置3 70之縫溶接輥單元200的開放區域（凸 部3 82 )，係被形成在對應於第2變換裝置370之誘導溝 3 72的Υ方向靜止區域3 72Β的位置處，因此，係能夠設 爲：就算是第2變換裝置370以及第3變換裝置380藉由 ❹ 共通之第2輥驅動軸610而被作旋轉，在可進行裝著脫離 切換構件3 50之移動所致的開放動作之狀態下，Υ方向可 動構件320係不會移動，而在Υ方向可動構件320爲可移 動的狀態下，則不使其進行裝著脫離切換構件3 50之移動 所致的開放動作。藉由此，能夠以簡單且低價之構成，來 將被連接於第2變換裝置370以及第3變換裝置380處之 軸共通化。 又，真空內溶接處理裝置1，由於係將保持在保持部 〇 340處之縫溶接輥單元200與配置在真空處理室100內之 交換用縫溶接輥單元201自動地作交換，因此，一般而言 會成爲極長時間之交換作業，亦成爲能夠在短時間內完 成，而能夠使裝置之稼動率飛躍性的提昇。又，由於係能 夠在將真空處理室100內保持爲真空氛圍的狀態下，而對 縫溶接輥單元200作交換，因此，交換後之作動準備係成 爲短時間，而能夠對較先前技術爲更多之工件10連續地 作處理。 又’交換用縫溶接輥單元201，由於係被載置在載體 -33- 200932414 400上（或者是與載體連動之平台上），因此，能夠經由 溶接頭300以及載體400之移動的組合，來進行將縫溶接 輥單元200作交換時之定位。亦即是，能夠不使將真空處 理室100外之驅動裝置與真空處理室100內之可動物作連 接的軸之根數增加，便成爲能夠將縫溶接輥單元200作自 動交換。 又，縫溶接輥單元200，由於係爲具備有輥電極（溶 〇 接輥210)之縫溶接輥單元，因此，係成爲能夠藉由較先 前技術爲更低價之裝置而有效率地在真空氛圍中進行電子 構件封裝等之縫溶接，在能夠提昇電子構件之生產性的同 時，亦能夠削減生產成本。 另外，在本實施形態中，雖係將X軸方向與Y軸方 向設定在水平面內，並將Z軸方向設定在垂直方向，但 是，本發明係並不被限定於此，亦可將X、Y、Z軸方向 設定在其他方向上。 ❹ 又，在本實施形態中，雖係將Y方向可動構件3 20可 移動地配設在Y軸方向上，但是，本發明係並不被限定於 此’亦可構成爲使Y方向可動構件3 20在X軸方向又或 是其他之方向上作移動。又，亦可將Y方向可動構件320 構成爲可旋轉。 又’本實施形態之真空內溶接處理裝置1，雖係分別 具備有2個的z方向可動構件310及Y方向可動構件 320 ’但是’本發明係並不被限定於此，亦可分別具備有1 個的Z方向可動構件310及γ方向可動構件320，或是分 -34- 200932414 別具備有3個以上。 又，在本實施形態中，雖係在溶接頭300處配設Y方 向可動構件320，並在Y方向可動構件320處配設Z方向 可動構件3 1 0，但是，本發明係並不被限定於此，亦可在 溶接頭300處配設Z方向可動構件310，並在Z方向可動 構件310處配設Y方向可動構件320。 又，在本實施形態中，雖係分別藉由旋轉之凸輪來構 φ 成第1變換裝置360、第2變換裝置370以及第3變換裝 置380，但是’本發明係並不被限定於此，亦可將第1變 換裝置3 60、第2變換裝置370以及第3變換裝置380藉 由齒輪齒條（rack and pinion )機構等之其他機構來構 成。 進而，在本實施形態中，雖僅展示有第2變換裝置 370與第3變換裝置380共有第2輥驅動軸610的情況， 但是，亦可使第1變換裝置360與第3變換裝置380共有 Q 第1輥驅動軸600。於此情況，係只要設爲使第3變換裝 置380之保持區域的旋轉相位與對於在第1變換裝置3 6〇 處之Z方向誘導區域的旋轉相位範圍相對應，並使第3變 換裝置380之開放區域的旋轉相位與對於在第1變換裝置 360處之Z方向靜止區域的旋轉相位範圍相對應即可。 又，在本實施形態中，雖係將交換用縫溶接輕單元 2〇1配置在載體400所具備之交換台420上，但是，本發 明係並不被限定於此，亦可將交換用縫溶接輥單元2 〇 i酉己 置在其他場所。又，亦可將交換台420構成爲從載體4〇〇 -35- 200932414 獨立並可移動。 又’在本實施形態中，縫溶接輥單元200，雖係爲縫 溶接輥單元，但是，本發明係並不被限定於此，縫溶接輥 單元200，係亦可爲其他之手法、構造所致之溶接單元。 又’亦可在本實施形態之真空內溶接處理裝置1中具 備有複數之載體40 0。進而，亦可與真空處理室1〇〇而一 倂設置將搬入至真空處理室100內之工件托盤410、以及 φ 從真空處理室100內所搬出之工件托盤410在真空狀態下 暫時作待機之待機處理室。 圖11(a)〜（d) ’係爲展示在真空內溶接處理裝置 1內具備有2個的載體400a、400b，同時，與真空處理室 110而一倂設置有待機處理室120的情況之其中一例的 圖。在此例中，於真空內溶接處理裝置1之真空處理室 1〇〇內，係被配設有在X方向上而相互平行移動之2個的 載體400a、400b。溶接頭3 00，係以在2個的載體400a、 φ 400b之任一者處均可進行溶接處理的方式，而被設定γ 方向之‘移動範圍。 而，在真空處理室100之X方向的其中一側，係被倂 設有待機處理室120。此待機處理室120，係與真空處理 室1〇〇同樣的而被構成爲可將內部保持爲真空氛圍。又， 在待機處理室120處，係被設置有用以將工件托盤410搬 入至待機處理室120內的密閉扉（省略圖示），同時，在 待機處理室120與真空處理室100之間，係被設置有遮斷 扉（省略圖示）。亦即是，待機處理室120，係被構成爲 -36- 200932414 可在將真空處理室100內保持爲真空氛圍的狀態下，而進 行工件托盤410之搬入又或是搬出的空氣鎖而起作用。 在此例之真空內溶接處理裝置1中，首先，係如同圖 之（a)中所示一般，對於被載置於其中一方之載體400a 上的工件托盤410a之工件10進行溶接。而後，在進行溶 接的期間中，將接下來進行溶接之工件托盤410b搬入至 待機處理室120內，並將待機處理室120內作減壓，而設 0 爲與真空處理室100內略相同之真空氛圍。 在進行工件托盤410a處之溶接的期間中，將接下來 進行溶接之工件托盤410b移動至另外一方之載體400b 上。若是在工件托盤410a處之溶接結束，則接下來，如 同圖（b)中所示一般，將溶接頭300從載體400a而朝向 載體400b移動，並立即開始對於被載置於載體400b上之 工件托盤410b的工件10的縫溶接。另一方面，將結束了 溶接的工件托盤410a從載體400a而移動至待機處理室 〇 120內。另外，工件托盤410a、410b之移動，係亦可經由 另外設置之搬送裝置來進行，亦可設爲使載體400a、400b 進入待機處理室120內而進行之。 在工件托盤410a之移動結束後，如同圖（c)所示一 般，將待機處理室120與真空處理室100之間作遮蔽，而 後，將此工件托盤410a從待機處理室120內而搬出至外 部。接下來，如同圖（d)所示一般，將工件托盤410b之 下一個的進行溶接之工件托盤410c搬入至待機處理室120 內，並將待機處理室120內設爲真空氛圍。進而，將待機 -37- 200932414 處理室120與真空處理室100之間開放，並將工件托盤 410c移動至另外一方之載體400a上。藉由此，而成爲能 夠與在工件托盤410b處之溶接結束同時地來使溶接頭300 從載體400b而朝向載體400c移動並開始溶接。之後，係 反覆進行與上述相同之程序。 如此這般，藉由在真空內溶接處理裝置1內具備有2 個的載體400a、40 0b，且與真空處理室100 —倂設置有待 φ 機處理室120，能夠將結束溶接後之工件托盤410a之搬 出、以及下一個進行溶接之工件托盤410b的搬入，在將 真空處理室100內維持於真空狀態的情形下而進行，因 此，能夠更進而縮短溶接處理之循環時間。亦即是，由於 係成爲不需要在每一次之工件托盤410的交換時而反覆進 行真空處理室100內之大氣開放以及減壓，且能夠將待機 處理室120內之大氣開放以及減壓與溶接並行地進行，因 此，能夠大幅地提昇溶接頭3 00之稼動率。 〇 以上，雖係針對本發明之實施形態而作了說明，但 是，本發明之真空內溶接處理裝置，係並不被限定爲上述 之實施形態，不用說，在不脫離本發明之要旨的範圍內’ 係可施加各種之變更。 [產業上之利用可能性] 本發明，係可利用於電子機器或電子構件或者是其他 之各種物品的製造，又或是利用在物流的領域中。 -38- 200932414 【圖式簡單說明】 [圖1]本發明之實施形態的真空內溶 面圖。 [圖2]真空內溶接處理裝置之平面圖。 [圖3]真空內溶接處理裝置之左側面圖 [圖4] (a)係爲將真空內溶接處理裝 的模樣作擴大展示之正面圖，（b)係爲丨 0 理裝置所致之縫溶接的模樣作擴大展示的之 [圖5]將溶接頭之一部份作了剖面的正 [圖6]將溶接頭之一部份作了剖面的平 [圖7]將溶接頭之一部份作了剖面的左 [圖8](a)以及（b)係爲展示Y方 動的模樣之正面圖。 [圖9] ( a)以及（b)係爲展示Z方 動的模樣之左側面圖。 〇 [圖1〇] ( a)以及（b)係爲展示從保 輥單元作解放的的模樣之左側面圖。 [圖U](a)〜（d)係爲展示在真空 1內具備有2個的載體，同時，與真空處 有待機處理室的情況之其中一例的圖。 【主要元件符號說明】 1:真空內溶接處理裝置 1 0 :工件 處理裝置之正 置所致之縫溶接 塔真空內溶接處 έ側面圖。 面圖。 面圖。 側面圖。 向可動構件之移 向可動構件之移 持部而將縫溶接 內溶接處理裝置 理室而一倂設置 -39- 200932414 100 :真空處理室 200 :縫溶接輥單元 201 :交換用縫溶接輥單元 3 0 0 :溶接頭 3 1 0 : Z方向可動構件 320 : Y方向可動構件 340 :保持部 0 350:裝著脫離切換構件 3 60 :第1變換裝置 3 70 :第2變換裝置 372 :誘導溝 3 72A : Y方向誘導區域 3 72B ： Y方向靜止區域 3 8 0 :第3變換裝置 3 8 2 :凸部 ❿ 3 8 4 :平滑部 400 :載體 540 :溶接頭驅動裝置 600 :第1輥驅動軸 610:第2輥驅動軸 620 :第1輥驅動軸驅動裝置 63 0 :第2輥驅動軸驅動裝置 740 :載體驅動裝置 -40-200932414 IX. [Technical Field] The present invention, There is a vacuum internal dissolution processing apparatus for performing various processes such as seam welding in a vacuum atmosphere. [Prior Art] In the prior art, As a means for melting the package of the piezoelectric member such as the piezoelectric vibrating element or the semiconductor element, and the top cover, A seam-dissolving device is used. This seam welding device, By pressing a pair of bonding rolls against the contact portion of the package and the top cover and rotating it, At the same time, a pulsed voltage is applied to fuse the package to the top cover. The seam of the package of such electronic components is generally carried out in a nitrogen atmosphere. but, In recent years, With the miniaturization and high precision of electronic components, The need to maintain the vacuum inside the package, The case where the seam is melted in a vacuum atmosphere is increased. 相对 Relative to this, In the apparatus for performing the previous counting in the treatment of the seam welding or the like in a vacuum atmosphere, the apparatus is connected to the processing apparatus such as the slit bonding apparatus. The X-Y platform in which the top cover is placed is arranged in a matrix, And the driving device of this X-Y platform, They are housed together in a large vacuum processing room. And keeping the vacuum processing chamber in a vacuum atmosphere, And proceed with processing. however, In the case of using such a large vacuum processing chamber, In order to keep the interior in a vacuum atmosphere, Since the department is required to have a very high strength, therefore, There is a problem that not only the vacuum processing chamber, but also the size of the vacuum processing chamber will become non-200932414, and the cost will increase. and then, If the driving device such as a motor is housed in a vacuum processing chamber and used, There will be problems that cannot be dissipated as heat. therefore, There is a problem of having to adopt a high-priced vacuum specification. therefore, The devices in the prior art are very large and the manufacturing cost and maintenance management cost are very high. on the other hand, The proposal is: By arranging the driving device for driving the X-Υ platform outside the vacuum processing chamber, For the miniaturization of the vacuum processing chamber, the positioning mechanism in the vacuum processing chamber (for example, Refer to Patent Document 1). [Patent Document 1] JP-A-2005-5543 SUMMARY OF THE INVENTION [Problems to be Solved by the Invention] However, Because it is not only an X-Y platform that requires a large movable range, There is also a need to mount electronic components in a matrix. therefore, Actually, The system is required to have a wide base area. There is a problem that it is not possible to make the vacuum processing chamber small. especially, Since it is necessary to arrange the movable member that is engaged with the X-Y platform to move it in the X direction, the X-Y platform is disposed on the X-Y platform. therefore, There is a problem with the need for a wider base area. also, When using the X-Y platform, Since it is necessary to carry the carrier into the X-Y platform in the vacuum processing chamber, Then, the carrier is positioned at a reference position (zero point) of both the X direction and the γ direction. Then start to melt, therefore, There will be problems with longer preparation times. this invention, In order to carry out such problems, And for the mention of -5- 200932414 for one: The vacuum processing chamber can be further miniaturized compared to the prior art. And the melting efficiency is better in the vacuum internal melting treatment device. [Means for Solving the Problem] By the efforts of the inventors, the above object is It is achieved by the following means. (1) a vacuum internal melting treatment device, Its characteristic is that With Φ there are: Vacuum processing room, Maintaining the interior of itself as a vacuum atmosphere; And the carrier, Is disposed in the vacuum processing chamber ′ and placed on the workpiece to move in the X direction; And carrier drive, It is equipped with the above vacuum treatment outside, And moving the aforementioned carrier; And a soluble joint' is disposed in the aforementioned vacuum processing chamber. And moving in the γ direction at right angles to the aforementioned X direction; And melt joint drive, Is disposed outside the vacuum processing chamber, And moving the aforementioned dissolution joint; And Z-direction movable members, Is mounted on the previously dissolved joint, And moving in a Z direction perpendicular to the X direction and the Y direction; And the melting roller, It is mounted on the Z-direction movable member. And the aforementioned workpiece is melted; And the first roller drive shaft, Arranging in the vacuum processing chamber in parallel with the Y direction; And the first roller drive shaft drive device, Is disposed outside the vacuum processing chamber, And driving the aforementioned first roller drive shaft; And the first transforming device, Is mounted on the aforementioned soluble joint, The power of the first roller drive shaft is converted into the Z-direction moving power of the Z-direction movable member. (2) The vacuum internal melting treatment device according to (1) above, among them, The system is further equipped with: Y-direction movable member, It is mounted on the aforementioned -6 - 200932414 solvent joint. And relatively moving in the aforementioned Y direction; And the second roller drive shaft ′ is disposed in the vacuum processing chamber in parallel with the Υ direction, and the second roller drive shaft drive device is disposed outside the vacuum processing ‘and drives the second roller drive shaft: And the second transforming device, And being carried by the above-mentioned molten joint, and shifting the power of the second roller drive shaft to move the power in the Υ direction of the Υ direction movable member. The melt contact roller is mounted on the Υ direction movable member. (3) The vacuum internal dissolution processing apparatus as described in the above (2), in, The aforementioned melting roller, Two of the above-mentioned welding rolls are mounted. Front second transform device, The distance between the aforementioned welding rolls of 2 is changed by the power of the second roller drive shaft. (4) The vacuum internal melting treatment device according to (3) above, in, By changing the distance between the two aforementioned welding rolls, The portion of the dissolution roller that is in contact with the workpiece is changed. (5) The hollow inner melting treatment device according to any one of (2) to (4) above, among them, The system is further equipped with: Holding department, The melt-dissolving roller can be detachably held via the opening and closing member for opening and closing; And equipped with a disconnect device, Opening and closing the opening and closing member; The third transforming device, Is mounted on the aforementioned soluble joint, The power of the first roller drive shaft or the second roller drive shaft is converted into the power of the above-described detachment switching device. (6) The vacuum internal melting treatment device according to (5) above, in, The third transforming device, Transforming the force of the second roller drive shaft The second conversion device is provided via the second motion chamber, Said its, • A true 挟 and a moving roller 200932414 The rotational phase of the drive shaft is used to induce the aforementioned melting roller in the Y direction. And regardless of the aforementioned second roller drive shaft position, And the above-mentioned dissolved joint does not move in the Υ direction, The third transforming device, Provided is a holding region in which the opening portion of the welding roller is opened by the rotation phase of the first shaft, and the holding region of the welding roller is held by the rotation phase of the second roller driving shaft. The range of the γ ❹ region of the second conversion device, It is included in the range of the third conversion device holding area. The aforementioned opening of the third conversion device, It is included in the range of the aforementioned 区域 region of the second converter. (7) The processing device as described in (5) or (6) above, among them, The second converter and the apparatus are the cams (8) that rotate together with the second light drive shaft of the BU, as in the vacuum internal welding process described in the above (5). The third transforming device, Transforming the first roller drive, The first transforming device, The directional roller is provided with a direction of rotation of the front drive shaft in the ζ direction, And regardless of the aforementioned first roller drive shaft position, And the above-mentioned dissolved joint does not move in the Ζ direction, The third transforming device, Providing a holding region that holds the welding roller in an open state via the first rotation phase and a rotation phase of the first roller driving shaft, and holds the holding state in a holding state. After the movement of the first conversion device, the rotation phase of the crucible is stationary. 2 roller drive, And a static vacuum internal solution 3rd transformation 〇 device maintained in the direction of the aforementioned protection region induced by the direction of the protection, The movement of the moving shaft, the first roller, the rotation of the moving phase, the stationary phase, the drive shaft, the release area, Dissolving roll dimension, the aforementioned side -8 - 200932414 to the extent of the induced area, It is included in the range of the holding area of the third conversion device, The range of the aforementioned opening range of the third conversion device, It is included in the range of the aforementioned stationary region of the first transducer. (9) The vacuum connection processing device as described in the above (5) or (8), among them, The first conversion device and the third device, It is a cam that rotates together with the first roller drive shaft. 空 ( 1 〇 ) The empty internal solvent processing apparatus as described in any one of the above (5) or (9), among them, In the aforementioned vacuum processing chamber, The aforementioned welding roller for exchanging, The preceding roller ' held by the holding portion and the aforementioned welding roller for exchange in the vacuum processing chamber are automatically exchanged. (11) The vacuum-melting treatment device according to the above (10), wherein the aforementioned welding roller for the exchange is It is placed on a switching station that moves in the X direction via the precursor drive unit. φ ( 12 ) is a vacuum internal melting treatment device as recited in any one of (1) to (11) above, among them, The system is further equipped with: a spring pushing device that pushes the front direction movable member toward the workpiece Front direction movable member, It is connected to the first converter via the spring force of the above-described spring pushing device. (13) The vacuum internal dissolution treatment package according to (12) above, wherein The aforementioned Z-direction movable member, The first converter is connected to the first converter with a degree of freedom that absorbs the reaction force from the workpiece via the device. The true phase of the Z-zone internal dissolution transformation is set to dissolve the above, The description of Z is described above. The push-pull side -9- 200932414 (1 4 ) The vacuum internal melting treatment device as described in any one of the above (1) or (1 3), among them, The system is composed of: The workpiece is mounted on the carrier in one of the X directions, And after being dissolved, It is carried out by the other side of the X direction. [Effect of the Invention] According to the vacuum internal melting treatment device of the present invention, Then you can get 真空 vacuum processing room miniaturization, And it can cut the cost of excellent results. [Embodiment] Hereinafter, Reference picture, An example of an embodiment of the present invention will be described in detail. In addition, In the following description, Is the Y shown in the figure, The direction of the z-axis is used as a reference. In the X-axis direction of the figure, The X direction of the present invention, Υ axis direction, Is the direction of the invention, direction, Is the direction of the invention, but, The present invention is not limited thereto. figure 1, The front view of the vacuum internal dissolution treatment 1 according to the embodiment of the present invention, Fig. 2 is a plan view of the vacuum internal dissolution processing apparatus 1. Fig. 3 is a left side view of the vacuum internal dissolution processing apparatus 1. In addition, 1 to 3, The interior of the vacuum processing chamber 100 is shown in cross section. As shown in the figures, Vacuum treatment device 1, A vacuum processing chamber 100 having a box shape that can maintain the inside of a vacuum atmosphere, a pair of seam-dissolving roller unit 200 dissolution joints 300, And the carrier 400 of the carrier 10. From the previous one to the next, Is a 限定 axis limited device diagram, In the figure, there are: And has a job -10- 200932414 seam-dissolving roller unit 200, It is a molten electrode with a rotating roller shape (this is called a light connection), And the seam is melted. Therefore, The vacuum internal dissolution processing apparatus 1 of the present embodiment, It is a device that dissolves an electronic component package or the like in a vacuum atmosphere. Dissolving joint 300, The pair of seam-welding roller units 200 are movable in the Z-axis direction and can be detachably held as holders. and then, Dissolving joint 300, The interval between the Y-axis directions of the pair of slit-melting roller units 200 can be changed. For the details of the construction of the melt joint 300, This will be described later. Dissolving joint 300, Attached to the side of the beam 110 formed inside the vacuum processing chamber 1,, It is configured to move linearly in the Y-axis direction. in particular, At the side of the beam 110, Two guide rails 500 arranged in parallel with each other along the Y-axis direction are disposed, In this two guides, the rail is 500, Two sliding members 510 are linearly moved along the guide rails, respectively. Dissolving joint 300, The system is fixed at this total of 4 φ sliding members. Further, it is possible to linearly move in the Y-axis direction along the guide rail 500 together with the sliding member 510. Further, between the two guide rails 500, A joint drive shaft 520 formed with a male screw at the outer peripheral surface is disposed in parallel with the guide rail 500. Dissolving joint drive shaft 520, Passing through a bearing 522 disposed at an opposite side wall of the vacuum processing chamber 100, 524, It is rotatably supported. and, One end of the melt joint drive shaft 520, It is exposed to the outside through the side wall of the vacuum processing chamber 100. Simultaneously, It is connected to the melt joint driving device 540 disposed outside the vacuum processing chamber 1A. At the bearing 524 of the penetration portion -11 - 200932414, the molten joint driving shaft 520 and the vacuum processing chamber 1 are sealed by a magnetic fluid sealing member or the like. therefore, When the welding head drive shaft 520 is rotated by the driving of the external joint driving device 540, It is also possible to maintain the inside of the vacuum processing chamber 10 略 as a slight vacuum. Dissolving joint drive device 5 4 0, In this embodiment, It is a stepper motor. At the dissolution joint 300, A nut 530 that is screwed to the joint drive shaft 52 φ is provided. In addition, This nut 530 is a so-called ball screw having a ball at the screw portion. And reduce the sliding impedance. Therefore, The splicing head 300' is accompanied by the rotation of the splicing drive shaft 520 driven by the splicing drive unit 540. And in the same direction as the nut 530, it moves linearly in the Y-axis direction. also, At the dissolution joint 300, The first roller drive shaft 600 and the second roller drive shaft 610 which are disposed in the vacuum processing chamber 100 along the Y-axis direction are connected in series. The first roller drive shaft 600 and the second roller drive shaft 610, Is a bolting shaft, They are arranged side by side in the X-axis direction in parallel with each other. and, The first roller drive shaft 600 and the second roller drive shaft 610, Passing through a bearing 602 and a bearing 612 disposed at a side wall of one of the vacuum processing chambers 100, There is also a bearing 604 and a bearing 614 disposed at the side wall of the other side. They are rotatably supported separately. One end of the first roller drive shaft 600 and the second roller drive shaft 610, It is exposed to the outside through the side walls of the vacuum processing chamber 1 and is exposed to the outside. Each of them is connected to a first roller drive shaft drive unit 620 disposed outside the vacuum processing chamber 100 and a second roll drive shaft drive unit 630. In the through part of the bearing 6 04 -12- 200932414 and the bearing 614, The same as 'the joint drive shaft 520' is provided with a magnetic fluid seal member or the like. In the present embodiment, the first roller drive shaft drive unit 62' and the second roll drive shaft drive unit 630' are referred to as stepping motors. The first roller drive shaft 600 and the second roller drive shaft 610' are respectively connected to the first conversion device 360 and the second conversion device 370 (details are described later) provided in the melt joint 300. The first transforming device @360 and the second transforming device 3 70, The rotation force is transmitted while the first roller drive shaft 600 and the second roller drive shaft 630 which are the pin grooves are conveyed, Slide along each axis. Carrier 400, Is at the bottom of the interior of the vacuum processing chamber 100, It is configured to move linearly in the X-axis direction. At the bottom of the vacuum processing chamber 100, Two guide rails 700 arranged in parallel with each other along the X-axis direction are disposed, At the guide rails 700 of the two, Two sliding members Q 710 which are linearly moved along the guide rail 700 are combined, respectively. And 'carrier 400, It is fixed at the total of four sliding members 710. Further, it is possible to linearly move in the X-axis direction along the guide rail 700 together with the sliding member 710. Between the two guide rails 700, In parallel with the guide rail 700, a carrier drive shaft 720 formed with a male screw at the outer peripheral surface is disposed. One end of the carrier drive shaft 720, It is exposed to the outside through the side wall of the vacuum processing chamber 100. Simultaneously, It is connected to a carrier driving device 74 disposed outside the vacuum processing chamber 100. and, Below the carrier 4〇〇, A nut-13-200932414 730 that is screwed to the carrier drive shaft 720 is provided. Therefore, Carrier 400, With the rotation of the in-body drive shaft 720 driven by the carrier drive unit 740, And in the same direction as the nut 730, it moves linearly in the X-axis direction. Carrier drive shaft 720, Through the bearing 722 disposed at the bottom surface of the vacuum processing chamber 100, And a bearing 724 disposed at the bottom of the side wall, It is rotatably supported. At the bearing 724 of the through portion, Same as the melt joint drive shaft 5 2 0, They are respectively provided with a magnetic fluid seal 0 member and the like. Carrier driving device 740, In this embodiment, It is a stepper motor. Above the carrier 400, A workpiece tray 410 in which a plurality of workpieces 1 are held in a matrix of an X-axis and a Y-axis is placed. Workpiece tray 410, It is transported from the previous process to the vacuum processing chamber 100 while maintaining a plurality of workpieces 10, And it is placed on the carrier 40 0 . also, At one end of the carrier 400 in the Y-axis direction, The exchange table 420 for holding the exchange seam welding roller unit 201 is provided. On top of the exchange 420, The system is equipped with a plurality of holding stations 430, Exchange seaming roll unit 210, They are placed on the holding stage 430 in a paired state. That is, This exchange seam welding roller unit 201, It is also movable in the X direction via the carrier drive shaft 720. In this vacuum melting treatment device 1, By moving the carrier 400 in the X-axis direction, The molten joint 300 is moved in the Y-axis direction, so that the pair of slit-melting roller units 200 can be placed on any of the workpieces 1 that are arranged in the matrix form on the workpiece tray 410. Further, the vacuum internal melting treatment device 1, By moving the carrier 400 upward on the X-axis side -14- 200932414, Moving the dissolution joint 300 in the Y-axis direction, And become able to be on any of the holding stations 430 on the exchange 420, Opening the seam-dissolving roller unit 200, Alternatively, the new exchange seaming roll unit 201 can be held. By this, Vacuum treatment device 1, While being able to automatically process (separate) all of the workpieces 10 on the workpiece tray 410, It is also possible to automatically exchange the seam-dissolving roller unit 200 having a high frequency of exchange due to friction or the like in the vacuum processing chamber 100. φ Next, The operation procedure of the seam-sealing by the vacuum internal dissolution processing apparatus 1 will be described. Figure 4 (a), It is a front view showing an enlarged display of the pattern in which the seam caused by the vacuum internal dissolution processing apparatus 1 is melted. (b) in the same figure is a left side view showing an enlarged display of the pattern of the seam fusion caused by the vacuum internal dissolution processing apparatus 1. As shown in the figures above, The seaming roller unit 200, The solvating roller 210, which is a fusion electrode, is rotatably held at the housing 220. Workpiece 10, In a state in which the top cover 14 is mounted on the package 12 or is mounted on the top cover 14 It is housed within a plurality of recesses 412 formed in the workpiece tray 410. First of all, Moving the dissolution joint 300 in the Y direction, And moving the carrier 400 in the X direction, On the other hand, the pair of slit-melting roller units 200 are disposed directly above the workpiece 10 at a specific position. then, As shown in Figure 4(a), Dissolving joint 3 00, Decreasing the pair of seam-melting roller units 200 (moving in the Z-axis direction), The welding roller 210 is brought into contact with the opposite end edges of the top cover 14 at a specific pressure. Next, While applying a pulsed voltage to the bonding roller 210, As shown in Figure (b) 200932414, The carrier 400 is moved in the X-axis direction. With the movement of the carrier 400, The welding roller 210 is relatively moved along the edge of the top cover 14 while rotating. By this, Along the opposite edges of the top cover 14 4, The top cover 14 and the package 12 are fused. The carrier 400 continues to move, The workpieces 10 lined up in the X direction are continuously melted. When the melting of the workpiece 10 in one of the X-axis directions is completed, ❹ Dissolving joint 300, When the pair of seam-melting roller units 200 are raised (moving in the Z-axis direction), Moving in the γ-axis direction, On the other hand, the pair of slit-melting roller units 200 are disposed directly above the workpiece 1 〇 adjacent to each other. then, Same as above, The welding of the workpiece 10 in one of the X-axis directions is continuously performed. By repeating this, The edges of the X-axis direction of all the workpieces 1 held by the workpiece tray 410 are melted. In addition, When the Y-axis end edge of the workpiece 10 is melted, Just move the workpiece tray 410 into X, The Y direction is 90 degrees different. © The constructed vacuum is dissolved in the processing device and is melted. Or temporarily remove the workpiece tray 410 and rotate it 90 degrees. Then, it is again carried into the vacuum in the dissolution processing apparatus 1 and melted. also, It is also preferable to use a structure in which the carrier 400 is rotated by 90 degrees in a vacuum processing chamber. Next, the configuration of the dissolution joint 300 will be described in detail. Figure 5, The front view of a portion of the dissolution joint 300 is shown in Fig. 6' as a plan view of a portion of the dissolution joint 300. Fig. 7' is a left side view showing a portion of the dissolution joint 300. -16- 200932414 As shown in the figures, the 'dissolver 300' is equipped with: a sliding member 510 and a frame 302 of the nut 530 are fixed at the back surface; And at the lower side of the front side of the frame 302, Two Y-direction movable members 320 arranged to be relatively movable in the Y-axis direction; And a Z-direction movable member 310 that is relatively movable in the Z-axis direction with respect to each of the front faces of the two Y-direction movable members 306. In the Z direction, the upper part of the movable member 310, A connecting member 330 that is used to move the Z-direction movable member @ 310 is connected. also, In the lower portion of the movable member 310 in the Z direction, A holding portion 340 for holding the seam-dissolving roller unit 200 in a detachable manner is disposed. Dissolving joint 3 00, Further between the two Y-direction movable members 320, The detachment switching member 350 is provided to switch the holding/opening of the seam-melting roller unit 200 by the holding portion 340. also, Attached to the top of the frame 302, a first conversion device 360 for moving two Z-direction movable members 310 in the Z-axis direction; And two second transducers 3 70 for moving the two Y-direction movable members 320 in the Z-axis direction; And a third converting means 380 for moving the detachment switching member 350 in the Z-axis direction. In addition, Although some of the content has been described, but, The first transforming device 360, Is engaged with the first roller drive shaft 600 that is a pin groove, The second transforming device 370, The second roller drive shaft 610 that is engaged as a pin groove is engaged. The third transforming device 3 80, It is engaged with the second roller drive shaft 610. The frame 3 02' is a general shape in which a member of the box -17-200932414 is connected at the upper portion of the plate-like member. In the interior of the upper part of the box, The first conversion device 360 is housed, The second converter 370 and the third converter 380 are provided. Y-direction movable member 320, Two guide rails 304 arranged along the Y-axis direction through the front surface of the lower portion of the frame 302, And two sliding members 306 that move linearly along the guide rail 304, It is disposed at the frame 302. Two Y-direction movable members 320, It is arranged side by side in the direction of the Y axis of the moving direction. And by moving toward each other in opposite directions, And the distance between the two is expanded or reduced. At the upper end of the movable member 3 20 in the Y direction, A cam follower member 3 26 that is connected to the lower portion of the second shifting device 3 70 is protruded. At the front end of the cam follower member 326, A roller (not shown) is provided. Z-direction movable member 310, a guide rail 322 that is disposed along the Z-axis direction via a front surface of the movable member 320 in the Y direction, And two sliding members 324 that move linearly along the guide rail 322, The Q is disposed on the Y-direction movable member 320. In the upper front side of the movable member 310 in the Z direction, It is provided with a receiving plate 3 12° connecting member 330 connected to the connecting member 330, The Z-direction movable member 310 is connected to the first conversion device 360 and is a C-shaped member when viewed from the side. And it is disposed on the frame 302 so as to be movable in the Z-axis direction. At the end of the upper side of the connecting member 330, The upper roller 332 that is in contact with the upper surface of the first transducer 360 is provided. also, At the end of the lower side of the connecting member 330, It is provided with a lower -18-200932414 roller 334 that abuts against the underside of the receiving plate 3 1 2 . 2 connection members 330, The guide rail 336 is disposed along the Z-axis direction via the inner side surface of the front side of the box portion of the frame 322, And two sliding members 3 3 8 that move linearly along the guide rail 336 They are separately assigned. In this embodiment, The Z-direction movable member is pushed downward by a spring pushing device (not shown). By this, Lower roller 334, It is in a state of being constantly pressed downward from the receiving plate 312. and, Upper roller φ 332, The pressing force from the receiving plate 312 is pressed against the upper surface of the first converting device 360. So, The Z-direction movable member 310 is pushed downward by the pushing device, The contact between the receiving plate 312 and the lower roller 334 and the contact between the first converting device 360 and the upper roller 332 can be stabilized. and then, The pressing force for the welding roll 210 of the workpiece 10 can be stabilized to a specific level. In addition, the details are described later. but, This first conversion device 360 is a cam. And rotates together with the first roller drive shaft 600. The connecting member 330 is moved up and down via φ the rotation of the cam, Further, the Z-direction movable member 310 is raised and lowered by the upper and lower movement of the connecting member. Holding portion 340, It is constituted by the fixing member 342 and the opening and closing member 344, and is configured to hold the casing 220 of the seam-dissolving roller unit 200 by both of them. Opening and closing member 344, It is rotatably disposed on the back surface of the fixing member 342 via the rotation pin 346. also, Opening and closing member 344, It is urged in a direction in which the slit-melting roller unit 200 is held by a spring pushing device (not shown). That is, The holding portion 34〇, The system is constructed by -19-200932414 which is a structure in which the seam-dissolving roller unit 200 is held by the elastic force of the elastic pushing device. Opening and closing member 3 44, The utility model is provided with a rod 348 which is arranged to protrude upwards. At the front end of this rod 348, A roller 349 is provided. Loading the disengagement member 350, It is configured to be pressed by the roller 349 of the lever 348 in a specific direction. To resist the elastic thrust of the bombing device, And rotating in a direction to open the opening and closing member 344, On the other hand, the seam-dissolving roller unit φ 200 is released from the holding portion 340. In addition, Regarding the details of the detachment member 350, And the details of the release of the seam-dissolving roller unit 200 from the holding portion 3 40, It is described later. At the outer circumferential surface of the casing 220 of the seam-bonding roller unit 200, A positioning groove 222 is formed along the circumferential direction. and, At a position corresponding to the positioning groove 222 of the fixing member 3 42 of the holding portion 340 and the opening and closing member 344, A positioning protrusion (not shown) is protruded. By accommodating the positioning protrusions in the positioning groove 222 of the housing 220, The positioning of the seam-dissolving roller 〇 unit 200 in the Y-axis direction is performed. First transforming device 3 60, a cam having a shape that continuously changes from the center of rotation to the distance from the outer peripheral surface (refer to FIG. 7), And two of them are rotatably arranged at the upper portion of the frame 301. The two first conversion devices 360' are arranged in series with the rotation axis in parallel with the γ-axis direction. At the same time, at the center of rotation of the two first transforming devices 3 60, The first roller drive shaft 60 0 serving as a pin groove shaft is penetrated. The first transforming device 360' holds a ball that engages with the pin groove of the first roller drive shaft 600. That is, The first transforming device 360, It is rotatable together with the first roller drive shaft 60 0 by the -20- 200932414 ball bolt mechanism. Further, it is possible to move in the Y-axis direction along the first roller drive shaft 600. By the rotation of the first transforming device 3 60, The connecting member 330 and the Z-direction movable member 310 are moved up and down. In this embodiment, At the cam of the first transforming device 360, A state in which the seam-dissolving roller unit 200 is lowered to a state in which it can be melted is referred to as a "solubilization execution region". The state in which the slit-melting roller unit 200 is raised to a state in which it can be melted is referred to as "dissolved non-execution region J". The second transforming device 3 70, A cylindrical cam (see Fig. 6) in which the groove of the cam follower member 326 of the Y-direction movable member 320 is accommodated in the outer peripheral surface is formed. Two second transforming devices 3 70, From the front, the first converter 360 is arranged in series in parallel with the Y-axis direction. At the center of rotation of the second transforming device 3 70, The second roller drive shaft 610 is penetrated through each other. 2 second transforming devices 3 70, Similar to the first transforming device 360, It is possible to rotate together with the second roller drive shaft 610 by the ball and groove mechanism. Further, it is possible to move in the Y-axis direction along the second roller drive shaft 610 in the same manner as the melt joint 300. Inducing the ditch 3 72, It is formed by a Y-direction induced region 3 72A which is formed into a spiral shape. And a Y-direction stationary region 372B formed in a non-helical shape in the circumferential direction. This induced groove 372, It is a way of being bilaterally symmetrical by looking at it from the front. Each of them is formed in two second transforming means 370. Therefore, The roller of the cam follower member 325, If it moves within the Y-direction induction region 372A of the induction groove 372, Then, the Y-direction movable member 3 20 slides in the Y direction. on the other hand, Cam follower member -21 - 200932414 325 roller, If it is moved in the Y-direction stationary region 372B of the induction groove 372, the rotation of the second transducer 370 is not involved. The sliding of the Υ direction movable member 320 is stopped. The third transforming device 3 80, The convex portion 382 having a continuous change from the center of rotation and the cam having the outer peripheral surface formed by the constant smooth portion 384 from the center of rotation are provided. The details will be described later, however, With the rotation of the convex portion 3 82 and the smooth portion 384, the detachment switching member 350 is moved up and down. The holding portion 340 of the seam-welding roller unit 200 is opened and closed. In addition, In the present embodiment, the convex portion 382, The smoothing portion 3 84 functions as an open region in which the holding portion 340 is opened. It functions as a holding area for closing the holding portion 340. The third transforming device 3 70, Set the rotation axis to be parallel to the Υ axis direction. The two second conversion devices 3 70 are arranged in series between each other. Simultaneously, At the center of rotation, The second roller drive shaft 610 is passed through. The third transforming device 380, It is rotatable together with the second roller drive shaft 610 by the ball slot mechanism. It moves in the x-axis direction along the second roller drive shaft 610. In addition, The convex portion 3 82 (open area) is disposed at a position corresponding to the direction stationary region 3 72Β, The smoothing portion 3 84 (holding region) is provided at a position corresponding to the meandering direction inducing region 372 of the second converting means 3 70. Next, The movement of the movable member 32 in the Υ direction will be described. Figure 8 (a) and (b), It is a front view showing a pattern of movement of the movable member 320 in the direction of the cymbal. In addition, In these figures, Take a part as a section, At the same time, a part of the components will be displayed. -22- 200932414 Figure 8 (a), The two Y-direction movable members 320 are shown in a state in which they are located closest to each other. Then, from this state, the second roller drive shaft 610 is rotationally driven by the second roller drive shaft driving device 630. The second converter 3 70 is rotated in a clockwise direction from the left side view. Then, through the induction groove 3 72, the induced region 3 72Α, The cam follower member 326 is induced, The two yaw-direction movable members 3 20 are moved in the yaw axis @ direction toward the direction away from each other. In addition, When the second converter 370 is rotated counterclockwise from the state of Fig. 8(a) and viewed from the left side, Since the cam follower member 3 26 enters the Y-direction stationary region 3 72B, therefore, The two Y-direction movable members 3 20 are not moved in the Y-axis direction and are maintained at the positions closest to each other. When the cam follower member 326 is in the Y-direction induction region 372A of the induction groove 372, As shown in Figure 8(b), The second transducer 370 is rotated in a clockwise direction by 〇 from the left side view, The two direction movable members 320 are moved toward each other in a direction away from each other. The second transducer 3 70 is rotated in a counterclockwise direction by looking from the left side. The two directional movable members 320 are moved in directions toward each other. Two second transforming devices 3 70, Because the system is symmetrical to each other, And rotate the same angle in the same direction, therefore, 2 Y-direction movable members 320, The system moves to the same distance in the opposite direction. By this, The interval between the pair of bonding rolls 210 can be Cooperates with the dimensions of the electronic components that make up the workpiece 10. -23- 200932414 Again, By changing the interval of the pair of the bonding rolls 210, It becomes a portion that can contact the workpiece 10 on the side of the bonding roll 210, That is, the fusion part is changed. The molten portion of the side of the bonding roll 210, Although it is consumed due to the load and heat generated during the fusion, but, E.g, By changing the interval of the pair of the bonding rolls 210 in a specific cycle, And change the location of the fusion part, The life of the bonding roll 210 can be extended. That is, By not continuously using the same portion of the side surface of the bonding roll 2 1 0 in the fusion, It can reduce the wear amount of the side surface of the welding roller 2 1 0, Simultaneously, It is possible to prevent the side surface of the bonding roll 210 from being locally worn. also, When an abnormality occurs on the side of the bonding roll 210, Even if the welding roller unit 200 is not exchanged, It is also possible to change the gap between the pair of the bonding rolls 210 and change the welded portion. And continue to melt the work. The movable member 3 20 moves in the Y-axis direction along with the Y direction. a Z-direction movable member 310 disposed thereon, The holding portion 340 and the slit-dissolving roller unit 200, It also moves in the Y-axis direction. The Z-direction movable frame member 310 of the Q piece 310, Since the system is provided with a width in the Y-axis direction corresponding to the moving distance of the Y-direction movable member 320, therefore, Even if the position of the Z direction of the movable member 310 in the Y-axis direction is changed together with the Y-direction movable member 320, It is also possible to maintain contact between the lower roller 334 of the connecting portion 330 and the receiving plate 312. also, With the movement of the receiving plate 312, due to the rotation of the lower roller 3 3 4, Therefore, There is no such thing as a hindrance to the movement of the Y-direction movable member 320 and the Z-direction movable member 310 in the Y-axis direction. So, In this embodiment, The second transducer 370 is rotated and the Y-direction movable member 3 20 is moved by the second roller drive shaft drive -24 - 200932414 moving device 630. Further, it is possible to arbitrarily set the distance between the pair of the bonding rolls 2 i 0 . By this, In this embodiment, It is possible to perform seam-bonding of workpieces 10 corresponding to various sizes. Next, The movement of the Z-direction movable member 310 will be described. Figure 9 (a) and (b), The left side view of the pattern showing the movement of the Z-direction movable member 310 is shown. In addition, In these figures, A section of φ is shown as a section. Figure 9 (a), It is shown that the Z-direction movable member 310 is in the most up state. That is, Connecting member 3 3 0 above roller 3 3 2, It is in contact with the outer peripheral surface (solubilization non-implementation region) which is the farthest from the rotation center of the first transducer 300. then, From this state, the first roller drive shaft 600 is rotationally driven by the first roller drive shaft driving device 620. In the same figure, the first converting means 3 60 is rotated in a clockwise manner. Then, the upper roller 3 32 is rotated by the rotation of the first converting device 3 60. Simultaneously, The distance from the center of rotation of the contact surface of the first transducer 360 decreases (moves toward the region where the fusion is performed). That is, The contact member 330 is lowered, Accompanying this, Z-direction movable member 310, The holding portion 340 and the slit-melting roller unit 22 0 are also lowered. And in contact with the workpiece 1 It becomes a state in which it can be melted. As shown in Figure 9(b), By rotating the first transducer 3 60 in a clockwise direction in the same figure, The Z-direction movable member 310 is lowered, By rotating the first transducer 3 60 in the counterclockwise direction in the same figure, The Z-direction movable member 310 is raised. Two first transforming devices -25- 200932414 360, Because the system is the same shape, And rotate the same angle in the same direction, Therefore, the two Z-direction movable members 310' are moved by the same distance in the same direction. So, In the present embodiment, the first transducer 360 is rotated by the first roller drive shaft driving device 620, and the Z-direction movable member 310 is moved. Further, it is possible to raise or lower the seam-dissolving roller unit 200. By this, When the seam-dissolving roller unit 200 can be lowered and the workpiece 10 φ is treated (seam-bonded), while the dissolution joint 3 or the carrier 400 is moved, The seam-dissolving roller unit 200 can be raised and retracted. In addition, The Z-direction movable member 310' is in a state of being hung above the roller 334 below the connecting member 330 via the receiving plate 310. Therefore, This Z-direction movable member is capable of escaping to the upper side during the seam fusion. Therefore, In the present embodiment, the "slot-melting roller unit 200" is not required to apply a pressing force or more to the workpiece 1 in the seam welding. Oh, again, The pair of seam-dissolving roller units 200' can escape from each other upwards due to the system. therefore, Even in the case of, for example, when the workpiece 1 is tilted, It is also possible to make the pressing force by the pair of the bonding rolls 210 slightly uniform. Next, For the details of the detachment member 350, And the details of the liberation of the seam-dissolving roller unit 200 from the holding portion 340 will be described. Figure 10 (a) and (b), The left side view of the pattern in which the slit-melting roller unit 200 is released from the holding portion 340 is shown. In addition, In these figures, Take a part as a section, At the same time, the components in front of the switching member 350 are mounted in the same figure as omitted. As shown in the figures above, The disengagement 彳 3 50 ′ is attached to the guide rail 308 along the front lower portion of the frame 302, And two sliding members 309 along the guide rails 308, It is movably placed on top. Loading the upper end of the disengagement member 3 50, On the front side, it is offset, Simultaneously, Connected to the shake Q. Loading the lower end of the switching member 3 50, It is viewed from the front as the left and right. Further, it is configured such that the rollers 349 at the tips of the two 340 rods 3 48 can be pressed from above at the same time 5). also, The pressing slopes 350 to be contacted with the rollers 394 are respectively formed under the two detachment switching members 350. As shown in Figures 10(a) and (b), The rocking lever is connected to the end of the back side (the left side of the figure) at the end E 354, And disposed at the lower side of the third converter 380, It is also possible to swing around the rocking shaft 3 54. And the end of the front side of the 3 52 (the right side of the figure), Connected to the disengagement switching member 350 via the inserted pin 356, Shake the lever 352, At a position below the third transforming device 380, The detachment switching member 350 that is in contact with the third converter 380 is provided. Since it is pushed upward by a bullet not shown, therefore, Roller 358, It becomes the lower side of the constant third transforming device 3 80. Figure 10 (a), Is shown in the second transforming device 370; Change member Z-axis direction Linear movement z-axis direction (The right movement of the figure is 3 5 2 and is divided into holding members (refer to the figure at the end of the '3 3 52, The β-shake axis frame 302, The rocking rod passes through the upper end of the long hole. The face is relatively light 3 5 8 . Push the device and push it in the direction -27- 200932414 Induction area 3 72A, The state in which the two Y-direction movable members are closest to each other (that is, The position is at a state at the boundary between the Υ direction inducing region 372 Α and the Υ direction stationary region 372 ,, In this state, Roller 358, The state is in contact with the vicinity of the boundary between the smooth portion 3 84 (holding region) of the third converter 380 and the convex portion 382 (open region). then, From this state, the second roller drive shaft 610 is further rotationally driven by the second roller drive shaft drive unit 630. And in the same figure, the third variable φ changing device 3 80 is rotated counterclockwise, Then, the roller 3 58 is abutted on the side of the convex portion 3 82 (open area). It is pressed in response to the amount of protrusion of the convex portion 382. By this, The rocking lever 3 52 is shaken, The detachment switching member 350 is moved downward. So, If the third converter is rotated further, Then, the second transforming device 3 70 also rotates at the same time. but, Since the cam follower member 326 of the Υ direction movable member 320 enters the Υ direction stationary region 372 ,, therefore, The Υ direction movable member 320 does not move in the 方向 axis direction 。. on the other hand, When the movable member 320 is moved in the squat direction, When the third converter 380 and the second converter 370 are rotated in the clockwise direction in the same figure as in the state of FIG. 10(b), Shake the roller 358 of the lever 352, The state is in contact with the smoothing portion 384 (holding region). However, the detachment switching member 3 50 is not moved downward. That is, In this embodiment, In a state in which the disengagement switching member 350 is mounted to be movable, The Υ direction movable member 320 does not move, And in the state in which the movable member 3 20 is movable in the Υ direction, The detachment switching member 3 505 is not moved. -28- 200932414 As shown in Figure 10(b), If it is moved away from the switching member 3 5 0, it moves downward. Then the front side pushes the slope 3 50A, The roller 3 4 9 at the front end of the rod 3 4 8 of the holding portion is pushed toward the front side (the right side of the figure). The opening and closing member 344 is moved in a direction to be opened from the fixing member 342. By this, The seaming roller unit 200, It is released from the holding unit 3 40 and is released. and then, In a state where the opening and closing member 344 is opened, By providing the exchange 0 with the seam-dissolving roller unit 201 between the fixing member 342 and the opening and closing member 344, The third conversion device 380 is rotated in the clockwise direction in Fig. 10 by the second roller drive shaft driving device 630. And moving the detachment-removing member 3 50 upward, The exchange seaming roll unit 201 can be held at the holding portion. So, In this embodiment, The third converter 380 is rotated by the second roller drive shaft driving device 630, and the detachment switching member 350 is moved. Further, it is possible to automatically perform the Q exchange of the slit-melting roller unit 200. especially, Between the seam-dissolving roller units 201 of one of the pairs at the time of exchange, Since it is separated by the Y-direction stationary region 3 72B of the second converting means 3 70, And constant becomes a certain, therefore, It can realize the exchange work of stability. If the procedure for automatic exchange of the seam-dissolving roller unit 200 is described in detail, It is as follows as follows. First of all, The solution joint 3 00 and the carrier 4 〇〇 are separately moved, The slit-melting roller unit 2 挟 held by the holding portion 340 is opposed to the empty holding table 430 placed on the upper surface of the exchange table 420. then, Lowering the Z-direction movable member 310, And the seam-dissolving roller -29-200932414 unit 200 approaches the holding table 430, Simultaneously, Lowering the loading and unloading member 350, The seam-dissolving roller unit 200 is released from the holding portion 340. The load is placed on the holding table 430 again. then, Lifting the Z-direction movable member 310, Simultaneously, Dissolving the joint 3 00 and the carrier 400, The holding portion 340 is opposed to the exchange slitting roller unit 201 placed on the holding table 430 of the exchange table 420. then, Lowering the Z-direction movable member 310, The exchange seaming roller unit 201 is positioned between the fixing member 342 of the holding portion 340 and the opening and closing member 344. Simultaneously, Lifting the loading and unloading member 350, The exchange slitting roller unit 201 is held at the holding portion 340. As explained above, In the vacuum internal dissolution processing apparatus 1 of the present embodiment, A carrier 400 that moves in the X-axis direction and a dissolution joint 300 that moves in the Y-axis direction are disposed in the vacuum processing chamber 100. Simultaneously, Outside the vacuum processing room, A dissolver drive 540 and a carrier drive 740 are provided. and then, At the dissolution joint 300, The Z-direction movable member 310 that moves in the Z-axis direction together with the slit-melting roller unit 200 is disposed, And a first transforming device 360 that moves the Z-direction moving member 310, And in the vacuum processing room, The first roller drive shaft 600 connected to the first converter 360 is disposed parallel to the Y-axis direction. Simultaneously, Outside the vacuum processing, A first roller drive shaft drive unit 620 that drives the first roller drive shaft 600 is disposed. therefore, The vacuum processing chamber 100 can be further miniaturized compared to the prior art. And can reduce manufacturing costs and maintenance management costs. also, By reducing the volume in the vacuum processing chamber 100, It is possible to carry out vacuum in a short time -30- 200932414 Decompression in the processing chamber 100. also, By causing the dissolution joint 300 to move linearly in the Y direction, Moving the carrier 400 in a straight line in the X direction, Compared to the prior art Χ-Υ platform, The structure is simple, And the position control system is easy, therefore, Compared to prior art, The positioning of the seam-bonding roller unit 200 of the workpiece 10 can be performed at a higher speed and with higher precision. also, Since the number of axes connecting the driving device outside the vacuum processing chamber 100 and the animal in the vacuum processing chamber 100 can be minimized, therefore, II While being able to improve the tightness of the vacuum processing chamber 100, It also reduces manufacturing costs and maintains management costs. also, Since the carrier 400 is linearly moved only in the X direction, Therefore, E.g, The workpiece tray 410 on which the workpiece 10 is placed may be received from one side of the vacuum processing chamber 100, After the completion of the welding, the workpiece tray 410 is carried out from the other side of the vacuum processing chamber 1 toward the next process. By adopting such a composition, The arrangement of the entire production line including the vacuum internal dissolution processing apparatus 1 can be made linear. 〇 And can be an efficient allocation. also, Dissolving the joint 300 of the treatment device 1 in a vacuum, The movable member 320 having the same direction as the slit-melting roller unit 200 is provided, And the second converter 370 that moves the Υ direction movable member 320, And in the vacuum processing chamber 100, The second roller drive shaft 610 connected to the second converter 370 is disposed parallel to the x-axis direction. And vacuum treatment outside, A second roller drive shaft drive unit 63 0 that drives the second roller drive shaft 610 is disposed. therefore, Even if it is not equipped with an actuator or a motor in the vacuum processing chamber, It is also possible to perform the diversified operation of the slit-melting roller unit 200. -31 - 200932414 While being able to process multiple types of artifacts, It is also possible to apply more complicated processing to the workpiece. also, In this case, Since it is not necessary to use a high-priced vacuum actuator or motor, Moreover, it is not necessary to enlarge the vacuum processing chamber 100, therefore, It can reduce manufacturing costs and maintain management costs. also, Since the Z-direction movable member 310 is disposed at each of the two movable members 320 in the direction, The second transducer 370 moves the two φ Y-direction movable members 320 in the Y-axis direction. To change the distance between the two, therefore, It is capable of handling workpieces of various sizes. also, It is possible to change the portion (melted portion) that is in contact with the workpiece 10 on the side of the bonding roll 210, It is possible to extend the life of the bonding roll 210. and then, By this, Since the frequency of exchange of the bonding rolls 210 can be reduced, therefore, It can increase the utilization rate of the device. also, Dissolving joint 3 00, Is equipped with a disengagement switch member 350, And the third converter 380 that moves the off-switching member 350, At the same time, At the z-direction movable member 310, A holding portion 340 that can be detachably held by the slit-melting roller unit 200 in association with the movement of the detachment switching member 350 is disposed. therefore, Even if you do not use expensive vacuum actuators, etc. It is also possible to automatically exchange the slit-dissolving roller unit 200 in the vacuum processing chamber 100. . and then, Since the third converter 380 is connected to the second roller drive shaft 610, therefore, The number of axes connecting the driving device outside the vacuum processing chamber 100 to the animals in the vacuum processing chamber 100 is not increased, Thus, the seam-dissolving roller unit 200 can be automatically exchanged in the vacuum processing chamber 1A. -32- 200932414 Again, Since the Y-direction induction region 3 72 of the induction groove 372 of the second transducer 370, It is formed at a position corresponding to the holding area (smooth portion 3 84 ) of the seam-bonding roller unit 200 at the third converting device 3 80, On the other hand, the open region (the projection 3 82) of the slit-melting roller unit 200 of the third converting device 3 70, It is formed at a position corresponding to the Υ direction stationary region 3 72 诱导 of the induction groove 3 72 of the second transducer 370, therefore, Can be set to: Even if the second converter 370 and the third converter 380 are rotated by the second roller drive shaft 610 that is common to each other, In a state in which an opening operation due to the movement of the disengagement switching member 350 is performed, The Υ direction movable member 320 does not move, And in the state in which the movable member 320 is movable in the Υ direction, Then, the opening operation caused by the movement of the switching member 350 is not carried out. By this, Can be composed of simple and low price, The axes connected to the second converter 370 and the third converter 380 are common to each other. also, Vacuum treatment device 1, Since the slit bonding roller unit 200 held at the holding portion 340 is automatically exchanged with the exchange slitting roller unit 201 disposed in the vacuum processing chamber 100, therefore, Generally speaking, it will become a very long exchange operation. It has also been able to be completed in a short time, And it can make the device's utilization rate increase dramatically. also, Since the system can maintain the vacuum atmosphere in the vacuum processing chamber 100, And the seam welding roller unit 200 is exchanged, therefore, The preparation for the exchange after the exchange is a short time, It is possible to continuously process more workpieces 10 than in the prior art. Further, the seam sewing roll unit 201 is exchanged, Since the system is placed on the carrier -33- 200932414 400 (or on the platform linked to the carrier), therefore, a combination of movement through the dissolution joint 300 and the carrier 400, The positioning when the seam-dissolving roller unit 200 is exchanged is performed. That is, It is possible to increase the number of axes that connect the driving device outside the vacuum processing chamber 100 to the animal in the vacuum processing chamber 100, This makes it possible to automatically exchange the seam-dissolving roller unit 200. also, The seaming roller unit 200, Since it is a slit-melting roller unit having a roller electrode (dissolving roller 210), therefore, It is possible to efficiently perform seam sealing of electronic component packages and the like in a vacuum atmosphere by means of a device having a lower cost than the prior art. While being able to improve the productivity of electronic components, It can also cut production costs. In addition, In this embodiment, Although the X-axis direction and the Y-axis direction are set in the horizontal plane, And set the Z axis direction in the vertical direction, But yes, The present invention is not limited to this. Can also X, Y, The Z axis direction is set in other directions. Oh, again, In this embodiment, Although the Y-direction movable member 3 20 is movably disposed in the Y-axis direction, but, The present invention is not limited thereto. The Y-direction movable member 306 may be configured to move in the X-axis direction or in other directions. also, The Y-direction movable member 320 may be configured to be rotatable. Further, the vacuum internal dissolution processing apparatus 1 of the present embodiment, Although the z-direction movable member 310 and the Y-direction movable member 320' are respectively provided, the present invention is not limited thereto. Each of the Z-direction movable member 310 and the γ-direction movable member 320 may be provided separately. Or divided into -34- 200932414 Do not have more than 3. also, In this embodiment, Although the Y-direction movable member 320 is disposed at the dissolution joint 300, And the Z-direction movable member 3 1 0 is disposed at the movable member 320 in the Y direction, but, The present invention is not limited to this. A Z-direction movable member 310 may also be disposed at the dissolution joint 300. A Y-direction movable member 320 is disposed at the Z-direction movable member 310. also, In this embodiment, Although the φ is converted into the first transforming device 360 by the rotating cam, The second conversion device 370 and the third conversion device 380, However, the present invention is not limited thereto. The first conversion device 3 60 can also be used. The second converter 370 and the third converter 380 are configured by other mechanisms such as a rack and pinion mechanism. and then, In this embodiment, Only the case where the second transducer 370 and the third transducer 380 share the second roller drive shaft 610 is shown. but, The first converting device 360 and the third converting device 380 may share the Q first roller drive shaft 600. In this case, The rotation phase of the holding region of the third converter 380 is set to correspond to the range of the rotational phase of the Z-direction inducing region at the first converter 34 〇, The rotation phase of the open region of the third transforming device 380 may be made to correspond to the rotational phase range of the Z-direction stationary region at the first converting device 360. also, In this embodiment, Although the exchange slotting light unit 2〇1 is disposed on the exchange table 420 provided in the carrier 400, but, The present invention is not limited thereto. The exchange seaming roller unit 2 can also be placed in other locations. also, The exchange 420 can also be constructed to be independent and movable from the carrier 4〇〇-35-200932414. In the present embodiment, The seaming roller unit 200, Although it is a seam-dissolving roller unit, but, The present invention is not limited to this. Seam welding roll unit 200, Can also be other methods, The melting unit resulting from the construction. Further, in the vacuum internals processing apparatus 1 of the present embodiment, a plurality of carriers 40 0 may be provided. and then, The workpiece tray 410 to be carried into the vacuum processing chamber 100 may be disposed in the vacuum processing chamber, And a standby processing chamber in which the workpiece tray 410 carried out from the vacuum processing chamber 100 is temporarily placed in a vacuum state. Figs. 11(a) to 11(d) are diagrams showing two carriers 400a provided in the vacuum processing apparatus 1 in a vacuum. 400b, Simultaneously, A diagram showing an example of a case where the standby processing chamber 120 is provided in the vacuum processing chamber 110. In this case, Dissolving the vacuum processing chamber of the processing device 1 in a vacuum within 1 ,, Two carriers 400a that are moved in parallel with each other in the X direction, 400b. Dissolving joint 3 00, Attached to two carriers 400a, The method of melting treatment can be performed at any of φ 400b, The ‘moving range is set in the γ direction. and, On one side of the X direction of the vacuum processing chamber 100, A standby processing room 120 is provided. This standby processing chamber 120, The inside of the vacuum processing chamber is configured to maintain the inside as a vacuum atmosphere. also, At the standby processing chamber 120, A sealed crucible (not shown) for carrying the workpiece tray 410 into the standby processing chamber 120 is provided. Simultaneously, Between the standby processing chamber 120 and the vacuum processing chamber 100, It is provided with an occlusion 省略 (omitted from illustration). That is, Standby processing room 120, The system is configured to be -36-200932414 in a state where the vacuum processing chamber 100 is maintained in a vacuum atmosphere. The loading of the workpiece tray 410 or the moving air lock acts. In the vacuum internal dissolution processing apparatus 1 of this example, First of all, As shown in (a) of the figure, The workpiece 10 of the workpiece tray 410a placed on one of the carriers 400a is melted. then, During the period of melting, The workpiece tray 410b to be subsequently melted is carried into the standby processing chamber 120, And decompressing the inside of the standby processing chamber 120, Let 0 be the same vacuum atmosphere as in the vacuum processing chamber 100. During the bonding at the workpiece tray 410a, The workpiece tray 410b to be subsequently melted is moved to the other carrier 400b. If the fusion at the workpiece tray 410a is completed, Then, As shown in Figure (b), The splicing joint 300 is moved from the carrier 400a toward the carrier 400b, The seam sealing of the workpiece 10 of the workpiece tray 410b placed on the carrier 400b is immediately started. on the other hand, The workpiece tray 410a which has been melted is moved from the carrier 400a to the standby processing chamber 〇120. In addition, Work tray 410a, The movement of 410b, It can also be carried out via a separate transport device. Can also be set to make the carrier 400a, The 400b enters the standby processing chamber 120 and is carried out. After the movement of the workpiece tray 410a is finished, As shown in Figure (c), Shading between the standby processing chamber 120 and the vacuum processing chamber 100, Then, The workpiece tray 410a is carried out from the inside of the standby processing chamber 120 to the outside. Next, As shown in Figure (d), The workpiece tray 410c that is melted next to the workpiece tray 410b is carried into the standby processing chamber 120. The inside of the standby processing chamber 120 is set to a vacuum atmosphere. and then, Standby -37- 200932414 between the processing chamber 120 and the vacuum processing chamber 100, The workpiece tray 410c is moved to the other carrier 400a. By this, On the other hand, at the same time as the end of the fusion at the workpiece tray 410b, the dissolution joint 300 is moved from the carrier 400b toward the carrier 400c and the bonding is started. after that, The same procedure as above is repeated. So, Two carriers 400a are provided in the vacuum processing apparatus 1 in a vacuum, 40 0b, And the vacuum processing chamber 100 is provided with a processing chamber 120 to be φ, The workpiece tray 410a after the completion of the fusion can be carried out, And loading of the next workpiece tray 410b to be melted, In the case where the vacuum processing chamber 100 is maintained in a vacuum state, Therefore, The cycle time of the fusion treatment can be further shortened. That is, Since the atmosphere opening and decompression in the vacuum processing chamber 100 are not required to be repeated every time the workpiece tray 410 is exchanged, Further, the atmosphere in the standby processing chamber 120 can be opened, and the pressure reduction and the melting can be performed in parallel. Therefore, It can greatly increase the productivity of the melt joint 300. 〇 Above, Although described with respect to an embodiment of the present invention, But yes, The vacuum internal melting treatment device of the present invention, The system is not limited to the above embodiment. Needless to say, Various changes may be made without departing from the spirit and scope of the invention. [Industrial Applicability] The present invention, Can be used in the manufacture of electronic machines or electronic components or other various items, Or use it in the field of logistics. -38- 200932414 BRIEF DESCRIPTION OF THE DRAWINGS [Fig. 1] A vacuum internal solution diagram of an embodiment of the present invention. Fig. 2 is a plan view of a vacuum internal dissolution processing apparatus. [Fig. 3] Left side view of the vacuum internal dissolution processing apparatus [Fig. 4] (a) is a front view showing an enlarged display of the pattern of the vacuum internal dissolution processing apparatus. (b) is an enlarged display of the pattern of seam-bonding caused by the device [Fig. 5]. A part of the solution joint is sectioned [Fig. 6]. The flat section of the profile [Fig. 7] is a section of the left side of the dissolution joint [Fig. 8] (a) and (b) is a front view showing the appearance of the Y square. [Fig. 9] (a) and (b) are left side views showing a pattern of the Z-direction. 〇 [Fig. 1〇] (a) and (b) are left side views showing the appearance of the liberation from the roller unit. [Fig. U] (a) to (d) show that two carriers are provided in the vacuum 1 . Simultaneously, A diagram showing an example of a case where there is a standby processing chamber at a vacuum. [Main component symbol description] 1: Vacuum melting treatment device 1 0 : The seam of the workpiece processing device is dissolved in the seam. The inside of the vacuum is dissolved in the vacuum. Surface map. Surface map. side view. Move the movable member to the moving portion of the movable member to melt the joint and dissolve the internal processing unit. -39- 200932414 100 : Vacuum processing chamber 200 : Seam bonding roller unit 201: Exchange seaming roll unit 3 0 0 : Dissolving joint 3 1 0 : Z-direction movable member 320: Y-direction movable member 340: Hold unit 0 350: Loading the disconnecting member 3 60 : First transforming device 3 70 : Second conversion device 372: Induction groove 3 72A : Y direction induction zone 3 72B : Y direction still area 3 8 0 : The third transforming device 3 8 2 : Convex ❿ 3 8 4 : Smoothing unit 400: Carrier 540 : Dissolving joint drive 600 : First roller drive shaft 610: 2nd roller drive shaft 620 : First roller drive shaft drive 63 0 : 2nd roller drive shaft drive 740: Carrier drive -40-